WO2013046602A1 - Pump for high temperature gas - Google Patents

Pump for high temperature gas Download PDF

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WO2013046602A1
WO2013046602A1 PCT/JP2012/005967 JP2012005967W WO2013046602A1 WO 2013046602 A1 WO2013046602 A1 WO 2013046602A1 JP 2012005967 W JP2012005967 W JP 2012005967W WO 2013046602 A1 WO2013046602 A1 WO 2013046602A1
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electrode
temperature gas
cylindrical member
pump according
gas pump
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PCT/JP2012/005967
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French (fr)
Japanese (ja)
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義晴 中島
木村　憲明
一輝 星島
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三井造船株式会社
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Publication of WO2013046602A1 publication Critical patent/WO2013046602A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma Technology (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

In the present invention, a pump for high temperature gas comprises the following: a pump vessel having an annular internal space; a discharge nozzle for discharging high temperature gas that is circulated from one part of the annular internal space; an actuator having a plurality of electrode pairs disposed in different locations on the circumference of wall surfaces of the annular internal space; and a power supply for applying voltage to the electrode pairs. Each of the electrode pairs of the actuator comprises a first electrode and a second electrode; the first electrode of each electrode pair protrudes from a wall and the second electrode is embedded within a dielectric body. The flow of the high temperature gas is formed by applying voltage to the space between the first electrode and the second electrode to generate plasma between the first electrode and the second electrode. All of the second electrodes are disposed on the same side in the circumferential direction in reference to the first electrodes.

Description

高温ガス用ポンプHot gas pump
　本発明は、高温ガスを吸引し吐出する高温ガス用ポンプに関する。 The present invention relates to a hot gas pump for sucking and discharging hot gas.
　従来より、高温ガス、例えば４００℃以上のガスをポンプにて吸引し一定の速度で吐出させる高温ガス用ポンプが、熱処理炉、焼成炉等において用いられる。この場合、高温ガスは高温ガス用ポンプで炉内を循環しつつ、高温ガス用ポンプで加速された高温ガスを用いて炉内の攪拌を行うので、炉内温度の均一化や処理効率が向上する。 Conventionally, a high-temperature gas pump that sucks a high-temperature gas, for example, a gas of 400 ° C. or higher and discharges it at a constant speed is used in a heat treatment furnace, a firing furnace, or the like. In this case, the high-temperature gas is circulated in the furnace with the high-temperature gas pump, and the high-temperature gas accelerated by the high-temperature gas pump is used for stirring in the furnace, so the temperature inside the furnace is made uniform and the processing efficiency is improved. To do.
　このような高温ガス用ポンプでは、一般にモータ等の回転駆動機構の回転軸と接続された回転軸にインペリが設けられた送風用ファンが用いられる。このとき、回転軸の軸受け等に用いる油等の潤滑剤が高温により揮発することで、送風される高温ガスに油の分解された成分が不純物として混入する場合がある。このため、回転軸や軸受けを冷却する機構が設けられるが、回転軸周りの構造が複雑となっている。 Such a high-temperature gas pump generally uses a blower fan in which an impeller is provided on a rotary shaft connected to a rotary shaft of a rotary drive mechanism such as a motor. At this time, a lubricant such as oil used for bearings of the rotating shaft volatilizes at a high temperature, so that the decomposed components of the oil may be mixed as impurities into the high-temperature gas blown. For this reason, a mechanism for cooling the rotating shaft and the bearing is provided, but the structure around the rotating shaft is complicated.
　一方、軸受けに磁気軸受けとして機能する磁石を備え、ケーシング内部で完全にシールされた送風用ファン及び回転軸を備えたマグネットポンプも用いられるが、構造が複雑である。また、磁気軸受けに用いる磁石の磁力も高温により低下するため、磁気軸受けを高温ガス用ポンプに長時間用いることは難しい。磁石の高温化を抑制するために冷却機構が設けられる場合もあるが、回転軸周りの構造が複雑になる。 On the other hand, a magnet pump that includes a magnet that functions as a magnetic bearing in the bearing and is completely sealed inside the casing and a magnet pump that includes a rotating shaft is also used, but the structure is complicated. Moreover, since the magnetic force of the magnet used for the magnetic bearing is also reduced by the high temperature, it is difficult to use the magnetic bearing for a high-temperature gas pump for a long time. Although a cooling mechanism may be provided in order to suppress the high temperature of the magnet, the structure around the rotation axis becomes complicated.
　下記特許文献１，２には高温ガス送風用ファンが開示されている。このガス送風用ファンは、固体酸化物形燃料電池（ＳＯＦＣ）において、高温ガス用ポンプとして用いられる。固体酸化物形燃料電池の動作温度は８００～１０００℃であるので、用いる水素ガスや天然ガスも８００～１０００℃である。このため当該高温ガス送風用ファンにおいても、上述した軸受けにおける油等の潤滑剤の揮発の問題を解消するために冷却機構を設け、また、磁気軸受けを用いている。 Patent Documents 1 and 2 below disclose high-temperature gas blowing fans. This gas blowing fan is used as a high-temperature gas pump in a solid oxide fuel cell (SOFC). Since the operating temperature of the solid oxide fuel cell is 800 to 1000 ° C., the hydrogen gas and natural gas used are also 800 to 1000 ° C. For this reason, also in the high-temperature gas blowing fan, a cooling mechanism is provided in order to solve the problem of volatilization of the lubricant such as oil in the bearing described above, and a magnetic bearing is used.
ＷＯ２００４／０７０２０９号公報WO 2004/070209 特開２００８－１８４９６０号公報JP 2008-184960 A
　本発明は、従来と異なる方式を用いて、従来に比べてより簡単な構造で効率よく高温ガスを吐出させることができる高温ガス用ポンプを提供することを目的とする。 The object of the present invention is to provide a high-temperature gas pump that can efficiently discharge a high-temperature gas with a simpler structure than the conventional one using a method different from the conventional one.
　本発明の一態様は、高温ガス用ポンプである。当該高温ガス用ポンプは、
　環状内部空間を備え、導入された高温ガスを前記環状内部空間の周方向に沿って流す循環経路を有するポンプ容器と、
　前記環状内部空間の一部分から循環する高温ガスを吐出させる吐出ノズルと、
　前記環状内部空間の誘電体からなる壁の周上の異なる位置に設けられる複数の電極対を有するアクチュエータであって、前記電極対のそれぞれは第１電極及び第２電極からなり、前記電極対のそれぞれの前記第１電極は前記壁から露出し、前記第２電極は前記誘電体内に埋め込まれ、前記第１電極と前記第２電極の間に電圧が印加されて前記第１電極と前記第２電極の間にプラズマを生成することにより、高温ガスの流れを形成するアクチュエータと、
　前記電極対に電圧を印加する電源と、を有する。
　前記電極対それぞれの前記第２電極はいずれも前記第１電極を基準にして前記循環経路の周方向の同じ側に設けられる。 One embodiment of the present invention is a hot gas pump. The hot gas pump is
A pump container having an annular inner space and having a circulation path for flowing the introduced high-temperature gas along the circumferential direction of the annular inner space;
A discharge nozzle for discharging hot gas circulating from a part of the annular internal space;
An actuator having a plurality of electrode pairs provided at different positions on the circumference of a wall made of a dielectric in the annular internal space, each of the electrode pairs comprising a first electrode and a second electrode, Each of the first electrodes is exposed from the wall, the second electrode is embedded in the dielectric, and a voltage is applied between the first electrode and the second electrode so that the first electrode and the second electrode are applied. An actuator that creates a flow of hot gas by generating plasma between the electrodes;
A power source for applying a voltage to the electrode pair.
The second electrodes of each of the electrode pairs are all provided on the same side in the circumferential direction of the circulation path with respect to the first electrode.
　その際、前記環状内部空間は、第１円筒部材の外側面と、前記外側面の中心軸に中心軸が一致し、かつ前記第１円筒部材の直径より大きい直径を有する第２円筒部材の内側面と、２つの平板の面で囲まれて形成され、前記電極対は前記内側面に設けられ、前記吐出ノズルの経路は前記循環経路から径方向外側に枝分かれし、前記吐出ノズルの壁面の一部は、前記循環経路の前記外側面から滑らかに延びている、ことが好ましい。 In this case, the annular inner space is formed on the outer surface of the first cylindrical member and the inner surface of the second cylindrical member whose central axis coincides with the central axis of the outer surface and has a diameter larger than the diameter of the first cylindrical member. The electrode pair is provided on the inner side surface, the discharge nozzle path is branched radially outward from the circulation path, and one of the wall surfaces of the discharge nozzle is formed. The part preferably extends smoothly from the outer surface of the circulation path.
　前記第１電極及び前記第２電極は、前記第１円筒部材の中心軸方向に延びてお互いに平行に配置された細長い電極である、ことが好ましい。 It is preferable that the first electrode and the second electrode are elongated electrodes that extend in the central axis direction of the first cylindrical member and are arranged in parallel to each other.
　また、前記環状内部空間は、第１円筒部材の外側面と、前記第１円筒部材の中心軸に中心軸が一致し、かつ前記第１円筒部材の直径より大きい直径を有する第２円筒部材の内側面と、２つの平板の面で囲まれて形成され、前記環状内部空間の壁面のうち、前記外側面に高温ガスを導入するスリット状のガス導入口が設けられている、ことが好ましい。 In addition, the annular inner space has a central axis that coincides with the outer surface of the first cylindrical member and the central axis of the first cylindrical member and has a diameter larger than the diameter of the first cylindrical member. It is preferable that a slit-like gas inlet for introducing high-temperature gas is provided in the outer surface of the wall surface of the annular inner space, which is surrounded by an inner surface and two flat surfaces.
　また、前記ガス導入口は、高温ガスを前記環状内部空間の壁面に対して前記環状内部空間の周方向に傾斜して導入し、導入される高温ガスの傾斜方向は、周方向のうち、前記第１電極を基準にして前記第２電極の側に向かう方向である、ことがより好ましい。 In addition, the gas introduction port introduces the high temperature gas with an inclination in the circumferential direction of the annular internal space with respect to the wall surface of the annular internal space, and the inclination direction of the introduced high temperature gas is the circumferential direction of the above More preferably, the direction is toward the second electrode with respect to the first electrode.
　前記ポンプ容器は、例えば石英あるいは合成石英で構成されている。
　前記第１電極と前記第２電極との間に交流電圧が印加される。あるいは、前記第１電極と前記第２電極との間にパルス電圧が断続的に印加される。
　さらに、前記高温ガス用ポンプは、前記複数の電極対のそれぞれに与えるパルス電圧の印加のタイミングを制御するコントローラを有することが好ましい。 The pump container is made of, for example, quartz or synthetic quartz.
An AC voltage is applied between the first electrode and the second electrode. Alternatively, a pulse voltage is intermittently applied between the first electrode and the second electrode.
Furthermore, it is preferable that the high temperature gas pump has a controller that controls application timing of a pulse voltage applied to each of the plurality of electrode pairs.
　上述の高温ガス用ポンプによれば、従来に比べてより簡単な構造で効率よく高温ガスを吐出させることができる。 According to the above hot gas pump, high temperature gas can be efficiently discharged with a simpler structure as compared with the conventional pump.
本実施形態の高温ガス用ポンプの一例の外観斜視図である。It is an external appearance perspective view of an example of the hot gas pump of this embodiment. 図１に示す高温ガス用ポンプの分解斜視図である。FIG. 2 is an exploded perspective view of the hot gas pump shown in FIG. 1. 本実施形態の高温ガス用ポンプに用いるアクチュエータを説明する図である。It is a figure explaining the actuator used for the hot gas pump of this embodiment. 図３に示すアクチュエータの矩形領域の拡大図である。FIG. 4 is an enlarged view of a rectangular area of the actuator shown in FIG. 3. 本実施形態の高温ガス用ポンプに用いるアクチュエータの原理を説明する模式図である。It is a schematic diagram explaining the principle of the actuator used for the hot gas pump of this embodiment.
　以下、本発明の高温ガス用ポンプについて詳細に説明する。
　図１は、実施形態の高温ガス用ポンプの一例の外観斜視図である。図２は、図１に示す高温ガス用ポンプの分解斜視図である。 Hereinafter, the hot gas pump of the present invention will be described in detail.
Drawing 1 is an appearance perspective view of an example of the hot gas pump of an embodiment. FIG. 2 is an exploded perspective view of the hot gas pump shown in FIG.
（高温ガス用ポンプ）
　図１に示す高温ガス用ポンプ（以下、単にポンプという）１０は、温度４００℃以上の高温ガスを導入して速度を与えて噴射（吐出）するポンプである。ポンプ１０は、図１に示すように、ポンプ容器１２と、吐出ノズル１４と、アクチュエータ１６（図２参照）と、電源１８と、コントローラ２０と、を有する。 (High temperature gas pump)
A high-temperature gas pump (hereinafter simply referred to as a pump) 10 shown in FIG. 1 is a pump that introduces a high-temperature gas having a temperature of 400 ° C. or higher and injects (discharges) it at a speed. As shown in FIG. 1, the pump 10 includes a pump container 12, a discharge nozzle 14, an actuator 16 (see FIG. 2), a power source 18, and a controller 20.
　ポンプ容器１２は、図２に示すように、内側円筒部材１２ａと外側円筒部材１２ｂと、平板部材１２ｃ，１２ｄとを用いて構成される。内側円筒部材１２ａの中心軸と外側円筒部材１２ｂの中心軸は一致しており、内側円筒部材１２ａの壁面と外側円筒部材１２ｂの壁面を側面とし、平板部材１２ｃの壁面を天井面とし、平板部材１２ｄの壁面を床面として形成された環状内部空間１２ｅを備える。すなわち、環状内部空間１２ｅは、内側円筒部材１２ａの外側面と、内側円筒部材１２ａの中心軸に中心軸が一致し、かつ内側円筒部材１２ａの外側面の直径より大きい直径を有する外側円筒部材１２ｂの内側面と、２つの平板部材１２ｃ、１２ｄの面で囲まれて形成される。 As shown in FIG. 2, the pump container 12 includes an inner cylindrical member 12a, an outer cylindrical member 12b, and flat plate members 12c and 12d. The central axis of the inner cylindrical member 12a coincides with the central axis of the outer cylindrical member 12b, the wall surface of the inner cylindrical member 12a and the wall surface of the outer cylindrical member 12b are side surfaces, the wall surface of the flat plate member 12c is a ceiling surface, An annular internal space 12e formed with a 12d wall surface as a floor surface is provided. That is, the annular inner space 12e has an outer cylindrical member 12b whose central axis coincides with the outer surface of the inner cylindrical member 12a and the central axis of the inner cylindrical member 12a and has a diameter larger than the diameter of the outer surface of the inner cylindrical member 12a. And is surrounded by the surfaces of the two flat plate members 12c and 12d.
　内側円筒部材１２ａの一部には、部材を切り欠いたガス導入孔１２ｇが設けられ、このガス導入孔１２ｇの環状内部空間１２ｅ側の出口が、高温ガスを環状内部空間１２ｅに導入するスリット状のガス導入口１２ｆ（図３参照）となっている。さらに、内側円筒部材１２ａの内側面には、ガス供給管２２（図１では点線で図示）が接合され、ガス供給管２２にはガス導入孔１２ｇに対応する位置にガス供給口（図示されない）が設けられている。したがって、図１に示す上方からガス供給管２２を伝って流れてきた高温ガスは、ガス供給管２２のガス供給口、ガス導入孔１２ｇ、ガス導入口１２ｆを通して、環状内部空間１２ｅに導入される。
　内側円筒部材１２ａと外側円筒部材１２ｂと、平板部材１２ｃ，１２ｄは、誘電体材料で構成され、例えば、石英あるいは合成石英が用いられる。 A part of the inner cylindrical member 12a is provided with a gas introduction hole 12g in which the member is notched, and the outlet of the gas introduction hole 12g on the annular inner space 12e side is a slit shape for introducing high temperature gas into the annular inner space 12e. The gas inlet 12f (see FIG. 3). Further, a gas supply pipe 22 (shown by a dotted line in FIG. 1) is joined to the inner side surface of the inner cylindrical member 12a, and a gas supply port (not shown) is provided in the gas supply pipe 22 at a position corresponding to the gas introduction hole 12g. Is provided. Therefore, the high temperature gas that has flowed through the gas supply pipe 22 from above shown in FIG. 1 is introduced into the annular internal space 12e through the gas supply port, the gas introduction hole 12g, and the gas introduction port 12f of the gas supply pipe 22. .
The inner cylindrical member 12a, the outer cylindrical member 12b, and the flat plate members 12c and 12d are made of a dielectric material, and for example, quartz or synthetic quartz is used.
　ポンプ容器１２の環状内部空間１２ｅは、導入された高温ガスを円周方向に沿って流す循環経路となっている。
　吐出ノズル１４は、環状内部空間の１２ｅ内で後述するアクチュエータ１６によって加速し循環する高温ガスの一部を吐出する。吐出ノズル１４は、高温ガスを熱処理炉、焼成炉等と接続した図示されないガス供給管と接続されて、高温ガスを熱処理炉、焼成炉等に供給する。
　吐出ノズル１４は、循環する高温ガスの一部を吐出するために、吐出ノズル１４の経路は、環状内部空間１２ｅ内の高温ガスの循環経路から径方向外側に枝分かれした通路であり、吐出ノズル１４の壁面の一部（径方向外側の壁面）は、外側円筒部材１２ｂの内側面である上記循環経路の外側面から滑らかに延びている。滑らかに延びているとは、比較する面の接続位置において接線方向が同じであることをいう。速度の高い高温ガスほど遠心力により径方向外側を円周方向に沿って流れる。このため、環状内部空間１２ｅ内の径方向外側に設けられた吐出ノズル１４は十分に加速された高温ガスを吐出することができる。本実施形態では、吐出ノズル１４の壁面の一部である径方向外側の壁面は、外側円筒部材１２ｂの内側面である上記循環経路の外側面から滑らかに延びているが、吐出ノズル１４の壁面（径方向外側の壁面）は、必ずしも滑らかに延びていなくてもよい。しかし、高温ガスの速度を低下させずに滑らかに高温ガスを吐出させるためには、吐出ノズル１４の壁面（径方向外側の壁面）は、外側円筒部材１２ｂの内側面から滑らかに延びていることが好ましい。 The annular inner space 12e of the pump container 12 serves as a circulation path for flowing the introduced high-temperature gas along the circumferential direction.
The discharge nozzle 14 discharges a part of high-temperature gas that is accelerated and circulated by an actuator 16 described later in the annular inner space 12e. The discharge nozzle 14 is connected to a gas supply pipe (not shown) connected to a high-temperature gas with a heat treatment furnace, a baking furnace, or the like, and supplies the high-temperature gas to the heat treatment furnace, the baking furnace, or the like.
In order for the discharge nozzle 14 to discharge a part of the circulating high-temperature gas, the path of the discharge nozzle 14 is a path branched radially outward from the high-temperature gas circulation path in the annular inner space 12e. A part of the wall surface (the radially outer wall surface) smoothly extends from the outer surface of the circulation path, which is the inner surface of the outer cylindrical member 12b. The term “smoothly extended” means that the tangential direction is the same at the connection position of the surface to be compared. The higher the velocity of the hot gas, the greater the velocity of the gas flows along the circumferential direction by centrifugal force. For this reason, the discharge nozzle 14 provided on the radially outer side in the annular inner space 12e can discharge a sufficiently accelerated high temperature gas. In the present embodiment, the radially outer wall surface that is a part of the wall surface of the discharge nozzle 14 extends smoothly from the outer surface of the circulation path that is the inner surface of the outer cylindrical member 12b. (The radially outer wall surface) does not necessarily extend smoothly. However, in order to smoothly discharge the high temperature gas without reducing the speed of the high temperature gas, the wall surface (the radially outer wall surface) of the discharge nozzle 14 extends smoothly from the inner surface of the outer cylindrical member 12b. Is preferred.
　また、内側円筒部材１２ａの外側面に設けられるガス導入口１２ｆは、図２に示すように、環状内部空間１２ｅの壁面に対して環状内部空間１２ｅの径方向（Ｒ方向）から円周方向（Ｃ方向）に傾斜して高温ガスを導入するように、ガス導入孔１２ｇが内側円筒部材１２ａに設けられている。すなわち、ガス導入口１２ｆは、高温ガスを環状内部空間１２ｅの壁面に対して環状内部空間１２ｅの周方向に傾斜して導入する。このとき、導入される高温ガスの流れは、上記円周方向のうち、後述するアクチュエータ１６の第１電極を基準にして第２電極の側に向かう方向となっている。本実施形態では、導入される高温ガスの傾斜方向が、アクチュエータ１６の第１電極を基準にして第２電極の側に向かう方向に定まっているが、上記高温ガスの傾斜方向は上記の方向に限定されない。しかし、アクチュエータ１６が高温ガスを加速させる方向に高温ガスが流れるように、高温ガスを導入する点で、上記導入される高温ガスの傾斜方向は環状内部空間１２ｅ内の第１電極を基準にして第２電極の側に向かう方向とするのが好ましい。 Further, as shown in FIG. 2, the gas inlet 12f provided on the outer side surface of the inner cylindrical member 12a has a circumferential direction (from the radial direction (R direction) of the annular inner space 12e to the wall surface of the annular inner space 12e ( A gas introduction hole 12g is provided in the inner cylindrical member 12a so as to introduce a high-temperature gas inclined in the (C direction). In other words, the gas introduction port 12f introduces the high-temperature gas with an inclination in the circumferential direction of the annular internal space 12e with respect to the wall surface of the annular internal space 12e. At this time, the flow of the introduced high-temperature gas is a direction toward the second electrode with respect to the first electrode of the actuator 16 described later in the circumferential direction. In this embodiment, the inclination direction of the hot gas to be introduced is determined in the direction toward the second electrode with respect to the first electrode of the actuator 16, but the inclination direction of the hot gas is in the above direction. It is not limited. However, the high temperature gas is introduced so that the high temperature gas flows in the direction in which the actuator 16 accelerates the high temperature gas. The inclination direction of the introduced high temperature gas is based on the first electrode in the annular inner space 12e. A direction toward the second electrode is preferable.
　アクチュエータ１６は、環状内部空間１２ｅの内壁面である内側円筒部材１２ａの外側面の周上の異なる位置に設けられる複数の電極対を有し、高温ガスの速度を加速する。図２の例では、アクチュエータ１６が内側円筒部材１２ａの外側面に略等間隔で６個設けられている。本実施形態では、アクチュエータ１６を６個用いるが、アクチュエータの数は６個に限定されず、少なくとも２個以上用いればよい。図３は、アクチュエータ１６を説明する図である。図４は、図３に示す矩形領域の拡大図である。 The actuator 16 has a plurality of electrode pairs provided at different positions on the outer surface of the inner cylindrical member 12a, which is the inner wall surface of the annular inner space 12e, and accelerates the speed of the high-temperature gas. In the example of FIG. 2, six actuators 16 are provided on the outer surface of the inner cylindrical member 12a at substantially equal intervals. In this embodiment, six actuators 16 are used, but the number of actuators is not limited to six, and at least two or more may be used. FIG. 3 is a diagram illustrating the actuator 16. FIG. 4 is an enlarged view of the rectangular area shown in FIG.
　アクチュエータ１６の電極対のそれぞれは、第１電極１６ａ及び第２電極１６ｂからなる。電極対それぞれにおける第１電極１６ａは誘電体である内側円筒部材１２ａの外側面から露出し、第２電極１６ｂは内側円筒部材１２ａ内に埋め込まれている。第１電極１６ａを壁面から露出し、第２電極１６ｂを内側円筒部材１２ａ内に埋め込むのは、後述するように第１電極１６ａと第２電極１６ｂとの間に発生するプラズマによって生じる吸引力を利用して、導入した高温ガスの速度を加速させるためである。第２電極１６ｂを内側円筒部材１２ａ内に埋め込むとき、埋め込み深さ、すなわち壁面から第２電極１６ｂの最上面までの距離を例えば０．０３～１．０ｍｍとすることが、プラズマによる吸引力を効率よく生成する点で、好ましい。
　また、第１電極１６ａ及び第２電極１６ｂは、内側円筒部材１２ａの中心軸方向に延びてお互いに平行に配置された細長い帯状の電極であることが、高温ガスの速度を効果的に加速させる点で好ましい。
　アクチュエータ１６のそれぞれの第２電極１６ｂはいずれも第１電極１６ａを基準にして円周方向の同じ側に設けられる。本実施形態では、第１電極１６ａから第２電極１６ｂに向く方向は、環状内部空間１２ｅの円周の右回転方向であるが、左回転方向であってもよい。この場合、吐出ノズル１４の延びる向きが図１に示す方向と逆方向になるように吐出ノズル１４が設けられる。
　第１電極１６ａ及び第２電極１６ｂは、円周方向に例えば０～３ｍｍ離間して配置される。第１電極１６ａ及び第２電極１６ｂは、厚さが例えば０．３～１．０ｍｍの導体で構成される。第１電極１６ａ及び第２電極１６ｂの材料として、例えば銀、銅やタングステン等が用いられる。 Each of the electrode pairs of the actuator 16 includes a first electrode 16a and a second electrode 16b. The first electrode 16a in each electrode pair is exposed from the outer surface of the inner cylindrical member 12a, which is a dielectric, and the second electrode 16b is embedded in the inner cylindrical member 12a. The reason why the first electrode 16a is exposed from the wall surface and the second electrode 16b is embedded in the inner cylindrical member 12a is that the attractive force generated by the plasma generated between the first electrode 16a and the second electrode 16b, as will be described later. This is to accelerate the speed of the introduced hot gas. When embedding the second electrode 16b in the inner cylindrical member 12a, the embedding depth, that is, the distance from the wall surface to the uppermost surface of the second electrode 16b is, for example, 0.03 to 1.0 mm. This is preferable in terms of efficient generation.
Further, the first electrode 16a and the second electrode 16b are elongated strip-like electrodes that extend in the central axis direction of the inner cylindrical member 12a and are arranged in parallel to each other, thereby effectively accelerating the speed of the hot gas. This is preferable.
Each of the second electrodes 16b of the actuator 16 is provided on the same side in the circumferential direction with respect to the first electrode 16a. In the present embodiment, the direction from the first electrode 16a to the second electrode 16b is the clockwise rotation direction of the circumference of the annular internal space 12e, but may be the counterclockwise rotation direction. In this case, the discharge nozzle 14 is provided so that the direction in which the discharge nozzle 14 extends is opposite to the direction shown in FIG.
The first electrode 16a and the second electrode 16b are spaced apart from each other by 0 to 3 mm in the circumferential direction, for example. The first electrode 16a and the second electrode 16b are made of a conductor having a thickness of 0.3 to 1.0 mm, for example. As a material of the first electrode 16a and the second electrode 16b, for example, silver, copper, tungsten or the like is used.
　電源１８は、アクチュエータ１６の第１電極１６ａ、第２電極１６ｂ間に電圧を印加する。例えば、数１００Ｈｚ～数１０ｋＨｚの交流電圧が第１電極１６ａ、第２電極１６ｂ間に印加される。あるいは、数１００Ｈｚ～数１０ｋＨｚのパルス電圧が、第１電極１６ａ、第２電極１６ｂ間に印加される。印加する電圧は、交流電圧の場合、例えば数ｋＶ～数１０ｋＶであり、パルス電圧の場合、例えば数ｋＶ～数１０ｋＶの電圧である。
　各アクチュエータ１６の第１電極１６ａ及び第２電極１６ｂは、電力線２４と接続され、電力線２４は、平板部材１２ｃを横切って電源１８と接続されている。 The power source 18 applies a voltage between the first electrode 16 a and the second electrode 16 b of the actuator 16. For example, an alternating voltage of several hundred Hz to several tens kHz is applied between the first electrode 16a and the second electrode 16b. Alternatively, a pulse voltage of several hundred Hz to several tens kHz is applied between the first electrode 16a and the second electrode 16b. The applied voltage is, for example, several kV to several tens kV in the case of an alternating voltage, and is several volts to several tens of kV in the case of a pulse voltage, for example.
The first electrode 16a and the second electrode 16b of each actuator 16 are connected to the power line 24, and the power line 24 is connected to the power source 18 across the flat plate member 12c.
　このような電源１８が第１電極１６ａ、第２電極１６ｂ間に電圧を印加するように、コントローラ２０が電圧の印加を制御する。なお、電源１８の印加する電圧が断続的に印加されるパルス電圧である場合、コントローラ２０は、各アクチュエータ１６に与えるパルス電圧の印加のタイミングを任意の遅延時間を用いて遅らせることができる。例えば、隣り合うアクチュエータ１６間の離間距離を高温ガスの平均速度で除算して得られる時間を遅延時間として、パルス電圧の印加のタイミングを遅らせるように、コントローラ２０は電源１８を制御することができる。これにより、高温ガスの流れの速度に合わせて高温ガスの加速を行うことができるので、ポンプの作用を効果的に向上させることができる。 The controller 20 controls the application of voltage so that the power source 18 applies a voltage between the first electrode 16a and the second electrode 16b. When the voltage applied by the power supply 18 is a pulse voltage applied intermittently, the controller 20 can delay the application timing of the pulse voltage applied to each actuator 16 by using an arbitrary delay time. For example, the controller 20 can control the power supply 18 so as to delay the timing of applying the pulse voltage, with the time obtained by dividing the separation distance between the adjacent actuators 16 by the average speed of the hot gas as a delay time. . Thereby, since the high temperature gas can be accelerated in accordance with the flow rate of the high temperature gas, the action of the pump can be effectively improved.
　このようなポンプ１０では、ガス導入口１２ｆを通して導入された高温ガスが環状内部空間１２ｅにおいて右回転方向の流れを作る。このとき、ポンプ１０は、アクチュエータ１６に電圧を印加することにより、第１電極１６ａと第２電極１６ｂとの間でプラズマを生成させる。これにより、プラズマによって生じる高温ガスを引っ張る力によって高温ガスの速度が加速される。高温ガスは、環状内部空間１２ｅに設けられたアクチュエータ１６で順次加速されて速度が高くなる。環状内部空間１２ｅを循環して速度が高まることによって生じる遠心力の増大によって外側円筒部材１２ｂの側が高圧、内側円筒部材１２ａの側が低圧となり、径方向Ｒにおいて高温ガスの圧力勾配が生じる。この圧力勾配の結果、ガス供給管２２内の高温ガスは、ガス導入口１２ｆを通して環状内部空間１２ｅに吸引されて導入される易くなる。それと同時に、高圧となった外側円筒部材１２ｂの側（環状内部空間１２ｅの径方向外側）に位置する高温ガスは吐出ノズル１４から排出される易くなる。 In such a pump 10, the high temperature gas introduced through the gas inlet 12f creates a flow in the clockwise direction in the annular inner space 12e. At this time, the pump 10 applies a voltage to the actuator 16 to generate plasma between the first electrode 16a and the second electrode 16b. Thereby, the velocity of the hot gas is accelerated by the force pulling the hot gas generated by the plasma. The high temperature gas is sequentially accelerated by the actuator 16 provided in the annular inner space 12e, and the velocity is increased. By increasing the centrifugal force generated by increasing the speed by circulating through the annular inner space 12e, the outer cylindrical member 12b side becomes high pressure and the inner cylindrical member 12a side becomes low pressure, and a pressure gradient of high-temperature gas is generated in the radial direction R. As a result of this pressure gradient, the hot gas in the gas supply pipe 22 is easily sucked and introduced into the annular inner space 12e through the gas inlet 12f. At the same time, the high-temperature gas located on the side of the outer cylindrical member 12b having a high pressure (the radially outer side of the annular inner space 12e) is easily discharged from the discharge nozzle 14.
（アクチュエータの原理）
　図５は、アクチュエータ１６の原理を説明する模式図である。図示されるアクチュエータ１６は、円筒状の曲面上ではなく平板上に設けられる。
　図５に示されるように、アクチュエータ１６として、誘電体板４０，４２に設けられた一対の電極である第１電極１６ａ、第２電極１６ｂに交流電源４４を用いて電圧が印加される場合を想定する。第１電極１６ａは高温ガスに曝される。第２電極１６ｂは誘電体４２により被覆され、高温ガスに曝されない。第１電極１６ａ、第２電極１６ｂに交流電圧を印加すると、第１電極１６ａ、第２電極１６ｂ間で局所的にプラズマＰが発生し、誘起流れが生じる。第１電極１６ａ、第２電極１６ｂに交流電圧を印加することにより誘起流れが生じる厳密なメカニズムは不明であるが、以下に説明するメカニズムにより誘起流れが生じ得ると考えることができる。 (Principle of actuator)
FIG. 5 is a schematic diagram illustrating the principle of the actuator 16. The illustrated actuator 16 is provided not on a cylindrical curved surface but on a flat plate.
As shown in FIG. 5, a case where a voltage is applied to the first electrode 16a and the second electrode 16b, which are a pair of electrodes provided on the dielectric plates 40 and 42, using the AC power supply 44 as the actuator 16 is shown. Suppose. The first electrode 16a is exposed to a high temperature gas. The second electrode 16b is covered with the dielectric 42 and is not exposed to the high temperature gas. When an AC voltage is applied to the first electrode 16a and the second electrode 16b, plasma P is locally generated between the first electrode 16a and the second electrode 16b, and an induced flow is generated. Although the exact mechanism by which an induced flow is generated by applying an alternating voltage to the first electrode 16a and the second electrode 16b is unknown, it can be considered that an induced flow can be generated by the mechanism described below.
　第１電極１６ａ、第２電極１６ｂ間で局所的にプラズマＰが発生すると、高温ガスが電離して電荷が生じる。電荷密度ρの電荷に電場Ｅが作用すると、電荷に作用するクーロン力は以下の式（１）で表される。 When the plasma P is locally generated between the first electrode 16a and the second electrode 16b, the high temperature gas is ionized to generate charges. When the electric field E acts on the charge having the charge density ρ, the Coulomb force acting on the charge is expressed by the following equation (1).
Figure JPOXMLDOC01-appb-M000001
 　また、高温ガスの誘電率をε０とすると、ガウスの法則は以下の式（２）で表される。
Figure JPOXMLDOC01-appb-M000001
 Further, when the dielectric constant of the high temperature gas is ε 0 , Gauss's law is expressed by the following equation (2).
Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002
　ここで、各電極に垂直な方向（図５の上方向）をｚ方向として上記式（１）、式（２）をｚ方向のみ考慮すると、式（２）は下記式（３）で表される。 Here, when the above formula (1) and formula (2) are considered only in the z direction with the direction perpendicular to each electrode (upward direction in FIG. 5) as the z direction, formula (2) is expressed by the following formula (3). The
Figure JPOXMLDOC01-appb-M000003
 　また、式（１）と式（３）より、下記式（４）が得られる。
Figure JPOXMLDOC01-appb-M000003
 Moreover, following Formula (4) is obtained from Formula (1) and Formula (3).
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004
　式（３）をナビエ・ストークス方程式の圧力項と考えると、圧力ｐＥは下記式（５）で表される。 Considering equation (3) and a pressure section Navier-Stokes equations, the pressure p E is represented by the following formula (5).
Figure JPOXMLDOC01-appb-M000005
Figure JPOXMLDOC01-appb-M000005
　式（５）は、第１電極１６ａ、第２電極１６ｂ付近に－ｚ方向の圧力が生じることを意味する。本実施形態では、この－ｚ方向の圧力を用いて、導入された高温ガスがプラズマＰに起因した力により－ｚ方向に引かれる特性が利用される。
　ポンプ１０では、プラズマの生成される領域が高温ガスの流れる方向に向くように第１電極１６ａ、第２電極１６ｂの配置を調整することにより、プラズマＰに起因して作られる力に、高温ガスの流れ方向の成分を含ませることができる。したがって、ポンプ１０は、この力を利用して効率よく、高温ガスを加速させることができる。 Equation (5) means that pressure in the −z direction is generated in the vicinity of the first electrode 16a and the second electrode 16b. In the present embodiment, the characteristic that the introduced high-temperature gas is pulled in the −z direction by the force caused by the plasma P using the pressure in the −z direction is used.
In the pump 10, by adjusting the arrangement of the first electrode 16a and the second electrode 16b so that the region where the plasma is generated is directed in the direction in which the high temperature gas flows, the force generated due to the plasma P is increased to the high temperature gas. The components in the flow direction can be included. Therefore, the pump 10 can efficiently accelerate the high-temperature gas using this force.
　また、このようなアクチュエータについては、”Airflow control by non-thermal plasma actuators”, Eric Moreau, Journal of Physics D: Applied Physics, J. Phys.D: Phys. 40 (2007) 605-636　に報告がなされている。 Such actuators are also reported in “Airflow control by non-thermal plasma actuators”, Eric Moreau, Journal of Physics D: Applied Physics, J. Phys.D: Phys. 40 (2007) 605-636 ing.
　実際、第１電極１６ａ、第２電極１６ｂからなるアクチュエータ１６に、電圧１２ｋＶで、周波数１３ｋＨｚの交流電圧を印加し、第２電極１６ｂから第１電極１６ａを見た方向と反対側の方向に第２電極１６ｂから５０ｍｍ離れた位置でガスの速度を計測したとき、ガスの励起速度（速度の上昇分）が約０．７（ｍ／秒）であったことが確認されている。 Actually, an AC voltage having a frequency of 13 kHz is applied to the actuator 16 including the first electrode 16a and the second electrode 16b at a voltage of 12 kV, and the first electrode 16a is viewed in the direction opposite to the direction in which the first electrode 16a is viewed. When the gas velocity was measured at a position 50 mm away from the two electrodes 16b, it was confirmed that the gas excitation velocity (velocity increase) was about 0.7 (m / sec).
　このように、ポンプ１０は、従来のような軸受けを有する送風用ファンを用いる代わりに、アクチュエータ１６を用いることにより、導入された高温ガスの流れをプラズマによる吸引により加速させて高温ガスを循環させた後、高温ガスを吐出することができる。したがって、従来に比べてより簡単な構造で効率よく高温ガスを吐出させる高温ポンプを提供することができる。
　また、ポンプ１０は、送風用ファンのような機械的駆動部分がなく、用いる部材は石英あるいは合成石英、及び第１電極１６ａ、第２電極１６ｂに用いる金属であるので、１０００℃以上の高温雰囲気中でもポンプとして用いることができる。 As described above, the pump 10 uses the actuator 16 instead of the conventional blower fan having the bearing, thereby accelerating the flow of the introduced high-temperature gas by suction with plasma and circulating the high-temperature gas. After that, the high temperature gas can be discharged. Therefore, it is possible to provide a high-temperature pump that efficiently discharges high-temperature gas with a simpler structure than conventional ones.
The pump 10 does not have a mechanical driving part such as a blower fan, and the member used is quartz or synthetic quartz, and the metal used for the first electrode 16a and the second electrode 16b. Among them, it can be used as a pump.
　本実施形態では、アクチュエータ１６を内側円筒部材１２ａの外側面に設けたが、外側円筒部材１２ｂの内側面に設けることもできる。さらに、環状内部空間１２ｅの天井面や床面にアクチュエータ１６を設けることもできる。しかし、環状内部空間１２ｅの径方向内側に多く存在する速度の遅い高温ガスを加速させることができる点で、アクチュエータ１６を内側円筒部材１２ａの外側面に設けることが好ましい。 In the present embodiment, the actuator 16 is provided on the outer side surface of the inner cylindrical member 12a, but may be provided on the inner side surface of the outer cylindrical member 12b. Furthermore, the actuator 16 can also be provided on the ceiling surface or floor surface of the annular internal space 12e. However, it is preferable to provide the actuator 16 on the outer surface of the inner cylindrical member 12a in that it can accelerate a high-speed gas having a low velocity that exists in the radial inner side of the annular inner space 12e.
　以上、本発明の高温ガス用ポンプについて詳細に説明したが、本発明は上記実施形態および変形例に限定されず、本発明の主旨を逸脱しない範囲において、種々の改良や変更をしてもよいのはもちろんである。 Although the hot gas pump of the present invention has been described in detail above, the present invention is not limited to the above-described embodiments and modifications, and various improvements and modifications may be made without departing from the spirit of the present invention. Of course.
１０　高温ガス用ポンプ
１２　ポンプ容器
１２ａ　内側円筒部材
１２ｂ　外側円筒部材
１２ｃ，１２ｄ　平板部材
１２ｅ　環状内部空間
１２ｆ　ガス導入口
１２ｇ　ガス導入孔
１４　吐出ノズル
１６　アクチュエータ
１８　電源
２０　コントローラ
２２　ガス供給管
２４　電力線
４０，４２　誘電体
４４　交流電源
  DESCRIPTION OF SYMBOLS 10 Hot gas pump 12 Pump container 12a Inner cylindrical member 12b Outer cylindrical member 12c, 12d Flat plate member 12e Annular internal space 12f Gas introduction port 12g Gas introduction hole 14 Discharge nozzle 16 Actuator 18 Power supply 20 Controller 22 Gas supply pipe 24 Power line 40, 42 Dielectric 44 AC power supply

Claims (9)

  1. 　高温ガス用ポンプであって、
    　環状内部空間を備え、導入された高温ガスを前記環状内部空間の周方向に沿って流す循環経路を有するポンプ容器と、
    　前記環状内部空間の一部分から循環する高温ガスを吐出させる吐出ノズルと、
    　前記環状内部空間の誘電体からなる壁の周上の異なる位置に設けられる複数の電極対を有するアクチュエータであって、前記電極対のそれぞれは第１電極及び第２電極からなり、前記電極対のそれぞれの前記第１電極は前記壁から露出し、前記第２電極は前記誘電体内に埋め込まれ、前記第１電極と前記第２電極の間に電圧が印加されて前記第１電極と前記第２電極の間にプラズマを生成することにより、高温ガスの流れを形成するアクチュエータと、
    　前記電極対に電圧を印加する電源と、を有し、
    　前記電極対それぞれの前記第２電極は、いずれも前記第１電極を基準にして前記循環経路の周方向の同じ側に設けられる、ことを特徴とする高温ガス用ガスポンプ。     A hot gas pump,
    A pump container having an annular inner space and having a circulation path for flowing the introduced high-temperature gas along the circumferential direction of the annular inner space;
    A discharge nozzle for discharging hot gas circulating from a part of the annular internal space;
    An actuator having a plurality of electrode pairs provided at different positions on the circumference of a wall made of a dielectric in the annular internal space, each of the electrode pairs comprising a first electrode and a second electrode, Each of the first electrodes is exposed from the wall, the second electrode is embedded in the dielectric, and a voltage is applied between the first electrode and the second electrode so that the first electrode and the second electrode are applied. An actuator that creates a flow of hot gas by generating plasma between the electrodes;
    A power source for applying a voltage to the electrode pair,
    The high-temperature gas pump according to claim 1, wherein the second electrodes of each of the electrode pairs are provided on the same side in the circumferential direction of the circulation path with respect to the first electrode.
  2. 　前記環状内部空間は、第１円筒部材の外側面と、前記外側面の中心軸に中心軸が一致し、かつ前記第１円筒部材の直径より大きい直径を有する第２円筒部材の内側面と、２つの平板の面で囲まれて形成され、前記電極対は前記内側面に設けられ、前記吐出ノズルの経路は前記循環経路から径方向外側に枝分かれし、前記吐出ノズルの壁面の一部は、前記循環経路の前記外側面から滑らかに延びている、請求項１に記載の高温ガス用ポンプ。 The annular inner space includes an outer surface of the first cylindrical member, an inner surface of the second cylindrical member having a diameter larger than the diameter of the first cylindrical member, the central axis of which coincides with the central axis of the outer surface, The electrode pair is provided on the inner surface, the discharge nozzle path branches radially outward from the circulation path, and part of the wall surface of the discharge nozzle is The hot gas pump according to claim 1, which extends smoothly from the outer surface of the circulation path.
  3. 　前記第１電極及び前記第２電極は、前記第１円筒部材の中心軸方向に延びてお互いに平行に配置された細長い電極である、請求項２に記載の高温ガス用ポンプ。 The high-temperature gas pump according to claim 2, wherein the first electrode and the second electrode are elongated electrodes extending in the direction of the central axis of the first cylindrical member and arranged parallel to each other.
  4. 　前記環状内部空間は、第１円筒部材の外側面と、前記第１円筒部材の中心軸に中心軸が一致し、かつ前記第１円筒部材の直径より大きい直径を有する第２円筒部材の内側面と、２つの平板の面で囲まれて形成され、
    　前記環状内部空間の壁面のうち、前記外側面に高温ガスを導入するスリット状のガス導入口が設けられている、請求項１～３のいずれか１項に記載の高温ガス用ポンプ。     The annular inner space has an outer surface of the first cylindrical member and an inner surface of the second cylindrical member whose central axis coincides with the central axis of the first cylindrical member and has a diameter larger than the diameter of the first cylindrical member. And surrounded by two flat surfaces,
    The high-temperature gas pump according to any one of claims 1 to 3, wherein a slit-like gas introduction port for introducing a high-temperature gas is provided on the outer surface of the wall surface of the annular internal space.
  5. 　前記ガス導入口は、高温ガスを前記環状内部空間の壁面に対して前記環状内部空間の周方向に傾斜して導入し、導入される高温ガスの傾斜方向は、周方向のうち、前記第１電極を基準にして前記第２電極の側に向かう方向である、請求項４に記載の高温ガス用ポンプ。 The gas introduction port introduces a high temperature gas with an inclination in a circumferential direction of the annular internal space with respect to a wall surface of the annular internal space, and an inclination direction of the introduced high temperature gas is the first of the circumferential directions. The hot gas pump according to claim 4, wherein the hot gas pump has a direction toward the second electrode with respect to the electrode.
  6. 　前記ポンプ容器は、石英あるいは合成石英で構成されている、請求項１～５のいずれか１項に記載の高温ガス用ポンプ。 The high-temperature gas pump according to any one of claims 1 to 5, wherein the pump container is made of quartz or synthetic quartz.
  7. 　前記第１電極と前記第２電極との間に交流電圧が印加される、請求項１～６のいずれか１項に記載の高温ガス用ポンプ。 The high-temperature gas pump according to any one of claims 1 to 6, wherein an AC voltage is applied between the first electrode and the second electrode.
  8. 　前記第１電極と前記第２電極との間にパルス電圧が断続的に印加される、請求項１～６のいずれか１項に記載の高温ガス用ポンプ。 The high-temperature gas pump according to any one of claims 1 to 6, wherein a pulse voltage is intermittently applied between the first electrode and the second electrode.
  9. 　さらに、前記複数の電極対のそれぞれに与えるパルス電圧の印加のタイミングを制御するコントローラを有する、請求項８に記載の高温ガス用ポンプ。 The high-temperature gas pump according to claim 8, further comprising a controller that controls application timing of a pulse voltage applied to each of the plurality of electrode pairs.
PCT/JP2012/005967 2011-09-29 2012-09-20 Pump for high temperature gas WO2013046602A1 (en)

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JP2007317656A (en) * 2006-04-28 2007-12-06 Toshiba Corp Airflow generation device, airflow generating unit, wing, heat exchanger, micro machine, gas treatment device, airflow generating method and airflow controlling method
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JP2008229432A (en) * 2007-03-19 2008-10-02 Yamaguchi Univ Swirling flow producing device without mechanical operation part

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JP2007317656A (en) * 2006-04-28 2007-12-06 Toshiba Corp Airflow generation device, airflow generating unit, wing, heat exchanger, micro machine, gas treatment device, airflow generating method and airflow controlling method
JP2008095685A (en) * 2006-10-13 2008-04-24 General Electric Co <Ge> Plasma enhanced rapidly expanded gas turbine engine transition duct
JP2008229432A (en) * 2007-03-19 2008-10-02 Yamaguchi Univ Swirling flow producing device without mechanical operation part

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