WO2013035742A1 - 精製された珪酸アルカリ水溶液及びシリカゾルの製造方法 - Google Patents
精製された珪酸アルカリ水溶液及びシリカゾルの製造方法 Download PDFInfo
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- WO2013035742A1 WO2013035742A1 PCT/JP2012/072621 JP2012072621W WO2013035742A1 WO 2013035742 A1 WO2013035742 A1 WO 2013035742A1 JP 2012072621 W JP2012072621 W JP 2012072621W WO 2013035742 A1 WO2013035742 A1 WO 2013035742A1
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- aqueous solution
- silicic acid
- alkali silicate
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
- C01B33/146—After-treatment of sols
- C01B33/148—Concentration; Drying; Dehydration; Stabilisation; Purification
- C01B33/1485—Stabilisation, e.g. prevention of gelling; Purification
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/20—Silicates
- C01B33/32—Alkali metal silicates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
- C01B33/141—Preparation of hydrosols or aqueous dispersions
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
- C01B33/141—Preparation of hydrosols or aqueous dispersions
- C01B33/142—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates
- C01B33/143—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates of aqueous solutions of silicates
- C01B33/1435—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates of aqueous solutions of silicates using ion exchangers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/22—Rheological behaviour as dispersion, e.g. viscosity, sedimentation stability
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/90—Other properties not specified above
Definitions
- the present invention relates to a method for producing a purified alkali silicate aqueous solution in which foreign matters of tabular microparticles are reduced, and silica sol using a purified aqueous solution of alkali silicate in which foreign matters of tabular microparticles are reduced Related to the manufacturing method.
- a surface polishing step is indispensable in the manufacturing process of a magnetic disk substrate, and surface polishing is performed with an abrasive containing colloidal silica.
- abrasives are required not to cause surface defects such as scratches and pits.
- the miniaturization of wiring is progressing as the circuit is highly integrated and the operating frequency is increased.
- further smoothing of the pattern forming surface is desired.
- the colloidal silica and fine particles are removed by washing following the polishing process using an abrasive containing colloidal silica.
- an aqueous solution of an acidic or alkaline chemical is used.
- acidic chemicals include compounds containing fluorine ions such as hydrofluoric acid, ammonium fluoride, ammonium monohydrogen difluoride, borohydrofluoric acid, sulfuric acid, nitric acid, hydrochloric acid, acetic acid, citric acid, malic acid, Acid, perchloric acid, etc. are used.
- alkaline chemicals examples include sodium hydroxide, potassium hydroxide, calcium hydroxide, ammonia, and amines.
- surfactants such as sodium alkylbenzene sulfonate, polyoxyethylene alkyl ether sulfate, dioctyl sulfosuccinate, sodium tripolyphosphate, sodium pyrophosphate, zeolite, sodium ethylenediaminetetraacetate, etc. in aqueous solutions of these acidic or alkaline chemicals
- a chelating agent or the like may be added as a component.
- the colloidal silica used in the above abrasive is spherical or almost spherical and can be removed by a conventional cleaning method. However, recently, it has been found that there are particles that cannot be easily removed by conventional cleaning. I came.
- the viscosity of the alkali silicate aqueous solution is previously adjusted to 1 to 50 mPa ⁇ s, and this is subjected to ultrafiltration with a molecular weight cut-off of 15000 or less.
- a method of passing through a membrane is disclosed (Patent Document 1).
- an object of the present invention is to provide a method for producing a silica sol in which flat microparticles having a side length of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm observed with a scanning electron microscope are reduced. Therefore, it is an object of the present invention to provide a method for reducing the above-mentioned plate-like fine particles in an alkali silicate aqueous solution that is a raw material for silica sol. Another object of the present invention is to provide a method for producing a silica sol with a reduced filtration rate and a reduced number of fine particles on the flat plate that can be mass-produced.
- the present inventors have found a method for solving the problem by filtering an aqueous alkali silicate solution under specific conditions. That is, as a first aspect, the silica concentration of the alkali silicate aqueous solution is adjusted to 0.5 to 10.0% by mass, and this is filtered through a filter having a primary particle diameter of 1.0 ⁇ m removal rate of 50% or more.
- this measuring method A 30 mL of a 25 ° C. alkali silicate aqueous solution whose silica concentration is adjusted to 4% by mass is filtered through a membrane filter (filtration area: 4.90 cm 2 ) having an absolute pore diameter of 0.4 ⁇ m, and then the membrane filter is filtered.
- a membrane filter filtration area: 4.90 cm 2
- a rectangular observation area of 15 ⁇ m in length and 20 ⁇ m in width is taken as one field of view, and one or more of the above plate-like microparticles are present in this field of view.
- the production method according to the first aspect wherein the removal rate is 60% or more
- the production method according to the first aspect wherein the removal rate is 70% or more.
- the production method according to the first aspect wherein the removal rate is 80% or more
- the production method according to the first aspect wherein the removal rate is 90% or more
- the filter is at least selected from the group consisting of a membrane filter, a pleat filter, a depth filter, a thread wound filter, a surface filter, a roll filter, a depth filter, and a diatomaceous earth-containing filter.
- the manufacturing method according to any one of the first to fifth aspects, wherein the filter is a membrane type filter having an absolute pore size of 0.3 to 3.0 ⁇ m.
- any one of the first to seventh aspects wherein the alkali component of the alkali silicate aqueous solution is at least one selected from the group consisting of sodium ions, potassium ions, lithium ions, rubidium ions, and cesium ions. Manufacturing method described in one, As a ninth aspect, after the cation exchange is performed on the purified alkaline silicate aqueous solution obtained in any one of the first to eighth aspects, an active silicate liquid is obtained, and then the active silicate liquid is added to the alkaline aqueous solution.
- the alkaline component of the alkaline aqueous solution is at least one selected from the group consisting of alkali metal ions, ammonium ions, amine compounds and quaternary ammonium ions, the production method according to the ninth aspect, It is.
- the method for producing a purified alkali silicate aqueous solution of the present invention efficiently produces the above-mentioned 0.2 to 4.0 ⁇ m, 1 to 100 nm tabular fine particles remaining in the conventional filtration of an alkali silicate aqueous solution. Can be removed. For this reason, also in the silica sol manufactured using the refine
- An abrasive using a silica sol in which flat microparticles having a side length of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm are observed with a scanning electron microscope is used as a magnetic disk substrate or a semiconductor substrate. In the flattening process, the flat microparticles do not remain or hardly remain on these substrates after the cleaning process.
- the production method of the present invention has a high filtration rate of an alkali silicate aqueous solution, and is suitable for mass production of a purified alkali silicate aqueous solution and a silica sol produced using the same.
- the SiO 2 / M 2 O molar ratio (M represents.
- An alkali metal element) is not limited to, it may be a commercially available alkali silicate solution, typically SiO 2 The molar ratio of / M 2 O is 2-4.
- the alkali component of the alkali silicate aqueous solution is an alkali metal ion, and is at least one selected from the group consisting of sodium ion, potassium ion, lithium ion, rubidium ion, and cesium ion. Of these, alkali silicate aqueous solutions of sodium ions, potassium ions, and lithium ions are commercially available and can be obtained at low cost.
- Sodium silicate aqueous solution is the most versatile and can be preferably used.
- the commercially available sodium silicate aqueous solution has a silica concentration of 19 to 38% by mass.
- Purified alkali silicate in which the abundance of tabular fine particles having a side length of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm measured according to the measuring method A of the present invention is 0 to 30%
- an alkali silicate aqueous solution is adjusted to a silica concentration of 0.5 to 10.0% by mass using water.
- a filter having a removal rate of particles having a primary particle diameter of 1.0 ⁇ m of 50% or more is prepared, and the alkali silicate aqueous solution whose concentration is adjusted is filtered through the filter.
- the removal rate of particles having a primary particle diameter of 1.0 ⁇ m is 50% or more.
- the removal rate is preferably 60% or more, more preferably 70% or more, still more preferably 80% or more, and most preferably 90% or more.
- the removal rate of particles having a primary particle diameter of 1.0 ⁇ m or more is calculated from the number of latex particles before and after filtration when an aqueous dispersion of monodisperse polystyrene latex particles having a diameter of 1.0 ⁇ m is filtered.
- monodisperse polystyrene latex particles having a diameter of 1.0 ⁇ m for example, STANDEX-SC-103-S manufactured by JSR Corporation, standard particles 4009A manufactured by Thermo Fisher Scientific, Inc. can be used.
- the material of the filter used in the present invention is polyester, polyethylene, polypropylene, polycarbonate, polytetrafluoroethylene, polyethylene terephthalate, cellulose acetate, cellulose / epoxy resin, glass fiber / acrylic resin, cotton, polysulfone, nylon, polyethersulfone. These are at least one selected from the group consisting of, and are used alone, in combination or in combination.
- a filter aid woven with diatomaceous earth, silica / alumina, a mixture of zeolite and silica / alumina, or the like can be used.
- the filter used in the present invention captures solid particles not only on the surface of the filter medium but also inside the filter medium, depending on the manufacturing method, a membrane filter (porous membrane filter), a pleated filter (pleated filter), and a depth filter (not only on the filter medium surface) Filter), roll type filter (filter wound in roll), spool type filter (pincushion), surface type filter (type of filter that captures particulate matter mainly on the primary side of the filter, not inside the filter), Classified as diatomaceous earth-containing filters.
- the production method of the filter used in the present invention is not particularly limited, and any of the above methods can be adopted.
- the membrane type filter is effective for microfiltration.
- a membrane type filter having an absolute pore size of 0.3 to 3.0 ⁇ m can remove plate-like fine particles very effectively.
- a filter with a primary particle size of 1.0 ⁇ m removal rate of less than 50% was used as a pretreatment filter, and then the primary particle size of 1.0 ⁇ m particle removal rate It is also possible to perform filtration using a filter having a ratio of 50% or more.
- the temperature at which the alkali silicate aqueous solution is filtered using a filter having a primary particle diameter 1.0 ⁇ m removal rate of 50% or more may be room temperature, but if the alkali silicate aqueous solution has a high viscosity, the filter is filtered. Filtration can be performed by raising the temperature of the aqueous alkali silicate solution to a temperature that does not impair the performance.
- the temperature of the alkali silicate aqueous solution is preferably 50 ° C. or lower, more preferably 15 ° C. or higher and 35 ° C. or lower.
- the filtration rate when filtering an aqueous alkali silicate solution using a filter having a primary particle diameter of 1.0 ⁇ m removal rate of 50% or more varies depending on the silica concentration and viscosity of the aqueous alkali silicate solution and the filter used. is 13 to 400 l / min filtration area 1 m 2 per filter used.
- the measuring method A of the flat microparticles contained in the purified alkali silicate aqueous solution filtered by a filter having a primary particle diameter of 1.0 ⁇ m removal rate of 50% or more is as follows. [Measurement method A] 30 ml of a liquid to be observed at 25 ° C.
- the polycarbonate membrane-type filter for example, Isopore HTTP-02500 manufactured by Nippon Millipore Corporation can be used.
- the liquid to be observed is a purified alkali silicate aqueous solution filtered through a filter having a removal rate of particles having a primary particle diameter of 1.0 ⁇ m of 50% or more.
- the abundance of tabular microparticles having a side length of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm measured according to Measurement Method A is obtained.
- a purified aqueous alkali silicate solution of 0-30% is obtained.
- the length of one side measured by the measuring method A obtained by filtering with a filter having a removal rate of particles having a primary particle diameter of 1.0 ⁇ m of 50% or more is 0.2.
- An active silicic acid solution is obtained by cation exchange of a purified alkali silicate aqueous solution in which the abundance of tabular fine particles having a thickness of 1 to 100 nm and a thickness of 1 to 100 nm is 0 to 30%.
- a conventional general method can be adopted.
- a hydrogen cation exchange resin for example, Amberlite (registered trademark) 120B: manufactured by Dow Chemical Co., Ltd.
- a purified alkali silicate aqueous solution having a silica concentration of 2 to 4% by mass is added to a purified alkali silicate aqueous solution having a silica concentration of 2 to 4% by mass, and the pH of the aqueous solution is preferably acidic.
- the silica concentration of the purified alkali silicate aqueous solution to be ion-exchanged may be selected from the range of 0.1 to 10.0% by mass, but the range of good stability of the obtained active silicic acid solution is that the silica concentration is 0.00. 1% by mass or more, preferably 2.0% by mass or more, more preferably 3.0% by mass or more, and preferably 5.0% by mass or less.
- the obtained active silicic acid solution is added to an alkaline aqueous solution and heated to polymerize the active silicic acid. Colloidal silica particles are produced by the polymerization of the active silicic acid to obtain a silica sol.
- the silica concentration of the active silicic acid solution added to the alkaline aqueous solution is in the range of 0.1 to 10.0% by mass, 0.1% by mass or more, preferably 2.0% by mass or more, more preferably 3.0% by mass. % Or more, preferably 5.0% by mass or less.
- the alkaline component of the alkaline aqueous solution is at least one selected from the group consisting of alkali metal ions, ammonium ions, amine compounds and quaternary ammonium ions.
- alkali metal include sodium ion, potassium ion, lithium ion, rubidium ion and cesium ion, and sodium ion and potassium ion are preferable.
- the amine compound is preferably a water-soluble amine compound, such as monoethanolamine, diethanolamine, triethanolamine, N, N-dimethylethanolamine, N- ( ⁇ -aminomethyl) ethanolamine, N-methylethanolamine, Examples include monopropanolamine and morpholine.
- the quaternary ammonium ion include tetraethanolammonium ion, monomethyltriethanolammonium ion, and tetramethylammonium ion.
- the appropriate amount ratio between the added active silicic acid solution and the alkaline aqueous solution can be described by the ratio between the number of moles of silica in the total amount of the added active silicic acid solution and the number of moles of the alkaline component in the aqueous alkaline solution.
- the ratio of the number / number of moles of alkali component is preferably in the range of 25-100.
- the temperature of the alkaline aqueous solution when the active silicic acid is polymerized can be selected in the range of 20 to 300 ° C. If the temperature at the time of polymerization is low, the particle diameter of the resulting colloidal silica particles will be small, and if it is high, the particle diameter of the resulting colloidal silica will be large.
- the particle diameter of the resulting colloidal silica particles varies depending on the polymerization conditions of the active silicic acid, but is in the range of 3 to 1000 nm as the primary particle diameter observed with a transmission electron microscope.
- the diluted silica sol containing colloidal silica particles obtained by polymerization of active silicic acid can be concentrated by a conventionally known method such as an evaporation concentration method or an ultrafiltration method.
- the concentration of the silica sol can be usually performed to a silica concentration of about 50% by mass.
- the removal rate of particles having a primary particle size of 1.0 ⁇ m was measured by the following method.
- An aqueous dispersion in which 0.5 ml of monodisperse polystyrene latex particles having a diameter of 1.0 ⁇ m (manufactured by JSR, STADEX SC-103-S) is dispersed in 5000 ml of pure water is prepared, and the particle sensor KS-42C in the liquid (Rion stock)
- the number of particles (a) having a primary particle diameter of 1.0 ⁇ m was measured using In addition, the number of pure water particles (b) used in the aqueous dispersion was measured to obtain a blank 1.
- the aqueous dispersion was filtered with a filter to be used, and the number (c) of particles having a primary particle diameter of 1.0 ⁇ m in the aqueous dispersion after filtration was measured. Moreover, the filter to be used was preliminarily filtered only with pure water, and the number of particles (d) in the filtered pure water was measured to obtain a blank 2.
- Example 1 Commercially available aqueous solution of sodium silicate (No. JIS3, SiO 2 29.3 wt%, Na 2 O9.5% by weight) of pure water was added to dilute 6325g to 1000 g.
- the diluted sodium silicate aqueous solution has physical properties of SiO 2 4.0 mass%, Na 2 O 1.3 mass% and specific gravity 1.038, and the length of one side observed with a scanning electron microscope when measured under measurement condition A
- the abundance of tabular fine particles having a thickness of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm was 100%.
- the filtration was performed at a flow rate of 3 liters / minute using a single filter area of 0.2 m 2 and a total filter length of 250 mm.
- the abundance of the tabular fine particles was 14%.
- Example 2 As a filter used for filtration, a depth-type filter having a nominal pore size of 0.5 ⁇ m of polypropylene non-woven fabric in the first stage (SL-005 manufactured by Loki Techno Co., Ltd .: removal rate of particles having a primary particle size of 1.0 ⁇ m is 90%, and the filtration area is 0.
- a pleated filter with a nominal pore size of 0.5 ⁇ m PEH-005 made by Loki Techno Co., Ltd., primary particle size: 1.3 m 2 , filter overall length 250 mm
- a second-stage blended glass fiber and diatomaceous earth As a filter used for filtration, a depth-type filter having a nominal pore size of 0.5 ⁇ m of polypropylene non-woven fabric in the first stage (SL-005 manufactured by Loki Techno Co., Ltd .: removal rate of particles having a primary particle size of 1.0 ⁇ m is 90%, and the filtration area is 0.
- Example 3 Commercially available aqueous solution of sodium silicate (No. JIS3, SiO 2 29.3 wt%, Na 2 O9.5% by weight) of pure water was added to dilute 6325g to 1000 g.
- the diluted sodium silicate aqueous solution has physical properties of SiO 2 4.0 mass%, Na 2 O 1.3 mass% and specific gravity 1.038, and the length of one side observed with a scanning electron microscope when measured under measurement condition A
- the abundance of tabular fine particles having a thickness of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm was 100%.
- a membrane type filter made of polyethersulfone having an absolute pore size of 0.45 ⁇ m (CES-005 made by Loki Techno Co., Ltd .: the removal rate of particles having a primary particle size of 1.0 ⁇ m is 100%, the filtration area is 0.75 m 2 , Filtration was performed at a flow rate of 3 liters / minute using a single filter having a total length of 250 mm.
- the abundance of the tabular fine particles was 4%.
- Example 4 4000 g of the filtered sodium silicate aqueous solution obtained in Example 1 was passed through an ion exchange column filled with 500 mL of a cation exchange resin (Amberlite (registered trademark) 120B: manufactured by Dow Chemical Company) at a rate of 2500 g / hr. To obtain an active silicic acid solution.
- the obtained active silicic acid solution was a colorless transparent liquid having a specific gravity of 1.019, pH of 2.90, and SiO 2 of 3.55% by mass.
- 4.55 g of a 32 mass% NaOH aqueous solution and 379 g of pure water were added to a 3 L glass separable flask, and heated to 85 ° C. while stirring.
- the liquid temperature was raised to 100 ° C., and 1879 g of the active silicic acid solution was further added. After completion of the addition, stirring was continued for 6 hours while maintaining the liquid temperature at 100 ° C. After heating, the mixture was cooled and concentrated with an ultrafiltration membrane having a molecular weight cut off of 50,000 to obtain a silica sol.
- the physical properties of this silica sol were a specific gravity of 1.211, pH of 9.9, a viscosity of 4.5, a silica concentration of 30.4% by weight, and a primary particle diameter measured by transmission electron microscope was 10 to 40 nm. Met. When the obtained silica sol was measured according to the measuring method A, the abundance of the tabular fine particles was 1%.
- Comparative Example 1 Commercially available aqueous solution of sodium silicate (No. JIS3, SiO 2 29.3 wt%, Na 2 O9.5% by weight) of pure water was added to dilute 6325g to 1000 g.
- the diluted sodium silicate had physical properties of SiO 2 4.0 mass%, Na 2 O 1.3 mass% and specific gravity 1.038.
- 4000 g of the obtained sodium silicate aqueous solution was passed through an ion exchange tower filled with 500 mL of a cation exchange resin (Amberlite (registered trademark) 120B, manufactured by Dow Chemical Co., Ltd.) at a rate of 2500 g / hr to obtain an active silicic acid solution. It was.
- a cation exchange resin Amberlite (registered trademark) 120B, manufactured by Dow Chemical Co., Ltd.
- the obtained active silicic acid solution was a colorless and transparent liquid having a specific gravity of 1.020, pH of 2.88, and SiO 2 of 3.55% by mass.
- the abundance of the tabular microparticles contained in the active silicic acid solution when measured according to the measuring method A was 100%.
- a silica sol was produced by the method described in Example 4 except that this active silicic acid solution was used.
- the physical properties of this silica sol were a specific gravity of 1.212, a pH of 9.9, a viscosity of 4.6, a silica concentration of 30.5% by weight, and a primary particle diameter of 10 to 40 nm as observed with a transmission electron microscope.
- the obtained silica sol was measured according to Measurement Method A, the abundance of the tabular fine particles was 100%.
- Comparative Example 2 Commercially available aqueous solution of sodium silicate (No. JIS3, SiO 2 29.3 wt%, Na 2 O9.5% by weight) of pure water was added to dilute 6325g to 1000 g.
- the diluted sodium silicate aqueous solution has physical properties of SiO 2 4.0 mass%, Na 2 O 1.3 mass% and specific gravity 1.038, and the length of one side observed with a scanning electron microscope when measured under measurement condition A
- the abundance of tabular fine particles having a thickness of 0.2 to 4.0 ⁇ m and a thickness of 1 to 100 nm was 100%.
- This sodium silicate aqueous solution is a polypropylene non-woven depth filter with a nominal pore size of 20 ⁇ m (SL-200 manufactured by Loki Techno Co., Ltd .: removal rate of particles with a primary particle size of 1.0 ⁇ m is 20%, filtration area is 0.3 m 2 , filter overall length is 250 mm)
- the abundance of the tabular fine particles was 100%.
- Comparative Example 3 A silica sol was obtained in the same manner as in Example 4 except that the filtered sodium silicate aqueous solution obtained in Comparative Example 2 was used.
- the physical properties of this silica sol were a specific gravity of 1.214, a pH of 9.9, a viscosity of 5.0, a silica concentration of 30.7% by weight, and a primary particle diameter measured by transmission electron microscope was 10 to 40 nm.
- the obtained silica sol was measured according to the measuring method A, the abundance of the tabular fine particles was 100%.
- Comparative Example 4 An alkali silicate aqueous solution produced by the same production method as in Example 1 was subjected to filtration using a polysulfone ultrafiltration membrane (filtration area: 45 cm 2 , diameter: 76 mm) having a fractional molecular weight of 10,000 for filtration of the alkali silicate aqueous solution.
- the first average flow of 5 minutes of filtration was 1 l / min per filtering area 1 m 2. Further, the filtration rate after 100 minutes from the start of filtration decreased to 0.4 liters / minute per 1 m 2 of the filtration area.
- the silica sol produced from the purified alkali silicate aqueous solution obtained in the present invention has few flat microparticles, so that minute foreign matters remain in the surface processing of substrates such as metals, alloys and glass. Therefore, defects such as wiring defects and surface roughness due to foreign matter can be prevented, and the substrate can be used for manufacturing a substrate with high surface accuracy.
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Abstract
Description
研磨剤には表面平滑性(例えば、表面粗さ〔Ra〕及びうねり〔wa〕)が良好であることの他に、スクラッチ、ピット等の表面欠陥を引き起こさないことが求められている。
洗浄には、酸性又はアルカリ性の薬品の水溶液が用いられる。酸性の薬品としては、例えばフッ化水素酸、フッ化アンモニウム、一水素二フッ化アンモニウム、ホウフッ化水素酸等のフッ素イオンを含む化合物、硫酸、硝酸、塩酸、酢酸、クエン酸、リンゴ酸、シュウ酸、過塩素酸等が用いられる。アルカリ性の薬品としては、例えば水酸化ナトリウム、水酸化カリウム、水酸化カルシウム、アンモニア、アミン類等が用いられる。また、これらの酸性又はアルカリ性の薬品の水溶液にアルキルベンゼンスルホン酸ナトリウム、ポリオキシエチレンアルキルエーテル硫酸塩、ジオクチルスルホサクシネート等の界面活性剤やトリポリリン酸ナトリウム、ピロリン酸ナトリウム、ゼオライト、エチレンジアミン四酢酸ナトリウム等のキレート剤等を成分として添加することも行われる場合がある。
上記の研磨剤に用いられるコロイダルシリカは、球状又はほぼ球状であるため、従来行われてきた洗浄方法により除去可能であるが、最近、従来の洗浄では容易に除去できない粒子が存在することが判ってきた。
従来、珪酸アルカリ水溶液は、原料カレットを加熱溶解した直後の粗珪酸アルカリ水溶液に珪藻土等の濾過助剤を加えて濾過して精製することが行われているが、この方法では走査型電子顕微鏡で観察される一辺の長さが0.2~4.0μm厚さ、1~100nmの平板状の微小粒子の含有量を低減させることはできなかった。
また、特許文献1の方法では、一般に限外濾過膜の持つ孔径は0.01μm以下と言われており、珪酸アルカリ水溶液の濾過速度が著しく遅く、大量生産には不向きであった。
また、本発明の目的は、濾過速度が速く、大量生産可能な上記平板上の微小粒子を低減させたシリカゾルの製造方法を提供することにある。
即ち、第1観点として、珪酸アルカリ水溶液のシリカ濃度を0.5~10.0質量%に調整し、これを1次粒子径1.0μmの粒子の除去率が50%以上であるフィルターで濾過することを特徴とする、以下の条件(1)を満たす精製された珪酸アルカリ水溶液の製造方法:
(1)測定方法Aに従い計測された、一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量が0~30%、
該測定方法Aは、シリカ濃度を4質量%に調整した25℃の珪酸アルカリ水溶液30mLを絶対孔径0.4μmのメンブレン型フィルター(濾過面積4.90cm2)で濾過した後、該メンブレン型フィルターを走査型電子顕微鏡で5000倍に拡大して観察したとき、縦15μm、横20μmの長方形の観察域を1視野として、この1視野に上記平板状の微小粒子が1つ以上存在したときを1カウントとし、互いに重ならない100視野の総てについてカウントの有無を決定し、得られたカウント総数を該平板状の微小粒子の存在量(%)とする方法である、
第2観点として、前記除去率が60%以上である第1観点に記載の製造方法、
第3観点として、前記除去率が70%以上である第1観点に記載の製造方法。
第4観点として、前記除去率が80%以上である第1観点に記載の製造方法、
第5観点として、前記除去率が90%以上である第1観点に記載の製造方法、
第6観点として、前記フィルターが、メンブレン型フィルター、プリーツ型フィルター、デプス型フィルター、糸巻き型フィルター、サーフェース型フィルター、ロール型フィルター、デプスプリーツ型フィルター、珪藻土含有型フィルターからなる群から選ばれる少なくとも1種である第1観点乃至第5観点のいずれか一つに記載の製造方法、
第7観点として、前記フィルターが、絶対孔径0.3~3.0μmのメンブレン型フィルターである1観点乃至第5観点のいずれか一つに記載の製造方法。
第8観点として、前記珪酸アルカリ水溶液のアルカリ成分が、ナトリウムイオン、カリウムイオン、リチウムイオン、ルビジウムイオン及びセシウムイオンからなる群から選ばれる少なくとも1種である第1観点乃至第7観点のいずれか一つに記載の製造方法、
第9観点として、第1観点乃至第8観点のいずれか一つで得られる精製された珪酸アルカリ水溶液を陽イオン交換して活性珪酸液を得た後、アルカリ性水溶液中に該活性珪酸液を添加し、加熱して、活性珪酸を重合することを特徴とする、以下の条件(2)を満たすシリカゾルの製造方法:
(2)第1観点に記載の測定方法Aに従い計測された、一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量が0~30%、
第10観点として、前記アルカリ性水溶液のアルカリ成分が、アルカリ金属イオン、アンモニウムイオン、アミン化合物及び第4級アンモニウムイオンからなる群から選ばれる少なくとも1種である第9観点に記載の製造方法、
である。
この走査型電子顕微鏡で観察される一辺の長さが0.2~4.0μm、厚さ1~100nmの平板状の微小粒子が低減されたシリカゾルを用いた研磨剤を磁気ディスク基板や半導体基板の平坦化工程に用いた場合に、洗浄工程の後にこれら基板上に前記平板状の微小粒子は残留しないか、ほとんど残留しない。
珪酸アルカリ水溶液のアルカリ成分は、アルカリ金属イオンであり、ナトリウムイオン、カリウムイオン、リチウムイオン、ルビジウムイオン、セシウムイオンからなる群から選ばれる少なくとも1種である。中でも、ナトリウムイオン、カリウムイオン、リチウムイオンの珪酸アルカリ水溶液は市販されており、安価に入手可能である。珪酸ナトリウム水溶液は最も汎用であり、好ましく用いることができる。市販の珪酸ナトリウム水溶液のシリカ濃度は、19~38質量%である。
また、これらの材質でフィルターが製作されるときに、珪藻土、シリカ・アルミナ、ゼオライトとシリカ・アルミナとの混合物などの濾過助剤をフィルターに織り込んだものを使用することもできる。
前記1次粒子径1.0μmの粒子の除去率が50%以上であるフィルターを用いて珪酸アルカリ水溶液を濾過する際の温度は常温で良いが、珪酸アルカリ水溶液の粘度が高い場合はフィルターの濾過性能を損なわない温度にまで珪酸アルカリ水溶液の温度を上げて濾過することができる。珪酸アルカリ水溶液の温度は50℃以下が好ましく、更に好ましくは15℃以上、35℃以下である。
前記1次粒子径1.0μmの粒子の除去率が50%以上であるフィルターを用いて珪酸アルカリ水溶液を濾過する際の濾過速度は、珪酸アルカリ水溶液のシリカ濃度、粘度及び用いられるフィルターにより異なるが、用いるフィルターの濾過面積1m2当たり13~400リットル/分である。
〔測定方法A〕
シリカ濃度を4質量%に調整した25℃の被観察液30mlを絶対孔径0.4μmのポリカーボネート製メンブレン型フィルター(濾過面積4.90cm2、直径25mm)に通過させ、通液後の前記メンブレン型フィルターを走査型電子顕微鏡で5000倍に拡大して観察したとき、縦15μm、横20μmの長方形の観察域を1視野として、この1視野に一辺の長さが0.2μm~4.0μm、厚さが1~100nmの平板状の微小粒子が1つ以上存在したときを1カウントとし、互いに重ならない100視野の総てについてカウントの有無を決定し、得られたカウント総数を前記平板状の微小粒子の存在量(%)とする。前記ポリカーボネート製メンブレン型フィルターとしては、例えば日本ミリポア(株)社製アイソポアHTTP-02500を使用することができる。
この場合、前記被観察液は1次粒子径1.0μmの粒子の除去率が50%以上であるフィルターにより濾過された精製された珪酸アルカリ水溶液である。
(1)上記の測定方法Aに従い計測された、一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量が0~30%、
である。
この場合、被観察液は前記シリカゾルである。
アルカリ金属としては、ナトリウムイオン、カリウムイオン、リチウムイオン、ルビジウムイオン、セシウムイオン等が挙げられ、ナトリウムイオン、カリウムイオンが好ましい。
アミン化合物としては、水溶性のアミン化合物が好ましく、例えば、モノエタノールアミン、ジエタノールアミン、トリエタノールアミン、N,N-ジメチルエタノールアミン、N-(β-アミノメチル)エタノールアミン、N-メチルエタノールアミン、モノプロパノールアミン、モルホリン等が挙げられる。
第4級アンモニウムイオンとしては、テトラエタノールアンモニウムイオン、モノメチルトリエタノールアンモニウムイオン、テトラメチルアンモニウムイオン等が挙げられる。
用いるフィルターについて、1次粒子径1.0μmの粒子の除去率は以降の方法により測定した。直径1.0μmの単分散ポリスチレンラテックス粒子(JSR社製、STADEX SC-103-S)0.5mlを純水5000mlに分散させた水分散液を準備し、液中パーティクルセンサKS-42C(リオン株式会社製)を用いて1次粒子径1.0μmの粒子数(a)を測定した。また、前記水分散液に使用した純水の粒子数(b)を測定し、ブランク1とした。用いるフィルターで前記水分散液を濾過し、濾過後の水分散液中の1次粒子径1.0μmの粒子数(c)を測定した。また、用いるフィルターは純水のみを予め濾過し、濾過した純水中の粒子数(d)を測定し、ブランク2とした。用いるフィルターの1次粒子径1.0μmの除去率は、下記の式(I)から算出した。
式(I) … 除去率(%)=[1-{(c-d)/(a-b)}]×100
市販の珪酸ナトリウム水溶液(JIS3号、SiO229.3質量%、Na2O9.5質量%)1000gに純水6325gを添加して希釈した。希釈した珪酸ナトリウム水溶液はSiO24.0質量%、Na2O1.3質量%、比重1.038の物性であり、測定条件Aで測定したときの走査型電子顕微鏡で観察される一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量は100%であった。この珪酸ナトリウム水溶液をグラスファイバーと珪藻土を混抄させたポリプロピレン不織布の公称孔径0.5μmのプリーツ型フィルター(ロキテクノ社製PEH-005:1次粒子径1.0μmの粒子の除去率は99.9%、濾過面積0.2m2、フィルター全長250mm)1本を用いて、流量3リットル/分で濾過を行った。濾過後の珪酸ナトリウム水溶液を測定方法Aに従い計測した結果、前記平板状の微小粒子の存在量は14%であった。
濾過に用いるフィルターとして、1段目にポリプロピレン不織布の公称孔径0.5μmのデプス型フィルター(ロキテクノ社製SL-005:1次粒子径1.0μmの粒子の除去率は90%、濾過面積0.3m2、フィルター全長250mm)1本を用い、2段目にグラスファイバーと珪藻土を混抄させたポリプロピレン不織布の公称孔径0.5μmのプリーツ型フィルター(ロキテクノ社製PEH-005:1次粒子径1.0μmの粒子の除去率は99.9%、濾過面積0.2m2、フィルター全長250mm)1本を直列に接続し、流量5リットル/分とした他は、実施例1と同様にしてSiO24.0質量%の希釈珪酸ナトリウム水溶液7325gの濾過を行った。濾過後の珪酸ナトリウム水溶液を測定方法Aに従い計測した結果、前記平板状の微小粒子の存在量は6%であった。
市販の珪酸ナトリウム水溶液(JIS3号、SiO229.3質量%、Na2O9.5質量%)1000gに純水6325gを添加して希釈した。希釈した珪酸ナトリウム水溶液はSiO24.0質量%、Na2O1.3質量%、比重1.038の物性であり、測定条件Aで測定したときの走査型電子顕微鏡で観察される一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量は100%であった。この珪酸ナトリウム水溶液をポリエーテルスルフォン製の絶対孔径0.45μmのメンブレン型フィルター(ロキテクノ社製CES-005:1次粒子径1.0μmの粒子の除去率は100%、濾過面積0.75m2、フィルター全長250mm)1本を用いて、流量3リットル/分で濾過を行った。濾過後の珪酸ナトリウム水溶液を測定方法Aに従い計測した結果、前記平板状の微小粒子の存在量は4%であった。
実施例1で得られたフィルター濾過後の珪酸ナトリウム水溶液4000gを陽イオン交換樹脂(アンバーライト(登録商標)120B:ダウ・ケミカル社製)500mLを充填したイオン交換塔に2500g/時の速度で通液し、活性珪酸液を得た。得られた活性珪酸液は比重1.019、pH2.90、SiO23.55質量%で無色透明の液体であった。次いで容積3Lのガラス製セパラブルフラスコに32質量%NaOH水溶液を4.55gと純水379gを添加し、攪拌しながら85℃に加熱した。この加熱されたNaOH水溶液に前記活性珪酸液723gを430g/分の速度で添加した後、液温を100℃まで上げ、更に活性珪酸液1879gを添加した。添加終了後、液温を100℃に保ちながら6時間攪拌を続けた。加熱終了後、冷却し、分画分子量5万の限外濾過膜にて濃縮してシリカゾルを得た。このシリカゾルの物性は比重1.211、pH9.9、粘度4.5、シリカ濃度30.4重量%、透過型電子顕微鏡観察による一次粒子径は10~40nmであった。であった。得られたシリカゾルを測定方法Aに従い計測したところ、前記平板状の微小粒子の存在量は1%であった。
市販の珪酸ナトリウム水溶液(JIS3号、SiO229.3質量%、Na2O9.5質量%)1000gに純水6325gを添加して希釈した。希釈した珪酸ナトリウムはSiO24.0質量%、Na2O1.3質量%、比重1.038の物性であった。得られた珪酸ナトリウム水溶液4000gを陽イオン交換樹脂(アンバーライト(登録商標)120B、ダウ・ケミカル社製)500mLを充填したイオン交換塔に2500g/時の速度で通液し、活性珪酸液を得た。得られた活性珪酸液は比重1.020、pH2.88、SiO23.55質量%で無色透明の液体であった。この活性珪酸液中に含まれる、測定方法Aに従い計測したときの前記平板状の微小粒子の存在量は100%であった。この活性珪酸液を用いた以外は実施例4に記載の方法でシリカゾルを製造した。このシリカゾルの物性は比重1.212、pH9.9、粘度4.6、シリカ濃度30.5重量%、透過型電子顕微鏡観察による一次粒子径は10~40nmであった。得られたシリカゾルを測定方法Aに従い計測したときの前記平板状の微小粒子の存在量は100%であった。
市販の珪酸ナトリウム水溶液(JIS3号、SiO229.3質量%、Na2O9.5質量%)1000gに純水6325gを添加して希釈した。希釈した珪酸ナトリウム水溶液はSiO24.0質量%、Na2O1.3質量%、比重1.038の物性であり、測定条件Aで測定したときの走査型電子顕微鏡で観察される一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量は100%であった。この珪酸ナトリウム水溶液をポリプロピレン不織布の公称孔径20μmのデプス型フィルター(ロキテクノ社製SL-200:1次粒子径1.0μmの粒子の除去率は20%、濾過面積0.3m2、フィルター全長250mm)1本を用いて、流量3リットル/分で濾過を行った。濾過後の珪酸ナトリウム水溶液を測定方法Aに従い計測した結果、前記平板状の微小粒子の存在量は100%であった。
比較例2で得られたフィルター濾過後の珪酸ナトリウム水溶液を用いた以外は実施例4と同様にしてシリカゾルを得た。このシリカゾルの物性は比重1.214、pH9.9、粘度5.0、シリカ濃度30.7重量%、透過型電子顕微鏡観察による一次粒子径は10~40nmであった。得られたシリカゾルを測定方法Aに従い計測したところ、前記平板状の微小粒子の存在量は100%であった。
珪酸アルカリ水溶液の濾過に分画分子量10000のポリスルフォン製限外濾過膜(濾過面積45cm2、直径76mm)を用いて、実施例1と同様の製法で作製した珪酸アルカリ水溶液を濾過に供した。濾過の最初の5分間の平均流量は濾過面積1m2当たり1リットル/分であった。また、濾過開始から100分後の濾過速度は濾過面積1m2当たり0.4リットル/分に低下した。
Claims (10)
- 珪酸アルカリ水溶液のシリカ濃度を0.5~10.0質量%に調整し、これを1次粒子径1.0μmの粒子の除去率が50%以上であるフィルターで濾過することを特徴とする、以下の条件(1)を満たす精製された珪酸アルカリ水溶液の製造方法:
(1)下記測定方法Aに従い計測された、一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量が0~30%。
該測定方法Aは、シリカ濃度を4質量%に調整した25℃の珪酸アルカリ水溶液30mLを絶対孔径0.4μmのメンブレン型フィルター(濾過面積4.90cm2)で濾過した後、該メンブレン型フィルターを走査型電子顕微鏡で5000倍に拡大して観察したとき、縦15μm、横20μmの長方形の観察域を1視野として、この1視野に上記平板状の微小粒子が1つ以上存在したときを1カウントとし、互いに重ならない100視野の総てについてカウントの有無を決定し、得られたカウント総数を該平板状の微小粒子の存在量(%)とする方法である。 - 前記除去率が60%以上である請求項1に記載の製造方法。
- 前記除去率が70%以上である請求項1に記載の製造方法。
- 前記除去率が80%以上である請求項1に記載の製造方法。
- 前記除去率が90%以上である請求項1に記載の製造方法。
- 前記フィルターが、メンブレン型フィルター、プリーツ型フィルター、デプス型フィルター、糸巻き型フィルター、サーフェース型フィルター、ロール型フィルター、デプスプリーツ型フィルター、珪藻土含有型フィルターからなる群から選ばれる少なくとも1種である請求項1乃至請求項5のいずれか一項に記載の製造方法。
- 前記フィルターが、絶対孔径0.3~3.0μmのメンブレン型フィルターである請求項1乃至請求項5のいずれか一項に記載の製造方法。
- 前記珪酸アルカリ水溶液のアルカリ成分が、ナトリウムイオン、カリウムイオン、リチウムイオン、ルビジウムイオン及びセシウムイオンからなる群から選ばれる少なくとも1種である請求項1乃至請求項7のいずれか一項に記載の製造方法。
- 請求項1乃至請求項8のいずれか一項で得られる精製された珪酸アルカリ水溶液を陽イオン交換して活性珪酸液を得た後、アルカリ性水溶液中に該活性珪酸液を添加し、加熱して、活性珪酸を重合することを特徴とする、以下の条件(2)を満たすシリカゾルの製造方法:
(2)請求項1に記載の測定方法Aに従い計測された、一辺の長さが0.2~4.0μm、厚さが1~100nmの平板状の微小粒子の存在量が0~30%。 - 前記アルカリ性水溶液のアルカリ成分が、アルカリ金属イオン、アンモニウムイオン、アミン化合物及び第4級アンモニウムイオンからなる群から選ばれる少なくとも1種である請求項9に記載のシリカゾルの製造方法。
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JP6792206B2 (ja) * | 2015-10-20 | 2020-11-25 | 日産化学株式会社 | 精製された珪酸水溶液の製造方法 |
CN106447021A (zh) * | 2016-09-26 | 2017-02-22 | 中国水产科学研究院淡水渔业研究中心 | 一种对角线式浮游植物计数方法 |
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