WO2013035328A1 - インライン型蒸着装置 - Google Patents
インライン型蒸着装置 Download PDFInfo
- Publication number
- WO2013035328A1 WO2013035328A1 PCT/JP2012/005651 JP2012005651W WO2013035328A1 WO 2013035328 A1 WO2013035328 A1 WO 2013035328A1 JP 2012005651 W JP2012005651 W JP 2012005651W WO 2013035328 A1 WO2013035328 A1 WO 2013035328A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vapor deposition
- plate
- radiant heat
- diffusion plate
- cylindrical body
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Definitions
- the cylindrical body 4 has an opening 41 at the upper end, and the deposition target body 2 is disposed so as to face the opening 41.
- the correction plate 5 is disposed in the opening 41.
- the evaporation source 3 is disposed at the lower end of the cylindrical body 4, and the portion where the evaporation source 3 is not disposed forms the bottom 42 of the cylindrical body 4.
- a cylindrical body heater (hereinafter referred to as a heater 43) composed of a sheathed heater or the like is wound around the outer peripheral surface of the cylindrical body 4.
- the heater 43 is connected to the power source 44 and receives power to heat the inside of the cylindrical body 4.
- the half-moon shaped diffusion plate pair 60 when the deposition target 2 is moved at a constant speed, the time required for the central portion along the transport direction of the deposition target 2 to pass through the opening 41 is shortened. The time for both end portions of the vapor-deposited body 2 orthogonal to the direction to pass through the opening 41 becomes longer.
- the opening 41 has a higher concentration of the vapor deposition material 32 vaporized toward the center side. Therefore, when in-line deposition is performed in a state where the opening 41 is not obstructed, the deposition density at the center of the deposition target 2 is high. Thus, the film thickness of the vapor deposition film formed in this portion is increased.
- the diffusion plate pair 60 described above it is possible to suppress the vapor deposition density in the central portion of the vapor deposition target body 2 and make the film thickness of the vapor deposition film uniform as the vapor deposition target body 2 as a whole.
- the temperature of the correction plate 5 of each vapor deposition apparatus 1 is 80 ° C. higher than the sublimation temperature of the vapor deposition material 32, like the cylindrical body 4 in contact therewith.
- the temperature of the diffusion plate 6 was about 100 to 200 ° C.
- the deposition target 2 is continuously conveyed to the plurality of deposition apparatuses 1 in the in-line deposition process, so that the temperature of the deposition target 2 is suppressed to 60 ° C. or less while receiving heat from each deposition apparatus 1. It was.
- the temperature of the vapor-deposited body 2 reached 100 ° C.
- the vapor deposition apparatus 1 is not restricted to the organic EL element 102 of the structure mentioned above.
- the configuration of the illustrated example is a two-stage configuration in which an intermediate layer is interposed between a plurality of light-emitting layers, but may be a single-stage configuration or a three-stage configuration or more.
- the material which comprises each organic layer is not restricted to the material mentioned above, Arbitrary materials which can be used for vapor deposition can be used.
- the radiant heat from the evaporation source 3 and the cylindrical body 4 increases as the distance from these sources increases. Therefore, if a relatively large diffusion plate 6 is provided on the side close to the evaporation source 3 and the cylindrical body 4, even if the diffusion plate 6 provided on the deposition target 2 side is small, the deposition target 2. Temperature rise can be suppressed. Further, if the small diffusion plate 6 on the deposition target 2 side is arranged above the peripheral edge of the correction plate 5, each diffusion plate 6 spreads in a stepped manner from the correction plate 5 side to the deposition target 2 side, and an opening portion. The vapor deposition material 32 released from 41 diffuses radially. As a result, the vapor deposition concentration of the vapor deposition material 32 deposited on the vapor-deposited body 2 can be made uniform.
- this cooling device 8 since the diffusion plate 6 is cooled by the cooling device 8, the radiant heat from the evaporation source 3 or the like is less easily transmitted to the vapor deposition target 2, and the temperature rise of the vapor deposition target 2 is reliably suppressed. be able to.
- this cooling device 8 may be provided not only in the downstream of the conveyance direction of the to-be-deposited body 2, but upstream, and may be provided in both.
- the cooling device 8 is not limited to the above-described water cooling mechanism, and may be, for example, an electric cooling device using a compressor, refrigerant gas, or the like.
- the cooling plate 9 is made of a material having a thermal diffusibility equal to or higher than that of the diffusion plate 6 and discharges heat from the diffusion plate 6.
- the cooling plate 9 is disposed on both the upstream side and the downstream side in the transport direction of the deposition target 2 so as to sandwich the upper and lower sides of the transport path of the deposition target 2.
- the temperature of the diffusion plate 6 is lowered, and the temperature rise of the deposition target 2 can be further suppressed.
- the surface area of the diffusion plate 6 is increased by the extending portion 61, the heat of the diffusion plate 6 can be efficiently transferred to the cooling plate 9.
- region 6a is a part close
- the correction plate 5 has an opening extending portion 51 that extends from the opening side end of the correction plate 5 in the direction of the deposition target 2.
- the opening extending portion 51 can suppress the deposition material 32 from adhering to the diffusion plate 6.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
2 被蒸着体
3 蒸発源
32 蒸着材料
4 筒状体
41 開口部
5 補正板
51 開口延伸部
6 拡散板(輻射熱拡散板)
6a 鏡面領域
6b 粗面領域
60 拡散板対
61 延伸部
8 冷却装置
80 ポンプ(水冷機構)
81 水冷配管(水冷機構)
9 冷却板
91 接続部
Claims (13)
- 被蒸着体に蒸着される蒸着材料を蒸発させる蒸発源と、前記蒸発源及び前記被蒸着体の間の空間を囲い、前記被蒸着体側に開口部を有する筒状体と、前記筒状体の開口部近傍に設けられて前記筒状体から放射される前記蒸着材料の量を制御する補正板と、を備え、
前記補正板より前記被蒸着体側に、輻射熱拡散板を設けたことを特徴とするインライン型蒸着装置。 - 前記輻射熱拡散板は、冷却装置を有することを特徴とする請求項1に記載のインライン型蒸着装置。
- 前記冷却装置は、水冷機構であることを特徴とする請求項2に記載のインライン型蒸着装置。
- 前記輻射熱拡散板を複数備え、
該複数の輻射熱拡散板は、上面視において重複した部分を有することを特徴とする請求項1乃至請求項3のいずれか一項に記載のインライン型蒸着装置。 - 前記複数の輻射熱拡散板が、前記被蒸着体の搬送方向の上流側と下流側に同一平面上に離間して配置されて拡散板対を形成することを特徴とする請求項4に記載のインライン型蒸着装置
- 前記拡散板対が複数個積層され、
前記被蒸着体側の拡散板対の離間距離が、前記蒸発源側の拡散板対の離間距離より大きいことを特徴とする請求項5に記載のインライン型蒸着装置。 - 前記輻射熱拡散板は、前記筒状体の開口部の周縁よりも外方へ延伸された延伸部を有することを特徴とする請求項1乃至請求項6のいずれか一項に記載のインライン型蒸着装置。
- 前記輻射熱拡散板の延伸部と平面視において重複する位置に設けられた冷却板を更に備え、
前記冷却板は、前記輻射熱拡散板からの輻射熱を排出することを特徴とする請求項7に記載のインライン型蒸着装置。 - 前記冷却板は、前記輻射熱拡散板と接続される接続部を有し、
前記接続部は、前記輻射熱拡散板から前記冷却板へ熱を伝導することを特徴とする請求項8に記載のインライン型蒸着装置。 - 前記冷却板は、前記輻射熱拡散板より前記蒸着源側に形成されていることを特徴とする請求項8又は請求項9に記載のインライン型蒸着装置。
- 前記輻射熱拡散板は、前記筒状体と平面視において重複する位置に鏡面化処理が施された鏡面領域を有することを特徴とする請求項8乃至請求項10のいずれか一項に記載のインライン型蒸着装置。
- 前記輻射熱拡散板は、前記冷却板と平面視において重複する位置に粗面化処理が施された粗面領域を有することを特徴とする請求項8乃至請求項11のいずれか一項に記載のインライン型蒸着装置。
- 前記補正板は、該補正板の開口部側端部から前記被蒸着体方向に延伸された開口延伸部を有することを特徴とする請求項1乃至請求項12のいずれか一項に記載のインライン型蒸着装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147002113A KR20140029529A (ko) | 2011-09-06 | 2012-09-06 | 인라인형 증착 장치 |
CN201280039982.4A CN103732787A (zh) | 2011-09-06 | 2012-09-06 | 连续式蒸镀装置 |
JP2013532452A JP5796168B2 (ja) | 2011-09-06 | 2012-09-06 | インライン型蒸着装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-194294 | 2011-09-06 | ||
JP2011194294 | 2011-09-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013035328A1 true WO2013035328A1 (ja) | 2013-03-14 |
Family
ID=47831798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2012/005651 WO2013035328A1 (ja) | 2011-09-06 | 2012-09-06 | インライン型蒸着装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5796168B2 (ja) |
KR (1) | KR20140029529A (ja) |
CN (1) | CN103732787A (ja) |
TW (1) | TWI464288B (ja) |
WO (1) | WO2013035328A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015120943A (ja) * | 2013-12-20 | 2015-07-02 | パナソニックIpマネジメント株式会社 | 蒸着方法及び蒸着装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104278239A (zh) * | 2014-10-31 | 2015-01-14 | 京东方科技集团股份有限公司 | 蒸镀坩埚装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004158337A (ja) * | 2002-11-07 | 2004-06-03 | Sony Corp | 蒸着装置 |
JP2004214185A (ja) * | 2002-12-19 | 2004-07-29 | Sony Corp | 蒸着装置および有機エレクトロルミネッセンス素子の製造方法 |
JP2004238663A (ja) * | 2003-02-05 | 2004-08-26 | Sony Corp | 蒸着装置 |
JP2011017059A (ja) * | 2009-07-10 | 2011-01-27 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4160381B2 (ja) * | 2002-12-27 | 2008-10-01 | ローム株式会社 | 音声出力装置を有する電子装置 |
US20100126417A1 (en) * | 2007-03-30 | 2010-05-27 | Tokyo Electron Limited | Deposition source unit, deposition apparatus and temperature controller of deposition source unit |
-
2012
- 2012-09-06 WO PCT/JP2012/005651 patent/WO2013035328A1/ja active Application Filing
- 2012-09-06 JP JP2013532452A patent/JP5796168B2/ja not_active Expired - Fee Related
- 2012-09-06 TW TW101132570A patent/TWI464288B/zh not_active IP Right Cessation
- 2012-09-06 CN CN201280039982.4A patent/CN103732787A/zh active Pending
- 2012-09-06 KR KR1020147002113A patent/KR20140029529A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004158337A (ja) * | 2002-11-07 | 2004-06-03 | Sony Corp | 蒸着装置 |
JP2004214185A (ja) * | 2002-12-19 | 2004-07-29 | Sony Corp | 蒸着装置および有機エレクトロルミネッセンス素子の製造方法 |
JP2004238663A (ja) * | 2003-02-05 | 2004-08-26 | Sony Corp | 蒸着装置 |
JP2011017059A (ja) * | 2009-07-10 | 2011-01-27 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015120943A (ja) * | 2013-12-20 | 2015-07-02 | パナソニックIpマネジメント株式会社 | 蒸着方法及び蒸着装置 |
Also Published As
Publication number | Publication date |
---|---|
JP5796168B2 (ja) | 2015-10-21 |
TW201326439A (zh) | 2013-07-01 |
JPWO2013035328A1 (ja) | 2015-03-23 |
CN103732787A (zh) | 2014-04-16 |
TWI464288B (zh) | 2014-12-11 |
KR20140029529A (ko) | 2014-03-10 |
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