WO2013031692A1 - 研磨パッド - Google Patents
研磨パッド Download PDFInfo
- Publication number
- WO2013031692A1 WO2013031692A1 PCT/JP2012/071472 JP2012071472W WO2013031692A1 WO 2013031692 A1 WO2013031692 A1 WO 2013031692A1 JP 2012071472 W JP2012071472 W JP 2012071472W WO 2013031692 A1 WO2013031692 A1 WO 2013031692A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polishing
- region
- light transmission
- polishing pad
- support film
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Definitions
- the present invention relates to a polishing pad for use in planarizing unevenness on a surface of an object to be polished such as a semiconductor wafer by chemical mechanical polishing (CMP), and more specifically, a window for detecting a polishing state or the like by optical means.
- CMP chemical mechanical polishing
- the present invention relates to a polishing pad having (light transmission region) and a method for manufacturing a semiconductor device using the polishing pad.
- a conductive film is formed on the surface of a semiconductor wafer (hereinafter also referred to as a wafer), and a wiring layer is formed by photolithography, etching, or the like.
- a process for forming an interlayer insulating film is performed on the surface of the wafer, and these processes cause irregularities made of a conductor such as metal or an insulator on the wafer surface.
- miniaturization of wiring and multilayer wiring have been advanced for the purpose of increasing the density of semiconductor integrated circuits, and along with this, technology for flattening the irregularities on the wafer surface has become important.
- CMP is a technique of polishing using a slurry-like abrasive (hereinafter referred to as slurry) in which abrasive grains are dispersed in a state where the surface to be polished of a wafer is pressed against the polishing surface of a polishing pad.
- slurry a slurry-like abrasive
- a polishing apparatus generally used in CMP includes a polishing surface plate 2 that supports a polishing pad 1 and a support base (polishing head) 5 that supports an object to be polished (wafer or the like) 4. And a backing material for uniformly pressing the wafer and a supply mechanism for the abrasive 3.
- the polishing pad 1 is attached to the polishing surface plate 2 by attaching it with a double-sided tape, for example.
- the polishing surface plate 2 and the support base 5 are disposed so that the polishing pad 1 and the object to be polished 4 supported on each of the polishing surface plate 2 and the support base 5 are opposed to each other, and are provided with rotating shafts 6 and 7 respectively. Further, a pressing mechanism for pressing the object to be polished 4 against the polishing pad 1 is provided on the support base 5 side.
- the optical detection means is a method of detecting an end point of polishing by irradiating a wafer with a light beam through a window (light transmission region) through a polishing pad and monitoring an interference signal generated by the reflection. It is.
- the end point is determined by monitoring the change in the thickness of the surface layer of the wafer and knowing the approximate depth of the surface irregularities. When such a change in thickness becomes equal to the depth of the unevenness, the CMP process is terminated.
- Various methods have been proposed for the polishing end point detection method using such optical means and the polishing pad used in the method.
- Patent Documents 1 and 2 proposals for preventing the slurry from leaking out from the boundary (seam) between the polishing region and the light transmission region have also been made.
- Patent Document 3 a method of disposing a transparent film having an adhesive applied on the upper and lower surfaces between an upper layer pad and a lower layer pad is disclosed (Patent Document 3).
- Patent Document 3 a method of disposing a transparent film having an adhesive applied on the upper and lower surfaces between an upper layer pad and a lower layer pad.
- a polishing layer and a porous subpad layer are laminated, and a light transmissive window is provided in an internal opening of the polishing layer and the porous subpad layer.
- a polishing pad is disclosed in which a pressure sensitive adhesive layer is bonded to the lower surface of the layer and the light transmissive window (Patent Document 4).
- Patent Document 4 if there is a pressure sensitive adhesive layer on the lower surface of the light transmissive window, the same problem as described above occurs.
- An object of the present invention is to provide a polishing pad that can prevent slurry leakage and is excellent in optical detection accuracy.
- the present inventor has found that the above object can be achieved by the polishing pad shown below, and has completed the present invention.
- the present invention provides a polishing pad in which a polishing region, a cushion layer, and a support film are laminated in this order.
- a light transmission region is provided in the opening through the polishing region and the cushion layer and on the support film, and the light transmission region has a peripheral portion and a recessed portion on the surface on the polishing surface plate side,
- the present invention relates to a polishing pad in which a support film is laminated on a peripheral portion, and the support film is not laminated on the indented portion but is opened.
- a covering member is provided on the side surface of the recess. Moreover, it is preferable that the said covering member is formed by bending the edge part of the support film laminated
- the present invention also relates to a method for manufacturing a semiconductor device including a step of polishing a surface of a semiconductor wafer using the polishing pad.
- the polishing pad of the present invention has a structure in which a support film is laminated on the peripheral surface provided on the polishing platen side surface of the light transmission region and the polishing platen side surface of the cushion layer. Even if the slurry leaks from the boundary and the boundary between the cushion layer and the light transmission region, the support film can prevent the slurry from leaking.
- a concave portion is provided on the surface of the polishing platen side of the light transmission region, and the concave portion is not laminated with an adhesive layer and a member such as a film. The decrease can be prevented, thereby improving the optical detection accuracy.
- the optical detection device can be protruded from the surface of the polishing platen and can be brought close to the recessed portion of the light transmission region. Thereby, since the distance between the object to be polished (wafer) and the optical detection device can be shortened, the optical detection accuracy can be further improved.
- FIG. 2 is a schematic sectional view showing an example of the structure of the polishing pad of the present invention.
- the polishing pad 1 of the present invention has a polishing region 8, a cushion layer 11, and a support film 12 laminated in this order, and is supported in the opening 10 penetrating the polishing region 8 and the cushion layer 11.
- a light transmission region 9 is provided on the film 12.
- the light transmission region 9 has a peripheral portion 13 and a concave portion 14 on the surface of the polishing surface plate side, and a support film 12 is laminated on the peripheral portion 13, and the support film 12 is provided on the concave portion 14. Are not stacked and open.
- the material for forming the light transmission region 9 is not particularly limited, but a material that enables high-precision optical end point detection in the state of polishing and has a light transmittance of 20% or more over the entire wavelength range of 400 to 700 nm is used. It is preferable that the material has a light transmittance of 50% or more.
- Such materials include polyurethane resins, polyester resins, phenol resins, urea resins, melamine resins, epoxy resins, and acrylic resins, and other thermosetting resins, polyurethane resins, polyester resins, polyamide resins, cellulose resins, Acrylic resins, polycarbonate resins, halogen resins (polyvinyl chloride, polytetrafluoroethylene, polyvinylidene fluoride, etc.), polystyrene, olefin resins (polyethylene, polypropylene, etc.), thermoplastic resins, butadiene rubber, isoprene rubber, etc. Examples thereof include rubber, photo-curing resin that is cured by light such as ultraviolet rays and electron beams, and photosensitive resin. These resins may be used alone or in combination of two or more.
- the material used for the light transmission region 9 is preferably the same as or larger than the material used for the polishing region 8.
- Grindability refers to the degree to which a workpiece or dresser is shaved during polishing. In such a case, the light transmission region 9 does not protrude from the surface of the polishing region 8, and scratches on the object to be polished and dechucking errors during polishing can be prevented.
- polishing region 8 it is preferable to use a material used for forming the polishing region 8 or a material similar to the physical properties of the polishing region 8.
- a highly wear-resistant polyurethane resin that can suppress light scattering in the light transmission region 9 due to dressing marks during polishing is desirable.
- the polyurethane resin comprises an isocyanate component, a polyol component (high molecular weight polyol, low molecular weight polyol, etc.), and a chain extender.
- isocyanate component 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, 2,2′-diphenylmethane diisocyanate, 2,4′-diphenylmethane diisocyanate, 4,4′-diphenylmethane diisocyanate, 1,5-naphthalene diisocyanate,
- examples include p-phenylene diisocyanate, m-phenylene diisocyanate, p-xylylene diisocyanate, m-xylylene diisocyanate, hexamethylene diisocyanate, 1,4-cyclohexane diisocyanate, 4,4′-dicyclohexylmethane diisocyanate, isophorone diisocyanate, and the like. . These may be used alone or in combination of two or more.
- the high molecular weight polyol examples include a polyether polyol typified by polytetramethylene ether glycol, a polyester polyol typified by polybutylene adipate, a polycaprolactone polyol, a reaction product of a polyester glycol such as polycaprolactone and an alkylene carbonate, and the like.
- a polyether polyol typified by polytetramethylene ether glycol
- a polyester polyol typified by polybutylene adipate a polycaprolactone polyol
- a reaction product of a polyester glycol such as polycaprolactone and an alkylene carbonate
- Exemplified polyester polycarbonate polyol, polyester polycarbonate polyol obtained by reacting ethylene carbonate with polyhydric alcohol and then reacting the obtained reaction mixture with organic dicarboxylic acid, and polycarbonate obtained by transesterification reaction between polyhydroxyl compound and aryl carbonate A polyol etc. are mentioned.
- chain extenders include ethylene glycol, 1,2-propylene glycol, 1,3-propylene glycol, 1,4-butanediol, 1,6-hexanediol, neopentyl glycol, 1,4-cyclohexanedimethanol, 3 -Low molecular weight polyols such as methyl-1,5-pentanediol, diethylene glycol, triethylene glycol, 1,4-bis (2-hydroxyethoxy) benzene, or 2,4-toluenediamine, 2,6-toluenediamine, 3, 5 -diethyl-2, 4 -toluenediamine, 4,4'-di-sec-butyl-diaminodiphenylmethane, 4,4'-diaminodiphenylmethane, 3,3'-dichloro-4,4'-diaminodiphenylmethane, 2,2 ', 3,3'-tetrachloro
- polyamines are often colored themselves or resins formed using these are colored in many cases, it is preferable to blend them so as not to impair the physical properties and light transmittance.
- a compound having an aromatic hydrocarbon group when used, the light transmittance on the short wavelength side tends to be lowered. Therefore, it is particularly preferable not to use such a compound.
- a compound in which an electron donating group such as a halogen group or a thio group or an electron withdrawing group is bonded to an aromatic ring or the like tends to decrease the light transmittance. Therefore, such a compound may not be used. Particularly preferred. However, you may mix
- the ratio of the isocyanate component, the polyol component, and the chain extender in the polyurethane resin can be appropriately changed depending on the molecular weight of each and the desired physical properties of the light transmission region produced therefrom.
- the number of isocyanate groups of the organic isocyanate relative to the total number of functional groups (hydroxyl group + amino group) of the polyol and the chain extender is preferably 0.95 to 1.15, more preferably 0.99 to 1.10.
- the polyurethane resin can be manufactured by applying a known urethanization technique such as a melting method or a solution method, but it is preferable to manufacture the polyurethane resin by a melting method in consideration of cost, working environment, and the like.
- the polymerization procedure of the polyurethane resin either a prepolymer method or a one-shot method is possible.
- an isocyanate-terminated prepolymer from an organic isocyanate and a polyol in advance. Is preferably synthesized, and a prepolymer method in which a chain extender is reacted with this is preferred.
- the NCO wt% of the prepolymer is preferably about 2 to 8 wt%, more preferably about 3 to 7 wt%. If the NCO wt% is less than 2 wt%, the reaction curing tends to take too much time and the productivity tends to decrease.
- the reaction rate becomes too fast.
- air entrainment or the like occurs, and physical properties such as transparency and light transmittance of the polyurethane resin tend to deteriorate.
- the attenuation of the reflected light increases due to light scattering, and the polishing end point detection accuracy and the film thickness measurement accuracy tend to decrease. Therefore, in order to remove such bubbles and make the light transmission region non-foamed, it is preferable to sufficiently remove the gas contained in the material by reducing the pressure to 10 Torr or less before mixing the material. .
- the stirring process after mixing in the case of the stirring blade type mixer normally used, it is preferable to stir at the rotation speed of 100 rpm or less so that bubbles may not mix.
- the stirring step is preferably performed under reduced pressure.
- the rotation and revolution type mixer is difficult to mix bubbles even at high rotation, it is also preferable to perform stirring and defoaming using the mixer.
- the production method of the light transmission region 9 is not particularly limited and can be produced by a known method.
- a polyurethane resin block produced by the above method has a predetermined thickness using a band saw type or canna type slicer, a method of pouring the resin into a mold having a cavity of a predetermined thickness, an injection molding method, A method using a coating technique or a sheet forming technique is used.
- the light transmission region 9 has a peripheral portion 13 and a recessed portion 14 on one side.
- the method for forming the recessed portion 14 is not particularly limited.
- the light transmitting region having the recessed portion is directly formed by a method of cutting the surface of the light transmitting region manufactured by the above method, an injection molding method, or a casting method. The method of producing etc. are mentioned.
- the shape and size of the light transmission region 9 are not particularly limited, it is preferable to have the same shape and size as the polishing region 8 and the opening 10 of the cushion layer 11. When producing a long polishing pad, a long light transmission region may be used.
- the shape and size of the peripheral portion 13 and the recessed portion 14 can be appropriately adjusted in consideration of the shape and size of the light transmission region 9, but the light transmission region 9 is fixed on the support film 12 by the peripheral portion 13. Therefore, the width of the peripheral portion 13 is preferably 1 mm or more.
- the thickness of the light transmission region 9 is not particularly limited, but it is preferable to adjust the thickness to be equal to or less than the surface of the polishing region 8 when it is provided in the opening 10.
- the wafer may be damaged by the protruding portion during polishing.
- the difference in height between the surface of the polishing region 8 and the surface of the light transmission region 9 is preferably 500 ⁇ m or less.
- the depth of the recess 14 is not particularly limited, but is preferably equal to or less than the thickness of the cushion layer 11 in order to make the life of the light transmission region 9 equal to the life of the polishing region 8.
- the surface roughness Ra of the recessed portion 14 is preferably 10 ⁇ m or less in order to suppress irregular reflection of light.
- the Asker D hardness of the light transmission region 9 is preferably 30 to 60 degrees. By using the light transmission region having the hardness, the generation of scratches on the wafer surface and the deformation of the light transmission region can be suppressed. In addition, it is possible to suppress the occurrence of scratches on the surface of the light transmission region, thereby enabling highly accurate optical end point detection to be performed stably.
- the Asker D hardness in the light transmission region is preferably 30 to 50 degrees.
- the surface on the polishing surface side of the light transmission region 9 and the surface of the recessed portion 14 may be subjected to roughening treatment in advance. Thereby, the change of the light transmittance of the light transmissive region at the time of use can be suppressed, and when the end point is detected by the program corresponding to the initial light transmittance (light reflectance), from the initial use to the end of the use of the polishing pad, It is possible to prevent an end point detection error from occurring due to a change in light transmittance.
- Examples of roughening methods include 1) a method of performing sandblasting, embossing (embossing), etching, corona discharge, or laser irradiation on one surface of a resin sheet, and 2) a textured mold. 3) A method of forming a pattern on one side when extruding a resin sheet, 4) A resin roll using a metal roll, a rubber roll or an embossing roll having a predetermined surface shape. Examples thereof include a method of forming a pattern on one side, and 5) a method of buffing using an abrasive such as sandpaper.
- Examples of the material for forming the polishing region 8 include polyurethane resin, polyester resin, polyamide resin, acrylic resin, polycarbonate resin, halogen-based resin (polyvinyl chloride, polytetrafluoroethylene, polyvinylidene fluoride, etc.), polystyrene, and olefin resin. (Polyethylene, polypropylene, etc.), epoxy resin, photosensitive resin, and the like. These may be used alone or in combination of two or more.
- the material for forming the polishing region may be the same or different from that of the light transmission region, but it is preferable to use the same type of material as that used for the light transmission region.
- Polyurethane resin is a particularly preferable material as a material for forming a polishing region because it has excellent abrasion resistance and a polymer having desired physical properties can be easily obtained by variously changing the raw material composition.
- the isocyanate component to be used is not particularly limited, and examples thereof include the isocyanate component.
- the high molecular weight polyol to be used is not particularly limited, and examples thereof include the high molecular weight polyol.
- the number average molecular weight of these high molecular weight polyols is not particularly limited, but is preferably 500 to 2000 from the viewpoint of the elastic properties of the resulting polyurethane. If the number average molecular weight is less than 500, a polyurethane using the number average molecular weight does not have sufficient elastic properties and becomes a brittle polymer. For this reason, the polishing region produced from this polyurethane becomes too hard, which causes scratches on the wafer surface. Moreover, since it becomes easy to wear, it is not preferable from the viewpoint of the pad life. On the other hand, when the number average molecular weight exceeds 2,000, polyurethane using this is too soft, and the polishing region produced from this polyurethane tends to have poor planarization characteristics.
- the low molecular weight polyol in addition to the high molecular weight polyol, the low molecular weight polyol can be used in combination.
- chain extenders examples include 4,4′-methylenebis (o-chloroaniline) (MOCA), 2,6-dichloro-p-phenylenediamine, 4,4′-methylenebis (2,3-dichloroaniline), 3, 5-bis (methylthio) -2,4-toluenediamine, 3,5-bis (methylthio) -2,6-toluenediamine, 3,5-diethyltoluene-2,4-diamine, 3,5-diethyltoluene- 2,6-diamine, trimethylene glycol-di-p-aminobenzoate, polytetramethylene oxide-di-p-aminobenzoate, 1,2-bis (2-aminophenylthio) ethane, 4,4′-diamino- 3,3′-diethyl-5,5′-dimethyldiphenylmethane, N, N′-di-sec-butyl-4,4′-diaminodipheny
- the ratio of the isocyanate component, the polyol component, and the chain extender in the polyurethane resin can be variously changed depending on the molecular weight of each and the desired physical properties of the polishing region produced therefrom.
- the number of isocyanate groups in the isocyanate component relative to the total number of functional groups (hydroxyl group + amino group) of the polyol component and the chain extender is preferably 0.95 to 1.15. Preferably it is 0.99 to 1.10.
- the polyurethane resin can be produced by the same method as described above.
- stabilizers such as antioxidants, surfactants, lubricants, pigments, solid beads, fillers such as water-soluble particles and emulsion particles, antistatic agents, abrasive grains, and other materials as necessary. Additives may be added.
- the polishing region is preferably a fine foam.
- a fine foam By using a fine foam, the slurry can be held in the fine pores on the surface, and the polishing rate can be increased.
- the method of finely foaming the polyurethane resin is not particularly limited, and examples thereof include a method of adding hollow beads, a method of foaming by a mechanical foaming method, a chemical foaming method, and the like.
- the mechanical foaming method using the silicon type surfactant which is a copolymer of polyalkylsiloxane and polyether is especially preferable.
- the silicon-based surfactant SH-192, L-5340 (manufactured by Toray Dow Corning Silicon) and the like are exemplified as suitable compounds.
- the manufacturing method of this polyurethane foam has the following processes. 1) Foaming process for producing a cell dispersion of isocyanate-terminated prepolymer A silicon-based surfactant is added to the isocyanate-terminated prepolymer (first component), and the mixture is stirred in the presence of a non-reactive gas to remove the non-reactive gas. Disperse as fine bubbles to obtain a cell dispersion. When the prepolymer is solid at normal temperature, it is preheated to an appropriate temperature and melted before use.
- non-reactive gas used to form the fine bubbles non-flammable gases are preferable, and specific examples include nitrogen, oxygen, carbon dioxide, rare gases such as helium and argon, and mixed gases thereof.
- nitrogen, oxygen, carbon dioxide, rare gases such as helium and argon, and mixed gases thereof are preferable.
- air that has been dried to remove moisture is most preferable in terms of cost.
- a stirring device for making non-reactive gas into fine bubbles and dispersing it in an isocyanate-terminated prepolymer containing a silicon-based surfactant a known stirring device can be used without particular limitation. Specifically, a homogenizer, a dissolver, A two-axis planetary mixer (planetary mixer) is exemplified.
- the shape of the stirring blade of the stirring device is not particularly limited, but it is preferable to use a whipper-type stirring blade because fine bubbles can be obtained.
- stirring in the mixing step may not be stirring that forms bubbles, and it is preferable to use a stirring device that does not involve large bubbles.
- a planetary mixer is suitable. There is no problem even if the same stirring device is used as the stirring device for the stirring step and the mixing step, and it is also preferable to adjust the stirring conditions such as adjusting the rotation speed of the stirring blade as necessary. .
- the foam reaction solution may be poured into the mold and immediately put into a heating oven for post cure, and heat is not immediately transferred to the reaction components under such conditions, so the bubble size does not increase.
- the curing reaction is preferably performed at normal pressure because the bubble shape is stable.
- a catalyst that promotes a known polyurethane reaction such as a tertiary amine type or an organic tin type may be used.
- the type and addition amount of the catalyst are selected in consideration of the flow time for pouring into a mold having a predetermined shape after the mixing step.
- the polyurethane foam may be produced by a batch method in which each component is metered into a container and stirred, and each component and a non-reactive gas are continuously supplied to the stirring device and stirred to produce bubbles. It may be a continuous production method in which a dispersion is sent out to produce a molded product.
- the average cell diameter of the polyurethane foam is preferably 30 to 80 ⁇ m, more preferably 30 to 60 ⁇ m. When deviating from this range, the polishing rate tends to decrease, or the planarity of the polished material (wafer) after polishing tends to decrease.
- the specific gravity of the polyurethane foam is preferably 0.5 to 1.3.
- the specific gravity is less than 0.5, the surface strength of the polishing region decreases, and the planarity of the material to be polished tends to decrease.
- the ratio is larger than 1.3, the number of bubbles on the surface of the polishing region decreases, and planarity is good, but the polishing rate tends to decrease.
- the hardness of the polyurethane foam is preferably 45 to 70 degrees as measured by an Asker D hardness meter.
- Asker D hardness is less than 45 degrees, the planarity of the material to be polished is lowered.
- Asker D hardness is more than 70 degrees, the planarity is good but the uniformity of the material to be polished is lowered. There is a tendency.
- the polishing region 8 is manufactured by cutting the polyurethane foam produced as described above into a predetermined size.
- the polishing region 8 is preferably provided with a concavo-convex structure (grooves or holes) for holding and renewing the slurry on the polishing side surface in contact with the wafer.
- a concavo-convex structure grooves or holes
- the polishing region is formed of fine foam, it has many openings on the polishing surface and has the function of holding the slurry, but in order to more efficiently maintain the slurry and renew the slurry.
- the concavo-convex structure is not particularly limited as long as it is a surface shape that holds and renews slurry.
- XY lattice grooves For example, XY lattice grooves, concentric grooves, through holes, non-through holes, polygonal columns, cylinders, spiral grooves , Eccentric circular grooves, radial grooves, and combinations of these grooves.
- the groove pitch, groove width, groove depth and the like are not particularly limited and are appropriately selected and formed.
- these uneven structures are generally regular, but in order to make the slurry retention and renewability desirable, the groove pitch, groove width, groove depth, etc. should be changed for each range. Is also possible.
- the thickness of the polishing region 8 is not particularly limited, but is usually about 0.8 to 4 mm, preferably 1.5 to 2.5 mm.
- a method of producing the polishing region of the thickness a method of making the block of the fine foam a predetermined thickness using a band saw type or a canna type slicer, pouring resin into a mold having a cavity of a predetermined thickness, and curing And a method using a coating technique or a sheet forming technique.
- the cushion layer 11 supplements the characteristics of the polishing region.
- the cushion layer is necessary in order to achieve both planarity and uniformity in a trade-off relationship in CMP.
- Planarity refers to the flatness of a pattern portion when a polished object with minute irregularities generated during pattern formation is polished, and uniformity refers to the uniformity of the entire object to be polished.
- the planarity is improved by the characteristics of the polishing region, and the uniformity is improved by the characteristics of the cushion layer.
- the material for forming the cushion layer 11 is not particularly limited.
- a fiber nonwoven fabric such as a polyester nonwoven fabric, a nylon nonwoven fabric, and an acrylic nonwoven fabric
- a resin-impregnated nonwoven fabric such as a polyester nonwoven fabric impregnated with polyurethane
- a polymer resin such as polyurethane foam and polyethylene foam
- rubber resins such as foam, butadiene rubber and isoprene rubber, and photosensitive resins.
- the support film 12 is provided with an adhesive layer on one side or both sides of a resin film.
- the resin film material include polyesters such as polyethylene terephthalate, polyethylene, polypropylene, polystyrene, polyimide, polyvinyl alcohol, polyvinyl chloride, fluorine-containing resins such as polyfluoroethylene, nylon, cellulose, and general-purpose engineering plastics such as polycarbonate; Special engineering plastics such as polyetherimide, polyetheretherketone, and polyethersulfone can be mentioned.
- the composition of the adhesive layer include rubber adhesives and acrylic adhesives.
- the adhesive layer is provided to bond the support film 12 to the cushion layer 11 or the polishing surface plate 2 and to bond the peripheral portion 13 of the light transmission region 9 to the support film 12.
- the thickness of the resin film is not particularly limited, but is preferably about 20 to 200 ⁇ m from the viewpoint of strength and the like.
- the manufacturing method of the polishing pad 1 of the present invention is not particularly limited, and various methods are conceivable. Specific examples will be described below.
- Case 1 The polishing region 8 and the cushion layer 11 are bonded together, and then an opening 10 that penetrates the polishing region 8 and the cushion layer 11 is formed. Thereafter, the support film 12 is bonded to one side of the cushion layer 11. Then, the light transmission region 9 is fitted into the opening 10, and the peripheral portion 13 of the light transmission region 9 is bonded to the support film 12. Further, the portion of the support film 12 corresponding to the recessed portion 14 of the light transmission region 9 is cut out, and the recessed portion 14 is opened.
- Case 2 The polishing region 8 and the cushion layer 11 are bonded together, and then an opening 10 that penetrates the polishing region 8 and the cushion layer 11 is formed. Thereafter, the support film 12 is bonded to one side of the cushion layer 11. And the light transmissive area
- a covering member 15 may be provided on the side surface of the recessed portion 14.
- the method of providing the covering member 15 is not particularly limited, and examples thereof include a method of bonding a resin sheet, a method of applying a resin composition or an adhesive to the side surface of the indented portion, and a method of curing, but reliably preventing slurry leakage. Therefore, from the viewpoint of manufacturing efficiency, a method in which the end portion of the support film 12 laminated on the peripheral portion 13 is bent and bonded to the side surface of the recessed portion 14 is preferable.
- Examples of means for attaching the polishing region and the cushion layer include a method in which the polishing region and the cushion layer are sandwiched with a double-sided tape and pressed.
- the double-sided tape has a general configuration in which adhesive layers are provided on both sides of a substrate such as a nonwoven fabric or a film.
- Examples of the composition of the adhesive layer include rubber adhesives and acrylic adhesives. Considering the content of metal ions, an acrylic adhesive is preferable because the metal ion content is low.
- the composition of the polishing region and the cushion layer may be different, the composition of each adhesive layer of the double-sided tape can be made different so that the adhesive force of each layer can be optimized.
- the means for forming the opening in the polishing region and the cushion layer is not particularly limited, and examples thereof include a method of opening by pressing or grinding with a cutting tool, a method of using a laser with a carbonic acid laser, and the like. .
- the size and shape of the opening are not particularly limited.
- the semiconductor device is manufactured through a process of polishing the surface of the semiconductor wafer using the polishing pad.
- a semiconductor wafer is generally a laminate of a wiring metal and an oxide film on a silicon wafer.
- the method and apparatus for polishing the semiconductor wafer are not particularly limited.
- a polishing surface plate 2 that supports the polishing pad 1
- a support table 5 that supports the semiconductor wafer 4
- This is performed using a backing material for performing uniform pressurization and a polishing apparatus equipped with a polishing agent 3 supply mechanism.
- the polishing pad 1 is attached to the polishing surface plate 2 by attaching it with a double-sided tape, for example.
- the polishing surface plate 2 and the support base 5 are disposed so that the polishing pad 1 and the semiconductor wafer 4 supported on each of the polishing surface plate 2 and the support table 5 face each other, and are provided with rotating shafts 6 and 7 respectively. Further, a pressurizing mechanism for pressing the semiconductor wafer 4 against the polishing pad 1 is provided on the support base 5 side. In polishing, the semiconductor wafer 4 is pressed against the polishing pad 1 while rotating the polishing surface plate 2 and the support base 5, and polishing is performed while supplying acidic slurry.
- the flow rate of the acidic slurry, the polishing load, the polishing platen rotation speed, and the wafer rotation speed are not particularly limited, and are adjusted as appropriate.
- the protruding portion of the surface of the semiconductor wafer 4 is removed and polished flat. Thereafter, a semiconductor device is manufactured by dicing, bonding, packaging, or the like. The semiconductor device is used for an arithmetic processing device, a memory, and the like.
- Hardness measurement This was performed according to JIS K6253-1997.
- the produced polyurethane foam or light transmission region cut into a size of 2 cm ⁇ 2 cm (thickness: arbitrary) is used as a hardness measurement sample, and the temperature is 23 ° C. ⁇ 2 ° C. and the humidity is 50% ⁇ 5% for 16 hours. Left to stand. At the time of measurement, the samples were overlapped to a thickness of 6 mm or more.
- the hardness was measured using a hardness meter (manufactured by Kobunshi Keiki Co., Ltd., Asker D type hardness meter).
- Example 1 [Production of light transmission region] A thermoplastic polyurethane A1098A (manufactured by Toyobo Co., Ltd.) is used to produce a polyurethane sheet (59.5 mm long, 19.5 mm wide, 2.0 mm thick, D hardness 48 degrees) by injection molding, and the polyurethane sheet is further cut. A light transmission region was produced by forming a crease (length 54 mm, width 14 mm, depth 0.8 mm).
- the buffed sheet was punched into a diameter (61 cm), and concentric grooves were formed on the surface using a groove processing machine (manufactured by Toho Koki Co., Ltd.). A laminating machine was used on the surface of the sheet opposite to the grooved surface, and a double-sided tape (manufactured by Sekisui Chemical Co., Ltd., double tack tape) was bonded to prepare a polishing region with double-sided tape.
- a groove processing machine manufactured by Toho Koki Co., Ltd.
- a laminating machine was used on the surface of the sheet opposite to the grooved surface, and a double-sided tape (manufactured by Sekisui Chemical Co., Ltd., double tack tape) was bonded to prepare a polishing region with double-sided tape.
- a cushion layer made of polyethylene foam (Toray Industries Inc., TORAYPEF, thickness: 0.8 mm) buffed and corona-treated is bonded to the adhesive surface of the prepared polishing area with double-sided tape using a laminator.
- An abrasive sheet was prepared.
- an opening having a size of 60 mm ⁇ 20 mm was formed in the polishing sheet.
- the support sheet polyethylene terephthalate, thickness: 50 micrometers
- the light transmission region was fitted into the opening of the laminate, and the peripheral portion on the back surface side of the light transmission region was bonded to the support sheet. Then, the support sheet laminated
- Polishing pad 2 Polishing surface plate 3: Abrasive (slurry) 4: Material to be polished (semiconductor wafer) 5: Support base (polishing head) 6, 7: Rotating shaft 8: Polishing area 9: Light transmission area 10: Opening part 11: Cushion layer 12: Support sheet 13: Peripheral part 14: Recessed part 15: Cover member
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
研磨領域及びクッション層を貫く開口部内かつ支持フィルム上に光透過領域が設けられており、前記光透過領域は、研磨定盤側の表面に、周囲部とくぼみ部とを有しており、前記周囲部には支持フィルムが積層されており、前記くぼみ部には支持フィルムが積層されておらず開口していることを特徴とする研磨パッド、に関する。
1)イソシアネート末端プレポリマーの気泡分散液を作製する発泡工程
イソシアネート末端プレポリマー(第1成分)にシリコン系界面活性剤を添加し、非反応性気体の存在下で撹拌し、非反応性気体を微細気泡として分散させて気泡分散液とする。前記プレポリマーが常温で固体の場合には適宜の温度に予熱し、溶融して使用する。
2)硬化剤(鎖延長剤)混合工程
上記の気泡分散液に鎖延長剤(第2成分)を添加、混合、撹拌して発泡反応液とする。
3)注型工程
上記の発泡反応液を金型に流し込む。
4)硬化工程
金型に流し込まれた発泡反応液を加熱し、反応硬化させる。
研磨領域8とクッション層11を貼り合わせ、その後、研磨領域8及びクッション層11を貫く開口部10を形成する。その後、クッション層11の片面に支持フィルム12を貼り合わせる。そして、開口部10内に光透過領域9を嵌め込み、光透過領域9の周囲部13を支持フィルム12に貼り合せる。さらに、光透過領域9のくぼみ部14に対応する部分の支持フィルム12を切除し、くぼみ部14を開口させる。
研磨領域8とクッション層11を貼り合わせ、その後、研磨領域8及びクッション層11を貫く開口部10を形成する。その後、クッション層11の片面に支持フィルム12を貼り合わせる。そして、開口部10内かつ支持フィルム12上に光透過樹脂組成物を注入して加熱、光照射又は湿気等により硬化させることにより光透過領域9を形成する。さらに、光透過領域9のくぼみ部14に対応する部分の支持フィルム12を切除し、くぼみ部14を切削等により形成する。
(平均気泡径測定)
作製したポリウレタン発泡体を厚み1mm以下になるべく薄くミクロトームカッターで平行に切り出したものを平均気泡径測定用試料とした。試料をスライドガラス上に固定し、SEM(S-3500N、日立サイエンスシステムズ(株))を用いて100倍で観察した。得られた画像を画像解析ソフト(WinRoof、三谷商事(株))を用いて、任意範囲の全気泡径を測定し、平均気泡径を算出した。
JIS Z8807-1976に準拠して行った。作製したポリウレタン発泡体を4cm×8.5cmの短冊状(厚み:任意)に切り出したものを比重測定用試料とし、温度23℃±2℃、湿度50%±5%の環境で16時間静置した。測定には比重計(ザルトリウス社製)を用い、比重を測定した。
JIS K6253-1997に準拠して行った。作製したポリウレタン発泡体又は光透過領域を2cm×2cm(厚み:任意)の大きさに切り出したものを硬度測定用試料とし、温度23℃±2℃、湿度50%±5%の環境で16時間静置した。測定時には、試料を重ね合わせ、厚み6mm以上とした。硬度計(高分子計器社製、アスカーD型硬度計)を用い、硬度を測定した。
〔光透過領域の作製〕
熱可塑性ポリウレタンA1098A(東洋紡績社製)を用い、インジェクション成型にてポリウレタンシート(縦59.5mm、横19.5mm、厚み2.0mm、D硬度48度)を作製し、さらにポリウレタンシートを切削加工してくぼみ部(縦54mm、横14mm、深さ0.8mm)を形成して光透過領域を作製した。
反応容器内に、ポリエーテル系プレポリマー(ユニロイヤル社製、アジプレンL-325、NCO濃度:2.22meq/g)100重量部、及びシリコン系界面活性剤(東レダウコーニングシリコーン社製、SH-192)3重量部を混合し、温度を80℃に調整した。撹拌翼を用いて、回転数900rpmで反応系内に気泡を取り込むように約4分間激しく撹拌を行った。そこへ予め120℃で溶融した4,4’-メチレンビス(o-クロロアニリン)(イハラケミカル社製、イハラキュアミンMT)26重量部を添加した。その後、約1分間撹拌を続けてパン型のオープンモールドへ反応溶液を流し込んだ。この反応溶液の流動性がなくなった時点でオーブン内に入れ、110℃で6時間ポストキュアを行い、ポリウレタン発泡体ブロックを得た。このポリウレタン発泡体ブロックをバンドソータイプのスライサー(フェッケン社製)を用いてスライスし、ポリウレタン発泡体シート(平均気泡径50μm、比重0.82、D硬度55度)を得た。次にこのシートをバフ機(アミテック社製)を使用して、所定の厚さに表面バフをし、厚み精度を整えたシートとした(シート厚み:2mm)。このバフ処理をしたシートを直径(61cm)に打ち抜き、溝加工機(東邦鋼機社製)を用いて表面に同心円状の溝加工を行った。このシートの溝加工面と反対側の面にラミ機を使用して、両面テープ(積水化学工業社製、ダブルタックテープ)を貼り合わせて両面テープ付き研磨領域を作製した。
表面をバフがけし、コロナ処理したポリエチレンフォーム(東レ社製、トーレペフ、厚さ:0.8mm)からなるクッション層を、作製した両面テープ付き研磨領域の接着面にラミ機を用いて貼り合わせて研磨シートを作製した。次に、研磨シートに60mm×20mmの大きさの開口部を形成した。そして、片面に接着剤層を有する支持シート(ポリエチレンテレフタレート、厚さ:50μm)を研磨シートのクッション層に貼り合わせて積層体を得た。その後、該積層体の開口部内に光透過領域を嵌め込み、光透過領域の裏面側の周囲部を支持シートに貼り合わせた。その後、光透過領域の裏面側のくぼみ部に積層された支持シートを切除し、支持フィルムの端部を折り曲げてくぼみ部の側面に貼り合せて図3記載の構造の研磨パッドを作製した。該研磨パッドは、ダミーウエハ15枚を研磨してもスラリー漏れは発生しなかった。
2:研磨定盤
3:研磨剤(スラリー)
4:被研磨材(半導体ウエハ)
5:支持台(ポリシングヘッド)
6、7:回転軸
8:研磨領域
9:光透過領域
10:開口部
11:クッション層
12:支持シート
13:周囲部
14:くぼみ部
15:被覆部材
Claims (4)
- 研磨領域、クッション層、及び支持フィルムがこの順に積層されている研磨パッドにおいて、
研磨領域及びクッション層を貫く開口部内かつ支持フィルム上に光透過領域が設けられており、前記光透過領域は、研磨定盤側の表面に、周囲部とくぼみ部とを有しており、前記周囲部には支持フィルムが積層されており、前記くぼみ部には支持フィルムが積層されておらず開口していることを特徴とする研磨パッド。 - くぼみ部の側面に被覆部材が設けられている請求項1記載の研磨パッド。
- 被覆部材は、周囲部に積層された支持フィルムの端部を折り曲げることにより形成されている請求項2記載の研磨パッド。
- 請求項1~3のいずれかに記載の研磨パッドを用いて半導体ウエハの表面を研磨する工程を含む半導体デバイスの製造方法。
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CN201280041433.0A CN103747918A (zh) | 2011-09-01 | 2012-08-24 | 抛光垫 |
US14/241,008 US9156126B2 (en) | 2011-09-01 | 2012-08-24 | Polishing pad |
KR1020147007404A KR101633745B1 (ko) | 2011-09-01 | 2012-08-24 | 연마 패드 |
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KR101945874B1 (ko) * | 2017-08-07 | 2019-02-11 | 에스케이씨 주식회사 | 표면 처리된 연마패드용 윈도우 및 이를 포함하는 연마패드 |
CN109202693B (zh) * | 2017-10-16 | 2021-10-12 | Skc索密思株式会社 | 防泄漏抛光垫及其制造方法 |
US11633830B2 (en) * | 2020-06-24 | 2023-04-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | CMP polishing pad with uniform window |
KR102488101B1 (ko) * | 2021-05-04 | 2023-01-12 | 에스케이엔펄스 주식회사 | 연마 패드, 연마 패드의 제조 방법 및 이를 이용한 반도체 소자의 제조 방법 |
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US20140213151A1 (en) | 2014-07-31 |
KR101633745B1 (ko) | 2016-06-27 |
KR20140051441A (ko) | 2014-04-30 |
CN103747918A (zh) | 2014-04-23 |
JP2013052459A (ja) | 2013-03-21 |
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