WO2013012169A3 - 감광성 조성물 및 그 감광성 조성물에 사용되는 화합물 - Google Patents

감광성 조성물 및 그 감광성 조성물에 사용되는 화합물 Download PDF

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Publication number
WO2013012169A3
WO2013012169A3 PCT/KR2012/004465 KR2012004465W WO2013012169A3 WO 2013012169 A3 WO2013012169 A3 WO 2013012169A3 KR 2012004465 W KR2012004465 W KR 2012004465W WO 2013012169 A3 WO2013012169 A3 WO 2013012169A3
Authority
WO
WIPO (PCT)
Prior art keywords
compound used
photosensitive composition
present
composition
pattern
Prior art date
Application number
PCT/KR2012/004465
Other languages
English (en)
French (fr)
Other versions
WO2013012169A2 (ko
Inventor
이건우
Original Assignee
주식회사 엘지화학
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020120056628A external-priority patent/KR101391530B1/ko
Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to CN201280034988.2A priority Critical patent/CN103718110B/zh
Priority to JP2014520109A priority patent/JP5872035B2/ja
Publication of WO2013012169A2 publication Critical patent/WO2013012169A2/ko
Publication of WO2013012169A3 publication Critical patent/WO2013012169A3/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)

Abstract

본 출원은 감광성 조성물 및 이에 사용되는 화합물에 대한 것이다. 본 출원을 통해 제공되는 조성물을 사용하면 패턴의 접착력이 향상된 박막을 형성할 수 있다.
PCT/KR2012/004465 2011-07-15 2012-06-07 감광성 조성물 및 그 감광성 조성물에 사용되는 화합물 WO2013012169A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280034988.2A CN103718110B (zh) 2011-07-15 2012-06-07 光敏组合物及其中使用的化合物
JP2014520109A JP5872035B2 (ja) 2011-07-15 2012-06-07 感光性組成物およびその感光性組成物に用いられる化合物

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2011-0070644 2011-07-15
KR20110070644 2011-07-15
KR1020120056628A KR101391530B1 (ko) 2011-07-15 2012-05-29 감광성 조성물
KR10-2012-0056628 2012-05-29

Publications (2)

Publication Number Publication Date
WO2013012169A2 WO2013012169A2 (ko) 2013-01-24
WO2013012169A3 true WO2013012169A3 (ko) 2013-03-21

Family

ID=47558561

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/004465 WO2013012169A2 (ko) 2011-07-15 2012-06-07 감광성 조성물 및 그 감광성 조성물에 사용되는 화합물

Country Status (2)

Country Link
US (1) US8835521B2 (ko)
WO (1) WO2013012169A2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9049790B2 (en) * 2013-08-13 2015-06-02 Echem Solutions Corp. Masking layer formed by applying developable photosensitive resin compositions on panel structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0296583A (ja) * 1988-09-30 1990-04-09 Toshiba Silicone Co Ltd アミノアルキルアルコキシシランの製造方法
JPH08269071A (ja) * 1995-03-31 1996-10-15 Nitto Boseki Co Ltd シランカップリング剤及びその製造方法
KR100655047B1 (ko) * 2005-12-30 2006-12-06 제일모직주식회사 감광성 수지 조성물 및 이를 이용한 블랙매트릭스

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5464900A (en) * 1993-10-19 1995-11-07 Minnesota Mining And Manufacturing Company Water soluble organosiloxane compounds
KR100793946B1 (ko) 2006-11-17 2008-01-16 제일모직주식회사 액정표시소자　칼럼 스페이서용 감광성　수지 조성물, 이를이용한 액정표시소자 칼럼 스페이서의 제조방법,액정표시소자용 칼럼 스페이서 및 이를 포함하는디스플레이 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0296583A (ja) * 1988-09-30 1990-04-09 Toshiba Silicone Co Ltd アミノアルキルアルコキシシランの製造方法
JPH08269071A (ja) * 1995-03-31 1996-10-15 Nitto Boseki Co Ltd シランカップリング剤及びその製造方法
KR100655047B1 (ko) * 2005-12-30 2006-12-06 제일모직주식회사 감광성 수지 조성물 및 이를 이용한 블랙매트릭스

Also Published As

Publication number Publication date
US8835521B2 (en) 2014-09-16
WO2013012169A2 (ko) 2013-01-24
US20130029271A1 (en) 2013-01-31

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