WO2013002371A1 - Procédé de superfinition et dispositif de superfinition - Google Patents

Procédé de superfinition et dispositif de superfinition Download PDF

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Publication number
WO2013002371A1
WO2013002371A1 PCT/JP2012/066700 JP2012066700W WO2013002371A1 WO 2013002371 A1 WO2013002371 A1 WO 2013002371A1 JP 2012066700 W JP2012066700 W JP 2012066700W WO 2013002371 A1 WO2013002371 A1 WO 2013002371A1
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WO
WIPO (PCT)
Prior art keywords
grindstone
component force
workpiece
superfinishing
detected
Prior art date
Application number
PCT/JP2012/066700
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English (en)
Japanese (ja)
Inventor
大橋　一仁
孝 大西
眞也 塚本
晃平 東
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Ntn株式会社
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Publication of WO2013002371A1 publication Critical patent/WO2013002371A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • B24B19/06—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements for grinding races, e.g. roller races
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
    • B24B5/04—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally
    • B24B5/045—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally with the grinding wheel axis perpendicular to the workpiece axis

Definitions

  • the present invention relates to a superfinishing processing method and a superfinishing processing apparatus.
  • mirror finishing of industrial parts typified by bearings having raceway surfaces employs super-finishing processing in which grinding is performed by pressing a grindstone against a rotating workpiece while rocking.
  • super-finishing processing as represented by Patent Document 1, first, a “rough” process is performed in which abrasive grains are dropped to increase the grinding efficiency, and then the grindstone is clogged to generate a mirror surface. "Finish” processing. Switching from “rough” machining to “finishing” machining is done by lowering the rocking speed of the grindstone without changing the rotation speed of the workpiece, and the switching timing is generally determined by timer control. is there.
  • the state of the grindstone is determined based on the detection output of the force sensor, and the switching timing from “rough” processing to “finishing” processing is determined based on the determination.
  • the workpiece is supported by the backing plate and the shoe, and only the supporting force by the shoe is detected by the force sensor among the supporting force by the backing plate and the supporting force by the shoe.
  • the detection output is likely to be unstable due to the influence of the support force by the backing plate. Therefore, it is difficult to stably determine the state of the grindstone, and there is a possibility that the switching timing from the “rough” processing to the “finishing” processing becomes unstable.
  • the processing efficiency is high and the machining resistance is small compared to general abrasive grindstones represented by alumina and silicon carbide, so the state of the grindstone has changed.
  • the force changes little. Therefore, it is difficult to stably determine the state of the grindstone.
  • the method using the force sensor of patent document 2 is a method limited only to the bearing ring of a ball bearing.
  • an object of the present invention is to provide a superfinishing method and a superfinishing device that can obtain a stable machining state.
  • a workpiece is rotated, and the workpiece is pressed against the workpiece while the grindstone is swung in a direction perpendicular to the tangential direction of the rotation of the workpiece.
  • a main component force sensor for detecting a component force Q in a tangential direction of rotation of the workpiece of the force applied to the grindstone in a state of being pressed against the workpiece on the grindstone table that supports the grindstone.
  • a back component force sensor for detecting a component force P in the pressing direction of the grindstone of the force applied to the grindstone in a state of being pressed against the workpiece, and based on the component forces P and Q detected by each sensor The method of determining the machining state of the workpiece was adopted.
  • the tangential component force Q detected by the main component force sensor during the superfinishing process changes the machining resistance between the grindstone and the work piece according to the grindstone machining state. It exhibits a reaction according to the processing state of the grindstone.
  • the processing state of the grindstone is a state (cutting state) in which the blades are positively spontaneously generated by dropping off the abrasive grains. Thereafter, when shifting to the “finishing” process, the processing state of the grindstone shifts to a clogged state (polished state) through a semi-cut state.
  • the component force P in the pressing direction is determined by the pressing force against the grindstone, when the pressing force is set to be constant, a substantially constant value is indicated accordingly.
  • the component force (back component force) P in the pressing direction is a gutter that indicates a value corresponding to the grinding stone pressing force.
  • the tangential component force (main component force) Q generally has a characteristic of maintaining a constant ratio with respect to the back component force P according to the processing. Therefore, if the surface condition or the machining state of the grindstone does not change under the machining conditions, the machining component force ratio P / Q shows a constant value even if the pressing force is changed. Therefore, when the pressing force is set to be constant, the component force P shows a substantially constant value accordingly.
  • the component force Q in the tangential direction shows a change according to the processing state of the grindstone. Specifically, when “rough” machining is performed, the grindstone is self-generated, increasing the machining resistance, and the tangential component force Q takes a large value. Thereafter, when the process shifts to “finishing”, the self-generated blade is stopped and the grindstone is in a polished state, so that the machining resistance is reduced and the main component force Q is a small value. Therefore, if this is monitored, the processing state of the grindstone during the “rough” processing and “finishing” processing can be determined.
  • the grindstone table is provided with an air cylinder that presses the grindstone supported on the tip by advancing the rod against the workpiece, and the main wheel is disposed between the tip of the rod of the air cylinder to which the grindstone is attached and the grindstone.
  • a component force sensor and the back component force sensor can be arranged.
  • the processing state of the grindstone can be determined regardless of the method of supporting the workpiece. Therefore, the range of application of workpieces is wide.
  • an in-process gauge for detecting a reduction in the size of the workpiece caused by processing with a grindstone
  • a movement amount sensor for detecting a movement amount in the pressing direction of the grindstone due to a reduction in the size of the workpiece and wear of the grindstone. And adopting a method of determining the machining state of the workpiece based on the dimension reduction amount of the workpiece detected by the in-process gauge and the movement amount of the grindstone detected by the movement amount sensor. Can do.
  • the processing state of the grindstone becomes a state (cutting state) in which the blades are positively spontaneously generated by the removal of the abrasive grains. Therefore, the movement amount detected by the movement amount sensor increases (advances) at a constant speed, and the reduction amount of the finishing dimension detected by the in-process gauge decreases at a constant rate.
  • the processing state of the grindstone shifts to a clogged state (polished state) through a semi-cut state. For this reason, the movement amount detected by the movement amount sensor is constant, and the change in the finishing dimension detected by the in-process gauge is stagnant.
  • the dimension reduction amount detected by the in-process gauge and the movement amount detected by the movement amount sensor exhibit different characteristics, it is possible to discriminate between “rough” processing and “finishing” processing. Therefore, by combining the output characteristics of the movement amount sensor and the in-process gauge with the detection outputs of the main component force sensor and the back component force sensor, it is possible to improve the discrimination accuracy for switching from “rough” to “finish” processing.
  • the workpiece is rotated, and the grinding stone is pressed against the workpiece while swinging the grinding stone in a direction perpendicular to the tangential direction of the rotation of the workpiece, thereby super-finishing the workpiece.
  • a main component force sensor for detecting a component force Q in a tangential direction of rotation of the workpiece applied to the grindstone in a state of being pressed against the workpiece on the grindstone table that supports the grindstone;
  • a back component force sensor that detects a component force P in the pressing direction of the grindstone of the force applied to the grindstone in the applied state, and the superfinishing processing based on the component forces P and Q detected by each sensor The method of performing the control is adopted.
  • the grindstone table is provided with an air cylinder for pressing the grindstone supported at the tip by advancing the rod against the workpiece, and the main wheel is disposed between the tip of the rod of the air cylinder to which the grindstone is attached and the grindstone.
  • a component force sensor and the back component force sensor can be arranged.
  • the force applied to the grindstone can be detected, and the processing state of the grindstone can be determined regardless of the workpiece support method. Therefore, based on the determination, it is possible to obtain a more stable machining state by changing machining conditions such as the number of rotations of the workpiece, the rocking speed of the grindstone, and the pressing force of the grindstone.
  • the ratio P / of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor Processing conditions so that the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece is increased when Q is sequentially calculated and the ratio P / Q is larger than a preset upper limit value. It is possible to adopt a control that changes.
  • the ratio P / Q is large. Becomes larger than a preset upper limit value.
  • the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece is increased, that is, the maximum intersection formed by the trajectory of the abrasive grain generated on the workpiece surface and the traveling direction of the workpiece surface. Since the control for changing the machining conditions so as to increase the angle is executed, the self-generated blade of the grindstone is promoted, and the deterioration of the processing accuracy due to the lack of the self-generated blade of the grindstone can be prevented.
  • the ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor are sequentially calculated, and when the magnitude of the ratio P / Q becomes smaller than a preset lower limit value, the machining conditions are set so that the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece becomes small. Variable control can be employed.
  • the ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor Is calculated, and when the ratio P / Q becomes larger than a preset upper limit value, control is performed to change the machining conditions so as to increase the pressing force of the grindstone against the workpiece. Can do.
  • the main component force Q is reduced when the machining resistance is reduced due to a lack of self-generated blades of the grindstone, and as a result, the ratio P / Q is large. Becomes larger than a preset upper limit value.
  • the self-generated blade of the grindstone is promoted, and the deterioration of the processing accuracy due to the lack of the self-generated blade of the grindstone is prevented. Can do.
  • the ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor Is calculated, and when the magnitude of the ratio P / Q becomes smaller than a preset lower limit, a control is adopted that changes the machining conditions so as to reduce the pressing force of the grindstone against the workpiece. Can do.
  • the ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor Is calculated successively, and when the magnitude of the ratio P / Q becomes larger than a preset abnormality detection threshold, it is possible to adopt a control for determining that the clogged stone is extremely clogged. it can.
  • an in-process gauge for detecting a reduction in the size of the workpiece due to machining with a grindstone
  • a movement amount sensor for detecting a movement amount in the pressing direction of the grindstone due to a reduction in the size of the workpiece and wear of the grindstone And the superfinishing ratio can be calculated based on the dimensional reduction amount of the workpiece detected by the in-process gauge and the movement amount of the grindstone detected by the movement amount sensor.
  • the superfinishing ratio is the ratio of the amount of wear of the grindstone to the amount of reduction in the size of the workpiece, and greatly affects the machining cost.
  • a rocking load sensor for detecting a component force R in the rocking direction of the grindstone of the force applied to the grindstone pressed against the workpiece is further provided on the grindstone table that supports the grindstone, and the rocking load is provided.
  • the superfinishing process can be controlled based on the amplitude of the component force R detected by the sensor.
  • the magnitude of the component force R in the oscillating direction detected by the oscillating load sensor depends on the inertial force of the oscillating grindstone and the machining resistance acting between the grindstone and the workpiece, It exhibits sine wave vibration according to the rocking number of the grindstone.
  • the processing state of the grindstone is a state (cutting state) in which the abrasive grains are positively generated spontaneously by cutting off the abrasive grains
  • the processing resistance is increased because the grindstone is spontaneously bladed, and the component force in the oscillating direction
  • the amplitude of R increases.
  • the processing state of the grindstone is a polished state in which the self-generated blade is stopped
  • the processing resistance decreases and the amplitude of the component force R in the swinging direction decreases. Therefore, if the amplitude of the component force R in the swinging direction is monitored, it is possible to determine the machining state when performing “rough” machining and “finishing” machining, and based on this judgment, the rotational speed of the workpiece
  • a stable processing state can be obtained.
  • the magnitude of the amplitude of the component force R detected by the swing load sensor is larger than a preset lower limit width. In this case, it is possible to adopt a control for changing the machining condition so that the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece increases.
  • the amplitude of the component force R is smaller than the preset lower limit width when the machining resistance is reduced due to the lack of the self-generated blade of the grindstone during superfinishing. Get smaller.
  • the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece is increased, that is, the maximum crossing angle formed by the abrasive locus generated on the workpiece surface and the traveling direction of the workpiece surface. Since the control to change the machining conditions is executed so that the grinding wheel becomes large, the self-generated blade of the grindstone is promoted, and the deterioration of the machining accuracy due to the lack of the self-generated blade of the grindstone can be prevented.
  • the magnitude of the amplitude of the component force R detected by the swing load sensor is larger than a preset upper limit width. Control that changes the machining conditions so that the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece becomes small when it becomes large can be employed.
  • the amplitude of the component force R is larger than the preset upper limit width. growing.
  • the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece is reduced, that is, the maximum crossing angle formed by the abrasive locus generated on the workpiece surface and the traveling direction of the workpiece surface. Since the control is performed to change the machining conditions so as to decrease, the self-generated blade of the grindstone is suppressed, and the reduction of the superfinishing ratio due to the excessive self-generated blade of the grindstone can be prevented.
  • the amplitude of the component force R detected by the swing load sensor is smaller than a preset lower limit width.
  • the amplitude of the component force R is smaller than the preset lower limit width when the machining resistance is reduced due to the lack of the self-generated blade of the grindstone during superfinishing. Get smaller.
  • the self-generated blade of the grindstone is promoted, and the deterioration of the processing accuracy due to the lack of the self-generated blade of the grindstone is prevented. Can do.
  • the magnitude of the amplitude of the component force R detected by the swing load sensor is larger than a preset upper limit width.
  • a water-insoluble (oil-based) coolant excellent in lubricity and permeability is generally employed.
  • water-soluble coolant with poor lubricity and permeability it is possible to control the self-generated blade of the grindstone based on the detection signal of each sensor, so that a stable machining state can be obtained. Is possible.
  • Examples of the workpiece include an inner ring, an outer ring, and a rolling element of a bearing.
  • the super-finishing processing apparatus for performing the super-finishing processing method
  • the workpiece is rotated while the grindstone is swung in a direction perpendicular to the tangential direction of the rotation of the workpiece.
  • a superfinishing machine that presses the grindstone against the workpiece and superfinishing the workpiece, and a grinder mounted on the grindstone table that supports the grindstone, and the rotation of the workpiece with the force applied to the grindstone pressed against the workpiece
  • a main component sensor for detecting a component force Q in the tangential direction, and a component force P in the pressing direction of the grindstone applied to the grindstone that is attached to the grindstone table that supports the grindstone and is pressed against the workpiece.
  • a control device that controls the superfinishing process based on the component forces P and Q detected by the sensors.
  • the grindstone table includes an air cylinder that presses the grindstone supported at the tip by advancing the rod against the workpiece, and a main component force sensor between the tip of the rod of the air cylinder to which the grindstone is attached and the grindstone It can be set as the structure which provided the back component force sensor.
  • the control device sequentially calculates a ratio P / Q of the component force P detected by the back component force sensor to the component force Q detected by the main component force sensor, and the magnitude of the ratio P / Q is preset.
  • control can be performed to change the machining conditions so that the ratio of the rocking speed of the grindstone to the rotational speed of the workpiece is increased.
  • the control device sequentially calculates a ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor, and the magnitude of the ratio P / Q is determined in advance.
  • it becomes smaller than the set lower limit value it is possible to perform a control for changing the machining conditions so that the ratio of the rocking number of the grindstone to the rotation speed of the workpiece becomes small.
  • the control device sequentially calculates a ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor, and the magnitude of the ratio P / Q is determined in advance. When it becomes larger than the set upper limit value, it is possible to perform a control for changing the machining conditions so as to increase the pressing force of the grindstone against the workpiece.
  • the control device sequentially calculates a ratio P / Q of the component force P detected by the back component force sensor with respect to the component force Q detected by the main component force sensor, and the magnitude of the ratio P / Q is determined in advance. When it becomes smaller than the set lower limit value, it is possible to perform a control for changing the machining conditions so as to reduce the pressing force of the grindstone against the workpiece.
  • an in-process gauge for detecting a reduction in the size of the workpiece caused by processing with a grindstone
  • a movement amount sensor for detecting a movement amount in the pressing direction of the grindstone due to a reduction in the size of the workpiece and wear of the grindstone.
  • the control device reduces the dimension of the workpiece based on the dimension reduction amount of the workpiece detected by the in-process gauge and the movement amount of the grindstone detected by the movement amount sensor.
  • the control device further includes a rocking load sensor for detecting a component force R in the rocking direction of the grindstone of the force applied to the grindstone pressed against the workpiece on the grindstone table that supports the grindstone. May employ a configuration in which the superfinishing process is controlled based on the amplitude of the component force R detected by the swing load sensor.
  • the superfinishing processing method and superfinishing processing device of the present invention are based on the component forces P and Q detected by the main component force sensor and the back component force sensor, and the rotational speed of the workpiece, the rocking number of the grindstone, By changing processing conditions such as pressing force, it is possible to obtain a stable processing state.
  • FIG. 1 and 2 are schematic views of a superfinishing apparatus for explaining the present invention.
  • FIG. 1 is a schematic diagram of the superfinishing machine
  • FIG. 2 is a block diagram of the control device 19.
  • the superfinishing apparatus includes a superfinishing machine and a control device 19. As shown in FIG. 1, the superfinishing machine includes a fixed center 1, a turner 2, a swing device 3, a grinding wheel base 4, an air cylinder 5, a main component force sensor 6a, a back component force sensor 6b, and a swing load sensor 6c. , A movement amount sensor 7, an in-process gauge 8, a grindstone 10, and a discharge nozzle 12.
  • the workpiece 9 supported by the fixed center 1 of the superfinishing machine is given a rotational force by the turner 2.
  • a grindstone base 4 that supports the grindstone 10 is attached to the rocking device 3.
  • the oscillating device 3 applies a driving force for reciprocating the grindstone table 4.
  • a main component force sensor 6a, a back component force sensor 6b, and a swing load sensor 6c are attached to a grindstone table 4 that is swung by the swing device 3 via an air cylinder 5, and the main component force sensor 6a,
  • the grindstone 10 is supported by the component force sensor 6b and the swing load sensor 6c.
  • the main component force sensor 6a, the back component force sensor 6b, and the swing load sensor 6c are provided between the tip of the rod 13 of the air cylinder 5 to which the grindstone 10 is attached and the grindstone 10.
  • the main component force sensor 6a detects the component force Q in the tangential direction of the rotation of the workpiece 9 out of the force applied to the grindstone 10 pressed against the workpiece 9.
  • the back component force sensor 6b detects the component force P in the pressing direction of the grindstone 10 out of the force applied to the grindstone 10 pressed against the workpiece 9.
  • the rocking load sensor 6 c detects a component force R in the rocking direction of the grindstone 10 out of the force applied to the grindstone 10 pressed against the workpiece 9.
  • a force sensor such as a load cell, a piezoelectric element (semiconductor (piezoresistive element) strain gauge, unimorph, bimorph) or the like can be used.
  • a piezoelectric element semiconductor (piezoresistive element) strain gauge, unimorph, bimorph) or the like
  • sensors 6a, 6b, and 6c can be provided as separate sensors, respectively, but may be an integrated three-axis type. In this embodiment, an integral unit is used.
  • a movement amount sensor 7 is attached to the rear end of the air cylinder 5 to detect the movement amount S of the grindstone 10.
  • a potentiometer can be used as the movement amount sensor 7, for example.
  • a non-contact type linear motion displacement meter using an optical type or a differential transformer may be used aiming at a drip-proof effect from a coolant which is a liquid.
  • the in-process gauge 8 is for detecting a dimensional change of the workpiece 9 during processing, and is arranged so that the stylus comes into contact with the workpiece 9 and measures the size of the workpiece 9 simultaneously with the processing. It is like that.
  • the coolant 11 has the performance of reducing the frictional force between the grindstone 10 and the workpiece 9 (lubricating action), discharging chips (cleaning action), and discharging processing heat (cooling action). And the coolant 11 arrange
  • the coolant used may be either water-insoluble or water-soluble.
  • FIG. 2 is a block diagram focusing on a signal (input) system obtained from the superfinishing machine of the control device 19 and a signal (output) system output to the superfinishing machine and external devices (dressing 25, grindstone exchanger 26). .
  • control device 19 includes an A / D conversion function 20a, a D / A conversion function 20b, an arithmetic processing function (CPU) 21, and an I / O interface 24.
  • the CPU 21 is connected to the main component force sensor 6a, the back component force sensor 6b, the swing load sensor 6c, the movement amount sensor 7 and the in-process gauge 8 provided on the superfinishing board via the A / D conversion function 20a.
  • the output of each of the three component forces P, Q, R output from the main component force sensor 6a, the back component force sensor 6b, and the swing load sensor 6c, and the measurement output S from the movement amount sensor 7 and the in-process gauge 8 Collect T.
  • the CPU 21 is connected to each inverter circuit 27 of the spindle motor 22 and the swing motor 23 of the superfinishing machine via the D / A conversion function 20b. At the same time, the CPU 21 is connected to the electropneumatic air regulator 28 of the air cylinder 5 through the D / A conversion function 20b. Therefore, the CPU 21 determines the processing state of the grindstone 10 based on the detection outputs of the main component force sensor 6a, the back component force sensor 6b, the swing load sensor 6c, the movement amount sensor 7 and the in-process gauge 8.
  • the spindle motor 22, the swing motor 23, and the air cylinder 5 are controlled to operate the rotational speed of the workpiece 9, the swing speed of the grindstone 10, and the pressure applied to the grindstone 10, and the machining conditions for the superfinishing processing are real-time. It comes to control with.
  • the CPU 21 is connected to the air cylinder 5 via the I / O interface 24. In this way, when an abnormality of the grindstone 10 is detected from the detection outputs of the main component force sensor 6a, the back component force sensor 6b, the swing load sensor 6c, the movement amount sensor 7 and the in-process gauge 8, the swing is stopped. Can be commanded to the air cylinder 5.
  • the CPU 21 can be connected to the external devices 25 and 26 via the I / O interface 24 to instruct maintenance operation of the grindstone 10.
  • the external devices are the dressing device 25 for sharpening and the grindstone changing device 26, both of which may be well known. Both devices 25 and 26 determine that the CPU 21 is necessary based on the detection outputs of the main component force sensor 6a, the back component force sensor 6b, the swing load sensor 6c, the movement amount sensor 7 and the in-process gauge 8. When the command is issued, the sharpening and replacement of the grindstone 10 are automatically performed.
  • the processing apparatus of the present application is configured, and next, super finishing used in the processing apparatus will be described.
  • the horizontal axis represents time transition
  • the vertical axis represents signal strength (grinding resistance).
  • the detection outputs of the main component force sensor 6a, the back component force sensor 6b, and the swing load sensor 6c are three axes (X axis, Y axis) of the main component force Q, the back component force P, and the swing load R, respectively. , Z-axis) direction component, and as shown in FIG. 5, a signal including the frequency resulting from the number of rotations of the workpiece 9 and the number of oscillations of the grindstone 10 is presented. Each signal varies according to the processing state of the grindstone 10.
  • FIG. 6 shows signal changes of the moving amount (grinding wheel wear amount) S of the grindstone 10 and the finish dimension reduction amount (stock amount: so-called “removing allowance”) T of the workpiece 9 of the in-process gauge 8.
  • the horizontal axis represents time transition
  • the vertical axis represents the amount of displacement.
  • the moving amount S of the grindstone 10 is constant (the forward movement of the rod 13 of the air cylinder 5 is stopped), and the finish.
  • the change in the dimension reduction amount T is also stagnant.
  • FIG. 7 shows a component force Q (so-called “main component force”) in the tangential direction of rotation of the workpiece 9 of the force applied to the grindstone 10 when machining is performed under the conditions set in FIG.
  • An example of measuring the component force P in the contact direction (so-called “back component force”) and its ratio P / Q is shown.
  • the horizontal axis of FIG. 7 indicates the time transition
  • the vertical axis indicates the magnitude of each component force and the ratio thereof.
  • the component force Q in the pressing direction is determined by the pressing force of the grindstone 10. From this, it can be seen that the condition of FIG. 4 shows a substantially constant value.
  • the component force Q in the pressing direction shows a change according to the grinding resistance between the workpiece 9 and the grindstone 10. Specifically, in the “rough” processing, the grindstone 10 spontaneously cuts and the grinding resistance increases. Therefore, the component force Q in the pressing direction takes a large value. Thereafter, during the “finishing” process, the self-generated blade stops and the grindstone 10 is polished. Therefore, the grinding resistance is reduced, and the component force Q in the pressing direction takes a small value.
  • the ratio P / Q (representing the load balance) shows a change according to the processing state of the grindstone 10 as shown in FIGS. That is, the ratio P / Q shows a gradual increase as shown in FIG. 7 (b) as the process shifts from “rough” to “finish”. In the case of the grindstone 10 having the same specifications, this ratio P / Q shows almost the same tendency regardless of which numerical value is set in the processing conditions of FIG. Therefore, the ratio P / Q is effective as an index for monitoring the processing efficiency and finishing accuracy in super finishing.
  • the grinding wheel wear amount which is the moving amount (advance amount) S of the grindstone 10 on the same time axis as FIG. 7, the finishing dimension reduction amount T of the workpiece 9, and the moving amount S of the grinding stone 10 and the finishing dimension reduction amount T.
  • the super-finishing ratio U is taken as the cumulative ratio. That is, the superfinishing ratio U is obtained by accumulating the “dimension reduction amount (removed volume)” detected by the in-process gauge 8 from the start of machining, and the movement amount S obtained by the movement amount sensor 7 (whetstone wear amount + workpiece). Only the grinding wheel wear amount is calculated from the dimensional reduction amount of the article 9 and is taken as a ratio with the cumulative amount from the start of machining.
  • the grinding wheel wear amount can be calculated by subtracting the “dimension reduction amount (removed volume)” detected by the in-process gauge 8 from the movement amount S.
  • the superfinishing ratio U is expressed by the ratio of the cumulative value of the amount of wear of the grinding wheel 10 from the start of machining and the finishing dimension reduction amount T. is there.
  • FIG. 9 shows a component force P in the pressing direction and a component force Q in the tangential direction and a ratio P / Q when the material of the workpiece 9 is adhered to the grindstone 10 (adhesion state). Shows changes. That is, the component force P in the pressing direction, the component force Q in the tangential direction, and the ratio P / Q follow a relatively gradual change in FIG. Then, the component force Q of the said tangential direction shows the tendency to fall instantaneously. As a result, the ratio P / Q increases rapidly as shown in FIG. Therefore, if a limit value (threshold value) is set for the ratio P / Q, the occurrence of adhesion can be detected.
  • a limit value threshold value
  • the main component force sensor 6a, the back component force sensor 6b, and the swing load sensor 6c on the grindstone base 4 that supports the grindstone 10, it is possible to discriminate from "rough” processing to "finishing” processing. Thus, it can be used for super-finishing using the grindstone table 4. Further, by providing the movement amount sensor 7 and the in-process gauge 8, it is possible to determine the finish. And it becomes possible to judge the processing state of the grindstone 10 comprehensively using those detected values, and the processing conditions (the number of rotations of the workpiece 9, the number of oscillations of the grindstone 10, and the pressing force of the grindstone 10). It is possible to always keep the super-finish ratio U optimally by operating it intentionally.
  • the machining apparatus includes the main shaft motor 22 and the swing motor 23 based on the outputs of the main component force sensor 6a, the back component force sensor 6b, the swing load sensor 6c, the movement amount sensor 7, and the in-process gauge 8. Then, the air cylinder 5 is controlled to change the machining conditions. That is, from FIG.
  • the detection output of the main component force sensor 6a and the back component force sensor 6b is the transition point from the processing start point A where the grindstone 10 and the workpiece 9 contact each other to “rough” processing ⁇ “finishing” processing. Fluctuates greatly. Therefore, switching from “rough” machining to “finishing” machining is determined from this variation, and switching control to “finishing” machining is performed.
  • the oscillating load sensor 6c receives the oscillating inertia and the machining resistance of the grindstone 10, and thus exhibits a sine wave vibration corresponding to the oscillating number. Therefore, in the “rough” process in which the grindstone 10 is crushed and dropped, the grindstone 10 is in a cutting state and the amplitude of the sine wave is increased.
  • the amplitude of the sine wave is reduced because the grindstone 10 is in a polished state. Therefore, if the determination is made by adding the detection output of the swing load sensor 6c to the detection output of the main component force sensor 6a and the back component force sensor 6b, the determination accuracy is improved. Therefore, even in the superabrasive grindstone, the determination of the transition from “rough” to “finishing” processing is ensured. For example, automatic switching control from “rough” processing to “finishing” processing can be easily controlled.
  • “coarse” machining and “finishing” machining can also be discriminated by the detection output of the movement amount sensor 7 and the in-process gauge 8. That is, as shown in FIG. 6, the movement amount S of the grindstone 10 detected by the movement amount sensor 7 advances at a constant speed because crushing or dropping occurs in “rough” processing. In the “finishing” process, the polishing state is stopped. Further, the processing characteristics of the finishing dimension reduction amount T of the workpiece 9 measured by the in-process gauge 8 change according to the moving amount (grinding wheel wear) S of the grindstone 10 as shown in FIG.
  • this machining cycle switching control can be realized by monitoring the dimension reduction amount T of the workpiece 9 based on the detection output of the in-process gauge 8.
  • the grinding wheel 10 is in a cutting state, and the grinding stone 10 at this time actively blades spontaneously. Then, the process proceeds to “finishing” processing (polished state). Then, the grindstone 10 gradually shifts from a semi-cut state to a clogged state. During this time, the two-way component forces Q and P detected by the main component force sensor 6a and the back component force sensor 6b are not as large as the component force (swing load) R in the swing direction detected by the swing load sensor 6c. A sinusoidal signal including a frequency of the same phase caused by the rotational speed of the workpiece 9 or the vibration frequency of the grindstone 10 is exhibited.
  • the fluctuation of the component force Q in the tangential direction and the component force P in the pressing direction due to the state change of the grindstone 10 is very small with respect to the amplitude included in the rotation speed or frequency component. Since the constant minute amplitude appearing in the waveform of the component force Q in the tangential direction and the component force P in the pressing direction has the same phase as the machining characteristics, the ratio P / Q cancels each other and has a relatively low amplitude. It becomes a direct current waveform. For this reason, the ratio P / Q can clearly show the change according to the processing state of the grindstone 10 as shown in FIGS. 7 (a), (b), and (c). Therefore, the machining process can be determined from the output change pattern. In addition, if the determination is made with the output change pattern as described above, the superfinishing can be performed by determining the processing state of the grindstone 10 regardless of the difference in surface roughness of the workpiece 9 before processing.
  • the dimension reduction amount T based on the detection output of the in-process gauge 8 and the movement amount S of the grindstone 10 based on the detection output of the movement amount sensor 7 from the start of machining.
  • FIG. 8 shows the superfinishing calculated from the transition of the movement amount S and dimension reduction amount T of the grindstone 10 when machining under the conditions set in FIG. 4 and the accumulated value of the movement amount S and dimension reduction amount T.
  • the ratio U is drawn.
  • the processing efficiency at the time of grinding in the cutting state is high, the initial gradient of the superfinishing ratio U at the initial stage of processing increases.
  • the rotational speed of the spindle motor 22 and the swing motor 23 of the grinding wheel base 4 are controlled so that the value of U becomes large.
  • the ratio P / Q and the superfinishing ratio U can be used for determining the finished state of the workpiece 9.
  • the grindstone 10 is polished and the ratio P / Q rises again, and the machining is completed when the set value is exceeded, stable machining quality can be obtained.
  • the workpiece 9 can be finished to a predetermined size.
  • the metal is attached to the grindstone 10 (attached). Occurs.
  • the ratio P / Q increases and the size reduction amount T decreases. Therefore, if the processing state of the grindstone 10 is monitored by combining the change in the ratio P / Q and the dimensional change of the dimensional reduction amount T detected by the in-process gauge 8, the occurrence of adhesion can be detected.
  • the air cylinder 5 is retracted via the I / O interface 24 in order to stop the processing.
  • the dressing device 25 connected as an external device via the I / O interface 24 is operated to perform dressing (sharpening) of the grindstone 10.
  • the air cylinder 5 is advanced to return to the finishing process and the work is continued.
  • the grindstone exchanging device 24 connected as an external device via the I / O interface 24 is operated to replace the grindstone 10 with a new one. To do.
  • the air cylinder 5 is advanced to return to the polishing process and the operation is continued.
  • operation can be continued stably.
  • the super-finishing ratio U can be changed by freely operating the processing efficiency
  • a water-soluble coolant can be used during processing as shown in FIG. That is, the ratio P / Q is sequentially calculated from the tangential component force Q detected by the main component sensor 6a and the pressing component component Q detected by the back component sensor 6b, and the calculated ratio P / Q is When the value changes below a preset lower limit value, the number of oscillations of the grindstone table 4 is increased or the number of rotations of the workpiece 9 is decreased to increase the machining efficiency.
  • the ratio P / Q is larger than the preset upper limit value, the number of oscillations of the grindstone table 4 is decreased or the number of rotations of the workpiece 9 is increased to lower the machining efficiency.
  • clogging due to adhesion or adhesion can be prevented in advance by changing the processing efficiency and arbitrarily setting the superfinishing ratio U and setting the limit value to the ratio P / Q.
  • the coolant 11 to be used is a water-soluble coolant that is clogged due to inferior cleanability and lubricity and is likely to cause adhesion, it is possible to set processing conditions that hardly cause these problems.
  • water-soluble coolant that is excellent in cooling performance and cost can be used in the superfinishing process, and as a result, the productivity can be improved by improving the quality of the superfinishing process and reducing the production cost. Further, even when a conventional water-insoluble coolant is employed, the machining efficiency can be optimally maintained by adopting the above-described machining control, which can contribute to a reduction in production cost.
  • the output P (back component force) of the back component force sensor 6b and the output Q (main component force) of the main component force sensor 6a are sequentially calculated. It is also possible to maintain optimum machining efficiency by feeding back to the machining conditions.
  • the processing state of the grindstone 10 is monitored to determine the processing state for each of “rough” processing and “finishing” processing, and can be maintained optimally, so switching from rough processing to finishing processing is automatically performed. Can be done. Moreover, since the processing state of the grindstone 10 can be monitored to detect adhesion of the grindstone 10, dressing and replacement of the grindstone 10 can be automatically performed. Furthermore, since the processing state of the grindstone 10 can be monitored and the processing efficiency can be kept constant, a good processing state can be maintained even with a water-soluble coolant that is inferior in lubricity and cleanability to a water-insoluble (oil-based) coolant.
  • Example 1 a specific example of the control method is shown as Example 1.
  • the processing apparatus includes a main shaft motor 22, a swing motor based on outputs from the main component force sensor 6 a, back component force sensor 6 b, swing load sensor 6 c, movement amount sensor 7, and in-process gauge 8. Control is performed to change the machining conditions by controlling the dynamic motor 23 and the air cylinder 5.
  • the control device 19 reads the component force Q detected by the main component force sensor 6a and the component force P detected by the back component force sensor 6b during the superfinishing process, and the back of the detected output P of the main component force sensor 6a.
  • the ratio P / Q of the component force P detected by the component force sensor is sequentially calculated. Then, for example, as shown in FIG. 7, the magnitude of the ratio P / Q is compared with a preset upper limit value Th1 or lower limit value Th2, and control is performed to prevent the superfinishing ratio from being lowered during processing.
  • the controller 19 calculates the ratio P / Q with respect to the rotational speed of the workpiece 9 when the preset ratio P / Q is larger than a preset upper limit value Th1 for determining whether the self-generated blade is insufficient.
  • the ratio of the number of oscillations of the grindstone 10 is increased, that is, the grain trajectory generated on the workpiece surface and the traveling direction of the workpiece surface (tangential direction of rotation of the workpiece).
  • the machining conditions are changed by controlling the spindle motor 22 and the swing motor 23 so that the maximum crossing angle is increased.
  • the control device 19 swings the grindstone 10 with respect to the rotational speed of the workpiece 9.
  • the machining conditions are changed by controlling the spindle motor 22 and the swinging motor 23 so that the ratio of the dynamic numbers becomes small, that is, the maximum crossing angle becomes small. In this way, by reducing the ratio of the rocking speed of the grindstone 10 to the rotational speed of the workpiece 9, the superfinishing ratio is prevented from being lowered due to excessive self-generated blades of the grindstone 10.
  • the control unit 19 does not reduce the ratio P / Q.
  • the air cylinder 5 is controlled so as to increase the pressing force against the control to change the machining conditions. This is because, during superfinishing, the grinding resistance is reduced due to a lack of self-generated blades of the grindstone 10 and the main component force Q is reduced, so that the ratio P / Q is set to an upper limit value Th1 set in advance. It is because it became larger.
  • the control device 19 does not increase the ratio P / Q.
  • the processing conditions are changed by controlling the air cylinder 5 so as to reduce the pressing force of the grindstone 10 against 9. This is because the main component force Q increases and the ratio P / Q is a preset lower limit because the cutting force increases due to excessive self-generated blades of the grindstone 10 during superfinishing. This is because the value is smaller than the value Th2. Therefore, by changing the machining conditions so that the pressing force of the grindstone 10 against the workpiece 9 is reduced, the superfinishing ratio is prevented from being lowered due to excessive self-generated blades of the grindstone 10.
  • control device 19 detects that the ratio P / Q to be sequentially calculated during the superfinishing process is larger than a preset abnormality detection threshold Th3 as shown in FIG. 9, for example. Then, it determines with the extreme clogging having generate
  • the control device 19 determines clogging, the control device 19 activates the dressing device 25 for dressing via the I / O interface 24. Then, the clogged grindstone 10 is sharpened using the activated dressing device 25. When the setting is finished, the control device 19 performs super finishing. When the productivity reduction due to dressing is disliked, the grindstone exchanging device 26 is activated via the I / O interface 24 and the grindstone 10 is exchanged. Thus, the maintenance operation is performed.
  • the control device 19 calculates the superfinishing ratio U from the detected values of the movement amount sensor 7 and the in-process gauge 8 during superfinishing, so that the calculated superfinishing ratio U becomes an optimum value.
  • the machining conditions are controlled by controlling the motor 22, the swing motor 23, and the air cylinder 5. That is, the superfinishing ratio U is obtained by accumulating the “dimension reduction amount (removed volume)” detected by the in-process gauge 8 from the start of machining, and the movement amount S obtained by the movement amount detection sensor 7 (whetstone wear amount + Only the grinding wheel wear amount is calculated from the dimension reduction amount of the workpiece 9 and is taken as a ratio with the cumulative amount from the start of machining.
  • the control device 19 samples and accumulates the detection output of the in-process cage 8 and the output of the movement amount detection sensor 7 at regular intervals, and calculates the superfinishing ratio U by taking the ratio of the accumulated values. In this way, the superfinishing ratio U is detected in real time. At this time, the grinding wheel wear amount is calculated by subtracting the “dimension reduction amount (removed volume)” detected by the in-process gauge 8 from the movement amount S, for example. Then, the machining conditions of the spindle motor 22, the swing motor 23, and the air cylinder 5 are controlled so as to approach the superfinishing ratio U set so that the cost of the finished dimension reduction amount and the wear amount of the grindstone 10 are harmonized. . By doing so, the processing cost can be reduced.
  • control device 19 determines the machining state by detecting the output of the rocking load sensor 6c. Based on the determination, the number of rotations of the workpiece 9, the number of rocking of the grindstone, and the pressing of the grindstone 10 are determined. A stable machining state is obtained by changing machining conditions such as force.
  • the control device 19 determines the shortage of the self-generated blade of the grindstone 10 and sets the amplitude lower limit value Th4 set in advance and the amplitude of the component force R detected by the swing load sensor 6c. Compare sequentially.
  • the amplitude of the component force R becomes smaller than a preset lower limit Th4 of the amplitude
  • the spindle motor 22 and the swing motor 23 are controlled.
  • the machining state is changed so that the ratio of the rocking speed of the grindstone 10 to the rotational speed of the workpiece 9 is increased, that is, the maximum crossing angle is increased.
  • the use of the swing load sensor 6c that can detect the state of the self-generated blade as described above prevents the superfinishing ratio U from being lowered.
  • the control device 19 determines the excess of the self-generated blade of the grindstone 10, and the magnitude of the amplitude of the component force R detected by the preset upper limit value Th5 and the swing load sensor 6c. Are compared sequentially.
  • the spindle motor 22 and the swing motor 23 are controlled to swing the grindstone 10 with respect to the rotational speed of the workpiece 9.
  • the machining conditions are changed so that the ratio of the numbers becomes smaller, that is, the maximum crossing angle becomes smaller.
  • the control device 19 sequentially compares the amplitude of the component force R detected by the swing load sensor 6c with a preset lower limit Th6 of the amplitude in order to determine whether the self-generated blade is insufficient.
  • Th6 the processing conditions are changed so as to increase the pressing force of the grindstone 10 against the workpiece 9 by controlling the air cylinder 5. If it does in this way, when processing resistance becomes small, since the self-generated blade of the grindstone 10 is accelerated
  • control device 19 sequentially compares the amplitude of the component force R detected by the swing load sensor 6c with an amplitude upper limit value Th7 set in advance in order to determine the excessive self-generated blade. Then, when the amplitude becomes larger than the upper limit value Th7, the processing conditions are changed so as to control the air cylinder 5 to reduce the pressing force of the grindstone 10 against the workpiece 9. In this way, when the processing resistance increases due to excessive self-generated blades of the grindstone 10, the pressing force of the grindstone 10 against the workpiece 9 is reduced, and the self-generated blades of the grindstone 10 are suppressed, and the grindstone 10 It is possible to suppress a decrease in the superfinishing ratio U due to excessive self-generated blades.
  • FIGS. 10A and 10B schematically show the processing.
  • FIG. 10A shows the super-finishing of the tapered inner ring 40
  • FIG. 10B shows the super-finishing of the outer ring 41.
  • reference numeral 14 denotes a shoe
  • 15 denotes a packing plate
  • 3 denotes a rocking device
  • 4 denotes a grindstone base
  • 5 denotes an air cylinder
  • 6a denotes a main component force sensor
  • 6b spine a case where the superfinishing of the present application is applied to a tapered roller bearing will be described.
  • FIGS. 10A and 10B schematically show the processing.
  • FIG. 10A shows the super-finishing of the tapered inner ring 40
  • FIG. 10B shows the super-finishing of the outer ring 41.
  • a force sensor, 6c swing load sensor, 7 is a potentiometer, and 8 is an in-process gauge.
  • the machining state of the grindstone 10 is determined regardless of the method of supporting the workpiece. Can be determined. Therefore, the range of application of workpieces is wide. Therefore, the present invention can be applied to super finishing of a workpiece supported by a chuck gripping type, a center supporting type, or the like. It can also be applied to super finishing of tapered rollers. Therefore, it is possible to provide a tapered roller bearing that uses these inner rings, outer rings, and tapered rollers to improve the quality and productivity of superfinishing.
  • Example 3 describes a machine part to which the present invention is applied.
  • 11 (a) to 11 (d) show typical bearings to which the present invention is applied and application locations in parts constituting the bearings.
  • FIG. 11A shows a ball bearing 50 in which a plurality of balls 53 are incorporated between an inner ring 51 and an outer ring 52.
  • 11 (b) and 11 (c) show a processing target portion 54 for performing the superfinishing of the present application in the ball bearing of FIG. 11 (a).
  • FIG. 11 (b) is provided on the outer periphery of the inner ring 51. The machining can be performed as shown in FIG. 10A on the raceway surface having an arcuate cross section.
  • FIG. 10A shows typical bearings to which the present invention is applied and application locations in parts constituting the bearings.
  • FIG. 11A shows a ball bearing 50 in which a plurality of balls 53 are incorporated between an inner ring 51 and an outer ring 52.
  • 11 (b) and 11 (c) show a processing
  • FIG. 10C shows a rolling surface provided on the inner periphery of the outer ring, and the processing may be as shown in FIG.
  • FIG. 11 (d) shows a machining target portion 54 for the “roller” 55 of the self-aligning roller bearing, and shows the outer periphery of the convex roller 55 having a convex outer diameter as the machining target portion 54. Is.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention porte sur un procédé de superfinition et sur un dispositif de superfinition grâce auxquels on peut obtenir des conditions de traitement stables. La tête de meulage (4) d'un dispositif de superfinition dans laquelle une meule (10) portée par la tête de meulage (4) est pressée en même temps qu'elle oscille contre une pièce (9) entraînée en rotation, est équipée de : un capteur de composante de force de coupe (6a) qui détecte une composante de force (Q) dans une direction tangentielle à la pièce entraînée en rotation (9) ; un capteur de composante de force de poussée (6b) qui détecte une composante de force (P) dans la direction de la pression ; un capteur de charge d'oscillation (6c) qui détecte une composante de force (R) dans la direction de l'oscillation de la meule (10) ; un capteur de mouvement (7) qui détecte l'amplitude du mouvement dans la direction dans laquelle la meule (10) est pressée ; et une jauge travaillant en cours de traitement (8) qui détecte la réduction de la dimension de la pièce (9). Les conditions du traitement sont évaluées sur la base des sorties des capteurs (6a, 6b) qui varient sous l'effet du passage de « finition grossière » → « Superfinition », et le rendement du traitement est amélioré par la variation appliquée aux conditions de traitement (vitesse de rotation, vitesse d'oscillation, force de pression).
PCT/JP2012/066700 2011-06-29 2012-06-29 Procédé de superfinition et dispositif de superfinition WO2013002371A1 (fr)

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CN102554779A (zh) * 2012-01-17 2012-07-11 天津大学 可变成型点直线包络外廓形线为凸函数回转件的加工方法
CN103481180A (zh) * 2013-09-29 2014-01-01 黄彬 轴承内圈滚道螺旋超精机
JP2014061554A (ja) * 2012-09-19 2014-04-10 Noritake Co Ltd 超仕上砥石およびそれを用いた超仕上加工方法
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JP6455188B2 (ja) * 2015-01-30 2019-01-23 株式会社ジェイテクト 加工装置

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JPH02256461A (ja) * 1988-12-28 1990-10-17 Nagase Iron Works Co Ltd 砥石の管理装置
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Publication number Priority date Publication date Assignee Title
CN102554779A (zh) * 2012-01-17 2012-07-11 天津大学 可变成型点直线包络外廓形线为凸函数回转件的加工方法
JP2014061554A (ja) * 2012-09-19 2014-04-10 Noritake Co Ltd 超仕上砥石およびそれを用いた超仕上加工方法
CN103481180A (zh) * 2013-09-29 2014-01-01 黄彬 轴承内圈滚道螺旋超精机
DE102014203018A1 (de) * 2014-02-19 2015-08-20 Supfina Grieshaber Gmbh & Co. Kg Finishbearbeitungsverfahren und Vorrichtung zur Finishbearbeitung
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WO2023169884A1 (fr) * 2022-03-07 2023-09-14 Nagel Maschinen- Und Werkzeugfabrik Gmbh Procédé de finition et dispositif de finition pour un usinage de finition de chemins de roulement d'éléments roulants

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