WO2012144701A1

WO2012144701A1 - Glove box with clean room function and transfer system using the same

Info

Publication number: WO2012144701A1
Application number: PCT/KR2011/007292
Authority: WO
Inventors: 김철영
Original assignee: (주)엠오텍
Priority date: 2011-04-22
Filing date: 2011-10-02
Publication date: 2012-10-26
Also published as: KR101052460B1; CN102859644A

Abstract

The present invention relates to a glove box providing a clean process environment by removing oxygen and moisture and a transfer system using the same, the glove box with a clean room function includes a filtering unit(110) provided on an upper structure(A) and a lower structure(C) which are provided on an upper and a lower part of a process chamber(B), and filters dust by circulating the inside air of the process chamber(B) to the outside, a static electricity removing unit(120) provided on the upper structure(A) and removes static electricity generated by the dust, and a chamber unit(130) provided in the process chamber(B) for processing an operation, and a transfer system using the glove box as stated above.

Description

Glove box with clean room function and transfer system using it

The present invention relates to a glove box having a clean room function for manufacturing a semiconductor device and a transfer system using the same.

As is well known, an organic electroluminescent device (OLED) is one of flat panel display devices and has an organic electroluminescent layer between a positive electrode layer and a negative electrode layer on a wafer, and has a very thin matrix form.

Since the organic thin film layer formed on the organic EL device easily reacts with moisture (H 2 O) and oxygen (O 2) to affect the lifespan and characteristics of the device, an encapsulation cap or encapsulation on the substrate on which the organic EL device is formed. By encapsulating the organic electroluminescent element through a sealing means such as a thin film, the organic thin film layer of the organic electroluminescent element formed on the substrate can be protected from external moisture and oxygen.

However, in the process of encapsulating the organic EL device, since oxygen and moisture may be introduced from the outside, the encapsulation process is performed in a glove box, and stable maintenance of the atmosphere in the glove box is achieved. Can have a big impact on performance and yield.

As described above, the glove box used in the manufacturing process of a semiconductor device such as an organic electroluminescent device is provided with a glove box body, a control unit, a vacuum pump, etc., the glove box body is a glove box, the front of the worker to work with hands, Window, etc., wherein the regulating unit includes an inert gas and vacuum regulating devices.

Such a glove box transfers a target object (for example, an organic electroluminescent element, etc.) into a chamber, sets and adjusts a predetermined gas, pressure, temperature, etc. to perform one process, and adjusts the glove as necessary. Can be operated by the operator's hand. Thereafter, when the process is completed, the object may be transferred from the process chamber to the next process chamber to perform the next process for the next process.

Inside the glove box as described above, there may be dust (or dust) that contaminates an object, which may cause contamination of the object and a serious error in the process, and the presence of dust, etc. The static electricity generated due to this problem has a more serious error.

The present invention is to filter the dust by circulating the internal air through the filtering unit provided in the glove box, and a glove box with a clean room function that can prevent the generation of static electricity by the anti-static unit and the transfer system using the same To provide.

The present invention also provides a glove box having a clean room function capable of cleanly transferring a target object from the current process chamber to the next process chamber by connecting a plurality of glove boxes having an air circulation unit and an antistatic unit to the next process chamber. To provide a transport system used.

The objects of the embodiments of the present invention are not limited to the above-mentioned objects, and other objects, which are not mentioned above, will be clearly understood by those skilled in the art from the following description. .

According to an aspect of the present invention, in the glove box to remove oxygen and moisture to provide a clean process environment, the upper structure (A) and the lower portion provided in the upper and lower portions of the process chamber (B) provided in the glove box Installed in the structure (C), the filtering unit 110 for filtering dust by circulating the internal air of the process chamber (B) to the outside, and is installed in the upper structure (A), the static electricity generated by the dust The glove box may be provided with a clean room function including a static electricity removing unit 120 for removing the gas, and a chamber unit 130 provided in the process chamber B for a process operation.

According to another aspect of the present invention, in the transfer system for transferring a target object from the first process chamber to the second process chamber, the upper structure (A) and the lower structure (C) installed on the upper and lower portions of the transfer chamber (B) And a filtering unit 110 for filtering dust by circulating the internal air of the transfer chamber B to the outside, and installed in the upper structure A, and removing static electricity generated by the dust. A plurality of glove boxes including a removal unit 120 and a chamber unit 130 provided in the transfer chamber B for a process operation are extended and connected to the first process chamber and discharged therefrom. A first glove box 100a for transferring an object and the same object as that of the first glove box 100a and connected to the second process chamber are introduced into the second process chamber. The key may be a third glove box 100c, a first elevating unit 200a for elevating or lowering the object to be conveyed from the first glove box 100a, and conveying or rotating the same object in the same direction, and the It has the same function as the first lifting unit 200a, the second lifting unit 200b for transferring the target object to the third glove box 100c, and the same configuration as the first glove box 100a. The transfer system using a glove box having a clean room function includes a second glove box 100b for connecting the first lifting unit 200a and the second lifting unit 200b to transfer the object. Can be provided.

In the present invention, the clean room by purifying the air inside the process chamber of the glove box to remove dust from the discharge box first, remove the dust from the blower box second, and remove the static electricity generated from the dust through the antistatic unit, Functions can be implemented to provide a clean process environment.

In addition, in the transfer system using a glove box equipped with a clean room function, a plurality of glove boxes having a dust filtering function and an electrostatic elimination function are connected and extended, and a target object is moved by moving up and down and rotating through an elevator. The object may be transferred from the first process chamber to the second process chamber by maintaining a clean process environment.

1 is a top perspective view of a glove box having a clean room function according to an embodiment of the present invention;

2 is a bottom perspective view of a glove box provided with a clean room function according to an embodiment of the present invention;

3 is a cross-sectional view of a glove box having a clean room function according to an embodiment of the present invention;

Figure 4 illustrates a bottom plate provided in the process chamber of the glove box according to an embodiment of the present invention,

5 is a top perspective view of a lift unit of a transport system according to another embodiment of the present invention;

Figure 6 is a bottom perspective view of the lifting portion of the transfer system according to another embodiment of the present invention,

7 illustrates a transport system according to another embodiment of the present invention.

[Description of the code]

100: glove box 110: filtering unit

120: static electricity removing unit 130: chamber unit

200a: first lifting unit 200b: second lifting unit

Advantages and features of the embodiments of the present invention, and methods of achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

In describing the embodiments of the present invention, if it is determined that a detailed description of a known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof will be omitted. The terms to be described below are terms defined in consideration of functions in the embodiments of the present invention, which may vary according to intentions or customs of users or operators. Therefore, the definition should be made based on the contents throughout the specification.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a top perspective view of a glove box with a clean room function according to an embodiment of the present invention, FIG. 2 is a bottom perspective view of a glove box with a clean room function according to an embodiment of the present invention, and FIG. 3. 4 is a cross-sectional view of a glove box having a clean room function according to an embodiment of the present invention, and FIG. 4 is a diagram illustrating a bottom plate provided in a process chamber of a glove box according to an embodiment of the present invention.

Conventional glove box is provided with a glove provided by the operator to work by hand, and provided with an air conditioner for removing moisture and oxygen, in the description of the glove box according to embodiments of the present invention, Only the features of the present invention will be described below without describing the water and oxygen removal device and the like.

Of course, in the case of the glove may not be installed, even if the glove is not installed because the device is configured to perform a process operation in a clean state is generally referred to as a glove box will be described below. .

1 to 4, a glove box having a clean room function according to an embodiment of the present invention may include a filtering unit 110, an electrostatic eliminating unit 120, a chamber unit 130, and the like. .

The filtering unit 110 is installed in the upper structure A and the lower structure C installed on the upper and lower portions of the process chamber B provided in the glove box, and circulates the internal air of the process chamber B to the outside. Dust can be filtered out.

Here, the filtering unit 110 may include a blower box 111, a circulation pipe 112, a discharge box 113, and the like.

Blower box 111 is a plurality of blowers (111a) and a plurality of filters (111b) are installed in pairs in the upper structure (A), after the relatively large dust is removed from the discharge box 113 primarily Relatively small particles of dust in the circulated internal air may be filtered and introduced into the process chamber (B). Here, the filter 111b may use, for example, a HEPA filter, and the like, and the filter 111b may be provided at an inlet connected to the process chamber B by being installed below the blower 111a.

The circulation pipe 112 is installed outside the process chamber B to connect the upper structure A in which the blower box 111 is installed and the exhaust box 113, and may circulate internal air.

Here, the circulation pipe 112 may be directly connected to the blower box 111 or when the upper structure A including the blower box 111 has a sealed space, it may be connected to the upper structure A.

A plurality of exhaust box 113 is installed in the lower structure (C) adjacent to the process chamber (B), it may discharge the internal air.

Here, the exhaust box 113 can be provided with the adsorption means which adsorb | sucks a dust on an inner surface. Such adsorption means may include, for example, an adsorption cloth or the like, and can adsorb dust with large particles to remove dust primarily.

The static electricity removing unit 120 is installed in the upper structure A and removes static electricity generated by dust. The static electricity removing unit 120 generates negative electricity to remove positive electricity generated from dust. can do. Since the static elimination unit 120 is variously developed and disclosed in the related art, a detailed description thereof will be omitted.

The chamber unit 130 is provided in the process chamber B for a process operation, and a plurality of discharge parts 131a are provided to correspond to the exhaust box 113 and the internal air is discharged through the discharge part 131a. The bottom plate 131 may be provided.

In addition, the chamber unit 130 may include a transfer roller 132 that may support and transfer the process plate 133 on which a target object for a process operation is seated.

Therefore, in the glovebox according to an embodiment of the present invention, the air inside the process chamber of the glovebox is purified to remove dust first from the discharge box, secondly remove dust from the blower box, and By eliminating the static electricity generated, a clean room function can be implemented to provide a clean process environment.

Next, a description will be given of a transfer system using a glove box having a clean room function, which implements a clean room function by applying a glove box having the above-described configuration to transfer of objects between process chambers.

5 is a top perspective view of a lift unit of a transfer system according to another embodiment of the present invention, FIG. 6 is a bottom perspective view of a lift unit of a transfer system according to another embodiment of the present invention, and FIG. 7 is a view showing another embodiment of the present invention. Figure is a diagram illustrating a transport system according to.

5 to 7, a transfer system according to another embodiment of the present invention is a system for transferring a target object from a first process chamber to a second process chamber, and includes a first glove box 100a and a second glove box. 100 b, the third glove box 100 c, the first lifting part 200 a, the second lifting part 200 b, and the like.

The first glove box 100a is installed in the upper structure A and the lower structure C installed on the upper and lower portions of the transfer chamber B, and filters dust by circulating the air inside the transfer chamber B to the outside. The filtering unit 110, the upper structure (A) is installed, the static elimination unit 120 for removing the static electricity generated by the dust, and the chamber unit 130 provided in the transfer chamber (B) for the process operation Glove box including a) is connected to extend a plurality, it is connected to the first process chamber can be transferred to the first object lifting portion 200a.

The second glove box 100b has the same configuration as the first glove box 100a and connects the first elevating unit 200a and the second elevating unit 200b to flow into the first elevating unit 200a. The object may be transferred to the second lifting unit 200b.

The third glove box 100c has the same configuration as the first glove box 100a and may be connected to the second process chamber to introduce a target object introduced from the second elevating part 200b into the second process chamber. .

The first lifting unit 200a lifts or lowers the object to be transferred from the first glove box 100a and moves or rotates the second object to the second glove box 100b in the same direction. Can be transferred.

The second elevating unit 200b has the same function as the first elevating unit 200a and may transfer a target object transferred from the second glove box 100b to the third glove box 100c.

As shown in FIG. 5 to FIG. 7, the first lifting unit 200a rotates in a perpendicular direction and is transported, and the second lifting unit 200b represents moving the target object in the same direction, but is not limited thereto. The first lifting unit 200a may be transferred in the same direction or rotated at different angles to transfer the object, and the second lifting unit 200b may also be rotated at different angles.

Here, the first lifting unit 200a and the second lifting unit 200b include the support post 202, the support 204, the vertical drive motor 206, the screw 208, the turntable support 210, and the turntable. 212, the second feed roller 214, the rotation drive motor 216, and the like.

The support posts 202 are fixedly installed on one side of each inner space of the first lifting unit 200a and the second lifting unit 200b, and two may be installed on both sides to stably support the other components.

The support 204 may be fixedly installed in the horizontal direction between the two support posts 202.

The vertical drive motor 206 may be fixed to the support 204 and transmit a driving force to the screw 208.

The turntable support 210 may be coupled to the screw 208 to move the turntable 212 in the up and down direction according to the driving of the up and down driving motor.

The rotary drive motor 216 is installed below the turntable support 210, may provide a driving force for rotating the turntable 212, and may provide a roller driving force.

The second feed roller 214 is installed on the top of the turntable, and may be rotated through the roller driving force provided from the rotation driving motor 216 to transfer the object.

Meanwhile, the first glove box 100a, the second glove box 100b, and the third glove box 100c as described above have the same configuration as that of the glove box 100 described with reference to FIGS. 1 to 4. The specific description thereof is omitted.

Therefore, in a transfer system using a glove box equipped with a clean room function according to another embodiment of the present invention, a plurality of glove boxes having a dust filtering function and an electrostatic elimination function are connected to each other and transferred, and are moved up and down through a lifting unit. By moving the object through movement, the object can be transferred from the first process chamber to the second process chamber while maintaining a clean process environment.

In the foregoing description, various embodiments of the present invention have been described and described, but the present invention is not necessarily limited thereto, and a person having ordinary skill in the art to which the present invention pertains may have various modifications without departing from the technical spirit of the present invention. It will be readily appreciated that branch substitutions, modifications and variations are possible.

Claims

A glove box that removes oxygen and moisture to provide a clean process environment,

It is installed in the upper structure (A) and the lower structure (C) installed on the upper and lower portions of the process chamber (B) provided in the glove box, and circulates the internal air of the process chamber (B) to the outside to filter dust Filtering unit 110,

A static electricity removing unit 120 installed in the upper structure A and removing static electricity generated by the dust;

Chamber unit 130 provided in the process chamber (B) for the process operation

Glove box with a clean room function including a.
The method of claim 1,

The filtering unit 110,

A plurality of blowers 111a and a plurality of filters 111b are installed in pairs in the upper structure A, and a blower box for filtering the dust from the circulated internal air and then introducing the dust into the process chamber B ( 111),

In the lower structure (C) a plurality is installed adjacent to the process chamber (B), exhaust box 113 for discharging the internal air,

A circulation pipe 112 installed outside the process chamber B to connect the blower box 111 and the exhaust box 113 to circulate the internal air.

Glove box with a clean room function including a.
The method of claim 2,

The circulation pipe 112 is directly connected to the blower box 111 or when the upper structure A including the blower box 111 has a sealed space, it is connected to the upper structure A. Glove box with clean room function.
The method of claim 3, wherein

The exhaust box 113 is a glove box having a clean room function, characterized in that the inner surface is provided with adsorption means for adsorbing the dust.
The method of claim 4, wherein

The chamber unit 130 includes a plurality of discharge parts 131a corresponding to the exhaust box 113 and a bottom plate 131 through which the internal air is discharged through the discharge part 131a. Glove box with clean room function.
A transfer system for transferring an object from a first process chamber to a second process chamber,

A filtering unit 110 installed in the upper structure A and the lower structure C installed at the upper and lower portions of the transfer chamber B, and filtering dust by circulating the internal air of the transfer chamber B to the outside; A static electricity removal unit 120 installed in the upper structure A and removing static electricity generated by the dust; and a chamber unit 130 provided in the transfer chamber B for processing. A first glove box 100a connected to the plurality of glove boxes and connected to the first process chamber to transfer the object discharged therefrom;

A third glove box 100c having the same configuration as that of the first glove box 100a and introducing the object to be transferred to and connected to the second process chamber to the second process chamber;

A first elevating unit 200a for elevating or lowering the object to be conveyed from the first glove box 100a and conveying or rotating the same in the same direction;

A second lifting unit 200b having the same function as the first lifting unit 200a and transferring the target object to the third glove box 100c;

A second glove box 100b having the same configuration as that of the first glove box 100a and connecting the first lifting unit 200a and the second lifting unit 200b to transfer the target object.

Transfer system using a glove box with a clean room function including a.
The method of claim 6,

The first lifting unit 200a and the second lifting unit 200b are

Two support posts 202 fixed to one side of each inner space of the first lifting unit 200a and the second lifting unit 200b;

A support 204 fixedly installed in the horizontal direction between the support posts 202,

A vertical drive motor 206 fixed to the support 204 and transmitting a driving force to the screw 208;

A turntable support 210 coupled to the screw 208 to move the turntable 212 in an up and down direction according to the driving of the up and down drive motor;

A rotation driving motor 216 installed below the turntable support 210 and providing a driving force for rotating the turntable 212 and providing a roller driving force;

A second feed roller 214 installed at an upper portion of the turntable to rotate through the roller driving force to transfer the object;

Transfer system using a glove box with a clean room function including a.
The method according to claim 6 or 7,

The filtering unit 110,

A plurality of blowers 111a and a plurality of filters 111b are installed in pairs in the upper structure A, and a blower box for filtering the dust from the circulated internal air and then introducing the dust into the process chamber B ( 111),

In the lower structure (C) a plurality is installed adjacent to the process chamber (B), exhaust box 113 for discharging the internal air,

A circulation pipe 112 installed outside the process chamber B to connect the blower box 111 and the exhaust box 113 to circulate the internal air.

Transfer system using a glove box with a clean room function comprising a.
The method of claim 8,

The circulation pipe 112 is directly connected to the blower box 111 or when the upper structure A including the blower box 111 has a sealed space, it is connected to the upper structure A. Transfer system using a glove box equipped with a clean room function.
The method of claim 9,

The exhaust box (113) is a transport system using a glove box with a clean room function, characterized in that the inner surface is provided with adsorption means for adsorbing the dust.
The method of claim 10,

The chamber unit 130 includes a plurality of discharge parts 131a corresponding to the exhaust box 113 and a bottom plate 131 through which the internal air is discharged through the discharge part 131a. Transfer system using a glove box equipped with a clean room function.