CN102859644A - Glove box with clean room function and transfer system using the same - Google Patents
Glove box with clean room function and transfer system using the same Download PDFInfo
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- CN102859644A CN102859644A CN201080053769XA CN201080053769A CN102859644A CN 102859644 A CN102859644 A CN 102859644A CN 201080053769X A CN201080053769X A CN 201080053769XA CN 201080053769 A CN201080053769 A CN 201080053769A CN 102859644 A CN102859644 A CN 102859644A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Abstract
The present invention relates to a glove box providing a clean process environment by removing oxygen and moisture and a transfer system using the same, the glove box with a clean room function includes a filtering unit(110) provided on an upper structure(A) and a lower structure(C) which are provided on an upper and a lower part of a process chamber(B), and filters dust by circulating the inside air of the process chamber(B) to the outside, a static electricity removing unit(120) provided on the upper structure(A) and removes static electricity generated by the dust, and a chamber unit(130) provided in the process chamber(B) for processing an operation, and a transfer system using the glove box as stated above.
Description
Technical field
The present invention relates to a kind of glove box that possesses clean room's function for the manufacture of semiconductor element and utilize the transfer system of this glove box.
Background technology
As everyone knows, organic illuminating element (OLED:organic electro luminescent device) possesses organic luminous layer by one in the flat panel displaying element between the positive electrode layer on the wafer and negative electrode layer, have the matrix shape of very thin thickness.
Formed organic thin film layer easily and moisture (H on this organic illuminating element
2O) and oxygen (O
2) reaction; life-span and characteristic on element produce many impacts; therefore at the substrate that is formed with organic illuminating element by the sealing units such as seal cover or sealing film sealing organic illuminating elements, thereby the organic thin film layer that makes formed organic illuminating element on the substrate is with outside moisture and oxygen isolation and protect.
But, in the operation of sealing organic illuminating element, also can import from the outside oxygen and moisture, therefore above-mentioned sealing process carries out in glove box (glove box), stably keeps the interior atmosphere of glove box and can bring very large impact to performance and the output of organic illuminating element.
Employed glove box comprises glove box main body, governor motion, vacuum pump etc. in the manufacture process of the semiconductor element as organic illuminating element so as mentioned above, the glove box main body is put into gloves that hand operates and front window etc. by the operator and is consisted of, and governor motion comprises inert gas and vacuum regulator.
Above-mentioned glove box, is set and is regulated by predetermined gas, pressure, temperature etc. to chamber interior transmission object thing (such as organic illuminating element etc.) in order to carry out an operation, utilizes as required glove box to pass through operator's manual manipulation object.Afterwards, if finish operation, then carry out next operation from this operation chamber to next operation chamber transmission object thing in order to carry out next operation.
May there be the dust (or dust) of contaminated object thing etc. in the inside of above-mentioned glove box, and this can become the principal element that the pollution that causes object and corresponding operation produce gross error, because the existence of the static of generation such as dust produces the more problem of grave error.
Summary of the invention
Problem to be solved by this invention
The object of the present invention is to provide a kind of transfer system that possesses the glove box of clean room's function and utilize this glove box, can make by the filter mechanism that glove box possesses the inner air circulation filter dust, possess the anti-locking mechanism of static, can prevent static.The present invention also aims to provide a kind of transfer system that possesses the glove box of clean room's function and utilize this glove box, extend a plurality of glove boxes that possess air circulation mechanism and the anti-locking mechanism of static of connection, can be from current operation chamber to next operation chamber clean ground transmission object thing.
The purpose of embodiments of the invention is not limited to above-mentioned purpose, and those skilled in the art can clearly understand top NM other purposes according to following record.
Be used for solving the means of problem
According to an aspect of the present invention, a kind of glove box that possesses clean room's function is provided, removing oxygen and moisture provides the operation environment of cleaning, comprise: filter mechanism 110, be arranged at top and set superstructure thing A and the infrastructure thing C in bottom of the operation chamber B that possesses at above-mentioned glove box, make the inner air of above-mentioned operation chamber B filter dust to outer loop; Static removal mechanism 120 is arranged at above-mentioned superstructure thing A, removes because the static that dust produces; And chamber mechanism 130, be arranged at above-mentioned operation chamber B in order to carry out procedures.
According to another aspect of the present invention, a kind of transfer system that has utilized the glove box that possesses clean room's function is provided, from the 1st operation chamber to the 2nd operation chamber transmission object thing, comprise: the 1st glove box 100a, extend and be connected with a plurality of filter mechanisms 110 that comprise, the glove box of static removal mechanism 120 and chamber mechanism 130, above-mentioned filter mechanism 110 is arranged on the top of operation chamber B and the bottom is set superstructure thing A and infrastructure thing C, make the inner air of above-mentioned operation chamber B filter dust to outer loop, above-mentioned static removal mechanism 120 is arranged at above-mentioned superstructure thing A, remove because the static that dust produces, above-mentioned chamber mechanism 130 is arranged at above-mentioned operation chamber B in order to carry out procedures, above-mentioned the 1st glove box 100a is connected with the 1st operation chamber, transmits the above-mentioned object of discharging from the 1st operation chamber; The 3rd glove box 100c has the structure identical with above-mentioned the 1st glove box 100a, is connected with above-mentioned the 2nd operation chamber, sends into the above-mentioned object that transmits to above-mentioned the 2nd operation chamber; The 1st lifting unit 200a makes the above-mentioned object that transmits from above-mentioned the 1st glove box 100a rise or descend, and transmits in the same direction above-mentioned object, or transmits after making above-mentioned object rotation; The 2nd lifting unit 200b has the function identical with above-mentioned the 1st lifting unit 200a, transmits above-mentioned object to above-mentioned the 3rd glove box 100c; And the 2nd glove box 100b, have the structure identical with above-mentioned the 1st glove box 100a, connect above-mentioned the 1st lifting unit 200a and above-mentioned the 2nd lifting unit 200b and transmit above-mentioned object.
The invention effect
In the present invention, make the operation chamber interior air circulation of glove box, in discharging case, dust is once removed, in wind pushing box, dust is carried out second removal, remove the static that produces from dust by the anti-locking mechanism of static, thereby realize clean room's function, the operation environment of cleaning can be provided.
In addition, in the system that has utilized the glove box that possesses clean room's function, extend and connect a plurality of glove boxes with dust filtering function and static removal function, by moving up and down and rotary moving transmission object thing of lifting unit, thus can keep cleaning the operation environment and from the 1st operation chamber to the 2nd operation chamber transmission object thing.
Description of drawings
Fig. 1 is the top stereogram of the glove box that possesses clean room's function of one embodiment of the present of invention.
Fig. 2 is the bottom stereogram of the glove box that possesses clean room's function of one embodiment of the present of invention.
Fig. 3 is the cutaway view of the glove box that possesses clean room's function of one embodiment of the present of invention.
Fig. 4 is the figure of the base plate that possesses of the operation chamber of the glove box of illustration one embodiment of the present of invention.
Fig. 5 is the top stereogram of lifting unit of the transfer system of an alternative embodiment of the invention.
Fig. 6 is the bottom stereogram of lifting unit of the transfer system of an alternative embodiment of the invention.
Fig. 7 is the figure of the transfer system of illustration an alternative embodiment of the invention.
Label declaration
100 glove boxes, 110 filter mechanisms
120 static removal mechanism, 130 chamber mechanisms
200a the 1st lifting unit 200b the 2nd lifting unit
Embodiment
The method of the advantage of embodiments of the invention, characteristics and realization above-described embodiment can be able to clearly with reference to the aftermentioned embodiment that describes in detail with reference to the accompanying drawings.But the present invention is not limited to the embodiment of following explanation, can realize by the variety of way that differs from one another, following examples only are used for intactly openly the present invention, and make the clear and definite scope of invention of those skilled in the art, and the present invention is determined by claims.Samely in specification represent the same structure key element with reference to label.
When the explanation embodiments of the invention, think and can obscure in the situation of main idea of the present invention the detailed description of known function or structure, description is omitted.In addition, term described later is at the term of having considered the function in the embodiments of the invention and having defined, and it can be according to user, operator's intention or custom and be different.Therefore, should give a definition according to the content of this specification integral body.
Below, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is the top stereogram of the glove box that possesses clean room's function of one embodiment of the present of invention, Fig. 2 is the bottom stereogram of the glove box that possesses clean room's function of one embodiment of the present of invention, Fig. 3 is the cutaway view of the glove box that possesses clean room's function of one embodiment of the present of invention, and Fig. 4 is the figure of the base plate that possesses of the operation chamber of the glove box of illustration one embodiment of the present of invention.
Existing glove box possesses the manual gloves for the operator, also comprise for the air regulator of removing moisture and oxygen etc., but when the glove box of explanation embodiments of the invention, above-mentioned gloves, moisture and oxygen removal device etc. are not described, feature of the present invention only is described.
Certainly, also gloves can be set, even in the situation that gloves are not set, the device that also usually will can carry out procedures under the state of cleaning is called glove box, and therefore following called after glove box describes.
Referring to figs. 1 through Fig. 4, the glove box that possesses clean room's function of one embodiment of the present of invention comprises filter mechanism 110, static removal mechanism 120 and chamber mechanism 130 etc.
At this, filter mechanism 110 can comprise wind pushing box 111, circulation pipe arrangement 112 and discharge case 113 etc.
At this, circulation pipe arrangement 112 can directly be connected with wind pushing box 111, perhaps when the above-mentioned superstructure thing A that comprises wind pushing box 111 has airtight space, can be connected with superstructure thing A.
A plurality of fumers 113 are adjacent to be arranged at infrastructure thing C with above-mentioned operation chamber B, can discharge above-mentioned inner air.
At this, fumer 113 can possess at inner surface the absorbing unit of absorption dust.This absorbing unit be such as can comprising absorption cloth etc., can the large dust of adsorption particle and dust is once removed.
In addition, chamber mechanism 130 can possess transfer roller 132, and this transfer roller 132 can support and transmit the operation plate 133 of placing for the object that carries out procedures.
Thereby, in the glove box of one embodiment of the present of invention, make the operation chamber interior air circulation of glove box, in discharging case, dust is once removed, in wind pushing box, dust is carried out second removal, remove the static that produces from dust by the anti-locking mechanism of static, thereby realize clean room's function, the operation environment of cleaning is provided.
Then, the object that the glove box that will have a said structure is applicable between the operation chamber transmits, and the utilization that realized clean room's function has been described has possessed the transfer system of the glove box of clean room's function.
Fig. 5 is the top stereogram of lifting unit of the transfer system of an alternative embodiment of the invention.
Fig. 6 is the bottom stereogram of lifting unit of the transfer system of an alternative embodiment of the invention.
Fig. 7 is the figure of the transfer system of illustration an alternative embodiment of the invention.
With reference to Fig. 5 to Fig. 7, the transfer system of an alternative embodiment of the invention is the system from the 1st operation chamber to the 2nd operation chamber transmission object thing, comprises the 1st glove box 100a, the 2nd glove box 100b, the 3rd glove box 100c, the 1st lifting unit 200a and the 2nd lifting unit 200b etc.
The 1st glove box 100a extension is connected with a plurality of filter mechanisms 110 that comprise, the glove box of static removal mechanism 120 and chamber mechanism 130, above-mentioned filter mechanism 110 is arranged at top and set superstructure thing A and the infrastructure thing C in bottom of operation chamber B, make the inner air of operation chamber B filter dust to outer loop, above-mentioned static removal mechanism 120 is arranged at superstructure thing A, remove because the static that dust produces, above-mentioned chamber mechanism 130 is arranged at operation chamber B in order to carry out procedures, the 1st glove box 100a is connected with the 1st operation chamber, can transmit the object of discharging from the 1st operation chamber to the 1st lifting unit 200a.
The 2nd glove box 100b has the structure identical with the 1st glove box 100a, connects the 1st lifting unit 200a and the 2nd lifting unit 200b, can transmit the object of sending into from the 1st lifting unit 200a to the 2nd lifting unit 200b.
The 3rd glove box 100c has the structure identical with the 1st glove box 100a, is connected with the 2nd operation chamber, sends into the object of sending into from the 2nd lifting unit 200b to the 2nd operation chamber.
The 1st lifting unit 200a can make the object that transmits from the 1st glove box 100a rise or descend, and in the same direction towards the 2nd glove box 100b transmission object thing, or makes object rotate backward the 2nd glove box 100b transmission.
The 2nd lifting unit 200b has the function identical with the 1st lifting unit 200a, can transmit the object that sends from the 2nd glove box 100b to the 3rd glove box 100c.
As shown in the figure, Fig. 5 to Fig. 7 represents that the 1st lifting unit 200a is with the situation of object to the rear transmission of right angle orientation rotation, the 2nd lifting unit 200b is to same direction transmission object thing, but be not limited to this, certain the 1st lifting unit 200a can transmit after other angle rotations to same direction transmission object thing or with object, and the 2nd lifting unit 200b can transmit object after other angle rotations.
At this, the 1st lifting unit 200a and the 2nd lifting unit 200b can comprise support bar 202, support 204, up and down drive motors 206, screw rod 208, support for rotary disc 210, rotating disk 212, the 2nd transfer roller 214 and rotary drive motor 216 etc.
Drive motors 206 is fixed in support 204 up and down, can be to screw rod 208 transmission of drive force.
Support for rotary disc 210 and screw rod 208 combinations can be according to the driving of drive motors up and down movable roundabouts 212 along the vertical direction.
The 2nd transfer roller 214 is arranged at the top of rotating disk, can rotate the transmission object thing by the roller actuating force that provides from above-mentioned rotary drive motor 216.
On the other hand, aforesaid the 1st glove box 100a, the 2nd glove box 100b and the 3rd glove box 100c have the structure identical with the structure of the glove box 100 that illustrates referring to figs. 1 through Fig. 4, therefore omit it and specify.
Thereby, in the system of the glove box that possesses clean room's function that has utilized embodiments of the invention, extend to connect and a plurality ofly to have dust filtering function and static and remove the glove box of function and the transmission object thing, by moving up and down and rotary moving transmission object thing of lifting unit, thus can keep cleaning the operation environment and from the 1st operation chamber to the 2nd operation chamber transmission object thing.
Prompting has illustrated various embodiment of the present invention in the above description, but the present invention is not limited to this, and those skilled in the art can understand in the scope that does not break away from technological thought of the present invention can carry out various displacements, distortion and change.
For the mode that carries out an invention
According to an aspect of the present invention, a kind of glove box that possesses clean room's function is provided, removing oxygen and moisture provides the operation environment of cleaning, comprise: filter mechanism 110, be arranged at top and set superstructure thing A and the infrastructure thing C in bottom of the operation chamber B that possesses at above-mentioned glove box, make the inner air of above-mentioned operation chamber B filter dust to outer loop; Static removal mechanism 120 is arranged at above-mentioned superstructure thing A, removes because the static that dust produces; And chamber mechanism 130, be arranged at above-mentioned operation chamber B in order to carry out procedures.
According to another aspect of the present invention, a kind of transfer system that has utilized the glove box that possesses clean room's function is provided, from the 1st operation chamber to the 2nd operation chamber transmission object thing, comprise: the 1st glove box 100a, extend and be connected with a plurality of filter mechanisms 110 that comprise, the glove box of static removal mechanism 120 and chamber mechanism 130, above-mentioned filter mechanism 110 is arranged on the top of operation chamber B and the bottom is set superstructure thing A and infrastructure thing C, make the inner air of above-mentioned operation chamber B filter dust to outer loop, above-mentioned static removal mechanism 120 is arranged at above-mentioned superstructure thing A, remove because the static that dust produces, above-mentioned chamber mechanism 130 is arranged at above-mentioned operation chamber B in order to carry out procedures, above-mentioned the 1st glove box 100a is connected with the 1st operation chamber, transmits the above-mentioned object of discharging from the 1st operation chamber; The 3rd glove box 100c has the structure identical with above-mentioned the 1st glove box 100a, is connected with above-mentioned the 2nd operation chamber, sends into the above-mentioned object that transmits to above-mentioned the 2nd operation chamber; The 1st lifting unit 200a makes the above-mentioned object that transmits from above-mentioned the 1st glove box 100a rise or descend, and transmits in the same direction above-mentioned object, or transmits after making above-mentioned object rotation; The 2nd lifting unit 200b has the function identical with above-mentioned the 1st lifting unit 200a, transmits above-mentioned object to above-mentioned the 3rd glove box 100c; And the 2nd glove box 100b, have the structure identical with above-mentioned the 1st glove box 100a, connect above-mentioned the 1st lifting unit 200a and above-mentioned the 2nd lifting unit 200b and transmit above-mentioned object.
Industrial utilizability
In the present invention, make the operation chamber interior air circulation of glove box, in discharging case, dust is once removed, in wind pushing box, dust is carried out second removal, remove the static that produces from dust by the anti-locking mechanism of static, thereby realize clean room's function, the operation environment of cleaning can be provided.
In addition, in the system that has utilized the glove box that possesses clean room's function, extend and connect a plurality of glove boxes with dust filtering function and static removal function, by moving up and down and rotary moving transmission object thing of lifting unit, thus can keep cleaning the operation environment and from the 1st operation chamber to the 2nd operation chamber transmission object thing.
Claims (11)
1. a glove box that possesses clean room's function is removed the operation environment that oxygen and moisture provide cleaning, comprising:
Filter mechanism (110) is arranged at set superstructure thing (A) and the infrastructure thing (C) in top and bottom of the operation chamber (B) that possesses at above-mentioned glove box, makes the inner air of above-mentioned operation chamber (B) filter dust to outer loop;
Static removal mechanism (120) is arranged at above-mentioned superstructure thing (A), removes because the static that dust produces; And
Chamber mechanism (130) is arranged at above-mentioned operation chamber (B) in order to carry out procedures.
2. the glove box that possesses clean room's function according to claim 1, wherein,
Above-mentioned filter mechanism (110) comprising:
Wind pushing box (111) is provided with a plurality of blowers (111a) and a plurality of filter (111b) in couples on above-mentioned superstructure thing (A), filter above-mentioned dust and send into above-mentioned operation chamber (B) afterwards from the above-mentioned inner air that circulates;
A plurality of fumers (113) are adjacent to be arranged at above-mentioned infrastructure thing (C) with above-mentioned operation chamber (B), can discharge above-mentioned inner air; And
Circulation pipe arrangement (112) is arranged at the outside of above-mentioned operation chamber (B), connects above-mentioned wind pushing box (111) and above-mentioned fumer (113), makes above-mentioned inner air circulation.
3. the glove box that possesses clean room's function according to claim 2, wherein,
Above-mentioned circulation pipe arrangement (112) directly is connected with above-mentioned wind pushing box (111), and perhaps when the above-mentioned superstructure thing (A) that comprises above-mentioned wind pushing box (111) had airtight space, above-mentioned circulation pipe arrangement (112) was connected with above-mentioned superstructure thing (A).
4. the glove box that possesses clean room's function according to claim 3, wherein,
Above-mentioned fumer (113) possesses the absorbing unit of the above-mentioned dust of absorption at inner surface.
5. the glove box that possesses clean room's function according to claim 4, wherein,
Above-mentioned chamber mechanism (130) possesses base plate (131), and this base plate (131) possesses a plurality of discharge portions (131a) accordingly with above-mentioned fumer (113), and (131a) discharges above-mentioned inner air by above-mentioned discharge portion.
6. transfer system that has utilized the glove box that possesses clean room's function from the 1st operation chamber to the 2nd operation chamber transmission object thing, comprising:
The 1st glove box (100a), extend and be connected with a plurality of filter mechanisms (110) that comprise, the glove box of static removal mechanism (120) and chamber mechanism (130), above-mentioned filter mechanism (110) is arranged on the top of operation chamber (B) and the bottom is set superstructure thing (A) and infrastructure thing (C), make the inner air of above-mentioned operation chamber (B) filter dust to outer loop, above-mentioned static removal mechanism (120) is arranged at above-mentioned superstructure thing (A), remove because the static that dust produces, above-mentioned chamber mechanism (130) is arranged at above-mentioned operation chamber (B) in order to carry out procedures, above-mentioned the 1st glove box (100a) is connected with the 1st operation chamber, transmits the above-mentioned object of discharging from the 1st operation chamber;
The 3rd glove box (100c) has the structure identical with above-mentioned the 1st glove box (100a), is connected with above-mentioned the 2nd operation chamber, sends into the above-mentioned object that transmits to above-mentioned the 2nd operation chamber;
The 1st lifting unit (200a) makes the above-mentioned object that transmits from above-mentioned the 1st glove box (100a) rise or descend, and transmits in the same direction above-mentioned object, or transmits after making above-mentioned object rotation;
The 2nd lifting unit (200b) has the function identical with above-mentioned the 1st lifting unit (200a), transmits above-mentioned object to above-mentioned the 3rd glove box (100c); And
The 2nd glove box (100b) has the structure identical with above-mentioned the 1st glove box (100a), connects above-mentioned the 1st lifting unit (200a) and above-mentioned the 2nd lifting unit (200b) and transmits above-mentioned object.
7. the transfer system that has utilized the glove box that possesses clean room's function according to claim 6, wherein,
Above-mentioned the 1st lifting unit (200a) and the 2nd lifting unit (200b) comprising:
Two support bars (202) are fixedly installed on a side of above-mentioned the 1st lifting unit (200a) and the 2nd lifting unit (200b) inner space separately;
Support (204), the edge laterally is fixedly installed between above-mentioned support bar (202);
Drive motors (206) is fixed in above-mentioned support (204) up and down, to screw rod (208) transmission of drive force;
Support for rotary disc (210) is with above-mentioned screw rod (208) combination, according to the driving of above-mentioned up and down drive motors movable roundabout (212) along the vertical direction;
Rotary drive motor (216) is arranged at the bottom of above-mentioned support for rotary disc (210), the actuating force that makes above-mentioned rotating disk (212) rotation is provided, and the roller actuating force is provided; And
The 2nd transfer roller (214) is arranged at the top of above-mentioned rotating disk, rotates to transmit above-mentioned object by above-mentioned roller actuating force.
8. according to claim 6 or the 7 described transfer systems that utilized the glove box that possesses clean room's function, wherein,
Above-mentioned filter mechanism (110) comprising:
Wind pushing box (111) is provided with a plurality of blowers (111a) and a plurality of filter (111b) in couples on above-mentioned superstructure thing (A), filter above-mentioned dust and send into above-mentioned operation chamber (B) afterwards from the described inner air that circulates;
A plurality of fumers (113) are adjacent to be arranged at above-mentioned infrastructure thing (C) with above-mentioned operation chamber (B), discharge above-mentioned inner air; And
Circulation pipe arrangement (112) is arranged at the outside of above-mentioned operation chamber (B), connects above-mentioned wind pushing box (111) and above-mentioned fumer (113), makes above-mentioned inner air circulation.
9. the transfer system that has utilized the glove box that possesses clean room's function according to claim 8, wherein,
Above-mentioned circulation pipe arrangement (112) directly is connected with above-mentioned wind pushing box (111), and perhaps when the above-mentioned superstructure thing (A) that comprises above-mentioned wind pushing box (111) had airtight space, above-mentioned circulation pipe arrangement (112) was connected with above-mentioned superstructure thing (A).
10. the transfer system that has utilized the glove box that possesses clean room's function according to claim 9, wherein,
Above-mentioned fumer (113) possesses the absorbing unit of the above-mentioned dust of absorption at inner surface.
11. the transfer system that has utilized the glove box that possesses clean room's function according to claim 10, wherein,
Above-mentioned chamber mechanism (130) possesses base plate (131), and this base plate (131) possesses a plurality of discharge portions (131a) accordingly with above-mentioned fumer (113), and (131a) discharges above-mentioned inner air by above-mentioned discharge portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0037671 | 2011-04-22 | ||
| KR1020110037671A KR101052460B1 (en) | 2011-04-22 | 2011-04-22 | Glove box with clean room capacity and its used transfer system |
| PCT/KR2011/007292 WO2012144701A1 (en) | 2011-04-22 | 2011-10-02 | Glove box with clean room function and transfer system using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102859644A true CN102859644A (en) | 2013-01-02 |
Family
ID=44924173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080053769XA Pending CN102859644A (en) | 2011-04-22 | 2011-10-02 | Glove box with clean room function and transfer system using the same |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101052460B1 (en) |
| CN (1) | CN102859644A (en) |
| WO (1) | WO2012144701A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112185852B (en) * | 2020-09-21 | 2023-08-18 | 武汉光谷航天三江激光产业技术研究院有限公司 | Portable cascading hundred-grade cleaning device and method for semiconductor device packaging |
| KR20240008763A (en) | 2022-07-11 | 2024-01-19 | 주식회사 레이크머티리얼즈 | Chloride Dust Collector |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10272320A (en) * | 1997-03-28 | 1998-10-13 | Toshiba Ceramics Co Ltd | Air purifying apparatus for semiconductor manufacturing process |
| US20040168742A1 (en) * | 2003-02-12 | 2004-09-02 | Kim Hyun-Joon | Module for transferring a substrate |
| KR20060066415A (en) * | 2004-12-13 | 2006-06-16 | 삼성전자주식회사 | Apparatus for transferring a substrate |
| CN101575125A (en) * | 2008-05-09 | 2009-11-11 | 岳山 | Water-oxygen fractionating purification vacuum glove box |
| KR20100028293A (en) * | 2008-09-04 | 2010-03-12 | (주)신성이엔지 | Clean room system |
-
2011
- 2011-04-22 KR KR1020110037671A patent/KR101052460B1/en not_active IP Right Cessation
- 2011-10-02 CN CN201080053769XA patent/CN102859644A/en active Pending
- 2011-10-02 WO PCT/KR2011/007292 patent/WO2012144701A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10272320A (en) * | 1997-03-28 | 1998-10-13 | Toshiba Ceramics Co Ltd | Air purifying apparatus for semiconductor manufacturing process |
| US20040168742A1 (en) * | 2003-02-12 | 2004-09-02 | Kim Hyun-Joon | Module for transferring a substrate |
| KR20060066415A (en) * | 2004-12-13 | 2006-06-16 | 삼성전자주식회사 | Apparatus for transferring a substrate |
| CN101575125A (en) * | 2008-05-09 | 2009-11-11 | 岳山 | Water-oxygen fractionating purification vacuum glove box |
| KR20100028293A (en) * | 2008-09-04 | 2010-03-12 | (주)신성이엔지 | Clean room system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012144701A1 (en) | 2012-10-26 |
| KR101052460B1 (en) | 2011-07-28 |
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Application publication date: 20130102 |