WO2012140980A1 - Dispositif de déplacement en translation, interféromètre de michelson et spectromètre à transformation de fourier - Google Patents

Dispositif de déplacement en translation, interféromètre de michelson et spectromètre à transformation de fourier Download PDF

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Publication number
WO2012140980A1
WO2012140980A1 PCT/JP2012/056073 JP2012056073W WO2012140980A1 WO 2012140980 A1 WO2012140980 A1 WO 2012140980A1 JP 2012056073 W JP2012056073 W JP 2012056073W WO 2012140980 A1 WO2012140980 A1 WO 2012140980A1
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WIPO (PCT)
Prior art keywords
elastic
moving
light
translation device
mirror
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PCT/JP2012/056073
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English (en)
Japanese (ja)
Inventor
広瀬　悟
小坂　明
賢次 水本
祐司 延本
豊年 川崎
滋人 大森
Original Assignee
コニカミノルタホールディングス株式会社
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Priority to JP2013509831A priority Critical patent/JP5720777B2/ja
Publication of WO2012140980A1 publication Critical patent/WO2012140980A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror

Definitions

  • the present invention relates to a translation device in which a moving unit reciprocates while maintaining a parallel posture, a Michelson interferometer including the translation device, and a Fourier transform spectroscopic analysis device including the Michelson interferometer.
  • a parallel leaf spring structure is known as disclosed in Japanese Patent Laid-Open No. 02-307037 (Patent Document 1) and Japanese Patent Laid-Open No. 61-085640 (Patent Document 2).
  • Patent Document 1 Japanese Patent Laid-Open No. 02-307037
  • Patent Document 2 Japanese Patent Laid-Open No. 61-085640
  • one end side is fixed, and the moving part on the other end side reciprocates while maintaining a parallel posture.
  • a piezoelectric element is used for vibration (excitation) of the moving part.
  • the parallel leaf spring structure disclosed in Patent Document 2 uses a permanent magnet for vibration (excitation) of the moving part.
  • the present invention relates to a translation device capable of improving the translation performance in the moving part when the parallel leaf spring structure is vibrated at the resonance frequency, a Michelson interferometer including the translation device, and the Michelson interference.
  • An object of the present invention is to provide a Fourier transform spectroscopic analysis apparatus including a meter.
  • the parallel movement device is a parallel movement device in which the moving portion reciprocates while maintaining a parallel posture, and is composed of flat plate-like members, which are arranged to face each other with a space therebetween.
  • a drive receiving unit that is attached to the moving unit and reciprocates together with the moving unit by receiving electromagnetic force in a non-contact manner, the first elastic unit, the first A parallel leaf spring structure in which one end is fixed to the fixed portion is configured by the two elastic portions and the moving portion, and the drive receiving portion is configured so that the moving portion of the parallel leaf spring structure vibrates at a resonance frequency. Receives the electromagnetic force.
  • the drive receiving unit is composed of a magnet.
  • the drive receiving portion is attached to the one end side of the parallel leaf spring structure as viewed from the moving portion.
  • the moving part includes an extending part extending toward the one end side of the parallel leaf spring structure between the first elastic part and the second elastic part, and the drive receiving part includes It attaches to the front-end
  • the drive receiving portion is located in a central portion of a region where the first elastic portion and the second elastic portion are elastically deformed in the longitudinal direction of the first elastic portion and the second elastic portion.
  • the extension part is manufactured separately from a part connecting the other ends of the first elastic part and the second elastic part of the moving part, and It is fixed.
  • the inside of the extending part is formed in a hollow shape, and the moving part has a hole extending from the moving part side toward the drive receiving part side.
  • the parallel movement device according to the present invention further includes a stopper for restricting the movement of the moving unit so that the moving amount of the moving unit is within a predetermined range.
  • the moving portion is provided with a fitting portion into which the drive receiving portion is fitted.
  • a Michelson interferometer includes the parallel movement device according to the present invention, a movable mirror provided so as to be exposed on the outer surface on the other end side of the parallel leaf spring structure, a fixed mirror, The light source and the light emitted from the light source are divided into light directed to the fixed mirror and light directed to the movable mirror, and the light reflected on each of the fixed mirror and the movable mirror is combined and emitted as interference light.
  • a Fourier transform spectroscopic analyzer based on the present invention includes the Michelson interferometer based on the present invention, a calculation unit that calculates the spectrum of the interference light detected by the detector, and the spectrum obtained by the calculation unit. And an output unit for outputting.
  • a translation device capable of improving the translation performance in the moving part, a Michelson interferometer including the translation device, and the Michael A Fourier transform spectroscopic analyzer equipped with a Son interferometer can be obtained.
  • FIG. 2 is a perspective view showing a translation device in the first embodiment.
  • FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2. It is sectional drawing which shows a mode that the parallel displacement apparatus in Embodiment 1 is vibrating.
  • FIG. 5 is a cross-sectional view taken along line VV in FIG. 4.
  • (A) is sectional drawing which shows a mode that the position detection apparatus used for the translation apparatus in Embodiment 1 has detected the position of the elastic part located in the top dead center of reciprocation.
  • FIG. B is sectional drawing which shows a mode that the position detection apparatus used for the translation apparatus in Embodiment 1 has detected the position of the elastic part located in the bottom dead center of reciprocation. Relationship between the displacement of the elastic part in the reciprocating direction (horizontal axis) and the magnitude of the output signal output from the light receiver (vertical axis) when the elastic part reciprocates between the top dead center and the bottom dead center FIG. It is a figure which shows the relationship between time (horizontal axis) and the magnitude
  • FIG. 10 is an enlarged view of a diagram in the vicinity of a frequency f 0 (resonance frequency) in FIG. 9.
  • FIG. 6 is a cross-sectional view showing a translation device in a second embodiment.
  • FIG. 6 is a perspective view showing a translation device in a second embodiment.
  • FIG. 10 is a cross-sectional view showing a translation device in a third embodiment.
  • FIG. 9 is a perspective view showing a translation device in a third embodiment.
  • FIG. 10 is a plan view showing a translation device in a fourth embodiment.
  • FIG. 16 is a cross-sectional view taken along line XVI-XVI in FIG. 15.
  • FIG. 10 is a plan view showing a translation device in a fifth embodiment.
  • FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG.
  • FIG. 25 is a plan view showing another example of the parallel movement device in the fifth embodiment. It is sectional drawing which shows the parallel displacement apparatus in Embodiment 6. It is sectional drawing which shows a mode that the parallel displacement apparatus in Embodiment 6 is vibrating.
  • FIG. 10 is a cross-sectional view showing a translation device in a seventh embodiment.
  • FIG. 25 is a perspective view showing a state in which a part (stopper) of the parallel movement device in the eighth embodiment is disassembled. It is a perspective view which shows the assembled state of the parallel displacement apparatus in Embodiment 8.
  • the Fourier transform spectroscopic analysis apparatus 100 includes a Michelson interferometer 1, a calculation unit 2, and an output unit 3.
  • the Michelson interferometer 1 includes a parallel movement device 10, a spectroscopic optical system 11, a reference optical system 21, an optical path correction device 31, a position detection device 70, and a control unit 90.
  • the spectroscopic optical system 11 includes a light source 12, a collimating optical system 13, a beam splitter 14, a fixed mirror 15, a moving mirror 16, a condensing optical system 17, a detector 18, and a translation device 10.
  • the light source 12 is a light source for spectroscopy.
  • the light source 12 is composed of a halogen lamp or the like, and emits lamp light having a wide wavelength including infrared light.
  • the light emitted from the light source 12 is introduced into an optical path combining mirror 23 in the reference optical system 21 (details will be described later), and is combined with the light emitted from the reference light source 22 (details will be described later).
  • the combined light is emitted from the optical path combining mirror 23, converted into parallel light by the collimating optical system 13, and then introduced into the beam splitter 14.
  • the beam splitter 14 is composed of a half mirror or the like. The light (incident light) introduced into the beam splitter 14 is divided into two light beams.
  • One side of the divided light is irradiated to the fixed mirror 15.
  • the light reflected by the surface of the fixed mirror 15 (reflected light) passes through substantially the same optical path as before the reflection and is irradiated again to the beam splitter 14.
  • the other of the divided lights is irradiated to the movable mirror 16.
  • the light reflected by the surface of the movable mirror 16 (reflected light) passes through substantially the same optical path as before the reflection and is irradiated again to the beam splitter 14.
  • the reflected light from the fixed mirror 15 and the reflected light from the moving mirror 16 are combined (superposed) by the beam splitter 14.
  • the movable mirror 16 is reciprocated (translated) in the direction of the arrow AR while being kept parallel by the translation device 10 (details). Will be described later). Due to the reciprocating movement of the movable mirror 16, a difference in optical path length occurs between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16. The reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16 are combined by the beam splitter 14 to form interference light.
  • the difference in optical path length changes continuously according to the position of the movable mirror 16.
  • the intensity of light as interference light also changes continuously according to the difference in optical path length.
  • the difference in optical path length is, for example, an integral multiple of the wavelength of light irradiated from the collimating optical system 13 to the beam splitter 14, the intensity of light as interference light is maximized.
  • the sample S is irradiated with the light forming the interference light.
  • the light transmitted through the sample S is collected by the condensing optical system 17.
  • the condensed light is introduced into the optical path separation mirror 24 in the reference optical system 21 (details will be described later).
  • the detector 18 detects the light emitted from the optical path separation mirror 24 as an interference pattern (interferogram).
  • This interference pattern is sent to the calculation unit 2 including a CPU (Central Processing Unit) and the like.
  • the computing unit 2 converts the collected (sampled) interference pattern from an analog format to a digital format, and further performs Fourier transform on the converted data.
  • the data after the Fourier transform is output to another device through the output unit 3 or displayed on a display or the like. Based on this spectral distribution, the characteristics (eg, material, structure, or amount of components) of the sample S are analyzed.
  • the reference optical system 21 includes a collimating optical system 13, a beam splitter 14, a fixed mirror 15, a moving mirror 16, a condensing optical system 17, a reference light source 22, an optical path synthesis mirror 23, an optical path separation mirror 24, a reference detector 25, and a signal.
  • a processing unit 26 is included.
  • the collimating optical system 13, the beam splitter 14, the fixed mirror 15, the moving mirror 16, and the condensing optical system 17 are common to both the spectroscopic optical system 11 and the reference optical system 21.
  • the reference light source 22 is composed of a light emitting element such as a semiconductor laser, and emits light such as red light. As described above, the light emitted from the reference light source 22 is introduced into the optical path combining mirror 23.
  • the optical path combining mirror 23 is composed of a half mirror (a mirror having wavelength selectivity) and the like. The light emitted from the light source 12 passes through the optical path combining mirror 23. The light emitted from the reference light source 22 is reflected by the optical path combining mirror 23.
  • the light from the light source 12 and the light from the reference light source 22 are emitted from the optical path combining mirror 23 onto the same optical path in a state where they are combined by the optical path combining mirror 23.
  • the light emitted from the optical path combining mirror 23 is converted into parallel light by the collimating optical system 13 and then introduced into the beam splitter 14 and split into two light beams.
  • one of the divided lights is irradiated on the fixed mirror 15 and again irradiated on the beam splitter 14 as reflected light.
  • the other of the divided lights is applied to the movable mirror 16 and is applied again to the beam splitter 14 as reflected light.
  • the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16 are combined by the beam splitter 14 to form interference light.
  • the sample S is irradiated with the light forming the interference light.
  • the light transmitted through the sample S is collected by the condensing optical system 17.
  • the condensed light is introduced into the optical path separation mirror 24 in the reference optical system 21.
  • the optical path separation mirror 24 is composed of a half mirror (wavelength selective mirror) or the like, and the light (incident light) introduced into the optical path separation mirror 24 is divided into two light beams.
  • the light emitted from the light source 12 and introduced into the optical path separation mirror 24 through the optical path synthesis mirror 23, the collimating optical system 13, the beam splitter 14, the fixed mirror 15, the movable mirror 16, the sample S, and the condensing optical system 17 The light passes through the separation mirror 24. As described above, this light (interference light) transmitted through the optical path separation mirror 24 is detected by the detector 18.
  • the interference pattern of the interference light is sent to a signal processing unit 26 including a CPU and the like.
  • the signal processing unit 26 calculates the intensity of the reflected light from the optical path separation mirror 24 based on the collected interference pattern. Based on the intensity of the reflected light from the optical path separation mirror 24, the signal processing unit 26 can generate a signal indicating the sampling timing in the calculation unit 2.
  • a signal indicating the sampling timing in the calculation unit 2 can be generated by a known means.
  • the signal processing unit 26 tilts the light between the two optical paths (relative tilt between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16). Can also be calculated.
  • the optical path correction device 31 Based on the detection result in the signal processing unit 26 (relative inclination between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16), the optical path correction device 31 is configured to move the posture of the fixed mirror 15 (of the movable mirror 16). The relative angle of the surface of the fixed mirror 15 with respect to the surface is adjusted. By this adjustment, the optical path of the reflected light at the fixed mirror 15 is corrected, and the inclination of the light between the two optical paths can be eliminated (or reduced). By providing the optical path correction device 31 in the Michelson interferometer 1, it becomes possible to generate interference light with higher accuracy.
  • FIG. 2 is a perspective view showing the translation device 10.
  • 3 is a cross-sectional view taken along the line III-III in FIG.
  • the parallel movement device 10 includes an elastic part 41 (first elastic part), an elastic part 42 (second elastic part), a moving part 43, a fixed part 44, and a driving part 45.
  • the parallel leaf spring structure 40 is configured by the elastic portion 41, the elastic portion 42, and the moving portion 43.
  • the parallel leaf spring structure 40 is configured symmetrically in the width direction of the elastic portions 41 and 42.
  • the elastic part 41 and the elastic part 42 have substantially the same length, and are configured in a flat plate shape having a rectangular shape in plan view.
  • the material of each elastic part 41, 42 is silicon or metal.
  • Each elastic part 41 and 42 is extended in the same direction, and is mutually opposingly arranged at intervals.
  • the fixing portion 44 is configured in a substantially rectangular parallelepiped shape, and the material thereof is glass, metal, ceramic, or the like.
  • the fixing portion 44 is sandwiched between the back surface on the one end 41 a side of the elastic portion 41 and the surface on the one end 42 a side of the elastic portion 42.
  • the elastic portion 41 and the fixed portion 44 are joined by anodic bonding.
  • the elastic portion 42 and the fixed portion 44 are also joined by anodic bonding.
  • the fixing portion 44 is firmly fixed to another structural device (not shown) in the Michelson interferometer 1 (see FIG. 1).
  • the moving part 43 is formed in a substantially rectangular parallelepiped shape, and the material thereof is glass, metal, ceramic, or the like.
  • the moving portion 43 is sandwiched between the back surface on the other end 41 b side of the elastic portion 41 and the surface on the other end 42 b side of the elastic portion 42.
  • the elastic portion 41 and the moving portion 43 are joined by anodic bonding.
  • the elastic portion 42 and the moving portion 43 are also joined by anodic bonding.
  • the moving portion 43 connects the other end 41 b of the elastic portion 41 and the other end 42 b of the elastic portion 42.
  • the parallel leaf spring structure 40 is configured by the elastic portion 41, the elastic portion 42, and the moving portion 43.
  • One end 40 a of the parallel leaf spring structure 40 is constituted by one end 41 a of the elastic portion 41 and one end 42 a of the elastic portion 42.
  • the other end 40 b of the parallel leaf spring structure 40 is configured by the other end 41 b of the elastic portion 41 and the other end 42 b of the elastic portion 42.
  • the drive part 45 (refer FIG. 3) is what is called a voice coil motor (VCM: Voice Coil Motor), and is comprised from the coil part 45C and the magnet part 45M (drive receiving part).
  • VCM Voice Coil Motor
  • the drive unit 45 (the coil unit 45C and the magnet unit 45M) in the present embodiment is disposed between the elastic unit 41 and the elastic unit 42.
  • the coil part 45C is fixed to another structural device (not shown) in the Michelson interferometer 1 (see FIG. 1).
  • the magnet unit 45M is attached to the moving unit 43.
  • the magnet part 45M in the present embodiment is provided on the end face of the moving part 43 on the fixed part 44 side.
  • the magnet part 45 ⁇ / b> M is located on the one end 40 a side of the fixed part 44 when viewed from the moving part 43.
  • the magnet part 45M is disposed in the central part (in the thickness direction and the width direction) on the end face of the moving part 43.
  • Magnet unit 45M is made of a permanent magnet such as neodymium, for example.
  • the movable mirror 16 is fixed to the surface 40S (outer surface) of the elastic part 41 on the other end 41b side.
  • the position detection device 70 includes a projector 71, a light receiver 72, and a connection unit 73.
  • the light projector 71 and the light receiver 72 are arranged to face each other with the elastic part 41 of the translation device 10 interposed therebetween.
  • the operation of the translation device 10 will be described with reference to FIGS. 3 and 4.
  • a predetermined voltage is applied to the coil portion 45C.
  • the magnet part 45M receives the electromagnetic force displaced in the thickness direction (up and down direction in FIG. 3) of the elastic parts 41 and 42 in a non-contact manner by a magnetic field generated around the coil part 45C.
  • the magnet unit 45M When an AC voltage is applied to the coil unit 45C, the magnet unit 45M receives an electromagnetic force that tends to be displaced upward in FIG. 3 at some point, and the magnet unit 45M is below the page in FIG. Receives an electromagnetic force trying to displace in the direction. When an AC voltage is applied to the coil portion 45C, these electromagnetic forces act alternately on the magnet portion 45M.
  • the magnet portion 45M reciprocates (vibrates) with an amplitude L in the thickness direction (arrow AR direction) of the elastic portions 41 and 42.
  • the moving portion 43 also reciprocates (vibrates) with an amplitude L in the thickness direction (arrow AR direction) of the elastic portions 41 and 42.
  • the one end 40a of the parallel leaf spring structure 40 constitutes a fixed end, and the other end 40b side of the parallel leaf spring structure 40 and the moving part 43 vibrate as free ends.
  • the movable mirror 16 provided on the other end 41b side of the surface 41S of the elastic portion 41 vibrates (reciprocates) in the direction of the arrow AR while maintaining a parallel posture.
  • the Michelson interferometer 1 By the reciprocation of the movable mirror 16, the Michelson interferometer 1 (see FIG. 1) can generate interference light.
  • the elastic portion 41 reciprocates between the projector 71 and the light receiver 72 with an amplitude D1.
  • the position detection device 70 will be described with reference to FIG. FIG. 5 is a cross-sectional view taken along the line VV in FIG. As described above, the elastic part 41 and the elastic part 42 receive a driving force from the driving part 45 (see FIG. 3) and reciprocate in the direction of the arrow AR similarly to the movable mirror 16 (see FIG. 3).
  • the phase of the elastic part 41 is equivalent to the phase of the movable mirror 16.
  • the position detection device 70 includes a projector 71, a light receiver 72, and a connection unit 73.
  • a photo interrupter registered trademark
  • the light projector 71 and the light receiver 72 are fixedly arranged so as to face each other with the elastic portion 41 interposed therebetween.
  • the elastic part 41 reciprocates between the projector 71 and the light receiver 72.
  • the connecting portion 73 is fixed to a predetermined structure 75 in the Michelson interferometer 1 (see FIG. 1) with the support portion 74 interposed therebetween.
  • the projector 71 has a projector 71A.
  • the light receiver 72 has a light receiving portion 72A.
  • Measurement light 80 having a width W is emitted from the light projecting unit 71A.
  • the measurement light 80 is projected toward the light receiving unit 72A.
  • the measuring light 80 that has reached the light receiving part 72A is received by the light receiving part 72A.
  • the light projector 71 and the light receiver 72 are fixed in a state where they are inclined with respect to the reciprocating direction (arrow AR direction) of the elastic portion 41.
  • the light projecting unit 71A and the light receiving unit 72A are arranged so that the measurement light 80 obliquely intersects the reciprocating direction (arrow AR direction) of the elastic unit 41. In other words, the measurement light 80 is inclined by an angle ⁇ with respect to the reciprocating direction (arrow AR direction) of the elastic portion 41.
  • FIG. 6A is a diagram illustrating a state in which the elastic portion 41 moves in the direction of the arrow AR1 and is located at the top dead center of the reciprocating movement.
  • FIG. 6B is a diagram illustrating a state in which the elastic portion 41 moves in the direction of the arrow AR2 and is located at the bottom dead center of the reciprocating movement.
  • the support portion 74 and the structure 75 are not shown for convenience of illustration.
  • width W2 is smaller than the width W1.
  • the amount of measurement light 80 received by the light receiving portion 72A is minimized when the elastic portion 41 is located at the bottom dead center.
  • the elastic part 41 is reciprocatingly moved with the amplitude D1.
  • the width W of the measurement light 80, and the angle ⁇ between the measurement light 80 (the light beam of the measurement light 80) and the reciprocating direction (arrow AR direction) of the elastic portion 41 To establish. 0 ⁇ angle ⁇ ⁇ sin ⁇ 1 (width W / amplitude D1)
  • the elastic portion 41 causes a predetermined amount of measurement light 80 to be emitted. Even when the elastic portion 41 is blocked and located at the bottom dead center, another predetermined amount of the measuring light 80 can be blocked by the elastic portion 41.
  • FIG. 7 shows the displacement X (horizontal axis) in the reciprocating direction of the elastic portion 41 when the elastic portion 41 reciprocates between the top dead center A and the bottom dead center B, and the light receiving portion 72A of the measuring light 80. It is a figure which shows the relationship with the magnitude
  • the measurement light 80 projected from the light projecting part 71A toward the light receiving part 72A is in the most unobstructed state.
  • the amount of the measurement light 80 (the remaining portion) detected by the light receiving unit 72A is maximized, and the magnitude of the output signal V from the light receiver 72 is the maximum value VA .
  • the measurement light 80 projected from the light projecting part 71A toward the light receiving part 72A is in the most blocked state. Received light amount of the measuring light 80 to be detected in the light receiving unit 72A (the remainder) is minimized, also the minimum value V B the magnitude of the output signal V from the light receiver 72.
  • the elastic portion 41 constitutes the parallel movement device 10.
  • the elastic part 41 reciprocates with high accuracy along the straight line direction between the projector 71 and the light receiver 72.
  • the value of the output signal V obtained between the top dead center A and the bottom dead center B is highly linear.
  • the relationship between the output signal V obtained from the reciprocating elastic portion 41 and the time T is uniform sine with little variation as the elastic portion 41 reciprocates with high precision along a straight line direction. It is represented as a wave SW.
  • the frequency and amplitude (relative value) of the elastic portion 41 are obtained from this sine wave SW.
  • the frequency of the elastic part 41 is equivalent to the frequency of the movable mirror 16 attached to the tip of the elastic part 41.
  • the amplitude of the elastic part 41 is equivalent to the amplitude of the movable mirror 16 as a relative value.
  • An increase in the amplitude value of the elastic portion 41 obtained from the sine wave SW means that the amplitude of the movable mirror 16 increases.
  • a decrease in the amplitude value of the elastic portion 41 obtained from the sine wave SW means that the amplitude of the movable mirror 16 also decreases.
  • the movable mirror 16 is reciprocatingly moved in the direction of the arrow AR while maintaining parallelism by the parallel movement device 10.
  • the position detection device 70 detects the frequency and amplitude of the elastic portion 41, the frequency and amplitude of the movable mirror 16 are equivalently calculated.
  • the reciprocation of the movable mirror 16 causes a difference in optical path length between the reflected light from the fixed mirror 15 and the reflected light from the movable mirror 16.
  • Interference light is formed using the difference in optical path length.
  • the light forming the interference light is irradiated onto the sample S, and the characteristics (for example, material, structure, or component amount) of the sample S are analyzed based on data obtained by a predetermined calculation such as Fourier transform.
  • the wavelength of the interference light changes according to the displacement of the movable mirror 16.
  • the sample S is irradiated with interference light having different wavelengths, and a plurality of data is obtained by a predetermined calculation such as Fourier transform. By integrating the plurality of data, the analysis ability of the sample S is improved.
  • the Michelson interferometer 1 used in the Fourier transform spectroscopic analyzer 100 vibrates the movable mirror 16 at the resonance frequency.
  • the resonance Q quality factor acts as a kind of disturbance filtering, and it is possible to obtain a simple vibration with less distortion and a large mechanical vibration amplitude.
  • the resonance frequency of the movable mirror 16 varies depending on the environment of the vibration system including the movable mirror 16 (temperature, humidity, or positional deviation that occurs in the mounting angle of the movable mirror 16 due to aging, etc.).
  • the Michelson interferometer 1 uses the control unit 90 connected to the position detection device 70 and the translation device 10 so that the movable mirror 16 always vibrates at the resonance frequency by PLL (Phase Locked Loop) control.
  • PLL Phase Locked Loop
  • the PLL control by the control unit 90 (see FIG. 1) will be described with reference to FIG.
  • a curve indicated by a thick dotted line in FIG. 9 indicates a mechanical output (output) when the control unit 90 drives the drive unit 45 (see FIG. 3) of the translation device 10 at the drive frequency fd (horizontal axis).
  • the magnitude (vertical axis) of the signal Vm) is shown.
  • the curve indicated by the thick solid line in FIG. 9 indicates the above mechanical signal corresponding to the drive signal when the control unit 90 drives the drive unit 45 (see FIG. 3) of the translation device 10 with a predetermined drive signal.
  • the phase ⁇ m (vertical axis) of the output (output signal Vm) is shown.
  • the control unit 90 (see FIG. 1) performs PLL control in order to obtain the resonance phenomenon described above, and drives the drive unit 45 with an AC signal (drive signal Vd) corresponding to the frequency f 0 (resonance frequency).
  • the resonance frequency of the parallel leaf spring structure 40 (moving mirror 16) always changes according to the environment of the vibration system including the moving mirror 16.
  • the control unit 90 determines the frequency of the drive signal Vd (drive frequency fd) based on the value of the sine wave SW (see FIG. 8) detected by the position detection device 70. Is made to follow the frequency f 0 (the drive frequency fd is fed back).
  • FIG. 10 is an enlarged view of the output signal Vm and the phase ⁇ m near the frequency f 0 in FIG.
  • the vibration displacement X (see FIG. 7) is taken as the output signal Vm
  • the phase ⁇ m is delayed from the drive signal Vd by 90 degrees at the frequency f 0 (resonance frequency).
  • the phase ⁇ m is delayed by a maximum of 180 deg with respect to the drive signal Vd.
  • the control unit 90 Based on the sine wave SW (see FIG. 8) obtained from the position detection device 70, the control unit 90 detects the phase difference between the drive signal Vd and the machine output (displacement X in FIG. 7).
  • the drive frequency fd for the drive unit 45 is controlled so that the phase difference is always 90 deg. By this control, the frequency of the drive signal Vd (the drive frequency fd) follows the frequency f 0.
  • the movable mirror 16 has a resonance frequency by PLL control that negatively controls the oscillation frequency of the built-in voltage controlled oscillator VCO (Voltage Controlled Oscillator) so that the phase difference between the two signals is always a predetermined value. Always vibrated.
  • VCO Voltage Controlled Oscillator
  • Patent Document 1 Japanese Patent Laid-Open No. 02-307037 (Patent Document 1) described at the beginning uses a single piezoelectric element to drive a parallel leaf spring structure.
  • the piezoelectric element applies a driving force to the elastic part while physically contacting one elastic part. Since the driving force is received from one of the elastic portions, it is difficult for the moving portion to reciprocate while maintaining a parallel posture (translation at the moving portion is likely to be reduced).
  • the two piezoelectric elements are provided so as to be in mechanical contact with both of the elastic portions. It becomes difficult for these two piezoelectric elements to apply a driving force in a balanced manner to the respective elastic portions. Further, due to an error in the mass balance of the two piezoelectric elements, the translational property at the moving part is likely to be lowered.
  • the drive unit 45 (so-called voice coil motor) configured by the magnet unit 45M and the coil unit 45C applies a driving force to the moving unit 43 in a non-contact manner.
  • the translation device 10 does not employ a configuration in which the piezoelectric element directly contacts the elastic portion 41 and / or the elastic portion 42 to apply a driving force.
  • the driving unit 45 applies a driving force to the moving unit 43 disposed between the elastic unit 41 and the elastic unit 42 in a non-contact manner.
  • the translation device 10 can obtain a higher translational property in the moving unit 43 than a configuration using a piezoelectric element.
  • the movable mirror 16 reciprocates several tens of times per second with an amplitude of several mm to several cm, for example.
  • the movable mirror 16 is reciprocated at a high speed, according to the translation device 10, high translational properties in the moving unit 43 and the movable mirror 16 can be obtained.
  • the Michelson interferometer 1 and the Fourier transform spectroscopic analyzer 100 including the translation device 10 it is possible to obtain high analytical performance.
  • the piezoelectric element is bonded to the elastic portion. Even if the piezoelectric element is bonded in a state of being shifted due to a manufacturing error or the like, it is not easy to reattach the piezoelectric element.
  • the positional shift of the magnet unit 45M is corrected by relatively shifting the position of the coil unit 45C with respect to the magnet unit 45M bonded to the moving unit 43. It is also possible.
  • the movable mirror 16 of the Michelson interferometer 1 vibrates at the resonance frequency by the PLL control of the control unit 90.
  • a plurality of data can be obtained in a shorter time, and the analysis ability for the sample S can be improved.
  • the magnet unit 45M is attached to the movement unit 43, and the coil unit 45C is fixed to another device constituting the Michelson interferometer 1 or the Fourier transform spectrometer 100. .
  • the magnet unit 45M constitutes a “drive receiving unit” that receives electromagnetic force from the coil unit 45C.
  • the coil unit 45C may be attached to the moving unit 43, and the magnet unit 45M may be fixed to another device constituting the Michelson interferometer 1 or the Fourier transform spectrometer 100.
  • the coil portion 45C constitutes a “drive receiving portion” that receives (relatively) electromagnetic force from the magnet portion 45M. Also with this configuration, the same operations and effects as those of the first embodiment can be obtained.
  • FIG. 11 is a cross-sectional view showing the translation device 10A.
  • FIG. 12 is a perspective view showing the translation device 10A.
  • the magnet part 45 ⁇ / b> M may be fitted into a fitting part 43 ⁇ / b> M provided in the moving part 43.
  • the fitting portion 43M is provided so as to be recessed from the surface of the moving portion 43.
  • the fitting portion 43M is recessed in a cylindrical shape. Also with this configuration, the same operations and effects as those of the first embodiment can be obtained.
  • the fitting part 43M also improves the convenience in attachment to the moving part 43 of the magnet part 45M.
  • the shape of the magnet portion 45M is not limited to a cylindrical shape, and may be a quadrangular prism shape. By configuring the opposing coils in a quadrangular shape, it is possible to effectively use a magnetic field.
  • FIG. 13 is a cross-sectional view showing the translation device 10B.
  • FIG. 14 is a perspective view showing the translation device 10B.
  • the magnet part 45 ⁇ / b> M may be fitted into a fitting part 43 ⁇ / b> N provided in the moving part 43.
  • the fitting portion 43N is provided so as to protrude from the surface of the moving portion 43.
  • the fitting portions 43N are arranged in a standing wall shape at intervals along the same circumference. Also with this configuration, the same operations and effects as those of the first embodiment can be obtained. Moreover, the fitting part 43N also improves the convenience in attachment to the moving part 43 of the magnet part 45M.
  • FIG. 15 is a plan view showing the translation device 10C.
  • 16 is a cross-sectional view taken along the line XVI-XVI in FIG.
  • the magnet part 45M may be provided on the surface of the moving part 43 opposite to the fixed part 44.
  • the coil part 45 ⁇ / b> C is also arranged on the side opposite to the fixed part 44 with the moving part 43 interposed therebetween.
  • the fixed portion 44 is not disposed between the elastic portions 41 and 42 but is disposed so as to face the magnet portion 45M. Also with this configuration, the same operations and effects as those of the first embodiment can be obtained. Moreover, the convenience on the layout between the elastic parts 41 and 42 is also improved.
  • FIG. 17 is a plan view showing the translation device 10D.
  • 18 is a cross-sectional view taken along the line XVIII-XVIII in FIG.
  • the magnet part 45 ⁇ / b> M may be provided on both side surfaces of the moving part 43.
  • Coil portions 45C are also provided on both outer sides of the moving portion 43 so as to correspond to the magnet portions 45M provided on both side surfaces. Also with this configuration, the same operations and effects as those of the first embodiment can be obtained. In addition, a stronger driving force can be applied to the moving unit 43.
  • the magnet unit 45M may be provided so as to be embedded on both side surfaces of the moving unit 43.
  • FIG. 20 is a cross-sectional view showing the translation device 10F.
  • FIG. 21 is a cross-sectional view showing a state in which the translation device 10F is vibrating.
  • the moving part 43 in the parallel moving device 10F includes an extending part 43T.
  • the extending portion 43T extends between the elastic portion 41 and the elastic portion 42 toward the one end 40a side of the parallel leaf spring structure 40.
  • the extending part 43T is formed in a rectangular parallelepiped shape and extends in a direction perpendicular to the moving part 43.
  • the extending portion 43T may be configured in a flat plate shape or a rod shape.
  • the magnet portion 45M is attached to the tip 43S in the extending direction of the extending portion 43T (the right direction in FIG. 20).
  • the same operation and effect as in the first embodiment can be obtained also by this configuration.
  • plate spring structure 40 approaches the fixing
  • the center of gravity as the vibration system of the parallel leaf spring structure 40 also approaches the fixed portion 44 (fixed end side).
  • stable vibration can be obtained.
  • the magnet portion 45 ⁇ / b> M may be positioned in the center of the region R ⁇ b> 40 where the elastic portion 41 and the elastic portion 42 are elastically deformed in the longitudinal direction of the elastic portion 41 and the elastic portion 42.
  • the distance L10 between the end surface portion on the fixed portion 44 side of the moving portion 43 and the magnet portion 45M and the distance L20 between the end surface portion on the moving portion 43 side of the fixed portion 44 and the magnet portion 45M are the same. Distance. According to this configuration, it is possible to obtain more stable vibration as the vibration system of the parallel leaf spring structure 40.
  • FIG. 22 is a perspective view showing an exploded state of the translation device 10G.
  • FIG. 23 is a perspective view showing an assembled state of the translation device 10G.
  • FIG. 24 is a cross-sectional view showing the translation device 10G.
  • a pedestal 60 is used to fix the parallel leaf spring structure 40 (fixing portion 44).
  • the pedestal 60 and other detailed members are not shown in FIG.
  • the pedestal 60 is formed in a container shape that is open at the top and the front, and has a receiving portion 60S in the center.
  • a parallel leaf spring structure 40 including an elastic part 41, an elastic part 42, and a moving part 43 is fitted together with the fixed part 44 in the housing part 60 ⁇ / b> S.
  • the fixing plate 65 and the fixing plate 66 are provided on the surface of the elastic portion 41 in a state where the parallel leaf spring structure 40 and the fixing portion 44 are fitted in the housing portion 60S.
  • a fixing plate 67 is provided on the side surface of the fixing portion 44.
  • the fixing plate 65 has an opening 62A and an opening 62B.
  • the fixed plate 65 is disposed on the fixed surface 64, and sandwiches the elastic portion 41, the fixed portion 44, and the elastic portion 42 with the bottom plate 60B of the base 60 (see FIG. 23).
  • bolts 63A and 63B are used in order to fix the fixing plate 65 to the base 60.
  • the bolt 63A is inserted into the opening 62A of the fixing plate 65 and is screwed into a screw hole 61A provided in the fixing surface 64 of the base 60 (see arrow DRA).
  • the bolt 63B is inserted into the opening 62B of the fixing plate 65 and is screwed into a screw hole 61B provided in the fixing surface 64 of the base 60 (see arrow DRB).
  • the fixing plate 66 has an opening 62C and an opening 62D.
  • the fixed plate 66 is arranged in a bridging manner on the fixed surface 64C and the fixed surface 64D, and sandwiches the elastic portion 41, the fixed portion 44, and the elastic portion 42 with the bottom plate 60B of the base 60 (see FIG. 23).
  • bolts 63C and 63D are used in order to fix the fixing plate 66 to the base 60.
  • the bolt 63C is inserted into the opening 62C of the fixing plate 66 and is screwed into a screw hole 61C provided in the fixing surface 64C of the base 60 (see arrow DRC).
  • the bolt 63D is inserted into the opening 62D of the fixing plate 66 and is screwed into a screw hole 61D provided in the fixing surface 64D of the base 60 (see arrow DRD).
  • the fixing plate 67 has an opening 62E and an opening 62F.
  • the fixing plate 67 is arranged in a bridging manner on the fixing surface 64E and the fixing surface 64F, and sandwiches the fixing portion 44 with the back surface portion 69 of the base 60 (see FIG. 23).
  • bolts 63E and 63F are used in order to fix the fixing plate 67 to the base 60.
  • the bolt 63E is inserted into the opening 62E of the fixing plate 67 and screwed into the screw hole 61E provided in the fixing surface 64E of the base 60 (see arrow DRE and FIG. 23).
  • the bolt 63F is inserted into the opening 62F of the fixing plate 67 and is screwed into the screw hole 61F provided in the fixing surface 64F of the base 60 (see arrow DRF and FIG. 23).
  • the position detection device 70 includes a projector 71, a light receiver 72, and a connection unit 73.
  • the light projector 71 and the light receiver 72 are disposed to face each other with the elastic portion 41 of the translation device 10 interposed therebetween (see FIG. 23).
  • the coil portion 45C is disposed between the elastic portion 41 and the elastic portion 42 (see FIG. 23).
  • the coil portion 45C in the present embodiment has an opening 62G and an opening 62H.
  • the coil portion 45C is arranged in a bridging manner on the fixed surface 64G and the fixed surface 64H of the base 60 between the elastic portion 41 and the elastic portion 42 (see FIG. 23).
  • bolts 63G and 63H are used in order to fix the coil part 45C to the pedestal 60.
  • the bolt 63G is inserted into the opening 62G of the coil portion 45C and is screwed into a screw hole 61G provided in the fixing surface 64G of the base 60 (see arrow DRG and FIG. 23).
  • the bolt 63H is inserted into the opening 62H of the coil portion 45C and screwed into a screw hole 61H provided in the fixing surface 64H of the base 60 (see arrow DRH).
  • the moving part 43 includes the extending part 43Q as in the above-described sixth embodiment (see FIG. 20).
  • the extending part 43Q also extends toward the one end (fixed part 44) side of the parallel leaf spring structure 40 between the elastic part 41 and the elastic part 42.
  • the magnet portion 45M is attached to the distal end 43S (see FIG. 24) in the extending direction of the extending portion 43Q.
  • the extending portion 43Q of the present embodiment is formed in a cylindrical shape.
  • the inside of the extending part 43Q is formed in a hollow shape.
  • a hole part 43H extending from the moving part 43 side toward the magnet part 45M (drive receiving part) side is formed.
  • a weight 43W can be inserted into the hole 43H from the rear end 43R side of the extending portion 43Q.
  • the resonance frequency of the parallel leaf spring structure 40 can be adjusted to a desired value by inserting the weight 43W into the hole 43H.
  • a plurality of types of weights 43W may be prepared according to the number, material, size, and the like.
  • the weight 43W can be easily inserted into and removed from the hole 43H.
  • This configuration is effective when the interval between the magnet portion 45M and the coil portion 45C is narrow (for example, when the interval is 1 mm or less).
  • the extending portion 43Q of the present embodiment is manufactured as a separate body from the rectangular parallelepiped portion that connects the elastic portion 41 and the elastic portion 42 of the moving portion 43, and is attached and fixed to the portion.
  • the hollow extending portion 43Q may be formed integrally with the portion.
  • the rear end 43R of the extending portion 43Q in the present embodiment protrudes outward from the end face of the moving portion 43, but may be configured to be flush with the end face of the moving portion 43.
  • the weight 43W may be attached on the outer peripheral surface of the extending portion 43Q. In order to further improve the parallel translation, the weight 43W is preferably arranged as close to the magnet portion 45M as possible.
  • FIG. 25 is a perspective view showing a state in which a part (stopper 68) of the translation device 10H is disassembled.
  • FIG. 26 is a perspective view showing the assembled state of the translation device 10H.
  • a stopper 68 that restricts the movement of the moving unit 43 is used so that the moving amount of the moving unit 43 is within a predetermined range.
  • the stopper 68 is formed in a flat plate shape, has an opening 68H at the center, and has fixing notches at both ends.
  • the stopper 68 of the present embodiment is arranged in a bridging manner on the surfaces of the front end face 64J and the front end face 64K of the base 60.
  • bolts 63J and 63K are used.
  • the bolt 63J is inserted into one notch of the stopper 68 and screwed into a screw hole 61J provided in the front end face 64J of the base 60 (see arrow DRJ).
  • the bolt 63K is inserted into the other notch of the stopper 68 and screwed into a screw hole 61K provided in the front end face 64K of the base 60 (see arrow DRK).
  • the rear end 43R of the extending portion 43Q is effectively used as a portion that cooperates with the stopper 68. Since it is not necessary to provide a member different from the extending portion 43Q in order to restrict the movement of the moving portion 43, an effect that the number of parts can be reduced is also obtained.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention porte sur un dispositif de déplacement en translation (10), dans lequel une partie mobile (43) se déplace e va-et-vient tout en conservant une attitude parallèle, qui comprend : des parties élastiques (41, 42) ; une partie fixe (44) ; une partie mobile (43) ; et une partie réceptrice de force motrice (45M) qui est attachée à la partie mobile (43) et se déplace en va-et-vient conjointement avec la partie mobile (43) par réception d'une force électromagnétique d'une manière sans contact. Les parties élastiques (41, 42) et la partie mobile (43) constituent une structure de ressort à lames parallèle (40) ayant une extrémité (40a) fixée à la partie fixe (44). La partie réceptrice de force motrice (45M) reçoit la force électromagnétique de manière que la partie mobile (43) de la structure de ressort à lames parallèle (40) oscille à une fréquence de résonance. Il devient possible d'améliorer le mouvement de translation de la partie mobile dans le cas où la structure de ressort à lames parallèle est amenée à osciller à sa fréquence de résonance.
PCT/JP2012/056073 2011-04-12 2012-03-09 Dispositif de déplacement en translation, interféromètre de michelson et spectromètre à transformation de fourier WO2012140980A1 (fr)

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
WO2014112027A1 (fr) * 2013-01-18 2014-07-24 コニカミノルタ株式会社 Spectromètre à transformée de fourier
WO2020158470A1 (fr) * 2019-01-30 2020-08-06 浜松ホトニクス株式会社 Module optique, système de traitement de signal et procédé de traitement de signal

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Publication number Priority date Publication date Assignee Title
JPH11332171A (ja) * 1998-05-11 1999-11-30 Teikoku Tsushin Kogyo Co Ltd 振動発生器
JP2005181898A (ja) * 2003-12-22 2005-07-07 Sasakura Engineering Co Ltd 防音装置及びその制振装置
WO2011037015A1 (fr) * 2009-09-28 2011-03-31 コニカミノルタホールディングス株式会社 Système optique d'interférences et spectroscope muni de celui-ci
WO2012029453A1 (fr) * 2010-08-31 2012-03-08 コニカミノルタホールディングス株式会社 Mécanisme de translation, interféromètre de michelson et spectroscope infrarouge à transformée de fourier

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Publication number Priority date Publication date Assignee Title
JPH11332171A (ja) * 1998-05-11 1999-11-30 Teikoku Tsushin Kogyo Co Ltd 振動発生器
JP2005181898A (ja) * 2003-12-22 2005-07-07 Sasakura Engineering Co Ltd 防音装置及びその制振装置
WO2011037015A1 (fr) * 2009-09-28 2011-03-31 コニカミノルタホールディングス株式会社 Système optique d'interférences et spectroscope muni de celui-ci
WO2012029453A1 (fr) * 2010-08-31 2012-03-08 コニカミノルタホールディングス株式会社 Mécanisme de translation, interféromètre de michelson et spectroscope infrarouge à transformée de fourier

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Publication number Priority date Publication date Assignee Title
WO2014112027A1 (fr) * 2013-01-18 2014-07-24 コニカミノルタ株式会社 Spectromètre à transformée de fourier
WO2020158470A1 (fr) * 2019-01-30 2020-08-06 浜松ホトニクス株式会社 Module optique, système de traitement de signal et procédé de traitement de signal
CN113424028A (zh) * 2019-01-30 2021-09-21 浜松光子学株式会社 光模块、信号处理系统和信号处理方法
US11898841B2 (en) 2019-01-30 2024-02-13 Hamamatsu Photonics K.K. Optical module, signal processing system, and signal processing method

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