WO2012133616A1

WO2012133616A1 - Discharge lamp

Info

Publication number: WO2012133616A1
Application number: PCT/JP2012/058304
Authority: WO
Inventors: 昭芳藤森; 金井　信夫; 和正藤原; 圭上条; 陽佑南雲
Original assignee: 株式会社オーク製作所
Priority date: 2011-03-30
Filing date: 2012-03-29
Publication date: 2012-10-04
Also published as: JP2012208351A; TWI536119B; JP5723652B2; TW201239550A; CN103460137A; KR20140061305A; CN103460137B; KR101867527B1

Abstract

An exposure apparatus of the present invention is provided with: a discharge lamp, which radiates light that includes emission lines, i.e., the g line (436 nm), the h line (405 nm) and the i line (365 nm); a light measuring means, which has a light receiving section, and measures the light radiated from the discharge lamp; and an illumination adjusting means, which, on the basis of a measurement value obtained from the light measuring means, adjusts power to be supplied to the discharge lamp. The light measuring means has spectral sensitivity characteristics having peak sensitivities between two adjacent emission lines among the g line, the h line and the i line.

Description

Discharge lamp

The present invention relates to a photometric device that measures light such as illuminance, and more particularly to light measurement with respect to radiated light of a discharge lamp used in an exposure device or the like.

In the exposure apparatus, pattern light is projected onto a substrate coated with a photosensitive material such as a photoresist to form a pattern on the photosensitive material. In order to form a highly accurate pattern, it is necessary to irradiate light with a fixed dose during the exposure operation. Therefore, lighting control is performed by measuring the illuminance and the like using a photometric device between exposures and adjusting the power supplied to the discharge lamp (for example, see Patent Documents 1 and 2).

In the exposure apparatus, a high-pressure / ultra-high-pressure mercury lamp that emits light including bright lines of g-line (436 nm), h-line (405 nm), and i-line (365 nm) is used (see Patent Document 3). The photosensitive material also has sensitivity characteristics based on bright lines. In the illuminance measuring apparatus, a filter that removes light other than g-line, h-line, and i-line is provided, and illuminance is measured based on light transmitted through the filter (for example, , See Patent Document 4).

JP-A-8-8154 JP 2002-5736 A JP 2010-85954 A JP 2002-340667 A

In the discharge lamp described above, since the inside of the discharge tube is at a high pressure, noise due to discharge fluctuation tends to be dominant in the irradiance. In particular, in the vicinity of the bright line, a change occurs due to self-absorption of light energy, and the measured spectral value in the vicinity of the bright line is greatly influenced by noise-like discharge fluctuations.

For this reason, there is a case where only the radiation spectrum in the vicinity of the emission line fluctuates even if the change in the entire radiation spectrum distribution is small, without substantially reducing the lamp output. On the other hand, even if the entire radiation spectrum distribution fluctuates due to a reduction in lamp output, the radiation spectrum fluctuation near the bright line may be smaller than the total fluctuation amount.

If the illuminance is detected using a filter with peak transmittance in line with the emission line for a discharge lamp with such radiation characteristics, it will be affected by noise-like spectral fluctuations near the peak, and the illuminance over the entire spectrum will be reduced. It cannot be detected accurately. As a result, power adjustment based on erroneous illuminance measurement is performed, and unnecessary power fluctuations frequently occur during lamp lighting, which affects the lamp life. In addition, an erroneous photometric value is detected in photometric calculations other than illuminance.

The present invention is directed to realizing a photometric apparatus and an exposure apparatus that appropriately measure light from a discharge lamp without being affected by noise-induced discharge fluctuations.

The exposure apparatus of the present invention includes a discharge lamp that emits spectral light including g-line (436 nm), h-line (405 nm), and i-line (365 nm) emission lines, and illuminance measurement means that measures light emitted from the discharge lamp. And a light adjusting means for adjusting the power supplied to the discharge lamp based on the measured value.

As the discharge lamp, a high-pressure or ultrahigh-pressure mercury lamp can be applied. In this case, a spectrum including g-line, h-line, and i-line emission line spectra is generated, and the spectrum distribution of the emitted light corresponds to the three emission lines. It exhibits a continuous spectral distribution curve with a large relative spectral intensity in a narrow wavelength region. For example, the discharge lamp can be applied as a mercury lamp sealed in a discharge tube with a mercury of 0.2 mg / mm ³ or more.

The light receiving unit of the light measuring means includes, for example, a light receiving element such as a photoelectric conversion element and a filter disposed on the incident light path, and performs measurement based on an electric signal generated by light incident on the light receiving element. The spectral sensitivity characteristic of the light receiving unit is determined based on the spectral sensitivity characteristic of the light receiving element and the spectral transmittance characteristic of the filter. When the spectral sensitivity of the light receiving element is approximately constant over the entire wavelength range without having a deviating sensitivity in the specific wavelength range, the spectral transmission characteristic of the filter appears as it is as the spectral sensitivity characteristic of the light receiving unit.

The light measurement means can measure any of various physical quantities related to the emitted light of the discharge lamp, such as illuminance, luminance, and light quantity, as measurement values. The light adjusting means adjusts the supplied power so as to maintain the measured photometric value at an appropriate value or a constant value.

In the present invention, the spectral sensitivity characteristic of the light measurement means is between two adjacent bright lines, i.e., between i line (365 nm) and h line (405 nm), or between h line (405 nm) and g line (436 nm). Between the two, peak sensitivity is provided.

That is, the peak sensitivity of the light receiving portion is at a position shifted from the h-line and i-line that should be watched, and the sensitivity (spectral value) corresponding to the h-line and i-line in the spectral sensitivity characteristic is lower than the peak sensitivity. Since the sensitivity (spectrum value) decreases toward the i-line and h-line with the peak sensitivity at the top, even if a dominant discharge fluctuation of noise occurs near the bright line, the fluctuation is not greatly affected by the discharge lamp. Can be measured.

For example, when constant illuminance lighting control is performed, it is possible to adjust the power according to the accurately measured illuminance, and stable constant illuminance lighting can be achieved without causing unnecessary power fluctuation due to incorrect power adjustment. Realized.

The spectral sensitivity characteristic can be represented by a substantially Gaussian distribution curve (normal distribution) centered on the peak sensitivity, or can be represented by a band pass (band). The spectral sensitivity curve may be configured such that the peak sensitivity is as far as possible from i-line and h-line or g-line or i-line. For example, a peak may be provided in the intermediate region.

It is desirable to detect the light in the wavelength range between the i-line and h-line or the wavelength range between the h-line and g-line without leaking while avoiding the influence of noise-dominated discharge fluctuations. For example, the light measurement means may have an effective sensitivity characteristic in which the half-value width of the spectral sensitivity curve is wider than the wavelength range between the i-line and the h-line. Thereby, the spectral intensity in the wavelength region between the i-line and the h-line is detected with high accuracy as a whole.

For example, at the h-line and i-line wavelengths, the sensitivity should be 85% or less of the peak sensitivity, and the spectral sensitivity curve has a wider half-value width than the wavelength range between the h-line and i-line. That's fine. As a result, it is possible to eliminate the influence of noise and to more reliably detect the overall spectrum variation.

On the other hand, a photometric device according to another aspect of the present invention performs photometric calculation based on a light receiving unit having a light receiving element such as a photoelectric conversion element, a filter disposed on an incident optical path, and light incident on the light receiving element. A light receiving portion having a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines of g-line (436 nm), h-line (405 nm), and i-line (365 nm). .

Also in the present invention, it is possible to measure accurate illuminance, luminance, light quantity, etc. by the spectral sensitivity characteristics of the light receiving section, and it is possible to realize accurate photometry of the discharge lamp. As a more specific spectral sensitivity characteristic of the light receiving unit, the above-described spectral sensitivity characteristic can be applied.

The photometric device can detect, for example, illuminance, luminance, light amount, etc., and can be configured as an illuminometer, luminance meter, and light meter, respectively. The photometric device can be configured as a handycam type photometric device, for example, and the light receiving unit and the measuring unit may be integrated. Alternatively, the light receiving unit and the measurement unit can be connected via a signal cable.

On the other hand, the light receiving unit may be connected to the desktop type photometric device main body with a cable. Further, the photometric device can be used by being incorporated in the exposure device or the light source device, or can be configured to perform photometry by installing the photometric device on a drawing table or the like in the exposure preparation stage.

A photometric device according to another aspect of the present invention includes a light receiving unit having a light receiving element, a filter disposed on an incident optical path, and a measuring unit that performs photometric calculation based on light incident on the light receiving element. It has a spectral sensitivity characteristic having a peak sensitivity between two matched bright lines.

According to the present invention, it is possible to appropriately measure the light of the discharge lamp without being affected by the dominant discharge fluctuation of noise.

It is a schematic block diagram of the exposure apparatus which is 1st Embodiment. It is the figure which showed the spectral sensitivity characteristic of the light-receiving part. It is the figure which showed the spectral distribution characteristic of the discharge lamp. It is a schematic diagram of the illuminance meter in 2nd Embodiment. It is a block diagram of the illumination meter which is 2nd Embodiment. It is the figure which showed the spectral sensitivity characteristic of the light-receiving part different from 1st Embodiment. It is the figure which showed the spectral sensitivity characteristic of the conventional light-receiving part (henceforth a 1st conventional light-receiving part) according to i line | wire (365 nm). It is the figure which showed the spectral sensitivity characteristic of the conventional light-receiving part (henceforth a 2nd conventional light-receiving part) according to h line | wire (405 nm). It is the graph which showed the fluctuation | variation of the lamp supply power when performing constant illumination illumination control using the 1st, 2nd conventional light-receiving part shown in FIG. 7, FIG. It is the graph which showed the electric power fluctuation | variation when performing constant illumination illumination control using the light-receiving part of a present Example. It is the figure which showed the change of the spectral distribution measured when supply electric power is adjusted in steps. It is the graph which plotted spectrum relative integrated intensity for every electric power. It is the graph which showed the change rate of spectrum relative integrated intensity.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic block diagram of an exposure apparatus according to the first embodiment.

The exposure apparatus 10 is a maskless exposure apparatus that directly forms a pattern on a substrate SW having a photosensitive material such as a photoresist formed on the surface thereof, and includes a discharge lamp 21 and a DMD (Digital Micro-mirror Device) 24. The substrate SW is irradiated based on the light from the discharge lamp 21 to form a pattern on the surface of the substrate SW.

The discharge lamp 21 is a high-pressure or ultrahigh-pressure mercury lamp and contains, for example, 0.2 mg / mm ³ or more of mercury. The spectrum of the discharge lamp has a continuous spectral distribution at about 330 nm to 480 nm and emits g-line (436 nm), h-line (405 nm), and i-line (365 nm) emission line spectrum light.

The light emitted from the discharge lamp 21 is shaped into parallel light by the illumination optical system 23 and guided to the DMD 24 through the mirror 25, the half mirror 27A, and the mirror 27B. The DMD 24 is a light modulation element array (for example, 1024 × 768) in which micro rectangular micromirrors of several μm to several tens μm are two-dimensionally arranged in a matrix, and is controlled by the exposure control unit 60.

In the DMD 24, each micromirror is selectively ON / OFF controlled based on the exposure data sent from the exposure control unit 60. The light reflected by the micromirror in the ON state is guided to the projection optical system 28 via the half mirror 27A. The light beam formed by the reflected light from the ON state mirror, that is, the light of the pattern image is irradiated onto the substrate SW. A pattern is formed on the entire substrate while moving the substrate SW.

The exposure apparatus 10 includes an illuminance measurement control device 50 including an illuminance calculation control unit 30 and a light receiving unit 40. The illuminance measurement control device 50 measures the illuminance of the discharge lamp 21 and performs constant illuminance lighting control. The light from the discharge lamp 21 is guided to the light receiving unit 40 by moving the light receiving unit 40 to the irradiation region of the projection optical system 28. The illuminance measurement is performed based on the light incident on the light receiving unit 40 from the end of drawing on one substrate to the start of drawing on the next substrate.

The light receiving unit 40 includes a light receiving element 41 composed of a photoelectric conversion element and the like, and a filter 42 disposed to face the light receiving surface of the light receiving element 41, and light incident from a window (not shown) of the housing part is The light enters the light receiving element 41 through the filter 42 on the incident optical path.

As will be described later, the filter 42 has a spectral transmittance characteristic that transmits light in a predetermined band including g-line (436 nm), h-line (405 nm), and i-line (365 nm), and a wavelength region other than that band. Remove the light. A signal generated by the light incident on the light receiving element 41 is sent to the illuminance calculation control unit 30.

The signal input to the illuminance calculation control unit 30 is amplified by the amplifier 35 and then converted into a digital signal by the A / D converter 34. Then, the illuminance is calculated in the calculation unit 36. The illuminance calculation method is obtained by a conventionally known method.

The illuminance control unit 33 adjusts the power supplied from the lamp driving unit 32 to the discharge lamp 21 based on the illuminance data. Thereby, while the lamp is lit, light is irradiated from the discharge lamp 21 to the substrate SW with a constant illuminance.

FIG. 2 is a diagram showing the spectral sensitivity characteristics of the light receiving section. FIG. 3 is a diagram showing the spectral sensitivity characteristic of the light receiving unit and the spectral distribution characteristic of the discharge lamp. The spectral sensitivity characteristics of the light receiving unit will be described with reference to FIGS.

The photosensitive material of the substrate SW on which a pattern is formed by the exposure apparatus 10 often has a photosensitive characteristic that reacts with g-rays, h-rays, or i-rays as mercury rays. As shown in FIG. 2, the spectral sensitivity curve L1 of the light receiving unit 40 is a curve that approximates a Gaussian distribution over the wavelength range 340 to 480 nm according to these emission lines, and has a peak sensitivity P1 at 385 nm. The sensitivity at the h-line (405 nm) is P2, and the sensitivity at the i-line (365 nm) is P3, which is a substantially symmetrical distribution curve centering on the peak P1 having the highest relative spectral value.

FIG. 3 shows the spectral distribution curve SP of the discharge lamp 21 together with the spectral sensitivity curve L1 of the light receiving section. However, the spectral sensitivity curve L1 of the light receiving unit is based on the spectral transmittance characteristic of the filter 42 and the spectral sensitivity characteristic of the light receiving element 41. The discharge lamp 21 emits continuous spectrum light including g-line (436 nm), h-line (405 nm), and i-line (365 nm) emission lines, and has a sharp spectral power with a narrow wavelength width of around 436 nm, 405 nm, and 365 nm. It has. In addition, since it is an ultra-high pressure mercury lamp, the spectral change is relatively gradual, and a continuous distribution curve spread over a wide range.

During the lamp operation, the spectral distribution of the discharge lamp 21 varies due to self-absorption (absorption spectrum). FIG. 3 shows a spectral distribution curve in which the spectral value suddenly decreases in the vicinity of the g-line (436 nm), h-line (405 nm), and i-line (365 nm), and the self-absorption phenomenon of the discharge lamp 21 appears prominently. Spectral distribution characteristics are illustrated. Such spectral fluctuations in a specific narrow wavelength range occur irregularly during lighting.

The peak P1 of the spectral sensitivity curve L1 of the light receiving unit 40 of the present embodiment is far from the h-line (405 nm) and i-line (365 nm), and is maximum for light having an approximately intermediate wavelength from two adjacent bright lines. There is sensitivity. Further, the sensitivity ratio R11 at the wavelength of h-line and the sensitivity ratio R12 at the wavelength of i-line are lower than P1, and R11 = 0.70 and R12 = 0.61 for P1 = 1.0. Both are 85% or less of P1.

Furthermore, the half-value width (Δλ / 2) of the spectral sensitivity curve is wider than the wavelength region between the h-line and i-line, and Δλ / 2 = 50 nm. In this way, the wavelength range with high sensitivity in the spectral sensitivity curve L1 is excluded from the h-line and i-line, and is not affected by fluctuations in the spectral distribution due to self-absorption, and the wavelength between the h-line and i-line. Light is transmitted over the entire area.

As a result, the spectral power of the light incident on the light receiving element 41 becomes light that is not controlled by noise-like spectral fluctuations, and the actual illuminance is appropriately detected. And based on the illumination intensity detected appropriately, the constant illumination illumination which adjusted the electric power supplied to the discharge lamp 21 is performed, and frequent power adjustment is suppressed.

As described above, according to the present embodiment, the exposure apparatus 10 that forms a pattern using the discharge lamp 21 includes the illuminance measurement control device 50 including the illuminance calculation control unit 30 and the light receiving unit 40, and the light receiving unit 40. In the spectral sensitivity curve L1, the peak P1 is shifted from the h-line (405 nm) and the i-line (365 nm), and is provided in a substantially intermediate wavelength region from two adjacent bright lines. The sensitivity for h-line and i-line is lower than the peak sensitivity, and the sensitivity ratio R1 at the wavelength of h-line and the sensitivity ratio R2 at the wavelength of i-line are 85% or less of P1. Furthermore, the half-value width (Δλ / 2) of the spectral sensitivity curve is wider than the wavelength region between the h-line and the i-line.

Next, a photometric device according to the second embodiment will be described with reference to FIGS. In the second embodiment, a photometric device independent of the exposure device is used for illuminance measurement.

FIG. 4 is a schematic diagram of an illuminometer in the second embodiment.

The handycam type illuminance meter 100 includes a main body 120 including a display unit 129 and a light receiving unit 110, and the light receiving unit 110 is connected to a connection unit 127 of the main body 120 via a signal cable 130 attached to the light receiving unit 110. Connected. In order to measure illuminance in an exposure apparatus (not shown), the light receiving unit 110 of the illuminometer 100 is placed on the substrate mounting stage, and the light receiving unit 110 is moved to a predetermined measurement point. And the illumination intensity displayed on the display part 129 of the main body 120 is confirmed, and the electric power supplied to a discharge lamp is adjusted.

FIG. 5 is a block diagram of an illuminometer according to the second embodiment.

The light receiving unit 110 includes a filter 114 and a light receiving element 116 below a window 112 provided on the upper surface of the light receiving unit main body 110H, and the light receiving unit 110 is disposed to face the light receiving element 116. Here, not only the light receiving unit 110 having the same spectral sensitivity characteristic as that of the first embodiment but also a light receiving unit 110 ′ having a spectral sensitivity characteristic described later can be selectively connected to the main body 120.

FIG. 6 is a diagram showing the spectral sensitivity characteristics of the light receiving unit different from the first embodiment.

As shown in FIG. 6, the spectral sensitivity distribution curve L2 of the light receiving unit 110 ′ is a curve that approximates a Gaussian distribution with a peak P2 of about 422 nm, and is approximately the center position of the g-line (436 nm) and h-line (405 nm). There is a peak P2. Further, the sensitivity ratio R21 at the wavelength of g-line and the sensitivity ratio R22 at the wavelength of h-line are lower than P2, and for P2 = 1.0, R21 = 0.64 and R22 = 0.71. Both are less than 85 percent of P1.

Furthermore, the half-value width (Δλ / 2) of the spectral sensitivity curve is wider than the wavelength region between the g-line and the h-line, and Δλ / 2 = 43 nm. Thus, since the spectral sensitivity curve L2 has the peak P2 in the approximate middle between the g-line and the h-line, it is not affected by the noise-dominated spectrum fluctuation due to self-absorption and the like, and The spectral light in the entire wavelength range is appropriately transmitted and guided to the light receiving element 116.

The electrical signal generated in the light receiving element 116 of the light receiving unit 110 or the light receiving element 116 'of the light receiving unit 110' is amplified by the amplifier 122 and then converted into a digital signal by the A / D converter 124. Then, the illuminance is calculated in the calculation unit 128. The obtained illuminance data is displayed on the display unit 129. The controller 126 controls the power supply circuit and signal processing circuit inside the main body.

In the first and second embodiments, the illuminance meter is configured as a photometric device. However, other photometric devices such as a luminance meter, an integrated light meter, and an integrated intensity meter can be applied. In this case, in the photometric device main body, the luminance, light quantity, intensity, and the like are calculated from a signal based on the received light according to a conventionally known arithmetic processing method. In addition, the main body 120 can be configured not only as a handy cam type but also as a desktop device. Furthermore, the filter may be selectively detachably attached to the light receiving unit by a slide mechanism using a guide groove.

As the discharge lamp, a mercury lamp other than the above can be used, and a discharge lamp that emits continuous spectrum light including a continuous spectrum and a bright line of g-line, h-line, and i-line is applicable. Is possible. Alternatively, a discharge lamp that emits continuous spectrum light including a plurality of other bright lines may be used. In this case, the photometric device is configured to have spectral sensitivity characteristics that match the characteristics of the discharge lamp. Further, when the illuminance measuring device is incorporated in the exposure apparatus as in the first embodiment, a configuration having sensitivity characteristics by a filter may be used.

Hereinafter, embodiments of the present invention will be described.

This example is composed of an illuminometer provided with a light receiving portion having the spectral sensitivity characteristics described in the first and second embodiments. A comparison experiment with a conventional illuminometer provided with a light receiving portion having spectral sensitivity characteristics was performed.

FIG. 7 is a diagram showing spectral sensitivity characteristics of a conventional light receiving portion (hereinafter referred to as a first conventional light receiving portion) corresponding to i-line (365 nm). FIG. 8 is a diagram showing spectral sensitivity characteristics of a conventional light receiving unit (hereinafter referred to as a second conventional light receiving unit) corresponding to h line (405 nm).

The spectral sensitivity curve L3 shown in FIG. 7 is a distribution curve having a peak sensitivity of about 355 nm, and has a maximum sensitivity on the short wavelength side near the i-line (365 nm). The sensitivity ratio R31 = 0 at the wavelength of h-line (405 nm), the sensitivity ratio R32 = 0.90 at the wavelength of i-line (365 nm), and the half-value width Δλ / 2 = 40 nm of the spectral sensitivity curve.

A spectral sensitivity curve L4 shown in FIG. 8 is a distribution curve having a peak sensitivity of about 405 nm, and has a maximum sensitivity on the short wavelength side near the h line (405 nm). Sensitivity ratio R41 = 0.75 at the wavelength of g-line (436 nm), sensitivity ratio 42 = 0.99 at the wavelength of h-line (405 nm), sensitivity ratio R43 = 0.35 at the wavelength of i-line (365 nm), The half-value width Δλ / 2 of the spectral sensitivity curve is 75 nm. Each spectral sensitivity curve has a peak sensitivity in a wavelength range that is easily affected by noise-like spectral fluctuations due to self-absorption.

FIG. 9 is a graph showing fluctuations in lamp supply power when constant illuminance lighting control is performed using the first and second conventional light receiving units shown in FIGS. FIG. 10 is a graph showing power fluctuations when constant illuminance lighting control is performed using the light receiving unit of the present embodiment. Here, a super-high pressure mercury lamp of mercury 0.2 mg / mm ³ or more was used as a discharge lamp, and constant illumination lighting control was performed.

7 and FIG. 8, in the case of the illuminometer using the first and second conventional light receiving units, large power fluctuations continuously occur continuously during use of the lamp (see M1 and M2 in FIG. 9). This indicates that an inaccurate illuminance is detected due to the influence of discharge fluctuations in which noise is dominant, and unnecessary power adjustment with a large power fluctuation is performed accordingly.

FIG. 10 is a graph showing fluctuations in lamp supply power when constant illumination lighting control is performed using the light receiving unit of the present embodiment. As shown in FIG. 10, power adjustment is performed with almost no large power fluctuation. This is because, by using the light receiving unit of the present embodiment described above, the entire spectrum power is accurately detected and an appropriate power adjustment is performed without being affected by the radiation spectrum fluctuation in which noise becomes dominant. It is shown that 10 shows the power fluctuation of the discharge lamp which is an example according to the first embodiment, but the discharge lamp which is an example according to the second embodiment is also accompanied by a large power fluctuation. Absent.

Next, a comparative experiment was conducted on the change of the relative spectral integrated intensity and the spectral relative integrated intensity when the power supplied to the discharge lamp was changed. About the illuminometer, the Example according to 1st Embodiment was used among the present Examples, and it compared with the prior art example.

FIG. 11 is a diagram showing changes in the spectral distribution measured when the supplied power is adjusted stepwise. The power distribution is changed in steps of 20 W in the range of 170 W to 250 W, and the spectrum distributions SL1 to SL5 at that time are shown. As the power supply decreases, the spectral intensity of the spectral distribution curve decreases as a whole. The spectral distribution shown in FIG. 11 is a graph created based on the spectral distribution curve obtained by measuring the light emitted from the discharge lamp and passing through the optical system with the multi-side optical system MC-3000-28C (manufactured by Otsuka Electronics Co., Ltd.). It is.

FIG. 12 is a graph plotting the spectral relative integrated intensity for each power. Here, the relative integrated value obtained by integrating the values obtained by multiplying the spectral distribution curve measured for each supply power by the sensitivity curve of the light receiving unit is graphed in comparison with each light receiving unit. Here, using the integrated value of the second conventional light receiving unit when the supplied power is 250 W as a reference (100%), the ratio of the integrated intensity in the supplied power of each light receiving unit is shown.

For example, for the light receiving unit of this embodiment, the spectral distribution curve calculated for each supply power shown in FIG. 11 is multiplied by the spectral sensitivity curve shown in FIG. 2 for each unit wavelength (1 nm), and 300 nm. The integrated value between 500 nm and 500 nm is obtained and shown as a ratio to the integrated value of the second conventional light receiving unit when the supplied power calculated by the same method is 250 W.

As shown in FIG. 12, the spectrum relative integrated intensity in each light receiving unit decreases with reference to the supplied power of 250 W, and the integrated intensity decreases almost in proportion to the amount of power change. When the light receiving unit of the present embodiment and the second conventional light receiving unit are used, the overall spectral relative integrated intensity is large.

FIG. 13 is a graph showing the rate of change of the spectral relative integrated intensity. Here, the rate of change of the integrated intensity when the input power is 170 W is used as a reference. The larger the change rate, the higher the resolution, the more finely the change in the integrated intensity can be detected, and the illuminance fluctuation can be accurately grasped. As shown in FIG. 13, the rate of change is greatest when the light receiving unit of this embodiment is used.

As shown above, by using the light receiving unit of this embodiment, it is possible to accurately grasp the actual discharge change (illuminance change) without being affected by noise-dominated discharge fluctuations. It becomes. Therefore, it is obvious that other photometric calculations such as luminance measurement and light quantity measurement can be performed accurately by using the light receiving unit of this embodiment.

-Various changes, substitutions, and alternatives are possible with respect to the present invention without departing from the spirit and scope of the present invention as defined by the appended claims. Furthermore, the present invention is not intended to be limited to the specific embodiments of the processes, apparatus, manufacture, components, means, methods, and steps described in the specification. Those skilled in the art will appreciate from the disclosure of the present invention devices, means, and methods that perform substantially the same functions as those provided by the embodiments described herein, or that provide substantially the same operations and effects. You will recognize it. Accordingly, the appended claims are intended to be included within the scope of such devices, means, and methods.

This application claims the priority as a basic application of a Japanese application (Japanese Patent Application No. 2011-074420, filed on March 30, 2011), and the disclosure including the specification, drawings and claims of the basic application is referred to. Which is incorporated herein by reference in its entirety.

DESCRIPTION OF SYMBOLS 10 Exposure apparatus 21 Discharge lamp 30 Illuminance calculation control part 40 Light-receiving part 41 Light-receiving element 42 Filter 50 Illuminance measurement control apparatus 100 Illuminance meter 110 Light-receiving part 114 Filter 120 Main body

Claims

a discharge lamp that emits light including emission lines of g-line (436 nm), h-line (405 nm), and i-line (365 nm);
A light measuring means having a light receiving portion and measuring light emitted from the discharge lamp;
Illumination adjustment means for adjusting the power supplied to the discharge lamp based on the measurement value in the light measurement means,
An exposure apparatus, wherein the light measuring means has a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines among g-line, h-line, and i-line.
2. The exposure apparatus according to claim 1, wherein a half width of a spectral sensitivity curve in the spectral sensitivity characteristic is wider than a wavelength region between the two adjacent bright lines.
2. The exposure apparatus according to claim 1, wherein, in the spectral sensitivity characteristic, sensitivities at the two adjacent bright lines are 85% or less of the peak sensitivity. 3.
4. The exposure apparatus according to claim 1, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength region (365 nm to 405 nm) between i-line and h-line.
4. The exposure apparatus according to claim 1, wherein the spectral sensitivity characteristic has a spectral sensitivity characteristic having a peak sensitivity in a wavelength region (405 nm to 436 nm) between the h-line and the g-line. .
4. The exposure apparatus according to claim 1, wherein the spectral sensitivity curve in the spectral sensitivity characteristic is represented by a substantially Gaussian distribution curve centered on the peak sensitivity.
The light measuring means measures the illuminance of light emitted from the discharge lamp;
The exposure apparatus according to claim 1, wherein the illumination adjusting unit adjusts supply power so as to maintain a constant illuminance.
The exposure apparatus according to any one of claims 1 to 3 , wherein the discharge lamp is a mercury lamp in which 0.2 mg / mm 3 or more of mercury is sealed.
A light receiving unit having a light receiving element and a filter disposed on the incident optical path;
A measurement unit that performs photometric calculation based on light incident on the light receiving element;
The photometric device according to claim 1, wherein the light receiving section has a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines among g-line (436 nm), h-line (405 nm), and i-line (365 nm).
10. The photometric device according to claim 9, wherein a half-value width of a spectral sensitivity curve in the spectral sensitivity characteristic is wider than a wavelength region between the two adjacent bright lines.
10. The photometric device according to claim 9, wherein, in the spectral sensitivity characteristic, sensitivities at the two adjacent bright lines are 85% or less of the peak sensitivity.
12. The photometric device according to claim 9, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength region (365 nm to 405 nm) between i-line and h-line.
12. The photometric device according to claim 9, wherein the spectral sensitivity characteristic has a spectral sensitivity characteristic having a peak sensitivity in a wavelength region (405 nm to 436 nm) between the h line and the g line. .
It can be connected to the photometric device body via a signal cable,
A light receiving element;
A filter disposed on the incident optical path,
A light receiving portion of a photometric device characterized by having a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines among g lines (436 nm), h lines (405 nm) and i lines (365 nm) which are bright lines.
A light receiving unit having a light receiving element and a filter disposed on the incident optical path;
A measurement unit that performs photometric calculation based on light incident on the light receiving element;
The photometric device, wherein the light receiving unit has a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines.