TWI536119B - Photometric devices and exposure devices - Google Patents

Description

Photometric device and exposure device

The present invention relates to a photometric device for measuring illuminance and the like, and more particularly to photometric measurement of emitted light by a discharge lamp used in an exposure device.

In the exposure apparatus, pattern light is projected on a substrate on which a photosensitive material such as a photoresist is applied, and a pattern is formed on the photosensitive material. In order to form a high-precision pattern, it is necessary to irradiate light with a certain amount of irradiation during the exposure operation. Therefore, the illuminance or the like is measured using a photometric device during the exposure of the gap to adjust the lighting power supply to the discharge lamp (see, for example, Patent Documents 1 and 2).

A high-pressure/ultra-high pressure mercury lamp that emits a bright line including a g-line (436 nm), an h-line (405 nm), and an i-line (365 nm) is used in the exposure apparatus (see Patent Document 3). The photosensitive material has a sensitivity characteristic based on a bright line, and the illuminance measuring device is provided with a filter that removes light other than the g line, the h line, and the i line, and measures the illuminance according to the light transmitted through the filter (for example, see Patent Document 4).

Prior technical literature

Patent literature

[Patent Document 1] JP-A-8-8154

[Patent Document 2] JP-A-2002-5736

[Patent Document 3] JP-A-2010-85954

[Patent Document 4] JP-A-2002-340667

In the above discharge lamp, since the inside of the discharge tube is high pressure, it is easy to cause a state in which the irradiance is dominated by noise caused by the discharge fluctuation. Especially in the vicinity of the bright line, because the self-absorption of light energy changes, the spectral value near the measured bright line is obviously affected by the discharge fluctuation of the noise.

Therefore, even if the substantial lamp output falls and the change in the entire radiation spectrum distribution is small, the radiation spectrum fluctuation near the bright line occurs. On the other hand, even if the radiation spectrum distribution changes in general due to the decrease in the output of the lamp, the radiation spectrum fluctuation near the bright line is small as compared with the total fluctuation amount.

When a discharge lamp having such a radiation characteristic is used for illuminance detection using a filter having a peak transmittance corresponding to a bright line, it is affected by fluctuations in the noise spectrum near the peak, and the illuminance of the entire spectrum cannot be accurately detected. As a result, power adjustment is performed based on the illuminance measurement of the error, and when the lamp is turned on, unnecessary power fluctuations are frequently continued, which affects the life of the lamp. In addition, in the photometry calculation other than the illuminance, an erroneous photometric value is also detected.

An exposure apparatus according to the present invention includes a discharge lamp that emits light including a bright line of g line (436 nm), h line (405 nm), and i line (365 nm), and a light measuring unit having a light receiving unit for measuring the discharge from the foregoing The light emitted by the lamp; and the illumination adjusting unit adjust the electric power supplied to the discharge lamp in accordance with the measured value of the light measuring unit.

A high-pressure or ultra-high pressure mercury lamp can be used as the discharge lamp. In this case, a spectrum of a bright line spectrum including g lines, h lines, and i lines is generated, and the spectral distribution of the emitted light is narrow in the three bright lines. A continuous spectral distribution curve with large relative spectral intensities in the wavelength domain. For example, a mercury lamp in which 0.2 mg/mm ³ or more of mercury is sealed in a discharge tube can be used as the discharge lamp.

The light receiving unit of the light measuring unit is, for example, a light receiving member having a photoelectric conversion member or the like, a filter disposed on the incident light path, or the like, and is subjected to electrical signal measurement based on light incident on the light receiving member. The spectral sensitivity characteristic of the light receiving portion can be determined according to the spectral sensitivity characteristics of the light receiving member and the spectral transmission characteristics of the filter. When the spectral sensitivity of the light-receiving member does not have a bias sensitivity in a specific wavelength region, and the entire wavelength region is substantially constant, the spectral light transmission characteristics of the filter are directly expressed as the spectral sensitivity characteristics of the light-receiving portion.

The light measuring unit can measure any one of various physical quantities related to the emitted light of the discharge lamp such as illuminance, brightness, amount of light, and the like as a measured value. The light adjustment unit adjusts the supplied power so that the measured photometric value is maintained at an appropriate value or a certain value.

In the present invention, the spectral sensitivity characteristic of the light measuring unit is such that a peak sensitivity is established between two adjacent bright lines, that is, between the i line (365 nm) and the h line (405 nm) or the h line (405 nm) and g. Between the lines (436nm).

That is, the peak sensitivity of the light receiving portion is a position shifted from the h line and the i line which should be observed, and the sensitivity (spectral value) of the h line and the i line is lower than the peak sensitivity in the spectral sensitivity characteristic. Since the sensitivity (spectral value) to the i-line and the h-line is lower at the peak sensitivity, the dominant discharge fluctuation of the noise occurs in the vicinity of the bright line, and the discharge can be measured without being greatly affected by the fluctuation. The light of the light.

For example, when the illuminance lighting control is performed, the electric power can be adjusted in accordance with the illuminance that is accurately measured, and the power fluctuation that is not originally required can be generated due to the erroneous electric power adjustment, and stable illuminance lighting can be realized.

The spectral sensitivity characteristic can be expressed as a slightly Gaussian distribution curve (normal distribution) centered on the peak sensitivity, or can be represented by a band pass (region). The spectral sensitivity curve is configured such that the peak sensitivity is removed from the i-line, the h-line or the g-line as much as possible, for example, the peak is in the intermediate domain.

On the one hand, it is possible to avoid the influence of the dominant discharge fluctuation of the noise, and on the other hand, it is desirable to detect the wavelength region between the i-line and the h-line or the wavelength region between the h-line and the g-line in a wide range without missing. For example, the effective sensitivity characteristic of the light measuring unit is preferably such that the half width of the spectral sensitivity curve is larger than the wavelength domain between the i line and the h line. Thereby, the overall spectral intensity in the wavelength domain between the i-line and the h-line can be accurately detected.

For example, the effective sensitivity characteristic is such that the sensitivity at the h-line and the i-line wavelength is 85% or less of the peak sensitivity, and the half-width of the spectral sensitivity curve is larger than the wavelength region between the i-line and the h-line. Thereby, the influence of noise is eliminated, and the detection of the entire spectral variation can be performed more reliably.

On the other hand, the photometric apparatus according to another aspect of the present invention includes a light receiving unit including a light receiving member such as a photoelectric conversion member and a filter disposed on the incident light path, and a measuring unit that receives light according to the light receiving member. The light-receiving calculation is performed; the light-receiving portion has a spectral sensitivity characteristic having a peak sensitivity between two adjacent bright lines among the g-line (436 nm), the h-line (405 nm), and the i-line (365 nm).

In the present invention, accurate illuminance, brightness, amount of light, and the like can be measured by the spectral sensitivity characteristic of the light receiving portion, and accurate photometry of the discharge lamp can be realized. The above-described spectral sensitivity characteristics can be applied as the spectral sensitivity characteristics of a more specific light receiving portion.

The photometric device can detect, for example, illuminance, brightness, amount of light, etc., and can be configured as an illuminometer, a luminance meter, or a light meter, respectively. The photometric device may be configured, for example, as a hand-carrying type photometric device, and the light-receiving portion and the measuring portion may be integrally formed. Alternatively, the light receiving unit and the measuring unit may be connected by a signal cable.

On the other hand, the light receiving unit may be configured to be connected to the desktop type photometric apparatus main body by a cable. Further, the photometric device may be mounted in the exposure device or the light source device, or the photometric device may be placed in the drawing station to perform photometry in the exposure preparation phase.

A photometric apparatus according to another aspect of the present invention includes: a light receiving unit including a light receiving member and a filter disposed on the incident light path; and a measuring unit that performs photometry calculation based on light incident on the light receiving member; and the light receiving unit It has a spectral sensitivity characteristic with peak sensitivity between two adjacent bright lines.

According to the present invention, it is possible to appropriately measure the light of the discharge lamp without being affected by the fluctuation of the dominant discharge of the noise.

Embodiments of the present invention will be described below with reference to the drawings.

Fig. 1 is a schematic block diagram of an exposure apparatus according to a first embodiment.

The exposure apparatus 10 is a maskless exposure apparatus that directly forms a pattern on a substrate SW on which a photosensitive material such as a photoresist is formed on the surface, and includes a discharge lamp 21 and a DMD (Digital Micro-mirror Device) 24. A pattern is formed on the surface of the substrate SW by irradiating the substrate SW with light from the discharge lamp 21.

The discharge lamp 21 is a high pressure or an ultrahigh pressure mercury lamp, and contains, for example, mercury of 0.2 mg/mm ³ or more. The spectrum of the discharge lamp is a continuous spectral distribution at about 330 nm to 480 nm, and emits bright line spectral light of g line (436 nm), h line (405 nm), and i line (365 nm).

The light emitted from the discharge lamp 21 is formed into parallel light by the illumination optical system 23, and is guided to the DMD 24 via the mirror 25, the half mirror 27A, and the mirror 27B. The DMD 24 is an array of optical modulating elements (for example, 1024*768) in which micromirrors of a few micrometers to several tens of micrometers are arranged in a matrix, and is controlled by the exposure control unit 60.

In the DMD 24, based on the exposure data transmitted from the exposure control unit 60, the control causes each of the micromirrors to be selectively turned ON/OFF. The light reflected by the micromirrors in the ON state is guided to the projection optical system 28 through the semi-transparent mirror 27. Further, the light beam formed by the reflected light of the ON state mirror, that is, the light of the pattern image is irradiated onto the substrate SW. A pattern is formed on the entire substrate while moving the substrate SW.

The exposure device 10 includes an illuminance measurement control device 50 including an illuminance calculation control unit 30 and a light receiving unit 40. The illuminance measurement control device 50 measures the illuminance of the discharge lamp 21, and performs illuminance lighting control. When the light receiving unit 40 moves to the irradiation area of the projection optical system 28, the light of the discharge lamp 21 is guided to the light receiving unit 40. The illuminance measurement is performed based on the light incident on the light receiving unit 40 after the drawing of one substrate is completed and the drawing of the next substrate is started.

The light receiving unit 40 includes a light receiving member 41 including a photoelectric conversion member or the like, and a filter 42 disposed to face the light receiving surface of the light receiving member 41, and light incident from a window (not shown) of the housing portion is provided in the incident light. The filter 42 on the road is incident on the light receiving member 41.

As will be described later, the filter 42 has a spectral transmittance characteristic that passes light of a specific band including a g-line (436 nm), an h-line (405 nm), and an i-line (365 nm), and removes light in a wavelength range other than the band. The signal generated by the light incident on the light receiving member 41 is transmitted to the illuminance calculation control unit 30.

The signal input to the illuminance calculation control unit 30 is subjected to an amplification process by the amplifier 35, and then converted into a digital signal by the A/D converter 34. Further, the illuminance is calculated by the calculation unit 36. Regarding the illuminance calculation method, a conventionally known method can be used.

The illuminance control unit 33 adjusts the electric power supplied from the lamp driving unit 32 to the discharge lamp 21 based on the illuminance data. Thereby, the light is irradiated from the discharge lamp 21 to the substrate SW with a constant illuminance while the lamp is being turned on.

Fig. 2 is a view showing the spectral sensitivity characteristics of the light receiving portion. Fig. 3 is a view showing the spectral sensitivity characteristics of the light receiving portion and the spectral distribution characteristics of the discharge lamp. The spectral sensitivity characteristics of the light receiving unit will be described using Figs. 2 and 3 .

The photosensitive material of the substrate SW patterned by the exposure device 10 mostly has a photosensitive property which is reflected on the g-line, the h-line or the i-line as a mercury line. As shown in Fig. 2, the spectral sensitivity curve L1 of the light receiving portion 40 is a curve similar to a Gaussian distribution in which the bright lines cross the wavelength range of 340 to 480 nm, and has a peak sensitivity P1 at 385 nm. The sensitivity at the h line (405 nm) is P2, and the sensitivity at the i line (365 nm) is P3, which is approximately symmetric with respect to the peak P1 having the highest relative spectral value.

In Fig. 3, the spectral sensitivity curve L1 of the light receiving portion and the spectral distribution curve SP of the discharge lamp 21 are displayed. Here, the spectral sensitivity curve L1 of the light receiving unit is based on the spectral transmittance characteristics of the filter 42 and the spectral sensitivity characteristics of the light receiving member 41. The discharge lamp 21 emits continuous spectral light including a bright line of g line (436 nm), h line (405 nm), and i line (365 nm), and has sharp spectral energy at a narrow wavelength range of 436 nm, 405 nm, and 365 nm. In addition, since it is an ultra-high pressure mercury lamp, the spectral change is relatively slow, and it becomes a continuous distribution curve which spreads over a wide range.

When the lamp is turned on, the spectral distribution of the discharge lamp 21 fluctuates due to self-absorption (absorption spectrum). In Fig. 3, a spectral distribution curve in which the spectral value sharply decreases in the vicinity of the g-line (436 nm), the h-line (405 nm), and the i-line (365 nm) is shown, and the spectroscopic representation of the self-absorption phenomenon of the discharge lamp 21 is schematically illustrated. Distribution characteristics. Spectral fluctuations in a specific narrow wavelength domain like this are irregularly generated in the lighting.

The peak value P1 of the spectral sensitivity curve L1 of the light receiving unit 40 of the present embodiment deviates from the h line (405 nm) and the i line (365 nm), and has the greatest sensitivity to the light having a wavelength substantially in the middle of the adjacent two bright lines. Further, compared with P1, the sensitivity ratio R11 at the wavelength of the h line and the wavelength sensitivity ratio R12 at the i line are lower, and P11 = 1.0, R11 = 0.70, and R12 = 0.61, all of which are 85% or less of P1. .

Further, the half width (Δλ/2) of the spectral sensitivity curve is wider than the wavelength range between the h line and the i line, and Δλ/2 = 50 nm. In this way, the wavelength range in which the sensitivity is high in the spectral sensitivity curve L1 is separated from the h line and the i line, and is not affected by the self-absorbed spectral distribution fluctuation, and the light that spans the entire wavelength region between the h line and the i line. Through.

As a result, the spectral energy of the light incident on the light receiving member 41 is light that is not governed by the spectral variation of the noise, and the actual illuminance can be appropriately detected. Further, according to the appropriately detected illuminance, the illuminance lighting for adjusting the supply power to the discharge lamp 21 is performed to avoid frequent power adjustment.

According to the present embodiment, the exposure apparatus 10 that forms the pattern by the discharge lamp 21 has the illuminance measurement control unit 50 including the illuminance calculation control unit 30 and the light receiving unit 40, and the peak value P1 of the spectral sensitivity curve L1 of the light receiving unit 40 is obtained from The h line (405 nm) and the i line (365 nm) are removed, and are disposed in the wavelength region substantially in the middle of the adjacent two bright lines. The sensitivity of the h-line and the i-line is lower than the peak sensitivity, and the sensitivity ratio R1 at the wavelength of the h-line and the sensitivity ratio R2 at the wavelength of the i-line are 85% or less of P1. Further, the half width (Δλ/2) of the spectral sensitivity curve is wider than the wavelength range between the h line and the i line.

Next, the photometric apparatus of the second embodiment will be described using Figs. 4 to 6 . In the second embodiment, the photometric device independent of the exposure device is used for illuminance measurement.

Fig. 4 is a schematic view showing an illuminometer according to a second embodiment.

The hand-carrying type illuminometer 100 includes a main body 120 having a display portion 129 and a light-receiving portion 110. The light-receiving portion 110 passes through a signal cable 130 attached to the light-receiving portion 110, and is connected to the connecting portion 127 of the main body 120. In order to measure the illuminance in an exposure apparatus (not shown), the light receiving unit 110 of the illuminometer 100 is placed on the substrate loading platform, and the light receiving unit 110 is moved to a specific measurement point. Next, the illuminance of the display unit 129 shown in the main body 120 is confirmed, and the electric power supplied to the discharge lamp is adjusted.

Fig. 5 is a block diagram of the illuminometer of the second embodiment.

The light receiving unit 110 is provided below the window 112 provided on the upper surface of the light receiving unit main body 110H, and is provided with a filter 114 and a light receiving member 116, and the light receiving unit 110 is disposed to face the light receiving member 116. Here, the light-receiving portion 110 having the spectral sensitivity characteristics similar to those of the first embodiment can be selectively connected to the main body 120 by the light-receiving portion 110' having the spectral sensitivity characteristics to be described later.

Fig. 6 is a view showing spectral sensitivity characteristics different from those of the light receiving unit of the first embodiment.

As shown in Fig. 6, the spectral sensitivity distribution curve L2 of the light receiving portion 110' is a curve having an approximate Gaussian distribution with a peak value P2 of about 422 nm, and the peak P2 exists at the center of the g line (436 nm) and the h line (405 nm). position. In addition, compared with P2, the sensitivity ratio R21 at the wavelength of the g line and the sensitivity ratio R22 at the wavelength of the h line are lower, with respect to P2=1.0, R21=0.64, and R22=0.71, both being 85% of P1. the following.

Further, the half width (Δλ/2) of the spectral sensitivity curve is wider than the wavelength range between the g line and the h line, and Δλ/2 = 43 nm. Since the spectral sensitivity curve L2 has a peak P2 in the middle of the g line and the h line, it is not affected by the spectral variation of the noise caused by self-absorption or the like, and between the h line and the i line. The spectral light of the entire wavelength region is appropriately passed through and guided to the light receiving member 116.

The electric signal generated by the light receiving member 116 of the light receiving portion 110 or the light receiving member 116' of the light receiving portion 110' is subjected to an amplification process by the amplifier 122, and then converted into a digital signal by the A/D converter 124. Next, the calculation unit 128 calculates the illuminance. The obtained illuminance data is displayed on the display unit 129. The control unit 126 controls the power supply circuit and the signal processing circuit inside the main body.

In the first and second embodiments, the illuminance meter is configured as a photometric device. However, other photometric devices such as a luminance meter, an integrated photometer, and an integrated intensity meter may be applied. In this case, in the photometry apparatus main body, luminance, light amount, intensity, and the like are calculated from a conventional calculation processing method based on the received light signal. Further, it may be configured not only as a handcarry type but also as a desktop type. Further, the filter may be selectively attached to the light receiving portion by a sliding mechanism or the like using a guide groove.

It is also possible to use a mercury lamp other than the above as a discharge lamp, and it is possible to apply a discharge lamp that emits a continuous spectrum and emits continuous spectrum light including bright lines of g lines, h lines, and i lines. Alternatively, a discharge lamp that emits continuous spectral light containing other complex bright lines can also be used. In this case, the photometric device is configured to have a spectral sensitivity characteristic that matches the characteristics of the discharge lamp. Further, as in the first embodiment, when the illuminance measuring device is incorporated in the exposure device, the filter may have a sensitivity characteristic.

The following is a description of embodiments of the invention.

[Examples]

This embodiment is composed of an illuminometer having a light receiving unit having spectral sensitivity characteristics described in the first and second embodiments. A comparative experiment of an illuminometer with a light-receiving portion having a conventional spectral sensitivity characteristic was performed.

Fig. 7 is a view showing the spectral sensitivity characteristics of a conventional light receiving unit (hereinafter referred to as a first conventional light receiving unit) corresponding to an i-line (365 nm). Fig. 8 is a view showing the spectral sensitivity characteristics of a conventional light receiving unit (hereinafter referred to as a second conventional light receiving unit) corresponding to the h line (405 nm).

The spectral sensitivity curve L3 shown in Fig. 7 is a distribution curve having a peak sensitivity of about 355 nm, and has the largest sensitivity on the short wavelength side near the i-line (365 nm). The sensitivity ratio at the h line (405 nm) wavelength is R31=0, the sensitivity ratio at the i line (365 nm) wavelength is R32=0.90, and the half width Δλ/2 of the spectral sensitivity curve is 40 nm.

The spectral sensitivity curve L4 shown in Fig. 8 has a distribution curve of about 405 nm as a peak sensitivity, and has the largest sensitivity on the short wavelength side near the h line (405 nm). The sensitivity ratio at the wavelength of the g line (436 nm) is R41 = 0.75, the sensitivity ratio at the wavelength of the h line (405 nm) is R42 = 0.99, the sensitivity ratio at the wavelength of the i line (365 nm) is R43 = 0.35, and the half width of the spectral sensitivity curve is Δλ / 2 = 75 nm. Regardless of which spectral sensitivity curve, the peak sensitivity is in a wavelength domain that is susceptible to fluctuations in the spectral spectrum of the self-absorbed noise.

Fig. 9 is a graph showing fluctuations in lamp supply power when the first illumination control unit performs the illumination illumination control using the first and second conventional light receiving units shown in Figs. 7 and 8 . Fig. 10 is a graph showing the power fluctuation when the light receiving unit of the present embodiment performs the illuminance lighting control. Here, an ultrahigh pressure mercury lamp having a mercury content of 0.2 mg/mm ³ or more is used as a discharge lamp, and the illuminance lighting control is performed.

When the illuminance of the first and second conventional light receiving units shown in FIGS. 7 and 8 is used, the large power fluctuation is continuously generated during the use of the lamp (see M1 and M2 in Fig. 9). This indicates that an unacceptable illuminance is detected due to the fluctuation of the noise dominated by the noise, and an unnecessary power adjustment accompanying a large power fluctuation is performed in order to cooperate with this.

Fig. 10 is a graph showing the power fluctuation when the light receiving unit of the present embodiment performs the illuminance lighting control. As shown in Fig. 10, when power adjustment is performed, there is almost no significant power fluctuation. This means that by using the light-receiving portion of the present embodiment as described above, it is possible to reliably detect the entire spectral energy and perform appropriate power adjustment without being affected by the fluctuation of the radiation spectrum of the noise control. In addition, Fig. 10 shows the electric power fluctuation of the discharge lamp according to the embodiment of the first embodiment. Similarly, in the discharge lamp according to the embodiment of the second embodiment, there is no significant electric power fluctuation.

Next, a comparative experiment was performed in response to changes in the relative integrative intensity of the spectrum and the relative integrated intensity of the spectrum when the electric power was supplied to the discharge lamp. The illuminance meter is compared with the conventional example using the embodiment corresponding to the first embodiment in the present embodiment.

Fig. 11 is a view showing a change in the spectral distribution measured when the power is supplied in a stepwise manner. The electric power is changed stepwise in the range of 170 W - 250 W in the order of every 20 W, and the spectral distributions SL1 - SL5 at this time point are shown. When the supply power is reduced, the spectral intensity of the spectral distribution curve generally decreases. Further, the spectral distribution shown in Fig. 11 is based on a spectroscopic distribution curve obtained by measuring the light emitted from the discharge lamp and passing through the optical system using a composite photometric system MC-3000-28C (manufactured by Otsuka Electronics Co., Ltd.). Chart.

Figure 12 shows a graph plotting the relative integrand of the spectra for each power. Here, the relative integrated value integrated by the value obtained by multiplying the sensitivity curve of the light receiving unit for each of the spectral distribution curves of the supplied electric power is compared and graphed by the respective light receiving units. Here, the ratio of the integrated intensity of the supplied electric power to each of the light receiving units is expressed on the basis of the integrated value of the second conventional light receiving unit when the power is supplied at 250 W (100%).

For example, in the light-receiving unit of the present embodiment, the spectral distribution curve calculated for each of the supplied electric powers shown in Fig. 11 is multiplied by the unit wavelength (1 nm) by the spectral sensitivity curve shown in Fig. 2, and is obtained from 300 nm. The integrated value between 500 nm is expressed as a ratio of the integrated value of the second conventional light receiving unit when the supplied electric power calculated by the same method is 250 W.

As shown in Fig. 12, with respect to the supplied electric power 250W, the spectral integrated strength of each light receiving unit is lowered, and the reduction in the integrated intensity is substantially proportional to the amount of electric power change. When the light receiving unit and the second conventional light receiving unit of the present embodiment are used, the overall spectral total integration intensity is large.

Figure 13 shows a graph of the rate of change of the relative integrand of the spectrum. Here, it is represented by the rate of change of the integrated intensity with reference to the input power of 170 W. The larger the rate of change, the higher the decomposition energy, the more detailed the change in the integrated intensity can be detected, and the illuminance variation can be grasped more precisely. As shown in Fig. 13, the rate of change at the time of using the light receiving portion of the present embodiment is the largest.

As described above, by using the light receiving unit of the present embodiment, it is possible to accurately grasp the actual discharge change (illuminance change) without being affected by the dominant discharge fluctuation of the noise. Therefore, by using the light receiving unit of the present embodiment, it is possible to accurately perform other photometry calculations such as brightness measurement and light amount measurement.

10. . . Exposure device

twenty one. . . Discharge lamp

30. . . Illumination calculation control department

40. . . Light receiving department

41. . . Light receiving part

42. . . filter

50. . . Illuminance measurement control device

100. . . Illuminometer

110. . . Light receiving department

114. . . filter

120. . . main body

Fig. 1 is a schematic block diagram of an exposure apparatus according to a first embodiment.

Fig. 2 is a view showing the spectral sensitivity characteristics of the light receiving portion.

Fig. 3 is a view showing the spectral distribution characteristics of the discharge lamp.

Fig. 4 is a schematic view showing an illuminometer according to a second embodiment.

Fig. 5 is a block diagram of the illuminometer of the second embodiment.

Fig. 6 is a view showing spectral sensitivity characteristics different from those of the light receiving unit of the first embodiment.

Fig. 7 is a view showing the spectral sensitivity characteristics of a conventional light receiving unit (hereinafter referred to as a first conventional light receiving unit) corresponding to an i-line (365 nm).

Fig. 8 is a view showing the spectral sensitivity characteristics of a conventional light receiving unit (hereinafter referred to as a second conventional light receiving unit) corresponding to the h line (405 nm).

Fig. 9 is a graph showing fluctuations in lamp supply power when the first illumination control unit performs the illumination illumination control using the first and second conventional light receiving units shown in Figs. 7 and 8 .

Fig. 10 is a graph showing the power fluctuation when the light receiving unit of the present embodiment performs the illuminance lighting control.

Fig. 11 is a view showing a change in the spectral distribution measured when the power is supplied in a stepwise manner.

Figure 12 shows a graph plotting the relative integrand of the spectra for each power.

Figure 13 shows a graph of the rate of change of the relative integrand of the spectrum.

Claims (11)

An exposure apparatus comprising: a discharge lamp that emits light including a bright line of a g line (436 nm), an h line (405 nm), and an i line (365 nm); and a light measuring unit having a light receiving unit that measures the discharge lamp from the foregoing The intensity of the emitted light; and the illumination adjusting unit adjusts the power supplied to the discharge lamp according to the measured value of the light measuring unit; the light measuring unit has two bright lights adjacent to the g line, the h line, and the i line There is a spectral sensitivity characteristic of peak sensitivity between lines. In the exposure apparatus according to the first aspect of the invention, the half-width of the spectral sensitivity curve of the spectral sensitivity characteristic is wider than the wavelength range between the adjacent two bright lines. In the exposure apparatus according to the first aspect of the invention, in the spectral sensitivity characteristic, the sensitivity of the adjacent two bright lines is equal to or less than 85% of the peak sensitivity. The exposure apparatus according to any one of claims 1 to 3, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength range (365 nm to 405 nm) between the i-line and the h-line. The exposure apparatus according to any one of claims 1 to 3, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength range (405 nm to 436 nm) between the h line and the g line. A photometric device comprising: a light receiving portion having a light receiving member and a filter disposed on the incident light path; The measuring unit performs at least one of illuminance, brightness, and light amount based on light incident on the light receiving member, and the light receiving unit has a g line (436 nm), an h line (405 nm), and an i line (365 nm). There is a spectral sensitivity characteristic of peak sensitivity between two adjacent bright lines. In the photometric apparatus according to claim 6, the half-width of the spectral sensitivity curve of the spectral sensitivity characteristic is wider than the wavelength range between the adjacent two bright lines. In the photometric apparatus according to claim 6, in the spectral sensitivity characteristic, the sensitivity of the adjacent two bright lines is equal to or less than 85% of the peak sensitivity. The photometric device according to any one of claims 6 to 8, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength range (365 nm to 405 nm) between the i-line and the h-line. The photometric device according to any one of claims 6 to 8, wherein the spectral sensitivity characteristic has a peak sensitivity in a wavelength range (405 nm to 436 nm) between the h line and the g line. A light receiving portion of a photometric device, which is connectable to a main body of the photometric device through a signal cable, comprising: a light receiving member; and a filter disposed on the incident light path; characterized by having a bright line g line (436 nm) and an h line (405 nm) ), there is a spectral sensitivity characteristic of peak sensitivity between two adjacent bright lines in the i-line (365 nm).