WO2012132479A1 - 光デリバリ部品、及び、それを用いたレーザ装置 - Google Patents

光デリバリ部品、及び、それを用いたレーザ装置 Download PDF

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Publication number
WO2012132479A1
WO2012132479A1 PCT/JP2012/050003 JP2012050003W WO2012132479A1 WO 2012132479 A1 WO2012132479 A1 WO 2012132479A1 JP 2012050003 W JP2012050003 W JP 2012050003W WO 2012132479 A1 WO2012132479 A1 WO 2012132479A1
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Prior art keywords
light
fiber
light emitting
delivery
optical fiber
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Ceased
Application number
PCT/JP2012/050003
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English (en)
French (fr)
Japanese (ja)
Inventor
田谷　浩之
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Fujikura Ltd
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Fujikura Ltd
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Publication of WO2012132479A1 publication Critical patent/WO2012132479A1/ja
Priority to US14/032,372 priority Critical patent/US9263847B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06754—Fibre amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06704—Housings; Packages
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0405—Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/0675—Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094011—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre with bidirectional pumping, i.e. with injection of the pump light from both two ends of the fibre
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping

Definitions

  • the present invention relates to an optical delivery component capable of preventing damage due to heat, and a laser device using the same.
  • Fiber laser devices are used in the fields of processing machines, medical equipment, measuring instruments, and the like, and output light amplified by an optical fiber for amplification.
  • signal light amplified in an amplification optical fiber composed of a double clad fiber is output from the core of the amplification optical fiber and is delivered from a single clad fiber connected to the amplification optical fiber.
  • the signal is input to the core of the fiber, propagated to a desired location by the delivery fiber, and then output.
  • the delivery fiber is connected to the amplification optical fiber as described above. If this is the case, this excess excitation light is input to the cladding of the delivery fiber. Also, mismatch in mode field diameter between the signal light propagating through the core of the amplification optical fiber and the signal light propagating through the core of the delivery fiber, axial misalignment, angular misalignment, etc. in the connection between the amplification optical fiber and the delivery fiber Thus, part of the signal light output from the amplification optical fiber may be input to the cladding of the delivery fiber.
  • the light input to the cladding of the delivery fiber may be absorbed by the coating layer of the delivery fiber, causing a problem that the coating layer is burned out. Therefore, it is desirable that the light input to the cladding of the delivery fiber is emitted appropriately.
  • Patent Document 1 describes such an optical fiber fusion splicing structure that emits light input to the cladding.
  • this fusion spliced structure the double clad fiber and the single clad fiber are arranged in a straight line and connected, and at least the vicinity of the fusion point of the single clad fiber is covered with a high thermal conductivity block. Therefore, even when light is input from the double-clad fiber to the clad of the single-clad fiber and heat is generated by the radiation of this light, this heat is absorbed by the block, preventing deterioration of the coating of the optical fiber. It is supposed to be possible.
  • Patent Document 2 describes a laser transmission device that emits light input to a clad.
  • a portion where the optical fiber cladding is partially exposed is bent with a predetermined curvature, covered with a light transmitting member, and further provided with a light absorbing member / cooling member. Is. With such a configuration, it is supposed that light propagating through the cladding can be removed almost completely in the portion where the cladding is exposed.
  • light input from the amplification optical fiber to the delivery fiber includes excitation light that propagates through the cladding of the amplification optical fiber and signal light that propagates through the core.
  • excitation light is light with many components having a large NA (Numerical Aperture)
  • signal light is light with many components having a relatively small NA compared to excitation light.
  • a component having a small NA has better straightness than a component having a large NA.
  • an object of the present invention is to provide an optical delivery component capable of preventing damage due to heat, and a laser device using the same.
  • An optical delivery component of the present invention includes a delivery fiber having a core and a clad, and a heat dissipation member, and the delivery fiber includes a first light emitting unit connected to a part of the heat dissipation member, and the heat dissipation member.
  • a second light emitting portion connected to another part, and at least the second light emitting portion is bent, and the first light emitting portion is light in the delivery fiber more than the second light emitting portion. Is provided on the input end side, and has a bending radius larger than that of the second light emitting portion.
  • the second light emitting portion Since the second light emitting portion has a smaller bending radius than the first light emitting portion, both the light having a relatively large NA and the light having a relatively small NA can be emitted. Therefore, the remaining light that has passed through the first light emitting portion is emitted from the second light emitting portion.
  • the heat generated by the light emitted from the first light emitting part is radiated from a part of the heat radiating member, and the heat generated by the light emitted from the second light emitting part is the other part of the radiating member. Radiated from the heat.
  • the first light emitting part is preferably linear.
  • first light emitting portion By setting the first light emitting portion on a straight line, light having a small NA can be appropriately propagated to the second light emitting portion, and more appropriately generated in the first light emitting portion and the second light emitting portion. Heat can be dispersed.
  • the second light emitting portion may have a constant bending radius.
  • the heat dissipating member is usually made by processing aluminum or the like having good heat conductivity with a metal working machine such as a milling machine, but the second light emitting part of the heat dissipating member has a second bend radius by making the second emitting part constant.
  • the part to which the part is connected can be processed with a constant bending radius, and the processing becomes easy. Therefore, the heat dissipation member can be suppressed at a low cost. It can be.
  • the bending radius of the second light emitting portion may be gradually reduced from the first light emitting portion side.
  • the second light emitting portion in the second light emitting portion, light is gradually emitted sequentially from light having a relatively large NA to light having a relatively small NA. Therefore, even when light having a relatively large NA that has not been emitted from the first light emitting unit propagates to the second light emitting unit, the second light emitting unit first emits light having a relatively large NA, Then, light having a relatively small NA can be emitted. Thus, in the second light emitting portion, the portions that generate heat can be further dispersed, and damage due to heat can be prevented more appropriately.
  • the bend radius of the delivery fiber is gradually reduced from the first light emitting portion to the second light emitting portion.
  • the heat dissipating member further includes a light-transmitting resin that covers the delivery fiber, and at least a part of the first light-emitting portion and the second light-emitting portion, the cladding is the light-transmitting resin. It is preferable to be covered with.
  • the clad is covered with a light-transmitting resin, light can be converted into heat at a location away from the delivery fiber. Therefore, the delivery fiber can be more appropriately protected from heat.
  • the delivery fiber may further include a coating layer that covers the cladding, and the cladding is covered with the coating layer in at least a part of the first light emitting portion and the second light emitting portion. preferable.
  • the core and the cladding can be prevented from being broken by the coating layer when assembling the optical delivery component.
  • the core and the cladding can be prevented from being broken by the coating layer when assembling the optical delivery component.
  • the core and the cladding are not bent more when the optical delivery component is assembled. It can be effectively prevented.
  • the heat dissipation member further includes a resin that covers the delivery fiber, and at least a part of the first light emitting unit and the second light emitting unit includes the coating.
  • the layer is covered with the resin, and both the coating layer and the resin are light transmissive.
  • both the coating layer and the resin are light-transmitting resins, heat generation in the coating layer can be suppressed, and light can be converted into heat at a location away from the delivery fiber. Therefore, the delivery fiber can be more appropriately protected from heat.
  • the heat radiating member when the delivery fiber has a coating layer, the heat radiating member further includes a resin that covers the delivery fiber, and at least a part of the first light emitting portion and the second light emitting portion has the coating.
  • the layer is covered with the resin, and the resin is more excellent in thermal conductivity than the coating layer.
  • the resin covering the coating layer has better thermal conductivity than the coating layer, even when heat is generated in the coating layer, this heat can be appropriately conducted by the resin. Accordingly, even in this case, the delivery fiber can be more appropriately protected from heat.
  • a laser apparatus includes any one of the above-described optical delivery components, and an optical fiber that has a core and a cladding and outputs light, and an output end of the optical fiber is the delivery fiber. It is characterized by being connected to the input terminal.
  • the laser device further includes a pumping light source
  • the optical fiber is an amplification optical fiber in which an active element that is excited by pumping light output from the pumping light source is added to the core. It is also good.
  • Such a laser device is a fiber laser device.
  • surplus pumping light output from the amplification optical fiber is light having a large NA
  • signal light amplified in the amplification optical fiber includes light having a large NA and light having a small NA. Therefore, according to the laser apparatus of the present invention, the surplus pumping light is output even when the surplus pumping light output from the amplification optical fiber is input to the clad of the delivery fiber or a part of the signal light is input to the clad.
  • Most of the signal light is emitted from the first light emitting portion, and most of the signal light input to the clad is output from the second light emitting portion. Therefore, since the excitation light and the signal light input to the cladding can be dispersed and converted into heat, a highly reliable fiber laser device can be obtained.
  • the laser device further includes an excitation light source and an amplification optical fiber to which an active element excited by the excitation light is added to a core, and an input end of the optical fiber has the amplification light It may be connected to the output end of the fiber.
  • surplus pumping light output from the amplification optical fiber is input to the cladding of the delivery fiber through the optical fiber, or signal light output from the amplification optical fiber through the optical fiber
  • most of the excess excitation light is emitted from the first light emitting portion, and most of the signal light input to the cladding is output from the second light emitting portion. Therefore, since the excitation light and the signal light input to the cladding can be dispersed and converted into heat, a highly reliable fiber laser device can be obtained.
  • an optical delivery component capable of preventing damage due to heat and a laser device using the same are provided.
  • FIG. 2 is an enlarged view of the light delivery component of FIG. 1.
  • FIG. 5 is a diagram showing a cross-sectional structure taken along line VV in FIG. 3.
  • FIG. 1 is a diagram showing a laser apparatus according to the first embodiment of the present invention.
  • the laser device 1 is a fiber laser device, and includes a seed light source 10 that outputs seed light, an excitation light source 20 that outputs excitation light, and amplification light that is input by the seed light and the excitation light.
  • the fiber 30, the combiner 40 that connects the seed light source 10 and the excitation light source 20, and the amplification optical fiber 30, and the optical delivery component 100 including the delivery fiber 50 that is connected at one end to the amplification optical fiber 30 are mainly used.
  • the seed light output from the seed light source 10 is amplified and output by an amplification optical fiber, and is an MO-PA (Master-Oscillator-Power-Amplifier) type fiber laser apparatus.
  • MO-PA Master-Oscillator-Power-Amplifier
  • the seed light source 10 is composed of, for example, a laser light source composed of a laser diode, or a Fabry-Perot type or fiber ring type fiber laser device.
  • the seed light output from the seed light source 10 is not particularly limited, but is, for example, laser light having a wavelength of 1070 nm.
  • the seed light source 10 is connected to a seed light fiber 15 including a core and a clad covering the core, and the seed light output from the seed light source 10 passes through the core of the seed light fiber 15. Propagate.
  • An example of the seed light fiber 15 is a single mode fiber. In this case, the seed light propagates through the seed light fiber 15 as single mode light.
  • the seed light output from the seed light source 10 is also called signal light. However, the signal need not be superimposed on the seed light.
  • the excitation light source 20 is composed of a plurality of laser diodes 21 and outputs excitation light having a wavelength of 915 nm, for example, when the wavelength of the seed light is 1070 nm as described above. Further, each laser diode 21 of the excitation light source 20 is connected to the excitation light fiber 22, and the excitation light output from the laser diode 21 propagates through the excitation light fiber 22.
  • An example of the excitation light fiber 22 is a multimode fiber. In this case, the excitation light propagates through the excitation light fiber 22 as multimode light.
  • FIG. 2 is a diagram showing a cross-sectional structure perpendicular to the longitudinal direction of the amplification optical fiber 30.
  • the amplification optical fiber 30 includes a core 31, a cladding 32 that covers the core 31, an outer cladding 33 that covers the cladding 32, and a coating layer 34 that covers the outer cladding 33.
  • the refractive index of the cladding 32 is lower than the refractive index of the core 31, and the refractive index of the outer cladding 33 is further lower than the refractive index of the cladding 32.
  • the diameter of the core 31 is, for example, 15 ⁇ m, and the outer diameter of the clad 32 is, for example, 400 ⁇ m.
  • an element such as germanium for increasing the refractive index and an active element such as ytterbium (Yb) excited by excitation light output from the excitation light source 20 are added.
  • Quartz examples of such active elements include rare earth elements, and examples of rare earth elements include thulium (Tm), cerium (Ce), neodymium (Nd), and europium (Eu) in addition to Yb.
  • active elements include bismuth (Bi), chromium (Cr), and the like.
  • the pure quartz to which no dopant is added is mentioned, for example.
  • the material constituting the outer clad 33 includes, for example, ultraviolet curable resin, quartz added with fluorine, and the like, and the material constituting the coating layer 34 is, for example, when the outer clad 33 is made of resin.
  • An ultraviolet curable resin different from the resin may be used.
  • the combiner 40 connects the seed light fiber 15 and the respective excitation light fibers 22 and the amplification optical fiber 30. Specifically, in the combiner 40, the core of the seed light fiber 15 is end-connected to the core 31 of the amplification optical fiber 30. Further, in the combiner 40, the cores of the respective excitation light fibers 22 are end-connected to the clad 32 at one end of the amplification optical fiber 30. Thus, the seed light output from the seed light source 10 is input to the core 31 of the amplification optical fiber 30, and the excitation light output from the excitation light source 20 is input to the clad 32 of the amplification optical fiber 30.
  • FIG. 3 is an enlarged view of the optical delivery component 100 of FIG. As shown in FIG. 3, the optical delivery component 100 includes a heat dissipation member 60 and a delivery fiber 50.
  • FIG. 4 is a diagram showing a state of a cross section perpendicular to the length direction of the delivery fiber 50 of FIG.
  • the delivery fiber 50 includes a core 51, a cladding 52 that covers the core 51, and a coating layer 54 that covers the cladding 52.
  • the diameter of the core 51 is, for example, the same as the diameter of the core 31 of the amplification optical fiber 30, and the outer diameter of the cladding 52 is, for example, the same as the outer diameter of the cladding 32 of the amplification optical fiber 30.
  • the outer diameter of 54 is, for example, the same as the outer diameter of the coating layer 34 of the amplification optical fiber 30.
  • the refractive index of the core 51 is, for example, the same as that of the core 31 of the amplification optical fiber 30, and the refractive index of the cladding 52 is the same as that of the cladding 32 of the amplification optical fiber 30.
  • examples of such a material constituting the core 51 include quartz to which an element such as germanium for increasing the refractive index is added, and examples of a material constituting the clad 52 include any dopant. There is no pure quartz.
  • urethane type ultraviolet curable resin is mentioned, for example.
  • the coating layer 54 on the light input end 58 side is peeled by a predetermined length, the cladding 52 is exposed, and the light input end 58 is The output end 39 of the amplification optical fiber 30 is connected.
  • the delivery fiber 50 has a predetermined length from the light input end 58 including the portion where the coating layer 54 is peeled off as the first light emitting portion 50a, and continues from the input end 58 side to the first light emitting portion 50a.
  • the predetermined length is the second light emitting portion 50b.
  • a part of the first light emitting portion 50a has the coating layer 54 peeled off and the cladding 52 exposed, and the other part of the first light emitting portion 50a has the coating layer 54 not peeled off.
  • the coating layer 54 is not peeled off at all.
  • the life of the optical fiber tends to be shortened.
  • the cladding 52 is coated with the coating layer 54 in this way, The delivery fiber 50 is prevented from having a short life.
  • the heat radiating member 60 includes a first heat radiating member 60 a that constitutes a part of the heat radiating member 60 and a second heat radiating member 60 b that constitutes another part of the heat radiating member 60.
  • FIG. 5 is a diagram showing a cross-sectional structure taken along line VV in FIG.
  • the first heat radiating member 60 a fills the plate-like first base 61 a on which the concave first storage portion 62 a is formed, and the first storage portion 62 a.
  • a resin 64 having excellent thermal conductivity.
  • the outer diameter of the first base 61a has a substantially rectangular shape
  • the first storage portion 62a has a substantially rectangular shape.
  • the first base 61a has a pair of groove portions 63a at both ends in the longitudinal direction of the first storage portion 62a so as to be connected to the first storage portion 62a.
  • the resin 64 is preferably a resin having excellent thermal conductivity, and is not particularly limited. Examples thereof include silicone RTV rubber containing a material having high thermal conductivity.
  • the second heat radiating member 60 includes a second base 61b in which a concave second storage portion 62b is formed, and a resin 64 with excellent thermal conductivity filled in the second storage portion 62b.
  • the shape of the second base 61b is substantially the same as the shape of the cross section of the first base 61a shown in FIG. 5, and the outer shape of the second base 61b is bent at a substantially right angle on the plane. It is said that. Further, the outer shape of the second storage portion 62b is such that the first storage portion 62a is bent at a substantially right angle on a plane.
  • the second base 61b is formed with a pair of groove portions 63b so as to be connected to both ends of the second storage portion 62b. In the present embodiment, the outer shape of the second base 61b and the outer shape of the second storage portion 62b are bent at substantially right angles, but this angle is not particularly limited.
  • the 1st light emission part 50a of the delivery fiber 50 is arrange
  • the portion of the first light emitting portion 50a where the covering layer 54 is peeled off is the portion where the cladding 52 is covered with the resin 64 and the portion where the covering layer 54 is not peeled off is the covering layer. 54 is covered with a resin 64.
  • the first light emitting portion 50a is connected to the first heat radiating member 60a.
  • the resin 64 that covers the coating layer 54 is more excellent in thermal conductivity than the coating layer 54. In such a case, even when heat is generated in the coating layer 54, this heat can be appropriately conducted by the resin 64, and the delivery fiber 50 can be more appropriately protected from the heat.
  • a resin include the silicone RTV rubber described above when the coating layer 54 is a urethane-based resin.
  • the amplification optical fiber 30 connected to the delivery fiber 50 is disposed in the groove portion 63a opposite to the groove portion 63a on the side where the delivery fiber 50 is disposed from the first housing portion 62a. Has been derived.
  • the second light emitting portion 50b of the delivery fiber 50 is disposed in the second housing portion 62b from the groove portion 63b on the first heat radiating member 60a side in the second heat radiating member 60b, and further from the second housing portion 62b. It arrange
  • the coating layer 54 is not peeled off in the second light emitting portion 50b, the coating layer 54 is covered with the resin 64 in the second storage portion 62b.
  • the second light emitting unit 50b is connected to the second heat radiating member 60b.
  • the resin 64 covering the coating layer 54 is more excellent in thermal conductivity than the coating layer 54, like the first light emitting portion 50a described above. In such a case, even when heat is generated in the coating layer 54, this heat can be appropriately conducted by the resin 64, and the delivery fiber 50 can be more appropriately protected from the heat. A portion of the delivery fiber 50 that follows the second light emitting portion is led out of the heat dissipation member 60.
  • the first light emitting portion 50a since the first light emitting portion 50a is linear as described above, the bending radius of the first light emitting portion 50a can be considered to be infinite. Therefore, the first light emitting unit 50a has a larger bending radius than the second light emitting unit 50b. In the present embodiment, the second light emitting portion 50b is bent at a substantially right angle, but this angle is not particularly limited.
  • nothing is connected to the end of the delivery fiber 50 opposite to the amplification optical fiber 30 side, and the output end is the light output.
  • an end cap made of a glass rod for expanding the diameter of the output light may be connected to the output end.
  • Such a laser device 1 operates as follows.
  • seed light is output from the seed light source 10 and excitation light is output from the excitation light source 20.
  • the seed light output from the seed light source 10 has a wavelength of, for example, 1070 nm as described above.
  • the seed light output from the seed light source 10 propagates through the core of the seed light fiber 15 and enters the combiner 40.
  • the excitation light output from each laser diode 21 of the excitation light source 20 has a wavelength of, for example, 915 nm as described above.
  • the pumping light output from each laser diode 21 propagates through the pumping light fiber 22 and enters the combiner 40.
  • the seed light input to the combiner 40 is input to the core 31 of the amplification optical fiber 30 and propagates through the core 31.
  • the excitation light input to the combiner 40 is input to the cladding 32 of the amplification optical fiber 30 and propagates mainly through the cladding 32.
  • the excitation light passes through the core 31, it is absorbed by the active element added to the core 31 and excites the active element.
  • the excited active element causes stimulated emission, the seed light is amplified by the stimulated emission, and is output from the output end 39 of the amplification optical fiber 30 as output light.
  • the output light output from the core 31 of the amplification optical fiber 30 is input to the core 51 from the input end 58 of the delivery fiber 50, propagates through the core 51, and is output from the output end of the delivery fiber 50.
  • the core 31 of the amplification optical fiber 30 and the core 51 of the delivery fiber 50 are input at the input end 58.
  • the output light leaks due to misalignment / angular misalignment with the optical fiber, or the mode field mismatch between the amplification optical fiber 30 and the delivery fiber 50 and enters the clad 52 as leakage light.
  • excessive pumping light that is not absorbed by the active element and is output from the output end 39 of the amplification optical fiber 30 may be input to the cladding 52 of the delivery fiber 50.
  • the excitation light is composed of light having a relatively large NA
  • the output light obtained by amplifying the seed light includes light having a small NA and light having a large NA. Therefore, when output light or excitation light is input to the clad 52 of the delivery fiber 50 as described above, this light includes light having a large NA and light having a small NA.
  • the light having a relatively large NA is likely to be output from the outer peripheral surface of the clad 52 because the incident angle with respect to the outer peripheral surface of the clad 52 is small. For this reason, at least a part of the light having a relatively large NA is emitted from the clad 52 in the first light emitting portion 50a of the delivery fiber 50 and is changed into heat. This heat is conducted through the resin 64 in the first heat radiating member 60a and released to the outside through the first base 61a. As described above, if the resin 64 that covers the coating layer 54 in the first light emitting portion 50a has better thermal conductivity than the coating layer 54, the coating layer 54 generates heat in the first light emitting portion 50a. Even in this case, the heat can be appropriately conducted by the resin 64, and the delivery fiber 50 can be more appropriately protected from the heat.
  • light having a relatively small NA has a large incident angle with respect to the outer peripheral surface of the clad 52, so that it is difficult to be emitted from the clad 52 in the linear first light emitting portion 50a and passes through the first light emitting portion 50a. .
  • Even in light having a relatively large NA a part of the light passes through the first light emitting unit 50a.
  • the light that has passed through the first light emitting portion 50a propagates to the second light emitting portion 50b.
  • the second light emitting portion 50b has a smaller bending radius than the first light emitting portion 50a, light having a relatively small NA is easily emitted from the clad 52.
  • the cladding 52 is covered with the coating layer 54, and a part of the light emitted from the cladding 52 is heated by the coating layer 54.
  • the amount of heat generated in the covering layer 54 in the second light emitting portion 50b is reduced by the covering layer 54. Not big enough to damage.
  • the coating layer 54 is connected to the second heat radiating member 60b in the second light emitting portion 50b, the coating layer 54 is not easily damaged by heat.
  • the coating layer 54 generates heat in the second light emitting portion 50b.
  • the heat can be appropriately conducted by the resin 64, and the delivery fiber 50 can be more appropriately protected from the heat. Then, the heat generated in the coating layer 54 is conducted through the resin 64 and released to the outside through the second base 61b.
  • the light delivery component 100 of the present embodiment when light having low NA and high NA is input to the cladding 52 of the delivery fiber 50, this light is emitted as the first light.
  • the light propagates in the order of the part 50a and the second light emitting part 50b.
  • Light having a large NA such as excitation light has a small incident angle with respect to the outer peripheral surface of the clad 52 of the delivery fiber 50 and is easily emitted from the clad 52.
  • light having a small NA included in the output light obtained by amplifying the seed light has a large incident angle with respect to the outer peripheral surface of the cladding 52 of the delivery fiber 50 and is not easily emitted from the cladding 52.
  • the first light emitting portion 50a has a larger bending radius than the second light emitting portion 50b.
  • Light having a relatively large NA such as part of the light, is emitted from the first light emitting unit 50a.
  • the second light emitting unit 50b has a smaller bending radius than the first light emitting unit 50a, it can emit light having a relatively large NA and light having a relatively small NA. Accordingly, the second light emitting unit 50b emits the remaining light that has passed through the first light emitting unit 50a.
  • the heat generated by the light emitted from the first light emitting portion 50a is radiated from the first heat radiating member 60a, and the heat generated by the light emitted from the second light emitting portion 50b is the second heat radiating member 60b. Radiated from the heat.
  • the heat generated by the light emitted from the first light emitting portion 50a is radiated from the first heat radiating member 60a, and the heat generated by the light emitted from the second light emitting portion 50b is the second heat radiating member 60b. Radiated from the heat.
  • the laser apparatus 1 using such an optical delivery component 100 can have high reliability.
  • the laser device 1 is a fiber laser device using the amplification optical fiber 30 as in the present embodiment
  • the surplus pumping light output from the amplification optical fiber 30 is input to the cladding 52 of the delivery fiber 50.
  • part of the output light obtained by amplifying the seed light is input to the clad 52.
  • most of the excess pumping light is emitted from the first light emitting unit 50a and is emitted to the clad 52.
  • Most of the input output light is output from the second light emitting unit 50b. Accordingly, since the excitation light and the signal light input to the clad 52 can be dispersed and converted into heat, a highly reliable fiber laser device can be obtained.
  • the first light emitting portion 50a is linear, light having a small NA can be appropriately propagated to the second light emitting portion 50b, and the first light In the emission part 50a and the 2nd light emission part 50b, the heat
  • the 2nd light emission part 50b is bent by the fixed bending radius, the 2nd thermal radiation member 60b connected with the 2nd light emission part 50b can be processed by fixed bending deformation.
  • the processing can be easily performed by a metal processing machine such as a milling machine, so that the second storage portion 62b can be easily formed, and heat can be radiated at low cost.
  • the member 60 can be manufactured.
  • another optical fiber may be provided between the amplification optical fiber 30 and the delivery fiber 50.
  • This optical fiber has a core and a clad, and is, for example, the same configuration as the seed light fiber 15 or a double clad fiber having a core, a clad, and an outer clad.
  • the double clad fiber may have the same configuration as the amplification optical fiber 30 except that no active element is added to the core.
  • the output end of the amplification optical fiber 30 is connected to the input end of the optical fiber, and the output end of the optical fiber is connected to the input end of the delivery fiber.
  • FIG. 6 is an enlarged view of the light delivery component 101 according to the second embodiment of the present invention.
  • the light delivery component 101 of the present embodiment is the same as the light delivery component 100 of the first embodiment in that the delivery fiber 50 is linearly arranged in the first light emitting portion 50a, but the second light emission.
  • the delivery fiber 50 is different from the light delivery part 100 of the first embodiment in that the bending fiber is gradually reduced from the first light emitting part side. Then, along the bending of the delivery fiber 50, the outer shapes of the first base 61a of the first heat radiating member 60a and the second base 61b of the second heat radiating member 60b are bent in the plane direction, and accordingly The outer shapes of the first storage portion 62a and the second storage portion 62b are bent in the plane direction.
  • the light delivery component 101 of the present embodiment light is gradually emitted in order from light having a relatively large NA to light having a relatively small NA in the second light emitting portion. Therefore, even when light having a relatively large NA that has not been emitted from the first light emitting unit propagates to the second light emitting unit, the second light emitting unit first emits light having a relatively large NA, Then, light having a relatively small NA can be emitted.
  • the portions that generate heat can be more dispersed than the light delivery component 100 of the first embodiment, and damage due to heat can be prevented more appropriately.
  • FIG. 7 is an enlarged view of the light delivery component 102 according to the third embodiment of the present invention.
  • the bending radius of the delivery fiber 50 is gradually reduced from the first light emitting portion 50a to the second light emitting portion 50b. Accordingly, in the light delivery component 100 of the first embodiment, the delivery fiber 50 is linearly arranged in the first light emitting portion 50a, whereas in the light delivery component 102 of the present embodiment, the first light is arranged. The delivery fiber 50 is bent at the emission part 50a.
  • the external shape of the 1st base 61a of the 1st heat radiating member 60a and the 2nd base 61b of the 2nd heat radiating member 60b is bent in the plane direction so that the bending of this delivery fiber 50 may be accompanied, and with this
  • the outer shapes of the first storage portion 62a and the second storage portion 62b are bent in the plane direction.
  • the bend radius of the delivery fiber 50 is gradually reduced from the first light emitting portion 50a to the second light emitting portion 50b, so that light having a relatively large NA can be reduced to NA.
  • the light can be emitted gradually in order up to relatively small light. Therefore, the portions that generate heat can be further dispersed as compared with the light delivery component 100 of the first embodiment, and damage due to heat can be prevented more appropriately.
  • FIG. 8 is a diagram showing the laser apparatus 2 according to the present embodiment.
  • the laser device 2 of the present embodiment includes excitation light sources 20 a and 20 b having the same configuration as the excitation light source 20 in the first embodiment, an amplification optical fiber 30, and both ends of the amplification optical fiber 30.
  • the combiner 40a, 40b having the same configuration as the combiner 40 in the first embodiment, the first resonance fiber 16 connected to the combiner 40a, and the first resonance fiber 16 are connected to the first embodiment.
  • the optical delivery component 100a having the same configuration as the optical delivery component 100 in FIG. 1, the second resonance fiber 18 connected to the combiner 40b, and the second delivery fiber 18 connected to the optical delivery component 100 in the first embodiment.
  • FBG Fiber Bragg
  • the combiner 40a is provided at the end of the amplification optical fiber 30 in the same manner as the combiner 40 of the first embodiment. Moreover, the combiner 40b is provided in the edge part on the opposite side to the edge part in which the combiner 40a of the optical fiber 30 for amplification is provided.
  • Each laser diode 21 of the pumping light source 20a is connected to the pumping light fiber 22 in the same manner as in the first embodiment.
  • These pumping light fibers 22 are clad of the amplifying optical fiber 30 in the combiner 40a. 32. Therefore, the pumping light output from the pumping light source 20a is input to the cladding 32 of the amplification optical fiber 30 via the combiner 40a.
  • the first resonance fiber 16 has a core and a clad, and is, for example, the same configuration as the seed light fiber 15 in the first embodiment, or a double clad fiber having a core, a clad, and an outer clad.
  • the double clad fiber has a configuration similar to that of the amplification optical fiber or a configuration in which no active element is added to the core.
  • the first resonance fiber 16 is connected to the amplification optical fiber 30 in the combiner 40a, and the core 31 of the amplification optical fiber 30 and the core of the first resonance fiber 16 are coupled.
  • a first FBG 71 is provided in the core of the first resonance fiber 16, and the first FBG 71 is coupled to the core 31 of the amplification optical fiber 30.
  • the first FBG 71 reflects light having the same wavelength as a part of the spontaneous emission light emitted when the active element added to the core 31 of the amplification optical fiber 30 is in an excited state, and the reflectance is For example, 100%.
  • the input end 58 of the delivery fiber 50 of the optical delivery component 100a is connected to the side of the first resonance fiber 16 opposite to the amplification optical fiber 30 side.
  • the termination member 17 is connected to the delivery fiber 50 of the optical delivery component 100a.
  • each laser diode 21 of the pumping light source 20b is connected to the pumping light fiber 22 in the same manner as in the first embodiment, and these pumping light fibers 22 are connected to the amplifier optical fiber 30 in the combiner 40b.
  • the clad 32 is connected. Therefore, the excitation light output from the excitation light source 20b is input to the clad 32 of the amplification optical fiber 30 via the combiner 40b.
  • the second resonance fiber 18 has a core and a clad, and is, for example, the same configuration as the seed light fiber 15 in the first embodiment, or a double clad fiber having a core, a clad, and an outer clad.
  • the double clad fiber has a configuration similar to that of the amplification optical fiber or a configuration in which no active element is added to the core.
  • the second resonance fiber 18 is connected to the amplification optical fiber 30 in the combiner 40b, and the core 31 of the amplification optical fiber 30 and the core of the second resonance fiber 18 are coupled.
  • a second FBG 72 is provided at the core of the second resonance fiber 18, and the second FBG 72 is coupled to the core 31 of the amplification optical fiber 30.
  • the second FBG 72 reflects light having the same wavelength as the light reflected by the first FBG 71 with a lower reflectance than the first FBG 71.
  • the reflectance of the second FBG is, for example, 30%.
  • the input end 58 of the delivery fiber 50 of the optical delivery component 100b is connected to the opposite side of the second resonance fiber 18 from the amplification optical fiber 30 side.
  • the laser apparatus 2 is a Fabry-Perot that uses both first and second FBGs 71 and 72 to resonate pumping light that is input from both the front and rear sides of the amplification optical fiber 30.
  • Type fiber laser device is a Fabry-Perot that uses both first and second FBGs 71 and 72 to resonate pumping light that is input from both the front and rear sides of the amplification optical fiber 30.
  • excitation light is output from the respective laser diodes 21 of the excitation light sources 20a and 20b.
  • the excitation light output from each laser diode 21 has a wavelength of, for example, 915 nm, as in the laser device 1 of the first embodiment.
  • the pumping light output from each laser diode 21 is input to the clad 32 from the front side and the rear side of the amplification optical fiber 30 via the respective pumping light fibers 22.
  • the excitation light input to the cladding of the amplification optical fiber 30 mainly propagates through the cladding 32. And when passing through the core 31, it is absorbed by the active element added to the core 31, and the active element is brought into an excited state.
  • spontaneous emission light is emitted from the active element excited by the excitation light, and light resonance occurs between the first FBG 71 and the second FBG 72 based on the spontaneous emission light.
  • the resonating light has the same wavelength as the reflection wavelength of the first FBG 71 and the second FBG 72, and this resonating light is amplified by stimulated emission of the active element excited in the amplification optical fiber 30 as light to be amplified.
  • a part of the amplified light passes through the second FBG 72, is output from the second resonance fiber as output light (signal light), and is input to the delivery fiber 50 of the optical delivery component 100b.
  • the excess pump light output from the amplification optical fiber 30 is output from the excitation light source 20 a and is not absorbed by the amplification optical fiber 30.
  • the output light is input to the clad 52 of the delivery fiber 50.
  • these lights are converted into heat.
  • the light propagating through the core 51 of the delivery fiber 50 in the light delivery component 100 b is output from the delivery fiber 50.
  • surplus pumping light output from the amplifying optical fiber 30 or a part of the resonating light that is output from the pumping light source 20b and not absorbed in the amplifying optical fiber 30 passes through the first FBG 71.
  • Such light is output from the first resonance fiber 16 and input to the delivery fiber 50 of the optical delivery component 100a.
  • the light may be input to the cladding 52 of the delivery fiber 50.
  • this light is converted into heat in the same manner as the light delivery component 100 of the first embodiment.
  • the light propagating through the core 51 of the delivery fiber 50 in the optical delivery component 100 a is converted into heat at the termination member 17.
  • both ends of the amplification optical fiber are output from this point of view.
  • the input ends of the first and second resonance fibers 16 and 18, which are optical fibers, can be considered to be connected to the output end of the amplification optical fiber 30.
  • the first and second resonance fibers 16 and 18 propagate and output the light output from the amplification optical fiber 30 and input it to the input end of the delivery fiber 50 of the optical delivery components 100a and 100b. It can be considered that the output ends of the first and second resonance fibers 16 and 18 are connected to the input end 58 of the delivery fiber 50.
  • the laser device 2 of the present embodiment even when light is output from the first and second resonance fibers 16 and 18 and is input to the cladding 52 of the delivery fiber 50 of the optical delivery components 100a and 100b, Light is output from the first light emitting unit 50a and the second light emitting unit 50b. Accordingly, since the light input to the clad 52 can be dispersed and converted into heat, a highly reliable laser device can be obtained.
  • a double-pumped fiber laser device such as the laser device 2 of the present embodiment, surplus pumping light tends to be output from both sides of the amplification optical fiber 30, so that the laser device 2 of the present embodiment is similar to the laser device 2 of the present embodiment.
  • the light delivery components 101 and 102 of the second embodiment and the third embodiment may be used instead of the light delivery components 100a and 100b.
  • the covering layer 54 is peeled off at a part of the first light emitting portion 50a, but the peeling of the covering layer 54 is not essential. It may be peeled over all of 50a and the 2nd light emission part 50b, and does not need to be peeled.
  • the coating layer 54 may be made of a light transmissive resin.
  • the coating layer 54 may be made of a urethane resin.
  • the cladding 52 is emitted. Therefore, the delivery fiber 50 can be appropriately protected.
  • the resin 64 may be a light transmissive resin.
  • the first light emitting unit 50a and the second light emitting unit 50b light emitted from the delivery fiber 50 is converted into heat while propagating through the resin 64, or propagated through the resin 64 and transmitted through the first base. It is converted into heat by 61a and the second base 61b.
  • the coating layer 54 is a light-transmitting resin as described above, the light transmitted through the coating layer 54 is converted into heat while propagating through the resin 64, or is propagated through the resin 64 and transmitted through the first base. It is converted into heat by 61a and the second base 61b.
  • An example of such a light transmissive resin 64 is an epoxy resin.
  • the laser device has been described by taking the fiber laser device as an example.
  • the present invention is not limited to this, and for example, an optical delivery used in a solid-state laser device that has an optical fiber and outputs light from the optical fiber.
  • the light delivery component of the above embodiment may be used.
  • the laser device 1 inputs pumping light from one side of the amplification optical fiber 30 and the laser device 2 inputs pumping light from both of the amplification optical fibers 30.
  • the excitation light may be input from either one of the amplification optical fibers 30 or may be input from both.
  • heat sink fins may be provided on the first base 61a and the second base 61b.
  • a heat pipe may be provided on the two bases 61b.
  • Example 1 An optical delivery component similar to that of the first embodiment was produced.
  • a delivery fiber as a single clad fiber was connected to the output end of an amplification optical fiber as a double clad fiber, and the coating layer was peeled off by about 20 mm from the end.
  • a first base made of a metal plate with a concave first storage part and a metal plate with a concave second storage part formed and bent in a planar shape. Two units were prepared. Then, the delivery fiber was linearly arranged on the first base about 50 mm from the end portion, and the outer peripheral surface of the delivery fiber was covered with this resin by filling the accommodating portion with a heat conductive resin.
  • the portion following the portion disposed on the first base of the delivery fiber is disposed on the second base over a length of 240 mm with a constant bending radius of 80 mm, and the housing portion is filled with a photothermal conductive resin.
  • the outer peripheral surface of the delivery fiber was covered with this resin.
  • Example 2 An optical delivery component similar to that of the second embodiment was produced. The same procedure as in Example 1 was performed except that the bending radius at the beginning of bending disposed on the second base of the delivery fiber was 160 mm and the radius at the end of bending was 80 mm.
  • Example 2 light having the same intensity as in Example 1 was input from the end of this delivery fiber under the same conditions as in Example 1. Then, the temperature of the linear portion arranged on the first base in the delivery fiber becomes 65 ° C., the temperature of the portion at the beginning of bending of the portion arranged on the second base becomes about 60 ° C., and the second base The temperature of the bending end portion of the portion arranged in (1) was about 60 ° C.
  • Example 1 An optical delivery component was produced in the same manner as in Example 1 except that the delivery fiber was arranged on the first base in the same manner as in Example 1 and the delivery fiber was not arranged in the second base.
  • Example 2 Then, about 50 W of light was input from the end of this delivery fiber under the same conditions as in Example 1. Then, the temperature of the linear portion arranged on the first base in the delivery fiber becomes 60 ° C., and at the place where the delivery fiber is bent at the place about several tens of centimeters away from the end of the delivery fiber, it is about 100 The coating layer of the delivery fiber was damaged.
  • the light input to the cladding of the delivery fiber is dispersed and output, and the place where heat is generated is dispersed. Therefore, it is considered that the optical delivery component of the present invention and the laser device using the same can prevent damage due to heat.
  • an optical delivery component capable of preventing damage due to heat and a laser apparatus using the same are provided.
  • Second heat release member 61a First base 61b ... Second base 62a ... First storage part 62b ... First 2 storage part 64 ... resin 71 ...
  • the first mirror (the 1FBG) 72 ... 2nd mirror (2nd FBG) 100, 100a, 100b, 101, 102 ... optical delivery parts

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TWI615644B (zh) * 2016-12-07 2018-02-21 國家中山科學研究院 高功率光纖包覆層能量去除器

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