WO2012120954A1 - Method for manufacturing liquid crystal panel - Google Patents

Method for manufacturing liquid crystal panel Download PDF

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Publication number
WO2012120954A1
WO2012120954A1 PCT/JP2012/052876 JP2012052876W WO2012120954A1 WO 2012120954 A1 WO2012120954 A1 WO 2012120954A1 JP 2012052876 W JP2012052876 W JP 2012052876W WO 2012120954 A1 WO2012120954 A1 WO 2012120954A1
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WO
WIPO (PCT)
Prior art keywords
liquid crystal
substrates
crystal panel
pair
scribe line
Prior art date
Application number
PCT/JP2012/052876
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French (fr)
Japanese (ja)
Inventor
藤原 学
Original Assignee
シャープ株式会社
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Publication date
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Publication of WO2012120954A1 publication Critical patent/WO2012120954A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • C03B33/076Laminated glass comprising interlayers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a method for dividing a pair of bonded substrates in a manufacturing process of a liquid crystal panel, and more particularly to a method for manufacturing a liquid crystal panel in which a liquid crystal panel is manufactured by dividing an end material from a pair of substrates. .
  • Liquid crystal display devices are used in a wide range of devices such as OA devices, AV devices, and portable terminal devices because of their thinness, light weight, and low power consumption.
  • the liquid crystal display device includes a liquid crystal panel in which liquid crystal is sandwiched between a pair of glass substrates, a backlight that illuminates the liquid crystal panel, and the like.
  • a liquid crystal panel is manufactured by using a glass substrate having a large size and bonding the substrates together using a sealing material or the like. Manufactured by cutting to a predetermined size.
  • the following method is known as one of the methods for cutting a pair of substrates.
  • the entire surface of the liquid crystal panel is fixed to the stage by vacuum suction.
  • one substrate of the liquid crystal panel (the upper glass substrate in this state) )
  • a scribe line a predetermined depth
  • the entire surface of the liquid crystal panel is vacuum-sucked on the stage with the surface on which the scribe line is formed, and then a vertical load is applied from the top of the liquid crystal panel using a break bar, and one side of the liquid crystal panel (the one of the above) Substrate).
  • the entire surface of the liquid crystal panel is vacuum-sucked on the stage, and a scribe line is formed in the same manner, and the surface on which the second scribe line is formed is down (that is, the first scribe line).
  • the entire surface of the liquid crystal panel is vacuum-sucked on the stage.
  • a vertical load is applied from above the liquid crystal panel using a break bar, and one side (the other substrate) of the liquid crystal panel is cut to divide the liquid crystal panel into two.
  • Patent Document 1 Another method is disclosed in Patent Document 1.
  • the pair of substrates in a method for manufacturing a liquid crystal panel including a step of cutting a pair of bonded substrates, the pair of substrates is placed on the stage so that end portions on a predetermined side of the pair of substrates protrude from the stage.
  • a first step of vacuum suction a second step of forming a scribe line at opposite positions of the upper surface and the lower surface of the protruding end, and a rod-shaped or roller-shaped break pin
  • a method including:
  • Patent Document 1 it is necessary to form a scribe line at a position where the upper and lower surfaces of the end portions of a pair of substrates face each other. It cannot be applied to a structure larger than this substrate.
  • FIG. 12 is a cross-sectional view showing a pair of bonded substrates.
  • the liquid crystal layer is sandwiched between the TFT substrate 200 and the counter substrate 201, and at least one end portion (the right end portion in the figure) of the TFT substrate is wider than the counter substrate. .
  • This expanded portion is used as a region for forming a connection terminal with an external device.
  • JP 2007-156310 A (published on June 21, 2007)
  • the present invention has been made in view of the above-described conventional problems, and the object thereof is the end material in the case where the pair of substrates are configured to have end materials having different widths from the edge. It is an object of the present invention to provide a method for manufacturing a liquid crystal panel that realizes efficient and good division.
  • the manufacturing method of the liquid crystal panel according to the present invention is to solve the above problems,
  • the one substrate is provided in the row direction and the edges of the pair of substrates in a region different from the liquid crystal panel region.
  • a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line.
  • the manufacturing yield can be improved.
  • the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
  • the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
  • the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
  • a liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates, A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction; In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel
  • a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line.
  • the manufacturing yield can be improved.
  • the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
  • the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
  • the method for manufacturing a liquid crystal panel according to the present invention provides an efficient and good separation of the end material when the pair of substrates has end materials having different widths.
  • a method for manufacturing a liquid crystal panel can be provided.
  • a liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates, A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction; In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one
  • FIG. 3 is a cross-sectional view taken along an arrow showing a state in which one liquid crystal panel and an end material adjacent thereto are cut along a cutting line AA ′ shown in FIG. 2.
  • FIG. 2 is a cross-sectional view taken along an arrow showing a state in which a pair of substrates is cut along a cutting line BB ′ shown in FIG.
  • the liquid crystal panel manufacturing method according to the present invention is to manufacture a liquid crystal panel by making a plurality of liquid crystal panels on a large glass substrate and then cutting the substrate into a predetermined size. Below, one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention is described.
  • the configuration of the liquid crystal panel is not particularly limited, and a conventionally known configuration can be adopted. Specifically, a pixel electrode and an alignment film are provided on a glass substrate (insulating substrate), and in addition, TFTs are provided in the vicinity of the intersections of a large number of scanning signal lines and a large number of data signal lines that intersect each other.
  • An active matrix substrate hereinafter referred to as a TFT substrate
  • a counter substrate having a common electrode and an alignment film on a glass substrate (insulating substrate).
  • a liquid crystal layer may be sandwiched between the substrate and the substrate.
  • a plurality of TFT substrates are formed on one of a pair of large substrates, and the same number of counter substrates as the TFT substrate is formed on the other. Then, these substrates are bonded to each other using a sealing material or the like so that the TFT substrate and the counter substrate face each other, and a liquid crystal layer is formed in a counter region between the TFT substrate and the counter substrate.
  • a pair of substrates in which is formed is formed.
  • FIG. 1 is a perspective view showing the configuration of the pair of substrates.
  • the pair of substrates shown in FIG. 1 is used in the liquid crystal panel manufacturing method of the present embodiment.
  • FIG. 1A is a view of the pair of substrates with the counter substrate side as an upper surface
  • FIG. 1B is a view of the pair of substrates with the TFT substrate side as an upper surface. is there.
  • a total of 15 liquid crystal panels 2 (5 vertical ⁇ 3 horizontal) are formed.
  • a portion that is not configured as a liquid crystal panel is provided between the liquid crystal panel 2 at the end of the liquid crystal panels 2 arranged side by side and the edge 1 'of the pair of substrates.
  • the portion that is not configured as the liquid crystal panel is referred to as an end material 3.
  • FIG. 2 is a perspective view showing one liquid crystal panel 2 and the end material 3 adjacent thereto in the pair of substrates 1 of FIG.
  • the TFT substrate 22 has a portion extending to the right side of the drawing with respect to the counter substrate 21. This expanded portion is referred to as an expansion region 22a in the present specification.
  • a scanning signal line or a data signal line terminal 23 can be formed in the extended region 22a of the TFT substrate 22, as shown in FIG. 3, a scanning signal line or a data signal line terminal 23 can be formed.
  • the extension region 22a can be used as a region for mounting a driver for driving the liquid crystal panel.
  • the counter substrate side end material 31 adjacent to the counter substrate 21 and the TFT substrate side end material adjacent to the extended region 22 a of the TFT substrate 22. 32 As shown in FIG. 2, in this embodiment, as the above-described end material 3, the counter substrate side end material 31 adjacent to the counter substrate 21 and the TFT substrate side end material adjacent to the extended region 22 a of the TFT substrate 22. 32.
  • the positions of the end side of the counter substrate side end member 31 and the end side of the TFT substrate side end member 32 are aligned along the substrate superposition direction. That is, the counter substrate side end material 31 and the TFT substrate side end material 32 are configured to have different widths, and the TFT substrate side end material 32 corresponds to the extended region 22a than the counter substrate side end material 31. Is also configured to be narrow.
  • the end sides of the TFT substrate 22 and the counter substrate 21 are aligned along the overlapping direction of the substrate, except for the end side having the extended region 22a. That is, one liquid crystal panel 2 and the end material 3 adjacent thereto constitute a rectangle (rectangle) having the same shape and the same area on the upper and lower substrates of the pair of substrates 1 as shown in FIG. .
  • FIG. 3 is a cross-sectional view taken along the line AA ′ shown in FIG. 2 showing a state where one liquid crystal panel 2 and the end material 3 adjacent thereto are cut.
  • a liquid crystal layer 40 sealed with a sealing material 41a is provided between the counter substrate 21 and the TFT substrate 22. Further, the terminal 23 is formed in the extended region 22a of the TFT substrate 22 as described above.
  • the pair of substrates is attached by a sealing material 41 a surrounding the liquid crystal layer 40 and a sealing material 41 b formed at a facing portion between the opposing substrate side end material 31 and the TFT substrate side end material 32. are combined.
  • the dimensions of the entire structure of the rectangle shown in FIG. 2 are (long side) 15 mm ⁇ (short side) 8 mm.
  • the width difference between the TFT substrate side end material 32 is 3 mm
  • the width of the counter substrate side end material 31 is 5 mm
  • the width of the TFT substrate side end material 32 is 2 mm
  • the thickness of each substrate is 0.2 mm
  • the substrate and the substrate The separation distance (height of the sealing material) can be 0.003 to 0.004 mm, but the present invention is not limited to these dimensions.
  • the rectangular structure shown in FIG. 2 has the liquid crystal panel 2 such that the end members 3 are arranged on the same side along the short side of the rectangle and along the long side of the rectangle.
  • a pair of substrates 1 shown in FIG. 1 is formed in such a manner that the end members 3 are alternately arranged.
  • the direction along the long side of the rectangle may be referred to as the X direction
  • the direction along the short side of the rectangle may be referred to as the Y direction. That is, in the pair of substrates 1 shown in FIG. 1, three liquid crystal panels 2 are arranged along the X direction with the end members 3 therebetween.
  • the Y direction of the pair of substrates 1 shown in FIG. 1 there are locations where the five liquid crystal panels 2 are arranged adjacent to each other and locations where the five end materials 3 are arranged adjacent to each other.
  • FIG. 4 is a cross-sectional view taken along the arrow line showing a state in which the pair of substrates 1 is cut along the cutting line BB ′ shown in FIG. Since the cutting line BB ′ is along the long side (X direction) of the rectangular structure shown in FIG. 2, the horizontal direction in FIG. 4 is the direction along the long side of the rectangular structure (X direction). It hits.
  • scribe lines are formed on the pair of substrates 1 (scribe line forming step). Note that the above-described configuration of the liquid crystal panel 2 is already formed on the pair of substrates 1 shown in FIG. 4 where the scribe lines are formed.
  • a scribe line formation is performed by mounting the whole surface of a pair of board
  • the stage 50 is made of a material having elasticity, and this elasticity prevents an excessive pressure (load) from being applied to the pair of substrates 1 in the scribe forming process and the loading process following the process. can do.
  • the stage 50 may be provided with a suction hole for adsorbing a pair of substrates during scribe formation to the surface of the stage 50.
  • the suction from the suction hole can be configured to be controlled by a separate device.
  • a process of forming a scribe line on each side of the pair of substrates 1 is performed. That is, after a scribe line is formed on one surface, a pair of substrates are reversed using a reversing device (not shown) so that the surface on which the scribe line is formed is opposed to the stage 50 before the other surface. A scribe line is formed.
  • the TFT substrate side starts from a state where the substrate surface faces upward. Therefore, in consideration of this, in the scribe formation process, the substrate on the counter substrate side is first applied. It is preferable to form a scribe line.
  • the scribe formation order is in the order described above. Not limited.
  • a scribe cutter made of a super hard material such as diamond or sapphire is used for scribe formation. It is desirable that the same number of scribe cutters as the number of scribe line formation scheduled portions are provided along the X direction. By providing the same number, a scribe line can be collectively formed at a desired location by simultaneously scanning these in the Y direction.
  • the formation position of the scribe line will be described with reference to FIG. 4.
  • the scribe line is formed at the boundary between the liquid crystal panel 2 and the end material 3 on both the substrate on the counter substrate side and the substrate on the TFT substrate side. Then, when the counter substrate side and the TFT substrate side are paired and the formation position of the scribe line is viewed along the X direction, the scribe lines coincide on the counter substrate side and the TFT substrate side as shown in FIG. It can be seen that the locations where the images are shifted and the locations where they are shifted are located alternately.
  • the counter substrate-side end member 31 and the TFT substrate-side end member 32 are configured to have different widths, and the TFT substrate-side end member 32 is opposed to the extended region 22a.
  • the width of the substrate side end material 31 is narrower than that of the substrate side end material 31, and the end sides of the liquid crystal panel 2 other than the end side having the extended region 22 a are overlapped with the end sides of the TFT substrate 22 and the counter substrate 21. This is because the positions are aligned along the direction. That is, as shown in FIG. 4, the scribe at the boundary between the extended region 22a and the TFT substrate side end member 32 of the TFT substrate side substrate is paired with the scribe end member 31 of the opposite substrate side of the counter substrate side substrate. Between the scribe lines formed on both sides of the X direction.
  • the depth of scribing with a scribe cutter is preferably 20% to 50% of the substrate thickness. The reason is that if the cut is less than 20%, the propagation of cracks may not progress vertically in the subsequent loading process, and if the cut exceeds 50%, the substrate surface may be crushed at the time of cutting. is there.
  • FIG. 5 shows a scribe (line) 24 formed by the scribe formation process. As shown in FIG. 5, the scribe (line) 24 is completed in a state where it is not formed in a part of the thickness of the substrate, specifically, in the part circled in FIG. 5 (the side close to the liquid crystal layer). .
  • a point load in the load direction along the overlapping direction of the substrates is applied to the center of the surface of the end material 3 of one substrate of the pair of substrates 1 after the scribe line forming step, and The point load is applied while moving in parallel with the scribe line extending in the Y direction.
  • substrate can be cut
  • the pair of substrates 1 on which the scribe formation by the scribe formation process has been completed is placed on the stage such that the substrate on the opposite substrate side is the upper surface and the substrate on the TFT substrate side is opposed to the stage.
  • This stage may be the same as or different from the stage 50 provided in the scribe forming apparatus.
  • the pushing roller 60 which is a load means is set at an intermediate position with respect to the scribe line.
  • FIG. 6A is a side view of the pushing roller 60 as viewed from the rotating shaft portion side
  • FIG. 6B shows the contact area of the O-ring when the pushing roller 60 is pushed (when loaded). It is a figure.
  • the pushing roller 60 includes a rotating shaft portion 61 and an O-ring 62, and the O-ring 62 surrounds the rotating shaft portion 61. .
  • the rotation shaft portion 61 is configured with a curvature (R) of 20 to 30 mm, and is configured to rotate (turn) around the central axis 63 of the rotation shaft portion 61 as a rotation axis under the control of a rotation drive mechanism (not shown). It has become.
  • the O-ring 62 is a so-called rubber ring, and a fluorine type or a nitrile rubber type can be used.
  • the O-ring 62 having a diameter of 1.5 to 3 mm can be used.
  • a plurality of such pushing rollers 60 are provided on the common central shaft 63. Specifically, in this embodiment, as shown in FIG. 1, a load process is performed on a pair of substrates 1 having three end members 3 in the X direction. It is preferable that the pushing rollers 60 are arranged on one central shaft 63 at equal intervals, that is, at intervals corresponding to the intervals between the end members 3.
  • the O-ring when the push roller 60 is pushed in (when loaded) is 1.0-2. 2 along the moving direction with respect to the substrate (counter substrate side end material 31).
  • a contact area of 0.5 to 1.5 mm in the width direction (q in FIG. 6B) is realized with a contact length of 5 mm (p in FIG. 6B). It is preferable. This contact area is relatively small, and so-called point contact is realized.
  • the pushing roller 60 having the above configuration is moved in parallel with the scribe line extending in the Y direction, a load is applied so as to push the counter substrate side end member 31 toward the TFT substrate side end member 32.
  • FIG. 8 the left-right direction on the paper surface corresponds to the Y direction, and the counter substrate side end member 31 and the TFT substrate side end member 32 are arranged along the Y direction.
  • the pushing roller 60 moves in the Y direction, the counter substrate side end member 31 and the TFT substrate side end member 32 are distorted to the stage side at the load point.
  • the method of moving the push roller 60 in parallel with the scribe line extending in the Y direction is only required to move the push roller 60 and the pair of substrates 1 relatively as described above.
  • the pair of substrates 1 may move together with the stage, or both may move.
  • the end material can be divided from the pair of substrates according to the following principle.
  • the compressive stress generated in the lower part of the cut upper substrate is released, and a tensile stress appears on the lower substrate. Therefore, the cut amount of the scribe line of the lower glass substrate is increased, and the lower substrate is divided into the TFT substrate 22 and the TFT substrate side end member 32.
  • the vertical load by the pushing roller 60 is directly above the scribe line 24 of the lower substrate. This is because the pressure is effectively transmitted to the lower substrate after the division of the upper substrate by the pushing roller is effectively finished.
  • FIG. 10 shows another example of the load device of the loading process
  • (a) in FIG. 10 is a top view of the substrate (the counter substrate 21 and the counter substrate side end member 31) viewed from the load means side.
  • (B) in FIG. 10 is a cross-sectional view taken along the arrow showing a state in which the substrate is cut along a cutting line CC ′ shown in (a) in FIG.
  • the loading process is performed using a stage including a suction plate 70 on which a suction pipe 73 is formed and an elastic sheet 71 placed thereon instead of the stage 50.
  • the suction plate 70 can be made of an aluminum material or the like.
  • a pump device (not shown) is connected to the suction pipe 73 so that the substrate disposed via the elastic sheet 71 can be adsorbed to the surface of the elastic sheet 71. Therefore, the elastic sheet 71 is provided with a hole communicating with the suction pipe 73.
  • the elastic sheet 71 is preferably made of a rubber material or the like so that the substrate is distorted in the loading process.
  • the suction pipe 73 may be provided not only in the region of the end material 3 but also in the region of the liquid crystal panel 2.
  • a protective sheet 72 is provided between the substrate (the counter substrate side end member 31 and the TFT substrate side end member 32) and the elastic sheet 71 and between the substrate and the pressing roller 60. Intervene. Thereby, the elastic sheet 71 and the pushing roller 60 can be prevented from coming into direct contact with the substrate, and the substrate can be prevented from being damaged.
  • the protective sheet 72 is made of a breathable material so as not to block the suction holes provided in the suction plate 70 and the elastic sheet 71.
  • the loading process is performed with the substrate adsorbed.
  • the pair of substrates are firmly fixed on the stage, so that the pair of substrates is not large as shown in FIG. 1.
  • FIG. 10 This is also effective for a pair of relatively small substrates formed in a single row.
  • the substrate since the end material 3 is located on the end sides of the pair of substrates, if a stage having no suction function is used, the substrate may move during loading, and a load may not be applied to a predetermined position. .
  • a load can be applied to a predetermined position.
  • FIG. 11 is a diagram showing a liquid crystal panel separation step.
  • A) in FIG. 11 is a pair of substrates after the loading process is performed.
  • (a) shows that the pair of substrates themselves hold the shape, but in reality, the pair of substrates placed on the stage in the loading process. is there.
  • From the pair of substrates in FIG. 11A a row in which the liquid crystal panels 2 are adjacent to each other and a row of end materials 3 adjacent to the same are taken out ((b) in FIG. 11). There is no restriction on the extraction method.
  • the end material removing stage 80 shown in FIG. 11B is provided with an end material adsorbing portion 81 along the arrangement direction of the end materials 3.
  • the liquid crystal panel and the end material for one row taken out are placed with the counter substrate 21 and the counter substrate side end material 31 facing the end material removing stage 80.
  • the counter substrate side end material 31 is arranged so as to cover the end material adsorbing portion 81.
  • the liquid crystal panel 2 is used by using the panel moving arm 90 having the panel adsorbing pad 91 shown in FIG. Adsorb and move.
  • the panel suction pad 91 a conventionally known suction pad can be used.
  • panel suction by vacuum suction can be realized.
  • the panel suction pad 91 comes into contact with the TFT substrate 22 and is attracted to the surface thereof.
  • the TFT substrate 22 and the counter substrate 21 are bonded together by a sealing material 41a as shown in FIG. 3, and the counter substrate side end material 31 and the TFT substrate side end material 32 are sealed as shown in FIG. 41b, by lifting the TFT substrate 22 by the panel suction pad 91, the end material 3 remains on the end material removing stage 80 as shown in FIG. Moves together with the panel suction pad 91.
  • liquid crystal panel 2 and the end material 3 are separated. Since one panel suction pad 91 is provided for one liquid crystal panel, the liquid crystal panels 2 are separated from each other by operating each panel suction pad 91.
  • the end material can be separated from the substrate by a simple method in which the point load is applied while being moved in parallel with the scribe line, so that the production yield of the liquid crystal panel can be improved.
  • the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
  • the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
  • the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
  • a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line.
  • the manufacturing yield can be improved.
  • the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
  • the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
  • the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
  • a liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates, A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction; In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one
  • a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line.
  • the manufacturing yield can be improved.
  • the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
  • the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
  • the method for manufacturing a liquid crystal panel according to the present invention provides an efficient and good separation of the end material when the pair of substrates has end materials having different widths.
  • a method for manufacturing a liquid crystal panel can be provided.
  • one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
  • the loading step it is preferable to apply the point load while moving the point load in parallel with the scribe line using a roller.
  • one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
  • the one substrate to which the point load is applied is farther from the scribe line than the other substrate.
  • one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
  • the position where the point load is applied is aligned with the formation position of the scribe line on the other substrate in the overlapping direction.
  • the force is optimally applied when the other substrate is divided, that is, no force is applied in the rotation direction, so that the other substrate is divided well, and as a result, the influence on the one substrate is also affected. Therefore, the division of the one substrate can be realized well.
  • one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
  • the loading step the pair of substrates after the scribe line forming step is divided in the state of being adsorbed to the adsorbable cushion material
  • the above manufacturing method further includes: After the loading step, after separating the pair of substrates from the cushion material, inverting and placing the substrate on another cushion material configured to be able to adsorb only the region different from the liquid crystal panel region, It is preferable to include a liquid crystal panel separation step of separating the liquid crystal panel region from the different region in a state where only the region different from the liquid crystal panel region is adsorbed by the another cushion material.
  • the liquid crystal panel separation step is performed after the pair of substrates are inverted after the loading step. Therefore, in the loading step, the width of a region (end material) different from the liquid crystal panel region.
  • the liquid crystal panel separating step the liquid crystal panel is detached from the end material in a state where the wide end material is adsorbed with the wide side of the end material facing another cushion material. Can be separated.
  • the plurality of liquid crystal panels are collectively processed into an end material group in the liquid crystal panel separation step. Can be separated from Therefore, the yield can be improved.
  • one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
  • the loading step it is preferable to apply the point load in a state where a protective material is interposed between the cushion material and the pair of substrates, and a protective material is also interposed on the one substrate.
  • the said protective material by interposing the said protective material, it can avoid that a pair of board
  • the present invention can be applied to the production of a liquid crystal panel of a liquid crystal display device.
  • a pair of substrates Liquid crystal panel 3 Edge material (area different from liquid crystal panel area) 21 Counter substrate 22 TFT substrate 22a Expansion area 23 Terminal 24 Scribe (line) 31 Opposite substrate side material (region different from liquid crystal panel region) 32 TFT substrate side edge material (area different from liquid crystal panel area) 40 Liquid crystal layers 41a and 41b Sealing material 50 Stage (cushioning material) 60 Pushing roller 61 Rotating shaft portion 62 O-ring 63 Center shaft 70 Suction plate 71 Elastic sheet (cushion material) 72 Protection sheet (protective material) 73 Adsorbing pipe 80 End material removal stage 81 End material adsorbing part 90 Panel moving arm 91 Panel adsorbing pad

Abstract

This invention includes: a scribe line forming step, wherein a scribe line to be provided on one substrate of a pair of substrates, and a scribe line to be provided on the other substrate are formed at positions shifted from each other in the superimposition direction of the pair of substrates; and a loading step, wherein, in a state wherein the pair of substrates are placed on a cushion material after the scribe line forming step, at an intermediate position between an edge side of the one substrate and the scribe line provided on the one substrate, a point load is applied, while moving the point load parallel to the scribe line, and the pair of substrates are cut at respective scribe lines of the substrates.

Description

液晶パネルの製造方法Manufacturing method of liquid crystal panel
 本発明は、液晶パネルの製造過程において、貼り合わせた一対の基板を分断する方法に関し、特に、一対の基板から端材を分断して液晶パネルを製造する、液晶パネルの製造方法に関するものである。 The present invention relates to a method for dividing a pair of bonded substrates in a manufacturing process of a liquid crystal panel, and more particularly to a method for manufacturing a liquid crystal panel in which a liquid crystal panel is manufactured by dividing an end material from a pair of substrates. .
 液晶表示装置は、薄型、軽量、低消費電力という特徴からOA機器、AV機器、携帯端末機器等の広い分野の装置に用いられている。液晶表示装置は、一対のガラス基板の間に液晶が挟持された液晶パネル、および、液晶パネルを照明するバックライトなどで構成される。 Liquid crystal display devices are used in a wide range of devices such as OA devices, AV devices, and portable terminal devices because of their thinness, light weight, and low power consumption. The liquid crystal display device includes a liquid crystal panel in which liquid crystal is sandwiched between a pair of glass substrates, a backlight that illuminates the liquid crystal panel, and the like.
 液晶パネルは、概して、製造コストを削減するために、サイズの大きいガラス基板を用いて各々の基板を作製し、シール材などを用いて両基板を貼り合わせた後、貼り合わせた一対の基板を所定のサイズに切断することによって製造される。 In general, in order to reduce manufacturing costs, a liquid crystal panel is manufactured by using a glass substrate having a large size and bonding the substrates together using a sealing material or the like. Manufactured by cutting to a predetermined size.
 一対の基板を切断する手法の一つとしては、次の手法が知られている。まず、真空吸着により液晶パネルの全面をステージに固定する。次に、ステージに固定された液晶パネルの上部よりスクライブを行うためのカッターを降ろし、カッターに所定の圧力を加えながら移動させることによって、液晶パネルの一方の基板(この状態での上側のガラス基板)に所定の深さの切り欠き傷(スクライブラインと呼ぶ)を形成する。次に、スクライブラインを形成した面を下にして、液晶パネルの全面をステージに真空吸着させた後、ブレイクバーを用いて液晶パネルの上部より垂直荷重をかけ、液晶パネルの片側(上記一方の基板)を切断する。次に、切断されてない面を上にして、液晶パネルの全面をステージに真空吸着させ、同様にスクライブラインを形成し、二回目のスクライブラインを形成した面を下(すなわち、一回目のスクライブラインを形成した面を上)にして、液晶パネルの全面をステージに真空吸着させる。そして、ブレイクバーを用いて液晶パネルの上部より垂直荷重をかけ、液晶パネルの片側(他方の基板)を切断することによって、液晶パネルが2つに分断される。 The following method is known as one of the methods for cutting a pair of substrates. First, the entire surface of the liquid crystal panel is fixed to the stage by vacuum suction. Next, by lowering the cutter for scribing from the upper part of the liquid crystal panel fixed to the stage and moving the cutter while applying a predetermined pressure, one substrate of the liquid crystal panel (the upper glass substrate in this state) ) To form a notch with a predetermined depth (referred to as a scribe line). Next, the entire surface of the liquid crystal panel is vacuum-sucked on the stage with the surface on which the scribe line is formed, and then a vertical load is applied from the top of the liquid crystal panel using a break bar, and one side of the liquid crystal panel (the one of the above) Substrate). Next, with the uncut surface facing up, the entire surface of the liquid crystal panel is vacuum-sucked on the stage, and a scribe line is formed in the same manner, and the surface on which the second scribe line is formed is down (that is, the first scribe line). With the surface on which the line is formed facing up), the entire surface of the liquid crystal panel is vacuum-sucked on the stage. Then, a vertical load is applied from above the liquid crystal panel using a break bar, and one side (the other substrate) of the liquid crystal panel is cut to divide the liquid crystal panel into two.
 このように、片側切断でスクライブを行い、ブレイクバーによる衝撃を加えて切断(ブレイク)する場合は、スクライブラインの真上より垂直荷重を印加することで、スクライブラインと垂直荷重の印加とが同じ位置で行われるため、切断が垂直方向に安定に行われる。 In this way, when scribing with one side cut and cutting with an impact by a break bar (break), applying a vertical load directly above the scribe line is the same as applying a vertical load to the scribe line. Since the cutting is performed at the position, the cutting is stably performed in the vertical direction.
 また、別の手法として特許文献1に開示されている手法がある。特許文献1の手法は、貼り合わせた一対の基板を切断する工程を含む液晶パネルの製造方法において、一対の基板の所定の辺側の端部がステージからはみ出すように、一対の基板をステージに真空吸着させる第1のステップと、はみ出した端部の上面および下面の対向する位置にスクライブラインを形成する第2のステップと、棒状またはローラー状のブレイクピンを用いて、スクライブラインよりも所定の辺側であってスクライブラインの始点寄りの所定の位置において、基板の法線方向、または、所定の辺に向かう方向かつスクライブラインの進行方向に傾斜させた方向から荷重を印加する第3のステップと、を含む方法である。 Another method is disclosed in Patent Document 1. In the method of Patent Document 1, in a method for manufacturing a liquid crystal panel including a step of cutting a pair of bonded substrates, the pair of substrates is placed on the stage so that end portions on a predetermined side of the pair of substrates protrude from the stage. A first step of vacuum suction, a second step of forming a scribe line at opposite positions of the upper surface and the lower surface of the protruding end, and a rod-shaped or roller-shaped break pin, A third step of applying a load from the direction normal to the substrate or inclined toward the direction of the predetermined side and the traveling direction of the scribe line at a predetermined position on the side near the starting point of the scribe line; And a method including:
 このように、貼り合わせた一対の基板の端部の上面および下面の対向する位置にスクライブラインを形成して、両基板の端部を一括して分断する上述の技術は、液晶パネルの歩留まりの向上を図ることができる。 In this way, the above-described technique for forming the scribe lines at the opposing positions of the upper and lower surfaces of the end portions of the pair of substrates bonded together to divide the end portions of both substrates together is the yield of the liquid crystal panel. Improvements can be made.
 ところが、特許文献1に開示されている技術は、一対の基板の端部の上面および下面の対向する位置にスクライブラインを形成する必要があるため、液晶パネルの一方の基板の一部が、他方の基板よりも大きい構造に対しては適用することができない。 However, in the technique disclosed in Patent Document 1, it is necessary to form a scribe line at a position where the upper and lower surfaces of the end portions of a pair of substrates face each other. It cannot be applied to a structure larger than this substrate.
 この構造を、図12に示す。図12は、貼り合わせた一対の基板を示した断面図である。図12に示す構造では、TFT基板200と、対向基板201とによって、液晶層を挟持しており、TFT基板の少なくとも一方の端部(図中の右側端部)が対向基板よりも拡がっている。この拡がった部分は、外部機器との接続端子などを形成する領域として用いられる。 This structure is shown in FIG. FIG. 12 is a cross-sectional view showing a pair of bonded substrates. In the structure shown in FIG. 12, the liquid crystal layer is sandwiched between the TFT substrate 200 and the counter substrate 201, and at least one end portion (the right end portion in the figure) of the TFT substrate is wider than the counter substrate. . This expanded portion is used as a region for forming a connection terminal with an external device.
 図12に示す構造の場合、基板の重畳方向においてスクライブラインの位置が一致していないため、上述した技術を適用することが困難である。 In the case of the structure shown in FIG. 12, it is difficult to apply the above-described technique because the positions of the scribe lines do not match in the overlapping direction of the substrates.
 そこで、図12に示す構造の場合、液晶パネル100から端材101を手作業にて分断して除去する処理が採用されている。その主な理由は、対向基板側にスクライブラインを形成する際にスクライブラインだけで基板を完全に分断することができず、また、TFT基板に過剰な曲げ応力がかからない程度の力を加えて、図13中の矢印で示す方向にスライドさせる必要があるためである。具体的な処理手順としては、一方の基板の所定位置にスクライブラインを形成した後、当該スクライブラインよりも縁側を指で押さえて、図13中の矢印で示す方向に指で力を加えることによって、端材をスライドさせて除去する。 Therefore, in the case of the structure shown in FIG. 12, a process is employed in which the end material 101 is manually separated from the liquid crystal panel 100 and removed. The main reason is that when the scribe line is formed on the counter substrate side, the substrate cannot be completely divided only by the scribe line, and a force that does not apply excessive bending stress to the TFT substrate is applied. This is because it is necessary to slide in the direction indicated by the arrow in FIG. As a specific processing procedure, after a scribe line is formed at a predetermined position on one substrate, the edge side of the scribe line is pressed with a finger and a force is applied with the finger in the direction indicated by the arrow in FIG. Slide off the scraps.
日本国公開特許公報「特開2007-156310号公報(2007年6月21日公開)」Japanese Patent Publication “JP 2007-156310 A (published on June 21, 2007)”
 しかしながら、図13の手法では手作業であることから歩留まりを避けることができず、且つ、端材除去時に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまうことから、当該表面もしくは表面に形成された端子等に傷が付いてしまう事態を招く。加えて、指で掴む部位は一部のみであることから、掴めていない部位のスクライブが基板の厚さ方向に進行せずパネルと端材とが完全分離できない部位が残る虞がある。 However, since the method of FIG. 13 is a manual operation, the yield cannot be avoided, and when removing the end material, the end material is rubbed against the surface of the expanded portion of the TFT substrate. This causes a situation where the surface or the terminal formed on the surface is damaged. In addition, since there is only a part that can be grasped by a finger, there is a possibility that a part where the scribing of the part not grasped does not proceed in the thickness direction of the substrate and the panel and the end material cannot be completely separated remains.
 すなわち、互いに異なる幅を有した端材を有して構成されている一対の基板の、当該端材の効率的で良好な分断除去が可能な、液晶パネルの製造方法が今なお渇望されている。 That is, there is still a need for a method of manufacturing a liquid crystal panel capable of efficiently and satisfactorily removing and removing a pair of substrates configured with end members having different widths. .
 本発明は、上記従来の問題点に鑑みなされたものであって、その目的は、一対の基板が縁辺から互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することにある。 The present invention has been made in view of the above-described conventional problems, and the object thereof is the end material in the case where the pair of substrates are configured to have end materials having different widths from the edge. It is an object of the present invention to provide a method for manufacturing a liquid crystal panel that realizes efficient and good division.
 すなわち、本発明に係る液晶パネルの製造方法は、上記の課題を解決するために、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対してスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板における基板の重畳方向においてずれた位置に形成するスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、一対の基板の端辺と、行方向に設けたスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
That is, the manufacturing method of the liquid crystal panel according to the present invention is to solve the above problems,
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step for providing a scribe line for each of the pair of substrates, the scribe line extending in a row direction provided on one of the pair of substrates, and a row direction provided on the other substrate A scribe line forming step of forming a scribe line extending in a position shifted in a direction in which the substrates overlap in a pair of substrates,
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, the one substrate is provided in the row direction and the edges of the pair of substrates in a region different from the liquid crystal panel region. A load step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between the scribe lines;
It is characterized by including.
 上記の構成によれば、点荷重を当該スクライブラインと平行に移動させながらかけるという簡便な手法によって、基板から、液晶パネル領域とは異なる領域(端材)を分断することができることから、液晶パネルの製造の歩留まりを改善することができる。 According to the above configuration, a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line. The manufacturing yield can be improved.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、端材をスライドさせて除去する必要がない。これにより、除去しようとする端材がもう一方の基板の表面にこすり付けてしまう事態は回避することができる。よって、上述のように、一方の基板において対向基板に隣接した端材を除去する際に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまって端子等に傷が付いてしまう事態を回避することできる。すなわち、上記拡がった部分を傷つけることなく露呈させることができる。 Moreover, since the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、パネルと端材とを完全分離することができる。 Moreover, since the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
 以上のことから、本発明に係る液晶パネルの製造方法は、一対の基板が縁辺から互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 From the above, the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
 また本発明に係る液晶パネルの別の製造方法は、上記の課題を解決するために、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対して行方向および列方向にスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板の重畳方向において揃った位置に形成する箇所と、当該重畳方向においてずれた位置に形成する箇所とに設けるスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、隣り合う行方向に設けたスクライブラインとスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
Further, another manufacturing method of the liquid crystal panel according to the present invention is to solve the above-described problems.
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction;
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one substrate A loading step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between
It is characterized by including.
 上記の構成によれば、点荷重を当該スクライブラインと平行に移動させながらかけるという簡便な手法によって、基板から、液晶パネル領域とは異なる領域(端材)を分断することができることから、液晶パネルの製造の歩留まりを改善することができる。 According to the above configuration, a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line. The manufacturing yield can be improved.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、端材をスライドさせて除去する必要がない。これにより、除去しようとする端材がもう一方の基板の表面にこすり付けてしまう事態は回避することができる。よって、上述のように、一方の基板において対向基板に隣接した端材を除去する際に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまって端子等に傷が付いてしまう事態を回避することできる。すなわち、上記拡がった部分を傷つけることなく露呈させることができる。 Moreover, since the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、パネルと端材とを完全分離することができる。 Moreover, since the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
 以上のことから、本発明に係る液晶パネルの製造方法は、一対の基板が互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 From the above, the method for manufacturing a liquid crystal panel according to the present invention provides an efficient and good separation of the end material when the pair of substrates has end materials having different widths. A method for manufacturing a liquid crystal panel can be provided.
 本発明に係る液晶パネルの製造方法は、以上のように、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対してスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板における基板の重畳方向においてずれた位置に形成するスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、一対の基板の端辺と、行方向に設けたスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
The manufacturing method of the liquid crystal panel according to the present invention is as described above.
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step for providing a scribe line for each of the pair of substrates, the scribe line extending in a row direction provided on one of the pair of substrates, and a row direction provided on the other substrate A scribe line forming step of forming a scribe line extending in a position shifted in a direction in which the substrates overlap in a pair of substrates,
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, the one substrate is provided in the row direction and the edges of the pair of substrates in a region different from the liquid crystal panel region. A load step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between the scribe lines;
It is characterized by including.
 また、本発明に係る液晶パネルの別の製造方法は、以上のように、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対して行方向および列方向にスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板の重畳方向において揃った位置に形成する箇所と、当該重畳方向においてずれた位置に形成する箇所とに設けるスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、隣り合う行方向に設けたスクライブラインとスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
Moreover, another manufacturing method of the liquid crystal panel according to the present invention is as described above.
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction;
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one substrate A loading step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between
It is characterized by including.
 これにより、一対の基板が互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 Accordingly, it is possible to provide a method for manufacturing a liquid crystal panel that realizes efficient and good division of the end material in the case where the pair of substrates has end materials having different widths. .
本発明に係る液晶パネル製造方法の一実施形態において用いられる一対の基板の構成を示す斜視図である。It is a perspective view which shows the structure of a pair of board | substrate used in one Embodiment of the liquid crystal panel manufacturing method concerning this invention. 図1の一対の基板における、1つの液晶パネルおよびそれに隣接した端材を示した斜視図である。It is the perspective view which showed one liquid crystal panel and the end material adjacent to it in a pair of board | substrate of FIG. 図2に示す切断線A-A´において1つの液晶パネルとそれに隣接する端材とを切断した状態を示す矢視断面図である。FIG. 3 is a cross-sectional view taken along an arrow showing a state in which one liquid crystal panel and an end material adjacent thereto are cut along a cutting line AA ′ shown in FIG. 2. 図1の(a)に示す切断線B-B´において一対の基板を切断した状態を示す矢視断面図である。FIG. 2 is a cross-sectional view taken along an arrow showing a state in which a pair of substrates is cut along a cutting line BB ′ shown in FIG. 本発明に係る液晶パネル製造方法の一実施形態のスクライブ形成工程によって形成されたスクライブ(ライン)を示す図である。It is a figure which shows the scribe (line) formed by the scribe formation process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の荷重工程で用いる押し込みローラーの構成を示す図である。It is a figure which shows the structure of the pushing roller used at the load process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の荷重工程で用いる押し込みローラーの構成を示す図である。It is a figure which shows the structure of the pushing roller used at the load process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の荷重工程を示す図である。It is a figure which shows the load process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の荷重工程を示す図である。It is a figure which shows the load process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の荷重工程の別例を示す図である。It is a figure which shows another example of the load process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 本発明に係る液晶パネル製造方法の一実施形態の液晶パネル分離工程を説明する図である。It is a figure explaining the liquid crystal panel isolation | separation process of one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention. 従来構成を示す図である。It is a figure which shows a conventional structure. 従来構成を示す図である。It is a figure which shows a conventional structure.
 本発明に係る液晶パネル製造方法は、複数個の液晶パネルをサイズの大きいガラス基板に作り込んだ後、当該基板を所定のサイズに切断することによって液晶パネルを製造するというものである。以下に、本発明に係る液晶パネル製造方法の一実施形態について説明する。 The liquid crystal panel manufacturing method according to the present invention is to manufacture a liquid crystal panel by making a plurality of liquid crystal panels on a large glass substrate and then cutting the substrate into a predetermined size. Below, one Embodiment of the liquid crystal panel manufacturing method which concerns on this invention is described.
 液晶パネルの構成は、特に制限されるものではなく従来周知の構成のものを採用することができる。具体的には、ガラス基板(絶縁基板)上に画素電極および配向膜を有しており、加えて、互いに交差する多数の走査信号線と多数のデータ信号線との各交差位置近傍にTFTが配されているアクティブマトリクス基板(以下、TFT基板と記載)と、ガラス基板(絶縁基板)上に共通電極および配向膜を有した構成である対向基板とを有しており、このTFT基板と対向基板との間に液晶層を挟持した構成とすることができる。 The configuration of the liquid crystal panel is not particularly limited, and a conventionally known configuration can be adopted. Specifically, a pixel electrode and an alignment film are provided on a glass substrate (insulating substrate), and in addition, TFTs are provided in the vicinity of the intersections of a large number of scanning signal lines and a large number of data signal lines that intersect each other. An active matrix substrate (hereinafter referred to as a TFT substrate) and a counter substrate having a common electrode and an alignment film on a glass substrate (insulating substrate). A liquid crystal layer may be sandwiched between the substrate and the substrate.
 <一対の基板の構成>
 本発明では、サイズの大きい一対の基板の一方に、複数のTFT基板が作り込まれ、他方に、TFT基板と同数の対向基板が作り込まれている。そして、これらの基板同士を、TFT基板と対向基板とが対向するようにシール材などを用いて貼り合わし、TFT基板と対向基板との対向領域に液晶層を形成することによって、複数の液晶パネルが作り込まれた一対の基板を形成する。なお、ここまでの製造方法および手順等については、上述のものに限定されるものではない。
<Configuration of a pair of substrates>
In the present invention, a plurality of TFT substrates are formed on one of a pair of large substrates, and the same number of counter substrates as the TFT substrate is formed on the other. Then, these substrates are bonded to each other using a sealing material or the like so that the TFT substrate and the counter substrate face each other, and a liquid crystal layer is formed in a counter region between the TFT substrate and the counter substrate. A pair of substrates in which is formed is formed. In addition, about the manufacturing method and procedure so far, it is not limited to the above-mentioned thing.
 上記一対の基板の構成を示す斜視図を図1に示す。本実施形態の液晶パネル製造方法において用いられるのが、この図1に示す一対の基板である。図1の(a)は、上記一対の基板を、対向基板側を上面にしてみた図であり、図1の(b)は、上記一対の基板を、TFT基板側を上面にしてみた図である。 FIG. 1 is a perspective view showing the configuration of the pair of substrates. The pair of substrates shown in FIG. 1 is used in the liquid crystal panel manufacturing method of the present embodiment. FIG. 1A is a view of the pair of substrates with the counter substrate side as an upper surface, and FIG. 1B is a view of the pair of substrates with the TFT substrate side as an upper surface. is there.
 図1に示す一対の基板1には、縦5つ×横3つの計15個の液晶パネル2が作り込まれており、(i)横に並んだ液晶パネル2と液晶パネル2との間、および、(ii)横に並んだ液晶パネル2のうちの最も端にある液晶パネル2と上記一対の基板の縁辺1´との間に、液晶パネルとして構成されない部分を有している。本願明細書では、この液晶パネルとして構成されない部分を、端材3と称する。 In the pair of substrates 1 shown in FIG. 1, a total of 15 liquid crystal panels 2 (5 vertical × 3 horizontal) are formed. (I) Between the liquid crystal panel 2 and the liquid crystal panel 2 arranged side by side, And (ii) a portion that is not configured as a liquid crystal panel is provided between the liquid crystal panel 2 at the end of the liquid crystal panels 2 arranged side by side and the edge 1 'of the pair of substrates. In the present specification, the portion that is not configured as the liquid crystal panel is referred to as an end material 3.
 液晶パネル2と端材3との関係について、図2に基づいて詳述する。図2は、図1の一対の基板1における、1つの液晶パネル2およびそれに隣接した端材3を示した斜視図である。 The relationship between the liquid crystal panel 2 and the end material 3 will be described in detail with reference to FIG. FIG. 2 is a perspective view showing one liquid crystal panel 2 and the end material 3 adjacent thereto in the pair of substrates 1 of FIG.
 図2の液晶パネル2は、上側が対向基板21、下側がTFT基板22である。そして、TFT基板22は、対向基板21よりも紙面右側に拡がっている部分を有している。この拡がっている部分を、本願明細書では、拡張領域22aと称する。 2 is a counter substrate 21 on the upper side and a TFT substrate 22 on the lower side. The TFT substrate 22 has a portion extending to the right side of the drawing with respect to the counter substrate 21. This expanded portion is referred to as an expansion region 22a in the present specification.
 このTFT基板22の拡張領域22aは、図3に示すように、走査信号線もしくはデータ信号線の端子23を形成することができる。また代わりに、拡張領域22aは、液晶パネルを駆動するドライバを実装する領域として用いることができる。 In the extended region 22a of the TFT substrate 22, as shown in FIG. 3, a scanning signal line or a data signal line terminal 23 can be formed. Alternatively, the extension region 22a can be used as a region for mounting a driver for driving the liquid crystal panel.
 また、図2に示すように、本実施形態では、上述した端材3として、対向基板21に隣接する対向基板側端材31と、TFT基板22の拡張領域22aに隣接するTFT基板側端材32とを有している。対向基板側端材31の端辺と、TFT基板側端材32の端辺とは基板の重畳方向に沿って位置が揃っている。すなわち、対向基板側端材31とTFT基板側端材32とは、異なる幅を有して構成されており、TFT基板側端材32は、拡張領域22aの分、対向基板側端材31よりも幅が狭く構成されている。 As shown in FIG. 2, in this embodiment, as the above-described end material 3, the counter substrate side end material 31 adjacent to the counter substrate 21 and the TFT substrate side end material adjacent to the extended region 22 a of the TFT substrate 22. 32. The positions of the end side of the counter substrate side end member 31 and the end side of the TFT substrate side end member 32 are aligned along the substrate superposition direction. That is, the counter substrate side end material 31 and the TFT substrate side end material 32 are configured to have different widths, and the TFT substrate side end material 32 corresponds to the extended region 22a than the counter substrate side end material 31. Is also configured to be narrow.
 なお本実施形態では、液晶パネル2は、拡張領域22aを有する端辺以外の端辺は、TFT基板22と対向基板21との端辺が基板の重畳方向に沿って位置が揃っている。すなわち、1つの液晶パネル2とそれに隣接する端材3とは、図2に示すように、一対の基板1の上下の基板において互いに同一形状で同一面積である矩形(長方形)を構成している。 In the present embodiment, in the liquid crystal panel 2, the end sides of the TFT substrate 22 and the counter substrate 21 are aligned along the overlapping direction of the substrate, except for the end side having the extended region 22a. That is, one liquid crystal panel 2 and the end material 3 adjacent thereto constitute a rectangle (rectangle) having the same shape and the same area on the upper and lower substrates of the pair of substrates 1 as shown in FIG. .
 図3は、図2に示す切断線A-A´において1つの液晶パネル2とそれに隣接する端材3とを切断した状態を示す矢視断面図である。 FIG. 3 is a cross-sectional view taken along the line AA ′ shown in FIG. 2 showing a state where one liquid crystal panel 2 and the end material 3 adjacent thereto are cut.
 図3に示すように、液晶パネル2の領域は、対向基板21とTFT基板22との間に、シール材41aで封止された液晶層40が設けられている。さらに、TFT基板22の拡張領域22aには、上述のように端子23が形成されている。 As shown in FIG. 3, in the region of the liquid crystal panel 2, a liquid crystal layer 40 sealed with a sealing material 41a is provided between the counter substrate 21 and the TFT substrate 22. Further, the terminal 23 is formed in the extended region 22a of the TFT substrate 22 as described above.
 図3に示すように、一対の基板同士は、液晶層40を囲むシール材41aと、対向基板側端材31とTFT基板側端材32との対向部分に形成したシール材41bとによって、貼り合わされている。 As shown in FIG. 3, the pair of substrates is attached by a sealing material 41 a surrounding the liquid crystal layer 40 and a sealing material 41 b formed at a facing portion between the opposing substrate side end material 31 and the TFT substrate side end material 32. Are combined.
 図2に示す液晶パネル2および端材3の一具体例としては、図2に示した長方形の全体構造の寸法が(長辺)15mm×(短辺)8mmで、対向基板側端材31とTFT基板側端材32との幅の差が3mmで、対向基板側端材31の幅を5mm、TFT基板側端材32の幅を2mm、各基板の厚さを0.2mm、基板と基板との離間距離(シール材の高さ)を0.003~0.004mmとすることが可能であるが、本発明はこれらの寸法に限定されるものではない。 As a specific example of the liquid crystal panel 2 and the end member 3 shown in FIG. 2, the dimensions of the entire structure of the rectangle shown in FIG. 2 are (long side) 15 mm × (short side) 8 mm. The width difference between the TFT substrate side end material 32 is 3 mm, the width of the counter substrate side end material 31 is 5 mm, the width of the TFT substrate side end material 32 is 2 mm, the thickness of each substrate is 0.2 mm, the substrate and the substrate The separation distance (height of the sealing material) can be 0.003 to 0.004 mm, but the present invention is not limited to these dimensions.
 本実施形態では、図2に示した長方形の構造が、当該長方形の短辺に沿って、それぞれ端材3が同じ側に並ぶように、且つ、当該長方形の長辺に沿って、液晶パネル2と端材3とが交互に並ぶようにして、図1に示す一対の基板1が形成されている。以下、長方形の長辺に沿った方向を、X方向と呼び、長方形の短辺に沿った方向を、Y方向と呼ぶことがある。すなわち、図1に示す一対の基板1は、X方向に沿って3つの液晶パネル2が、間に端材3を介して並んでいる。一方、図1に示す一対の基板1のY方向に関しては、5つの液晶パネル2同士が隣接して並んでいる箇所と、5つの端材3同士が隣接して並んでいる箇所とがある。 In the present embodiment, the rectangular structure shown in FIG. 2 has the liquid crystal panel 2 such that the end members 3 are arranged on the same side along the short side of the rectangle and along the long side of the rectangle. A pair of substrates 1 shown in FIG. 1 is formed in such a manner that the end members 3 are alternately arranged. Hereinafter, the direction along the long side of the rectangle may be referred to as the X direction, and the direction along the short side of the rectangle may be referred to as the Y direction. That is, in the pair of substrates 1 shown in FIG. 1, three liquid crystal panels 2 are arranged along the X direction with the end members 3 therebetween. On the other hand, with respect to the Y direction of the pair of substrates 1 shown in FIG. 1, there are locations where the five liquid crystal panels 2 are arranged adjacent to each other and locations where the five end materials 3 are arranged adjacent to each other.
 <液晶パネルの製造方法(一対の基板からの端材の除去)>
 図4は、図1の(a)に示す切断線B-B´において一対の基板1を切断した状態を示す矢視断面図である。切断線B-B´は、図2に示した長方形の構造の長辺(X方向)に沿っているので、図4の紙面左右方向が長方形の構造の長辺に沿った方向(X方向)にあたる。
<Manufacturing method of liquid crystal panel (removal of end material from a pair of substrates)>
FIG. 4 is a cross-sectional view taken along the arrow line showing a state in which the pair of substrates 1 is cut along the cutting line BB ′ shown in FIG. Since the cutting line BB ′ is along the long side (X direction) of the rectangular structure shown in FIG. 2, the horizontal direction in FIG. 4 is the direction along the long side of the rectangular structure (X direction). It hits.
 まずは、この一対の基板1に、スクライブラインを形成する(スクライブライン形成工程)。なお、スクライブラインを形成する図4に示す一対の基板1には、上述した液晶パネル2内部の構成が既に形成されている状態である。 First, scribe lines are formed on the pair of substrates 1 (scribe line forming step). Note that the above-described configuration of the liquid crystal panel 2 is already formed on the pair of substrates 1 shown in FIG. 4 where the scribe lines are formed.
 ・ スクライブライン形成工程
 スクライブライン形成は、スクライブ形成装置に設けられたステージ50上に一対の基板1の全面を載置して、固定して行われる。ステージ50は、弾性を有した材料から構成されており、スクライブ形成工程および当該工程に続く荷重工程において、一対の基板1に対して過剰な圧力(負荷)が与えられるのを、この弾性によって回避することができる。また、ステージ50には、スクライブ形成中の一対の基板をステージ50表面に吸着させるための吸引孔が設けられていてもよい。吸引孔からの吸引は、別装置にて制御することができるように構成することができる。
-Scribe line formation process A scribe line formation is performed by mounting the whole surface of a pair of board | substrate 1 on the stage 50 provided in the scribe formation apparatus, and fixing. The stage 50 is made of a material having elasticity, and this elasticity prevents an excessive pressure (load) from being applied to the pair of substrates 1 in the scribe forming process and the loading process following the process. can do. Further, the stage 50 may be provided with a suction hole for adsorbing a pair of substrates during scribe formation to the surface of the stage 50. The suction from the suction hole can be configured to be controlled by a separate device.
 本実施形態では、一対の基板1の片面ずつにスクライブライン形成する処理を施す。すなわち、一方の表面にスクライブラインを形成した後、図示しない反転装置を用いて、一対の基板を反転させて、先ほどスクライブラインを形成した面をステージ50に対向させた状態としてから、他方の表面にスクライブラインを形成する。 In this embodiment, a process of forming a scribe line on each side of the pair of substrates 1 is performed. That is, after a scribe line is formed on one surface, a pair of substrates are reversed using a reversing device (not shown) so that the surface on which the scribe line is formed is opposed to the stage 50 before the other surface. A scribe line is formed.
 本実施形態では、続く荷重工程において、TFT基板側の基板表面が上方に向いている状態からスタートすることになるため、これを考慮して、スクライブ形成工程では、先に対向基板側の基板にスクライブラインを形成することが好ましい。なお、続く分断工程が、ステージ50から移動して異なるステージ上で行われる場合や、その移動の最中に、一対の基板を反転させる装置を採用する場合には、スクライブ形成順序は上述した順に限られない。 In this embodiment, in the subsequent loading process, the TFT substrate side starts from a state where the substrate surface faces upward. Therefore, in consideration of this, in the scribe formation process, the substrate on the counter substrate side is first applied. It is preferable to form a scribe line. When the subsequent dividing step is performed on a different stage after moving from the stage 50, or when a device that reverses a pair of substrates during the movement is employed, the scribe formation order is in the order described above. Not limited.
 スクライブ形成には、ダイヤモンドやサファイヤなどの超硬材料からなるスクライブカッターを用いる。スクライブカッターは、X方向に沿って、スクライブライン形成予定箇所と同数設けられていることが望ましい。同数設けられていることにより、これらを同時にY方向に走査することで、所望の箇所に一括してスクライブラインを形成することができる。 For scribe formation, a scribe cutter made of a super hard material such as diamond or sapphire is used. It is desirable that the same number of scribe cutters as the number of scribe line formation scheduled portions are provided along the X direction. By providing the same number, a scribe line can be collectively formed at a desired location by simultaneously scanning these in the Y direction.
 スクライブラインの形成位置について、図4を用いて説明すると、対向基板側の基板も、TFT基板側の基板も、液晶パネル2と端材3との境界にスクライブラインを形成する。そして、対向基板側とTFT基板側とを対にしてスクライブラインの形成位置をX方向に沿ってみてみると、図4に示すように、対向基板側とTFT基板側とでスクライブラインが一致している箇所と、ずれている箇所とが、交互に位置していることがわかる。これは、上述したように、対向基板側端材31とTFT基板側端材32とは、異なる幅を有して構成されており、TFT基板側端材32は、拡張領域22aの分、対向基板側端材31よりも幅が狭く構成されており、また、液晶パネル2における、拡張領域22aを有する端辺以外の端辺は、TFT基板22と対向基板21との端辺が基板の重畳方向に沿って位置が揃っていることによる。すなわち、図4に示すように、TFT基板側基板の、拡張領域22aとTFT基板側端材32との境界にあるスクライブは、これらと対をなす、対向基板側基板の対向基板側端材31をX方向に沿って挟んで両側に形成されているスクライブラインの間に位置している。 The formation position of the scribe line will be described with reference to FIG. 4. The scribe line is formed at the boundary between the liquid crystal panel 2 and the end material 3 on both the substrate on the counter substrate side and the substrate on the TFT substrate side. Then, when the counter substrate side and the TFT substrate side are paired and the formation position of the scribe line is viewed along the X direction, the scribe lines coincide on the counter substrate side and the TFT substrate side as shown in FIG. It can be seen that the locations where the images are shifted and the locations where they are shifted are located alternately. As described above, the counter substrate-side end member 31 and the TFT substrate-side end member 32 are configured to have different widths, and the TFT substrate-side end member 32 is opposed to the extended region 22a. The width of the substrate side end material 31 is narrower than that of the substrate side end material 31, and the end sides of the liquid crystal panel 2 other than the end side having the extended region 22 a are overlapped with the end sides of the TFT substrate 22 and the counter substrate 21. This is because the positions are aligned along the direction. That is, as shown in FIG. 4, the scribe at the boundary between the extended region 22a and the TFT substrate side end member 32 of the TFT substrate side substrate is paired with the scribe end member 31 of the opposite substrate side of the counter substrate side substrate. Between the scribe lines formed on both sides of the X direction.
 スクライブカッターによる切り込み(スクライブ)の深さは、基板厚の20%から50%とすることが望ましい。その理由は、20%を下回る切り込みでは、続く荷重工程においてクラックの伝播が垂直に進行しない虞があり、また、50%を超える切り込みでは切り込み時に、基板表面に砕けが発生する虞があるからである。 The depth of scribing with a scribe cutter is preferably 20% to 50% of the substrate thickness. The reason is that if the cut is less than 20%, the propagation of cracks may not progress vertically in the subsequent loading process, and if the cut exceeds 50%, the substrate surface may be crushed at the time of cutting. is there.
 図5は、スクライブ形成工程によって形成されたスクライブ(ライン)24を示している。図5に示すように、スクライブ(ライン)24は基板の厚さの一部、具体的には、図5中に丸で囲んだ部分(液晶層に近い側)には形成されない状態で完了する。 FIG. 5 shows a scribe (line) 24 formed by the scribe formation process. As shown in FIG. 5, the scribe (line) 24 is completed in a state where it is not formed in a part of the thickness of the substrate, specifically, in the part circled in FIG. 5 (the side close to the liquid crystal layer). .
 ・ 荷重工程
 続く荷重工程では、スクライブライン形成工程の後の一対の基板1の一方の基板の端材3の表面の中央に、基板の重畳方向に沿った荷重方向の点荷重をかけ、且つ、当該点荷重を、Y方向に延びるスクライブラインと平行に移動させながらかける。これにより、スクライブラインにおいて一対の基板を一括して分断することができる。より具体的に説明すれば、以下の通りである。
-Load process In the subsequent load process, a point load in the load direction along the overlapping direction of the substrates is applied to the center of the surface of the end material 3 of one substrate of the pair of substrates 1 after the scribe line forming step, and The point load is applied while moving in parallel with the scribe line extending in the Y direction. Thereby, a pair of board | substrate can be cut | disconnected collectively in a scribe line. More specifically, it is as follows.
 まず、スクライブ形成工程によるスクライブ形成が完了した一対の基板1は、対向基板側の基板が上面になっていて、TFT基板側の基板をステージに対向させるかたちでステージに載置される。このステージは、スクライブ形成装置に設けられたステージ50と同じであってもよく、異なっていても良い。 First, the pair of substrates 1 on which the scribe formation by the scribe formation process has been completed is placed on the stage such that the substrate on the opposite substrate side is the upper surface and the substrate on the TFT substrate side is opposed to the stage. This stage may be the same as or different from the stage 50 provided in the scribe forming apparatus.
 続いて、対向基板側の基板の対向基板側端材31の中央部分、より具体的には、対向基板側端材31と両側において隣接する対向基板21との間に形成されているスクライブラインとスクライブラインとの中間位置に、荷重手段である押し込みローラー60をセットする。 Subsequently, a scribe line formed between the counter substrate side end member 31 of the substrate on the counter substrate side, more specifically, between the counter substrate side end member 31 and the counter substrate 21 adjacent on both sides, The pushing roller 60 which is a load means is set at an intermediate position with respect to the scribe line.
 ここで、押し込みローラー60の構成について、図6を用いて説明する。図6の(a)は、押し込みローラー60の回転シャフト部側を見た側面図であり、図6の(b)は、押し込みローラー60の押し込み時(荷重時)におけるOリングの接触面積を示した図である。 Here, the configuration of the pushing roller 60 will be described with reference to FIG. 6A is a side view of the pushing roller 60 as viewed from the rotating shaft portion side, and FIG. 6B shows the contact area of the O-ring when the pushing roller 60 is pushed (when loaded). It is a figure.
 押し込みローラー60は、図6の(a)に示すように、回転シャフト部61とOリング62とを有しており、回転シャフト部61の周囲をOリング62が囲んだ構造を有している。 As shown in FIG. 6A, the pushing roller 60 includes a rotating shaft portion 61 and an O-ring 62, and the O-ring 62 surrounds the rotating shaft portion 61. .
 回転シャフト部61は、曲率(R)20~30mmで構成されており、図示しない回転駆動機構による制御を受けて回転シャフト部61の中心軸63を回転軸として回転(回動)する構成とになっている。 The rotation shaft portion 61 is configured with a curvature (R) of 20 to 30 mm, and is configured to rotate (turn) around the central axis 63 of the rotation shaft portion 61 as a rotation axis under the control of a rotation drive mechanism (not shown). It has become.
 Oリング62は、いわゆるゴムリングであり、フッ素系やニトリルゴム系などを用いることができる。Oリング62には、径1.5~3mmものを用いることができる。 The O-ring 62 is a so-called rubber ring, and a fluorine type or a nitrile rubber type can be used. The O-ring 62 having a diameter of 1.5 to 3 mm can be used.
 このような押し込みローラー60は、共通の中心軸63に複数個設けられていることが好ましい。具体的には、本実施形態では、図1に示すように、X方向に3つの端材3を有する一対の基板1に対して荷重工程を施すことから、図7に示すように、3つの押し込みローラー60が1つの中心軸63に等間隔、すなわち端材3と端材3との間隔に合わせた間隔、で配設されていることが好ましい。 It is preferable that a plurality of such pushing rollers 60 are provided on the common central shaft 63. Specifically, in this embodiment, as shown in FIG. 1, a load process is performed on a pair of substrates 1 having three end members 3 in the X direction. It is preferable that the pushing rollers 60 are arranged on one central shaft 63 at equal intervals, that is, at intervals corresponding to the intervals between the end members 3.
 図6の(b)のように、押し込みローラー60の押し込み時(荷重時)におけるOリングは、基板(対向基板側端材31)に対して、その移動方向に沿って1.0~2.5mmの接触長(図6の(b)中のp)で、幅方向に0.5~1.5mmの接触長(図6の(b)中のq)である接触面積を実現していることが好ましい。この接触面積は比較的小さく、いわゆる点接触を実現している。 As shown in FIG. 6B, the O-ring when the push roller 60 is pushed in (when loaded) is 1.0-2. 2 along the moving direction with respect to the substrate (counter substrate side end material 31). A contact area of 0.5 to 1.5 mm in the width direction (q in FIG. 6B) is realized with a contact length of 5 mm (p in FIG. 6B). It is preferable. This contact area is relatively small, and so-called point contact is realized.
 以上の構成の押し込みローラー60を、Y方向に延びるスクライブラインと平行に移動させながら対向基板側端材31をTFT基板側端材32に向けて押し込むように荷重する。これを図8に示す。図8は、紙面左右方向がY方向に相当し、対向基板側端材31およびTFT基板側端材32がY方向に沿って並んでいる。押し込みローラー60がこの上をY方向に移動することにより、荷重箇所において対向基板側端材31およびTFT基板側端材32がステージ側に歪むことになる。 While the pushing roller 60 having the above configuration is moved in parallel with the scribe line extending in the Y direction, a load is applied so as to push the counter substrate side end member 31 toward the TFT substrate side end member 32. This is shown in FIG. In FIG. 8, the left-right direction on the paper surface corresponds to the Y direction, and the counter substrate side end member 31 and the TFT substrate side end member 32 are arranged along the Y direction. When the pushing roller 60 moves in the Y direction, the counter substrate side end member 31 and the TFT substrate side end member 32 are distorted to the stage side at the load point.
 なお、押し込みローラー60をY方向に延びるスクライブラインと平行に移動させる手法は、押し込みローラー60と一対の基板1とが相対的に上述のように移動すればよいので、押し込みローラー60が移動してもよく、一対の基板1がステージごと移動してもよく、あるいは、両者が移動してもよい。 Note that the method of moving the push roller 60 in parallel with the scribe line extending in the Y direction is only required to move the push roller 60 and the pair of substrates 1 relatively as described above. Alternatively, the pair of substrates 1 may move together with the stage, or both may move.
 以上のように、押し込みローラー60をY方向に延びるスクライブラインと平行に移動させて垂直荷重をかけると、以下のような原理で、一対の基板から端材を分断することができる。 As described above, when the pushing roller 60 is moved parallel to the scribe line extending in the Y direction and a vertical load is applied, the end material can be divided from the pair of substrates according to the following principle.
 すなわち、押し込みローラー60をY方向に延びるスクライブラインと平行に移動させて垂直荷重をかけると、図9に示すように、一対の基板における垂直荷重がかかった場所近傍が下方(ステージ50に向かって)に歪む。これにより、上側の基板の表面に引っ張り応力、内側に圧縮応力が働き、スクライブラインの切り込みが引っ張り応力を受けるために切り込み量が大きくなって上側の基板が、対向基板21と、対向基板側端材31とに分断される。 That is, when a vertical load is applied by moving the pushing roller 60 in parallel with the scribe line extending in the Y direction, as shown in FIG. 9, the vicinity of the place where the vertical load is applied on the pair of substrates is downward (toward the stage 50). ). As a result, tensile stress is applied to the surface of the upper substrate, compressive stress is applied to the inner surface, and the incision of the scribe line is subjected to tensile stress. Divided into material 31.
 その直後、切断された上側の基板の下部に生じていた圧縮応力が開放されて、下側の基板に引っ張り応力が現れる。そのため、下側のガラス基板のスクライブラインの切り込み量が大きくなり、下側の基板が、TFT基板22と、TFT基板側端材32とに分断される。 Immediately after that, the compressive stress generated in the lower part of the cut upper substrate is released, and a tensile stress appears on the lower substrate. Therefore, the cut amount of the scribe line of the lower glass substrate is increased, and the lower substrate is divided into the TFT substrate 22 and the TFT substrate side end member 32.
 ここで、垂直荷重をかける位置と、スクライブラインの位置とを、図7および図9に示すように離すことによって、作用点と力点が離れているということになり(支点は力点とほぼ同じところにある)、作用点の小さな力で力点に大きな力がかかり。垂直荷重の大きさが少なくてすむので好ましい。 Here, by separating the position where the vertical load is applied and the position of the scribe line as shown in FIGS. 7 and 9, the action point and the force point are separated (the fulcrum is almost the same as the force point). ), A large force is applied to the force point with a small force of action point. This is preferable because the vertical load is small.
 特に、押し込みローラー60による垂直荷重が、下側の基板のスクライブライン24の直上であることが望ましい。これは、押込みローラによる上側基板の分割を有効に終了させたあと、押圧が下側基板に有効に伝わるからである。 Particularly, it is desirable that the vertical load by the pushing roller 60 is directly above the scribe line 24 of the lower substrate. This is because the pressure is effectively transmitted to the lower substrate after the division of the upper substrate by the pushing roller is effectively finished.
 なお本実施形態では、荷重工程において、スクライブ形成工程で使用したステージ50をそのまま使用したが、本発明はこれに限定されるものではなく、例えば、図10に示すようなステージおよび構成を用いても良い。図10は、荷重工程の荷重装置の別例を示しており、図10中の(a)が荷重手段側から基板(対向基板21および対向基板側端材31)を見た上面図であり、図10中の(b)は、図10中の(a)に示す切断線C-C´において基板を切断した状態を示す矢視断面図である。 In the present embodiment, the stage 50 used in the scribe forming process is used as it is in the loading process. However, the present invention is not limited to this, for example, using a stage and configuration as shown in FIG. Also good. FIG. 10 shows another example of the load device of the loading process, and (a) in FIG. 10 is a top view of the substrate (the counter substrate 21 and the counter substrate side end member 31) viewed from the load means side. (B) in FIG. 10 is a cross-sectional view taken along the arrow showing a state in which the substrate is cut along a cutting line CC ′ shown in (a) in FIG.
 図10の構成では、ステージ50に代えて、吸着パイプ73が形成された吸着プレート70と、その上に載置された弾性シート71とを備えたステージを用いて荷重工程を行っている。吸着プレート70はアルミ材などから構成することができる。吸着パイプ73には、図示しないポンプ装置が接続されており、弾性シート71を介して配置された基板を弾性シート71表面に吸着させることができる。よって、弾性シート71には、吸着パイプ73と連通する孔が設けられている。弾性シート71は、荷重工程で基板が歪むようゴム材などから構成することが好ましい。なお、吸着パイプ73は、端材3の領域のみでなく、液晶パネル2の領域にも設けられているとよい。 In the configuration of FIG. 10, the loading process is performed using a stage including a suction plate 70 on which a suction pipe 73 is formed and an elastic sheet 71 placed thereon instead of the stage 50. The suction plate 70 can be made of an aluminum material or the like. A pump device (not shown) is connected to the suction pipe 73 so that the substrate disposed via the elastic sheet 71 can be adsorbed to the surface of the elastic sheet 71. Therefore, the elastic sheet 71 is provided with a hole communicating with the suction pipe 73. The elastic sheet 71 is preferably made of a rubber material or the like so that the substrate is distorted in the loading process. The suction pipe 73 may be provided not only in the region of the end material 3 but also in the region of the liquid crystal panel 2.
 さらに図10の構成では、基板(対向基板側端材31とTFT基板側端材32)と、弾性シート71との間、および、当該基板と押し込みローラー60との間には、保護シート72を介在させている。これにより、当該基板に対して、弾性シート71および押し込みローラー60が直接接触することを避け、当該基板の傷付きを抑制することが可能となる。なお、保護シート72は、吸着プレート70および弾性シート71に設けられた吸着孔を塞がないよう、通気性の有する材料から構成される。 Further, in the configuration of FIG. 10, a protective sheet 72 is provided between the substrate (the counter substrate side end member 31 and the TFT substrate side end member 32) and the elastic sheet 71 and between the substrate and the pressing roller 60. Intervene. Thereby, the elastic sheet 71 and the pushing roller 60 can be prevented from coming into direct contact with the substrate, and the substrate can be prevented from being damaged. The protective sheet 72 is made of a breathable material so as not to block the suction holes provided in the suction plate 70 and the elastic sheet 71.
 図10の構成は、基板を吸着した状態で荷重工程を行っている。このように吸着することによって、一対の基板はしっかりとステージ固定されるので、一対の基板が図1のように大きくなく、例えば、図10に示しているように液晶パネル2と端材3とが一列だけ形成された比較的小さい一対の基板にも有効である。この場合、端材3が一対の基板の端辺にあるため、吸着機能のないステージを用いると、荷重の際、基板が動いて所定の位置に荷重をかけることができない虞があるからである。これに対して、図10の構成であれば、一対の基板がしっかりとステージ固定されているので、所定の位置に荷重をかけることができる。 In the configuration of FIG. 10, the loading process is performed with the substrate adsorbed. By adsorbing in this way, the pair of substrates are firmly fixed on the stage, so that the pair of substrates is not large as shown in FIG. 1. For example, as shown in FIG. This is also effective for a pair of relatively small substrates formed in a single row. In this case, since the end material 3 is located on the end sides of the pair of substrates, if a stage having no suction function is used, the substrate may move during loading, and a load may not be applied to a predetermined position. . On the other hand, in the configuration shown in FIG. 10, since the pair of substrates are firmly fixed on the stage, a load can be applied to a predetermined position.
 ・ 液晶パネル分離工程
 荷重工程に続いて、液晶パネルと端材とを分離する工程を行う(液晶パネル分離工程)。
-Liquid crystal panel isolation | separation process The process which isolate | separates a liquid crystal panel and an end material is performed following a load process (liquid crystal panel isolation | separation process).
 上述の荷重工程において、既に、スクライブラインにおいて端材と液晶パネルとは切断されている。そこで液晶パネル分離工程では、これらを完全に分離する。 In the above-described loading process, the end material and the liquid crystal panel are already cut in the scribe line. Therefore, in the liquid crystal panel separating step, these are completely separated.
 図11は、液晶パネル分離工程を示す図である。図11中の(a)は、荷重工程が施された後の一対の基板である。なお、図11中の(a)では、一対の基板自身が形を保持しているように示されているが、実際は、荷重工程でステージ上に載置された状態の一対の基板のことである。図11中の(a)の一対の基板から、液晶パネル2同士が隣接した一列と、それに隣り合う一列の端材3とを取り出す(図11中の(b))。取り出し方法に制限はない。 FIG. 11 is a diagram showing a liquid crystal panel separation step. (A) in FIG. 11 is a pair of substrates after the loading process is performed. In FIG. 11, (a) shows that the pair of substrates themselves hold the shape, but in reality, the pair of substrates placed on the stage in the loading process. is there. From the pair of substrates in FIG. 11A, a row in which the liquid crystal panels 2 are adjacent to each other and a row of end materials 3 adjacent to the same are taken out ((b) in FIG. 11). There is no restriction on the extraction method.
 この図11中の(b)に示す端材除去ステージ80には、端材3同士の配列方向に沿って端材吸着部81が設けられている。取り出された一列分の液晶パネルおよび端材は、対向基板21および対向基板側端材31を、端材除去ステージ80に対向させて載置する。このとき、端材吸着部81を覆うように対向基板側端材31を配置する。 The end material removing stage 80 shown in FIG. 11B is provided with an end material adsorbing portion 81 along the arrangement direction of the end materials 3. The liquid crystal panel and the end material for one row taken out are placed with the counter substrate 21 and the counter substrate side end material 31 facing the end material removing stage 80. At this time, the counter substrate side end material 31 is arranged so as to cover the end material adsorbing portion 81.
 そして、端材吸着部81による対向基板側端材31の吸着を行っている間に、図11中の(c)に示すパネル吸着パット91を有したパネル移動アーム90を用いて、液晶パネル2を吸着し移動する。パネル吸着パット91は、従来周知の吸着パットを用いることができ、例えば真空吸着によるパネル吸着を実現することができる。 While the counter substrate side end material 31 is being adsorbed by the end material adsorbing portion 81, the liquid crystal panel 2 is used by using the panel moving arm 90 having the panel adsorbing pad 91 shown in FIG. Adsorb and move. As the panel suction pad 91, a conventionally known suction pad can be used. For example, panel suction by vacuum suction can be realized.
 図11中の(c)において、パネル吸着パット91は、TFT基板22と接触してその表面に吸着する。 11 (c), the panel suction pad 91 comes into contact with the TFT substrate 22 and is attracted to the surface thereof.
 TFT基板22と対向基板21とは図3で示したようにシール材41aによって貼り合わされており、対向基板側端材31とTFT基板側端材32とは、図3に示したようにシール材41bによって貼り合わされているので、パネル吸着パット91によって、TFT基板22を持ち上げることによって、図11中の(c)に示すように、端材3は、端材除去ステージ80に残り、液晶パネル2がパネル吸着パット91とともに移動する。 The TFT substrate 22 and the counter substrate 21 are bonded together by a sealing material 41a as shown in FIG. 3, and the counter substrate side end material 31 and the TFT substrate side end material 32 are sealed as shown in FIG. 41b, by lifting the TFT substrate 22 by the panel suction pad 91, the end material 3 remains on the end material removing stage 80 as shown in FIG. Moves together with the panel suction pad 91.
 これにより、液晶パネル2と端材3とが分離する。パネル吸着パット91は、1つの液晶パネルに対して、1つ配設されているので、個々のパネル吸着パット91を動作させることによって、液晶パネル2同士も互いに分離される。 Thereby, the liquid crystal panel 2 and the end material 3 are separated. Since one panel suction pad 91 is provided for one liquid crystal panel, the liquid crystal panels 2 are separated from each other by operating each panel suction pad 91.
 <本実施形態の作用効果>
 以上の構成によれば、点荷重をスクライブラインと平行に移動させながらかけるという簡便な手法によって、基板から端材を分断することができることから、液晶パネルの製造の歩留まりを改善することができる。
<Operational effects of this embodiment>
According to the above configuration, the end material can be separated from the substrate by a simple method in which the point load is applied while being moved in parallel with the scribe line, so that the production yield of the liquid crystal panel can be improved.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、端材をスライドさせて除去する必要がない。これにより、除去しようとする端材がもう一方の基板の表面にこすり付けてしまう事態は回避することができる。よって、上述のように、一方の基板において対向基板に隣接した端材を除去する際に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまって端子等に傷が付いてしまう事態を回避することできる。すなわち、上記拡がった部分を傷つけることなく露呈させることができる。 Moreover, since the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
 また、点荷重をスクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、パネルと端材とを完全分離することができる。 Moreover, since the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
 以上のことから、本発明に係る液晶パネルの製造方法は、一対の基板が縁辺から互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 From the above, the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
 なお、本発明は上述した各実施形態に限定されるものではない。当業者は、請求項に示した範囲内において、本発明をいろいろと変更できる。すなわち、請求項に示した範囲内において、適宜変更された技術的手段を組み合わせれば、新たな実施形態が得られる。すなわち、発明の詳細な説明の項においてなされた具体的な実施形態は、あくまでも、本発明の技術内容を明らかにするものであって、そのような具体例にのみ限定して狭義に解釈されるべきものではなく、本発明の精神と次に記載する請求の範囲内で、いろいろと変更して実施することができるものである。 In addition, this invention is not limited to each embodiment mentioned above. Those skilled in the art can make various modifications to the present invention within the scope of the claims. That is, a new embodiment can be obtained by combining appropriately changed technical means within the scope of the claims. In other words, the specific embodiments made in the detailed description section of the invention are merely to clarify the technical contents of the present invention, and are limited to such specific examples and are interpreted narrowly. It should be understood that the invention can be practiced with various modifications within the spirit of the invention and within the scope of the following claims.
 (本発明の総括)
 以上のように、本発明に係る液晶パネルの製造方法は、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対してスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板における基板の重畳方向においてずれた位置に形成するスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、一対の基板の端辺と、行方向に設けたスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
(Summary of the present invention)
As described above, the manufacturing method of the liquid crystal panel according to the present invention is as follows.
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step for providing a scribe line for each of the pair of substrates, the scribe line extending in a row direction provided on one of the pair of substrates, and a row direction provided on the other substrate A scribe line forming step of forming a scribe line extending in a position shifted in a direction in which the substrates overlap in a pair of substrates,
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, the one substrate is provided in the row direction and the edges of the pair of substrates in a region different from the liquid crystal panel region. A load step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between the scribe lines;
It is characterized by including.
 上記の構成によれば、点荷重を当該スクライブラインと平行に移動させながらかけるという簡便な手法によって、基板から、液晶パネル領域とは異なる領域(端材)を分断することができることから、液晶パネルの製造の歩留まりを改善することができる。 According to the above configuration, a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line. The manufacturing yield can be improved.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、端材をスライドさせて除去する必要がない。これにより、除去しようとする端材がもう一方の基板の表面にこすり付けてしまう事態は回避することができる。よって、上述のように、一方の基板において対向基板に隣接した端材を除去する際に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまって端子等に傷が付いてしまう事態を回避することできる。すなわち、上記拡がった部分を傷つけることなく露呈させることができる。 Moreover, since the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、パネルと端材とを完全分離することができる。 Moreover, since the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
 以上のことから、本発明に係る液晶パネルの製造方法は、一対の基板が縁辺から互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 From the above, the manufacturing method of the liquid crystal panel according to the present invention is efficient and good for the end material when the pair of substrates have end materials having different widths from the edge. It is possible to provide a method for manufacturing a liquid crystal panel that realizes division.
 また本発明に係る液晶パネルの別の製造方法は、以上のように、
 一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
 上記一対の基板のそれぞれの基板に対して行方向および列方向にスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板の重畳方向において揃った位置に形成する箇所と、当該重畳方向においてずれた位置に形成する箇所とに設けるスクライブライン形成工程と、
 上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、隣り合う行方向に設けたスクライブラインとスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
を含むことを特徴としている。
Moreover, another manufacturing method of the liquid crystal panel according to the present invention is as described above.
A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction;
In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one substrate A loading step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between
It is characterized by including.
 上記の構成によれば、点荷重を当該スクライブラインと平行に移動させながらかけるという簡便な手法によって、基板から、液晶パネル領域とは異なる領域(端材)を分断することができることから、液晶パネルの製造の歩留まりを改善することができる。 According to the above configuration, a region (end material) different from the liquid crystal panel region can be separated from the substrate by a simple method of applying a point load while moving in parallel with the scribe line. The manufacturing yield can be improved.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、端材をスライドさせて除去する必要がない。これにより、除去しようとする端材がもう一方の基板の表面にこすり付けてしまう事態は回避することができる。よって、上述のように、一方の基板において対向基板に隣接した端材を除去する際に、当該端材を、TFT基板の上記拡がった部分の表面にこすり付けてしまって端子等に傷が付いてしまう事態を回避することできる。すなわち、上記拡がった部分を傷つけることなく露呈させることができる。 Moreover, since the end material can be cut off from the substrate by applying the point load while moving in parallel with the scribe line, it is not necessary to slide and remove the end material. Thereby, it is possible to avoid a situation in which the end material to be removed is rubbed against the surface of the other substrate. Therefore, as described above, when the end material adjacent to the counter substrate is removed from one substrate, the end material is rubbed against the surface of the expanded portion of the TFT substrate, and the terminals are damaged. Can be avoided. That is, it can be exposed without damaging the expanded part.
 また、点荷重を当該スクライブラインと平行に移動させながらかけることで基板から端材を分断することができるので、パネルと端材とを完全分離することができる。 Moreover, since the end material can be separated from the substrate by applying the point load while moving in parallel with the scribe line, the panel and the end material can be completely separated.
 以上のことから、本発明に係る液晶パネルの製造方法は、一対の基板が互いに異なる幅を有した端材を有して構成されている場合の、当該端材の効率的で良好な分断を実現する液晶パネルの製造方法を提供することができる。 From the above, the method for manufacturing a liquid crystal panel according to the present invention provides an efficient and good separation of the end material when the pair of substrates has end materials having different widths. A method for manufacturing a liquid crystal panel can be provided.
 また本発明に係る液晶パネルの製造方法の一形態は、上記の構成に加えて、
 上記荷重工程では、ローラーを用いて上記点荷重を当該スクライブラインと平行に移動させながらかけることが好ましい。
In addition to the above configuration, one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
In the loading step, it is preferable to apply the point load while moving the point load in parallel with the scribe line using a roller.
 上記の構成によれば、簡易で効率的に荷重をかけることができる。 According to the above configuration, a load can be applied easily and efficiently.
 また本発明に係る液晶パネルの製造方法の一形態は、上記の構成に加えて、
 上記荷重工程では、上記点荷重をかける上記一方の基板は、上記他方の基板よりも、上記位置が上記スクライブラインからより離れていることが好ましい。
In addition to the above configuration, one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
In the loading step, it is preferable that the one substrate to which the point load is applied is farther from the scribe line than the other substrate.
 上記の構成によれば、上記中間位置が上記スクライブラインからより離れているほうの基板、すなわち、端材の幅がより広いほうの基板に対して点荷重をかけることになるので、荷重位置の位置合わせにおいて精度を必要としない。またこれにより、歩留まりを向上させることができる。 According to the above configuration, a point load is applied to the substrate whose intermediate position is farther from the scribe line, that is, the substrate having the wider end material, so the load position Precision is not required for alignment. Thereby, the yield can be improved.
 また本発明に係る液晶パネルの製造方法の一形態は、上記の構成に加えて、
 上記荷重工程では、上記点荷重をかける位置は、上記他方の基板における上記スクライブラインの形成位置と、重畳方向において揃っていることが好ましい。
In addition to the above configuration, one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
In the loading step, it is preferable that the position where the point load is applied is aligned with the formation position of the scribe line on the other substrate in the overlapping direction.
 上記の構成によれば、他方の基板の分断で力が最適にかかる、すなわち、回転方向に力がかからないため、上記他方の基板の分断が良好になり、結果、上記一方の基板への影響もないため、当該一方の基板の分断も良好に実現することができる。 According to the above configuration, the force is optimally applied when the other substrate is divided, that is, no force is applied in the rotation direction, so that the other substrate is divided well, and as a result, the influence on the one substrate is also affected. Therefore, the division of the one substrate can be realized well.
 また本発明に係る液晶パネルの製造方法の一形態は、上記の構成に加えて、
 上記荷重工程では、上記スクライブライン形成工程の後の上記一対の基板を、吸着可能な上記クッション材に吸着させた状態で上記分断し、
 上記製造方法は、さらに、
 上記荷重工程の後に、上記一対の基板を上記クッション材から分離して、反転させて上記液晶パネル領域とは異なる上記領域のみを吸着できるように構成された別のクッション材に載置した後、当該別のクッション材によって上記液晶パネル領域とは異なる上記領域のみを吸着した状態で、上記液晶パネル領域を当該異なる領域から分離する液晶パネル分離工程を含むことが好ましい。
In addition to the above configuration, one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
In the loading step, the pair of substrates after the scribe line forming step is divided in the state of being adsorbed to the adsorbable cushion material,
The above manufacturing method further includes:
After the loading step, after separating the pair of substrates from the cushion material, inverting and placing the substrate on another cushion material configured to be able to adsorb only the region different from the liquid crystal panel region, It is preferable to include a liquid crystal panel separation step of separating the liquid crystal panel region from the different region in a state where only the region different from the liquid crystal panel region is adsorbed by the another cushion material.
 上記の構成によれば、上記荷重工程の後に、上記一対の基板を反転させてから、液晶パネル分離工程を行うため、上記荷重工程では、上記液晶パネル領域とは異なる領域(端材)の幅の広い側から荷重をかけ、液晶パネル分離工程では、端材の幅の広い側を別のクッション材に対向させて当該幅の広い端材を吸着させた状態で、液晶パネルを上記端材から分離することができる。 According to the above configuration, the liquid crystal panel separation step is performed after the pair of substrates are inverted after the loading step. Therefore, in the loading step, the width of a region (end material) different from the liquid crystal panel region. In the liquid crystal panel separating step, the liquid crystal panel is detached from the end material in a state where the wide end material is adsorbed with the wide side of the end material facing another cushion material. Can be separated.
 そのため、スクライブラインの延設方向に沿って複数の液晶パネルが形成されている一対の基板を用いている場合には、当該液晶パネル分離工程において、当該複数の液晶パネルを一括して端材群から分離することができる。よって、歩留まりを向上させることができる。 Therefore, when a pair of substrates on which a plurality of liquid crystal panels are formed along the extending direction of the scribe line is used, the plurality of liquid crystal panels are collectively processed into an end material group in the liquid crystal panel separation step. Can be separated from Therefore, the yield can be improved.
 また本発明に係る液晶パネルの製造方法の一形態は、上記の構成に加えて、
 上記荷重工程では、上記クッション材と上記一対の基板との間に保護材を介在させ、且つ、上記一方の基板の上にも保護材を介在させた状態で上記点荷重をかけることが好ましい。
In addition to the above configuration, one mode of the method for producing a liquid crystal panel according to the present invention is as follows.
In the loading step, it is preferable to apply the point load in a state where a protective material is interposed between the cushion material and the pair of substrates, and a protective material is also interposed on the one substrate.
 上記の構成によれば、上記保護材を介在させることによって、一対の基板と、上記クッション材または上記点荷重をかける手段とが直接接触することを回避することができ、一対の基板の傷付きを防止することができる。 According to said structure, by interposing the said protective material, it can avoid that a pair of board | substrate and the said cushion material or the means which applies the said point load contact directly, and a pair of board | substrate is damaged. Can be prevented.
 本発明は、液晶表示装置の液晶パネル製造に適用することが可能である。 The present invention can be applied to the production of a liquid crystal panel of a liquid crystal display device.
1   一対の基板
2   液晶パネル
3   端材(液晶パネル領域とは異なる領域)
21  対向基板
22  TFT基板
22a 拡張領域
23  端子
24  スクライブ(ライン)
31  対向基板側端材(液晶パネル領域とは異なる領域)
32  TFT基板側端材(液晶パネル領域とは異なる領域)
40  液晶層
41a、41b  シール材
50  ステージ(クッション材)
60  押し込みローラー
61  回転シャフト部
62  Oリング
63  中心軸
70  吸着プレート
71  弾性シート(クッション材)
72  保護シート(保護材)
73  吸着パイプ
80  端材除去ステージ
81  端材吸着部
90  パネル移動アーム
91  パネル吸着パット
1 A pair of substrates 2 Liquid crystal panel 3 Edge material (area different from liquid crystal panel area)
21 Counter substrate 22 TFT substrate 22a Expansion area 23 Terminal 24 Scribe (line)
31 Opposite substrate side material (region different from liquid crystal panel region)
32 TFT substrate side edge material (area different from liquid crystal panel area)
40 Liquid crystal layers 41a and 41b Sealing material 50 Stage (cushioning material)
60 Pushing roller 61 Rotating shaft portion 62 O-ring 63 Center shaft 70 Suction plate 71 Elastic sheet (cushion material)
72 Protection sheet (protective material)
73 Adsorbing pipe 80 End material removal stage 81 End material adsorbing part 90 Panel moving arm 91 Panel adsorbing pad

Claims (7)

  1.  一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
     上記一対の基板のそれぞれの基板に対してスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板における基板の重畳方向においてずれた位置に形成するスクライブライン形成工程と、
     上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、一対の基板の端辺と、行方向に設けたスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
    を含むことを特徴とする液晶パネルの製造方法。
    A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
    A scribe line forming step for providing a scribe line for each of the pair of substrates, the scribe line extending in a row direction provided on one of the pair of substrates, and a row direction provided on the other substrate A scribe line forming step of forming a scribe line extending in a position shifted in a direction in which the substrates overlap in a pair of substrates,
    In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, the one substrate is provided in the row direction and the edges of the pair of substrates in a region different from the liquid crystal panel region. A load step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between the scribe lines;
    A method for producing a liquid crystal panel, comprising:
  2.  一対の基板の一部から、当該一対の基板の間に液晶層を挟んでなる液晶パネル領域を切り出して液晶パネルを製造する液晶パネルの製造方法であって、
     上記一対の基板のそれぞれの基板に対して行方向および列方向にスクライブラインを設けるスクライブライン形成工程であって、当該一対の基板のうちの一方の基板に設ける行方向に延びるスクライブラインと、他方の基板に設ける行方向に延びるスクライブラインとを、一対の基板の重畳方向において揃った位置に形成する箇所と、当該重畳方向においてずれた位置に形成する箇所とに設けるスクライブライン形成工程と、
     上記スクライブライン形成工程の後の上記一対の基板をクッション材に載置した状態で、上記一方の基板における上記液晶パネル領域とは異なる領域の、隣り合う行方向に設けたスクライブラインとスクライブラインとの間の位置において、点荷重を当該スクライブラインと平行に移動させながらかけることによって、上記一対の基板のそれぞれの上記スクライブラインにおいて基板を分断する荷重工程と、
    を含むことを特徴とする液晶パネルの製造方法。
    A liquid crystal panel manufacturing method for manufacturing a liquid crystal panel by cutting out a liquid crystal panel region in which a liquid crystal layer is sandwiched between the pair of substrates from a part of a pair of substrates,
    A scribe line forming step of providing scribe lines in the row direction and the column direction with respect to each of the pair of substrates, the scribe line extending in the row direction provided on one of the pair of substrates, and the other A scribe line extending step in the row direction provided on the substrate, a scribe line forming step provided at a position where the scribe line is formed at a position aligned in the overlapping direction of the pair of substrates and a position formed at a position shifted in the overlapping direction;
    In a state where the pair of substrates after the scribe line forming step is placed on a cushioning material, a scribe line and a scribe line provided in an adjacent row direction in a region different from the liquid crystal panel region in the one substrate A loading step of dividing the substrate at each of the scribe lines of the pair of substrates by applying a point load while moving in parallel with the scribe line at a position between
    A method for producing a liquid crystal panel, comprising:
  3.  上記荷重工程では、ローラーを用いて上記点荷重を当該スクライブラインと平行に移動させながらかけることを特徴とする請求項1または2に記載の液晶パネルの製造方法。 3. The method of manufacturing a liquid crystal panel according to claim 1, wherein, in the loading step, the point load is applied using a roller while moving in parallel with the scribe line.
  4.  上記荷重工程では、上記点荷重をかける上記一方の基板は、上記他方の基板よりも、上記位置が上記スクライブラインからより離れていることを特徴とする請求項1から3までの何れか1項に記載の液晶パネルの製造方法。 4. The method according to claim 1, wherein, in the loading step, the one substrate to which the point load is applied is located farther from the scribe line than the other substrate. 5. The manufacturing method of the liquid crystal panel as described in any one of.
  5.  上記荷重工程では、上記点荷重をかける位置は、上記他方の基板における上記スクライブラインの形成位置と、重畳方向において揃っていることを特徴とする請求項4に記載の液晶パネルの製造方法。 5. The method of manufacturing a liquid crystal panel according to claim 4, wherein, in the loading step, the position where the point load is applied is aligned with the formation position of the scribe line on the other substrate in the overlapping direction.
  6.  上記荷重工程では、上記スクライブライン形成工程の後の上記一対の基板を、吸着可能な上記クッション材に吸着させた状態で上記分断し、
     上記製造方法は、さらに、
     上記荷重工程の後に、上記一対の基板を上記クッション材から分離して、反転させて上記液晶パネル領域とは異なる上記領域のみを吸着できるように構成された別のクッション材に載置した後、当該別のクッション材によって上記液晶パネル領域とは異なる上記領域のみを吸着した状態で、上記液晶パネル領域を当該異なる領域から分離する液晶パネル分離工程を含むことを特徴とする請求項1から5までの何れか1項に記載の液晶パネルの製造方法。
    In the loading step, the pair of substrates after the scribe line forming step is divided in the state of being adsorbed to the adsorbable cushion material,
    The above manufacturing method further includes:
    After the loading step, after separating the pair of substrates from the cushion material, inverting and placing the substrate on another cushion material configured to be able to adsorb only the region different from the liquid crystal panel region, 6. A liquid crystal panel separation step of separating the liquid crystal panel region from the different region in a state where only the region different from the liquid crystal panel region is adsorbed by the another cushion material. The manufacturing method of the liquid crystal panel of any one of these.
  7.  上記荷重工程では、上記クッション材と上記一対の基板との間に保護材を介在させ、且つ、上記一方の基板の上にも保護材を介在させた状態で上記点荷重をかけることを特徴とする請求項1から6までの何れか1項に記載の液晶パネルの製造方法。 In the loading step, the point load is applied in a state where a protective material is interposed between the cushion material and the pair of substrates, and the protective material is also interposed on the one substrate. The method for producing a liquid crystal panel according to any one of claims 1 to 6.
PCT/JP2012/052876 2011-03-08 2012-02-08 Method for manufacturing liquid crystal panel WO2012120954A1 (en)

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JPH08194200A (en) * 1995-01-17 1996-07-30 Ookubo Seisakusho:Kk Method for parting liquid crystal cell and device therefor
JP2007156310A (en) * 2005-12-08 2007-06-21 Nec Lcd Technologies Ltd Method of manufacturing liquid crystal panel
WO2009154012A1 (en) * 2008-06-17 2009-12-23 三星ダイヤモンド工業株式会社 Method for processing substrate of mother board
JP2010090022A (en) * 2008-10-10 2010-04-22 Mitsuboshi Diamond Industrial Co Ltd Method for scribing bonded substrate
JP2010126391A (en) * 2008-11-27 2010-06-10 Seiko Epson Corp Apparatus for dividing substrate and method of dividing substrate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194200A (en) * 1995-01-17 1996-07-30 Ookubo Seisakusho:Kk Method for parting liquid crystal cell and device therefor
JP2007156310A (en) * 2005-12-08 2007-06-21 Nec Lcd Technologies Ltd Method of manufacturing liquid crystal panel
WO2009154012A1 (en) * 2008-06-17 2009-12-23 三星ダイヤモンド工業株式会社 Method for processing substrate of mother board
JP2010090022A (en) * 2008-10-10 2010-04-22 Mitsuboshi Diamond Industrial Co Ltd Method for scribing bonded substrate
JP2010126391A (en) * 2008-11-27 2010-06-10 Seiko Epson Corp Apparatus for dividing substrate and method of dividing substrate

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