WO2012110384A1 - Ensemble palier pour arbres à rotation rapide de pompes à vide - Google Patents

Ensemble palier pour arbres à rotation rapide de pompes à vide Download PDF

Info

Publication number
WO2012110384A1
WO2012110384A1 PCT/EP2012/052164 EP2012052164W WO2012110384A1 WO 2012110384 A1 WO2012110384 A1 WO 2012110384A1 EP 2012052164 W EP2012052164 W EP 2012052164W WO 2012110384 A1 WO2012110384 A1 WO 2012110384A1
Authority
WO
WIPO (PCT)
Prior art keywords
bearing
outer ring
arrangement according
pump housing
bearing arrangement
Prior art date
Application number
PCT/EP2012/052164
Other languages
German (de)
English (en)
Inventor
Hans Wischott
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to EP12704041.8A priority Critical patent/EP2676043A1/fr
Priority to CN2012800093202A priority patent/CN103370553A/zh
Priority to JP2013553873A priority patent/JP2014506981A/ja
Publication of WO2012110384A1 publication Critical patent/WO2012110384A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07—Fixing them on the shaft or housing with interposition of an element
    • F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular pump with a rotor element carried by a shaft.
  • the rotor element has a plurality of individual disk-shaped rotor elements, each of which comprises a plurality of rotor blades. Between these individual disc-shaped rotor elements stator elements are arranged, which also have wings.
  • the shaft is mounted in a pump housing surrounding the rotor element, wherein the bearing arrangement according to the invention is designed as described above.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Support Of The Bearing (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

L'invention concerne un ensemble palier pour arbres à rotation rapide de pompes à vide, en particulier de pompes turbomoléculaires, ledit ensemble comprenant deux éléments palier (12) logeant l'arbre (10). Au moins un des deux éléments palier (12) comporte un palier (16) muni d'une bague extérieure de palier (20) entourant le corps de roulement (22). Un élément d'amortissement (32) est agencé entre un corps de pompe (14) et la bague extérieure de palier (20). En outre, un élément de retenue (28) fixant l'élément ou les éléments d'amortissement (32) est relié au corps de pompe (14).
PCT/EP2012/052164 2011-02-16 2012-02-09 Ensemble palier pour arbres à rotation rapide de pompes à vide WO2012110384A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP12704041.8A EP2676043A1 (fr) 2011-02-16 2012-02-09 Ensemble palier pour arbres à rotation rapide de pompes à vide
CN2012800093202A CN103370553A (zh) 2011-02-16 2012-02-09 用于真空泵的快速转动的轴的轴承装置
JP2013553873A JP2014506981A (ja) 2011-02-16 2012-02-09 真空ポンプの軸を高速に回転するための軸受構造

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202011002794U DE202011002794U1 (de) 2011-02-16 2011-02-16 Lageranordnung für schnell drehende Wellen von Vakuumpumpen
DE202011002794.5 2011-02-16

Publications (1)

Publication Number Publication Date
WO2012110384A1 true WO2012110384A1 (fr) 2012-08-23

Family

ID=45607235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/052164 WO2012110384A1 (fr) 2011-02-16 2012-02-09 Ensemble palier pour arbres à rotation rapide de pompes à vide

Country Status (5)

Country Link
EP (1) EP2676043A1 (fr)
JP (1) JP2014506981A (fr)
CN (1) CN103370553A (fr)
DE (1) DE202011002794U1 (fr)
WO (1) WO2012110384A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014204608A1 (de) * 2014-03-12 2015-09-17 BSH Hausgeräte GmbH Staubsaugergebläse
CN114423943A (zh) * 2019-09-19 2022-04-29 大陆-特韦斯贸易合伙股份公司及两合公司 用于车辆的电动机驱动的组件

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014213505B4 (de) * 2014-07-11 2022-05-12 Robert Bosch Gmbh Elektrozylinder, dessen Spindellagerung eine Stützvorrichtung mit einem querbeweglichem Drehlager aufweist
JP6772721B2 (ja) * 2015-10-23 2020-10-21 株式会社島津製作所 真空ポンプ
JP7327132B2 (ja) * 2019-12-06 2023-08-16 株式会社島津製作所 真空ポンプ
EP4215769A1 (fr) * 2022-01-21 2023-07-26 Siemens Aktiengesellschaft Élément palier, machine et procédé de commande d'un élément palier

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1788231U (de) * 1959-02-27 1959-05-06 Zahnraederfabrik Renk A G Praezisions-waelz- bzw. gleitlager.
EP1122442A1 (fr) * 2000-01-31 2001-08-08 Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
GB2415019A (en) * 2004-06-07 2005-12-14 Boc Group Plc A supporting arrangement for a roller bearing
DE102007037792A1 (de) * 2007-08-10 2009-02-12 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
EP2088327A1 (fr) * 2008-02-11 2009-08-12 VARIAN S.p.A. Support de roulement à rouleaux

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR95734E (fr) * 1966-11-15 1971-06-04 Pitner Alfred Roulement a aiguilles sans jeu.
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
DE3537822A1 (de) * 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
JPH0525025U (ja) * 1991-09-12 1993-04-02 光洋精工株式会社 転がり軸受装置
JPH10274188A (ja) * 1997-03-31 1998-10-13 Shimadzu Corp ターボ分子ポンプ
GB0309830D0 (en) * 2003-04-29 2003-06-04 Boc Group Plc A vacuum pump
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
JP2007192376A (ja) * 2006-01-20 2007-08-02 Ntn Corp 転がり軸受装置
JP2008157365A (ja) * 2006-12-25 2008-07-10 Ntn Corp 航空機エンジン用転がり軸受
GB0701609D0 (en) * 2007-01-29 2007-03-07 Boc Group Plc Vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1788231U (de) * 1959-02-27 1959-05-06 Zahnraederfabrik Renk A G Praezisions-waelz- bzw. gleitlager.
EP1122442A1 (fr) * 2000-01-31 2001-08-08 Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
GB2415019A (en) * 2004-06-07 2005-12-14 Boc Group Plc A supporting arrangement for a roller bearing
DE102007037792A1 (de) * 2007-08-10 2009-02-12 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
EP2088327A1 (fr) * 2008-02-11 2009-08-12 VARIAN S.p.A. Support de roulement à rouleaux

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014204608A1 (de) * 2014-03-12 2015-09-17 BSH Hausgeräte GmbH Staubsaugergebläse
CN114423943A (zh) * 2019-09-19 2022-04-29 大陆-特韦斯贸易合伙股份公司及两合公司 用于车辆的电动机驱动的组件
CN114423943B (zh) * 2019-09-19 2023-09-19 大陆汽车科技有限公司 用于车辆的电动机驱动的组件

Also Published As

Publication number Publication date
JP2014506981A (ja) 2014-03-20
EP2676043A1 (fr) 2013-12-25
CN103370553A (zh) 2013-10-23
DE202011002794U1 (de) 2012-06-06

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