WO2012101882A1 - 放射線検出器およびそれを備える放射線画像取得装置 - Google Patents

放射線検出器およびそれを備える放射線画像取得装置 Download PDF

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Publication number
WO2012101882A1
WO2012101882A1 PCT/JP2011/074333 JP2011074333W WO2012101882A1 WO 2012101882 A1 WO2012101882 A1 WO 2012101882A1 JP 2011074333 W JP2011074333 W JP 2011074333W WO 2012101882 A1 WO2012101882 A1 WO 2012101882A1
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WO
WIPO (PCT)
Prior art keywords
radiation
wavelength conversion
detector
scintillation light
energy band
Prior art date
Application number
PCT/JP2011/074333
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English (en)
French (fr)
Japanese (ja)
Inventor
須山　敏康
元胤 杉山
Original Assignee
浜松ホトニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 浜松ホトニクス株式会社 filed Critical 浜松ホトニクス株式会社
Priority to CN201190001000.3U priority Critical patent/CN203630057U/zh
Publication of WO2012101882A1 publication Critical patent/WO2012101882A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

Definitions

  • the present invention relates to a radiation detector and a radiation image acquisition apparatus including the radiation detector.
  • the present invention has been made in view of such problems, and provides a radiation detector capable of acquiring a radiation detection image with less blur over a wide energy band and a radiation image acquisition apparatus including the radiation detector. With the goal.
  • a radiation detector includes a planar wavelength conversion member that generates scintillation light in response to incidence of radiation that has passed through an object, and radiation that has passed through the wavelength conversion member. And a shielding member that is disposed between the wavelength conversion member and the radiation detection element and prevents the scintillation light from entering the radiation detection element.
  • the radiation in the relatively low energy band among the radiation transmitted through the object is converted into scintillation light by the wavelength conversion member and arranged on the radiation incident surface side of the wavelength conversion member.
  • the scintillation light is detected by the detector, it can be detected as an image signal.
  • radiation in a relatively high energy band passes through the wavelength conversion member and the shielding member and is directly detected as an image signal by the radiation detection element.
  • the shielding member prevents the scintillation light from entering the radiation detection element, the S / N in the image signal in the high energy band is improved and the scintillation light is detected on the incident surface side of the wavelength conversion member.
  • a radiological image acquisition apparatus includes a radiation source that emits radiation, and a planar source that generates scintillation light in response to the incidence of radiation emitted from the radiation source and transmitted through the object.
  • Wavelength conversion member, imaging element for imaging scintillation light emitted from radiation incident surface of wavelength conversion member, radiation detection element for detecting radiation transmitted through wavelength conversion member, wavelength conversion member and radiation detection element And a shielding member that prevents scintillation light from entering the radiation detection element.
  • the radiation in the relatively low energy band out of the radiation transmitted through the object is converted into scintillation light by the wavelength conversion member and arranged on the radiation incident surface side of the wavelength conversion member.
  • the scintillation light is detected by the image pickup device thus made, and can be detected as an image signal.
  • radiation in a relatively high energy band passes through the wavelength conversion member and the shielding member and is directly detected as an image signal by the radiation detection element.
  • the shielding member prevents the scintillation light from entering the radiation detection element, the S / N in the image signal in the high energy band is improved and the scintillation light is detected on the incident surface side of the wavelength conversion member.
  • the low energy band radiographic image captured by the imaging element and the high energy band radiographic image detected by the radiation detection element are separately acquired, so a wide energy band can be obtained by adding the acquired images.
  • An image with a good S / N of the radiation detection signal can be obtained.
  • a favorable energy subtraction image can be acquired by subtracting the acquired images.
  • a radiation detection image with little blur can be acquired over a wide energy band.
  • FIG. 1 is a front view showing a schematic configuration of a radiation image acquisition apparatus 1 according to a preferred embodiment of the present invention.
  • FIG. 2 is an enlarged front view showing the radiation detector 3 of FIG. 4 is a front view showing an assembled state of the radiation detector 3 of FIG.
  • the radiation image acquisition apparatus 1 is emitted from a radiation source 2 that emits radiation such as X-rays toward an object A such as an electronic component such as a semiconductor device or a food product, and the radiation source 2.
  • a radiation detector 3 for detecting the radiation transmitted through the object A and a photodetector (imaging device) 4 for imaging the light converted by the radiation detector 3.
  • the radiation detector 3 is a direct conversion type detector that directly detects incident radiation and generates an image signal indicating a detection image of the object A, and the photodetector 4 converts based on the incident radiation.
  • Indirect conversion type detectors such as a CMOS sensor and a CCD sensor that detect the emitted light and generate an image signal.
  • the radiation detector 3 includes a direct conversion detector (radiation detection element) 5 that directly detects radiation emitted from the radiation source 2 and transmitted through the object A.
  • the direct conversion detector 5 include a semiconductor detector whose main material is a semiconductor material such as amorphous selenium, CdTe, silicon (Si), or Ge.
  • the direct conversion detector 5 internally converts the radiation that has passed through the object A and entered from the planar radiation detection surface 5a on the radiation source 2 side into charges, and detects the charges to detect the object A.
  • An image signal indicating a two-dimensional radiation transmission image is output.
  • the radiation detector 3 includes a wavelength conversion plate (wavelength conversion film / wavelength conversion member) 6 and a light shielding plate (light shielding film / shielding member) 7 disposed on the radiation detection surface 5 a side of the direct conversion detector 5.
  • the wavelength conversion plate 6 is a flat member disposed so as to cover the radiation detection surface 5a along the radiation detection surface 5a of the direct conversion detector 5, and responds to the incidence of radiation transmitted through the object A. To generate scintillation light.
  • Gd 2 O 2 S Tb
  • Gd 2 O 2 S Pr
  • CsI Tl
  • CdWO 4 CaWO 4
  • Gd 2 SiO 5 Ce
  • Lu 0.4 Gd 1.6 SiO 5 Examples include scintillators such as Bi 4 Ge 3 O 12 , Lu 2 SiO 5 : Ce, Y 2 SiO 5 , YAlO 3 : Ce, Y 2 O 2 S: Tb, YTaO 4 : Tm, etc. It is set to an appropriate value depending on the energy band of the radiation detected within a range of several mm.
  • the light shielding plate 7 is disposed between the wavelength conversion plate 6 and the direct conversion detector 5 so as to cover the radiation detection surface 5a, and the scintillation light generated by the wavelength conversion plate 6 is directly converted into the detector.
  • 5 is a flat plate-like member for preventing the light from being incident on 5.
  • the light shielding plate 7 is a member that has a light shielding property against light in the wavelength region of the scintillation light and has a property of transmitting radiation emitted from the radiation source 2.
  • the material of the light shielding member 7 include metal members such as beryllium, aluminum, copper, and titanium, non-metal members such as carbon (carbon) and silicon (silicon), polypropylene, polyimide, and polyethylene terephthalate. Examples thereof include a member in which a molecular organic substance has a light shielding property.
  • the wavelength conversion member 6 and the light shielding member 7 may be in the form of a film.
  • the light shielding member 7 and the wavelength conversion member 6 are assembled to the direct conversion type detector 5 as described above, the light shielding member 7 and the wavelength conversion member 6 are placed on the radiation detection surface 5a of the direct conversion type detector 5.
  • the light shielding member 7 and the wavelength conversion member 6 may be deposited in advance, and the light shielding member 7 and the wavelength conversion member 6 may be bonded on the radiation detection surface 5a.
  • holder members 8 and 9 for holding the light shielding member 7 and the wavelength conversion member 6 are prepared, and the light shielding member 7 and the wavelength conversion member 6 are prepared by the holder members 8 and 9. May be held on the radiation detection surface 5 a of the direct conversion detector 5.
  • the light shielding member 7 and the wavelength conversion member 6 may be directly fixed on the radiation detection surface 5 a of the conversion type detector 5 using a fixing member such as a bolt.
  • the optical axis of radiation is substantially perpendicular to the radiation detection surface 5a of the direct conversion detector 5 (perpendicular to the radiation detection surface 5a and the optical axis of radiation). And is disposed so as to face the center of the radiation detection surface 5a. Further, the optical detector 4 obliquely intersects the radiation incident surface 6a of the wavelength conversion plate 6 with the optical axis of the built-in imaging lens 4a so that the scintillation light emitted from the wavelength conversion plate 6 can be imaged.
  • the imaging lens 4 a condenses the scintillation light emitted from the radiation incident surface 6 a toward an imaging element (not shown) inside the photodetector 4.
  • the photodetector 4 is arranged so as to be out of the radiation emission region from the radiation source 2.
  • the radiation in the relatively low energy band among the radiation transmitted through the object A is converted into scintillation light by the wavelength conversion plate 6, and the radiation incident surface of the wavelength conversion plate 6.
  • the scintillation light is detected by the photodetector 4 arranged on the 6a side, it can be detected as an image signal indicating a radiation transmission image of the object A.
  • radiation in a relatively high energy band passes through the wavelength conversion plate 6 and the light shielding plate 7 and is directly detected by the direct conversion detector 5 as an image signal.
  • low-energy radiation incident on the direct conversion type detector is reduced, and as a result, pseudo signals can be reduced.
  • image blur in the low energy band image signal detected by the photodetector 4 can also be prevented.
  • a direct conversion type detector has a limit in energy sensitivity, and a detector having sensitivity in a high energy band may have low sensitivity in a low energy band. Therefore, the radiological image acquisition apparatus 1 can acquire a low-energy band radiographic image with high sensitivity by imaging the scintillation light by the indirect conversion method using the photodetector 4. As a result, a highly sensitive detection image can be acquired in a wide energy range including a high energy band and a low energy band.
  • the photodetector 4 is arranged so as to be out of the radiation emission region from the radiation source 2, the shadow of the photodetector 4 is not reflected in the radiation transmission image of the object A, and noise in the image signal. Therefore, it is possible to detect low-energy radiation. Furthermore, generation of noise including a direct conversion signal of radiation due to exposure inside the photodetector 4 is also prevented.
  • the target object is obtained by performing predetermined arithmetic processing on the image signal in the low energy band and the image signal in the high energy band acquired by the radiation image acquisition device 1 by one shot (single imaging or detection).
  • a contrast-enhanced energy difference (energy subtraction) and energy-separated radiation transmission image regarding A can be obtained.
  • the light shielding member 7 may be a reflection plate or a reflection film that reflects the scintillation light generated by the wavelength conversion plate 6.
  • a flat reflector 107 is interposed between the wavelength conversion plate 6 and the direct conversion detector 5 instead of the light shielding plate 7. You may do it.
  • the reflection plate 107 is disposed so as to cover the radiation detection surface 5a of the direct conversion detector 5, has a reflection surface 107a that reflects light in the wavelength region of the scintillation light on the wavelength conversion plate 6 side, and
  • the member has a property of transmitting the radiation emitted from the radiation source 2.
  • Examples of the material of the reflecting member 107 include a material in which a reflecting surface is formed by polishing the surface of a flat plate member such as aluminum, nickel, copper, silver, or gold.
  • a method for forming the reflection surface in addition to polishing, a method of forming a metal layer by vapor deposition, spraying, coating, or the like on the surface of a support that transmits radiation, or on the back surface of the radiation incident surface 6a of the wavelength conversion member Examples thereof include a method of forming a metal layer by vapor deposition, spraying, coating, or the like.
  • the light shielding plate 7 and the reflection plate 107 may be provided with a filtering function that further blocks low energy band components of the radiation transmitted through the object A.
  • a filtering function that further blocks low energy band components of the radiation transmitted through the object A.
  • the material of the light shielding plate 7 and the reflection plate 107 having such a filtering function include copper, aluminum, carbon, silicon (silicon), nickel, silver, gold, stainless steel (iron), and titanium.
  • the light detector 4 be arranged so as to be away from the radiation emission region from the radiation source 2, and the radiation source 2 is arranged so that the radiation detection surface 5 a of the direct conversion type detector 5 is shown in FIG. 6.
  • the optical detector 4 has the optical axis of the imaging lens 4a substantially perpendicular to the radiation incident surface 6a of the wavelength conversion plate 6, and the radiation incident surface 6a. You may arrange
  • a reflecting plate 11 that reflects the scintillation light generated from the wavelength conversion plate 6 is disposed on the optical axis of the radiation emitted from the radiation source 2, and the imaging lens 4 a of the photodetector 4 is provided.
  • the photodetector 4 may be arranged so that the scintillation light reflected by the reflector 11 can be collected. Even in this case, the photodetector 4 can be separated from the radiation emission region.
  • the shielding member is preferably a planar member having a light shielding property against scintillation light. If such a shielding member is provided, S / N can be reliably improved over a wide energy band.
  • the shielding member is a planar reflecting member that reflects scintillation light.
  • the S / N ratio in the image signal in the high energy band can be improved, and the detection efficiency of the image signal in the low energy band can be improved.
  • the shielding member blocks a low energy band of radiation.
  • the present invention uses a radiation detector and a radiation image acquisition apparatus including the radiation detector, and makes it possible to acquire a radiation detection image with less blur over a wide energy band.
  • SYMBOLS 1 Radiation image acquisition apparatus, 2 ... Radiation source, 4 ... Photo detector (imaging element), 5 ... Direct conversion type detector (radiation detection element), 6 ... Wavelength conversion plate, wavelength conversion film (wavelength conversion member), 7: light-shielding plate, light-shielding film (shielding member), 107: reflector, reflective film (shielding member).

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PCT/JP2011/074333 2011-01-25 2011-10-21 放射線検出器およびそれを備える放射線画像取得装置 WO2012101882A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201190001000.3U CN203630057U (zh) 2011-01-25 2011-10-21 放射线检测器以及具备该检测器的放射线图像取得装置

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Application Number Priority Date Filing Date Title
JP2011-013191 2011-01-25
JP2011013191A JP5784915B2 (ja) 2011-01-25 2011-01-25 放射線検出器およびそれを備える放射線画像取得装置

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CN (1) CN203630057U (enrdf_load_stackoverflow)
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Publication number Priority date Publication date Assignee Title
JP5894657B1 (ja) * 2014-11-14 2016-03-30 株式会社イシダ Ｘ線検査装置
JP7106323B2 (ja) * 2018-03-29 2022-07-26 住友化学株式会社 異物検査装置および異物検査方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10153662A (ja) * 1996-11-21 1998-06-09 Mitsubishi Electric Corp 深部線量測定装置とその検出器
JP2000510729A (ja) * 1996-05-13 2000-08-22 ユニバーシテイ・オブ・マサチユセツツ・メデイカル・センター 定量的放射線撮像法のためのシステム
JP2005127899A (ja) * 2003-10-24 2005-05-19 Hitachi Medical Corp 放射線検出器及びそれを用いた放射線画像診断装置

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Publication number Priority date Publication date Assignee Title
JP3513884B2 (ja) * 1993-09-20 2004-03-31 富士写真フイルム株式会社 放射線検出器
JP4886245B2 (ja) * 2005-08-26 2012-02-29 株式会社東芝 放射線検出器
JP2010056397A (ja) * 2008-08-29 2010-03-11 Fujifilm Corp Ｘ線検出素子
JP2010056396A (ja) * 2008-08-29 2010-03-11 Fujifilm Corp Ｘ線検出素子
JP2010080636A (ja) * 2008-09-25 2010-04-08 Fujifilm Corp 放射線検出素子
JP2010253049A (ja) * 2009-04-24 2010-11-11 Toshiba Corp 放射線治療装置および放射線透視装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000510729A (ja) * 1996-05-13 2000-08-22 ユニバーシテイ・オブ・マサチユセツツ・メデイカル・センター 定量的放射線撮像法のためのシステム
JPH10153662A (ja) * 1996-11-21 1998-06-09 Mitsubishi Electric Corp 深部線量測定装置とその検出器
JP2005127899A (ja) * 2003-10-24 2005-05-19 Hitachi Medical Corp 放射線検出器及びそれを用いた放射線画像診断装置

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JP5784915B2 (ja) 2015-09-24
CN203630057U (zh) 2014-06-04

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