WO2012045202A1 - Discrete component backward traceability and semiconductor device forward traceability - Google Patents

Discrete component backward traceability and semiconductor device forward traceability Download PDF

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Publication number
WO2012045202A1
WO2012045202A1 PCT/CN2010/077568 CN2010077568W WO2012045202A1 WO 2012045202 A1 WO2012045202 A1 WO 2012045202A1 CN 2010077568 W CN2010077568 W CN 2010077568W WO 2012045202 A1 WO2012045202 A1 WO 2012045202A1
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WO
WIPO (PCT)
Prior art keywords
semiconductor device
semiconductor
die
substrate
identifier
Prior art date
Application number
PCT/CN2010/077568
Other languages
French (fr)
Inventor
Didier Chavet
Cheeman Yu
Hem Takiar
Frank Lu
Chih-Chiang Tung
Jiaming Shi
Original Assignee
Sandisk Semiconductor (Shanghai) Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP10858032.5A priority Critical patent/EP2625708A4/en
Application filed by Sandisk Semiconductor (Shanghai) Co., Ltd. filed Critical Sandisk Semiconductor (Shanghai) Co., Ltd.
Priority to PCT/CN2010/077568 priority patent/WO2012045202A1/en
Priority to JP2013530524A priority patent/JP2013545266A/en
Priority to US13/634,068 priority patent/US20130006564A1/en
Priority to KR1020127009314A priority patent/KR101575831B1/en
Priority to KR1020167006572A priority patent/KR101700904B1/en
Priority to BR112012004524A priority patent/BR112012004524A2/en
Priority to CN201080040554.4A priority patent/CN102640253B/en
Priority to KR1020147024433A priority patent/KR20140116560A/en
Priority to TW103126254A priority patent/TWI570874B/en
Priority to TW100135930A priority patent/TWI459533B/en
Publication of WO2012045202A1 publication Critical patent/WO2012045202A1/en
Priority to US15/053,575 priority patent/US10229886B2/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67294Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54406Marks applied to semiconductor devices or parts comprising alphanumeric information
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54413Marks applied to semiconductor devices or parts comprising digital information, e.g. bar codes, data matrix
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54433Marks applied to semiconductor devices or parts containing identification or tracking information
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present technology relates to fabrication of semiconductor devices.
  • Non-volatile semiconductor memory devices such as flash memory storage cards
  • flash memory storage cards are becoming widely used to meet the ever-growing demands on digital information storage and exchange.
  • Their portability, versatility and rugged design, along with their high reliability and large capacity, have made such memory devices ideal for use in a wide variety of electronic devices, including for example digital cameras, digital music players, video game consoles, PDAs and cellular telephones.
  • FIGs. 1 and 2 respectively show a flowchart and schematic representation of steps in the production of semiconductor device memory cards.
  • Manufacturing execution systems are known which receive information in real time from process tools and fab personnel to manage and, to an extent, track the production of memory cards.
  • An MES maintains a database of the fabrication process which allows fab personnel to track semiconductor devices during the production process and also may be used to trace the source of problems should a defect be found in one or more assembled semiconductor devices.
  • MES platform One example of a known MES platform is that from Camstar Inc., Charlotte, North Carolina, USA. Camstar Inc. provides an MES platform under the name Camstar Manufacturing, and a quality management system under the name Camstar Quality.
  • Other known platforms for managing the flow in a semiconductor memory card plant include Tango production monitoring suite by CyberDaemons Inc. of Hsinchu, Taiwan and an assembly line production (ALPS) manager by Kinesys Software Inc., Forest Grove, Pennsylvania, USA.
  • memory die wafer lots 70 and controller die lot 72 are received in a memory card fabrication plant from wafer piece manufacturers.
  • the wafers arrive with the integrated circuits defined thereon by the wafer piece manufacturers so that each memory die wafer piece includes a plurality of memory die, and each controller die wafer piece includes a plurality of controller die.
  • a semiconductor device is being fabricated including a pair of memory die.
  • two memory die wafer lots 70a and 70b are shown. It is also known to form semiconductor devices with one or more than two memory die.
  • the wafer lot 70a used for the bottom memory die may be referred to as the wafer mother lot, while wafer lot(s) used for memory die above the bottom die may be referred to as the wafer sublots.
  • Substrate lots 74 are also received in the memory card fabrication plant from a substrate manufacturer.
  • the substrates in a substrate lot 74 may for example be a printed circuit board (PCB), leadframe or tape automated bonding (TAB) tape.
  • PCB printed circuit board
  • TAB tape automated bonding
  • each wafer piece may have a protective tape applied to its active surface (the surface including the integrated circuits) and is then mounted to a chuck (not shown), active side down in step 20. Thereafter, a backgrind step 22 may be performed on the each wafer piece to thin the wafer down to a desired thickness. After backgrind step 22, the wafer pieces may be transferred to another tool where they are diced, for example by saw or laser, in step 24 so that they may be picked and placed onto the substrate.
  • passive components may be mounted on the substrate in a surface mounting process.
  • the solder paste may be applied in step 30.
  • the passive components also referred to herein as passives, may be mounted in step 32, and the solder may reflowed/cleaned in a step 34.
  • the passives may include for example resistors and capacitors.
  • the memory die and a controller die may be mounted on a substrate at a die attach tool 76.
  • the tool 76 makes use of a known good die (KGD) map 78 which defines good and bad die for each wafer piece used.
  • KGD known good die
  • each die on each wafer piece in wafer lots 70, 72 may be operationally tested and given a rating such as 0,0 (flawless), A, A (good) or 1,1 (bad).
  • the KGD map 78 is used by the die attach tool so that bad die on a wafer piece are ignored.
  • memory die and typically a controller die are mounted on a substrate to form a semiconductor device.
  • the term “device” refers to an assembly of a substrate, one or more semiconductor die on the substrate and, possibly, passive components on the substrate.
  • the respective die, substrate and/or passives within a device may be referred to herein as "discrete components" of the semiconductor device.
  • the resulting device may then be wire bonded in step 48.
  • the wire bonding step 48 is a time consuming process. As such, the device assembly lots may be split into a plurality of device assembly sublots so that wire bonding may be performed by a plurality of wire bonding tools 80 simultaneously (the number of wire bonding tools in Fig. 2 is by way of example only).
  • die bond pads on each of the die mounted to a substrate may be electrically coupled to contact pads on the substrate.
  • the devices in the respective device assembly sublots may be encapsulated in a molding compound (step 50) in one or more tools 82, laser marked with an identifier (step 54) in one or more tools 84, and then singulated (step 56) in one or more tools 86.
  • Fig. 2 shows the device assembly sublots remaining separated through each of these steps. However, one or more of the device assembly sublots may be reassembled into the device assembly lot following any of the steps 48 through 56.
  • the laser marking step 54 may be significant in that it allows information regarding a device assembly lot or sublot to be uploaded and tracked by the MES platform managing flow within the card fabrication plant.
  • Prior art Fig. 3 shows an example of a conventional laser mark placed on the devices in a device assembly lot or sublot.
  • the laser mark may include for example a logo and alphanumeric characters.
  • the alphanumeric characters may include a plant code identifying the plant where the semiconductor device was made, a date code indicating when the semiconductor device was made, an MES lot or sublot number assigned to each device assembly lot or sublot, and a device ID code identifying the type of semiconductor package the device is.
  • the information from the laser mark for a device assembly lot or sublot is assigned and stored by the MES, and used for device tracking and traceability.
  • MES platform does not uniquely identify specific devices. At most, the MES assembly sublot number is unique to an entire device assembly sublot that went through a particular set of tools. Each particular device in such an MES assembly sublot will have the same identification code on its surface and be identified by the same identification code stored in the MES platform. Second, in part because of the generic marking of entire assembly sublots, there is no specific discrete component information directly associated with a specific device. That is, there is no direct link between a device's identification code and the semiconductor die, substrate and/or passive components used in that device. [0012] As one consequence, when a problem with a device is detected during or after fabrication, conventional systems have limited ability find the source of the problem.
  • prior art systems may allow identification of an MES assembly sublot from which the problem device came. From the knowledge of the MES assembly sublot, it may be possible to determine what processes the problem device went through. From this, further research could reveal a specific wafer lot, and possibly reveal where a problem occurred. However, such research is time consuming and does not provide any specific identification or information on the discrete components from which the semiconductor device was formed.
  • semiconductor devices 90 may be inspected (step 60) and then put through one or more tests in step 62. These tests may include for example burn-in and memory read -write testing at high and low temperatures. Typically, semiconductor devices 90 from a number of device assembly lots are combined in the testing step. It is known to perform tests on 30,000 to 50,000 devices 90 from a plurality of device assembly lots. There is an N:l consolidation of device assembly lots into a single device test lot, where N may for example be 25 device assembly lots.
  • the devices from respective assembly lots are reshuffled into different bins, depending on how the devices performed in the testing operations.
  • Devices classified in bins 5-7 failed the testing operation for one reason or another, and are subjected to a reclaim step 64 where they are retested.
  • the reclaim operations will vary depending on whether a device was classified in bin 5, bin 6 or bin 7.
  • a device may go through multiple reclaim processes.
  • the card test in step 66 may be similar to the memory test in step 62, however content may be written to each device and its capabilities tested. Although not shown in Fig. 2, the card test may have a similar binning operation, where devices classified in certain bins are submitted for retest in a reclaim operation in step 68. Devices 90 which pass the card test may undergo some final inspection and processing steps (not shown) and then shipped.
  • the assembly steps of attaching die to a substrate through to singulating the devices are referred to as a 54-81 process.
  • the memory test is referred to as a 54-62 process.
  • the card test is referred to as a 54-99 process.
  • FIGURE 1 is a prior art flowchart showing an assembly process of a semiconductor device memory card.
  • FIGURE 2 is a prior art schematic representation of an assembly process of a semiconductor device memory card.
  • FIGURE 3 is a prior art illustration of a semiconductor device including an MES marking.
  • FIGURE 4 is a flowchart of an embodiment of the present technology for processing a substrate strip.
  • FIGURE 5 is a flowchart of an embodiment of the present technology for processing a semiconductor wafer piece.
  • FIGURE 6 is a flowchart of an embodiment of the present technology for forming a semiconductor device.
  • FIGURE 7 is an illustration of a substrate including a marking according to an embodiment of the present technology.
  • FIGURE 8 is an illustration of a KGD map used in embodiments of the present technology.
  • FIGURE 9 is an illustration of a semiconductor device including a unique identifier.
  • FIGURE 10 is a table including information on a semiconductor device and its discrete components according to an embodiment of the present technology.
  • FIGURE 11 is a flowchart of an embodiment of the present technology for testing a semiconductor device.
  • FIGURE 12 is a table including information on a semiconductor device and its processes according to an embodiment of the present technology.
  • FIGURE 13 is a block diagram of a sample server for implementing aspects of the present technology.
  • Figs. 4 through 13 relate to a system enabling backward traceability of a semiconductor device fabrication process to a single semiconductor die or other discrete component, and forward traceability of individual devices and components through memory and card tests. It is understood that the present technology may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the invention to those skilled in the art. Indeed, the present system is intended to cover alternatives, modifications and equivalents of these embodiments, which are included within the scope and spirit of the present system as defined by the appended claims.
  • the present technology provides backward and forward traceability by a methodology which uniquely identifies each semiconductor device, and which provides an association between the uniquely identified semiconductor device and the discrete components (die, substrate and/or passives) that are used in that device.
  • the unique identification and marking of a semiconductor device enables the semiconductor device, and the discrete components within that device, to be tracked and traced through each process and test in the production of a memory card from that device.
  • the information relating to a semiconductor device are stored in a database, referred to herein as an MES database.
  • the MES database stores backward and forward traceability data in addition to other MES data.
  • storage of data relating to card fabrication may be distributed across more than one database in a variety of ways.
  • a traceability database 306a for storing all backward and forward traceability data, generated as explained below
  • a separate MES database 306b for storing other MES-related data.
  • MES database which stores backward and forward traceability data as well as other MES data.
  • information regarding discrete components may be stored in the MES database prior to their assembly into a semiconductor device.
  • this information for the discrete components may be associated in the MES database with the device.
  • information regarding the discrete components may be identified and stored.
  • the fabrication process may begin by defining a work order for production of a given number and type of memory card. This may occur for example days or weeks before the actual fabrication begins. Each memory card is made from a particular type of substrate, memory die, controller die and other discrete components.
  • the discrete components that will be used for the work order are also specified and stored in the MES database.
  • the component manufacturer, date and place of manufacture and a lot number assigned to that component lot are scanned upon receipt (or at some point prior to use in a work order) and uploaded to the MES database.
  • the specific lot numbers of the discrete components that will be used for that work order are also specified.
  • a substrate lot is scanned in a step 100 to verify it is a proper substrate lot for that work order.
  • the individual substrate strips from that substrate lot may then be processed.
  • a variety of different substrates may be used with the present technology, including for example a PCB, a leadframe and/or a TAB tape.
  • the example of Fig. 7 shows a strip 200 of leadframe substrates 204 (one of which is marked in Fig. 7). Although any of a wide variety of substrates may be used, the strip 200 shown in Fig. 7 may for example be for MicroSD memory cards having eighty substrates 204 in a 4 x 20 array.
  • strip 200 shown is by way of example only and strip 200 may come in other shapes, sizes and configurations. While a strip of substrates is described hereinafter, it is understood that the individual substrates may be other substrates and may alternatively be formed of a panel, roll or other grouping of substrates.
  • each strip 200 (or other grouping of substrates 204) may be laser marked with its substrate lot number and a specific ID unique to that strip 200.
  • the MES system includes a control program which receives data and feedback from various tools and components within the card fabrication plant and stores the information in the MES database. Two components providing data and feedback to the MES control program are laser mark stations 318 (Fig. 13) and scanners 320.
  • the laser mark station 318 associated with substrate processing may generate and assign each substrate strip 200 a unique ID.
  • the laser mark station may assign successive strip identifiers as successive substrate strips 200 are processed.
  • the laser mark station 318 then laser marks each substrate with the known substrate lot number and the substrate strip ID that it generated. It is understood that the unique strip identifier for each substrate strip 200 may be generated by another component within the MES system.
  • the component may then communicate the unique substrate strip ID to the laser mark station, which marks each substrate strip 200 with the substrate lot and substrate strip identifier.
  • Each instance of a substrate strip 200 may include a laser marking 202 including a substrate lot number (generic to all strips in that substrate lot) and a substrate strip identifier that is unique to that specific strip.
  • the substrate lot number and unique strip identifier are shown in Fig. 7 as a pair of two digit alphanumeric characters. It is understood that the substrate lot number and/or the unique strip identifier may be represented with more digits, or in different ways, than is shown in Fig. 7 in further embodiments.
  • each digit of a two digit alphanumeric identifier may have 33 possible values.
  • the 33 possible values come from 10 numeric values (0-9) and 23 letters of the alphabet (A-Z, minus the letters B, O and I, as these may be confused with 8, 0 and 1, respectively).
  • a digit may be any of 33 possible characters for each digit.
  • the laser marking 202 may further include a machine-readable code having the substrate lot number and unique strip identifier information in a form that is readable by a computer scanner.
  • the machine-readable code shown in Fig. 7 is a two-dimensional matrix code, but it is understood that the computer readable code may be a one- dimensional bar code or any other marking in which the substrate lot number and unique strip identifier may be encoded in such a way so as to be understood by a computing device.
  • a computer can read alphanumeric text.
  • the separate matrix or other code in addition to the text may be omitted.
  • the markings of step 102 may be made by laser or other known printing operation. Instead of marking, adhesive labels including the above-described information may be affixed to each substrate strip 200.
  • Fig. 7 shows the laser marking 202 in the upper left hand corner of substrate strip 200. It is understood that the laser marking 202 may be provided at other locations on substrate strip 200 in further embodiments.
  • the laser mark station 318 which generated the unique strip ID may upload the unique ID assigned to each substrate strip to the MES database.
  • a separate record may be created in the MES database for each substrate strip 200.
  • Each record may include the substrate lot, substrate lot history, unique strip ID and a unique substrate ID of each substrate on a strip 200.
  • Substrate lot history may include information such as who made the substrate lot, and when and where it was made. Historical information may include other information in further embodiments.
  • the substrate lot ID and history may be uploaded to the MES database at a time other than when received within the card fabrication plant, such as for example when a substrate lot is selected for use.
  • the step 104 further includes storing a unique ID for each instance of a substrate 204 on the strip
  • control program or other aspect of the MES system may generate unique IDs for each substrate 204 on a strip 200 using some pre-defined convention of identifying individual substrates based on their position on a substrate strip 200.
  • the MES control program may adopt a convention where the rows are assigned a letter A-D starting from the bottom and the columns are assigned a number 1-20 starting from the left.
  • the substrate in row 2, column 4 may be identified as B-4.
  • a convention may be defined which numbers each position consecutively, for example the first row from the bottom are number 1 through 20, the second row from the bottom are numbered 21 -40, etc. It is understood that each substrate may be assigned a unique identifier by other conventions in further embodiments.
  • different substrate strips may have different shapes and numbers of substrates in further examples.
  • the substrate strip 200 may be processed prior to connection of the passive components, including for example solder application, cleaning and inspection.
  • any such process steps may be stored by the MES control program in the MES database in association with the substrate strip 200 and/or specific substrates 204. Additional information relating to the processes may also be stored in association with the strip 200 and/or specific substrate 204, including for example when and where the processes were performed, the specific tool that was used, a maintenance record for that tool and/or fab personnel associated with the process.
  • each wafer piece in each wafer lot may be identified.
  • a unique ID may be marked on each wafer piece, either by the wafer manufacturer or within the card fabrication plant, for example using a marking process as described above with respect to the substrate strips.
  • a wafer piece may be uniquely identified by its vertical position relative to other wafer pieces within a wafer sublot (e.g., the ninth wafer piece from the top of the sublot).
  • a record may be created in the MES database for each die on a wafer, including the wafer sublot, wafer lot history, wafer piece ID for each wafer piece in the sublot and a die ID for each die on a wafer piece. This occurs for each wafer sublot used in a device fabrication process, including the one or more memory die wafer sublots/mother lot and the controller die wafer lot.
  • an MES wafer lot ID for that lot, as well as a history for that lot may be scanned and uploaded to the MES database.
  • Wafer lot history may include information such as who made the wafer lot, and when and where it was made.
  • the MES wafer lot ID and history may be uploaded to the MES database at a time other than when received within the card fabrication plant, such as for example when a wafer sublot is selected for use.
  • the step 112 further includes storing a wafer piece ID and die ID. As described in step 110, the MES control program identifies each wafer piece, either with a unique ID or by its position within an identified wafer sublot. The MES control program may also store the wafer piece identifier at the time it is generated.
  • the MES control program may store these using a predefined convention of describing the positions of all die on a wafer piece in terms of (x, y) coordinates.
  • Spherical coordinates (r, ⁇ ) may alternatively be used to define the positions of die on a wafer piece.
  • Other methods of identifying specific die on a wafer piece are contemplated, including by position on the wafer piece or a unique ID assigned to each die on a wafer piece.
  • a wafer piece may be processed, including for example backgrind, dicing, inspection and cleaning.
  • any such process steps may be stored by the MES control program in the MES database in association with the wafer piece and/or die on the wafer piece. Additional information relating to the processes may also be stored in association with the wafer piece and/or die on the wafer piece, including for example when and where the processes were performed, the specific tool or tools that were used, a maintenance record for the tool(s) and/or fab personnel associated with the processes.
  • Figs. 4 and 5 enable maximum resolution as to backward traceability of the discrete components used within a semiconductor device, as explained below.
  • one or more of the discrete component identification and storage steps described above may be omitted.
  • at least some of the steps described above with respect to Figs. 4 and 5 may be performed later in the fabrication process, such as for example when the discrete components are assembled together into a semiconductor device, as will now be described with respect to the flowchart of Fig. 6.
  • step 120 the next substrate 204 to receive passives and die on a strip 200 is selected. If not already done, the substrate lot number, strip ID and position of this substrate 204 are stored in the MES database by the MES control program.
  • step 122 a unique identifier for each passive component to be mounted on the selected substrate 204 may be stored in the MES database in association with the selected substrate 204.
  • the passives including for example resistors and/or capacitors, may have their own unique identifier, which gets scanned or otherwise entered by fab personnel into the MES database in association with the substrate 204 on which they are to be mounted.
  • the passive components may then be surface mounted on the selected substrate 204 and reflowed in step 124.
  • step 126 die are selected for mounting on the substrate 204 based on a KGD map.
  • a representation of a KGD map is shown in Fig. 8 for a single wafer piece from an MES wafer sublot.
  • semiconductor devices may include different numbers of semiconductor die, and there may be a separate wafer sublot used for each die to be mounted in a die stack on the substrate 204.
  • KGD map of each wafer piece in each MES wafer sublot which KGD maps are provided by the wafer piece manufacturer based on testing done at the manufacturer.
  • Fig. 8 shows an example of a wafer piece 206 having a plurality of semiconductor die 208 (one of which is numbered in Fig. 8).
  • the goodness of a die may be represented in the KGD map by alphanumeric codes associated with each die 208 on wafer piece 206.
  • 0,0 may represent a die with no detected flaws
  • A may be a good die with minimal flaws
  • 1 ,1 may represent a bad die which should not be selected for mounting on any of the substrates 204. It is understood that any of a variety of other schemes may be used by a KGD map to represent the goodness of a die on a particular wafer piece 204.
  • the die selected in step 126 from wafer pieces in different MES wafer lots may be selected based on a number of different criteria.
  • flawless die (0,0) from wafer pieces in the respective MES wafer sublots may be first selected and attached together on substrates 204. Substrates having only flawless die are likely to result in the highest quality semiconductor devices. As explained below, one aspect of the present technology allows identification and segregation of semiconductor devices having the highest quality semiconductor die. These devices may then be shipped to OEM manufacturers or others for a premium. Selection of only flawless die for mounting in a single semiconductor device may optimize the chance of that device being of the highest quality. If the flawless die from one or more wafer pieces in respective sublots have been exhausted, then the next best die (A,A) may be used. It is understood that the die selected for attachment within a given semiconductor device may be selected based on a variety of other criteria in further embodiments.
  • the MES wafer sublot, wafer piece ID and selected die position on the wafer piece may be stored in association with the substrate 204 on which the selected die are to be mounted. This may be done for each die from the different sublots to be mounted on the substrate. After all die to be mounted on a given substrate have been identified and stored in association with that substrate in step 128, the die may be mounted on the substrate in step 130. The order of steps 128 and 130 may be reversed in alternative embodiments. The die may be mounted to the substrate for example via a die attach adhesive in a known adhesive or eutectic die bond process.
  • that assembly may be considered a semiconductor device (although further processing steps are performed before it is a finished package as explained below). At this point, it is possible to assign each semiconductor device a unique device ID. However, as explained hereinafter, assignment of a unique device ID may alternatively be performed later in the process, for example in relation to the laser mark step 142.
  • step 136 semiconductor devices formed on substrates may go through a wire bond process for wire bonding die bond pads on each device semiconductor die 208 to contact pads formed on the substrate 204.
  • this process is relatively time consuming.
  • an MES assembly lot may be subdivided into MES assembly sublots.
  • the information for each device may be updated in the MES database to reflect the particular assembly sublot and process tool to which each device is transferred.
  • the devices in the respective assembly sublots may be encapsulated in a molding compound in step 138, assigned a unique device ID in step 140, laser marked with an identifier in step 142 (steps 140 and 142 are explained in greater detail below), singulated into separate semiconductor devices in step 144 and inspected in step 148.
  • the respective sublots may stay separated for steps 138, 140, 142, 144 and/or 148. Alternatively, at one of these steps, one or some of the assembly sublots may recombine, or all assembly sublots may recombine into the original assembly lot.
  • the step 140 of assigning a unique device ID to each device, and the step 142 of laser marking that unique device ID on a device may both be performed by a laser marking station 318 associated with device marking.
  • Fig. 9 shows a top view semiconductor device 210 after encapsulation, singulation and laser mark.
  • the laser mark may include a logo 212 and an alphanumeric representation 214 of the unique ID associated with the device.
  • the logo 212 may be omitted in embodiments.
  • the device unique ID representation 214 may have the format of:
  • Y represents the year's last digit
  • WW represents the week # within the year
  • D represents the day within the week (1 to 7);
  • M represents the card fabrication plant
  • LL represents an alphanumeric 2-digit ID to designate each MES assembly sub lot
  • XXX represents an alphanumeric 3 -digit unique ID to distinguish each device made with the same date, location and MES assembly sublot information.
  • the first seven digits in the unique ID representation 214 are known by the MES system for each device.
  • the last three digits may be generated and assigned for example by the laser marking station as it marks each device.
  • the laser mark station may assign successive device identifiers as successive devices 210 are processed.
  • the unique ten digit ID may then be stored by the MES control program in the MES database as a means of uniquely identifying the specific device 210 in the database.
  • the unique device identifier for each device 210 may be generated by another component within the MES system. The component may then communicate the unique device ID to the laser mark station, which marks each device 210 with the ten digit device identifier.
  • any of the digits such as for example the sublot number LL and the assigned digits XXX, may have 33 possible values as described above (10 numeric values and 23 letters of the alphabet (A-Z, minus the letters B, O and I)).
  • the sublot number LL may uniquely identify any of 1089 sublots
  • the assigned three digit code may uniquely identify any of almost 36,000 devices within a given sublot. It is understood that a given digit may represent more or less values in further embodiments.
  • the unique ID representation 214 may be included within the unique ID representation 214 in further embodiments, with the provision that the representation uniquely identify the semiconductor device 210 bearing the representation.
  • the representation uniquely identify the semiconductor device 210 bearing the representation.
  • the date information may be represented in different ways in the representation 214.
  • the marking further includes a code 218 having the same information as the alphanumeric representation 214, but in machine-readable form.
  • the machine-readable code 218 may be a two-dimensional matrix code, but it is understood that the computer readable code may be a one-dimensional bar code or any other marking in which the unique device ID may be encoded in such a way so as to be understood by a computing device.
  • the separate matrix or other code in addition to the text may be omitted.
  • the logo 212, representation 214 and/or code 218 may be made by laser or other known printing operation. Instead of marking, adhesive labels including the above- described information may be affixed to each semiconductor device 210.
  • the locations of the logo 212, representation 214 and code 218 shown in Fig. 10 are by way of example only, and the location of each may be moved to different locations.
  • One or more of the logo 212, representation 214 and code 218 may be placed on a back surface of the semiconductor device 210 in further embodiments.
  • the code 218 may be omitted where a computing device is able to read and comprehend the alphanumeric representation. Alternatively, though more time consuming, the code 218 may be omitted and fab personnel can input the alphanumeric representation via a keyboard or other input device associated with the MES control program. Similarly, while it is useful to allow people to read the alphanumeric representation 214, it may be omitted, in which event, people may identify the unique ID once the code 218 is scanned.
  • the laser mark station may then upload the three digit code so that the MES system then has a unique ten digit identifier for each device.
  • the unique ten digit identifier may then be stored in the MES database to allow unique identification of each specific device in the process.
  • the MES database may have a table 220 with all of the data it needs for backward traceability of all relevant information relating to all processed devices. This information may include for example the specific discrete components (as opposed to a wafer lot, substrate lot or passive component lot) that are included in each device. As shown in Fig. 10, the MES database may store the unique ID for a device, together with the following information associated with that unique device ID:
  • the above information regarding the discrete components may be stored along with the information shown in Fig. 10, or it may be cross-referenced in the MES database with the information shown in Fig. 10. With the above information, the MES database can provide complete backward traceability with respect to all of the discrete components within a given semiconductor device. This information may be accessed by knowing a device's unique ID, which is printed right on the device as explained above (both in human-readable and machine-readable formats). The information shown in Fig. 10 and described above is not intended as an exhaustive listing of the information which may be stored in the MES database regarding a semiconductor device and its discrete components. Additional and/or alternative information may also be stored in further embodiments in association with a unique device ID.
  • each device 210 In addition to backward traceability, uniquely identifying each device 210 also enables forward traceability.
  • Each process tool (or personnel associated with each such process tool) may have a scanner 320 in communication with the MES control program.
  • the scanner at a given tool scans the matrix code 218 of a device 210, and the MES control program updates the MES database to indicate that the device 210 is undergoing the process or test at that tool.
  • the scanner may scan one device 210 at a time, or the scanner could potentially scan the code 218 of a number of devices 210 at one time.
  • the MES control program may record the process step, as well as information about the process step, in association with the device's unique ID number.
  • This recorded information may include for example a date and time the device underwent a process, personnel associated with the tool performing the process, a maintenance record of the process tool, and a wide variety of other information.
  • the unique device ID together with the scanning of that ID for all processes the device undergoes, provides complete forward traceability of the device 210 as it moves through the fabrication and testing processes.
  • the devices 210 may undergo memory testing and card testing.
  • memory testing For memory testing, several assembly sublots can be combined to a larger test lot in an N to 1 consolidation for efficient testing and equipment utilization. As one example, 25 assembly sublots may be combined into a single test lot, though it can be more or less assembly sublots in further examples.
  • a consolidated test lot may undergo a memory test.
  • the memory test may include multiple read/write operations to each device 210 in the test lot, possibly at hot and cold temperatures.
  • the memory test in step 150 may include other or alternative tests, such as for example burn-in.
  • the memory test 150 results in a binning of the semiconductor devices in the test lot, where the devices are physically separated into different bins.
  • there may be 7 bins where devices in bins 1-4 are deemed to have satisfactorily passed the test operation(s), and devices in bins 5-7 have not.
  • a variety of other binning and classifications may be used where devices which satisfactorily perform the memory test are distinguished from those that do not.
  • step 156 if any device winds up in bins 5-7, the device ID is scanned in step 158, and the record for that device in the MES database is moved to a different logical partition (still within the MES database, but within a different set of stored records).
  • the steps 156, 158 and 160 of identifying bad devices and moving the records for the bad devices to a new location results in two different overall classifications of devices.
  • Database records for devices which pass the memory test remain unchanged in the database. These devices, referred to herein as a prime test sublot, are transported to the card test as described below.
  • records for devices which wind up in bins 5, 6 and 7 are scanned to record their bin, and records for those devices moved to a new database locations.
  • Other information may also be stored with the records in the new locations, including for example date and time, test personnel, etc. Records for individual devices may be identified by their unique ID number as explained above. With the separation into different database locations, it may be readily apparent which devices performed well in the memory testing steps and which devices did not.
  • step 162 those devices ending up in bins 5-7 may go through reclaim, where they are retested in step 150.
  • the type of retest may depend on which bin a device was classified into. After retest, the devices are again binned, and bad devices scanned. Database records for these devices that fail binning a second time may again be moved to a new database location.
  • the MES database will have an express record of how a given device performed in testing step 150. Where a device fails multiple times, each instance and resulting binning will be stored in association with that device.
  • the present system allows the MES control program to provide a variety of real-time data.
  • the MES control program may indicate when a device has failed the testing step 150 a predetermined number of times, in which event that device may be removed from further testing.
  • the devices may be combined into a card test lot for a card test in step 166.
  • the card testing steps may be similar to the memory testing steps, but additional or different tests are run, such as for example seeing how the devices 210 handle downloaded content.
  • the devices 210 are subjected to a card test in step 166 and the devices are binned depending on how they perform in step 168.
  • This binning may be by the same or different procedure than in the memory test step.
  • Bad devices may be scanned in step 170, and their records moved to a new database location together with the binning information in step 174. These devices may be reclaimed in step 178, and the process repeated. Each time a device 210 goes through reclaim, its record, together with the reclaim information, may be moved to a new location upon failure.
  • Those devices 210 which pass the card test may go through final labeling or handling in step 176 at which point the devices 210 are finished semiconductor packages ready for shipment.
  • One aspect of the present technology allows identification of the best devices. That is, given the tracking of each device and storage of information about the device, the MES control program can identify devices which for example have only flawless semiconductor die (0,0 on the KGD map) and/or those which passed the memory test and card test without any reclaim. These devices may be segregated in step 180 for sale to customers requiring higher performance. The remaining good quality devices may be sold elsewhere. Similarly, devices which passed the memory and/or card tests after several reclaims may be segregated, for example to be sold at a lower price.
  • Segregation step 180 may be omitted in further embodiments.
  • Fig. 12 shows the table 220 further including records for all process tools a semiconductor device went through, and all testing procedures the semiconductor device went through.
  • the table 220 may also include all of the discrete component information shown in the table 220 of Fig. 9, which is omitted from Fig. 12 for clarity).
  • the table 220 may further have records for each reclaim process a semiconductor device went through during a test operation.
  • the table 220 of Fig. 12 is shown by way of example only, and may include additional or different information in further embodiments.
  • the present system provides complete backward and forward traceability of a semiconductor device and its discrete components as the semiconductor device travels through the fabrication process, and the present system provides this traceability in realtime. Such a system provides better resolution than was possible with conventional tracking and traceability systems.
  • conventional traceability systems did not have a unique ID associated with each device, and did not have the ability to trace back and track the specific discrete components (die, substrate and/or passives) used in a device.
  • Prior art systems allowed identification of MES assembly lots, from which it could be determined what processes a given device went through. From this, further research could reveal a wafer lot, and possibly reveal where a problem occurred. However, such research was time consuming and did not provide any specific identification or information on the discrete components from which the semiconductor device was formed.
  • a query to the MES database can instantly reveal all processes the device went through, as well as an identification, process steps and information relating to the specific die, substrate and/or passives used. Not only does this enable identification of the source of a problem more easily, but it can quickly reveal problem trends. Analysis of a small number of problem devices may quickly and easily identify a common factor between them, whether at the device level or the discrete component level. For example, it may happen that a sampling of problem devices reveals that each problem device was made using semiconductor die from a particular wafer sublot or lots coming from a particular wafer manufacturer. The ability to pinpoint the source of a problem, even when occurring at the discrete component level, provides a marked advance over conventional MES platforms.
  • the source of a problem may be identified and remedied as soon as the problem is found, without wasting additional resources. For example, if a problem in a sampling of semiconductor devices during memory or card testing identifies a particular wafer lot or lots as the problem, the fabrication run may be stopped, and the problematic lot or lots removed from the process before further die from these wafers are incorporated into devices.
  • the MES control program and MES database may be part of an MES server 300, one example of which is now described with reference to Fig. 13.
  • Components of MES server 300 may include, but are not limited to, a processor 302, a system memory 304, traceability database 306a, MES database 306b, various system interfaces and a system bus 308 that couples various system components.
  • the traceability database 306a and MES database 306b may be combined into a single database or distributed across multiple databases.
  • the system bus 308 may be any of several types of bus structures including a memory bus or memory controller, a peripheral bus, and a local bus using any of a variety of bus architectures.
  • the system memory 304 includes computer storage media in the form of volatile and/or nonvolatile memory such as ROM 310 and RAM 312.
  • RAM 312 may contain an operating system 313 for MES server 300, and the program modules of the MES software platform 314.
  • One of these program modules may be the MES control program mentioned above.
  • the MES control program may be that portion of the MES platform which directs various components of MES server 300 to retrieve data relating to the semiconductor devices 210 and the discrete components of the semiconductor devices 210.
  • the MES control program may further be responsible for generating identifiers as described above.
  • the MES control program may have further responsibilities.
  • the traceability database 306a and the MES database 306b may each for example be a relational database including computer-readable media which together store all MES data including data relating to the semiconductor devices 210 and the discrete components of the semiconductor devices 210 discussed above.
  • the databases 306a and/or 306b may store other types of data and information as well.
  • the traceability database 306a and/or the MES database may store other types of data and information as well.
  • the MES server 300 may be remote from server 300, and may even be remote from the card fabrication plant in which the MES server may be located. There may be redundant and backup versions of one or both of the traceability database 306a and the MES database 306b in embodiments.
  • the MES server 300 may also include a variety of other computer-readable media, including removable/non-removable, volatile/nonvolatile computer storage media.
  • the MES server 300 may include a variety of interfaces for the input and output of data and information.
  • Input interface 316 receives data from a plurality of scanners 320 and input devices such as a keyboard 322 and mouse 324.
  • the scanners 320 may be provided at process and test tools for reading the machine readable codes discussed above, such as the matrix code 218 on the semiconductor device 210.
  • the scanners 320 may also read the machine readable codes on the discrete components.
  • the number of scanners shown in Fig. 13 is by way of example only.
  • a video interface 330 may be provided for interfacing with a monitor 332.
  • Monitor 332 may for example be used to provide a graphical user interface for fab personnel, and to display data from the various process and testing tools, as well as other plant operations.
  • a peripheral interface 336 may be provided for supporting peripheral devices, including for example a printer 338.
  • the MES server 300 may operate in a networked environment via a network interface 340 using logical connections to one or more remote computers 344, 346.
  • the logical connection to computer 344 may be a local area connection (LAN) 348, and the logical connection to computer 346 may be via the Internet 350.
  • LAN local area connection
  • Other types of networked connections are possible.
  • the present system allows connection to the MES server 300 to obtain this information from any remote location having a network connection to the MES server.
  • MES server 300 is by way of example only, and may include a wide variety of other components in addition to or instead of those described above.
  • one embodiment of the present technology relates to a system for tracking semiconductor packages.
  • the system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate.
  • the system further includes an identifier associated with the semiconductor device, the identifier uniquely distinguishing the semiconductor device from all other semiconductor devices.
  • the present technology relates to a system for tracking semiconductor packages.
  • the system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate.
  • the system further includes an identifier associated with the semiconductor device, the identifier associating the specific semiconductor die used in the semiconductor device with the semiconductor device.
  • the present technology relates to a system for tracking semiconductor packages.
  • the system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate.
  • the system further includes an identifier associated with the semiconductor device, the identifier also associating with the semiconductor device: i) fabrication processes performed on the semiconductor device, ii) testing operations performed on the semiconductor device, and iii) how the semiconductor device performed in the testing operations.
  • the present technology relates to a system for tracking semiconductor packages.
  • the system includes a semiconductor device having a substrate, one or more semiconductor die mounted on the substrate, and passive components.
  • the system further includes a computer-readable medium including stored information identifying at least one of: i) the substrate used in the semiconductor device, ii) the one or more semiconductor die used in the semiconductor device, iii) the passive components used in the semiconductor device, iv) tools at which the semiconductor was processed, v) tools at which the semiconductor device was tested, vi) binning of the semiconductor device after testing of the semiconductor device, and vii) whether and how many times the semiconductor device underwent a reclaim operation after a testing operation.

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Abstract

A system is disclosed for providing backward and forward traceability by a methodology which identifies discrete components (die, substrate and/or passives) that are included in a semiconductor device. The present technology further includes a system for generating a unique identifier and marking a semiconductor device with the unique identifier enabling the semiconductor device, and the discrete components within that device, to be tracked and traced through each process and test in the production of the semiconductor device.

Description

DISCRETE COMPONENT BACKWARD TRACEABILITY AND SEMICONDUCTOR DEVICE FORWARD TRACEABILITY
BACKGROUND OF THE INVENTION
Field
[0001] The present technology relates to fabrication of semiconductor devices.
Description of Related Art
[0002] The strong growth in demand for portable consumer electronics is driving the need for high-capacity storage devices. Non-volatile semiconductor memory devices, such as flash memory storage cards, are becoming widely used to meet the ever-growing demands on digital information storage and exchange. Their portability, versatility and rugged design, along with their high reliability and large capacity, have made such memory devices ideal for use in a wide variety of electronic devices, including for example digital cameras, digital music players, video game consoles, PDAs and cellular telephones.
[0003] Prior art Figs. 1 and 2 respectively show a flowchart and schematic representation of steps in the production of semiconductor device memory cards. Given the large number of components which are assembled into a memory card, and the tremendous scale on which memory cards are produced within a semiconductor fabrication plant, it is important to provide a methodology for tracking semiconductor devices as they progress through the memory card production process. Manufacturing execution systems (MES) are known which receive information in real time from process tools and fab personnel to manage and, to an extent, track the production of memory cards. An MES maintains a database of the fabrication process which allows fab personnel to track semiconductor devices during the production process and also may be used to trace the source of problems should a defect be found in one or more assembled semiconductor devices. One example of a known MES platform is that from Camstar Inc., Charlotte, North Carolina, USA. Camstar Inc. provides an MES platform under the name Camstar Manufacturing, and a quality management system under the name Camstar Quality. Other known platforms for managing the flow in a semiconductor memory card plant include Tango production monitoring suite by CyberDaemons Inc. of Hsinchu, Taiwan and an assembly line production (ALPS) manager by Kinesys Software Inc., Forest Grove, Pennsylvania, USA.
[0004] Referring to prior art Figs. 1 and 2, memory die wafer lots 70 and controller die lot 72 are received in a memory card fabrication plant from wafer piece manufacturers. The wafers arrive with the integrated circuits defined thereon by the wafer piece manufacturers so that each memory die wafer piece includes a plurality of memory die, and each controller die wafer piece includes a plurality of controller die. In the embodiment shown in Fig. 2, a semiconductor device is being fabricated including a pair of memory die. Thus, two memory die wafer lots 70a and 70b are shown. It is also known to form semiconductor devices with one or more than two memory die. The wafer lot 70a used for the bottom memory die may be referred to as the wafer mother lot, while wafer lot(s) used for memory die above the bottom die may be referred to as the wafer sublots. Substrate lots 74 are also received in the memory card fabrication plant from a substrate manufacturer. The substrates in a substrate lot 74 may for example be a printed circuit board (PCB), leadframe or tape automated bonding (TAB) tape.
[0005] In order to prepare the wafer pieces in the wafer lots 70, 72 for affixation to a substrate in substrate lot 74, each wafer piece may have a protective tape applied to its active surface (the surface including the integrated circuits) and is then mounted to a chuck (not shown), active side down in step 20. Thereafter, a backgrind step 22 may be performed on the each wafer piece to thin the wafer down to a desired thickness. After backgrind step 22, the wafer pieces may be transferred to another tool where they are diced, for example by saw or laser, in step 24 so that they may be picked and placed onto the substrate.
[0006] In parallel with the die preparation steps, passive components may be mounted on the substrate in a surface mounting process. The solder paste may be applied in step 30. The passive components, also referred to herein as passives, may be mounted in step 32, and the solder may reflowed/cleaned in a step 34. The passives may include for example resistors and capacitors.
[0007] In step 42, the memory die and a controller die may be mounted on a substrate at a die attach tool 76. The tool 76 makes use of a known good die (KGD) map 78 which defines good and bad die for each wafer piece used. In particular, each die on each wafer piece in wafer lots 70, 72 may be operationally tested and given a rating such as 0,0 (flawless), A, A (good) or 1,1 (bad). The KGD map 78 is used by the die attach tool so that bad die on a wafer piece are ignored. In step 42, memory die and typically a controller die are mounted on a substrate to form a semiconductor device. As used herein, the term "device" refers to an assembly of a substrate, one or more semiconductor die on the substrate and, possibly, passive components on the substrate. The respective die, substrate and/or passives within a device may be referred to herein as "discrete components" of the semiconductor device.
[0008] Following the mounting of the die and passives on a substrate, the resulting device may then be wire bonded in step 48. The wire bonding step 48 is a time consuming process. As such, the device assembly lots may be split into a plurality of device assembly sublots so that wire bonding may be performed by a plurality of wire bonding tools 80 simultaneously (the number of wire bonding tools in Fig. 2 is by way of example only). In the wire bonding step 48, die bond pads on each of the die mounted to a substrate may be electrically coupled to contact pads on the substrate.
[0009] Following the wire bond step 48, the devices in the respective device assembly sublots may be encapsulated in a molding compound (step 50) in one or more tools 82, laser marked with an identifier (step 54) in one or more tools 84, and then singulated (step 56) in one or more tools 86. Fig. 2 shows the device assembly sublots remaining separated through each of these steps. However, one or more of the device assembly sublots may be reassembled into the device assembly lot following any of the steps 48 through 56.
[0010] The laser marking step 54 may be significant in that it allows information regarding a device assembly lot or sublot to be uploaded and tracked by the MES platform managing flow within the card fabrication plant. Prior art Fig. 3 shows an example of a conventional laser mark placed on the devices in a device assembly lot or sublot. The laser mark may include for example a logo and alphanumeric characters. The alphanumeric characters may include a plant code identifying the plant where the semiconductor device was made, a date code indicating when the semiconductor device was made, an MES lot or sublot number assigned to each device assembly lot or sublot, and a device ID code identifying the type of semiconductor package the device is. The information from the laser mark for a device assembly lot or sublot is assigned and stored by the MES, and used for device tracking and traceability.
[0011] Traditional MES platforms using this methodology have several limitations. First, the MES platform does not uniquely identify specific devices. At most, the MES assembly sublot number is unique to an entire device assembly sublot that went through a particular set of tools. Each particular device in such an MES assembly sublot will have the same identification code on its surface and be identified by the same identification code stored in the MES platform. Second, in part because of the generic marking of entire assembly sublots, there is no specific discrete component information directly associated with a specific device. That is, there is no direct link between a device's identification code and the semiconductor die, substrate and/or passive components used in that device. [0012] As one consequence, when a problem with a device is detected during or after fabrication, conventional systems have limited ability find the source of the problem. When a problem with a device occurs, prior art systems may allow identification of an MES assembly sublot from which the problem device came. From the knowledge of the MES assembly sublot, it may be possible to determine what processes the problem device went through. From this, further research could reveal a specific wafer lot, and possibly reveal where a problem occurred. However, such research is time consuming and does not provide any specific identification or information on the discrete components from which the semiconductor device was formed.
[0013] Referring again to the flowchart and schematic representation of Figs. 1 and 2, after singulation, semiconductor devices 90 may be inspected (step 60) and then put through one or more tests in step 62. These tests may include for example burn-in and memory read -write testing at high and low temperatures. Typically, semiconductor devices 90 from a number of device assembly lots are combined in the testing step. It is known to perform tests on 30,000 to 50,000 devices 90 from a plurality of device assembly lots. There is an N:l consolidation of device assembly lots into a single device test lot, where N may for example be 25 device assembly lots.
[0014] The devices from respective assembly lots are reshuffled into different bins, depending on how the devices performed in the testing operations. In one example, it is known to divide the devices into seven bins (1-7), where devices classified in bins 1-4 have satisfactorily passed the testing operations and are passed on to a card test, described below. Devices classified in bins 5-7 failed the testing operation for one reason or another, and are subjected to a reclaim step 64 where they are retested. The reclaim operations will vary depending on whether a device was classified in bin 5, bin 6 or bin 7. A device may go through multiple reclaim processes. If, after one or more of these reclaim processes, a device is found to operate satisfactorily, it may be reclassified into one of bins 1-4 and passed on to the card test. [0015] The card test in step 66 may be similar to the memory test in step 62, however content may be written to each device and its capabilities tested. Although not shown in Fig. 2, the card test may have a similar binning operation, where devices classified in certain bins are submitted for retest in a reclaim operation in step 68. Devices 90 which pass the card test may undergo some final inspection and processing steps (not shown) and then shipped.
[0016] In some semiconductor memory card fabrication plants, the assembly steps of attaching die to a substrate through to singulating the devices are referred to as a 54-81 process. The memory test is referred to as a 54-62 process. And the card test is referred to as a 54-99 process. Given the consolidation and shuffling of devices 90 from a variety of assembly lots in 54-81 to the test lots in 54-62, and then the subsequent reshuffling of devices in card lots in 54-99, it is difficult and time consuming, if it is possible at all, to trace devices which are identified as problematic in the memory or card test phase using a conventional MES. This is in part due to the fact that memory devices are not marked with unique IDs, and thus, there is no record of how a specific semiconductor device performed in the testing operations.
DESCRIPTION OF THE DRAWINGS
[0017] FIGURE 1 is a prior art flowchart showing an assembly process of a semiconductor device memory card.
[0018] FIGURE 2 is a prior art schematic representation of an assembly process of a semiconductor device memory card.
[0019] FIGURE 3 is a prior art illustration of a semiconductor device including an MES marking. [0020] FIGURE 4 is a flowchart of an embodiment of the present technology for processing a substrate strip.
[0021] FIGURE 5 is a flowchart of an embodiment of the present technology for processing a semiconductor wafer piece.
[0022] FIGURE 6 is a flowchart of an embodiment of the present technology for forming a semiconductor device.
[0023] FIGURE 7 is an illustration of a substrate including a marking according to an embodiment of the present technology.
[0024] FIGURE 8 is an illustration of a KGD map used in embodiments of the present technology.
[0025] FIGURE 9 is an illustration of a semiconductor device including a unique identifier.
[0026] FIGURE 10 is a table including information on a semiconductor device and its discrete components according to an embodiment of the present technology.
[0027] FIGURE 11 is a flowchart of an embodiment of the present technology for testing a semiconductor device.
[0028] FIGURE 12 is a table including information on a semiconductor device and its processes according to an embodiment of the present technology.
[0029] FIGURE 13 is a block diagram of a sample server for implementing aspects of the present technology.
DETAILED DESCRIPTION
[0030] Embodiments will now be described with reference to Figs. 4 through 13, which relate to a system enabling backward traceability of a semiconductor device fabrication process to a single semiconductor die or other discrete component, and forward traceability of individual devices and components through memory and card tests. It is understood that the present technology may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the invention to those skilled in the art. Indeed, the present system is intended to cover alternatives, modifications and equivalents of these embodiments, which are included within the scope and spirit of the present system as defined by the appended claims.
[0031] In general, the present technology provides backward and forward traceability by a methodology which uniquely identifies each semiconductor device, and which provides an association between the uniquely identified semiconductor device and the discrete components (die, substrate and/or passives) that are used in that device. The unique identification and marking of a semiconductor device enables the semiconductor device, and the discrete components within that device, to be tracked and traced through each process and test in the production of a memory card from that device.
[0032] The information relating to a semiconductor device, including its unique ID and the specific component identifiers, are stored in a database, referred to herein as an MES database. In the description below, the MES database stores backward and forward traceability data in addition to other MES data. However, it is understood that storage of data relating to card fabrication may be distributed across more than one database in a variety of ways. In one such example shown in the block diagram of Fig. 13, there are two databases: a traceability database 306a for storing all backward and forward traceability data, generated as explained below, and a separate MES database 306b for storing other MES-related data. As indicated, the description that follows generally refers to a single MES database which stores backward and forward traceability data as well as other MES data. [0033] An embodiment of the present technology will now be described with reference to the flowcharts of Figs. 4 through 6. In embodiments, information regarding discrete components (substrates, semiconductor die and/or passive components) may be stored in the MES database prior to their assembly into a semiconductor device. As explained below, when the discrete components get assembled into a semiconductor device, this information for the discrete components may be associated in the MES database with the device. However, as a precursor to this association, information regarding the discrete components may be identified and stored.
[0034] The fabrication process may begin by defining a work order for production of a given number and type of memory card. This may occur for example days or weeks before the actual fabrication begins. Each memory card is made from a particular type of substrate, memory die, controller die and other discrete components. When a work order is defined, the discrete components that will be used for the work order are also specified and stored in the MES database. When discrete components such as substrate lots and wafer lots are received in the fabrication plant, they are labeled with information such as the component manufacturer, date and place of manufacture and a lot number assigned to that component lot. This information is scanned upon receipt (or at some point prior to use in a work order) and uploaded to the MES database. Thus, when a work order is defined, the specific lot numbers of the discrete components that will be used for that work order are also specified.
[0035] When a work order is to begin, a substrate lot is scanned in a step 100 to verify it is a proper substrate lot for that work order. The individual substrate strips from that substrate lot may then be processed. It is understood that a variety of different substrates may be used with the present technology, including for example a PCB, a leadframe and/or a TAB tape. The example of Fig. 7 shows a strip 200 of leadframe substrates 204 (one of which is marked in Fig. 7). Although any of a wide variety of substrates may be used, the strip 200 shown in Fig. 7 may for example be for MicroSD memory cards having eighty substrates 204 in a 4 x 20 array. The strip 200 shown is by way of example only and strip 200 may come in other shapes, sizes and configurations. While a strip of substrates is described hereinafter, it is understood that the individual substrates may be other substrates and may alternatively be formed of a panel, roll or other grouping of substrates.
[0036] In step 102, each strip 200 (or other grouping of substrates 204) may be laser marked with its substrate lot number and a specific ID unique to that strip 200. In embodiments, the MES system includes a control program which receives data and feedback from various tools and components within the card fabrication plant and stores the information in the MES database. Two components providing data and feedback to the MES control program are laser mark stations 318 (Fig. 13) and scanners 320.
[0037] In step 102, the laser mark station 318 associated with substrate processing may generate and assign each substrate strip 200 a unique ID. As one example, the laser mark station may assign successive strip identifiers as successive substrate strips 200 are processed. The laser mark station 318 then laser marks each substrate with the known substrate lot number and the substrate strip ID that it generated. It is understood that the unique strip identifier for each substrate strip 200 may be generated by another component within the MES system. The component may then communicate the unique substrate strip ID to the laser mark station, which marks each substrate strip 200 with the substrate lot and substrate strip identifier.
[0038] Each instance of a substrate strip 200 may include a laser marking 202 including a substrate lot number (generic to all strips in that substrate lot) and a substrate strip identifier that is unique to that specific strip. The substrate lot number and unique strip identifier are shown in Fig. 7 as a pair of two digit alphanumeric characters. It is understood that the substrate lot number and/or the unique strip identifier may be represented with more digits, or in different ways, than is shown in Fig. 7 in further embodiments. [0039] In a non-limiting example, each digit of a two digit alphanumeric identifier (of the substrate lot number and/or the unique strip identifier) may have 33 possible values. The 33 possible values come from 10 numeric values (0-9) and 23 letters of the alphabet (A-Z, minus the letters B, O and I, as these may be confused with 8, 0 and 1, respectively). Thus, a digit may be any of 33 possible characters for each digit. A two digit number may thus represent 33 x 33 = 1089 possible unique identifications for a substrate sublot, and 1089 possible unique strip identifiers for each substrate sub lot. It is understood that a two digit number may be comprised of digits having more than or less than 33 possible values in further embodiments.
[0040] The laser marking 202 may further include a machine-readable code having the substrate lot number and unique strip identifier information in a form that is readable by a computer scanner. The machine-readable code shown in Fig. 7 is a two-dimensional matrix code, but it is understood that the computer readable code may be a one- dimensional bar code or any other marking in which the substrate lot number and unique strip identifier may be encoded in such a way so as to be understood by a computing device. In embodiments, it is conceivable that a computer can read alphanumeric text. In such embodiments, the separate matrix or other code in addition to the text may be omitted.
[0041] The markings of step 102 may be made by laser or other known printing operation. Instead of marking, adhesive labels including the above-described information may be affixed to each substrate strip 200. Fig. 7 shows the laser marking 202 in the upper left hand corner of substrate strip 200. It is understood that the laser marking 202 may be provided at other locations on substrate strip 200 in further embodiments.
[0042] In step 104, the laser mark station 318 which generated the unique strip ID may upload the unique ID assigned to each substrate strip to the MES database. With the known substrate lot number and the received unique strip ID, a separate record may be created in the MES database for each substrate strip 200. Each record may include the substrate lot, substrate lot history, unique strip ID and a unique substrate ID of each substrate on a strip 200. As noted above, when a substrate lot first enters the card fabrication plant, an ID for that lot, as well as a history for that lot, may be scanned and uploaded to the MES database. Substrate lot history may include information such as who made the substrate lot, and when and where it was made. Historical information may include other information in further embodiments. The substrate lot ID and history may be uploaded to the MES database at a time other than when received within the card fabrication plant, such as for example when a substrate lot is selected for use.
[0043] As noted, in addition to storing a strip ID for each substrate strip 200, the step 104 further includes storing a unique ID for each instance of a substrate 204 on the strip
200. As the type of substrate used in a work order is known, the control program or other aspect of the MES system may generate unique IDs for each substrate 204 on a strip 200 using some pre-defined convention of identifying individual substrates based on their position on a substrate strip 200. [0044] For example, with respect to the 80 substrates 204 shown on the strip 200 of Fig.
7, the MES control program may adopt a convention where the rows are assigned a letter A-D starting from the bottom and the columns are assigned a number 1-20 starting from the left. Thus, the substrate in row 2, column 4 may be identified as B-4. As an alternative, a convention may be defined which numbers each position consecutively, for example the first row from the bottom are number 1 through 20, the second row from the bottom are numbered 21 -40, etc. It is understood that each substrate may be assigned a unique identifier by other conventions in further embodiments. Moreover, as indicated, different substrate strips may have different shapes and numbers of substrates in further examples. [0045] In step 106, the substrate strip 200 may be processed prior to connection of the passive components, including for example solder application, cleaning and inspection. In step 108, any such process steps may be stored by the MES control program in the MES database in association with the substrate strip 200 and/or specific substrates 204. Additional information relating to the processes may also be stored in association with the strip 200 and/or specific substrate 204, including for example when and where the processes were performed, the specific tool that was used, a maintenance record for that tool and/or fab personnel associated with the process.
[0046] At the same time or at a different time, analogous identification, storing and processing of wafer pieces to be used in production of the semiconductor devices may also be performed. As explained in the Background section, a separate wafer lot may be used for each die in the die stack to be affixed to the semiconductor device. In step 110, each wafer piece in each wafer lot may be identified. In embodiments, a unique ID may be marked on each wafer piece, either by the wafer manufacturer or within the card fabrication plant, for example using a marking process as described above with respect to the substrate strips. In a further embodiment, instead of marking each wafer piece, a wafer piece may be uniquely identified by its vertical position relative to other wafer pieces within a wafer sublot (e.g., the ninth wafer piece from the top of the sublot).
[0047] In step 112, a record may be created in the MES database for each die on a wafer, including the wafer sublot, wafer lot history, wafer piece ID for each wafer piece in the sublot and a die ID for each die on a wafer piece. This occurs for each wafer sublot used in a device fabrication process, including the one or more memory die wafer sublots/mother lot and the controller die wafer lot. In embodiments, as indicated above, when a wafer lot first enters the card fabrication plant, an MES wafer lot ID for that lot, as well as a history for that lot, may be scanned and uploaded to the MES database. Wafer lot history may include information such as who made the wafer lot, and when and where it was made. Historical information may include other information in further embodiments. The MES wafer lot ID and history may be uploaded to the MES database at a time other than when received within the card fabrication plant, such as for example when a wafer sublot is selected for use. [0048] The step 112 further includes storing a wafer piece ID and die ID. As described in step 110, the MES control program identifies each wafer piece, either with a unique ID or by its position within an identified wafer sublot. The MES control program may also store the wafer piece identifier at the time it is generated. As for the identification of specific die on a wafer piece, the MES control program may store these using a predefined convention of describing the positions of all die on a wafer piece in terms of (x, y) coordinates. Spherical coordinates (r, □) may alternatively be used to define the positions of die on a wafer piece. Other methods of identifying specific die on a wafer piece are contemplated, including by position on the wafer piece or a unique ID assigned to each die on a wafer piece.
[0049] In step 114, a wafer piece may be processed, including for example backgrind, dicing, inspection and cleaning. In step 116, any such process steps may be stored by the MES control program in the MES database in association with the wafer piece and/or die on the wafer piece. Additional information relating to the processes may also be stored in association with the wafer piece and/or die on the wafer piece, including for example when and where the processes were performed, the specific tool or tools that were used, a maintenance record for the tool(s) and/or fab personnel associated with the processes.
[0050] The embodiments described above with respect to Figs. 4 and 5 enable maximum resolution as to backward traceability of the discrete components used within a semiconductor device, as explained below. In further embodiments, where maximum resolution is not required, one or more of the discrete component identification and storage steps described above may be omitted. Moreover, at least some of the steps described above with respect to Figs. 4 and 5 may be performed later in the fabrication process, such as for example when the discrete components are assembled together into a semiconductor device, as will now be described with respect to the flowchart of Fig. 6.
[0051] In step 120, the next substrate 204 to receive passives and die on a strip 200 is selected. If not already done, the substrate lot number, strip ID and position of this substrate 204 are stored in the MES database by the MES control program. In step 122, a unique identifier for each passive component to be mounted on the selected substrate 204 may be stored in the MES database in association with the selected substrate 204. The passives, including for example resistors and/or capacitors, may have their own unique identifier, which gets scanned or otherwise entered by fab personnel into the MES database in association with the substrate 204 on which they are to be mounted. The passive components may then be surface mounted on the selected substrate 204 and reflowed in step 124.
[0052] In step 126, die are selected for mounting on the substrate 204 based on a KGD map. A representation of a KGD map is shown in Fig. 8 for a single wafer piece from an MES wafer sublot. As noted, semiconductor devices may include different numbers of semiconductor die, and there may be a separate wafer sublot used for each die to be mounted in a die stack on the substrate 204. Thus, where there are for example 2, 4 or 8 memory die to be mounted on the substrate 204, there may be 2, 4 or 8 MES wafer sublots, respectively, feeding die to the substrate. There may be a KGD map of each wafer piece in each MES wafer sublot, which KGD maps are provided by the wafer piece manufacturer based on testing done at the manufacturer.
[0053] Fig. 8 shows an example of a wafer piece 206 having a plurality of semiconductor die 208 (one of which is numbered in Fig. 8). The goodness of a die may be represented in the KGD map by alphanumeric codes associated with each die 208 on wafer piece 206. In this example, 0,0 may represent a die with no detected flaws; A, A may be a good die with minimal flaws; and 1 ,1 may represent a bad die which should not be selected for mounting on any of the substrates 204. It is understood that any of a variety of other schemes may be used by a KGD map to represent the goodness of a die on a particular wafer piece 204.
[0054] The die selected in step 126 from wafer pieces in different MES wafer lots may be selected based on a number of different criteria. In one embodiment, flawless die (0,0) from wafer pieces in the respective MES wafer sublots may be first selected and attached together on substrates 204. Substrates having only flawless die are likely to result in the highest quality semiconductor devices. As explained below, one aspect of the present technology allows identification and segregation of semiconductor devices having the highest quality semiconductor die. These devices may then be shipped to OEM manufacturers or others for a premium. Selection of only flawless die for mounting in a single semiconductor device may optimize the chance of that device being of the highest quality. If the flawless die from one or more wafer pieces in respective sublots have been exhausted, then the next best die (A,A) may be used. It is understood that the die selected for attachment within a given semiconductor device may be selected based on a variety of other criteria in further embodiments.
[0055] In step 128, the MES wafer sublot, wafer piece ID and selected die position on the wafer piece may be stored in association with the substrate 204 on which the selected die are to be mounted. This may be done for each die from the different sublots to be mounted on the substrate. After all die to be mounted on a given substrate have been identified and stored in association with that substrate in step 128, the die may be mounted on the substrate in step 130. The order of steps 128 and 130 may be reversed in alternative embodiments. The die may be mounted to the substrate for example via a die attach adhesive in a known adhesive or eutectic die bond process.
[0056] Once the die and/or passives have been mounted on a substrate, that assembly may be considered a semiconductor device (although further processing steps are performed before it is a finished package as explained below). At this point, it is possible to assign each semiconductor device a unique device ID. However, as explained hereinafter, assignment of a unique device ID may alternatively be performed later in the process, for example in relation to the laser mark step 142.
[0057] In step 136, semiconductor devices formed on substrates may go through a wire bond process for wire bonding die bond pads on each device semiconductor die 208 to contact pads formed on the substrate 204. As noted in the Background section, this process is relatively time consuming. As such, an MES assembly lot may be subdivided into MES assembly sublots. The information for each device may be updated in the MES database to reflect the particular assembly sublot and process tool to which each device is transferred.
[0058] Following the wire bond step 136, the devices in the respective assembly sublots may be encapsulated in a molding compound in step 138, assigned a unique device ID in step 140, laser marked with an identifier in step 142 (steps 140 and 142 are explained in greater detail below), singulated into separate semiconductor devices in step 144 and inspected in step 148. As discussed in the Background section, the respective sublots may stay separated for steps 138, 140, 142, 144 and/or 148. Alternatively, at one of these steps, one or some of the assembly sublots may recombine, or all assembly sublots may recombine into the original assembly lot.
[0059] The step 140 of assigning a unique device ID to each device, and the step 142 of laser marking that unique device ID on a device may both be performed by a laser marking station 318 associated with device marking. Fig. 9 shows a top view semiconductor device 210 after encapsulation, singulation and laser mark. The laser mark may include a logo 212 and an alphanumeric representation 214 of the unique ID associated with the device. The logo 212 may be omitted in embodiments. The device unique ID representation 214 may have the format of:
YWWDMLLXXX, where:
Y represents the year's last digit;
WW represents the week # within the year;
D represents the day within the week (1 to 7);
M represents the card fabrication plant; LL represents an alphanumeric 2-digit ID to designate each MES assembly sub lot; and
XXX represents an alphanumeric 3 -digit unique ID to distinguish each device made with the same date, location and MES assembly sublot information.
[0060] The first seven digits in the unique ID representation 214 are known by the MES system for each device. The last three digits may be generated and assigned for example by the laser marking station as it marks each device. As one example, the laser mark station may assign successive device identifiers as successive devices 210 are processed. The unique ten digit ID may then be stored by the MES control program in the MES database as a means of uniquely identifying the specific device 210 in the database. Instead of the last three digits being generated by the laser mark station, it is understood that the unique device identifier for each device 210 may be generated by another component within the MES system. The component may then communicate the unique device ID to the laser mark station, which marks each device 210 with the ten digit device identifier.
[0061] There may be greater or fewer than three digits at the end of the unique ID representation 214, depending on how many digits are required to uniquely identify each device for that date, location and MES assembly sublot. In a non-limiting example, any of the digits, such as for example the sublot number LL and the assigned digits XXX, may have 33 possible values as described above (10 numeric values and 23 letters of the alphabet (A-Z, minus the letters B, O and I)). Thus, for example the sublot number LL may uniquely identify any of 1089 sublots, and the assigned three digit code may uniquely identify any of almost 36,000 devices within a given sublot. It is understood that a given digit may represent more or less values in further embodiments. It is further understood that additional or alternative information may be included within the unique ID representation 214 in further embodiments, with the provision that the representation uniquely identify the semiconductor device 210 bearing the representation. For example, it will be appreciated that the date information may be represented in different ways in the representation 214.
[0062] The marking further includes a code 218 having the same information as the alphanumeric representation 214, but in machine-readable form. The machine-readable code 218 may be a two-dimensional matrix code, but it is understood that the computer readable code may be a one-dimensional bar code or any other marking in which the unique device ID may be encoded in such a way so as to be understood by a computing device. In embodiments where a computer can read alphanumeric text, the separate matrix or other code in addition to the text may be omitted.
[0063] The logo 212, representation 214 and/or code 218 may be made by laser or other known printing operation. Instead of marking, adhesive labels including the above- described information may be affixed to each semiconductor device 210. The locations of the logo 212, representation 214 and code 218 shown in Fig. 10 are by way of example only, and the location of each may be moved to different locations. One or more of the logo 212, representation 214 and code 218 may be placed on a back surface of the semiconductor device 210 in further embodiments.
[0064] While the provision of both the alphanumeric representation 214 and code 218 on a surface of the device 210 is helpful, it is understood that one or the other of these may be omitted in further embodiments. As noted above, the code 218 may be omitted where a computing device is able to read and comprehend the alphanumeric representation. Alternatively, though more time consuming, the code 218 may be omitted and fab personnel can input the alphanumeric representation via a keyboard or other input device associated with the MES control program. Similarly, while it is useful to allow people to read the alphanumeric representation 214, it may be omitted, in which event, people may identify the unique ID once the code 218 is scanned.
[0065] After a three digit code XXX is assigned to a device by a laser mark station, the laser mark station may then upload the three digit code so that the MES system then has a unique ten digit identifier for each device. The unique ten digit identifier may then be stored in the MES database to allow unique identification of each specific device in the process.
[0066] Referring now to Fig. 10, the MES database may have a table 220 with all of the data it needs for backward traceability of all relevant information relating to all processed devices. This information may include for example the specific discrete components (as opposed to a wafer lot, substrate lot or passive component lot) that are included in each device. As shown in Fig. 10, the MES database may store the unique ID for a device, together with the following information associated with that unique device ID:
• the MES assembly sublot to which the device belongs;
• the substrate lot number, strip ID and position on the identified strip;
• the MES wafer sublot number, wafer piece ID and die position on the wafer piece for the first die;
• the MES wafer sublot number, wafer piece ID and die position on the wafer piece for the second die; ...
• the MES wafer sublot number, wafer piece ID and die position on the wafer piece for the die n (in an n-die stack).
In the embodiment of Fig. 10, specific information relating to the passive components is not shown in the table 220, but this information may be included in further embodiments.
[0067] With the association of a specific discrete component (die, substrate and/or passive) with a specific unique device ID, all of the above-described stored information regarding the discrete components may be associated with a specific semiconductor device by its unique device ID. As noted above, a wealth of information is generated and stored relating to discrete components prior to the time they are assembled into a semiconductor device. Once a unique device ID is generated for a semiconductor device, all of the stored information for the discrete components in that device may be associated in the MES database with that unique device ID. Thus, for example, using a device's unique ID, the following information may be quickly and easily accessed from the MES database:
• For the semiconductor die (memory and controller) used in the device: o Manufacturer; o When and where manufactured; o When received at device fabrication plant; o When and where backgrind, dicing and other processing steps performed (while still part of a wafer piece or thereafter) and by whom; o Where on the wafer the die was located (as described above).
• For the substrate used in the device: o Manufacturer; o When and where manufactured; o When received at device fabrication plant; o When and where surface mounting and other processing steps performed (while still part of a strip or thereafter) and by whom; o Where on the strip the substrate was located (as described above).
• For passives used in the device: o Manufacturer; o When and where manufactured; o When received at device fabrication plant; o When and where surface mounted and other processing steps performed and by whom.
[0068] The above information regarding the discrete components may be stored along with the information shown in Fig. 10, or it may be cross-referenced in the MES database with the information shown in Fig. 10. With the above information, the MES database can provide complete backward traceability with respect to all of the discrete components within a given semiconductor device. This information may be accessed by knowing a device's unique ID, which is printed right on the device as explained above (both in human-readable and machine-readable formats). The information shown in Fig. 10 and described above is not intended as an exhaustive listing of the information which may be stored in the MES database regarding a semiconductor device and its discrete components. Additional and/or alternative information may also be stored in further embodiments in association with a unique device ID.
[0069] In addition to backward traceability, uniquely identifying each device 210 also enables forward traceability. Each process tool (or personnel associated with each such process tool) may have a scanner 320 in communication with the MES control program. The scanner at a given tool scans the matrix code 218 of a device 210, and the MES control program updates the MES database to indicate that the device 210 is undergoing the process or test at that tool. The scanner may scan one device 210 at a time, or the scanner could potentially scan the code 218 of a number of devices 210 at one time.
[0070] Upon scanning of a device at a given process tool (fabrication or test), the MES control program may record the process step, as well as information about the process step, in association with the device's unique ID number. This recorded information may include for example a date and time the device underwent a process, personnel associated with the tool performing the process, a maintenance record of the process tool, and a wide variety of other information. Thus, the unique device ID, together with the scanning of that ID for all processes the device undergoes, provides complete forward traceability of the device 210 as it moves through the fabrication and testing processes.
[0071] Referring now to Fig. 11, after singulation and marking of devices 210, the devices 210 may undergo memory testing and card testing. For memory testing, several assembly sublots can be combined to a larger test lot in an N to 1 consolidation for efficient testing and equipment utilization. As one example, 25 assembly sublots may be combined into a single test lot, though it can be more or less assembly sublots in further examples. In step 150, a consolidated test lot may undergo a memory test. The memory test may include multiple read/write operations to each device 210 in the test lot, possibly at hot and cold temperatures. The memory test in step 150 may include other or alternative tests, such as for example burn-in.
[0072] As explained in the Background section, the memory test 150 results in a binning of the semiconductor devices in the test lot, where the devices are physically separated into different bins. In one example, there may be 7 bins, where devices in bins 1-4 are deemed to have satisfactorily passed the test operation(s), and devices in bins 5-7 have not. The embodiment of 7 bins, with bins 1-4 passing and bins 5-7 requiring retest, is by way of example only. A variety of other binning and classifications may be used where devices which satisfactorily perform the memory test are distinguished from those that do not.
[0073] In step 156, if any device winds up in bins 5-7, the device ID is scanned in step 158, and the record for that device in the MES database is moved to a different logical partition (still within the MES database, but within a different set of stored records). Thus, the steps 156, 158 and 160 of identifying bad devices and moving the records for the bad devices to a new location, results in two different overall classifications of devices. Database records for devices which pass the memory test remain unchanged in the database. These devices, referred to herein as a prime test sublot, are transported to the card test as described below.
[0074] On the other hand, records for devices which wind up in bins 5, 6 and 7 are scanned to record their bin, and records for those devices moved to a new database locations. Other information may also be stored with the records in the new locations, including for example date and time, test personnel, etc. Records for individual devices may be identified by their unique ID number as explained above. With the separation into different database locations, it may be readily apparent which devices performed well in the memory testing steps and which devices did not.
[0075] In step 162, those devices ending up in bins 5-7 may go through reclaim, where they are retested in step 150. As indicated in the Background section, the type of retest may depend on which bin a device was classified into. After retest, the devices are again binned, and bad devices scanned. Database records for these devices that fail binning a second time may again be moved to a new database location. By this system, the MES database will have an express record of how a given device performed in testing step 150. Where a device fails multiple times, each instance and resulting binning will be stored in association with that device. The present system allows the MES control program to provide a variety of real-time data. In one aspect, the MES control program may indicate when a device has failed the testing step 150 a predetermined number of times, in which event that device may be removed from further testing.
[0076] In the system of steps 150 through 162, only those devices that failed testing are scanned. This provides advantages in that the devices which pass, which would typically be a very large number of devices, do not need to be scanned. However, in further embodiments, all devices may be scanned after test, and the information regarding their binning may also be added to the database. In embodiments, instead of removing bad device records, all records may be left within their original location in the database, but their record is updated to reflect the test result. Here again, only bad devices may be scanned and their record updated, or all devices may be scanned and their record updated.
[0077] For devices 210 which pass the testing step 150 (bins 1-4), the devices may be combined into a card test lot for a card test in step 166. The card testing steps may be similar to the memory testing steps, but additional or different tests are run, such as for example seeing how the devices 210 handle downloaded content. The devices 210 are subjected to a card test in step 166 and the devices are binned depending on how they perform in step 168. This binning may be by the same or different procedure than in the memory test step. Bad devices may be scanned in step 170, and their records moved to a new database location together with the binning information in step 174. These devices may be reclaimed in step 178, and the process repeated. Each time a device 210 goes through reclaim, its record, together with the reclaim information, may be moved to a new location upon failure.
[0078] Those devices 210 which pass the card test, may go through final labeling or handling in step 176 at which point the devices 210 are finished semiconductor packages ready for shipment. One aspect of the present technology allows identification of the best devices. That is, given the tracking of each device and storage of information about the device, the MES control program can identify devices which for example have only flawless semiconductor die (0,0 on the KGD map) and/or those which passed the memory test and card test without any reclaim. These devices may be segregated in step 180 for sale to customers requiring higher performance. The remaining good quality devices may be sold elsewhere. Similarly, devices which passed the memory and/or card tests after several reclaims may be segregated, for example to be sold at a lower price. Segregation step 180 may be omitted in further embodiments. [0079] Fig. 12 shows the table 220 further including records for all process tools a semiconductor device went through, and all testing procedures the semiconductor device went through. (The table 220 may also include all of the discrete component information shown in the table 220 of Fig. 9, which is omitted from Fig. 12 for clarity). The table 220 may further have records for each reclaim process a semiconductor device went through during a test operation. As above, the table 220 of Fig. 12 is shown by way of example only, and may include additional or different information in further embodiments.
[0080] The present system provides complete backward and forward traceability of a semiconductor device and its discrete components as the semiconductor device travels through the fabrication process, and the present system provides this traceability in realtime. Such a system provides better resolution than was possible with conventional tracking and traceability systems. As discussed in the Background section, conventional traceability systems did not have a unique ID associated with each device, and did not have the ability to trace back and track the specific discrete components (die, substrate and/or passives) used in a device. As one consequence, when a problem with a device was detected after fabrication, conventional systems had limited ability to find the problem. Prior art systems allowed identification of MES assembly lots, from which it could be determined what processes a given device went through. From this, further research could reveal a wafer lot, and possibly reveal where a problem occurred. However, such research was time consuming and did not provide any specific identification or information on the discrete components from which the semiconductor device was formed.
[0081] These problems are solved in the present system. Where a problem with a device is detected, a query to the MES database can instantly reveal all processes the device went through, as well as an identification, process steps and information relating to the specific die, substrate and/or passives used. Not only does this enable identification of the source of a problem more easily, but it can quickly reveal problem trends. Analysis of a small number of problem devices may quickly and easily identify a common factor between them, whether at the device level or the discrete component level. For example, it may happen that a sampling of problem devices reveals that each problem device was made using semiconductor die from a particular wafer sublot or lots coming from a particular wafer manufacturer. The ability to pinpoint the source of a problem, even when occurring at the discrete component level, provides a marked advance over conventional MES platforms.
[0082] Moreover, as traceability is possible in real-time, the source of a problem may be identified and remedied as soon as the problem is found, without wasting additional resources. For example, if a problem in a sampling of semiconductor devices during memory or card testing identifies a particular wafer lot or lots as the problem, the fabrication run may be stopped, and the problematic lot or lots removed from the process before further die from these wafers are incorporated into devices.
[0083] While the present system has been described in relation to a non-volatile memory package such as a memory card, it is understood that the methodology described herein may be used for complete backward and forward traceability in other semiconductor package technologies.
[0084] The MES control program and MES database may be part of an MES server 300, one example of which is now described with reference to Fig. 13. Components of MES server 300 may include, but are not limited to, a processor 302, a system memory 304, traceability database 306a, MES database 306b, various system interfaces and a system bus 308 that couples various system components. As noted above, the traceability database 306a and MES database 306b may be combined into a single database or distributed across multiple databases. The system bus 308 may be any of several types of bus structures including a memory bus or memory controller, a peripheral bus, and a local bus using any of a variety of bus architectures.
[0085] The system memory 304 includes computer storage media in the form of volatile and/or nonvolatile memory such as ROM 310 and RAM 312. RAM 312 may contain an operating system 313 for MES server 300, and the program modules of the MES software platform 314. One of these program modules may be the MES control program mentioned above. The MES control program may be that portion of the MES platform which directs various components of MES server 300 to retrieve data relating to the semiconductor devices 210 and the discrete components of the semiconductor devices 210. The MES control program may further be responsible for generating identifiers as described above. The MES control program may have further responsibilities. [0086] The traceability database 306a and the MES database 306b may each for example be a relational database including computer-readable media which together store all MES data including data relating to the semiconductor devices 210 and the discrete components of the semiconductor devices 210 discussed above. The databases 306a and/or 306b may store other types of data and information as well. Although shown as being part of MES server 300, the traceability database 306a and/or the MES database
306b may be remote from server 300, and may even be remote from the card fabrication plant in which the MES server may be located. There may be redundant and backup versions of one or both of the traceability database 306a and the MES database 306b in embodiments. Although not shown, the MES server 300 may also include a variety of other computer-readable media, including removable/non-removable, volatile/nonvolatile computer storage media.
[0087] The MES server 300 may include a variety of interfaces for the input and output of data and information. Input interface 316 receives data from a plurality of scanners 320 and input devices such as a keyboard 322 and mouse 324. The scanners 320 may be provided at process and test tools for reading the machine readable codes discussed above, such as the matrix code 218 on the semiconductor device 210. The scanners 320 may also read the machine readable codes on the discrete components. The number of scanners shown in Fig. 13 is by way of example only.
[0088] A video interface 330 may be provided for interfacing with a monitor 332. Monitor 332 may for example be used to provide a graphical user interface for fab personnel, and to display data from the various process and testing tools, as well as other plant operations. A peripheral interface 336 may be provided for supporting peripheral devices, including for example a printer 338.
[0089] The MES server 300 may operate in a networked environment via a network interface 340 using logical connections to one or more remote computers 344, 346. The logical connection to computer 344 may be a local area connection (LAN) 348, and the logical connection to computer 346 may be via the Internet 350. Other types of networked connections are possible. Thus, in addition to interfacing with the databases 306a and/or 306b to obtain traceability information within the card fabrication plant, the present system allows connection to the MES server 300 to obtain this information from any remote location having a network connection to the MES server.
[0090] It is understood that the above description of MES server 300 is by way of example only, and may include a wide variety of other components in addition to or instead of those described above.
[0091] In summary, one embodiment of the present technology relates to a system for tracking semiconductor packages. The system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate. The system further includes an identifier associated with the semiconductor device, the identifier uniquely distinguishing the semiconductor device from all other semiconductor devices.
[0092] In another embodiment, the present technology relates to a system for tracking semiconductor packages. The system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate. The system further includes an identifier associated with the semiconductor device, the identifier associating the specific semiconductor die used in the semiconductor device with the semiconductor device.
[0093] In a further embodiment, the present technology relates to a system for tracking semiconductor packages. The system includes a semiconductor device having a substrate and one or more semiconductor die mounted on the substrate. The system further includes an identifier associated with the semiconductor device, the identifier also associating with the semiconductor device: i) fabrication processes performed on the semiconductor device, ii) testing operations performed on the semiconductor device, and iii) how the semiconductor device performed in the testing operations.
[0094] In another embodiment, the present technology relates to a system for tracking semiconductor packages. The system includes a semiconductor device having a substrate, one or more semiconductor die mounted on the substrate, and passive components. The system further includes a computer-readable medium including stored information identifying at least one of: i) the substrate used in the semiconductor device, ii) the one or more semiconductor die used in the semiconductor device, iii) the passive components used in the semiconductor device, iv) tools at which the semiconductor was processed, v) tools at which the semiconductor device was tested, vi) binning of the semiconductor device after testing of the semiconductor device, and vii) whether and how many times the semiconductor device underwent a reclaim operation after a testing operation.
[0095] The foregoing detailed description of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the above teaching. The described embodiments were chosen in order to best explain the principles of the invention and its practical application to thereby enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto.

Claims

1. A system for tracking semiconductor packages, comprising:
a semiconductor device, the device including:
a substrate, and
one or more semiconductor die mounted on the substrate; and an identifier associated with the semiconductor device, the identifier uniquely distinguishing the semiconductor device from all other semiconductor devices.
2. The system of claim 1 , wherein the unique identifier is provided on a surface of the semiconductor device.
3. The system of claim 2, wherein the unique identifier is an alphanumeric code provided on the surface of the semiconductor device.
4. The system of claim 2, wherein the unique identifier is a machine-readable code provided on the surface of the semiconductor device.
5. The system of claim 1, wherein the unique identifier is stored in the memory of a computing device for monitoring a fabrication process for the semiconductor package.
6. The system of claim 1 , wherein the unique identifier identifies the one or more semiconductor die used in the semiconductor device.
7. The system of claim 1 , wherein the unique identifier identifies at least one of a manufacturer of the semiconductor die used in the semiconductor device, a time and place the semiconductor die were made and processes performed on the semiconductor die before incorporation into the semiconductor device.
8. The system of claim 1, wherein the unique identifier identifies the substrate used in the semiconductor device.
9. The system of claim 1 , wherein the unique identifier identifies at least one of a manufacturer of the substrate used in the semiconductor device, a time and place the substrate was made and processes performed on the substrate before incorporation into the semiconductor package.
10. The system of claim 1, wherein the unique identifier includes:
a time and place the semiconductor device was made,
a device assembly sublot from which the semiconductor device came, and an ID distinguishing each device made with the same time and place information and same device assembly sublot information.
11. The system of claim 1, wherein the unique identifier has the format of YWWDMLLXXX, where:
Y represents the year's last digit;
WW represents the week number within the year;
D represents the day within the week;
M represents the semiconductor package fabrication plant;
LL represents an alphanumeric 2-digit ID to designate each device assembly sublot; and
XXX represents an alphanumeric 3 -digit unique ID to distinguish each device made with the same date, location and device assembly sublot information.
12. The system of claim 1, wherein the semiconductor package is a non-volatile memory package.
13. A system for tracking semiconductor packages, comprising:
a semiconductor device, the device including:
a substrate, and
one or more semiconductor die mounted on the substrate; and an identifier associated with the semiconductor device, the identifier associating the specific semiconductor die used in the semiconductor device with the semiconductor device.
14. The system of claim 13, the identifier further associating the specific substrate used in the semiconductor device with the semiconductor device.
15. The system of claim 13, the semiconductor device further including a passive component, the identifier further associating the specific passive component used in the semiconductor device with the semiconductor device.
16. The system of claim 13, wherein the identifier further associates with the semiconductor device at least one of a manufacturer of the semiconductor die used in the semiconductor device, a time and place the semiconductor die were made and processes performed on the semiconductor die before incorporation into the semiconductor device.
17. The system of claim 13, wherein the identifier further associates with the semiconductor device at least one of a manufacturer of the substrate used in the semiconductor device, a time and place the substrate was made and processes performed on the substrate before incorporation into the semiconductor device.
18. The system of claim 13, wherein the one or more semiconductor die include a memory die, the identifier associating with the semiconductor device the specific memory die used, and at least one of a manufacturer of the memory die, when the one or more memory die were made and where the one or more memory die were made.
19. The system of claim 13, wherein the one or more semiconductor die include a controller die, the identifier associating with the semiconductor device the specific controller die used, and at least one of a manufacturer of the controller die, when the controller die was made and where the controller die was made.
20. The system of claim 13, wherein the identifier is unique to the semiconductor device.
21. The system of claim 13, wherein the identifier is displayed on a surface of the semiconductor device and stored in a computer memory associated with the system.
22. A system for tracking semiconductor packages, comprising:
a semiconductor device, the device including:
a substrate, and
one or more semiconductor die mounted on the substrate; and an identifier associated with the semiconductor device, the identifier also associating with the semiconductor device: i) fabrication processes performed on the semiconductor device, ii) testing operations performed on the semiconductor device, and iii) how the semiconductor device performed in the testing operations.
23. The system of claim 22, the identifier associating with the semiconductor device a bin into which the semiconductor device was classified.
24. The system of claim 22, the identifier associating with the semiconductor device whether the semiconductor device underwent any reclaim operations and, if so, the number of reclaim operations and what the reclaim operations were.
25. The system of claim 22, the identifier associating with the semiconductor device at least one of an identification of a tool used to process or test the semiconductor device, a maintenance history of the tool and fab personnel associated with that tool.
26. The system of claim 22, wherein the identifier enables classification of the semiconductor device, the classification used to identify and segregate a first group of semiconductor devices that performed better than a second group of semiconductor devices.
27. The system of claim 22, wherein the identifier is provided in a machine-readable code on a surface of the semiconductor device.
28. The system of claim 22, wherein the identifier is unique to the semiconductor device.
29. A system for tracking semiconductor packages, comprising:
a semiconductor device, the device including:
a substrate,
one or more semiconductor die mounted on the substrate, and passive components; and
a computer-readable medium including stored information identifying at least one of:
i) the substrate used in the semiconductor device,
ii) the one or more semiconductor die used in the semiconductor device,
iii) the passive components used in the semiconductor device, iv) tools at which the semiconductor device was processed, v) tools at which the semiconductor device was tested, vi) binning of the semiconductor device after testing of the semiconductor device, and
vii) whether and how many times the semiconductor device underwent a reclaim operation after a testing operation.
30. The system of claim 29, wherein the computer-readable medium is used within a database for a manufacturing execution system.
31. The system of claim 30, further comprising a network connection enabling access of the database within a fabrication plant where the semiconductor package is fabricated.
32. The system of claim 30, further comprising a network connection enabling access of the database outside of a fabrication plant where the semiconductor package is fabricated.
33. The system of claim 29, wherein the information stored on the computer-readable medium enables identification and segregation of a first group of semiconductor devices that performed better than a second group of semiconductor devices.
34. The system of claim 29, further comprising a plurality of scanners associated with the tools at which the semiconductor device is processed, the scanners scanning a unique code on the semiconductor device enabling information associated with the tools to be stored in association with the semiconductor device.
PCT/CN2010/077568 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability WO2012045202A1 (en)

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KR1020167006572A KR101700904B1 (en) 2010-10-04 2010-10-04 A semiconductor device and electronic device with discrete component backward traceability and forward traceability
PCT/CN2010/077568 WO2012045202A1 (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
JP2013530524A JP2013545266A (en) 2010-10-04 2010-10-04 Individual component backward traceability and semiconductor device forward traceability
US13/634,068 US20130006564A1 (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
KR1020127009314A KR101575831B1 (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
EP10858032.5A EP2625708A4 (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
BR112012004524A BR112012004524A2 (en) 2010-10-04 2010-10-04 discrete component back traceability and semiconductor device forward traceability
CN201080040554.4A CN102640253B (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
KR1020147024433A KR20140116560A (en) 2010-10-04 2010-10-04 Discrete component backward traceability and semiconductor device forward traceability
TW103126254A TWI570874B (en) 2010-10-04 2011-10-04 System and method for tracking semiconductor packages
TW100135930A TWI459533B (en) 2010-10-04 2011-10-04 System and method for tracking semiconductor packages
US15/053,575 US10229886B2 (en) 2010-10-04 2016-02-25 Discrete component backward traceability and semiconductor device forward traceability

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015114814A (en) * 2013-12-11 2015-06-22 株式会社デンソー Product history management method of semiconductor device

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2625708A4 (en) * 2010-10-04 2014-10-08 Sandisk Semiconductor Shanghai Co Ltd Discrete component backward traceability and semiconductor device forward traceability
JP6546810B2 (en) * 2015-08-24 2019-07-17 新電元工業株式会社 Inspection apparatus and inspection method
KR102328450B1 (en) * 2015-09-30 2021-11-19 삼성디스플레이 주식회사 Display apparatus
KR102391516B1 (en) 2015-10-08 2022-04-27 삼성전자주식회사 Semiconductor test apparatus
KR102503892B1 (en) 2015-12-31 2023-02-28 삼성전자주식회사 Package on package typed semiconducotor packages and methods for fabricating the same
WO2017136305A1 (en) * 2016-02-01 2017-08-10 Octavo Systems Llc Systems and methods for manufacturing electronic devices
DE102016112049B3 (en) 2016-06-30 2017-08-24 Infineon Technologies Ag METHOD FOR PRODUCING CZ-SILICON WAFERS AND METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE
KR102473662B1 (en) * 2017-10-18 2022-12-02 삼성전자주식회사 Method of manufacturing a semiconductor package
CN107808831B (en) * 2017-11-10 2021-03-16 上海华岭集成电路技术股份有限公司 Whole-course traceable semiconductor test data recording method
JP2019159240A (en) * 2018-03-16 2019-09-19 シャープ株式会社 Display panel
JP7101528B2 (en) * 2018-04-25 2022-07-15 東京エレクトロン株式会社 Board processing equipment
US10685918B2 (en) 2018-08-28 2020-06-16 Semiconductor Components Industries, Llc Process variation as die level traceability
US11063000B2 (en) * 2019-01-29 2021-07-13 Infineon Technologies Ag Semiconductor package authentication feature
JP7304709B2 (en) * 2019-02-19 2023-07-07 株式会社ディスコ Workpiece processing method
KR20200136605A (en) * 2019-05-28 2020-12-08 에스케이하이닉스 주식회사 System for Fabrication of Semiconductor Apparatus and Marking Method Using the Same
CN110349887A (en) * 2019-07-16 2019-10-18 沛顿科技(深圳)有限公司 The system of the single IC condition of production of retrospect based on two dimensional code
CN113361667B (en) * 2020-03-04 2024-02-27 奥特斯科技(重庆)有限公司 Component carrier inspection station for inspecting component carriers during the manufacture thereof
CN112242308B (en) * 2020-09-04 2024-02-02 嘉盛半导体(苏州)有限公司 Chip marking method, device, electronic equipment and storage medium
JP7185671B2 (en) * 2020-09-23 2022-12-07 株式会社Screenホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
KR102654727B1 (en) * 2021-07-21 2024-04-03 세메스 주식회사 Die bonding method and die bonding apparatus
CN117650088B (en) * 2024-01-30 2024-05-03 合肥康芯威存储技术有限公司 Positioning system and positioning method for material batch of memory chip

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020036235A1 (en) 1997-06-27 2002-03-28 Isao Kudo Semiconductor device and an information management system thereof
US6830941B1 (en) * 2002-12-17 2004-12-14 Advanced Micro Devices, Inc. Method and apparatus for identifying individual die during failure analysis
US6939727B1 (en) * 2003-11-03 2005-09-06 Lsi Logic Corporation Method for performing statistical post processing in semiconductor manufacturing using ID cells
US20080237353A1 (en) * 2007-03-29 2008-10-02 Joy Lau Unique identifier on integrated circuit device
US20100044858A1 (en) * 2008-08-19 2010-02-25 Cohn John M Product Chips and Die With a Feature Pattern That Contains Information Relating to the Product Chip, Methods for Fabricating Such Product Chips and Die, and Methods for Reading a Feature Pattern From a Packaged Die
CN101751592A (en) * 2008-12-17 2010-06-23 四川凯路威电子有限公司 Method and circuit for setting and reading unique identification code of chip on silicon wafer in batch

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2685969B1 (en) 1992-01-03 1994-03-04 Isocel Sarl LABEL FOR MARKING A PRODUCT.
JP3659981B2 (en) * 1992-07-09 2005-06-15 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド Apparatus comprising integrated circuits on a die characterized by die specific information
KR950010865B1 (en) * 1992-11-27 1995-09-25 금성일렉트론주식회사 Semiconductor package for process data
JPH07335510A (en) * 1994-06-09 1995-12-22 Hitachi Ltd Semiconductor device, supply of its identifier and defect analysis
US6063685A (en) 1998-08-07 2000-05-16 Advanced Micro Devices, Inc. Device level identification methodology
US6161213A (en) * 1999-02-17 2000-12-12 Icid, Llc System for providing an integrated circuit with a unique identification
US7342496B2 (en) 2000-01-24 2008-03-11 Nextreme Llc RF-enabled pallet
US6415977B1 (en) * 2000-08-30 2002-07-09 Micron Technology, Inc. Method and apparatus for marking and identifying a defective die site
US20020083374A1 (en) 2000-12-26 2002-06-27 Nortel Networks Limited Identification module for a passive component of a system
US6792365B2 (en) 2001-08-10 2004-09-14 Micron Technology, Inc. Sequential unique marking
JP2003280713A (en) * 2002-03-19 2003-10-02 Dainippon Printing Co Ltd Manufacturing information control system
JP2004127069A (en) * 2002-10-04 2004-04-22 Matsushita Electric Ind Co Ltd Quality information management system
JP2004193189A (en) 2002-12-09 2004-07-08 Matsushita Electric Ind Co Ltd Production management system of semiconductor device
EP1478022A1 (en) * 2003-05-13 2004-11-17 Infineon Technologies AG Integrated circuit package marked with product tracking information
US7094633B2 (en) 2003-06-23 2006-08-22 Sandisk Corporation Method for efficiently producing removable peripheral cards
KR20060117933A (en) * 2003-11-28 2006-11-17 마츠시타 덴끼 산교 가부시키가이샤 Circuit substrate manufacturing method and system, substrate used for the same, and circuit substrate using the same
US20050222817A1 (en) 2004-03-09 2005-10-06 Traceability System Architects, Inc. Computer implemented methods and systems for storing product history and/or failure data and/or analyzing causes of component and/or system failure
JP2005316826A (en) 2004-04-30 2005-11-10 Fujitsu Ltd Traceability management data formation method, traceability management data formation device, and traceability management data formation program
JP4620970B2 (en) 2004-05-24 2011-01-26 株式会社日立製作所 Quality control method and quality control system for semiconductor products
US20050283266A1 (en) 2004-06-17 2005-12-22 Geraci Gwen R Method and system for providing unit level traceability of semiconductor die
EP1810326A1 (en) 2004-10-15 2007-07-25 Applied Materials, Inc. Die-level traceability mechanism for semiconductor assembly and test facility
JP2006341937A (en) 2005-06-07 2006-12-21 Pentax Corp Decentralized traceability control system
US7653453B2 (en) 2006-03-13 2010-01-26 Mcgushion Kevin David Method for tracking characteristics in joined assemblies
US7615404B2 (en) 2006-10-31 2009-11-10 Intel Corporation High-contrast laser mark on substrate surfaces
JP4912848B2 (en) 2006-11-30 2012-04-11 株式会社日立製作所 Traceability system, server, traceability method, and traceability program
US20090254535A1 (en) 2008-04-02 2009-10-08 International Business Machines Corporation Search engine to improve product recall traceability activities
US7750444B2 (en) 2008-05-19 2010-07-06 Powertech Technology Inc. Lead-on-chip semiconductor package and leadframe for the package
US8754538B2 (en) 2008-06-24 2014-06-17 Infineon Technologies Ag Semiconductor chip including identifying marks
US8060758B2 (en) 2008-06-30 2011-11-15 Sap Ag Item tracing with supply chain secrecy using RFID tags and an identity-based encryption scheme
US20110259951A1 (en) * 2010-04-26 2011-10-27 Medtronic, Inc. Method for Tracing Individual Dies
EP2625708A4 (en) * 2010-10-04 2014-10-08 Sandisk Semiconductor Shanghai Co Ltd Discrete component backward traceability and semiconductor device forward traceability

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020036235A1 (en) 1997-06-27 2002-03-28 Isao Kudo Semiconductor device and an information management system thereof
US6830941B1 (en) * 2002-12-17 2004-12-14 Advanced Micro Devices, Inc. Method and apparatus for identifying individual die during failure analysis
US6939727B1 (en) * 2003-11-03 2005-09-06 Lsi Logic Corporation Method for performing statistical post processing in semiconductor manufacturing using ID cells
US20080237353A1 (en) * 2007-03-29 2008-10-02 Joy Lau Unique identifier on integrated circuit device
US20100044858A1 (en) * 2008-08-19 2010-02-25 Cohn John M Product Chips and Die With a Feature Pattern That Contains Information Relating to the Product Chip, Methods for Fabricating Such Product Chips and Die, and Methods for Reading a Feature Pattern From a Packaged Die
CN101751592A (en) * 2008-12-17 2010-06-23 四川凯路威电子有限公司 Method and circuit for setting and reading unique identification code of chip on silicon wafer in batch

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2625708A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015114814A (en) * 2013-12-11 2015-06-22 株式会社デンソー Product history management method of semiconductor device

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JP2013545266A (en) 2013-12-19
US20160181205A1 (en) 2016-06-23
KR20120091072A (en) 2012-08-17
KR101700904B1 (en) 2017-01-31
TW201234559A (en) 2012-08-16
US10229886B2 (en) 2019-03-12
CN102640253B (en) 2014-06-18
TWI459533B (en) 2014-11-01
EP2625708A4 (en) 2014-10-08
KR20160034423A (en) 2016-03-29
EP2625708A1 (en) 2013-08-14
KR20140116560A (en) 2014-10-02
KR101575831B1 (en) 2015-12-08
TWI570874B (en) 2017-02-11
US20130006564A1 (en) 2013-01-03
BR112012004524A2 (en) 2016-03-22
TW201503310A (en) 2015-01-16

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