WO2012043724A1 - 光制御素子 - Google Patents
光制御素子 Download PDFInfo
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- WO2012043724A1 WO2012043724A1 PCT/JP2011/072387 JP2011072387W WO2012043724A1 WO 2012043724 A1 WO2012043724 A1 WO 2012043724A1 JP 2011072387 W JP2011072387 W JP 2011072387W WO 2012043724 A1 WO2012043724 A1 WO 2012043724A1
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- light control
- modulation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
- G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
Definitions
- the present invention relates to a light control element, and more particularly, to a light control element having two or more signal electrodes in a modulation electrode.
- An optical control element in which an optical waveguide and a modulation electrode are formed on a substrate having an electro-optic effect such as lithium niobate, and a light wave propagating through the optical waveguide is modulated by the modulation electrode has been put into practical use.
- DQPSK modulation differential quadrature phase shift keying
- DQPSK modulation differential quadrature phase shift keying
- a Mach-Zehnder type optical waveguide (MZ type optical waveguide) is driven by a plurality of modulation signals.
- a light control element having a plurality of optical waveguides and a plurality of signal electrodes
- different modulation signals are often inputted to the respective signal electrodes, and different modulation signals are applied to the respective optical waveguides. It is configured. For this reason, when an electric field other than a predetermined modulation signal acts on a specific optical waveguide, optical characteristics of the light control element such as the extinction ratio of the signal light deteriorate. Such a phenomenon is called crosstalk.
- the problem to be solved by the present invention is to provide a light control element capable of solving the above-described problems and suppressing crosstalk between electrodes without increasing the size of the element itself.
- Another object of the present invention is to provide an optical control element that can perform a stable modulation operation even at a wideband frequency.
- an invention according to claim 1 is an optical control including a substrate having an electro-optic effect, an optical waveguide formed on the substrate, and a modulation electrode that modulates a light wave propagating through the optical waveguide.
- the modulation electrode includes at least two signal electrodes and a ground electrode disposed so as to sandwich the signal electrode, the ground electrode disposed between the two signal electrodes, and the other electrode.
- an electrical connecting means is provided so as to straddle part of the signal electrode.
- the electrical connection means is provided in an action portion where the modulation electrode exerts a modulation action on the light wave.
- an optical control element comprising: a substrate having an electro-optic effect; an optical waveguide formed on the substrate; and a modulation electrode for applying a high-frequency signal for modulating a light wave propagating through the optical waveguide.
- the modulation electrode has a ground electrode arranged so as to sandwich the signal electrode at an operation portion where the modulation electrode exerts a modulation action on the light wave, and operates the ground electrodes sandwiching the signal electrode.
- electrical connection is made by electrical connection means.
- the “operating state” means a state where a high frequency signal is applied to the modulation electrode, and “corresponding” means that it corresponds to a state that changes from moment to moment.
- the electrical connecting means is configured to arrange a plurality of conductive members made of conductive wires or conductive ribbons in parallel.
- the interval between the conductive members is set to be 1 ⁇ 2 wavelength or less of the electric signal propagating through the signal electrode.
- the modulation electrode is composed of at least two signal electrodes and a ground electrode disposed so as to sandwich the signal electrode, and the ground electrode disposed between the two signal electrodes;
- the ground state of the ground electrode is strengthened and stabilized, It is possible to suppress the electric field to be formed from exceeding the ground electrode and affecting the adjacent signal electrode and optical waveguide.
- the grounding state of the ground electrode is strengthened and stabilized by the electrical connection means, there is no need to widen between the optical waveguides and between the signal electrodes as in the prior art, and the size of the light control element itself increases. This can also be suppressed.
- the electrical connection means is provided in the working part where the modulation electrode exerts a modulating action on the light wave, the signal light is deteriorated in the working part most important for the formation of the signal light. Since it can suppress, the light control element excellent in optical characteristics, such as the extinction ratio of signal light, can be provided.
- the modulation electrode for applying the high-frequency signal has a ground electrode arranged so as to sandwich the signal electrode at a portion where the modulation electrode exerts a modulation action on the light wave, and the signal Since the ground electrodes sandwiching the electrodes are electrically connected by an electrical connection means in order to suppress the occurrence of a local potential difference corresponding to the operating state, the potential between the ground electrodes is stabilized, so the signal electrode and the ground electrode It is possible to maintain the same phase state on the left and right sides of the signal electrode, and to suppress the deterioration of the modulation characteristic at a wideband frequency.
- the electrical connecting means is configured to arrange a plurality of conductive members made of conductive wires or conductive ribbons in parallel, and the interval between the conductive members is an electric signal propagating through the signal electrode. Since the wavelength is set to be 1 ⁇ 2 wavelength or less, the leakage of the electric field formed by the signal electrode through the gap between the conductive members can be effectively suppressed, and the occurrence of crosstalk can be prevented. In addition, it is possible to efficiently apply the electric field formed by the signal electrode to the optical waveguide, and it is also possible to suppress the deterioration of the modulation characteristics at a wideband frequency.
- FIG. 2 is a cross-sectional view taken along one-dot chain line A-A ′ in FIG. 1. It is a top view concerning the light control element of the present invention. It is a figure explaining the difference in the optical signal waveform by the presence or absence of an electrical connection means.
- FIG. 1 is a schematic view of a light control element to which the present invention is applied
- FIG. 2 is a cross-sectional view taken along the alternate long and short dash line AA ′ in FIG.
- the light control element of the present invention modulates a substrate 1 having an electro-optic effect, an optical waveguide (21 to 23) formed on the substrate, and a light wave propagating through the optical waveguide.
- the modulation electrode is composed of at least two signal electrodes (31, 32) and a ground electrode (41 to 43) arranged so as to sandwich the signal electrode.
- the ground electrode disposed between the signal electrodes and the other ground electrode are electrically connected, and electrical connection means (51, 52) disposed so as to straddle part of the signal electrode. ).
- the substrate 1 having an electro-optic effect a single crystal of any one of LiNbO 3 , LiTaO 5 or PLZT (lead lanthanum zirconate titanate) can be suitably used.
- LiNbO 3 and LiTaO 5 frequently used in light control elements such as an optical modulator are preferable.
- the optical waveguide formed on the substrate is formed, for example, by thermally diffusing a high refractive index material such as titanium (Ti) on a LiNbO 3 substrate (LN substrate).
- a ridge-type optical waveguide in which irregularities along the optical waveguide are formed on the substrate can also be used.
- the light control element using the X-cut type substrate is illustrated in FIG. 2, the present invention is not limited to this and can be similarly applied to a Z-cut type substrate.
- FIG. 1 shows a so-called nested optical waveguide in which two sub-MZ optical waveguides 22 and 23 are inserted into a main MZ optical waveguide 21 in a nested manner.
- the light control element of the present invention is not limited to such an optical waveguide, but in a light control element having a plurality of light modulation portions such as a nested optical waveguide, a crosstalk phenomenon is likely to occur.
- the advantage of applying the configuration of the present invention is increased.
- the modulation electrode is composed of the signal electrodes 31 and 32 and the ground electrodes 41 to 43.
- the modulation electrode can be formed by forming a Ti / Au electrode pattern on the substrate surface and using a gold plating method or the like. Furthermore, if necessary, a buffer layer such as dielectric SiO 2 can be provided on the surface of the substrate after the optical waveguide is formed, and a modulation electrode can be formed above the buffer layer.
- the light control element to which the present invention is applied is particularly preferable for an element having a configuration in which a ground electrode is disposed between a plurality of signal electrodes.
- a conductive wire or a conductive ribbon having a high conductivity such as a gold wire or a gold ribbon
- it may be an electrical connection means for forming a through hole in the substrate and connecting from the front side of the substrate to the front side again through the back side.
- a plurality of conductive members 51 and 52 made of conductive wires or conductive ribbons a plurality of conductive members are arranged in parallel as shown in FIG. By arranging a plurality of conductive members in this manner, the ground state between the ground electrodes can be strengthened and stabilized.
- a bridge-shaped structure body made of a conductive material can be attached with a conductive adhesive.
- the light control element is usually housed in a metal case and modularized.
- the ground electrode near the side surface of the light control element is connected to the ground side terminal of the signal line introduced from the metal case or the outside.
- the interval L between the conductive members is set to be equal to or less than 1 ⁇ 2 wavelength of the electric signal propagating through the signal electrode, it is possible to suppress the leakage of the electric field from the signal electrode beyond the ground electrode. It becomes possible. More preferably, the crosstalk can be reliably suppressed by setting the interval L to 1/10 or less of the wavelength of the electric signal.
- the electric field formed by the signal electrode is efficiently applied to the optical waveguide, it is possible to suppress a decrease in modulation efficiency at a broadband frequency.
- FIG. 4 is a diagram showing a signal waveform when a gold wire is used as the conductive material and the conductive material is arranged as shown in FIG. 3 at an interval L of 1/10 of the wavelength of the electric signal.
- FIG. 4A shows a state where no electrical connection means is provided (before improvement)
- FIG. 4B shows a case where electrical connection means is provided (after improvement).
- the electrical connection means is provided in an action portion where the modulation electrode exerts a modulation action on the light wave. This is because it is necessary to most suppress the crosstalk phenomenon in the action portion. Further, such an action part exists near the center of the substrate of the light control element, and is farthest from a place where the ground electrode is grounded to the metal case of the module (near the upper and lower side surfaces of the light control element shown in FIG. 3). Often in place. For this reason, since it is difficult to ensure a sufficient grounding state, it is necessary to reinforce and stabilize the grounding state using the electrical connection means as in the present invention.
- ground electrodes when isolated ground electrodes (45, 46) are generated as shown in FIG. 3 due to the relationship with the signal electrodes and the optical waveguide, the ground electrodes are electrically connected using the conductive materials 53, 54, etc. It is more preferable to connect to and stabilize the grounding state.
- the present invention it is possible to provide a light control element capable of suppressing crosstalk between electrodes without increasing the size of the element itself.
- an optical control element capable of stable modulation operation even at a wideband frequency.
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- Nonlinear Science (AREA)
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- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
本発明の光制御素子は、図1及び2に示すように、電気光学効果を有する基板1と、該基板に形成された光導波路(21~23)と、該光導波路を伝播する光波を変調する変調電極とを有する光制御素子において、該変調電極は、少なくとも二つの信号電極(31,32)と該信号電極を挟むように配置された接地電極(41~43)から構成され、二つの該信号電極の間に配置された該接地電極と、それ以外の該接地電極とを電気的に接続すると共に、該信号電極の一部を跨ぐように配置された電気的接続手段(51,52)を設けることを特徴とする。
21~23 光導波路
31,32 信号電極
41~47 接地電極
51~54 導電部材
Claims (4)
- 電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調する変調電極とを有する光制御素子において、
該変調電極は、少なくとも二つの信号電極と該信号電極を挟むように配置された接地電極から構成され、
二つの該信号電極の間に配置された該接地電極と、それ以外の該接地電極とを電気的に接続すると共に、該信号電極の一部を跨ぐように配置された電気的接続手段を設けることを特徴とする光制御素子。 - 請求項1に記載の光制御素子において、該電気的接続手段は、該変調電極が該光波に変調作用を及ぼしている作用部分に設けられていることを特徴とする光制御素子。
- 電気光学効果を有する基板と、該基板に形成された光導波路と、該光導波路を伝播する光波を変調する高周波信号を印加する変調電極とを有する光制御素子において、
該変調電極は、該変調電極が該光波に変調作用を及ぼしている作用部分で、信号電極を挟むように配置された接地電極を有し、
該信号電極を挟む該接地電極同士を、動作状態に対応した局所的な電位差発生を抑制するため電気的接続手段で電気的に接続することを特徴とする光制御素子。 - 請求項1乃至3のいずれかに記載の光制御素子において、該電気的接続手段は、導電線又は導電性リボンからなる導電部材を複数並列に配置するよう構成され、各導電部材の間隔は、該信号電極を伝播する電気信号の1/2波長以下となるよう設定されていることを特徴とする光制御素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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US13/876,811 US9568751B2 (en) | 2010-09-30 | 2011-09-29 | Optical control device |
CN201180047322.6A CN103124923B (zh) | 2010-09-30 | 2011-09-29 | 光控制元件 |
EP11829277.0A EP2624045B1 (en) | 2010-09-30 | 2011-09-29 | Light control element |
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JP2010222572A JP5067464B2 (ja) | 2010-09-30 | 2010-09-30 | 光制御素子 |
JP2010-222572 | 2010-09-30 |
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WO2012043724A1 true WO2012043724A1 (ja) | 2012-04-05 |
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US (1) | US9568751B2 (ja) |
EP (1) | EP2624045B1 (ja) |
JP (1) | JP5067464B2 (ja) |
CN (1) | CN103124923B (ja) |
WO (1) | WO2012043724A1 (ja) |
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JP5276681B2 (ja) * | 2011-02-09 | 2013-08-28 | アンリツ株式会社 | 光変調器 |
JP5612539B2 (ja) * | 2011-05-26 | 2014-10-22 | 日本電信電話株式会社 | 光変調器およびその作製方法 |
JP5991339B2 (ja) * | 2014-03-31 | 2016-09-14 | 住友大阪セメント株式会社 | 光制御素子 |
JP6586223B2 (ja) * | 2016-03-18 | 2019-10-02 | 日本電信電話株式会社 | 光変調器 |
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JP6414116B2 (ja) * | 2016-03-25 | 2018-10-31 | 住友大阪セメント株式会社 | 光変調器 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07199134A (ja) * | 1993-11-22 | 1995-08-04 | At & T Corp | 光導波路変調器中の温度効果を減すための光電子デバイス構造及び方法 |
JP2005274889A (ja) * | 2004-03-24 | 2005-10-06 | Ngk Insulators Ltd | 光導波路デバイス |
JP2007264063A (ja) * | 2006-03-27 | 2007-10-11 | Mitsubishi Precision Co Ltd | 光導波路変調器及び光ファイバジャイロ |
JP2009053444A (ja) | 2007-08-27 | 2009-03-12 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP2009181108A (ja) * | 2008-02-01 | 2009-08-13 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP2010072129A (ja) * | 2008-09-17 | 2010-04-02 | Fujitsu Ltd | 電子デバイス |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5252180A (en) * | 1990-05-17 | 1993-10-12 | Xerox Corporation | Electrical contacts for an electro-optic modulator |
SE467330B (sv) * | 1990-10-03 | 1992-06-29 | Ericsson Telefon Ab L M | Saett att linearisera en oeverfoeringsfunktion hos en modulatoranordning samt modulatoranordning med lineariserad oeverfoeringsfunktion |
JPH07325276A (ja) * | 1994-05-30 | 1995-12-12 | Nippon Telegr & Teleph Corp <Ntt> | 偏波無依存光制御素子 |
US6192167B1 (en) * | 1998-07-24 | 2001-02-20 | Uniphase Telecommunications Products | Differential drive optical modulator |
US7027668B2 (en) | 2002-05-02 | 2006-04-11 | Covega Corporation | Optical modulators with coplanar-waveguide-to-coplanar-strip electrode transitions |
JP3847668B2 (ja) * | 2002-06-13 | 2006-11-22 | 日本オプネクスト株式会社 | 進行波型光変調装置 |
JP3695717B2 (ja) * | 2002-09-17 | 2005-09-14 | 住友大阪セメント株式会社 | 光変調器 |
JP2008116865A (ja) * | 2006-11-08 | 2008-05-22 | Sumitomo Osaka Cement Co Ltd | ネスト型変調器 |
WO2008114349A1 (ja) * | 2007-03-16 | 2008-09-25 | Fujitsu Limited | 光導波路デバイス |
JP5326624B2 (ja) * | 2009-02-10 | 2013-10-30 | 富士通オプティカルコンポーネンツ株式会社 | 光変調器 |
US8849071B2 (en) * | 2009-12-30 | 2014-09-30 | Jds Uniphase Corporation | Optical waveguide modulator |
-
2010
- 2010-09-30 JP JP2010222572A patent/JP5067464B2/ja active Active
-
2011
- 2011-09-29 US US13/876,811 patent/US9568751B2/en active Active
- 2011-09-29 WO PCT/JP2011/072387 patent/WO2012043724A1/ja active Application Filing
- 2011-09-29 EP EP11829277.0A patent/EP2624045B1/en active Active
- 2011-09-29 CN CN201180047322.6A patent/CN103124923B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07199134A (ja) * | 1993-11-22 | 1995-08-04 | At & T Corp | 光導波路変調器中の温度効果を減すための光電子デバイス構造及び方法 |
JP2005274889A (ja) * | 2004-03-24 | 2005-10-06 | Ngk Insulators Ltd | 光導波路デバイス |
JP2007264063A (ja) * | 2006-03-27 | 2007-10-11 | Mitsubishi Precision Co Ltd | 光導波路変調器及び光ファイバジャイロ |
JP2009053444A (ja) | 2007-08-27 | 2009-03-12 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP2009181108A (ja) * | 2008-02-01 | 2009-08-13 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP2010072129A (ja) * | 2008-09-17 | 2010-04-02 | Fujitsu Ltd | 電子デバイス |
Non-Patent Citations (1)
Title |
---|
See also references of EP2624045A4 * |
Also Published As
Publication number | Publication date |
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CN103124923B (zh) | 2014-11-12 |
CN103124923A (zh) | 2013-05-29 |
US9568751B2 (en) | 2017-02-14 |
EP2624045A1 (en) | 2013-08-07 |
JP5067464B2 (ja) | 2012-11-07 |
EP2624045B1 (en) | 2016-11-02 |
JP2012078496A (ja) | 2012-04-19 |
US20130243364A1 (en) | 2013-09-19 |
EP2624045A4 (en) | 2014-03-19 |
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