WO2012032798A1 - 真空装置用照明器具 - Google Patents
真空装置用照明器具 Download PDFInfo
- Publication number
- WO2012032798A1 WO2012032798A1 PCT/JP2011/053645 JP2011053645W WO2012032798A1 WO 2012032798 A1 WO2012032798 A1 WO 2012032798A1 JP 2011053645 W JP2011053645 W JP 2011053645W WO 2012032798 A1 WO2012032798 A1 WO 2012032798A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum
- viewing window
- peripheral wall
- chamber
- led
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V33/00—Structural combinations of lighting devices with other articles, not otherwise provided for
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V33/00—Structural combinations of lighting devices with other articles, not otherwise provided for
- F21V33/0004—Personal or domestic articles
- F21V33/0052—Audio or video equipment, e.g. televisions, telephones, cameras or computers; Remote control devices therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2215/00—Special procedures for taking photographs; Apparatus therefor
- G03B2215/05—Combinations of cameras with electronic flash units
- G03B2215/0564—Combinations of cameras with electronic flash units characterised by the type of light source
- G03B2215/0567—Solid-state light source, e.g. LED, laser
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2215/00—Special procedures for taking photographs; Apparatus therefor
- G03B2215/05—Combinations of cameras with electronic flash units
- G03B2215/0564—Combinations of cameras with electronic flash units characterised by the type of light source
- G03B2215/0575—Ring shaped lighting arrangements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
10B 真空装置用照明器具
11 連結アダプタ
12 開口
13 LED(発光ダイオード)
14 周壁
15 LED設置板
16 前端部
17 中間部
18 後端部
22 光拡散板
26 光反射板
27 CCDカメラ(撮像装置)
28 ディスプレイ(表示装置)
50 真空装置
51 真空チャンバー
52 搬送ユニット
60 覗き窓
Claims (9)
- 真空装置の内部を視認するための覗き窓に取り付けられ、前記真空装置の内部を照らす真空装置用照明器具において、
前記照明器具が、前記覗き窓に連結手段を介して着脱可能に連結される連結アダプタと、前記連結アダプタの中央部に形成されて前記覗き窓をとおして前記真空装置の内部を視認可能な開口と、前記連結アダプタに設置されて前記覗き窓に対向する複数個のLED(発光ダイオード)とを有することを特徴とする真空装置用照明器具。 - 前記連結アダプタが、前記覗き窓の側に位置する前端部と前記前端部の反対側に位置する後端部と前記前後端部の間に位置する中間部とを有して軸方向へ延びる周壁と、前記周壁の中間部における内周面に固定されて前記開口を取り囲むように該周壁の径方向内方へ延びる環状のLED設置板とから形成され、前記複数個のLEDが、前記LED設置板の前記覗き窓に対向する対向面に設置されている請求項1記載の真空装置用照明器具。
- 前記複数個のLEDが、前記LED設置板の対向面の周り方向へ等間隔で並んでいる請求項2記載の真空装置用照明器具。
- 前記LEDから放射された光を拡散する光拡散板が、前記連結アダプタの周壁の前端部および中間部における内周面と前記LED設置板の対向面とのうちの少なくとも一方に取り付けられている請求項2または請求項3に記載の真空装置用照明器具。
- 前記LEDから放射された光を反射する光反射板が、前記連結アダプタの周壁の前端部および中間部における内周面と前記LED設置板の対向面とのうちの少なくとも一方に取り付けられている請求項2または請求項3に記載の真空装置用照明器具。
- 前記照明器具が、前記連結アダプタの周壁の後端部に着脱可能に設置されて前記真空装置の内部を撮影する撮像装置と、前記撮像装置が撮影した映像を表示する表示装置とを含む請求項1ないし請求項5いずれかに記載の真空装置用照明器具。
- 前記撮像装置が、CCDイメージセンサを有するCCDカメラである請求項6記載の真空装置用照明器具。
- 前記真空装置が、真空チャンバーと、前記真空チャンバーに連接されて該真空チャンバーの内部に真空処理対象物を搬送する搬送手段を有する搬送ユニットとを備え、前記覗き窓が、前記真空チャンバーと前記搬送ユニットとのうちの少なくとも該真空チャンバーに形成され、前記照明器具が、前記真空チャンバーと前記搬送ユニットとのうちの少なくとも該真空チャンバーに形成された覗き窓に設置される請求項1ないし請求項7いずれかに記載の真空装置用照明器具。
- 前記表示装置が、前記搬送ユニットの搬送手段の近傍に設置されている請求項8記載の真空装置用照明器具。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201180043532.8A CN103097802B (zh) | 2010-09-09 | 2011-02-21 | 真空装置用照明器具 |
US13/821,656 US9360205B2 (en) | 2010-09-09 | 2011-02-21 | Lighting apparatus for vacuum apparatus |
KR1020137005507A KR101455549B1 (ko) | 2010-09-09 | 2011-02-21 | 진공 장치용 조명기구 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010-201568 | 2010-09-09 | ||
JP2010201568A JP5555104B2 (ja) | 2010-09-09 | 2010-09-09 | 真空装置用照明器具 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012032798A1 true WO2012032798A1 (ja) | 2012-03-15 |
Family
ID=45810406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/053645 WO2012032798A1 (ja) | 2010-09-09 | 2011-02-21 | 真空装置用照明器具 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9360205B2 (ja) |
JP (1) | JP5555104B2 (ja) |
KR (1) | KR101455549B1 (ja) |
CN (1) | CN103097802B (ja) |
WO (1) | WO2012032798A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10498933B2 (en) | 2011-11-22 | 2019-12-03 | Cognex Corporation | Camera system with exchangeable illumination assembly |
KR102220180B1 (ko) * | 2014-08-21 | 2021-02-25 | 엘지전자 주식회사 | 디스플레이 장치 및 디스플레이 장치의 진공 제어 방법 |
JP6546820B2 (ja) * | 2015-09-14 | 2019-07-17 | 能美防災株式会社 | 感度試験器及び感度試験システム |
US11589661B2 (en) | 2017-01-12 | 2023-02-28 | Dyson Technology Limited | Hand held appliance |
CN107062081A (zh) * | 2017-05-12 | 2017-08-18 | 长园电力技术有限公司 | 一种气密封照明可视装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194831A (ja) * | 2006-01-18 | 2007-08-02 | Toshiba Teli Corp | 耐真空用カメラ |
JP2008306162A (ja) * | 2007-05-08 | 2008-12-18 | Tokyo Electron Ltd | 処理装置、処理方法、被処理体の認識方法および記憶媒体 |
JP2009168612A (ja) * | 2008-01-16 | 2009-07-30 | R-Dec Co Ltd | 水素量測定装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2567234Y (zh) * | 2002-09-05 | 2003-08-20 | 西安电子科技大学 | 光化学气相沉积设备的光透过窗口装置 |
JP2009006877A (ja) | 2007-06-28 | 2009-01-15 | Bridgestone Corp | 重荷重タイヤ |
CN101082678A (zh) * | 2007-07-09 | 2007-12-05 | 李启山 | 一种测压重力仪原理 |
-
2010
- 2010-09-09 JP JP2010201568A patent/JP5555104B2/ja active Active
-
2011
- 2011-02-21 WO PCT/JP2011/053645 patent/WO2012032798A1/ja active Application Filing
- 2011-02-21 CN CN201180043532.8A patent/CN103097802B/zh not_active Expired - Fee Related
- 2011-02-21 KR KR1020137005507A patent/KR101455549B1/ko active IP Right Grant
- 2011-02-21 US US13/821,656 patent/US9360205B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194831A (ja) * | 2006-01-18 | 2007-08-02 | Toshiba Teli Corp | 耐真空用カメラ |
JP2008306162A (ja) * | 2007-05-08 | 2008-12-18 | Tokyo Electron Ltd | 処理装置、処理方法、被処理体の認識方法および記憶媒体 |
JP2009168612A (ja) * | 2008-01-16 | 2009-07-30 | R-Dec Co Ltd | 水素量測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2012059538A (ja) | 2012-03-22 |
KR101455549B1 (ko) | 2014-10-27 |
CN103097802A (zh) | 2013-05-08 |
KR20130047753A (ko) | 2013-05-08 |
JP5555104B2 (ja) | 2014-07-23 |
CN103097802B (zh) | 2015-04-22 |
US9360205B2 (en) | 2016-06-07 |
US20130222572A1 (en) | 2013-08-29 |
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