Classifications

• • A—HUMAN NECESSITIES
  • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
  • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
  • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
  • A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
  • A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
• • A—HUMAN NECESSITIES
  • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
  • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
  • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
  • A61B6/48—Diagnostic techniques
  • A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
  • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
  • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
  • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
  • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
  • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
  • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
  • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
  • G02B5/1871—Transmissive phase gratings
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B11/00—Measuring arrangements characterised by the use of optical techniques
  • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
  • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
  • G01B11/2518—Projection by scanning of the object
  • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
  • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2223/00—Investigating materials by wave or particle radiation
  • G01N2223/10—Different kinds of radiation or particles
  • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
  • G01N2223/1016—X-ray
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2223/00—Investigating materials by wave or particle radiation
  • G01N2223/30—Accessories, mechanical or electrical features
  • G01N2223/32—Accessories, mechanical or electrical features adjustments of elements during operation
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
  • G02B5/1838—Diffraction gratings for use with ultraviolet radiation or X-rays
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
  • G02B5/1842—Gratings for image generation
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/18—Diffraction gratings
  • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
  • G02B5/189—Structurally combined with optical elements not having diffractive power
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
  • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K2201/00—Arrangements for handling radiation or particles
  • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
  • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Definitions

• the present invention relates to an X-ray imaging
• phase of the X-rays is changed due to the constituent elements and the difference in density of the subject.
• the research of the phase contrast imaging method using the phase change of the X-rays has been conducted since the 1990s.
• One of the phase contrast imaging methods is described in Patent Document 1.
• the method is a kind of a method referred to as a phase stepping method.
• the phase stepping method is featured in that the method is influenced by neither the transmittance distribution of the subject nor the spatial
• Patent Document 1 proposes an X-ray imaging apparatus as described below. In the apparatus, X-rays
• a periodic interference pattern referred to as a self-image is formed at a position away from the diffraction grating by a
• a masking grating having the same period as the period of the interference pattern is provided at the position where the interference pattern is formed, and the generated moire is detected by an X-ray detector.
• the apparatus is configured such that the phase information of the X-rays transmitted through the subject is acquired on the basis of three or more moire images detected by moving the diffraction grating or the masking grating at a constant interval, and such that a phase contrast image of the subject is obtained from the phase information.
• apparatus includes: a diffraction grating which diffracts X-rays emitted from an X-ray source to thereby form an interference pattern having two-dimensionally arranged bright and dark zones; a masking grating in which masking portions for masking the X-rays and transmitting portions for transmitting the X-rays are two-dimensionally arranged to partially mask each of the bright zones of the interference pattern; a moving device which changes the relative position between the interference pattern and the masking grating; a detector which detects the intensity distribution of the X-rays transmitted through the masking grating; and a calculator which calculates a differential phase contrast image or a phase contrast image of a subject on the basis of the result of detection performed by the detector, the calculator being configured to calculate the
• differential phase contrast image or the phase contrast image in each of two mutually crossing directions on the basis of results of detection performed a plurality of times by the detector.
• FIG. 1 is a diagram for describing a
• FIG. 2 is a diagram for describing a
• Example 1 diffraction grating of an X-ray imaging apparatus in Example 1.
• FIG. 3 is a diagram for describing an
• FIG. 4 is a diagram for describing a masking grating in Example 1.
• FIG. 5A is a diagram for describing a state where the interference pattern and the masking grating overlap with each other in Example 1.
• FIG. 5B is a diagram for describing a state where the interference pattern and the masking grating overlap with each other in Example 1.
• FIG. 6 is a diagram for describing a
• FIG. 7 is a diagram illustrating measurement steps in Example 1.
• FIG. 8A is a diagram for describing a
• Example 2 diffraction grating of an X-ray imaging apparatus in Example 2.
• FIG. 8B is a diagram for describing an interference pattern in Example 2.
• FIG. 8C is a diagram for describing a masking grating in Example 2.
• FIG. 9A is a diagram for describing a state where the interference pattern and the masking grating overlap with each other in Example 2.
• FIG. 9B is a diagram for describing a state where the interference pattern and the masking grating overlap with each other in Example 2.
• FIG. 10 is a diagram for describing a
• FIG. 11A is a diagram for describing a
• FIG. 11B is a diagram for describing an interference pattern in Example 3.
• FIG. llC is a diagram for describing a
• An imaging apparatus illustrated in FIG. 1 includes: an X-ray source 1 which emits X-rays; a diffraction
• grating 4 which diffracts X-rays emitted from the X-ray source 1 to form an interference pattern having two- dimensionally arranged bright and dark zones; a moving device 5 for diffraction grating which changes the position of the diffraction grating 4 in the grating surface of the diffraction grating 4; a masking grating 6 in which transmitting portions for transmitting X- rays and masking portions for masking X-rays are two- dimensionally arranged; a moving device 7 for masking grating which changes the position of the masking grating 6 in the grating surface of the masking grating 6; an X-ray detector 8 which acquires the intensity distribution of X-rays transmitted through the masking grating 6; and a calculator 9 which calculates a
• the moving device 5 for diffraction grating and the moving device 7 for masking grating are moving device for changing the relative position between the interference pattern and the masking grating 6, and hence it is not always necessary to provide both the moving devices. Further, when the relative position between the interference pattern and the masking
• grating 6 can be moved by, for example, a moving device for X-ray source for moving the X-ray source, neither the moving device 5 for diffraction grating nor the moving device 7 for masking grating need to be provided.
• PTL 2 discloses the method of moving an X-ray source
• an X-ray source is moved to an opposite direction of the movement of the interference pattern. Then, a movement distance of the interference pattern on a diffraction gratings is derived by multiplying the movement distance of the X- ray source by an amount derived when the distance between the diffraction gratings and a masking portion is divided by the distance between the X-ray source and the diffraction gratings.
• phase advance portions and phase lag portions are two-dimensionally and
• a phase type diffraction grating according to the present embodiment has a structure in which the thickness of the X-ray transmitting member is
• ⁇ represents the wavelength of X-ray 2
• the diffraction grating is a phase type diffraction grating in which the phase advance portions and the phase lag portions are
• N is a real number expressed by n-1/2, while in the case where the amount of phase shift is n and where the diffraction grating is a phase type diffraction grating in which the phase advance portions and the phase lag portions are
• N is a real number expressed by n/2-1/4.
• N is a real number expressed by n.
• n is a natural number.
• transmitting X-rays are two-dimensionally arranged.
• the masking grating 6 is. arranged at the position where the interference pattern is formed, and partially masks of each of the bright zones of the interference pattern by each of the . masking portions.
• the period of the masking grating 6 of the present embodiment is set to coincide with the period of the interference pattern in the state where a subject 3 does not exist, and the direction of the period of the masking grating 6 is also set to coincide with the direction of the period of the interference pattern.
• he moving device 5 for diffraction grating has a
• the driving device to move the diffraction grating 4 in the direction of the period of the diffraction grating 4.
• the interference pattern is also moved.
• the interference pattern is moved, the relative position between the
• the moving device 7 for masking grating has a driving device to move the masking grating 6 in the direction of the period of the masking grating 6.
• the relative position between the interference pattern and the masking grating 6 is changed, so that the amount of X-rays transmitted through the respective transmitting
• portions of the masking grating 6 is periodically changed.
• the detector 8 detects, a plurality of times, the
• the calculator 9 calculates a differential phase contrast image in each of the mutually-crossing two directions on the basis of the results of detection performed the plurality of times by the detector 8, and calculates a phase contrast image by integrating the differential phase contrast image.
• the method of calculation of the phase contrast image of the subject performed by calculator 9 will be described below.
• the subject 3 is arranged between the X-ray source 1 and the diffraction grating 4. However, it may also be arranged between the diffraction grating 4 and the masking grating 6.
• the positions, at which the bright zones and the dark zones of the interference pattern are respectively formed are changed according to the refractive index distribution of the subject. The reason for this will be described briefly below.
• the differential phase which is the spatial change rate of the phase of the X- ray is also changed. Since the traveling direction of the X-ray is changed in proportion to the differential phase of the X-ray, the positions of the bright and dark zones of the interference pattern on the masking grating 6 are also changed in proportion to the
• One of the diffraction grating 4 and the masking grating 6 is moved, by corresponding one of the moving device 5 and the moving device 7, in one direction in the grating surfaces of the one of the diffraction grating 4 and the masking grating 6, so that the relative position between the interference pattern and the masking grating 6 is changed in the one direction at an equal interval.
• the intensity distribution of the X-rays transmitted through the masking grating 6 is detected by the X-ray detector 8 at least at three relative positions corresponding to the changes in the relative position between the masking grating 6 and the interference pattern.
• the positional change ⁇ of the interference pattern in the x direction can be calculated.
• the differential phase contrast image in each of two mutually crossing directions can be obtained in such a manner that the relative position between the
• interference pattern and the masking grating is changed in the direction crossing the x direction so that the intensity distribution of the X-rays is detected at least three relative positions corresponding to the changes in the relative position, and that the
• the calculation processing based on the detection results is performed. Even when the two mutually crossing directions are not orthogonal to each other, the two- dimensional differential phase contrast image or phase contrast image of the subject can be obtained. However, when the detection is performed in the two directions which are not orthogonal to each other, the calculation processing for obtaining the two-dimensional
• differential phase contrast image or phase contrast image generally becomes complicated.
• differential phase contrast images in two directions orthogonal to each other are obtained in such a manner that the relative position between the interference pattern and the masking grating 6 is moved by moving the diffraction grating 4 or the masking grating 6 in the two directions orthogonal to each other, that the intensity distribution of X-rays is detected by the detector 8 in correspondence with the movement of the relative position, and that the
• the period of the masking grating 6 is made to coincide with the period of the interference pattern formed on the masking grating in the state where the subject 3 does not exist between the X-ray source 1 and the diffraction grating 4 or between the diffraction grating 4 and the masking grating 6. Also, the direction of the period of the masking grating 6 is made to coincide with the direction of the period of " the " interference pattern. Therefore, when the subject 3 does not exist, the relative positions x 0 between the respective transmitting portions of the masking grating 6 and the respective bright zones of the interference pattern are equal to each other over the entire area of the interference pattern.
• the shape of the differential phase of X-ray is not changed.
• the measurement in the state where the subject 3 does not exist does not necessarily need to be performed in order to obtain the phase contrast image.
• the differential phase change obtained by subtracting the differential phase of an X-ray measured in the state where the subject 3 does not exist from the differential phase of an X-ray measured in the state where the subject 3 exist, is used as the differential phase change of the X-ray caused by the subject 3, the period and the direction of the period of the masking grating 6 may not strictly coincide with that of the interference pattern.
• differential phase contrast images in two mutually crossing directions can be obtained without exchanging the diffraction grating or changing the attaching direction of the diffraction grating. Further, the differential phases in the two directions can be calculated by commonly using one detection result, and hence the number times of the detection of the X-ray intensity distribution can be reduced by one.
• Example 1 according to the present invention 1 will be described with reference to FIG. 1 to FIG. 7.
• an X-ray imaging apparatus of Example 1 has the configuration illustrated in FIG. 1, in which X-rays emitted from the X-ray source is transmitted through the subject, the diffraction grating, and the masking grating, so as to reach the X- ray detector. Further, the relative position between the interference pattern and the masking grating is changed by the moving device for diffraction grating, and the position of the masking grating is fixed.
• FIG. 2 is a view of a part of the diffraction grating 4 in the present example seen from the side of the X-ray source.
• a phase type In the present example, a phase type
• phase advance portions 41 and phase lag portions 42 are used as the diffraction grating.
• phase advance portion 41 and the phase lag portion 42 have a difference in the thickness of silicon so that the phase difference between the X-ray transmitted through the phase advance portion 41 and the X-ray transmitted through the phase lag portion 42 becomes n/2, and are arranged with a period d.
• the masking grating is arranged such that the interval Zo between the diffraction grating and the masking grating satisfies Expression (1) so that an
• N 1/2.
• FIG. 3. illustrates the interference pattern formed on the masking grating when the diffraction grating of the present example is used, and the period di of the interference pattern is ex ressed by Expression (3).
• FIG. 4 is a view of a part of the masking grating in the present example seen from the side of the X-ray source.
• the masking grating is made of gold having a small transmittance to X-rays, and has transmitting portions 61 for transmitting the X-ray which are arranged in a mesh pattern at the same period di as the period of the interference pattern.
• the transmitting portion 61 has a square shape having one side of di/2.
• FIG. 5A and FIG. 5B which illustrate the masking
• the X-ray interference pattern which portions respectively overlap with the transmitting portions 61 of the masking grating, are transmitted through the masking grating to reach the X-ray detector.
• the detector is configured by a CCD (Charge Coupled Device) imaging device having an X-ray luminescent material in the light receiving surface thereof.
• the pixel size of the X-ray detector is set to be equal to the period di of the masking grating, but may be set to be an integer multiple of di .
• FIG. 5B exemplarily illustrates an overlapping state between the bright zones 51 of the interference pattern and the transmitting portions' 61 of the masking grating when the diffraction grating is moved in the x direction by a distance of 1/3 period, that is, a distance of di/3, from the position illustrated in FIG. 5A.
• the overlapping area between the bright zones 51 of the interference pattern and the transmitting portions 61 of the masking grating in the state illustrated in FIG. 5B is smaller as compared with the state illustrated in FIG. 5A, and hence the amount of the X-rays reaching the X-ray detector is also reduced.
• FIG. 6 illustrates a relationship between the amount of movement of the interference pattern and the amount of X-rays transmitted through the masking grating.
• the solid line represents the ratio of the amount of X-rays transmitted through the masking grating to the amount of X-rays irradiated onto the masking grating, and the horizontal axis represents the amount of movement of the interference pattern with the period of the
• FIG. 7 illustrates the steps for measuring the subject in the present example.
• the masking grating is arranged so that the distance ⁇ between the masking grating and the diffraction grating satisfies Expression (1), and hence an intensity distribution of a clear interference pattern is formed on the masking grating 6.
• the intensity distribution is acquired with the detector, and the acquired intensity distribution is set to Io.
• positions of Po to P 4 are defined as the positions of the diffraction grating 4 as follows.
• the position of the diffraction grating in step 120 is set to P 0 .. Then, the position away from P 0 in the x direction by 1/3 period of the diffraction grating is set to Pi, and the position away from P 0 in the -x direction by 1/3 period is set to P 2 . Further, the position away from Po in the y direction by 1/3 period is set to P3, and the position away from P 0 in the -y direction by 1/3 period is set to P 4 .
• the x direction and the y direction are the directions respectively illustrated by the arrows in FIG. 2, and the -x direction and the -y direction are respectively correspond to directions reverse to the directions of the arrows illustrated in FIG. 2.
• step 130 the diffraction grating is moved to Pi by the moving device for diffraction grating.
• the intensity distribution is detected by the detector, and the detected intensity distribution is set to Ii.
• step 150, step 170 and step 190 the movement of the diffraction grating 4 to P 2 , P 3 and P 4 (in step 150, step 170 and step 190) and the detection of the intensity distribution (in step 160, step 180 and step 200) are repeated, and the obtained detection results are successively set to I 2 , I 3 and I4.
• step 210 by using Expression (4) and Expression (5) based on the three step algorithm of the phase stepping method, the phase cp x as the differential phase in the x direction is calculated for each pixel from Io, Ii an I 2 , and similarly, the phase cp y as the differential phase in the y direction is calculated for each pixel from I 0 , 13 an I 4 .
• Expression (4) and Expression (5) are wrapped phases which are wrapped in the interval between 0 and 2n, and hence are subjected to phase unwrapping so that the differential phases W x and y in the respective
• phase distribution of the X-rays transmitted through the subject that is, the phase contrast image of the subject can be obtained by combining two phase
• the diffraction grating is not limited to this. However, in order to accurately obtain the differential phase contrast image or the phase contrast image of the subject, it is preferred that the respective amounts of movement are equal to each other.
• the phase cp x and the phase cp y can be calculated by adopting expressions based on the amounts of movement in place of Expression (4) and Expression (5). Further, as for the method for moving the diffraction grating, three or more grating positions may only be linearly arranged in both the x and y directions, and hence, for example, a method may also be adopted in which the diffraction grating is moved twice in the x direction from the initial
• Example 2 of an X-ray imaging apparatus embodying the present invention will be described with reference to FIGS. 8A, 8B and 8C, FIG. 9 and FIG. 10.
• the diffraction grating and the masking grating are different from those in the Example 1, and the other configuration is the same as that of Example 1.
• FIG. 8A is a view of a part of the diffraction grating 4 in the present example seen from the side of the X- ray source.
• a phase modulation grating made of silicon and formed by arranging phase advance portions 43 and phase lag portions 44 in a checker pattern with a period d2 is used as the diffraction grating of the present example.
• the phase advance portions 43 and the phase lag portions 44 have a difference in the
• the masking grating is arranged such that the interval Zo between the
• FIG. 8B illustrates the interference pattern formed on the masking grating when the diffraction grating of the present example is used, and the period d3 of the interference pattern is expressed by Expression ( 6) .
• Zo is the interval between the X-ray source and the diffraction grating.
• FIG. 8C is a view of a part of the masking grating in the present example seen from the side of the X-ray source.
• the masking grating is made of gold similarly to Example 1, and has transmitting portions 62 arranged in a checker pattern with the same period d3 as the period of the interference pattern.
• the transmitting portion 62 has a square shape having one side of d 3 /V2.
• FIG. 9A and FIG. 9B which illustrate the
• the pixel size of the X-ray detector is set to be equal to the period d 3 of the masking grating, but may be set to be an integer multiple of d 3 .
• the relative position between the interference pattern and the masking grating is moved by moving the diffraction grating in the surface of the diffraction grating.
• FIG. 9B exemplarily
• the interference pattern 52 and the masking grating 62 when the relative position between the interference pattern and the masking grating is moved in the x direction by a distance of 1/3 period of the interference pattern from the position illustrated in FIG. 9A.
• the area of the bright zone 52 of the interference pattern which overlaps with the transmitting portion 62 is changed according to the movement of the diffraction grating.
• the area of the bright zone 52 which overlaps with the transmitting portion 62 is reduced in the case illustrated in FIG. 9B as compared with the case illustrated in FIG. 9A, and hence the amount of X- rays reaching the X-ray detector is also reduced.
• FIG. 10 illustrates a relationship between the amount of movement of the interference pattern and the amount of X-rays transmitted through the transmitting portion 62 similarly to FIG. 6 in Example 1.
• the solid line represents the ratio of the amount of X-rays
• the horizontal axis represents the amount of movement of the interference pattern with the period of the
• the dotted line represents, for comparison, an ideal sinusoidal wave whose amplitude, period, and phase are made to coincide with those of the waveform represented by the solid line.
• the number of steps is set to 3.
• Example 3 As can be seen from the comparison between FIG. 10 and FIG. 6, the amount of X-rays transmitted through the masking grating 6 in the present example is twice the amount of the X-rays in Example 1. Therefore, the present example has a higher utilization efficiency of X-rays than that in Example 1.
• the measurement steps in the present example are the same as those in Example 1 described with reference to FIG. 7, and hence the description thereof is omitted.
• Example 3
• Example 3 according to the present invention will be
• the present example is an X-ray imaging apparatus in which an amplitude type diffraction grating is used as the diffraction grating, and the other configuration is the same as that of Example 1.
• FIG. 11A is a view of a part of the diffraction grating in the present example seen from the side of the X-ray source.
• the diffraction grating, used in the present example has a structure in which transmitting portions 45 for transmitting X-rays and masking portions 46 for masking X-rays are arranged in a checker pattern with a period of d 4 .
• the masking grating is arranged such that the interval Z 0 between the diffraction grating and the masking grating satisfies Expression (1) so that an interference pattern is formed on the masking grating.
• FIG. 11B illustrates the interference pattern formed on the masking grating, and the period ds of the
• FIG. llC is a view of a part of the masking grating in the present example seen from the side of the X-ray ⁇ " source.
• the masking grating which is made of gold similarly to Example 1
• transmitting portions 63 for transmitting X-rays and masking portions 64 for masking the X-rays are arranged in a mesh pattern with the same period ds as the period of the interference pattern.
• the transmitting portion 63 has a square shape having one side of ds/2.
• the interference pattern and the masking grating of the present example are the same as those of example 1, and hence the overlapping state of the interference pattern and the masking grating, and the relationship between the movement of the diffraction grating and the amount of X-rays transmitted through the transmitting portion 63 of the masking grating are also the same as those of Example 1
• the measurement steps in the present example are the same as those in Example 1 described with reference to FIG. 7, and hence the description thereof is omitted.
• the pattern of the diffraction grating and the pattern of the masking grating can also be exchanged with each other. That is, it may also be configured such that the diffraction grating has the mesh pattern as illustrated in FIG. 11C, and such that the masking grating has the checker pattern as illustrated in
• the interference pattern and the masking grating are the same as those of
• Example 2 Thus, the overlapping state of the bright zones of the interference pattern and the transmitting portions 63 of the masking grating, and the
• the present invention can be used for an imaging
• apparatus for imaging a subject which apparatus uses the phase change produced when X-rays are transmitted through the subject.

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