WO2011148797A1 - スクリュー真空ポンプ - Google Patents
スクリュー真空ポンプ Download PDFInfo
- Publication number
- WO2011148797A1 WO2011148797A1 PCT/JP2011/061077 JP2011061077W WO2011148797A1 WO 2011148797 A1 WO2011148797 A1 WO 2011148797A1 JP 2011061077 W JP2011061077 W JP 2011061077W WO 2011148797 A1 WO2011148797 A1 WO 2011148797A1
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- WO
- WIPO (PCT)
- Prior art keywords
- rotor
- screw
- male
- female
- vacuum pump
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
- F04C2240/402—Plurality of electronically synchronised motors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/008—Hermetic pumps
Definitions
- the present invention relates to a screw vacuum pump.
- the screw vacuum pump can be used in the region from atmospheric pressure to 0.5 Pa, and the pressure in the pump can suppress a sudden rise in the vicinity of the exhaust port, suppress abnormal heat generation, and reduce power consumption. In addition, even if a large amount of product is generated, each screw tooth surface can be scraped out of the pump.
- Patent Document 1 Conventionally, a screw vacuum pump described in Patent Document 1 is known as such a screw vacuum pump.
- the conventional screw vacuum pump includes a male rotor and a female rotor that mesh with each other, a stator that houses the male rotor and the female rotor, and a first shaft and a second shaft that function as rotation axes of the male rotor and the female rotor. , A receiving bearing for bearing the first shaft and the second shaft, and a drive motor for rotationally driving the first shaft and the second shaft.
- the receiving bearing and the drive motor are arranged outside the male rotor or the female rotor, that is, the male rotor or the female rotor, the receiving bearing and the drive motor are arranged in parallel in the longitudinal direction of the rotation axis.
- an object of the present invention is to achieve a reduction in pump size in the longitudinal direction of the rotating shaft.
- Another object of the present invention is to provide a screw vacuum pump that ensures the degree of design freedom of pump components.
- the screw vacuum pump includes a male rotor and a female rotor each having a screw gear portion that meshes with each other on the outer peripheral side, a stator that houses the male rotor and the female rotor, and a drive that rotationally drives the male rotor and the female rotor.
- the screw gear portion of the male rotor, the screw gear portion of the female rotor, and the stator cooperate to form a gas working chamber, and the stator communicates with one end and the other end of the gas working chamber.
- either or both of the male rotor and the female rotor have a rotor hollow portion that opens at least on one end surface side in the longitudinal direction of the rotation axis of the male rotor and / or female rotor. And at least a part of the drive motor is accommodated in the rotor hollow portion, thereby solving the above-described problems. If both male and female rotors are provided with a hollow portion and a motor is accommodated in each hollow portion (that is, there are two motors), the heat rise due to the heat generated by the motor is uniform in the male and female rotors. The thermal expansion is the same and the effect of maintaining the uniformity of the meshing gap between the two is brought about.
- a hollow portion is provided in either the male rotor or the female rotor, and the motor is accommodated in the hollow portion ( That is, if the motor has one structure, the pump size can be reduced and the degree of freedom of installation of the exhaust system can be increased while the motor cost can be reduced.
- the pump dimension in the longitudinal direction of the rotary shaft can be reduced by housing at least a part of the drive motor in the rotor hollow portion.
- the drive heat of the drive motor is retained inside the male rotor and / or the female rotor, the influence of the drive heat of the drive motor on the pump component members other than the male rotor and the female rotor can be reduced. High design freedom can be realized.
- the screw vacuum pump 100 is arranged in a state of being engaged with each other while maintaining a meshing gap, and synchronously rotates in the reverse direction (not shown).
- a pair of male and female male rotors 110 and 120 which are synchronously driven by an inverter, a stator 130 that houses the male rotor 110 and the female rotor 120, and drive motors 140A and 140B that rotationally drive the male rotor 110 or the female rotor 120.
- Rotating shafts (rotating shafts) 150A and 150B fixed to the male rotor 110 or the female rotor 120, bearings 160Aa, 160Ab, 160Ac, 160Ba, 160Bb, and 160Bc for bearing the rotating shafts 150A and 150B, and the rotating shaft 150A, A pair of teeth attached to one end of 150B 170A, 170B (Prevents contact between male and female screw rotors in the event of an abnormality.
- an oil supply unit 180 that supplies lubricating oil to each component to be described later by centrifugal force, and a cooling device 190 that cools the lubricating oil by a water cooling method are provided.
- the male rotor 110, the female rotor 120, and the stator 130 cooperate to form a gas working chamber that transfers and compresses gas.
- the male rotor 110 and the female rotor 120 respectively have screw gear portions 111 and 121 that mesh with each other while maintaining a meshing gap.
- the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 are arranged on the intake port 134 side, and are unequal leads and unequal slopes that transport and compress gas. It has square screw portions 111a and 121a, and unequal lead unequal inclined angle screw portions 111a and 121a, and one lead or multiple lead equal lead screw portions 111b and 121b that transfer gas.
- the tooth trace lead angle is changed according to the rotation angle of the male rotor 110 and the female rotor 120, and a V-shape formed by the male rotor 110, the female rotor 120 and the stator 130.
- the volume of the gas working chamber changes, becomes smaller, performs transfer compression, and compresses and exhausts in the vicinity of the exhaust port 135.
- the temperature of the male rotor 110 and the female rotor 120 becomes uniform.
- the male rotor 110 and the female rotor 120 are opened on both end surfaces of the male rotor 110 and / or the female rotor 120 in the longitudinal direction of the rotational axis, that is, in the longitudinal direction of the rotational axis.
- Rotor hollow portions 112 and 122 penetrating through the rotor.
- the rotor hollow portions 112 and 122 have a circular cross-sectional shape perpendicular to the axis.
- the stator 130 supports a stator main body 131 that houses the male rotor 110 and the female rotor 120, and is fixed to the stator 130 and supports the drive motors 140 ⁇ / b> A and 140 ⁇ / b> B and bearings 160 ⁇ / b> Aa, 160 ⁇ / b> Ab, 160 ⁇ / b> Ba, and 160 ⁇ / b> Bb.
- a first support portion 132 that is fixed to the stator 130 and supports the bearings 160Ac and 160Bc, and an intake port that is formed in the stator body portion 131 and communicates with one end and the other end of the gas working chamber. 134 and an exhaust port 135. As shown in FIG. 1, a part of the first support portion 132 is accommodated in the rotor hollow portions 112 and 122.
- the drive motors 140A and 140B are partly housed in the rotor hollow portions 112 and 122 of the male rotor 110 and the female rotor 120, respectively, and are synchronously controlled by an inverter (not shown). .
- the drive motor 140A is disposed between the bearings 160Aa and 160Ab.
- the drive motor 140B is disposed between the bearings 160Ba and 160Bb.
- the rotating shafts 150 ⁇ / b> A and 150 ⁇ / b> B are partially housed in the rotor hollow portions 112 and 122.
- the rotating shafts 150 ⁇ / b> A and 150 ⁇ / b> B have flange portions 151 ⁇ / b> A and 151 ⁇ / b> B that are extended and fixed toward the inner peripheral walls of the rotor hollow portions 112 and 122, respectively.
- the bearing mechanism of the rotary shafts 150A and 150B includes bearing bearings 160Aa and 160Ba arranged on the intake port 134 side, bearing bearings 160Ac and 160Bc arranged on the exhaust port 135 side, and bearing bearing 160Aa. , 160Ac, or bearings 160Ab, 160Bb disposed between the bearings 160Ba, 160Bc.
- the gears 170A and 170B are attached to the rotary shafts 150A and 150B, and serve to prevent contact with the screw gear portion 111 of the male rotor 110 and the screw gear portion 121 of the female rotor 120 when an abnormality occurs. It functions to reduce vibration and noise caused by backlash of the screw gear portions 111 and 121 during raising and lowering.
- the oil supply means 180 supplies lubricating oil to each component, and as shown in FIG. 2, the oil storage part 181 that stores the lubricating oil and the centrifugal force and drag effect of the lubricating oil from the oil storage part 181 And the oil flow passage 183 for supplying the lubricating oil pushed up by the push-up head 182 to each component.
- FIG. 2 is a diagram conceptually illustrating the circulation path of the lubricating oil by hatching each portion related to the circulation path of the lubricating oil. Further, the arrows shown in FIG. 2 are described for conceptually explaining the circulation path of the lubricating oil, and do not indicate a specific circulation path of the lubricating oil.
- the oil reservoir 181 is a space that is formed in the lower portion of the stator 130 and stores lubricating oil.
- a cooling pipe 191 of a cooling device 190 described later is disposed in the oil reservoir 181. Has been.
- the push-up head 182 has a through-hole penetrating in the vertical direction, and the inner peripheral surface of the through-hole is formed in a tapered shape that increases in diameter from below to above.
- the push-up head 182 is fixed to the lower ends of the rotary shafts 150A and 150B.
- the push-up head 182 rotates with the rotary shafts 150A and 150B and rotates the tapered inner peripheral surface and the rotary shafts 150A and 150B.
- the lubricating oil is configured to be pushed up from the oil reservoir 181 by the centrifugal force used and the drag effect.
- the oil flow passage 183 is formed at a position physically separated from the gas working chamber described above, and supplies the lubricating oil pushed up by the push-up head 182 to each constituent member, and the lubricating oil supplied to each constituent member. This is a circulation path that returns to the oil reservoir 181 again.
- the lubricating oil flows along the inner wall that defines the oil circulation passage 183 and also flows in the hollow oil circulation passage 183 in the form of a mist. Specifically, in the present embodiment, as shown in FIG. 2, the lubricating oil is pushed up from the oil reservoir 181 by the push-up head 182 and is moved upward by a centrifugal force through the hollow portions formed in the rotary shafts 150A and 150B.
- the released lubricating oil is supplied into the bearings 160Aa and 160Ba, and flows in a mist in the hollow portion formed between the bearings 160Aa and 160Ba and the drive motors 140A and 140B. It flows along the inner wall that defines the hollow portion, and is supplied into the drive motors 140A and 140B.
- the lubricating oil discharged from the drive motors 140A and 140B flows in the form of mist in the hollow portion formed between the drive motors 140A and 140B and the bearings 160Ab and 160Bb, and the inner wall that defines the hollow portion.
- the lubricating oil discharged from the bearings 160Ab and 160Bb flows in the form of mist in the hollow portion formed between the bearings 160Ab and 160Bb and the synchronous gears 170A and 170B, and the inner wall that defines the hollow portion. And flows to the synchronous gears 170A and 170B.
- the lubricating oil supplied to the side of the synchronous gears 170A and 170B is supplied to the surface of the synchronous gears 170A and 170B including the meshing portion between the synchronous gears 170A and 170B.
- the lubricating oil is supplied into the bearings 160Ac and 160Bc and returned to the oil reservoir 181 again.
- what is necessary is just to set the supply location of lubricating oil arbitrarily according to an embodiment.
- the cooling device 190 cools the lubricating oil stored in the oil reservoir 181 by a water cooling method, and as shown in FIG. 2, a cooling pipe 191 that is disposed in the oil reservoir 181 and circulates the cooling water, A cooling pump 192 that supplies cooling water to the cooling pipe 191 is configured.
- illustration of the cooling device 190 is abbreviate
- the engagement of the male rotor 110 and the female rotor 120 is based on the distance between the rotation shaft (rotation shaft) 150A of the male rotor 110 and the rotation shaft (rotation shaft) 150B of the female rotor 120 and the male rotor 110 and It is in a position deviated from the gear meshing pitch circles SA and SB determined by the number of teeth of the female rotor 120. Therefore, there is no tooth surface in which the tooth surface speeds of the screw gear portion 111 and the screw gear portion 121 coincide with each other, and there is an action of scraping out the sucked reaction product and the like, and an effect of scraping the reaction product out of the pump is achieved.
- the symbols DA and DB shown in FIG. 5 indicate the outer diameters of the male rotor 110 and the female rotor 120.
- the pump dimensions in the longitudinal direction of the rotary shaft can be reduced by housing a part of the drive motors 140A, 140B in the rotor hollow portions 112, 122.
- the drive heat generated from the drive motors 140A and 140B is generated by the screw gear portions 111 and 110 of the male rotor 110 and the female rotor 120, respectively. 121, and the thermal expansion of the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 can be maintained at the same level. Therefore, the meshing clearance between the screw gear portions 111 and 121 of the male rotor 110 and the female rotor 120 is reduced. Maintain a uniform gap without bias.
- Drive motors 140A and 140B are disposed between the bearings 160Aa and 160Ab and between the bearings 160Ba and 160Bb. As a result, a certain interval is secured between the bearings 160Aa and 160Ab and between the bearings 160Ba and 160Bb to secure a reliable bearing of the rotating shaft, and a space between the bearings 160Aa and 160Ab and between the bearings 160Ba and 160Bb is secured.
- the pump size in the longitudinal direction of the rotating shaft can be further reduced. That is, since the motor is placed inside the screw rotor, the dimensions outside the pump can be greatly reduced. Conventional pumps could not be installed in the vicinity of semiconductor device manufacturing equipment, liquid crystal panel manufacturing equipment and solar panel manufacturing equipment, but this motor built-in screw pump can be installed in the vicinity of each equipment or under the chamber, and the equipment installation space Can be greatly improved.
- the male rotor 110 and the female rotor 120 include unequal lead unequal inclination angle screw portions 111a and 121a on the intake port 134 side, and equal lead screw portions 111b and 121b on the exhaust port 135 side.
- 110 and the female rotor 120 are in a position deviated from the gear mesh pitch circles SA and SB determined by the inter-axis distance between the male rotor 110 and the female rotor 120 and the number of teeth of the male rotor 110 and the female rotor 120.
- a single drive motor 240 as a drive source common to the male rotor 210 and the female rotor 220 is formed in the male rotor 210 as shown in FIG.
- the rotor hollow portion 212 is housed.
- the drive motor 240 rotationally drives the rotary shaft 250A, and the driving force of the drive motor 240 is transmitted to the rotary shaft 250B in a synchronized state via the synchronous gears 270A and 270B.
- the synchronous gears 270A and 270B are configured to be wider and more robust than the gears 170A and 170B of the first embodiment.
- an oil supply means 280 and a cooling device (not shown) configured in the same manner as in the first embodiment are provided, but the number of drive motors to which lubricating oil is supplied is not limited. Since there is no difference, the illustration and description thereof will be omitted.
- the screw gear portions 111, 121, 211, and 221 of the male rotors 110 and 210 and the female rotors 120 and 220 are unequal leads.
- the present modification as shown in FIG.
- the screw gear portions 311 and 321 of the male rotor 310 and the female rotor 320 are the first equal lead screw portions 311a and 321a arranged on the intake port 335 side, the first etc.
- Unequal lead unequal inclination angle screw part 311b, 321b continuing to the lead screw part 311a, 321a, and 1st lead or multiple lead second equal lead screw part continuing to the unequal lead unequal inclination angle screw part 311b, 321b 311c and 321c.
- FIG. 7 only the male rotor 310 is shown.
- the screw gear portions of the male rotor and the female rotor have been described as having the unequal lead unequal inclination angle screw portion and the equal lead screw portion. It does not matter if it is designed as having only unequal lead unequal inclination angle screw parts. Further, the dimensional design and combination of the unequal lead unequal inclination angle screw portion and the equal lead screw portion may be appropriately set according to the embodiment.
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Abstract
Description
しかしながら、プロセスガス、キャリアガス、発生ガス等の分子量が1から百数十と広いため、前記ポンプの各種ガスの排気特性とポンプ固有の排気領域によって使い分けをしているのが現状である。
また、本発明の他の目的は、ポンプ構成部材の設計自由度を確保するスクリュー真空ポンプを提供することである。
これら雄ロータ110及び雌ロータ120のねじ歯車部111、121は、図1、図3、図4に示すように、吸気口134側に配置されて、ガスを移送圧縮する不等リード不等傾斜角スクリュー部111a、121aと、不等リード不等傾斜角スクリュー部111a、121aに連続し、ガスを移送する1リードまたは複数リードの等リードスクリュー部111b、121bとを有している。
不等リード不等傾斜角スクリュー部111a、121aでは、歯筋リード角を雄ロータ110及び雌ロータ120の回転角にしたがって変化させ、雄ロータ110及び雌ロータ120とステータ130により形成されるV字形の気体作動室の容積が変化し、小さくなり、移送圧縮を行い、排気口135近傍で圧縮排気する。
不等リード不等傾斜角スクリュー部111a、121aでは、移送圧縮排気を行うため、雄ロータ110及び雌ロータ120の温度は均一となる。
このロータ中空部112、122は、軸直角断面形状が円形を呈している。
第1支持部132は、図1に示すように、その一部がロータ中空部112、122内に収納されている。
駆動モータ140Aは、図1に示すように、軸受ベアリング160Aa、160Ab間に配置されている。
駆動モータ140Bは、図1に示すように、軸受ベアリング160Ba、160Bb間に配置されている。
回転シャフト150A、150Bは、図1に示すように、ロータ中空部112、122の内周壁に向けて延出して固定されるフランジ部151A、151Bをそれぞれ有している。
そのため、ねじ歯車部111及びねじ歯車部121の歯面速度が一致する歯面がなく、吸入された反応生成物等を掻き出す作用があり、反応生成物をポンプ外に掻き出す効果を奏する。
なお、図5に示す符号DA、DBは、雄ロータ110及び雌ロータ120の外径を示している。
これにより、軸受ベアリング160Aa、160Ab間及び軸受ベアリング160Ba、160Bb間に一定間隔を確保して回転シャフトの確実な軸受を確保しつつ、軸受ベアリング160Aa、160Ab間及び軸受ベアリング160Ba、160Bb間のスペースを駆動モータ140A、140Bの設置スペースとして有効利用して、回転軸長手方向におけるポンプ寸法を一段と小型化できる。すなわち、モータをスクリューロータ内部に入れたためポンプ外寸法を大幅に小さくすることが出来る。従来のポンプは半導体デバイス製造装置、液晶パネル製造装置及びソーラパネル製造装置の近傍に設置出来なかったが、このモータ内臓スクリューポンプは各装置の近傍またはチャンバーの下に設置が可能となり、装置設置スペースを大幅に改善することが出来る。
ここで、第2実施例であるスクリュー真空ポンプ200における駆動モータ240以外の構成は前述した内容と全く同じであるため、第1実施例のスクリュー真空ポンプ100に関する明細書、および、図1乃至図5に示す100番台の符号を200番台の符号に読み替えることによって、駆動モータ240以外の構成についてはその説明を省略する。
そして、駆動モータ240は、回転シャフト250Aを回転駆動するとともに、駆動モータ240の駆動力は、同期ギア270A、270Bを介して回転シャフト250Bにも同期状態で伝達される。他方のスクリューロータを回転駆動させるため、同期ギア270A、270Bは、第1実施例の歯車170A、170Bよりも幅が大きく頑丈に構成されている。
前述した第1実施例及び第2実施例では、図1または図6に示すように、雄ロータ110、210及び雌ロータ120、220のねじ歯車部111、121、211、221は、不等リード不等傾斜角スクリュー部111a、121a、211a、221aと、1リードまたは複数リードの等リードスクリュー部111b、121b、211b、221bとを有しているものとして説明した。
本変形例では、図7に示すように、雄ロータ310及び雌ロータ320のねじ歯車部311、321は、吸気口335側に配置される第1等リードスクリュー部311a、321aと、第1等リードスクリュー部311a、321aに連続する不等リード不等傾斜角スクリュー部311b、321bと、不等リード不等傾斜角スクリュー部311b、321bに連続する1リードまたは複数リードの第2等リードスクリュー部311c、321cとを有している。
なお、図7には、雄ロータ310のみを図示した。
また、不等リード不等傾斜角スクリュー部及び等リードスクリュー部の寸法設計や組み合わせは、実施態様に応じて適宜設定すれば良い。
110 、210 ・・・ 雄ロータ
111 、211 ・・・ ねじ歯車部
111a ・・・ 不等リード不等傾斜角スクリュー部
111b ・・・ 等リードスクリュー部
112 、212 ・・・ ロータ中空部
120 、220 ・・・ 雌ロータ
121 、221 ・・・ ねじ歯車部
121a ・・・ 不等リード不等傾斜角スクリュー部
121b ・・・ 等リードスクリュー部
122 、222 ・・・ ロータ中空部
130 、230 ・・・ ステータ
131 、231 ・・・ ステータ本体部
132 、232 ・・・ 第1支持部
133 、233 ・・・ 第2支持部
134 、234 ・・・ 吸気口
135 、235 ・・・ 排気口
140A ・・・ 駆動モータ
140B ・・・ 駆動モータ
240 ・・・ 駆動モータ
150A 、250A ・・・ 回転シャフト
150B 、250B ・・・ 回転シャフト
151A 、251A ・・・ フランジ部
151B 、251B ・・・ フランジ部
160Aa、260Aa ・・・ 軸受ベアリング
160Ab、260Ab ・・・ 軸受ベアリング
160Ac、260Ac ・・・ 軸受ベアリング
160Ba、260Ba ・・・ 軸受ベアリング
160Bb、260Bb ・・・ 軸受ベアリング
160Bc、260Bc ・・・ 軸受ベアリング
170A 、170B ・・・ 歯車
270A 、270B ・・・ 同期ギア
180 、280 ・・・ オイル供給手段
181 ・・・ オイル貯留部
182 ・・・ 押し上げヘッド
183 ・・・ オイル流通路
190 ・・・ 冷却装置
191 ・・・ 冷却パイプ
192 ・・・ 冷却ポンプ
310 ・・・ 雄ロータ
311 ・・・ ねじ歯車部
311a ・・・ 第1等リードスクリュー部
311b ・・・ 不等リード不等傾斜角スクリュー部
311c ・・・ 第2等リードスクリュー部
312 ・・・ ロータ中空部
Claims (9)
- 相互に噛み合うねじ歯車部を外周側にそれぞれ有する雄ロータ及び雌ロータと、前記雄ロータ及び雌ロータを収納するステータと、前記雄ロータ及び雌ロータを回転駆動する駆動モータとを備え、
前記雄ロータのねじ歯車部と雌ロータのねじ歯車部とステータとは、協働して気体作動室を形成し、
前記ステータは、前記気体作動室の一端及び他端に連通する吸気口及び排気口を有し、
前記雄ロータ及び雌ロータのうち少なくとも一方は、前記雄ロータ及び/又は雌ロータの回転軸長手方向の少なくとも一端面側で開口するロータ中空部を有し、
前記駆動モータの少なくとも一部は、前記ロータ中空部内に収納されていることを特徴とするスクリュー真空ポンプ。 - 前記雄ロータ及び雌ロータは、前記ロータ中空部をそれぞれ有し、
前記駆動モータは、2つ設けられ、
前記雄ロータ及び雌ロータのロータ中空部内には、前記駆動モータの少なくとも一部がそれぞれ収納されていることを特徴とする請求項1に記載のスクリュー真空ポンプ。 - 前記ロータ中空部内に少なくとも一部が収納され、前記雄ロータ及び/又は雌ロータに固定される回転シャフトと、前記回転シャフトを軸受する少なくとも2つの軸受ベアリングとを更に備え、
前記駆動モータは、前記軸受ベアリング間に配置されていることを特徴とする請求項1または請求項2に記載のスクリュー真空ポンプ。 - 前記ステータは、前記雄ロータ及び雌ロータを収納するステータ本体部と、該ステータ本体部に固定され、前記ロータ中空部内に一部が収納され、前記駆動モータ及び/又は軸受ベアリングを支持する支持部を有していることを特徴とする請求項1乃至請求項3のいずれか1項に記載のスクリュー真空ポンプ。
- 前記雄ロータ及び雌ロータのねじ歯車部は、前記吸気口側に配置される不等リード不等傾斜角スクリュー部と、該不等リード不等傾斜角スクリュー部に連続する1リードまたは複数リードの等リードスクリュー部とを有していることを特徴とする請求項1乃至請求項4のいずれか1項に記載のスクリュー真空ポンプ。
- 前記雄ロータ及び雌ロータのねじ歯車部は、前記吸気口側に配置される第1等リードスクリュー部と、該第1等リードスクリュー部に連続する不等リード不等傾斜角スクリュー部と、該不等リード不等傾斜角スクリュー部に連続する1リードまたは複数リードの第2等リードスクリュー部とを有していることを特徴とする請求項1乃至請求項4のいずれか1項に記載のスクリュー真空ポンプ。
- 前記雄ロータ及び雌ロータの噛み合いは、前記雄ロータの回転軸および雌ロータの回転軸の軸間距離と雄ロータ及び雌ロータの歯数とにより決定される歯車噛み合いピッチ円から外れた位置にあることを特徴とする請求項1乃至請求項6のいずれか1項に記載のスクリュー真空ポンプ。
- 前記雄ロータ及び/又は雌ロータに固定される回転シャフトと、潤滑オイルを供給するオイル供給手段とを更に備え、
前記オイル供給手段は、潤滑オイルを貯留するオイル貯留部と、前記回転シャフトに固定され前記回転シャフトの回転を利用して前記オイル貯留部から潤滑オイルを押し上げる押し上げヘッドと、前記押し上げヘッドにより押し上げた潤滑オイルを所定箇所に流通させるオイル流通路とを有していることを特徴とする請求項1乃至請求項7のいずれか1項に記載のスクリュー真空ポンプ。 - 前記潤滑オイルを冷却する冷却装置を更に備えていることを特徴とする請求項8に記載のスクリュー真空ポンプ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/698,691 US20130058823A1 (en) | 2010-05-24 | 2010-05-13 | Screw vacuum pump |
KR1020127030638A KR20130125703A (ko) | 2010-05-24 | 2011-05-13 | 스크루 진공 펌프 |
JP2012517218A JPWO2011148797A1 (ja) | 2010-05-24 | 2011-05-13 | スクリュー真空ポンプ |
DE112011101773T DE112011101773T5 (de) | 2010-05-24 | 2011-05-13 | Schraubenvakuumpumpe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2010118315 | 2010-05-24 | ||
JP2010-118315 | 2010-05-24 |
Publications (1)
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WO2011148797A1 true WO2011148797A1 (ja) | 2011-12-01 |
Family
ID=45003789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2011/061077 WO2011148797A1 (ja) | 2010-05-24 | 2011-05-13 | スクリュー真空ポンプ |
Country Status (5)
Country | Link |
---|---|
US (1) | US20130058823A1 (ja) |
JP (1) | JPWO2011148797A1 (ja) |
KR (1) | KR20130125703A (ja) |
DE (1) | DE112011101773T5 (ja) |
WO (1) | WO2011148797A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015083195A1 (ja) * | 2013-12-02 | 2015-06-11 | 株式会社飯塚鉄工所 | スクリュー真空ポンプ |
WO2015083194A1 (ja) * | 2013-12-02 | 2015-06-11 | 株式会社飯塚鉄工所 | スクリュー真空ポンプ |
WO2015128906A1 (ja) * | 2014-02-28 | 2015-09-03 | 国立大学法人東北大学 | スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101712962B1 (ko) * | 2015-09-24 | 2017-03-07 | 이인철 | 냉각장치를 갖춘 진공펌프 |
WO2019210053A1 (en) * | 2018-04-27 | 2019-10-31 | Carrier Corporation | Screw compressor with external motor rotor |
CN112943603B (zh) * | 2021-01-27 | 2022-12-02 | 宁波市润桥工业设计有限公司 | 一种充排可控的螺杆泵 |
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JPH01267384A (ja) * | 1988-04-15 | 1989-10-25 | Hitachi Ltd | 勾配歯を有するスクリューロータ |
JPH02283898A (ja) * | 1989-04-21 | 1990-11-21 | Hitachi Koki Co Ltd | ねじ溝分子ポンプ |
JPH05195957A (ja) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH08100779A (ja) * | 1994-10-04 | 1996-04-16 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JP2004263629A (ja) * | 2003-03-03 | 2004-09-24 | Tadahiro Omi | スクリュー真空ポンプ |
-
2010
- 2010-05-13 US US13/698,691 patent/US20130058823A1/en not_active Abandoned
-
2011
- 2011-05-13 JP JP2012517218A patent/JPWO2011148797A1/ja not_active Withdrawn
- 2011-05-13 DE DE112011101773T patent/DE112011101773T5/de not_active Withdrawn
- 2011-05-13 KR KR1020127030638A patent/KR20130125703A/ko not_active Application Discontinuation
- 2011-05-13 WO PCT/JP2011/061077 patent/WO2011148797A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01267384A (ja) * | 1988-04-15 | 1989-10-25 | Hitachi Ltd | 勾配歯を有するスクリューロータ |
JPH02283898A (ja) * | 1989-04-21 | 1990-11-21 | Hitachi Koki Co Ltd | ねじ溝分子ポンプ |
JPH05195957A (ja) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH08100779A (ja) * | 1994-10-04 | 1996-04-16 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JP2004263629A (ja) * | 2003-03-03 | 2004-09-24 | Tadahiro Omi | スクリュー真空ポンプ |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015083195A1 (ja) * | 2013-12-02 | 2015-06-11 | 株式会社飯塚鉄工所 | スクリュー真空ポンプ |
WO2015083194A1 (ja) * | 2013-12-02 | 2015-06-11 | 株式会社飯塚鉄工所 | スクリュー真空ポンプ |
JP5892569B2 (ja) * | 2013-12-02 | 2016-03-23 | 株式会社飯塚鉄工所 | スクリュー真空ポンプ |
WO2015128906A1 (ja) * | 2014-02-28 | 2015-09-03 | 国立大学法人東北大学 | スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ |
JPWO2015128906A1 (ja) * | 2014-02-28 | 2017-03-30 | 国立大学法人東北大学 | スクリュー排気ポンプ用のオイル供給部品及びその部品を備えたスクリュー排気ポンプ |
Also Published As
Publication number | Publication date |
---|---|
DE112011101773T5 (de) | 2013-03-14 |
KR20130125703A (ko) | 2013-11-19 |
US20130058823A1 (en) | 2013-03-07 |
JPWO2011148797A1 (ja) | 2013-07-25 |
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