WO2011126220A2 - Procédé d'acquisition d'image destiné à un objet devant être mesuré au moyen d'une structure de microscope confocal - Google Patents

Procédé d'acquisition d'image destiné à un objet devant être mesuré au moyen d'une structure de microscope confocal Download PDF

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Publication number
WO2011126220A2
WO2011126220A2 PCT/KR2011/001768 KR2011001768W WO2011126220A2 WO 2011126220 A2 WO2011126220 A2 WO 2011126220A2 KR 2011001768 W KR2011001768 W KR 2011001768W WO 2011126220 A2 WO2011126220 A2 WO 2011126220A2
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light
scan position
information
scan
scanning
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PCT/KR2011/001768
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English (en)
Korean (ko)
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WO2011126220A3 (fr
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김태욱
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에스엔유프리시젼 주식회사
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Publication of WO2011126220A2 publication Critical patent/WO2011126220A2/fr
Publication of WO2011126220A3 publication Critical patent/WO2011126220A3/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation

Definitions

  • the present invention relates to a method for acquiring an image of a measurement object using a confocal microscope structure, and more particularly, an acquisition signal that varies depending on optical properties such as reflectivity, roughness, and reflection angle, which are optical characteristics of each scanning position surface of light to be scanned into the measurement object to be scanned.
  • the present invention relates to an image acquisition method using a confocal microscope structure in which the measurement accuracy can be improved by scanning and controlling the intensity of light in an acoustic optical deflector so that the difference can be as leveled as possible.
  • confocal microscopy uses light from a point source with a laser as a light source to confocal the focus of the sample and onto the photodetector slit or pinhole, so that portions other than the focal plane are light.
  • the resolution of the focal plane is 1.4 times higher than that of a conventional fluorescence microscope, and a pinhole or slit mask is installed on the optical axis to focus the light passing through or reflected from the sample.
  • two-dimensional images can be reconstructed into three-dimensional or three-dimensional images again using certain software, so that images of XZ sections that were not previously observed can be observed and are bulky.
  • the shape of the structure can be reconstructed through a confocal microscope to easily obtain the image in the desired direction.
  • Such a confocal microscope employs an optical deflector such as a scan mirror (galvanometer), a MEMS device or an acoustic optical deflector to deflect the light to the scan position to be scanned on the XY plane of the sample.
  • an optical deflector such as a scan mirror (galvanometer), a MEMS device or an acoustic optical deflector to deflect the light to the scan position to be scanned on the XY plane of the sample.
  • the scan mirror (galvanometer) is a mirror (reflective mirror) attached to the rotating axis, there is an advantage that can be driven relatively high speed with a simple structure, MEMS (micoroelectromechanical systems) is a compact, high-speed integration of this reflecting mirror structure It is.
  • the acoustic optical deflector is a widely used means for deflecting incident light, and may be formed of a piezoelectric transducer (a) and a medium (b) as shown in FIG. 1.
  • the piezoelectric transducer (a) when an RF signal having a predetermined frequency allocated from the controller is transmitted through the RF modulator, the piezoelectric transducer (a) pressurizes the medium (b) according to the frequency transmitted by the RF signal and the wavelength ⁇ Acoustic waves c are generated and propagated into the medium b. As a result, a periodic change of the refractive index occurs in the medium portion b by the acoustic optical effect of the generated acoustic wave c.
  • This change in refractive index can be thought of as a diffraction grating and diffracts the incident light as if it diffracts (Bragg diffraction) X-rays at atoms on the crystal surface.
  • the deflection angle ⁇ of the incident light caused by the acoustic wave c may be expressed as follows.
  • the deflection angle ⁇ of the incident light can be changed by adjusting the frequency f of the acoustic wave c.
  • the frequency f of this acoustic wave c can be determined by controlling the frequency of the RF signal.
  • the acoustic optical deflector operated on the same principle, it is possible to control the incident light to be deflected in the scanning direction on the XY plane of the measurement object to be scanned, and to obtain light from each scan position to obtain an image of the measurement object to be scanned. .
  • each scan position of the measurement object is different in height from each scan position (unit pixel), and the height measurement is completed by scanning step by step focusing on the height of any part of the measurement object.
  • the focus of the light scanned through the scanning optical system 1 is accurately formed on the surface of each scan position of the scan area 2 of the measurement object, the focus of the light reflected from each scan position is also slit. It is precisely formed in the slit of the mask 3 so that light can be obtained through the photodetector 4.
  • the optical focus formed in the slit of the slit mask 3 also does not coincide with the photodetector 4.
  • the light obtained from) is obtained with light having a relatively low intensity.
  • the overall height of the scan area is obtained by combining the light detected from different scan positions with different heights, resulting in the height (three-dimensional shape) of the entire scan area. Since the difference in signal values varies depending on the surface of reflectance, roughness and reflection angle of each part of the scan position, there is a problem in that the measurement accuracy of the entire scan area is not uniform.
  • the intensity of light is measured for each scan position according to the portion of the measurement object to be scanned, and based on this, scanning while changing the light output of the light source directly when scanning the light at each scan position This has been proposed.
  • the proposed method can improve the measurement accuracy, the overall process time is increased because the intensity of light generated from the light source must be adjusted according to the reflectivity of each scan position based on the initial scan after performing the initial scan.
  • the present invention provides a method for acquiring an image of a measurement object using a confocal microscope structure that can improve the measurement accuracy of a scan area by acquiring an image by adjusting the intensity of light to be scanned according to the intensity of light detected from a scan position.
  • a confocal microscope for generating an image from an upper portion of a measurement object and scanning the light while sequentially deflecting the light onto the XY plane of the scan area using a deflection unit including an acoustic optical deflector to acquire an image.
  • the intensity information of the detected light in accordance with the optical characteristics of the surface of each scan position of the scan area by using the deflection unit to obtain the intensity information of the obtained light at each scan position
  • An information setting step of mapping the location information to setting the mapping information A loading step of loading mapping information stored in the information setting step according to a control signal;
  • the light inputted to the acousto-optic deflector and output is deflected and at the same time the light intensity is adjusted according to the sound intensity information, and the output light is scanned and reflected to each scan position through a scanning unit, and then the reflected light is
  • An injection step input to the injection unit A recording step of detecting light reflected from each scan position input to the scanning unit with a photodetector and recording the detected photodetection signal; The distance between the measurement object
  • a Z-axis scanning step of performing at least one optical detection signal of each scan position according to the distance change An image acquisition step of acquiring an entire image of the scan area by forming an image of each scan position according to the sound intensity information by selecting any one from a plurality of light detection signals of each scan position detected through the Z-axis scan step. It is achieved by an image acquisition method of a measurement object using a confocal microscope structure comprising a.
  • the light detection signal selected from the plurality of light detection signals of each scan position in the image acquisition step may be a light detection signal when the voltage of the light detector is at the maximum voltage.
  • the information setting step the first distance to move at least one of the scanning unit and the measurement object in the Z-axis direction to set any one of the Z-axis separation distance between the scanning unit and the measurement object.
  • Setting step The light having a predetermined intensity is sequentially deflected through the deflection unit onto the XY plane of the scan area and outputted, and the output light is scanned through the scanning unit to each scan position, and then reflected and input to the scanning unit.
  • the first scanning step Detecting light at each scan position input to the scanning unit with a photodetector, recording the light detection signal detected from each scan position, and setting the recorded light detection signal as the intensity information of the light obtained at each scan position; 1 intensity information setting step; And mapping the acquired intensity information of the light to position information of each scan position and setting the mapping information as mapping information.
  • the separation distance set in the first distance setting step may be set to correspond to a distance substantially corresponding to the center of the maximum separation distance formed by the scanning unit and the measurement object.
  • the information setting step the second distance for setting at least one of the Z-axis distance between the scanning unit and the measurement object by moving at least one of the scanning unit and the measurement object in the Z-axis direction Setting step;
  • the light having a predetermined intensity is sequentially deflected onto the XY plane of the scan area through the acoustic optical deflector, and the output light is scanned through the scanning unit to each scan position and then reflected to the scanning unit.
  • a second scanning step input A second signal recording step of detecting light at each scan position input to the scanning unit with a photodetector and recording the detected photodetection signal; Changing the separation distance between the measurement object and the scanning unit in a Z-axis direction and sequentially performing the second scanning step and the second signal recording step to record the light detection signal according to the change of the separation distance at each scan position.
  • the light detection signal selected from among the plurality of light detection signals according to the Z-axis change of each scan position in the scanning step may be a light detection signal when the voltage of the light detector is at the maximum voltage.
  • each scan position surface may be at least one of reflectivity, roughness, and reflection angle of each scan position surface.
  • the scanning of the light in accordance with the intensity of the light detected from each scan position to correspond to the difference in the brightness of the image by the detection signal difference that varies depending on the surface information such as the reflectivity, roughness and reflection angle of each scan position of the scan area Provided are an image acquisition method and system for measuring an object using a confocal microscope structure capable of improving the measurement accuracy of a scan area by acquiring an image by adjusting the intensity.
  • FIG. 1 is a schematic diagram of an acoustic optical deflector
  • FIG. 5 is a schematic diagram of an image acquisition system of a measurement object using a confocal microscope structure according to a first embodiment of the present invention
  • FIG. 6 is a detailed view of the controller unit of FIG. 5;
  • FIG. 7 is an algorithm of an image acquisition method of a measurement object using the system of FIG. 5;
  • FIG. 10 is a graph showing the magnitude of the light detection signal of each scan position obtained by a conventional image acquisition method
  • FIG. 12 is a graph showing the magnitude of the light detection signal according to the change in the Z-axis separation distance of each scan position obtained by setting the sound intensity information according to the mapping information
  • FIG. 13 is an image obtained according to the graph result of FIG. 12. .
  • FIG. 5 is a schematic diagram of an image acquisition system of a measurement object using a confocal microscope structure according to the first embodiment of the present invention.
  • the image acquisition system of the measurement object using the confocal microscope structure according to the present invention is a light source unit 10, a deflection unit 20, a scanning unit 30, a light detection unit 40 and a controller unit It consists of 50.
  • the light source unit 10 may be positioned above the scan area of the measurement object T and may include a light source 11 and an optical expander 12.
  • the measurement object T may be positioned on a predetermined stage, and the stage may be controlled to be movable in the Z direction by a predetermined driving means.
  • the light source 11 is a laser provided with a He-Ne laser or a diode laser to generate light to output light in the Z-axis direction of the measurement target T.
  • the optical expander 12 is positioned in front of the light source 11 to perform spatial filtering of the light output from the light source 12 to deform and expand the light.
  • the deflection unit 20 includes an acoustic optical deflector 21 for deflecting the input light in the X-axis direction or the Y-axis direction, and a deflection in one axial direction different from the deflection axial direction from the acoustic optical deflector 21. It may be configured to include an optical deflector 22.
  • the light input from the light source 12 may be deflected through the deflection unit 20 onto the XY plane of the scan area.
  • the acoustic optical deflector 21 is a predetermined angle by the piezoelectric actuator to press the medium at a predetermined period in accordance with the acoustic frequency transmitted from the controller unit 50 to be described later as in the prior art at a predetermined angle In the first axis direction.
  • the piezoelectric actuator may adjust the intensity of the input light by pressing the medium part to a predetermined intensity according to the sound intensity information transmitted from the controller unit 50.
  • the light intensity I of the acoustic optical deflector 21 has a relationship with the acoustic intensity P of the transmitted acoustic intensity information.
  • I 0 is the intensity of the input light
  • I 1 is the intensity of the output light
  • P is the acoustic intensity
  • M, H, L are the characteristic constants of the acoustic optical deflector
  • ⁇ 0 is the wavelength of the input light.
  • the optical deflector 22 may be any one of a scan mirror, a galvano mirror or a MEMS mirror, and deflects light input and driven by predetermined driving information transmitted from the controller unit 50 to be described later to a second axis. It is prepared to.
  • the light may be deflected on the XY plane of the scan area through the acoustic optical deflector 21 and the optical deflector 22, and in particular, the intensity of light deflected through the acoustic optical deflector 21 may be adjusted and output. Can be.
  • the scanning unit 30 includes a housing 30A, and includes a light splitter 31, a scan lens 32, a tube lens 33, 1 / from the direction of the light source unit 10 inside the housing 30A.
  • the four-wavelength plate 34 and the objective lens 35 are sequentially installed and may be installed to be movable in the Z direction by a predetermined driving means.
  • the light deflected through the acoustic optical deflector 21 passes through the light splitter 31, the scan lens 32, the tube lens 33, the quarter wave plate 34, and the objective lens 35. Scanned to the scan position, the light reflected from each scan position is reflected by the optical splitter 31 through the objective lens 35, the quarter-wave plate 34, the tube lens 33, the scan lens 32 .
  • the light splitter 31 may be formed of any one of a half mirror or a polarizing beam splitter (PBS) to separate transmittance and reflectance according to a wavelength.
  • PBS polarizing beam splitter
  • the optical splitter 31 is positioned between the acoustic optical deflector 21 and the optical deflector 22, and the optical splitter 31 transmits the light that is deflected from the acoustic optical deflector 21 and inputs the scan.
  • the light input from the region may be reflected by changing wavelengths while passing through the quarter-wave plate 34.
  • the light from the light source unit 10 to the scan area and the light input from the scan area can be separated through the light splitter 31 and the quarter wave plate 34.
  • the scan lens 32 is installed so that the light deflected through the optical deflector 22 focuses on the image plane 32a, and the light focused on the image plane 32a passes through the tube lens 33 in parallel. It is installed to be output as light and transmitted to the objective lens (35).
  • the light deflected by the acoustic optical deflector 21 through the scan lens 32 and the tube lens 33 can be accurately transmitted to the objective lens 35.
  • the light detecting unit 40 includes a light collecting lens 41, a light receiving mask 42, and a light detector 43 to detect light reflected from each scan position of the scan area.
  • the condenser lens 41 receives the light reflected through the above-described quarter wave plate 34 to generate condensed light.
  • the light receiving mask 42 may be a slit mask having a slit 42a or a pinhole mask (not shown) having a pin hole, and the light collecting lens 41 may be formed through the slit 42a or the pinhole.
  • the focused light can be received from the light source.
  • the photodetector 43 is provided with a photodiode or the like and receives the light passing through the slit 42a of the light receiving mask 42 to convert the light intensity into an electric signal.
  • the controller unit 50 includes an information setting unit 51, an image forming unit 52, a mapping information setting unit 53, and a mapping information loading unit 54. .
  • the information setting unit 51 includes an acoustic frequency information setting unit 51A, an acoustic intensity information setting unit 51B, and a driving information setting unit 51C.
  • the acoustic frequency information setting unit 51A may set acoustic frequency information which is a control signal of the deflection angle of the acoustic optical deflector 21, and the driving information setting unit 51C is a deflection angle control signal of the optical deflector 22. Drive information can be set.
  • the sound intensity information setting unit 51B may set the sound intensity information, which is a control signal for controlling the intensity of light output through the acoustic optical deflector 21.
  • each information set in each setting unit may be set by an administrator.
  • the information is a photo detector 43 obtained from the light of each scan position of the scan area on the basis of the mapping information of the scan area loaded by the mapping information loading unit 54 to be described later by a predetermined control signal input from the outside ) Can be set to be obtained at a predetermined level or more.
  • the acoustic optical deflector 21 deflects the input light according to the transmitted acoustic frequency information in either the X-axis or the Y-axis direction, and simultaneously adjusts the light intensity according to the sound intensity information.
  • the optical deflector 22 deflects the input light according to the transmitted driving information in one axial direction different from the acoustic optical deflector 21 and outputs it.
  • the light input to the deflection unit 20 may be sequentially deflected onto the XY plane of the scan area, and at the same time, the intensity of the light may be adjusted and output.
  • the mapping information setting unit 53 is connected to the photodetector 43 and detects a plurality of light at each scan position detected by changing the separation distance in the Z-axis direction of the measurement object T and the scanning unit 30.
  • the signal may be recorded, and any one of the plurality of recorded photodetection signals may be selected to map the selected photodetection signal to position information of each scan position and set as mapping information.
  • mapping information may be configured to be stored in a predetermined storage means.
  • the selected photodetection signal may be a photodetection signal at the maximum voltage among the plurality of photodetection signals at each scan position detected by the photodetector 43.
  • the meaning that the photodetection signal is the maximum voltage may be understood to mean that the optical focus of the light scanned to each scan position is closest to or coinciding with the surface of each scan position, as described in the background art.
  • selecting the light detection signal at the maximum voltage may be understood as meaning that the light focus selects light formed on the surface of each scan position.
  • the mapping information loading unit 54 may be configured to load the mapping information stored by a predetermined external input signal or a control signal to load the mapping information of the corresponding scan area and transmit the mapping information to the information setting unit 51 described above.
  • the image forming unit 52 is connected to the photodetector 43 so that a plurality of photodetection signals at each scan position detected as the separation distance in the Z-axis direction of the measurement object T and the scanning unit 30 is changed. Any one of them may be configured to form a signal size (image) of each scan position.
  • the selected photodetection signal may be a photodetection signal at the maximum voltage of the photodetector 43.
  • an image of each scan position may be recorded to form a whole image of the scan area through a predetermined algorithm, and the whole image may be configured to be displayed through a predetermined display means.
  • FIG. 7 is an algorithm of an image acquisition method of a measurement object using the system of FIG. 5.
  • the deflection unit 20 by using the deflection unit 20, the intensity information of light detected according to the optical characteristics of the surface of each scan position of the scan area to be scanned is obtained, and the intensity information of the light of each scan position is obtained. Mapping to the location information of each scan position is set as the mapping information (S10).
  • mapping information a method of setting the mapping information.
  • a method of setting two kinds of mapping information is presented.
  • the first is a method of randomly setting the Z-axis separation distance between the injection unit 30 and the measurement object (T) and scanning while changing the separation distance at least one or more times
  • the second is the scanning unit 30 and the measurement object ( This is a method of scanning once by setting the separation distance corresponding to the median value of the maximum separation distance between Z axes.
  • the Z-axis separation distance between the scanning unit 30 and the measurement target T is set to an arbitrary separation distance (S11), and light having a predetermined intensity is deflected unit 20 and the scanning unit 30. After scanning on the XY plane of the scan area through the light, the light reflected from each scan position of the scan area is input to the scanning unit 30 (S12).
  • the setting of the separation distance is not separately set, but may be a separation distance set by the scanning unit 30 is positioned above the scan area.
  • the light reflected from each scan position input to the scanning unit 30 is detected by the photodetector 43, and the mapping information setting unit 53 records the detected photodetection signal (S13).
  • steps S12 and S13 are sequentially performed by varying the Z-axis separation distance between the scanning unit 30 and the measurement object, and the Z-axis separation distance of each scan position detected according to the result is performed.
  • the mapping information setting unit 53 records the light detection signal according to the operation S14.
  • the step S14 may be repeated a plurality of times as necessary.
  • the mapping information setting unit 53 selects any one of the plurality of light detection signals according to the change in the Z-axis separation distance of each of the recorded scan positions, and obtains the information as the intensity of light at each scan position (S15).
  • the selected photodetection signal is a photodetection signal when the voltage of the photodetector 43 is the maximum voltage.
  • the acquired intensity information of the light is mapped to the position information of each scan position and set as mapping information of each scan position (S16).
  • FIG. 9 is an algorithm for setting mapping information according to the second method.
  • the scan unit 30 is moved in the Z-axis direction by setting a separation distance corresponding to the middle value of the maximum range in which the scan unit 30 can move in the Z-axis direction from the measurement object T. (S11 ').
  • the light having a predetermined intensity is scanned through the deflection unit 20 and the scanning unit 30 onto the XY plane of the scan area, and the light reflected from each scan position of the scan area is input to the scan unit 30. (S12 ').
  • the light reflected from each scan position input to the scanning unit 30 is detected by the photodetector 43, and the mapping information setting unit 53 records the detected photodetection signal (S13).
  • the recorded light detection signal is the intensity information of the light at each scan position, and maps the intensity information of the acquired light to the position information of each scan position and sets it as mapping information of each scan position (S13 ').
  • mapping information in which light intensity information of each scan position is mapped may be set, and the mapped mapping information may be stored in predetermined storage means.
  • mapping information loading unit 54 loads the mapping information of the corresponding scan area from the stored mapping information and sets the information setting unit ( 51) (S30).
  • the information setting unit 51 sets the acoustic frequency information and the driving information so that the light is deflected to each scan position based on the mapping information transmitted, and the intensity of the light reflected from each scan position and detected by the photodetector 43 is preset. Sound intensity information is set to be detected by the intensity of the light (S40).
  • the preset light intensity may be set by the manager.
  • the deflection unit 20 deflects the input light according to the transmitted acoustic frequency information and the driving information.
  • the acoustic optical deflector 21 adjusts the intensity of the light according to the acoustic intensity information at the same time as the deflection (S50). .
  • the output light is scanned and reflected at each scan position through the scanning unit 30 and then inputted back to the scanning unit 30 (S60).
  • the light input to the scanning unit 30 is reflected by the light splitter 31 and detected by the light detector 43, and the detected light detection signal is recorded by the image forming unit 52 (S70).
  • the separation distance between the scanning unit 30 and the measurement target (T) is changed by a predetermined distance in the Z-axis direction, and steps S60 to S70 are sequentially performed (S80).
  • the predetermined distance may be set by the administrator, and step S80 may be performed a plurality of times.
  • the image forming unit 52 selects any one of the plurality of light detection signals according to the change in the Z-axis separation distance of each scan position detected through the step S80, and forms an image of each scan position based on this. An entire image of the scan area may be acquired (S90).
  • the selected photodetection signal may be a photodetection signal when the signal size of the photodetector 43 is maximum, that is, when the photodetector 43 is the maximum voltage.
  • the light output through the acoustic optical deflector can simultaneously adjust the intensity of the light at the same time, a separate control means for adjusting the intensity is not required, so that high-precision scan and quick scan of the scan area can be enabled.
  • FIG. 10 is a graph showing the magnitude of the photodetection signal of each scan position obtained by a conventional image acquisition method
  • FIG. 11 is an image obtained according to the graph result of FIG.
  • the strongest light is detected in the scan position 1 and the scan position 2 at a distance of 40 ⁇ m between the scanning unit and the measurement object, and the 40 ⁇ m may be determined as the height of the scan position 1 and the scan position 2.
  • the scan position 3 is in a state where the intensity of light is generally insufficient.
  • the intensity of light is oversaturated at 40 ⁇ m to 60 ⁇ m.
  • the image forming unit selects the photodetection signal at the maximum voltage among the photodetection signals through the photodetection signal according to the detected Z-axis separation distance, and forms an image of each scan position based on the photodetection signal as shown in FIG. 9. Can be.
  • the bright part is too bright and the dark part is too dark to obtain an image with a severe variation in the intensity of light for each scan position, resulting in low measurement accuracy.
  • FIG. 12 is a graph showing the magnitude of the light detection signal according to the change in the Z-axis separation distance of each scan position obtained by setting the sound intensity information according to the mapping information
  • FIG. 13 is an image obtained according to the graph result of FIG. 12. .
  • mapping information including scan positions 1 to 4 is loaded by a predetermined control signal
  • sound intensity information is appropriately set according to intensity information of light detected at each scan position included in the mapping information. Can be.
  • the intensity information of light included in the mapping information is the same as the light detection signal according to the change of the Z-axis separation distance according to the conventional method described above, the light detection signal of the scan position 3 in which the light detection signal is generally low corresponds to the corresponding Z.
  • Acoustic intensity information on the Z-axis separation distance of each scan position is set so that the optical detection signal of scan position 4, which is set to appear high at the axis separation distance, and the light detection signal of the scan position 4 where the photodetection signal is oversaturated appears low at the corresponding Z-axis separation distance Can be.
  • the acoustic optical deflector adjusts and outputs the light intensity for each scan position according to the set sound intensity information. Accordingly, the light detection signal detected for each scan position may be as shown in the graph.
  • the image forming unit selects the photodetection signal at the maximum voltage among the photodetection signals based on the detected photodetection distance according to the Z-axis separation distance, and forms an image of each scan position based on the photodetection signal as shown in FIG. 13. Can be.
  • the dark portion may be formed to be brighter than a certain level, and the bright portion may be formed to be darker to a certain level, thereby reducing variation in intensity of light for each scan position, thereby improving measurement accuracy.
  • the intensity of the light to be scanned is adjusted to obtain an image, thereby obtaining a flattened image, thereby improving the measurement accuracy of the entire scan area.
  • the brightness difference of the image due to the detection signal difference that varies depending on the surface information such as reflectance, roughness and reflection angle of each scan position of the scan area can be improved by acquiring an image by adjusting the intensity of light to be scanned according to the intensity of light detected from each scan position.

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Abstract

La présente invention concerne un procédé d'acquisition d'image destiné à un objet devant être mesuré au moyen d'une structure de microscope confocal. D'après la présente invention, le procédé d'acquisition d'image de l'objet devant être mesuré au moyen de la structure de microscope confocal consiste à obtenir une image en produisant une lumière provenant de la partie supérieure de l'objet devant être mesuré, puis en faisant défléchir et en balayant séquentiellement la lumière sur les plans XY d'une zone de balayage au moyen d'une unité de déflexion comprenant un déflecteur acousto-optique. Le procédé d'acquisition d'image comprend : une étape de configuration d'informations permettant d'obtenir des informations sur l'intensité d'une lumière détectée en fonction des propriétés optiques de chaque surface de position de balayage de la zone de balayage, en utilisant l'unité de déflexion et en mappant les informations sur l'intensité de la lumière obtenues dans des informations de localisation au niveau de chaque position de balayage de façon à paramétrer des informations de mappage ; une étape de chargement permettant de charger les informations de mappage mémorisées au cours de l'étape de configuration d'informations en fonction d'un signal de commande ; une étape de transmission permettant de paramétrer des informations sur l'intensité acoustique sur la base des informations de mappage chargées, puis de transmettre les informations paramétrées au déflecteur acousto-optique ; une étape de balayage destinée à permettre la sortie de la lumière entrée dans le déflecteur acousto-optique, et sortie de celui-ci, en ajustant l'intensité de la lumière en fonction des informations sur l'intensité acoustique dès que la lumière est défléchie, ce qui permet de balayer la lumière sortie et de la réfléchir au niveau de chaque position de balayage par l'intermédiaire d'une unité de balayage et permet également à la lumière réfléchie d'entrer dans l'unité de balayage ; une étape d'enregistrement permettant de détecter, à l'aide d'un détecteur optique, la lumière qui est entrée dans l'unité de balayage après avoir été réfléchie à partir de chaque position de balayage, puis d'enregistrer les signaux de détection optique détectés ; une étape de balayage de l'axe Z permettant de modifier une distance entre l'unité de balayage et l'objet devant être mesuré à une certaine distance dans une direction de l'axe Z, puis de réaliser séquentiellement l'étape de transmission, l'étape de balayage et l'étape d'enregistrement de façon à enregistrer les signaux de détection optique au niveau de chaque position de balayage en fonction de la modification de la distance, les signaux de détection optique de chaque position de balayage fonction de la modification de la distance mettant les étapes en œuvre au moins une fois ; et une étape d'acquisition d'image permettant de sélectionner un signal parmi la pluralité de signaux de détection optique au niveau de chaque position de balayage détectée au cours de l'étape de balayage de l'axe Z, puis de former des images au niveau de chaque position de balayage en fonction des informations sur l'intensité acoustique de façon à obtenir les images d'ensemble de la zone de balayage. La présente invention concerne donc le procédé d'acquisition d'image destiné à l'objet devant être mesuré au moyen de la structure de microscope confocal, les images étant obtenues en ajustant l'intensité de la lumière balayée en fonction de l'intensité de la lumière détectée provenant de chaque position de balayage de manière à ce qu'elle corresponde aux différences de luminosité des images dues aux différences des signaux de détection qui sont modifiés en fonction d'informations sur une surface telles que la réflectivité, la rugosité, les angles de réflexion ou d'autres données similaires au niveau de chaque position de balayage de la zone de balayage, ce qui accroît la précision de la mesure de la zone de balayage.
PCT/KR2011/001768 2010-04-08 2011-03-14 Procédé d'acquisition d'image destiné à un objet devant être mesuré au moyen d'une structure de microscope confocal WO2011126220A2 (fr)

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KR101333161B1 (ko) 2012-02-15 2013-11-27 이연태 공초점을 이용한 영상 처리 장치 및 이를 이용한 영상 처리 방법
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KR100519266B1 (ko) * 2003-11-25 2005-10-07 삼성전자주식회사 공초점 현미경
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