WO2011096539A1 - 配線板及びその製造方法 - Google Patents
配線板及びその製造方法 Download PDFInfo
- Publication number
- WO2011096539A1 WO2011096539A1 PCT/JP2011/052420 JP2011052420W WO2011096539A1 WO 2011096539 A1 WO2011096539 A1 WO 2011096539A1 JP 2011052420 W JP2011052420 W JP 2011052420W WO 2011096539 A1 WO2011096539 A1 WO 2011096539A1
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- WO
- WIPO (PCT)
- Prior art keywords
- wiring board
- mold
- wiring
- base material
- insulating base
- Prior art date
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Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0014—Shaping of the substrate, e.g. by moulding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0108—Male die used for patterning, punching or transferring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/005—Punching of holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/465—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer having channels for the next circuit layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49158—Manufacturing circuit on or in base with molding of insulated base
- Y10T29/4916—Simultaneous circuit manufacturing
Definitions
- the present invention relates to a wiring board and a manufacturing method thereof.
- the conventional technology has a problem that it is difficult to maintain the connection reliability between the via formed in the wiring board and the wiring pattern that is electrically connected to the via pattern.
- the problem to be solved by the present invention is to provide a wiring board having a high connection reliability between the via pattern and the wiring pattern and a method for manufacturing the wiring board.
- the present invention includes a plate surface including a protrusion formed in accordance with a via pattern that constitutes a part of a pattern of a wiring board, and the protrusion is connected to the main surface of the plate surface with a curvature. And a step of preparing a mold having an inclined portion whose outer diameter becomes thinner as approaching the top of the projection from the base, and pressing the plate surface of the mold onto one main surface of the softened insulating base After the contact, the mold is released and a hole corresponding to the shape of the protrusion is formed in the insulating base, and a wiring pattern constituting a part of the pattern is formed on one main surface of the insulating base.
- a fourth lamination step of forming a via pattern and a wiring pattern which are filled with a material and can be connected to each other, and depending on the number of laminations of the wiring boards, the first lamination step to the fourth lamination step are By a method of manufacturing a laminated wiring board, characterized in that To solve the problems.
- the present invention includes a protrusion formed according to a via pattern constituting a part of a pattern of a wiring board and a convex part formed according to a wiring pattern constituting a part of the pattern.
- a wiring board comprising: a step of forming an insulating base material; and a step of filling the hole and the concave portion formed in the insulating base material with a conductive material to form a via pattern and a wiring pattern that can conduct each other.
- the present invention includes a printing plate including a protrusion formed in accordance with a via pattern that constitutes a part of a pattern of a wiring board, and has a base having a curved surface, and as the base approaches the top of the protrusion.
- a step of preparing a via mold having an inclined portion with a thin outer diameter, and a wiring mold having a plate surface including a convex portion formed according to a wiring pattern constituting a part of the pattern And a step of preparing and releasing the mold after pressing against one main surface of the insulating base material in which the plate surface of the wiring mold is softened, and forming the concave portion corresponding to the convex portion into the insulating base material.
- the protrusion is pressed after the plate surface of the mold for via is pressed against the surface of the insulating base so that the protrusion hits the recess formed on the surface of the insulating base, and the protrusion
- the method for producing a multilayer wiring board which comprises carrying out 1 laminating step to the fourth laminating step once or twice more, to solve the above problems.
- the top of the protrusion may be configured to have a curved surface.
- a step of removing the insulating base material at the bottom of the hole and penetrating the hole can be further provided.
- the present invention provides an insulating substrate, a wiring pattern formed on one main surface of the insulating substrate, and from one main surface side to the other main surface side of the insulating substrate.
- a via pattern that penetrates and is electrically connected to the wiring pattern, and the via pattern has a connecting base portion that has a curvature connected to the wiring pattern, and an outer diameter that approaches the top of the via pattern from the connecting base portion.
- the wiring pattern and the via pattern can be integrally formed without an interface.
- the wiring pattern can be formed in a convex shape on the main surface of the insulating substrate toward the outside of the main surface.
- the wiring pattern may be formed on the main surface of the insulating base material in a state of being embedded in a convex shape toward the inner side of the main surface.
- the via pattern may be a filled via.
- the diameter of the connection base portion of the via pattern may be 2 ⁇ m or more and 35 ⁇ m or less.
- the diameter of the top of the via pattern may be 1 ⁇ m or more and 30 ⁇ m or less.
- the via pattern penetrating from the one main surface side of the insulating substrate of the wiring board to the other main surface side has a curvature with the wiring pattern formed on the one main surface of the insulating substrate. Since the outer diameter is reduced from the connected part to the top of the via pattern, the stress generated between the via pattern and the wiring pattern is dispersed, and the stress is concentrated on the connection part between the via pattern and the wiring pattern. Can be prevented. As a result, the connection reliability between the via pattern and the wiring pattern can be improved. In addition, since the via pattern is connected to the wiring pattern with a curvature, reflection of the signal can be suppressed, so that loss of signal can be reduced even when a high-frequency signal is transmitted.
- the method for manufacturing a wiring board in the present embodiment is roughly divided into two steps: a step of preparing a mold to be used and a step of manufacturing a wiring board using the prepared die.
- the method for manufacturing a mold according to the present embodiment includes a step of preparing a cured resin plate body, a step of irradiating a main surface of the resin plate body with a laser or an electron beam according to a via pattern, and forming a hole, And filling a hole formed in the resin plate using a mold material and covering the main surface of the resin plate.
- a resin plate 3 for taking the shape of the mold 1 and a support plate 2 for supporting the resin plate 3 are prepared.
- the support plate 2 is made of a material that can be removed by etching.
- a copper foil having a thickness of about 80 to 120 ⁇ m is used as the support plate 2.
- the resin plate 3 is made of an alkali or acid soluble material.
- a photocurable or thermosetting resist film having a thickness of about 15 to 40 ⁇ m, for example, 25 ⁇ m is used as the resin plate 3.
- the resin plate 3 is laminated on the main surface of the support plate 2, and the resin plate 3 is cured by light irradiation or heating. A peeling process can be performed between the support plate 2 and the resin plate 3.
- the main surface of the resin plate 3 is irradiated with a laser or an electron beam (EB) to form holes 31 and 32.
- a laser an excimer laser, a femtosecond laser, or the like can be used.
- the irradiation direction of the laser or electron beam may be perpendicular to the main surface of the resin plate 3 or may be irradiated from a predetermined angle.
- the diameters of the openings 311 and 321 of the holes 31 and 32 of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312 and 322 of the holes 31 and 32 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the diameters of the openings 311 and 321 are about 10 ⁇ m and the depth is about 15 ⁇ m.
- the energy applied to the resin plate 3 by the laser or the electron beam gradually decreases from the openings 311 and 321 of the holes 31 and 32 toward the bottoms 312 and 322 of the holes 31 and 32.
- the resin plate 3 can be irradiated with a laser or an electron beam.
- a method of gradually decreasing the energy density of the laser beam and a method of gradually decreasing the number of shots over time can be used.
- the holes 31 and 32 are gradually digged from the opening parts 311 and 321 toward the bottom parts 312 and 322.
- the diameter of 32 can be reduced.
- the inner walls 311a and 321a of the openings 311 and 321 of the holes 31 and 32 can be made to have curved surfaces, and the openings 311 and 321
- the continuous trunk portions 313 and 323 can be inclined walls 313a and 323a having an inclination in the depth direction.
- the method for controlling the energy applied by the laser or electron beam is not particularly limited, but the type of the resin plate 3, the thickness of the resin plate 3, the type of the laser or electron beam, and the magnitude of energy applied (energy density, number of shots) Depending on the distance between the light source and the resin plate 3, it can be determined experimentally.
- a method of reducing the beam diameter of laser light such as excimer laser with time can be used.
- the laser beam diameter when forming the openings 311 and 321 of the holes 31 and 32 can be made larger than the laser beam diameter when forming the bottom portions 312 and 322 of the holes 31 and 32.
- the diameters of the openings 31 and 321 are increased, and the diameters of the holes 31 and 32 are reduced as the holes 31 and 32 are dug from the openings 311 and 321 toward the bottoms 312 and 322. Can do.
- the holes 31 and 32 formed by such a method are such that the inner walls 311 a and 321 a of the openings 311 and 321 are connected to the main surface of the resin plate 3 with a curvature. Can be formed. Also, body portions 313 and 323 having inclined walls 313a and 323a whose outer diameters become narrower from the opening portions 311 and 321 of the holes 31 and 32 formed in the resin plate body 3 toward the bottom portions 312 and 322 are formed. Can do.
- the mold material is used to fill the holes 31 and 32 formed in the resin plate 3 and cover the main surface of the resin plate 3.
- a conductive layer that becomes a seed layer in a plating process or the like performed later.
- This conductive layer is formed by a direct plating process (DPP) treatment using carbon (C), palladium (Pd), or the like, or sputtering using copper (Cu) or nickel (Ni).
- DPP direct plating process
- plating is performed using a mold material such as copper (Cu) or nickel (Ni)
- the holes 31 and 32 are filled with the mold material
- the main surface of the resin plate 3 is covered with a plating layer of the mold material. cover.
- a conductive nano paste containing copper (Cu), silver (Ag) or the like may be printed to fill the holes 31 and 32 with a mold material and cover the main surface of the resin plate 3.
- a conductive nano paste containing copper (Cu), silver (Ag) or the like may be printed to fill the holes 31 and 32 with a mold material and cover the main surface of the resin plate 3.
- an insulating material non-conductive material such as glass can be used.
- copper plating is performed after a copper (Cu) layer is formed to a thickness of about 100 to 300 nm by sputtering.
- a copper plating layer having a thickness of about 10 to 50 ⁇ m is formed on the resin plate 3 to fill the holes 31 and 32 with a mold material and cover the main surface of the resin plate 3.
- the base portions 111 and 121 having the curved surfaces 111a and 121a, the inclined portions 113 and 123, and the top portions 112 and 122, Protrusions 11 and 12 having the above are formed.
- the formed curved surfaces 111a and 121a of the projections 11 and 12 are in contact with the inner walls 311a and 321a of the holes 31 and 32, and the inclined surfaces 113a and 123a of the projections 11 and 12 are the inclined walls 313a and 323a of the holes 31 and 32, respectively.
- the top portions 112 and 122 of the protrusions 11 and 12 are in contact with the bottom portions 312 and 322 of the holes 31 and 32.
- the holes 31 and 32 of the resin plate body 3 of the present embodiment are formed so that the inner walls 311a and 321a of the openings 311 and 321 are connected to the main surface of the resin plate body 3 by a surface having a curvature, Corners formed by intersecting straight lines are not formed. If the object to be plated has corners, the plating thickness of the corners tends to be different from the plating thickness of other parts. On the other hand, in this embodiment, since the corners are not formed in the openings 311 and 321, it is possible to form a plating layer having a uniform thickness on the inner walls 311 a and 321 a.
- the surfaces of the inclined walls 313a and 323a whose diameters become thinner from the inner side walls 311a and 321a toward the bottoms 312 and 322, are flat with no irregularities, and the opening area gradually increases from the bottoms 312 and 322 to the openings 311 and 321. Since it is wide, a plating layer having a uniform thickness can be formed on the inclined walls 313a and 323a and the bottom portions 312 and 322 as well.
- the plating thickness is not uniform, the stress acting on the plating layer is concentrated and a strong force may be applied to a part of the plating layer, but in this embodiment, the inner walls 311a and 321a of the openings 311 and 321 are applied. Since the plating layers having a uniform thickness are formed on the inclined walls 313a and 323a and the bottom portions 312 and 322, it is possible to prevent stress from acting on a part of the plating layer (mold 1). According to the manufacturing method of this embodiment, the highly durable metal mold
- the support plate 2 is removed with an etching solution such as ferric chloride to expose the surface of the resin plate 3.
- the shape of the protrusion is governed by the resolution of photolithography, and the diameter is 20 ⁇ m or less, particularly 10 ⁇ m or less, and the aspect ratio is 1 or more. It was difficult to produce a fine shape.
- the holes 31 and 32 are formed by a laser or an electron beam, so that the diameters of the openings 311 and 321 of the holes 31 and 32 are small.
- the fine holes 31 and 32 having a high aspect ratio (for example, 1 or more) having a diameter of 2 ⁇ m or more and 35 ⁇ m or less and the diameters of the bottom portions 312 and 322 of the holes 31 and 32 being 1 ⁇ m or more and 30 ⁇ m or less are formed in one step. Can do.
- a curved surface that is difficult to form in the photolithography process can be formed in one process.
- the inner walls 311a and 321a having curvature and the inner walls 311a and 321a are connected to each other and inclined with respect to the depth direction. Since the inclined walls 313a and 323a and the bottom portions 312 and 322 connected to the inclined walls 313a and 323a and formed by curved surfaces can be manufactured in one step, the mold 1 having the shape shown in FIG. The manufacturing cost can be reduced.
- the diameter of the via pattern formed on the insulating substrate is limited to about 30 ⁇ m in diameter. is there.
- a gas such as krypton fluoride (KrF) to be used is expensive. Therefore, it takes a cost to process each via pattern of the wiring board one by one.
- the via pattern of the wiring board can be formed using the mold 1 according to the present embodiment, a fine via having a diameter of the thickest part of the via pattern of 35 ⁇ m or less, further 15 ⁇ m or less, and less than 10 ⁇ m.
- a pattern can be formed at low cost.
- FIG. 5 is a cross-sectional view of the mold 1 of the present embodiment along the clamping direction (arrow M in the figure).
- the mold 1 of this embodiment has a printing plate 1a formed according to a pattern (including a via pattern and a wiring pattern) produced on a wiring board.
- the plate surface 1a of the mold 1 according to the present embodiment has a concavo-convex shape (including protrusions 11 and 12 corresponding to a via pattern and a convex portion corresponding to a wiring pattern) for forming a desired pattern. It functions as a processing plate (original plate) for transferring to an insulating substrate or the like.
- symbol 1a in FIG. 5 has instruct
- the plate surface 1a of this embodiment has at least protrusions 11 and 12 formed in a convex shape on the main surface side of the plate surface 1a. There is no interface between the plate surface 1a and the projections 11 and 12, and the projections 11 and 12 constitute a part of the plate surface 1a.
- the plate surface 1a may be a plate-like member having a predetermined thickness as shown in FIG. 5, or may be a structure supported by another plate-like member (not shown).
- a metal such as copper (Cu), a resin, or the like can be used as a mold material constituting the mold 1.
- the protrusions 11 and 12 of the present embodiment are formed in a shape having a thickness (diameter), a length, and an aspect ratio corresponding to the via pattern hole to be formed.
- the diameters of the bases 111 and 121 of the protrusions 11 and 12 are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m.
- the diameters of the top portions 112 and 122 of the protrusions 11 and 12 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the length of the protrusions 11 and 12 of the present embodiment is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the aspect ratio is 0.5 to 40, preferably 1 to 30, and can be about 1 to 4 in this example.
- two protrusions 11 and 12 are shown in FIG. 5, the arrangement and number of the protrusions 11 and 12 are not particularly limited.
- the protrusions 11 and 12 in the present embodiment taper from the bases 111 and 121 connected by curved surfaces 111a and 121a having a curvature to the main surface of the printing plate 1a, and from the bases 111 and 121 to the tops 112 and 122 of the protrusions 11 and 12, respectively. And inclined portions 113 and 123.
- the main surface of the plate surface 1a is a surface parallel to a surface that moves when transferring or releasing.
- FIG. 6 is an enlarged view of a region A indicated by a broken line in FIG.
- the protrusion 12 of the present embodiment has a curved surface 121a at the base 121 that is the root portion thereof.
- the base 121 of the protrusion 12 is continuous with the plate surface 1a with a curvature.
- the base 121 that supports the projection 12 having a high aspect ratio on the plate surface 1a is configured by the curved surface 121a, the force acting on the base 121 can be dispersed by the curved surface 121a. As a result, it is possible to prevent problems such as the protrusion 12 being bent from the base or the tip of the protrusion 12 being chipped.
- FIG. 6 only the protrusion 12 is shown, but the protrusion 11 can also have the same configuration.
- the inclined portions 113 and 123 have a diameter (thickness) or a cross-section of a cross section parallel to the main surface of the plate surface 1a as the distance from the main surface of the plate surface 1a increases. It is formed in the shape of a cone whose area gradually decreases (see FIG. 5). Specifically, as shown in the enlarged view of FIG. 6, the inclined surface 123a of the inclined portion 123 of the projection portion 12 of the present embodiment has an outer diameter (P1-P1 ′) that becomes narrower from the base portion 121 toward the top portion 122. It is formed as follows.
- the distance (outer diameter: P1-P1 ′) between the points T1 and T4 on the surface of the protrusion 12 shown in FIG. 6 gradually decreases from the point T1 (T4) to the point T2 (T3) (P2- P2 ′ ⁇ P1-P1 ′).
- the cross-sectional shape along the moving direction (direction of arrow M in FIG. 5) of the plate surface 1a of the inclined portion 123 for example, the shape surrounded by the points T1, T2, T3, T4 is approximately. It can be a tapered shape.
- the mold 1 of the present embodiment has the protruding portion 12 having the shape including the inclined portion 123 gradually narrowing from the base portion 121 to the top portion 122 having a curvature on the main surface of the plate surface 1a, and thus resin.
- the protrusion 12 is press-fitted into the base material, the portion having a small cross-sectional area can be first press-fitted into the resin base material. Thereby, the resistance at the time of press-fitting can be reduced.
- the top 122 of the protrusion 12 can be formed to have a curved surface.
- the tip portion when embossing the resin base material is curved, the force acting on the protrusion 12 at the time of press-fitting can be dispersed.
- the protrusions 11 and 12 are easily press-fitted into the resin substrate when the mold 1 is pressed onto the resin substrate, and the protrusions 11 and 12 are removed from the resin substrate when released from the resin substrate.
- An easy mold 1 can be provided.
- the length of T1-T4 shown in FIG. 6 corresponds to an example of the diameter of the bases 111, 121 of the protrusions 11, 12, and the length of T2-T3 shown in FIG. This corresponds to an example of the diameter of the top portions 112 and 122.
- the top portions 112 and 122 include a portion of a predetermined distance from the top of the top portions 112 and 122 of the projecting portions 11 and 12 to the base portions 111 and 121, and the diameter of the top portions 112 and 122 is a portion included in the top portions 112 and 122. Of the cross section along the plate surface 1a.
- the shapes of the holes 31 and 32 of the resin plate 3 described above, the holes 31V and 32V of the insulating base material 30 described later, and the via patterns 11V and 12V are substantially the same as the shape of the protrusion 12 shown in FIG. .
- the diameter of the base 121 of the protrusion 12 includes the diameters of the openings 311 and 321 of the holes 31 and 32 of the resin plate 3, the diameters of the openings 311V and 321V of the holes 31V and 32V of the insulating substrate 30, and Corresponding to the connection base portions 111V and 121V of the via patterns 11V and 12V, the diameter of the top portion 122 of the projection portion 12 is the diameter of the bottom portions 312 and 322 of the holes 31 and 32 of the resin plate 3, and the hole 31V of the insulating substrate 30. , 32V of the bottom portions 312V and 322V, and the via patterns 11V and 12V of the top portions 112V and 122V.
- a wiring board is obtained by a so-called imprint method using the mold 1 shown in FIGS.
- a transfer insulating substrate (resin film) 30 constituting the mold 1 and the wiring board is prepared, and the main surface of the mold 1 is opposed to the main surface of the insulating substrate 30. Let them be arranged.
- a thermosetting resin such as an epoxy resin or a thermoplastic resin such as a liquid crystal polymer can be used.
- die 1 is moved along the direction (direction shown by arrow P1) which makes the insulating base material 30 approach.
- an Ajinomoto Build-Up Film (ABF) which is a thermosetting resin, is used as the material of the insulating base material 30 and is heated and pressed at 150 ° C. and 10 MPa.
- the resistance force received from the insulating base material 30 can be reduced. For this reason, it can press-fit into the insulating base material 30 with a force smaller than the case where the top parts 112 and 122 of the projection parts 11 and 12 are flat.
- the mold 1 and the insulating substrate 30 are heated to a temperature equal to or higher than the glass transition temperature (Tg), and the mold 1 is pressed against the main surface of the insulating substrate 30 as shown in FIG. Thereafter, the mold 1 and the insulating base material 30 are cooled to below the glass transition temperature (Tg).
- Tg glass transition temperature
- the mold 1 is released in a direction (arrow P ⁇ b> 2) away from the insulating substrate 30.
- the bases 111 and 121 of the protrusions 11 and 12 have a curvature, the bases 111 and 121 are easier to release than when the bases 111 and 121 are connected to the plate surface 1a at an angle.
- the insulating base material 30 is a thermosetting resin, the insulating base material 30 is completely cured by heating at 180 ° C. for 1 hour in an oven or the like.
- the insulating base material 30 is a thermoplastic resin, it is cooled and cured.
- the pattern (including a via pattern and a wiring pattern, the same applies hereinafter) of the plate surface 1 a of the mold 1 can be transferred to the main surface of the insulating base material 30.
- holes 31V and 32V corresponding to the shapes of the protrusions 11 and 12 of the mold 1 are formed in the insulating base material 30.
- the holes 31V and 32V include inner side walls 311Va and 321Va having curvature around the openings 311V and 321V, and inclined walls 313Va and 323Va whose inner diameter gradually decreases toward the bottom surface.
- the holes 31V and 32V formed in the insulating substrate 30 have substantially the same shape as the holes 31 and 32 shown in FIG.
- the holes 31V and 32V formed in the insulating base material 30 have inner walls 311Va and 321Va having curvatures formed in the openings 311V and 321V, as shown in FIG.
- the main surface has a curvature and continues.
- the holes 31V and 32V have trunk portions 313V and 323V having inclined walls 313Va and 323Va that have outer diameters that become narrower from the openings 311V and 321V toward the bottom portions 312V and 322V.
- the diameters of the openings 311V and 321V of the holes 31V and 32V of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312V and 322V of the holes 31V and 32V of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the diameters of the openings 311V and 321V are about 10 ⁇ m and the depth is about 15 ⁇ m.
- the insulating base material 30 remaining in the bottom portions 312V and 322V of the holes 31V and 32V is removed. And as shown in FIG. 10, the holes 31V and 32V are penetrated.
- the method of removing the insulating base material 30 remaining in the bottom portions 312V and 322V is not particularly limited, polishing is performed mechanically or chemically from the upper surface or the lower surface of the insulating base material 30.
- the holes 31 ⁇ / b> V and 32 ⁇ / b> V are penetrated by irradiating plasma from the upper surface or the lower surface of the insulating base material 30, spraying a chemical, or sandblasting.
- a resist is applied to one main surface of the insulating base material 30, the resist is patterned according to the wiring pattern using a photolithography technique, and a concave portion corresponding to the wiring pattern is formed on the one main surface of the insulating base material 30.
- plating is performed, and the recesses formed by the holes 31V and 32V and the resist pattern are filled with a conductive material such as copper (Cu) or silver (Ag).
- This treatment can also be performed on the other main surface of the insulating substrate 30. That is, after patterning a resist on one main surface of the insulating base material 30, the resist can be patterned on the other main surface using a photolithography technique, and then plating can be performed.
- a conductive material such as copper (Cu) or silver (Ag) in the upper concave portion on one main surface side and the lower concave portion on the other main surface side formed by the holes 31V and 32V and the resist pattern. It can. That is, the conductive material is filled in the holes 31V and 32V corresponding to the via pattern and the concave portions corresponding to the front and back wiring patterns in a single plating process, so that a wiring board having interlayer conduction can be obtained.
- a conductive material such as copper (Cu) or silver (Ag)
- the holes 31V and 32V of the present embodiment have inner walls 311Va and 321Va having curvature around the openings 311V and 321V, and inclined walls 313Va and 323Va whose inner diameter gradually decreases toward the bottom surface.
- a uniform seed layer can be formed evenly on the inner surfaces of the holes 31V and 32V by a direct plating process (DPP) process or a sputtering process before the plating process.
- DPP direct plating process
- the holes 31V and 32V of the present embodiment have inner side walls 311Va and 321Va having curvature around the openings 311V and 321V, and inclined walls 313Va and 323Va whose inner diameter gradually decreases toward the bottom surface, they are uniform.
- the plating layer can be formed at a rate, a plating layer having a uniform metal orientation can be formed on the inner surfaces of the holes 31V and 32V.
- the plating layer formed there can be formed evenly on the inner surfaces of the holes 31V and 32V with a uniform thickness.
- the holes 31V and 32V of the present embodiment have openings 311V and 321V having diameters of 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. Since the diameters of the bottom portions 312V and 322V of 31V and 32V are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less, a solid filled via is formed by plating. can do. By forming the holes 31V and 32V to be thin, the filled via can be formed in a short time. Further, since the plating time can be shortened, the formation conditions of the plating layer can be controlled to be uniform, and a uniform plating layer can be formed.
- the first wiring patterns 51 to 57, the second wiring patterns 61 and 62, and these Via patterns 11V and 12V that are electrically connected to each other can be formed in a lump. If an excess portion of the conductive material remains, it is removed by polishing or etching. And the wiring board 100 is obtained.
- the step of drilling the insulating base material 30 with a laser since the step of drilling the insulating base material 30 with a laser is not included, smear such as debris and dust generated at the time of drilling does not occur. For this reason, it is not necessary to perform a desmear process, and a process can be reduced.
- FIG. 11 is a diagram showing the wiring board 100 according to the present embodiment.
- the wiring board 100 of the present embodiment includes an insulating substrate 30, first wiring patterns 51 to 57 formed on one main surface of the insulating substrate 30, and formed on the other main surface.
- the via patterns 11 ⁇ / b> V and 12 ⁇ / b> V in the present embodiment of the present invention are a concept including a columnar conductive member formed in a via hole that penetrates the insulating base material 30.
- the first wiring patterns 51 to 57 of the wiring board 100 of the present embodiment are formed in a convex shape from one main surface of the insulating base material 30 to the outside side (upper side in the figure) of the insulating base material 30.
- the via patterns 11V and 12V of the present embodiment are connected to the first wiring patterns 52 and 56 with a curvature and connected to the connecting base portions 111V and 121V, and from the connecting base portions 111V and 121V to the via patterns 11V and 12V.
- cone-shaped portions 113V and 123V whose outer diameters become narrower as they approach the head top portions 112V and 122V.
- the via patterns 11V and 12V of this embodiment have curved surfaces 111Va and 121Va having curvatures with the first wiring patterns 52 and 56, and the via patterns 11V and 12V and the first wiring patterns 52 and 56. Is smoothly connected via the curved surfaces 111Va and 121Va, so that even when the frequency is increased, the reflection of the electric signal is reduced and the loss can be suppressed.
- the via patterns 11V and 12V of the present embodiment are so-called filled vias, have no cavities, and are solidly formed of a conductive material. Since the via patterns 11V and 12V and the first wiring patterns 51 to 57 of the present embodiment are formed by the same process (for example, plating process) under the same conditions at the same time, the orientation of the metal crystals in the conductive material is made uniform. be able to. Therefore, no interface is generated in the via patterns 11V and 12V and in the connection portions between the via patterns 11V and 12V and the first wiring patterns 51 to 57. When a portion having a different orientation of the metal crystal is generated, this portion becomes a starting point, and a crack tends to be generated in the via pattern.
- the diameters of the connection bases 111V and 121V of the via patterns 11V and 12V of the present embodiment are 2 ⁇ m or more, and It is 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m.
- the diameters of the top portions 112V and 122V of the via patterns 11V and 12V of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the lengths of the via patterns 11V and 12V of this embodiment are 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the aspect ratio is 0.5 to 40, preferably 1 to 30, and can be about 1 to 4 in this example.
- the connection bases 111V and 121V have a diameter of about 10 ⁇ m and a depth of about 15 ⁇ m.
- first wiring patterns 51 to 57 and the via patterns 11V and 12V of the wiring board 100 of the present embodiment are formed at the same time, they are integrally formed without an interface.
- a cross section along the penetration direction of the first wiring pattern 52 and the via pattern 11V and the first wiring pattern 56 and the via pattern 12V of this embodiment is observed by scanning ion microscopy (SIM), the pattern shown in FIG. As shown in the figure, crystal grains without boundaries can be observed.
- connection base 111V of the via pattern 11V connected to the first wiring pattern 52 and the connection base 121V of the via pattern 12V connected to the first wiring pattern 56 crystal grains having no boundary can be observed.
- the via patterns 11V and 12V of the wiring board 100 formed using the mold 1 according to the present embodiment corners where straight lines intersect are not formed. That is, the main surface of the insulating substrate 30, the first wiring patterns 51 to 57, and the connection bases 111V and 121V of the via patterns 11V and 12V are connected by the curved surfaces 111Va and 121Va having the curvature. It is possible to prevent signal reflection when the signal is transmitted. Even when a high-frequency signal, which is generally considered to cause signal reflection, is transmitted, according to the wiring board according to the present embodiment, signal reflection can be prevented. Can be suppressed. As a result, the wiring board 100 having excellent transmission characteristics can be provided.
- the limit of the diameter of the via pattern formed in the insulating layer using an ultraviolet (UV) laser is about 30 ⁇ m as in the conventional manufacturing process of a wiring board.
- UV ultraviolet
- a gas such as krypton fluoride (KrF) to be used is expensive. Therefore, the manufacturing cost is increased.
- the wiring board 100 having the fine via patterns 11V and 12V can be efficiently manufactured using the mold 1.
- the wiring board 100 shown in FIG. 11 described above is prepared.
- Insulating base materials 30a and 30b are laminated (first laminating step).
- a thermosetting resin such as an epoxy resin or a thermoplastic resin such as a liquid crystal polymer can be used.
- the same material as the insulating substrate 30 of the wiring board 100 can be used, but a different material can also be used.
- two molds 1A and 1B are prepared. Since the structures of the molds 1A and 1B are the same as those of the mold 1 shown in FIG. 5 described in the first embodiment, description thereof is omitted here.
- one mold 1 ⁇ / b> A is arranged in parallel to the insulating base material 30 a laminated on the uppermost layer surface side of the wiring board 100, and the other mold 1 ⁇ / b> B is laminated on the lowermost layer side of the wiring board 100.
- the insulating substrate 30b is arranged in parallel.
- the top portions 112 and 122 of the projecting portions 11 and 12 formed on the plate surfaces 1a of the two molds 1A and 1B are opposed to the insulating base materials 30a and 30b, respectively.
- Insulating base materials 30a and 30b are heated until the glass transition temperature or higher, and molds 1A and 1B are moved in the directions of insulating base materials 30a and 30b as shown in FIG. , 12a (11b, 12b) are press-fitted into the insulating substrate 30a (30b).
- the movement of the molds 1A and 1B may be performed simultaneously or sequentially.
- the mold 1A and the mold 1B are released from the insulating base materials 30a and 30b, respectively.
- the bases 111 and 121 of the protrusions 11a and 12a (11b and 12b) have a curvature, the protrusions 11a and 12a (11b and 12b) are easier to release than when the protrusions 11a and 12a (11b and 12b) are connected to the plate surface 1a at an angle.
- the insulating base materials 30a and 30b are thermosetting resins, they are cured by heating with an oven or the like.
- the insulating base materials 30a and 30b are thermoplastic resins, they are cooled and cured.
- holes 31Va, 32Va (31Vb, 31Vb, 31Vb, 31Bb) corresponding to the shapes of the protrusions 11a, 12a (11b, 12b) of the molds 1A, 1B are formed in the insulating base material 30a (30b) after the release. 32Vb) is formed (second lamination step).
- a resist is applied to the main surfaces (exposed surfaces) of the insulating base materials 30a and 30b, and the resist is patterned according to the wiring pattern using a photolithography technique. A recess corresponding to the wiring pattern is formed on the main surface (third lamination step).
- conductive materials such as copper (Cu) and silver (Ag) are filled in the recesses formed by the holes 31Va, 32Va (31Vb, 32Vb) and the resist pattern.
- the conductive material is filled in the recesses corresponding to the holes 31Va, 32Va (31Vb, 32Vb) and the wiring pattern. Therefore, as shown in FIG. 18, the via patterns 11Va, 12Va (11Vb, 12Vb) and the wiring pattern 51a.
- To 57a (51b to 57b) can be formed (fourth stacking step).
- the laminated wiring board 1000 having the interlayer conduction with the wiring board 100 can be obtained from the first laminating process to the fourth laminating process.
- the first to fourth lamination steps described above can be repeated as many times as the number of laminations of the target wiring board 1000.
- the first wiring patterns 51 to 57, 51a to 57a, 51b to 57b, and the second wiring patterns 61 and 62 may have substantially the same shape or different shapes.
- the stacked wiring board 1000 having the fine via patterns 11Va and 12Va (11Vb and 12Vb) using the mold 1A and the mold 1B is high. It can be manufactured with production efficiency.
- first wiring patterns 51 to 57 are formed on one main surface of the insulating substrate 30 of the wiring board 100 located in the center, and second wiring patterns 61 and 62 are formed on the other main surface. Is formed. Via patterns 11 ⁇ / b> V and 12 ⁇ / b> V formed integrally with these and electrically conductive are connected to the first wiring patterns 52 and 56 on a curved surface. The via patterns 11V and 12V taper from the first wiring patterns 52 and 56 side toward the second wiring patterns 61 and 62 side.
- another wiring board 100a is laminated on one main surface side (upper side in the figure) of the wiring board 100, and another wiring board 100b is placed on the other main surface side of the wiring board 100.
- First wiring patterns 51a to 57a are formed on one main surface side (upper side in the drawing) of the insulating substrate 30a of the wiring board 100a.
- Via patterns 11Va and 12Va that are formed integrally with the first wiring patterns 51a to 57a and are electrically connected to the first wiring patterns 51 to 57 of the wiring board 100 and the first wiring patterns 51a to 57a
- the patterns 52a and 56a are connected by curved surfaces.
- the via patterns 11Va and 12Va taper from the first wiring patterns 52a and 56a side toward the first wiring patterns 52 and 56 side of the wiring board 100.
- first wiring patterns 51b to 57b are formed on the other main surface side (lower side in the figure) of the insulating base material 30b of the wiring board 100b.
- Via patterns 11Vb and 12Vb that are formed integrally with the first wiring patterns 51b to 57b and are electrically connected to the second wiring patterns 61 and 62 of the wiring board 100 and the first wiring patterns 51b to 57b
- the patterns 52b and 56b are connected by curved surfaces.
- the via patterns 11Vb and 12Vb taper from the first wiring patterns 52b and 56b side toward the second wiring patterns 61 and 62 side of the wiring board 100.
- the via patterns 11Va and 12Va and the via patterns 11Vb and 12Vb are formed integrally with the first wiring patterns 51a to 57a and 51b to 57b in the same manner as the via patterns 11V and 12V described in the first embodiment without any interface. Has been.
- the via patterns 11Va and 12Va and the via patterns 11Vb and 12Vb in the multilayer wiring board 1000 of the present embodiment have the same configuration as the via patterns 11V and 12V of the first embodiment, the multilayer pattern according to the present embodiment.
- the wiring board 1000 has the same operations and effects as the single-layer wiring board 100 according to the first embodiment.
- the manufacturing method according to the first embodiment is the same as the second embodiment, but the manufacturing method (variation example) is different from that of the second embodiment in the aspect of lamination. Will be explained.
- the wiring board 100 shown in FIG. 11 obtained by the manufacturing method of the first embodiment is prepared. And as shown in FIG. 19, another insulating base material 30a is laminated
- the insulating base material 30a the same material as that of the second embodiment can be used.
- the mold 1 is the same as the mold 1 shown in FIG. 5 used in the manufacturing method of the first embodiment. As shown in FIG. 20, the mold 1 is disposed in parallel with the wiring board 100, and the plate surface 1a of the mold 1 is disposed so as to face the main surface of the insulating base material 30a.
- the insulating base material 30a is heated until the glass transition temperature or higher, and as shown in FIG. 21, the mold 1 is moved in the direction of the insulating base material 30a, and the protrusions 11 and 12 are further connected to the insulating base material. Press fit into the material 30a.
- the mold 1 is released from the insulating substrate 30a, and the insulating substrate 30a is cured.
- holes 31Va and 32Va corresponding to the shapes of the protrusions 11 and 12 of the mold 1 are formed in the insulating base material 30a after the release (second laminating step).
- a resist is applied to the main surface (exposed surface) of the insulating base material 30a, the resist is patterned according to the wiring pattern using a photolithography technique, and wiring is performed on the main surface of the insulating base material 30a. A concave portion corresponding to the pattern is formed (third lamination step).
- a conductive material such as copper (Cu) or silver (Ag) is filled in the recesses formed by the holes 31Va and 32Va and the resist pattern.
- a conductive material such as copper (Cu) or silver (Ag) is filled in the recesses formed by the holes 31Va and 32Va and the resist pattern.
- a laminated wiring board 1000 having interlayer conduction with the wiring board 100 can be obtained as shown in FIG.
- the first to fourth lamination steps described above can be repeated as many times as the number of laminations of the target wiring board 1000.
- the wiring board 1000 shown in the figure is an example of a four-layer wiring board 1000 in which the first to fourth lamination processes are repeated three times, and the wiring board 100 is laminated with three layers of the wiring boards 100a, 100c, and 100d. is there.
- the first wiring patterns 51 to 57, 51a to 57a, 51c to 57c, 51d to 57d, and the second wiring patterns 61 and 62, 61a may have the same shape or different shapes. .
- the via patterns 11Va, 12Va, the via patterns 11Vc, 12Vc, the via patterns 11Vd, 12Vd are the same as the via patterns 11V, 12V described in the first embodiment.
- the first wiring patterns 51a to 57a, 51c to 57c, and 51d to 57d are formed integrally with no wiring.
- the via patterns 11Va, 12Va, the via patterns 11Vc, 12Vc, the via patterns 11Vd, 12Vd are connected to the first wiring patterns 51a to 57a, 51c to 57c, and 51d to 57d by curved surfaces. It has a tapered shape toward the tip of the pattern.
- the via patterns 11Va, 12Va, the via patterns 11Vc, 12Vc, the via patterns 11Vd, 12Vd in the multilayer wiring board 1000 of this example have the same configuration as the via patterns 11V, 12V of the first embodiment.
- the multilayer wiring board 1000 of this embodiment exhibits the same operations and effects as the single-layer wiring board 100 of the first embodiment.
- a wiring board manufacturing method and a wiring board 100 manufactured by this manufacturing method according to the third embodiment will be described below with reference to FIGS.
- the method for manufacturing the wiring board of the present embodiment and the configuration of the wiring board 100 manufactured by this manufacturing method are basically the same as the configuration of the wiring board 100 of the first embodiment.
- the description of the embodiment will be cited, and different parts will be mainly described.
- the method for manufacturing a wiring board in the present embodiment is roughly divided into two steps: a step of preparing a mold to be used and a step of manufacturing a wiring board using the prepared die.
- a method for manufacturing a mold and a manufactured mold will be described, and a method for manufacturing a wiring board using the mold and the manufactured wiring board will be described.
- the mold manufacturing method of the present embodiment includes a step of preparing a cured resin plate body, and a step of forming a hole by irradiating a main surface of the resin plate body with a laser or an electron beam according to a via pattern.
- a laminate of the resin plate 3 and the support plate 2 shown in FIG. 25 is prepared, and the resin plate 3 is cured.
- the materials of the resin plate 3 and the support 2 are the same as those in the first embodiment.
- holes 31 and 32 are formed by irradiating the main surface of the resin plate 3 with a laser or an electron beam (EB) by the same method as in the first embodiment.
- the inner walls of the openings 311 and 321 of the holes 31 and 32 of the resin plate body 3 of the present embodiment are formed so as to be connected to the main surface of the resin plate body 3 with a curved surface having a curvature.
- the holes 31 and 32 have inclined walls 313 a and 323 a that are continuous with the openings 311 and 321 and have an inclination in the depth direction, and are connected at the bottoms 312 and 322.
- the diameters of the openings 311 and 321 of the holes 31 and 32 of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312 and 322 of the holes 31 and 32 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the holes 31 and 32 of this embodiment have a diameter of about 10 ⁇ m and a depth of about 15 ⁇ m.
- a resist layer 4 is formed on the resin plate 3 so as not to fill the holes 31 and 32.
- the resist layer 4 may be a film having a thickness of about 5 to 20 ⁇ m soluble in alkali or acid.
- a predetermined region of the resist layer 4 including a region covering the opening region of the holes 31 and 32 is removed by photolithography according to the wiring pattern.
- the resist layer 4 is exposed using a photomask and an exposure apparatus, and a predetermined region of the resist layer 4 is selectively removed by alkali development or acid development and patterned.
- the opening regions of the holes 31 and 32 are opened (the holes 31 and 32 are not closed), and the grooves 41 to 47 of the resist layer 4 are formed.
- the formed grooves 42 and 46 are connected to the previously formed holes 31 and 32, the main surface of the resin plate 3 connected to the openings 311 and 321 of the holes 31 and 32, and the resist layer 4 that forms the grooves 42 and 46.
- a step-like (two-stage) pattern is formed by the main surface (on the light source side of exposure).
- the wiring width of the line-and-space portion formed by the grooves 41 to 47 should be about 5 to 20 ⁇ m
- the wiring interval should be about 5 to 20 ⁇ m
- the land diameter of the via pattern should be about 50 to 120 ⁇ m. Can do.
- a conductive layer to be a seed layer is formed in a plating process or the like performed later by the same method as in the first embodiment.
- the main surface of the resist layer 4 and the resin plate 3 from which the predetermined region including the region covering the opening region is removed is covered with a mold material.
- the mold material is filled with holes 31 and 32 and grooves 41 to 47 formed in the resin plate 3 by plating, and the upper and side surfaces of the resist layer 4 and the main surface of the resin plate 3 are filled. Cover.
- the plating method and the like are the same as those in the first embodiment.
- the support plate 2 is removed with an etching solution such as ferric chloride.
- the resin plate 3 is swelled and peeled off with an aqueous sodium hydroxide solution to obtain the mold 1 shown in FIG.
- a two-step pattern having holes 31 and 32 and grooves 41 to 47 by a laser or an electron beam is formed, thereby performing a single plating process.
- the protrusions 11 and 12 and the protrusions 21 to 27 can be formed in one step.
- via pattern holes 31 and 32 are first formed by laser or the like, then wiring pattern grooves 41 to 47 are formed, and mold material holes 31 and 32 and grooves 41 to 47 are formed in one step.
- the process of polishing the top of the protrusion for the via pattern as compared with the conventional method of forming the protrusion for the via pattern on the protrusion after forming the protrusion for the wiring pattern. Can be eliminated, and the process can be simplified.
- the holes 31 and 32 may be formed in the resin plate disposed below.
- the protrusion 11 having the bases 111 and 121 that are curved and smoothly connected to the upper surfaces of the protrusions 12 and 16 that cannot be obtained in the photolithography process. , 12 can be formed, and the same operations and effects as the first embodiment can be obtained.
- the via pattern and the wiring pattern constitute a wiring board pattern.
- the protrusions 11 and 12 have bases 111 and 121 that are continuous with curvature on the upper surfaces of the convex parts 21 to 27, and an inclination in which the outer diameter becomes thinner from the bases 111 and 121 toward the top parts 112 and 122 of the protrusions 11 and 12. Parts 113 and 123.
- the bases 111 and 121 of the protrusions 11 and 12 corresponding to the via pattern are connected to the upper surfaces of the convex portions 21 to 27 (surfaces parallel to the main surface of the plate surface 1a, hereinafter the same) by the curved surfaces 111a and 121a. That is, the protrusions 11 and 12 have apexes 112 and 122 higher than the protrusions 21 to 27, and bases 111 and 121 connected to the upper surfaces of the protrusions 22 and 26 by curved surfaces 111a and 121a having curvature. There is no interface between the printing plate 1a and the projections 21 to 27, and between the projections 22 and 26 and the projections 11 and 12, and the mold 1 is integrally formed. Copper (Cu) or the like can be used as the mold material constituting the mold 1 as in the first embodiment.
- Cu Copper
- the protrusions 11 and 12 of the present embodiment have tops 112 and 122 formed of curved surfaces, respectively.
- shape of the projections 11 and 12 can be formed by the same method as in the above-described embodiment.
- the diameters of the bases 111 and 121 of the protrusions 11 and 12 are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m.
- the diameters of the top portions 112 and 122 of the protrusions 11 and 12 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the lengths of the protrusions 11 and 12 of the present embodiment are 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the aspect ratio is 0.5 to 40, preferably 1 to 30, and can be about 1 to 4 in this example.
- the bases 111 and 121 of the projections 11 and 12 are smoothly connected to the upper surfaces (surfaces parallel to the plate surface 1a) of the convex portions 21 to 27 with a curvature. The same operations and effects as the first embodiment are achieved.
- a wiring board is obtained by the so-called imprint method using the mold 1 shown in FIG.
- a transfer insulating base material (resin film) 30 constituting the mold 1 and the wiring board is prepared, and the main surface of the mold 1 faces the main surface of the insulating base material 30. Let them be arranged.
- the material of the insulating substrate 30 is the same as that in the first embodiment.
- the mold 1 is moved along the arrow P1 shown in FIG. 32, and the mold is pushed as shown in FIG.
- the mold 1 and the insulating base material 30 are cooled to below the glass transition temperature (Tg), and the mold 1 is released in the direction (arrow P2) away from the insulating base material 30, as shown in FIG.
- the insulating base material 30 is a thermosetting resin
- the insulating base material 30 is completely cured by heating, for example, at 160 to 200 ° C. for 40 minutes to 80 minutes using an oven or the like.
- the insulating base material 30 is a thermoplastic resin, it is cooled and cured.
- the pattern of the plate surface 1a of the mold 1 (including the via pattern and the wiring pattern, the same applies hereinafter) can be transferred to the main surface of the insulating substrate 30.
- the mold 1 when the mold 1 is released, holes 31V and 32V and recesses 331 to 337 corresponding to the shapes of the protrusions 11 and 12 of the mold 1 are formed in the insulating base 30. .
- the holes 31V and 32V have inner walls 311Va and 321Va having curvatures around the openings 311V and 321V, and inclined walls 313Va and 323Va whose inner diameter gradually decreases toward the bottom surface.
- inner walls 311Va and 321Va having curvature are formed in the opening portions 311V and 321V, and the concave portions 331 to 337 of the insulating base material 30 are curved.
- the holes 31V and 32V have trunk portions 313V and 323V having inclined walls 313Va and 323Va whose outer diameters become narrower from the openings 311V and 321V toward the bottom portions 312V and 322V.
- the diameters of the openings 311V and 321V of the holes 31V and 32V of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312V and 322V of the holes 31V and 32V of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the holes 31V and 32V of the present embodiment have a diameter of about 10 ⁇ m and a depth of about 15 ⁇ m.
- Plating or conductive paste is printed and sintered, and the recesses 331 to 337 and the holes 31V and 32V are filled with a conductive material, whereby the first wiring patterns 51 to 57 and the via patterns 11V and 12V are formed as shown in FIG. Form. Moreover, when the excess part of nanopaste remains, it removes by grinding
- plating or conductive paste is printed / sintered on the other main surface (lower side in the drawing) of the insulating base material 30 to form second wiring patterns 61 and 62 that are electrically connected to the via patterns 11V and 12V. .
- FIG. 37 shows the wiring board 100 according to the present embodiment.
- the wiring board 100 of the present embodiment includes an insulating base material 30, first wiring patterns 51 to 57 formed on one main surface of the insulating base material 30, and the insulating base material 30.
- the first wiring patterns 51 to 57 and the second wiring patterns 61 and 62 penetrate from the first main surface side of the insulating base material 30 to the other main surface side. Via patterns 11V and 12V which are electrically connected to each other.
- the first wiring patterns 51 to 57 of the wiring board 100 of this embodiment are embedded on one main surface of the insulating base material 30 so as to protrude from the main surface of the insulating base material 30 toward the inside. It is formed in the state. As shown in FIG. 37, the upper side surfaces of the first wiring patterns 51 to 57 are the same height as the main surface of the insulating base material 30, and the main surface of the insulating base material 30 and the upper sides of the first wiring patterns 51 to 57 are shown. There is no difference in level with the plane. That is, although the first wiring patterns 51 to 57 are formed, the main surface of the insulating base material 30 can be flattened.
- the via patterns 11V and 12V of the present embodiment are connected to the first wiring patterns 52 and 56 with a curvature and connected to the connecting base portions 111V and 121V, and from the connecting base portions 111V and 121V to the via patterns 11V and 12V.
- cone-shaped portions 113V and 123V whose outer diameters become narrower as they approach the head top portions 112V and 122V.
- the via patterns 11V and 12V of this embodiment have curved surfaces 111Va and 121Va having curvatures with the first wiring patterns 52 and 56, and the via patterns 11V and 12V and the first wiring patterns 52 and 56. Is smoothly connected via the curved surfaces 111Va and 121Va and is integrally formed, and thus has the same function as the wiring board of the first embodiment and has the same effect.
- the first wiring patterns 51 to 57 and the via patterns 11V and 12V are collectively formed using the two-stage mold 1. Therefore, it is possible to obtain a highly accurate wiring board 100 with a small manufacturing error in the pitch and positional relationship between the first wiring patterns 51 to 57 and the via patterns 11V and 12V.
- the first wiring patterns 51 to 57 and the via patterns 11V and 12V can be collectively formed by using the two-stage mold 1. Therefore, the via pattern 11V can be formed by a single plating process. , 12V and the first wiring patterns 51 to 57 can be manufactured together. Therefore, as compared with the case where the via pattern and the wiring pattern are formed by repeating the steps of photolithography, plating, and polishing, a polishing step between the steps is not necessary, and the process becomes simple.
- the via patterns 11V and 12V are left using the chemical solution from the lower surface of the insulating substrate 30 as shown in FIG. A part of the insulating base material 30 is selectively removed as it is.
- the tips of the via patterns 11 ⁇ / b> V and 12 ⁇ / b> V are projected from the lower surface (lower side in the drawing) of the insulating base material 30.
- second wiring patterns 61 and 62 are formed by printing or sintering a plating or conductive paste. As a result, the contact area between the via patterns 11V and 12V and the second wiring patterns 61 and 62 increases, and the connection reliability can be improved.
- FIG. 34 after the mold 1 is released from the insulating base material 30, the lower surface of the insulating base material 30 is chemically or mechanically polished, or the upper surface or the lower surface of the insulating base material 30. Then, the remaining portions of the bottom portions 312V and 322V are removed by plasma, chemical solution, sandblasting, or the like as shown in FIG. 40, and the holes 31V and 32V are penetrated. Thereafter, plating or conductive paste is printed and sintered, and the holes 31V and 32V are filled with a conductive material, thereby forming first wiring patterns 51 to 57 and via patterns 11V and 12V as shown in FIG.
- the tips of the via patterns 11 ⁇ / b> V and 12 ⁇ / b> V are exposed and protrude from the other main surface (lower side surface) of the insulating base material 30.
- the second wiring patterns 61 and 62 are formed by printing or sintering a plating or conductive paste.
- the contact area between the via patterns 11V and 12V and the second wiring patterns 61 and 62 is increased, and the connection reliability can be improved.
- FIG. 32 and FIG. 33 are substantially the same, and redundant description is omitted.
- 34 after the mold 1 is released from the insulating substrate 30, chemical or mechanical polishing is performed from the lower surface of the insulating substrate 30, or the upper surface or lower surface of the insulating substrate 30. Then, the holes 31V and 32V are penetrated by plasma, chemical solution, sandblasting or the like as shown in FIG. Thereafter, a support substrate (not shown) is disposed on the lower surface of the insulating base material 30, and the holes 31V and 32V are temporarily closed, and plating or conductive paste is printed and sintered, so that a conductive material is formed in the holes 31V and 32V. As shown in FIG. 43, first wiring patterns 51 to 57 and via patterns 11V and 12V are formed.
- the lower surface of the insulating base 30 and the top portions 112V and 122V of the via patterns 11V and 12V have the same height (so-called flush).
- plating or conductive paste is printed and sintered to form second wiring patterns 61 and 62 as shown in FIG.
- modified examples 1 to 3 have features common to the third embodiment, and exhibit common functions and effects.
- the above-described wiring board 100 shown in FIG. 37 is prepared, and the insulating base used in the wiring board 100 is formed on the uppermost surface (exposed surface) of the wiring board 100.
- Insulating base material 30a other than material 30 is laminated (first laminating step).
- the same material as the insulating base material 30 of the wiring board 100 can be used for the insulating base material 30a.
- the mold 1 is prepared. Since the structure of the mold 1 is the same as that of the mold 1 shown in FIG. 31 described in the third embodiment, the description thereof is omitted here. As shown in FIG. 44, the mold 1 is arranged in parallel with the insulating base material 30 a laminated on the uppermost surface side of the wiring board 100. The top portions 112 and 122 of the projections 11 and 12 formed on the plate surface 1a of the mold 1 are opposed to the insulating base material 30a.
- the insulating substrate 30a is heated until the glass transition temperature or higher, and as shown in FIG. 45, the mold 1 is moved in the direction of the insulating substrate 30a, and the protrusions 11 and 12 are insulated. Press-fit into the substrate 30a.
- the mold 1 is released from the insulating substrate 30a.
- the bases 111 and 112 of the protrusions 11 and 12 have a curvature, they are easier to release than when the protrusions 11 and 12 are connected to the plate surface 1a at an angle.
- the insulating substrate 30a is a thermosetting resin, it is cured by heating with an oven or the like.
- the insulating substrate 30a is a thermoplastic resin, it is cooled and cured.
- the step of curing the insulating base material 30a is not limited to after the mold release, but may be after the mold 1 shown in FIG. 45 is press-fitted, and the holes 31Va and 32Va as shown in FIG. 47 described later. It may be after having penetrated.
- the insulating base material 30a after the mold release has holes 31Va and 32Va corresponding to the shapes of the protrusions 11 and 12 of the mold 1 and recesses 331a to 337a corresponding to the first wiring pattern. Is formed (second lamination step).
- a laminated wiring board 1000 having interlayer conduction shown in FIG. 48 can be obtained by the first to third lamination steps described above. The above-described first to third stacking steps can be repeated a number of times corresponding to the target number of stacks.
- the via patterns 11V and 12V have a curvature with the first wiring patterns 51 to 57 (51a to 57a), as in the above-described embodiment. Since the outer diameter becomes narrower as it approaches the top of the via from the connection portion with the first wiring patterns 51 to 57 (51a to 57a), the same effect as in the above-described embodiment can be obtained. There is an effect.
- the via patterns 11V and 12V are interfaced with the first wiring patterns 51 to 57 (51a to 57a) as in the above-described embodiment. Since they are integrally formed without any problem, the same effects as those of the above-described embodiment can be obtained, and the same effects can be obtained.
- FIG. 48 shows a laminated wiring board 1000 having wiring boards 100 and 100a.
- another wiring board 100 may be further laminated on the upper surface of the wiring board 100a (the surface opposite to the wiring board 100). It can.
- the first wiring patterns 51 to 57 of each wiring board to be laminated may be in a common mode or in different modes.
- a wiring board manufacturing method and a wiring board 100 manufactured by this manufacturing method according to the fifth embodiment will be described below with reference to FIGS.
- the method for manufacturing the wiring board of the present embodiment and the configuration of the wiring board 100 manufactured by this manufacturing method are basically the same as the configuration of the wiring board 100 of the first embodiment.
- the description of the embodiment will be cited, and different parts will be mainly described.
- the method for manufacturing a wiring board in the present embodiment is roughly divided into two steps: a step of preparing a mold to be used and a step of manufacturing a wiring board using the prepared die.
- a method for manufacturing a mold and a manufactured mold will be described, and a method for manufacturing a wiring board using the mold and the manufactured wiring board will be described.
- two molds are prepared: a via mold 1 and a wiring pattern mold 1C.
- the manufacturing method of the via mold 1 is the same as that of the mold 1 of the first embodiment, and a laser is applied to the main surface of the resin plate according to the step of preparing the cured resin plate and the via pattern. Or it has the process of irradiating an electron beam and forming a hole, and the process of filling the hole formed in the resin plate body using metal mold
- holes 31 and 32 are formed by irradiating the main surface of the resin plate 3 with a laser or an electron beam (EB) by the same method as in the first embodiment.
- Inner side walls 311 a and 321 a of the openings 311 and 321 of the holes 31 and 32 of the resin plate body 3 of the present embodiment are formed so as to be continuous with a curved surface having a curvature on the main surface of the resin plate body 3.
- the holes 31 and 32 have inclined walls 313 a and 323 a that are continuous with the openings 311 and 321 and have an inclination in the depth direction, and are connected at the bottoms 312 and 322.
- the diameters of the openings 311 and 321 of the holes 31 and 32 of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312 and 322 of the holes 31 and 32 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the diameters of the openings 311 and 321 of the holes 31 and 32 of this embodiment are about 10 ⁇ m and the depth is about 15 ⁇ m.
- a conductive layer to be a seed layer is formed in a plating process or the like performed later by the same method as in the first embodiment.
- holes 31 and 32 formed in the resin plate 3 are filled using a mold material and the main surface of the resin plate 3 is covered.
- the mold material is filled in the holes 31 and 32 formed in the resin plate 3 by plating, and the main surface of the resin plate 3 is covered.
- the plating method and the like are the same as those in the first embodiment.
- the support plate 2 is removed with an etching solution such as ferric chloride.
- the resin plate 3 is swelled and peeled off with an aqueous sodium hydroxide solution to obtain a mold.
- the height of the projecting portions 11 and 12 in the mold clamping direction is configured to be thicker than the insulating base material 30. This is because the mold 1 comes into contact with the insulating base material 30 when the protrusions 11 and 12 are press-fitted into the insulating base material 30, and will be described later, recessed portions 331 to 337 previously formed on the insulating base material 30. Can be prevented from losing its shape.
- the plate surface 1a of the mold 1 has at least protrusions 11 and 12 formed in a convex shape on the main surface side of the plate surface 1a. There is no interface between the plate surface 1a and the projections 11 and 12, and the projections 11 and 12 constitute a part of the plate surface 1a.
- the protrusions 11 and 12 of the present embodiment are formed in a shape having a thickness (diameter), a length, and an aspect ratio corresponding to the via pattern hole to be formed.
- the diameters of the bases 111 and 121 of the protrusions 11 and 12 are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m.
- the diameters of the top portions 112 and 122 of the protrusions 11 and 12 of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the lengths of the protrusions 11 and 12 of the present embodiment are 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the aspect ratio is 0.5 to 40, preferably 1 to 30, and can be about 1 to 4 in this example.
- the protrusions 11 and 12 in the present embodiment taper from the bases 111 and 121 having the curved surfaces 111a and 121a and from the bases 111 and 121 to the tops 112 and 122 of the protrusions 11 and 12, respectively. And inclined portions 113 and 123.
- the wiring mold 1C includes a printing plate 1a including a convex portion formed according to a wiring pattern that constitutes a part of the pattern.
- the plate surface 1a of the mold 1C includes a convex portion corresponding to the wiring pattern.
- the mold 1C can form a wiring pattern with a line width of about several nm to several ⁇ m in an insulating resin.
- the mold 1C can be manufactured by various methods. For example, the mold 1C can be manufactured by using a photolithography technique.
- a photoresist is applied to a glass substrate, the resist is patterned using a photolithography technique, a metal coat is applied to the surface of the patterned resist by sputtering or electroless plating, and nickel (Ni ) Or copper (Cu), a glass substrate is peeled from the metal layer, and a resist remaining on the metal layer is removed.
- a metal mold die 1C, a commercially available nanoimprint mold etc. can be used.
- a wiring board is obtained by a so-called imprint method using the via mold 1 and the wiring mold 1C shown in FIG.
- a wiring mold 1C is disposed so as to face the main surface of the insulating substrate 30. Convex portions 21 to 27 corresponding to the wiring pattern are formed on the plate surface 1a of the wiring mold 1C.
- the material of the insulating substrate 30 is the same as that in the first embodiment.
- the mold 1C is brought close to the insulating base material 30 (moved along the arrow P1) under the same conditions as in the first embodiment, and the mold is pressed.
- the convex portions 21 to 27 are press-fitted by a hot press of 130 to 170 ° C. and 0.8 to 1.2 MPa.
- the mold 1C and the insulating base material 30 are cooled to below the glass transition temperature (Tg), and the mold 1C is released in the direction separating from the insulating base material 30 (arrow P2) as shown in FIG.
- ABSOR Ajinomoto Build-Up Film
- recesses 331 to 337 corresponding to the wiring pattern are formed on the main surface of the insulating substrate 30.
- the via mold 1 is so arranged that the projections 11 and 12 of the mold 1 abut against the recesses 331 to 337 formed on one main surface of the insulating substrate 30.
- the insulating substrate 30 is disposed so as to face the main surface.
- die 1 is made to approach the insulating base material 30 on the same conditions as 1st Embodiment (it is moved along the arrow P1), and a mold is pushed.
- the protrusions 11 and 12 are press-fitted by a hot press of 130 to 170 ° C. and 0.8 to 1.2 MPa.
- the mold 1 and the insulating base material 30 are cooled to below the glass transition temperature (Tg), and the mold 1 is released in a direction (arrow P2) away from the insulating base material 30, as shown in FIG.
- Tg glass transition temperature
- P2 glass transition temperature
- the insulating base material 30 is a thermosetting resin
- the insulating base material 30 is completely cured by heating, for example, at 160 to 200 ° C. for 40 minutes to 80 minutes using an oven or the like.
- the insulating base material 30 is a thermoplastic resin, it is cooled and cured.
- the mold 1 and the insulating base material 30 do not come into contact with each other by making the height in the mold clamping direction (vertical direction in the drawing) of the protrusions 11 and 12 higher than the thickness of the insulating base material 30. Therefore, it is possible to prevent the concave portions 331 to 337 of the insulating base material 30 from being deformed.
- the shape according to the via pattern of the plate surface 1a of the mold 1 and the shape according to the wiring pattern of the plate surface 1a of the mold 1C can be transferred to the main surface of the insulating substrate 30.
- concave portions 331 to 337 corresponding to the convex portions 21 to 27 of the mold 1C are formed in the insulating substrate 30, and the protrusions of the mold 1 are formed. Holes 31V and 32V corresponding to the shapes of 11 and 12 are formed.
- the holes 31V and 32V include inner walls 311Va and 321Va having curvatures around the openings 311V and 321V, and inclined walls 313Va and 323Va whose inner diameter gradually decreases toward the bottom surface.
- the holes 31V and 32V formed in the insulating base material 30 have inner walls 311Va and 321Va having curvatures formed in the openings 311V and 321V, as shown in FIG.
- the recesses 331 to 337 are continuous with curvature.
- the holes 31V and 32V have trunk portions 313V and 323V having inclined walls 313Va and 323Va that have outer diameters that become narrower from the openings 311V and 321V toward the bottom portions 312V and 322V.
- the diameters of the openings 311V and 321V of the holes 31V and 32V of the present embodiment are 2 ⁇ m or more and 35 ⁇ m or less, preferably 2 ⁇ m or more and 15 ⁇ m or less, more preferably 2 ⁇ m or more and less than 10 ⁇ m. .
- the diameters of the bottom portions 312V and 322V of the holes 31V and 32V of the present embodiment are 1 ⁇ m or more and 30 ⁇ m or less, preferably 1 ⁇ m or more and 10 ⁇ m or less, more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- the depth is 1 ⁇ m or more and 50 ⁇ m or less, preferably 10 ⁇ m or more and 40 ⁇ m or less.
- the holes 31V and 32V of the present embodiment have a diameter of about 10 ⁇ m and a depth of about 15 ⁇ m.
- a resist is applied to the lower surface of the insulating substrate 30 shown in FIG. 60, and after patterning the resist using a photolithography technique, plating is performed to fill the holes 31V and 32V and the recesses 331 to 337 with a conductive material.
- the via patterns 11V and 12V, the first wiring patterns 51 to 57, and the second wiring patterns 61 and 62 can be simultaneously formed.
- the via patterns 11V and 12V, the first wiring patterns 51 to 57, and the second wiring patterns 61 and 62 can be simultaneously formed by printing and sintering a conductive paste on the upper surface of the insulating substrate 30. .
- the excess part of nanopaste remains, it removes by grinding
- FIG. 61 shows the wiring board 100 according to the present embodiment.
- the wiring board 100 of the present embodiment includes an insulating substrate 30, first wiring patterns 51 to 57 formed on one main surface of the insulating substrate 30, and the insulating substrate 30.
- the first wiring patterns 51 to 57 and the second wiring patterns 61 and 62 penetrate from the first main surface side of the insulating base material 30 to the other main surface side. Via patterns 11V and 12V which are electrically connected to each other.
- the first wiring patterns 51 to 57 of the wiring board 100 of the present embodiment are embedded in a convex shape from one main surface (upper side in the figure) of the insulating base material 30 toward the inner side of the insulating base material 30. It is formed in a state. Therefore, the upper surfaces of the first wiring patterns 51 to 57 are the same height as the main surface of the insulating substrate 30, and the insulating substrates are formed even though the first wiring patterns 51 to 57 are formed. 30 main surfaces can be made flat. Therefore, other parts can be mounted and other wiring boards 100 can be stacked on the insulating base material 30 in which the first wiring patterns 51 to 57 are embedded without being restricted by the arrangement position. . Further, even if a plurality of wiring boards 100 are laminated, a laminated wiring board having a flat entire surface can be produced.
- the via patterns 11V and 12V of the present embodiment are connected to the connecting base portions 111V and 121V connected to the first wiring patterns 52 and 56 at the connecting curved surfaces 111Va and 121Va and the connecting base portions 111V and 121V as shown in FIG. And conical portions 113V and 123V whose outer diameters become narrower as they approach the tips of the patterns 11V and 12V.
- the via patterns 11V and 12V of this embodiment have curved surfaces 111Va and 121Va having curvatures with the first wiring patterns 52 and 56, and the via patterns 11V and 12V and the first wiring patterns 52 and 56. Is smoothly connected via the curved surfaces 111Va and 121Va and is integrally formed, and thus has the same function as the wiring board of the above-described embodiment and has the same effect.
- the wiring board 100 of the fifth embodiment described above is prepared, and the insulating surface used in the wiring board 100 is provided on the uppermost surface (exposed surface) of the wiring board 100.
- Insulating base material 30a other than base material 30 is laminated (first laminating step).
- the same material as the insulating base material 30 of the wiring board 100 can be used for the insulating base material 30a.
- a mold 1C is prepared.
- the structure of the mold 1C is common to the mold 1C described in the fifth embodiment. As shown in the figure, the mold 1C is arranged in parallel to the insulating base material 30a laminated on the uppermost layer side of the wiring board 100. The convex portions 21 to 27 formed on the plate surface 1a of the mold 1C face the insulating substrate 30a.
- the insulating base material 30a is heated to the glass transition temperature or higher, and as shown in FIG. 63, the mold 1C is moved in the direction of the insulating base material 30a, and the protrusions 21 to 27 are insulative. Press-fit into the substrate 30a.
- the mold 1C is released from the insulating base material 30a, and the concave portions 331a to 337a having shapes corresponding to the convex portions 21 to 27 of the mold 1C are formed as the insulating base material. 30 (second laminating step).
- the mold 1 is prepared. Since the structure of the mold 1 is the same as that of the mold 1 described in the fifth embodiment, the description thereof is omitted here. As shown in FIG. 65, the mold 1 is arranged in parallel to the insulating base material 30a laminated on the uppermost surface side of the wiring board 100. Concave portions 331a to 337a are formed in the insulating base material 30a. The top portions 112 and 122 of the protrusions 11 and 12 formed on the plate surface 1a of the mold 1 are opposed to the recesses 332a and 336a of the insulating base material 30a.
- the insulating base material 30a is heated until the glass transition temperature or higher, and as shown in FIG. 66, the mold 1 is moved in the direction of the insulating base material 30a, and the protrusions 11 and 12 are insulative. Press-fit into the substrate 30a.
- the mold 1 is released from the insulating base material 30a.
- the bases 111 and 112 of the protrusions 11 and 12 have a curvature, they are easier to release than when the protrusions 11 and 12 are connected to the mold 1 at an angle.
- the insulating substrate 30a is a thermosetting resin, it is cured by heating with an oven or the like.
- the insulating substrate 30a is a thermoplastic resin, it is cooled and cured.
- the insulating base material 30a after the mold 1 is released has holes 31Va and 32Va corresponding to the shapes of the protrusions 11 and 12 of the mold 1 and the first wiring pattern.
- Recesses 331a to 337a are formed (third lamination step).
- the first wiring pattern and the via pattern are formed by printing / sintering the wiring board 100 of FIG. 68 or printing / sintering and filling the recesses 331a to 337a and the holes 31Va and 32Va with the conductive material. (Fourth stacking step). Moreover, when the excess part of nanopaste remains, it removes by grinding
- the multilayer wiring board 1000 having interlayer conduction with the wiring board 100 can be obtained by the first to fourth lamination processes described above.
- FIG. 69 shows an example of a laminated wiring board 1000 in which the wiring boards 100a, 100c, and 100d are laminated on the wiring board 100 by repeating the first to fourth lamination processes three times. The first to fourth lamination steps described above can be repeated as many times as the number of laminations of the target wiring board 1000.
- the via patterns 11V, 12V are provided in the first wiring patterns 51 to 57 (51a to 57a, 51c to 57c, 51d to 57d) with a curvature, and from the connection portion with the first wiring patterns 51 to 57 (51a to 57a, 51c to 57c, 51d to 57d), approaching the top of the via. Since it has a shape in which the outer diameter is reduced, the same effect as the above-described embodiment is achieved, and the same effect is achieved.
- the via patterns 11V and 12V are provided in the first wiring patterns 51 to 57, as in the above-described embodiment. Since (51a to 57a, 51c to 57c, 51d to 57d) are integrally formed with no interface, the same operation as the above-described embodiment is achieved and the same effect is achieved.
- the number of laminated wiring boards 100 is not limited. Further, the first wiring patterns 51 to 57 (51a to 57a, 51c to 57c, 51d to 57d) of the respective wiring boards to be laminated may be in a common mode or in different modes.
- the method for manufacturing a wiring board in the present embodiment is roughly divided into two steps: a step of preparing a mold to be used and a step of manufacturing a wiring board using the prepared die.
- a method for manufacturing a mold and a manufactured mold will be described, and a method for manufacturing a wiring board using the mold and the manufactured wiring board will be described.
- two molds are prepared: a via mold 1 and a wiring pattern mold 1C.
- the manufacturing method of the via mold 1 is the same as that of the mold 1 of the first embodiment, and a laser is applied to the main surface of the resin plate according to the step of preparing the cured resin plate and the via pattern. Or it has the process of irradiating an electron beam and forming a hole, and the process of filling the hole formed in the resin plate body using metal mold
- the manufacturing method of the via mold 1 is the same as that of the fifth embodiment.
- holes 31 and 32 are formed by irradiating the main surface of the resin plate 3 with a laser or an electron beam (EB) by the same method as in the first embodiment.
- Inner side walls 311 a and 321 a of the openings 311 and 321 of the holes 31 and 32 of the resin plate body 3 of the present embodiment are formed so as to be continuous with a curved surface having a curvature on the main surface of the resin plate body 3.
- the holes 31 and 32 have inclined walls 313 a and 323 a that are continuous with the openings 311 and 321 and have an inclination in the depth direction, and are connected at the bottoms 312 and 322.
- the diameter, depth, and aspect ratio of the holes 31 and 32 are the same as those in the fifth embodiment.
- a conductive layer to be a seed layer is formed in a plating process or the like performed later by the same method as in the first embodiment.
- holes 31 and 32 formed in the resin plate 3 are filled using a mold material and the main surface of the resin plate 3 is covered.
- the holes 31 and 32 formed in the resin plate 3 are filled with a mold material by plating, and the main surface of the resin plate 3 is covered.
- the plating method and the like are the same as those in the first embodiment.
- the support plate 2 is removed with an etchant such as ferric chloride.
- the resin plate 3 is swollen and peeled off with an aqueous sodium hydroxide solution to obtain a mold 1 shown in FIG.
- the height of the projecting portions 11 and 12 in the mold clamping direction (vertical direction in the drawing) is configured to be thicker than the thickness of the insulating base material 30. This is because the mold 1 comes into contact with the insulating base material 30 when the protrusions 11 and 12 are press-fitted into the insulating base material 30, and the recesses 331 to 337 formed in the insulating base material 30 are described later. Loss of shape can be prevented.
- FIG. 74 is a cross-sectional view of the mold 1 of the present embodiment along the mold clamping direction (arrow M in the figure).
- the plate surface 1a of the mold 1 has at least protrusions 11 and 12 formed in a convex shape on the main surface side of the plate surface 1a. There is no interface between the plate surface 1a and the projections 11 and 12, and the projections 11 and 12 constitute a part of the plate surface 1a.
- the thickness (diameter), length, and aspect ratio of the protrusions 11 and 12 are the same as those in the fifth embodiment.
- the protrusions 11 and 12 in the present embodiment include bases 111 and 121 having curved surfaces 111a and 121a, and inclined parts 113 and 123 that taper from the bases 111 and 121 to the tops 112 and 122 of the protrusions 11 and 12, Have
- the other mold 1C for wiring is prepared.
- the wiring mold 1C is the same as that of the fifth embodiment.
- a wiring board is obtained by a so-called imprint method using the via mold 1 and the wiring mold 1C shown in FIG.
- the wiring mold 1C is disposed so as to face the main surface of the insulating substrate 30.
- die 1C is made to approach the insulating base material 30 on the same conditions as 5th Embodiment (it is moved along the arrow P1), and a hot press process is performed.
- the mold 1C and the insulating base material 30 are cooled to below the glass transition temperature (Tg), and the mold 1C is released in the direction separating from the insulating base material 30 (arrow P2) as shown in FIG. Thereby, concave portions 331 to 337 corresponding to the wiring pattern are formed on the main surface of the insulating base material 30.
- the via mold 1 is disposed so as to face the main surface of the insulating substrate 30 in which the concave portions 331 to 337 are formed.
- the via mold 1 is arranged so that the protrusions 11 and 12 of the mold 1 abut against the recesses 331 to 337 formed on one main surface of the insulating base 30.
- die 1 is made to approach the insulating base material 30 on the same conditions as 5th Embodiment (it moves along the arrow P1), and a hot press process is performed.
- the mold 1 and the insulating base material 30 are cooled to below the glass transition temperature (Tg), and the mold 1 is released in a direction (arrow P2) away from the insulating base material 30, as shown in FIG.
- the mold 1 and the insulating base material 30 do not come into contact with each other by making the height in the mold clamping direction (vertical direction in the drawing) of the protrusions 11 and 12 higher than the thickness of the insulating base material 30. Therefore, it is possible to prevent the concave portions 331 to 337 of the insulating base material 30 from being deformed.
- the shape according to the via pattern of the plate surface 1a of the mold 1 and the shape according to the wiring pattern of the plate surface 1a of the mold 1C can be transferred to the main surface of the insulating substrate 30.
- concave portions 331 to 337 corresponding to the convex portions 21 to 27 of the mold 1C are formed in the insulating substrate 30, and the protrusions of the mold 1 are formed. Holes 31V and 32V corresponding to the shapes of 11 and 12 are formed.
- a resist is applied to the lower surface of the insulating base material 30 shown in FIG. 81, and the resist is patterned using a photolithography technique, followed by plating, thereby filling the holes 31V and 32V with a conductive material.
- the via patterns 11V and 12V, the first wiring patterns 51 to 57, and the second wiring patterns 61 and 62 can be simultaneously formed.
- the via patterns 11V and 12V, the first wiring patterns 51 to 57, and the second wiring patterns 61 and 62 can be simultaneously formed by printing and sintering a conductive paste on the upper surface of the insulating substrate 30. .
- the excess part of nanopaste remains, it removes by grinding
- FIG. 82 shows the wiring board 100 according to the present embodiment.
- the wiring board 100 of the present embodiment includes an insulating base material 30, first wiring patterns 51 to 57 formed on one main surface of the insulating base material 30, and the insulating base material 30.
- the first wiring patterns 51 to 57 and the second wiring patterns 61 and 62 penetrate from the first main surface side of the insulating base material 30 to the other main surface side. Via patterns 11V and 12V which are electrically connected to each other.
- the first wiring patterns 51 to 57 of the wiring board 100 of the present embodiment are embedded in a convex shape from one main surface (upper side in the drawing) of the insulating base material 30 toward the inner side of the insulating base material 30. It is formed in the state.
- the wiring board 100 of this embodiment has the same operations and effects as the wiring board of the fifth embodiment.
- the eighth embodiment will be described below.
- a method for manufacturing a multilayer wiring board using the wiring board 100 according to the seventh embodiment and a multilayer wiring board obtained by this manufacturing method will be described.
- the detailed description of the common items uses the description of the above-described embodiment.
- the wiring board 100 of 7th Embodiment is prepared, and the insulating base material used by this wiring board 100 is provided on the uppermost surface (exposed surface) of the wiring board 100.
- Insulating base materials 30a other than 30 are laminated (first laminating step).
- the same material as the insulating base material 30 of the wiring board 100 can be used for the insulating base material 30a.
- a mold 1C is prepared.
- the mold 1C is common to the mold 1C described in the fifth embodiment. As shown in the figure, the mold 1C is arranged in parallel to the insulating base material 30a laminated on the uppermost layer side of the wiring board 100. The convex portions 21 to 27 formed on the plate surface 1a of the mold 1C face the insulating substrate 30a.
- Insulating base material 30a is heated until the glass transition temperature or higher, and mold 1C is moved in the direction of insulating base material 30a as shown in FIG. Press-fit into the substrate 30a.
- the mold 1C is released from the insulating base material 30a, and the concave portions 331a to 337a having shapes corresponding to the convex portions 21 to 27 of the mold 1C are formed as the insulating base material. 30a (second lamination step).
- the mold 1 is prepared.
- the structure of the mold 1 is common to the mold 1 described in the seventh embodiment.
- the mold 1 is arranged in parallel with the insulating base material 30 a laminated on the uppermost surface side of the wiring board 100.
- Concave portions 331a to 337a are formed in the insulating base material 30a.
- the top portions 112 and 122 of the protrusions 11 and 12 formed on the plate surface 1a of the mold 1 are opposed to abut against the recesses 332a and 336a of the insulating base material 30a.
- the insulating base material 30a is heated until the glass transition temperature or higher, and the mold 1 is moved in the direction of the insulating base material 30a as shown in FIG. 87, and the protrusions 11 and 12 are insulative. Press-fit into the substrate 30a.
- the mold 1 is released from the insulating base material 30a.
- the insulating base material 30a after releasing the mold 1 has holes 31Va and 32Va corresponding to the shapes of the protrusions 11 and 12 of the mold 1 and the first wiring pattern.
- Recesses 331a to 337a are formed (third lamination step).
- the first wiring pattern and the via pattern are formed by printing / sintering plating or conductive paste on the wiring board 100 of FIG. 89 and filling the recesses 331a to 337a and the holes 31Va and 32Va with a conductive material. (Fourth stacking step).
- the multilayer wiring board 1000 having interlayer conduction with the wiring board 100 can be obtained by the first to fourth lamination processes described above.
- FIG. 90 is a diagram illustrating an example of a laminated wiring board 1000 in which the wiring boards 100a, 100c, and 100d are laminated on the wiring board 100 by repeating the first to fourth lamination processes three times. The first to fourth lamination steps described above can be repeated as many times as the number of laminations of the target wiring board 1000.
- the multilayer wiring board 1000 has via patterns 11V, 12V (11Va, 11Vc, 11Vd, 12Va, 12Vc, 12Vd) and first wiring patterns 51 to 57 (51a).
- via patterns 11V, 12V 11Va, 11Vc, 11Vd, 12Va, 12Vc, 12Vd
- first wiring patterns 51 to 57 51a.
- To 57a, 51c to 57c, and 51d to 57d) are integrally formed with no interface, and thus the same operation as the above-described embodiment is achieved and the same effect is obtained.
- the multilayer type wiring board 1000 having the wiring boards 100, 100a, 100c, and 100d is shown in FIG. 90, the number of laminated wiring boards 100 is not limited.
- the first wiring patterns 51 to 57 (51a to 57a, 51c to 57c, 51d to 57d) of the respective wiring boards to be laminated may be in a common mode or in different modes.
- Wiring board 1000 Laminated type wiring board 1, 1A, 1B, 1C ... Mold 1a ... Plate surface 11, 12 ... Projection part 111, 121 ... Base part 111a, 121a ... Curved surface 112, 122 ... Top part 113, 123 ... Inclination Portions 21 to 27: Protruding portion 2 ... Support plate 3 ... Resin plate bodies 31, 32 ... Holes 311, 321 ... Openings 312, 322 ... Bottom portions 313, 323 ... Body portions 313a, 323a ... Inclined walls 4 ... Resist layer 41- 47 ... Groove 11V, 12V, 11Va-11Vd, 12Va-12Vd, ...
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
以下、本発明の本実施形態に係る配線板及びこの配線板の製造方法について説明する。本実施形態における配線板の製造方法は、大きく分けて、使用する金型を準備する工程と、準備した金型を用いて配線板を作製する工程の2つの工程を有する。
以下、第2実施形態について説明する。第2実施形態は、第1実施形態に係る配線板100を用いて積層型の配線板を製造する方法と、この製造方法により得られた積層型の配線板について説明する。共通する事項についての詳細な説明は上述した第1実施形態に係る説明を援用する。
以下、図25~図37に基づいて第3実施形態の配線板の製造方法及びこの製造方法により製造される配線板100について説明する。本実施形態の配線板の製造方法及びこの製造方法により製造される配線板100の構成は、第1実施形態の配線板100の構成と基本的に共通するため、重複する説明を避け、第1実施形態の説明を援用し、異なる部分を中心に説明する。
以下、第4実施形態について説明する。第4実施形態は、第3実施形態に係る配線板100を用いて積層型の配線板を製造する方法と、この製造方法により得られた積層型の配線板について説明する。共通する事項についての詳細な説明は上述した実施形態に係る説明を援用する。
(7)上述の第1積層工程から第3積層工程により、図48に示す、層間導通がされた積層型の配線板1000を得ることができる。上述した第1積層工程から第3積層工程は、目的とする積層数に応じた回数だけ繰り返すことができる。
以下、図49~図61に基づいて第5実施形態の配線板の製造方法及びこの製造方法により製造される配線板100について説明する。本実施形態の配線板の製造方法及びこの製造方法により製造される配線板100の構成は、第1実施形態の配線板100の構成と基本的に共通するため、重複する説明を避け、第1実施形態の説明を援用し、異なる部分を中心に説明する。
以下、第6実施形態について説明する。第6実施形態は、第5実施形態に係る配線板100を用いて積層型の配線板を製造する方法と、この製造方法により得られた積層型の配線板について説明する。共通する事項についての詳細な説明は上述の実施形態に係る説明を援用する。
(4)続いて、図64に示すように、金型1Cを絶縁性基材30aから離型し、金型1Cの凸部21~27に応じた形状の凹部331a~337aを絶縁性基材30に形成する(第2積層工程)。
(8)上述の第1積層工程から第4積層工程により、配線板100と層間導通がされた積層型の配線板1000を得ることができる。図69は、第1積層工程から第4積層工程を3回繰り返し、配線板100に、配線板100a,100c,100dを積層させた積層型の配線板1000の例を示す。上述した第1積層工程から第4積層工程は、目的とする配線板1000の積層数に応じた回数だけ繰り返すことができる。
以下、図70~図82に基づいて第7実施形態の配線板の製造方法及びこの製造方法により製造される配線板100について説明する。本実施形態の配線板の製造方法は、第5実施形態と基本的に共通するため、重複する説明を避け、第5実施形態の説明を援用する。
以下、第8実施形態について説明する。第8実施形態は、第7実施形態に係る配線板100を用いて積層型の配線板を製造する方法と、この製造方法により得られた積層型の配線板について説明する。共通する事項についての詳細な説明は上述の実施形態に係る説明を援用する。
(4)続いて、図85に示すように、金型1Cを絶縁性基材30aから離型し、金型1Cの凸部21~27に応じた形状の凹部331a~337aを絶縁性基材30aに形成する(第2積層工程)。
(8)上述の第1積層工程から第4積層工程により、配線板100と層間導通がされた積層型の配線板1000を得ることができる。図90は、第1積層工程から第4積層工程を3回繰り返し、配線板100に、配線板100a,100c,100dが積層された積層型の配線板1000の例を示す図である。上述した第1積層工程から第4積層工程は、目的とする配線板1000の積層数に応じた回数だけ繰り返すことができる。
1000…積層型の配線板
1,1A,1B,1C…金型
1a…版面
11,12…突起部
111,121…基部
111a,121a…曲面
112,122…頂部
113,123…傾斜部
21~27…凸部
2…支持板
3…樹脂板体
31,32…孔
311,321…開口部
312,322…底部
313,323…胴部
313a,323a…傾斜壁
4…レジスト層
41~47…溝
11V,12V,11Va~11Vd,12Va~12Vd,…ビアパターン
111V,121V…接続基部
111Va,121Va…接続曲面
112V,122V…頭頂部
113V,123V…錐状部
30,30a~30d…絶縁性基材
31V,32V、31Va,32Va,31Vb、32Vb…孔
311V,321V…開口部
311Va,321Va…内側壁
312V,322V,312Va,322Va,312Vb,322Vb…底部
313V,323V…胴部
313Va,323Va…傾斜壁
331~337,331a~337a…凹部
51~57,51a~57a,51b~57b…第1配線パターン
61~62…第2配線パターン
Claims (16)
- 配線板のパターンの一部を構成するビアパターンに応じて形成された突起部を含む版面を備え、前記突起部が前記版面の主面に曲率を有して連なる基部と、前記基部から前記突起部の頂部に近づくにつれて外径が細くなる傾斜部とを有する金型を準備する工程と、
軟化させた絶縁性基材の一方主面に前記金型の版面を押し当てた後に離型して、前記突起部の形状に応じた孔を前記絶縁性基材に形成する工程と、
絶縁性基材の一方主面に、前記パターンの一部を構成する配線パターンに応じた凹部を形成する工程と、
前記絶縁性基材に形成された前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する工程と、を有する配線板の製造方法。 - 請求項1の配線板の製造方法により得られた配線板を準備し、当該配線板の最上面及び/又は最下面に他の絶縁性基材を積層する第1積層工程と、
前記積層された絶縁性基材の表面に前記金型の版面を押し当てた後に離型して、前記突起部の形状に応じた孔を前記絶縁性基材に形成する第2積層工程と、
前記積層された絶縁性基材の主面に、前記パターンの一部を構成する配線パターンに応じた凹部を形成する第3積層工程と、
前記絶縁性基材に形成された前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する第4積層工程と、を有し、
前記配線板の積層数に応じて、前記第1積層工程乃至前記第4積層工程を一回又は二回以上行うことを特徴とする積層型の配線板の製造方法。 - 配線板のパターンの一部を構成するビアパターンに応じて形成された突起部と、前記パターンの一部を構成する配線パターンに応じて形成された凸部とを含む版面を備え、前記突起部が前記凸部の上面に曲率を有して連なる基部と、前記基部から前記突起部の頂部に近づくにつれて外径が細くなる傾斜部とを有する金型を準備する工程と、
前記金型の版面を軟化させた絶縁性基材の一方主面に押し当てた後に離型して、前記突起部の形状に応じた孔と前記凸部の形状に応じた凹部を前記絶縁性基材に形成する工程と、
前記絶縁性基材に形成された前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する工程と、を有する配線板の製造方法。 - 請求項3の配線板の製造方法により得られた配線板を準備し、当該配線板の最上面及び/又は最下面に他の絶縁性基材を積層する第1積層工程と、
前記積層された絶縁性基材の表面に前記金型の版面を押し当てた後に離型して、前記突起部の形状に応じた孔と前記凸部の形状に応じた凹部を前記絶縁性基材に形成する第2積層工程と、
前記絶縁性基材に形成された、前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する第3積層工程と、を有し、
前記配線板の積層数に応じて、前記第1積層工程乃至前記第3積層工程を一回又は二回以上行うことを特徴とする積層型の配線板の製造方法。 - 配線板のパターンの一部を構成するビアパターンに応じて形成された突起部を含む版面を備え、曲面を有する基部と、前記基部から前記突起部の頂部に近づくにつれて外径が細くなる傾斜部とを有するビア用の金型を準備する工程と、
前記パターンの一部を構成する配線パターンに応じて形成された凸部を含む版面を備える配線用の金型を準備する工程と、
前記配線用の金型の版面を軟化させた絶縁性基材の一方主面に押し当てた後に離型して、前記凸部に応じた形状の凹部を前記絶縁性基材に形成する工程と、
前記絶縁性基材の一方主面に形成された凹部に前記突起部が突き当たるように、前記絶縁性基材の一方主面に前記ビア用の金型の版面を押し当てた後に離型して、前記突起部の形状に応じた孔を前記絶縁性基材に形成する工程と、
前記絶縁性基材に形成された、前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する工程と、を有する配線板の製造方法。 - 請求項5の配線板の製造方法により得られた配線板を準備し、当該配線板の最上面及び/又は最下面に他の絶縁性基材を積層する第1積層工程と、
前記配線用の金型の版面を軟化させた前記絶縁性基材の表面に押し当てた後に離型して、前記凸部に応じた形状の凹部を前記絶縁性基材に形成する第2積層工程と、
前記絶縁性基材の表面に形成された凹部に前記突起部が突き当たるように、前記絶縁性基材の表面に前記ビア用の金型の版面を押し当てた後に離型して、前記突起部の形状に応じた孔を前記絶縁性基材に形成する第3積層工程と、
前記絶縁性基材に形成された、前記孔と前記凹部に導電材料を充填して互いに導通可能なビアパターン及び配線パターンを形成する第4積層工程と、を有し、
前記配線板の積層数に応じて、前記第1積層工程乃至前記第4積層工程を一回又は二回以上行うことを特徴とする積層型の配線板の製造方法。 - 請求項1~6の何れか一項に記載の配線板の製造方法において、
前記絶縁性基材の他方主面に、前記ビアパターンと導通する配線パターンに応じた下層凹部を形成する工程をさらに有し、
前記孔に導電材料を充填する工程において、前記絶縁性基材の他方主面に形成された前記下層凹部に導電材料を充填することを特徴とする配線板の製造方法。 - 請求項1~7の何れか一項に記載の配線板の製造方法において、
前記突起部の頂部は曲面を有することを特徴とする配線板の製造方法。 - 請求項1~8の何れか一項に記載の配線板の製造方法において、
前記絶縁性基材に孔を形成する工程の後に、
前記孔の底部の絶縁性基材を除去し、前記孔を貫通させる工程をさらに有することを特徴とする配線板の製造方法。 - 絶縁性基材と、
前記絶縁性基材の一方主面に形成された配線パターンと、
前記絶縁性基材の一方主面側から他方主面側に貫通し、前記配線パターンと導通するビアパターンと、を備え、
前記ビアパターンは、前記配線パターンと曲率を有して連なる接続基部と、前記接続基部からビアパターンの頭頂部に近づくにつれて外径が細くなる錐状部と、を有することを特徴とする配線板。 - 請求項10に記載の配線板であって、
前記配線パターンと前記ビアパターンとは、界面のない状態で一体に形成されていることを特徴とする配線板。 - 請求項10又は11に記載の配線板であって、
前記配線パターンは、前記絶縁性基材の主面に、当該主面の外部側に向かって凸状に形成されていることを特徴とする配線板。 - 請求項10又は11に記載の配線板であって、
前記配線パターンは、前記絶縁性基材の主面に、当該主面の内部側に向かって凸状に埋設された状態で形成されていることを特徴とする配線板。 - 請求項10~13の何れか一項に記載の配線板であって、
前記ビアパターンは、フィルドビアであることを特徴とする配線板。 - 請求項10~14の何れか一項に記載の配線板であって、
前記ビアパターンの接続基部の径は2μm以上、かつ35μm以下であることを特徴とする配線板。 - 請求項15の何れか一項に記載の配線板であって、
前記ビアパターンの頭頂部の径は1μm以上、かつ30μm以下であることを特徴とする配線板。
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US13/567,685 US20130025120A1 (en) | 2010-02-05 | 2012-08-06 | Wiring board and manufacturing method for same |
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US13/567,685 Continuation US20130025120A1 (en) | 2010-02-05 | 2012-08-06 | Wiring board and manufacturing method for same |
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WO2011096539A1 true WO2011096539A1 (ja) | 2011-08-11 |
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PCT/JP2011/052420 WO2011096539A1 (ja) | 2010-02-05 | 2011-02-04 | 配線板及びその製造方法 |
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JP (1) | JPWO2011096539A1 (ja) |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016092365A (ja) * | 2014-11-11 | 2016-05-23 | イビデン株式会社 | プリント配線板および半導体パッケージ |
JP2019046972A (ja) * | 2017-09-01 | 2019-03-22 | 株式会社フジクラ | プリント配線板及びその製造方法 |
WO2019216011A1 (ja) * | 2018-05-07 | 2019-11-14 | 住友電気工業株式会社 | プリント配線板及びプリント配線板の製造方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106034373B (zh) * | 2015-03-10 | 2018-09-25 | 上海量子绘景电子股份有限公司 | 高密度多层铜线路板及其制备方法 |
CN205793596U (zh) * | 2016-01-29 | 2016-12-07 | 奥特斯(中国)有限公司 | 元件载体和电子装置 |
CN107027238B (zh) | 2016-01-29 | 2020-08-18 | 奥特斯(中国)有限公司 | 包括铜填充多径激光钻孔的元件载体 |
TWI657721B (zh) * | 2018-04-02 | 2019-04-21 | 欣興電子股份有限公司 | 線路板、封裝結構及其製造方法 |
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2011
- 2011-02-04 CN CN2011800069868A patent/CN102726127A/zh active Pending
- 2011-02-04 WO PCT/JP2011/052420 patent/WO2011096539A1/ja active Application Filing
- 2011-02-04 JP JP2011552844A patent/JPWO2011096539A1/ja active Pending
- 2011-02-08 TW TW100104076A patent/TW201204214A/zh unknown
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2012
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JPS5790999A (en) * | 1980-11-26 | 1982-06-05 | Anritsu Electric Co Ltd | Method of producing metallic printed board |
JPH0317294A (ja) * | 1989-06-14 | 1991-01-25 | San Aroo Kk | 回路基板用樹脂成形金型を使用した基板の製造方法 |
JP2001244609A (ja) * | 2000-02-25 | 2001-09-07 | Sony Corp | 配線基板の製造方法及びそれにより得られた配線基板 |
JP2005203586A (ja) * | 2004-01-16 | 2005-07-28 | Shinko Electric Ind Co Ltd | 多層配線基板の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2016092365A (ja) * | 2014-11-11 | 2016-05-23 | イビデン株式会社 | プリント配線板および半導体パッケージ |
JP2019046972A (ja) * | 2017-09-01 | 2019-03-22 | 株式会社フジクラ | プリント配線板及びその製造方法 |
WO2019216011A1 (ja) * | 2018-05-07 | 2019-11-14 | 住友電気工業株式会社 | プリント配線板及びプリント配線板の製造方法 |
JP2019197750A (ja) * | 2018-05-07 | 2019-11-14 | 住友電気工業株式会社 | プリント配線板及びプリント配線板の製造方法 |
US10917967B2 (en) | 2018-05-07 | 2021-02-09 | Sumitomo Electric Industries, Ltd. | Printed wiring board and method for manufacturing printed wiring board |
JP7063095B2 (ja) | 2018-05-07 | 2022-05-09 | 住友電気工業株式会社 | プリント配線板及びプリント配線板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2011096539A1 (ja) | 2013-06-13 |
US20130025120A1 (en) | 2013-01-31 |
CN102726127A (zh) | 2012-10-10 |
TW201204214A (en) | 2012-01-16 |
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