WO2011083762A1 - 圧電発電素子および圧電発電素子を用いた発電方法 - Google Patents
圧電発電素子および圧電発電素子を用いた発電方法 Download PDFInfo
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- WO2011083762A1 WO2011083762A1 PCT/JP2011/000023 JP2011000023W WO2011083762A1 WO 2011083762 A1 WO2011083762 A1 WO 2011083762A1 JP 2011000023 W JP2011000023 W JP 2011000023W WO 2011083762 A1 WO2011083762 A1 WO 2011083762A1
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- vibrating beam
- power generation
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- 238000010248 power generation Methods 0.000 title claims abstract description 152
- 238000000034 method Methods 0.000 title claims description 22
- 230000005611 electricity Effects 0.000 abstract description 2
- 230000001133 acceleration Effects 0.000 description 8
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- 238000004519 manufacturing process Methods 0.000 description 8
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- 238000005452 bending Methods 0.000 description 5
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- 230000001154 acute effect Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
Definitions
- the present invention relates to a piezoelectric power generation element and a power generation method using the piezoelectric power generation element.
- Vibration vibration power generation is a power generation method in which mechanical energy contained in mechanical vibration is captured and converted into electrical energy.
- Vibration power generation uses, for example, electromagnetic induction, electrostatic induction, or a piezoelectric effect.
- vibration power generation (piezoelectric power generation) using the piezoelectric effect exhibits high power density. This is because the configuration of an element for piezoelectric power generation (piezoelectric power generation element) is simple and the element can be miniaturized.
- a piezoelectric power generation element (vibration power generation element) is an element that generates electric power by converting the energy of mechanical vibration applied to a piezoelectric layer into electrical energy by a piezoelectric effect.
- 11 and 12 show a conventional piezoelectric power generation element.
- the element shown in FIG. 11 includes a cantilevered (cantilever-like) vibrating beam 102.
- the vibrating beam 102 has a strip shape.
- One end (fixed end) 103 of the vibrating beam 102 is fixed to the frame 104.
- the other end 105 of the vibrating beam 102 is not fixed to the frame 104.
- the end portion 105 is a free end.
- the end portion 105 can vibrate in a direction perpendicular to the main surface of the vibrating beam 102.
- the power generation layer 101 is disposed on one surface of the vibrating beam 102.
- the power generation layer 101 includes a piezoelectric layer and a pair of electrodes that sandwich the piezoelectric layer. When external vibration is applied to the element shown in FIG.
- the vibrating beam 102 vibrates in accordance with the vibration. This vibration deforms the piezoelectric layer included in the power generation layer 101. This deformation generates a potential difference between the pair of electrodes that sandwich the piezoelectric layer based on the piezoelectric effect.
- the power generation layer 101 can be disposed on both surfaces of the vibrating beam 102. A part of the power generation layer 101 can also be disposed on the surface of the frame 104.
- the element shown in FIG. 11 is disclosed in Patent Document 1, for example.
- the element shown in FIG. 12 includes a double-supported (bridge-shaped) vibrating beam 201.
- the vibrating beam 201 has a strip shape. Both ends 202 and 203 of the vibrating beam 201 are fixed to the frame 104.
- the power generation layer 101 is disposed on one surface of the vibrating beam 201.
- the vibrating beam 201 vibrates in accordance with the vibration.
- the amplitude of vibration becomes maximum at the central portion 204 of the vibrating beam 201.
- This vibration deforms the piezoelectric layer included in the power generation layer 101.
- This deformation generates a potential difference between the pair of electrodes that sandwich the piezoelectric layer based on the piezoelectric effect.
- the element shown in FIG. 12 is disclosed in Patent Document 2, for example.
- the vibrating beam 102 has a cantilever shape. For this reason, there are few restrictions with respect to the vibration of the vibrating beam 102. This few constraints allow some amount of power to be generated. On the other hand, the vibrating beam 102 is easily damaged by excessive external vibration.
- the vibrating beam 201 is a doubly supported type.
- the double-ended vibrating beam 201 is not easily damaged by external vibration.
- both ends of the vibrating beam are fixed, the amount of amplitude of the beam tends to be small and the generated power tends to be small.
- Patent Document 3 discloses a method for increasing the amplitude of a double-supported vibrating beam. Specifically, in the element disclosed in Patent Document 3, the vibrating beam is bent in advance and held in a bistable state. In the element, the vibrating beam vibrates alternately between two stable states. The amplitude amount of the vibration is larger than the amplitude amount that can be shown by the vibrating beam 201 shown in FIG.
- Patent Document 4 and Patent Document 5 may relate to the present invention.
- Patent Document 5 does not disclose a piezoelectric power generation element.
- Patent Document 5 discloses a high-frequency micromachine switch.
- the piezoelectric power generation element is based on a technique related to vibration of a beam.
- High-frequency micromachine switches are based on a technique that holds a beam in the OFF or ON position as a switch, i.e., converts the beam between two specific forms and holds it in that form. In high-frequency micromachine switches, beam vibration is not considered at all. Both are based on completely different technologies.
- the method of bending the vibrating beam in advance increases the amplitude of the vibrating beam.
- it is essential to bend the vibrating beam, search for a bistable point, adjust the bending state of the vibrating beam, and fix the vibrating beam while maintaining the adjusted state. That is, the manufacturing process of the piezoelectric power generation element is complicated.
- a piezoelectric power generation element that includes a dual-supported vibrating beam, has a large amount of power generation, and is relatively easy to manufacture has not been realized.
- the piezoelectric power generation element of the present invention includes a support, a strip-shaped vibrating beam, a piezoelectric layer, and a pair of electrodes that sandwich the piezoelectric layer. Both ends (first end and second end) of the vibrating beam are fixed to the support. The piezoelectric layer and the pair of electrodes are disposed on the surface of the vibrating beam.
- the vibrating beam extends in one plane while not vibrating.
- the vibrating beam includes a first part extending from the first end fixed to the support, a second part extending from the second end fixed to the support, And a third portion connecting an end opposite to the first end in the first portion and an end opposite to the second end in the second portion.
- the vibrating beam has the following shapes (1) to (3) when viewed from a direction perpendicular to the plane.
- the first direction in which the first portion extends from the first end and the second direction in which the second portion extends from the second end are respectively the second direction. It is a direction approaching the end and the first end.
- the first direction and the second direction are each greater than 0 ° and less than 90 ° with respect to a straight line connecting the center of the first end and the center of the second end. Have an angle.
- (3) The third portion intersects the straight line once.
- the method of the present invention is a power generation method using a piezoelectric power generation element, and includes a step of preparing the piezoelectric power generation element and the following step (A).
- the piezoelectric power generation element includes a support, a strip-shaped vibrating beam, a piezoelectric layer, and a pair of electrodes that sandwich the piezoelectric layer. Both ends (first end and second end) of the vibrating beam are fixed to the support.
- the piezoelectric layer and the pair of electrodes are disposed on the surface of the vibrating beam.
- the vibrating beam extends in one plane while not vibrating.
- the vibrating beam includes a first part extending from the first end fixed to the support, a second part extending from the second end fixed to the support, And a third portion connecting an end opposite to the first end in the first portion and an end opposite to the second end in the second portion.
- the vibrating beam has the following shapes (1) to (3) when viewed from a direction perpendicular to the plane.
- (1) The first direction in which the first portion extends from the first end and the second direction in which the second portion extends from the second end are respectively the second direction. It is a direction approaching the end and the first end.
- the first direction and the second direction are each greater than 0 ° and less than 90 ° with respect to a straight line connecting the center of the first end and the center of the second end. Have an angle.
- the third portion intersects the straight line once.
- Step (A) is a step of generating a potential difference between the pair of electrodes by applying vibration to the piezoelectric power generation element.
- the power generating element of the present invention includes a vibrating beam having a specific shape. This realizes a piezoelectric power generation element that is not easily damaged by external vibration, has a large amount of power generation, and is relatively easy to manufacture.
- the piezoelectric power generation element of the present invention can capture a large amount of electric power from vibrations present in the surrounding environment of the element. By using the piezoelectric generator of the present invention, a small self-supporting generator that is robust and excellent in productivity is realized.
- FIG. 1 is a perspective view schematically showing an example of the piezoelectric power generation element of the present invention.
- FIG. 2 is a schematic plan view of the piezoelectric power generation element shown in FIG. 1 as viewed from a direction perpendicular to a plane on which a vibrating beam included in the element extends.
- FIG. 3 is a plan view schematically showing an example of a piezoelectric power generation element not included in the present invention, although the vibrating beam has a bent portion.
- FIG. 4A is a schematic diagram for explaining the center of the end of the vibrating beam.
- FIG. 4B is a schematic diagram for explaining the center of the end of the vibrating beam.
- FIG. 5A is a plan view schematically showing another example of the piezoelectric power generation element of the present invention.
- FIG. 5B is a cross-sectional view of the piezoelectric power generation element shown in FIG. 5A cut along the center line of the vibrating beam included in the element.
- FIG. 6A is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- 6B is a cross-sectional view of the piezoelectric power generation element shown in FIG. 6A cut along the center line of the vibrating beam included in the element.
- FIG. 7A is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 7B is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 7C is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 8A is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 8B is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 8C is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 8D is a plan view schematically showing still another example of the piezoelectric power generation element of the present invention.
- FIG. 9 is a diagram illustrating the time dependence of the generated voltage exhibited by the piezoelectric power generation element evaluated in Example 1.
- FIG. 10 is a perspective view schematically showing the structure of the piezoelectric power generation element evaluated in Example 3.
- FIG. It is a perspective view which shows typically an example of the conventional piezoelectric generating element which comprises a cantilever-like vibrating beam. It is a perspective view which shows typically an example of the conventional piezoelectric generating element which comprises a bridge-shaped vibrating beam.
- FIG. 1 shows an example of the piezoelectric power generation element of the present invention.
- a piezoelectric power generation element 1 shown in FIG. 1 includes a strip-shaped vibrating beam 2. Both end portions (first end portion 4 and second end portion 6) of the vibrating beam 2 are fixed to a support body (base) 3. A portion (vibrating portion) other than the end portion (fixed end) of the vibrating beam 2 can vibrate according to external vibration. That is, the vibrating beam 2 is a double-supported type. For this reason, the vibrating beam 2 is not easily damaged by external vibration.
- the vibrating beam 2 is fixed to the support 3 so that the vibrating portion can vibrate in the thickness direction of the beam.
- the vibrating beam 2 extends in one plane with the beam not vibrating. That is, at the time of manufacturing the element 1, it is unnecessary to bend the vibrating beam, search for a bistable point, adjust the bending state of the vibrating beam, and fix the vibrating beam while maintaining the adjusted state. For this reason, the element 1 is relatively easy to manufacture.
- the direction perpendicular to the plane in which the vibrating beam 2 extends and the direction perpendicular to the main surface of the vibrating beam 2 are the same.
- the vibrating beam 2 includes a first portion 5 extending from a first end 4 fixed to the support 3, and a second portion 7 extending from a second end 6 fixed to the support 3. And a third portion 10 that connects the end portion of the first portion 5 opposite to the end portion 4 and the end portion of the second portion 7 opposite to the end portion 6.
- FIG. 2 is a plan view of the element 1 shown in FIG. 1 as viewed from a direction perpendicular to the plane on which the vibrating beam 2 extends.
- the first direction 11 in which the first portion 5 extends from the first end 4 of the vibrating beam 2 when viewed from the direction perpendicular to the plane in which the vibrating beam 2 extends is vibration. This is a direction approaching the second end 6 of the beam 2.
- a second direction 12 in which the second portion 7 extends from the second end 6 of the vibrating beam 2 is a direction approaching the first end 4 of the vibrating beam 2.
- the first direction 11 and the second direction 12 exceed 0 ° with respect to the straight line 13 connecting the center 8 of the first end 4 of the vibrating beam 2 and the center 9 of the second end 6. Intersect at an angle of less than 90 °.
- the third portion 10 intersects the straight line 13 once.
- a power generation layer 14 including a piezoelectric layer and a pair of electrodes that sandwich the piezoelectric layer is disposed on the surface of the vibrating beam 2.
- the thickness direction of the band-shaped vibrating beam 2 is the same as the thickness direction of the piezoelectric layer.
- the element 1 including the vibrating beam 2 generates a large amount of power due to external vibration.
- the 12 includes a double-sided vibrating beam 201.
- the conventional piezoelectric power generation element shown in FIG. the direction in which the beam 201 extends from one end 202 thereof is the same as the direction in which the beam 201 extends from the other end 203.
- the straight line connecting these directions and the centers of both ends of the beam 201 is parallel. That is, the angle formed by these directions and the straight line is 0 °.
- the vibrating beam 201 having such a straight bridge shape is rigid.
- the vibration beam 201 has a small amount of amplitude that can be taken during vibration.
- the vibrating beam 2 is more flexible. Therefore, the vibration beam 2 has a large amount of amplitude that can be taken during vibration.
- the amount of power generation does not increase only by the large amount of amplitude that the vibrating beam can take. This is because in the piezoelectric power generation element, power generation is performed by vibration in a direction perpendicular to the plane in which the vibration beam extends (the thickness direction of the vibration beam and the piezoelectric layer, for example, the z direction shown in FIG. 2). Considering this, the vibrating beam 2 has the shape described above.
- the vibrating beam 2 vibrates in the z direction to generate power. Is called. Vibrations in other directions, for example, vibrations in the y direction shown in FIG. 2, do not contribute to power generation. However, it is rare that the external vibration consists only of the component in the z direction.
- the external vibration usually includes a component in a direction other than the z direction.
- the vibration in the y direction in the vibrating beam 2 is suppressed.
- the suppressed vibrations in the y direction are concentrated into vibrations in the z direction and contribute to power generation. Thereby, the electric power generation amount of the element 1 becomes large.
- the amount of amplitude that the vibrating beam can take increases by providing the vibrating beam with a bent portion or a curved portion.
- the degree to which vibration in the y direction is suppressed in the vibrating beam is reduced. That is, the amount by which the vibration in the y direction is concentrated into the vibration in the z direction is reduced, and the power generation amount is reduced.
- An example of a vibrating beam having a bent portion or a curved portion but not satisfying the above-described shape is shown in FIG.
- the vibrating beam 301 shown in FIG. 3 extends in one plane while not vibrating.
- FIG. 3 is a plan view seen from a direction perpendicular to the plane in which the vibrating beam 301 extends.
- the vibrating beam 301 has a portion 305 extending from one end 303 fixed to the support 302 and a portion 306 extending from the other end 304 fixed to the support 302.
- the vibrating beam 301 has a bent portion 309 and a bent portion 310 between the portion 305 and the portion 306.
- the bent portions 309 and 310 contribute to an increase in the amount of amplitude that the vibrating beam 301 can take.
- the direction 307 in which the portion 305 extends from the end portion 303 and the direction 308 in which the portion 306 extends from the end portion 304 and the direction 308 in which the portion 306 extends are viewed from the direction perpendicular to the plane in which the vibrating beam 301 extends.
- the first direction 11 in which the first portion 5 extends approaches the second end portion 6 where the second portion 7 is fixed to the support 3.
- the second direction 12 in which the second portion 7 extends is a direction in which the first portion 5 approaches the first end 4 fixed to the support 3. If the direction 11 and the direction 12 are directions away from the second end 6 and the first end 4, respectively, the third portion 10 connecting the first portion 5 and the second portion 7. The length is long and the shape becomes complicated.
- first direction 11 and the second direction 12 intersect with a straight line 13 connecting the center 8 of the first end 4 and the center 9 of the second end 6 at an angle of less than 90 °. If the direction 11 and the direction 12 intersect with the straight line 13 at an angle of 90 ° or more, the length of the third portion 10 is long and the shape becomes complicated.
- the third portion 10 intersects the straight line 13 once. If the number of intersections is two or more, the length of the third portion 10 is long and the shape becomes complicated.
- the shape of the vibrating beam 2 is a technology in which the length of the third portion 10 that connects the first portion 5 and the second portion 7 is shortened while increasing the amplitude, and the shape is not excessively complicated. Based on creative thought.
- the vibrating beam easily vibrates in a direction other than the z direction. That is, the power generation amount decreases.
- the amplitude of the vibrating beam due to vibration is the largest in the vicinity of the fixed end of the vibrating beam (the end fixed to the support).
- the greater the amount of amplitude the greater the amount of power generation. That is, in the first part, the second part, and the third part, the contribution of the third part to the power generation amount is relatively small. Therefore, even if the length of the third portion is shortened, the amount of power generation is increased due to the effect of vibrations gathering in the z direction.
- the vibrating beam When the intersection between the third portion and the straight line connecting the centers of both ends of the vibrating beam is zero, the vibrating beam is only in one plane divided by the straight line in the plane in which the beam extends. Exists. In the case of this shape, the vibrating beam is likely to vibrate in directions other than the z direction regardless of the length of the vibrating beam. That is, the power generation amount decreases. In the piezoelectric power generating element of the present invention, the number of intersections between the third portion and the straight line is one. In this case, the vibrating beam is present on both planes divided by the straight line in the plane in which the beam extends.
- the width of the vibrating portion of the vibrating beam 2 shown in FIGS. 1 and 2 (the width seen from the direction perpendicular to the plane in which the vibrating beam 2 extends) is uniform.
- the first portion 5 and the second portion 7 are trapezoidal when viewed from a direction perpendicular to the plane.
- the third portion 10 is a parallelogram when viewed from a direction perpendicular to the plane.
- the vibrating beam 2 has two right-angled bends. One bent portion is located at a connection portion between the first portion 5 and the third portion 10. The other bent portion is located at a connection portion between the second portion 7 and the third portion 10.
- the vibrating beam 2 shown in FIGS. 1 and 2 has a crank shape when viewed from a direction perpendicular to the plane.
- the center of the end of the vibrating beam is the following point.
- the vibration is seen from the direction perpendicular to the plane in which the vibrating beam 21 extends.
- This is the midpoint C of the line segment AB connecting the end points A and B on the side surface of the beam 21 that contacts the support 22.
- the vibrating beam 21 and the support 22 are viewed from a direction perpendicular to the plane in which the vibrating beam 21 extends. This is the midpoint C of the line segment AB connecting the end points A and B, with the end of the non-overlapping portion (that is, the vibrating portion) 23 as the end.
- the direction in which the first part and the second part extend is the direction in which the center line of the part (the center line in the length direction of the belt-like vibrating beam) extends.
- the center line of the first part and the second part is a straight line.
- the third portion intersects with a straight line means that the center line of the third portion (the center line in the length direction of the belt-like vibrating beam) intersects with the straight line.
- the shapes of the first part and the second part are not limited as long as the following conditions are satisfied. Both ends (first end and second end) are fixed to the support. A first portion and a second portion extend from the first end and the second end, respectively. The first portion and the second portion extend in one plane without vibration.
- the directions (first direction and second direction) in which the first portion and the second portion extend from the end portions as viewed from the direction perpendicular to the plane in which the vibrating beam extends are the second direction and the second direction, respectively. It is a direction which approaches an edge part and a 1st edge part. When viewed from the direction perpendicular to the plane in which the vibrating beam extends, the first direction and the second direction have an angle of more than 0 ° and less than 90 ° with respect to a straight line connecting the centers of the end portions.
- the shape of the third part is such that the first part and the second part are connected at the end of each part, and extend in the same plane as the plane in which the first part and the second part extend. As long as it intersects the straight line once, there is no limitation.
- the third portion may have a curved portion and / or a bent portion when viewed from a direction perpendicular to a plane in which the vibrating beam extends.
- the first direction and the second direction are parallel to each other. In this case, the amount by which vibrations in directions other than the z direction are aggregated into vibrations in the z direction increases.
- the vibration beam preferably has a point-symmetric shape when viewed from a direction perpendicular to the plane in which the beam extends. In this case, the amount by which vibrations in directions other than the z direction are aggregated into vibrations in the z direction increases.
- the vibrating beam 2 shown in FIGS. 1 and 2 has a point-symmetric shape with respect to a point 16 on the center line 15. The point 16 is located at an intermediate point between the first end 4 and the second end 6 on the center line 15.
- a weight can be disposed on the surface of the vibrating beam. Depending on the arrangement of the weights, the response frequency in the piezoelectric power generation element and the level of the captured vibration can be adjusted.
- a power generation layer 14 is disposed on the surface of the vibrating beam 2.
- the power generation layer 14 includes a piezoelectric layer and a pair of electrodes that sandwich the piezoelectric layer.
- the power generation layer 14 is disposed on at least a part of the surface of the vibrating beam 2. There may be a surface of the vibrating beam 2 on which the power generation layer 14 is not disposed.
- the power generation layer 14 can be disposed on both surfaces (main surfaces) of the vibrating beam 2.
- the power generation layer 14 may be further disposed on the portion of the vibrating beam 2 fixed to the support 3 and on the surface of the support 3. 1 and 2, the thickness of the power generation layer 14 is not expressed. However, in reality, the power generation layer 14 has a thickness.
- the material constituting the piezoelectric layer has piezoelectric performance.
- the material include ferroelectrics including lead such as Pb (Zr, Ti) O 3 ; ferroelectrics such as BaTiO 3 , (Bi, Na) TiO 3 and (K, Na) NbO 3. Body; and polymeric piezoelectric material.
- the material constituting the piezoelectric layer can be a known piezoelectric material.
- the electrode is made of a conductive material.
- the material is not limited.
- the support 3 has a U shape surrounding the vibrating beam 2 when viewed from a direction perpendicular to the plane in which the vibrating beam 2 extends.
- the person skilled in the art can manufacture the piezoelectric power generation element of the present invention by applying a known method.
- FIG. 5A and 5B show another example of the piezoelectric power generation element of the present invention.
- FIG. 5B shows a cross section of the piezoelectric power generation element 31 shown in FIG. 5A cut along the center line 33 of the vibration beam 32 included in the element 31.
- the piezoelectric power generation element 31 shown in FIGS. 5A and 5B has one electrode (upper electrode 34) selected from a pair of electrodes (lower electrode 32 and upper electrode 34) sandwiching the piezoelectric layer 33 as the vibrating beam 2.
- the piezoelectric power generation device 1 is the same as the piezoelectric power generation device 1 shown in FIGS. 1 and 2 except that two or more (upper electrodes 34a, 34b, 34c) are arranged in the extending direction.
- the upper electrode 34 a is disposed on the surface of the first portion 5 in the vibrating beam 2 via the lower electrode 32 and the piezoelectric layer 33.
- the upper electrode 34 b is disposed on the surface of the third portion 10 in the vibrating beam 2 via the lower electrode 32 and the piezoelectric layer 33.
- the upper electrode 34 c is disposed on the surface of the second portion 7 in the vibrating beam 2 via the lower electrode 32 and the piezoelectric layer 33.
- the entire vibrating beam 2 is displaced in the same direction with respect to external vibration in the z direction.
- in-plane stress generated on the surface of the vibrating beam 2 that is, stress applied to the piezoelectric layer 33 disposed on the surface of the vibrating beam 2, the first portion 5, the second portion 7, and the third portion 10 and different.
- one end of each of the first portion 5 and the second portion 7 is fixed to the support body 3 (has a fixed end).
- both ends of the third portion 10 can vibrate. Accordingly, when compressive stress is applied to the first portion 5 and the second portion 7, tensile stress is applied to the third portion 10.
- compressive stress is applied to the third portion 10.
- the compressive stress and the tensile stress are applied to each portion periodically and alternately according to the vibration. That is, the direction of the electric field generated in the part corresponding to the first part 5 and the second part 7 in the piezoelectric layer is opposite to the direction of the electric field generated in the part corresponding to the third part 10 ( (See Fig. 5B.
- the arrow in the piezoelectric layer 33 indicates the direction of the electric field generated in the layer 33 at a certain moment).
- the upper electrode 34 is divided into three parts. Thereby, the degree to which the power generation in the piezoelectric layer 33 cancels out can be reduced. That is, in the piezoelectric power generating element of the present invention, it is preferable that at least one electrode selected from a pair of electrodes sandwiching the piezoelectric layer is divided and disposed in the direction in which the vibrating beam extends. A specific state in which the at least one electrode is divided is not particularly limited. Depending on the state of the division and the state of the wiring for taking out the electric power generated by the power generation, the cancellation of the power generation in the piezoelectric layer can be substantially suppressed. In the example shown in FIGS.
- the upper electrode 34 is divided into three electrodes 34 a, 34 b and 34 c corresponding to the first portion 5, the second portion 7 and the third portion 10, respectively. Yes.
- the portion corresponding to the first portion 5 in the piezoelectric layer and the portion corresponding to the second portion 7 in the piezoelectric layer are electrically connected via the lower electrode 32.
- the lower electrode 32 Are connected in parallel.
- a part corresponding to the first part 5 and a part corresponding to the second part 7 in the piezoelectric layer and a part corresponding to the third part 10 in the piezoelectric layer via the lower electrode 32. Are electrically connected in series. According to this configuration, cancellation of power generation is substantially suppressed, and a large amount of power can be extracted.
- the electrode 34b disposed on the surface of the third portion can be omitted.
- the state of the wiring can be the following state: Using the electrode 34a and the lower electrode 32, the electric power generated in the portion corresponding to the first portion 5 in the piezoelectric layer is taken out; the electrode 34b and the lower portion Using the electrode 32, the electric power generated in the portion corresponding to the second portion 7 of the piezoelectric layer is taken out; using the electrode 34c and the lower electrode 32, the third portion of the piezoelectric layer is extracted.
- the electric power generated in the part corresponding to the part 10 is taken out. That is, the power generated in the portion corresponding to the first portion 5, the power generated in the portion corresponding to the second portion 7, and the power generated in the portion corresponding to the third portion 10 are individually Take out.
- FIG. 6A and 6B show another example in which at least one electrode is divided into two or more in the direction in which the vibrating beam extends.
- FIG. 6B shows a cross section of the piezoelectric power generation element 41 shown in FIG. 6A cut along the center line 15 of the vibrating beam 2 included in the element 41.
- a pair of electrodes (lower electrode 42 and upper electrode 44) sandwiching the piezoelectric layer 43 are divided into two in the direction in which the vibrating beam 2 extends.
- the piezoelectric power generating element 1 is the same as that shown in FIGS.
- the upper electrode 44 a is disposed on the surface of the first portion 5 in the vibrating beam 2 via the lower electrode 42 a and the piezoelectric layer 43.
- the upper electrode 44b is connected to the surface of the second portion 7 of the vibrating beam 2 via the lower electrode 42a and the piezoelectric layer 43, and to the third electrode of the vibrating beam 2 via the lower electrode 42b and the piezoelectric layer 43. It is arranged on the surface of the part 10.
- the lower electrode 42 a is disposed on the surfaces of the first portion 5 and the second portion 7 in the vibrating beam 2.
- the lower electrode 42 b is disposed on the surface of the third portion 10 in the vibrating beam 2.
- An insulating gap 45 is provided between the lower electrode 42a and the lower electrode 42b to electrically insulate both the electrodes 42a and 42b.
- the insulating gap 45 can be composed of a gap or an insulator.
- the portion corresponding to the first portion 5, the portion corresponding to the second portion 7, and the portion corresponding to the third portion 10 in the piezoelectric layer are electrically Connected in series.
- the above-described cancellation is substantially suppressed, and a large amount of electric power can be extracted.
- an electrode for taking out electric power is arranged in the vicinity of the fixed end of the vibrating beam 2. For this reason, the connection between the element 41 and the external circuit is facilitated.
- the vibrating beam included in the piezoelectric power generation element of the present invention can have a bent portion.
- the vibrating beam 2 included in the element 1 shown in FIG. 1 has two right-angled bent portions.
- the angle of the bent portion may be an acute angle or an obtuse angle.
- FIG. 7A shows an example of an element in which the angle of the bending portion of the vibrating beam is an acute angle.
- the vibrating beam 51 included in the element shown in FIG. 7A has two sharp bent portions.
- the angle of the bent portion is an acute angle, the use efficiency of the space surrounded by the support 3 in which the vibrating beam 51 is accommodated can be increased. That is, the amount of power generation per unit area of the element can be increased.
- FIG. 7B shows an example in which the angle of the bending portion of the vibrating beam is an obtuse angle.
- the vibrating beam 53 included in the element shown in FIG. 7B has two obtuse bends.
- FIG. 7C shows an example in which the vibrating beam 54 has two acute angle bends, but the bends are rounded. If there is a corner portion on the vibrating beam, cracks may occur from the corner portion due to repeated vibration. In the example shown in FIGS. 7B and 7C, the occurrence of such cracks can be suppressed. That is, the frequency of element breakage is reduced, and a more robust element can be realized.
- two or more upper electrodes are arranged in the direction in which the vibrating beams 51, 53 or 54 extend (upper electrodes 52a, 52b and 52c).
- the first portion 5 and the second portion 7 are portions where the center line 15 of the vibrating beam is a straight line.
- the remaining part of the vibrating beam 51, 53 or 54 is the third part 10.
- FIG. 8A shows an example in which the vicinity of the fixed end of the vibrating beam in the element shown in FIG. 5A is widened.
- FIG. 8B shows an example in which the vicinity of the fixed end of the vibrating beam is widened in the element shown in FIG. 7A.
- FIG. 8C shows an example in which the vicinity of the fixed end of the vibrating beam is widened in the element shown in FIG. 7B.
- FIG. 8D shows an example in which the vicinity of the fixed end of the vibrating beam in the element shown in FIG. 7C is widened.
- the power generation efficiency of the piezoelectric power generation element is improved.
- the use efficiency of the space surrounded by the support 3 in which the vibrating beam is accommodated can be increased. That is, the amount of power generation per unit area of the element can be increased.
- the widening preferably has a form in which the width of the vibrating beam increases as it approaches the fixed end.
- the piezoelectric power generating element of the present invention can include any member other than those described above as long as the effects of the present invention can be obtained.
- the vibration beam included in the element vibrates.
- the vibration generates an electromotive force due to the piezoelectric effect in the piezoelectric layer.
- a potential difference is generated between the pair of electrodes (upper electrode and lower electrode) that sandwich the piezoelectric layer.
- Example 1 In Example 1, a silicon (Si) substrate was finely processed to form a support and a vibrating beam fixed to the support. Two types of vibrating beams were formed. One was a linear bridge-shaped vibrating beam shown in FIG. The other was a crank-shaped vibrating beam shown in FIG. On the surface of the formed vibrating beam, a piezoelectric layer composed of a perovskite ferroelectric Pb (Zr, Ti) O 3 (hereinafter referred to as PZT), and a pair of electrodes (an upper electrode and an electrode) sandwiching the piezoelectric layer Lower electrode) was placed. Thereby, the piezoelectric power generation element of the present invention (the shape of the vibrating beam is shown in FIG. 1) and the comparative piezoelectric power generation element (the shape of the vibrating beam is shown in FIG. 12) were formed.
- PZT perovskite ferroelectric Pb
- FIG. 12 the piezoelectric power generation element of the present invention
- the shape of the vibrating beam is shown
- the PZT thin film was formed under the condition of a substrate temperature of 600 ° C.
- the laminated body of Si substrate / Ir layer / PZT thin film was patterned into the shape shown in FIG. 1 by photolithography.
- another laminate of Si substrate / Ir layer / PZT thin film was patterned into the shape shown in FIG. 12 by photolithography.
- the width of the vibrating beam (the width seen from the direction perpendicular to the plane in which the vibrating beam extends) was uniform throughout the vibrating beam and was 2 mm.
- the shape of the support was the shape shown in FIGS. 1 and 12 (U-shape). The interval between the U-shaped parallel facing sides was 10 mm.
- the length of the third portion 10 of the vibrating beam 2 is 4 mm as the length of the center line 15 of the portion.
- a titanium (Ti) layer was disposed as an adhesion layer between the PZT thin film and the Au layer.
- the Au layer was formed so as to be in contact with a portion to be a fixed end of the vibrating beam.
- the whole was dry-etched so that the thickness of the vibrating beam was 80 ⁇ m.
- the piezoelectric power generation element having the shape shown in FIG. 1 and the piezoelectric power generation element having the shape shown in FIG. 12 were formed.
- FIG. 9 shows the time of voltage generated at no load (potential difference generated between the upper electrode and the lower electrode) when an external vibration having a maximum acceleration of 2G (G: gravitational acceleration) and a frequency of 800 Hz is applied to the element.
- the white mark corresponds to the potential difference output from the piezoelectric power generation element having the shape shown in FIG.
- the black mark corresponds to the potential difference output from the piezoelectric power generation element having the shape shown in FIG.
- the peak-to-peak voltage output by the element having the shape shown in FIG. 1 was 2.8V. This was more than twice the peak-to-peak voltage output by the element having the shape shown in FIG.
- the average generated power of each element was estimated by connecting the load. Both devices showed the maximum power generation when a load resistance of 5 k ⁇ (kiloohm) was connected.
- the maximum power generation amount of the element having the shape shown in FIG. 12 was 8 ⁇ W in terms of the effective power value.
- the maximum power generation amount of the element having the shape shown in FIG. 1 was 50 ⁇ W in terms of the power effective value.
- the maximum acceleration of external vibration applied to the element was increased.
- the maximum power generation amount of the element having the shape shown in FIG. 12 was saturated at 10 ⁇ W. This was thought to be due to the low limit of amplitude in the vibrating beam.
- the maximum power generation amount of the element having the shape shown in FIG. 1 increased as the acceleration increased.
- the instantaneous maximum generated electric power with respect to the external vibration having the maximum acceleration of 2G reaches 400 ⁇ W.
- the element was not damaged by external vibration with a maximum acceleration of 10 G, and power generation continued.
- Example 2 Using the same material and method as in Example 1, the piezoelectric power generation element having the shape shown in FIG. 1 and the piezoelectric power generation element having the shape shown in FIG. 3 were formed. In both elements, the width of the vibrating beam was uniform throughout the vibrating beam and was 2 mm.
- the shape of the support was the shape (U-shape) shown in FIGS. 1 and 3. The interval between the U-shaped parallel facing sides was 10 mm.
- the length of the third portion 10 of the vibrating beam 2 is 4 mm as the length of the center line 15 of the portion.
- the upper electrode was formed with a length of about 3 mm from the fixed end of the vibrating beam.
- the resonance frequency of the vibrating beam is about 800 Hz at the center point 16 (the element having the shape shown in FIG. 1) and the point 320 (the element having the shape shown in FIG. 3) of the vibrating beam.
- a weight was installed.
- the vibration tester which was not completely identical to the z direction and inclined 45 degrees in the y direction, that is, including both components in the z direction and the y direction.
- the maximum power generation amount was 70 ⁇ W in terms of the effective power value.
- the maximum power generation amount was 100 ⁇ W in terms of the effective power value.
- the vibration in the y direction is concentrated into the vibration in the z direction. That is, in the element having the shape shown in FIG. 1, a configuration of a piezoelectric power generation element with extremely high power generation efficiency in which vibration in the y direction as well as the z direction contributes to power generation is realized.
- Example 3 A piezoelectric power generation element having the shape shown in FIG. 10 was formed using the same material and method as in Example 1.
- the shape of the support 3 was U-shaped.
- the interval between the U-shaped parallel facing sides was 10 mm.
- the width of the vibrating beam 65 was uniform by 2 mm in the third portion (the portion other than the first portion 5 and the second portion 7 in the vibrating beam 65).
- the width of the vibrating beam 65 was 4 mm at the fixed ends of the first portion 5 and the second portion 7.
- the width of the vibrating beam 65 was 2 mm at the connection end of the first portion 5 and the second portion 7 with the third portion. That is, the width of the vibrating beam 65 is larger as it approaches the fixed end.
- the weight is adjusted so that the resonant frequency of the vibrating beam is about 800 Hz. Was installed. In order to make the drawing easy to understand, the third portion is not shown.
- the upper electrode 52a formed on the first portion 5 and the upper electrode 52c formed on the second portion 7 are provided beside the upper electrode 52b on the third portion. Electrical connection is established by the lead wiring 61.
- the upper electrode 52 a is drawn out to the electrode terminal 62 formed on the support 3.
- the upper electrode 52b formed on the third portion is drawn out by the lead wiring 63 provided beside the upper electrode 52a and is electrically connected to the electrode terminal 64.
- electric power generated in the piezoelectric layer 66 disposed on the first portion 5, the second portion 7, and the third portion is connected between the electrode terminal 62 and the electrode terminal 64 in series. Connected with. That is, in the element, the electrical connection shown in FIG. 5B is realized. As a result, efficient generation of electricity was expected.
- the piezoelectric power generation device formed in this way was installed in a vibration tester.
- Example 2 An external vibration with a maximum acceleration of 2G was applied by a vibration testing machine in a direction (z direction) perpendicular to the principal surface of the vibration beam of the element.
- the maximum power generation amount at that time was estimated in the same manner as in Example 1.
- the maximum power generation amount 1.5 mW in terms of effective power value
- the instantaneous maximum generated power reached 10 mW.
- the element has a shape of a vibrating beam with few voids in a space surrounded by the support. Therefore, the effective power generation amount per unit area (unit area when the element is viewed from a direction perpendicular to the plane in which the vibrating beam extends) has reached a value as large as 2 mW / cm 2 .
- the piezoelectric power generation element of the present invention is useful as a small self-supporting power generation element that captures electric power from the surrounding environment.
- the piezoelectric power generation element of the present invention realizes a device that does not require battery replacement.
- the device is, for example, an electronic device such as various sensors or a wireless device.
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
図1は、本発明の圧電発電素子の一例を示す。図1に示される圧電発電素子1は、帯状の振動梁2を具備する。振動梁2の双方の端部(第1の端部4および第2の端部6)は、支持体(土台)3に固定されている。振動梁2の当該端部(固定端)以外の部分(振動部)は、外部振動に応じて振動しうる。すなわち、振動梁2は、両持ち式である。このため、振動梁2は、外部振動に対して破損し難い。振動梁2は、振動部が当該梁の厚さ方向に振動しうるように、支持体3に固定されている。
上述した本発明の圧電発電素子に振動を与えることにより、圧電体層を挟持する一対の電極間に電位差が生じる。これにより、当該電極を介して電力が得られる。上述した圧電発電素子の好ましい形態は、本発明の発電方法に使用する圧電発電素子においても、好ましい。
実施例1では、シリコン(Si)基板を微細加工して、支持体と、当該支持体に固定された振動梁とが形成された。2種類の振動梁が形成された。一つは、図12に示される直線ブリッジ状の振動梁であった。もう一つは、図1に示されるクランク状の振動梁であった。形成した振動梁の表面には、ペロブスカイト型強誘電体Pb(Zr,Ti)O3(以下、PZT)から構成される圧電体層、ならびに当該圧電体層を挟持する一対の電極(上部電極および下部電極)が配置された。これにより、本発明の圧電発電素子(振動梁が図1に示される形状)と、比較用の圧電発電素子(振動梁が図12に示される形状)とが形成された。
実施例1と同様の材料および手法を用いて、図1に示される形状を有する圧電発電素子および図3に示される形状を有する圧電発電素子が形成された。双方の素子ともに、振動梁の幅は、振動梁全体で均一であり、2mmであった。支持体の形状は、図1および図3に示される形状(U字状)であった。U字の平行に向かい合った辺の間隔は10mmであった。図1に示される形状において、振動梁2の第3の部分10の長さは、当該部分の中心線15の長さにして、4mmであった。双方の素子ともに、上部電極は、振動梁の固定端から3mm程度の長さで形成した。双方の素子ともに、振動梁の中央の点16(図1に示される形状を有する素子)および点320(図3に示される形状を有する素子)に、振動梁の共振周波数が800Hz前後となるように、錘が設置された。
実施例1と同様の材料および手法を用いて、図10に示される形状を有する圧電発電素子が形成された。支持体3の形状は、U字状であった。U字の平行に向かい合った辺の間隔は10mmであった。振動梁65の幅は、第3の部分(振動梁65における第1の部分5および第2の部分7以外の部分)において、2mm均一であった。振動梁65の幅は、第1の部分5および第2の部分7における固定端において4mmであった。振動梁65の幅は、第1の部分5および第2の部分7における第3の部分との接続端において2mmであった。すなわち、振動梁65の幅は、固定端に近づくほど、大きかった。振動梁65の中央(振動梁の中心線15における、一方の固定端から他方の固定端への中央部)に位置する点16に、振動梁の共振周波数が800Hz前後となるように、錘が設置された。図面を分かり易くするために、第3の部分の図示は省略する。
Claims (8)
- 支持体と、帯状の振動梁と、圧電体層と、前記圧電体層を挟持する一対の電極と、を具備し、
前記振動梁の第1の端部および第2の端部は、前記支持体に固定され、
前記圧電体層および前記一対の電極が、前記振動梁の表面に配置され、
前記振動梁は、
振動していない状態で、一つの平面内に伸長し、
前記支持体に固定された前記第1の端部から伸長する第1の部分と、前記支持体に固定された前記第2の端部から伸長する第2の部分と、前記第1の部分における前記第1の端部とは反対側の端部および前記第2の部分における前記第2の端部とは反対側の端部をつなぐ第3の部分と、を有し、および
前記平面に垂直な方向から見て、
前記第1の端部から前記第1の部分が伸長する第1の方向、および前記第2の端部から前記第2の部分が伸長する第2の方向が、それぞれ前記第2の端部および前記第1の端部に近づく方向であるとともに、前記第1の端部の中心と前記第2の端部の中心とを結ぶ直線に対して0°を超え90°未満の角度を有し、
前記第3の部分が前記直線と1回交差する、
形状を有する、
圧電発電素子。 - 前記第1の方向と前記第2の方向とが互いに平行である請求項1に記載の発電素子。
- 前記振動梁が、前記平面に垂直な方向から見て点対称の形状を有する請求項1に記載の発電素子。
- 前記一対の電極から選ばれる少なくとも1つの電極が、前記振動梁が伸長する方向に、分割して2以上配置されている請求項1に記載の発電素子。
- 圧電発電素子を用いた発電方法であって、
前記圧電発電素子を準備する工程、および
ここで、前記圧電発電素子は、
支持体と、帯状の振動梁と、圧電体層と、前記圧電体層を挟持する一対の電極と、を具備し、
前記振動梁の第1の端部および第2の端部は、前記支持体に固定され、
前記圧電体層および前記一対の電極が、前記振動梁の表面に配置され、
前記振動梁は、
振動していない状態で、一つの平面内に伸長し、
前記支持体に固定された前記第1の端部から伸長する第1の部分と、前記支持体に固定された前記第2の端部から伸長する第2の部分と、前記第1の部分における前記第1の端部とは反対側の端部および前記第2の部分における前記第2の端部とは反対側の端部をつなぐ第3の部分と、を有し、および
前記平面に垂直な方向から見て、
前記第1の端部から前記第1の部分が伸長する第1の方向、および前記第2の端部から前記第2の部分が伸長する第2の方向が、それぞれ前記第2の端部および前記第1の端部に近づく方向であるとともに、前記第1の端部の中心と前記第2の端部の中心とを結ぶ直線に対して0°を超え90°未満の角度を有し、
前記第3の部分が前記直線と1回交差する、
形状を有し、
前記圧電発電素子に振動を与えることにより、前記一対の電極間に電位差を生じさせる工程、
を包含する、方法。 - 前記第1の方向と前記第2の方向とが互いに平行である請求項5に記載の方法。
- 前記振動梁が、前記平面に垂直な方向から見て点対称の形状を有する請求項5に記載の方法。
- 前記一対の電極から選ばれる少なくとも1つの電極が、前記振動梁が伸長する方向に、分割して2以上配置されている請求項5に記載の方法。
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JP2013123291A (ja) * | 2011-12-09 | 2013-06-20 | Kohei Hayamizu | 振動力発電装置 |
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WO2019021400A1 (ja) * | 2017-07-26 | 2019-01-31 | 株式会社 トライフォース・マネジメント | 発電素子 |
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JP2017205011A (ja) * | 2017-07-31 | 2017-11-16 | 株式会社トライフォース・マネジメント | 発電素子 |
Also Published As
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US20110278991A1 (en) | 2011-11-17 |
JP4767369B1 (ja) | 2011-09-07 |
US8093784B2 (en) | 2012-01-10 |
CN102414854A (zh) | 2012-04-11 |
CN102414854B (zh) | 2014-04-30 |
JPWO2011083762A1 (ja) | 2013-05-13 |
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