WO2011083541A1 - Solid-state image capture device and image capture device - Google Patents

Solid-state image capture device and image capture device Download PDF

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Publication number
WO2011083541A1
WO2011083541A1 PCT/JP2010/007419 JP2010007419W WO2011083541A1 WO 2011083541 A1 WO2011083541 A1 WO 2011083541A1 JP 2010007419 W JP2010007419 W JP 2010007419W WO 2011083541 A1 WO2011083541 A1 WO 2011083541A1
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Prior art keywords
pixel
row
row selection
signal
imaging device
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PCT/JP2010/007419
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French (fr)
Japanese (ja)
Inventor
剛 曽和
邦彦 原
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パナソニック株式会社
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Publication of WO2011083541A1 publication Critical patent/WO2011083541A1/en

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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/40Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled
    • H04N25/42Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled by switching between different modes of operation using different resolutions or aspect ratios, e.g. switching between interlaced and non-interlaced mode
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors

Definitions

  • the present invention relates to a solid-state imaging device in which pixels that photoelectrically convert incident light are two-dimensionally arranged on a semiconductor substrate, and particularly to achieve a solid-state imaging device that can obtain a high-quality pixel mixture image.
  • MOS Metal Oxide Semiconductor
  • DSLR digital single-lens reflex cameras
  • FIG. 16 is a diagram showing an overall configuration of a conventional solid-state imaging device described in Patent Document 1.
  • the solid-state imaging device shown in FIG. 1 includes an imaging unit 200, pixels 202, and a pixel readout circuit 250.
  • the pixel 202 includes a photodiode 211, a reset transistor 214, an amplification transistor 215, and a selection transistor 216.
  • the pixel readout circuit 250 includes a current source 253, a ground connection transistor 254, a load transistor 255, and a power supply connection transistor 256.
  • a first vertical wiring 221 and a second vertical wiring 222 are provided as output wirings for pixel signals, and a first pixel output 257 and a second pixel output 258 are provided as output terminals.
  • the ground connection transistor 254 is turned off and the power connection transistor 256 is turned on.
  • a current source 253 is connected to the source / drain terminal on the selection transistor side of the amplification transistor 215 of the pixel via the first vertical wiring 221, and a power source is connected to the source / drain terminal on the opposite side via the second vertical wiring 222.
  • the amplification transistor 215 and the current source 253 of the pixel 202 function as a source follower amplifier, and a pixel signal is read from the first pixel output 257. At this time, if pixel signals are read by sequentially turning on the selection transistors 216 row by row, the signals of all the pixels 202 are read.
  • the ground connection transistor 254 is turned on and the power supply connection transistor 256 is turned off.
  • a load transistor 255 is connected to the source / drain terminal on the selection transistor 216 side of the amplification transistor 215 of the pixel 202 via the first vertical wiring 221 and a load transistor 255 is connected to the opposite source / drain terminal via the second vertical wiring 222.
  • the amplification transistor 215 and the load transistor 255 of the pixel 202 function as a source-grounded amplifier, and if two rows of selection transistors 216 are simultaneously turned on, a mixed signal of two upper and lower pixels is obtained from the second pixel output 258. If the pixel signals are read by sequentially turning on the selection transistors 216 two rows at a time, the mixed signal of the entire imaging unit 200 is read.
  • the imaging unit 200 includes an effective part used as image information in the camera and a peripheral part such as a light-shielding pixel arranged around the effective part.
  • the operation of each drive mode is the same in the effective part and the peripheral part.
  • correction data is generated from an output signal of a light-shielded pixel arranged in the peripheral portion of the image pickup unit, and correction is performed by a digital signal processor in the subsequent stage.
  • the number of rows for creating correction data in the pixel mixture mode is significantly smaller than that in the all-pixel readout mode. Since the pixel readout signal includes random noise due to power fluctuation, device-specific noise, and the like, a reduction in the number of correction lines leads to a reduction in accuracy of the correction data, resulting in a problem that image quality is deteriorated.
  • an object of the present invention is to provide a solid-state imaging device that suppresses a reduction in accuracy of correction data in the pixel mixing mode.
  • a solid-state imaging device is a pixel row including an imaging unit having a plurality of pixels arranged in a two-dimensional manner and the plurality of pixels arranged in a horizontal direction.
  • a row selection circuit that selects a pixel circuit, a column circuit unit that temporarily holds pixel signals output from the plurality of pixels of the selected pixel row, and a row that designates a pixel row to be selected during a single row readout period
  • a controller that supplies an address signal to the row selection circuit, wherein the plurality of pixels includes a plurality of first pixels that output a pixel signal corresponding to the amount of received light, and a plurality of second pixels that output a fixed pixel signal.
  • the imaging unit includes an effective unit in which the plurality of first pixels are arranged and a peripheral unit in which the plurality of second pixels are arranged, and in at least one of the driving modes,
  • the control unit corresponds to the effective unit.
  • the first row selection sequence including the row address signal and the second row selection sequence including the row address signal corresponding to the peripheral portion are simultaneously specified in the first row selection sequence and the second row selection sequence.
  • the number of pixel rows to be generated or the number of times each row is designated is generated and supplied to the row selection circuit.
  • the driving mode of the solid-state imaging device is a pixel mixing mode that mixes and outputs the pixel signals of the effective part, it can be output without reducing the number of pixel signals in the peripheral part obtained as correction data. It is possible to suppress a decrease in accuracy of the business data.
  • control unit is configured such that the number of pixel rows designated in a single row readout period in the first row selection sequence is a pixel row designated in a single row readout period in the second row selection sequence.
  • the first row selection sequence and the second row selection sequence may be generated so as to be greater than
  • control unit may be configured such that the number of times each pixel row is designated by the first row selection sequence is smaller than the number of times each pixel row is designated by the second row selection sequence in one frame period.
  • the first row selection sequence and the second row selection sequence may be generated.
  • the number of pixel rows from which pixel signals are simultaneously read out is small, or the number of times each pixel row is designated increases. Even in the pixel mixing mode in which signals are mixed and output, it is possible to suppress a decrease in accuracy of the correction data.
  • the control unit designates two or more pixel rows as a single row readout period, and in the second row selection sequence, reads one pixel row as a single row. You may make it designate in a period.
  • pixel signals of two or more pixel rows are mixed and output when reading the pixel signals of the effective portion, and pixel signals of the pixel rows are output one by one when reading the pixel signals of the peripheral portion. Therefore, the pixel signals of the peripheral pixel rows used for generating the correction data are output without being mixed. Thereby, it is possible to suppress a decrease in accuracy of the correction data without reducing the number of correction data in the pixel mixing mode.
  • control unit designates two or more pixel rows in a single row readout period in the first row selection sequence, and pixels designated in the first row selection sequence in the second row selection sequence. Two or more pixel rows different from the number of rows may be designated in a single row readout period.
  • the control unit designates two or more pixel rows as a single row readout period
  • the control unit designates the Nth pixel row (N is an integer of 1 or more).
  • N is an integer of 1 or more
  • M is an integer equal to or greater than 1 and M ⁇ N
  • the Nth pixel row is changed multiple times by changing the value of M in one frame period. You may make it specify.
  • the pixel signals of the Nth pixel row and the Mth pixel row are mixed and output when reading out the pixel signals of the effective portion and the peripheral portion, the pixel signals are efficiently output by reducing the number of times of reading. Obtainable.
  • the pixel signals of the Nth pixel row and the Mth pixel row are mixed and output a plurality of times in different combinations, so that the correction data is generated even in the pixel mixture mode. The accuracy of correction data can be prevented from decreasing without reducing the number of peripheral pixel signals used for the correction.
  • the plurality of times may be two times.
  • the pixel signals in the Nth pixel row and the Mth pixel row are mixed and each pixel is designated twice. It is possible to obtain the same number of pixel signals as when reading out one row at a time. Therefore, regardless of the difference in driving mode, there is no concern that an offset will occur in the output even in the pixel mixing mode compared to the mode in which pixel mixing is not performed, and the correction data is created with high accuracy. Can do.
  • the size of the parasitic component of the circuit is the same as that in the mode in which pixel mixing is not performed, and it is possible to suppress a reduction in accuracy of correction data in the pixel mixing mode without increasing power consumption.
  • the second pixel may include a light-shielded light-shielded pixel or a reference voltage output pixel that outputs a reference voltage.
  • the pixel signal output from the second pixel can be accurately set to a constant value.
  • peripheral part may be arranged on the peripheral side of the imaging unit with respect to the effective part.
  • an imaging device includes a solid-state imaging device having the above-described characteristics and a digital that performs correction processing on the pixel signal of the effective portion output from the solid-state imaging device.
  • a signal processing unit, and a storage unit that holds the pixel signal of the peripheral part output from the solid-state imaging device and the correction data generated using the pixel signal of the peripheral part.
  • the solid-state imaging device According to the solid-state imaging device according to the present invention, it is possible to suppress a reduction in accuracy of correction data in the pixel mixing mode.
  • FIG. 1 is a diagram illustrating an overall configuration of a solid-state imaging device according to the first embodiment of the present invention.
  • FIG. 2 is a diagram illustrating a configuration of the pixel in FIG.
  • FIG. 3 is a diagram showing the configuration of the column circuit section in FIG.
  • FIG. 4 is a diagram showing the configuration of the multiplexer and column selection circuit in FIG.
  • FIG. 5 is a diagram showing a configuration of the row selection circuit in FIG.
  • FIG. 6 is a timing chart showing the reading operation of the pixel signal of the effective portion in the all-pixel reading mode.
  • FIG. 7 is a timing chart showing the reading operation of the pixel signal of the effective portion in the vertical 2-pixel horizontal 2-pixel mixed read mode.
  • FIG. 8A and 8B are diagrams showing a row selection sequence in the all-pixel readout mode, where FIG. 8A is a diagram showing row numbers of each row in the effective portion and the peripheral portion, and FIG. 8B is a sequence of row address signals supplied to each row.
  • FIG. FIG. 9 is a diagram showing a row selection sequence in the vertical two-pixel horizontal two-pixel mixed readout mode, where (a) shows the row numbers of the rows in the effective portion and the peripheral portion, and (b) is supplied to each row. It is a figure which shows the sequence of a row address signal.
  • FIG. 10 is a diagram showing a row selection sequence in the vertical two-pixel horizontal two-pixel mixed readout mode of the solid-state imaging device according to the second embodiment of the present invention.
  • FIG. 10 is a diagram showing a row selection sequence in the vertical two-pixel horizontal two-pixel mixed readout mode of the solid-state imaging device according to the second embodiment of the present invention.
  • FIG. 10A is a row of each row in the effective portion and the peripheral portion.
  • the figure which shows a number and (b) are the figures which show the sequence of the row address signal supplied to each row.
  • FIG. 11 is a diagram illustrating an overall configuration of a solid-state imaging device according to the third embodiment of the present invention.
  • FIG. 12 is a diagram showing the configuration of the column ADC in FIG.
  • FIG. 13 is a timing chart showing the operation of the column ADC.
  • FIG. 14 is a diagram illustrating a configuration of an imaging apparatus according to the fourth embodiment of the present invention.
  • FIG. 15 is a flowchart of the imaging operation of the imaging apparatus in FIG.
  • FIG. 16 is a diagram illustrating a configuration of a solid-state imaging device in the related art.
  • an imaging unit having a plurality of pixels arranged two-dimensionally, a row selection circuit that selects a pixel row composed of a plurality of pixels arranged in the horizontal direction, and the selected pixel row
  • a column circuit unit that temporarily holds pixel signals output from the plurality of pixels
  • a control unit that supplies a row address signal specifying a pixel row to be selected to the row selection circuit during a single row readout period.
  • the plurality of pixels include a plurality of first pixels that output pixel signals corresponding to the amount of received light, and a plurality of second pixels that output a fixed pixel signal
  • the imaging unit includes a plurality of first pixels.
  • the control unit includes a first row selection sequence including a row address signal corresponding to the effective unit, and a peripheral portion in which a plurality of second pixels are arranged. Second including a row address signal corresponding to the peripheral portion
  • a solid-state imaging device that generates a selection sequence so that the number of pixel rows specified simultaneously in the first row selection sequence and the second row selection sequence, or the number of times each row is specified differs, and supplies the selection sequence to the row selection circuit Will be described.
  • the driving mode of the solid-state imaging device is a pixel mixing mode in which the pixel signals of the effective portion are mixed and output
  • the output can be performed without reducing the number of pixel signals in the peripheral portion obtained as correction data. It is possible to suppress a decrease in accuracy of the business data.
  • FIG. 1 is a diagram showing an overall configuration of a solid-state imaging device 1 according to the first embodiment of the present invention.
  • the solid-state imaging device 1 includes an imaging unit 2 in which a plurality of pixels 11a and 11b are two-dimensionally arranged, a row selection circuit 3, a pixel current source circuit 4, a clamp circuit 5, and a sample hold (S / H).
  • the circuit 6 includes a multiplexer (MUX) 7, a column selection circuit 8, a control unit 9, an output amplifier 10, a vertical signal line 19, and a horizontal common signal line 39.
  • MUX multiplexer
  • the imaging unit 2 includes a pixel row including pixels 11 a and 11 b arranged in the horizontal direction, and includes an effective unit 16 and a peripheral unit 17.
  • the effective portion 16 pixels 11 a that photoelectrically convert incident light and output pixel signals according to the amount of received light are arranged in a two-dimensional manner.
  • the peripheral portion 17 is provided adjacent to the effective portion 16, and pixels 11 b that output a constant pixel signal are arranged in the peripheral portion 17.
  • the pixel 11b is a light-shielded pixel that is shielded in advance.
  • the pixel 11b is not limited to a light-shielded pixel, and may be a reference voltage output pixel that outputs a constant reference voltage.
  • the pixel 11a and the pixel 11b correspond to the first pixel and the second pixel in the present invention.
  • FIG. 1 shows an example of 24 pixels arranged in a 6 ⁇ 4 two-dimensional shape as an example, but the actual total number of pixels is several million or more.
  • the peripheral portion 17 is not limited to being provided at a position adjacent to one side of the effective portion 16 as shown in the figure.
  • the peripheral portion 17 is disposed on the peripheral side of the imaging portion 2 so as to surround the effective portion 16. Also good.
  • the pixel current source circuit 4 includes a pixel current source circuit basic unit 4a in each column in an array (see FIG. 3 to be described later), and supplies pixel signals output from the pixels 11a and 11b to the clamp circuit 5.
  • the clamp circuit 5 includes a basic unit 5a of the clamp circuit in each column in an array, and a fixed pattern generated in the pixels 11a and 11b from the pixel signal output from the pixel current source circuit 4 via the vertical signal line 19. Remove noise components.
  • the sample hold circuit 6 includes a basic unit 6a of the sample hold circuit in each column in an array, and holds the pixel signal output from the clamp circuit 5.
  • the pixel current source circuit 4, the clamp circuit 5, and the sample hold circuit 6 constitute a column circuit unit 20.
  • the multiplexer 7 switches the connection between the sample hold circuit 6 and the output amplifier 10.
  • the column selection circuit 8 includes a column selection signal line 40 and sequentially selects columns of the multiplexer 7 (see FIG. 4 described later).
  • the output amplifier 10 receives the output signal of the sample hold circuit 6 from the multiplexer 7 via the horizontal common signal line 39, amplifies it, and outputs it.
  • control unit 9 supplies the row selection circuit 3 with a row address signal ADR that selects pixels in units of pixel rows in accordance with the drive mode for driving the solid-state imaging device 1 and the region of the imaging unit 2 that performs readout.
  • the first row selection sequence including the row address signal corresponding to the valid portion 16 and the second row selection sequence including the row address signal corresponding to the peripheral portion 17 are divided into the first row selection sequence and the second row selection sequence.
  • the number of pixel rows specified simultaneously in the row selection sequence or the number of times each row is specified is generated and supplied to the row selection circuit 3.
  • FIG. 2 is a circuit diagram showing details of the pixels 11a arranged in the effective unit 16 of the imaging unit 2.
  • the pixel 11a includes a photodiode (PD) 21 that photoelectrically converts incident light and outputs a charge, a floating diffusion (FD) 23 that accumulates the charge generated by the photodiode 21, and outputs the accumulated charge as a voltage signal.
  • PD photodiode
  • FD floating diffusion
  • the reset transistor (reset Tr) 24 that resets the voltage indicated by the floating diffusion 23 to the initial voltage (VDD in this case), and the transfer transistor (transfer Tr) that supplies the charge output from the photodiode 21 to the floating diffusion 23 ) 22, an amplification transistor (amplification Tr) 25 that outputs a voltage that changes following the voltage indicated by the floating diffusion 23, and the output of the amplification transistor 25 when a row selection signal is received from the row selection circuit 3.
  • the supplied selection transistor includes a (selection Tr) 26, and a power supply line 27 for supplying a power supply voltage to the source or drain of the reset transistor 24 and amplifying transistor 25.
  • the pixel 11b has the same configuration as the pixel 11a.
  • the selection circuit 3 gives a row selection signal for line selection, a pixel reset signal for reset, and a charge transfer signal for read, and controls each operation.
  • the pixel circuit configuration of the pixel 11a of the effective portion 16 and the pixel 11b of the peripheral portion 17 are the same, but the pixel 11b of the peripheral portion 17 is a light-shielded pixel in which the photodiode 21 is shielded in advance. As a result, an output signal in a dark state is always obtained from the pixel 11b. Thereby, the pixel 11b outputs the reset voltage obtained by amplifying the voltage at the time of initialization and the read voltage obtained by amplifying the voltage at the time of reading (output voltage in the dark state) to the vertical signal line 19.
  • the pixel 11a includes a plurality of photodiodes 21 in a unit cell, and further has a structure in which any one or all of the floating diffusion 23, the reset transistor 24, and the amplification transistor 25 are shared in the unit cell, so-called many. You may have a pixel 1 cell structure.
  • the pixel 11a may constitute a so-called back-illuminated image sensor (back-illuminated solid-state imaging device) structure in which the pixel 11a is formed on the gate and wiring of the transistor and on the back surface side.
  • the pixel 11b is the same as the pixel 11a.
  • FIG. 3 is a diagram showing details of the column circuit unit 20 according to the first embodiment of the present invention, which includes the pixel current source circuit 4, the clamp circuit 5, and the sample hold circuit 6.
  • the function of the column circuit unit 20 is to temporarily hold a pixel signal indicated by the difference between the reset voltage and the read voltage output from the imaging unit 2 and then output the pixel signal to the multiplexer 7.
  • the basic unit 4a of the pixel current source circuit 4 includes a current source transistor 30 that supplies current to the amplification transistor 25 when a pixel signal is read from the pixels 11a and 11b, and a current source transistor. And a bias terminal 31 for supplying a current source bias potential to 30 gates.
  • the basic unit 5a of the clamp circuit 5 includes a sampling transistor 32 that inputs a pixel signal output from the pixel current source circuit 4, and a difference between a reset signal and a read signal from the input pixel signal.
  • a clamp capacitor 33 (capacitance value Ccl) for obtaining a pixel signal indicated by the following: a clamp voltage input terminal 35 for setting a terminal potential on the opposite side of the clamp capacitor 33 to a clamp potential (VCL); a clamp capacitor 33 and a clamp A clamp transistor 34 that switches connection with the voltage input terminal 35 is provided.
  • the sample hold circuit 6 has a basic unit 6a of the sample hold circuit in each column.
  • the basic unit 6a of the sample and hold circuit includes an S / H capacitor input transistor 36 for inputting the pixel signal output from the clamp circuit 5, and an S / H capacitor 37 (capacitance value Csh) for temporarily holding the pixel signal.
  • an S / H capacitor input signal is supplied to the gate of the S / H capacitor input transistor 36, the pixel signal output from the clamp circuit 5 is held in the S / H capacitor 37.
  • FIG. 4 is a diagram showing details of the multiplexer 7, the column selection circuit 8, and the output amplifier 10.
  • the multiplexer 7 has a multiplexer basic unit 7a in each column.
  • the basic unit 7 a of the multiplexer includes a column selection transistor 38, and each column selection transistor 38 is connected to a horizontal common signal line 39. That is, the column selection transistor 38 is arranged between each S / H capacitor 37 of the S / H circuit 6 and the horizontal common signal line 39.
  • the column selection transistor 38 sequentially applies the pixel signal held in the S / H capacitor 37 for each column in accordance with the column selection signal H [k] supplied to the gate. Output to 39.
  • the signal supplied to the output amplifier 10 via the horizontal common signal line 39 is amplified and then output to the outside of the solid-state imaging device 1 formed on the chip.
  • FIG. 5 is a diagram showing details of the row selection circuit 3.
  • the row selection circuit 3 includes an address decoder 41 and a row selection logic circuit 42 arranged for each row.
  • the address decoder 41 outputs a Hi (High) level signal to the row selection logic circuit 42 of the corresponding row in accordance with the row address signal supplied from the control unit 9.
  • the write enable signal WE of the flip-flop (FF) 43 of the corresponding row selection logic circuit 42 is input from the control unit 9, a Hi level signal is set in the flip-flop 43, and the row is selected. become.
  • the solid-state imaging device 1 is characterized by including an all-pixel readout mode that can be used for camera still photography and a pixel mixture mode that can be used for a moving image recording function as drive modes.
  • the signal reading operation of the effective unit 16 of the imaging unit 2 will be described.
  • FIG. 6 is a diagram illustrating the timing of each control signal supplied to the imaging unit 2 and the column circuit unit 20 in the readout operation of the effective unit 16 in the all-pixel readout mode.
  • the row selection signal supplied to the control line SEL [1] is at the Hi level, and the first row of the pixel rows is selected.
  • the charge transfer signal supplied to the control line TRAN [1] is Lo level, and the pixel reset signal supplied to the control line RST [1] is Hi level.
  • the charge transfer signal and the pixel reset signal supplied to the control line TRAN [1] and the control line RST [1] are at the Lo level. That is, since the transfer transistor 22 and the reset transistor 24 are off, the reset state of the FD potential is maintained.
  • the row selection signal supplied to the control line SEL [1] is at the Hi level, that is, the selection transistor 26 is on. Therefore, assuming that the threshold voltage of the amplification transistor 25 is Vth, Vfdrst ⁇ Vth is vertical as the reset voltage. It is output to the signal line 19 (precisely Vfdrst ⁇ Vth ⁇ , but ⁇ is omitted here).
  • both the clamp signal (gate signal of the clamp transistor 34) and the sampling signal (gate of the S / H capacitor input transistor 36) are at the Hi level, that is, the clamp transistor 34 and the S / H capacitor input. Since the transistor 36 is on, the other terminal of the clamp capacitor 33 and the potential of the S / H capacitor 37 are set to the clamp potential VCL.
  • the charge transfer signal supplied to the control line TRAN [1] is at the Hi level, that is, the transfer transistor 22 is turned on, so that the charge accumulated in the photodiode 21 is transferred to the floating diffusion 23, and at Vfdrst
  • the existing FD potential Vfd is lowered by a voltage Vfdsig corresponding to the signal charge amount, and becomes Vfdrst ⁇ Vfdsig.
  • the charge transfer signal supplied to the control line TRAN [1] is Lo level
  • the row selection signal supplied to the control line SEL [1] is Hi level, that is, the transfer transistor 22 is off and the selection transistor 26 is off.
  • Vfdrst ⁇ Vfdsig ⁇ Vth is output to the vertical signal line 19 as a read voltage.
  • the input voltage of the clamp capacitor 33 changes by Vfdsig.
  • the potential of the other terminal of the clamp capacitor 33 (capacitance value: Ccl), that is, the potential of the S / H capacitor 37 (capacitance value: Csh) is It changes by Vfdsig ⁇ Ccl / (Ccl + Csh).
  • This potential change is a voltage corresponding to the difference between the reset voltage and the read voltage in the vertical signal line 19, that is, a pixel signal.
  • the sampling signal becomes Lo level, and this pixel signal is accumulated in the S / H capacitor 37. As described above, the pixel signals for one row are held in the sample hold circuit 6.
  • the column selection signal H [1] of the first column of the column selection circuit 8 becomes Hi level, and the column selection transistor 38 of the first column of the multiplexer 7 is turned on.
  • the signal of the S / H capacitor 37 in the first column is output to the horizontal common signal line 39 and output to the outside via the output amplifier 10.
  • the column selection signal H [2] of the second column becomes Hi level, and the column selection transistor 38 of the second column of the multiplexer 7 is turned on.
  • the signal of the S / H capacitor 37 in the second column is output to the horizontal common signal line 39 and output to the outside via the output amplifier 10.
  • the column selection signal of each column of the column selection circuit 8 is set to Hi level, the signal of the S / H capacitor 37 of each column is sequentially output.
  • FIG. 7 is a diagram illustrating the timing of each control signal supplied to the imaging unit 2 and the column circuit unit 20 in the read operation of the effective unit 16 in the vertical 2-pixel horizontal 2-pixel mixing mode as an example of the pixel mixing mode. .
  • the row selection signal supplied to the control lines SEL [1] and SEL [2] is at the Hi level, and the first and second rows are selected. Further, the charge transfer signal supplied to the control lines TRAN [1] and TRAN [2] is Lo level, and the pixel reset signal supplied to the control lines RST [1] and RST [2] is Hi level, that is, one row.
  • the respective row address signals are sequentially supplied to the address decoder 41 of the row selection circuit 3, and the row selection logic circuit 42. This can be achieved by sequentially setting the selection states in the flip-flops 43.
  • the charge transfer signal and the pixel reset signal supplied to the control lines TRAN [1] and TRAN [2] and the control lines RST [1] and RST [2] are at the Lo level, that is, the first and second rows. Since the transfer transistor 22 and the reset transistor 24 of the eye are off, the reset state of the FD potential is maintained.
  • the row selection signals supplied to the control lines SEL [1] and SEL [2] are at the Hi level, that is, the selection transistors 26 in the first and second rows are on, so that Vfdrst ⁇ Vth is used as the reset voltage. It is output to the vertical signal line 19 (precisely Vfdrst ⁇ Vth ⁇ , but ⁇ is omitted here).
  • the reset voltage Vfdrst ⁇ Vth is output to one terminal of the clamp capacitor 33 of the clamp circuit 5 through the vertical signal line 19.
  • both the clamp signal (gate signal of the clamp transistor 34) and the sampling signal (gate signal of the S / H capacitor input transistor 36) are at the Hi level, that is, the clamp transistor 34 and the S / H capacitor. Since the input transistor 36 is on, the other terminal of the clamp capacitor 33 and the potential of the S / H capacitor 37 are set to the clamp potential VCL.
  • the charge transfer signals supplied to the control lines TRAN [1] and TRAN [2] are at the Hi level, that is, the transfer transistors 22 in the first row and the second row are turned on.
  • the charges accumulated in the photodiodes 21 in the row are transferred to the floating diffusion 23, and the respective FD potentials Vfd1 and Vfd2 are reduced by voltages Vfdsig1 and Vfdsig2 corresponding to these signal charge amounts, and Vfdrst ⁇ Vfdsig1 and Vfdrst ⁇ Vfdsig2.
  • the charge transfer signals supplied to the control lines TRAN [1] and TRAN [2] are at the Lo level, and the row selection signals supplied to the control lines SEL [1] and SEL [2] are at the Hi level.
  • Vfdrst ⁇ Vfdsig ⁇ Vth is output to the vertical signal line 19 as a read voltage.
  • This read signal corresponds to the mixed signal in the first and second rows. Due to the potential change of the vertical signal line 19, the input of the clamp capacitor 33 also changes by Vfdsig.
  • the clamp transistor 34 since the clamp transistor 34 is off, the potential of the other terminal of the clamp capacitor 33, that is, the potential of the S / H capacitor 37 changes by Vfdsig ⁇ Ccl / (Ccl + Csh).
  • This potential change is a voltage corresponding to the difference between the reset voltage and the read voltage in the vertical signal line 19, that is, an averaged pixel signal (vertical pixel mixed signal) in the first and second rows.
  • the row selection signal and the sampling signal supplied to the control lines SEL [1] and SEL [2] are set to the Lo level, and the vertical mixed pixel signals of the selected first row and second row are S / S. Accumulated in the H capacity 37.
  • the sampling signal is at the Lo level
  • the column selection signals H [1] and H [2] of the first column and the second column of the column selection circuit 8 are at the Hi level
  • the first column of the multiplexer 7 The column selection transistor 38 in the second column is turned on.
  • the averaged pixel signal (horizontal pixel mixed signal) of the S / H capacitor 37 in the first column and the S / H capacitor 37 in the second column is output to the horizontal common signal line 39, via the output amplifier 10.
  • Output to the outside That is, a vertical two-pixel horizontal two-pixel mixed signal in which pixel signals of the pixels in the first and second columns of the first and second rows are mixed is output.
  • the column selection signals H [3] and H [4] for the third column and the fourth column are set to the Hi level, and the column selection transistors 38 for the third column and the fourth column of the multiplexer 7 are turned on.
  • the horizontal pixel mixed signal of the S / H capacitor 37 in the third column and the S / H capacitor 37 in the fourth column is output to the horizontal common signal line 39, and the first and second rows are output via the output amplifier 10.
  • a vertical 2-pixel horizontal 2-pixel mixed signal obtained by mixing the pixel signals of the pixels in the third and fourth columns is output to the outside.
  • the column selection signal of each column of the column selection circuit 8 is set to Hi level, the signal of the S / H capacitor 37 of each column is sequentially output.
  • the clamp potential VCL of the column circuit unit 20 has a distribution in the horizontal direction, and as a result, the reference potential of each column is different for each column. This means that nonuniformity in the horizontal direction occurs in the dark state output that is the reference of the output image, and horizontal shading occurs in the image.
  • FIG. 8 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the all-pixel readout mode.
  • a row selection sequence for one frame period in which pixel signals for one screen are output is shown by taking the imaging unit 2 of 16 rows as an example.
  • FIG. 5A shows the row numbers of the pixel rows corresponding to the effective portion 16 and the peripheral portion 17.
  • Line numbers 1 to 10 indicate the peripheral portion 17, and line numbers 11 to 16 indicate the effective portion 16.
  • FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A.
  • the sequence corresponding to the row numbers 11 to 16 is the first row selection.
  • the sequence corresponding to the row numbers 1 to 10 is the second row selection sequence.
  • a period during which one row address signal is output is a row reading period. Since signals other than the row address signal are the same as those in FIG. 6, the description thereof is omitted here.
  • one row address signal is output in a single row readout period in both the first row selection sequence and the second row selection sequence in one frame period.
  • Sequence that is, a sequence including row address signals for sequentially designating one pixel row at a time.
  • the row selection circuit 3 sequentially selects the pixels 11a of the effective portion 16 from the row numbers 11 to 16 one by one in order, and the peripheral portion 17 similarly to the effective portion 16 has the pixels 11b of the peripheral portion 17 as well.
  • FIG. 9 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the vertical 2-pixel horizontal 2-pixel mixing mode which is an example of the pixel mixing mode.
  • FIG. 8A shows the row numbers of the pixel rows corresponding to the effective portion 16 and the peripheral portion 17 as in FIG.
  • Line numbers 1 to 10 indicate the peripheral portion 17, and line numbers 11 to 16 indicate the effective portion 16.
  • FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A.
  • the sequence corresponding to the row numbers 11 to 16 is the first row selection.
  • the sequence corresponding to the row numbers 1 to 10 is the second row selection sequence. Since signals other than the row address signal are the same as those in FIG. 7, the description thereof is omitted here.
  • the first row selection sequence a sequence in which two different row address signals are output in a single row readout period, that is, two pixels.
  • a sequence including a row address signal that sequentially designates each row is formed.
  • the second row selection sequence a sequence in which one pixel row is designated in a single row readout period, that is, a sequence including a row address signal that designates one row at a time is configured. Therefore, the first row selection sequence and the second row selection sequence differ in the number of pixel rows specified at the same time.
  • the row selection circuit 3 selects two rows from the row numbers 11 to 16 simultaneously in the valid portion 16 and selects one row from the row numbers 1 to 10 in the peripheral portion 17 one by one.
  • pixel signals used for correction data having the same number of physical pixel rows as that of the peripheral portion 17 can be obtained. This means that correction data of a plurality of rows can be obtained in the pixel mixture mode as well as the all-pixel readout mode, and horizontal shading correction data can be created with high accuracy.
  • the pixel signals of the peripheral portion 17 can be output without being mixed in accordance with the mixing of the pixel signals of the effective portion 16.
  • the number of pixel rows in the peripheral portion 17 is the same as in the prior art, and the size of parasitic components in the circuit is also the same. This means that high image quality in the pixel mixing mode can be realized with low power consumption.
  • the number of pixels for mixing pixel signals may be changed without being limited to the mixing of pixel signals of two vertical pixels and two horizontal pixels.
  • the effective portion 16 and the peripheral portion 17 do not have to have the same number of rows and pixels in which pixel signals are mixed, and may have different numbers of rows and pixels. For example, a sequence for selecting three or more rows at the same time in the first row selection sequence, and a sequence for selecting two or more rows at the same time in the second row selection sequence, and the valid portion 16 mixes the pixel signals of three rows. In the peripheral portion 17, the pixel signals of two rows may be mixed and output.
  • the second embodiment is different from the first embodiment in that in the vertical two-pixel horizontal two-pixel mixed mode which is an example of the pixel mixed mode shown in the first embodiment, two or more pixel rows are single.
  • the Nth pixel row (N is an integer greater than or equal to 1) is designated with the Mth pixel row (M is an integer greater than or equal to 1 and M ⁇ N) in a single row readout period.
  • the point is that the value of M is changed multiple times during one frame period.
  • the circuit configuration of the solid-state imaging device, the readout operation of the effective part, and the readout operation of the peripheral part in the all-pixel readout mode are the same as in the first embodiment.
  • FIG. 10 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the vertical 2-pixel horizontal 2-pixel mixed mode.
  • the row selection sequence for one frame period in which pixel signals for one screen are output is shown by taking the imaging unit 2 of 16 rows as an example.
  • FIG. 6A shows pixel rows provided in the effective portion 16 and the peripheral portion 17 with consecutive row numbers.
  • the row numbers N and M of the Nth pixel row (N is an integer of 1 or more) and the Mth pixel row (M is 1 or more and M ⁇ N) correspond to any of these.
  • Row numbers 1 to 10 indicate the peripheral portion 17, and row numbers 11 to 16 indicate the pixel rows of the effective portion 16.
  • FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A.
  • the sequence corresponding to the row numbers 11 to 16 is the first row selection.
  • the sequence corresponding to the row numbers 1 to 10 is the second row selection sequence.
  • selection of line number 1 is the second time, but line number 2 is selected at the same time in the first selection of line number 1, whereas line number 6 is selected at the same time in the second selection of line number 1.
  • the combined row is different from the first time.
  • line numbers 2 and 7, line numbers 3 and 8, line numbers 4 and 9, and line numbers 5 and 10 are selected, respectively.
  • ten sets of pixel signals are obtained as the pixel signals used for the correction data.
  • the same number of pixel signals as the pixel signals for 10 rows obtained when read out are obtained.
  • row numbers 11 and 12, row numbers 13 and 14, and row numbers 15 and 16 are selected in order according to the first row selection sequence. Then, the pixel signal of the effective unit 16 is read out. As a result, the number of times each row is designated is 1 in the first row selection sequence, and the number of times each row is designated is 2 in the second row selection sequence. It is possible to obtain the same number of pixel signals as when reading.
  • Such a sequence makes it possible to create correction data for horizontal shading with high accuracy and to realize a high-quality mixed mode.
  • the number of rows designated at the same time in the reading of the effective portion 16 and the reading of the peripheral portion 17 is the same, there is no concern that an offset will be generated between the outputs due to the difference in the drive mode, and the subsequent correction process is easier. There is also an advantage of becoming.
  • the pixel signals of the two pixel rows are mixed and designated twice, but the number and the number of pixel rows to be mixed may be changed.
  • pixel signals of three pixel rows may be mixed and specified three times.
  • the third embodiment is different from the first embodiment in that a column ADC and a digital mixer are provided instead of the multiplexer and the column selection circuit shown in the first embodiment.
  • FIG. 11 is a diagram showing an overall configuration of a solid-state imaging device according to the third embodiment of the present invention.
  • the solid-state imaging device 101 includes an imaging unit 102, a row selection circuit 103, a pixel current source circuit 104, a clamp circuit 105, and a sample hold (S / H) circuit 106.
  • the pixel current source circuit 104, the clamp circuit 105, and the sample hold circuit 106 constitute a column circuit unit 120.
  • the output unit output amplifier
  • the basic units 144a of the column ADC 144 are arranged in an array in the column direction (see FIG. 12 described later), and the row-unit analog pixel signals held in the sample hold circuit 106 are converted into digital signals.
  • the basic units (not shown) of the digital mixer are arranged in an array in the column direction, and the output data of the column ADC 144 is mixed.
  • the imaging unit 102 includes a peripheral unit having an effective unit 116 in which pixels 111a that output pixel signals corresponding to the amount of received light are two-dimensionally arranged, and a pixel 111b that is a light-shielding pixel and always obtains a dark state output. 117.
  • the pixel 111a and the pixel 111b correspond to the first pixel and the second pixel in the present invention, respectively.
  • FIG. 12 is a diagram showing the configuration of the column ADC 144.
  • the column ADC 144 includes a column ADC input terminal 146, a comparator 147, a ramp waveform generation circuit 148, a latch 149, and a counter 150.
  • a basic unit 144a of a column ADC 144 is arranged in each vertical signal line 119.
  • the pixel signal from the sample hold circuit 106 input to the column ADC input terminal 146 is input to the comparator 147.
  • the comparator 147 compares the ramp waveform generated by the ramp waveform generation circuit 148 with the pixel signal, and outputs a Hi level latch signal when the ramp waveform is lower than the pixel signal.
  • the latch 149 has a basic unit corresponding to the number of bits of the digital value after AD conversion.
  • the output of the counter 150 is input to each basic unit, and the latch signal from the comparator 147 is switched from the Hi level to the Lo level. When you write it.
  • the counter 150 counts up in synchronization with the ramp waveform.
  • the digital mixer 145 mixes pixel signals of a plurality of columns that are AD-converted by the basic unit 144a of the column ADC 144 in each column. As a result, a mixed pixel signal having a digital value in which pixel signals in a plurality of rows and columns are mixed is generated.
  • a pixel signal is input to the column ADC input terminal 146 of the column ADC 144, the ramp waveform output from the ramp waveform generation circuit 148 is set to the minimum value of the pixel signal, and the counter value of the counter 150 is set. Set to 0.
  • the latch signal output from the comparator 147 is at the Hi level.
  • the ramp waveform level starts to rise.
  • the rising slope is set to reach the maximum value of the pixel signal at timing t3.
  • the counter value of the counter 150 is also counted up in synchronization with the ramp waveform rise.
  • the latch signal is switched to the Lo level, and the counter value at that time is written in the latch 149.
  • the counter value is written in the latch 149.
  • the counter value (digital value) written in the latch 149 is a value corresponding to the magnitude of the pixel signal. .
  • the above operation is performed in parallel in the basic unit 144a of the column ADC 144 provided in each column, and analog pixel signals for one row are AD-converted in parallel, and the digital signal is held in the latch 149 in each column. .
  • the solid-state imaging device 101 includes an all-pixel readout mode for still image shooting and a pixel mixing mode for moving image shooting as drive modes. Next, the signal reading operation of the valid unit 116 will be described for each driving mode.
  • pixel signals for one row are read out from the imaging unit 102 and are held in the sample hold circuit 106.
  • the column ADC 144 performs AD conversion on the pixel signals for one row.
  • these digital signals are sequentially output to the outside of the chip via an output unit not shown in FIG. If the above operation is repeated for the number of rows of the effective unit 116, a pixel signal is output from the pixels 111a of the entire imaging unit 102.
  • the imaging unit 102 first, two rows are simultaneously selected by the imaging unit 102, the pixel signals of the pixels 111b for two rows are read, and the two rows mixed by the vertical signal line 119 are read.
  • the mixed pixel signal is held in the sample hold circuit 106.
  • the mixed signal is AD converted by the column ADC 144.
  • pixel signals (digital values) for two columns are mixed by the digital mixer 145. Finally, these mixed pixel signals are sequentially output to the outside of the chip via an output unit not shown in FIG. If the above operation is repeated by the number of pixel rows / 2 of the effective unit 116, the pixel signal of the entire imaging unit 102 is output.
  • the clamp potential of the column circuit unit 120 is distributed in the horizontal direction, and as a result, the reference potential of each column is different for each column. This means that nonuniformity in the horizontal direction occurs in the dark state output that is the reference of the output image, and horizontal shading occurs in the image.
  • the peripheral part 117 sequentially selects the pixels 111b from which pixel signals are read from the row number 1 in the same manner as the effective part 116. Thereby, the pixel signal used for the correction data having the same number of rows as the physical number of the peripheral portion 117 is obtained.
  • the effective unit 116 selects two rows at the same time, but the peripheral unit 117 selects one row from row number 1 at a time. select.
  • pixel signals used for correction data having the same number of rows as the physical number of the peripheral portion 117 can be obtained.
  • correction data for multiple rows can be obtained in the pixel mixing mode as well as the all-pixel readout mode, and horizontal shading correction data can be created with high accuracy, and a high-quality pixel mixing mode can be realized. become.
  • correction of horizontal shading may be performed by incorporating a digital signal processing circuit in the solid-state imaging device.
  • FIG. 14 is a diagram illustrating an overall configuration of an imaging apparatus (camera) according to the fourth embodiment of the present invention.
  • the imaging device 151 includes a solid-state imaging device 1 described in the first embodiment, an analog front end (AFE) 152, a digital signal processor (DSP) 153, and a memory 154.
  • AFE analog front end
  • DSP digital signal processor
  • the analog front end 152 converts the pixel signals (analog signals) of the effective unit 16 and the peripheral unit 17 output from the solid-state imaging device 1 into digital signals so that the digital image signal processing device can handle them.
  • the digital signal processor 153 corrects the pixel signal of the effective unit 16 converted into the digital signal with the correction data stored in the memory 154.
  • the memory 154 is a pixel signal for the peripheral portion 17 output from the solid-state imaging device 1, that is, a peripheral portion data for newly generating correction data and a correction portion generated using the pixel signal of the peripheral portion 17. Memorize data.
  • the imaging device 151 is driven by an all-pixel readout mode that can be used for camera still photography and a pixel mixture mode that can be used for a moving image recording function.
  • FIG. 15 shows a flowchart for explaining the operation in the all-pixel readout mode in the imaging apparatus 151.
  • step 1 peripheral data (pixel signals) are read out line by line from the pixels 11b arranged in the peripheral part 17 shown in FIG. 1 (ST1). At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11b in the selected row.
  • step 2 new correction data is created using the peripheral data detected in step 1 and the correction data value stored in the memory 154 (ST2).
  • step 3 it is determined whether or not the reading of the peripheral portion 17 is completed. If not, the process returns to step 1 (ST3). As described above, when Step 1 and Step 2 are performed on all the rows of the peripheral portion 17, correction data including the average of the output of each column of the peripheral portion 17 is obtained. This correction data corresponds to dark horizontal shading data. This correction data is held in the memory 154.
  • step 4 pixel signals are read out row by row from the pixels 11a arranged in the effective section 16 (ST4). At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11a in the selected row.
  • step 5 horizontal shading correction is performed by subtracting the correction data held in the memory 154 from the data obtained in step 4 (ST5).
  • step 6 it is determined whether or not the readout of the pixel signal from the pixels 11a in each pixel row of the effective unit 16 is completed. If not, the process returns to step 4 (ST6).
  • Step 4 and Step 5 are performed on the entire effective section 16, a high-quality image in which horizontal shading is corrected on the entire effective section 16 can be obtained.
  • step 1 peripheral data is read line by line from the pixels 11b arranged in the peripheral part 17 shown in FIG. At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11b in the selected row (ST1).
  • step 2 new correction data is created using the peripheral data detected in step 1 and the correction data value stored in the memory 154 (ST2).
  • step 3 it is determined whether or not the reading of the peripheral portion 17 is completed. If not, the process returns to step 1 (ST3). As described above, when Step 1 and Step 2 are performed on all the rows of the peripheral portion 17, correction data including the average of the output of each column of the peripheral portion 17 is obtained. This correction data corresponds to dark horizontal shading data. This correction data is held in the memory 154.
  • step 4 pixel signals are read out row by row from the pixels 11a arranged in the effective portion 16 (ST4).
  • the imaging unit 2 of the solid-state imaging device 1 two rows are simultaneously selected, and pixel signals are read from the pixels 11a in the selected row.
  • a pixel mixture signal is output from the solid-state imaging device 1 by the mixing operation of the vertical and horizontal signals at the time of signal readout.
  • step 5 horizontal shading correction is performed by subtracting the correction data held in the memory 154 from the data obtained in step 4 (ST5).
  • step 6 it is determined whether or not the readout of the pixel signal from the pixels 11a in each pixel row of the effective unit 16 is completed. If not, the process returns to step 4 (ST6).
  • Step 4 and Step 5 are performed on the entire effective portion 16, a high-quality mixed image in which horizontal shading is corrected on the entire effective portion 16 can be obtained.
  • the correction data at this time is also generated from a large number of peripheral data equivalent to the all-pixel readout mode, and high-precision correction is possible.
  • the pixels arranged in the effective portion and the peripheral portion are not limited to the number and arrangement described above, and may be changed as appropriate.
  • the peripheral pixels are not limited to light-shielded pixels that are shielded in advance, but may be pixels that output a constant reference voltage.
  • the readout of the pixel signals of the effective portion and the peripheral portion in the pixel mixture mode is not limited to the readout method shown in the above-described embodiment, and other methods may be used.
  • the present invention is not limited to the vertical two-pixel horizontal two-pixel mixed mode in which pixel signals of two vertical pixels and two horizontal pixels are mixed, and other mixed modes may be used.
  • the combination of rows for reading out pixel signals by mixing is not limited to the above-described embodiment, and any combination may be used.
  • the configuration of the solid-state imaging device and the imaging device according to the present invention is not limited to the above-described embodiment, and may be any configuration.
  • the pixel current source circuit, the clamp circuit, the sample hold circuit, the multiplexer, the column selection circuit, the column ADC, the digital mixer, or a combination thereof may be changed.
  • the solid-state imaging device according to the present invention includes other embodiments realized by combining arbitrary components in the above-described embodiments, and other embodiments that do not depart from the gist of the present invention. Modifications obtained by various modifications conceived by a trader and various devices including the solid-state imaging device according to the present invention are also included in the present invention. For example, a movie camera including the solid-state imaging device according to the present invention is also included in the present invention.
  • the solid-state imaging device according to the present invention is useful as an image sensor for imaging equipment that requires high image quality and high functionality such as a digital single-lens reflex camera and a high-end compact camera.

Abstract

Provided are a solid-state image capture device and an image capture device, comprising an image capture unit (2), further comprising an effective portion (16) and a peripheral portion (17); a row selection circuit (3) that selects pixels (11a, 11b) on a row unit basis; a column circuit unit (20) that temporarily retains outputted pixel signals; and a control unit (9) that supplies row address signals that designate rows to be selected to the row selection circuit (3). With respect to at least one drive mode, the control unit (9) generates a first row selection sequence that includes the row address signals corresponding to the effective portion (16) and a second row selection sequence that includes the row address signals corresponding to the peripheral portion (17), and supplies same to the row selection circuit (3) such that either the number of pixel rows simultaneously designated in each of the first row selection sequence and the second row selection sequence, or the number of cycles within each designated row of each respective row selection sequence, varies among the row selection sequences.

Description

固体撮像装置および撮像装置Solid-state imaging device and imaging device
 本発明は、入射された光を光電変換する画素が半導体基板上に2次元に配置された固体撮像装置に関し、特に高画質な画素混合画像を得ることができる固体撮像装置を実現することを目的とする。 The present invention relates to a solid-state imaging device in which pixels that photoelectrically convert incident light are two-dimensionally arranged on a semiconductor substrate, and particularly to achieve a solid-state imaging device that can obtain a high-quality pixel mixture image. And
 MOS(Metal Oxide Semiconductor)型イメージセンサは高速、高感度など優れた特徴があり、MOS型イメージセンサを搭載したデジタル一眼レフカメラ(DSLR:Digital Single-Lens Reflex Camera)の市場は近年急速に拡大している。また、最近は静止画撮影機能だけでなく、ハイビジョン動画記録機能を搭載したDSLRも増えてきている。これは静止画撮影用の全画素読み出しモードだけでなく、動画撮影用の画素混合モードも高画質であることがMOS型イメージセンサで必要になっていることを意味する。 MOS (Metal Oxide Semiconductor) type image sensors have excellent features such as high speed and high sensitivity, and the market for digital single-lens reflex cameras (DSLR) equipped with MOS type image sensors has expanded rapidly in recent years. ing. Recently, DSLRs equipped with not only a still image shooting function but also a high-definition video recording function are increasing. This means that not only the all-pixel readout mode for still image shooting but also the pixel mixing mode for moving image shooting needs to have high image quality in the MOS image sensor.
 図16は、特許文献1に記載されている従来の固体撮像装置の全体構成を示す図である。同図に示す固体撮像装置は、撮像部200、画素202、画素読み出し回路250から構成される。 FIG. 16 is a diagram showing an overall configuration of a conventional solid-state imaging device described in Patent Document 1. The solid-state imaging device shown in FIG. 1 includes an imaging unit 200, pixels 202, and a pixel readout circuit 250.
 図16に示すように、画素202は、フォトダイオード211と、リセットトランジスタ214と、増幅トランジスタ215と、選択トランジスタ216とを備えている。また、画素読み出し回路250は、電流源253と、グランド接続トランジスタ254と、負荷トランジスタ255と、電源接続トランジスタ256とを備えている。また、画素信号の出力配線として、第1垂直配線221と、第2垂直配線222とを備え、出力端子として第1画素出力257、第2画素出力258とを備えている。 As shown in FIG. 16, the pixel 202 includes a photodiode 211, a reset transistor 214, an amplification transistor 215, and a selection transistor 216. The pixel readout circuit 250 includes a current source 253, a ground connection transistor 254, a load transistor 255, and a power supply connection transistor 256. In addition, a first vertical wiring 221 and a second vertical wiring 222 are provided as output wirings for pixel signals, and a first pixel output 257 and a second pixel output 258 are provided as output terminals.
 従来の固体撮像装置の動作を説明する。駆動モードは全画素読み出しモードと画素混合モードの2種類である。 The operation of a conventional solid-state imaging device will be described. There are two drive modes, an all-pixel readout mode and a pixel mixture mode.
 全画素読み出しモードでは、グランド接続トランジスタ254をオフ、電源接続トランジスタ256をオンに設定する。画素の増幅トランジスタ215の選択トランジスタ側のソース・ドレイン端子には第1垂直配線221を介して電流源253が接続され、反対側のソース・ドレイン端子には第2垂直配線222を介して電源が接続される。この構成では画素202の増幅トランジスタ215と電流源253とがソースフォロアアンプとして機能し、第1画素出力257から画素信号を読み出す。このとき、1行ずつ順次選択トランジスタ216をオンにして画素信号を読み出せば、全ての画素202の信号が読み出される。 In the all-pixel readout mode, the ground connection transistor 254 is turned off and the power connection transistor 256 is turned on. A current source 253 is connected to the source / drain terminal on the selection transistor side of the amplification transistor 215 of the pixel via the first vertical wiring 221, and a power source is connected to the source / drain terminal on the opposite side via the second vertical wiring 222. Connected. In this configuration, the amplification transistor 215 and the current source 253 of the pixel 202 function as a source follower amplifier, and a pixel signal is read from the first pixel output 257. At this time, if pixel signals are read by sequentially turning on the selection transistors 216 row by row, the signals of all the pixels 202 are read.
 一方、画素混合モードでは、グランド接続トランジスタ254をオン、電源接続トランジスタ256をオフに設定する。画素202の増幅トランジスタ215の選択トランジスタ216側のソース・ドレイン端子には第1垂直配線221を介してグランドが、反対側のソース・ドレイン端子には第2垂直配線222を介して負荷トランジスタ255が接続される。この構成では画素202の増幅トランジスタ215と負荷トランジスタ255でソース接地アンプとして機能し、2行の選択トランジスタ216を同時にオンすれば、上下2画素の混合信号が第2画素出力258から得られる。2行ずつ順次選択トランジスタ216をオンにして画素信号を読み出せば、撮像部200全体の混合信号が読み出される。 On the other hand, in the pixel mixed mode, the ground connection transistor 254 is turned on and the power supply connection transistor 256 is turned off. A load transistor 255 is connected to the source / drain terminal on the selection transistor 216 side of the amplification transistor 215 of the pixel 202 via the first vertical wiring 221 and a load transistor 255 is connected to the opposite source / drain terminal via the second vertical wiring 222. Connected. In this configuration, the amplification transistor 215 and the load transistor 255 of the pixel 202 function as a source-grounded amplifier, and if two rows of selection transistors 216 are simultaneously turned on, a mixed signal of two upper and lower pixels is obtained from the second pixel output 258. If the pixel signals are read by sequentially turning on the selection transistors 216 two rows at a time, the mixed signal of the entire imaging unit 200 is read.
 なお、撮像部200はカメラにおいて画像情報として使われる有効部とその周辺に配置された遮光画素などの周辺部からなるが、それぞれの駆動モードの動作は有効部と周辺部で同一である。 Note that the imaging unit 200 includes an effective part used as image information in the camera and a peripheral part such as a light-shielding pixel arranged around the effective part. The operation of each drive mode is the same in the effective part and the peripheral part.
米国特許第7091466号明細書US Pat. No. 7,091,466
 一般に、DSLR向けのような大きなセンサでは、各列の読み出し回路のオフセット電圧にばらつきが存在する。これは、基準レベルとなる暗出力において水平方向にオフセット成分の変動が現れることを意味し、画像の水平シェーディングとなり画質の低下につながる。 Generally, in a large sensor for DSLR, there is variation in the offset voltage of the readout circuit in each column. This means that the offset component fluctuates in the horizontal direction in the dark output at the reference level, resulting in horizontal shading of the image, leading to deterioration in image quality.
 この水平シェーディングの対策としては、撮像部の周辺部に配置された遮光画素の出力信号により補正用データを生成し、後段のデジタル信号処理プロセッサで補正を行うという方法がある。 As a countermeasure against this horizontal shading, there is a method in which correction data is generated from an output signal of a light-shielded pixel arranged in the peripheral portion of the image pickup unit, and correction is performed by a digital signal processor in the subsequent stage.
 しかし、従来技術の固体撮像装置は、画素混合モードでは補正用データを作成するための行数が全画素読み出しモードに比べ大幅に少なくなる。画素読み出し信号には電源のゆれ、デバイス固有ノイズなどによるランダムノイズが含まれるため、補正用の行数が少なくなることは補正用データの精度低下につながり、画質が低下するという課題が発生する。 However, in the solid-state imaging device of the prior art, the number of rows for creating correction data in the pixel mixture mode is significantly smaller than that in the all-pixel readout mode. Since the pixel readout signal includes random noise due to power fluctuation, device-specific noise, and the like, a reduction in the number of correction lines leads to a reduction in accuracy of the correction data, resulting in a problem that image quality is deteriorated.
 また、補正用行数の低減を補う手段として物理的に行数を増加させるという手段もあるが、これは回路の寄生容量の増加につながり消費電力の観点より望ましくない。 There is also a means of physically increasing the number of rows as a means to compensate for the reduction in the number of correction rows, but this leads to an increase in circuit parasitic capacitance, which is not desirable from the viewpoint of power consumption.
 かかる課題を鑑み、本発明は、画素混合モードにおける補正用データの精度低下を抑制した固体撮像装置を提供することを目的とする。 In view of such a problem, an object of the present invention is to provide a solid-state imaging device that suppresses a reduction in accuracy of correction data in the pixel mixing mode.
 上記課題を解決するために本発明の一形態における固体撮像装置は、2次元状に配列された複数の画素を有する撮像部と、水平方向に配列された前記複数の画素により構成される画素行を選択する行選択回路と、選択された画素行の前記複数の画素から出力される画素信号を一時保持する列回路部と、単一の行読み出し期間中、選択すべき画素行を指定する行アドレス信号を前記行選択回路に供給する制御部とを備え、前記複数の画素は、受光量に応じた画素信号を出力する複数の第1画素と、一定の画素信号を出力する複数の第2画素とを含み、前記撮像部は、前記複数の第1画素が配置された有効部と、前記複数の第2画素が配置された周辺部とを有し、少なくとも1つの前記駆動モードにおいて、前記制御部は、前記有効部に対応する前記行アドレス信号を含む第1行選択シーケンスと、前記周辺部に対応する前記行アドレス信号を含む第2行選択シーケンスとを、前記第1行選択シーケンスと前記第2行選択シーケンスにおいて同時に指定される画素行数、または、各行が指定される回数が異なるように生成して、前記行選択回路に供給する。 In order to solve the above problems, a solid-state imaging device according to an embodiment of the present invention is a pixel row including an imaging unit having a plurality of pixels arranged in a two-dimensional manner and the plurality of pixels arranged in a horizontal direction. A row selection circuit that selects a pixel circuit, a column circuit unit that temporarily holds pixel signals output from the plurality of pixels of the selected pixel row, and a row that designates a pixel row to be selected during a single row readout period A controller that supplies an address signal to the row selection circuit, wherein the plurality of pixels includes a plurality of first pixels that output a pixel signal corresponding to the amount of received light, and a plurality of second pixels that output a fixed pixel signal. The imaging unit includes an effective unit in which the plurality of first pixels are arranged and a peripheral unit in which the plurality of second pixels are arranged, and in at least one of the driving modes, The control unit corresponds to the effective unit. The first row selection sequence including the row address signal and the second row selection sequence including the row address signal corresponding to the peripheral portion are simultaneously specified in the first row selection sequence and the second row selection sequence. The number of pixel rows to be generated or the number of times each row is designated is generated and supplied to the row selection circuit.
 この構成によれば、有効部の画素信号と周辺部の画素信号が出力されるときに、それぞれのシーケンスで行が選択されるので、画像の形成に使用される有効部の画素信号と補正用データの生成に使用される周辺部の画素信号が、それぞれに適したシーケンスで出力される。また、固体撮像装置の駆動モードが、有効部の画素信号を混合して出力する画素混合モードであっても、補正用データとして得られる周辺部の画素信号の数を減らすことなく出力でき、補正用データの精度低下を抑制することが可能である。 According to this configuration, when the pixel signal of the effective portion and the pixel signal of the peripheral portion are output, the rows are selected in the respective sequences. Therefore, the pixel signal of the effective portion used for image formation and the correction signal are used. Peripheral pixel signals used for data generation are output in a sequence suitable for each. Even if the driving mode of the solid-state imaging device is a pixel mixing mode that mixes and outputs the pixel signals of the effective part, it can be output without reducing the number of pixel signals in the peripheral part obtained as correction data. It is possible to suppress a decrease in accuracy of the business data.
 ここで、前記制御部は、前記第1行選択シーケンスにおいて単一の行読み出し期間に指定される画素行の数が、前記第2行選択シーケンスにおいて単一の行読み出し期間に指定される画素行の数より多くなるように、前記第1行選択シーケンスおよび前記第2行選択シーケンスを生成するようにしてもよい。 Here, the control unit is configured such that the number of pixel rows designated in a single row readout period in the first row selection sequence is a pixel row designated in a single row readout period in the second row selection sequence. The first row selection sequence and the second row selection sequence may be generated so as to be greater than
 また、前記制御部は、1フレーム期間において、前記第1行選択シーケンスにより各画素行が指定される回数が、前記第2行選択シーケンスにより各画素行が指定される回数より少なくなるように、前記第1行選択シーケンスおよび前記第2行選択シーケンスを生成するようにしてもよい。 Further, the control unit may be configured such that the number of times each pixel row is designated by the first row selection sequence is smaller than the number of times each pixel row is designated by the second row selection sequence in one frame period. The first row selection sequence and the second row selection sequence may be generated.
 この構成によれば、周辺部において、同時に画素信号が読み出される画素行の数が少なく、または、各画素行が指定される回数が多くなるので、固体撮像装置の駆動モードが、有効部の画素信号を混合して出力する画素混合モードであっても、補正用データの精度低下を抑制することが可能である。 According to this configuration, in the peripheral portion, the number of pixel rows from which pixel signals are simultaneously read out is small, or the number of times each pixel row is designated increases. Even in the pixel mixing mode in which signals are mixed and output, it is possible to suppress a decrease in accuracy of the correction data.
 ここで、前記制御部は、前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、前記第2行選択シーケンスでは、1の画素行を単一の行読み出し期間に指定するようにしてもよい。 Here, in the first row selection sequence, the control unit designates two or more pixel rows as a single row readout period, and in the second row selection sequence, reads one pixel row as a single row. You may make it designate in a period.
 この構成によれば、有効部の画素信号の読み出しでは、2行以上の画素行の画素信号が混合して出力され、周辺部の画素信号の読み出しでは、1行ずつ画素行の画素信号が出力されるので、補正用データの生成に使用される周辺部の画素行の画素信号が混合されることなく出力される。これにより、画素混合モードにおける補正用データの数が減少することなく、補正用データの精度低下を抑制することができる。 According to this configuration, pixel signals of two or more pixel rows are mixed and output when reading the pixel signals of the effective portion, and pixel signals of the pixel rows are output one by one when reading the pixel signals of the peripheral portion. Therefore, the pixel signals of the peripheral pixel rows used for generating the correction data are output without being mixed. Thereby, it is possible to suppress a decrease in accuracy of the correction data without reducing the number of correction data in the pixel mixing mode.
 また、前記制御部は、前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、前記第2行選択シーケンスでは、前記第1行選択シーケンスで指定される画素行の数と異なる2以上の画素行を単一の行読み出し期間に指定するようにしてもよい。 Further, the control unit designates two or more pixel rows in a single row readout period in the first row selection sequence, and pixels designated in the first row selection sequence in the second row selection sequence. Two or more pixel rows different from the number of rows may be designated in a single row readout period.
 また、前記制御部は、前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、前記第2行選択シーケンスでは、第N画素行(Nは1以上の整数)を単一の行読み出し期間に第M画素行(Mは1以上の整数、かつ、M≠N)と共に指定し、1フレーム期間において、第N画素行をMの値を変更して複数回指定するようにしてもよい。 In the first row selection sequence, the control unit designates two or more pixel rows as a single row readout period, and in the second row selection sequence, the control unit designates the Nth pixel row (N is an integer of 1 or more). ) Together with the Mth pixel row (M is an integer equal to or greater than 1 and M ≠ N) in a single row readout period, and the Nth pixel row is changed multiple times by changing the value of M in one frame period. You may make it specify.
 この構成によれば、有効部および周辺部の画素信号の読み出しにおいて、第N画素行と第M画素行の画素信号が混合して出力されるので、読み出し回数を減少して効率よく画素信号を得ることができる。また、周辺部の画素信号の読み出しでは、第N画素行と第M画素行の画素信号が異なる組み合わせで複数回混合して出力されるため、画素混合モードであっても、補正用データの生成に使用される周辺部の画素信号の数を減らすことなく、補正用データの精度低下を抑制することができる。 According to this configuration, since the pixel signals of the Nth pixel row and the Mth pixel row are mixed and output when reading out the pixel signals of the effective portion and the peripheral portion, the pixel signals are efficiently output by reducing the number of times of reading. Obtainable. In addition, when reading out the pixel signals in the peripheral portion, the pixel signals of the Nth pixel row and the Mth pixel row are mixed and output a plurality of times in different combinations, so that the correction data is generated even in the pixel mixture mode. The accuracy of correction data can be prevented from decreasing without reducing the number of peripheral pixel signals used for the correction.
 また、前記複数回は、2回であるようにしてもよい。 Further, the plurality of times may be two times.
 この構成によれば、周辺部の画素信号の読み出しでは、第N画素行と第M画素行の画素信号が混合されるとともに、各画素が2回ずつ指定されるので、周辺部の画素信号を1行ずつ読み出した場合と同数の画素信号を得ることができる。したがって、駆動モードの差に関係なく、画素混合モードの場合であっても画素混合を行わないモードのときと比べて出力にオフセットが発生する懸念がなく、補正用データを高精度で作成することができる。また、画素混合を行わないモードのときと回路の寄生成分の大きさが同等であり、消費電力を増加することなく画素混合モードにおける補正用データの精度低下を抑制することができる。 According to this configuration, when reading out the pixel signals in the peripheral portion, the pixel signals in the Nth pixel row and the Mth pixel row are mixed and each pixel is designated twice. It is possible to obtain the same number of pixel signals as when reading out one row at a time. Therefore, regardless of the difference in driving mode, there is no concern that an offset will occur in the output even in the pixel mixing mode compared to the mode in which pixel mixing is not performed, and the correction data is created with high accuracy. Can do. In addition, the size of the parasitic component of the circuit is the same as that in the mode in which pixel mixing is not performed, and it is possible to suppress a reduction in accuracy of correction data in the pixel mixing mode without increasing power consumption.
 また、前記第2画素は、遮光された遮光画素または基準電圧を出力する基準電圧出力画素を含むようにしてもよい。 Further, the second pixel may include a light-shielded light-shielded pixel or a reference voltage output pixel that outputs a reference voltage.
 この構成によれば、第2画素から出力される画素信号を精度よく一定の値にすることができる。 According to this configuration, the pixel signal output from the second pixel can be accurately set to a constant value.
 また、前記周辺部は、前記有効部よりも前記撮像部の周辺側に配置されるようにしてもよい。 Further, the peripheral part may be arranged on the peripheral side of the imaging unit with respect to the effective part.
 また、上記課題を解決するために本発明の一形態における撮像装置は、上記した特徴を有する固体撮像装置と、前記固体撮像装置から出力された前記有効部の画素信号に対し補正処理を行うデジタル信号処理部と、前記固体撮像装置から出力された前記周辺部の画素信号、および、前記周辺部の画素信号を用いて生成された補正用データを保持する記憶部とを備える。 In order to solve the above problems, an imaging device according to an embodiment of the present invention includes a solid-state imaging device having the above-described characteristics and a digital that performs correction processing on the pixel signal of the effective portion output from the solid-state imaging device. A signal processing unit, and a storage unit that holds the pixel signal of the peripheral part output from the solid-state imaging device and the correction data generated using the pixel signal of the peripheral part.
 この構成によれば、画素混合モードにおける補正用データの精度低下を抑制した撮像装置を提供することができる。 According to this configuration, it is possible to provide an imaging device that suppresses a decrease in accuracy of correction data in the pixel mixing mode.
 本発明にかかる固体撮像装置によれば、画素混合モードにおける補正用データの精度低下を抑制することができる。 According to the solid-state imaging device according to the present invention, it is possible to suppress a reduction in accuracy of correction data in the pixel mixing mode.
図1は、本発明の第1の実施形態における固体撮像装置の全体構成を示す図である。FIG. 1 is a diagram illustrating an overall configuration of a solid-state imaging device according to the first embodiment of the present invention. 図2は、図1における画素の構成を示す図である。FIG. 2 is a diagram illustrating a configuration of the pixel in FIG. 図3は、図1における列回路部の構成を示す図である。FIG. 3 is a diagram showing the configuration of the column circuit section in FIG. 図4は、図1におけるマルチプレクサおよび列選択回路の構成を示す図である。FIG. 4 is a diagram showing the configuration of the multiplexer and column selection circuit in FIG. 図5は、図1における行選択回路の構成を示す図である。FIG. 5 is a diagram showing a configuration of the row selection circuit in FIG. 図6は、全画素読み出しモードにおける、有効部の画素信号の読み出しの動作を示すタイミングチャートである。FIG. 6 is a timing chart showing the reading operation of the pixel signal of the effective portion in the all-pixel reading mode. 図7は、垂直2画素水平2画素混合読み出しモードにおける、有効部の画素信号の読み出しの動作を示すタイミングチャートである。FIG. 7 is a timing chart showing the reading operation of the pixel signal of the effective portion in the vertical 2-pixel horizontal 2-pixel mixed read mode. 図8は、全画素読み出しモードにおける行選択シーケンスを示す図であり、(a)は有効部および周辺部の各行の行番号を示す図、(b)は各行に供給される行アドレス信号のシーケンスを示す図である。8A and 8B are diagrams showing a row selection sequence in the all-pixel readout mode, where FIG. 8A is a diagram showing row numbers of each row in the effective portion and the peripheral portion, and FIG. 8B is a sequence of row address signals supplied to each row. FIG. 図9は、垂直2画素水平2画素混合読み出しモードにおける行選択シーケンスを示す図であり、(a)は有効部および周辺部の各行の行番号を示す図、(b)は各行に供給される行アドレス信号のシーケンスを示す図である。FIG. 9 is a diagram showing a row selection sequence in the vertical two-pixel horizontal two-pixel mixed readout mode, where (a) shows the row numbers of the rows in the effective portion and the peripheral portion, and (b) is supplied to each row. It is a figure which shows the sequence of a row address signal. 図10は、本発明の第2の実施形態にかかる固体撮像装置の垂直2画素水平2画素混合読み出しモードにおける行選択シーケンスを示す図であり、(a)は有効部および周辺部の各行の行番号を示す図、(b)は各行に供給される行アドレス信号のシーケンスを示す図である。FIG. 10 is a diagram showing a row selection sequence in the vertical two-pixel horizontal two-pixel mixed readout mode of the solid-state imaging device according to the second embodiment of the present invention. FIG. 10A is a row of each row in the effective portion and the peripheral portion. The figure which shows a number and (b) are the figures which show the sequence of the row address signal supplied to each row. 図11は、本発明の第3の実施形態における固体撮像装置の全体構成を示す図である。FIG. 11 is a diagram illustrating an overall configuration of a solid-state imaging device according to the third embodiment of the present invention. 図12は、図11におけるカラムADCの構成を示す図である。FIG. 12 is a diagram showing the configuration of the column ADC in FIG. 図13は、カラムADCの動作を示すタイミングチャートである。FIG. 13 is a timing chart showing the operation of the column ADC. 図14は、本発明の第4の実施形態における撮像装置の構成を示す図である。FIG. 14 is a diagram illustrating a configuration of an imaging apparatus according to the fourth embodiment of the present invention. 図15は、図14における撮像装置の撮像動作のフローチャートである。FIG. 15 is a flowchart of the imaging operation of the imaging apparatus in FIG. 図16は、従来技術における固体撮像装置の構成を示す図である。FIG. 16 is a diagram illustrating a configuration of a solid-state imaging device in the related art.
 以下、本発明にかかる画像撮像装置の実施の形態について、デジタルスチルカメラを例にとり、図面を参照しながら説明する。なお、本発明について、以下の実施の形態および添付の図面を用いて説明を行うが、これは例示を目的としており、本発明がこれらに限定されることを意図しない。 Hereinafter, an embodiment of an image pickup apparatus according to the present invention will be described with reference to the drawings, taking a digital still camera as an example. In addition, although this invention is demonstrated using the following embodiment and attached drawing, this is for the purpose of illustration and this invention is not intended to be limited to these.
 (第1の実施形態)
 まず、本発明の実施の形態にかかる画像撮像装置の構成について説明する。本実施の形態では、2次元状に配列された複数の画素を有する撮像部と、水平方向に配列された複数の画素により構成される画素行を選択する行選択回路と、選択された画素行の複数の画素から出力される画素信号を一時保持する列回路部と、単一の行読み出し期間中、選択すべき画素行を指定する行アドレス信号を行選択回路に供給する制御部とを備え、複数の画素は、受光量に応じた画素信号を出力する複数の第1画素と、一定の画素信号を出力する複数の第2画素とを含み、撮像部は、複数の第1画素が配置された有効部と、複数の第2画素が配置された周辺部とを有し、少なくとも1つの駆動モードにおいて、制御部は、有効部に対応する行アドレス信号を含む第1行選択シーケンスと、周辺部に対応する行アドレス信号を含む第2行選択シーケンスとを、第1行選択シーケンスと第2行選択シーケンスにおいて同時に指定される画素行数、または、各行が指定される回数が異なるように生成して、行選択回路に供給する固体撮像装置について説明する。これにより、固体撮像装置の駆動モードが有効部の画素信号を混合して出力する画素混合モードであっても、補正用データとして得られる周辺部の画素信号の数を減らすことなく出力でき、補正用データの精度低下を抑制することが可能である。
(First embodiment)
First, the configuration of the image capturing apparatus according to the embodiment of the present invention will be described. In the present embodiment, an imaging unit having a plurality of pixels arranged two-dimensionally, a row selection circuit that selects a pixel row composed of a plurality of pixels arranged in the horizontal direction, and the selected pixel row A column circuit unit that temporarily holds pixel signals output from the plurality of pixels, and a control unit that supplies a row address signal specifying a pixel row to be selected to the row selection circuit during a single row readout period. The plurality of pixels include a plurality of first pixels that output pixel signals corresponding to the amount of received light, and a plurality of second pixels that output a fixed pixel signal, and the imaging unit includes a plurality of first pixels. And at least one driving mode, the control unit includes a first row selection sequence including a row address signal corresponding to the effective unit, and a peripheral portion in which a plurality of second pixels are arranged. Second including a row address signal corresponding to the peripheral portion A solid-state imaging device that generates a selection sequence so that the number of pixel rows specified simultaneously in the first row selection sequence and the second row selection sequence, or the number of times each row is specified differs, and supplies the selection sequence to the row selection circuit Will be described. As a result, even if the driving mode of the solid-state imaging device is a pixel mixing mode in which the pixel signals of the effective portion are mixed and output, the output can be performed without reducing the number of pixel signals in the peripheral portion obtained as correction data. It is possible to suppress a decrease in accuracy of the business data.
 図1は、本発明の第1の実施形態における固体撮像装置1の全体構成を示す図である。 FIG. 1 is a diagram showing an overall configuration of a solid-state imaging device 1 according to the first embodiment of the present invention.
 固体撮像装置1は、複数の画素11a、11bが2次元状に配置された撮像部2と、行選択回路3と、画素電流源回路4と、クランプ回路5と、サンプルホールド(S/H)回路6と、マルチプレクサ(MUX)7と、列選択回路8と、制御部9と、出力アンプ10と、垂直信号線19と、水平共通信号線39とを備えている。 The solid-state imaging device 1 includes an imaging unit 2 in which a plurality of pixels 11a and 11b are two-dimensionally arranged, a row selection circuit 3, a pixel current source circuit 4, a clamp circuit 5, and a sample hold (S / H). The circuit 6 includes a multiplexer (MUX) 7, a column selection circuit 8, a control unit 9, an output amplifier 10, a vertical signal line 19, and a horizontal common signal line 39.
 撮像部2は、水平方向に配列された画素11a、11bにより画素行を構成し、有効部16と周辺部17とを備えている。有効部16には、入射された光を光電変換し、受光量に応じた画素信号を出力する画素11aが、2次元状に配列されている。また、周辺部17は有効部16に隣接して設けられ、周辺部17には、一定の画素信号を出力する画素11bが配列されている。ここで、画素11bは、あらかじめ遮光された遮光画素である。なお、画素11bは、遮光画素に限らず、一定の基準電圧を出力する基準電圧出力画素であればよい。画素11aおよび画素11bは、本発明における第1画素および第2画素に相当する。 The imaging unit 2 includes a pixel row including pixels 11 a and 11 b arranged in the horizontal direction, and includes an effective unit 16 and a peripheral unit 17. In the effective portion 16, pixels 11 a that photoelectrically convert incident light and output pixel signals according to the amount of received light are arranged in a two-dimensional manner. The peripheral portion 17 is provided adjacent to the effective portion 16, and pixels 11 b that output a constant pixel signal are arranged in the peripheral portion 17. Here, the pixel 11b is a light-shielded pixel that is shielded in advance. The pixel 11b is not limited to a light-shielded pixel, and may be a reference voltage output pixel that outputs a constant reference voltage. The pixel 11a and the pixel 11b correspond to the first pixel and the second pixel in the present invention.
 図1では、一例として6×4の2次元状に配列された24画素の例を示しているが、実際の総画素数は数百万個以上である。なお、周辺部17は、同図に示したように有効部16の一辺に隣接する位置に設けられることに限らず、例えば撮像部2の周辺側に、有効部16を囲むように配置されてもよい。 FIG. 1 shows an example of 24 pixels arranged in a 6 × 4 two-dimensional shape as an example, but the actual total number of pixels is several million or more. Note that the peripheral portion 17 is not limited to being provided at a position adjacent to one side of the effective portion 16 as shown in the figure. For example, the peripheral portion 17 is disposed on the peripheral side of the imaging portion 2 so as to surround the effective portion 16. Also good.
 行選択回路3は、撮像部2に配置された画素11a、画素11bの画素行毎に、制御線SEL[n]、RST[n]、TRAN[n](n=1、2、…)の3本の制御線を備え(後述する図2参照)、各画素11a、画素11bを画素行単位で選択して、ラインセレクト(行選択)、リセット(初期化)、リード(読み出し)を制御する。 For each pixel row of the pixel 11a and the pixel 11b arranged in the imaging unit 2, the row selection circuit 3 includes control lines SEL [n], RST [n], TRAN [n] (n = 1, 2,...). Three control lines are provided (see FIG. 2 described later), and each pixel 11a and pixel 11b are selected in units of pixel rows to control line selection (row selection), reset (initialization), and reading (reading). .
 また、画素電流源回路4は、アレイ状に各列に画素電流源回路の基本単位4aを備え(後述する図3参照)、画素11a、画素11bから出力された画素信号をクランプ回路5に供給するための電流を生成する。クランプ回路5は、アレイ状に各列にクランプ回路の基本単位5aを備え、垂直信号線19を介して画素電流源回路4から出力された画素信号から、画素11a、画素11bで発生する固定パターンノイズ成分を除去する。サンプルホールド回路6は、アレイ状に各列にサンプルホールド回路の基本単位6aを備え、クランプ回路5から出力された画素信号を保持する。なお、画素電流源回路4、クランプ回路5、サンプルホールド回路6により、列回路部20が構成される。 The pixel current source circuit 4 includes a pixel current source circuit basic unit 4a in each column in an array (see FIG. 3 to be described later), and supplies pixel signals output from the pixels 11a and 11b to the clamp circuit 5. To generate current. The clamp circuit 5 includes a basic unit 5a of the clamp circuit in each column in an array, and a fixed pattern generated in the pixels 11a and 11b from the pixel signal output from the pixel current source circuit 4 via the vertical signal line 19. Remove noise components. The sample hold circuit 6 includes a basic unit 6a of the sample hold circuit in each column in an array, and holds the pixel signal output from the clamp circuit 5. The pixel current source circuit 4, the clamp circuit 5, and the sample hold circuit 6 constitute a column circuit unit 20.
 また、マルチプレクサ7は、サンプルホールド回路6と出力アンプ10との接続を切り替える。列選択回路8は、列選択信号線40を備え、マルチプレクサ7の列を順次選択する(後述する図4参照)。出力アンプ10は、マルチプレクサ7から水平共通信号線39を介してサンプルホールド回路6の出力信号を受け取り、増幅して出力する。 Further, the multiplexer 7 switches the connection between the sample hold circuit 6 and the output amplifier 10. The column selection circuit 8 includes a column selection signal line 40 and sequentially selects columns of the multiplexer 7 (see FIG. 4 described later). The output amplifier 10 receives the output signal of the sample hold circuit 6 from the multiplexer 7 via the horizontal common signal line 39, amplifies it, and outputs it.
 また、制御部9は、固体撮像装置1を駆動する駆動モード、および、読み出しを行う撮像部2の領域に応じて、画素を画素行単位で選択する行アドレス信号ADRを行選択回路3に供給する。具体的には、有効部16に対応する行アドレス信号を含む第1行選択シーケンスと、周辺部17に対応する行アドレス信号を含む第2行選択シーケンスとを、第1行選択シーケンスと第2行選択シーケンスにおいて同時に指定される画素行数、または、各行が指定される回数が異なるように生成して行選択回路3に供給する。 In addition, the control unit 9 supplies the row selection circuit 3 with a row address signal ADR that selects pixels in units of pixel rows in accordance with the drive mode for driving the solid-state imaging device 1 and the region of the imaging unit 2 that performs readout. To do. Specifically, the first row selection sequence including the row address signal corresponding to the valid portion 16 and the second row selection sequence including the row address signal corresponding to the peripheral portion 17 are divided into the first row selection sequence and the second row selection sequence. The number of pixel rows specified simultaneously in the row selection sequence or the number of times each row is specified is generated and supplied to the row selection circuit 3.
 図2は、撮像部2の有効部16に配置された画素11aの詳細を示す回路図である。画素11aは、入射した光を光電変換し電荷を出力するフォトダイオード(PD)21と、フォトダイオード21により発生した電荷を蓄積し、蓄積した電荷を電圧信号として出力するフローティングディフュージョン(FD)23と、フローティングディフュージョン23の示す電圧が初期電圧(ここではVDD)になるようにリセットするリセットトランジスタ(リセットTr)24と、フォトダイオード21により出力される電荷をフローティングディフュージョン23に供給する転送トランジスタ(転送Tr)22と、フローティングディフュージョン23の示す電圧に追従して変化する電圧を出力する増幅トランジスタ(増幅Tr)25と、行選択回路3から行選択信号を受けたときに増幅トランジスタ25の出力を垂直信号線19に供給する選択トランジスタ(選択Tr)26と、リセットトランジスタ24および増幅トランジスタ25のソースまたはドレインに電源電圧を供給する電源線27とを含む。なお、画素11bについても画素11aと同様の構成である。 FIG. 2 is a circuit diagram showing details of the pixels 11a arranged in the effective unit 16 of the imaging unit 2. The pixel 11a includes a photodiode (PD) 21 that photoelectrically converts incident light and outputs a charge, a floating diffusion (FD) 23 that accumulates the charge generated by the photodiode 21, and outputs the accumulated charge as a voltage signal. The reset transistor (reset Tr) 24 that resets the voltage indicated by the floating diffusion 23 to the initial voltage (VDD in this case), and the transfer transistor (transfer Tr) that supplies the charge output from the photodiode 21 to the floating diffusion 23 ) 22, an amplification transistor (amplification Tr) 25 that outputs a voltage that changes following the voltage indicated by the floating diffusion 23, and the output of the amplification transistor 25 when a row selection signal is received from the row selection circuit 3. Line 1 The supplied selection transistor includes a (selection Tr) 26, and a power supply line 27 for supplying a power supply voltage to the source or drain of the reset transistor 24 and amplifying transistor 25. The pixel 11b has the same configuration as the pixel 11a.
 選択トランジスタ26、リセットトランジスタ24、転送トランジスタ22の各ゲートには、それぞれ制御線SEL[n]、RST[n]、TRAN[n](n=1、2、・・・)が接続され、行選択回路3によりラインセレクトのための行選択信号、リセットのための画素リセット信号、リードのための電荷転送信号が与えられ、各動作の制御が行われる。 Control lines SEL [n], RST [n], TRAN [n] (n = 1, 2,...) Are connected to the gates of the selection transistor 26, the reset transistor 24, and the transfer transistor 22, respectively. The selection circuit 3 gives a row selection signal for line selection, a pixel reset signal for reset, and a charge transfer signal for read, and controls each operation.
 なお、有効部16の画素11aと周辺部17の画素11bでは、画素回路構成は同じであるが、周辺部17の画素11bは、フォトダイオード21があらかじめ遮光された遮光画素である。その結果、画素11bからは、常に暗状態の出力信号が得られる。これにより、画素11bは、初期化時の電圧を増幅したリセット電圧と読み出し時の電圧(暗状態の出力電圧)を増幅したリード電圧とを垂直信号線19に出力する。 The pixel circuit configuration of the pixel 11a of the effective portion 16 and the pixel 11b of the peripheral portion 17 are the same, but the pixel 11b of the peripheral portion 17 is a light-shielded pixel in which the photodiode 21 is shielded in advance. As a result, an output signal in a dark state is always obtained from the pixel 11b. Thereby, the pixel 11b outputs the reset voltage obtained by amplifying the voltage at the time of initialization and the read voltage obtained by amplifying the voltage at the time of reading (output voltage in the dark state) to the vertical signal line 19.
 また、図2に示した画素11aは単位セルであり、フォトダイオード21、転送トランジスタ22、フローティングディフュージョン23、リセットトランジスタ24および増幅トランジスタ25をそれぞれ有する構造、いわゆる1画素1セル構造を有している。ここで、画素11aは、単位セル内に複数のフォトダイオード21を含み、さらに、フローティングディフュージョン23、リセットトランジスタ24および増幅トランジスタ25のいずれか、あるいは、全てを単位セル内で共有する構造、いわゆる多画素1セル構造を有しても構わない。 2 is a unit cell and has a structure including a photodiode 21, a transfer transistor 22, a floating diffusion 23, a reset transistor 24, and an amplifying transistor 25, that is, a so-called one-pixel one-cell structure. . Here, the pixel 11a includes a plurality of photodiodes 21 in a unit cell, and further has a structure in which any one or all of the floating diffusion 23, the reset transistor 24, and the amplification transistor 25 are shared in the unit cell, so-called many. You may have a pixel 1 cell structure.
 また、図2に示した画素11aは、半導体基板の表面、すなわち、トランジスタのゲート、配線と同じ面側に形成される表面照射型イメージセンサ(表面照射型固体撮像装置)の構造を構成している。なお、画素11aは、画素11aがトランジスタのゲート、配線と裏面側に形成される、いわゆる、裏面照射型イメージセンサ(裏面照射型固体撮像装置)の構造を構成してもよい。なお、画素11bについても、画素11aと同様である。 2 constitutes a structure of a surface irradiation type image sensor (surface irradiation type solid-state imaging device) formed on the surface of the semiconductor substrate, that is, on the same side as the gate and wiring of the transistor. Yes. The pixel 11a may constitute a so-called back-illuminated image sensor (back-illuminated solid-state imaging device) structure in which the pixel 11a is formed on the gate and wiring of the transistor and on the back surface side. The pixel 11b is the same as the pixel 11a.
 図3は、画素電流源回路4、クランプ回路5、サンプルホールド回路6からなる本発明の第1の実施形態における列回路部20の詳細を示す図である。列回路部20の機能は、撮像部2から出力されるリセット電圧とリード電圧との差分により示される画素信号を一時保持した後に、マルチプレクサ7に出力することである。 FIG. 3 is a diagram showing details of the column circuit unit 20 according to the first embodiment of the present invention, which includes the pixel current source circuit 4, the clamp circuit 5, and the sample hold circuit 6. The function of the column circuit unit 20 is to temporarily hold a pixel signal indicated by the difference between the reset voltage and the read voltage output from the imaging unit 2 and then output the pixel signal to the multiplexer 7.
 詳細には、図3に示すように、画素電流源回路4の基本単位4aは、画素11a、画素11bからの画素信号読み出し時に増幅トランジスタ25に電流を供給する電流源トランジスタ30と、電流源トランジスタ30のゲートに電流源バイアス電位を供給するためのバイアス端子31とを備えている。 Specifically, as shown in FIG. 3, the basic unit 4a of the pixel current source circuit 4 includes a current source transistor 30 that supplies current to the amplification transistor 25 when a pixel signal is read from the pixels 11a and 11b, and a current source transistor. And a bias terminal 31 for supplying a current source bias potential to 30 gates.
 また、図3に示すように、クランプ回路5の基本単位5aは、画素電流源回路4から出力された画素信号を入力するサンプリングトランジスタ32と、入力された画素信号からリセット信号とリード信号の差分により示される画素信号を求めるクランプ容量33(容量値Ccl)と、該クランプ容量33の反対側の端子電位をクランプ電位(VCL)に設定するためのクランプ電圧入力端子35と、クランプ容量33とクランプ電圧入力端子35との接続を切り替えるクランプトランジスタ34とを備えている。 Further, as shown in FIG. 3, the basic unit 5a of the clamp circuit 5 includes a sampling transistor 32 that inputs a pixel signal output from the pixel current source circuit 4, and a difference between a reset signal and a read signal from the input pixel signal. A clamp capacitor 33 (capacitance value Ccl) for obtaining a pixel signal indicated by the following: a clamp voltage input terminal 35 for setting a terminal potential on the opposite side of the clamp capacitor 33 to a clamp potential (VCL); a clamp capacitor 33 and a clamp A clamp transistor 34 that switches connection with the voltage input terminal 35 is provided.
 また、サンプルホールド回路6は、各列にサンプルホールド回路の基本単位6aを有している。サンプルホールド回路の基本単位6aは、クランプ回路5から出力された画素信号を入力するS/H容量入力トランジスタ36と、画素信号を一時保持するS/H容量37(容量値Csh)とを含み、S/H容量入力トランジスタ36のゲートにS/H容量入力信号が供給されると、クランプ回路5から出力された画素信号がS/H容量37に保持される。 The sample hold circuit 6 has a basic unit 6a of the sample hold circuit in each column. The basic unit 6a of the sample and hold circuit includes an S / H capacitor input transistor 36 for inputting the pixel signal output from the clamp circuit 5, and an S / H capacitor 37 (capacitance value Csh) for temporarily holding the pixel signal. When an S / H capacitor input signal is supplied to the gate of the S / H capacitor input transistor 36, the pixel signal output from the clamp circuit 5 is held in the S / H capacitor 37.
 図4は、マルチプレクサ7、列選択回路8、出力アンプ10の詳細を示す図である。 FIG. 4 is a diagram showing details of the multiplexer 7, the column selection circuit 8, and the output amplifier 10.
 図4に示すように、マルチプレクサ7は、各列にマルチプレクサの基本単位7aを有している。マルチプレクサの基本単位7aは、列選択トランジスタ38を備え、それぞれの列選択トランジスタ38は水平共通信号線39に接続されている。つまり、S/H回路6の各S/H容量37と水平共通信号線39の間には列選択トランジスタ38が配置されている。また、列選択トランジスタ38のゲートには、列選択回路8から列選択信号H[k](k=1、2、・・・)が供給される。 As shown in FIG. 4, the multiplexer 7 has a multiplexer basic unit 7a in each column. The basic unit 7 a of the multiplexer includes a column selection transistor 38, and each column selection transistor 38 is connected to a horizontal common signal line 39. That is, the column selection transistor 38 is arranged between each S / H capacitor 37 of the S / H circuit 6 and the horizontal common signal line 39. A column selection signal H [k] (k = 1, 2,...) Is supplied from the column selection circuit 8 to the gate of the column selection transistor 38.
 このような構成により、列選択トランジスタ38は、ゲートに供給される列選択信号H[k]に応じて、列毎にS/H容量37に保持された画素信号を、順次、水平共通信号線39に出力する。水平共通信号線39を介して出力アンプ10に供給された信号は、増幅された後にチップに形成された固体撮像装置1の外部に出力される。 With such a configuration, the column selection transistor 38 sequentially applies the pixel signal held in the S / H capacitor 37 for each column in accordance with the column selection signal H [k] supplied to the gate. Output to 39. The signal supplied to the output amplifier 10 via the horizontal common signal line 39 is amplified and then output to the outside of the solid-state imaging device 1 formed on the chip.
 図5は、行選択回路3の詳細を示す図である。図5に示すように、行選択回路3は、アドレスデコーダ41と、各行毎に配置された行選択用論理回路42から構成される。アドレスデコーダ41は、制御部9から供給される行アドレス信号に応じて、対応する行の行選択用論理回路42にHi(High)レベルの信号を出力する。同時に、制御部9から、対応する行選択用論理回路42のフリップフロップ(FF)43のライトイネーブル信号WEを入力すると、当該フリップフロップ43にはHiレベルの信号が設定され、その行は選択状態になる。 FIG. 5 is a diagram showing details of the row selection circuit 3. As shown in FIG. 5, the row selection circuit 3 includes an address decoder 41 and a row selection logic circuit 42 arranged for each row. The address decoder 41 outputs a Hi (High) level signal to the row selection logic circuit 42 of the corresponding row in accordance with the row address signal supplied from the control unit 9. At the same time, when the write enable signal WE of the flip-flop (FF) 43 of the corresponding row selection logic circuit 42 is input from the control unit 9, a Hi level signal is set in the flip-flop 43, and the row is selected. become.
 次に、選択状態になった行の行選択用論理回路42に画素制御用のパルス信号であるSEL_s、トランジスタ制御信号TRAN_s、リセット信号RST_sを入力すると、行選択用論理回路42のANDゲート44により、制御線SEL[n]、TRAN[n]、RST[n](n=1、2、・・・)を介して、選択された行の画素11aにそれぞれ行選択信号、画素リセット信号および電荷転送信号のパルスが供給される。画素11a(または画素11b)の駆動が完了したら、各フリップフロップ43の値をLo(Low)レベルの信号にリセットし、行選択を解除する。 Next, when SEL_s, a transistor control signal TRAN_s, and a reset signal RST_s, which are pixel control pulse signals, are input to the row selection logic circuit 42 in the selected row, the AND gate 44 of the row selection logic circuit 42 causes the selection. , A control signal SEL [n], TRAN [n], RST [n] (n = 1, 2,...), A row selection signal, a pixel reset signal, and a charge are supplied to the pixels 11a in the selected row. A pulse of the transfer signal is supplied. When driving of the pixel 11a (or pixel 11b) is completed, the value of each flip-flop 43 is reset to a signal of Lo (Low) level, and the row selection is released.
 次に、本実施形態にかかる固体撮像装置1には、駆動モードとしてカメラスチル撮影に使える全画素読み出しモードと、動画記録機能に使える画素混合モードとを備えることを特徴としており、それぞれのモードに関し、撮像部2の有効部16の信号読み出し動作を説明する。 Next, the solid-state imaging device 1 according to the present embodiment is characterized by including an all-pixel readout mode that can be used for camera still photography and a pixel mixture mode that can be used for a moving image recording function as drive modes. The signal reading operation of the effective unit 16 of the imaging unit 2 will be described.
 図6は、全画素読み出しモードにおける有効部16の読み出し動作において、撮像部2と列回路部20に供給される各制御信号のタイミングを示す図である。 FIG. 6 is a diagram illustrating the timing of each control signal supplied to the imaging unit 2 and the column circuit unit 20 in the readout operation of the effective unit 16 in the all-pixel readout mode.
 図6に示すタイミングt1においては、制御線SEL[1]に供給される行選択信号はHiレベルであり、画素行の1行目が選択されている。また、制御線TRAN[1]に供給される電荷転送信号はLoレベル、制御線RST[1]に供給される画素リセット信号はHiレベルである。つまり、選択された1行目では、各画素11a(または画素11b)の転送トランジスタ22がオフでリセットトランジスタ24はオンであり、フローティングディフュージョン23の電位(以下ではVfd)はFDリセット電位Vfdrst(=VDD)に初期化される。 At the timing t1 shown in FIG. 6, the row selection signal supplied to the control line SEL [1] is at the Hi level, and the first row of the pixel rows is selected. The charge transfer signal supplied to the control line TRAN [1] is Lo level, and the pixel reset signal supplied to the control line RST [1] is Hi level. In other words, in the selected first row, the transfer transistor 22 of each pixel 11a (or pixel 11b) is off and the reset transistor 24 is on, and the potential of the floating diffusion 23 (hereinafter Vfd) is the FD reset potential Vfdrst (= VDD).
 タイミングt2では、制御線TRAN[1]および制御線RST[1]に供給される電荷転送信号および画素リセット信号がLoレベルである。つまり、転送トランジスタ22およびリセットトランジスタ24がオフなので、FD電位のリセット状態は保持される。このとき、制御線SEL[1]に供給される行選択信号はHiレベル、つまり、選択トランジスタ26はオンのため、増幅トランジスタ25のしきい電圧をVthとすると、Vfdrst-Vthがリセット電圧として垂直信号線19に出力される(正確にはVfdrst-Vth-αであるが、ここではαは省略)。 At timing t2, the charge transfer signal and the pixel reset signal supplied to the control line TRAN [1] and the control line RST [1] are at the Lo level. That is, since the transfer transistor 22 and the reset transistor 24 are off, the reset state of the FD potential is maintained. At this time, the row selection signal supplied to the control line SEL [1] is at the Hi level, that is, the selection transistor 26 is on. Therefore, assuming that the threshold voltage of the amplification transistor 25 is Vth, Vfdrst−Vth is vertical as the reset voltage. It is output to the signal line 19 (precisely Vfdrst−Vth−α, but α is omitted here).
 さらに、このリセット電圧Vfdrst-Vthは、垂直信号線19を介して、クランプ回路5のクランプ容量33の一方の端子に出力される。一方、図6に示すように、クランプ信号(クランプトランジスタ34のゲート信号)と、サンプリング信号(S/H容量入力トランジスタ36のゲート)は共にHiレベル、つまり、クランプトランジスタ34およびS/H容量入力トランジスタ36はオンであるので、クランプ容量33の他方の端子ならびにS/H容量37の電位は、クランプ電位VCLに設定される。 Further, the reset voltage Vfdrst−Vth is output to one terminal of the clamp capacitor 33 of the clamp circuit 5 through the vertical signal line 19. On the other hand, as shown in FIG. 6, both the clamp signal (gate signal of the clamp transistor 34) and the sampling signal (gate of the S / H capacitor input transistor 36) are at the Hi level, that is, the clamp transistor 34 and the S / H capacitor input. Since the transistor 36 is on, the other terminal of the clamp capacitor 33 and the potential of the S / H capacitor 37 are set to the clamp potential VCL.
 タイミングt3では、制御線TRAN[1]に供給される電荷転送信号がHiレベル、つまり、転送トランジスタ22がオンとなるため、フォトダイオード21に蓄積された電荷がフローティングディフュージョン23に転送され、VfdrstであったFD電位Vfdはこの信号電荷量に応じた電圧Vfdsigだけ低下し、Vfdrst-Vfdsigとなる。 At timing t3, the charge transfer signal supplied to the control line TRAN [1] is at the Hi level, that is, the transfer transistor 22 is turned on, so that the charge accumulated in the photodiode 21 is transferred to the floating diffusion 23, and at Vfdrst The existing FD potential Vfd is lowered by a voltage Vfdsig corresponding to the signal charge amount, and becomes Vfdrst−Vfdsig.
 タイミングt4では、制御線TRAN[1]に供給される電荷転送信号がLoレベル、制御線SEL[1]に供給される行選択信号がHiレベル、つまり、転送トランジスタ22がオフで選択トランジスタ26がオンであり、Vfdrst-Vfdsig-Vthがリード電圧として垂直信号線19に出力される。これによりクランプ容量33の入力電圧は、Vfdsigだけ変化する。 At timing t4, the charge transfer signal supplied to the control line TRAN [1] is Lo level, the row selection signal supplied to the control line SEL [1] is Hi level, that is, the transfer transistor 22 is off and the selection transistor 26 is off. On, Vfdrst−Vfdsig−Vth is output to the vertical signal line 19 as a read voltage. As a result, the input voltage of the clamp capacitor 33 changes by Vfdsig.
 さらに、クランプ信号はLoレベルであり、クランプトランジスタ34はオフなので、クランプ容量33(容量値:Ccl)の他方の端子の電位、すなわち、S/H容量37(容量値:Csh)の電位は、Vfdsig×Ccl/(Ccl+Csh)だけ変化する。この電位変化は、垂直信号線19におけるリセット電圧とリード電圧の差分に対応した電圧、すなわち画素信号である。 Further, since the clamp signal is at Lo level and the clamp transistor 34 is OFF, the potential of the other terminal of the clamp capacitor 33 (capacitance value: Ccl), that is, the potential of the S / H capacitor 37 (capacitance value: Csh) is It changes by Vfdsig × Ccl / (Ccl + Csh). This potential change is a voltage corresponding to the difference between the reset voltage and the read voltage in the vertical signal line 19, that is, a pixel signal.
 また、タイミングt5では、サンプリング信号がLoレベルとなり、この画素信号がS/H容量37に蓄積される。以上により、1行分の画素信号がサンプルホールド回路6に保持されることになる。 At timing t5, the sampling signal becomes Lo level, and this pixel signal is accumulated in the S / H capacitor 37. As described above, the pixel signals for one row are held in the sample hold circuit 6.
 次に、タイミングt11では、列選択回路8の1列目の列選択信号H[1]がHiレベルとなり、マルチプレクサ7の1列目の列選択トランジスタ38がオンとなる。これにより、1列目のS/H容量37の信号が水平共通信号線39に出力され、出力アンプ10を介して外部に出力される。 Next, at the timing t11, the column selection signal H [1] of the first column of the column selection circuit 8 becomes Hi level, and the column selection transistor 38 of the first column of the multiplexer 7 is turned on. As a result, the signal of the S / H capacitor 37 in the first column is output to the horizontal common signal line 39 and output to the outside via the output amplifier 10.
 同様に、タイミングt12では、2列目の列選択信号H[2]がHiレベルとなり、マルチプレクサ7の2列目の列選択トランジスタ38がオンとなる。これにより、2列目のS/H容量37の信号が水平共通信号線39に出力され、出力アンプ10を介して外部に出力される。 Similarly, at the timing t12, the column selection signal H [2] of the second column becomes Hi level, and the column selection transistor 38 of the second column of the multiplexer 7 is turned on. As a result, the signal of the S / H capacitor 37 in the second column is output to the horizontal common signal line 39 and output to the outside via the output amplifier 10.
 同様に、順次列選択回路8の各列の列選択信号をHiレベルにすれば、各列のS/H容量37の信号が順次出力される。 Similarly, if the column selection signal of each column of the column selection circuit 8 is set to Hi level, the signal of the S / H capacitor 37 of each column is sequentially output.
 以上より、1行分の画素信号が順次出力される。さらに、図6に示した動作を、選択する行をn=1からn=nまで順に変更して撮像部2の有効部16の行数だけ繰り返せば、1画面分(1フレーム)の画像について有効部16全体の信号が読み出されることになる。 From the above, pixel signals for one row are output sequentially. Furthermore, if the operation shown in FIG. 6 is changed in order from n = 1 to n = n and the number of rows of the effective unit 16 of the imaging unit 2 is repeated, the image for one screen (one frame) is repeated. The signal of the entire valid portion 16 is read out.
 図7は、画素混合モードの一例として、垂直2画素水平2画素混合モードにおける有効部16の読み出し動作において、撮像部2と列回路部20に供給される各制御信号のタイミングを示す図である。 FIG. 7 is a diagram illustrating the timing of each control signal supplied to the imaging unit 2 and the column circuit unit 20 in the read operation of the effective unit 16 in the vertical 2-pixel horizontal 2-pixel mixing mode as an example of the pixel mixing mode. .
 図7に示すタイミングt1においては、制御線SEL[1]、SEL[2]に供給される行選択信号はHiレベルであり、1行目と2行目が選択されている。また、制御線TRAN[1]、TRAN[2]に供給される電荷転送信号はLoレベル、制御線RST[1]、RST[2]に供給される画素リセット信号はHiレベル、つまり、1行目と2行目の転送トランジスタ22がオフでリセットトランジスタ24はオンであり、フローティングディフュージョン23の電位(以下ではVfd)はFDリセット電位Vfdrst(=VDD)に初期化される。ここで、2つの行に同時に行選択信号、電荷転送信号、画素リセット信号を供給するには、行選択回路3のアドレスデコーダ41にそれぞれの行アドレス信号を順次供給し、行選択用論理回路42のフリップフロップ43に選択状態を順次設定すれば可能になる。 At the timing t1 shown in FIG. 7, the row selection signal supplied to the control lines SEL [1] and SEL [2] is at the Hi level, and the first and second rows are selected. Further, the charge transfer signal supplied to the control lines TRAN [1] and TRAN [2] is Lo level, and the pixel reset signal supplied to the control lines RST [1] and RST [2] is Hi level, that is, one row. The transfer transistors 22 in the first and second rows are off and the reset transistor 24 is on, and the potential of the floating diffusion 23 (hereinafter Vfd) is initialized to the FD reset potential Vfdrst (= VDD). Here, in order to simultaneously supply the row selection signal, the charge transfer signal, and the pixel reset signal to the two rows, the respective row address signals are sequentially supplied to the address decoder 41 of the row selection circuit 3, and the row selection logic circuit 42. This can be achieved by sequentially setting the selection states in the flip-flops 43.
 タイミングt2では、制御線TRAN[1]およびTRAN[2]、制御線RST[1]およびRST[2]に供給される電荷転送信号および画素リセット信号がLoレベル、つまり、1行目と2行目の転送トランジスタ22、リセットトランジスタ24がオフなので、FD電位のリセット状態は保持される。このとき、制御線SEL[1]、SEL[2]に供給される行選択信号はHiレベル、つまり、1行目と2行目の選択トランジスタ26はオンのため、Vfdrst-Vthがリセット電圧として垂直信号線19に出力される(正確にはVfdrst-Vth-αであるが、ここではαは省略)。 At timing t2, the charge transfer signal and the pixel reset signal supplied to the control lines TRAN [1] and TRAN [2] and the control lines RST [1] and RST [2] are at the Lo level, that is, the first and second rows. Since the transfer transistor 22 and the reset transistor 24 of the eye are off, the reset state of the FD potential is maintained. At this time, the row selection signals supplied to the control lines SEL [1] and SEL [2] are at the Hi level, that is, the selection transistors 26 in the first and second rows are on, so that Vfdrst−Vth is used as the reset voltage. It is output to the vertical signal line 19 (precisely Vfdrst−Vth−α, but α is omitted here).
 さらに、このリセット電圧Vfdrst-Vthは、垂直信号線19を介して、クランプ回路5のクランプ容量33の一方の端子に出力される。一方、図7に示すように、クランプ信号(クランプトランジスタ34のゲート信号)と、サンプリング信号(S/H容量入力トランジスタ36のゲート信号)は共にHiレベル、つまり、クランプトランジスタ34およびS/H容量入力トランジスタ36はオンであるので、クランプ容量33の他方の端子ならびにS/H容量37の電位は、クランプ電位VCLに設定される。 Further, the reset voltage Vfdrst−Vth is output to one terminal of the clamp capacitor 33 of the clamp circuit 5 through the vertical signal line 19. On the other hand, as shown in FIG. 7, both the clamp signal (gate signal of the clamp transistor 34) and the sampling signal (gate signal of the S / H capacitor input transistor 36) are at the Hi level, that is, the clamp transistor 34 and the S / H capacitor. Since the input transistor 36 is on, the other terminal of the clamp capacitor 33 and the potential of the S / H capacitor 37 are set to the clamp potential VCL.
 タイミングt3では、制御線TRAN[1]、TRAN[2]に供給される電荷転送信号がHiレベル、つまり、1行目と2行目の転送トランジスタ22がオンとなるため、1行目および2行目のフォトダイオード21に蓄積された電荷がフローティングディフュージョン23に転送され、それぞれのFD電位Vfd1およびVfd2は、これらの信号電荷量に応じた電圧Vfdsig1およびVfdsig2だけ低下し、Vfdrst-Vfdsig1およびVfdrst-Vfdsig2となる。 At timing t3, the charge transfer signals supplied to the control lines TRAN [1] and TRAN [2] are at the Hi level, that is, the transfer transistors 22 in the first row and the second row are turned on. The charges accumulated in the photodiodes 21 in the row are transferred to the floating diffusion 23, and the respective FD potentials Vfd1 and Vfd2 are reduced by voltages Vfdsig1 and Vfdsig2 corresponding to these signal charge amounts, and Vfdrst−Vfdsig1 and Vfdrst− Vfdsig2.
 タイミングt4では、制御線TRAN[1]、TRAN[2]に供給される電荷転送信号がLoレベル、制御線SEL[1]、SEL[2]に供給される行選択信号がHiレベル、つまり、転送トランジスタ22がオフで選択トランジスタ26がオンであり、Vfdsig1およびVfdsig2の平均をVfdsigとしたときに、Vfdrst-Vfdsig-Vthがリード電圧として垂直信号線19に出力される。このリード信号は1行目および2行目の混合信号に相当する。この垂直信号線19の電位変化により、クランプ容量33の入力もVfdsigだけ変化する。 At timing t4, the charge transfer signals supplied to the control lines TRAN [1] and TRAN [2] are at the Lo level, and the row selection signals supplied to the control lines SEL [1] and SEL [2] are at the Hi level. When the transfer transistor 22 is off and the selection transistor 26 is on and the average of Vfdsig1 and Vfdsig2 is Vfdsig, Vfdrst−Vfdsig−Vth is output to the vertical signal line 19 as a read voltage. This read signal corresponds to the mixed signal in the first and second rows. Due to the potential change of the vertical signal line 19, the input of the clamp capacitor 33 also changes by Vfdsig.
 さらに、クランプトランジスタ34はオフなので、クランプ容量33の他方の端子の電位、すなわち、S/H容量37の電位は、Vfdsig×Ccl/(Ccl+Csh)だけ変化する。この電位変化は、垂直信号線19におけるリセット電圧とリード電圧の差分に対応した電圧、すなわち1行目と2行目の平均化された画素信号(垂直画素混合信号)である。 Furthermore, since the clamp transistor 34 is off, the potential of the other terminal of the clamp capacitor 33, that is, the potential of the S / H capacitor 37 changes by Vfdsig × Ccl / (Ccl + Csh). This potential change is a voltage corresponding to the difference between the reset voltage and the read voltage in the vertical signal line 19, that is, an averaged pixel signal (vertical pixel mixed signal) in the first and second rows.
 また、タイミングt5では、制御線SEL[1]、SEL[2]に供給される行選択信号とサンプリング信号がLoレベルとなり、選択された1行目と2行目の垂直混合画素信号がS/H容量37に蓄積される。 At timing t5, the row selection signal and the sampling signal supplied to the control lines SEL [1] and SEL [2] are set to the Lo level, and the vertical mixed pixel signals of the selected first row and second row are S / S. Accumulated in the H capacity 37.
 次に、タイミングt11では、サンプリング信号がLoレベル、列選択回路8の1列目と2列目の列選択信号H[1]、H[2]がHiレベルとなり、マルチプレクサ7の1列目と2列目の列選択トランジスタ38がオンとなる。これにより、1列目のS/H容量37と2列目のS/H容量37の平均化された画素信号(水平画素混合信号)が水平共通信号線39に出力され、出力アンプ10を介して外部に出力される。つまり、1行目、2行目の1列目、2列目の画素の画素信号が混合された垂直2画素水平2画素混合信号が出力される。 Next, at timing t11, the sampling signal is at the Lo level, the column selection signals H [1] and H [2] of the first column and the second column of the column selection circuit 8 are at the Hi level, and the first column of the multiplexer 7 The column selection transistor 38 in the second column is turned on. As a result, the averaged pixel signal (horizontal pixel mixed signal) of the S / H capacitor 37 in the first column and the S / H capacitor 37 in the second column is output to the horizontal common signal line 39, via the output amplifier 10. Output to the outside. That is, a vertical two-pixel horizontal two-pixel mixed signal in which pixel signals of the pixels in the first and second columns of the first and second rows are mixed is output.
 同様に、タイミングt12では、3列目と4列目の列選択信号H[3]、H[4]がHiレベルとなり、マルチプレクサ7の3列目と4列目の列選択トランジスタ38がオンとなる。これにより、3列目のS/H容量37と4列目のS/H容量37の水平画素混合信号が水平共通信号線39に出力され、出力アンプ10を介して1行目、2行目の3列目、4列目の画素の画素信号が混合された垂直2画素水平2画素混合信号が外部に出力される。 Similarly, at timing t12, the column selection signals H [3] and H [4] for the third column and the fourth column are set to the Hi level, and the column selection transistors 38 for the third column and the fourth column of the multiplexer 7 are turned on. Become. As a result, the horizontal pixel mixed signal of the S / H capacitor 37 in the third column and the S / H capacitor 37 in the fourth column is output to the horizontal common signal line 39, and the first and second rows are output via the output amplifier 10. A vertical 2-pixel horizontal 2-pixel mixed signal obtained by mixing the pixel signals of the pixels in the third and fourth columns is output to the outside.
 同様に、順次列選択回路8の各列の列選択信号をHiレベルにすれば、各列のS/H容量37の信号が順次出力される。 Similarly, if the column selection signal of each column of the column selection circuit 8 is set to Hi level, the signal of the S / H capacitor 37 of each column is sequentially output.
 以上より、垂直2画素水平2画素混合された画素信号が順次出力される。さらに、図7に示した動作を、選択する行をn=1からn=nまで順に変更して有効部16の行数/2だけ繰り返せば、1画面分(1フレーム)の画像について有効部16全体の信号が読み出されることになる。 From the above, pixel signals in which two vertical pixels and two horizontal pixels are mixed are sequentially output. Further, if the operation shown in FIG. 7 is changed in order from n = 1 to n = n and is repeated by the number of rows of the valid portion 16/2, the valid portion for the image of one screen (one frame) is obtained. The entire 16 signals are read out.
 ところで、列回路部20のクランプ電位VCLは水平方向に分布があり、結果として各列の基準電位が列毎に異なることになる。これは、出力画像の基準となる暗状態出力に水平方向の不均一が発生することを意味し、画像において水平シェーディングが発生することになる。 By the way, the clamp potential VCL of the column circuit unit 20 has a distribution in the horizontal direction, and as a result, the reference potential of each column is different for each column. This means that nonuniformity in the horizontal direction occurs in the dark state output that is the reference of the output image, and horizontal shading occurs in the image.
 これに対し、常に暗状態の出力が得られる周辺部17の画素11bの画素信号を読み出し、この情報を用いて後段で補正すれば水平シェーディングをおさえることができる。 On the other hand, horizontal shading can be suppressed by reading out the pixel signal of the pixel 11b of the peripheral portion 17 that always obtains an output in the dark state and correcting this using this information at a later stage.
 次に、本実施形態にかかる固体撮像装置1が有する上記した2つの駆動モードに対し、それぞれの行選択動作を説明する。 Next, each row selection operation for the above-described two drive modes of the solid-state imaging device 1 according to the present embodiment will be described.
 図8は、全画素読み出しモードにおいて、制御部9から行選択回路3に供給される行アドレス信号の供給タイミングを示した行選択シーケンスである。同図では、16行の撮像部2を例として、1画面分の画素信号を出力する1フレーム期間についての行選択シーケンスを示している。同図(a)は、有効部16および周辺部17に対応する画素行の行番号を示している。行番号1から10までは周辺部17、行番号11から16までは有効部16の行を示している。また、同図(b)は、同図(a)に示した行番号を有する各行に供給される行アドレス信号のシーケンスを示しており、行番号11から16に対応したシーケンスが第1行選択シーケンス、行番号1から10に対応したシーケンスが第2行選択シーケンスである。また、1の行アドレス信号が出力される期間を行読み出し期間としている。行アドレス信号以外の信号は図6と同様であるため、ここでは説明を省略する。 FIG. 8 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the all-pixel readout mode. In the figure, a row selection sequence for one frame period in which pixel signals for one screen are output is shown by taking the imaging unit 2 of 16 rows as an example. FIG. 5A shows the row numbers of the pixel rows corresponding to the effective portion 16 and the peripheral portion 17. Line numbers 1 to 10 indicate the peripheral portion 17, and line numbers 11 to 16 indicate the effective portion 16. FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A. The sequence corresponding to the row numbers 11 to 16 is the first row selection. The sequence corresponding to the row numbers 1 to 10 is the second row selection sequence. In addition, a period during which one row address signal is output is a row reading period. Since signals other than the row address signal are the same as those in FIG. 6, the description thereof is omitted here.
 全画素読み出しモードでは、図8(b)に示すように、1フレーム期間において、第1行選択シーケンスおよび第2行選択シーケンスのいずれも、単一の行読み出し期間に1の行アドレス信号が出力されるシーケンス、つまり、1画素行ずつ順に指定する行アドレス信号を含むシーケンスが構成される。これらの行選択シーケンスに従って、行選択回路3は、有効部16の画素11aを行番号11から16まで1行ずつ順に選択し、周辺部17でも有効部16と同様に、周辺部17の画素11bを行番号1から10まで1行ずつ順に選択する。これにより、周辺部17の物理的な行数と同じ行数の、補正用データに使用される画素信号が得られる。 In the all-pixel readout mode, as shown in FIG. 8B, one row address signal is output in a single row readout period in both the first row selection sequence and the second row selection sequence in one frame period. Sequence, that is, a sequence including row address signals for sequentially designating one pixel row at a time. According to these row selection sequences, the row selection circuit 3 sequentially selects the pixels 11a of the effective portion 16 from the row numbers 11 to 16 one by one in order, and the peripheral portion 17 similarly to the effective portion 16 has the pixels 11b of the peripheral portion 17 as well. Are sequentially selected from line numbers 1 to 10 line by line. Thereby, the pixel signal used for the correction data having the same number of rows as the physical number of the peripheral portion 17 is obtained.
 一方、図9は、画素混合モードの一例である垂直2画素水平2画素混合モードにおいて、制御部9から行選択回路3に供給される行アドレス信号の供給タイミングを示した行選択シーケンスである。同図では、図8と同様に、1画面分の画素信号を出力する1フレーム期間についての行選択シーケンスを示している。同図(a)は、図8(a)と同様に、有効部16および周辺部17に対応する画素行の行番号を示している。行番号1から10までは周辺部17、行番号11から16までは有効部16の行を示している。また、同図(b)は、同図(a)に示した行番号を有する各行に供給される行アドレス信号のシーケンスを示しており、行番号11から16に対応したシーケンスが第1行選択シーケンス、行番号1から10に対応したシーケンスが第2行選択シーケンスである。行アドレス信号以外の信号は図7と同様であるため、ここでは説明を省略する。 On the other hand, FIG. 9 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the vertical 2-pixel horizontal 2-pixel mixing mode which is an example of the pixel mixing mode. In the same figure, as in FIG. 8, a row selection sequence for one frame period in which pixel signals for one screen are output is shown. FIG. 8A shows the row numbers of the pixel rows corresponding to the effective portion 16 and the peripheral portion 17 as in FIG. Line numbers 1 to 10 indicate the peripheral portion 17, and line numbers 11 to 16 indicate the effective portion 16. FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A. The sequence corresponding to the row numbers 11 to 16 is the first row selection. The sequence corresponding to the row numbers 1 to 10 is the second row selection sequence. Since signals other than the row address signal are the same as those in FIG. 7, the description thereof is omitted here.
 垂直2画素水平2画素混合モードでは、図9(b)に示すように、第1行選択シーケンスでは、単一の行読み出し期間に異なる2の行アドレス信号が出力されるシーケンス、つまり、2画素行ずつ順に指定する行アドレス信号を含むシーケンスが構成される。また、第2行選択シーケンスでは、1の画素行が単一の行読み出し期間に指定されるシーケンス、つまり、1行ずつ順に指定する行アドレス信号を含むシーケンスが構成される。したがって、第1行選択シーケンスと第2行選択シーケンスでは、同時に指定される画素行の行数が異なっている。これらの行選択シーケンスに従って、行選択回路3は、有効部16では行番号11から16まで同時に2行ずつ選択し、周辺部17では行番号1から10まで1行ずつ選択する。これにより、本モードでも、周辺部17の物理的な画素行数と同じ行数の、補正用データに使用される画素信号が得られる。これは、画素混合モードでも全画素読み出しモードと同様に、複数の行数の補正用データが得られ、水平シェーディング補正データを高精度で作成できることを意味している。 In the vertical two-pixel horizontal two-pixel mixed mode, as shown in FIG. 9B, in the first row selection sequence, a sequence in which two different row address signals are output in a single row readout period, that is, two pixels. A sequence including a row address signal that sequentially designates each row is formed. In the second row selection sequence, a sequence in which one pixel row is designated in a single row readout period, that is, a sequence including a row address signal that designates one row at a time is configured. Therefore, the first row selection sequence and the second row selection sequence differ in the number of pixel rows specified at the same time. According to these row selection sequences, the row selection circuit 3 selects two rows from the row numbers 11 to 16 simultaneously in the valid portion 16 and selects one row from the row numbers 1 to 10 in the peripheral portion 17 one by one. As a result, even in this mode, pixel signals used for correction data having the same number of physical pixel rows as that of the peripheral portion 17 can be obtained. This means that correction data of a plurality of rows can be obtained in the pixel mixture mode as well as the all-pixel readout mode, and horizontal shading correction data can be created with high accuracy.
 このように、本発明によると、有効部16の画素信号を混合する画素混合モードであっても、周辺部17の画素信号を有効部16の画素信号の混合に合わせて混合することなく出力でき、周辺部17から得られる補正用データの数を減らすことがなく、補正用データの精度低下を抑制して、高画質な画素混合モードが実現可能になる。また、本発明では、周辺部17の画素行の行数は従来と同等であり、回路の寄生成分の大きさも同等である。これは、低消費電力に画素混合モードの高画質化が実現できることを意味する。 Thus, according to the present invention, even in the pixel mixing mode in which the pixel signals of the effective portion 16 are mixed, the pixel signals of the peripheral portion 17 can be output without being mixed in accordance with the mixing of the pixel signals of the effective portion 16. Thus, without reducing the number of correction data obtained from the peripheral portion 17, it is possible to realize a high-quality pixel mixing mode by suppressing a decrease in accuracy of the correction data. Further, in the present invention, the number of pixel rows in the peripheral portion 17 is the same as in the prior art, and the size of parasitic components in the circuit is also the same. This means that high image quality in the pixel mixing mode can be realized with low power consumption.
 なお、画素混合モードでは、上記したように垂直2画素水平2画素の画素信号の混合に限らず、画素信号を混合する画素数を変更してもよい。 In the pixel mixing mode, as described above, the number of pixels for mixing pixel signals may be changed without being limited to the mixing of pixel signals of two vertical pixels and two horizontal pixels.
 また、有効部16と周辺部17では、画素信号が混合される行数や画素数を同数にする必要はなく、異なる行数や画素数にしてもよい。例えば、第1行選択シーケンスでは同時に3以上の行を選択するシーケンス、第2行選択シーケンスでは同時に2以上の行を選択するシーケンスを構成して、有効部16では3行の画素信号を混合し、周辺部17では2行の画素信号を混合して出力してもよい。 Also, the effective portion 16 and the peripheral portion 17 do not have to have the same number of rows and pixels in which pixel signals are mixed, and may have different numbers of rows and pixels. For example, a sequence for selecting three or more rows at the same time in the first row selection sequence, and a sequence for selecting two or more rows at the same time in the second row selection sequence, and the valid portion 16 mixes the pixel signals of three rows. In the peripheral portion 17, the pixel signals of two rows may be mixed and output.
 (第2の実施形態)
 次に、本発明の第2の実施形態について説明する。第2の実施形態が第1の実施形態と異なる点は、第1の実施形態に示した画素混合モードの一例である垂直2画素水平2画素混合モードにおいて、2以上の画素行が単一の行読み出し期間に指定され、第N画素行(Nは1以上の整数)は、単一の行読み出し期間に第M画素行(Mは1以上の整数、かつ、M≠N)と共に指定され、1フレーム期間においてMの値を変更して複数回指定される点である。固体撮像装置の回路構成、有効部の読み出し動作、全画素読み出しモードでの周辺部の読み出し動作は、第1の実施形態と同じである。
(Second Embodiment)
Next, a second embodiment of the present invention will be described. The second embodiment is different from the first embodiment in that in the vertical two-pixel horizontal two-pixel mixed mode which is an example of the pixel mixed mode shown in the first embodiment, two or more pixel rows are single. The Nth pixel row (N is an integer greater than or equal to 1) is designated with the Mth pixel row (M is an integer greater than or equal to 1 and M ≠ N) in a single row readout period. The point is that the value of M is changed multiple times during one frame period. The circuit configuration of the solid-state imaging device, the readout operation of the effective part, and the readout operation of the peripheral part in the all-pixel readout mode are the same as in the first embodiment.
 図10は、垂直2画素水平2画素混合モードにおいて、制御部9から行選択回路3に供給される行アドレス信号の供給タイミングを示した行選択シーケンスである。同図では、図8と同様に、16行の撮像部2を例として、1画面分の画素信号を出力する1フレーム期間についての行選択シーケンスを示している。同図(a)は、有効部16および周辺部17に設けられた画素行に、連続する行番号を付して示したものである。第N画素行(Nは1以上の整数)、第M画素行(Mは1以上、かつ、M≠N)の行番号N、Mは、これらのいずれかに対応する。行番号1から10までは周辺部17、行番号11から16までは有効部16の画素行を示している。また、同図(b)は、同図(a)に示した行番号を有する各行に供給される行アドレス信号のシーケンスを示しており、行番号11から16に対応したシーケンスが第1行選択シーケンス、行番号1から10に対応したシーケンスが第2行選択シーケンスである。 FIG. 10 is a row selection sequence showing the supply timing of the row address signal supplied from the control unit 9 to the row selection circuit 3 in the vertical 2-pixel horizontal 2-pixel mixed mode. In the same figure, similarly to FIG. 8, the row selection sequence for one frame period in which pixel signals for one screen are output is shown by taking the imaging unit 2 of 16 rows as an example. FIG. 6A shows pixel rows provided in the effective portion 16 and the peripheral portion 17 with consecutive row numbers. The row numbers N and M of the Nth pixel row (N is an integer of 1 or more) and the Mth pixel row (M is 1 or more and M ≠ N) correspond to any of these. Row numbers 1 to 10 indicate the peripheral portion 17, and row numbers 11 to 16 indicate the pixel rows of the effective portion 16. FIG. 4B shows a sequence of row address signals supplied to each row having the row number shown in FIG. 2A. The sequence corresponding to the row numbers 11 to 16 is the first row selection. The sequence corresponding to the row numbers 1 to 10 is the second row selection sequence.
 図10(b)に示すように、この行選択シーケンスにより、周辺部17では、第1画素行(N=1)は、単一の行読み出し期間に第2画素行(M=2)と共に指定される。つまり、行番号1と行番号2が同時に選択される。続いて、行番号3と4、行番号5と6、行番号7と8がそれぞれ選択される。 As shown in FIG. 10B, by this row selection sequence, in the peripheral portion 17, the first pixel row (N = 1) is designated together with the second pixel row (M = 2) in a single row readout period. Is done. That is, line number 1 and line number 2 are selected simultaneously. Subsequently, line numbers 3 and 4, line numbers 5 and 6, and line numbers 7 and 8 are selected, respectively.
 次に、同一の1フレーム期間において、異なる単一の行読み出し期間に、第1画素行(N=1)は、第6画素行(M=6)と共に指定される。つまり、行番号1と6が同時に選択される。ここで、行番号1の選択は2回目だが、1回目の行番号1の選択では行番号2が同時に選択されていたのに対し、2回目の行番号1の選択では行番号6が同時に選択され、組み合わせる行が1回目と異なっている。同様に、行番号2と7、行番号3と8、行番号4と9、行番号5と10がそれぞれ選択される。この結果、行数が10行の周辺部17において、2つの行を同時に指定した場合でも、補正用データに使用される画素信号として10組分の画素信号が得られるので、1つの行毎に読み出した場合に得られる10行分の画素信号と同数の画素信号が得られることになる。 Next, in the same one frame period, the first pixel row (N = 1) is designated together with the sixth pixel row (M = 6) in different single row readout periods. That is, line numbers 1 and 6 are selected simultaneously. Here, selection of line number 1 is the second time, but line number 2 is selected at the same time in the first selection of line number 1, whereas line number 6 is selected at the same time in the second selection of line number 1. The combined row is different from the first time. Similarly, line numbers 2 and 7, line numbers 3 and 8, line numbers 4 and 9, and line numbers 5 and 10 are selected, respectively. As a result, even when two rows are designated at the same time in the peripheral portion 17 having 10 rows, ten sets of pixel signals are obtained as the pixel signals used for the correction data. The same number of pixel signals as the pixel signals for 10 rows obtained when read out are obtained.
 その後、第1の実施形態の図9に示した行選択シーケンスと同様に、第1行選択シーケンスに応じて、行番号11と12、行番号13と14、行番号15と16がそれぞれ順に選択され、有効部16の画素信号が読み出される。この結果、第1行選択シーケンスでは各行が指定される回数は1回、第2行選択シーケンスでは各行が指定される回数は2回となり、周辺部17では周辺部17の画素信号を1行ずつ読み出した場合と同数の画素信号を得ることができる。 After that, similarly to the row selection sequence shown in FIG. 9 of the first embodiment, row numbers 11 and 12, row numbers 13 and 14, and row numbers 15 and 16 are selected in order according to the first row selection sequence. Then, the pixel signal of the effective unit 16 is read out. As a result, the number of times each row is designated is 1 in the first row selection sequence, and the number of times each row is designated is 2 in the second row selection sequence. It is possible to obtain the same number of pixel signals as when reading.
 このようなシーケンスにより、水平シェーディングに対する補正用データを高精度で作成でき、高画質な混合モードが実現可能になる。また、有効部16の読み出しと周辺部17の読み出しにおいて同時に指定される行数は同じであり、駆動モードの差により両者の出力にオフセットが発生する懸念がなく、後段の補正処理がより容易になるという利点もある。 Such a sequence makes it possible to create correction data for horizontal shading with high accuracy and to realize a high-quality mixed mode. In addition, the number of rows designated at the same time in the reading of the effective portion 16 and the reading of the peripheral portion 17 is the same, there is no concern that an offset will be generated between the outputs due to the difference in the drive mode, and the subsequent correction process is easier. There is also an advantage of becoming.
 なお、本実施形態では2画素行の画素信号を混合するとともに2回ずつ指定しているが、混合する画素行の数および回数は変更してもよい。例えば、3画素行の画素信号を混合するとともに、3回ずつ指定してもよい。 In this embodiment, the pixel signals of the two pixel rows are mixed and designated twice, but the number and the number of pixel rows to be mixed may be changed. For example, pixel signals of three pixel rows may be mixed and specified three times.
 (第3の実施形態)
 次に、本発明の第3の実施形態について説明する。第3の実施形態が第1の実施形態と異なる点は、第1の実施形態に示したマルチプレクサと列選択回路に代えて、カラムADCとデジタル混合器を備える点である。
(Third embodiment)
Next, a third embodiment of the present invention will be described. The third embodiment is different from the first embodiment in that a column ADC and a digital mixer are provided instead of the multiplexer and the column selection circuit shown in the first embodiment.
 図11は、本発明の第3の実施形態における固体撮像装置の全体構成を示す図である。同図に示すように、本実施形態における固体撮像装置101は、撮像部102と、行選択回路103と、画素電流源回路104と、クランプ回路105と、サンプルホールド(S/H)回路106と、カラムADC144と、デジタル混合器145と、制御部109と、垂直信号線119とを備えている。なお、画素電流源回路104と、クランプ回路105と、サンプルホールド回路106とにより、列回路部120が構成される。また、同図において出力部(出力アンプ)は図示を省略している。 FIG. 11 is a diagram showing an overall configuration of a solid-state imaging device according to the third embodiment of the present invention. As shown in the figure, the solid-state imaging device 101 according to the present embodiment includes an imaging unit 102, a row selection circuit 103, a pixel current source circuit 104, a clamp circuit 105, and a sample hold (S / H) circuit 106. Column ADC 144, digital mixer 145, control unit 109, and vertical signal line 119. The pixel current source circuit 104, the clamp circuit 105, and the sample hold circuit 106 constitute a column circuit unit 120. Further, in the figure, the output unit (output amplifier) is not shown.
 カラムADC144は、列方向にカラムADC144の基本単位144aがアレイ状にならび(後述する図12参照)、サンプルホールド回路106に保持された行単位のアナログ画素信号をデジタル信号に変換する。 In the column ADC 144, the basic units 144a of the column ADC 144 are arranged in an array in the column direction (see FIG. 12 described later), and the row-unit analog pixel signals held in the sample hold circuit 106 are converted into digital signals.
 デジタル混合器145は、列方向にデジタル混合器の基本単位(図示せず)がアレイ状にならび、カラムADC144の出力データの混合を行う。 In the digital mixer 145, the basic units (not shown) of the digital mixer are arranged in an array in the column direction, and the output data of the column ADC 144 is mixed.
 撮像部102、画素電流源回路104、クランプ回路105、サンプルホールド回路106、行選択回路103、制御部109の構成は第1の実施形態と同様であるため、説明を省略する。なお、撮像部102は、受光量に応じた画素信号を出力する画素111aが2次元状に配列された有効部116と、遮光画素であり常に暗状態の出力が得られる画素111bを有する周辺部117を備えている。ここで、画素111aおよび画素111bがそれぞれ本発明における第1画素および第2画素に相当する。 Since the configurations of the imaging unit 102, the pixel current source circuit 104, the clamp circuit 105, the sample hold circuit 106, the row selection circuit 103, and the control unit 109 are the same as those in the first embodiment, the description thereof is omitted. The imaging unit 102 includes a peripheral unit having an effective unit 116 in which pixels 111a that output pixel signals corresponding to the amount of received light are two-dimensionally arranged, and a pixel 111b that is a light-shielding pixel and always obtains a dark state output. 117. Here, the pixel 111a and the pixel 111b correspond to the first pixel and the second pixel in the present invention, respectively.
 図12は、カラムADC144の構成を示す図である。カラムADC144は、カラムADC入力端子146と、コンパレータ147と、ランプ波形生成回路148と、ラッチ149と、カウンタ150とを備えている。各垂直信号線119には、カラムADC144の基本単位144aが配置されている。 FIG. 12 is a diagram showing the configuration of the column ADC 144. The column ADC 144 includes a column ADC input terminal 146, a comparator 147, a ramp waveform generation circuit 148, a latch 149, and a counter 150. In each vertical signal line 119, a basic unit 144a of a column ADC 144 is arranged.
 カラムADC入力端子146に入力されたサンプルホールド回路106からの画素信号は、コンパレータ147に入力される。 The pixel signal from the sample hold circuit 106 input to the column ADC input terminal 146 is input to the comparator 147.
 コンパレータ147は、ランプ波形生成回路148により生成されたランプ波形と画素信号との比較を行い、ランプ波形が画素信号よりも低いときにHiレベルのラッチ信号を出力する。 The comparator 147 compares the ramp waveform generated by the ramp waveform generation circuit 148 with the pixel signal, and outputs a Hi level latch signal when the ramp waveform is lower than the pixel signal.
 ラッチ149は、AD変換後のデジタル値のビット数に応じた基本単位を有し、各基本単位にはカウンタ150の出力が入力され、コンパレータ147からのラッチ信号がHiレベルからLoレベルに切り替わったときにそれを書き込む。カウンタ150は、ランプ波形に同期してカウントアップを行う。 The latch 149 has a basic unit corresponding to the number of bits of the digital value after AD conversion. The output of the counter 150 is input to each basic unit, and the latch signal from the comparator 147 is switched from the Hi level to the Lo level. When you write it. The counter 150 counts up in synchronization with the ramp waveform.
 デジタル混合器145は、それぞれの列においてカラムADC144の基本単位144aでAD変換された複数列の画素信号を混合する。これにより、複数行および複数列の画素信号が混合されたデジタル値の混合画素信号が生成される。 The digital mixer 145 mixes pixel signals of a plurality of columns that are AD-converted by the basic unit 144a of the column ADC 144 in each column. As a result, a mixed pixel signal having a digital value in which pixel signals in a plurality of rows and columns are mixed is generated.
 次に、カラムADC144のAD変換動作について、図13のタイミングチャートを参照して説明する。 Next, the AD conversion operation of the column ADC 144 will be described with reference to the timing chart of FIG.
 まず、図13に示すタイミングt0で、カラムADC144のカラムADC入力端子146に画素信号を入力し、ランプ波形生成回路148から出力されるランプ波形を画素信号の最小値に、カウンタ150のカウンタ値を0に設定する。ここで、同図に示すように、ランプ波形は画素信号より低いレベルなので、コンパレータ147から出力されるラッチ信号はHiレベルである。 First, at a timing t0 shown in FIG. 13, a pixel signal is input to the column ADC input terminal 146 of the column ADC 144, the ramp waveform output from the ramp waveform generation circuit 148 is set to the minimum value of the pixel signal, and the counter value of the counter 150 is set. Set to 0. Here, as shown in the figure, since the ramp waveform is at a level lower than the pixel signal, the latch signal output from the comparator 147 is at the Hi level.
 次に、タイミングt1で、ランプ波形のレベルは上昇し始める。上昇の傾きはタイミングt3で画素信号の最大値に達するように設定する。カウンタ150のカウンタ値もランプ波形の上昇に同期させてカウントアップさせる。 Next, at the timing t1, the ramp waveform level starts to rise. The rising slope is set to reach the maximum value of the pixel signal at timing t3. The counter value of the counter 150 is also counted up in synchronization with the ramp waveform rise.
 タイミングt2では、ランプ波形が画素信号より大きくなるので、ラッチ信号がLoレベルに切り替わり、そのときのカウンタ値がラッチ149に書き込まれる。例えば、図13に示す場合には、カウンタ値として4が書き込まれる。先に述べたように、ランプ波形の上昇とカウンタ150のカウントアップは同期しているので、ラッチ149に書き込まれたカウンタ値(デジタル値)は画素信号の大きさに対応した値になっている。 At timing t2, since the ramp waveform becomes larger than the pixel signal, the latch signal is switched to the Lo level, and the counter value at that time is written in the latch 149. For example, in the case shown in FIG. 13, 4 is written as the counter value. As described above, since the rise of the ramp waveform and the count-up of the counter 150 are synchronized, the counter value (digital value) written in the latch 149 is a value corresponding to the magnitude of the pixel signal. .
 以上の動作は各列に設けられたカラムADC144の基本単位144aで並列に行われており、1行分のアナログ画素信号が並列にAD変換され、デジタル信号が各列のラッチ149に保持される。 The above operation is performed in parallel in the basic unit 144a of the column ADC 144 provided in each column, and analog pixel signals for one row are AD-converted in parallel, and the digital signal is held in the latch 149 in each column. .
 本実施の形態における固体撮像装置101は、駆動モードとして静止画撮影用の全画素読み出しモードと動画撮影用の画素混合モードとを備えている。次に、それぞれの駆動モードに関し、有効部116の信号読み出し動作を説明する。 The solid-state imaging device 101 according to the present embodiment includes an all-pixel readout mode for still image shooting and a pixel mixing mode for moving image shooting as drive modes. Next, the signal reading operation of the valid unit 116 will be described for each driving mode.
 全画素読み出しモードでは、第1の実施形態と同様に、まず、撮像部102から1行分の画素信号を読み出し、サンプルホールド回路106に保持する。次に、カラムADC144で当該1行分の画素信号をAD変換する。最後に、図11には記載されていない出力部を介して、これらのデジタル信号を順次チップ外部に出力する。以上の動作を有効部116の行数だけ繰り返せば撮像部102全体の画素111aから画素信号が出力される。 In the all-pixel readout mode, as in the first embodiment, first, pixel signals for one row are read out from the imaging unit 102 and are held in the sample hold circuit 106. Next, the column ADC 144 performs AD conversion on the pixel signals for one row. Finally, these digital signals are sequentially output to the outside of the chip via an output unit not shown in FIG. If the above operation is repeated for the number of rows of the effective unit 116, a pixel signal is output from the pixels 111a of the entire imaging unit 102.
 画素混合モードでも、第1の実施形態と同様に、まず、撮像部102で2行を同時選択して2行分の画素111bの画素信号を読み出し、垂直信号線119で混合された2行分の混合画素信号をサンプルホールド回路106に保持する。次に、カラムADC144で混合画素信号をAD変換する。 Even in the pixel mixture mode, as in the first embodiment, first, two rows are simultaneously selected by the imaging unit 102, the pixel signals of the pixels 111b for two rows are read, and the two rows mixed by the vertical signal line 119 are read. The mixed pixel signal is held in the sample hold circuit 106. Next, the mixed signal is AD converted by the column ADC 144.
 続いて、デジタル混合器145で2列分の画素信号(デジタル値)の混合を行う。最後に、図12には記載されていない出力部を介して、これらの混合画素信号が順次チップ外部に出力される。以上の動作を有効部116の画素行数/2だけ繰り返せば、撮像部102全体の画素信号が出力される。 Subsequently, pixel signals (digital values) for two columns are mixed by the digital mixer 145. Finally, these mixed pixel signals are sequentially output to the outside of the chip via an output unit not shown in FIG. If the above operation is repeated by the number of pixel rows / 2 of the effective unit 116, the pixel signal of the entire imaging unit 102 is output.
 ところで、列回路部120のクランプ電位は水平方向に分布があり、結果として各列の基準電位が列毎に異なることになる。これは、出力画像の基準となる暗状態出力に水平方向の不均一が発生することを意味し、画像において水平シェーディングが発生することになる。 By the way, the clamp potential of the column circuit unit 120 is distributed in the horizontal direction, and as a result, the reference potential of each column is different for each column. This means that nonuniformity in the horizontal direction occurs in the dark state output that is the reference of the output image, and horizontal shading occurs in the image.
 これに対し、常に暗状態の出力が得られる周辺部117(画素111b)の画素信号を読み出し、この情報を用いて後段で補正すれば水平シェーディングをおさえることができる。 On the other hand, horizontal shading can be suppressed by reading out the pixel signal of the peripheral portion 117 (pixel 111b), which always provides a dark state output, and correcting this information later.
 本固体撮像装置101が有する上記した2つの駆動モードに対し、それぞれの周辺部117の読み出し動作を説明する。 The readout operation of each peripheral portion 117 for the above-described two drive modes of the solid-state imaging device 101 will be described.
 全画素読み出しモードでは、第1の実施形態における図8に示したように、周辺部117でも有効部116と同様に、画素信号を読み出す画素111bを行番号1から順次選択する。これにより、周辺部117の物理的な行数と同じ行数の、補正用データに使用される画素信号が得られる。 In the all-pixel readout mode, as shown in FIG. 8 in the first embodiment, the peripheral part 117 sequentially selects the pixels 111b from which pixel signals are read from the row number 1 in the same manner as the effective part 116. Thereby, the pixel signal used for the correction data having the same number of rows as the physical number of the peripheral portion 117 is obtained.
 一方、垂直2画素水平2画素混合モードでは、第1の実施形態における図9に示したように、有効部116では同時に2つの行を選択するが、周辺部117では行番号1から1行ずつ選択する。これにより、本モードでも、周辺部117の物理的な行数と同じ行数の、補正用データに使用される画素信号が得られる。これは、画素混合モードでも全画素読み出しモードと同様に、複数の行数の補正用データが得られ、水平シェーディング補正データを高精度で作成できることを意味し、高画質な画素混合モードが実現可能になる。 On the other hand, in the vertical two-pixel horizontal two-pixel mixed mode, as shown in FIG. 9 in the first embodiment, the effective unit 116 selects two rows at the same time, but the peripheral unit 117 selects one row from row number 1 at a time. select. As a result, even in this mode, pixel signals used for correction data having the same number of rows as the physical number of the peripheral portion 117 can be obtained. This means that correction data for multiple rows can be obtained in the pixel mixing mode as well as the all-pixel readout mode, and horizontal shading correction data can be created with high accuracy, and a high-quality pixel mixing mode can be realized. become.
 なお、水平シェーディングの補正は、固体撮像装置内にデジタル信号処理回路を内蔵して実行してもよい。 Note that the correction of horizontal shading may be performed by incorporating a digital signal processing circuit in the solid-state imaging device.
 (第4の実施形態)
 次に、本発明の第4の実施形態について説明する。図14は、本発明の第4の実施形態における撮像装置(カメラ)の全体構成を示す図である。
(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described. FIG. 14 is a diagram illustrating an overall configuration of an imaging apparatus (camera) according to the fourth embodiment of the present invention.
 図14に示すように、本実施形態における撮像装置151は、第1の実施形態に記載した固体撮像装置1と、アナログフロントエンド(AFE)152と、デジタル信号処理プロセッサ(DSP)153と、メモリ154とを備えている。 As illustrated in FIG. 14, the imaging device 151 according to the present embodiment includes a solid-state imaging device 1 described in the first embodiment, an analog front end (AFE) 152, a digital signal processor (DSP) 153, and a memory 154.
 アナログフロントエンド152は、固体撮像装置1から出力された有効部16および周辺部17の画素信号(アナログ信号)をデジタル画像信号処理装置で扱うことができるよう、デジタル信号に変換する。 The analog front end 152 converts the pixel signals (analog signals) of the effective unit 16 and the peripheral unit 17 output from the solid-state imaging device 1 into digital signals so that the digital image signal processing device can handle them.
 デジタル信号処理プロセッサ153は、デジタル信号に変換された有効部16の画素信号を、メモリ154に記憶されている補正用データによって補正する。 The digital signal processor 153 corrects the pixel signal of the effective unit 16 converted into the digital signal with the correction data stored in the memory 154.
 メモリ154は、固体撮像装置1から出力された周辺部17の画素信号、つまり、新たに補正用データを生成するための周辺部データと、周辺部17の画素信号を用いて生成された補正用データとを記憶する。 The memory 154 is a pixel signal for the peripheral portion 17 output from the solid-state imaging device 1, that is, a peripheral portion data for newly generating correction data and a correction portion generated using the pixel signal of the peripheral portion 17. Memorize data.
 本撮像装置151は、カメラスチル撮影に使える全画素読み出しモードと、動画記録機能に使える画素混合モードにより駆動される。 The imaging device 151 is driven by an all-pixel readout mode that can be used for camera still photography and a pixel mixture mode that can be used for a moving image recording function.
 図15に、本撮像装置151における全画素読み出しモードの動作を説明するフローチャートを示す。 FIG. 15 shows a flowchart for explaining the operation in the all-pixel readout mode in the imaging apparatus 151.
 ステップ1では、図1に示した周辺部17に配置された画素11bから周辺部データ(画素信号)を1行ずつ読み出す(ST1)。このとき、固体撮像装置1の撮像部2に対しては、1行のみ選択して、選択した行の画素11bから画素信号の読み出しを行う。 In step 1, peripheral data (pixel signals) are read out line by line from the pixels 11b arranged in the peripheral part 17 shown in FIG. 1 (ST1). At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11b in the selected row.
 ステップ2では、ステップ1で検出された周辺部データとメモリ154に保持されている補正用データの値を用いて、新しい補正用データを作成する(ST2)。 In step 2, new correction data is created using the peripheral data detected in step 1 and the correction data value stored in the memory 154 (ST2).
 ステップ3では、周辺部17の読み出しが完了したか否かを判断し、否の場合はステップ1に戻る(ST3)。以上、ステップ1とステップ2を周辺部17の全行に対して行えば、周辺部17の各列の出力の平均からなる補正用データが得られる。この補正用データは、暗状態の水平シェーディングデータに相当する。この補正用データは、メモリ154に保持される。 In step 3, it is determined whether or not the reading of the peripheral portion 17 is completed. If not, the process returns to step 1 (ST3). As described above, when Step 1 and Step 2 are performed on all the rows of the peripheral portion 17, correction data including the average of the output of each column of the peripheral portion 17 is obtained. This correction data corresponds to dark horizontal shading data. This correction data is held in the memory 154.
 次に、ステップ4では、有効部16に配置された画素11aから画素信号を1行ずつ読み出す(ST4)。このとき、固体撮像装置1の撮像部2に対しては、1行のみ選択して、選択した行の画素11aから画素信号の読み出しを行う。 Next, in step 4, pixel signals are read out row by row from the pixels 11a arranged in the effective section 16 (ST4). At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11a in the selected row.
 ステップ5では、ステップ4で得られたデータからメモリ154に保持されている補正データを減算することにより、水平シェーディングの補正を行う(ST5)。 In step 5, horizontal shading correction is performed by subtracting the correction data held in the memory 154 from the data obtained in step 4 (ST5).
 ステップ6では、有効部16の各画素行の画素11aから画素信号の読み出しが完了したか否かを判断し、否の場合はステップ4に戻る(ST6)。 In step 6, it is determined whether or not the readout of the pixel signal from the pixels 11a in each pixel row of the effective unit 16 is completed. If not, the process returns to step 4 (ST6).
 以上、ステップ4とステップ5を有効部16全体に対して行えば、有効部16全体に対し水平シェーディングが補正された高画質な画像が得られる。 As described above, if Step 4 and Step 5 are performed on the entire effective section 16, a high-quality image in which horizontal shading is corrected on the entire effective section 16 can be obtained.
 次に、画素混合モードの動作を説明する。画素混合モードの動作を説明するフローチャートは、図15に記載した全画素読み出しモードと同様である。 Next, the operation of the pixel mixing mode will be described. The flowchart for explaining the operation in the pixel mixture mode is the same as that in the all-pixel readout mode described in FIG.
 ステップ1では、図1に示した周辺部17に配置された画素11bから周辺部データを1行ずつ読み出す。このとき、固体撮像装置1の撮像部2に対しては、1行のみ選択して、選択した行の画素11bから画素信号の読み出しを行う(ST1)。 In step 1, peripheral data is read line by line from the pixels 11b arranged in the peripheral part 17 shown in FIG. At this time, for the imaging unit 2 of the solid-state imaging device 1, only one row is selected, and pixel signals are read from the pixels 11b in the selected row (ST1).
 ステップ2では、ステップ1で検出された周辺部データとメモリ154に保持されている補正用データの値を用いて、新しい補正用データを作成する(ST2)。 In step 2, new correction data is created using the peripheral data detected in step 1 and the correction data value stored in the memory 154 (ST2).
 ステップ3では、周辺部17の読み出しが完了したか否かを判断し、否の場合はステップ1に戻る(ST3)。以上、ステップ1とステップ2を周辺部17の全行に対して行えば、周辺部17の各列の出力の平均からなる補正用データが得られる。この補正用データは、暗状態の水平シェーディングデータに相当する。この補正用データは、メモリ154に保持される。 In step 3, it is determined whether or not the reading of the peripheral portion 17 is completed. If not, the process returns to step 1 (ST3). As described above, when Step 1 and Step 2 are performed on all the rows of the peripheral portion 17, correction data including the average of the output of each column of the peripheral portion 17 is obtained. This correction data corresponds to dark horizontal shading data. This correction data is held in the memory 154.
 次に、ステップ4では、有効部16に配置された画素11aから画素信号を2行ずつ読み出す(ST4)。このとき、固体撮像装置1の撮像部2に対しては、2行を同時に選択して、選択した行の画素11aから画素信号の読み出しを行う。信号読み出し時の垂直、水平信号の混合動作により、固体撮像装置1からは画素混合信号が出力される。 Next, in step 4, pixel signals are read out row by row from the pixels 11a arranged in the effective portion 16 (ST4). At this time, for the imaging unit 2 of the solid-state imaging device 1, two rows are simultaneously selected, and pixel signals are read from the pixels 11a in the selected row. A pixel mixture signal is output from the solid-state imaging device 1 by the mixing operation of the vertical and horizontal signals at the time of signal readout.
 ステップ5では、ステップ4で得られたデータからメモリ154に保持されている補正データを減算することにより、水平シェーディングの補正を行う(ST5)。 In step 5, horizontal shading correction is performed by subtracting the correction data held in the memory 154 from the data obtained in step 4 (ST5).
 ステップ6では、有効部16の各画素行の画素11aから画素信号の読み出しが完了したか否かを判断し、否の場合はステップ4に戻る(ST6)。 In step 6, it is determined whether or not the readout of the pixel signal from the pixels 11a in each pixel row of the effective unit 16 is completed. If not, the process returns to step 4 (ST6).
 以上、ステップ4とステップ5を有効部16全体に対して行えば、有効部16全体に対し水平シェーディングが補正された高画質な混合画像が得られる。このときの補正用データも、全画素読み出しモードと同等の多数の周辺部データから生成されることになり、高精度な補正が可能である。 As described above, if Step 4 and Step 5 are performed on the entire effective portion 16, a high-quality mixed image in which horizontal shading is corrected on the entire effective portion 16 can be obtained. The correction data at this time is also generated from a large number of peripheral data equivalent to the all-pixel readout mode, and high-precision correction is possible.
 なお、本発明は、上記した実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の改良、変形を行ってもよい。 The present invention is not limited to the above-described embodiment, and various improvements and modifications may be made without departing from the scope of the present invention.
 例えば、有効部、周辺部に配置される画素は、上記した個数や配置に限らず、適宜変更してもよい。 For example, the pixels arranged in the effective portion and the peripheral portion are not limited to the number and arrangement described above, and may be changed as appropriate.
 また、周辺部の画素は、あらかじめ遮光された遮光画素に限らず、一定の基準電圧を出力する画素であればよい。 The peripheral pixels are not limited to light-shielded pixels that are shielded in advance, but may be pixels that output a constant reference voltage.
 また、画素混合モードにおける有効部および周辺部の画素信号の読み出しは、上記した実施形態に示した読み出し方法に限らず、その他の方法であってもよい。例えば、垂直2画素水平2画素の画素信号を混合した垂直2画素水平2画素混合モードに限らず、その他の混合モードとしてもよい。また、画素信号を混合して読み出す行の組み合わせは、上記した実施形態に限らずどのような組み合わせであってもよい。 In addition, the readout of the pixel signals of the effective portion and the peripheral portion in the pixel mixture mode is not limited to the readout method shown in the above-described embodiment, and other methods may be used. For example, the present invention is not limited to the vertical two-pixel horizontal two-pixel mixed mode in which pixel signals of two vertical pixels and two horizontal pixels are mixed, and other mixed modes may be used. Further, the combination of rows for reading out pixel signals by mixing is not limited to the above-described embodiment, and any combination may be used.
 また、本発明にかかる固体撮像装置、撮像装置の構成は、上記した実施の形態に限らず、どのような構成であってもよい。例えば、画素電流源回路、クランプ回路、サンプルホールド回路、マルチプレクサ、列選択回路、カラムADC、デジタル混合器の構成やこれらの組み合わせを変更した構成であってもよい。 Further, the configuration of the solid-state imaging device and the imaging device according to the present invention is not limited to the above-described embodiment, and may be any configuration. For example, the pixel current source circuit, the clamp circuit, the sample hold circuit, the multiplexer, the column selection circuit, the column ADC, the digital mixer, or a combination thereof may be changed.
 また、本発明にかかる固体撮像装置には、上記実施の形態における任意の構成要素を組み合わせて実現される別の実施の形態や、実施の形態に対して本発明の主旨を逸脱しない範囲で当業者が思いつく各種変形を施して得られる変形例や、本発明にかかる固体撮像装置を備えた各種デバイスなども本発明に含まれる。例えば、本発明にかかる固体撮像装置を備えたムービーカメラも本発明に含まれる。 In addition, the solid-state imaging device according to the present invention includes other embodiments realized by combining arbitrary components in the above-described embodiments, and other embodiments that do not depart from the gist of the present invention. Modifications obtained by various modifications conceived by a trader and various devices including the solid-state imaging device according to the present invention are also included in the present invention. For example, a movie camera including the solid-state imaging device according to the present invention is also included in the present invention.
 本発明にかかる固体撮像装置は、デジタル一眼レフカメラ、高級コンパクトカメラなど高画質、高機能が求められる撮像機器向けイメージセンサとして有用である。 The solid-state imaging device according to the present invention is useful as an image sensor for imaging equipment that requires high image quality and high functionality such as a digital single-lens reflex camera and a high-end compact camera.
1、101 固体撮像装置
2、102、200 撮像部
3、103 行選択回路
9、109 制御部
11a、111a 画素(第1画素)
11b、111b 画素(第2画素)
16、116 有効部
17、117 周辺部
20 列回路部
151 撮像装置
153 デジタル信号処理プロセッサ(デジタル信号処理部)
154 メモリ(記憶部)
DESCRIPTION OF SYMBOLS 1,101 Solid-state imaging device 2,102,200 Imaging part 3,103 Row selection circuit 9,109 Control part 11a, 111a Pixel (1st pixel)
11b, 111b pixels (second pixels)
16, 116 Effective part 17, 117 Peripheral part 20 Column circuit part 151 Imaging device 153 Digital signal processor (digital signal processor)
154 Memory (storage unit)

Claims (10)

  1.  複数の駆動モードにより駆動される固体撮像装置において、
     2次元状に配列された複数の画素を有する撮像部と、
     水平方向に配列された前記複数の画素により構成される画素行を選択する行選択回路と、
     選択された画素行の前記複数の画素から出力される画素信号を一時保持する列回路部と、
     単一の行読み出し期間中、選択すべき画素行を指定する行アドレス信号を前記行選択回路に供給する制御部とを備え、
     前記複数の画素は、
     受光量に応じた画素信号を出力する複数の第1画素と、
     一定の画素信号を出力する複数の第2画素とを含み、
     前記撮像部は、
     前記複数の第1画素が配置された有効部と、
     前記複数の第2画素が配置された周辺部とを有し、
     少なくとも1つの前記駆動モードにおいて、
     前記制御部は、
     前記有効部に対応する前記行アドレス信号を含む第1行選択シーケンスと、前記周辺部に対応する前記行アドレス信号を含む第2行選択シーケンスとを、前記第1行選択シーケンスと前記第2行選択シーケンスにおいて同時に指定される画素行数、または、各行が指定される回数が異なるように生成して、前記行選択回路に供給する
    固体撮像装置。
    In a solid-state imaging device driven by a plurality of drive modes,
    An imaging unit having a plurality of pixels arranged two-dimensionally;
    A row selection circuit for selecting a pixel row composed of the plurality of pixels arranged in a horizontal direction;
    A column circuit unit that temporarily holds pixel signals output from the plurality of pixels of the selected pixel row;
    A controller for supplying a row address signal designating a pixel row to be selected to the row selection circuit during a single row readout period;
    The plurality of pixels are:
    A plurality of first pixels that output pixel signals corresponding to the amount of received light;
    A plurality of second pixels that output a constant pixel signal;
    The imaging unit
    An effective portion in which the plurality of first pixels are arranged;
    A peripheral portion where the plurality of second pixels are arranged,
    In at least one of the drive modes,
    The controller is
    The first row selection sequence including the row address signal corresponding to the valid portion and the second row selection sequence including the row address signal corresponding to the peripheral portion are the first row selection sequence and the second row. A solid-state imaging device that generates and supplies the row selection circuit with different numbers of pixel rows that are simultaneously designated in the selection sequence or different numbers of times each row is designated.
  2.  前記制御部は、
     前記第1行選択シーケンスにおいて単一の行読み出し期間に指定される画素行の数が、
     前記第2行選択シーケンスにおいて単一の行読み出し期間に指定される画素行の数より多くなるように、前記第1行選択シーケンスおよび前記第2行選択シーケンスを生成する
    請求項1に記載の固体撮像装置。
    The controller is
    The number of pixel rows specified in a single row readout period in the first row selection sequence is:
    The solid according to claim 1, wherein the first row selection sequence and the second row selection sequence are generated so as to be larger than the number of pixel rows specified in a single row readout period in the second row selection sequence. Imaging device.
  3.  前記制御部は、1フレーム期間において、
     前記第1行選択シーケンスにより各画素行が指定される回数が、前記第2行選択シーケンスにより各画素行が指定される回数より少なくなるように、前記第1行選択シーケンスおよび前記第2行選択シーケンスを生成する
    請求項1に記載の固体撮像装置。
    In one frame period, the control unit
    The first row selection sequence and the second row selection are performed such that the number of times each pixel row is designated by the first row selection sequence is less than the number of times each pixel row is designated by the second row selection sequence. The solid-state imaging device according to claim 1, wherein the sequence is generated.
  4.  前記制御部は、
     前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、
     前記第2行選択シーケンスでは、1の画素行を単一の行読み出し期間に指定する
    請求項1または2に記載の固体撮像装置。
    The controller is
    In the first row selection sequence, two or more pixel rows are designated as a single row readout period,
    3. The solid-state imaging device according to claim 1, wherein in the second row selection sequence, one pixel row is designated in a single row readout period.
  5.  前記制御部は、
     前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、
     前記第2行選択シーケンスでは、前記第1行選択シーケンスで指定される画素行の数と異なる2以上の画素行を単一の行読み出し期間に指定する
    請求項1または2に記載の固体撮像装置。
    The controller is
    In the first row selection sequence, two or more pixel rows are designated as a single row readout period,
    3. The solid-state imaging device according to claim 1, wherein, in the second row selection sequence, two or more pixel rows different from the number of pixel rows designated in the first row selection sequence are designated in a single row readout period. .
  6.  前記制御部は、
     前記第1行選択シーケンスでは、2以上の画素行を単一の行読み出し期間に指定し、
     前記第2行選択シーケンスでは、第N画素行(Nは1以上の整数)を単一の行読み出し期間に第M画素行(Mは1以上の整数、かつ、M≠N)と共に指定し、1フレーム期間において、第N画素行をMの値を変更して複数回指定する
    請求項3に記載の固体撮像装置。
    The controller is
    In the first row selection sequence, two or more pixel rows are designated as a single row readout period,
    In the second row selection sequence, the Nth pixel row (N is an integer of 1 or more) is designated together with the Mth pixel row (M is an integer of 1 or more and M ≠ N) in a single row readout period, The solid-state imaging device according to claim 3, wherein the Nth pixel row is designated a plurality of times by changing the value of M in one frame period.
  7.  前記複数回は、2回である
    請求項6に記載の固体撮像装置。
    The solid-state imaging device according to claim 6, wherein the plurality of times is two times.
  8.  前記第2画素は、遮光された遮光画素または基準電圧を出力する基準電圧出力画素を含む
    請求項1ないし7のいずれかに記載の固体撮像装置。
    The solid-state imaging device according to claim 1, wherein the second pixel includes a light-shielded pixel that is shielded from light or a reference voltage output pixel that outputs a reference voltage.
  9.  前記周辺部は、前記有効部よりも前記撮像部の周辺側に配置される
    請求項1ないし8のいずれかに記載の固体撮像装置。
    The solid-state imaging device according to claim 1, wherein the peripheral portion is disposed closer to the peripheral side of the imaging unit than the effective portion.
  10.  請求項1ないし7のいずれかに記載の固体撮像装置と、
     前記固体撮像装置から出力された前記有効部の画素信号に対し補正処理を行うデジタル信号処理部と、
     前記固体撮像装置から出力された前記周辺部の画素信号、および、前記周辺部の画素信号を用いて生成された補正用データを保持する記憶部とを備える
    撮像装置。
     
    A solid-state imaging device according to any one of claims 1 to 7,
    A digital signal processing unit that performs correction processing on the pixel signal of the effective unit output from the solid-state imaging device;
    An imaging device comprising: a peripheral unit pixel signal output from the solid-state imaging device; and a storage unit that holds correction data generated using the peripheral unit pixel signal.
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