WO2011043284A1 - 半導体集積回路装置 - Google Patents
半導体集積回路装置 Download PDFInfo
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- WO2011043284A1 WO2011043284A1 PCT/JP2010/067346 JP2010067346W WO2011043284A1 WO 2011043284 A1 WO2011043284 A1 WO 2011043284A1 JP 2010067346 W JP2010067346 W JP 2010067346W WO 2011043284 A1 WO2011043284 A1 WO 2011043284A1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/003—Modifications for increasing the reliability for protection
- H03K19/00369—Modifications for compensating variations of temperature, supply voltage or other physical parameters
- H03K19/00384—Modifications for compensating variations of temperature, supply voltage or other physical parameters in field effect transistor circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
- H01L27/0811—MIS diodes
Definitions
- the present invention relates to a semiconductor integrated circuit device, and more particularly to a technique effective when applied to a differential circuit having an offset adjustment function.
- each of the differential pair transistors is composed of four partial transistors, and these eight partial transistors are arranged symmetrically in a region of 4 columns ⁇ 2 stages, and the arrangement A configuration in which dummy transistors are arranged in a region outside the region is shown.
- the influence of the process variation is uniformly generated in both the differential pair transistors, so that the device characteristics can be made uniform.
- FIG. 2 of Patent Document 2 four gates are regularly arranged on the diffusion layer region, the two gates on both sides are for dummy transistors, and the two gates between them are two fingers.
- a configuration for a MOS transistor configuration is shown.
- This MOS transistor is used for a tail current source in a differential amplifier circuit, and has a drain between two gates and a source outside each of the two gates.
- Each dummy transistor sharing each source is connected to the drain of the MOS transistor (that is, the common node of the differential amplifier circuit) by having the source and drain wired and the gate wired to the drain of the MOS transistor.
- Capacitive element This dummy transistor contributes to the reduction of the manufacturing variation of the MOS transistor and also contributes to the stabilization of the common node. Therefore, performance can be improved in a small area.
- Patent Document 3 shows a configuration in which pairs of elements constituting a differential circuit are formed in independent diffusion layer regions, and dummy elements are arranged in empty spaces around these elements. .
- the input offset can be reduced, the dimensional variation in the process can be reduced, and the characteristics of the differential circuit can be obtained as designed.
- the symmetry between the differential pair transistors is considered as described in, for example, Patent Document 1 to Patent Document 3.
- Layout is done.
- FIG. 9 is a diagram for explaining the LOD effect.
- the LOD effect is a phenomenon in which the performance of a transistor deteriorates when the distance (SA, SB) from the end of the gate GT of the transistor to the end of the diffusion layer region DPA is short.
- the diffusion layer region DPA and another diffusion layer region DNA are separated by an insulating layer STI (Shallow Trench Isolation).
- the STI is formed by making a hole in the semiconductor substrate SUB by etching and then embedding SiO 2 or the like therein.
- anisotropic etching is required, and a physical method such as FIB (focused ion beam) is mainly used.
- FIG. 10A and 10B show a semiconductor integrated circuit device studied as a premise of the present invention.
- FIG. 10A is a circuit diagram showing a configuration example of the main part
- FIG. 10B shows a layout configuration example of FIG. FIG.
- the semiconductor integrated circuit device shown in FIG. 10A includes NMOS transistors MN31 and MN32 serving as a differential pair, dummy NMOS transistors MND31a and MND32a having sources connected to the common source node (S), and MND31a and MND32a.
- Dummy NMOS transistors MND31b and MND32b each having a source connected to the drain are provided.
- the gate of the dummy NMOS transistor is connected to the ground power supply voltage VSS and is fixed to the off state.
- each of MN31 and MN32 is a transistor having a multi-finger structure (here, two fingers), and is arranged adjacent to each other at the center in the N-type diffusion layer region DNA.
- the diffusion layer DN between MN31 and MN32 and the diffusion layer DN on both outer sides serve as a common source node (S), and the diffusion layer DN between two fingers in MN31 and MN32 outputs differential output signals Do_n and Do_p, respectively. It becomes a drain node.
- an MND 31a is arranged at the end of the DNA on the MN 31 side so as to share the source node with the MN 31, and an MND 31b is arranged adjacent to the end.
- an MND 32a is arranged at the end of the DNA on the MN 32 side so as to share the source node with the MN 32, and an MND 32b is arranged adjacent to the end.
- the peripheral environment of MN31 and MN32 becomes the same due to the arrangement of the dummy NMOS transistors MND31 and MND32, so that the process variations for MN31 and MN32 are equalized and the offset voltage can be reduced.
- the arrangement of MND31 and MND32 separates MN31 and MN32 from the end of the diffusion layer region DNA, so that the LOD effect can be suppressed.
- the dummy NMOS transistor functions as a capacitor added to the common source node, and thus there is no particular operational side effect.
- a transistor that requires high speed such as a differential pair transistor, desirably uses such a multi-finger configuration from the viewpoint of reducing gate resistance.
- FIG. 11 shows an example of a method for adjusting the offset voltage in the semiconductor integrated circuit device studied as a premise of the present invention, and (a) and (b) are circuit diagrams showing different methods, respectively.
- FIG. 11A shows a system in which variable current sources ISn and ISp are connected to the drains of the NMOS transistors MN31 and MN32, respectively, as a differential pair, and the offset voltage is adjusted by the amount of current. This method is useful when correcting a so-called DC offset voltage collectively in a DC manner. Since ISn and ISp require a relatively large transistor area (gate width W), they are usually formed in a diffusion layer region different from the diffusion layer region forming MN31 and MN32.
- FIG. 11B shows a system in which the variable capacitors Cn and Cp are connected to the drains of the NMOS transistors MN31 and MN32, respectively, as a differential pair, and the offset voltage is adjusted based on these capacitance values.
- This method unlike the case of FIG. 11A, corrects the offset voltage in an AC manner. That is, the DC offset voltage cannot be corrected at once, but when viewed in a short time, the DC offset voltage can be corrected equivalently by providing a difference in the signal transition time of the differential output signal depending on the capacitance. In particular, it is a useful method for high-speed applications.
- This variable capacity method is superior in terms of power consumption and circuit area as compared with the variable current source method described above.
- it is advantageous because a higher response speed can be obtained compared to the variable current source method.
- the present invention has been made in view of the above, and one of its purposes is to realize a high-speed semiconductor integrated circuit device by adjusting an offset voltage. Another object is to realize adjustment of the offset voltage with a small area.
- the semiconductor integrated circuit device has first and second MIS transistors that receive one and the other of the differential input signals, and have the same conductivity type, and are connected to the drains of the first and second MIS transistors, respectively.
- the third and fourth MIS transistor groups are provided.
- the third MIS transistor group is composed of a plurality of transistors whose source / drain paths are connected in series. One end of the series path is connected to the drain of the first MIS transistor, and the other end is open.
- the fourth MIS transistor group includes a plurality of transistors whose source / drain paths are connected in series. One end of the series path is connected to the drain of the second MIS transistor, and the other end is open.
- a predetermined capacitance is added to the drain of the first MIS transistor or the drain of the second MIS transistor by appropriately controlling the gate voltage of each transistor constituting the third and fourth MIS transistor groups. Equivalently, the offset voltage between the first and second MIS transistors can be adjusted. Specifically, a transistor connected to the drain of the first MIS transistor in the third MIS transistor group is a third A transistor, and a transistor connected to the drain of the second MIS transistor in the fourth MIS transistor group is a fourth A transistor. Then, for example, by driving one of the third A transistor and the fourth A transistor on, a capacitor can be added to the corresponding side.
- the offset voltage can be reduced, and the speed of the semiconductor integrated circuit device can be increased. Further, when the first diffusion layer serving as the drain of the first MIS transistor is shared with the diffusion layer of the third A transistor and the second diffusion layer serving as the drain of the second MIS transistor is shared with the diffusion layer of the fourth A transistor, the offset voltage is adjusted. In this case, high accuracy can be achieved.
- the semiconductor integrated circuit device described above is laid out as follows. First, the gate of the first MIS transistor and the gate of the second MIS transistor are disposed adjacent to each other, and the common source region is disposed therebetween.
- the first diffusion layer facing the common source region across the first MIS transistor is the drain of the first MIS transistor
- the second diffusion layer facing the common source region across the second MIS transistor is the drain of the second MIS transistor.
- the gates of the third A transistors are arranged so as to share the first diffusion layer with the gates of the first MIS transistors, and the gates of the remaining transistors in the third MIS transistor group are arranged sequentially adjacent thereto.
- the gates of the 4A transistors are arranged so as to share the second diffusion layer with the gates of the second MIS transistors, and the gates of the remaining transistors in the fourth MIS transistor group are sequentially arranged adjacently from there. .
- the third and fourth MIS transistor groups can function as dummy transistors of the first and second MIS transistors, and thus the offset voltage can be reduced.
- this may cause a minute offset voltage, but this voltage can be further reduced by controlling the gate voltages of the third and fourth MIS transistor groups as described above.
- the speed of the semiconductor integrated circuit device can be increased.
- the third and fourth MIS transistor groups share both the dummy transistor function and the offset voltage adjustment function, the area can be reduced.
- the response speed can be improved by the shared structure of the first diffusion layer and the second diffusion layer described above.
- FIG. 1 is a circuit diagram which shows the structural example of the principal part
- FIG. 2 is the schematic which shows the layout structural example of (a). is there.
- (A)-(c) is a figure for demonstrating the offset adjustment function of the dummy transistor in the semiconductor integrated circuit device of FIG. It is a circuit diagram which shows the structural example which expanded Fig.1 (a).
- FIG. 6 is a circuit diagram showing an example of the configuration of a semiconductor integrated circuit device according to a second embodiment of the present invention.
- FIG. 5 is a waveform diagram showing an operation example of the semiconductor integrated circuit device of FIG. 4.
- FIG. 5 is a schematic diagram illustrating a partial layout configuration example in the semiconductor integrated circuit device of FIG. 4.
- FIG. 10 is a circuit diagram showing an example of the configuration of a semiconductor integrated circuit device according to a third embodiment of the present invention.
- FIG. 8 is a waveform diagram showing an operation example in the semiconductor integrated circuit device of FIG. 7. It is a figure explaining the LOD effect.
- the semiconductor integrated circuit device examined as a premise of this invention is shown, (a) is a circuit diagram which shows the structural example of the principal part, (b) is a figure which shows the layout structural example of (a).
- an example of an adjustment method of the offset voltage is shown, and (a) and (b) are circuit diagrams showing different methods, respectively.
- the constituent elements are not necessarily indispensable unless otherwise specified and apparently essential in principle. Needless to say.
- the shapes, positional relationships, etc. of the components, etc. when referring to the shapes, positional relationships, etc. of the components, etc., the shapes are substantially the same unless otherwise specified, or otherwise apparent in principle. And the like are included. The same applies to the above numerical values and ranges.
- each functional block of the embodiment are not particularly limited, but are formed on a semiconductor substrate such as single crystal silicon by a known integrated circuit technology such as a CMOS (complementary MOS transistor).
- CMOS complementary MOS transistor
- MOS Metal Oxide Semiconductor
- MISFET Metal Insulator Semiconductor Field Effect Transistor
- PMOS transistor P-channel MOS transistor
- NMOS transistor N-channel MOS transistor
- FIG. 1A and 1B show a semiconductor integrated circuit device according to a first embodiment of the present invention.
- FIG. 1A is a circuit diagram showing a configuration example of a main part thereof
- FIG. 1B is a layout configuration example of FIG. FIG.
- the semiconductor integrated circuit device shown in FIG. 1A includes NMOS transistors MN1 and MN2 whose sources are connected to a common source node (S) and serving as a differential pair, and dummy NMOSs whose sources are connected to the drains of MN1 and MN2, respectively.
- Transistors MND1a and MND2a, and dummy NMOS transistors MND1b and MND2b having sources connected to the drains of MND1a and MND2a, respectively.
- MN1 receives a positive differential input signal Din_p at the gate and outputs a negative differential output signal Do_n from the drain
- MN2 receives a negative differential input signal Din_n at the gate and a difference from the drain to the positive electrode.
- the dynamic output signal Do_p is output.
- Offset amount setting signals OFST1 ⁇ 0> and OFST1 ⁇ 1> are input to the gates of MND1a and MND1b, respectively
- offset amount setting signals OFST2 ⁇ 0> and OFST2 ⁇ 1> are input to the gates of MND2a and MND2b, respectively. Is done.
- the drains of MND1b and MND2b are both open.
- the source and the drain of the dummy NMOS transistor are distinguished from each other, but in practice, it is not necessary to distinguish them.
- each of MN1 and MN2 is a transistor having a multi-finger structure (here, a finger composed of three gates GT), and in the central portion in the N-type diffusion layer region DNA, Arranged adjacent to each other.
- the diffusion layer DN between MN1 and MN2 serves as a common source node (S), and the diffusion layer DN facing the diffusion layer with the three gate fingers of MN1 interposed therebetween serves as a drain for outputting Do_n.
- the diffusion layer DN facing the diffusion layer DN between MN1 and MN2 across the three gate fingers of MN2 serves as a drain for outputting Do_p.
- the one closer to the center of the DNA is connected to the drain, and the one closer to the end is connected to the source.
- the one closer to the center of the DNA is connected to the drain, and the one closer to the end is connected to the source.
- MND1a is arranged at the end on the MN1 side in the DNA so as to share the diffusion layer DN of the drain on the end side in MN1 as a source, and MND1b is arranged adjacent to the end.
- MND2a is arranged at the end on the MN2 side in DNA so as to share the diffusion layer DN of the drain on the end side in MN2 as a source, and MND2b is arranged adjacent to the end.
- Each dummy NMOS transistor has the same conductivity type as the normal NMOS transistors (MN1, MN2) and has the same size as the gate length and gate width per gate finger in MN1, MN2.
- the peripheral environment of MN1 and MN2 becomes the same due to the arrangement of the dummy NMOS transistors MND1 and MND2, so that process variations for MN1 and MN2 are equalized, and the offset voltage can be reduced. .
- the distance between MN1 and MN2 and the end of the diffusion layer region DNA is increased due to the arrangement of MND1 and MND2, the LOD effect can be suppressed.
- the dummy NMOS transistors can be configured as differential output nodes (Do_n, Do_p).
- FIGS. 2A to 2C are diagrams for explaining the offset adjustment function of the dummy transistor in the semiconductor integrated circuit device of FIG.
- the dummy NMOS transistor MND is equivalent to a gate-source capacitance Cgs, a gate-drain capacitance Cgd, a source diffusion layer capacitance Cs, a drain diffusion layer capacitance Cd, and a gate insulating film.
- a capacity Cg is provided.
- a gate voltage for turning off MND for example, the reference power supply voltage VSS
- VSS differential output node
- AC is Cgs and Cs appears to be connected in parallel, and Cgd and Cd disappear. Since the gate voltage is DC input, Cg can be ignored.
- the offset adjustment function also has a function as a dummy transistor as described above, there is no area overhead, and a small area can be realized. Further, the dummy transistor with the offset adjusting function is formed in a form sharing the diffusion layer of the drain (differential output node) of the differential pair transistors (MN1, MN2) as shown in FIG. 1 (b). Therefore, when the capacitance is varied by the offset amount setting signal OFST, it can be instantaneously reflected on the differential output node. This is particularly useful when it is desired to dynamically adjust the offset voltage.
- FIG. 3 is a circuit diagram showing a configuration example obtained by extending FIG.
- the offset adjustment circuit is composed of dummy NMOS transistors MND1a and MND1b and MND2a and MND2b connected in two stages in series.
- Dummy NMOS transistors MND1a to MND1d and MND2a to MND2d are further added to both ends in the N-type diffusion layer region DNA in FIG.
- the adjustment range of the offset amount can be further expanded.
- the offset adjustment circuit can be configured in one stage depending on the case.
- the dummy NMOS transistor MND is controlled by digital on / off, but in some cases, it may be controlled in an analog manner.
- the signal transition time can be controlled using the resistance value between the source and the drain.
- an NMOS transistor is used for the differential pair has been described as an example, but it goes without saying that the present invention can be similarly applied even when a PMOS transistor is used.
- the semiconductor integrated circuit device As described above, by using the semiconductor integrated circuit device according to the first embodiment, it is typically possible to increase the speed by reducing the offset voltage. Also, the offset voltage can be reduced with a small area. Furthermore, it is possible to sufficiently cope with a case where dynamic adjustment of the offset voltage is desired to be performed at high speed.
- FIG. 4 is a circuit diagram showing an example of the configuration of the semiconductor integrated circuit device according to the second embodiment of the present invention.
- the semiconductor integrated circuit device shown in FIG. 4 includes a CMOS type data input circuit DIBF, CMOS inverter circuits CIV1 and CIV2, a CMOS type SR latch circuit CSRLT, and an SR latch circuit SRLT.
- the data input circuit DIBF is connected to the NMOS transistors MN1 and MN2 to which the differential input signals Din_p and Din_n are input, and the drains (ap and an) of the MN1 and MN2, respectively.
- an NMOS transistor MN3 and PMOS transistors MP1 and MP2 are provided.
- the source of MN3 is connected to the reference power supply voltage VSS
- the drain is connected to the common source node (cm) of MN1 and MN2
- the clock signal CK is input to the gate.
- sources are connected to the power supply voltage VDD, and CK is input to the gates.
- the drain of MP1 is connected to the drain (ap) of MN1, and the drain of MP2 is connected to the drain (an) of MN2.
- Each of MNDBK1 and MNDBK2 includes a plurality (four in this case) of dummy NMOS transistors MND connected in series as described in FIG.
- the CMOS inverter circuit CIV1 receives the drain (ap) signal of MN1 as a gate input and outputs an inverted signal thereof to the output node (a1p).
- CIV2 receives the drain (an) signal of MN2 as a gate input and outputs an inverted signal thereof to an output node (a1n).
- the numbers in parentheses in FIG. 4 indicate the number of gate fingers.
- the CMOS SR latch circuit CSRLT includes NMOS transistors MN11, MN12, MN21, MN22 and PMOS transistors MP11, MP12, MP21, MP22.
- MP11 and MN11 use the node (a1n) as a gate input
- MP21 and MN21 use the node (a1p) as a gate input.
- MP12 has a source / drain connected to the source / drain of MP11
- MN12 has a source connected to the drain of MN11 and a drain connected to the drain of MP11 (MP12).
- the source / drain of MP22 is connected to the source / drain of MP21
- the source of MN22 is connected to the drain of MN21 and the drain is connected to the drain of MP21 (MP22).
- the gates of MP12 and MN12 are connected to the drain (bp) of MP22 (MN22), and the gates of MP22 and MN22 are connected to the drain (bn) of MP12 (MN12).
- the sources of MP11, MP12, MP21, and MP22 are connected to the power supply voltage VDD, and the sources of MN11 and MN21 are connected to the reference power supply voltage VSS.
- the SR latch circuit SRLT includes two 2-input NAND circuits NAD1 and NAD2.
- NAD1 and NAD2 output differential output signals Dout_p and Dout_n, respectively.
- the NAD1 has the node (bp) as one input and Dout_n as the other input.
- NAD2 has node (bn) as one input and Dout_p as the other input.
- FIG. 5 is a waveform diagram showing an operation example of the semiconductor integrated circuit device of FIG.
- the data input circuit DIBF receives the nodes (ap, an) via MP1 and MP2 regardless of the values of the differential input signals Din_p and Din_n. Is charged to the VDD level.
- the nodes (a1p, a1n) are both set to the VSS level via CIV1 and CIV2.
- the CMOS SR latch circuit CSRLT MP11 and MP21 are turned on, and the nodes (bp, bn) are at the VDD level.
- the nodes (bp, bn) maintain the VDD level.
- the SR latch circuit SRLT receives the VDD level of the nodes (bp, bn), it maintains the state of the differential output signals Dout_p, Dout_n at that time.
- the node (a1p) is at the VDD level and the node (a1n) is at the VSS level, and in CSRLT, MN21 is on, MP21 is off, MN11 is off, and MP11 is on.
- the node (bn) maintains the VDD level and the MN22 is turned on and the MP22 is kept off.
- the node (bp) is discharged to the VSS level because the MN21 is turned on (MP21 is turned off).
- MP12 transitions on and MN12 transitions off, but only the charging path from MP12 is added to the charging path from MP11, and the node (bn) still maintains the VDD level.
- the SRLT sets Dout_p to the “H” level and sets Dout_n to the “L” level.
- the semiconductor integrated circuit device of FIG. 4 is a flip-flop circuit for the rising edge trigger of the clock signal CK. While CK is at the “L” level, the data input circuit DIBF (and the inverter circuits CIV1, CIV2) outputs the “L” level to the two output nodes (a1n, a1p). In response to this, the CMOS SR latch circuit CSRLT outputs “H” level to the two output nodes (bp, bn), and the SR latch circuit SRLT holds the output data as it is due to this “H” level. To do.
- DIBF (and CIV1, CIV2) outputs different levels according to the input data to the two output nodes for a certain period, and then outputs the “H” level together.
- input data is converted into a difference in discharge time between two nodes.
- the CSRLT receives different levels from the DIBF, outputs different levels according to the levels to the two output nodes, and then receives the 'H' level to hold the output data as it is.
- a difference in discharge time between two nodes is detected, and information on which node has a short (long) discharge time is latched.
- the SRLT receives different levels from the CSRLT and outputs different levels according to the levels to the two output nodes. Thereafter, the CSRLT holds the output data as it is, and therefore holds its own output data as it is.
- high-speed differential input signals can be handled by converting the amplitude difference between the small-amplitude differential input signals Din_p and Din_n into a discharge time difference, and detecting and latching the difference. It becomes possible.
- the data input circuit DIBF has a configuration in which MP1, MP2, and MN3 are complementarily turned on by the clock signal CK, so that no through current flows.
- the CMOS SR latch circuit CSRLT does not flow. Therefore, the power consumption of the flip-flop circuit can be reduced.
- even a minute offset voltage cannot be ignored.
- the offset voltage due to process variations in the layout can be reduced, and the remaining offset can be reduced by this.
- the voltage can be reduced by adjusting the offset voltage using the offset amount setting signals OFST_p and OFST_n. Therefore, the offset voltage can be greatly reduced, and the speed can be further increased. Specifically, for example, when a positive offset voltage exists in Din_p with reference to Din_n, the discharge rate of the node (ap) becomes excessively faster than the case where there is no offset voltage, and the input margin in the CSRLT is reduced. There is a fear. In this case, by appropriately adjusting OFST_p and adding capacity to the node (ap) by MNDBK1, the excessive discharge rate can be reduced, and the offset voltage can be compensated equivalently.
- FIG. 6 is a schematic diagram showing a partial layout configuration example of the semiconductor integrated circuit device of FIG.
- a layout configuration example of the CMOS type data input circuit DIBF and the CMOS inverter circuits CIV1 and CIV2 (area AA in FIG. 4) in FIG. 4 is shown.
- two reference power supply voltage wirings (VSS) are arranged in parallel, and in parallel with this, one power supply voltage wiring (VDD) is arranged between the two reference power supply voltage wirings.
- VDD power supply voltage wiring
- an N-type diffusion layer region DNA1 and a P-type diffusion layer region DPA1 are arranged close to each other in order from the VSS side.
- the P-type diffusion layer region DPA2 and the N-type diffusion layer region DNA2 are arranged close to each other in order from the VDD side.
- a gate composed of two gate fingers is arranged at the center, and this gate is for MN3 to which the clock signal CK is input.
- a gate composed of three gate fingers is arranged. One gate is for MN1 to which Din_p is input, and the other gate is for MN2 to which Din_n is input.
- Four gates are arranged in order at positions facing the MN3 gate across the MN1 gate, and each of these gates is for MNDBK1 to which OFST_p is input.
- Four gates are arranged in order at positions facing the MN3 gate across the MN2 gate, and each gate is for the MNDBK2 to which OFST_n is input.
- the shared diffusion layer between the MN1 gate and the MNDBK1 gate is a node (ap), and the shared diffusion layer between the MN2 gate and the MNDBK2 gate is a node (an).
- the shared diffusion layer between the MN3 gate and the MN1 gate and the shared diffusion layer between the MN3 gate and the MN2 gate are both nodes (cm).
- two gates are arranged adjacent to the center, one gate is for MP1 to which the clock signal CK is input, and the other gate is for MP2 to which CK is input.
- the diffusion layer between the two gates is connected to VDD, and the diffusion layer facing this VDD across the MP1 gate is connected to the node (ap), and facing across this VDD across the MP2 gate.
- the diffusion layer is connected to the node (an).
- a dummy gate is provided adjacent to the MN1 gate so as to share the node (ap), and a dummy gate is provided adjacent to the MN2 gate so as to share the node (an).
- the dummy gate is kept off by being connected to VDD.
- the P-type diffusion layer region DPA2 two gates are arranged adjacent to the center, one gate is for CIV1 (PMOS) connected to the node (ap), and the other gate is the node (an). It is for CIV2 (PMOS) connected to.
- the diffusion layer between the two gates is connected to VDD, and the diffusion layer facing this VDD across the gate for CIV1 (PMOS) is connected to the node (a1p), and the gate for CIV2 (PMOS) is sandwiched between them.
- the diffusion layer opposed to VDD is connected to the node (a1n).
- a dummy gate is provided adjacent to the CIV1 (PMOS) gate so as to share the node (a1p), and the dummy gate is also provided adjacent to the CIV2 (PMOS) gate. Is provided.
- the dummy gate is kept off by being connected to VDD.
- N-type diffusion layer region DNA2 two gates are arranged adjacent to the center, one gate is for CIV1 (NMOS) connected to the node (ap), and the other gate is a node (an). It is for CIV2 (NMOS) connected to.
- the diffusion layer between the two gates is connected to VSS, and the diffusion layer opposed to this VSS across the gate for CIV1 (NMOS) is connected to the node (a1p), and the gate for CIV2 (NMOS) is sandwiched between them.
- the diffusion layer facing this VSS is connected to the node (a1n).
- a dummy gate is provided adjacent to the CIV1 (NMOS) gate so as to share the node (a1p), and the dummy gate is also provided adjacent to the CIV2 (NMOS) gate. Is provided. This dummy gate is kept off by being connected to VSS. By providing this dummy gate, as described with reference to FIG. 10 and the like, the offset voltage due to process variations of CIV1 (NMOS) and CIV2 (NMOS) can be reduced.
- the offset voltage with respect to MN1 and MN2 serving as a differential pair can be reduced by the arrangement of the dummy NMOS transistor groups MNDBK1 and MNDBK2, and the offset of MP1 and MP2 is also offset by the arrangement of the dummy transistors.
- the voltage can be reduced.
- a minute offset voltage may be generated due to a minute imbalance between MN1 and MN2 and MP1 and MP2.
- this error is caused by inputting offset amount setting signals OFST_p and OFST_n to Can be reduced by adjusting the offset voltage.
- the adjustment accuracy can be increased.
- the offset voltage can be greatly reduced, and the speed of the semiconductor integrated circuit device can be increased. Further, since the MNDBK1 and MNDBK2 have both the function as a dummy transistor and the function for adjusting the offset voltage, the area can be reduced.
- the semiconductor integrated circuit device As described above, by using the semiconductor integrated circuit device according to the second embodiment, it is typically possible to increase the speed by reducing the offset voltage. Also, the offset voltage can be reduced with a small area.
- the transmission unit when the transmission unit outputs a data signal of “H” level in a certain cycle T [0] and outputs a data signal of “L” level in the next cycle T [1], the transmission in T [0] Since the 'H' level interferes with T [1] at a predetermined rate, the signal that the receiving unit actually receives at T [1] is a signal obtained by adding the interfered signal to the 'L' level data signal. Become.
- DFE is a circuit that removes such intersymbol interference and identifies a correct data signal. Specifically, for example, at the receiving unit, the above-described 'H' level of T [0] is fed back at a predetermined rate, and at T [1], the feedback signal is returned from the data signal at the 'L' level. If the subtracted signal is determined, the correct data signal can be identified in principle.
- T [0] the above-described 'H' level of T [0]
- T [1] the feedback signal is returned from the data signal at the 'L' level. If the subtracted signal is determined, the correct data signal can be identified in principle.
- FIG. 7 is a circuit diagram showing an example of the configuration of the semiconductor integrated circuit device according to the third embodiment of the present invention.
- the semiconductor integrated circuit device shown in FIG. 7 includes a CMOS type data input circuit DIBF, CMOS inverter circuits CIV1 and CIV2, a CMOS type SR latch circuit CSRLT, and an SR latch circuit SRLT, as in FIG.
- the internal configuration of each circuit is the same as in FIG. 4, and the layout configuration of DIBF and CIV1, CIV2 is also the same as in FIG.
- the semiconductor integrated circuit device shown in FIG. 7 differs from the configuration example of FIG. 4 in that a feedback path including delay circuits DLY1 and DLY2 is added.
- the delay circuit DLY1 receives one of the differential output signals (Dout_p) as an input, delays it by T / 2 (T is one clock cycle time), and then feeds it back to the dummy NMOS transistor group MNDBK1.
- the MNDBK1 is composed of a dummy NMOS transistor MND1a having a source connected to the node (ap) and a plurality of dummy NMOS transistors (in order MND1b, MND1c,...) Having source / drain paths connected in series to the drain thereof.
- a feedback signal from DLY1 is input to the gate of MND1a.
- the delay circuit DLY2 inputs the other differential output signal (Dout_n), delays it by T / 2, and then feeds it back to the dummy NMOS transistor group MNDBK2.
- the MNDBK2 is composed of a dummy NMOS transistor MND2a having a source connected to the node (an) and a plurality of dummy NMOS transistors (MND2b, MND2c,... In order) whose source / drain paths are connected in series to the drain thereof.
- a feedback signal from DLY2 is input to the gate of MND2a.
- MND1b and MND2b, MND1c and MND2c,... are controlled by a common gate signal.
- These gate signals serve as a DFE amount setting signal DFEST for determining a capacitance value (that is, an offset amount) connected to the node (ap) or the node (an).
- the capacity value determined by this DFEST is determined based on how much of the previous cycle data interferes with the data of the target cycle.
- FIG. 8 is a waveform diagram showing an operation example of the semiconductor integrated circuit device of FIG.
- the operation shown in FIG. 8 is obtained by adding an operation by a feedback path to the operation described in FIG.
- the output of DLY1 is delayed by T / 2 from that point
- the node (d1p) transitions to the “H” level
- the output node (d1n) of DLY2 transitions to the “L” level.
- the MND 1a is turned on, and a capacity is added to the node (ap).
- the discharge rate (aptf) of the node (ap) can be delayed as compared with the case where no capacity is added to the node (ap).
- the output node (d1p) of DLY1 is set to “L” with a delay of T / 2 from that point.
- the output node (d1n) of DLY2 transits to the “H” level.
- the MND 2a is turned on, and a capacity is added to the node (an).
- the discharge rate (antf) of the node (an) can be made slower than the case where no capacity is added to the node (an).
- the main purpose is not to make the offset voltage close to zero as in the second embodiment, but to cancel the intersymbol interference.
- the method added to is used. In this case, it is necessary to add capacity to one of the nodes (an, ap) at high speed according to the sign of the previous cycle.
- the dummy NMOS transistors MND1a and MND2a are arranged so as to share the diffusion layers of the nodes (an, ap). As described above, capacity can be added to the node at high speed.
- the offset voltage can be adjusted with a small area. Furthermore, dynamic adjustment of the offset voltage can be performed at high speed.
- the capacitance values added to the nodes are the same, but a difference may be added to the capacitance values. For example, if the difference is set to be a DC offset voltage component, the offset voltage in the initial state without intersymbol interference can be greatly reduced as described in the second embodiment.
- the configuration example corresponding to the differential input signal has been shown.
- it can be applied as a technique for adding an offset voltage to a single input signal at high speed. That is, for example, when only the configuration on one side (MD1 and MND1) in FIGS. 1A and 1B is used, an offset voltage can be applied to a single input signal at high speed.
- the semiconductor integrated circuit device is a technique that is particularly useful when applied to a semiconductor integrated circuit device including a differential circuit that operates with a high-speed differential signal. It can be widely applied as a technique for adding an offset voltage.
Abstract
Description
図1は、本発明の実施の形態1による半導体集積回路装置を示すものであり、(a)は、その主要部の構成例を示す回路図、(b)は(a)のレイアウト構成例を示す概略図である。図1(a)に示す半導体集積回路装置は、ソースが共通ソースノード(S)に接続され差動対となるNMOSトランジスタMN1,MN2と、MN1,MN2のドレインにそれぞれソースが接続されたダミーNMOSトランジスタMND1a,MND2aと、MND1a,MND2aのドレインにそれぞれソースが接続されたダミーNMOSトランジスタMND1b,MND2bを備えている。
本実施の形態2では、実施の形態1で述べたオフセット調整機能をフリップフロップ回路に適用した場合について説明する。図4は、本発明の実施の形態2による半導体集積回路装置において、その構成の一例を示す回路図である。図4に示す半導体集積回路装置は、CMOS型のデータ入力回路DIBFと、CMOSインバータ回路CIV1,CIV2と、CMOS型のSRラッチ回路CSRLTと、SRラッチ回路SRLTを備えている。
本実施の形態3では、実施の形態2で述べたフリップフロップ回路を応用したDFE(判定帰還型等価器)について説明する。例えば、数十Gbpsクラスの光伝送システム等では、送信部から伝送線路を介して受信部に到るまでの過程でISI(Inter Symbol Interference)と呼ばれる符号間干渉が生じることが知られている。例えば、送信部があるサイクルT[0]において‘H’レベルのデータ信号を出力し、次サイクルT[1]において‘L’レベルのデータ信号を出力した場合には、T[0]での‘H’レベルが所定の割合でT[1]に干渉するため、受信部がT[1]で実際に受ける信号は、‘L’レベルのデータ信号にこの干渉した信号が加算された信号となる。
CIV CMOSインバータ回路
CK クロック信号
CSRLT CMOS型SRラッチ回路
DIBF データ入力回路
DLY 遅延回路
DN N型拡散層
DNA N型拡散層領域
DP P型拡散層
DPA P型拡散層領域
Din 入力信号
Do,Dout 出力信号
GT ゲート
IS 電流源
MN NMOSトランジスタ
MND ダミーNMOSトランジスタ
MNDBK ダミーNMOSトランジスタ群
MP PMOSトランジスタ
NAD NAND回路
OFST オフセット量設定信号
S ソース
SRLT SRラッチ回路
STI 絶縁層
SUB 半導体基板
VDD 電源電圧
VSS 基準電源電圧
Claims (18)
- 共通ソース領域と、
それぞれ第1方向に延伸し、前記共通ソース領域を起点に前記第1方向と直交する第2方向に向けて順次並んで配置されたN(N≧1)本の第1ゲート層、ならびにM(M≧1)本の第3ゲート層と、
それぞれ第1方向に延伸し、前記共通ソース領域を起点に前記第2方向の反対方向となる第3方向に向けて順次並んで配置された前記N本の第2ゲート層、ならびに前記M本の第4ゲート層と、
前記N本の第1ゲート層と前記M本の第3ゲート層の間に配置され、前記N本の第1ゲート層内の1本となる第1Aゲート層と前記M本の第3ゲート層内の1本となる第3Aゲート層との共有拡散層となる第1拡散層と、
前記M本の第3ゲート層を挟んで前記第1拡散層と対向するように配置された第3拡散層と、
前記N本の第2ゲート層と前記M本の第4ゲート層の間に配置され、前記N本の第2ゲート層内の1本となる第2Aゲート層と前記M本の第4ゲート層内の1本となる第4Aゲート層との共有拡散層となる第2拡散層と、
前記M本の第4ゲート層を挟んで前記第2拡散層と対向するように配置された第4拡散層とを具備してなり、
前記N本の第1ゲート層は、第1MISトランジスタのゲートフィンガであり、差動入力信号の一方が入力され、
前記N本の第2ゲート層は、第2MISトランジスタのゲートフィンガであり、前記差動入力信号の他方が入力され、
前記第1拡散層は、前記第1MISトランジスタのドレインであり、
前記第2拡散層は、前記第2MISトランジスタのドレインであり、
前記第3および第4拡散層は、共に、オープンであることを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記第3Aゲート層に第1電圧が印加される際、前記第4Aゲート層には、前記第1電圧と異なる第2電圧が印加されることを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記半導体集積回路装置は、前記M本の第3ゲート層のそれぞれに印加される電圧と、前記M本の第4ゲート層のそれぞれに印加される電圧を、1本毎に2以上の電圧値の中から選択可能となっていることを特徴とする半導体集積回路装置。 - 請求項1記載の半導体集積回路装置において、
前記Nは、奇数であることを特徴とする半導体集積回路装置。 - 差動入力信号の一方がゲートに入力された第1導電型の第1MISトランジスタと、
前記差動入力信号の他方がゲートに入力された前記第1導電型の第2MISトランジスタと、
ソース・ドレイン経路が直列接続された前記第1導電型の複数の第3MISトランジスタと、
ソース・ドレイン経路が直列接続された前記第1導電型の複数の第4MISトランジスタとを備え、
前記複数の第3MISトランジスタによる直列接続経路の一端は前記第1MISトランジスタのドレインに接続され、他端はオープンとされ、
前記複数の第4MISトランジスタによる直列接続経路の一端は前記第2MISトランジスタのドレインに接続され、他端はオープンとされることを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記複数の第3MISトランジスタの一つは、ソース・ドレインの一方が前記第1MISトランジスタのドレインに接続された第3Aトランジスタであり、
前記複数の第4MISトランジスタの一つは、ソース・ドレインの一方が前記第2MISトランジスタのドレインに接続された第4Aトランジスタであり、
前記第3Aトランジスタと前記第4Aトランジスタは、いずれか一方がオン、他方がオフとなるように制御されることを特徴とする半導体集積回路装置。 - 請求項6記載の半導体集積回路装置において、
前記半導体集積回路装置は、前記複数の第3MISトランジスタ及び前記複数の第4MISトランジスタの各ゲート毎に、オンに制御する第1ゲート電圧かオフに制御する第2ゲート電圧かを選択して印加可能となっていることを特徴とする半導体集積回路装置。 - 請求項6記載の半導体集積回路装置において、
前記第1MISトランジスタのドレインと前記第3Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成され、
前記第2MISトランジスタのドレインと前記第4Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成されることを特徴とする半導体集積回路装置。 - 請求項5記載の半導体集積回路装置において、
前記第1および第2MISトランジスタのそれぞれは、3以上の奇数となるN個のゲートフィンガで構成され、
前記複数の第3MISトランジスタおよび前記複数の第4MISトランジスタのそれぞれのゲート長およびゲート幅は、前記N個のゲートフィンガにおけるゲートフィンガ毎のゲート長およびゲート幅と同一であることを特徴とする半導体集積回路装置。 - 第1および第2ノードと、
差動入力信号の一方がゲートに入力され、ドレインが前記第1ノードに接続された第1導電型の第1MISトランジスタと、
前記差動入力信号の他方がゲートに入力され、ドレインが前記第2ノードに接続され、ソースが前記第1MISトランジスタのソースと共通に接続された前記第1導電型の第2MISトランジスタと、
ソース・ドレイン経路が直列接続され、その直列接続経路の一端が前記第1ノードに接続され、他端がオープンとされた前記第1導電型の複数の第3MISトランジスタと、
ソース・ドレイン経路が直列接続され、その直列接続経路の一端が前記第2ノードに接続され、他端がオープンとされた前記第1導電型の複数の第4MISトランジスタと、
クロック信号が第1論理レベルの際に、前記第1および第2MISトランジスタの共通ソースノードを第1電圧に接続する前記第1導電型の第5MISトランジスタと、
前記クロック信号が第2論理レベルの際に、前記第1および第2ノードを第2電圧に接続する第6および第7MISトランジスタと、
前記クロック信号が前記第2論理レベルから前記第1論理レベルに遷移した際に、前記差動入力信号に応じて前記第1ノードと前記第2ノードのいずれが先に前記第2電圧から前記第1電圧に変位したかを検出し、その情報をラッチするラッチ回路部とを有することを特徴とする半導体集積回路装置。 - 請求項10記載の半導体集積回路装置において、
前記複数の第3MISトランジスタの一つは、ソース・ドレインの一方が前記第1ノードに接続された第3Aトランジスタであり、
前記複数の第4MISトランジスタの一つは、ソース・ドレインの一方が前記第2ノードに接続された第4Aトランジスタであり、
前記第3Aトランジスタと前記第4Aトランジスタは、いずれか一方がオン、他方がオフとなるように制御されることを特徴とする半導体集積回路装置。 - 請求項11記載の半導体集積回路装置において、
前記第1MISトランジスタのドレインと前記第3Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成され、
前記第2MISトランジスタのドレインと前記第4Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成されることを特徴とする半導体集積回路装置。 - 請求項12記載の半導体集積回路装置において、
前記第1および第2MISトランジスタのそれぞれは、3以上の奇数となるN個のゲートフィンガで構成され、
前記複数の第3MISトランジスタおよび前記複数の第4MISトランジスタのそれぞれのゲート長およびゲート幅は、前記N個のゲートフィンガにおけるゲートフィンガ毎のゲート長およびゲート幅と同一であることを特徴とする半導体集積回路装置。 - 請求項10記載の半導体集積回路装置において、
前記ラッチ回路部は、
前記第1ノードを入力信号として、その反転信号を第3ノードに出力する第1インバータ回路と、
前記第2ノードを入力信号として、その反転信号を第4ノードに出力する第2インバータ回路と、
前記第3ノードと前記第4ノードを入力信号として、第5ノードと第6ノードに出力を行うCMOS型ラッチ回路と、
前記第5ノードと前記第6ノードを入力信号として、第7ノードと第8ノードに出力を行うSRラッチ回路とを備え、
前記CMOS型ラッチ回路は、
前記第3ノードがゲートに接続された前記第1導電型の第8MISトランジスタおよび第2導電型の第9MISトランジスタと、
前記第4ノードがゲートに接続された前記第1導電型の第10MISトランジスタおよび前記第2導電型の第11MISトランジスタと、
ソースが前記第8MISトランジスタのドレインに、ドレインが前記第9MISトランジスタのドレインに接続された前記第1導電型の第12MISトランジスタと、
ソースおよびドレインが前記第9MISトランジスタのソースおよびドレインに接続された前記第2導電型の第13MISトランジスタと、
ソースが前記第10MISトランジスタのドレインに、ドレインが前記第11MISトランジスタのドレインに接続された前記第1導電型の第14MISトランジスタと、
ソースおよびドレインが前記第11MISトランジスタのソースおよびドレインに接続された前記第2導電型の第15MISトランジスタとを有し、
前記第12および第13MISトランジスタのゲートと、前記第14MISトランジスタのドレインは、前記第5ノードに接続され、
前記第14および第15MISトランジスタのゲートと、前記第12MISトランジスタのドレインは、前記第6ノードに接続されることを特徴とする半導体集積回路装置。 - 第1および第2ノードと、
差動入力信号の一方がゲートに入力され、ドレインが前記第1ノードに接続された第1導電型の第1MISトランジスタと、
前記差動入力信号の他方がゲートに入力され、ドレインが前記第2ノードに接続され、ソースが前記第1MISトランジスタのソースと共通に接続された前記第1導電型の第2MISトランジスタと、
ソース・ドレイン経路が直列接続され、その直列接続経路の一端が前記第1ノードに接続され、他端がオープンとされた前記第1導電型の複数の第3MISトランジスタと、
ソース・ドレイン経路が直列接続され、その直列接続経路の一端が前記第2ノードに接続され、他端がオープンとされた前記第1導電型の複数の第4MISトランジスタと、
クロック信号が第1論理レベルの際に、前記第1および第2MISトランジスタの共通ソースノードを第1電圧に接続する前記第1導電型の第5MISトランジスタと、
前記クロック信号が第2論理レベルの際に、前記第1および第2ノードを第2電圧に接続する第6および第7MISトランジスタと、
前記クロック信号が前記第2論理レベルから前記第1論理レベルに遷移した際に、前記差動入力信号に応じて前記第1ノードと前記第2ノードのいずれが先に前記第2電圧から前記第1電圧に変位したかを検出し、その情報をラッチするラッチ回路部とを備え、
前記複数の第3MISトランジスタの一つは、ソース・ドレインの一方が前記第1ノードに接続された第3Aトランジスタであり、
前記複数の第4MISトランジスタの一つは、ソース・ドレインの一方が前記第2ノードに接続された第4Aトランジスタであり、
前記第3Aトランジスタと前記第4Aトランジスタは、前記ラッチ回路部のラッチデータに基づいて、いずれか一方がオン、他方がオフとなるように制御されることを特徴とする半導体集積回路装置。 - 請求項15記載の半導体集積回路装置において、
前記第1MISトランジスタのドレインと前記第3Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成され、
前記第2MISトランジスタのドレインと前記第4Aトランジスタのソース・ドレインの一方は、共通の拡散層で形成されることを特徴とする半導体集積回路装置。 - 請求項16記載の半導体集積回路装置において、
前記第1および第2MISトランジスタのそれぞれは、3以上の奇数となるN個のゲートフィンガで構成され、
前記複数の第3MISトランジスタおよび前記複数の第4MISトランジスタのそれぞれのゲート長およびゲート幅は、前記N個のゲートフィンガにおけるゲートフィンガ毎のゲート長およびゲート幅と同一であることを特徴とする半導体集積回路装置。 - 請求項15記載の半導体集積回路装置において、
前記ラッチ回路部は、
前記第1ノードを入力信号として、その反転信号を第3ノードに出力する第1インバータ回路と、
前記第2ノードを入力信号として、その反転信号を第4ノードに出力する第2インバータ回路と、
前記第3ノードと前記第4ノードを入力信号として、第5ノードと第6ノードに出力を行うCMOS型ラッチ回路と、
前記第5ノードと前記第6ノードを入力信号として、第7ノードと第8ノードに出力を行うSRラッチ回路とを備え、
前記CMOS型ラッチ回路は、
前記第3ノードがゲートに接続された前記第1導電型の第8MISトランジスタおよび第2導電型の第9MISトランジスタと、
前記第4ノードがゲートに接続された前記第1導電型の第10MISトランジスタおよび前記第2導電型の第11MISトランジスタと、
ソースが前記第8MISトランジスタのドレインに、ドレインが前記第9MISトランジスタのドレインに接続された前記第1導電型の第12MISトランジスタと、
ソースおよびドレインが前記第9MISトランジスタのソースおよびドレインに接続された前記第2導電型の第13MISトランジスタと、
ソースが前記第10MISトランジスタのドレインに、ドレインが前記第11MISトランジスタのドレインに接続された前記第1導電型の第14MISトランジスタと、
ソースおよびドレインが前記第11MISトランジスタのソースおよびドレインに接続された前記第2導電型の第15MISトランジスタとを有し、
前記第12および第13MISトランジスタのゲートと、前記第14MISトランジスタのドレインは、前記第5ノードに接続され、
前記第14および第15MISトランジスタのゲートと、前記第12MISトランジスタのドレインは、前記第6ノードに接続されることを特徴とする半導体集積回路装置。
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