WO2011037178A1 - 真空ドライポンプ - Google Patents

真空ドライポンプ Download PDF

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Publication number
WO2011037178A1
WO2011037178A1 PCT/JP2010/066532 JP2010066532W WO2011037178A1 WO 2011037178 A1 WO2011037178 A1 WO 2011037178A1 JP 2010066532 W JP2010066532 W JP 2010066532W WO 2011037178 A1 WO2011037178 A1 WO 2011037178A1
Authority
WO
WIPO (PCT)
Prior art keywords
oil
sealing member
holes
oil sealing
pump
Prior art date
Application number
PCT/JP2010/066532
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
智成 田中
Original Assignee
株式会社アルバック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アルバック filed Critical 株式会社アルバック
Priority to JP2011533021A priority Critical patent/JP5280545B2/ja
Priority to CN201080037445.7A priority patent/CN102483063B/zh
Priority to KR1020127007042A priority patent/KR101366769B1/ko
Publication of WO2011037178A1 publication Critical patent/WO2011037178A1/ja

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F04C27/006—Elements specially adapted for sealing of the lateral faces of intermeshing-engagement type pumps, e.g. gear pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Definitions

  • the present invention relates to a mechanical vacuum dry pump that does not use oil or liquid in a vacuum chamber, and more particularly to a vacuum dry pump that has an excellent ability to prevent oil from leaking from the oil chamber to the pump chamber.
  • a vacuum pump having a pump chamber for exhausting gas is used, and a dry pump (DRP) or a mechanical booster pump (MBP) is known as a vacuum pump.
  • DRP dry pump
  • MBP mechanical booster pump
  • the phenomenon of oil entering the pump chamber from the oil chamber is that when the pressure in the vacuum pump reaches a predetermined pressure, the oil molecules that diffuse due to the vapor pressure of the oil, and the pressure between the pump chamber and the oil chamber due to fluctuations in the suction pressure The difference is caused by the flow of gas and the entry of oil molecules or fine oil particles into the pump chamber.
  • a structure that prevents oil from leaking by a ring-shaped shaft seal attached to a rotating shaft is conventionally known.
  • This structure prevents oil from leaking due to the shape or gap of the shaft seal ring (see, for example, Patent Document 1), and is basically one of labyrinth seal structures.
  • a structure in which elements constituting the labyrinth seal are complicated is known (for example, see Patent Document 2).
  • a structure that complicates the elements constituting the labyrinth seal is considered effective as a structure that prevents oil leakage, but the shaft seal and the cylinder structure that supports the shaft seal are complicated. Therefore, there is a problem that the manufacturing cost of the vacuum dry pump increases.
  • the present invention has been made to solve the above-described conventional problems, and an object thereof is to provide a vacuum dry pump having a simple structure and capable of preventing oil from leaking. .
  • the vacuum dry pump of one embodiment of the present invention includes a pump chamber through which gas passes, an oil chamber that is provided adjacent to the pump chamber, and through which the oil exists, inside the oil chamber.
  • a rotating shaft that protrudes, a rotating body that is provided around the rotating shaft in the pump chamber and rotates in conjunction with the rotation of the rotating shaft, and a rotating portion of the rotating shaft at a boundary portion between the pump chamber and the oil chamber.
  • Provided in the periphery, rotates in conjunction with the rotation of the rotating shaft has a plurality of holes that are locally disposed on the surface thereof and penetrate in the thickness direction, and oil leaks from the oil chamber to the pump chamber And a disk-shaped oil sealing member for preventing this.
  • the plurality of holes are provided so as to surround the rotating shaft.
  • the plurality of holes are formed in a circular shape and in a crank shape in a cross section in the thickness direction of the oil sealing member.
  • the plurality of holes are formed in a circular shape and extend in an oblique direction with respect to the thickness direction of the oil sealing member.
  • the plurality of holes are provided in positions close to the outer periphery of the oil sealing member and formed in a circular shape, and positions near the center of the oil sealing member.
  • the holes are preferably arranged concentrically.
  • the plurality of holes may be formed so that the opening width of the holes gradually increases on the radially outer side from the center of the oil sealing member toward the outer periphery. preferable.
  • a disk-shaped oil sealing member that rotates in conjunction with the rotation of the rotary shaft is provided, and a plurality of oil sealing members that are locally disposed on the surface of the oil sealing member and penetrate in the thickness direction are provided. A hole is formed, and the oil sealing member prevents oil from leaking from the oil chamber to the pump chamber.
  • the oil sealing member having such a structure has a structure through which gas can pass. Due to this gas flow, oil fine particles or oil vapor is adsorbed to the oil sealing member when passing through the rotating oil sealing member. The oil adsorbed on the oil sealing member is blown off around the oil sealing member by centrifugal force generated by the rotation of the oil sealing member.
  • the vacuum dry pump concerning a 1st embodiment of the present invention it is a top view showing typically an oil sealing member.
  • the vacuum dry pump which concerns on 1st Embodiment of this invention it is sectional drawing which shows an oil sealing member typically.
  • the vacuum dry pump concerning a 2nd embodiment of the present invention it is a top view showing typically an oil sealing member.
  • the vacuum dry pump concerning a 2nd embodiment of the present invention is a sectional view showing typically an oil sealing member.
  • a 3rd embodiment of the present invention is a top view showing typically an oil sealing member.
  • a 3rd embodiment of the present invention is a sectional view showing typically an oil sealing member.
  • a 4th embodiment of the present invention is a top view showing typically an oil sealing member.
  • a 4th embodiment of the present invention is a sectional view showing typically an oil sealing member.
  • the vacuum dry pump concerning a 5th embodiment of the present invention is a top view showing typically an oil sealing member.
  • vacuum dry pump concerning a 5th embodiment of the present invention it is a sectional view showing typically an oil sealing member.
  • FIG. 1 is a diagram schematically illustrating a vacuum dry pump according to a first embodiment of the present embodiment, in which FIGS. 1A and 1B are longitudinal sectional views, and FIG. 1C is a transverse sectional view.
  • the vacuum dry pump 1 includes pump chambers 10A to 10E, an oil chamber 20, rotary shafts 30 and 30, a rotor 40 (rotary body), and an oil sealing member 50.
  • the pump chambers 10A to 10E the gas sucked into the vacuum dry pump 1 and discharged from the vacuum dry pump 1 passes.
  • the oil chamber 20 is provided adjacent to the pump chamber 10 ⁇ / b> E, and oil exists in the oil chamber 20.
  • the rotating shafts 30 and 30 are provided so as to penetrate the pump chambers 10A to 10E and protrude into the oil chamber 20.
  • the rotor 40 is provided around the rotary shafts 30 and 30 in the pump chambers 10A to 10E, and rotates in conjunction with the rotation of the rotary shafts 30 and 30.
  • the oil sealing member 50 is provided around the rotary shafts 30 and 30 at the boundary portion between the pump chamber 10E and the oil chamber 20.
  • the oil sealing member 50 is formed in a disc shape and rotates in conjunction with the rotational movement of the rotary shafts 30 and 30 to prevent oil from leaking from the oil chamber 20 to the pump chambers 10A to 10E.
  • the vacuum dry pump 1 having such a configuration rotates the rotor 40 based on the rotation of the rotary shafts 30, 30, and the gas existing in the pump chambers 10 A to 10 E is rotated from the suction port 16 by the rotation operation of the rotor 40. The gas is moved toward the discharge port 17 and the gas is exhausted to the outside of the vacuum dry pump 1.
  • the disk-shaped oil sealing member 50 is arrange
  • a plurality of holes 51 are provided.
  • the oil sealing member 50 since the oil sealing member 50 is provided with the plurality of holes 51 as described above, the oil sealing member 50 has a structure that allows gas to pass therethrough. Have. Due to the flow of gas generated by the oil sealing member 50, oil fine particles or oil vapor is adsorbed to the oil sealing member 50 when passing through the rotating oil sealing member 50. Here, the centrifugal force due to the rotation of the oil sealing member 50 acts on the oil adsorbed on the oil sealing member 50.
  • a plurality (for example, five stages in this embodiment) of pump chambers 10A to 10E are connected in series through a pipe 15 along the longitudinal direction thereof.
  • the pump chamber 10A located on the most upstream side is provided with a suction port 16
  • the pump chamber 10E located on the most downstream side is provided with a discharge port 17.
  • the two rotary shafts 30 and 30 (first rotary shaft and second rotary shaft) are rotatably supported by bearings 31 and 32, and are connected to one end of the two rotary shafts 30 and 30. They are connected to each other via a provided gear 33 (timing gear).
  • One of the two rotary shafts 30, 30 is connected to the motor 35 via a coupling 34.
  • a plurality of rotors 40 disposed in the respective pump chambers 10A to 10E are provided along the axial direction of the rotary shafts 30 and 30.
  • the plurality of rotors 40 are disposed in each of the pump chambers 10A to 10E and are provided around the rotary shafts 30 and 30.
  • the plurality of rotors 40 can rotate in conjunction with the rotation of the rotary shafts 30 and 30.
  • the rotor 40 is a gas transfer body that transfers gas.
  • the oil chamber 20 is an oil existing region that is provided adjacent to the pump chamber 10E and is sealed so that oil does not leak outside the vacuum dry pump 1.
  • oil 21 lubricating oil
  • a gear 33 constituting a rotation mechanism of the rotary shafts 30 and 30 is accommodated.
  • the oil 21 in the oil chamber 20 is pumped up by the rotation operation of the gear, and the gear 33 is maintained in a lubrication state.
  • a disk-like oil sealing member 50 is provided around the rotary shafts 30 and 30.
  • the oil sealing member 50 rotates in conjunction with the rotation of the rotary shafts 30 and 30 to prevent oil from leaking from the oil chamber 20 to the pump chambers 10A to 10E.
  • the oil sealing member 50 has a plurality of holes 51 penetrating in the thickness direction of the oil sealing member 50.
  • the hole 51 is locally disposed on the surface of the oil sealing member 50.
  • a gap (slit) is provided outside the rotating oil sealing member 50, and gas passes through this gap. For this reason, a structure in which the number of slits is increased or the size of the slits is reduced (fine) has been adopted, but it is difficult to process a part to which the oil sealing member is fixed, and the manufacturing cost is increased. It was.
  • the through-hole 51 is provided in the disc part of the oil sealing member 50, and the oil sealing member 50 has a structure which can pass gas.
  • 2A and 2B are views showing the oil sealing member 50 according to the first embodiment of the present invention.
  • FIG. 2A is a plan view
  • FIG. 2B is a cross-sectional view.
  • the plurality of holes 51A (51) are formed in a circular shape so as to surround the rotary shafts 30 and 30.
  • the oil sealing member 50 ⁇ / b> A (50) includes a first surface 60 and a second surface 61 opposite to the first surface 60.
  • the hole 51A is formed between the first surface 60 and the second surface 61, that is, is formed so as to penetrate the oil sealing member 50A.
  • the conductance in the oil sealing member 50 (the total conductance defined by the plurality of holes 51 ⁇ / b> A) is larger than the conductance of the gap formed around the oil sealing member 50.
  • the flow rate of the gas passing through the plurality of holes 51A formed in the plate is increasing. Oil fine particles or oil vapor strikes and adsorbs around the holes 51 when passing through the holes 51 of the rotating oil sealing member 50.
  • oil is further adsorbed (attached) onto the oil (oil film, oil droplets) adsorbed on the oil sealing member 50, and the oil is stacked on the oil adsorbed earlier, the oil adsorbed on the oil sealing member 50 ( The amount of oil film and oil droplets) increases.
  • the pressure increase rate of the oil chamber is high due to the pump action occurring in one direction, but the pressure decrease rate
  • the exhaust performance deteriorates under the use condition that the engine is slow.
  • a pressure reduction / pressurization process such as depressurizing the load lock chamber or setting the pressure of the load lock chamber to a pressure higher than the vacuum (for example, atmospheric pressure) Performance degradation occurs.
  • a pressure reduction / pressurization process such as depressurizing the load lock chamber or setting the pressure of the load lock chamber to a pressure higher than the vacuum (for example, atmospheric pressure) Performance degradation occurs.
  • the configuration of the first embodiment of the present invention it is possible to capture oil efficiently for the magnitude of conductance without having a directionality in the flow of gas.
  • FIG. 3A and 3B are views showing an oil sealing member 50 according to a second embodiment of the present invention.
  • FIG. 3A is a plan view and FIG. 3B is a cross-sectional view.
  • the hole 51B (51) is formed in a circular shape
  • the hole 51B (51) is formed in a crank shape in the cross section in the thickness direction of the oil sealing member 50B (50).
  • the hole 51B has a first hole 62 having a predetermined depth formed in the first surface 60 of the oil sealing member 50B and a predetermined depth formed in the second surface 61 of the oil sealing member 50B. It is formed by connecting with the 2nd hole 63 which has.
  • the center of the second hole 63 is deviated from the center of the first hole 62 on the radially outer side of the oil sealing member 50B.
  • FIGS. 4A and 4B are views showing an oil sealing member 50 according to a third embodiment of the present invention.
  • FIG. 4A is a plan view and FIG. 4B is a cross-sectional view.
  • the hole 51C (51) is formed in a circular shape and extends in a direction oblique to the thickness direction in the cross section in the thickness direction of the oil sealing member 50C (50). Is provided. Specifically, the position of the second opening 65 formed in the second surface 61 is shifted from the position of the first opening 64 formed in the first surface 60 on the radially outer side of the oil sealing member 50C.
  • the hole 51 By forming the hole 51 in an oblique direction with respect to the thickness direction, an effect of pumping action due to centrifugal force can be expected.
  • the pumping action by centrifugal force is used only to increase the probability (supplementary probability) that oil molecules collide with the oil sealing member 50.
  • FIG. 5A and 5B are views showing an oil sealing member 50 according to a fourth embodiment of the present invention.
  • FIG. 5A is a plan view and FIG. 5B is a cross-sectional view.
  • the hole 51D (51) includes a plurality of inner holes 151D (51) and outer holes 251D (51) formed in a circular shape.
  • the outer hole 251D (51) is provided at a position close to the outer periphery of the oil sealing member 50D (50).
  • the inner hole 151D (51) is provided at a position near the center on the radially inner side of the oil sealing member 50B.
  • the diameter (size) of the outer hole 251D (51) is larger than the diameter (size) of the inner hole 151D (51).
  • a circle in which the centers of the plurality of outer holes 251D (51) are located on the circumference and a circle in which the centers of the plurality of inner holes 151D (51) are located on the circumference are arranged concentrically. Is done. That is, the plurality of outer holes 251D (51) and the plurality of inner holes 151D (51) are arranged concentrically.
  • a hole group having two diameters that is, a first group including a plurality of inner holes 151D and a second group including a plurality of outer holes 251D are arranged in the oil sealing member 50.
  • the present invention is not limited to this structure.
  • a structure in which the third hole group is arranged in the oil sealing member may be employed.
  • the third hole group is constituted by a plurality of holes having a diameter larger than the diameter of the inner hole 151D and smaller than the diameter of the outer hole 251D, and the third hole group includes the first group (the inner hole).
  • the first group, the second group, and the third group are arranged concentrically.
  • FIGS. 6A and 6B are views showing an oil sealing member 50 according to a fifth embodiment of the present invention.
  • FIG. 6A is a plan view
  • FIG. 6B is a cross-sectional view.
  • the hole 51E (51) has an increased opening width of the hole 51E on the radially outer side of the oil sealing member 50E (50).
  • the shape of the hole 51E may not be circular.
  • a structure in which the opening area at a position close to the outer periphery where the peripheral speed is high is increased. ing. This structure is effective for increasing the conductance.
  • FIGS. 7A and 7B are views showing an oil sealing member 50 according to a sixth embodiment of the present invention.
  • FIG. 7A is a plan view and FIG. 7B is a cross-sectional view.
  • a sintered metal or net 52 is disposed inside the hole 51F (51) so as to close the hole 51F. By disposing the sintered metal or the net 52 inside the hole 51, the action of capturing the oil particles can be enhanced.
  • the present invention can be widely applied to mechanical vacuum dry pumps in which oil or liquid is not used in the vacuum chamber.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
PCT/JP2010/066532 2009-09-25 2010-09-24 真空ドライポンプ WO2011037178A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011533021A JP5280545B2 (ja) 2009-09-25 2010-09-24 真空ドライポンプ
CN201080037445.7A CN102483063B (zh) 2009-09-25 2010-09-24 干式真空泵
KR1020127007042A KR101366769B1 (ko) 2009-09-25 2010-09-24 진공 드라이 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-220320 2009-09-25
JP2009220320 2009-09-25

Publications (1)

Publication Number Publication Date
WO2011037178A1 true WO2011037178A1 (ja) 2011-03-31

Family

ID=43795923

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/066532 WO2011037178A1 (ja) 2009-09-25 2010-09-24 真空ドライポンプ

Country Status (5)

Country Link
JP (1) JP5280545B2 (zh)
KR (1) KR101366769B1 (zh)
CN (1) CN102483063B (zh)
TW (1) TWI510715B (zh)
WO (1) WO2011037178A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016121334A1 (ja) * 2015-01-27 2016-08-04 株式会社デンソー 燃料ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造
JP2002332963A (ja) * 2001-05-08 2002-11-22 Toyota Industries Corp 真空ポンプにおける油洩れ防止構造
JP2008051116A (ja) * 2007-11-05 2008-03-06 Toyota Industries Corp 真空ポンプにおける軸封構造

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158252U (zh) * 1974-10-30 1976-05-07
JPH1193877A (ja) * 1997-09-25 1999-04-06 Nec Yamagata Ltd 真空ポンプ
JP2002206493A (ja) * 2000-11-10 2002-07-26 Ebara Corp スクリュー式ドライ真空ポンプ
KR20020049723A (ko) * 2000-12-20 2002-06-26 김성범 실시간 경매 사이트의 서비스 방법
KR20040031854A (ko) * 2002-10-04 2004-04-14 가부시키가이샤 도요다 지도숏키 진공 펌프의 오일 누설 방지 구조
FR2920207B1 (fr) * 2007-08-23 2009-10-09 Alcatel Lucent Sas Pompe a vide de type seche comportant un dispositif d'etancheite aux fluides lubrifiants et elements centrifugeur equipant un tel dispositif

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造
JP2002332963A (ja) * 2001-05-08 2002-11-22 Toyota Industries Corp 真空ポンプにおける油洩れ防止構造
JP2008051116A (ja) * 2007-11-05 2008-03-06 Toyota Industries Corp 真空ポンプにおける軸封構造

Also Published As

Publication number Publication date
CN102483063B (zh) 2015-02-11
CN102483063A (zh) 2012-05-30
TWI510715B (zh) 2015-12-01
JPWO2011037178A1 (ja) 2013-02-21
TW201128072A (en) 2011-08-16
KR101366769B1 (ko) 2014-02-25
KR20120048022A (ko) 2012-05-14
JP5280545B2 (ja) 2013-09-04

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