WO2011016607A1 - Pickup apparatus and led chip classification apparatus including same - Google Patents

Pickup apparatus and led chip classification apparatus including same Download PDF

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Publication number
WO2011016607A1
WO2011016607A1 PCT/KR2009/007812 KR2009007812W WO2011016607A1 WO 2011016607 A1 WO2011016607 A1 WO 2011016607A1 KR 2009007812 W KR2009007812 W KR 2009007812W WO 2011016607 A1 WO2011016607 A1 WO 2011016607A1
Authority
WO
WIPO (PCT)
Prior art keywords
led chip
holding member
support
groove
seating
Prior art date
Application number
PCT/KR2009/007812
Other languages
French (fr)
Korean (ko)
Inventor
유병소
Original Assignee
(주)큐엠씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090071118A external-priority patent/KR101074532B1/en
Priority claimed from KR1020090109824A external-priority patent/KR101093450B1/en
Application filed by (주)큐엠씨 filed Critical (주)큐엠씨
Priority to CN200980160637.4A priority Critical patent/CN102472790B/en
Publication of WO2011016607A1 publication Critical patent/WO2011016607A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2632Circuits therefor for testing diodes
    • G01R31/2635Testing light-emitting diodes, laser diodes or photodiodes

Definitions

  • the present invention relates to a pickup device capable of easily picking up an object and an LED chip sorting device including the same.
  • LED Light Emitting Diode
  • Luminescent diode a kind of light emitting device using a semiconductor that converts electricity into light, also known as a Luminescent diode.
  • the LED is manufactured through an epi process (EPI), a chip process (Fabrication), and a package process (Package), etc., and is subjected to a test process in a packaged state through the package process.
  • EPI epi process
  • Fabrication chip process
  • Package package process
  • the LEDs which are not normally operated hereinafter referred to as 'defective products'
  • 'goods' the LEDs which are normally operated
  • LED may be classified as a low grade even if it is excluded or defective in the test process due to a problem occurring during the package process, but before the package process (hereinafter referred to as 'LED chip') Due to a problem that occurs during the manufacturing process, it may be excluded as a defective product in the test process or even classified as a low grade product. Therefore, it is necessary to accurately measure and classify the performance in the state of the LED chip so as not to go through unnecessary packaging and testing processes. In the LED chip sorting process, the LED chip must be picked up quickly and stably in order to move the LED chip from the supply apparatus to the loading apparatus or from the unloading apparatus to the sorting apparatus.
  • Another example of the object is a semiconductor chip.
  • element formation is completed, and the semiconductor chip integrally formed on a wafer is separated and separated into chip stages, and a semiconductor chip is formed. Since these semiconductor chips are usually fixed to the adhesive tape, the semiconductor chips must be peeled from the adhesive tape in order to pick up each semiconductor chip.
  • an object of the present invention is to provide a pickup device that can easily pick up the object and the LED chip sorting apparatus including the same.
  • the present invention may include the following configuration.
  • the pickup device for picking up the object located on the holding member the support member is installed on the lower side of the holding member, the groove is formed on the surface toward the holding member;
  • a support pin installed to protrude from the inside of the groove of the support member toward the holding member and penetrating the holding member to support the object;
  • a picker installed at an upper side of the object and picking up the object, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
  • the installation hole is installed through the groove of the support member, the support pin may be located through the installation hole.
  • the support member includes a contact surface in contact with the holding member, the groove is located inside the contact surface, when viewed from the upper surface of the support member, the distance between the intake hole and the center of the support member, the intake air It may be shorter than the distance between the ball and the contact surface.
  • the present invention may further include an intake apparatus for providing a suction force for moving the holding member in the inward direction of the groove through the intake hole.
  • the present invention may further include a pin lift device for raising and lowering the support pin.
  • the picker may be a device for adsorbing the object.
  • the holding member may be a thin film having an adhesive surface on the object.
  • the object may be an LED chip or a semiconductor chip.
  • the object may further include a plurality of expansion members that are disposed adjacent to the holding member, and expands the holding member to space the plurality of the objects apart from each other.
  • the expansion member may further include a support mechanism installed below the holding member and extending the holding member by pushing the holding member upward while supporting the lower surface of the holding member.
  • the expansion member may be further provided on the upper side of the holding member, and may further include a support mechanism for expanding the holding member by pushing the holding member downward while supporting the upper surface of the holding member.
  • the present invention in the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip, comprising a seating member on which the LED chip is seated, a loading position in which the LED chip is loaded on the seating member, A supply unit for rotating the seating member to a test position at which the LED chip is tested and to an unloading position at which the LED chip is unloaded from the seating member; A supply unit installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up an LED chip from the supply member at the loading position, and a loading unit to load the picked up LED chip into the seating member; A loading unit comprising a; A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And an unloading part installed next to the supply part and collecting an LED chip tested from the seating member in the unloading position, wherein the pickup device is installed below the supply member and faces the supply member.
  • a support member having a groove formed in the support member;
  • a support pin installed to protrude toward the supply member from the inner side of the groove of the support member and capable of supporting the object through the supply member;
  • a picker installed at an upper side of the LED chip and picking up the LED chip, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
  • the present invention in the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip, comprising a seating member on which the LED chip is seated, a loading position in which the LED chip is loaded on the seating member, and A supply unit for rotating the seating member to a test position at which the LED chip is tested and to an unloading position at which the LED chip is unloaded from the seating member; A loading unit installed beside the supply unit and supplying an LED chip to be tested to the seating member in the loading position; A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And a storage unit installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up the LED chips from the storage member at the unloading position, and a sorting unit to transfer the picked up LED chips.
  • the pick-up apparatus includes: a support member installed at a lower side of the accommodating member and having a groove formed on a surface of the accommodating member; A support pin installed to protrude toward the accommodation member from the inside of the groove of the support member and capable of supporting the object through the accommodation member; And a picker installed at an upper side of the LED chip and picking up the LED chip, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
  • the supply part includes a plurality of support frames extending radially about the rotation axis
  • the seating member may be installed on each end side of the plurality of support frames.
  • the present invention may further include an intake apparatus for providing a suction force for moving the supply member in the inward direction of the groove through the intake hole.
  • the present invention may further include a pin lift device for raising and lowering the support pin.
  • FIG. 1 is a side sectional view of a pickup apparatus according to a first embodiment of the present invention.
  • FIGS 2 to 4 are side cross-sectional views showing the operation relationship of the pickup apparatus according to the first embodiment of the present invention.
  • FIG 5 is a plan view of a pickup apparatus according to the first embodiment of the present invention.
  • FIGS. 6 and 7 are perspective views of an object supply device including a pickup device according to a second embodiment of the present invention.
  • FIG 8 to 10 are side cross-sectional views showing the operating relationship of the expansion member of the pickup apparatus according to the present invention.
  • FIG. 11 is a perspective view of the LED chip sorting apparatus according to the present invention.
  • FIG. 12 is a plan view of the LED chip sorting apparatus according to the present invention.
  • FIG. 13 is an enlarged perspective view of a supply unit of the LED chip sorting apparatus according to the present invention.
  • FIG. 1 is a side cross-sectional view of a pickup apparatus according to a first embodiment of the present invention
  • Figures 2 to 4 are side cross-sectional views showing the operation relationship of the pickup apparatus according to the first embodiment of the present invention
  • Figure 5 is a first A plan view of a pickup apparatus according to the embodiment.
  • the pickup apparatus 100 is a device for picking up the object (L) located on the holding member 10, the support member 110, the support pin 120, and the picker ( 130).
  • the object L may be, for example, a thin workpiece such as a semiconductor chip or an LED chip, but the object L is not necessarily limited to a semiconductor chip or an LED chip.
  • These objects L are usually located on the sticky holding member 10, such as a blue tape, are often held, stored or supplied.
  • the holding member 10 is not limited to the blue tape, for example, the surface facing the object has adhesiveness or adhesion, and any thin film having flexibility for separation from the object may be used as the holding member 10. Can be.
  • the holding member 10 In order to process, process, test, and classify the object L, the holding member 10 must be peeled off and picked up from the object L.
  • the components necessary for the pickup of the object L will be described in more detail. Let's do it.
  • the support member 110 is located below the holding member 10.
  • the support member 110 may be formed of, for example, a cylindrical member, but the shape of the support member 110 is not limited to the cylindrical shape and may be formed in various shapes.
  • the upper surface of the support member 110 has a contact surface 113 is in direct contact with the lower surface of the holding member 10, the groove 111 is formed in the inner region of the contact surface 113 is recessed to a certain depth.
  • This groove 111 is used as a space for removing the holding member 10 from the object (L).
  • the groove 111 may be formed in a hemispherical shape, but is not limited thereto and may be formed in various shapes such as a cylindrical shape and a rectangular shape.
  • the contact surface 113 is provided in a ring shape as shown in the plan view of FIG. 5, and the contact surface 113 in the ring shape is shown.
  • the holding member 10 is in contact with the support. In this case, the object L on the holding member 10 is positioned above the region where the groove 111 is located.
  • An installation hole 114 for lifting and lowering of the support pin 120 may be provided at the center of the groove 111.
  • the installation hole 114 is installed to penetrate the installation space and the groove 111 inside the support member 110 in which the support pin 120 is maintained, and the support pin 120 supports the center of the object L. It is formed in the center of the groove 111 to enable.
  • the installation hole 114 has a size and shape that does not interfere with the lifting movement of the support pin 120. 1 and 5, the installation hole 114 may be a cylindrical shape hole, but the shape of the installation hole 114 is not limited to a cylindrical shape, various conditions such as the shape of the support pin 120 It may have an appropriate shape according to.
  • an intake hole 112 may be provided around the installation hole 114 in the groove 111 of the support member 110 for inflow and outflow of air.
  • the intake hole 112 is installed to penetrate the installation space and the groove 111 inside the support member 110 in which the support pin 120 is held.
  • a plurality of intake holes 112 may be provided, and in this case, the intake holes 112 may be installed at predetermined intervals, for example, at equal intervals in the circumferential direction with respect to the installation hole 114.
  • the intake holes 112 When the intake holes 112 are installed at equal intervals, the air inside the groove 111 may flow in and out uniformly.
  • the intake hole 112 inhales air inside the groove 111 to provide a suction force, so that the holding member 10 moves inside the groove 111, that is, in the direction indicated by the arrow A in FIG. 1. do.
  • an intake apparatus 20 may be provided on one side of the support member 110.
  • the intake apparatus 20 communicates with the intake hole 112 of the groove 111, thereby providing a suction force for moving the holding member 10 in the direction of arrow A.
  • FIG. The intake apparatus 20 is connected to the support member 110 through a connection hole 115 formed on one side or the bottom surface of the support member 110 so as not to interfere with other components such as the holding member 10.
  • the support pin 120 when the support pin 120 is spaced apart from the holding member 10, air may be sucked through not only the intake hole 112 but also the installation hole 114. 112 and the installation hole 114 is connected to the intake apparatus 20 through an installation space and a connection hole 115 inside the support member 110 in which the support pin 120 is held.
  • the holding member 10 may be moved in the direction in which the groove 111 is located, and when the intake apparatus 20 stops suction of the fluid, the holding member ( 10) can be moved to its original position.
  • the support pin 120 is installed on the support member 110 to support the object L by penetrating the holding member 10. Specifically, the support pin 120 is installed to protrude in the direction toward the holding member 10 from the inside of the groove 111. When the intake apparatus 20 sucks the fluid, the holding member 10 can be easily removed from the object L because the holding member 10 is penetrated by the support pin 120.
  • the support pin 120 may be positioned below the holding member 10, may be positioned in the groove 111 through the supporting member 110, or may contact the bottom surface of the holding member 10.
  • the support pin 120 is a member having a rod or pin shape that is vertically long and may be formed to decrease in size in a direction toward the inside of the groove, that is, in the direction of an arrow A in FIG. 1.
  • the upper side of the support pin 120 to form a tip not only the penetration of the holding member 10 is easy, but also the area of the support pin 120 in contact with the object (L) is reduced to damage the object (L) Will be reduced.
  • the support pin 120 may be elevated through the installation hole 114 of the support member 110.
  • the support pin 120 may be moved relative to the fixed support member 110 by a separate moving means coupled to the support pin 120.
  • the support pin 120 is fixed to the support member 110. It is also possible to move only.
  • both the support member 110 and the support pin 120 may be formed to be movable.
  • Picker 130 is a device that is installed on the upper side of the object (L) can pick up the object (L).
  • the picker 130 may be, for example, a device for adsorbing the object L by the negative pressure of air or fixing the object L by the electrostatic force, and stably picking up the object L without damaging the object L as much as possible.
  • the mechanism and kind thereof are not particularly limited.
  • the picker 130 is connected to a picker arm or a rotating arm, which is not shown, and the picker arm and the rotating arm are connected to a motor or the like, so that the object L picked up by the picker 130 is driven by a predetermined drive. Can be moved to the desired position.
  • the distance d1 between the intake hole 112 and the center 114 of the support member 110 is greater than the distance d2 between the intake hole 110 and the contact surface 113 when viewed from the top.
  • the intake hole 112 is provided to be short.
  • the intake hole 112 is formed at a position closer to the contact surface 113 than the center 114 of the support member 110, the inlet hole 112 is moved to the holding member 10 before the holding member 10 is completely removed from the object L. Due to the intake hole 112 is closed, the suction force may no longer be transmitted.
  • the intake hole 112 is preferably formed at a position closer to the center 114 of the support member 110 than the contact surface 113.
  • the operation of the pickup apparatus will be described with reference to FIGS. 1 to 4.
  • the support member 110 of the pickup device 100 is fixed, and the support pin 120 is connected to a pin lifting device (not shown) to be able to lift up and down.
  • the pin lifting device may be installed on the support member 110.
  • the pin lifting device can directly raise and lower the support pin 120 using a hydraulic cylinder or a pneumatic cylinder, and the support pin using a motor and a coupling mechanism coupled to the motor and the support pin 120, respectively. It is also possible to raise and lower 120.
  • the connection mechanism may include at least one of a pulley and a belt, a ball screw, a cam member, a rack pinion gear, and the like.
  • the support pin 120 has a rising position where the support pin 120 is in contact with the holding member 10 and a lowering position where the support pin 120 is positioned below the holding member 10 and does not contact the holding member 10. Move up and down between locations. That is, the pin lifting device may raise the support pin 120 such that the support pin 120 reaches the raised position as shown in FIG. 2. In addition, the pin lifting device may lower the support pin 120 so that the support pin 120 reaches the lowered position as shown in FIG.
  • the pickup device 100 is initially set to the position as shown in FIG. That is, the object (L) is attached to the holding member 10, the support pin 120 is located in the lowered position not in contact with the holding member 10 from the lower side of the holding member 10, picker 130 ) Maintains a state in which the object L does not come into contact with the object L above.
  • the support pin 120 is raised to the rising position relative to the support member 110, and then the picker 130 is lowered in contact with the object (L) to pick up it.
  • the retaining member 10 may be partially or totally drilled, and then the retaining member 10 moves inside the groove 111. Therefore, the holding member 10 may be more easily removed from the object L picked up by the picker 130. In addition, since the object L is supported by the support pin 120 when the holding member 10 is moved into the groove 111, the picker 130 may stably pick up the object L.
  • the picker 130 is in danger of descending a distance greater than the distance that must be lowered to pick up the object (L).
  • vibration may occur in the state in which the picker 130 is in contact with the object L.
  • FIG. By the way, in the state in which the support pin 120 is located in the rising position, if the falling distance of the picker 130 is increased or vibration occurs as described above, the object L is supported by the support pin 120 in the rising position. There is a risk of damage.
  • the support pin 120 may be raised to the support member 110 in a raised position. Accordingly, the risk that the object L is damaged by the support pin 120 is reduced. That is, when the picker 130 descends and contacts the object L, the picker 130 descends a distance greater than the distance that the picker 130 must descend to pick up the object L, or the picker 130 is the object. Even if vibration occurs in the state of contact with (L), since the support pin 120 is not yet in the raised position, the object L and the holding member 10 may move inside the groove 111. That is, the groove 111 may be used as a free space for preventing damage to the object (L).
  • the suction force is provided to the holding member 10 by discharging the air in the groove 111 through the intake hole 112 by the intake apparatus 20. Accordingly, the picker 130 picks up the object L and the holding member 10 moves inwardly of the groove 111, so that the holding member 10 is peeled off from the object L. In this process, the support pin 120 is still supporting the lower side of the object (L) by maintaining the raised position.
  • the picker 130 may move or rotate the object L picked up using a separate picker arm or a rotating arm.
  • the application of the suction force by the intake apparatus 20 is stopped, the holding member 10 is returned to its original state, and the support pin 120 also returns to the initial lowered position. Through this step, pickup of the object L is completed stably and smoothly.
  • FIGS. 6 to 10 a pickup apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 6 to 10.
  • the second embodiment is the same as the first embodiment except that the pick-up apparatus is provided with an expansion member.
  • the same reference numerals will be given and no separate description will be given.
  • the object supply device includes a base unit 30, a receiving device 40 located on the base unit 30, and a pickup device 100.
  • the base unit 30 includes a first body 31 and a second body 32, the first body 31 is to be moved in the X direction and the Y direction relative to the second body (32). It may also be rotated.
  • the pickup device 100 maintains a fixed position with respect to the second body 32, and the receiving device 40 maintains a fixed position with respect to the first body 31.
  • an object attached to the holding member 10 fixed to the accommodation mechanism 40 may move to an upper side of the pickup apparatus 100, that is, to a pickup position.
  • the object may be oriented in an appropriate direction according to the rotation of the first body 31.
  • the pickup device 100 is fixed and only the object is moved and rotated to the appropriate pickup position.
  • the pickup apparatus 100 it is also possible to move and rotate the pickup apparatus 100 to an appropriate pickup position while the position of the object is fixed.
  • the first body 31 may be moved in the X direction and the Y direction with respect to the second body 32, and the pickup apparatus 100 may maintain a fixed position with respect to the first body 31, and may be accommodated.
  • the instrument 40 can maintain a fixed position relative to the second body 32. In this case, the pickup device 100 moves to an appropriate pickup position according to the movement of the first body 31.
  • the base unit 30 may be formed to be lowered.
  • the first body 31 is formed to be able to move up and down with respect to the second body 32, and the pickup apparatus 100 is fixed to the second body 32.
  • the retained position, and the receiving device 40 maintains a fixed position with respect to the first body 31.
  • the storage device 40 moves up and down relative to the fixed pickup device 100.
  • the second body 32 may be formed to be liftable with respect to the first body 31 while the first body 31 is fixed.
  • the pickup device 100 maintains a fixed position with respect to the second body 32, and the receiving device 40 maintains a fixed position with respect to the first body 31. In this case, as the second body 32 moves up and down, the pickup device 100 moves up and down relative to the fixed housing 40.
  • the above-described movement of the base unit 30 in the X and Y directions, and the lifting and lowering movement may be performed by using a hydraulic cylinder or a pneumatic cylinder, or may be performed by using a motor and a coupling mechanism coupled to the motor.
  • the connecting mechanism may include at least one of a pulley and a belt, a ball screw, a cam member, a rack pinion gear, and the like.
  • the upper side of the first body 31 of the base unit 30 is coupled to the receiving device (40).
  • an installation space 311 in which the pickup device 100 is installed is provided, and an accommodation groove 312 into which the accommodation mechanism 40 is inserted is provided (see FIG. 8). .
  • the accommodation mechanism 40 is inserted and fixed between the accommodation grooves 312.
  • the receiving device 40 is coupled on the first body 31 of the base unit 30.
  • the accommodation mechanism 40 has a housing 41 for housing the holding member 10. As shown in FIG. 6, the housing 41 may be formed in a disk shape as a whole. In addition, the housing 41 may include a hollow portion having a disk shape as a whole, and the holding member 10 is accommodated in the hollow portion.
  • a plurality of objects L are integrated on the holding member 10.
  • the object L may be an LED chip
  • the holding member 10 may be a blue tape.
  • the LED chip may be attached to the holding member 10 through a scribing and breaking process. When the holding member 10 is expanded in this state, the plurality of LED chips are spaced apart from each other by a predetermined distance.
  • the pickup device 100 further includes an expansion member 140 provided in the installation space 311 of the base unit 30.
  • the expansion member 140 is a device for expanding the holding member 10 so that a plurality of objects accumulated on the holding member 10 are spaced apart from each other at predetermined intervals. As the objects are spaced apart from each other, it is possible to pick up the individual objects separately.
  • FIGS. 8 to 10 do not show the pick-up device, in practice, a picker is provided above the holding member 10, and a support member, a supporting pin, and the like are provided below the holding member 10.
  • a holding member 10 having a plurality of objects L attached to an upper surface thereof is fixed between the receiving grooves 312 of the first body 31 by the housing 41.
  • the support mechanism 141 of the expansion member 140 is installed in the installation space 311 of the first body 31.
  • the objects L are integrated in close contact with each other.
  • the holding member 10 may be extended to allow the objects L to be spaced apart from each other.
  • the holding member 10 may be extended to allow the objects L to be spaced apart from each other.
  • the first body 31 and the support mechanism 141 may be formed to be movable with each other.
  • the support mechanism 114 is installed below the holding member 10, and the supporting member 114 supports the lower surface of the holding member 10, and the holding member 10 supports the supporting mechanism ( The holding member 10 is expanded by being pushed upward by the 114.
  • the support mechanism 114 is installed on the upper side of the holding member 10, and the supporting member 114 supports the upper surface of the holding member 10, and the holding member 10 supports the supporting mechanism 114. It is also possible to configure such that the holding member 10 is expanded by being pushed down by the bottom.
  • the pick-up can be performed in the same manner as in the above-described first embodiment with respect to any one of the objects L in a state where the object L is spaced apart. Therefore, even when the plurality of objects L are tightly integrated, only the desired objects L can be picked up stably and smoothly.
  • FIG. 11 is a perspective view of the LED chip sorting apparatus according to the present invention
  • FIG. 12 is a plan view of the LED chip sorting apparatus according to the present invention
  • FIG. 13 is an enlarged perspective view of a supply unit of the LED chip sorting apparatus according to the present invention. Since the configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment, a description thereof will be omitted. In addition, the object described in the above-mentioned embodiment becomes an LED chip in this embodiment.
  • the LED chip sorting apparatus 200 having the pick-up apparatus 100 according to the present invention is a device for classifying good and defective goods according to their performance by testing the characteristics of the LED chip at the chip stage before the packaging process. 11 and 12, the LED chip sorting apparatus 200 includes a supply unit 210, a loading unit 220, a test unit 230, and an unloading unit 240.
  • the supply unit 210 includes a rotating unit 211 for rotating the LED chip to be tested, and a rotating member 215 rotatably coupled to the rotating unit 211. do. On the lower side of the rotating unit 211, a motor 212 for rotating the rotating member 215 is attached.
  • the rotating member 215 includes a plurality of support frames 217 in the form of a plurality of, for example, eight cantilevered beams extending radially about the rotation shaft 216. Each end side of the support frame 217 is provided with a seating member 218 on which the LED chip is seated. As the rotating member 215 rotates, the seating member 218 has a loading position LP at which the LED chip is loaded on the seating member 218, a test position TP at which the LED chip is tested, and a seating member 218. ) Rotates to the unloading position (ULP) where the LED chip is unloaded.
  • ULP unloading position
  • the loading unit 220 is installed next to the supply unit 210 and supplies the LED chip to be tested to the mounting member 218 when the mounting member 218 is located at the loading position LP.
  • the loading unit 220 moves the supply member to the loading unit 223 via the first moving mechanism 222 from the first storage unit 221 holding the supply member holding the LED chip, the loading unit ( The LED chip is loaded from the loading unit 220 to the seating member 218 side of the supply unit 223 by 223.
  • the supply member (not shown) in which the LED chip to be loaded into the seating member 218 by the loading unit 220 is maintained corresponds to the retaining member 10 in the above-described embodiment. Since the plurality of LED chips are integrated in close contact with the supply member, the loading unit 220 is provided with the pickup device 100 described above. Therefore, the pickup apparatus 100 picks up the LED chip from the supply member, and the picked up LED chip is loaded into the seating member 218 by the loading unit 223.
  • the configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment.
  • the picker of the pickup apparatus 100 may be installed in the loading unit 223. That is, the LED chip picked up from the supply member by the picker is rotated by the loading unit 223 and moved onto the seating member 218 located at the loading position LP, and then placed on the seating member 218. .
  • the test unit 230 is installed next to the supply unit 210, and when the seating member 218 is located at the test position TP, the test chip 230 measures the characteristics of the LED chip placed on the seating member 218.
  • the characteristics of the LED chip may be, for example, optical characteristics such as luminance, wavelength, luminous flux, luminous intensity, illuminance, spectral distribution, color temperature, and color coordinates.
  • the test unit 230 includes an integrating sphere and an optical measuring device. It may include.
  • the unloading part 240 is installed next to the supply part 210, and when the seating member 218 is located at the unloading position (ULP), the LED chips are collected from the seating member 218, and these LED chips are removed. Classified and loaded on the receiving member.
  • the unloading unit 240 sorts the buffer unit 250 which collects and stores the tested LED chip from the seating member 218, and classifies the LED chips stored in the buffer unit 250 according to the test result.
  • the unit 260 is included.
  • the buffer unit 250 moves the LED chip from the seating member 218 to the storage member by the unloading unit 251, and then moves the storage member to the second storage unit 253 through the second moving mechanism 252. Will be kept.
  • the stored storage member is transferred to the sorting loading unit 261, and then loaded on a separate stacking member for each grade by the sorting unit 262 according to the LED chip test result.
  • the loading member is stored in the third storage unit 264 by the third moving mechanism 263. This allows the LED chips to be categorized by performance and provided for subsequent processing.
  • An accommodation member (not shown) in which the LED chip to be loaded from the sorting loading unit 261 to the sorting unit 262 is held corresponds to the holding member 10 in the above-described embodiment. Since the plurality of LED chips are integrated in close contact with the housing member, the sorting loading unit 261 of the sorting unit 260 is provided with the pickup device 100 described above. Therefore, as a result of the test, only the LED chip corresponding to a specific grade is picked up by the pickup device 100 from the housing member, and the picked-up LED chip is loaded on the stacking members classified according to grades by the sorting unit 262.
  • the configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment.
  • the picker of the pickup apparatus 100 may be installed in the sorting unit 262. That is, the LED chip picked up from the receiving member by the picker is rotated by the sorting unit 262 and placed on the loading member.
  • the LED chip sorting apparatus 200 has a straight arrangement (layout). That is, the unloading unit 240 is located on the opposite side of the loading unit 220 with respect to the supply unit 210. This makes it easy to see the flow of the process and to simplify maintenance.
  • the LED chip sorting apparatus 200 By using the LED chip sorting apparatus 200 according to the present invention, it becomes possible to test and classify the LED chips at the chip stage before packaging, and in particular, the pick-up apparatus in the loading unit 220 and / or the unloading unit 240. By providing 100, the LED chip can be picked up easily and safely.

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Abstract

The object of the present invention is to provide a pickup apparatus capable of easily picking up a target object and an LED chip classification apparatus including the same. To achieve this objective, the present invention provides a pickup apparatus for picking up a target object that is positioned on a holding member, and comprises: a supporting member which is installed on the lower side of the holding member, and is formed with a groove on a surface that faces the holding member; a supporting pin which protrudes toward the holding member from the inner side of the groove of the supporting member, and supports the target object by traversing through the holding member; and a picker which is installed on the upper side of the target object, and picks up the target object, wherein at least one intake hole for the inflow and the outflow of the air is installed to traverse through the groove of the supporting member.

Description

픽업장치 및 이를 포함하는 엘이디 칩 분류장치Pick-up device and LED chip sorting device including the same
본 발명은 대상물을 용이하게 픽업할 수 있는 픽업장치 및 이를 포함하는 엘이디 칩 분류장치에 관한 것이다.The present invention relates to a pickup device capable of easily picking up an object and an LED chip sorting device including the same.
소형 또는 박형의 대상물을 처리, 가공, 테스트, 및 분류하기 위해서는 이들 대상물을 픽업하여 이동시킬 필요가 있다. 그런데, 다수의 대상물이 운집해 있거나 이들 대상물이 공급부재 등에 밀착되어 있는 경우에는 픽업이 용이하지 않다. 이로 인해 픽업에 실패하거나 대상물에 크랙(crack)이나 칩핑(chipping), 스크래치(scratch) 등의 손상을 주는 일이 발생할 수 있으며, 이는 결국 수율 저하, 공정시간 지연, 생산비 증가 등의 원인이 된다.In order to process, process, test, and classify small or thin objects, they need to be picked up and moved. By the way, when a large number of objects are gathered or these objects are in close contact with a supply member or the like, pickup is not easy. This may cause a pickup failure or damage to the object (crack), chipping (chip), scratch (scratch), etc., which may cause the yield, process time delay, production cost increase.
이러한 대상물의 예로 엘이디 칩이 있다. 엘이디(LED, Light Emitting Diode)는 전기를 빛으로 변환하는 반도체를 이용한 발광 소자의 일종으로, 발광다이오드(Luminescent diode)라고도 한다.An example of such an object is an LED chip. LED (Light Emitting Diode) is a kind of light emitting device using a semiconductor that converts electricity into light, also known as a Luminescent diode.
엘이디는 에피공정(EPI), 칩공정(Fabrication) 및 패키지공정(Package) 등을 거쳐 제조되며, 상기 패키지공정을 거쳐 패키지된 상태로 테스트공정을 거치게 된다. 상기 테스트공정에서는 정상적으로 작동되지 않는 엘이디(이하, '불량품'이라 한다)를 제외시키는 한편, 정상적으로 작동되는 엘이디(이하, '양품'이라 한다)를 성능에 따라 등급별로 분류하여 출하하게 된다.The LED is manufactured through an epi process (EPI), a chip process (Fabrication), and a package process (Package), etc., and is subjected to a test process in a packaged state through the package process. In the test process, the LEDs which are not normally operated (hereinafter referred to as 'defective products') are excluded, and the LEDs which are normally operated (hereinafter referred to as 'goods') are classified and classified according to their performance and shipped.
한편, 엘이디는 상기 패키지공정을 거치면서 발생되는 문제로 인해 상기 테스트공정에서 불량품으로 제외되거나 양품이더라도 낮은 등급으로 분류될 수 있지만, 상기 패키지공정을 거치기 전 칩 상태(이하 '엘이디 칩'이라 한다)로 제조되는 과정에서 발생되는 문제로 인해 상기 테스트공정에서 불량품으로 제외되거나 양품이더라도 낮은 등급으로 분류될 수 있다. 따라서, 불필요한 패키지 공정 및 테스트공정을 거치지 않도록 엘이디 칩 상태에서 그 성능을 정확하게 측정하여 분류할 필요가 있다. 이와 같은 엘이디 칩의 분류 공정에 있어서, 엘이디 칩을 공급장치에서 로딩장치로 이동시키기 위해 또는 언로딩장치에서 분류장치로 이동시키기 위해, 엘이디 칩을 신속하고 안정적으로 픽업해야 한다.On the other hand, LED may be classified as a low grade even if it is excluded or defective in the test process due to a problem occurring during the package process, but before the package process (hereinafter referred to as 'LED chip') Due to a problem that occurs during the manufacturing process, it may be excluded as a defective product in the test process or even classified as a low grade product. Therefore, it is necessary to accurately measure and classify the performance in the state of the LED chip so as not to go through unnecessary packaging and testing processes. In the LED chip sorting process, the LED chip must be picked up quickly and stably in order to move the LED chip from the supply apparatus to the loading apparatus or from the unloading apparatus to the sorting apparatus.
상기 대상물의 다른 예로 반도체 칩이 있다. 반도체의 제조 공정에 있어서 소자 형성이 완료되어 웨이퍼 상에 일체로 붙어있는 반도체를 칩 단계로 분리하고 개편화하여 반도체 칩이 형성된다. 이들 반도체 칩들은 보통 점착성 테이프에 고정되어 있으므로, 각 반도체 칩을 픽업하기 위해서는 점착성 테이프로부터 반도체 칩을 박리하여야 한다.Another example of the object is a semiconductor chip. In the semiconductor manufacturing process, element formation is completed, and the semiconductor chip integrally formed on a wafer is separated and separated into chip stages, and a semiconductor chip is formed. Since these semiconductor chips are usually fixed to the adhesive tape, the semiconductor chips must be peeled from the adhesive tape in order to pick up each semiconductor chip.
따라서 엘이디 칩 및 반도체 칩 등의 대상물을 신속하고, 안정적이며, 용이하게 픽업할 수 있는 경제적인 픽업장치가 요구된다.Therefore, there is a need for an economical pick-up apparatus capable of picking up objects such as LED chips and semiconductor chips quickly, stably and easily.
본 발명은 상술한 바와 같은 문제를 해결하기 위해 안출된 것으로, 본 발명의 목적은 대상물을 용이하게 픽업할 수 있는 픽업장치 및 이를 포함하는 엘이디 칩 분류장치를 제공하는 것이다.The present invention has been made to solve the above problems, an object of the present invention is to provide a pickup device that can easily pick up the object and the LED chip sorting apparatus including the same.
상술한 바와 같은 목적을 달성하기 위해서, 본 발명은 하기와 같은 구성을 포함할 수 있다.In order to achieve the object as described above, the present invention may include the following configuration.
먼저 본 발명은, 유지부재 상에 위치한 대상물을 픽업하기 위한 픽업장치에 있어서, 상기 유지부재의 하측에 설치되며, 유지부재를 향한 면에 홈이 형성되어 있는 지지부재; 상기 지지부재의 홈의 내측에서 상기 유지부재를 향하여 돌출되도록 설치되며, 상기 유지부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및 상기 대상물의 상측에 설치되며, 상기 대상물을 픽업하기 위한 픽커를 포함하며, 상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 한다.First, the present invention, the pickup device for picking up the object located on the holding member, the support member is installed on the lower side of the holding member, the groove is formed on the surface toward the holding member; A support pin installed to protrude from the inside of the groove of the support member toward the holding member and penetrating the holding member to support the object; And a picker installed at an upper side of the object and picking up the object, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
여기서, 상기 지지부재의 홈에는 설치공이 관통 설치되며, 상기 설치공을 통해 상기 지지핀이 위치할 수 있다.Here, the installation hole is installed through the groove of the support member, the support pin may be located through the installation hole.
또한, 상기 지지부재는 상기 유지부재에 접촉되는 접촉면을 포함하고, 상기 홈은 상기 접촉면 내측에 위치하며, 상기 지지부재의 상면에서 보았을 때, 상기 흡기공과 상기 지지부재의 중심 사이의 거리는, 상기 흡기공과 상기 접촉면 사이의 거리보다 짧은 것일 수 있다.In addition, the support member includes a contact surface in contact with the holding member, the groove is located inside the contact surface, when viewed from the upper surface of the support member, the distance between the intake hole and the center of the support member, the intake air It may be shorter than the distance between the ball and the contact surface.
본 발명은, 상기 흡기공을 통해 상기 유지부재를 상기 홈의 내측 방향으로 이동시키기 위한 흡인력을 제공하는 흡기장치를 더 포함할 수 있다. 또한 본 발명은, 상기 지지핀을 승하강시키는 핀승강장치를 더 포함할 수 있다.The present invention may further include an intake apparatus for providing a suction force for moving the holding member in the inward direction of the groove through the intake hole. In another aspect, the present invention may further include a pin lift device for raising and lowering the support pin.
다음으로, 상기 픽커는 상기 대상물을 흡착하는 장치일 수 있다. 또한, 상기 유지부재는 상기 대상물을 향한 면이 점착성을 갖는 박막일 수 있다. 또한, 상기 대상물은 엘이디 칩 또는 반도체 칩일 수 있다.Next, the picker may be a device for adsorbing the object. In addition, the holding member may be a thin film having an adhesive surface on the object. In addition, the object may be an LED chip or a semiconductor chip.
다음으로, 상기 대상물은 상기 유지부재 상에서 복수개가 인접하여 배치되며, 복수개의 상기 대상물을 서로 이격시키도록 상기 유지부재를 확장시키는 확장부재를 더 포함할 수 있다.Next, the object may further include a plurality of expansion members that are disposed adjacent to the holding member, and expands the holding member to space the plurality of the objects apart from each other.
여기서, 상기 확장부재는, 상기 유지부재의 하측에 설치되며, 상기 유지부재의 하면을 지지한 상태로 상기 유지부재를 상측으로 밀어올림으로써 상기 유지부재를 확장시키는 지지기구를 더 포함할 수 있다. 이와 달리, 상기 확장부재는, 상기 유지부재의 상측에 설치되며, 상기 유지부재의 상면을 지지한 상태로 상기 유지부재를 하측으로 밀어내림으로써 상기 유지부재를 확장시키는 지지기구를 더 포함할 수 있다.The expansion member may further include a support mechanism installed below the holding member and extending the holding member by pushing the holding member upward while supporting the lower surface of the holding member. Alternatively, the expansion member may be further provided on the upper side of the holding member, and may further include a support mechanism for expanding the holding member by pushing the holding member downward while supporting the upper surface of the holding member. .
다음으로 본 발명은, 엘이디 칩의 특성을 측정하여 엘이디 칩을 분류하는 엘이디 칩 분류장치에 있어서, 상기 엘이디 칩이 안착되는 안착부재를 포함하며, 상기 안착부재에 엘이디 칩이 로딩되는 로딩위치와, 상기 엘이디 칩이 테스트되는 테스트위치와, 상기 안착부재로부터 상기 엘이디 칩이 언로딩되는 언로딩위치로 상기 안착부재를 회전시키는 공급부; 상기 공급부의 옆에 설치되며, 복수개의 엘이디 칩이 부착되는 공급부재와, 상기 로딩 위치에서 상기 공급부재로부터 엘이디 칩을 픽업하는 픽업장치와, 상기 픽업된 엘이디 칩을 상기 안착부재로 로딩하는 로딩유닛을 포함하는 로딩부; 상기 공급부의 옆에 설치되며, 상기 테스트위치에서 상기 엘이디 칩의 특성을 측정하는 테스트부; 및 상기 공급부의 옆에 설치되며, 상기 언로딩위치에서 상기 안착부재로부터 테스트된 엘이디 칩을 수거하는 언로딩부를 포함하며, 상기 픽업장치는, 상기 공급부재의 하측에 설치되며, 공급부재를 향한 면에 홈이 형성되어 있는 지지부재; 상기 지지부재의 홈의 내측에서 상기 공급부재를 향하여 돌출되도록 설치되며, 상기 공급부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및 상기 엘이디 칩의 상측에 설치되며, 상기 엘이디 칩을 픽업하기 위한 픽커를 포함하며, 상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 한다.Next, the present invention, in the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip, comprising a seating member on which the LED chip is seated, a loading position in which the LED chip is loaded on the seating member, A supply unit for rotating the seating member to a test position at which the LED chip is tested and to an unloading position at which the LED chip is unloaded from the seating member; A supply unit installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up an LED chip from the supply member at the loading position, and a loading unit to load the picked up LED chip into the seating member; A loading unit comprising a; A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And an unloading part installed next to the supply part and collecting an LED chip tested from the seating member in the unloading position, wherein the pickup device is installed below the supply member and faces the supply member. A support member having a groove formed in the support member; A support pin installed to protrude toward the supply member from the inner side of the groove of the support member and capable of supporting the object through the supply member; And a picker installed at an upper side of the LED chip and picking up the LED chip, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
또한 본 발명은, 엘이디 칩의 특성을 측정하여 엘이디 칩을 분류하는 엘이디 칩 분류장치에 있어서, 상기 엘이디 칩이 안착되는 안착부재를 포함하며, 상기 안착부재에 엘이디 칩이 로딩되는 로딩위치와, 상기 엘이디 칩이 테스트되는 테스트위치와, 상기 안착부재로부터 상기 엘이디 칩이 언로딩되는 언로딩위치로 상기 안착부재를 회전시키는 공급부; 상기 공급부의 옆에 설치되며, 상기 로딩 위치에서 상기 안착부재로 테스트될 엘이디 칩을 공급하는 로딩부; 상기 공급부의 옆에 설치되며, 상기 테스트위치에서 상기 엘이디 칩의 특성을 측정하는 테스트부; 및 상기 공급부의 옆에 설치되며, 복수개의 엘이디 칩이 부착되는 수납부재와, 상기 언로딩 위치에서 상기 수납부재로부터 엘이디 칩을 픽업하는 픽업장치와, 상기 픽업된 엘이디 칩을 이송하는 소팅유닛을 포함하는 언로딩부를 포함하며, 상기 픽업장치는, 상기 수납부재의 하측에 설치되며, 수납부재를 향한 면에 홈이 형성되어 있는 지지부재; 상기 지지부재의 홈의 내측에서 상기 수납부재를 향하여 돌출되도록 설치되며, 상기 수납부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및 상기 엘이디 칩의 상측에 설치되며, 상기 엘이디 칩을 픽업하기 위한 픽커를 포함하며, 상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 한다.In another aspect, the present invention, in the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip, comprising a seating member on which the LED chip is seated, a loading position in which the LED chip is loaded on the seating member, and A supply unit for rotating the seating member to a test position at which the LED chip is tested and to an unloading position at which the LED chip is unloaded from the seating member; A loading unit installed beside the supply unit and supplying an LED chip to be tested to the seating member in the loading position; A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And a storage unit installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up the LED chips from the storage member at the unloading position, and a sorting unit to transfer the picked up LED chips. And an unloading part, wherein the pick-up apparatus includes: a support member installed at a lower side of the accommodating member and having a groove formed on a surface of the accommodating member; A support pin installed to protrude toward the accommodation member from the inside of the groove of the support member and capable of supporting the object through the accommodation member; And a picker installed at an upper side of the LED chip and picking up the LED chip, wherein at least one intake hole for inflow and outflow of air is provided in a groove of the support member.
여기서, 상기 공급부는 회전축을 중심으로 반경 방향으로 연장된 복수개의 지지프레임을 포함하며, 상기 안착부재는 상기 복수개의 지지프레임의 단부측에 각각 설치될 수 있다.Here, the supply part includes a plurality of support frames extending radially about the rotation axis, the seating member may be installed on each end side of the plurality of support frames.
본 발명은, 상기 흡기공을 통해 상기 공급부재를 상기 홈의 내측 방향으로 이동시키기 위한 흡인력을 제공하는 흡기장치를 더 포함할 수 있다. 또한 본 발명은, 상기 지지핀을 승하강시키는 핀승강장치를 더 포함할 수 있다.The present invention may further include an intake apparatus for providing a suction force for moving the supply member in the inward direction of the groove through the intake hole. In another aspect, the present invention may further include a pin lift device for raising and lowering the support pin.
도 1은 본 발명의 제1 실시예에 따른 픽업장치의 측단면도이다.1 is a side sectional view of a pickup apparatus according to a first embodiment of the present invention.
도 2 내지 4는 본 발명의 제1 실시예에 따른 픽업장치의 작동관계를 나타내는 측단면도이다.2 to 4 are side cross-sectional views showing the operation relationship of the pickup apparatus according to the first embodiment of the present invention.
도 5는 본 발명의 제1 실시예에 따른 픽업장치의 평면도이다.5 is a plan view of a pickup apparatus according to the first embodiment of the present invention.
도 6 및 7은 본 발명의 제2 실시예에 따른 픽업장치를 포함하는 대상물 공급장치의 사시도이다.6 and 7 are perspective views of an object supply device including a pickup device according to a second embodiment of the present invention.
도 8 내지 10은 본 발명에 따른 픽업장치의 확장부재의 작동관계를 나타내는 측단면도이다.8 to 10 are side cross-sectional views showing the operating relationship of the expansion member of the pickup apparatus according to the present invention.
도 11은 본 발명에 따른 엘이디 칩 분류장치의 사시도이다.11 is a perspective view of the LED chip sorting apparatus according to the present invention.
도 12는 본 발명에 따른 엘이디 칩 분류장치의 평면도이다12 is a plan view of the LED chip sorting apparatus according to the present invention.
도 13은 본 발명에 따른 엘이디 칩 분류장치의 공급부의 확대사시도이다.13 is an enlarged perspective view of a supply unit of the LED chip sorting apparatus according to the present invention.
이하에서는 본 발명에 의한 픽업장치의 바람직한 실시예를 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, with reference to the accompanying drawings a preferred embodiment of the pickup device according to the present invention will be described in detail.
[제1 실시예][First Embodiment]
도 1은 본 발명의 제1 실시예에 따른 픽업장치의 측단면도, 도 2 내지 4는 본 발명의 제1 실시예에 따른 픽업장치의 작동관계를 나타내는 측단면도, 도 5는 본 발명의 제1 실시예에 따른 픽업장치의 평면도이다.1 is a side cross-sectional view of a pickup apparatus according to a first embodiment of the present invention, Figures 2 to 4 are side cross-sectional views showing the operation relationship of the pickup apparatus according to the first embodiment of the present invention, Figure 5 is a first A plan view of a pickup apparatus according to the embodiment.
도 1을 참고하면, 본 발명에 의한 픽업장치(100)는 유지부재(10) 상에 위치한 대상물(L)을 픽업하기 위한 장치로서, 지지부재(110), 지지핀(120), 및 픽커(130)를 포함한다.Referring to Figure 1, the pickup apparatus 100 according to the present invention is a device for picking up the object (L) located on the holding member 10, the support member 110, the support pin 120, and the picker ( 130).
대상물(L)은 예컨대 반도체 칩이나 엘이디 칩과 같은 박형의 가공물일 수 있으나, 대상물(L)이 반드시 반도체 칩 또는 엘이디 칩으로 한정되는 것은 아니다. 이들 대상물(L)은 보통 블루 테이프와 같이 점착성이 있는 유지부재(10) 상에 위치하여 유지, 보관되거나 공급되는 경우가 많다. 다만 유지부재(10)는 블루 테이프로 한정되는 것은 아니며, 예컨대 대상물을 향한 면이 점착성 또는 부착성을 가지며, 대상물과의 분리를 위해 가요성을 가진 박막이라면 어떠한 것이라도 유지부재(10)로 사용할 수 있다. 대상물(L)을 처리, 가공, 테스트, 및 분류하기 위해서는, 대상물(L)로부터 유지부재(10)를 박리하여 픽업해야 하며, 이하에서는 이러한 대상물(L)의 픽업에 필요한 구성요소를 더욱 상세히 설명하기로 한다.The object L may be, for example, a thin workpiece such as a semiconductor chip or an LED chip, but the object L is not necessarily limited to a semiconductor chip or an LED chip. These objects L are usually located on the sticky holding member 10, such as a blue tape, are often held, stored or supplied. However, the holding member 10 is not limited to the blue tape, for example, the surface facing the object has adhesiveness or adhesion, and any thin film having flexibility for separation from the object may be used as the holding member 10. Can be. In order to process, process, test, and classify the object L, the holding member 10 must be peeled off and picked up from the object L. Hereinafter, the components necessary for the pickup of the object L will be described in more detail. Let's do it.
본 발명에 의한 픽업장치(100)에 있어서, 지지부재(110)는 유지부재(10)의 하측에 위치한다. 지지부재(110)는 예컨대 원통형의 부재로 형성될 수 있으나, 그 형상이 원통형으로 한정되는 것은 아니며 다양한 형태로 형성될 수 있다.In the pickup device 100 according to the present invention, the support member 110 is located below the holding member 10. The support member 110 may be formed of, for example, a cylindrical member, but the shape of the support member 110 is not limited to the cylindrical shape and may be formed in various shapes.
상기 지지부재(110)의 상면에는 유지부재(10)의 하면과 직접 접촉하는 접촉면(113)이 형성되어 있고, 접촉면(113)의 안쪽 영역에는 일정 깊이 함몰된 홈(111)이 형성되어 있다. 이 홈(111)은 대상물(L)로부터 유지부재(10)를 제거하기 위한 공간으로 이용된다. 홈(111)은 반구 형상으로 형성될 수 있으나, 이에 한정되지 않고 원통형, 장방체 등 다양한 형태로 형성될 수 있다.The upper surface of the support member 110 has a contact surface 113 is in direct contact with the lower surface of the holding member 10, the groove 111 is formed in the inner region of the contact surface 113 is recessed to a certain depth. This groove 111 is used as a space for removing the holding member 10 from the object (L). The groove 111 may be formed in a hemispherical shape, but is not limited thereto and may be formed in various shapes such as a cylindrical shape and a rectangular shape.
지지부재(110)가 원통형의 부재이고, 홈(111)이 반구 형상으로 형성될 경우, 접촉면(113)은 도 5의 평면도에 도시된 바와 같이 링 형태로 마련되며, 이 링 형태의 접촉면(113) 상에 유지부재(10)가 접촉되어 지지된다. 또한 이 경우 유지부재(10) 상의 대상물(L)은 홈(111)이 위치한 영역의 상측에 위치하게 된다.When the support member 110 is a cylindrical member and the groove 111 is formed in a hemispherical shape, the contact surface 113 is provided in a ring shape as shown in the plan view of FIG. 5, and the contact surface 113 in the ring shape is shown. The holding member 10 is in contact with the support. In this case, the object L on the holding member 10 is positioned above the region where the groove 111 is located.
홈(111)의 중심부에는 지지핀(120)의 승강 이동을 위한 설치공(114)이 마련될 수 있다. 설치공(114)은 지지핀(120)이 보관 유지되어 있는 지지부재(110) 내측의 설치공간과 홈(111)을 관통하도록 설치되며, 지지핀(120)이 대상물(L)의 중심부를 지지할 수 있도록 홈(111)의 중심부에 형성된다. 설치공(114)은 지지핀(120)의 승강 이동에 지장이 없는 정도의 크기 및 형상을 가진다. 도 1 및 도 5에 도시된 바와 같이 설치공(114)은 원통형 형상의 구멍일 수 있으나, 설치공(114)의 형상이 원통형으로 한정되는 것은 아니며, 지지핀(120)의 형상과 같은 다양한 조건에 따라 적절한 형상을 가질 수 있다.An installation hole 114 for lifting and lowering of the support pin 120 may be provided at the center of the groove 111. The installation hole 114 is installed to penetrate the installation space and the groove 111 inside the support member 110 in which the support pin 120 is maintained, and the support pin 120 supports the center of the object L. It is formed in the center of the groove 111 to enable. The installation hole 114 has a size and shape that does not interfere with the lifting movement of the support pin 120. 1 and 5, the installation hole 114 may be a cylindrical shape hole, but the shape of the installation hole 114 is not limited to a cylindrical shape, various conditions such as the shape of the support pin 120 It may have an appropriate shape according to.
또한, 지지부재(110)의 홈(111)에 있어서 설치공(114)의 주위에는 공기의 유출입을 위한 흡기공(112)이 마련될 수 있다. 흡기공(112)은 설치공(114)과 마찬가지로, 지지핀(120)이 보관 유지되어 있는 지지부재(110) 내측의 설치공간과 홈(111)을 관통하도록 설치된다. 흡기공(112)은 복수개 마련될 수 있으며, 이 경우 흡기공(112)은 설치공(114)을 중심으로 하여 원주방향으로 소정간격, 예컨대 등간격으로 설치될 수 있다. 흡기공(112)이 등간격으로 설치될 경우 홈(111) 내부의 공기가 균일하게 유출입될 수 있다. 이 흡기공(112)을 통해 홈(111) 내측의 공기를 흡기시켜 흡인력을 제공함으로써, 유지부재(10)가 홈(111)의 내측으로, 즉 도 1에서 화살표 A로 표시한 방향으로 이동하게 된다.In addition, an intake hole 112 may be provided around the installation hole 114 in the groove 111 of the support member 110 for inflow and outflow of air. Like the installation hole 114, the intake hole 112 is installed to penetrate the installation space and the groove 111 inside the support member 110 in which the support pin 120 is held. A plurality of intake holes 112 may be provided, and in this case, the intake holes 112 may be installed at predetermined intervals, for example, at equal intervals in the circumferential direction with respect to the installation hole 114. When the intake holes 112 are installed at equal intervals, the air inside the groove 111 may flow in and out uniformly. The intake hole 112 inhales air inside the groove 111 to provide a suction force, so that the holding member 10 moves inside the groove 111, that is, in the direction indicated by the arrow A in FIG. 1. do.
도 1에 도시된 바와 같이 지지부재(110)의 일측면에는 흡기장치(20)가 마련될 수 있다. 이 흡기장치(20)가 홈(111)의 흡기공(112)과 연통됨으로써, 유지부재(10)를 화살표 A 방향으로 이동시키는 흡인력을 제공하게 된다. 흡기장치(20)는 유지부재(10) 등의 다른 구성요소와 간섭이 일어나지 않도록 지지부재(110)의 일측면 또는 하면에 형성된 연결공(115)을 통해 지지부재(110)와 연결된다. 도 1에 도시된 바와 같이 지지핀(120)이 유지부재(10)로부터 이격되어 있는 경우에는 흡기공(112) 뿐만 아니라 설치공(114)을 통해서도 공기가 흡인되는 것이 가능하며, 이들 흡기공(112) 및 설치공(114)은, 지지핀(120)이 보관 유지되어 있는 지지부재(110) 내측의 설치공간 및 연결공(115)을 통해 흡기장치(20)에 연결되어 있다. 전술한 바와 같이 흡기장치(20)가 유체의 흡인을 시작하면 유지부재(10)는 홈(111)이 있는 방향으로 이동될 수 있고, 흡기장치(20)가 유체의 흡인을 중지하면 유지부재(10)는 원래 위치로 이동될 수 있다.As shown in FIG. 1, an intake apparatus 20 may be provided on one side of the support member 110. The intake apparatus 20 communicates with the intake hole 112 of the groove 111, thereby providing a suction force for moving the holding member 10 in the direction of arrow A. FIG. The intake apparatus 20 is connected to the support member 110 through a connection hole 115 formed on one side or the bottom surface of the support member 110 so as not to interfere with other components such as the holding member 10. As shown in FIG. 1, when the support pin 120 is spaced apart from the holding member 10, air may be sucked through not only the intake hole 112 but also the installation hole 114. 112 and the installation hole 114 is connected to the intake apparatus 20 through an installation space and a connection hole 115 inside the support member 110 in which the support pin 120 is held. As described above, when the intake apparatus 20 starts suction of the fluid, the holding member 10 may be moved in the direction in which the groove 111 is located, and when the intake apparatus 20 stops suction of the fluid, the holding member ( 10) can be moved to its original position.
지지핀(120)은 유지부재(10)를 관통하여 대상물(L)을 지지하도록 지지부재(110)에 설치된다. 구체적으로, 지지핀(120)은 홈(111)의 내측에서 유지부재(10)를 향한 방향으로 돌출되도록 설치된다. 흡기장치(20)가 유체를 흡인시킬 경우 유지부재(10)가 지지핀(120)에 의해 관통되기 때문에 대상물(L)로부터 유지부재(10)가 용이하게 제거될 수 있다. 지지핀(120)은 유지부재(10)의 아래에 위치하며, 지지부재(110)를 관통하여 홈(111) 내에 위치하거나, 유지부재(10)의 저면에 접촉할 수 있다.The support pin 120 is installed on the support member 110 to support the object L by penetrating the holding member 10. Specifically, the support pin 120 is installed to protrude in the direction toward the holding member 10 from the inside of the groove 111. When the intake apparatus 20 sucks the fluid, the holding member 10 can be easily removed from the object L because the holding member 10 is penetrated by the support pin 120. The support pin 120 may be positioned below the holding member 10, may be positioned in the groove 111 through the supporting member 110, or may contact the bottom surface of the holding member 10.
지지핀(120)은 상하로 긴 막대기 또는 핀 형상의 부재이며, 홈의 내측을 향하는 방향, 즉 도 1에서 화살표 A 방향으로 크기가 점감되게 형성될 수 있다. 또한, 지지핀(120)의 상측이 첨단을 이루도록 하면, 유지부재(10)의 관통이 용이할 뿐만 아니라, 대상물(L)에 접촉되는 지지핀(120)의 면적이 줄어들어 대상물(L)이 손상되는 정도가 줄어들게 된다.The support pin 120 is a member having a rod or pin shape that is vertically long and may be formed to decrease in size in a direction toward the inside of the groove, that is, in the direction of an arrow A in FIG. 1. In addition, if the upper side of the support pin 120 to form a tip, not only the penetration of the holding member 10 is easy, but also the area of the support pin 120 in contact with the object (L) is reduced to damage the object (L) Will be reduced.
지지핀(120)은 지지부재(110)의 설치공(114)을 통해 승강 가능하다. 예컨대, 지지핀(120)에 별도의 이동 수단이 결합됨으로써 고정된 지지부재(110)에 대해 지지핀(120)이 이동하는 것도 가능하며, 반대로 지지핀(120)이 고정되고 지지부재(110)만이 이동하는 것도 가능하다. 또한, 지지부재(110) 및 지지핀(120)이 모두 이동 가능하도록 형성될 수도 있다.The support pin 120 may be elevated through the installation hole 114 of the support member 110. For example, the support pin 120 may be moved relative to the fixed support member 110 by a separate moving means coupled to the support pin 120. On the contrary, the support pin 120 is fixed to the support member 110. It is also possible to move only. In addition, both the support member 110 and the support pin 120 may be formed to be movable.
픽커(130)는 대상물(L)의 상측에 설치되어 대상물(L)을 픽업할 수 있는 장치이다. 픽커(130)는 예컨대 공기의 부압에 의해 대상물(L)을 흡착하거나, 정전기력에 의해 대상물(L)을 고정하는 장치일 수 있으며, 대상물(L)에 가능한 한 손상을 주지 않으면서도 안정적으로 픽업할 수 있는 장치라면, 그 메커니즘이나 종류가 특별히 한정되지 않는다. 또한, 픽커(130)는 도시되지 않은 픽커아암 또는 회전아암 등에 연결되고 이들 픽커아암 및 회전아암은 모터 등에 연결됨으로써, 모터의 구동에 따라 픽커(130)에 의해 픽업된 대상물(L)이 소정의 원하는 위치로 이동될 수 있다. Picker 130 is a device that is installed on the upper side of the object (L) can pick up the object (L). The picker 130 may be, for example, a device for adsorbing the object L by the negative pressure of air or fixing the object L by the electrostatic force, and stably picking up the object L without damaging the object L as much as possible. As long as the device can be used, the mechanism and kind thereof are not particularly limited. In addition, the picker 130 is connected to a picker arm or a rotating arm, which is not shown, and the picker arm and the rotating arm are connected to a motor or the like, so that the object L picked up by the picker 130 is driven by a predetermined drive. Can be moved to the desired position.
도 5를 참고하면, 상면에서 보아 흡기공(112)과 지지부재(110)의 중심(114) 사이의 거리(d1)가 상기 흡기공(110)과 접촉면(113) 사이의 거리(d2)보다 짧아지도록 흡기공(112)이 설치된다. 흡기공(112)이 지지부재(110)의 중심(114) 보다 접촉면(113)에 더 가까운 위치에 형성되면, 대상물(L)로부터 유지부재(10)가 완전히 제거되기 전에 유지부재(10)로 인해 흡기공(112)이 폐쇄됨으로써 흡인력이 더 이상 전달되지 않을 수 있다. 이를 방지하기 위해 흡기공(112)은 접촉면(113)보다 지지부재(110)의 중심(114)에 더 가까운 위치에 형성되는 것이 바람직하다.Referring to FIG. 5, the distance d1 between the intake hole 112 and the center 114 of the support member 110 is greater than the distance d2 between the intake hole 110 and the contact surface 113 when viewed from the top. The intake hole 112 is provided to be short. When the intake hole 112 is formed at a position closer to the contact surface 113 than the center 114 of the support member 110, the inlet hole 112 is moved to the holding member 10 before the holding member 10 is completely removed from the object L. Due to the intake hole 112 is closed, the suction force may no longer be transmitted. In order to prevent this, the intake hole 112 is preferably formed at a position closer to the center 114 of the support member 110 than the contact surface 113.
이하, 도 1 내지 도 4를 참고하여 픽업장치의 작동을 설명하기로 한다. 여기서는 픽업장치(100)의 지지부재(110)가 고정되어 있고, 지지핀(120)이 도시되지 않은 핀승강장치에 연결되어 승강 가능한 경우를 가정한다.Hereinafter, the operation of the pickup apparatus will be described with reference to FIGS. 1 to 4. Here, it is assumed that the support member 110 of the pickup device 100 is fixed, and the support pin 120 is connected to a pin lifting device (not shown) to be able to lift up and down.
상기 핀승강장치는 지지부재(110)에 설치될 수 있다. 또한, 상기 핀승강장치는 유압실린더 또는 공압실린더 등을 이용하여 지지핀(120)을 직접 승하강시킬 수 있으며, 모터 및 이 모터와 지지핀(120)에 각각 결합되는 연결기구를 이용하여 상기 지지핀(120)을 승하강시킬 수도 있다. 상기 연결기구는 풀리 및 벨트, 볼스크류, 캠부재, 랙피니언기어 등 중 적어도 하나를 포함할 수 있다.The pin lifting device may be installed on the support member 110. In addition, the pin lifting device can directly raise and lower the support pin 120 using a hydraulic cylinder or a pneumatic cylinder, and the support pin using a motor and a coupling mechanism coupled to the motor and the support pin 120, respectively. It is also possible to raise and lower 120. The connection mechanism may include at least one of a pulley and a belt, a ball screw, a cam member, a rack pinion gear, and the like.
지지핀(120)은, 지지핀(120)이 유지부재(10)와 접촉하는 상승위치 및 지지핀(120)이 유지부재(10)의 하측에 위치하여 유지부재(10)와 접촉하지 않는 하강위치 사이를 승하강한다. 즉, 핀승강장치는 도 2에 도시된 바와 같이 지지핀(120)이 상승위치에 도달하도록 지지핀(120)을 상승시킬 수 있다. 또한, 핀승강장치는 도 1에 도시된 바와 같이 지지핀(120)이 하강위치에 도달하도록 지지핀(120)을 하강시킬 수 있다.The support pin 120 has a rising position where the support pin 120 is in contact with the holding member 10 and a lowering position where the support pin 120 is positioned below the holding member 10 and does not contact the holding member 10. Move up and down between locations. That is, the pin lifting device may raise the support pin 120 such that the support pin 120 reaches the raised position as shown in FIG. 2. In addition, the pin lifting device may lower the support pin 120 so that the support pin 120 reaches the lowered position as shown in FIG.
픽업과정의 제1 단계로서, 픽업장치(100)는 도 1에 도시된 바와 같은 위치로 초기 세팅된다. 즉, 유지부재(10) 상에 대상물(L)이 부착되어 있고, 지지핀(120)은 유지부재(10)의 하측에서 유지부재(10)와 접촉하지 않는 하강위치에 위치하며, 픽커(130)는 대상물(L)의 상측에서 대상물(L)과 접촉하지 않는 상태를 유지하고 있다.As a first step in the pickup process, the pickup device 100 is initially set to the position as shown in FIG. That is, the object (L) is attached to the holding member 10, the support pin 120 is located in the lowered position not in contact with the holding member 10 from the lower side of the holding member 10, picker 130 ) Maintains a state in which the object L does not come into contact with the object L above.
픽업과정의 제2 단계로서, 지지핀(120)이 지지부재(110)에 대해 상승위치로 상승하고, 이후 픽커(130)가 하강하여 대상물(L)과 접촉하여 이를 픽업한다.As a second step of the pick-up process, the support pin 120 is raised to the rising position relative to the support member 110, and then the picker 130 is lowered in contact with the object (L) to pick up it.
지지핀(120)이 상승위치에 도달할 경우, 도 3에 도시된 바와 같이 지지핀(120)의 일부가 유지부재(10)에 삽입될 수 있다. 또한, 지지핀(120)이 상승위치에 도달할 경우 도 4에 도시된 바와 같이 지지핀(120)의 상단이 유지부재(10)를 관통하여 대상물(L)의 하면에 접촉될 수도 있다.When the support pin 120 reaches the raised position, as shown in FIG. 3, a part of the support pin 120 may be inserted into the holding member 10. In addition, when the support pin 120 reaches the raised position, as shown in FIG. 4, an upper end of the support pin 120 may penetrate the holding member 10 to contact the bottom surface of the object L. Referring to FIG.
이에 따라 상기 지지핀(120)이 상승위치에 도달할 경우 유지부재(10)가 부분적으로 또는 전체적으로 천공될 수 있고, 그 후 홈(111)의 내측으로 유지부재(10)가 이동하게 된다. 따라서 픽커(130)에 의해 픽업되는 대상물(L)로부터 유지부재(10)가 더 용이하게 제거될 수 있다. 또한, 유지부재(10)가 홈(111)의 내측으로 이동될 때 대상물(L)이 지지핀(120)에 의해 지지되므로, 픽커(130)가 대상물(L)을 안정적으로 픽업할 수 있다.Accordingly, when the support pin 120 reaches the raised position, the retaining member 10 may be partially or totally drilled, and then the retaining member 10 moves inside the groove 111. Therefore, the holding member 10 may be more easily removed from the object L picked up by the picker 130. In addition, since the object L is supported by the support pin 120 when the holding member 10 is moved into the groove 111, the picker 130 may stably pick up the object L.
한편, 픽커(130)는 대상물(L)을 픽업하기 위해 하강해야 하는 거리보다 더 큰 거리로 하강할 위험이 있다. 또한, 픽커(130)가 고속으로 하강하다가 정지함으로써 픽커(130)가 대상물(L)에 접촉된 상태에서 진동이 생길 수도 있다. 그런데, 지지핀(120)이 상승위치에 위치한 상태에서, 상기와 같이 픽커(130)의 하강거리가 길어지거나 진동이 발생하게 되면, 상승위치에 있는 지지핀(120)에 의해 대상물(L)이 손상될 위험이 있다.On the other hand, the picker 130 is in danger of descending a distance greater than the distance that must be lowered to pick up the object (L). In addition, since the picker 130 descends at a high speed and stops, vibration may occur in the state in which the picker 130 is in contact with the object L. FIG. By the way, in the state in which the support pin 120 is located in the rising position, if the falling distance of the picker 130 is increased or vibration occurs as described above, the object L is supported by the support pin 120 in the rising position. There is a risk of damage.
따라서, 상기 제2단계의 별법으로서, 픽커(130)가 하강하여 대상물(L)과 접촉하여 이를 픽업한 후에, 지지핀(120)이 지지부재(110)에 대해 상승위치로 상승할 수도 있다. 이에 따라, 대상물(L)이 지지핀(120)에 의해 손상될 위험이 감소된다. 즉, 픽커(130)가 하강하여 대상물(L)과 접촉하는 때에 있어서, 픽커(130)가 대상물(L)을 픽업하기 위해 하강해야 하는 거리보다 더 큰 거리로 하강하거나, 픽커(130)가 대상물(L)과 접촉한 상태에서 진동이 생기더라도, 지지핀(120)이 아직 상승위치에 있지 않기 때문에 대상물(L) 및 유지부재(10)는 홈(111)의 내측으로 이동할 여지가 있다. 즉, 홈(111)이 대상물(L)의 손상을 방지할 수 있는 여유 공간으로 이용될 수 있다.Therefore, as an alternative to the second step, after the picker 130 descends to contact the object L and picks it up, the support pin 120 may be raised to the support member 110 in a raised position. Accordingly, the risk that the object L is damaged by the support pin 120 is reduced. That is, when the picker 130 descends and contacts the object L, the picker 130 descends a distance greater than the distance that the picker 130 must descend to pick up the object L, or the picker 130 is the object. Even if vibration occurs in the state of contact with (L), since the support pin 120 is not yet in the raised position, the object L and the holding member 10 may move inside the groove 111. That is, the groove 111 may be used as a free space for preventing damage to the object (L).
픽업과정의 제3 단계로서, 흡기장치(20)에 의해 흡기공(112)을 거쳐 홈(111) 내부의 공기를 배출시킴으로써 유지부재(10)에 흡인력을 제공한다. 이에 따라 픽커(130)가 대상물(L)을 픽업하고 유지부재(10)가 홈(111)의 내측방향으로 이동하게 되어, 대상물(L)로부터 유지부재(10)가 박리된다. 이 과정에서 지지핀(120)은 여전히 상승위치를 유지함으로써 대상물(L)의 하측을 지지하고 있다.As a third step of the pickup process, the suction force is provided to the holding member 10 by discharging the air in the groove 111 through the intake hole 112 by the intake apparatus 20. Accordingly, the picker 130 picks up the object L and the holding member 10 moves inwardly of the groove 111, so that the holding member 10 is peeled off from the object L. In this process, the support pin 120 is still supporting the lower side of the object (L) by maintaining the raised position.
이후, 픽커(130)가 픽업된 대상물(L)을 별도의 픽커아암이나 회전아암 등을 이용하여 이동 또는 회전시키는 것도 가능하다. 또한, 픽업이 완료된 이후에는 흡기장치(20)에 의한 흡인력 인가가 중단되어 유지부재(10)가 원상태로 복귀되며, 지지핀(120)도 초기의 하강위치로 돌아간다. 이러한 단계를 통해 안정적이고 원활하게 대상물(L)의 픽업이 완료된다.Thereafter, the picker 130 may move or rotate the object L picked up using a separate picker arm or a rotating arm. In addition, after the pickup is completed, the application of the suction force by the intake apparatus 20 is stopped, the holding member 10 is returned to its original state, and the support pin 120 also returns to the initial lowered position. Through this step, pickup of the object L is completed stably and smoothly.
[제2 실시예]Second Embodiment
이하, 도 6 내지 도 10을 참고하여 본 발명의 제2 실시예에 따른 픽업장치를 설명한다. 제2 실시예는 픽업장치가 확장부재를 구비한다는 점을 제외하고는 제1 실시예와 동일하다. 앞의 설명과 동일한 구성에 대해서는 동일한 도면부호를 부여하고 별도의 설명을 하지 않기로 한다.Hereinafter, a pickup apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 6 to 10. The second embodiment is the same as the first embodiment except that the pick-up apparatus is provided with an expansion member. For the same configuration as the above description, the same reference numerals will be given and no separate description will be given.
도 6은 본 발명의 제2 실시예에 따른 픽업장치를 포함하는 대상물 공급장치의 사시도이다. 도시된 바와 같이, 대상물 공급장치는 베이스 유닛(30), 상기 베이스 유닛(30) 상에 위치한 수납기구(40), 및 픽업장치(100)를 포함한다.6 is a perspective view of an object supply device including a pickup device according to a second embodiment of the present invention. As shown, the object supply device includes a base unit 30, a receiving device 40 located on the base unit 30, and a pickup device 100.
도시된 바와 같이 베이스 유닛(30)은 제1 몸체(31) 및 제2 몸체(32)를 포함하며, 제1 몸체(31)는 제2 몸체(32)에 대해 X방향 및 Y방향으로 이동될 수 있으며, 또한 회전될 수도 있다. 이 경우 픽업장치(100)는 제2 몸체(32)에 대해 고정된 위치를 유지하고, 수납기구(40)는 제1 몸체(31)에 대해 고정된 위치를 유지한다. 제1 몸체(31)의 이동에 따라 수납기구(40)에 고정된 유지부재(10)에 부착된 대상물이 픽업장치(100)의 상측, 즉 픽업위치로 이동될 수 있다. 또한, 제1 몸체(31)의 회전에 따라 대상물이 적절한 방향을 향하도록 할 수 있다. 위와 같은 방법에서는 픽업장치(100)가 고정되어 있고 대상물만이 적절한 픽업위치로 이동 및 회전하게 된다.As shown, the base unit 30 includes a first body 31 and a second body 32, the first body 31 is to be moved in the X direction and the Y direction relative to the second body (32). It may also be rotated. In this case, the pickup device 100 maintains a fixed position with respect to the second body 32, and the receiving device 40 maintains a fixed position with respect to the first body 31. As the first body 31 moves, an object attached to the holding member 10 fixed to the accommodation mechanism 40 may move to an upper side of the pickup apparatus 100, that is, to a pickup position. In addition, the object may be oriented in an appropriate direction according to the rotation of the first body 31. In the above method, the pickup device 100 is fixed and only the object is moved and rotated to the appropriate pickup position.
다른 방법으로서, 대상물의 위치가 고정된 상태에서 픽업장치(100)를 적절한 픽업위치로 이동 및 회전시키는 것도 가능하다. 예컨대, 제1 몸체(31)가 제2 몸체(32)에 대해 X방향 및 Y방향으로 이동될 수 있고, 픽업장치(100)가 제1 몸체(31)에 대해 고정된 위치를 유지하고, 수납기구(40)가 제2 몸체(32)에 대해 고정된 위치를 유지할 수 있다. 이 경우 제1 몸체(31)의 이동에 따라 픽업장치(100)가 적절한 픽업위치로 이동하게 된다.Alternatively, it is also possible to move and rotate the pickup apparatus 100 to an appropriate pickup position while the position of the object is fixed. For example, the first body 31 may be moved in the X direction and the Y direction with respect to the second body 32, and the pickup apparatus 100 may maintain a fixed position with respect to the first body 31, and may be accommodated. The instrument 40 can maintain a fixed position relative to the second body 32. In this case, the pickup device 100 moves to an appropriate pickup position according to the movement of the first body 31.
한편, 베이스 유닛(30)은 승하강 가능하게 형성될 수도 있다. 예컨대, 제2 몸체(32)가 고정된 상태에서 제1 몸체(31)가 제2 몸체(32)에 대해 승하강 가능하도록 형성되고, 픽업장치(100)는 제2 몸체(32)에 대해 고정된 위치를 유지하고, 수납기구(40)는 제1 몸체(31)에 대해 고정된 위치를 유지한다. 이 경우, 제1 몸체(31)의 승하강에 따라 수납기구(40)가 고정된 픽업장치(100)에 대해 승하강 이동하게 된다.On the other hand, the base unit 30 may be formed to be lowered. For example, while the second body 32 is fixed, the first body 31 is formed to be able to move up and down with respect to the second body 32, and the pickup apparatus 100 is fixed to the second body 32. The retained position, and the receiving device 40 maintains a fixed position with respect to the first body 31. In this case, as the first body 31 moves up and down, the storage device 40 moves up and down relative to the fixed pickup device 100.
다른 방법으로서, 제1 몸체(31)가 고정된 상태에서 제2 몸체(32)가 제1 몸체(31)에 대해 승하강 가능하도록 형성될 수 있다. 픽업장치(100)는 제2 몸체(32)에 대해 고정된 위치를 유지하고, 수납기구(40)는 제1 몸체(31)에 대해 고정된 위치를 유지한다. 이 경우, 제2 몸체(32)의 승하강에 따라 픽업장치(100)가 고정된 수납기구(40)에 대해 승하강 이동하게 된다.As another method, the second body 32 may be formed to be liftable with respect to the first body 31 while the first body 31 is fixed. The pickup device 100 maintains a fixed position with respect to the second body 32, and the receiving device 40 maintains a fixed position with respect to the first body 31. In this case, as the second body 32 moves up and down, the pickup device 100 moves up and down relative to the fixed housing 40.
전술한 베이스 유닛(30)의 X 및 Y 방향 이동, 및 승하강 이동은 유압실린더 또는 공압실린더 등을 이용하여 이루어질 수 있으며, 모터 및 이 모터에 결합된 연결기구를 이용하여 이루어질 수도 있다. 이 연결기구는 풀리 및 벨트, 볼스크류, 캠부재, 랙피니언기어 등 중 적어도 하나를 포함할 수 있다.The above-described movement of the base unit 30 in the X and Y directions, and the lifting and lowering movement may be performed by using a hydraulic cylinder or a pneumatic cylinder, or may be performed by using a motor and a coupling mechanism coupled to the motor. The connecting mechanism may include at least one of a pulley and a belt, a ball screw, a cam member, a rack pinion gear, and the like.
베이스 유닛(30)의 제1 몸체(31)의 상측은 수납기구(40)와 결합된다. 제1 몸체(31)의 상측 중앙부에는 픽업장치(100) 등이 설치되는 설치공간(311)이 마련되며, 또한 수납기구(40)가 삽입되는 수납홈(312)이 마련된다(도 8 참조). 상기 수납홈(312) 사이에 수납기구(40)가 삽입되어 고정된다.The upper side of the first body 31 of the base unit 30 is coupled to the receiving device (40). In the upper central portion of the first body 31, an installation space 311 in which the pickup device 100 is installed is provided, and an accommodation groove 312 into which the accommodation mechanism 40 is inserted is provided (see FIG. 8). . The accommodation mechanism 40 is inserted and fixed between the accommodation grooves 312.
수납기구(40)는 베이스 유닛(30)의 제1 몸체(31) 상에 결합된다. 수납기구(40)는 유지부재(10)를 수납하는 하우징(41)을 구비한다. 도 6에 도시된 바와 같이 하우징(41)은 전체적으로 원반 형태로 형성될 수 있다. 또한 하우징(41)은 전체적으로 원반 형태인 중공부를 포함할 수 있으며, 이 중공부 내에 유지부재(10)가 수납된다.The receiving device 40 is coupled on the first body 31 of the base unit 30. The accommodation mechanism 40 has a housing 41 for housing the holding member 10. As shown in FIG. 6, the housing 41 may be formed in a disk shape as a whole. In addition, the housing 41 may include a hollow portion having a disk shape as a whole, and the holding member 10 is accommodated in the hollow portion.
유지부재(10) 상에는 복수개의 대상물(L)이 집적되어 있다. 예컨대, 대상물(L)은 엘이디 칩일 수 있으며, 유지부재(10)는 블루 테이프일 수 있다. 상기 엘이디 칩은 스크라이빙, 브레이킹 공정을 거쳐 유지부재(10) 상에 부착된 상태일 수 있다. 이 상태에서 유지부재(10)가 확장되면 이들 복수의 엘이디 칩은 서로 소정거리로 이격된다.A plurality of objects L are integrated on the holding member 10. For example, the object L may be an LED chip, and the holding member 10 may be a blue tape. The LED chip may be attached to the holding member 10 through a scribing and breaking process. When the holding member 10 is expanded in this state, the plurality of LED chips are spaced apart from each other by a predetermined distance.
도 7은 본 발명의 제2 실시예에 따른 픽업장치를 포함한 대상물 공급장치의 사시도로서 확장부재를 도시하고 있다. 도시된 바와 같이, 픽업장치(100)는 베이스 유닛(30)의 설치공간(311)에 마련된 확장부재(140)를 더 포함한다. 확장부재(140)는 유지부재(10)를 확장시킴으로써 유지부재(10) 상에 집적된 복수의 대상물이 서로 소정 간격으로 이격되도록 하는 장치이다. 이와 같이 대상물이 서로 이격됨으로써 개개의 대상물을 별도로 픽업하는 것이 가능하게 된다. 7 is a perspective view of an object supply apparatus including a pickup apparatus according to a second embodiment of the present invention, showing the expansion member. As shown, the pickup device 100 further includes an expansion member 140 provided in the installation space 311 of the base unit 30. The expansion member 140 is a device for expanding the holding member 10 so that a plurality of objects accumulated on the holding member 10 are spaced apart from each other at predetermined intervals. As the objects are spaced apart from each other, it is possible to pick up the individual objects separately.
확장부재(140)의 작동에 대해 도 8 내지 도 10을 사용하여 더 구체적으로 설명하기로 한다. 도 8 내지 도 10은 픽업장치를 도시하고 있지 않으나, 실제에 있어 유지부재(10)의 상측에는 픽커가 설치되고, 유지부재(10)의 하측에는 지지부재 및 지지핀 등이 설치된다.The operation of the expansion member 140 will be described in more detail with reference to FIGS. 8 to 10. 8 to 10 do not show the pick-up device, in practice, a picker is provided above the holding member 10, and a support member, a supporting pin, and the like are provided below the holding member 10.
도 8에 도시된 바와 같이, 상면에 복수의 대상물(L)이 부착된 유지부재(10)가 하우징(41)에 의해 제1 몸체(31)의 수납홈(312) 사이에 고정되어 있다. 또한, 제1 몸체(31)의 설치공간(311)에는 확장부재(140)의 지지기구(141)가 설치되어 있다. 대상물(L)은 서로 밀착되게 집적되어 있다.As shown in FIG. 8, a holding member 10 having a plurality of objects L attached to an upper surface thereof is fixed between the receiving grooves 312 of the first body 31 by the housing 41. In addition, the support mechanism 141 of the expansion member 140 is installed in the installation space 311 of the first body 31. The objects L are integrated in close contact with each other.
도 8에 도시된 바와 같이, 지지기구(141)가 고정된 상태에서 제1 몸체(31)를 하방 이동시킴으로써, 유지부재(10)를 확장시켜 대상물(L)이 서로 이격되도록 할 수 있다. 다른 방법으로서 도 9에 도시된 바와 같이, 제1 몸체(31)를 고정시킨 상태에서 지지기구(141)를 상방 이동시킴으로써, 유지부재(10)를 확장시켜 대상물(L)이 서로 이격되도록 할 수도 있다. 또 다른 방법으로서, 제1 몸체(31) 및 지지기구(141)가 서로 이동 가능하도록 형성할 수도 있다.As shown in FIG. 8, by moving the first body 31 downward while the support mechanism 141 is fixed, the holding member 10 may be extended to allow the objects L to be spaced apart from each other. As another method, as shown in FIG. 9, by moving the support mechanism 141 upward while the first body 31 is fixed, the holding member 10 may be extended to allow the objects L to be spaced apart from each other. have. As another method, the first body 31 and the support mechanism 141 may be formed to be movable with each other.
위의 방법들에서는 지지기구(114)가 유지부재(10)의 하측에 설치되며, 지지기구(114)가 유지부재(10)의 하면을 지지한 상태로, 유지부재(10)가 지지기구(114)에 의해 상측으로 밀어 올려짐으로써 유지부재(10)가 확장하게 된다. 그러나 이와 달리, 지지기구(114)가 유지부재(10)의 상측에 설치되며, 지지기구(114)가 유지부재(10)의 상면을 지지한 상태로, 유지부재(10)가 지지기구(114)에 의해 하측으로 밀어 내려짐으로써 유지부재(10)가 확장하게 되도록 구성하는 것도 가능하다.In the above methods, the support mechanism 114 is installed below the holding member 10, and the supporting member 114 supports the lower surface of the holding member 10, and the holding member 10 supports the supporting mechanism ( The holding member 10 is expanded by being pushed upward by the 114. However, unlike this, the support mechanism 114 is installed on the upper side of the holding member 10, and the supporting member 114 supports the upper surface of the holding member 10, and the holding member 10 supports the supporting mechanism 114. It is also possible to configure such that the holding member 10 is expanded by being pushed down by the bottom.
이와 같이 대상물(L)이 이격된 상태에서 어느 하나의 대상물(L)에 대해 전술한 제1 실시예에서와 같은 방법으로 픽업을 행할 수 있다. 따라서, 복수의 대상물(L)이 밀착되게 집적되어 있는 경우에도 안정적이고 원활하게 원하는 대상물(L)만을 픽업할 수 있게 된다.In this way, the pick-up can be performed in the same manner as in the above-described first embodiment with respect to any one of the objects L in a state where the object L is spaced apart. Therefore, even when the plurality of objects L are tightly integrated, only the desired objects L can be picked up stably and smoothly.
[엘이디 칩 분류장치][LED chip sorting device]
다음으로, 본 발명에 따른 픽업장치를 구비한 엘이디 칩 분류장치의 일실시예를 설명하기로 한다.Next, an embodiment of an LED chip sorting apparatus having a pickup device according to the present invention will be described.
도 11은 본 발명에 따른 엘이디 칩 분류장치의 사시도, 도 12는 본 발명에 따른 엘이디 칩 분류장치의 평면도, 도 13은 본 발명에 따른 엘이디 칩 분류장치의 공급부의 확대사시도이다. 픽업장치(100)의 구성 및 기능은 전술한 실시예에서와 동일하므로 이에 대한 설명은 생략하기로 한다. 또한, 전술한 실시예에 기재된 대상물은 본 실시예에서는 엘이디 칩이 된다.11 is a perspective view of the LED chip sorting apparatus according to the present invention, FIG. 12 is a plan view of the LED chip sorting apparatus according to the present invention, and FIG. 13 is an enlarged perspective view of a supply unit of the LED chip sorting apparatus according to the present invention. Since the configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment, a description thereof will be omitted. In addition, the object described in the above-mentioned embodiment becomes an LED chip in this embodiment.
본 발명에 따른 픽업장치(100)를 구비한 엘이디 칩 분류장치(200)는, 패키지공정을 거치기 전의 칩 단계에서 엘이디 칩의 특성을 테스트하여 양품과 불량품을 성능에 따라 등급별로 분류하는 장치이다. 도 11 및 도 12에 도시된 바와 같이 엘이디 칩 분류장치(200)는 공급부(210), 로딩부(220), 테스트부(230), 및 언로딩부(240)를 포함한다.The LED chip sorting apparatus 200 having the pick-up apparatus 100 according to the present invention is a device for classifying good and defective goods according to their performance by testing the characteristics of the LED chip at the chip stage before the packaging process. 11 and 12, the LED chip sorting apparatus 200 includes a supply unit 210, a loading unit 220, a test unit 230, and an unloading unit 240.
공급부(210)는 도 9에 도시된 바와 같이, 엘이디 칩을 회전시켜 테스트를 거치도록 하는 회전유닛(211), 및 이 회전유닛(211) 상에 회전가능하게 결합된 회전부재(215)를 포함한다. 회전유닛(211)의 하측에는 회전부재(215)를 회전시키는 모터(212)가 부착되어 있다.As shown in FIG. 9, the supply unit 210 includes a rotating unit 211 for rotating the LED chip to be tested, and a rotating member 215 rotatably coupled to the rotating unit 211. do. On the lower side of the rotating unit 211, a motor 212 for rotating the rotating member 215 is attached.
회전부재(215)는 회전축(216)을 중심으로 반경 방향으로 연장된 복수개, 예컨대 8개의 외팔보 형태의 지지프레임(217)을 포함한다. 이 지지프레임(217)의 각 단부측에는 엘이디 칩이 안착되는 안착부재(218)가 마련된다. 회전부재(215)가 회전함에 따라 안착부재(218)는 각각, 안착부재(218)에 엘이디 칩이 로딩되는 로딩위치(LP), 엘이디 칩이 테스트되는 테스트위치(TP), 및 안착부재(218)로부터 엘이디 칩이 언로딩되는 언로딩위치(ULP)로 회전 이동하게 된다.The rotating member 215 includes a plurality of support frames 217 in the form of a plurality of, for example, eight cantilevered beams extending radially about the rotation shaft 216. Each end side of the support frame 217 is provided with a seating member 218 on which the LED chip is seated. As the rotating member 215 rotates, the seating member 218 has a loading position LP at which the LED chip is loaded on the seating member 218, a test position TP at which the LED chip is tested, and a seating member 218. ) Rotates to the unloading position (ULP) where the LED chip is unloaded.
로딩부(220)는 공급부(210)의 옆에 설치되며, 안착부재(218)가 로딩위치(LP)에 위치할 경우 안착부재(218)로 테스트될 엘이디 칩을 공급하게 된다. 로딩부(220)는 엘이디 칩이 유지된 공급부재를 보관하고 있는 제1 저장유닛(221)으로부터 제1 이동기구(222)를 거쳐 로딩유닛(223)으로 공급부재를 이동시킨 후, 로딩유닛(223)에 의해 로딩부(220)로부터 공급부(210)의 안착부재(218) 측으로 엘이디 칩을 로딩하게 된다.The loading unit 220 is installed next to the supply unit 210 and supplies the LED chip to be tested to the mounting member 218 when the mounting member 218 is located at the loading position LP. The loading unit 220 moves the supply member to the loading unit 223 via the first moving mechanism 222 from the first storage unit 221 holding the supply member holding the LED chip, the loading unit ( The LED chip is loaded from the loading unit 220 to the seating member 218 side of the supply unit 223 by 223.
로딩부(220)에 의해 안착부재(218)로 로딩되어야 하는 엘이디 칩이 유지된 공급부재(도시 생략)는 전술한 실시예에서의 유지부재(10)에 대응한다. 복수개의 엘이디 칩이 공급부재 상에 밀착되게 집적되어 있으므로, 로딩부(220)에는 전술한 픽업장치(100)가 구비된다. 따라서, 픽업장치(100)가 공급부재로부터 엘이디 칩을 픽업하고, 픽업된 엘이디 칩은 로딩유닛(223)에 의해 안착부재(218)로 로딩된다. 픽업장치(100)의 구성 및 기능은 전술한 실시예와 동일하다. 또한, 픽업장치(100)의 픽커는 로딩유닛(223)에 설치될 수 있다. 즉, 픽커에 의해 공급부재로부터 픽업된 엘이디 칩은 로딩유닛(223)에 의해 회전하여 로딩 위치(LP)에 위치한 안착부재(218) 상으로 이동한 뒤, 안착부재(218) 상에 놓여지게 된다.The supply member (not shown) in which the LED chip to be loaded into the seating member 218 by the loading unit 220 is maintained corresponds to the retaining member 10 in the above-described embodiment. Since the plurality of LED chips are integrated in close contact with the supply member, the loading unit 220 is provided with the pickup device 100 described above. Therefore, the pickup apparatus 100 picks up the LED chip from the supply member, and the picked up LED chip is loaded into the seating member 218 by the loading unit 223. The configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment. In addition, the picker of the pickup apparatus 100 may be installed in the loading unit 223. That is, the LED chip picked up from the supply member by the picker is rotated by the loading unit 223 and moved onto the seating member 218 located at the loading position LP, and then placed on the seating member 218. .
테스트부(230)는 공급부(210)의 옆에 설치되며, 안착부재(218)가 테스트위치(TP)에 위치할 경우 이 안착부재(218)에 놓인 엘이디 칩의 특성을 측정하게 된다. 이러한 엘이디 칩의 특성은 예컨대 휘도, 파장, 광속, 광도, 조도, 분광분포, 색온도, 색좌표 등의 광특성일 수 있으며, 이러한 광특성을 측정하기 위해 테스트부(230)는 적분구 및 광측정장치를 포함할 수 있다.The test unit 230 is installed next to the supply unit 210, and when the seating member 218 is located at the test position TP, the test chip 230 measures the characteristics of the LED chip placed on the seating member 218. The characteristics of the LED chip may be, for example, optical characteristics such as luminance, wavelength, luminous flux, luminous intensity, illuminance, spectral distribution, color temperature, and color coordinates. In order to measure such optical characteristics, the test unit 230 includes an integrating sphere and an optical measuring device. It may include.
언로딩부(240)는 공급부(210)의 옆에 설치되며, 안착부재(218)가 언로딩위치(ULP)에 위치할 경우 이 안착부재(218)로부터 엘이디 칩을 수거하고, 이들 엘이디 칩을 분류하여 수납부재 상에 적재하게 된다. 언로딩부(240)는 안착부재(218)로부터 테스트된 엘이디 칩을 수거하여 보관하는 버퍼부(250), 및 이 버퍼부(250)에 보관된 엘이디 칩을 테스트 결과에 따라 등급별로 분류하는 소팅부(260)를 포함한다. 버퍼부(250)는 언로딩유닛(251)에 의해 안착부재(218)로부터 엘이디 칩을 수납부재로 이동시킨 후, 제2 이동기구(252)를 통해 제2 저장유닛(253)에 수납부재를 보관하게 된다. 보관된 수납부재는 소팅로딩유닛(261)으로 옮겨진 후, 엘이디 칩 테스트 결과에 따라 소팅유닛(262)에 의해 등급별로 별도의 적재부재 상에 적재된다. 이 적재부재는 제3 이동기구(263)에 의해 제3 저장유닛(264)에 보관된다. 이로써 엘이디 칩이 성능별로 분류되어 후속 공정으로 제공될 수 있게 된다.The unloading part 240 is installed next to the supply part 210, and when the seating member 218 is located at the unloading position (ULP), the LED chips are collected from the seating member 218, and these LED chips are removed. Classified and loaded on the receiving member. The unloading unit 240 sorts the buffer unit 250 which collects and stores the tested LED chip from the seating member 218, and classifies the LED chips stored in the buffer unit 250 according to the test result. The unit 260 is included. The buffer unit 250 moves the LED chip from the seating member 218 to the storage member by the unloading unit 251, and then moves the storage member to the second storage unit 253 through the second moving mechanism 252. Will be kept. The stored storage member is transferred to the sorting loading unit 261, and then loaded on a separate stacking member for each grade by the sorting unit 262 according to the LED chip test result. The loading member is stored in the third storage unit 264 by the third moving mechanism 263. This allows the LED chips to be categorized by performance and provided for subsequent processing.
소팅로딩유닛(261)에서 소팅유닛(262)으로 로딩되어야 하는 엘이디 칩이 유지된 수납부재(도시 생략)는 전술한 실시예에서의 유지부재(10)에 대응한다. 복수개의 엘이디 칩이 수납부재 상에 밀착되게 집적되어 있으므로, 소팅부(260)의 소팅로딩유닛(261)에는 전술한 픽업장치(100)가 구비된다. 따라서, 테스트 결과 특정 등급에 해당하는 엘이디 칩만을 픽업장치(100)가 수납부재로부터 픽업하고, 픽업된 엘이디 칩은 소팅유닛(262)에 의해 등급별로 구별된 적재부재 상에 적재된다. 픽업장치(100)의 구성 및 기능은 전술한 실시예와 동일하다. 또한, 픽업장치(100)의 픽커는 소팅유닛(262)에 설치될 수 있다. 즉, 픽커에 의해 수납부재로부터 픽업된 엘이디 칩은 소팅유닛(262)에 의해 회전하여 적재부재 상에 놓여지게 된다.An accommodation member (not shown) in which the LED chip to be loaded from the sorting loading unit 261 to the sorting unit 262 is held corresponds to the holding member 10 in the above-described embodiment. Since the plurality of LED chips are integrated in close contact with the housing member, the sorting loading unit 261 of the sorting unit 260 is provided with the pickup device 100 described above. Therefore, as a result of the test, only the LED chip corresponding to a specific grade is picked up by the pickup device 100 from the housing member, and the picked-up LED chip is loaded on the stacking members classified according to grades by the sorting unit 262. The configuration and function of the pickup apparatus 100 is the same as in the above-described embodiment. In addition, the picker of the pickup apparatus 100 may be installed in the sorting unit 262. That is, the LED chip picked up from the receiving member by the picker is rotated by the sorting unit 262 and placed on the loading member.
본 발명에 의한 엘이디 칩 분류장치(200)는 전체적으로 일자형의 배치(레이아웃)를 가진다. 즉 언로딩부(240)는 공급부(210)를 중심으로 로딩부(220)의 반대측에 위치하게 된다. 이로써 공정의 흐름이 손쉽게 파악되고 유지보수도 간편하게 된다.The LED chip sorting apparatus 200 according to the present invention has a straight arrangement (layout). That is, the unloading unit 240 is located on the opposite side of the loading unit 220 with respect to the supply unit 210. This makes it easy to see the flow of the process and to simplify maintenance.
본 발명에 의한 엘이디 칩 분류장치(200)를 이용함으로써 패키징 이전의 칩 단계에서 엘이디 칩을 테스트하여 분류하는 것이 가능하게 되며, 특히 로딩부(220) 및/또는 언로딩부(240)에 픽업장치(100)를 구비함으로써 엘이디 칩을 용이하고 안전하게 픽업할 수 있게 된다.By using the LED chip sorting apparatus 200 according to the present invention, it becomes possible to test and classify the LED chips at the chip stage before packaging, and in particular, the pick-up apparatus in the loading unit 220 and / or the unloading unit 240. By providing 100, the LED chip can be picked up easily and safely.
이상에서 설명한 본 발명은 전술한 실시예 및 첨부된 도면에 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능하다는 것이 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에게 있어 명백할 것이다.The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.
본 발명에 의한 픽업장치에 의하면, 엘이디 칩 및 반도체 칩 등의 대상물을 신속하고, 안정적이며, 용이하게 픽업할 수 있다.According to the pickup apparatus according to the present invention, objects such as LED chips and semiconductor chips can be picked up quickly, stably and easily.

Claims (19)

  1. 유지부재 상에 위치한 대상물을 픽업하기 위한 픽업장치에 있어서,In the pickup device for picking up the object located on the holding member,
    상기 유지부재의 하측에 설치되며, 유지부재를 향한 면에 홈이 형성되어 있는 지지부재;A support member installed below the holding member and having a groove formed on a surface thereof facing the holding member;
    상기 지지부재의 홈의 내측에서 상기 유지부재를 향하여 돌출되도록 설치되며, 상기 유지부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및A support pin installed to protrude from the inside of the groove of the support member toward the holding member and penetrating the holding member to support the object; And
    상기 대상물의 상측에 설치되며, 상기 대상물을 픽업하기 위한 픽커It is installed on the upper side of the object, the picker for picking up the object
    를 포함하며,Including;
    상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 하는 픽업장치.Picking device, characterized in that at least one intake hole for the inflow and outflow of air is installed through the groove of the support member.
  2. 제1항에 있어서, 상기 지지부재의 홈에는 설치공이 관통 설치되며, 상기 설치공을 통해 상기 지지핀이 위치하는 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, wherein an installation hole is installed through the groove of the support member, and the support pin is positioned through the installation hole.
  3. 제1항에 있어서, 상기 지지부재는 상기 유지부재에 접촉되는 접촉면을 포함하고, 상기 홈은 상기 접촉면 내측에 위치하며, 상기 지지부재의 상면에서 보았을 때, 상기 흡기공과 상기 지지부재의 중심 사이의 거리는, 상기 흡기공과 상기 접촉면 사이의 거리보다 짧은 것을 특징으로 하는 픽업장치.The method of claim 1, wherein the support member comprises a contact surface in contact with the holding member, the groove is located inside the contact surface, when viewed from the upper surface of the support member, between the intake hole and the center of the support member And the distance is shorter than the distance between the intake hole and the contact surface.
  4. 제1항에 있어서, 상기 흡기공을 통해 상기 유지부재를 상기 홈의 내측 방향으로 이동시키기 위한 흡인력을 제공하는 흡기장치를 더 포함하는 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, further comprising an intake apparatus for providing a suction force for moving the retaining member in the inward direction of the groove through the intake hole.
  5. 제1항에 있어서, 상기 지지핀을 승하강시키는 핀승강장치를 더 포함하는 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, further comprising a pin lift device for raising and lowering the support pin.
  6. 제1항에 있어서, 상기 픽커는 상기 대상물을 흡착하는 장치인 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, wherein the picker is a device for adsorbing the object.
  7. 제1항에 있어서, 상기 유지부재는 상기 대상물을 향한 면이 점착성을 갖는 박막인 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, wherein the holding member is a thin film having an adhesive surface on the object.
  8. 제1항에 있어서, 상기 대상물은 엘이디 칩 또는 반도체 칩인 것을 특징으로 하는 픽업장치.The pickup apparatus of claim 1, wherein the object is an LED chip or a semiconductor chip.
  9. 제1항에 있어서, 상기 대상물은 상기 유지부재 상에서 복수개가 인접하여 배치되며, 복수개의 상기 대상물을 서로 이격시키도록 상기 유지부재를 확장시키는 확장부재를 더 포함하는 것을 특징으로 하는 픽업장치.The pickup apparatus according to claim 1, wherein the object further includes a plurality of extension members disposed adjacent to each other on the holding member and extending the holding member to space the plurality of the objects from each other.
  10. 제9항에 있어서, 상기 확장부재는,The method of claim 9, wherein the expansion member,
    상기 유지부재의 하측에 설치되며, 상기 유지부재의 하면을 지지한 상태로 상기 유지부재를 상측으로 밀어올림으로써 상기 유지부재를 확장시키는 지지기구를 더 포함하는 것을 특징으로 하는 픽업장치.And a support mechanism installed below the holding member and extending the holding member by pushing the holding member upward while supporting the lower surface of the holding member.
  11. 제9항에 있어서, 상기 확장부재는,The method of claim 9, wherein the expansion member,
    상기 유지부재의 상측에 설치되며, 상기 유지부재의 상면을 지지한 상태로 상기 유지부재를 하측으로 밀어내림으로써 상기 유지부재를 확장시키는 지지기구를 더 포함하는 것을 특징으로 하는 픽업장치.And a support mechanism installed above the holding member and extending the holding member by pushing the holding member downward while supporting the upper surface of the holding member.
  12. 엘이디 칩의 특성을 측정하여 엘이디 칩을 분류하는 엘이디 칩 분류장치에 있어서,In the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip,
    상기 엘이디 칩이 안착되는 안착부재를 포함하며, 상기 안착부재에 엘이디 칩이 로딩되는 로딩위치와, 상기 엘이디 칩이 테스트되는 테스트위치와, 상기 안착부재로부터 상기 엘이디 칩이 언로딩되는 언로딩위치로 상기 안착부재를 회전시키는 공급부;And a seating member on which the LED chip is seated, a loading position at which the LED chip is loaded on the seating member, a test position at which the LED chip is tested, and an unloading position at which the LED chip is unloaded from the seating member. Supply unit for rotating the seating member;
    상기 공급부의 옆에 설치되며, 복수개의 엘이디 칩이 부착되는 공급부재와, 상기 로딩 위치에서 상기 공급부재로부터 엘이디 칩을 픽업하는 픽업장치와, 상기 픽업된 엘이디 칩을 상기 안착부재로 로딩하는 로딩유닛을 포함하는 로딩부;A supply unit installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up an LED chip from the supply member at the loading position, and a loading unit to load the picked up LED chip into the seating member; A loading unit comprising a;
    상기 공급부의 옆에 설치되며, 상기 테스트위치에서 상기 엘이디 칩의 특성을 측정하는 테스트부; 및A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And
    상기 공급부의 옆에 설치되며, 상기 언로딩위치에서 상기 안착부재로부터 테스트된 엘이디 칩을 수거하는 언로딩부를 포함하며,It is installed next to the supply portion, and includes an unloading portion for collecting the LED chip tested from the seating member in the unloading position,
    상기 픽업장치는,The pickup device,
    상기 공급부재의 하측에 설치되며, 공급부재를 향한 면에 홈이 형성되어 있는 지지부재;A support member installed at a lower side of the supply member and having a groove formed on a surface facing the supply member;
    상기 지지부재의 홈의 내측에서 상기 공급부재를 향하여 돌출되도록 설치되며, 상기 공급부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및A support pin installed to protrude toward the supply member from the inside of the groove of the support member and capable of supporting the object through the supply member; And
    상기 엘이디 칩의 상측에 설치되며, 상기 엘이디 칩을 픽업하기 위한 픽커A picker installed at an upper side of the LED chip and picking up the LED chip
    를 포함하며,Including;
    상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 하는 엘이디 칩 분류장치.LED chip sorting device, characterized in that at least one intake hole for the inflow and outflow of air is installed through the groove of the support member.
  13. 제12항에 있어서, 상기 공급부는 회전축을 중심으로 반경 방향으로 연장된 복수개의 지지프레임을 포함하며, 상기 안착부재는 상기 복수개의 지지프레임의 단부측에 각각 설치되는 것을 특징으로 하는 엘이디 칩 분류장치.13. The LED chip sorting apparatus according to claim 12, wherein the supply part includes a plurality of support frames extending radially about a rotation axis, and the seating members are respectively provided at end sides of the plurality of support frames. .
  14. 제12항에 있어서, 상기 흡기공을 통해 상기 공급부재를 상기 홈의 내측 방향으로 이동시키기 위한 흡인력을 제공하는 흡기장치를 더 포함하는 것을 특징으로 하는 엘이디 칩 분류장치.13. The LED chip sorting apparatus according to claim 12, further comprising an intake apparatus for providing a suction force for moving the supply member in the inward direction of the groove through the intake hole.
  15. 제12항에 있어서, 상기 지지핀을 승하강시키는 핀승강장치를 더 포함하는 것을 특징으로 하는 엘이디 칩 분류장치.13. The LED chip sorting apparatus of claim 12, further comprising a pin lift device for lifting and lowering the support pin.
  16. 엘이디 칩의 특성을 측정하여 엘이디 칩을 분류하는 엘이디 칩 분류장치에 있어서,In the LED chip sorting apparatus for classifying the LED chip by measuring the characteristics of the LED chip,
    상기 엘이디 칩이 안착되는 안착부재를 포함하며, 상기 안착부재에 엘이디 칩이 로딩되는 로딩위치와, 상기 엘이디 칩이 테스트되는 테스트위치와, 상기 안착부재로부터 상기 엘이디 칩이 언로딩되는 언로딩위치로 상기 안착부재를 회전시키는 공급부;And a seating member on which the LED chip is seated, a loading position at which the LED chip is loaded on the seating member, a test position at which the LED chip is tested, and an unloading position at which the LED chip is unloaded from the seating member. Supply unit for rotating the seating member;
    상기 공급부의 옆에 설치되며, 상기 로딩 위치에서 상기 안착부재로 테스트될 엘이디 칩을 공급하는 로딩부;A loading unit installed beside the supply unit and supplying an LED chip to be tested to the seating member in the loading position;
    상기 공급부의 옆에 설치되며, 상기 테스트위치에서 상기 엘이디 칩의 특성을 측정하는 테스트부; 및A test unit installed beside the supply unit and measuring a characteristic of the LED chip at the test position; And
    상기 공급부의 옆에 설치되며, 복수개의 엘이디 칩이 부착되는 수납부재와, 상기 언로딩 위치에서 상기 수납부재로부터 엘이디 칩을 픽업하는 픽업장치와, 상기 픽업된 엘이디 칩을 이송하는 소팅유닛을 포함하는 언로딩부를 포함하며,A storage member installed next to the supply unit, to which a plurality of LED chips are attached, a pickup device to pick up the LED chips from the storage member at the unloading position, and a sorting unit to transfer the picked up LED chips; Including an unloading unit,
    상기 픽업장치는,The pickup device,
    상기 수납부재의 하측에 설치되며, 수납부재를 향한 면에 홈이 형성되어 있는 지지부재;A support member installed below the housing member and having a groove formed on a surface thereof facing the housing member;
    상기 지지부재의 홈의 내측에서 상기 수납부재를 향하여 돌출되도록 설치되며, 상기 수납부재를 관통하여 상기 대상물을 지지할 수 있는 지지핀; 및A support pin installed to protrude toward the housing member from the inside of the groove of the support member and capable of supporting the object through the housing member; And
    상기 엘이디 칩의 상측에 설치되며, 상기 엘이디 칩을 픽업하기 위한 픽커A picker installed at an upper side of the LED chip and picking up the LED chip
    를 포함하며,Including;
    상기 지지부재의 홈에는 공기의 유출입을 위한 적어도 하나의 흡기공이 관통 설치되어 있는 것을 특징으로 하는 엘이디 칩 분류장치.LED chip sorting device, characterized in that at least one intake hole for the inflow and outflow of air is installed through the groove of the support member.
  17. 제16항에 있어서, 상기 공급부는 회전축을 중심으로 반경 방향으로 연장된 복수개의 지지프레임을 포함하며, 상기 안착부재는 상기 복수개의 지지프레임의 단부측에 각각 설치되는 것을 특징으로 하는 엘이디 칩 분류장치.17. The LED chip sorting apparatus according to claim 16, wherein the supply part includes a plurality of support frames extending radially about a rotation axis, and the seating members are respectively provided at end portions of the plurality of support frames. .
  18. 제16항에 있어서, 상기 흡기공을 통해 상기 수납부재를 상기 홈의 내측 방향으로 이동시키기 위한 흡인력을 제공하는 흡기장치를 더 포함하는 것을 특징으로 하는 엘이디 칩 분류장치.17. The LED chip sorting apparatus according to claim 16, further comprising an intake apparatus for providing a suction force for moving the accommodating member in the inward direction of the groove through the intake hole.
  19. 제16항에 있어서, 상기 지지핀을 승하강시키는 핀승강장치를 더 포함하는 것을 특징으로 하는 엘이디 칩 분류장치.17. The LED chip sorting apparatus of claim 16, further comprising a pin lifter for lifting and lowering the support pin.
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US10863658B2 (en) 2015-11-13 2020-12-08 Facebook Technologies, Llc Method and apparatus for use in the manufacture of a display element

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