CN110197813B - Dust removal type chip picking equipment with suction nozzle replacing function - Google Patents
Dust removal type chip picking equipment with suction nozzle replacing function Download PDFInfo
- Publication number
- CN110197813B CN110197813B CN201910312841.9A CN201910312841A CN110197813B CN 110197813 B CN110197813 B CN 110197813B CN 201910312841 A CN201910312841 A CN 201910312841A CN 110197813 B CN110197813 B CN 110197813B
- Authority
- CN
- China
- Prior art keywords
- suction
- rod
- dust removal
- vacuum pump
- suction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention relates to a dust removal type chip picking device with a suction nozzle replacing function, which comprises a suction pipe, a vacuum pump, an adsorption mechanism and a dust removal mechanism, wherein the adsorption mechanism comprises a lifting sleeve, a cylinder, a driving assembly, a movable rod, two sliders, at least two suction nozzles and at least two supporting assemblies, the dust removal mechanism comprises a supporting ring, a filtering net, two connecting assemblies and at least two ejector rods, the driving assembly comprises a motor, a gear and a rack, the supporting assemblies comprise two connecting units, in the dust removal type chip picking device with the suction nozzle replacing function, the switching between the suction nozzles with different types is realized through the adsorption mechanism, the picking device can pick up the chips with different sizes, the practicability of the picking device is improved, the dust adsorbed on the chips can be collected through the dust removal mechanism, and the quantity of the dust on the chips is reduced, the influence of dust on the performance of the chip is reduced, and the practicability of the picking equipment is improved.
Description
Technical Field
The invention relates to the field of chip pickup equipment, in particular to dust removal type chip pickup equipment with a suction nozzle replacement function.
Background
In order to prevent the semiconductor chips cut at the time of cutting from being scattered, the chips are bonded with a holding tape having adhesiveness on the back surface, and the chips are cut from the front surface side by a chip cutting device or the like, and at this time, the holding tape bonded to the back surface is cut into a few pieces but is not cut, and is in a state of holding the respective semiconductor chips.
In the using process of the chip picking equipment in the prior art, due to the fact that the chip picking equipment is single in function and only can pick the chips with the corresponding sizes, the using limitation of the existing chip picking equipment is caused, and in addition, in the chip production process, if dust is adsorbed on the chips, the performance of the chips is affected.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the dust removal type chip picking device with the suction nozzle replacing function is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a dust removal type chip picking device with a suction nozzle replacing function comprises a suction pipe, a vacuum pump, an adsorption mechanism and a dust removal mechanism, wherein one end of the suction pipe is connected with the vacuum pump;
the adsorption mechanism comprises a lifting sleeve, an air cylinder, a driving assembly, a moving rod, two sliding blocks, at least two suction nozzles and at least two supporting assemblies, wherein the lifting sleeve and the suction pipe are coaxially arranged, the lifting sleeve is sleeved on the suction pipe and is in sliding connection with the suction pipe, the axis of the air cylinder is parallel to that of the suction pipe, the cylinder body of the air cylinder is fixedly connected with one end, close to the vacuum pump, of the suction pipe, the top end of an air rod of the air cylinder is fixedly connected with the lifting sleeve, the moving rod is perpendicular to that of the suction pipe, the moving rod is arranged on one side of the lifting sleeve, a sliding groove is formed in the moving rod, the two sliding blocks are respectively arranged at two ends of one side, close to the moving rod, of the lifting sleeve, the straight line where the two sliding blocks are located is parallel to the moving rod, the sliding blocks are matched with the sliding grooves, the sliding blocks are arranged inside the sliding grooves and are in sliding connection with the sliding grooves, the vacuum pump comprises a movable rod, a driving assembly, suction nozzles, a support assembly, a driving assembly and a support assembly, wherein the driving assembly is arranged on one side of a lifting sleeve close to the movable rod, the driving assembly is connected with the movable rod, the suction nozzles are arranged on one side of the movable rod far away from the vacuum pump, the number of the suction nozzles is equal to that of the support assembly, the suction nozzles correspond to the support assembly one by one, the suction nozzles are connected with the movable rod through the support assembly, one end of each suction nozzle close to the suction pipe is provided with a cylindrical notch matched with the suction pipe, a suction hole is formed in each suction nozzle, and the suction hole and the suction nozzles are coaxially arranged;
dust removal mechanism includes support ring, filter screen, two coupling assembling and two at least ejector pins, the support ring sets up with the straw is coaxial, the support ring sets up the inside of the one end of keeping away from the vacuum pump of straw, the filter screen is perpendicular with the axis of straw, the filter screen sets up the one side of keeping away from the vacuum pump at the support ring, the filter screen is connected with the support ring through each coupling assembling, the ejector pin is parallel with the axis of straw, the ejector pin sets up on the inner wall of the cylindricality notched bottom of suction nozzle.
Preferably, in order to provide power for the moving rod, the driving assembly comprises a motor, a gear and a rack, the rack is arranged on one side of the moving rod close to the vacuum pump, the rack is parallel to the moving rod, the motor is fixedly connected with the lifting sleeve, the motor is in transmission connection with the gear, and the gear is meshed with the rack.
As preferred, in order to improve the stability that suction nozzle and carriage release lever are connected, supporting component includes two linkage elements, linkage element includes connecting rod, adapter sleeve, first spring and lug, the connecting rod is parallel with the axis of straw, the connecting rod sets up the one side of keeping away from the vacuum pump at the carriage release lever, the adapter sleeve cover is established on the connecting rod, adapter sleeve and connecting rod sliding connection, one side of connecting rod is equipped with the lug, the lug sets up the one side that is close to the vacuum pump at adapter sleeve, adapter sleeve supports each other with the lug and leans on, first spring housing is established on the connecting rod, the one end of keeping away from the vacuum pump of connecting rod is through first spring and adapter sleeve fixed connection, first spring is in compression state, adapter sleeve and suction nozzle fixed connection.
As preferred, in order to improve the stability that support ring and filter screen are connected, coupling assembling includes lifter and second spring, the both sides of support ring all are equipped with the connecting hole, the lifter is parallel with the axis of straw, the lifter passes the connecting hole, lifter and connecting hole sliding connection, the one end and the filter screen fixed connection of keeping away from the vacuum pump of lifter, the second spring housing is established on the lifter, the one end of lifter that is close to the vacuum pump passes through second spring and support ring fixed connection, the second spring is in compression state.
Preferably, the motor is a servo motor in order to improve the accuracy of the control of the rotation angle of the motor.
Preferably, in order to increase the suction force of the suction nozzle, the suction nozzle is made of rubber.
Preferably, in order to improve the sealing performance between the inner walls of the filter screen and the suction pipe, a sealing ring is arranged on the periphery of the filter screen, and the filter screen is connected with the inner wall of the suction pipe in a sealing mode through the sealing ring.
Preferably, in order to improve the connection stability of the lifting rod and the support ring, a limit ring is arranged at one end of the lifting rod close to the vacuum pump.
Preferably, in order to improve the connection stability of the connecting rod and the connecting sleeve, a limit block is arranged at one end of the connecting rod, which is far away from the vacuum pump.
Preferably, in order to improve the stability of the moving rod, a limiting plate is arranged at one end of the sliding block, which is far away from the lifting sleeve, and the moving rod is arranged between the limiting plate and the lifting sleeve.
The invention has the advantages that in the dust removal type chip picking device with the suction nozzle replacing function, the suction nozzles of different types are switched through the adsorption mechanism, so that the picking device can pick up chips with different sizes, the practicability of the picking device is improved, compared with the prior adsorption mechanism, the suction mechanism enables the suction nozzle connected with the suction pipe to be at different heights from other suction nozzles through the supporting component, so that the suction nozzle connected with the suction pipe is reduced in the process of adsorbing chips, the probability of collision between other suction nozzles and the chip can be realized, moreover, the dust adsorbed on the chip can be collected through the dust removal mechanism, the amount of dust on the chip is reduced, the influence of the dust on the performance of the chip is reduced, the practicability of the pickup device is improved, compared with the existing dust removal mechanism, the dust removal mechanism does not need electric drive, and the energy-saving performance of the mechanism is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view showing the construction of a dust removing type chip pickup apparatus having a nozzle replacing function according to the present invention;
FIG. 2 is a schematic structural view of an adsorption mechanism of a dust removal type chip pickup apparatus having a nozzle replacement function according to the present invention;
FIG. 3 is a schematic structural view of a connection assembly of the dust type chip picking apparatus having a nozzle replacing function according to the present invention;
FIG. 4 is a schematic structural view of a dust removing mechanism of the dust removing type chip pickup apparatus having a suction nozzle replacing function according to the present invention;
in the figure: 1. the vacuum cleaner comprises a rack, a cylinder, a suction pipe, a vacuum pump, a motor, a lifting sleeve, a movable rod, a sliding groove, a sliding block, a connecting rod, a connecting sleeve, a suction nozzle, a gear, a limiting plate, a bump, a first spring, a lifting rod, a supporting ring, a filter screen and a push rod, wherein the cylinder is 2, the suction pipe is 3, the vacuum pump is 4, the motor is 5, the lifting sleeve is 6, the movable rod is 7, the sliding groove is 8, the sliding block is 9, the connecting rod is 10, the connecting sleeve is 11, the suction nozzle is 12, the gear is 13, the limiting plate is 14, the bump is 15, the first spring is 16, the lifting rod is 17, the second spring is 18, the supporting ring is 19, the filter screen is 20, and the push rod is 21.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a dust removal type chip picking device with a suction nozzle replacement function comprises a suction pipe 3 and a vacuum pump 4, wherein one end of the suction pipe 3 is connected with the vacuum pump 4, and further comprises an adsorption mechanism and a dust removal mechanism, the adsorption mechanism is arranged on the suction pipe 3, and the dust removal mechanism is arranged inside the suction pipe 3;
through the adsorption mechanism, switching among the suction nozzles 12 of different models is realized, so that the picking equipment can pick up chips of different sizes, the practicability of the picking equipment is improved, and moreover, through the dust removal mechanism, dust adsorbed on the chips can be collected, the quantity of the dust on the chips is reduced, the influence of the dust on the performance of the chips is reduced, and the practicability of the picking equipment is improved;
as shown in fig. 2, the adsorption mechanism includes a lifting sleeve 6, a cylinder 2, a driving assembly, a moving rod 7, two sliders 9, at least two suction nozzles 12 and at least two supporting assemblies, the lifting sleeve 6 is coaxially disposed with the suction pipe 3, the lifting sleeve 6 is sleeved on the suction pipe 3, the lifting sleeve 6 is slidably connected with the suction pipe 3, the axis of the cylinder 2 is parallel to the axis of the suction pipe 3, the cylinder body of the cylinder 2 is fixedly connected with one end of the suction pipe 3 close to the vacuum pump 4, the top end of the air rod of the cylinder 2 is fixedly connected with the lifting sleeve 6, the moving rod 7 is perpendicular to the axis of the suction pipe 3, the moving rod 7 is disposed at one side of the lifting sleeve 6, a chute 8 is disposed on the moving rod 7, the two sliders 9 are respectively disposed at two ends of one side of the lifting sleeve 6 close to the moving rod 7, and the straight line where the two sliders 9 are disposed is parallel to the moving rod 7, the sliding block 9 is matched with the sliding groove 8, the sliding block 9 is arranged inside the sliding groove 8, the sliding block 9 is connected with the sliding groove 8 in a sliding mode, the driving assembly is arranged on one side, close to the movable rod 7, of the lifting sleeve 6, the driving assembly is connected with the movable rod 7, the suction nozzles 12 are arranged on one side, far away from the vacuum pump 4, of the movable rod 7, the number of the suction nozzles 12 is equal to that of the support assemblies, the suction nozzles 12 correspond to the support assemblies one by one, the suction nozzles 12 are connected with the movable rod 7 through the support assemblies, one ends, close to the suction pipes 3, of the suction nozzles 12 are provided with cylindrical notches matched with the suction pipes 3, suction holes are formed inside the suction nozzles 12, and the suction holes and the suction nozzles 12 are arranged coaxially;
an operator controls the picking equipment, the lifting sleeve 6 is driven by the air cylinder 2 to move downwards along the suction pipe 3, the movable rod 7 is driven by the lifting sleeve 6 to move downwards, then the suction nozzle 12 is driven by the movable rod 7 to move downwards under the action of the connecting component, so that the suction nozzle 12 is separated from the suction pipe 3, then the stability of the connection between the movable rod 7 and the lifting sleeve 6 is improved under the mutual limiting action between the sliding block 9 and the sliding groove 8, the movable rod 7 is driven to move left and right by the driving component to move the suction nozzles 12 of different types to the lower part of the suction pipe 3 through the movable rod 7, then the lifting sleeve 6 is driven by the air cylinder 2 to move upwards, so that the suction nozzle 12 is sleeved on the suction pipe 3, the switching between the suction nozzles 3 of different types is realized, and the picking equipment can pick up chips of different sizes, the practicability of the pickup equipment is improved;
as shown in fig. 4, the dust removing mechanism comprises a support ring 19, a filter screen 20, two connecting assemblies and at least two ejector rods 21, wherein the support ring 19 is arranged coaxially with the suction pipe 3, the support ring 19 is arranged inside one end of the suction pipe 3 far away from the vacuum pump 4, the filter screen 20 is perpendicular to the axis of the suction pipe 3, the filter screen 20 is arranged on one side of the support ring 19 far away from the vacuum pump 4, the filter screen 20 is connected with the support ring 19 through each connecting assembly, the ejector rods 21 are parallel to the axis of the suction pipe 3, and the ejector rods 21 are arranged on the inner wall of the bottom of the cylindrical recess of the suction nozzle 12;
under support ring 19's supporting role, the stability of filter screen 20 has been improved through coupling assembling, make filter screen 20 can go up and down along straw 3, when suction nozzle 12 takes off from straw 3, ejector pin 21 reduces filter screen 20's holding power, then under coupling assembling's effect, make filter screen 20 move down the outside of straw 3, then improved the clear convenient degree to filter screen 20, filter screen 20's life has been prolonged, when suction nozzle 12 cover was established on straw 3, through ejector pin 21 drive filter screen 20 remove the inside of straw 3, when suction nozzle 12 sucked up the chip, suction nozzle 12 inhales the inside of straw 3 with the dust on the chip, then filter the dust through filter screen 20, then realized the dust removal to the chip, the practicality of picking up equipment has been improved.
As shown in fig. 2, the driving assembly includes a motor 5, a gear 13 and a rack 1, the rack 1 is disposed on one side of the moving rod 7 close to the vacuum pump 4, the rack 1 is parallel to the moving rod 7, the motor 5 is fixedly connected with the lifting sleeve 6, the motor 5 is in transmission connection with the gear 13, and the gear 13 is meshed with the rack 1;
when the gear 13 is driven to rotate by the motor 5, the gear rack 1 is driven to move by the gear 13, and then the moving rod 7 is driven to move left and right by the gear rack 1.
As shown in fig. 3, the support assembly includes two connection units, the connection units including a connection rod 10, a connection bushing 11, a first spring 16 and a boss 15, the connecting rod 10 is parallel to the axis of the suction pipe 3, the connecting rod 10 is arranged on one side of the moving rod 7 far away from the vacuum pump 4, the connecting sleeve 11 is sleeved on the connecting rod 10, the connecting sleeve 11 is connected with the connecting rod 10 in a sliding way, one side of the connecting rod 10 is provided with a lug 15, the lug 15 is arranged on one side of the connecting sleeve 11 close to the vacuum pump 4, the connecting sleeve 11 and the convex block 15 are abutted against each other, the first spring 16 is sleeved on the connecting rod 10, the end of the connecting rod 10 remote from the vacuum pump 4 is fixedly connected with the connecting sleeve 11 through a first spring 16, the first spring 16 is in a compressed state, and the connecting sleeve 11 is fixedly connected with the suction nozzle 12;
when the moving rod 7 moves downwards, the connecting rod 10 is driven by the moving rod 7 to move downwards, the connecting sleeve 11 is driven to move downwards under the limiting action of the bump 15, the suction nozzle 12 is driven by the connecting sleeve 11 to move downwards, so that the suction nozzle 12 is separated from the suction pipe 3, when the moving rod 7 moves upwards, the connecting rod 10 moves upwards, the connecting sleeve 11 is driven to move upwards under the action of the elastic force of the first spring 16, the suction nozzle 12 is driven by the connecting sleeve 11, so that the suction nozzle 12 is sleeved on the suction pipe 3, when the suction nozzle 12 is fixedly sleeved on the suction pipe 3, the moving rod 7 continues to move upwards for a certain distance, at the moment, the first spring 16 on the suction nozzle 12 connected with the suction pipe 3 is compressed, the suction nozzle 12 not connected with the suction pipe 3 continues to move upwards, so that the height of the suction nozzle 12 connected with the suction pipe 3 is lower than that of the other suction nozzles 12, so that the suction nozzle 12 connected with the suction pipe 3 is lowered in the process of adsorbing chips, the peripheral suction nozzles 12 have a possibility of colliding with the chip.
As shown in fig. 4, the connecting assembly includes a lifting rod 17 and a second spring 18, connecting holes are respectively formed in two sides of the support ring 19, the lifting rod 17 is parallel to the axis of the straw 3, the lifting rod 17 passes through the connecting holes, the lifting rod 17 is slidably connected with the connecting holes, one end of the lifting rod 17, which is far away from the vacuum pump 4, is fixedly connected with the filter screen 20, the second spring 18 is sleeved on the lifting rod 17, one end of the lifting rod 17, which is close to the vacuum pump 4, is fixedly connected with the support ring 19 through the second spring 18, and the second spring 18 is in a compressed state;
the filter screen 20 is driven to move upwards by the ejector rod 21, the lifting rod 17 is pushed by the filter screen 20 to move upwards along the connecting hole, so that the second spring 18 is stretched, when the ejector rod 21 moves downwards, the lifting rod 17 is driven to move downwards along the connecting hole under the action of the second spring 18, and the filter screen 20 is driven to move downwards to the outside of the straw 3 by the lifting rod 17.
Preferably, the motor 5 is a servo motor in order to improve the accuracy of the control of the rotation angle of the motor 5.
Preferably, in order to increase the suction force of the suction nozzle 12, the suction nozzle 12 is made of rubber;
because the rubber is soft, the gap between the suction nozzle 12 and the chip is reduced, the probability of air leakage between the chip and the suction nozzle 12 is reduced, and the suction force of the suction nozzle 12 is improved.
Preferably, in order to improve the sealing performance between the filter screen 20 and the inner wall of the suction pipe 3, a sealing ring is arranged on the periphery of the filter screen 20, and the filter screen 20 is connected with the inner wall of the suction pipe 3 in a sealing manner through the sealing ring;
the gap between the filter screen 20 and the inner wall of the suction pipe 3 is reduced by the sealing ring, and the sealing performance between the filter screen 20 and the inner wall of the suction pipe 3 is improved.
Preferably, in order to improve the stability of the connection between the lifting rod 17 and the support ring 19, a limit ring is arranged on one end of the lifting rod 17 close to the vacuum pump 4;
through the limiting effect of the limiting ring, the probability that the lifting rod 17 is separated from the inside of the supporting ring 19 is reduced, and the connection stability of the lifting rod 17 and the supporting ring 19 is improved.
Preferably, in order to improve the stability of the connection between the connecting rod 10 and the connecting sleeve 11, a limiting block is arranged at one end of the connecting rod 10, which is far away from the vacuum pump 4;
the probability that the connecting sleeve 11 is separated from the connecting rod 10 is reduced through the limiting block, and the connecting stability of the connecting rod 10 and the connecting sleeve 11 is improved.
Preferably, in order to improve the stability of the moving rod 7, a limit plate 14 is arranged at one end of the sliding block 9 away from the lifting sleeve 6, and the moving rod 7 is arranged between the limit plate 14 and the lifting sleeve 6;
through the limiting effect of the limiting plate 14, the probability that the moving rod 7 is separated from the sliding block 9 is reduced, and the stability of the moving rod 7 is improved.
An operator controls the picking equipment, the suction nozzle 12 is driven to move downwards through the air cylinder 2, the suction nozzle 12 is separated from the suction pipe 3, then power is provided through the driving component, the suction nozzles 12 of different types are moved to the lower part of the suction pipe 3 through the movable rod 7, then the suction nozzle 12 is driven to ascend through the air cylinder 2, the suction nozzle 12 is sleeved on the suction pipe 3, switching between the suction nozzles 3 of different types is realized, the picking equipment can pick up chips of different sizes, the practicability of the picking equipment is improved, when the suction nozzle 12 is taken down from the suction pipe 3, the filter screen 20 is driven to move downwards to the outer part of the suction pipe 3 under the action of the connecting component, the convenience of cleaning the filter screen 20 is improved, the service life of the filter screen 20 is prolonged, when the suction nozzle 12 is sleeved on the suction pipe 3, the filter screen 20 is driven to move to the inner part of the suction pipe 3 through the ejector rod 21, dust is filtered through the filter screen 20, the dust removal to the chip is realized, and the practicability of the picking equipment is improved.
Compared with the prior art, in the dust removal type chip picking device with the suction nozzle replacement function, the suction nozzles 12 of different types are switched through the adsorption mechanism, so that the picking device can pick up chips of different sizes, the practicability of the picking device is improved, compared with the prior adsorption mechanism, the adsorption mechanism enables the suction nozzles 12 connected with the suction pipe 3 to be at different heights with other suction nozzles 12 through the supporting component, the collision probability of other suction nozzles 12 with the chip in the process of adsorbing the chip by the suction nozzle 12 connected with the suction pipe 3 is reduced, not only is the possibility of the other suction nozzles 12 colliding with the chip reduced, but also the dust adsorbed on the chip can be collected through the dust removal mechanism, the quantity of the dust on the chip is reduced, the influence of the dust on the performance of the chip is reduced, the practicability of the picking device is improved, compared with the prior dust removal mechanism, the dust removal mechanism does not need to be driven by electricity, the energy saving performance of the mechanism is improved.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A dust removal type chip picking device with a suction nozzle replacing function comprises a suction pipe (3) and a vacuum pump (4), wherein one end of the suction pipe (3) is connected with the vacuum pump (4), and the dust removal type chip picking device is characterized by further comprising an adsorption mechanism and a dust removal mechanism, wherein the adsorption mechanism is arranged on the suction pipe (3), and the dust removal mechanism is arranged inside the suction pipe (3);
the adsorption mechanism comprises a lifting sleeve (6), a cylinder (2), a driving assembly, a moving rod (7), two sliders (9), at least two suction nozzles (12) and at least two supporting assemblies, wherein the lifting sleeve (6) is coaxially arranged with the suction pipe (3), the lifting sleeve (6) is sleeved on the suction pipe (3), the lifting sleeve (6) is in sliding connection with the suction pipe (3), the axis of the cylinder (2) is parallel to the axis of the suction pipe (3), the cylinder body of the cylinder (2) is fixedly connected with one end, close to the vacuum pump (4), of the suction pipe (3), the top end of the air rod of the cylinder (2) is fixedly connected with the lifting sleeve (6), the moving rod (7) is perpendicular to the axis of the suction pipe (3), the moving rod (7) is arranged on one side of the lifting sleeve (6), a sliding groove (8) is formed in the moving rod (7), the two sliding blocks (9) are respectively arranged at two ends of one side, close to the movable rod (7), of the lifting sleeve (6), the straight line where the two sliding blocks (9) are located is parallel to the movable rod (7), the sliding blocks (9) are matched with the sliding grooves (8), the sliding blocks (9) are arranged inside the sliding grooves (8), the sliding blocks (9) are in sliding connection with the sliding grooves (8), the driving assembly is arranged on one side, close to the movable rod (7), of the lifting sleeve (6), the driving assembly is connected with the movable rod (7), the suction nozzles (12) are arranged on one side, far away from the vacuum pump (4), of the movable rod (7), the number of the suction nozzles (12) is equal to that of the supporting assemblies, the suction nozzles (12) correspond to the supporting assemblies one to one, the suction nozzles (12) are connected with the movable rod (7) through the supporting assemblies, cylindrical notches matched with the suction pipes (3) are arranged at one ends, close to the suction pipes (3), of the suction nozzles (12), a suction hole is formed in the suction nozzle (12), and the suction hole and the suction nozzle (12) are coaxially arranged;
dust removal mechanism includes support ring (19), filter screen (20), two coupling assembling and two at least ejector pins (21), support ring (19) and straw (3) coaxial setting, support ring (19) set up the inside of the one end of keeping away from vacuum pump (4) in straw (3), filter screen (20) are perpendicular with the axis of straw (3), filter screen (20) set up the one side of keeping away from vacuum pump (4) in support ring (19), filter screen (20) are connected with support ring (19) through each coupling assembling, ejector pin (21) are parallel with the axis of straw (3), ejector pin (21) set up on the inner wall of the cylindricality notch bottom of suction nozzle (12).
2. The dust removal type chip picking apparatus with a suction nozzle replacing function according to claim 1, wherein the driving assembly comprises a motor (5), a gear (13) and a rack (1), the rack (1) is arranged on one side of the moving rod (7) close to the vacuum pump (4), the rack (1) is parallel to the moving rod (7), the motor (5) is fixedly connected with the lifting sleeve (6), the motor (5) is in transmission connection with the gear (13), and the gear (13) is meshed with the rack (1).
3. The chip picking apparatus with dust removal function for nozzle replacement according to claim 1, wherein the supporting assembly comprises two connecting units, the connecting units comprise a connecting rod (10), a connecting sleeve (11), a first spring (16) and a bump (15), the connecting rod (10) is parallel to the axis of the suction pipe (3), the connecting rod (10) is disposed on the side of the moving rod (7) far away from the vacuum pump (4), the connecting sleeve (11) is sleeved on the connecting rod (10), the connecting sleeve (11) is slidably connected with the connecting rod (10), the bump (15) is disposed on one side of the connecting rod (10), the bump (15) is disposed on the side of the connecting sleeve (11) near the vacuum pump (4), the connecting sleeve (11) and the bump (15) are abutted against each other, the first spring (16) is sleeved on the connecting rod (10), one end, far away from the vacuum pump (4), of the connecting rod (10) is fixedly connected with the connecting sleeve (11) through a first spring (16), the first spring (16) is in a compressed state, and the connecting sleeve (11) is fixedly connected with the suction nozzle (12).
4. The chip picking apparatus with suction nozzle replacement function according to claim 1, wherein the connection assembly comprises a lifting rod (17) and a second spring (18), the support ring (19) is provided with connecting holes on both sides, the lifting rod (17) is parallel to the axis of the suction pipe (3), the lifting rod (17) passes through the connecting holes, the lifting rod (17) is slidably connected with the connecting holes, one end of the lifting rod (17) far away from the vacuum pump (4) is fixedly connected with the filter screen (20), the second spring (18) is sleeved on the lifting rod (17), one end of the lifting rod (17) near the vacuum pump (4) is fixedly connected with the support ring (19) through the second spring (18), and the second spring (18) is in a compressed state.
5. The dust removal type chip pickup apparatus having a nozzle replacing function as claimed in claim 2, wherein said motor (5) is a servo motor.
6. The dust removal type chip pickup apparatus having a nozzle replacing function as claimed in claim 1, wherein the nozzle (12) is made of rubber.
7. The dust removal type chip pick-up apparatus with a suction nozzle replacement function according to claim 1, wherein a sealing ring is provided on an outer circumference of the filter screen (20), and the filter screen (20) is sealingly connected with an inner wall of the suction pipe (3) through the sealing ring.
8. The dust removal type chip pickup apparatus having a suction nozzle replacing function as claimed in claim 4, wherein a stopper ring is provided on an end of said lift lever (17) adjacent to said vacuum pump (4).
9. The dust removal type chip pickup apparatus having a suction nozzle replacing function as claimed in claim 3, wherein a stopper is provided on an end of said connecting rod (10) away from said vacuum pump (4).
10. The dust removal type chip pickup apparatus having a nozzle replacement function according to claim 1, wherein a stopper plate (14) is provided at an end of the slider (9) away from the lift sleeve (6), and the moving bar (7) is disposed between the stopper plate (14) and the lift sleeve (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910312841.9A CN110197813B (en) | 2019-04-18 | 2019-04-18 | Dust removal type chip picking equipment with suction nozzle replacing function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910312841.9A CN110197813B (en) | 2019-04-18 | 2019-04-18 | Dust removal type chip picking equipment with suction nozzle replacing function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110197813A CN110197813A (en) | 2019-09-03 |
| CN110197813B true CN110197813B (en) | 2021-11-05 |
Family
ID=67752059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910312841.9A Active CN110197813B (en) | 2019-04-18 | 2019-04-18 | Dust removal type chip picking equipment with suction nozzle replacing function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110197813B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110854051B (en) * | 2019-09-11 | 2022-03-01 | 深圳市奥维特机电有限公司 | Chip picking device |
| CN110880458B (en) * | 2019-11-21 | 2021-04-20 | 大连佳峰自动化股份有限公司 | Bonding head assembly |
| CN115593934B (en) * | 2022-10-27 | 2023-06-27 | 浙江名瑞智能包装科技有限公司 | Automatic lunch box conveying device on box supporting and sealing machine and conveying method thereof |
| CN116884907B (en) * | 2023-08-30 | 2024-04-12 | 翼龙半导体设备(无锡)有限公司 | IC semiconductor chip packaging equipment |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4490236B2 (en) * | 2004-11-08 | 2010-06-23 | ヤマハ発動機株式会社 | Nozzle replacement unit and surface mounter equipped with the same |
| JP2009105249A (en) * | 2007-10-24 | 2009-05-14 | Nec Electronics Corp | Pickup apparatus and pickup method |
| CN102472790B (en) * | 2009-08-02 | 2015-01-28 | Qmc株式会社 | Pickup apparatus and LED chip classification apparatus including same |
| CN202205727U (en) * | 2011-08-19 | 2012-04-25 | 关羽翔 | Suction nozzle device |
| KR101811646B1 (en) * | 2012-05-17 | 2017-12-26 | (주)테크윙 | Pick and place apparatus for test handler |
| KR101385443B1 (en) * | 2013-09-13 | 2014-04-16 | 이향이 | Pick-up transfer collet for semiconductor chip |
| CN203882129U (en) * | 2014-02-19 | 2014-10-15 | 深圳深爱半导体股份有限公司 | Chip pick-up failure warning device for chip bonding apparatus |
| CN106057717A (en) * | 2016-07-28 | 2016-10-26 | 合肥矽迈微电子科技有限公司 | Chip taking and placing device |
| CN207876822U (en) * | 2018-01-19 | 2018-09-18 | 苏州杰锐思自动化设备有限公司 | Multistation draws module |
-
2019
- 2019-04-18 CN CN201910312841.9A patent/CN110197813B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN110197813A (en) | 2019-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110197813B (en) | Dust removal type chip picking equipment with suction nozzle replacing function | |
| KR100609356B1 (en) | Conclusion of lens and assembly device for mobile phon | |
| CN116900139B (en) | Stamping type automobile die manufacturing equipment | |
| CN114314017A (en) | Bernoulli rotary type pneumatic and hydraulic double-control building material stacking device | |
| CN113334418A (en) | Device is got to manipulator intelligent robot clamp | |
| CN114161305A (en) | Do not shut down and change double-deck ray apparatus of sweeping of cell-phone screen | |
| CN113070512A (en) | Fixing device for drilling plate | |
| CN116673843A (en) | Electric insulator polishing device with cleaning structure and polishing method | |
| CN116116787A (en) | Dust collecting equipment is used in electronic product equipment | |
| CN217616204U (en) | Glass screen belt cleaning device | |
| CN110465926B (en) | Automatic workpiece taking system of industrial robot | |
| CN212100953U (en) | Discharging mechanism for production of multilayer automatic line | |
| CN210497475U (en) | Comprehensive dust removal device for automobile filter | |
| CN221244385U (en) | Air filtering device for oxygenerator | |
| CN113974496A (en) | Multi-functional robot of sweeping floor based on internet of things | |
| CN116682745B (en) | Semiconductor plastic package device | |
| CN117012685B (en) | Plug-in lifting mechanism | |
| KR200402963Y1 (en) | Condusion of lens and assembly device for mobile phon | |
| CN221396052U (en) | Food material taking equipment | |
| CN219424640U (en) | Automatic cleaning device of cyclone dust collector | |
| CN103908195A (en) | Vacuum dust collector and cleaning method for filtering device thereof | |
| CN220702560U (en) | Feeding machine | |
| CN211470004U (en) | Trigger mechanism of rotary pickup device and rotary pickup device thereof | |
| CN220693418U (en) | Welding surface cleaning device | |
| CN220633464U (en) | Anti-blocking vacuum unit air extraction filter device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |