WO2011016158A1 - Dispositif et procédé de marquage - Google Patents

Dispositif et procédé de marquage Download PDF

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Publication number
WO2011016158A1
WO2011016158A1 PCT/JP2010/001376 JP2010001376W WO2011016158A1 WO 2011016158 A1 WO2011016158 A1 WO 2011016158A1 JP 2010001376 W JP2010001376 W JP 2010001376W WO 2011016158 A1 WO2011016158 A1 WO 2011016158A1
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WO
WIPO (PCT)
Prior art keywords
light beam
marking
unit
irradiation position
speed
Prior art date
Application number
PCT/JP2010/001376
Other languages
English (en)
Japanese (ja)
Inventor
谷川央樹
森英治
Original Assignee
東レエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東レエンジニアリング株式会社 filed Critical 東レエンジニアリング株式会社
Priority to CN201080032097.4A priority Critical patent/CN102470483B/zh
Publication of WO2011016158A1 publication Critical patent/WO2011016158A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material

Definitions

  • the present invention relates to an apparatus and method for marking an identification code or an arbitrary pattern on a flat panel display or a semiconductor chip.
  • an identification code for example, a two-dimensional code
  • the identification code is added (hereinafter, marked) by direct marking or a photolithography method.
  • the identification codes of the FPD and the semiconductor chip are respectively marked so as to correspond to the panels and chips arranged in one substrate.
  • an arbitrary pattern such as an alignment mark, a manufacturer's name or logo mark, characters, numbers, or other figures or symbols indicating additional information such as the product name, model or manufacturing lot of the marking object May be marked.
  • the marking method is appropriately determined in consideration of the material and size of the marking object, the time given for marking the identification code and the arbitrary pattern (hereinafter referred to as tact time), and the like.
  • Patent Document 1 a maskless exposure apparatus and method using a laser beam and a digital micromirror device are disclosed. According to this apparatus and method, since an arbitrary pattern can be marked by exposure on a marking object moving at a constant speed, it is widely used as a technique for marking a large number of identification codes within a predetermined time. It has been.
  • Patent Document 2 it is possible to periodically measure and adjust a positional shift caused by a change in the angle of a galvano mirror with time, thereby improving the laser irradiation position accuracy, that is, the processing position accuracy.
  • the time for irradiating energy to perform the marking is Tx 1 second.
  • the marking object is moved at a predetermined speed, and it is necessary to move the identification code and an arbitrary pattern so as to follow the marking object.
  • the identification code or the arbitrary pattern When marking one identification code or an arbitrary pattern, if there is a speed difference between the moving speed of the substrate and the speed at which the identification code or the arbitrary pattern is moved, the identification code or the arbitrary pattern is shaken. Will occur. If it is shifted by one dot constituting the identification code or by the minimum dot or line width dimension forming the arbitrary pattern, correct recognition cannot be performed.
  • the identification code or any pattern in the marking is blurred, there is a possibility that correct recognition may not be possible when trying to identify later.
  • the identification code and the arbitrary pattern in the state where the blur is included may be deteriorated in the identification ability when accompanied by scratches or dirt.
  • the time that the energy is applied to the predetermined place will be reduced, and the identification code or arbitrary pattern will be thinly marked or faint, which is correct when trying to identify later. It can be a cause of being unable to identify.
  • “Blur” here is not a mere positional deviation that is not marked at a predetermined position, but a relative speed does not become zero during the time required for marking, and a speed difference is generated. It means moving.
  • a light beam deflecting means for example, a mirror attached to a galvano scanner
  • a light beam deflecting means as means for moving an identification code or an arbitrary pattern during marking.
  • FIG. 9 shows a time chart of each part operation by the conventional marking device and method.
  • the horizontal axis represents time t
  • t1 to t20 represent time.
  • a broken line is attached as an auxiliary line so that the time relationship of event occurrence in each figure becomes clear. The same broken line means the same time.
  • FIG. 9A is a diagram showing a change in speed of the marking object 10.
  • the vertical axis represents the speed of the marking object 10: Vx.
  • the marking object 10 starts to move in the X direction.
  • the marking object 10 reaches a preset moving speed and continues to maintain the speed.
  • the marking object 10 starts decelerating at time t19 and stops at time t20.
  • FIG. 9B is a diagram showing the irradiation timing of the marking light beam for marking the identification code.
  • the vertical axis represents the irradiation of the marking light beam 309: Em.
  • the marking light beam 309 is irradiated between times t3 and t4, between t9 and t10, and between t15 and t16.
  • FIG. 9C is a diagram showing a change in speed at which the deflection angle of the deflecting means is changed.
  • the vertical axis represents the speed of changing the change angle: Vm.
  • the speed fluctuation during the marking time while moving is expressed as ⁇ Vm.
  • FIG. 9 is a figure which showed the change of the angle of a deflection
  • the vertical axis represents the angle of the deflection means: ⁇ m.
  • the angle ⁇ m is 0 degree when the marking light ray enters the mirror 308M and the outgoing light ray is 90 degrees, the minus direction is greater than 90 degrees, and the plus direction is less than 90 degrees.
  • the angle of the deflecting means is expressed as ⁇ m, and it keeps moving in the positive direction constantly from time t2 to t5, from t8 to t11, from t14 to t17, from time t6 to t7, from t12 to t13, from t18 to t19. In the meantime, it is required to keep moving in the negative direction.
  • the moving distance does not change to be constant, and a slight displacement occurs.
  • the relative speed between the marking object 10 and the marking light beam 309 does not become zero due to the influence of the speed variation of the deflection means: ⁇ Vm, and the identification code to be marked is blurred. It will occur.
  • the galvano scanner used as a deflecting means may vary in angular velocity even if the same control parameters are set due to continuous use for a long time or changes in the temperature and humidity of the outside air.
  • the above-mentioned management work is to prepare for the occurrence of a defect that does not know when it occurs by paying attention to an identification code or an arbitrary pattern that is not a main part of the final product, and it has been desired to omit it.
  • an object of the present invention is to provide means for measuring a change in the deflection angular velocity of the light beam deflection means with respect to the moving speed of the marking object before marking an identification code or an arbitrary pattern.
  • a marking device is a device that performs marking by irradiating an object that moves at a predetermined speed with a marking beam, and includes a moving unit, a beam irradiation position detection unit, and a beam irradiation unit. And a determination unit.
  • the moving unit moves the object at a predetermined speed.
  • the light irradiation position detection unit moves in synchronization with the movement unit.
  • the light beam irradiation unit is a device that irradiates the light irradiation position detection unit with the aiming light beam, and includes a light beam deflection unit that deflects the aiming light beam following the movement of the light irradiation position detection unit.
  • the determination unit determines a change in the irradiation position of the aiming light beam applied to the light irradiation position detection unit.
  • the light beam deflecting unit may have a speed gain that is a set value of speed for changing the deflection angle by following the movement of the light beam irradiation position detecting unit.
  • the marking device may further include a speed gain changing unit that changes the speed gain of the light beam deflecting unit so as to reduce the change in the irradiation position of the aiming light beam based on the determination result from the determining unit.
  • the marking device may further include a set value registration unit and a comparison unit.
  • the set value registration unit registers a set value indicating an allowable range with respect to a change in the irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit.
  • the comparison unit compares the value of the determination result from the determination unit with the set value indicating the allowable range.
  • the moving unit may reciprocate the object, and two light irradiation position detectors may be provided for one light irradiation unit.
  • a marking method is a marking method in which marking is performed by irradiating an object that moves at a predetermined speed with a marking light beam, and includes the following steps.
  • ⁇ Irradiation step for deflecting the aiming beam so that the beam irradiation position detection unit follows the aiming beam while moving the beam irradiation position detection unit at a predetermined speed by the moving unit ⁇
  • the aiming beam irradiated to the beam irradiation position detection unit Detection step for detecting a change in irradiation position
  • the irradiation step may include a step of deflecting the light beam so as to irradiate the light beam irradiation position detection unit with the aiming light beam.
  • the step of deflecting the light beam may have a speed gain that is a setting value of a speed for changing the deflection angle by following the movement of the light beam irradiation position detecting unit.
  • the method may further include a speed gain changing step of changing a speed gain of the light beam deflection step so as to reduce a change in the irradiation position of the aiming light beam based on a determination result from the determination unit.
  • the speed gain changing step includes a setting value registration step for registering a setting value indicating an allowable range with respect to a change in the irradiation position of the aiming light beam irradiated to the light irradiation position detection unit, and a determination result value from the determination unit and the allowable value
  • a comparison step of comparing with a set value indicating the range may be included.
  • the aiming light beam may be irradiated to the light beam irradiation position detection unit from a plurality of locations.
  • the light irradiation position detection unit may be provided in two places. In the irradiation step, two light beam position detection units may be irradiated with the aiming light beam while reciprocating the object.
  • the blur can be detected at an early stage. Further, since readjustment can be performed so that the influence of blur is eliminated, the marking quality can be improved.
  • FIG. 1 is a perspective view showing an example of an embodiment of the present invention.
  • the three axes of the orthogonal coordinate system are X, Y, and Z
  • the XY plane is the horizontal plane
  • the Z direction is the vertical direction.
  • the direction of the arrow is represented as the top
  • the opposite direction is represented as the bottom.
  • the marking device 1 includes a stage 2 for moving the marking object 10 in the X direction, and a marking head mounted on a gate-shaped structure including a column 31 and a beam 32 mounted on the device base 20.
  • Part 3 a position detector 4 attached to the table 22, a controller for controlling the equipment of each part, and a control part 9 in which equipment for operating the apparatus is housed. Has been.
  • the stage unit 2 includes an X-axis stage 21 that is mounted on the apparatus base 20 and is movable in the X direction, and a table 22 that is mounted on the X-axis stage.
  • the marking object 10 is placed on the table 22. Grooves and holes are provided on the surface of the table 22, and the grooves and holes are connected to a vacuum source via an opening / closing control valve.
  • the marking object 10 placed on the table 22 is attracted and held by a negative pressure so that it does not shift during movement.
  • a marking light beam 309 is appropriately emitted from the marking head unit 3, and marking is performed on a pre-registered place on the marking object 10.
  • the suction holding is released.
  • the operation of taking out the substrate after marking or placing the substrate to be marked next can be performed manually or using a transfer robot.
  • the operator can register necessary information or perform operations while confirming the information displayed by the information output means 92 using the information input means 91 of the control unit 9.
  • the operator can know the end of production and the abnormality of the apparatus by listening to the sound emitted from the reporting means 93 or by viewing the display state while the apparatus is in operation.
  • FIG. 2 is a principal part perspective view which shows an example of embodiment of this invention.
  • the marking head unit 3 includes a light source 301, optical components such as a mirror 302 and relay lenses 303 and 304, an identification code generation unit 305, an aperture 306, a galvano scanner 307S, and a mirror 307M attached to the galvano scanner 307S. , A galvano scanner 308S and a mirror 308M attached to the galvano scanner 308S, and the apparatus is appropriately arranged and configured.
  • the direction and size of the light beam emitted from the light source 301 of the marking head unit 3 can be changed by optical components such as the mirror 302 and the relay lenses 303 and 304.
  • the light whose direction and size are changed as described above passes through the identification code generation means 305 and becomes a light corresponding to the identification code.
  • the light beam corresponding to the identification code is irradiated toward the marking object 10 as the marking light beam 309 while controlling the irradiation direction using the galvano scanners 307S and 308S and the mirrors 307M and 308M.
  • the mirror 307M is used in a fixed state.
  • the galvano scanner 307S can be omitted.
  • the identification code generating means 305 is a reflection type that forms a light beam corresponding to the identification code by changing the angle of the micromirrors arranged in a matrix, or the transmittance of a mask made of a transmissive material arranged in a matrix.
  • Examples include those applying a micromirror device as a reflection method and those applying a liquid crystal device as a transmission method.
  • Examples of means for sequentially deflecting the irradiation beam include an acousto-optic element, or a combination of a galvano scanner and a reflection mirror.
  • Examples of the light source 301 of the marking light beam 309 include light emitting means such as a lamp, LED, laser diode, and laser transmitter.
  • the marking head unit 3 may be moved along the beam 32 even when it is fixed to the beam 32.
  • a Y-axis stage 33 movable in the Y direction may be attached to the beam 32 and the marking head unit 3 may be attached on the Y-axis stage 33.
  • the marking device 1 Since the marking device 1 has the above-described structure, the marking light beam is deflected at the same speed while the marking object is moved in the X direction, and an identification code is marked at an arbitrary position of the marking object. Can be done.
  • control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a notification unit 93, an information recording unit 94, and device control.
  • a unit 95 is connected and included.
  • Examples of the control computer 90 include those equipped with a numerical operation unit such as a microcomputer, a personal computer, and a workstation.
  • Examples of the information input means 91 include a keyboard, a mouse, and a switch.
  • Examples of the information output unit 92 include an image display display and a lamp.
  • Examples of the reporting means 93 include those that can alert the operator, such as a buzzer, a speaker, and a lamp.
  • Examples of the information recording means 94 include semiconductor recording media, magnetic recording media, magneto-optical recording media, such as memory cards and data disks.
  • Examples of the device control unit 95 include devices called programmable controllers and motion controllers.
  • the device control unit 95 includes an X-axis stage 21, a Y-axis stage 33, a position detector 4, a light source 301, an identification code generation unit 305, galvano scanners 307S and 308S, and other control devices (not shown). Are connected.
  • the galvano scanners 307 ⁇ / b> S and 308 ⁇ / b> S have a speed gain that is a set value of speed for changing the deflection angle by following the movement of the position detector 4.
  • the control computer 90 can change the speed gain of the galvano scanner.
  • the position detector 4 can output a signal indicating how much light in the light receiving unit is irradiated with light when the light receiving unit is irradiated with light.
  • the current value changes corresponding to the irradiation position of the aiming light beam. Therefore, by measuring the current value as the irradiation position information, it is possible to know the fluctuation of the light receiving position of the aiming light beam from the change in the current value.
  • the current value is measured by the device control unit 95.
  • the device control unit 95 can operate or stop each device by giving a control signal to each connected device.
  • the set marking positions and marking conditions can be registered in the information recording means 94 connected to the control computer 90, and can be read out, edited and changed as appropriate.
  • FIG. 4 is a flowchart showing the marking procedure at each step. Each step in FIG. 4 is mainly executed as a result of the control operation of the control computer 90. First, the marking object 10 is placed on the table 22 (s101), and the marking object 10 is sucked and held (s102).
  • the alignment mark on the marking object 10 is read (s103), and an alignment operation is performed.
  • the X-axis stage 21 drives the table 22 to move the marking object 10, and the marking head unit 3 is directed to the position detector 4 moving in synchronization with the movement of the marking object 10. Is irradiated (s104). Specifically, in the marking head unit 3, the galvano scanner 308 ⁇ / b> S changes the angle of the mirror 308 ⁇ / b> M at a constant speed so that the aiming light beam follows the light receiving unit of the position detector 4.
  • the control computer 90 measures a deviation amount of the irradiation position of the aiming light beam irradiated to the light receiving unit of the position detector 4 (s105), and determines whether or not it is within a preset appropriate range. (S106). Specifically, the control computer 90 registers in advance in the information recording means 94 a set value indicating an allowable range for a change in the irradiation position of the aiming light beam irradiated to the light irradiation position detector 4, and the aiming computer The deviation amount of the irradiation position of the light beam is compared with a set value indicating an allowable range.
  • the identification code generating means 305 generates an identification code and irradiates the marking light beam 309 corresponding to the identification code toward the marking object 10. And marking is performed (s107). Also at this time, the galvano scanner 308S changes the angle of the mirror 308M at a constant speed to cause the marking light beam 309 to follow the light receiving portion of the position detector 4.
  • Case A Marking is performed (s111).
  • Case B Marking is interrupted (s112). Thereafter, the operator is informed through the notification means 93 that the deviation amount is out of the appropriate range (s113). Thereafter, the adsorption of the marking object 10 is released (s108), the marking object 10 is taken out from the table 22 (s109), and maintenance work is performed.
  • Case C The speed gain of the galvano scanner is changed (s114), and the displacement is remeasured (s115). More specifically, the control computer 90 changes the speed gain of the galvano scanner based on the detection result from the position detector 4 so as to reduce the displacement amount of the irradiation position of the aiming light beam. Thereafter, it is determined whether or not the amount of positional deviation is within an appropriate range (s116), and if it is within the appropriate range, marking is performed (s107).
  • the speed gain of the galvano scanner is changed again (s114), and the positional deviation amount is measured again (s115). Thereafter, it is determined whether or not the amount of positional deviation is within an appropriate range (s116), and if it is within the appropriate range, marking is performed (s107). If the speed gain does not fall within the proper range even if the speed gain is changed many times, a warning may be issued (not shown).
  • the marking object 10 can be carried out in a state where it is not placed on the table 22.
  • the aiming beam is irradiated to the position detector 4.
  • the galvano scanner 308 ⁇ / b> S is rotated, and the angle of the mirror 308 ⁇ / b> M is changed at a constant speed so that the aiming light beam continues to be irradiated following the light receiving portion of the position detector 4.
  • a deviation amount of the irradiation position of the aiming light beam irradiated to the light receiving unit of the position detector 4 is measured, and it is determined whether or not it is within a preset appropriate range.
  • the marking object 10 is placed on the table 22 and marking is started. If the deviation amount of the irradiation position is not within an appropriate range, the speed gain of the galvano scanner is changed and the positional deviation amount is measured again.
  • the deviation amount of the irradiation position of the aiming light beam is measured again to determine whether or not the deviation amount is within an appropriate range. If the amount of positional deviation is within the appropriate range, the marking object 10 is placed on the table 22 and marking is started.
  • the misalignment measurement and judgment steps s104 to s106 may be omitted in the above steps s101 to s109. May be performed as appropriate, for example, by using a time during which the marking object is not marked.
  • FIG. 5 is a side view showing a state in which the aiming beam is irradiated to the position detector.
  • a state at a certain time Tx 0 is illustrated by a solid line.
  • the deflected aiming light beam 309A is irradiated toward the position detector 4 attached to the table 22 by the mirror 308M attached to the galvano scanner 308S of the marking head unit 3.
  • the aiming light beam 309A may be the same as the marking light beam 309, a part of which may be used, or may be generated by controlling the identification code generation unit 305 so as to have a predetermined pattern.
  • a means for irradiating a light beam that can be used as the aiming light beam 309A may be provided in the marking head unit.
  • the marking object 10 is held by suction on the table 22 and is moving at the same speed as the position detector 4, and the relative speed between them is zero.
  • the table 22a, the marking object 10a, and the position detector 4a are directed rightward in the X direction (that is, indicated by an arrow M, as indicated by a thin two-dot chain line). Move in the same direction).
  • the aiming light beam 309A controls the galvano scanner 308S so as to follow it, and the angle of the mirror 308M of the galvano scanner 308S is changed.
  • the position of the light beam irradiated to the light receiving unit of the position detector 4 Does not change. At this time, it can be said that the relative speed is the same. If the relative speed is the same, there is no positional deviation during marking, and the identification performance of the marked identification code is improved.
  • the set value of the speed for changing the deflection angle following the movement of the marking object 10 is set as the speed gain and registered in the galvano scanner 308S. If the set value of the speed gain is not changed, the speed at which the actual deflection angle changes is constant within a short time. However, when viewed over a long period of time, changes over time appear and change occurs.
  • a PSD position detection element
  • the position detector 4 includes an element that outputs a current corresponding to the position of the center of gravity of the irradiated light.
  • the current signal may be measured directly or converted into a voltage signal using a resistor.
  • a position detector 4 having a high frequency response performance and capable of outputting a signal every 1 / 100th of the time Tx 1 second required for marking is selected. By doing so, it is possible to measure the position repeatedly about 100 times while irradiating the aiming light beam for Tx for 1 second, and a signal corresponding to the light receiving position of the aiming light beam can be output each time.
  • a position detection method that matches the wavelength and output of the marking beam using a different aiming beam emitting means Select a vessel.
  • the position detector is irradiated with the aiming beam for the same time as that required for marking the identification code. If the aiming beam continues to be applied to the same location on the position detector, the relative speed is zero and the mirror tracking speed is appropriate. In this state, a very clear identification code is marked.
  • the aiming light beam continues to irradiate a predetermined range on the position detector (for example, a value that is sufficiently small for one dot of the identification code)
  • a predetermined range on the position detector for example, a value that is sufficiently small for one dot of the identification code
  • the relative velocity is small and the marked identification is performed.
  • the code is substantially clear and does not interfere with subsequent recognition.
  • the predetermined range may be appropriately set in consideration of the size of the identification code, the contrast at the time of identification, the recognition accuracy actually required, the error level, and the like.
  • the irradiation position of the marking light beam 309 is changed using the position detector 4 that moves in synchronization with the moving means of the marking object 10. Can be detected.
  • the setting value (speed gain) for deflecting the deflection angle of the marking light beam 309 can be changed and adjusted so that the speed fluctuation: ⁇ Vm is minimized.
  • a change in the irradiation position of the aiming light beam applied to the position detector 4 is measured, and it is determined whether or not the marking quality can be maintained by comparing whether or not the change is within a preset allowable range. I can do it.
  • FIG. 6 is a perspective view showing an example of another embodiment of the present invention.
  • FIG. 6 two marking head portions are arranged on the Y-axis stage 33. Thereby, marking can be performed at two places at the same time.
  • the number of identification codes increases, the number of codes that can be marked within a predetermined time may be limited. However, by increasing the number of marking heads, the number of codes that can be marked within a predetermined time can be increased.
  • one position detector 4 corresponds to two marking head units 3.
  • the irradiation area of the plurality of marking head units 3 is wide, and the aiming beam can be irradiated to the position detector 4 attached to the mounting table 22.
  • a uniaxial slider mechanism is attached to the mounting table, and a position detector is attached on the uniaxial slider so that the position detector can be moved in the Y direction. I can do it.
  • a common position detector in this way, there is an effect of eliminating variations in position detection accuracy due to variations among individual measuring instruments.
  • the number of position detectors may be increased in accordance with the number of marking heads.
  • FIG. 7 is a perspective view showing an example of another embodiment of the present invention.
  • the position detector 4 is provided at both ends of the mounting table 22 in the X direction.
  • the position of the pair of position detectors 4 in the Y direction is the same. Even if the number of identification codes increases, marking can be performed by reciprocating as a method of increasing the number of codes that can be marked within a predetermined time without increasing the number of marking heads. Generally, if there is one position detector for one marking head, it is possible to confirm immediately before exposure of the identification code only on either the forward path or the backward path.
  • the galvano scanner when the mounting table 22 is moved in the direction of the arrow in the X direction.
  • the rotation speed of the galvano scanner when the mounting table 22 is moved in the direction opposite to the arrow in the X direction can be confirmed immediately before marking.
  • the processing time can be shortened even when the marking operation is performed in a reciprocating manner.
  • marking object is formed into a continuous sheet
  • the present invention can be used for marking other than a flat plate.
  • the marking object may be a continuous sheet.
  • FIG. 8 shows a perspective view of a continuous sheet marking device, which is an example of another embodiment of the present invention.
  • the three axes of the orthogonal coordinate system are X, Y, and Z
  • the XY plane is the horizontal plane
  • the Z direction is the vertical direction.
  • the direction of the arrow is represented as the top
  • the opposite direction is represented as the bottom.
  • the marking device 5 is attached to the device frame 50, a portal structure composed of a column 51 and a beam 52 attached to the device frame 50, a Y-axis stage 53 attached to the beam 52, and the Y-axis stage 53.
  • the marking head unit 3 and the control unit 9 are included.
  • the apparatus frame 50 includes feeding rollers 54a and 54b for feeding and transporting the continuous sheet-like marking object 11, and winding rollers 55a and 55b for winding and transporting the marking object 11. Is attached.
  • the marking object 11 is sent and moved at a predetermined speed by the rotation operation of a motor (not shown) attached to the take-up roller 55c (not shown).
  • the position detector 4b is attached to the end of the take-up roller 55a, and can be rotated in synchronization with the feed movement of the marking object 11.
  • the marking head unit 3 and the control unit 9 of the marking device 5 have the same device configuration as that of the marking device 1, and further include the motor attached to the position detector 4b of the winding roller 55a and the winding roller 55c. It is connected.
  • the position detector 4b is connected to the device control unit 95 of the control unit 9 via an electrical contact mechanism (so-called rotary joint) capable of infinite rotation.
  • the position detector 4b at the end of the take-up roller 55a only needs to move in synchronism with the rotation of the take-up roller 55a.
  • the position detector 4b and the device control unit 95 of the control unit 9 may be connected without the electric contact mechanism capable of infinite rotation.
  • the marking device 5 Since the marking device 5 has the above-described configuration, it is possible to mark the identification code by irradiating an aiming ray to a continuous sheet-like marking object and measuring the blur of the marking.
  • the present invention can be used for marking by exposure.
  • the photosensitive resin is applied to the marking object and the light beam used for marking is a light beam having a wavelength capable of curing or softening the photosensitive resin such as ultraviolet rays
  • the exposure method is used for marking. If the present invention is used for the marking of the exposure system, it is possible to detect in advance the occurrence of blurring in the identification code by detecting a shift in relative movement speed without going through a development process. Therefore, it is possible to eliminate the time and waiting time for the developing process.
  • the present invention can also be used for direct marking that directly processes the surface of a marking object. If the light source or the marking beam is set to the wavelength or energy of the beam that can change the surface state of the marking object, the direct marking is performed. If the present invention is used for the direct marking, it is possible to detect in advance that the identification code is shaken by detecting a shift in the relative movement speed before directly marking the manufactured product. Therefore, it is possible to prevent a product with a defective identification code.
  • the present invention can also be used for inner marking in which marking is performed inside a marking object. If the conditions for changing the inside of the material of the marking object are satisfied as the light source or the marking light beam, the inner marking is obtained. In the inner marking, if there is a marking defect, it cannot be re-marked after the surface is polished. If the present invention is used for inner marking, it is possible to detect in advance that the identification code is shaken by detecting a shift in the relative movement speed before directly marking the manufactured product. Therefore, it is possible to prevent a product with a defective identification code.
  • the present invention can be applied as long as it moves while maintaining a proportional movement speed relationship, and can be handled as the same speed by calculating using a proportional coefficient. Therefore, the present invention can be applied to cases other than the case where the table and the position detector move at the same moving speed on the same plane.
  • arbitrary pattern generating means that can generate an arbitrary pattern in place of the identification code generating means 305 described above.
  • the arbitrary pattern include alignment marks, manufacturer names and logo marks, characters, numbers, and other figures and symbols indicating additional information such as product names, types, and manufacturing lots of marking objects.
  • a circuit pattern for electrical wiring, a processing pattern for shaping, and the like can be handled as an arbitrary pattern.
  • an arbitrary pattern can be marked on the marking object moving at a predetermined speed by following the movement of the marking object. And since the apparatus and method of this invention are used, the blurring at the time of marking arbitrary patterns can be prevented.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de marquage qui effectue un marquage en rayonnant une lumière de marquage sur un objet se déplaçant à une vitesse prédéterminée, le dispositif étant muni d’une table (22), d’un détecteur (4) de position, d’une partie (3) de tête de marquage et d’un ordinateur (90) de commande. La table (22) déplace l’objet à la vitesse prédéterminée. Le détecteur (4) de position se déplace de façon synchrone avec la table (22). La partie (3) de tête de marquage est un dispositif destiné à rayonner une lumière collimatée sur le détecteur (4) de position et est dotée d’un dispositif (308S) de balayage galvanométrique qui dévie la lumière collimatée en fonction du mouvement du détecteur (4) de position. L’ordinateur (90) de commande détecte un changement de la position d’irradiation de la lumière collimatée rayonnée sur le détecteur (4) de position.
PCT/JP2010/001376 2009-08-03 2010-03-01 Dispositif et procédé de marquage WO2011016158A1 (fr)

Priority Applications (1)

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CN201080032097.4A CN102470483B (zh) 2009-08-03 2010-03-01 标记装置及其方法

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JP2009181054 2009-08-03
JP2009-181054 2009-08-03

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WO2011016158A1 true WO2011016158A1 (fr) 2011-02-10

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JP (1) JP5118723B2 (fr)
KR (1) KR20120031093A (fr)
CN (1) CN102470483B (fr)
TW (1) TWI454687B (fr)
WO (1) WO2011016158A1 (fr)

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CN112017991A (zh) * 2019-05-28 2020-12-01 爱思开海力士有限公司 半导体装置的制造系统及使用该系统的标记方法
EP3702093A4 (fr) * 2017-10-25 2021-09-29 Nikon Corporation Dispositif de traitement et procédé de fabrication d'un corps en mouvement
WO2023180201A1 (fr) * 2022-03-23 2023-09-28 Bayerische Motoren Werke Aktiengesellschaft Procédé de prétraitement d'une surface d'une pièce

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JP5896459B2 (ja) * 2012-03-06 2016-03-30 東レエンジニアリング株式会社 マーキング装置及び方法
JP5715113B2 (ja) * 2012-12-14 2015-05-07 株式会社片岡製作所 レーザ加工機
CN103091339A (zh) * 2013-03-01 2013-05-08 苏州爱特盟光电有限公司 一种用于键合工艺微缺陷检测的方法
CN104637395A (zh) * 2013-11-13 2015-05-20 上海和辉光电有限公司 用于基板上的标识结构、基板以及形成基板的标识结构的方法
CN110018179A (zh) * 2019-05-10 2019-07-16 河北视窗玻璃有限公司 一种玻璃缺陷标记设备和玻璃板生产方法
JP7418169B2 (ja) * 2019-08-27 2024-01-19 株式会社ディスコ レーザー加工装置

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EP3702093A4 (fr) * 2017-10-25 2021-09-29 Nikon Corporation Dispositif de traitement et procédé de fabrication d'un corps en mouvement
CN112017991A (zh) * 2019-05-28 2020-12-01 爱思开海力士有限公司 半导体装置的制造系统及使用该系统的标记方法
WO2023180201A1 (fr) * 2022-03-23 2023-09-28 Bayerische Motoren Werke Aktiengesellschaft Procédé de prétraitement d'une surface d'une pièce

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CN102470483A (zh) 2012-05-23
KR20120031093A (ko) 2012-03-29
TW201105951A (en) 2011-02-16
JP2011051016A (ja) 2011-03-17
TWI454687B (zh) 2014-10-01
JP5118723B2 (ja) 2013-01-16
CN102470483B (zh) 2015-04-01

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