201105951 四、指定代表圖： (一）本案指定代表圖為：第（4 )圖。 (一）本代表圖之元件符號簡單說明. ，五、本案若有化學式時，請揭示最能顯示發明特 徵的化學式： 六、發明說明： 【發明所屬之技術領域】 本發明是關於標記（marking)識別碼（id co(ie)或任意 的圖案（pattern)於平面面板顯示器（flat panel dispUy) 或半導體晶片（semiconductor chip)等之裝置及方法。 【先前技術】 在平面面板顯示器（以下為FPD)或半導體晶片的製程 中，為了可追蹤前述製程中的製造條件或與各種製造有關 的資訊的履歷而附加有被稱為識別碼的固有的I D (例如二 維碼（two-dimensional code)等）。而且，前述識別碼是藉 » 由直接標記（direct marking)或光餘刻方法 (photolithography method)附加（以下為標記）。 Γ» 前述FPD或前述半導體晶片往往被配置多數個於一個 基板（substrate)内，總括被製造。因此，前述FPD或前述 半導體晶片的識別碼是對應配置於一個基板内的面板或晶 片而各自被標記。 而且，前述識別碼外，另外也有標記有顯示對準標記 2 201105951 (alignment mark)或製造廠的名稱或標誌（logomark)、標 記對象物的品名或型式或製造批等的附加資訊之文字、數 字、其他的圖形或符號等任意的圖案的情形。 , 標記方式是考慮標記對象物的材質或大小、為標記前 述識別碼或前述任意圖案而給予的時間（以下為作業時間 (tact time))等而適宜被決定。 依照專利文獻1，揭示有使用雷射光與數位微鏡裝置 (digital micromirror device)之無罩幕（maskless)的曝 光裝置（exposure eqUipment)及方法。依照該裝置及方 法’因可藉由曝光對等速移動的標記對象物標記任意的圖 樣，故作為在規定的時間内標記多數個識別碼的手法被廣 泛地使用。 依照專利文獻 2，定期地測定、調整因電流鏡 (galvano-mirror)的經時的角度變化造成的偏移，可提高 雷射照射位置精度，亦即加工位置精度。 [專利文獻1 ]日本國特開200 6-2595 1 5號公報 [專利文獻2]日本國特開2002-090682號公報 發明内容】 為了標記識別碼或任意的圖案，需朝標記對象 、 物照射 規定時間能量。設為進行前述標記而照射能量的時 秒 曰1為Tl 前述時間Τχι秒之間，標記對象物被以規定 叹*疋的速度移 動’為了追蹤該標記對象物’需使識別碼或任意 ^ 團案移 3 201105951 動0 在標記一個識別碼或任意的圖案時，若在前述基板的 移動速度與使前述識別碼或任意的圖案移動的迷度2間產 % 綣 生速度差，則識別碼或任意的圖案會產生模糊。如果構成 前述識別碼的丨點份及/或僅形成前述任意的圖案的最小 點及/或僅線寬的尺寸偏移，則無法進行正確的識別。 即使速度變化更小’若成為標記中的識別碼或任意的 圖案產生模糊的狀態，則之後在想識別的情形下，有無法 進行正確的識別的可…而且，包含有前述模糊的：態 的識別碼或任意的圖案在伴隨傷痕或污染的情形下也有識 別能力降低的可能性。 而且’若在標記中有模糊’則能量被照射到規定的場 所的時間減少，識別碼或任意的圖案被淺淺地標記，或字 跡模糊不清，之後在想識別的情形下，會成為無法進行正 確的識別的原因。 ^此處所謂的[模糊]是意味著未在預先規定的位置被標 記之不僅是偏淨多，也是在標記所花費的時間中，相對速度 不成為零而產生速度差，相互相對地運動。 因此，之後透過可正確地識別識別碼或任意的圖案的 。《質進灯標記，或為了維持該品質而消除前述標記中的速 度差很重要。 使標記中的識別碼或任意的圖案移動的手段（means) 有光線偏向手段（例如在電流掃描器（gal vano scanner)安 裝鏡子（mirr〇r)者）。為了消除標記中的速度差，需使基板 ί S] 4 201105951 的移動速度與别述光線偏向手段中的偏向速度相同，持續 維持該狀態。 在圖7(a)~(d)顯示依照習知的標記裝置及方法的各部 k動作的時序圖（time chart)。在各圖中，橫軸是表示時間 • t，ΐ卜t2〇是表示時刻。為了使各圖中的現象產生的時間 關係明確’附加虛線當作輔助線。前述同一條虛線上是意 味著同一時刻。 圖7(a)是顯示標記對象物的速度變化之圖。縱軸是 表示標記對象物10的速度：Vx。 在時刻11標記對象物1 〇開始移動於X方向，在時刻 12到達預先設定的移動速度’並持續維持該速度。標記對 象物1 0若標記動作結束，則在時刻t丨9開始減速，在時刻 t20使其停止。 圖7 (b )是顯示為了標記識別碼的標記光線的照射時序 (t i m i ng )之圖。縱軸是表示標記光線3 〇 9的照射：Em。標記 光線3 0 9在時刻13〜14間、19〜11 0間、11 5〜11 6間被照射。 圖7(c)是顯示變更偏向手段的偏向角度的速度的變化 之圖。縱轴是表示變更變更角度的速度：Vni。 w 偏向手段的角速度被要求在時刻t2〜t5間、t8〜tli " 間、〜tl7間於正方向以一定速度移動，在時刻u〜t7 間、tl2~tl3間、tl8~tl9間於負方向以一定速度移動。 特別是被要求一邊移動’ 一邊進行標記之時刻13 ~ 14 間' 19〜11 0間、11 5〜11 6間的等速性。但是實際上稍微有 延遲響應（delay response)及 / 或過衝（overshoot)等，―、 201105951 者發生速度變動等。通常該等誤差成分是藉由控制參數被 最佳設定而被調整俾成最小。 將一邊移動一邊進行標記的時間中的前述速度變動表 u 示成A Vm。 ， 圖7(d)是顯不偏向手段的角度的變化之圖。縱軸表示 偏向手段的角度：θιη。前述角度：是設標記光線之入射 到鏡子30 8Μ的光線與射出的光線成9〇度的狀態為〇度， 設比90度大的情形為負方向，比go度小的情形為正方^。 表示偏向手段的角度為0 m ’被要求在時刻12〜15間、 18〜111間、11 4〜11 7間於正方向一定持續移動，在時刻 16 ~ 17間、11 2〜11 3間' 11 8〜11 9間於負方向一定持續移動。 但是實際上，由於前述偏向手段的速度變動的影響， 移動距離不會一定地變化，雖然變化非常少但也會產生偏 移。即使標記對象物以一定速度移動了，也會因前述偏向 手段的速度變動：△ Vm的影響使標記對象物1 〇與標記光線 3 〇 9的相對速度不成為零’使得被標記的識別碼產生模糊。 當作偏向手段使用的電流掃瞄器由於長時間持續使用 或外部的空氣的溫度或濕度的變化等，即使設定相同的控 w 制參數也有角速度變動的可能性。 " 為了防止被標記的識別碼或任意的圖案的模糊，需要 如下的一連串的維修保養（maintenance)作業：確認前述電 流掃瞄器是否以預先設定的轉速動作呢，在有模糊或被認 為模糊的前兆的情形下再調整設定值（速度增益（gain))， 進行再確認。 201105951 以往識別碼或任意的圖案的模糊的確認是實際進行標 記並進行評價。因此，需在維修保養時中止生產。或者也 有在生產排程（production schedule)的空檔進行維於保 養。 因此’想連續進行生產的情形被進行如下的管理作業· 進行在生產品中被標記的識別碼或任意的圖案的確認，迅 速地把握模糊的前兆。 前述管理作業是注視非最終製品的主要零件的識別碼 或任意的圖案，防備不知道何時發生的情況不佳的發生， 故省略化較佳。 因此’本發明的目的為供在識別碼或任意的圖宰的 標記前，計測對標記對象物的移動速度之前述光線偏向手 段的偏向角速度的變化之手段。 為了解決以上的課題’申請專利範圍第1項的發明是 一種識別碼的標記裝置，包含： 以規定的速度使標記對象物移動之手段； 產生識別碼之手段； 照射對應前述識別碼的標記光線之手段；以及 “使前述標記光線偏向並照射到前述標記對象物之光線 r 偏向手段， 追蹤前述標記對象物的移動，前述標記光線的照射方 向被改變， 其特徵包含： 朝前述光線偏向手段照射準直光線（col 1 imated ray) 201105951 之手段；以及 與前述標記對象物的移動手段同步移動之光線照射位 置檢測器， 其中檢測被照射到前述光線照射位置檢測器的前述準 直光線的照射位置的變化。 ' 申請專利範圍第2項的發明是申請專利範圍第1項之 識別碼的標記裝置，其中前述光線偏向手段具有追蹤前述 標記對象物的移動並變更偏向角度之速度的設定值（速度 增益）， 包含：使前述光線偏向手段的前述速度增益變更之手 段；記憶前述速度增益之手段。 申請專利範圍第3項的發明是申請專利範圍第2項之 識別碼的標記裝置，其中包含：登記顯示被照射到前述光線 照射位置檢測器的前述準直光線之對照射位置的變化的容 許範圍（allowable range)的設定值之手段， 包含：比較由檢測前述準直光線的照射位置的變化之 手段顯示的值，與顯示前述容許範圍的設定值之比較手段。 申請專利範圍第4項的發明是申請專利範圍第1項至 '' 第3項中任一項之識別碼的標記裝置，其中包含複數個照 . 射前述標記光線之手段， 前述位置檢測器至少一個。 申請專利範圍第5項的發明是申請專利範圍第1項至 第4項中任一項之識別碼的標記裝置，其中使前述標記對 象物往復動作，可標記識別碼， 8 201105951 對照射前述標記光線的手段之一，前述光線照射位置 檢測器包含兩個。 申請專利範圍第 6項的發明是一種識別碼的標記方 法，具有： w 以規定的速度使標記對象物移動之步驟； " 產生識別碼之步驟； 照射對應前述識別碼的標記光線之步驟；以及 使用使前述標記光線偏向並照射到前述標記對象物之 光線偏向手段，追蹤前述標記對象物的移動，改變前述標 記光線的照射方向之步驟， 其特徵具有： 朝前述光線偏向手段照射準直光線之步驟；以及 使用與前述標記對象物的移動手段同步移動之光線照 射位置檢測器，檢測被照射到前述光線照射位置檢測器的 前述準直光線的照射位置的變化之步驟。 申請專利範圍第7項的發明是申請專利範圍第6項之 識別碼的標記方法，其中前述光線偏向手段具有追蹤前述 標記對象物的移動並變更偏向角度之速度的設定值（速度 4 增益）， r 具有：使前述光線偏向手段的前述速度增益變更之步 驟；記憶前述速度增益之步驟。 申請專利範圍第8項的發明是申請專利範圍第7項之 識別碼的標記方法，其中具有：登記顯示被照射到前述光線 照射位置檢測器的前述準直光線之對照射位置的變化的容 9 201105951 許範圍的設定值之步驟， 具有：比較在檢測前述準直光線的照射位置的變化之 步驟中被顯示的值，與顯示前述容許範圍的設定值之步驟。 申請專利範圍第9項的發明是申請專利範圍第6項至 第8項中任一項之識別碼的標記方法，其中包含複數個照 射前述標記光線之手段， 具有：使用至少一個前述位置檢測器，測定準直光線的 照射位置之步驟。 申請專利範圍第1 0項的發明是申請專利範圍第6項至 第9項中任一項之識別碼的標記方法，其中具有：使前述標 記對象物往復動作，標記識別碼之步驟， 具有：在前述標記的去程與回程中，使用各自不同的位 置檢測器進行位置檢測之步驟。 申請專利範圍第11項的發明是一種任意的圖案的標記 裝置，包含： 以規定的速度使標記對象物移動之手段； 產生任意的圖案之手段； 照射對應前述任意的圖案的標記光線之手段；以及 '使前述標記光線偏向並照射到前述標記對象物之光線 " 偏向手段， 追蹤前述標記對象物的移動，前述標記光線的照射方 向被改變， 其特徵包含： 朝前述光線偏向手段照射準直光線之手段；以及 201105951 與前述標記對象物的移動手段同步移動之光線照射位 置檢測器， 其中檢測被照射到前述光線照射位置檢測器的前述準 直光線的照射位置的變化。 申請專利範圍第1 2項的發明是申請專利範圍第11項 之任意的圖案的標記裝置， 其中前述光線偏向手段具有追蹤前述標記對象物的移 動並變更偏向角度之速度的設定值（速度增益）， 包含：使前述光線偏向手段的前述速度增益變更之手 段；記憶前述速度增益之手段。 申請專利範圍第1 3項的發明是申請專利範圍第1 2項 之任意的圖案的標記裝置，其中包含：登記顯示被照射到前 述光線照射位置檢測器的前述準直光線之對照射位置的變 化的容許範圍的設定值之手段， 包含：比較由檢測前述準直光線的照射位置的變化之 手段顯示的值，與顯示前述容許範圍的設定值之比較手段。 申請專利範圍第1 4項的發明是申請專利範圍第11項 至第1 3項中任一項之任意的圖案的標記裝置，其中包含複 數個照射前述標記光線之手段， 前述位置檢測器至少一個。 申請專利範圍第1 5項的發明是申請專利範圍第11項 至第1 4項中任一項之任意的圖案的標記裝置，其中使前述 標記對象物往復動作，可標記任意的圖案， 對照射前述標記光線的手段之一，前述光線照射位置 11 201105951 檢測器包含兩個。 申請專利範圍第1 6項的發明是一種任意的圖案的標記 方法，具有： 以規定的速度使標記對象物移動之步驟； 產生任意的圖案之步驟； 照射對應前述任意的圖案的標記光線之步驟；以及 使用使前述標記光線偏向並照射到前述標記對象物之 光線偏向手段，追蹤前述標記對象物的移動，改變前述標 記光線的照射方向之步驟， 其特徵具有： 朝前述光線偏向手段照射準直光線之步驟；以及 使用與前述標記對象物的移動手段同步移動之光線照 射位置檢測器，檢測被照射到前述光線照射位置檢測器的 前述準直光線的照射位置的變化之步驟。 申請專利範圍第1 7項的發明是申請專利範圍第1 6項 之任意的圖案的標記方法，其中前述光線偏向手段具有追 蹤前述標記對象物的移動並變更偏向角度之速度的設定值 (速度增益）， 具有：使前述光線偏向手段的前述速度增益變更之步 驟；記憶前述速度增益之步驟。 申請專利範圍第1 8項的發明是申請專利範圍第1 7項 之任意的圖案的標記方法，其中具有：登記顯示被照射到前 述光線照射位置檢測器的前述準直光線之對照射位置的變 化的容許範圍的設定值之步驟， 201105951 具有：比較在檢測前述準直光線的照射位置的變化之 步驟中被顯示的值，與顯示前述容許範圍的設定值之步驟。 申請專利範圍第1 9項的發明是申請專利範圍第1 6項 至第18項中任一項之任意的圖案的標記方法，其中包含複 數個照射前述標記光線之手段， 具有：使用至少一個前述位置檢測器，測定準直光線的 照射位置之步驟。 申請專利範圍第2 0項的發明是申請專利範圍第1 6項 至第1 9項中任一項之任意的圖案的標記方法，其中具有： 使前述標記對象物往復動作，標記任意的圖案之步驟， 具有：在前述標記的去程與回程中，使用各自不同的位 置檢測器進行位置檢測之步驟。 【發明的功效】 因使用本發明的標記識別碼之裝置及方法，檢測使用於 識別碼或任意的圖案的標記之光線的照射位置的變化，故 可早期發現模糊。而且，因可進行再調整，俾模糊的影響 消除，故可提高標記品質。 【實施方式】 針對為實施本發明的形態，一邊使用圖，一邊說明。圖 1是顯示本發明的實施形態的一例之斜視圖。在圖中設正交 座標系的3軸為X、Y、Z，設XY平面為水平面’ Z方向為 錯直方向。特別是Ζ方向為以前頭的方向為上，表現其反 201105951 方向為下® 標記裝f 1包含有如下構件而構成··為使標記對象物 10移動於X方向之平台部（stage part)2;被安裝於由安 裝於裝置底座（base)20上的支柱31與梁32構成的門型的 構造物上之標記頭部（marking head叩纣）3;安裝於a子 (table)22之位置檢測器4;收納有為控制各部的機器I控 制器及/或為進行裝置的操作的機器之控制部9。 平台部2包含有如下構件 ^ ^ ^ v ^ ^ 再凤.女忒於裝置底座20 上的叮移動於X方向的X軸平台21;安褒 台子22。在台子22上承葡右俨斜务此 神十σ上的 R载有私记對象物1〇。的表面設有溝或孔，前诚、、盖七了丨a味 仕口子22(± 溝或疋透過開關栌釗_ η (vaive)連接於真空源。承載於台子22 $卜控制用閥 被進行利用負壓進行的吸附保持，俾在移動^己對象物10 標§己光、線3 0 9被由標記頭部3適宜吗'射 θ偏移。 物1〇上的預先被登記的場所進行標記。基极的：標記對象 除吸附保持。一邊取出標記結束的基板出時是解 記的基板的作業能以人手進行或者使用運者；邊承栽樑 (transport robot)進行。 适機械手 作業者可使用控制部9的資訊輸入手段9 1 臂 邊確認 資訊顯示手段92顯示的資訊，一邊登記必要 進行操作。而且，㈣者在裝置運轉中可 1訊， JS-("n1pr-+ _ 邊^ 聽、由馨 以 邊 段（alert means)93發出的聲音 生產的結束及/或裝置的異常。 一知道 圖2是顯示本發明的實施形態的— <主要部分 > —— 邊看顯示 告手 狀態’知 斜規 201105951 圖。標記頭部3包含：光源301 ;鏡子3〇2及/或中繼透鏡 (relay lenS) 303、304等的光學零件；識別碼產生手段 3 0 5 ;開口（aperture) 30 6 ;電流掃描器307s ;安裝於電流 .掃描器307S的鏡子30 7M ;電流掃描器3 0 8S ;安裝於電流 ，掃描器3 0 8S的鏡子3〇8M’適宜配置有前述機器而構成。 由標記頭部3的光源301照射的光線藉由鏡子3〇2及/ 或中繼透鏡303 ' 304等的光學零件被改變方向及/或大 小。如前述，方向及/或大小被改變的光線經由識別碼產生 手段3 0 5成為對應識別碼的光線。 對應前述識別碼的光線是使用電流掃描器3〇7S、308s 與鏡子307M、3 0 8M —邊被控制照射方向，一邊被當作標記 光線3 0 9朝標記對象物1 〇照射。 在Y方向不變更標記光線3 〇 9的照射方向的情形，及/ 或使標C頭部3移動於γ方向並變更標記光線3 〇 9的照射 位置於Y方向的情形也可以在鏡子3 〇7M被固定的狀態下使 用，此情形可省略電流掃描器3 〇 7S。 識別碼產生手段30 5有如下的種種方式：藉由改變排 列成矩陣狀的微鏡（micromirr〇r)的角度形成對應識別碼 的光線之反射方式者；或藉由使由排列成矩陣狀的透射材 •料構成的遮罩（mask)的透射率（transmissi0I1丨3(：1:〇1^變 化’形成對應識別碼的光線之透射方式，或逐次使照射束 偏向並直接產生對應矩陣狀的識別碼的光線之方式等。 反射方式可舉例說明應用微鏡裝置（micr〇mirr〇r dev i ce)者，而透射方式可舉例說明應用液晶裝置者。逐次 201105951 使照射束偏向的手段可舉例說明組合聲光元件 (acoustic-optic element)及/或電流掃描器與反射鏡者。 標記光線3 0 9的光源3 0 1可舉例說明燈（1 a m p )戈 .LED、雷射二極體（laser diode)、雷射發射器（laser transmitter)等的發光手段。 - 即使是標記頭部3被固定於梁32的狀態，也可以使其 沿著梁3 2移動。使標記頭部3移動的情形，將可移動於γ 方向的Υ軸平台33安裝於梁32,在Υ軸平台33上安農標 記頭部3也可以。 因標記裝置1成為如前述的構造，故可一邊使標記對 象物移動於X方向，一邊以相同的速度使標記光線偏向， 對標記對象物的任意的場所進行識別碼的標記。 如圖3所示，在控制部9連接包含有：控制用電腦9 〇、 資訊輸入手段91、資訊顯示手段92、警告手段93、資訊 記錄手段9 4、機器控制單元9 5。 控制用電腦9 0可舉例說明微電腦、個人電腦、工作站 (以〇纯31;以丨〇1〇等的搭載有數值運算單元者。資訊輸入手段 91可舉例說明鍵盤（keyb〇ard)及/或滑鼠（m〇use)及/或開 關（switch)等。資訊顯示手段92可舉例說明晝像顯示顯示 - 器及/或燈等。 警告手段93可舉例說明蜂鳴器（buzzer)或揚聲器 (speaker)、燈等可喚起作業者注意者。資訊記錄手段94 可舉例說明記憶卡（memory card)或資料碟（data disk)等 的半導體記錄媒體或磁性記錄媒體或光磁性記錄媒體等。 201105951 機器控制單元 95 可舉例說明被 (programmable controller)或運 controller)的機器等。 ^ 在機器控制單元95連接有：X軸 位置檢測器4、光源3 0 1、識別碼產生 器307S、308S、其他的控制機器（未[ 位置檢測器4若光線被照射到受 程度的能量的光線被照射到前述受光 之信號輸出。在本實施例使用者為電 照射位置而變化者。因此，照射位置 述電流值，由前述電流值的變化知道 的模糊。前述電流值是以機器控制單 機器控制單元95可藉由對前述 控制用信號，使前述各機器動作或使 標記位置及/或標記條件等的設 於前述控制部9的前述控制電腦9〇存 行’可藉由資訊顯示手段9 2確認。 而且，被設定的前述塗佈條件可 腦9 0的資訊記錄手段9 4，可適宜讀{ " 圖4是每一步驟顯示標記程序之 物10承載於台子22 (si 01)，吸 i〇(sl〇2) 〇 接著，讀取標記對象物1 〇上的對 對準動作。 稱為可程式控制器 勤控制器（motion 卜台21、γ軸平台33、 手段305、電流掃插 8示）。 光部’則會產生哪種 4内的哪一個場所呢 流值對應準直光線的 的資訊可藉由計測前 準直光線的受光位置 元95計測。 被連接的各機器給予 其靜止。 定或變更可使用連接 J資訊輸入手段9 1進 登記於連接於控制電 h、編輯、變更。 流裎圖。將標記對象 附保持標記對象物 準標記（s 1 0 3 )，進行 201105951 接著，照射準直光線到與標 °己對象物1 〇的移動同 動的位置檢測器4(S104)。此時 』乂移 以一定速度使鏡子308Μ的角度 疋轉， 並持續照射位置檢測器4的受光部。 尤踝追蹤 接著，測定被照射到位置檢測器4的 直光線的照射位置的偏移量(sl〇5)，判 ： 的適當範圍（sl〇6)。 巧很元„又疋 接著，若前述準直光線的照射位置的 圍内，則產生識別碼，僅針麻▲ 1 , 里勹迥田範 ^使對應則述識別碼的標記光線309 朝標記對象物10照射，實施 尤I 309 描器308S旋轉，以—…二(:1〇7)。此時也使電流掃 疋速度使鏡子308M的角度變化，使 標記光：309追蹤並持續照射位置檢測器*的受光部。 若標記結束，則解除標記對象物1〇的吸附（sl08)，由 台子22取出標記對象物1〇(sl〇9)。 方月J述知射位置的偏移量不為適當範圍内，則依照事 則被選擇的情況A〜C動作被繼續（si 10)。 ,情況A:實施標記（sU1)。情況B:中斷標記（sU2)。然 後，透過警告手段93通知作業者偏移量脫離適當範圍 (s 11 3 ) ’、、、、後解除標記對象物1 〇的吸附（s i 〇 8 )，由台子 22取出私§己對象物1〇(sl〇9)，進行維修保養作業。 曰 灸更電流掃描器的速度增益（s 1 1 4 )，重新測定 曰—15)。然後判斷偏移量是否為適當範圍内 (s 11 6 )若為適當範圍内’則實施標記（s丨〇 7 )。 若前述昭虹& “、、射位置的偏移量不為適當範圍内，則再度變 201105951 更電流掃描器的速度增益（s 1 1 4)，重新測定偏移量 (s 11 5)。然後判斷偏移量是否為適當範圍内（s 1 1 6)，若為 適當範圍内，則實施標記（s 1 0 7 )。如果變更幾次速度增益 也不成為適當範圍内的情形就發出警告（s 11 3 )，作業者判 斷應該如何進行。 前述的流程外，另外即使是標記對象物1 0未被承載於 台子22上的狀態也能實施。 首先，將準直光線照射到位置檢測器4。此時使電流 掃描器308S旋轉，以一定速度使鏡子30 8M的角度變化， 使前述準直光線追蹤並持續照射位置檢測器4的受光部。 接著，測定被照射到位置檢測器4的受光部之前述準 直光線的照射位置的偏移量，判斷是否為預先設定的適當 範圍3 若前述準直光線的照射位置的偏移量為適當範圍内， 則將標記對象物1 0承載於台子2 2上，開始標記。如果前 述照射位置的偏移量不為適當範圍内，則變更電流掃描器 的速度增益，重新測定偏移量。 然後再度測定前述準直光線的照射位置的偏移量，判 斷偏移量是否為適當範圍内。然後若前述偏移量為適當範 圍内，則將標記對象物1 0承載於台子2 2上，開始標記。 若被判斷為在標記開始前無前述的偏移量，則在前述 的步驟 s 1 0 1〜s 1 0 9中省略偏移量的測定與判斷的步驟 s 1 0 4 ~ s 1 0 6也可以，前述偏移量的測定也可以利用不對標 記對象物進行標記的時間等而適宜進行。 19 201105951 圖5是顯示將準直光線照射到位置檢測器的狀態之 視圖。以實線圖示某時刻T X 〇中的狀態。藉由安裝於標 頭部3的電流掃描器3〇8S的鏡子308M，被偏向的準直 ^ 線309A朝安裝於台子22的位置檢測器4被照射。 準直光線309A與標記光線309同一，或成形一部分 使用’或控制識別碼產生手段3 〇 5俾成為規定的圖案而 生使用也可以。而且另外，在標記頭部之中具備照射可 作準直光線3 0 9 A使用的光線的手段而使用也可以。 標記對象物1 〇被吸附保持於台子2 2上，與位置檢 器4是以相同速度移動，彼此的相對速度為零。 由前述某時刻T X。經過τ X,秒後是如以細的二點鏈線 示的’台子22a與標記對象物丨〇a與位置檢測器4a移動 X方向向右（亦即以箭頭Μ顯示的方向）。準直光線309A 成：控制電流掃描器3 0 8 S俾追縱標記對象物1 0 a，電流 描器308S的鏡子308M的角度被改變，在以箭頭Μ顯示 方向改變照射角度之準直光線3〇9a。 若追蹤標記對象物1 〇的移動，改變鏡子308M的角 的速度’亦即變更光線偏向手段的偏向角度的速度適當 則被照射到位置檢測器4的受光部的光線的位置不變化 ，此時可以說相對速度相同。若相對速度相同’則無標記 的偏移，被標記的識別碼的識別性能提尚。 因此，以追蹤前述標記對象物1 〇的移動並變更偏向 度的速度的設定值當作速度増益而設定、登§己。右不改 前述速度增益的設定值，則在某短時間之間，實際的偏 側 記 光 而 產 當 測 顯 於 變 掃 的 度 中 角 變 向 201105951 角度變化的速度一定。但是，若透過長的日數的期間 則經時變化顯現，產生變動。 位置檢測器4可舉例說明PSD(位置檢測元件）。 檢測器4是具備輸出有對應被照射的光的重心位置的 之元件。直接計測電流信號，或使用電阻器轉換成電 號並計測也可以。 例如位置檢測器4頻率響應性能高，每一標記所 時間Τχ,秒的1/100的時間選擇信號輸出為可能者。4 在照射準直光線TXl秒之間1 〇〇次左右的重複位置計 可能’每次可輸出對應準直光線的受光位置的信號。 即使是很難依照標記光線的波長及/或輪出、位置 态的響應速度及/或價格選擇適合的位置檢測器的情； 可以使用與標記光線的波長及/或輸出不同的準直光 手’選擇適合該準直光線射出手段的位置檢測器 例如將前述準直光線照射到位置檢測器僅與識別 j所姑的時間相同的時間。若前述準直光線持續被 到則述位置檢測器上的相同場所，則相對速度為零， 的追蹤速度適當。若為該狀態，則極為明瞭的識別碼 δ己 〇 或者是若前述準直光線被持續照射到前述位置檢 規：的範圍(例如對識別碼的1點十分小的值）， 也盏ί k小’被標記的識別碼實質上明瞭，對之後的 I無障礙。 月'述規定的範圍也可以考慮識別碼的大小及/或 看， 位置 電流 壓信 需的 α此， 測為 檢測 衫，也 線射 Ο 碼的 照射 鏡子 被標 測器 則相 識別 識別 201105951 時的對比（contrast)等，實際被要求的識別精度及/或錯誤 等級（errorlevel)等而被適宜設定。 因標記裝置1成為如前述的構造，故可使用與標記對 象物1 0的移動手段同步移動的位置檢測器4，檢測標記光 線309的照射位置的變化。 而且，可變更使標記光線309的偏向角度偏向的速度 的設定值（速度增益），調整成前述速度變動：AVm成最小。 而且，可計測被照射到位置檢測器4的準直光線的照 射位置的變化，比較前述變化是否為預先設定的容許範圍 之内，判斷標記品質是否可維持。 標記頭部3若為至少一個以上則可進行標記，藉由依 照需要增加數目，使同時可標記的數目增加。 若識別碼增加，則有在規定的時間内可標記的碼的數 目被限制的情形。但是，可藉由增加標記頭，增加在規定 的時間内可標記的碼的數目。此情形，可藉由配合標記頭 的數目，使位置檢測器也增加以實施本發明。 另一方面，對複數個標記頭以一個兼用位置檢測器也 可以。 可藉由複數個標記頭的照射區域寬廣，將準直光線照 射到安裝於承載台的位置檢測器以實施本發明。 即使是複數個標記頭的照射區域為限定的，且對相同 的位置檢測器的受光部無法照射光線的情形，也可安裝單 軸的滑件（s 1 i der )機構於承載台，在前述單軸滑件上安裝 位置檢測器，可使前述位置檢測器移動於Y方向。也能以 22 201105951 該形態，將一個位置檢測器使用於來自複數個標記頭的準 直光線的位置檢測。 具有藉由使用共同的位置檢測器，消除因測定器各個 的偏差造成的位置檢測精度的偏差之效果。 另一形態在承載台的移動方向的前後端各自具備位置 檢測器也可以。即使識別碼增加也不增加標記頭，而是增 加在規定的時間内可標記的碼的數目的方法，可使其往復 動作並進行標記。若對一個標記頭位置檢測器為一個，則 只能去程或回程的任一個可進行識別碼即將曝光前的確 認。 但是，若在承載台的移動方向的前後端各自具備位置 檢測器，則可各自在即將標記前確認移動承載台於X方向 的箭頭的方向時的偏向手段的轉速，與移動承載台於與X 方向的箭頭相反方向時的偏向手段的轉速。據此，具有即 使是在往復進行標記動作的情形下，也能縮短處理時間之 效果。 可將本發明使用於對平面的板狀之物以外的標記。例 如標記對象物為連續的片狀之物也可以。 在圖6顯示本發明的另一實施形態的一例之連續片的 標記裝置的斜視圖。在圖中以正交座標系的3軸為X、Y、 Z，以XY平面為水平面，以Z方向為鉛直方向。特別是Z 方向為以箭頭的方向為上，表現其反方向為下。 標記裝置 5 包含有如下構件而構成：裝置框架 (frame)50;由安裝於裝置框架50的支柱51與梁52構成 23 201105951 的π型構造物；安裝於梁52上的γ軸平台53;安裝於γ 軸平台53上的標記頭部3 ;控制部9。 在裝置框架50包含安裝有如下構件：為送出運送連續 .片狀的標記對象物11之輸送滾子（仏1“61^1>()1161〇548、 '* 54b ;為捲繞運送標記對象物11之捲繞滾子55a、55b。標 .記對象物11是藉由安裝於捲繞滾子55c(未圖示）的馬達 (未圖示）的旋轉動作，被以規定的速度進給移動。 在捲繞滚子55a的端部安裝有位置檢測器4b，可與標 記對象物11的進給移動同步旋轉移動。 標記裝置5的標記頭部3及/或控制部9成為與標記裝 置1同樣的機器構成，更與捲繞滾子55a的位置檢測器 4b、安裝於捲繞滾子55c的前述馬達連接。位置檢測器讣 是透過可無限旋轉的電接點（electrical c〇ntact)機構 (所謂的旋轉接頭（rotary j〇int))與控制部9的機器控制 單元95連接。 捲繞滚子55a的端部的位置檢測器4b也可以與捲繞滾 子5 5a的旋轉同步動作，不被限定於只有旋轉，也可以進 行往復動作。此情形可省略前述可無限旋轉的電接點機 構連接位置檢測器4 b與控制部9的機器控制單元9 5。 ^ 因標s己裝置5成為如前述的構成’故可對連續的片狀 的標記對象照射準直光線並測定標記的模糊，進行識別碼 的標記。 據此’無須為標記的模糊的測定而中斷生產，可維持 在規定的時間内生產的製品的數量。 I S] 24 201105951 本發明可使用於利用曝先進行的標記。標記對象物塗 佈有感光性樹脂（photosensitive resin)，使用於標記的 光線為紫外線等的具有可使前述感光性樹脂硬化或軟化的 ‘波長的光線的情形是成為曝光方式的標記。若使用本發明 :於曝光方式的標記，則可不經過顯影（devel〇pment)製裎而 檢測相對移動速度的變化，可預先檢測識別碼產生模糊。 因此，可消除顯影製程所花的勞力時間及/或等候時間 (waiting time) 〇 本發明也flb使用於在標s己對象物的表面直接加工之直 接標記。若將光源及/或標記光線設定為可使前述標記對象 物的表面狀態變化的光線的波長及/或能量，則成為前述直 接標記。若使用本發明於前述直接標記，則在直接標記所 製造的製品前可檢測相對移動速度的變化，可預先檢測識 別碼產生模糊。因此，可防止識別碼不良的製品的產生。 本發明也能使用於在標記對象物的内部進行標記之内 部標記（inner marking)。若光源及/或標記光線滿足使前 述標記對象物的材料内部變質的條件，則成為前述内部標 記。在前述内部標記中，在有標記不良的情形下無法於研 •磨表面等之後再標記。若使用本發明於内部標記，則在直 •接標記所製造的製品前可檢測相對移動速度的變化，可預 先檢測識別碼產生模糊。因此，可防止識別碼不良的製品 的產生。 若標記對象物10與位置檢測器4由電流鏡平面視工作 件（work)時的移動速度相同，則即使由側面看的情形的位 25 201105951 置不 器的 形， 同步 適用 理。 同一 方法 置及 代成 圖案 記對 字、 w i r ί 案等 象物 且， 案時 同，也能視為相同速度。 前述以外的實施的形態即使是標記對象物與位置檢測 移動速度不同的情形，或平面視時的速度不相同的情 或安裝減速器（speed reducer)等的情形等，若為互相 並一邊保持比例的移動速度的關係，一邊移動，則可 本發明，可藉由使用比例係數運算當作同一速度處 因此’也能適用本發明於標記對象物與位置檢測器在 平面上以同一的移動速度移動的情形以外。 關於前述實施的形態雖然是針對標記識別碼的裝置及 來說明’ $取代前述識別碼，以標記任意的圖案的裝 方法使用也可以。 精甶將可 〜〜闲木<仕蒽的圖茶座玍于杈取 前述的識別碼產生手段305使用而實施。前述任意的 可舉例说明顯不對準標記或製造廠的名稱或標誌、標 象物的品*或$式或製造批等的附加資訊之文字、數 其他的圖形或符號I。ι ^ 而且’電氣配線（electric ng)用的電路圖案（ci rrMl; + ^ Fcult Pattern)或造形加工的圖 也月b當作任意的圖案處理。 藉由作成如前述般，可對以 使任音& F1宏、έ吵π 巩疋的逮度移動的標記對 更任思的圖案追蹤標記對象物的移 、 因使用本發明的裝置及方半 ，進行標記。而 ’故可卩大 的模糊。 々止標記任意的圖 【圖式簡單說明】 26 201105951 圖1是顯示本發明的實施形態的一例之斜視圖。 圖2是顯示本發明的實施形態的一例之主要部分斜視 圖。 圖3是顯示本發明的實施形態的一例之系統構成圖。 圖4是顯示本發明的實施形態的一例之流程圖。 圖5是顯示本發明的實施形態的一例之側視圖。 圖6是顯示本發明的另一實施形態的一例之主要部分 斜視圖。 圖7 ( a)〜（d )是顯示依照習知的標記裝置及方法之各 部的動作之時序圖。 【主要元件符號說明】 1、5 :標記裝置 2 :平台部 3 :頭部 4、4 a、4 b :位置檢測器 9 :控制部 I (h標記對象物 10a:對象物201105951 IV. Designated representative map: (1) The representative representative of the case is: (4). (1) A brief description of the symbol of the representative figure. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: 6. Description of the invention: [Technical field of invention] The present invention relates to marking (marking) An apparatus and method for identifying an id co (ie) or an arbitrary pattern on a flat panel dispUy or a semiconductor chip. [Prior Art] In a flat panel display (hereinafter FPD) In the process of semiconductor wafers, a unique ID called an identification code (for example, a two-dimensional code, etc.) is added in order to trace the manufacturing conditions in the above-described manufacturing process or the history of information related to various manufacturing processes. Moreover, the aforementioned identification code is added by a direct marking or a photolithography method (hereinafter referred to as a mark). Γ» The aforementioned FPD or the aforementioned semiconductor wafer is often arranged on a plurality of substrates ( In the substrate, the total is manufactured. Therefore, the identification code of the aforementioned FPD or the aforementioned semiconductor wafer is correspondingly arranged in one Each of the panels or wafers in the substrate is marked. In addition to the identification code, there is also a display of the alignment mark 2 201105951 (alignment mark) or the name or logo of the manufacturer, or the name or type of the object to be marked. Or a case where an arbitrary pattern such as a character, a number, another figure, or a symbol of additional information such as a lot is created. The mark method is a time given in consideration of the material or size of the object to be marked, and the mark or the arbitrary pattern. (The following is a tact time), etc. It is suitable to determine. According to Patent Document 1, a maskless exposure apparatus (exposure eqUipment) using a laser light and a digital micromirror device is disclosed. According to the apparatus and method, since an arbitrary pattern can be marked by an object to be moved by the exposure by the exposure, a method of marking a plurality of identification codes within a predetermined time is widely used. Regularly measure and adjust the offset caused by the angular change of the current mirror (galvano-mirror). In order to improve the positional accuracy of the laser irradiation, that is, the accuracy of the processing position. [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A-2002-090682 (Patent Document 2) The code or an arbitrary pattern needs to be irradiated with a predetermined time energy toward the object to be marked, and the time when the energy is applied by the above-mentioned mark is 曰1 is T1. Move 'to track the marked object' to make the identification code or any group move 3 201105951 move 0 When marking an identification code or an arbitrary pattern, if the moving speed of the substrate is the same as the aforementioned identification code or arbitrary pattern The degree of movement of the 2% of the production is poor, the identification code or any pattern will be blurred. If the dot forming the identification code and/or the minimum dot forming the arbitrary pattern and/or the size deviation of only the line width are formed, accurate recognition cannot be performed. Even if the speed change is smaller, if the identification code or the arbitrary pattern in the mark is in a blurred state, then in the case where it is desired to recognize, there is a possibility that the correct recognition cannot be performed... and the fuzzy state is included. The identification code or any pattern may also have a reduced ability to recognize in the case of scratches or contamination. Moreover, if there is blurring in the mark, the time when the energy is irradiated to the prescribed place is reduced, the identification code or the arbitrary pattern is marked shallowly, or the handwriting is blurred, and then it is impossible to identify it. The reason for the correct identification. The term "fuzzy" as used herein means that not being marked at a predetermined position is not only partial but also the time taken for the mark, and the relative speed does not become zero, and a speed difference is generated to move relative to each other. Therefore, it is then transmitted through the correct identification of the identification code or any pattern. It is important to mark the quality of the lamp or to eliminate the speed difference in the aforementioned marks in order to maintain the quality. Means for moving the identification code or any pattern in the mark have a light deflection means (for example, a mirror mounted on a gal vano scanner). In order to eliminate the speed difference in the mark, the moving speed of the substrate ί S] 4 201105951 is the same as the deflection speed in the light deflecting means, and the state is maintained. 7(a) to (d) show time charts of the operations of the respective units k in accordance with the conventional marking device and method. In each of the figures, the horizontal axis represents time • t, and t2 〇 represents time. In order to make the time relationship of the phenomena in the figures clear, the additional dotted line is used as the auxiliary line. The same dotted line above means the same moment. Fig. 7(a) is a view showing a change in the speed of the object to be marked. The vertical axis indicates the speed of the marker object 10: Vx. At time 11, the object 1 is started to move in the X direction, and at time 12, the predetermined moving speed is reached and the speed is maintained. When the marking object 10 is completed, the deceleration starts at time t 丨 9 and stops at time t20. Fig. 7(b) is a diagram showing the irradiation timing (t i m i ng ) of the marker ray for marking the identification code. The vertical axis is the illumination indicating the mark ray 3 〇 9 : Em. The mark ray 3 0 9 is irradiated between time 13 to 14, 19 to 11 0, and 11 5 to 11 6 . Fig. 7 (c) is a view showing a change in the speed of the deflection angle of the biasing means. The vertical axis indicates the speed at which the change angle is changed: Vni. w The angular velocity of the deflecting means is required to move at a constant speed between time t2 and t5, between t8 and tli ", and between tl7, in the positive direction, between time u~t7, tl2~tl3, and tl8~tl9 The direction moves at a certain speed. In particular, it is required to move while 'marking' at the time of 13 to 14 '19 to 11 0, 11 5 to 11 6 equal speed. However, there are actually slight delay responses and/or overshoots, etc., and 201105951 has a speed change. Usually these error components are adjusted to be minimized by the optimal setting of the control parameters. The aforementioned speed change table in the time when the mark is moved while moving is shown as A Vm . Figure 7(d) is a diagram showing the change in the angle of the unbiased means. The vertical axis represents the angle of the biasing means: θιη. The angle is a state in which the light incident on the mirror 30 8 与 and the emitted light are 9 degrees, and the negative direction is greater than 90 degrees, and the square is smaller than the go degree. The angle indicating that the biasing means is 0 m 'is required to continue to move in the positive direction at times 12 to 15, 18 to 111, and 11 4 to 11 7 in the positive direction, at times 16 to 17, 11 2 to 11 3 ' 11 8~11 9 must move continuously in the negative direction. However, in reality, the moving distance does not change to some extent due to the influence of the speed variation of the biasing means, and the offset is very small, but the offset is also generated. Even if the object to be marked moves at a constant speed, the speed of the deflection means is changed by the influence of ΔVm such that the relative speed of the object 1 〇 and the mark ray 3 〇 9 does not become zero', so that the marked identification code is generated. blurry. The current scanner used as a biasing means may have an angular velocity fluctuation even if the same control parameters are set due to long-term continuous use or changes in the temperature or humidity of the external air. " In order to prevent the marking of the identified identification code or any pattern, the following series of maintenance operations are required: confirm whether the current scanner is operated at a preset speed, in the presence of blur or is considered blurred In the case of the precursor, adjust the set value (speed gain) and reconfirm. 201105951 The confirmation of the ambiguity of the previous identification code or arbitrary pattern is actually performed and evaluated. Therefore, production must be stopped during maintenance. Or there is also a gap in the production schedule for maintenance. Therefore, in the case where the production is to be continuously performed, the following management operations are performed. • The identification code or the arbitrary pattern marked in the raw product is confirmed, and the precursor of the blur is quickly grasped. The management operation is an identification code or an arbitrary pattern of the main part of the non-final product, and it is preferable to omit the occurrence of a case where it is not known to be unsatisfactory. Therefore, the object of the present invention is to measure the change in the angular velocity of the light deflecting hand toward the moving speed of the marking object before the identification code or the arbitrary marking of the image. In order to solve the above problem, the invention of claim 1 is an identification code marking device, comprising: means for moving a marking object at a predetermined speed; means for generating an identification code; and irradiating the marking light corresponding to the identification code And means for deflecting the illuminating light to the mark object and illuminating the mark object, and tracking the movement of the mark object, the direction of the mark light being changed, and the feature includes: illuminating the light deflecting means a means for collimating light (col 1 imated ray) 201105951; and a light irradiation position detector moving in synchronization with the moving means of the marking object, wherein the irradiation position of the collimated light irradiated to the light irradiation position detector is detected The invention of claim 2 is the marking device of the identification code of claim 1, wherein the light deflecting means has a set value (speed) for tracking the movement of the marking object and changing the speed of the deflection angle. Gain), including: biasing the aforementioned light The means for changing the speed gain of the means; the means for memorizing the speed gain. The invention of claim 3 is the marking device of the identification code of claim 2, which comprises: the registration display is irradiated to the aforementioned light irradiation position The means for setting the allowable range of the change of the irradiation position of the collimated light of the detector includes: comparing a value displayed by means for detecting a change in the irradiation position of the collimated light, and displaying the tolerance A method for comparing the set values of the range. The invention of claim 4 is the marking device of the identification code of any one of the claims 1 to 3, which comprises a plurality of photographs. The apparatus of claim 5, wherein the invention is the marking device of any one of claims 1 to 4, wherein the marking object is reciprocated. Marker ID, 8 201105951 The aforementioned light irradiation position detector for one of the means for illuminating the aforementioned marking light The invention of claim 6 is an identification code marking method having: w: a step of moving the marking object at a prescribed speed; " a step of generating an identification code; illuminating a marking corresponding to the aforementioned identification code a step of illuminating; and a step of tracking the movement of the mark object by using a light deflecting means for biasing the mark light and irradiating the mark object, and changing a direction of irradiation of the mark light, wherein the light deflecting means a step of irradiating the collimated light; and detecting a change in the irradiation position of the collimated light that is irradiated to the light irradiation position detector by using a light irradiation position detector that moves in synchronization with the moving means of the marking object. The invention of claim 7 is the marking method of the identification code of claim 6 wherein the ray deflecting means has a set value (speed 4 gain) for tracking the movement of the marking object and changing the yaw angle, r Having the aforementioned speed for biasing the aforementioned light The gain changing step; step gain of said speed and memory. The invention of claim 8 is the marking method of the identification code of claim 7 of the patent application, comprising: registering and displaying the change of the irradiation position of the collimated light beam irradiated to the light irradiation position detector; The step of setting the threshold value of the range of 201105951 includes the step of comparing the value displayed in the step of detecting the change in the irradiation position of the collimated light, and the step of displaying the set value of the allowable range. The invention of claim 9 is the marking method of the identification code of any one of claims 6 to 8, which comprises a plurality of means for illuminating the marking light, having: using at least one of the aforementioned position detectors The step of measuring the irradiation position of the collimated light. The invention of claim 10 is the method for marking an identification code according to any one of claims 6 to 9, further comprising: a step of reciprocating the marking object, and marking the identification code, having: In the forward and return strokes of the aforementioned markers, the steps of position detection are performed using respective different position detectors. The invention of claim 11 is an arbitrary pattern marking device comprising: means for moving a marking object at a predetermined speed; means for generating an arbitrary pattern; means for irradiating the marking light corresponding to the arbitrary pattern; And a light ray that deflects the illuminating light and illuminates the mark object, and tracks the movement of the mark object, and the illuminating direction of the mark light is changed, and the feature includes: illuminating the light toward the light deflecting means And a light illuminating position detector that moves in synchronization with the moving means of the marking object, wherein a change in the irradiation position of the collimated ray irradiated to the light illuminating position detector is detected. The invention of claim 12 is the marking device of any one of the claims of claim 11, wherein the light deflecting means has a set value (speed gain) for tracking the movement of the marking object and changing the speed of the deflection angle. And including: means for changing the speed gain of the light deflecting means; and means for storing the speed gain. The invention of claim 13 is the marking device of any one of the claims of claim 12, which comprises: registering and displaying a change in the irradiation position of the collimated light irradiated to the light irradiation position detector; The means for setting the allowable range includes comparing a value displayed by a means for detecting a change in the irradiation position of the collimated light, and a means for comparing the set value of the allowable range. The invention of claim 14 is the marking device of any one of the above-mentioned items of any one of clauses 11 to 13, which comprises a plurality of means for illuminating the marking light, at least one of the position detectors . The invention is the marking device of any one of the above-mentioned items of the invention, wherein the marking object is reciprocated, and any pattern can be marked, and the irradiation is performed. One of the aforementioned means for marking light, the aforementioned light irradiation position 11 201105951 includes two detectors. The invention of claim 16 is an arbitrary pattern marking method comprising: a step of moving a marking object at a predetermined speed; a step of generating an arbitrary pattern; and a step of irradiating the marking light corresponding to the arbitrary pattern And a step of tracking the movement of the mark object by using a light deflecting means for biasing the mark light and irradiating the mark object, and changing a direction of irradiation of the mark light, wherein: the light is deflected toward the light deflecting means a step of illuminating the light; and a step of detecting a change in the irradiation position of the collimated light that is irradiated to the light irradiation position detector by using a light irradiation position detector that moves in synchronization with the moving means of the marking object. The invention of claim 17 is the method for marking a pattern according to any one of the sixteenth aspect of the patent application, wherein the light deflection means has a set value (speed gain) for tracking the movement of the marker object and changing the deflection angle. And a step of: changing the speed gain of the light deflecting means; and storing the speed gain. The invention of claim 18 is the marking method of any of the above-mentioned patents, wherein the registration display shows a change in the irradiation position of the collimated light irradiated to the light irradiation position detector. The step of setting the allowable range, 201105951, has a step of comparing the value displayed in the step of detecting the change in the irradiation position of the collimated light and the setting value of the allowable range. The invention of claim 19, wherein the method of marking a pattern of any one of clauses 1 to 18, wherein the method of illuminating the plurality of patterns of the marking light comprises: using at least one of the foregoing A position detector for measuring the irradiation position of the collimated light. The method of marking a pattern according to any one of the above-mentioned claims, wherein the marking object is reciprocated and marked with an arbitrary pattern. The step has the steps of performing position detection using different position detectors in the forward and return strokes of the foregoing mark. [Effects of the Invention] Since the apparatus and method for using the marker identification code of the present invention detect changes in the irradiation position of the light used for the marker of the identification code or an arbitrary pattern, the blur can be found early. Moreover, since the re-adjustment can be performed, the influence of the blurring is eliminated, so that the mark quality can be improved. [Embodiment] A mode for carrying out the invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of an embodiment of the present invention. In the figure, the three axes of the orthogonal coordinate system are X, Y, and Z, and the XY plane is the horizontal plane 'Z direction is the wrong direction. In particular, the direction of the Ζ is the upper direction of the head, and the direction of the reverse 201105951 is the lower mark. The mark f1 includes the following members: The stage part 2 for moving the object 10 in the X direction a marking head 3 mounted on a door-type structure composed of a strut 31 and a beam 32 mounted on a base 20 of the apparatus; mounted at a position of a table 22 The detector 4 includes a control unit 9 that houses a device I controller that controls each unit and/or a device that performs an operation of the device. The platform unit 2 includes the following members: ^ ^ v ^ ^ The phoenix on the device base 20 moves on the X-axis platform 21 in the X direction; the ampoule table 22. On the table 22, the right side of the shovel is swayed. The surface is provided with a ditch or a hole. The front is sturdy, and the cover is covered with a 仕a 味口22 (± 沟 or 疋 is connected to the vacuum source through the switch 栌钊 η η (vaive). The control valve is placed on the table 22 The adsorption holding by the negative pressure is carried out, and the object is moved to the object 10, and the line 3 0 9 is offset by the marking head 3. It is offset by the θ. The pre-registered place on the object 1 Marking. Base: The object to be marked is adsorbed and held. The work of extracting the substrate when the substrate is finished with the mark can be manually performed or used by the carrier; the transfer robot is used. The operator can use the information input means 9 1 of the control unit 9 to confirm the information displayed by the information display means 92, and register the necessary operation. Moreover, (4) the user can operate in the operation of the device, JS-("n1pr-+ _ 边 ^ listening, ending with the production of sound by the alarm means 93 and/or the abnormality of the device. It is known that Figure 2 shows an embodiment of the invention - <main part > —— while watching the display of the state of the acknowledgment of the oblique gauge 201105951. The marking head 3 comprises: a light source 301; an optical component of a mirror 3〇2 and/or a relay lens (relay lenS) 303, 304, etc.; an identification code generating means 3 0 5; an aperture 30 6 ; a current scanner 307s The mirror 30 7M mounted on the current scanner 307S; the current scanner 3 0 8S; the mirror 3〇8M' mounted on the current of the scanner 3 0 8S is suitably configured with the aforementioned machine. The light irradiated by the light source 301 of the marking head 3 is redirected and/or reduced by optical components such as the mirror 3〇2 and/or the relay lens 303'304. As described above, the light whose direction and/or size is changed becomes the light corresponding to the identification code via the identification code generating means 350. The light corresponding to the identification code is irradiated with the current scanners 3〇7S, 308s and the mirrors 307M and 3 0 8M while being guided as the mark light 309 to the mark object 1 . The case where the irradiation direction of the marker light 3 〇 9 is not changed in the Y direction, and/or the case where the target C head 3 is moved in the γ direction and the irradiation position of the marker ray 3 〇 9 is changed in the Y direction may be in the mirror 3 〇 7M is used in a fixed state, in which case the current scanner 3 〇 7S can be omitted. The identification code generating means 30 5 has various ways of forming a reflection manner of the light corresponding to the identification code by changing the angle of the micromirrors arranged in a matrix; or by arranging the arrays into a matrix The transmittance of the mask formed by the transmission material (transmissi0I1丨3(:1:〇1^change' forms the transmission mode of the light corresponding to the identification code, or sequentially deflects the illumination beam and directly produces the corresponding matrix shape. The way of identifying the light of the code, etc. The reflection mode can be exemplified by the application of the micromirror device (micr〇mirr〇r dev i ce), and the transmission mode can exemplify the application of the liquid crystal device. The method of biasing the illumination beam can be exemplified step by step 201105951 Explain the combination of an acoustic-optic element and/or a current scanner and a mirror. The light source 3 0 1 marking the light 3 0 9 can exemplify the lamp (1 amp ), LED, and laser diode ( Light-emitting means such as a laser diode or a laser transmitter - Even if the marking head 3 is fixed to the beam 32, it can be moved along the beam 3 2. The marking head 3 is moved. situation The yoke axis 33 that can be moved in the γ direction is attached to the beam 32, and the Annon mark head 3 can be attached to the yoke platform 33. Since the marking device 1 has the above-described structure, the object to be marked can be moved. In the X direction, the mark light is deflected at the same speed, and the identification code is marked on any place of the mark object. As shown in Fig. 3, the control unit 9 is connected to include: control computer 9 资讯, information input The means 91, the information display means 92, the warning means 93, the information recording means 94, and the machine control unit 9.5. The control computer 90 can exemplify a microcomputer, a personal computer, and a workstation (for 〇纯31; 丨〇1〇, etc.) The information input means 91 can exemplify a keyboard (keyb〇ard) and/or a mouse (m〇use) and/or a switch, etc. The information display means 92 can exemplify the key image display. The display means 93 can exemplify a buzzer or a speaker, a lamp, etc., which can alert the operator. The information recording means 94 can exemplify a memory card or data A semiconductor recording medium such as a data disk, a magnetic recording medium, a magneto-optical recording medium, etc. 201105951 The machine control unit 95 can exemplify a machine (programmable controller) or a controller, etc. ^ Connected to the machine control unit 95 : X-axis position detector 4, light source 310, identification code generator 307S, 308S, and other control devices (not [position detector 4, if light is irradiated to the received energy, the light is irradiated to the aforementioned light receiving signal Output. In the present embodiment, the user changes the position of the electric irradiation. Therefore, the current value at the irradiation position is blurred by the change in the current value. The current value is stored in the control computer 9 provided in the control unit 9 by the machine-controlled single-machine control unit 95 by operating the respective devices or by setting the position and/or the marking condition to the control signal. The line ' can be confirmed by the information display means 92. Further, the above-described coating conditions to be set can be read by the information recording means 94 of the brain, and can be read as appropriate. [Fig. 4 shows that the object 10 for displaying the marking program for each step is carried on the table 22 (si 01). (sl〇2) Next, the alignment operation on the mark object 1 is read. It is called a programmable controller (motion channel 21, γ axis platform 33, means 305, current sweep 8). Which of the four places is generated by the light portion', the information of the flow value corresponding to the collimated light can be measured by the light receiving position element 95 of the pre-collimated light. Each connected machine gives it a standstill. The connection or change can be registered using the connection J information input means 9 1 to connect to the control power h, edit, and change. Flow chart. The mark object is attached with the mark target object mark (s 1 0 3 ), and 201105951 is next, and the collimated light beam is irradiated to the position detector 4 in synchronization with the movement of the target object 1 ( (S104). At this time, the angle of the mirror 308 is rotated at a constant speed, and the light receiving portion of the position detector 4 is continuously irradiated.踝 踝 接着 Next, the amount of shift (sl 〇 5) of the irradiation position of the direct ray irradiated to the position detector 4 is measured, and an appropriate range (sl 〇 6) is determined.巧 很 „ 疋 疋 „ , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , When the object 10 is irradiated, the rotation of the scanner 308S is performed to - (2: 7). At this time, the current sweep speed is also changed to change the angle of the mirror 308M, so that the marker light: 309 is tracked and the illumination position detection is continued. When the marking is completed, the adsorption of the marking object 1〇 is released (s108), and the marking object 1〇(s1〇9) is taken out by the table 22. The offset of the known position is not In the appropriate range, the case A to C is continued according to the case where the event is selected (si 10). Case A: the execution flag (sU1). Case B: the interrupt flag (sU2). Then, the notification means 93 When the operator shifts out of the appropriate range (s 11 3 ) ', , , , and then the adsorption of the object 1 〇 is released (si 〇 8 ), the object 22 is taken out by the table 22 (sl〇9). Perform maintenance work. Moxibustion and current scanner speed gain (s 1 1 4 ), re-measure 曰15) Then judge whether the offset is within the appropriate range (s 11 6 ) If it is within the appropriate range, then the flag (s丨〇7) is implemented. If the aforementioned Zhaohong & ", the offset of the shot position is not Within the appropriate range, the speed gain (s 1 1 4) of the current scanner is again changed to 201105951, and the offset (s 11 5) is re-measured. Then, it is judged whether or not the offset is within an appropriate range (s 1 16), and if it is within the appropriate range, the flag (s 1 0 7 ) is implemented. If a change is made that the speed gain does not become within the proper range, a warning is issued (s 11 3 ), and the operator judges how it should proceed. In addition to the above-described flow, even if the object 10 to be marked is not carried on the table 22, it can be implemented. First, the collimated light is irradiated to the position detector 4. At this time, the current scanner 308S is rotated to change the angle of the mirror 30 8M at a constant speed, and the collimated ray is traced and continuously irradiated to the light receiving portion of the position detector 4. Next, the amount of shift of the irradiation position of the collimated ray that is irradiated onto the light receiving portion of the position detector 4 is measured, and it is determined whether or not it is a predetermined range set in advance. 3 If the offset amount of the irradiation position of the collimated ray is an appropriate range Then, the marker object 10 is carried on the table 2 2 to start marking. If the offset of the irradiation position is not within the proper range, the speed gain of the current scanner is changed, and the offset is measured again. Then, the amount of shift of the irradiation position of the collimated ray is measured again, and it is judged whether or not the offset is within an appropriate range. Then, if the offset amount is within an appropriate range, the marker object 10 is carried on the table 2 2 to start marking. If it is determined that there is no such offset before the start of the mark, the steps s 1 0 4 to s 1 0 6 of the measurement and determination of the offset are omitted in the above-described steps s 1 0 1 to s 1 0 9 The measurement of the offset amount may be performed by using a time when the labeling object is not marked, or the like. 19 201105951 Figure 5 is a view showing a state in which collimated light is irradiated to the position detector. The state in a certain time T X 〇 is shown by a solid line. The deflected collimation line 309A is irradiated toward the position detector 4 mounted on the stage 22 by the mirror 308M of the current scanner 3?8S attached to the head portion 3. The collimated light ray 309A may be used in the same manner as the mark light ray 309, or a part of the shape may be used or the control code generating means 3 〇 5 俾 may be used as a predetermined pattern. Further, it is also possible to use a means for illuminating the light used for collimating light 3 0 9 A in the marking head. The marker object 1 is adsorbed and held on the table 2 2, and moves at the same speed as the position detector 4, and the relative speed of each other is zero. From the aforementioned moment T X . After τ X, the second is followed by a thin two-dot chain line. The table 22a and the mark object 丨〇a and the position detector 4a move in the X direction to the right (that is, in the direction indicated by the arrow Μ). The collimated light ray 309A is: control current scanner 3 0 8 S俾 tracking mark object 1 0 a, the angle of the mirror 308M of the current tracer 308S is changed, and the collimated light beam 3 is changed in the direction indicated by the arrow Μ 〇9a. When the movement of the mark object 1 〇 is tracked, and the speed of the angle of the mirror 308M is changed, that is, the speed at which the deflection angle of the light deflection means is changed is appropriate, the position of the light that is irradiated to the light receiving portion of the position detector 4 does not change. It can be said that the relative speed is the same. If the relative speed is the same, then there is no mark offset, and the recognition performance of the marked identification code is improved. Therefore, the set value of the speed at which the movement of the mark object 1 追踪 is tracked and the degree of deflection is changed is set as a speed benefit. Right does not change the above-mentioned speed gain setting value, in a short period of time, the actual side of the light is recorded and the angle is changed to the angle of the change of the angle of the 201105951 angle. However, if the period of the long day is transmitted, the change over time changes and changes occur. The position detector 4 can exemplify a PSD (Position Detection Element). The detector 4 is provided with an element that outputs a position of the center of gravity corresponding to the light to be irradiated. It is also possible to measure the current signal directly or use a resistor to convert it into a signal and measure it. For example, the position detector 4 has a high frequency response performance, and each time mark is Τχ, and a time selection signal output of 1/100 of a second is possible. 4 Repeated position meter around 1 〇〇 between the collimated light TX1 sec. The signal corresponding to the light receiving position of the collimated ray can be output every time. It is difficult to select a suitable position detector according to the wavelength of the marked light and/or the rotational speed of the wheel, the response speed and/or the price of the positional state; a collimated light hand different from the wavelength and/or output of the marked light can be used. 'Selecting a position detector suitable for the collimated light emitting means, for example, illuminating the collimated light to the position detector for only the same time as the identification j. If the aforementioned collimated light is continuously transmitted to the same place on the position detector, the relative speed is zero, and the tracking speed is appropriate. If it is in this state, the identification code δ 〇 or the collimated ray is continuously irradiated to the range of the position finder (for example, a value which is very small at 1 point of the identification code), and 盏ί k The small 'marked identification code is essentially clear, and the subsequent I is unobstructed. The scope of the month's description can also take into account the size and/or the size of the identification code. The position current pressure is required to be α, which is measured as the inspection shirt, and the illumination mirror of the line-shot code is recognized by the marker when the identification is 201105951. Contrast or the like is appropriately set in accordance with the required recognition accuracy and/or error level. Since the marking device 1 has the above-described configuration, the position detector 4 that moves in synchronization with the moving means of the marker object 10 can be used to detect the change in the irradiation position of the marker light 309. Further, the set value (speed gain) of the speed at which the deflection angle of the marker ray 309 is deflected can be changed to be adjusted to the above-described speed variation: AVm is minimized. Further, it is possible to measure the change in the irradiation position of the collimated light beam irradiated to the position detector 4, compare whether the change is within the predetermined allowable range, and determine whether or not the mark quality can be maintained. If the mark head 3 is at least one or more, it can be marked, and the number of simultaneously markable can be increased by increasing the number as needed. If the identification code is increased, there is a case where the number of codes that can be marked within a predetermined time is limited. However, by increasing the marker head, the number of codes that can be marked within a specified time can be increased. In this case, the position detector can also be added to implement the present invention by cooperating with the number of marking heads. On the other hand, it is also possible to use a dual position detector for a plurality of marker heads. The invention can be practiced by illuminating the collimated light onto a position detector mounted to the carrier by a wide illumination area of the plurality of marking heads. Even if the irradiation area of the plurality of marking heads is limited, and the light receiving portion of the same position detector cannot illuminate the light, a single-axis slider (s 1 i der ) mechanism can be mounted on the carrying platform. A position detector is mounted on the single-axis slider to move the position detector in the Y direction. It is also possible to use a position detector for position detection of collimated rays from a plurality of marking heads in the form of 22 201105951. It is possible to eliminate the variation in the position detection accuracy due to the deviation of each of the measuring instruments by using a common position detector. Alternatively, the position detector may be provided at each of the front and rear ends of the movement direction of the stage. Even if the identification code is increased without increasing the marker head, a method of increasing the number of codes that can be marked within a prescribed time can be made to reciprocate and mark. If one marker head position detector is one, only one of the trip or return trips can be confirmed before the ID is about to be exposed. However, if the position detectors are provided at the front and rear ends of the movement direction of the stage, the rotation speed of the deflection means when the direction of the arrow of the movement stage in the X direction is confirmed immediately before the mark, and the movement stage and the X The direction of the arrow is opposite to the direction of rotation of the means. According to this, even in the case where the marking operation is performed in the reciprocating manner, the effect of the processing time can be shortened. The invention can be used for markings other than planar, plate-like objects. For example, the object to be marked may be a continuous sheet-like object. Fig. 6 is a perspective view showing a marking device of a continuous sheet which is an example of another embodiment of the present invention. In the figure, the three axes of the orthogonal coordinate system are X, Y, and Z, with the XY plane as the horizontal plane and the Z direction as the vertical direction. In particular, the Z direction is in the direction of the arrow, and the reverse direction is below. The marking device 5 comprises: a device frame 50; a π-shaped structure composed of a pillar 51 and a beam 52 attached to the device frame 50; 201105751; a γ-axis platform 53 mounted on the beam 52; Marking head 3 on y-axis stage 53; control unit 9. The apparatus frame 50 is provided with a transport roller for transporting a continuous and sheet-like object 11 to be transported (仏1"61^1>() 1161〇548, '*54b; The winding rollers 55a and 55b of the object 11. The target object 11 is fed at a predetermined speed by a rotation operation of a motor (not shown) attached to the winding roller 55c (not shown). The position detector 4b is attached to the end of the winding roller 55a, and can be rotationally moved in synchronization with the feeding movement of the marking object 11. The marking head 3 and/or the control unit 9 of the marking device 5 serve as a marking device. The same machine configuration is further connected to the position detector 4b of the winding roller 55a and the motor attached to the winding roller 55c. The position detector 讣 is an electrical c〇ntact that can be rotated infinitely. A mechanism (a so-called rotary joint) is connected to the machine control unit 95 of the control unit 9. The position detector 4b of the end portion of the winding roller 55a can also be operated in synchronization with the rotation of the winding roller 55a. It is not limited to only rotation, and it can also perform reciprocating motion. The above-described infinitely rotatable electrical contact mechanism is connected to the position detector 4b and the machine control unit 95 of the control unit 9. ^ Since the standard device 5 is configured as described above, it is possible to mark the continuous sheet. The collimated ray is irradiated and the ambiguity of the mark is measured, and the identification code is marked. According to this, it is not necessary to interrupt the production of the ambiguity of the mark, and the number of products produced within a predetermined time can be maintained. IS] 24 201105951 It is used for marking by exposure, and the labeling object is coated with a photosensitive resin, and the light used for marking is ultraviolet light or the like having a wavelength of 'wavelength that can cure or soften the photosensitive resin. When the invention is used, the mark of the exposure mode can detect the change of the relative movement speed without developing the detour, and the identification code can be detected in advance to generate blur. Therefore, the development process can be eliminated. The labor time and/or waiting time spent on the present invention is also used in the surface of the target object. Direct mark of processing. When the light source and/or the marker light is set to a wavelength and/or energy of light that can change the surface state of the object to be marked, the direct mark is used. If the present invention is used for the direct mark, The change of the relative moving speed can be detected before the manufactured article is directly marked, and the identification code can be detected in advance to generate blur. Therefore, the generation of the product having the poor identification code can be prevented. The present invention can also be used for marking the inside of the marking object. The internal marking is the internal marking when the light source and/or the marking light satisfies the condition for degrading the inside of the material of the marking object. In the above internal mark, in the case where the mark is defective, it is impossible to mark after grinding the surface or the like. If the present invention is used for internal marking, the change in relative movement speed can be detected before the article manufactured by the mark is directly attached, and the identification code can be detected in advance to generate blur. Therefore, it is possible to prevent the occurrence of an article having a poor identification code. If the moving speed of the marking object 10 and the position detector 4 are the same when the current mirror is viewed from the work, the shape of the position 25 25, 059, 519 is synchronized, even if it is viewed from the side. The same method can be regarded as the same speed as the pattern, the w i r ί case, and the like. In the embodiment other than the above, the case where the object to be marked differs from the position detection moving speed, or the speed in the plane view is not the same, or the case where a speed reducer or the like is attached, etc. The relationship between the moving speeds and the movement can be achieved by using the proportional coefficient calculation as the same speed. Therefore, the present invention can also be applied to move the marking object and the position detector at the same moving speed on the plane. Outside of the situation. The above-described embodiment may be applied to a device for marking an identification code and a method of attaching an arbitrary pattern to the above-mentioned identification code. Fine will be available ~ ~ idle wood <The official teahouse is implemented by using the above-described identification code generating means 305. Any of the foregoing may exemplify the name or logo of the misalignment mark or the name of the manufacturer, the article * or the type of the article or the additional information of the manufacturing lot, etc., other figures or symbols I. ι ^ and 'the circuit pattern (ci rrMl; + ^ Fcult Pattern) for electric wiring ( φ rmMl; + ^ Fcult Pattern) or the drawing of the shape processing b is also treated as an arbitrary pattern. By the above, it is possible to track the movement of the mark object with respect to the mark of the movement of the mark of the arbitrary sound & F1 macro, and the π π π 、 、 、 、 、 、 、 、 、 、 、 、 使用 使用 使用 使用Half, mark it. And it can be a big blur. Fig. 1 is a perspective view showing an example of an embodiment of the present invention. Fig. 2 is a perspective view showing an essential part of an example of an embodiment of the present invention. Fig. 3 is a system configuration diagram showing an example of an embodiment of the present invention. Fig. 4 is a flow chart showing an example of an embodiment of the present invention. Fig. 5 is a side view showing an example of an embodiment of the present invention. Fig. 6 is a perspective view showing an essential part of an example of another embodiment of the present invention. Fig. 7 (a) to (d) are timing charts showing the operation of each of the conventional marking device and method. [Description of main component symbols] 1. 5: Marking device 2: Platform unit 3: Head 4, 4 a, 4 b : Position detector 9 : Control unit I (h mark object 10a: object
II :基板I DII : Substrate I D
1 2、5 6 :被標記的個片I D 1 3、5 7 :個片I D的標記場所 2 0 :裝置底座 2 1 : X軸平台 [S] 27 201105951 22 、 22a:台子 3 0 :標記頭部 3 1、5 1 :支柱 32 ' 52:梁 33、53:Y軸平台 54a、54b:輸送滾子 55a、55b、55c :捲繞滾子 5 0 :裝置框架 9 0 ·.控制用電腦 91 :資訊輸入手段 9 2 :資訊顯示手段 9 3 :警告手段 9 4 :資訊記錄手段 95 :機器控制單元 3 0 1 :光源 30 2、307M、3 08M:鏡子 3 0 3、3 0 4 :中繼透鏡 3 0 5 :識別碼產生手段 3 0 6 :開口 3 0 7S、308S :電流掃描器 3 0 9 :標記光線 30 9A、3 0 9a:準直光線 281 2, 5 6 : Marked piece ID 1 3, 5 7 : Marking place of piece ID 2 0 : Device base 2 1 : X-axis platform [S] 27 201105951 22 , 22a: Table 3 0 : Marker Part 3 1 , 5 1 : Pillar 32 ' 52 : Beam 33 , 53 : Y-axis table 54a , 54b : Transport roller 55a , 55b , 55c : Winding roller 5 0 : Device frame 9 0 · Control computer 91 : Information input means 9 2 : Information display means 9 3 : Warning means 9 4 : Information recording means 95: Machine control unit 3 0 1 : Light source 30 2, 307M, 3 08M: Mirror 3 0 3, 3 0 4 : Relay Lens 3 0 5 : identification code generating means 3 0 6 : opening 3 0 7S, 308S: current scanner 3 0 9 : marking light 30 9A, 3 0 9a: collimated light 28