JP2002090682A - Galvanometer, position-correcting method for the galvanometer, laser beam machining apparatus using the galvanometer, and laser beam machining method using the galvanometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To correct errors in positioning irradiation with a laser light beam due to the variation of a galvanomirror rotational position detection signal, resulting from secular changes of the capacitance sensor of a galvanometer. SOLUTION: An origin sensor 3, which detects an origin and a gain sensor 4 which detects a gain correction point are provided and the origin, is corrected by adding the difference between the coordinate value obtained, when the galvanomirror 2 is moved toward the origin sensor 3 and then the origin sensor 3 turns on and the coordinate value, when the movement of the galvanomirror 2 to the origin with a current command signal as an external signal is completed as an origin correction quantity to the current command signal. Furthermore, the gain is corrected by adding the difference between the relative quantity of the coordinate value, when the galvanomirror 2 is moved and the orign sensor 3 and gain sensor 4 turn on and the relative quantity of the coordinate value, when the movement of the galvanomirror 2 to the origin and gain correction point with the external signal is completed as a gain correction quantity to the current command signal.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a galvanometer capable of correcting the rotation position of a galvanometer mirror when scanning a laser beam, a method of correcting the rotation position, and a laser processing apparatus and a laser processing method using the galvanometer. .

[0002]

2. Description of the Related Art In recent years, a laser processing technique is often used for drilling, cutting, welding, and the like of a workpiece. In particular, in the case of high-density circuit boards, high-speed hole processing and high-precision processing such as processing positions and dimensions are indispensable. In addition, a laser drilling technique using an optical scanning optical system galvanometer is suitably employed.

In this laser drilling technique, a laser beam reflected by a galvanometer mirror attached to the galvanometer is condensed by a condenser lens and radiated onto an irradiation plane of a workpiece to be melted or evaporated to form a hole. This is a drilling technology.

The galvanometer controls the rotation drive unit of the galvanometer mirror by inputting numerical data representing the irradiation position to a galvanometer control device for positioning the irradiation of the laser beam, so that the laser beam is irradiated on the irradiation plane of the workpiece. Is scanned.

Further, in the laser drilling technique using the galvanometer, it is required that a wide driving angle (generally about ± 20 °), accuracy of irradiation positioning on a micrometer order, and high-speed irradiation positioning be required. Have been. Therefore, the rotation position (rotation angle) of the galvanomirror
Generally, a capacitance sensor capable of detecting a small angle at high speed is used as a sensor (rotational position detection sensor) for detecting the rotation angle.

Hereinafter, a conventional galvanometer control system will be described with reference to the drawings. FIG. 4 is a block diagram of a conventional galvanometer control system. In the conventional galvanometer control system shown in FIG. 4, a galvanometer mirror 10 is output from a position command generator 15 included in the galvanometer controller 12.
Is output as a galvanomirror rotation position command signal for rotating the lens to a desired rotation position. On the other hand, a detection signal of the rotation position of the galvanomirror 10 (galvanomirror rotation position detection signal) is output from the capacitance sensor 9 which is a rotation position detection sensor, and the galvanomirror rotation position detection signal is output from the position detector 13. It is converted into an actual position data signal indicating the actual rotational position of the galvanomirror 10 and output.

The current command signal generator 14 performs a control process so that the deviation between the galvanomirror rotation position command signal and the actual position data signal becomes zero, and calculates a current command value at which the deviation becomes zero. To output a current command signal.

The driver integrated circuit 11 performs the above-described feedback control to thereby control the galvanomirror 1
The control can be performed with high accuracy so that the actual rotation position of 0 coincides with the galvanomirror rotation position command signal from the position command generator 15.

Note that the galvanometer mirror rotation position detection signal output from the capacitance sensor 9 is not fed back to the galvanometer control device 12, and is determined after the galvanometer mirror rotation position command signal is output from the position command generator. It is considered that the rotation positioning of the galvanomirror has been completed by the lapse of time.

FIG. 5 shows how a laser beam emitted from a laser oscillator (not shown) is irradiated and positioned by a galvanomirror 10. When laser processing is performed at the processing point 19 on the irradiation plane of the workpiece, the laser beam 17 is irradiated to the processing point 19 by fixing the rotation position of the galvanomirror 10 in a solid line state, and the processing is performed. . Next, when laser processing is performed at the processing point 20, the galvanomirror 10 is rotated in the rotation direction 18, and the rotation position is fixed in a state where the galvanomirror 10 is shown by a broken line, so that the laser beam 17 is moved to the processing point 20. Irradiation and processing are performed.

[0011]

However, a capacitance sensor generally used as a rotational position detection sensor of a galvanometer has a structure in which its output is changed due to changes in the surrounding environment such as temperature and humidity or changes over time. There is a possibility that the galvanomirror rotation position detection signal, which is a signal, fluctuates. Therefore, the rotation position of the galvanometer mirror is not accurately detected, and the galvanometer rotation position detection signal including an error is input to the position detector, and becomes the actual position data indicating the rotation position deviated from the actual rotation position. Is input to the current command signal generator. As a result, when controlling the rotation of the galvanomirror so that the desired irradiation position is irradiated with the laser beam by the current command signal from the current command signal generator, the galvanomirror is rotated to a position shifted from the desired rotation position. It may be controlled, causing an error in the irradiation position. That is, when the galvanomirror rotation position detection signal fluctuates, the rotation positioning accuracy of the galvanomirror decreases, and a desired irradiation position cannot be irradiated with a laser beam, and the processing accuracy decreases.

[0012] Of the temperature and humidity changes in the surrounding environment and changes over time that cause the galvanomirror rotation position detection signal to fluctuate, the temperature and humidity can be controlled to be constant by air conditioning. The laser beam irradiation positioning error caused by the laser beam irradiation can be eliminated, but the temporal change such as temperature drift due to continuous use cannot be managed, and the laser beam irradiation positioning error due to the time change cannot be eliminated. was there.

Further, in recent years, accurate laser beam irradiation positioning on the order of micrometers has been required on an irradiation plane of a workpiece, and the laser beam irradiation positioning error due to the above-mentioned change over time has become increasingly problematic. Is coming.

The present invention has been made in view of the above-mentioned conventional problems, and provides a galvanometer and a position correcting method for correcting an irradiation positioning error of a laser beam caused by a change in a galvanomirror rotational position detection signal caused by a change with time. In addition, an object of the present invention is to provide a laser processing apparatus and a laser processing method that can perform high-precision laser processing with high productivity by using the galvanometer and the position correction method.

[0015]

Means for Solving the Problems Claim 1 of the present invention
The galvanometer described is a galvanometer mirror that reflects a laser beam, a galvanometer mirror position detector that detects the position of the galvanometer mirror, and at least one position detection sensor that operates when the galvanometer reaches a predetermined position. Storage means for storing the coordinate values detected by the galvanomirror position detecting means, and the galvanomirror position detecting means detecting when the galvanomirror is moved in the direction of the predetermined position and the position detecting sensor is activated. The coordinate value stored in the storage means and the galvanomirror are moved in the direction of the predetermined position by an external signal, and the galvanomirror position detecting means is moved at a predetermined time after the external signal is output. Means for detecting and comparing the coordinate values stored in the storage means. And performing correction of the predetermined position of the over.

According to a second aspect of the present invention, there is provided a galvanometer according to the first aspect, wherein the galvanometer mirror, the galvanometer mirror position detecting means, and an arbitrary predetermined position as an origin. An origin sensor that operates when the galvanomirror reaches the origin,
Any predetermined position other than the origin is set as a gain correction point,
A gain sensor that operates when the galvanomirror reaches the gain correction point, the storage unit having a function of storing a relative amount of a coordinate value detected by the galvanomirror position detection unit, and the galvanomirror moving in the direction of the origin. And the coordinate value stored in the storage means detected by the galvanomirror position detecting means when the origin sensor is activated, and the galvanomirror is moved in the direction of the gain correction point to activate the gain sensor. At this point, the galvanomirror position detecting means detects the relative amount with respect to the coordinate value stored in the storage means, moves the galvanomirror in the direction of the origin by an external signal, and outputs a predetermined amount after the external signal is output. A coordinate value detected by the galvanomirror position detection means and stored in the storage means at a point in time when The galvanomirror is moved in the direction of the gain correction point by the external signal, and the coordinate value stored in the storage means detected by the galvanomirror position detection means at a point in time when a predetermined time elapses after the external signal is output. The gain of the galvanomirror is corrected by using the comparing means having a function of comparing the two relative quantities with each other.

According to a third aspect of the present invention, there is provided the galvanometer according to the second aspect, wherein a plurality of the origin sensors and a plurality of the gain sensors are used to correct the gain of the galvanometer mirror. Is performed.

According to a fourth aspect of the present invention, there is provided a galvanometer position correcting method, wherein the galvanometer of the galvanometer is moved in the direction of a predetermined position, and the position detection sensor is activated when the galvanometer mirror reaches the predetermined position. After storing the coordinate values at the time of the operation, the galvanomirror is moved from the predetermined position to an appropriate position, and then the galvanomirror is moved in the direction of the predetermined position based on an external signal. A coordinate value at a point in time when a predetermined time has elapsed since the signal was output is stored, the two stored coordinate values are compared, and the comparison result is given to an external signal, so that a predetermined position of the galvanomirror is determined. The correction is performed.

According to a fifth aspect of the present invention, there is provided a galvanometer position correcting method according to the fourth aspect, wherein an arbitrary predetermined position is set as an origin, and the galvanometer mirror is connected to the origin. When the position detection sensor that operates when the position reaches the origin is set as the origin sensor, an arbitrary predetermined position other than the origin is set as the gain correction point, and the position detection sensor that operates when the galvanomirror reaches the gain correction point is the gain sensor. After the position is corrected at the origin, the galvanomirror is moved in the direction of the origin, a coordinate value at the time when the origin sensor is activated is stored, and the galvanomirror is moved to the gain correction point. Direction, the coordinate value at the time when the gain sensor is operated is stored, and the relative amount of the two coordinate values is stored. The galvanomirror is moved in the direction of the origin on the basis of a signal, a coordinate value at a point in time when a predetermined time has passed since the external signal is output is stored, and the galvanomirror is corrected for the gain based on the external signal. Move in the direction of a point, store a coordinate value at a point in time when a predetermined time has elapsed since the output of the external signal, store a relative amount of the two coordinate values, compare the two relative amounts, The gain of the galvanomirror is corrected by giving the comparison result to an external signal.

According to a sixth aspect of the present invention, there is provided a galvanometer position correcting method according to the fifth aspect, wherein the plurality of origin sensors and the plurality of gain sensors are used. And correcting the gain of the galvanomirror.

According to a seventh aspect of the present invention, there is provided a laser processing apparatus using the galvanometer according to any one of the first to third aspects, wherein the galvanometer reflects a laser beam output from a laser oscillator. A desired position on a workpiece is irradiated with the laser beam.

According to another aspect of the present invention, there is provided a laser processing method using a galvanometer, wherein the galvanometer mirror is configured to reflect a laser beam output from a laser oscillator by a predetermined position. After the correction, the galvanomirror is moved so that the laser beam is irradiated to the processing point on the workpiece, a laser beam is output from a laser oscillator, and the laser beam is reflected by the galvanomirror. It is characterized by irradiating a processing point.

According to a ninth aspect of the present invention, there is provided a laser processing method using a galvanometer, wherein the laser beam output from the laser oscillator by the galvanometer position correcting method according to any one of the fifth and sixth aspects is provided. After correcting the origin and gain of the reflecting galvanometer mirror,
Moving the galvanomirror so that the laser beam is irradiated to a processing point on a workpiece, outputting a laser beam from a laser oscillator, and reflecting the laser beam by the galvanomirror to irradiate the processing point. It is characterized by.

According to the galvanometer and the method of correcting the position of the galvanometer of the present invention, it is possible to correct the irradiation positioning error of the laser beam caused by the change of the galvanometer mirror rotational position detection signal caused by the aging. According to the laser processing apparatus using the galvanometer and the laser processing method using the galvanometer, highly accurate laser processing can be performed with high productivity.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laser processing apparatus using a galvanometer according to the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic block diagram of a laser processing apparatus using the galvanometer of the present embodiment.
The laser processing apparatus using the galvanometer shown in FIG.
The laser beam 6 output from the laser oscillator 21 is reflected by the galvanomirror 2 so that the processing point 7 on the workpiece 22 is
This is a device that irradiates the workpiece 22 and performs processing such as melting on the workpiece 22. In FIG. 1, a current command signal output from a current command signal generator (see FIG. 4) is input to a galvanometer rotation drive unit (not shown) of the galvanometer 1, and the rotation output of the galvanometer rotation drive unit is passed through a shaft 5. The galvanometer mirror 2 is rotated. In addition, a capacitance sensor (see FIG. 4) is used as a rotation position detection sensor that is a galvanometer mirror position detection means of the galvanometer 1, and the capacitance sensor is attached to the shaft 5, and determines the rotation position of the galvanometer mirror 2. Detected. In the present embodiment, an output signal from the capacitance sensor that detects the rotational position of the galvanometer mirror 2 is fed back to a driver integrated circuit (see FIG. 4), and the driver integrated circuit receives the output signal from the capacitance sensor. By setting the deviation between the galvanomirror rotation position detection signal, which is the output signal of the second stage, and the galvanomirror rotation position command signal, which is an output signal from the position command generator (see FIG. 4), to 0, the rotation position of the galvanomirror 2 is changed. It is controlled with high precision.

In the galvanometer according to the present embodiment, the required driving angle of the galvanometer mirror 2 is set to a general ± 2.
0 °, origin at −20 °, gain correction point +2
0 ° position. As shown in FIG. 2, an origin sensor 3 and a gain sensor 4 are provided on the back of the galvanometer mirror 2. The origin sensor 3 and the gain sensor 4 are provided outside the required drive angle of the galvanometer mirror 2, and are out of the operation range of the galvanometer mirror 2 during laser processing, so that they do not interfere with the galvanometer mirror 2. .

Next, with the above configuration, a method of correcting a laser beam irradiation positioning error with respect to a workpiece caused by a change in the galvanomirror rotational position detection signal due to a temporal change of the capacitance sensor, that is, a method of correcting the galvanomirror. A method for correcting a rotational positioning error will be described with reference to the drawings.

FIG. 2 is a schematic diagram showing a method of correcting a rotational positioning error of the galvanometer mirror. When performing the origin correction, first, the galvanomirror 2 is moved at a low speed in the direction of the origin sensor 3, and when the galvanomirror 2 comes into contact with the origin sensor 3 and the origin sensor 3 is turned on, the output from the capacitance sensor is made. The galvanometer mirror rotational position detection signal (galvanometer rotational position coordinates) is stored in a storage unit (not shown). Next, the galvanomirror 2 is moved to an appropriate position, and the galvanomirror 2 is moved in the direction of the origin based on a current command signal that is a signal from the current command signal generator.
The galvanomirror rotation position coordinates at a point in time when a predetermined time has elapsed since the galvanomirror rotation position command signal was output from the position command generator are stored in the storage means.

The stored two galvanometer mirror rotational position coordinates are compared by comparing means (not shown), and the comparison result is stored in the storage means as the origin correction amount, and is given to the current command signal. Perform origin correction.
The storage means and the comparison means may be installed anywhere, for example, may be incorporated in a position detector (see FIG. 4). Further, the origin correction amount may be given not to the current command signal but to a galvano mirror rotation position detection signal from the capacitance sensor or an actual position data signal from the position detector.

Next, a method of performing gain correction will be described below. When performing the gain correction, the origin correction is performed by the above-described method. Then, the galvanometer mirror 2 is first moved at a low speed in the direction of the origin sensor 3 and the galvanometer mirror 2 comes into contact with the origin sensor 3 so that the origin sensor 3 is turned on. The coordinates of the galvanometer rotation position at the time of the execution are stored in the storage means. Next, the galvanomirror 2 is moved at a low speed in the direction of the gain sensor 4, and the galvanomirror rotation position coordinates at the time when the galvanomirror 2 comes into contact with the gain sensor 4 and the gain sensor 4 is turned on are stored in the storage means. Next, the stored two rotational position coordinates are compared by the comparing means, and the relative amount is stored in the storing means.

Subsequently, the galvanomirror 2 is moved in the direction of the origin on the basis of the current command signal which is a signal from the current command signal generator, and the position command generator 15 (see FIG. 4).
The galvanomirror rotation position coordinates at a point in time when a predetermined time has elapsed since the output of the galvanomirror rotation position command signal are stored in the storage means. Next, the galvanomirror 2 is moved in the direction of the gain correction point based on the current command signal which is a signal from the current command signal generator, and a galvanomirror rotation position command is issued from the position command generator 15 (see FIG. 4). The coordinates of the galvanomirror rotation position at the time when a predetermined time has elapsed since the signal was output are stored in the storage means. Next, the two stored galvanomirror rotational position coordinates are compared by the comparison means, and the relative amount is stored in the storage means.

The two stored relative amounts are compared by the comparing means, and the result of the comparison is added to the current command signal as a gain correction amount to perform gain correction. The gain correction amount may not be given to the current command signal as in the case of the origin correction amount, but may be given to a galvanomirror rotation position detection signal or the like from the capacitance sensor.

In this embodiment, when the galvanomirror comes into contact with the origin sensor 3 and the gain sensor 4, both sensors are set to be turned on.
It may be set to operate OFF, and the setting is optional for both sensors.

FIG. 3 shows the above operation. FIG.
In the above, the ideal relationship between the rotation position based on the galvanomirror rotation position command signal and the actual rotation position is when the relationship is indicated by a solid line. However, if the galvanomirror rotation position detection signal from the capacitance sensor fluctuates due to a change over time and the rotation positioning accuracy of the galvanomirror decreases, the relationship becomes a dashed line. Positions do not match. When the origin is corrected in such a relationship, the state is changed from a dashed line to a two-dot chain line, and only the origin is corrected. When the gain is further corrected, the state becomes a solid line, and the rotation position based on the rotation position command signal of the galvanometer mirror and the actual rotation position have an ideal relationship.

This correction operation may be performed at any time when the irradiation positioning accuracy is lowered, or may be performed periodically during a certain period. If the origin sensor and the gain sensor are contact sensors, for example, the detection accuracy is ± 1 [μ].
m], a high-precision sensor with a micro pressure of 1 [mg / m ² ] and a detection accuracy of 1 [mg / m ² ] may be used. These may be used, and a displacement meter using a laser is commercially available for a non-contact type sensor. , Which may be used.

In this embodiment, the origin sensor and the gain sensor are arranged on the back of the galvanomirror. However, as long as the position does not interfere with the laser beam, there is no problem even if it is on the front of the galvanomirror. Further, in the present embodiment, the galvanometer mirror is used for the detection surfaces of the origin sensor and the gain sensor, but a shaft may be used as long as it can detect the rotational position.

In this embodiment, the origin is-
The position of 20 °, the gain correction point is + 20 °, and only one origin sensor and one gain sensor were used.
The origin and the gain correction point may be anywhere within the drive angle of the galvanometer unless they are at the same position, and any number of origin sensors and gain sensors may be used. For example, when the drive angle of the galvanometer is ± 20 °, an origin sensor may be provided at a position of 0 °, and a gain sensor may be provided at each position of ± 20 °.

[0039]

As described above, according to the present invention, the error of the origin position and the error of the gain caused by the fluctuation of the output signal from the rotation position detecting sensor of the galvanometer are corrected periodically or as needed, so that it is always possible. High-precision laser beam irradiation positioning can be performed, and high-precision laser processing can be performed with high productivity.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a laser processing apparatus using a galvanometer according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing origin correction and gain correction of a galvanomirror according to the embodiment of the present invention.

FIG. 3 is a conceptual diagram showing an origin correction and a gain correction of the galvanomirror according to the embodiment of the present invention.

FIG. 4 is a block diagram of a control system of a conventional galvanometer.

FIG. 5 is a schematic view showing the principle of laser beam irradiation positioning by a conventional galvanometer.

[Description of Signs] 1 Galvanometer 2 Galvanometer mirror 3 Origin sensor 4 Gain sensor 5 Shaft 6 Laser beam 7 Processing point 8 Galvanometer 9 Capacitance sensor (rotational position detection sensor) 10 Galvanometer mirror 11 Driver integrated circuit 12 Galvanometer control device 13 Position Detector 14 Current command signal generator 15 Position command generator 16 Galvanometer control device 17 Laser beam 18 Rotation direction 19 Processing point 20 Processing point 21 Laser oscillator 22 Workpiece

Claims (9)

[Claims] A galvanomirror for reflecting a laser beam; a galvanomirror position detecting means for detecting a position of the galvanomirror; at least one position detection sensor that is activated when the galvanomirror reaches a predetermined position; Storage means for storing the coordinate values detected by the galvanomirror position detecting means; and, when the galvanomirror is moved in the direction of the predetermined position and the position detecting sensor is activated, the galvanomirror position detecting means detects the position. The coordinate value stored in the storage means and the galvanomirror are moved in the direction of the predetermined position by an external signal, and the galvanomirror position detecting means is moved at a predetermined time after the external signal is output. Means for detecting and comparing the coordinate values stored in the storage means with a predetermined value of the galvanomirror. A galvanometer, which corrects the position of the object. 2. The galvanomirror, the galvanomirror position detecting means, an origin set at an arbitrary predetermined position as an origin, and an origin sensor activated when the galvanomirror reaches the origin, an arbitrary predetermined sensor other than the origin. The position is the gain correction point,
A gain sensor that operates when the galvanomirror reaches the gain correction point; a storage unit having a function of storing a relative amount of a coordinate value detected by the galvanomirror position detection unit; And the coordinate value stored in the storage means detected by the galvanomirror position detecting means when the origin sensor is activated, and the galvanomirror is moved in the direction of the gain correction point to activate the gain sensor. At this point, the galvanomirror position detecting means detects the relative amount with respect to the coordinate value stored in the storage means, moves the galvanomirror in the direction of the origin by an external signal, and outputs a predetermined amount after the external signal is output. And the coordinate values detected by the galvanomirror position detection means and stored in the storage means at the time when the time has elapsed. The galvanomirror is moved in the direction of the gain correction point by an external signal, and when a predetermined time elapses after the external signal is output, a coordinate value detected by the galvanomirror position detection means and stored in the storage means 2. The galvanometer according to claim 1, wherein a gain of the galvanometer mirror is corrected by using a comparing unit having a function of calculating a relative amount of the two relative amounts and comparing the two relative amounts. 3. 3. The galvanometer according to claim 2, wherein a plurality of said origin sensors and a plurality of said gain sensors are used to correct the gain of said galvanometer mirror. 4. A galvanometer for moving a galvanometer of a galvanometer in a direction of a predetermined position, and storing a coordinate value at a time when a position detection sensor that operates when the galvanometer reaches the predetermined position is activated. Is moved from the predetermined position to an appropriate position, the galvanomirror is moved in the direction of the predetermined position based on an external signal, and a predetermined time has elapsed since the external signal was output. A method for correcting a position of a galvanometer, comprising storing coordinate values, comparing the stored two coordinate values, and applying a result of the comparison to an external signal to correct a predetermined position of the galvanometer mirror. 5. An origin, wherein an arbitrary predetermined position is set as an origin, a position detection sensor which operates when the galvanomirror reaches the origin is set as an origin sensor, and an arbitrary predetermined position other than the origin is set as a gain correction point, A position detection sensor that operates when the mirror reaches the gain correction point is a gain sensor. After the position is corrected at the origin, the galvanometer mirror is moved in the direction of the origin, and the origin sensor is Storing the coordinate values at the time of operating, moving the galvanomirror toward the gain correction point, storing the coordinate values at the time of operating the gain sensor, and storing the relative amount of the two coordinate values. Then, the galvanomirror is moved in the direction of the origin based on the external signal, and the coordinates at a point in time when a predetermined time has elapsed since the external signal was output. The galvanomirror is moved in the direction of the gain correction point based on an external signal, and a coordinate value at a predetermined time after the external signal is output is stored. The position of the galvanometer according to claim 4, wherein a relative amount of the value is stored, the two relative amounts are compared, and a gain of the galvanometer mirror is corrected by giving a comparison result to an external signal. Correction method. 6. The method according to claim 5, wherein a plurality of the origin sensors and a plurality of the gain sensors are used to correct the gain of the galvanometer mirror. 7. A method according to claim 1, wherein the galvanometer reflects a laser beam output from a laser oscillator to irradiate a desired position on a workpiece with the laser beam. Laser processing equipment using a galvanometer. 8. A method for correcting a position of a galvanometer according to claim 4, wherein a predetermined position of a galvanometer mirror for reflecting a laser beam output from a laser oscillator is corrected, and then the laser beam is applied to a processing point on a workpiece. Moving the galvanometer mirror so that the laser beam is emitted, outputting a laser beam from a laser oscillator, reflecting the laser beam by the galvanometer mirror, and irradiating the laser beam to the processing point. . 9. The workpiece to be processed after correcting the origin and gain of a galvanometer mirror for reflecting a laser beam output from a laser oscillator by the galvanometer position correction method according to any one of claims 5 and 6. Moving the galvanomirror so that the laser beam is irradiated to the upper processing point, outputting a laser beam from a laser oscillator, reflecting the laser beam by the galvanomirror, and irradiating the processing point. Laser processing method using a galvanometer.