CN113310672A - Device and method for detecting repeated positioning precision of galvanometer - Google Patents
Device and method for detecting repeated positioning precision of galvanometer Download PDFInfo
- Publication number
- CN113310672A CN113310672A CN202110867454.9A CN202110867454A CN113310672A CN 113310672 A CN113310672 A CN 113310672A CN 202110867454 A CN202110867454 A CN 202110867454A CN 113310672 A CN113310672 A CN 113310672A
- Authority
- CN
- China
- Prior art keywords
- galvanometer
- light spot
- test
- image
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 230000003213 activating effect Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a device and a method for detecting repeated positioning precision of a galvanometer, wherein the device comprises the following components: the device comprises a laser component, a collimation and beam expanding lens, a spectroscope, a galvanometer, a first focusing lens, a first image sensor, a second focusing lens, a second image sensor, a galvanometer control component, a control unit and a calculation unit; the first sensor is used for acquiring a light spot image of the reference light beam; the second image sensor is used for acquiring a light spot image of the test light beam; the control unit is used for controlling the galvanometer to carry out scanning for a plurality of times through the galvanometer control component; and the calculating unit is used for acquiring the real angle error of the galvanometer after the galvanometer finishes scanning for a plurality of times. The laser beam is divided into the reference beam and the test beam, and the light spot images of the two beams are obtained to offset errors, so that the position detection result of the galvanometer is more accurate, and the detection efficiency can be greatly improved.
Description
Technical Field
The invention relates to the field of optical components, in particular to a device and a method for detecting repeated positioning accuracy of a galvanometer.
Background
Laser machining has been widely used in modern manufacturing, particularly in the fields of precision machining and micromachining, and can be used for performing various machining processes such as cutting, marking, punching, engraving and the like.
The laser galvanometer is an excellent vector scanning device and is widely applied to laser processing. The repeated positioning precision of the galvanometer is one of important indexes of the performance of the galvanometer, and the repeated positioning precision of the galvanometer is high or low, so that the repeated positioning precision of laser processing equipment is directly influenced. Therefore, it is important to detect the repeated positioning accuracy of the galvanometer.
At present, detection indexes of repeated positioning precision of the galvanometer are mostly paid attention to, and influence of a detection environment on the repeated positioning precision of the galvanometer is not considered, so that the finally obtained repeated positioning precision data is low in precision.
Disclosure of Invention
The invention aims to provide a device and a method for detecting repeated positioning accuracy of a galvanometer.
In order to achieve the purpose, the invention adopts the following technical scheme:
in one aspect, a galvanometer repositioning accuracy detecting device is provided, which includes: the device comprises a laser component, a collimation and beam expanding lens, a spectroscope, a galvanometer, a first focusing lens, a first image sensor, a second focusing lens, a second image sensor, a galvanometer control component, a control unit and a calculation unit;
the laser component, the collimation beam expander, the spectroscope and the galvanometer are sequentially arranged at intervals; the first focusing lens is arranged below the spectroscope, and the first image sensor is arranged below the first focusing lens and connected with the control unit; the second focusing lens is arranged below the galvanometer, and the second image sensor is arranged below the second focusing lens and connected with the control unit; the galvanometer control assembly is correspondingly connected with the galvanometer and the control unit respectively;
the laser component is used for generating a laser beam, and the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through the collimation beam expander; the first sensor is used for acquiring a light spot image of the reference light beam; the second image sensor is used for acquiring a light spot image of the test light beam;
the control unit is used for controlling the galvanometer to carry out scanning for a plurality of times through the galvanometer control component;
the computing unit is used for acquiring the real angle error Delta of the galvanometer in the X direction after the galvanometer finishes a plurality of times of scanningφ x And the true angle error Δ in the Y directionφ y 。
Preferably, the scanning comprises: the sweep is started from zero to the maximum deflection angle and returned to zero again.
Preferably, each time the galvanometer returns to the zero point, the computing unit records the peak position of the reference beam spot image in the X directionx 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam in the X directionx 2 Peak position in Y-directiony 2 ；
And then the real angle error delta of the galvanometer in the X direction after the scanning is finished is obtained according to the formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Wherein,f 1 is the focal length of the first focusing head,f 2 the focal length of the second focusing head, thereby obtaining a plurality of galvanometers after the galvanometer completes a plurality of scansTrue angle error Δ in the X directionφ x And the true angle error Δ in the Y directionφ y 。
Preferably, the centers of the first focusing lens, the beam splitter and the first image sensor are in the same vertical direction
And on the axis, the centers of the second focusing lens, the vibrating mirror and the second image sensor are positioned on the same vertical axis.
Preferably, the collimating and beam expanding lens comprises a collimating lens or a beam expanding lens.
Preferably, the first image sensor and/or the second image sensor is a two-dimensional surface Charge Coupled Device (CCD) or
CMOS image sensors or PSD position sensors.
Preferably, the galvanometer repeated positioning precision detection device further includes:
a standard image acquisition unit for acquiring a light spot image of a reference beam formed on the first image sensor by the reference beam as a standard light spot image of the reference beam and a light spot image of a test beam formed on the second image sensor by the test beam as a standard light spot image of the test beam when the galvanometer is at a standard position;
the comparison unit is used for comparing the light spot image of the current reference light beam with the standard light spot image of the reference light beam when the galvanometer is at the current position so as to obtain a reference light beam light spot comparison result, and comparing the light spot image of the current test light beam with the standard light spot image of the test light beam so as to obtain a test light beam light spot comparison result;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, the control unit controls the galvanometer to scan for a plurality of times through the galvanometer control assembly.
Preferably, the first condition includes that the spot center offset of the reference beam does not exceed a preset value, and the first condition includes that the spot center offset of the reference beam does not exceed the preset value
The second condition includes that the spot center deviation amount of the test beam does not exceed a preset value.
The method for detecting the repeated positioning accuracy of the galvanometer comprises the following steps:
activating the laser assembly to produce a laser beam;
the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through a collimation beam expander; the first sensor acquires a light spot image of the reference light beam, and the second image sensor acquires a light spot image of the test light beam;
controlling the galvanometer to scan for a plurality of times to obtain the real angle error delta of the galvanometers in the X directionφ x And the true angle error Δ in the Y directionφ y ；
Taking a plurality of true angle errors delta in the X directionφ x Maximum value of and a number of true angle errors in Y-direction Δφ y The maximum value of (1) is used as the repeated positioning precision of the galvanometer.
Preferably, during scanning, when the galvanometer returns to a zero point each time, the peak position of the reference beam spot image in the X direction is recorded respectivelyx 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam in the X directionx 2 Peak position in Y-directiony 2 ；
Then obtaining the real angle error delta of the galvanometer in the X direction after the scanning is finished according to the following formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Wherein,f 1 is the focal length of the first focusing head,f 2 is the focal length of the second focusing head, thereby obtaining the true angle error Delta of the plurality of galvanometers in the X direction after the galvanometers complete a plurality of scansφ x And true angle error in the Y direction△φ y 。
Preferably, before controlling the galvanometer to perform scanning for a plurality of times, the method further comprises the following steps:
the galvanometer is in a standard position;
activating the laser assembly to produce a laser beam;
the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through a collimation beam expander; the reference beam passes through the first focusing lens and then is focused on the first image sensor to form a light spot image of the reference beam, and the light spot image is used as a standard light spot image of the reference beam; the test light beam enters a second focusing lens after being reflected by the vibrating mirror, and the second focusing lens focuses the test light beam on a second image sensor to form a light spot image of the test light beam to serve as a standard light spot image of the test light beam;
comparing the light spot image of the current reference light beam with the standard light spot image of the reference light beam to obtain a reference light beam light spot comparison result, and comparing the light spot image of the current test light beam with the standard light spot image of the test light beam to obtain a test light beam light spot comparison result;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, controlling the galvanometer to carry out scanning for a plurality of times.
The invention has at least the following beneficial effects:
the laser beam is divided into the reference beam and the test beam, the reference beam and the test beam are focused on the corresponding image sensors respectively, and errors caused by factors such as environment (such as platform vibration and the like) are offset by the difference value of the peak value positions of the light spot images acquired by the image sensors, so that the position detection result of the galvanometer is more accurate.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural view of a galvanometer repeated positioning precision detection device of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1:
as shown in fig. 1, the present embodiment provides a galvanometer repositioning accuracy detecting device, which includes: the device comprises a laser component 01, a collimation and beam expanding lens 02, a spectroscope 03, a galvanometer 04, a first focusing lens 05, a first image sensor 06, a second focusing lens 07, a second image sensor 08, a galvanometer control component 09, a control unit 10 and a calculation unit;
the laser assembly 01, the collimation and beam expanding lens 02, the spectroscope 03 and the vibrating lens 04 are sequentially arranged at intervals, and the centers of the laser assembly 01, the collimation and beam expanding lens 02, the spectroscope 03 and the vibrating lens 04 are all positioned on the same horizontal axis; the first focusing lens 05 is arranged below the spectroscope 03, and the first image sensor 06 is arranged below the first focusing lens 05 and is connected to the control unit 10 through a first data transmission line 14; the second focusing lens 07 is arranged below the galvanometer 04, and the second image sensor 08 is arranged below the second focusing lens 07 and is connected with the control unit 10 through a second data transmission line 13; the galvanometer control component 09 is correspondingly connected with the galvanometer 04 and the control unit 10 through a control line 11 and a third data transmission line 12 respectively; and the focal length of the first focusing head 05 isf 1 The focal length of the second focusing head 07 isf 2 ；
The laser component 01 is used for generating a laser beam, and the laser beam is split into a reference beam S1 and a test beam S2 by the beam splitter 03 after passing through the collimating and beam expanding lens 02; wherein the reference beam S1 passes through a first focusing lens 05 and then is focused on a first image sensor 06, so that the first sensor 06 acquires a spot image of the reference beam S1; the test light beam S2 enters the second focusing lens 07 after being reflected by the galvanometer 04, and the second focusing lens 07 focuses the test light beam S2 on the second image sensor 08, so that the second image sensor 08 acquires a light spot image of the test light beam S2;
the control unit 10 controls the galvanometer 04 to perform scanning for a plurality of times through the galvanometer control component 09, wherein the scanning comprises: starting to scan from the zero point to the maximum deflection angle, and returning to the zero point again, wherein in the embodiment, the scanning times are 3-5 times;
when the galvanometer 04 returns to the zero point each time, the computing unit records the peak position of the reference beam S1 spot image acquired by the first image sensor 06 in the X directionx 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam S2 in the X direction acquired by the second image sensor 08, respectivelyx 2 Peak position in Y-directiony 2 ；
Further, the calculating unit obtains the true angle error Δ of the galvanometer in the X direction after the scanning is finished according to the following formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Repeating the steps, thereby obtaining the real angle error Delta of the plurality of galvanometers in the X direction after the galvanometer 04 finishes a plurality of times of scanningφ x And the true angle error Δ in the Y directionφ y ；
Finally, a plurality of real angle errors delta in the X direction are takenφ x Maximum value of and a number of true angle errors in Y-direction Δφ y The maximum value of (1) is used as the repeated positioning accuracy of the galvanometer 04.
Therefore, in the embodiment, the laser beam is divided into two paths, namely the reference beam S1 and the test beam S2, and the two paths are focused on the corresponding image sensors respectively, and then the difference value of the peak positions of the spot images acquired by the image sensors is used for canceling out errors caused by factors such as environment (such as platform vibration) so as to enable the position detection result of the galvanometer to be more accurate.
Example 2:
the present embodiment is different from embodiment 1 only in that the centers of the first focusing lens 05, the beam splitter 03 and the first image sensor 06 in the present embodiment are on the same vertical axis, and the centers of the second focusing lens 07, the galvanometer 03 and the second image sensor 08 are on the same vertical axis.
Further, the laser assembly 01 includes a laser and a laser fiber coupling component, and a laser beam generated by the laser is coupled by the laser fiber coupling component and then is shot into the collimating beam expander 02; meanwhile, the wavelength of the laser beam can be selected according to the processing requirement, and specifically includes but is not limited to 266nm, 355nm, 450nm, 532nm, 632.8nm, 850nm, 950nm or 1064nm and the like;
further, the collimating and beam expanding lens 02 may be any component for reducing the divergence angle of the laser beam generated by the laser module 01 when the laser beam exits, including but not limited to a common laser collimating lens or a beam expanding lens; meanwhile, the first image sensor 06 and/or the second image sensor 08 are two-dimensional surface CCD or CMOS image sensors or PSD position sensors.
Example 3:
the present embodiment is different from embodiment 1 or 2 only in that the galvanometer repositioning accuracy detecting device in the present embodiment further includes:
a standard image obtaining unit, configured to obtain, when the galvanometer 04 is at a standard position, a spot image of the reference beam S1 focused through the first focusing lens 05 onto the reference beam S1 formed on the first image sensor 06 as a standard spot image of the reference beam S1, and a spot image of the test beam S2 reflected by the galvanometer 04 into the second focusing lens 07, where the second focusing head 07 focuses the test beam S2 onto the spot image of the test beam S2 formed on the second image sensor 08 as a standard spot image of the test beam S2;
a comparison unit, configured to compare the light spot image of the current reference light beam S1 acquired by the first sensor 06 with the standard light spot image of the reference light beam S1 to obtain a reference light beam light spot comparison result, and compare the light spot image of the current test light beam S2 acquired by the second image sensor 08 with the standard light spot image of the test light beam S2 to obtain a test light beam light spot comparison result, when the galvanometer 04 is at the current position;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, the control unit 10 controls the galvanometer 04 to perform scanning for a plurality of times through the galvanometer control component 09.
The first condition includes that the spot center offset of the reference beam S1 does not exceed a preset value, and the like, and the second condition includes that the spot center offset of the test beam S2 does not exceed a preset value, and the like, and of course, the first condition and the second condition may be set according to the accuracy requirement of the test.
Meanwhile, whether the galvanometer 04 is in the standard position may be determined according to the related art, for example, the step of determining whether the galvanometer 04 is in the standard position may include: the method comprises the steps of presetting a standard graph (such as a square) on a workpiece, marking a plurality of marking points (such as marking a cross-shaped position point at the middle point of each side of the square) on the standard graph, then setting a standard graph and a marking point processing path program, enabling a laser beam to process the workpiece through a vibrating mirror according to the standard graph processing path program so as to generate a processing graph and marking points on the workpiece, finally comparing the marking points on the actually obtained processing graph with the marking point positions on the standard graph, and if the position offset of the marking points and the marking point positions meets a preset condition, indicating that the vibrating mirror is at a standard position at the moment.
In this embodiment, the comparison unit may be arranged to compare the spot image of the current reference beam S1/the test beam S2 with the standard spot image, and the next scanning is started only when the comparison result satisfies the condition, so that an obvious error caused by an obvious incorrect position of the galvanometer may be eliminated in advance, thereby greatly reducing the workload of the subsequent calculation unit and improving the detection efficiency.
Example 4:
the present embodiment provides a method for detecting repeated positioning accuracy of a galvanometer, which is implemented by the repeated positioning accuracy detection apparatus of any one of embodiments 1 to 3, and includes the following steps:
s1, starting the laser assembly 01 to generate a laser beam;
s2, the laser beam passes through a collimation and beam expansion lens 02 and then is divided into a reference beam S1 and a test beam S2 by the beam splitter 03;
and the reference beam S1 passes through a first focusing lens 05 and then is focused on a first image sensor 06, so that the first sensor 06 acquires a spot image of the reference beam S1;
the test light beam S2 enters the second focusing lens 07 after being reflected by the galvanometer 04, and the second focusing lens 07 focuses the test light beam S2 on the second image sensor 08, so that the second image sensor 08 acquires a light spot image of the test light beam S2;
s3, the control unit 10 controls the galvanometer 04 to perform scanning for a plurality of times through the galvanometer control component 09, and the computing unit records the peak position of the reference beam S1 spot image acquired by the first image sensor 06 in the X direction when the galvanometer 04 returns to the zero point every timex 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam S2 in the X direction acquired by the second image sensor 08, respectivelyx 2 Peak position in Y-directiony 2 ；
The calculating unit then obtains the real angle error delta of the galvanometer in the X direction after the scanning is finished according to the following formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Therefore, after the galvanometer 04 finishes scanning for a plurality of times, the real angle error delta of the galvanometers in the X direction is obtainedφ x And the true angle error Δ in the Y directionφ y ；
S4, taking a plurality of true angle errors delta in the X directionφ x Maximum value of and a number of true angle errors in Y-direction Δφ y The maximum value of (1) is used as the repeated positioning accuracy of the galvanometer 04.
Preferably, before the control unit 10 controls the galvanometer 04 to perform scanning for several times through the galvanometer control component 09, the method further includes the following steps:
s11, enabling the galvanometer 04 to be at a standard position, and specifically comprising the following steps:
presetting a standard graph (such as a square) on a workpiece, marking a plurality of marking points (such as marking a cross-shaped locus at the middle point of each side of the square) on the standard graph, then setting a standard graph and a marking point processing path program, enabling a laser beam to pass through a vibrating mirror 04 and process the workpiece according to the standard graph processing path program so as to generate a processing graph and marking points on the workpiece, finally comparing the marking points on the actually obtained processing graph with the marking points on the standard graph, if the position offset of the marking points and the marking points on the standard graph meets a preset condition, indicating that the vibrating mirror 04 is at a standard position at the moment, if the position offset of the vibrating mirror 04 does not meet the preset condition, adjusting the position of the vibrating mirror 04, and repeating the steps until the vibrating mirror 04 is at the standard position;
s12, starting the laser assembly 01 to generate a laser beam;
s13, the laser beam passes through a collimation and beam expansion lens 02 and then is divided into a reference beam S1 and a test beam S2 by the beam splitter 03;
the reference beam S1 passes through the first focusing lens 05 and then is focused on the first image sensor 06 to form a spot image of the reference beam S1 as a standard spot image of the reference beam S1;
the test light beam S2 enters the second focusing lens 07 after being reflected by the galvanometer 04, and the second focusing lens 07 focuses the test light beam S2 on the second image sensor 08 to form a light spot image of the test light beam S2 to serve as a standard light spot image of the test light beam S2;
s14, comparing the spot image of the current reference beam S1 acquired by the first sensor 06 with the standard spot image of the reference beam S1 to obtain a reference beam spot comparison result, and comparing the spot image of the current test beam S2 acquired by the second image sensor 08 with the standard spot image of the test beam S2 to obtain a test beam spot comparison result;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, the control unit 10 controls the galvanometer 04 to perform scanning for a plurality of times through the galvanometer control component 09.
In summary, the present invention can divide the laser beam into the reference beam S1 and the test beam S2, and focus the reference beam S1 and the test beam S2 on the corresponding image sensors respectively, and then cancel out errors caused by factors such as environment (e.g., platform vibration) by the difference between the peak positions of the spot images acquired by the image sensors, so as to make the position detection result of the galvanometer more accurate, and further eliminate obvious errors caused by the obvious incorrect positions of the galvanometer through the preset conditions, thereby greatly reducing the workload of the subsequent computing units and improving the detection efficiency.
It should be noted that the technical features of the above embodiments 1 to 4 can be arbitrarily combined, and the technical solutions obtained by combining the technical features belong to the scope of the present application.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made without departing from the spirit and scope of the invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a galvanometer repositioning accuracy detection device which characterized in that includes: the device comprises a laser component, a collimation and beam expanding lens, a spectroscope, a galvanometer, a first focusing lens, a first image sensor, a second focusing lens, a second image sensor, a galvanometer control component, a control unit and a calculation unit;
the laser component, the collimation beam expander, the spectroscope and the galvanometer are sequentially arranged at intervals; the first focusing lens is arranged below the spectroscope, and the first image sensor is arranged below the first focusing lens and connected with the control unit; the second focusing lens is arranged below the galvanometer, and the second image sensor is arranged below the second focusing lens and connected with the control unit; the galvanometer control assembly is correspondingly connected with the galvanometer and the control unit respectively;
the laser component is used for generating a laser beam, and the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through the collimation beam expander; the first sensor is used for acquiring a light spot image of the reference light beam; the second image sensor is used for acquiring a light spot image of the test light beam;
the control unit is used for controlling the galvanometer to carry out scanning for a plurality of times through the galvanometer control component;
the computing unit is used for acquiring the real angle error Delta of the galvanometer in the X direction after the galvanometer finishes a plurality of times of scanningφ x And the true angle error Δ in the Y directionφ y 。
2. The galvanometer repositioning accuracy detection device of claim 1, wherein the scanning comprises: the sweep is started from zero to the maximum deflection angle and returned to zero again.
3. The galvanometer repositioning accuracy detection device of claim 2, wherein the vibratorWhen the mirror returns to the zero point each time, the computing unit respectively records the peak position of the reference beam spot image in the X directionx 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam in the X directionx 2 Peak position in Y-directiony 2 ；
And then the real angle error delta of the galvanometer in the X direction after the scanning is finished is obtained according to the formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Wherein,f 1 is the focal length of the first focusing head,f 2 is the focal length of the second focusing head, thereby obtaining the true angle error Delta of the plurality of galvanometers in the X direction after the galvanometers complete a plurality of scansφ x And the true angle error Δ in the Y directionφ y 。
4. The galvanometer repositioning accuracy detection device of claim 1, wherein said first step
The centers of the focusing lens, the spectroscope and the first image sensor are positioned on the same vertical axis, and the centers of the second focusing lens, the vibrating mirror and the second image sensor are positioned on the same vertical axis.
5. The galvanometer repositioning accuracy detection device of claim 1, wherein said first step
The first image sensor and/or the second image sensor is a two-dimensional surface sub CCD or CMOS image sensor or PSD position sensor.
6. The galvanometer repositioning accuracy detecting device according to claim 1, further comprising:
a standard image acquisition unit for acquiring a light spot image of a reference beam formed on the first image sensor by the reference beam as a standard light spot image of the reference beam and a light spot image of a test beam formed on the second image sensor by the test beam as a standard light spot image of the test beam when the galvanometer is at a standard position;
the comparison unit is used for comparing the light spot image of the current reference light beam with the standard light spot image of the reference light beam when the galvanometer is at the current position so as to obtain a reference light beam light spot comparison result, and comparing the light spot image of the current test light beam with the standard light spot image of the test light beam so as to obtain a test light beam light spot comparison result;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, the control unit controls the galvanometer to scan for a plurality of times through the galvanometer control assembly.
7. The galvanometer repositioning accuracy detection device of claim 6, wherein said first step
The second condition includes that the spot center deviation of the test beam does not exceed a preset value.
8. Vibration realized by using the galvanometer repeated positioning precision detection device of any one of claims 1 to 7
The method for detecting the repeated positioning accuracy of the mirror is characterized by comprising the following steps of:
activating the laser assembly to produce a laser beam;
the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through a collimation beam expander; the first sensor acquires a light spot image of the reference light beam, and the second image sensor acquires a light spot image of the test light beam;
controlling the galvanometer to scan for a plurality of times to obtain the real angle error delta of the galvanometers in the X directionφ x And the true angle error Δ in the Y directionφ y ；
Taking a plurality of true angle errors delta in the X directionφ x Maximum value of and a number of true angle errors in Y-direction Δφ y The maximum value of (1) is used as the repeated positioning precision of the galvanometer.
9. The method according to claim 8, wherein the peak position of the spot image of the reference beam in the X direction is recorded every time the galvanometer returns to the zero point during scanningx 1 Peak position in Y-directiony 1 And recording the peak positions of the spot images of the test beam in the X directionx 2 Peak position in Y-directiony 2 ；
Then obtaining the real angle error delta of the galvanometer in the X direction after the scanning is finished according to the following formula (1)φ x And the true angle error Δ in the Y directionφ y ；
Wherein,f 1 is the focal length of the first focusing head,f 2 is the focal length of the second focusing head, thereby obtaining the true angle error Delta of the plurality of galvanometers in the X direction after the galvanometers complete a plurality of scansφ x And the true angle error Δ in the Y directionφ y 。
10. The galvanometer repositioning accuracy detection method of claim 8, further comprising, before controlling the galvanometer to perform a plurality of scans, the steps of:
the galvanometer is in a standard position;
activating the laser assembly to produce a laser beam;
the laser beam is divided into a reference beam and a test beam by the spectroscope after passing through a collimation beam expander; the reference beam passes through the first focusing lens and then is focused on the first image sensor to form a light spot image of the reference beam, and the light spot image is used as a standard light spot image of the reference beam; the test light beam enters a second focusing lens after being reflected by the vibrating mirror, and the second focusing lens focuses the test light beam on a second image sensor to form a light spot image of the test light beam to serve as a standard light spot image of the test light beam;
comparing the light spot image of the current reference light beam with the standard light spot image of the reference light beam to obtain a reference light beam light spot comparison result, and comparing the light spot image of the current test light beam with the standard light spot image of the test light beam to obtain a test light beam light spot comparison result;
and when the reference beam light spot comparison result meets a first condition and/or the test beam light spot comparison result meets a second condition, controlling the galvanometer to carry out scanning for a plurality of times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110867454.9A CN113310672B (en) | 2021-07-30 | 2021-07-30 | Device and method for detecting repeated positioning precision of galvanometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110867454.9A CN113310672B (en) | 2021-07-30 | 2021-07-30 | Device and method for detecting repeated positioning precision of galvanometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113310672A true CN113310672A (en) | 2021-08-27 |
| CN113310672B CN113310672B (en) | 2021-10-12 |
Family
ID=77382465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110867454.9A Active CN113310672B (en) | 2021-07-30 | 2021-07-30 | Device and method for detecting repeated positioning precision of galvanometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113310672B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002090682A (en) * | 2000-09-19 | 2002-03-27 | Matsushita Electric Ind Co Ltd | Galvanometer, position-correcting method for the galvanometer, laser beam machining apparatus using the galvanometer, and laser beam machining method using the galvanometer |
| US20030197117A1 (en) * | 2002-04-22 | 2003-10-23 | Knirck Jeffrey G. | Method and apparatus for compensating a vector command to a galvanometer with light beam pointing error information |
| JP2004177502A (en) * | 2002-11-25 | 2004-06-24 | Takano Co Ltd | Laser scanning device |
| CN106153626A (en) * | 2015-04-13 | 2016-11-23 | 无锡迈福光学科技有限公司 | A kind of surface blemish optical detection apparatus and detection method thereof |
| CN108387176A (en) * | 2018-02-09 | 2018-08-10 | 武汉网锐检测科技有限公司 | A kind of measurement method of laser galvanometer repetitive positioning accuracy |
| CN109332879A (en) * | 2018-09-17 | 2019-02-15 | 上海航天设备制造总厂有限公司 | Based on the online galvanometer positioning accuracy correction system of processing of Michelson interference and method |
| CN109570750A (en) * | 2018-12-12 | 2019-04-05 | 武汉帝尔激光科技股份有限公司 | A kind of laser galvanometer precision on-line correction system and method |
| CN109685744A (en) * | 2018-12-29 | 2019-04-26 | 西安铂力特增材技术股份有限公司 | A kind of scanning galvanometer accuracy correcting method |
| CN109773332A (en) * | 2018-12-29 | 2019-05-21 | 大族激光科技产业集团股份有限公司 | A kind of bearing calibration and more galvanometers correction system of more galvanometer systems |
| CN112304568A (en) * | 2020-09-18 | 2021-02-02 | 光量信息科技(宁波)有限公司 | Laser galvanometer calibration system based on photosensitive sensor and calibration method thereof |
-
2021
- 2021-07-30 CN CN202110867454.9A patent/CN113310672B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002090682A (en) * | 2000-09-19 | 2002-03-27 | Matsushita Electric Ind Co Ltd | Galvanometer, position-correcting method for the galvanometer, laser beam machining apparatus using the galvanometer, and laser beam machining method using the galvanometer |
| US20030197117A1 (en) * | 2002-04-22 | 2003-10-23 | Knirck Jeffrey G. | Method and apparatus for compensating a vector command to a galvanometer with light beam pointing error information |
| JP2004177502A (en) * | 2002-11-25 | 2004-06-24 | Takano Co Ltd | Laser scanning device |
| CN106153626A (en) * | 2015-04-13 | 2016-11-23 | 无锡迈福光学科技有限公司 | A kind of surface blemish optical detection apparatus and detection method thereof |
| CN108387176A (en) * | 2018-02-09 | 2018-08-10 | 武汉网锐检测科技有限公司 | A kind of measurement method of laser galvanometer repetitive positioning accuracy |
| CN109332879A (en) * | 2018-09-17 | 2019-02-15 | 上海航天设备制造总厂有限公司 | Based on the online galvanometer positioning accuracy correction system of processing of Michelson interference and method |
| CN109570750A (en) * | 2018-12-12 | 2019-04-05 | 武汉帝尔激光科技股份有限公司 | A kind of laser galvanometer precision on-line correction system and method |
| CN109685744A (en) * | 2018-12-29 | 2019-04-26 | 西安铂力特增材技术股份有限公司 | A kind of scanning galvanometer accuracy correcting method |
| CN109773332A (en) * | 2018-12-29 | 2019-05-21 | 大族激光科技产业集团股份有限公司 | A kind of bearing calibration and more galvanometers correction system of more galvanometer systems |
| CN112304568A (en) * | 2020-09-18 | 2021-02-02 | 光量信息科技(宁波)有限公司 | Laser galvanometer calibration system based on photosensitive sensor and calibration method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 李桂存 等: "基于二维振镜与位置灵敏探测器的高精度激光跟踪系统", 《中国激光》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113310672B (en) | 2021-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3605359B2 (en) | METHOD AND APPARATUS FOR CALIBRATION OF LASER PROCESSING MACHINE FOR PROCESSING WORKING MATERIAL | |
| EP3249350A1 (en) | Laser measurement system and method capable of detecting 21 geometric errors | |
| US11951564B2 (en) | Method and computer program product for OCT measurement beam adjustment | |
| CN105855696B (en) | Laser focal beam spot localization method and device | |
| JP5351639B2 (en) | On-machine measuring method and measuring apparatus | |
| US20160103443A1 (en) | Method for programming a three-dimensional workpiece scan path for a metrology system | |
| CN112484657B (en) | Laser processing device, laser processing method, and correction data generation method | |
| JP2016090520A (en) | Non-contact surface shape measurement method and device using white light interferometer optical head | |
| JPH11351858A (en) | Noncontact three-dimensional measuring equipment | |
| KR20200002916A (en) | Laser processing equipment | |
| CN105758381A (en) | Method for detecting inclination of camera die set based on frequency spectrum analysis | |
| CN113310672B (en) | Device and method for detecting repeated positioning precision of galvanometer | |
| JP2007248208A (en) | Apparatus and method for specifying shape | |
| CN113305448B (en) | Focal depth automatic compensation method, device and system | |
| JP2007010354A (en) | Device for observing/measuring surface shape of object | |
| JP2013088570A (en) | Microscope apparatus | |
| JPS59171812A (en) | Optical inspection device and method | |
| US11000917B2 (en) | Laser marking system and method for laser marking a workpiece | |
| JPS5880510A (en) | Automatic measuring device for ridgeline coordinates | |
| JP6389759B2 (en) | Non-contact edge shape measuring method and apparatus | |
| JP2001289619A (en) | Surface shape measuring method | |
| Rizki et al. | Development of adaptive laser head for compensating error of beam waist position during processing materials using laser beam spot detection method | |
| JP2021030253A (en) | Laser processing device, laser processing method and corrected data creation method | |
| CN215064363U (en) | Vertical semiconductor wafer TTV interference testing device | |
| CN110706292A (en) | Two-dimensional workbench error self-calibration method based on machine vision |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |