CN109570750A - A kind of laser galvanometer precision on-line correction system and method - Google Patents
A kind of laser galvanometer precision on-line correction system and method Download PDFInfo
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- CN109570750A CN109570750A CN201811517370.7A CN201811517370A CN109570750A CN 109570750 A CN109570750 A CN 109570750A CN 201811517370 A CN201811517370 A CN 201811517370A CN 109570750 A CN109570750 A CN 109570750A
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- 238000003384 imaging method Methods 0.000 claims abstract description 41
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
Abstract
The present invention relates to a kind of laser galvanometer precision on-line correction system and methods, the system includes control device, for placing the workbench of workpiece, first imaging device, laser galvanometer and the second imaging device, the workbench includes the feeding station set gradually, processing stations and detection station, first imaging device is set at the feeding station, the laser galvanometer is set at the processing stations, second imaging device is set at the detection station, the control device respectively with the workbench, first imaging device, the laser galvanometer and second imaging device electrical connection.Technical solution provided by the invention may be implemented to carry out on-line correction to laser galvanometer, greatly improve laser processing efficiency.
Description
Technical field
The present invention relates to technical field of laser processing more particularly to a kind of laser galvanometer precision on-line correction system and sides
Method.
Background technique
When carrying out showing methods to workpiece using laser, laser beam is usually launched by laser first, then by swashing
Light galvanometer carries out high-velocity scanning to laser beam, acts on it on workpiece, and is finally completed respective graphical processing.And with laser
The long-time service of galvanometer, precision can change because of the external factor such as environment temperature, humidity, vibration and temperature drift itself,
In order to guarantee the precision of showing methods, need irregularly to correct laser galvanometer.But laser galvanometer is corrected at present
When, it is checked after needing system-down, this has seriously affected laser processing efficiency.
Summary of the invention
In order to improve laser processing quality and efficiency, the present invention provides a kind of laser galvanometer precision on-line correction system and side
Method.
On the one hand, the present invention provides a kind of laser galvanometer precision on-line correction system, including control device, for placing work
The workbench of part, the first imaging device, laser galvanometer and the second imaging device, the workbench include the feeding work set gradually
Position, processing stations and detection station, first imaging device are set at the feeding station, and the laser galvanometer is set to
At the processing stations, second imaging device is set at the detection station, the control device respectively with the work
Make platform, first imaging device, the laser galvanometer and second imaging device electrical connection.
The control device is used for:
When current workpiece is located at the feeding station of the workbench, identified according to default center and by described first
The first workpiece image that imaging device obtains determines processing deflection parameter.
When the current workpiece is located at the processing stations of the workbench, parameter adjustment is deflected according to the processing
The laser galvanometer, and laser beam is controlled after adjusted laser galvanometer in the current work according to preset test pattern
Engraving generates multiple identification points on part.
When the current workpiece is located at the detection station of the workbench, according to the processing deflect parameter, by
The second workpiece image including multiple identification points and the test pattern that second imaging device obtains determine galvanometer
Correction parameter.
Before the processing stations that subsequent workpiece enters the workbench are processed, according to the galvanometer correction parameter
Adjust the laser galvanometer.
On the other hand, the present invention also provides a kind of laser galvanometer precision on-line correction method, this method comprises the following steps:
When current workpiece is located at the feeding station of workbench, is identified according to default center and obtained by the first imaging device
The first workpiece image determine processing deflection parameter.
When the current workpiece is located at the processing stations of the workbench, parameter is deflected according to the processing and adjusts laser
Galvanometer, and laser beam is controlled according to preset test pattern and is carved on the current workpiece after adjusted laser galvanometer
Generate multiple identification points.
When the current workpiece is located at the detection station of the workbench, parameter is deflected, by second according to the processing
The second workpiece image including multiple identification points and the test pattern that imaging device obtains determine galvanometer correction parameter.
Before the processing stations that subsequent workpiece enters the workbench are processed, according to the galvanometer correction parameter
Adjust the laser galvanometer.
The beneficial effect of laser galvanometer precision on-line correction system and method provided by the invention is that workbench drives current
Workpiece initially enters feeding station I, due to the limitation of transmission precision, when workpiece is transferred on the processing table top of workbench,
It is likely to be not on the center of processing table top, it can not be corresponding with the preset Working position of subsequent laser galvanometer.Pass through
It can determine and worked as by the first imaging device, such as the first workpiece image of high definition camera acquisition and the default center mark of laser galvanometer
Preceding workpiece deflects parameter relative to processing table top center, that is, the processing of laser galvanometer mark card.It is adjusted according to this parameter
The machined parameters of laser galvanometer, after current workpiece can be made to enter processing stations II, by the graphics processing of laser beam engraving and default
Graphics processing is consistent, and is located at the center position of workpiece.In default graphics processing, several and preset standard figure can be set
The corresponding test pattern identification point of shape, wherein test pattern identification point can be cross, convenient for identification；It is of course also possible to make
Use the existing point of default graphics processing itself as identification point, for example, when in default graphics processing there are crosspoint etc. it is easy by
As device capture point when, can directly by crosspoint of default graphics processing etc. be used as identification point.Laser-processing system is completed
After the rapid laser carving of graphics processing and identification point, current workpiece enters detection station III, and second at detection station III
Imaging device can get the second workpiece image including each identification point, pass through the identification point information and processing in second workpiece image
Deflection parameter can determine identification point parameter of laser galvanometer when without processing deflection, and then by comparing this identification point parameter
With preset standard pattern identification point parameter to obtain corresponding galvanometer correction parameter.Due to workbench can receive incessantly,
Simultaneously workpieces processing is transmitted, processing work can be entered in subsequent workpiece by carrying out detected galvanometer correction parameter to current workpiece
Position II, that is, laser-processing system start before processing to subsequent workpiece, complete the online feedback to laser galvanometer and adjust,
To guarantee that laser processing is uninterrupted, processing efficiency is greatly improved, while can be corrected in time to laser galvanometer, fully ensure that and add
Work precision.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without any creative labor, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the electrical block diagram of the laser galvanometer precision on-line correction system of the embodiment of the present invention；
Fig. 2 is the schematic diagram of the workbench of the embodiment of the present invention；
Fig. 3 is the schematic diagram of the workpiece positioned at workbench feeding station of the embodiment of the present invention；
Fig. 4 is the schematic diagram of inverse point on the workpiece of the embodiment of the present invention；
Fig. 5 is the test pattern of the embodiment of the present invention and the schematic diagram of mark figure；
Fig. 6 is the flow diagram of the laser galvanometer precision on-line correction method of the embodiment of the present invention.
Specific embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the invention.
As depicted in figs. 1 and 2, a kind of laser galvanometer precision on-line correction system provided in an embodiment of the present invention includes control
Device, the workbench for placing workpiece, the first imaging device 1, laser galvanometer 2 and the second imaging device 3, the workbench bag
The feeding station I set gradually, processing stations II and detection station III are included, the first imaging device 1 is set at feeding station I,
Laser galvanometer 2 is set at processing stations II, and the second imaging device 3 is set at detection station III, the control device difference
It is electrically connected with the workbench, the first imaging device 1, laser galvanometer 2 and the second imaging device 3.Wherein, workbench may also include
At least one removable processing table top, workpiece is adsorbable on processing table top, and moves to feeding station I, processing stations
The positions such as II and detection station III.In addition, laser beam, laser will be launched with the matched system of processing laser of laser galvanometer 2
Device can also be controlled by control device, and laser beam after laser galvanometer 2 via being projected on the workpiece on table top.
The control device is used for:
When current workpiece is located at the feeding station I of the workbench, according to the default center of laser galvanometer 2 identify and by
The first workpiece image that first imaging device 1 obtains determines processing deflection parameter.
When the current workpiece is located at the processing stations II of the workbench, parameter adjustment is deflected according to the processing and is swashed
Light galvanometer 2, and according to preset test pattern control laser beam after adjusted laser galvanometer 2 on the current workpiece
Engraving generates multiple identification points.
When the current workpiece is located at the detection station III of the workbench, parameter is deflected, by the according to the processing
The second workpiece image including multiple identification points and the test pattern that two imaging devices 3 obtain determine that galvanometer correction is joined
Number.
Before the processing stations II that subsequent workpiece enters the workbench, laser vibration is adjusted according to the galvanometer correction parameter
Mirror 2.The mode that update correction document specifically can be used is adjusted laser galvanometer 2.
In the present embodiment, workbench drives current workpiece to initially enter feeding station I, due to the limitation of transmission precision,
When workpiece is transferred on the processing table top of workbench, be likely to be not on the center of processing table top, can not with it is rear
The preset Working position of the laser galvanometer in face is corresponding.By by the first imaging device, such as the first workpiece that high definition camera obtains
The default center of image and laser galvanometer mark can determine that current workpiece is beaten relative to processing table top center, that is, laser galvanometer
The processing of mark card deflects parameter.The machined parameters that laser galvanometer is adjusted according to this parameter, can make current workpiece enter processing work
After the II of position, the graphics processing carved by laser beam is consistent with default graphics processing, and is located at the center position of workpiece.Default
In graphics processing, several test pattern identification points corresponding with preset standard figure can be set, wherein test pattern identification point
It can be cross, convenient for identification；It is of course also possible to use the existing point of default graphics processing itself as identification point, such as
It, can be directly by default graphics processing when being easy the point captured by imaging device there are crosspoint etc. in default graphics processing
Crosspoint etc. is used as identification point.After laser-processing system completes the rapid laser carving of graphics processing and identification point, current workpiece
Into detection station III, the second imaging device at detection station III can get the second workpiece image including each identification point,
By the identification point information in second workpiece image and processing deflection parameter can determine laser galvanometer when without processing deflection
Identification point parameter, and then by compare this identification point parameter with preset standard pattern identification point parameter to obtain corresponding galvanometer
Correction parameter.Since workbench can receive and send simultaneously workpieces processing incessantly, by carrying out detection acquisition to current workpiece
Galvanometer correction parameter can enter processing stations II in subsequent workpiece, that is, laser-processing system starts to carry out subsequent workpiece
Before processing, completes the online feedback to laser galvanometer and adjust, to guarantee that laser processing is uninterrupted, greatly improve processing efficiency, together
When laser galvanometer can be corrected in time, fully ensure that machining accuracy.
It should be noted that workbench can be rotary processing work platform as shown in Figure 2, can also be processed for pipeline system
Workbench.By taking rotary processing work platform as an example, it can be seen that workbench includes the multiple pivoted arm machine tables set gradually
Face rotates processing work platform stepping rotation by drivings such as DD motors, wherein DD motor etc. can be controlled by control device.
Multiple pivoted arm processing table tops successively stop in feeding station I, processing stations II, detection station III and discharge station IV etc.
It stays.Other stations such as discharge station IV can be set according to actual needs, and current workpiece can be in the band of rotary processing work platform
Under dynamic, feeding station I, processing stations II and detection station III are sequentially entered at a predetermined interval, meanwhile, subsequent workpiece can also be
Each station is sequentially entered after current workpiece.Such as current workpiece, when being located at detection station III, subsequent workpiece can be located at processing work
Position II, at this point, galvanometer correction parameter can be obtained according to current workpiece, before the subsequent workpiece to processing stations II is processed,
According to galvanometer correction parameter on-line tuning laser galvanometer, can neither interrupt laser processing process, but in time to laser galvanometer into
Row correction, while guaranteeing the efficiency and quality of processing.
Preferably, as shown in figure 3, the processing deflection parameter includes the deflection that workpiece is identified relative to the default center
Angle and offset distance.
The control device is specifically used for:
The central point of the current workpiece is determined according to first workpiece image, that is, the M point in Fig. 3.
It compares central point M and default center identifies m, m can be the vector with coordinate and direction, be determined according to comparison result
The deflection angle, enables it beDeflection angle and the offset distance of the namely M relative to m enable it for dx, dy, that is,
Lateral distance and vertical distance of the M relative to m.
Preferably, the control device is specifically used for:
Parameter is deflected according to the processing and the second workpiece image determines inverse corresponding with the identification point respectively
Point.
The mark figure including all inverse points is determined according to the inverse point.
The test pattern and the mark figure are compared, the galvanometer correction parameter is determined according to comparison result.
It specifically, is that parameter is being deflected to sharp according to processing with identification point in the graphics processing on workpiece due to actual processing
Light galvanometer, which adjusts, to be obtained after machined parameters, and whether the laser galvanometer that can not accurately embody at this time, which has, causes graphics processing abnormal
Cash as situations such as.Therefore after identification point coordinate has been determined, need to carry out inverse to it according to processing deflection parameter, it can with acquisition
The inverse point parameter of real embodiment laser galvanometer current state.
Enabling identification point is p (xp, yp), inverse point is P (XP, YP), since the coordinate of identification point can be from second workpiece image
It obtains, then can determine inverse point coordinate according to polar coordinates formula are as follows:
Preferably, as shown in Figure 4 and Figure 5, the test pattern is quadrangle, and the identification point respectively corresponds four side
Four vertex of shape.
The control device is specifically used for:
The coordinate that four identification points are determined according to the second workpiece image deflects parameter and four according to the processing
The coordinate of a identification point determines the coordinate of four inverse points；And be sequentially connected four inverse points, obtain four
The mark figure of side shape form.
Specifically, by taking the test pattern of rectangular in form as an example, there are four vertex a, b, c, d for tool, correspondingly, on workpiece
Also there are four the identification point completed the process, four inverse points A, B, C, D are respectively corresponded.After the coordinate for determining each identification point,
It can further determine that the coordinate of each inverse point, i.e. A (XA, YA)、B(XB, YB)、C(XC, YC)、D(XD, YD).Meanwhile by A, B, C, D
Four inverse points are sequentially connected, and obtain the mark figure of quadrangular forms.
It should be noted that can be by the second imaging device, such as a camera shoot all identification points simultaneously, can also be with
Each identification point is shot respectively by multiple cameras.Wherein, when shooting each identification point respectively using multiple cameras, precision is shot
It is higher, to keep the parameter of the identification point of subsequent acquisition also more acurrate, it can further improve correction accuracy.The position of multiple cameras
It sets, i.e., relative coordinate can be determined in advance, meanwhile, the different identification point that can be shot different cameral by setting correcting plate is unified extremely
In the same coordinate system.
Preferably, the correction parameter includes at least one of central point offset, breathing ratio and angular deflection.
When the difference of inverse point and vertex corresponding in test pattern, such as when 2 points of spacing is more than certain threshold value, then
Start to determine the process of each correction parameter.
Preferably, the process of the determining galvanometer correction parameter includes:
Determine that the center point coordinate of the test pattern and the intersection point of two diagonal line intersection points of the mark figure are sat
Mark deviates the difference of the center point coordinate and the intersecting point coordinate as the central point.
Specifically, after the coordinate system where having unified test pattern and having identified figure, it is separately connected AC, BD, obtains four
The diagonal line intersection point E of the mark figure of side shape form, and determine according to the coordinate of inverse point the coordinate E (X of diagonal line intersection pointE,
YE).Due to the central point e of test pattern, namely the setting coordinate of the diagonal line intersection point of the test pattern of rectangle is e at this time
(0,0), the difference of the two can centered on point offset Offset.
Preferably, the process of the determining galvanometer correction parameter includes:
The mark side length of two mark adjacent sides in the mark figure, determining and institute are determined according to the coordinate of the inverse point
Two standard adjacent sides in the corresponding test pattern in two mark adjacent side positions described in mark figure are stated, by the mark
The quotient of side length and the standard side length of the standard adjacent side is as the breathing ratio.
Specifically, two adjacent sides AB and BC in mark figure are taken, the two can determine by the coordinate of inverse point A, B, C
Length is divided into other LABAnd LBC.Due to the length L of correspondence adjacent side ab and bc in test patternab、LbcIt is determining, therefore can basis
Following formula determines the breathing ratio Scale_X of X-direction and the breathing ratio Scale_Y of Y-direction.
Scale_X=LAB/Lab。
Scale_Y=LBC/Lbc。
Preferably, the process of the determining galvanometer correction parameter includes:
Based on arctan function, determine the mark figure relative to described respectively according to the coordinate of four inverse points
The apex angle of four apex angles of test pattern deflects, using the average value of the four apex angle deflection as the angular deflection.
Specifically, determine that the apex angle of four apex angles deflects θ 1 to θ 4 according to the following formula.
θ 1=arctan ((YB-YA)/(XB-XA))。
θ 2=arctan ((YC-YB)/(XC-XB))-90。
θ 3=arctan ((YC-YD)/(XC-XD))。
θ 4=arctan ((YD-YA)/(XD-XA))-90。
With following formula, the angular deflection Δ θ is determined according to four apex angle deflections.
Δ θ=(θ 1+ θ 2+ θ 3+ θ 4)/4.
Preferably, the specific implementation that the laser galvanometer is adjusted according to the galvanometer correction parameter are as follows: according to described
Galvanometer correction parameter updates the correction document of the laser galvanometer.
After tested, it is adjusted by the central point offset, breathing ratio and/or the angular deflection that are corrected to laser galvanometer in document
Whole, the correction used time will foreshorten to second grade, and even lower than 1 second, while precision changes caused by can effectively correcting because of reasons such as temperature drifts,
Not only it can meet assembly line process requirements to avoid the lengthy process of existing bearing calibration, quickly be corrected, improve correction
Working efficiency also can effectively ensure that the correction accuracy of laser galvanometer.
As shown in fig. 6, a kind of laser galvanometer precision on-line correction method provided in an embodiment of the present invention, can be applied to above-mentioned
System, this method comprises the following steps:
101, when current workpiece is located at the feeding station of workbench, identified according to default center and by the first imaging device
The first workpiece image obtained determines processing deflection parameter.
102, when the current workpiece is located at the processing stations of the workbench, parameter adjustment is deflected according to the processing
Laser galvanometer, and according to preset test pattern control laser beam after adjusted laser galvanometer on the current workpiece
Engraving generates multiple identification points.
103, when the current workpiece is located at the detection station of the workbench, according to the processing deflect parameter, by
The second workpiece image including multiple identification points and the test pattern that second imaging device obtains determine galvanometer correction
Parameter.
104, before the processing stations that subsequent workpiece enters the workbench are processed, corrected according to the galvanometer
Parameter adjusts the laser galvanometer.
Reader should be understood that in the description of this specification reference term " one embodiment ", " is shown " some embodiments "
The description of example ", specific examples or " some examples " etc. mean specific features described in conjunction with this embodiment or example, structure,
Material or feature are included at least one embodiment or example of the invention.In the present specification, above-mentioned term is shown
The statement of meaning property need not be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described
It may be combined in any suitable manner in any one or more of the embodiments or examples.In addition, without conflicting with each other, this
The technical staff in field can be by the spy of different embodiments or examples described in this specification and different embodiments or examples
Sign is combined.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of laser galvanometer precision on-line correction system, which is characterized in that including control device, the work for placing workpiece
Platform, the first imaging device, laser galvanometer and the second imaging device, the workbench include the feeding station set gradually, processing
Station and detection station, first imaging device are set at the feeding station, and the laser galvanometer is set to described add
At work station, second imaging device is set at the detection station, the control device respectively with the workbench, institute
State the first imaging device, the laser galvanometer and second imaging device electrical connection；
The control device is used for:
When current workpiece is located at the feeding station of the workbench, is identified according to default center and be imaged by described first
The first workpiece image that device obtains determines processing deflection parameter；
When the current workpiece is located at the processing stations of the workbench, according to processing deflection parameter adjustment
Laser galvanometer, and according to preset test pattern control laser beam after adjusted laser galvanometer on the current workpiece
Engraving generates multiple identification points；
When the current workpiece is located at the detection station of the workbench, parameter is deflected, by described according to the processing
The second workpiece image including multiple identification points and the test pattern that second imaging device obtains determine galvanometer correction
Parameter；
Before the processing stations that subsequent workpiece enters the workbench are processed, adjusted according to the galvanometer correction parameter
The laser galvanometer.
2. laser galvanometer precision on-line correction system according to claim 1, which is characterized in that the processing deflects parameter
The deflection angle and offset distance identified including workpiece relative to the default center；
The control device is specifically used for:
The central point of the current workpiece is determined according to first workpiece image；
The central point and default center mark are compared, the deflection angle and the offset distance are determined according to comparison result
From.
3. laser galvanometer precision on-line correction system according to claim 2, which is characterized in that the control device is specific
For:
Parameter is deflected according to the processing and the second workpiece image determines inverse point corresponding with the identification point respectively；
The mark figure including all inverse points is determined according to the inverse point；
The test pattern and the mark figure are compared, the galvanometer correction parameter is determined according to comparison result.
4. laser galvanometer precision on-line correction system according to claim 3, which is characterized in that the test pattern is four
Side shape, the identification point respectively correspond four vertex of the quadrangle；
The control device is specifically used for:
The coordinate that four identification points are determined according to the second workpiece image deflects parameter and four institutes according to the processing
The coordinate for stating identification point determines the coordinate of four inverse points；And be sequentially connected four inverse points, obtain quadrangle
The mark figure of form.
5. laser galvanometer precision on-line correction system according to claim 4, which is characterized in that the correction parameter includes
At least one of central point offset, breathing ratio and angular deflection.
6. laser galvanometer precision on-line correction system according to claim 5, which is characterized in that the determining galvanometer correction
The process of parameter includes:
The intersecting point coordinate for determining the center point coordinate of the test pattern and two diagonal line intersection points of the mark figure, will
The difference of the center point coordinate and the intersecting point coordinate is deviated as the central point.
7. laser galvanometer precision on-line correction system according to claim 5, which is characterized in that the determining galvanometer correction
The process of parameter includes:
The mark side length of two mark adjacent sides in the mark figure, the determining and mark are determined according to the coordinate of the inverse point
Two standard adjacent sides in the corresponding test pattern in two mark adjacent side positions described in figure are known, by the mark side length
Quotient with the standard side length of the standard adjacent side is as the breathing ratio.
8. laser galvanometer precision on-line correction system according to claim 5, which is characterized in that the determining galvanometer correction
The process of parameter includes:
Based on arctan function, determine the mark figure relative to the standard respectively according to the coordinate of four inverse points
The apex angle of four apex angles of figure deflects, using the average value of the four apex angle deflection as the angular deflection.
9. laser galvanometer precision on-line correction system according to any one of claims 1 to 8, which is characterized in that described
The specific implementation of the laser galvanometer is adjusted according to the galvanometer correction parameter are as follows: update according to the galvanometer correction parameter described sharp
The correction document of light galvanometer.
10. a kind of laser galvanometer precision on-line correction method, which is characterized in that described method includes following steps:
When current workpiece is located at the feeding station of workbench, identified according to default center and obtained by the first imaging device the
One workpiece image determines processing deflection parameter；
When the current workpiece is located at the processing stations of the workbench, parameter adjustment laser vibration is deflected according to the processing
Mirror, and laser beam is controlled according to preset test pattern and carves life on the current workpiece after adjusted laser galvanometer
At multiple identification points；
When the current workpiece is located at the detection station of the workbench, parameter is deflected, by the second imaging according to the processing
The second workpiece image including multiple identification points and the test pattern that device obtains determine galvanometer correction parameter；
Before the processing stations that subsequent workpiece enters the workbench are processed, adjusted according to the galvanometer correction parameter
The laser galvanometer.
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| CN110682005A (en) * | 2019-10-16 | 2020-01-14 | 佛山科学技术学院 | Laser marking real-time correction method and control device |
| CN111843190A (en) * | 2020-06-22 | 2020-10-30 | 常州捷佳创智能装备有限公司 | Laser processing apparatus and calibration method for laser processing apparatus |
| CN112872628A (en) * | 2020-12-24 | 2021-06-01 | 苏州维嘉科技股份有限公司 | Calibration method of laser drilling machine and laser drilling machine adopting same |
| CN113310672A (en) * | 2021-07-30 | 2021-08-27 | 武汉华工激光工程有限责任公司 | Device and method for detecting repeated positioning precision of galvanometer |
| CN117620488A (en) * | 2024-01-26 | 2024-03-01 | 深圳市智鼎自动化技术有限公司 | Modularized multi-axis laser galvanometer motion controller |
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| CN112872628A (en) * | 2020-12-24 | 2021-06-01 | 苏州维嘉科技股份有限公司 | Calibration method of laser drilling machine and laser drilling machine adopting same |
| CN112872628B (en) * | 2020-12-24 | 2023-02-21 | 苏州维嘉科技股份有限公司 | Calibration method of laser drilling machine and laser drilling machine adopting same |
| CN113310672A (en) * | 2021-07-30 | 2021-08-27 | 武汉华工激光工程有限责任公司 | Device and method for detecting repeated positioning precision of galvanometer |
| CN117620488A (en) * | 2024-01-26 | 2024-03-01 | 深圳市智鼎自动化技术有限公司 | Modularized multi-axis laser galvanometer motion controller |
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