CN109685744A - A kind of scanning galvanometer accuracy correcting method - Google Patents

A kind of scanning galvanometer accuracy correcting method Download PDF

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Publication number
CN109685744A
CN109685744A CN201811653094.7A CN201811653094A CN109685744A CN 109685744 A CN109685744 A CN 109685744A CN 201811653094 A CN201811653094 A CN 201811653094A CN 109685744 A CN109685744 A CN 109685744A
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center
circle
coordinate
mark line
cross mark
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CN201811653094.7A
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CN109685744B (en
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杨东辉
王婵
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Xian Bright Laser Technologies Co Ltd
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Xian Bright Laser Technologies Co Ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/80Geometric correction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/31Calibration of process steps or apparatus settings, e.g. before or during manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/49Scanners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10004Still image; Photographic image
    • G06T2207/10008Still image; Photographic image from scanner, fax or copier
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a kind of scanning galvanometer accuracy correcting methods, print circular array in advance on preprepared Standard adjustable board first, carry out cross hairs mark in circular interior;According to central coordinate of circle O conversion cross mark line center O ' coordinate, using vector OO ' as the deviation in the center of circle and cross mark line center;Find a center of circle (n+1, m+1), the deviation coordinate O ' of measure center O, the bias vector OO ' both obtained, post-processing all the points during subtract bias vector OO ';The coordinate at a cross mark line midpoint (n ', m ') is (n ' × d, m ' × d)+OO '+OOnm';The coordinate at other cross mark line midpoints is successively handled, and calculates and obtains bias vector with the corresponding center of circle;Obtain the matrix table of each cross mark line midpoint coordinates deviation.The present invention solves the problems, such as that scanner scanning image ranging Shi Tidian precision existing in the prior art is insufficient.

Description

A kind of scanning galvanometer accuracy correcting method
Technical field
The invention belongs to metal powder lasers to melt increases material manufacturing technology field, and in particular to a kind of scanning galvanometer precision school Correction method.
Background technique
Metal powder laser fusing increases material manufacturing technology can shape complexity and the higher metal parts of accuracy.It is existing Stage metal powder laser fusing increases material manufacturing technology mostly uses galvanometer as light path control equipment.Field lens is as aggregation laser Equipment there is barrel-type distortion in principle, precision drift can also occur using a period of time after correction is good, need school again Just.The case where often will appear anamorphose when using scanner scanning image ranging, cause to propose an accuracy decline or correction Problem on deformation is still had later.High-precision image instrument can solve the problem for precision deficiency that proposes, but inconvenience is in client Scene uses High-precision image instrument.
Summary of the invention
The object of the present invention is to provide a kind of scanning galvanometer accuracy correcting methods, solve scanning existing in the prior art The problem of instrument scan image ranging Shi Tidian precision deficiency.
The technical scheme adopted by the invention is that a kind of scanning galvanometer accuracy correcting method, specifically real according to the following steps It applies:
Step 1 prints circular array in advance on preprepared Standard adjustable board, and circular array is 2n+1 row, 2m+ 1 column, n, m are integer, if adjacent two center of circle spacing is d;
Step 2 carries out cross hairs mark in circular interior;
Step 3 sets each center of circle independently justified as O, and cross mark line center is O ', according to central coordinate of circle O conversion cross Mark line center O ' coordinate, to avoid the error generated during scanner scanning, using vector OO ' as the center of circle and cross mark The deviation at line center;
Step 4 finds the circle that position is in center, i.e. a center of circle (n+1, m+1) of circular array, if central circular Coordinate points are (0,0), the deviation coordinate O ' of measure center O, the bias vector OO ' both obtained, post-processing all the points Bias vector OO ' is subtracted in the process;
Step 5, (n ', m ') a circle for the, central coordinate of circle is (n ' × d, m ' × d), a cross mark of the (n ', m ') The coordinate at line midpoint is (n ' × d, m ' × d)+OO '+OOnm';
Step 6, the coordinate for successively handling other cross mark line midpoints, and calculate and obtain bias vector with the corresponding center of circle;? To the matrix table of each cross mark line midpoint coordinates deviation, and then it is used to carry out field lens correction for drift.
The features of the present invention also characterized in that
N=5 in step 1, m=5.
D=5 in step 1.
The invention has the advantages that a kind of scanning galvanometer accuracy correcting method, carries out school using circular array correcting plate Just, it is calculated when timing is in scanning, improves computational accuracy, while improving calculating speed.Obtained deviation matrix can be used It carries out field lens correction for drift, solves the problems, such as to propose a precision at present insufficient, while solving in curstomer's site inconvenience The problem of being mentioned using High-precision image instrument.
Detailed description of the invention
Fig. 1 is a kind of scanning galvanometer accuracy correcting method flow chart of the present invention;
Fig. 2 is a kind of scanning galvanometer accuracy correcting method Plays correcting plate schematic diagram of the present invention;
Fig. 3 is the Standard adjustable board signal after carrying out cross hairs mark in a kind of scanning galvanometer accuracy correcting method of the present invention Figure;
Fig. 4 is that (0,0) puts bias vector schematic diagram in coordinate system in a kind of scanning galvanometer accuracy correcting method of the present invention;
Fig. 5 is (n ', m ') point bias vector schematic diagram in a kind of scanning galvanometer accuracy correcting method of the present invention in coordinate system;
Fig. 6 is all coordinate points entirety bias vector schematic diagrames in a kind of scanning galvanometer accuracy correcting method of the present invention.
In figure, 1. Standard adjustable boards.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
A kind of scanning galvanometer accuracy correcting method of the present invention, flow chart is as shown in Figure 1, be specifically implemented according to the following steps:
Step 1 prints circular array on preprepared Standard adjustable board 1 in advance, as shown in Fig. 2, circular array It is arranged for 2n+1 row, 2m+1, n, m are integer, if adjacent two center of circle spacing is d;
Wherein, n=5, m=5, d=5.
Step 2 carries out cross hairs mark in circular interior, as shown in Figure 3;
Step 3 sets each center of circle independently justified as O, and cross mark line center is O ', according to central coordinate of circle O conversion cross Mark line center O ' coordinate, to avoid the error generated during scanner scanning, using vector OO ' as the center of circle and cross mark The deviation at line center;
Step 4 finds the circle that position is in center, i.e. a center of circle (n+1, m+1) of circular array, as shown in figure 4, If central circular coordinate points are (0,0), the deviation coordinate O ' of measure center O obtains the bias vector OO ' of the two, locates later Bias vector OO ' is subtracted during reason all the points;
Step 5, (n ', m ') a circle for the, as shown in figure 5, its central coordinate of circle is (n ' × d, m ' × d), the (n ', m ') The coordinate at a cross mark line midpoint is (n ' × d, m ' × d)+OO '+OOnm';
Step 6, the coordinate for successively handling other cross mark line midpoints, and calculate and obtain bias vector with the corresponding center of circle;? To the matrix table of each cross mark line midpoint coordinates deviation, as shown in table 1, and then it is used to carry out field lens correction for drift, such as Shown in Fig. 6.
A kind of scanning galvanometer accuracy correcting method of the present invention, is corrected, on timing side using circular array correcting plate It scans side to calculate, improves computational accuracy, while improving calculating speed.Obtained deviation matrix can be used to carry out field lens deviation Correction, solve the problems, such as to propose precision at present insufficient, while solving in curstomer's site High-precision image inconvenient to use The problem of instrument mentions.

Claims (3)

1. a kind of scanning galvanometer accuracy correcting method, which is characterized in that be specifically implemented according to the following steps:
Step 1 prints circular array in advance on preprepared Standard adjustable board (1), and circular array is 2n+1 row, 2m+1 Column, n, m are integer, if adjacent two center of circle spacing is d;
Step 2 carries out cross hairs mark in circular interior;
Step 3 sets each center of circle independently justified as O, and cross mark line center is O ', according to central coordinate of circle O conversion cross mark Line center O ' coordinate, to avoid the error generated during scanner scanning, using vector OO ' as the center of circle and cross mark line in The deviation of the heart;
Step 4 finds the circle that position is in center, i.e. a center of circle (n+1, m+1) of circular array, if central circular coordinate Point is (0,0), the deviation coordinate O ' of measure center O, the bias vector OO ' both obtained, post-processing all the points process In subtract bias vector OO ';
Step 5, (n ', m ') a circle for the, central coordinate of circle is (n ' × d, m ' × d), in a cross mark line of the (n ', m ') The coordinate of point is (n ' × d, m ' × d)+OO '+OOnm';
Step 6, the coordinate for successively handling other cross mark line midpoints, and calculate and obtain bias vector with the corresponding center of circle;It obtains every The matrix table of a cross mark line midpoint coordinates deviation, and then be used to carry out field lens correction for drift.
2. a kind of scanning galvanometer accuracy correcting method according to claim 1, which is characterized in that n=5 in the step 1, M=5.
3. a kind of scanning galvanometer accuracy correcting method according to claim 1, which is characterized in that d=5 in the step 1.
CN201811653094.7A 2018-12-29 2018-12-29 Scanning galvanometer precision correction method Active CN109685744B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487180A (en) * 2019-08-12 2019-11-22 上海理工大学 A kind of thermal drift measurement method for scanning galvanometer formula laser-processing system
CN111223067A (en) * 2020-02-21 2020-06-02 成都工业学院 Automatic alignment method for processing circular hole of bridge anchorage
CN113310672A (en) * 2021-07-30 2021-08-27 武汉华工激光工程有限责任公司 Device and method for detecting repeated positioning precision of galvanometer
CN113793313A (en) * 2021-09-10 2021-12-14 哈尔滨工业大学 High-precision tool setting method and device for machining full-surface micro-pit structure of thin-wall spherical shell type micro component
CN117359135A (en) * 2023-12-08 2024-01-09 迈为技术(珠海)有限公司 Galvanometer correction method, galvanometer correction device, computer apparatus, storage medium, and program product

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192585A (en) * 2006-01-17 2007-08-02 Develo:Kk Method of calibrating and producing survey unit, and method producing of device for performing moving body survey
CN107449374A (en) * 2017-07-05 2017-12-08 南京航空航天大学 The vision auxiliary laser galvanometer scanning system and its field calibration method of flexible layout
CN108426701A (en) * 2017-12-27 2018-08-21 北京空间机电研究所 A kind of discontinuous stellar camera elements of interior orientation test method of CCD device and system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192585A (en) * 2006-01-17 2007-08-02 Develo:Kk Method of calibrating and producing survey unit, and method producing of device for performing moving body survey
CN107449374A (en) * 2017-07-05 2017-12-08 南京航空航天大学 The vision auxiliary laser galvanometer scanning system and its field calibration method of flexible layout
CN108426701A (en) * 2017-12-27 2018-08-21 北京空间机电研究所 A kind of discontinuous stellar camera elements of interior orientation test method of CCD device and system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487180A (en) * 2019-08-12 2019-11-22 上海理工大学 A kind of thermal drift measurement method for scanning galvanometer formula laser-processing system
CN110487180B (en) * 2019-08-12 2020-12-25 上海理工大学 Thermal drift measurement method for scanning galvanometer type laser processing system
CN111223067A (en) * 2020-02-21 2020-06-02 成都工业学院 Automatic alignment method for processing circular hole of bridge anchorage
CN113310672A (en) * 2021-07-30 2021-08-27 武汉华工激光工程有限责任公司 Device and method for detecting repeated positioning precision of galvanometer
CN113793313A (en) * 2021-09-10 2021-12-14 哈尔滨工业大学 High-precision tool setting method and device for machining full-surface micro-pit structure of thin-wall spherical shell type micro component
CN113793313B (en) * 2021-09-10 2023-12-12 哈尔滨工业大学 High-precision tool setting method and device for machining full-surface micro-pit structure of thin-wall spherical shell type micro-component
CN117359135A (en) * 2023-12-08 2024-01-09 迈为技术(珠海)有限公司 Galvanometer correction method, galvanometer correction device, computer apparatus, storage medium, and program product
CN117359135B (en) * 2023-12-08 2024-03-12 迈为技术(珠海)有限公司 Galvanometer correction method, galvanometer correction device, computer apparatus, storage medium, and program product

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