CN109685744B - Scanning galvanometer precision correction method - Google Patents

Scanning galvanometer precision correction method Download PDF

Info

Publication number
CN109685744B
CN109685744B CN201811653094.7A CN201811653094A CN109685744B CN 109685744 B CN109685744 B CN 109685744B CN 201811653094 A CN201811653094 A CN 201811653094A CN 109685744 B CN109685744 B CN 109685744B
Authority
CN
China
Prior art keywords
center
circle
deviation
coordinates
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201811653094.7A
Other languages
Chinese (zh)
Other versions
CN109685744A (en
Inventor
杨东辉
王婵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xian Bright Laser Technologies Co Ltd
Original Assignee
Xian Bright Laser Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Bright Laser Technologies Co Ltd filed Critical Xian Bright Laser Technologies Co Ltd
Priority to CN201811653094.7A priority Critical patent/CN109685744B/en
Publication of CN109685744A publication Critical patent/CN109685744A/en
Application granted granted Critical
Publication of CN109685744B publication Critical patent/CN109685744B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G06T5/80
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/31Calibration of process steps or apparatus settings, e.g. before or during manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/49Scanners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10004Still image; Photographic image
    • G06T2207/10008Still image; Photographic image from scanner, fax or copier
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Abstract

The invention discloses a scanning galvanometer precision correction method, which comprises the following stepsPrinting a circular array on a prepared standard correction plate in advance, and marking a cross line in the circular array; converting the coordinates of the center O 'of the cross marking line according to the coordinates O of the circle center, and taking the vector OO' as the deviation between the circle center and the center of the cross marking line; searching the (n +1, m + 1) th circle center, measuring the deviation coordinate O ' of the circle center O to obtain the deviation vector OO ' of the circle center O and subtracting the deviation vector OO ' in the subsequent processing of all points; the coordinates of the midpoint of the (n ', m ') th cross mark line are (n ' × d, m ' × d) + OO ' + OO nm '; sequentially processing the coordinates of the middle points of other cross mark lines, and calculating the deviation vector between the coordinates and the corresponding circle center; and obtaining a matrix table of the coordinate deviation of the midpoint of each cross mark line. The invention solves the problem of insufficient point-lifting precision when the scanner scans images for distance measurement in the prior art.

Description

Scanning galvanometer precision correction method
Technical Field
The invention belongs to the technical field of metal powder laser melting additive manufacturing, and particularly relates to a scanning galvanometer precision correction method.
Background
The metal powder laser melting additive manufacturing technology can form metal parts with higher complexity and accuracy. In the existing metal powder laser melting additive manufacturing technology, a galvanometer is mostly adopted as light path control equipment. The field lens is used as a device for collecting laser, barrel-shaped distortion exists in principle, precision drift can occur after the field lens is used for a period of time after the field lens is corrected, and the field lens needs to be corrected again. When a scanner is used for scanning an image for ranging, the image deformation often occurs, so that the lifting point precision is reduced or the deformation problem still exists after correction. The high-precision imager can solve the problem of insufficient point-lifting precision, but is inconvenient to use in a customer site.
Disclosure of Invention
The invention aims to provide a scanning galvanometer precision correction method, which solves the problem of insufficient point extraction precision when a scanner scans images for distance measurement in the prior art.
The technical scheme adopted by the invention is that a scanning galvanometer precision correction method is implemented according to the following steps:
step 1, printing a circular array on a pre-prepared standard correction plate in advance, wherein the circular array is 2n +1 rows and 2m +1 rows, n and m are integers, and the distance between two adjacent circle centers is set as d;
step 2, marking a cross line in the circular inner part;
step 3, setting the center of each independent circle as O and the center of the cross marking line as O ', and converting the coordinates of the center O ' of the cross marking line according to the coordinates of the center of the circle O so as to avoid errors generated in the scanning process of the scanner, and taking the vector OO ' as the deviation between the center of the circle and the center of the cross marking line;
step 4, searching a circle with the position at the center, namely the (n +1, m + 1) th circle center of the circular array, setting the center circular coordinate point as (0,0), measuring the deviation coordinate O ' of the circle center O to obtain the deviation vectors OO ' of the circle center O and the circle center O, and subtracting the deviation vectors OO ' in the subsequent processing of all the points;
and 5, regarding the (n ', m ') th circle, the coordinate of the center of the circle is (n ' × d, m ' × d), and the coordinate of the midpoint of the (n ', m ') th cross mark line is (n ' × d, m ' × d) + OO ' + OO nm ’;
Step 6, sequentially processing the coordinates of the middle points of other cross mark lines, and calculating the coordinates and the corresponding circle center to obtain a deviation vector; and obtaining a matrix table of the point coordinate deviation of each cross mark line, and further correcting the field lens deviation.
The present invention is also characterized in that,
in step 1 n =5,m =5.
In step 1 d =5.
The scanning galvanometer precision correction method has the advantages that the circular array correction plate is used for correction, and the calculation is carried out while scanning during correction, so that the calculation precision is improved, and the calculation speed is improved. The obtained deviation matrix can be used for correcting the deviation of the field lens, so that the problem of insufficient precision of point lifting at present is solved, and the problem of inconvenient point lifting of a high-precision imager at a customer site is solved.
Drawings
FIG. 1 is a flow chart of a scanning galvanometer precision correction method of the present invention;
FIG. 2 is a schematic diagram of a standard calibration plate in the method for calibrating scanning galvanometer precision of the present invention;
FIG. 3 is a schematic diagram of a standard calibration plate after cross line marking in the scanning galvanometer precision calibration method of the present invention;
FIG. 4 is a schematic diagram of a (0,0) point deviation vector in a coordinate system in a scanning galvanometer precision correction method according to the present invention;
FIG. 5 is a schematic diagram of the deviation vector of the (n ', m') point in the coordinate system in the scanning galvanometer precision correction method of the present invention;
FIG. 6 is a schematic diagram of the global deviation vectors of all coordinate points in the scanning galvanometer precision correction method of the present invention.
In the figure, 1. Standard calibration plate.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The invention discloses a scanning galvanometer precision correction method, which is implemented by the following steps as shown in a flow chart shown in figure 1:
step 1, pre-printing a circular array on a pre-prepared standard correction plate 1, wherein the circular array is 2n +1 rows and 2m +1 columns as shown in fig. 2, n and m are integers, and the distance between two adjacent circle centers is d;
wherein n =5,m =5,d =5.
Step 2, marking a cross line in the circular inner part, as shown in figure 3;
step 3, setting the center of each independent circle as O and the center of the cross marking line as O ', and converting the coordinates of the center O ' of the cross marking line according to the coordinates of the center of the circle O so as to avoid errors generated in the scanning process of the scanner, and taking the vector OO ' as the deviation between the center of the circle and the center of the cross marking line;
step 4, searching for a circle with the position at the center, namely the (n +1, m + 1) th circle center of the circular array, as shown in fig. 4, setting the center circular coordinate point as (0,0), measuring the deviation coordinate O 'of the circle center O to obtain the deviation vector OO' of the circle center O and the circle center O ', and subtracting the deviation vector OO' in the subsequent processing of all the points;
step 5, regarding the (n ', m ') th circle, as shown in fig. 5, the coordinates of the center of the circle are (n ' × d, m ' × d), and the coordinates of the midpoint of the (n ', m ') th cross mark line are (n ' × d, m ' × d) + OO ' + OO nm ’;
Step 6, sequentially processing the coordinates of the middle points of other cross mark lines, and calculating the coordinates and the corresponding circle center to obtain a deviation vector; a matrix table of the point coordinate deviations in each crosshair mark line is obtained as shown in table 1 and is further used to correct the field lens deviations as shown in fig. 6.
Figure BDA0001929202630000041
According to the scanning galvanometer precision correction method, the circular array correction plate is used for correction, and the calculation is carried out while scanning during correction, so that the calculation precision is improved, and the calculation speed is improved. The obtained deviation matrix can be used for correcting the deviation of the field lens, so that the problem of insufficient precision of point lifting at present is solved, and the problem of inconvenient point lifting of a high-precision imager at a customer site is solved.

Claims (3)

1. A scanning galvanometer precision correction method is characterized by being implemented according to the following steps:
step 1, a circular array is printed on a standard correction plate (1) which is prepared in advance, the circular array is 2n +1 rows and 2m +1 columns, n and m are integers, and the distance between two adjacent circle centers is set to be d;
step 2, marking a cross line in the circular inner part;
step 3, setting the center of each independent circle as O and the center of the cross marking line as O ', and converting the coordinates of the center O ' of the cross marking line according to the coordinates of the center of the circle O so as to avoid errors generated in the scanning process of the scanner, and taking the vector OO ' as the deviation between the center of the circle and the center of the cross marking line;
step 4, searching a circle with the position at the center, namely the (n +1, m + 1) th circle center of the circular array, setting the center circular coordinate point as (0,0), measuring the deviation coordinate O ' of the circle center O to obtain the deviation vectors OO ' of the circle center O and the circle center O, and subtracting the deviation vectors OO ' in the subsequent processing of all the points;
and 5, regarding the (n ', m ') th circle, the coordinate of the center of the circle is (n ' × d, m ' × d), and the coordinate of the midpoint of the (n ', m ') th cross mark line is (n ' × d, m ' × d) + OO ' + OO nm ’;
Step 6, sequentially processing the coordinates of the middle points of other cross mark lines, and calculating the coordinates and the corresponding circle center to obtain a deviation vector; and obtaining a matrix table of the point coordinate deviation in each cross mark line, and further correcting the field lens deviation.
2. The method for correcting the precision of the scanning galvanometer according to claim 1, wherein n =5,m =5 in step 1.
3. The method for correcting the precision of the scanning galvanometer according to claim 1, wherein d =5 in step 1.
CN201811653094.7A 2018-12-29 2018-12-29 Scanning galvanometer precision correction method Active CN109685744B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811653094.7A CN109685744B (en) 2018-12-29 2018-12-29 Scanning galvanometer precision correction method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811653094.7A CN109685744B (en) 2018-12-29 2018-12-29 Scanning galvanometer precision correction method

Publications (2)

Publication Number Publication Date
CN109685744A CN109685744A (en) 2019-04-26
CN109685744B true CN109685744B (en) 2023-01-03

Family

ID=66191638

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811653094.7A Active CN109685744B (en) 2018-12-29 2018-12-29 Scanning galvanometer precision correction method

Country Status (1)

Country Link
CN (1) CN109685744B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487180B (en) * 2019-08-12 2020-12-25 上海理工大学 Thermal drift measurement method for scanning galvanometer type laser processing system
CN111223067B (en) * 2020-02-21 2023-05-26 成都工业学院 Automatic alignment method for machining bridge anchorage device round hole
CN113310672B (en) * 2021-07-30 2021-10-12 武汉华工激光工程有限责任公司 Device and method for detecting repeated positioning precision of galvanometer
CN113793313B (en) * 2021-09-10 2023-12-12 哈尔滨工业大学 High-precision tool setting method and device for machining full-surface micro-pit structure of thin-wall spherical shell type micro-component
CN117359135B (en) * 2023-12-08 2024-03-12 迈为技术(珠海)有限公司 Galvanometer correction method, galvanometer correction device, computer apparatus, storage medium, and program product

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192585A (en) * 2006-01-17 2007-08-02 Develo:Kk Method of calibrating and producing survey unit, and method producing of device for performing moving body survey
CN107449374A (en) * 2017-07-05 2017-12-08 南京航空航天大学 The vision auxiliary laser galvanometer scanning system and its field calibration method of flexible layout
CN108426701A (en) * 2017-12-27 2018-08-21 北京空间机电研究所 A kind of discontinuous stellar camera elements of interior orientation test method of CCD device and system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192585A (en) * 2006-01-17 2007-08-02 Develo:Kk Method of calibrating and producing survey unit, and method producing of device for performing moving body survey
CN107449374A (en) * 2017-07-05 2017-12-08 南京航空航天大学 The vision auxiliary laser galvanometer scanning system and its field calibration method of flexible layout
CN108426701A (en) * 2017-12-27 2018-08-21 北京空间机电研究所 A kind of discontinuous stellar camera elements of interior orientation test method of CCD device and system

Also Published As

Publication number Publication date
CN109685744A (en) 2019-04-26

Similar Documents

Publication Publication Date Title
CN109685744B (en) Scanning galvanometer precision correction method
CN106780623B (en) Rapid calibration method for robot vision system
CN101858755B (en) Method for calibrating star sensor
CN111288967B (en) Remote high-precision displacement detection method based on machine vision
CN105066884A (en) Robot tail end positioning deviation correction method and system
CN108072319B (en) Rapid calibration system and calibration method for motion platform
CN109877319B (en) Multi-galvanometer laser precision splicing calibration method
CN106780391B (en) Distortion correction algorithm for optical system of full-view three-dimensional measuring instrument
CN101013505A (en) Camera calibration method and calibration apparatus thereof
CN111077668A (en) Correction method of large-format laser scanning system
CN107633533B (en) High-precision circular mark point center positioning method and device under large-distortion lens
TW201541410A (en) Lens distortion calibration method
CN111383194A (en) Camera distortion image correction method based on polar coordinates
CN111047586A (en) Pixel equivalent measuring method based on machine vision
CN104820978A (en) Reference positioning method of CCD (Charge Coupled Device) cameras
CN111986267B (en) Coordinate system calibration method of multi-camera vision system
CN112371998A (en) Error calibration system and method for laser galvanometer of selective laser melting equipment
CN115218822A (en) Calibration method of laser profile measuring instrument
CN111376254B (en) Plane ranging method and system and plane adjusting method and system for mechanical arm
CN104156974A (en) Camera distortion calibration method on basis of multiple constraints
CN110490941B (en) Telecentric lens external parameter calibration method based on normal vector
CN116297181A (en) Method for rapidly and accurately correcting laser scanning galvanometer through calibration plate
CN110682005B (en) Laser marking real-time correction method and control device
CN109887038A (en) A kind of machine vision method for correcting image for on-line checking
CN111275761B (en) Visual positioning laser marking method with self-adaptive height

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant