JP2011051016A - Marking device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a means for measuring change in a deflection angle speed of a beam deflecting means for the moving speed of a marking object before marking of an identification code and an arbitrary pattern. <P>SOLUTION: In the marking device and method; a marking object is moved at a predetermined speed, with marking light emitted corresponding to an identification code and an arbitrary pattern by using a means for generating an identification code; a beam deflection means is used that deflects the marking light to emit it to the marking object; and, in following up the movement of the marking object, the irradiation direction of the marking light can be changed. The marking device and method use the means that detects change in the irradiation position of the collimation beam emitted to the beam irradiation position detector, by irradiating the beam deflection means with a collimation beam and by using a beam irradiation position detector that moves synchronously with the movement of the marking object. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus and a method for marking an identification code or an arbitrary pattern on a flat panel display or a semiconductor chip.

  In the manufacturing process of flat panel displays (hereinafter referred to as FPD) and semiconductor chips, a unique ID called an identification code (for example, a two-dimensional code) is used so that the manufacturing conditions in the manufacturing process and the history of various manufacturing information can be traced. Is added. The identification code is added (hereinafter, marked) by direct marking or a photolithography method.

  In many cases, the FPD and the semiconductor chip are arranged in large numbers on one substrate and are manufactured in a lump. Therefore, the identification codes of the FPD and the semiconductor chip are respectively marked so as to correspond to the panels and chips arranged in one substrate.

  In addition to the identification code, an arbitrary pattern such as an alignment mark, a manufacturer's name or logo mark, characters, numbers, or other figures or symbols indicating additional information such as the product name, model or manufacturing lot of the marking object May be marked.

  The marking method is appropriately determined in consideration of the material and size of the marking object, the time for marking the identification code and the arbitrary pattern (hereinafter referred to as tact time), and the like.

  According to Patent Document 1, a maskless exposure apparatus and method using a laser beam and a digital micromirror device are disclosed. According to this apparatus and method, since an arbitrary pattern can be marked by exposure on a marking object moving at a constant speed, it is widely used as a technique for marking a large number of identification codes within a predetermined time. It has been.

  According to Patent Document 2, it is possible to periodically measure and adjust a positional shift caused by a change in the angle of the galvano mirror with time, thereby improving the laser irradiation position accuracy, that is, the processing position accuracy.

JP 2006-259515 A JP 2002-090682 A

  In order to mark an identification code or an arbitrary pattern, it is necessary to irradiate the marking object with energy for a predetermined time. The time for irradiating energy to perform the marking is Tx1 seconds.

  During the time Tx1 second, the marking object is moved at a predetermined speed, and it is necessary to move the identification code and an arbitrary pattern so as to follow the marking object.

  When marking one identification code or an arbitrary pattern, if there is a speed difference between the moving speed of the substrate and the speed at which the identification code or the arbitrary pattern is moved, the identification code or the arbitrary pattern is shaken. Will occur. If it is shifted by one dot constituting the identification code or by the minimum dot or line width dimension forming the arbitrary pattern, correct recognition cannot be performed.

  Even if the speed change is even smaller, if the identification code or an arbitrary pattern in the marking is blurred, there is a possibility that correct recognition cannot be performed when attempting to identify later. In addition, the identification code and the arbitrary pattern in the state where the blur is included may be deteriorated in the identification ability when accompanied by scratches or dirt.

  In addition, if there is blurring during marking, the time that the energy is applied to the predetermined place will be reduced, and the identification code or arbitrary pattern will be thinly marked or faint, which is correct when trying to identify later. It can be a cause of being unable to identify.

  “Blur” here is not a mere positional deviation that is not marked at a predetermined position, but a relative speed does not become zero during the time required for marking, and a speed difference is generated. It means moving.

  Therefore, it is important to mark the identification code or an arbitrary pattern with a quality that can be correctly identified later, and to eliminate the speed difference during the marking in order to maintain the quality.

As a means for moving an identification code or an arbitrary pattern during marking, there is a light beam deflecting means (for example, a galvano scanner with a mirror attached). In order to eliminate the speed difference during marking, it is necessary to make the moving speed of the substrate equal to the deflection speed in the light beam deflecting means and keep the state.

  FIG. 9 shows a time chart of the operation of each part by the conventional marking apparatus and method. In each figure, the horizontal axis represents time t, and t1 to t20 represent time. A broken line is attached as an auxiliary line so that the time relationship of event occurrence in each figure becomes clear. The same broken line means the same time.

FIG. 9A is a diagram showing a change in speed of the marking object 10. The vertical axis represents the speed of the marking object 10: Vx.
At time t1, the marking object 10 starts to move in the X direction. At time t2, the marking object 10 reaches a preset moving speed and continues to maintain the speed. When the marking operation is finished, the marking object 10 starts decelerating at time t19 and stops at time t20.

FIG. 9B is a diagram showing the irradiation timing of the marking light beam for marking the identification code. The vertical axis represents the irradiation of the marking light beam 309: Em.
The marking light beam 309 is irradiated between times t3 and t4, between t9 and t10, and between t15 and t16.

FIG. 9C is a diagram showing a change in speed at which the deflection angle of the deflecting means is changed. The vertical axis represents the speed of changing the change angle: Vm.
As the angular velocity of the deflecting means, it moves at a constant speed in the positive direction between times t2 and t5, between t8 and t11, between t14 and t17, and in the negative direction between times t6 and t7, between t12 and t13, and between t18 and t19. Is required to move at a constant speed.

  In particular, constant velocity is required between times t3 and t4, between t9 and t10, and between t15 and t16, where marking is performed while moving. However, in actuality, there are slight responses such as delayed response and overshoot, and speed fluctuations may occur. Normally, these error components are adjusted to be minimized by optimally setting the control parameters.

  The speed fluctuation during the time of marking while moving is represented by ΔVm.

  FIG. 9D is a diagram showing a change in the angle of the deflecting means. The vertical axis represents the angle of the deflection means: θm. The angle θm is 0 degree when the marking light ray enters the mirror 308M and the outgoing light ray is 90 degrees, the minus direction is greater than 90 degrees, and the plus direction is less than 90 degrees. And

  The angle of the deflecting means is expressed as θm, and it keeps moving in the positive direction from time t2 to t5, from time t8 to t11, from time t14 to t17, and from time t6 to t7, from time t12 to t13, from time t18 to t19. In the meantime, it is required to keep moving in the negative direction.

  However, in practice, due to the influence of the speed fluctuation of the deflecting means, the movement distance does not change to a constant value, and a slight displacement occurs. Even if the marking object moves at a constant speed, the relative speed between the marking object 10 and the marking light beam 309 does not become zero due to the influence of the speed variation of the deflection means: ΔVm, and the identification code to be marked is blurred. It will occur.

  A galvano scanner used as a deflecting unit may be used for a long time, or even if the same control parameters are set due to changes in the temperature and humidity of the outside air, the angular velocity may fluctuate.

  In order to prevent blurring of the identification code or arbitrary pattern to be marked, check if the galvano scanner is operating at a preset rotation speed, and set if there is blurring or signs of blurring. A series of maintenance work such as readjusting the value (speed gain) and reconfirmation was required.

  Conventionally, confirmation of blurring of an identification code or an arbitrary pattern has been actually performed by marking. Therefore, production had to be stopped during maintenance. Alternatively, maintenance was sometimes performed between production schedules.

  For this reason, when it is desired to perform continuous production, an identification code or an arbitrary pattern marked on the product is confirmed, and management work is performed such that the signs of blur are quickly grasped.

The management work pays attention to an identification code or an arbitrary pattern that is not a main part of the final product, and prepares for the occurrence of a malfunction that does not know when it occurs, and it has been desired to omit it.

  Therefore, an object of the present invention is to provide means for measuring a change in the deflection angular velocity of the light beam deflecting means with respect to the moving speed of the marking object before marking an identification code or an arbitrary pattern.

  In order to solve the above-described problems, a marking apparatus according to an aspect of the present invention is an apparatus that performs marking by irradiating a moving object with a marking light beam at a predetermined speed. A position detection unit, a light beam irradiation unit, and a determination unit are provided. The moving unit moves the object at a predetermined speed. The light irradiation position detection unit moves in synchronization with the movement unit. The light beam irradiation unit is a device that irradiates the light irradiation position detection unit with the aiming light beam, and includes a light beam deflection unit that deflects the aiming light beam following the movement of the light irradiation position detection unit. The determination unit determines a change in the irradiation position of the aiming light beam applied to the light irradiation position detection unit.

  The light beam deflecting unit may have a speed gain that is a set value of a speed for changing the deflection angle by following the movement of the light beam irradiation position detecting unit. The marking device may further include a speed gain changing unit that changes the speed gain of the light beam deflecting unit so as to reduce the change in the irradiation position of the aiming light beam based on the determination result from the determining unit.

  The marking device may further include a set value registration unit and a comparison unit. The set value registration unit registers a set value indicating an allowable range with respect to a change in the irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit. The comparison unit compares the value of the determination result from the determination unit with the set value indicating the allowable range.

  There may be a plurality of light irradiation units, and at least one position detector may be provided.

  The moving unit may reciprocate the object, and two light irradiation position detectors may be provided for one light irradiation unit.

A marking method according to another aspect of the present invention is a marking method in which marking is performed by irradiating an object that moves at a predetermined speed with a marking light beam, and includes the following steps.
◎ Irradiation step for deflecting the aiming beam so that the beam irradiation position detection unit follows the aiming beam while moving the beam irradiation position detection unit at a predetermined speed by the moving unit ◎ The aiming beam irradiated to the beam irradiation position detection unit Detection step for detecting a change in irradiation position

  The irradiation step may include a step of deflecting the light beam in order to irradiate the light beam irradiation position detection unit with the aiming light beam. The step of deflecting the light beam may have a speed gain that is a setting value of a speed for changing the deflection angle by following the movement of the light beam irradiation position detecting unit. The method may further include a speed gain changing step of changing a speed gain of the light beam deflection step so as to reduce a change in the irradiation position of the aiming light beam based on a determination result from the determination unit.

  The speed gain changing step includes a setting value registration step for registering a setting value indicating an allowable range with respect to a change in the irradiation position of the aiming light beam irradiated to the light irradiation position detection unit, and a determination result value from the determination unit and the allowable value A comparison step of comparing with a set value indicating the range may be included.

  In the irradiation step, the aiming light beam may be irradiated to the light beam irradiation position detection unit from a plurality of locations.

  The light irradiation position detection unit may be provided in two places. In the irradiation step, two light beam position detection units may be irradiated with the aiming light beam while reciprocating the object.

  Since the change of the irradiation position of the light beam used for the marking of the identification code or the arbitrary pattern is detected by using the marking device and the marking method according to the present invention, the blur can be detected at an early stage. Further, since readjustment can be performed so that the influence of blur is eliminated, the marking quality can be improved.

It is a perspective view which shows an example of embodiment of invention. It is a principal part perspective view which shows an example of embodiment of this invention. It is a system configuration figure showing an example of an embodiment of the present invention. It is a flowchart which shows an example of embodiment of this invention. It is a side view which shows an example of embodiment of this invention. It is a perspective view which shows an example of another embodiment of this invention. It is a perspective view which shows an example of another embodiment of this invention. It is a principal part perspective view which shows an example of another embodiment of this invention. It is a time chart which shows operation | movement of each part by the conventional marking apparatus and method.

(1) Marking apparatus The form for implementing this invention is demonstrated using a figure.
FIG. 1 is a perspective view showing an example of an embodiment of the present invention. In the figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.

  The marking device 1 includes a stage 2 for moving the marking object 10 in the X direction, and a marking head mounted on a gate-shaped structure including a column 31 and a beam 32 mounted on the device base 20. Part 3, a position detector 4 attached to the table 22, a controller for controlling the equipment of each part, and a control part 9 in which equipment for operating the apparatus is housed. Has been.

  The stage unit 2 includes an X-axis stage 21 that is mounted on the apparatus base 20 and that is movable in the X direction, and a table 22 that is mounted on the X-axis stage. The marking object 10 is placed on the table 22. Grooves and holes are provided on the surface of the table 22, and the grooves and holes are connected to a vacuum source via an opening / closing control valve. The marking object 10 placed on the table 22 is attracted and held by a negative pressure so that it does not shift during movement.

A marking light beam 309 is appropriately emitted from the marking head unit 3, and marking is performed on a pre-registered place on the marking object 10.
When removing the substrate, the suction holding is released. The operation of taking out the substrate after marking or placing the substrate to be marked next can be performed manually or using a transfer robot.

  The operator can register necessary information or perform an operation while confirming the information displayed on the information output unit 92 by using the information input unit 91 of the control unit 9. In addition, the operator can know the end of production and the abnormality of the apparatus by listening to the sound emitted from the reporting means 93 or by viewing the display state while the apparatus is in operation.

(2) Marking head part FIG. 2: is a principal part perspective view which shows an example of embodiment of this invention.
The marking head unit 3 includes a light source 301, optical components such as a mirror 302 and relay lenses 303 and 304, an identification code generation unit 305, an aperture 306, a galvano scanner 307S, and a mirror 307M attached to the galvano scanner 307S. , A galvano scanner 308S and a mirror 308M attached to the galvano scanner 308S, and the apparatus is appropriately arranged and configured.

  The direction and size of the light beam emitted from the light source 301 of the marking head unit 3 can be changed by optical components such as the mirror 302 and the relay lenses 303 and 304. The light whose direction and size are changed as described above passes through the identification code generation means 305 and becomes a light corresponding to the identification code.

  The light beam corresponding to the identification code is irradiated toward the marking object 10 as the marking light beam 309 while controlling the irradiation direction using the galvano scanners 307S and 308S and the mirrors 307M and 308M.

  When the irradiation direction of the marking light beam 309 is not changed in the Y direction, or when the irradiation position of the marking light beam 309 is changed in the Y direction by moving the marking head unit 3 in the Y direction, the mirror 307M is used in a fixed state. In this case, the galvano scanner 307S can be omitted.

  The identification code generating means 305 is a reflection type that forms a light beam corresponding to the identification code by changing the angle of the micromirrors arranged in a matrix, or the transmittance of a mask made of a transmissive material arranged in a matrix. There are various methods, such as a transmission method for forming a light beam corresponding to an identification code by changing the angle, and a method for directly generating a light beam corresponding to a matrix-shaped identification code by sequentially deflecting an irradiation beam.

  An example of applying a micromirror device as a reflection method and an example of applying a liquid crystal device as a transmission method can be given. Examples of means for sequentially deflecting the irradiation beam include an acousto-optic element, or a combination of a galvano scanner and a reflection mirror.

  Examples of the light source 301 of the marking light beam 309 include light emitting means such as a lamp, LED, laser diode, and laser transmitter.

  The marking head unit 3 may be moved along the beam 32 even when it is fixed to the beam 32. When the marking head unit 3 is moved, a Y-axis stage 33 movable in the Y direction may be attached to the beam 32 and the marking head unit 3 may be attached on the Y-axis stage 33.

  Since the marking device 1 has the above-described structure, the marking light beam is deflected at the same speed while the marking object is moved in the X direction, and an identification code is marked at an arbitrary position of the marking object. Can be done.

(3) Control Configuration As shown in FIG. 3, the control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a notification unit 93, an information recording unit 94, and device control. A unit 95 is connected and included.

Examples of the control computer 90 include those equipped with a numerical operation unit such as a microcomputer, a personal computer, and a workstation.
Examples of the information input means 91 include a keyboard, a mouse, and a switch.
Examples of the information output unit 92 include an image display display and a lamp.

Examples of the reporting means 93 include those that can alert the operator, such as a buzzer, a speaker, and a lamp.
Examples of the information recording means 94 include semiconductor recording media, magnetic recording media, magneto-optical recording media, such as memory cards and data disks.
Examples of the device control unit 95 include devices called programmable controllers and motion controllers.

The device control unit 95 includes an X-axis stage 21, a Y-axis stage 33, a position detector 4, a light source 301, an identification code generation unit 305, galvano scanners 307S and 308S, and other control devices (not shown). Are connected.
The galvano scanners 307 </ b> S and 308 </ b> S have a speed gain that is a set value of speed for changing the deflection angle by following the movement of the position detector 4. The control computer 90 can change the speed gain of the galvano scanner.

  The position detector 4 can output a signal indicating how much light in the light receiving unit is irradiated with light when the light receiving unit is irradiated with the light. In this example, the current value changes corresponding to the irradiation position of the aiming light beam. Therefore, by measuring the current value as the irradiation position information, it is possible to know the fluctuation of the light receiving position of the aiming light beam from the change in the current value. The current value is measured by the device control unit 95.

  The device control unit 95 can operate or stop each device by giving a control signal to each connected device.

  Setting and changing of the marking position and marking conditions are performed using the information input means 91 connected to the control computer 90 of the control section 9 and can be confirmed by the information output means 92.

  The set marking positions and marking conditions can be registered in the information recording means 94 connected to the control computer 90, and can be read out, edited, and changed as appropriate.

(4) Marking operation FIG. 4 is a flowchart showing the marking procedure at each step. Each step in FIG. 4 is mainly executed as a result of the control operation of the control computer 90.
First, the marking object 10 is placed on the table 22 (s101), and the marking object 10 is sucked and held (s102).

  Next, the alignment mark on the marking object 10 is read (s103), and an alignment operation is performed.

  Next, the X-axis stage 21 drives the table 22 to move the marking object 10, and the marking head unit 3 is directed to the position detector 4 moving in synchronization with the movement of the marking object 10. Is irradiated (s104). Specifically, in the marking head unit 3, the galvano scanner 308 </ b> S changes the angle of the mirror 308 </ b> M at a constant speed so that the aiming light beam follows the light receiving unit of the position detector 4.

  Next, the control computer 90 measures a deviation amount of the irradiation position of the aiming light beam irradiated to the light receiving unit of the position detector 4 (s105), and determines whether or not it is within a preset appropriate range. (S106). Specifically, the control computer 90 registers in advance in the information recording means 94 a set value indicating an allowable range for a change in the irradiation position of the aiming light beam irradiated to the light irradiation position detector 4, and the aiming computer The deviation amount of the irradiation position of the light beam is compared with a set value indicating an allowable range.

  Next, if the deviation amount of the irradiation position of the aiming light beam is within an appropriate range, the identification code generating means 305 generates an identification code and irradiates the marking light beam 309 corresponding to the identification code toward the marking object 10. And marking is performed (s107). Also at this time, the galvano scanner 308S changes the angle of the mirror 308M at a constant speed to cause the marking light beam 309 to follow the light receiving portion of the position detector 4.

  When marking is completed, the marking object 10 is released from suction (s108), and the marking object 10 is taken out of the table 22 (s109).

  If the deviation amount of the irradiation position is not within the appropriate range, the operation is continued according to cases A to C selected in advance (s110).

  Case A: Marking is performed (s111). Case B: Marking is interrupted (s112). Thereafter, the operator is informed through the notification means 93 that the deviation amount is out of the appropriate range (s113). Thereafter, the adsorption of the marking object 10 is released (s108), the marking object 10 is taken out from the table 22 (s109), and maintenance work is performed.

  Case C: The speed gain of the galvano scanner is changed (s114), and the amount of displacement is measured again (s115). More specifically, the control computer 90 changes the speed gain of the galvano scanner based on the detection result from the position detector 4 so as to reduce the displacement amount of the irradiation position of the aiming light beam. Thereafter, it is determined whether or not the amount of positional deviation is within an appropriate range (s116), and if it is within the appropriate range, marking is performed (s107).

  If the displacement amount of the irradiation position is not within the appropriate range, the speed gain of the galvano scanner is changed again (s114), and the displacement amount is measured again (s115). Thereafter, it is determined whether or not the amount of positional deviation is within an appropriate range (s116), and if it is within the appropriate range, marking is performed (s107). If the speed gain does not fall within the proper range even if the speed gain is changed many times, a warning may be issued (not shown).

(5) Position shift measuring operation in a state where the marking object is not placed Separately from the above-described flow, the marking object 10 can be carried out in a state where it is not placed on the table 22.

  First, the aiming beam is irradiated to the position detector 4. At this time, the galvano scanner 308 </ b> S is rotated, and the angle of the mirror 308 </ b> M is changed at a constant speed so that the aiming light beam continues to be irradiated following the light receiving portion of the position detector 4.

  Next, a deviation amount of the irradiation position of the aiming light beam irradiated to the light receiving unit of the position detector 4 is measured, and it is determined whether or not it is within a preset appropriate range.

  If the deviation amount of the irradiation position of the aiming light beam is within an appropriate range, the marking object 10 is placed on the table 22 and marking is started. If the deviation amount of the irradiation position is not within an appropriate range, the speed gain of the galvano scanner is changed and the positional deviation amount is measured again.

  Thereafter, the deviation amount of the irradiation position of the aiming light beam is measured again to determine whether or not the deviation amount is within an appropriate range. If the amount of positional deviation is within the appropriate range, the marking object 10 is placed on the table 22 and marking is started.

  If it is determined that there is no misregistration amount before the start of marking, the misregistration amount measurement and determination steps s104 to s106 may be omitted in the above steps s101 to s109. May be performed as appropriate, for example, by using a time during which the marking object is not marked.

(6) Setting of deflection angular velocity of mirror of galvano scanner FIG. 5 is a side view showing a state in which the aiming beam is irradiated to the position detector.
A state at a certain time Tx0 is illustrated by a solid line. The deflected aiming light beam 309A is irradiated toward the position detector 4 attached to the table 22 by the mirror 308M attached to the galvano scanner 308S of the marking head unit 3.

  The aiming light beam 309A may be the same as the marking light beam 309, a part of the aiming light beam 309A may be used, or may be generated by controlling the identification code generation unit 305 so as to have a predetermined pattern. In addition, a means for irradiating a light beam that can be used as the aiming light beam 309A may be provided in the marking head unit.

  The marking object 10 is held by suction on the table 22 and moves at the same speed as the position detector 4, and their relative speed is zero.

  After a lapse of Tx1 seconds from the certain time Tx0, the table 22a, the marking object 10a, and the position detector 4a are directed rightward in the X direction (that is, in the direction indicated by the arrow M, as indicated by a thin two-dot chain line). ) The aiming light beam 309A controls the galvano scanner 308S so as to follow it, and the angle of the mirror 308M of the galvano scanner 308S is changed to become the aiming light beam 309a in which the irradiation angle is changed in the direction indicated by the arrow M.

If the speed of changing the angle of the mirror 308M following the movement of the marking object 10, that is, the speed of changing the deflection angle of the light beam deflecting means is appropriate, the position of the light beam irradiated to the light receiving unit of the position detector 4 Does not change. At this time, it can be said that the relative speed is the same.
If the relative speed is the same, there is no positional deviation during marking, and the identification performance of the marked identification code is improved.

  Therefore, a speed setting value for changing the deflection angle in accordance with the movement of the marking object 10 is set as a speed gain and registered in the galvano scanner 308S. If the set value of the speed gain is not changed, the speed at which the actual deflection angle changes is constant within a short time. However, when viewed over a long period of time, changes over time appear and change occurs.

(7) Position Detector As the position detector 4, a PSD (position detection element) can be exemplified.
The position detector 4 includes an element that outputs a current corresponding to the position of the center of gravity of the irradiated light. The current signal may be measured directly or converted into a voltage signal using a resistor.

  For example, a position detector 4 having a high frequency response performance and capable of outputting a signal every 1 / 100th of the time Tx1 second required for marking is selected. By doing so, it is possible to repeatedly measure the position of about 100 times during irradiation of the aiming ray for Tx 1 second, and each time a signal corresponding to the light receiving position of the aiming ray can be output.

  Even if it is difficult to select a suitable position detector due to the wavelength and output of the marking beam, and the response speed and price of the position detector, a position detection method that matches the wavelength and output of the marking beam using a different aiming beam emitting means Select a vessel.

  For example, the position detector is irradiated with the aiming light beam for the same time as that required for marking the identification code. If the aiming beam continues to be applied to the same location on the position detector, the relative speed is zero and the mirror tracking speed is appropriate. In this state, a very clear identification code is marked.

  Alternatively, if the aiming light beam continues to irradiate a predetermined range on the position detector (for example, a value that is sufficiently small for one dot of the identification code), the relative velocity is small and the marked identification is performed. The code is substantially clear and does not interfere with subsequent recognition.

  The predetermined range may be appropriately set in consideration of the size of the identification code, the contrast at the time of identification, the recognition accuracy actually required, the error level, and the like.

(8) Effect Since the marking device 1 has the above-described structure, the irradiation position of the marking light beam 309 is changed using the position detector 4 that moves in synchronization with the moving means of the marking object 10. Can be detected.

  Furthermore, the setting value (speed gain) for deflecting the deflection angle of the marking light beam 309 can be changed and adjusted so that the speed fluctuation: ΔVm is minimized.

  Further, a change in the irradiation position of the aiming light beam applied to the position detector 4 is measured, and it is determined whether or not the marking quality can be maintained by comparing whether or not the change is within a preset allowable range. I can do it.

(9) Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.
(9-1) Configuration provided with a plurality of marking head portions If at least one marking head portion 3 is provided, marking can be performed, and the number that can be marked simultaneously increases by increasing the number as necessary.
An embodiment in which a plurality of marking head portions 3 are provided will be described with reference to FIG.
FIG. 6 is a perspective view showing an example of another embodiment of the present invention.

  In FIG. 6, two marking head portions are arranged on the Y-axis stage 33. Thereby, marking can be performed at two places at the same time.

  When the number of identification codes increases, the number of codes that can be marked within a predetermined time may be limited. However, by increasing the number of marking heads, the number of codes that can be marked within a predetermined time can be increased.

  In FIG. 6, one position detector 4 corresponds to two marking head units 3. In other words, the irradiation area of the plurality of marking head units 3 is wide, and the aiming beam can be irradiated to the position detector 4 attached to the mounting table 22.

Note that there are cases where the irradiation areas of the plurality of marking heads are limited, and the light receiving units of the same position detector cannot be irradiated with light. In that case, as a modification of the above embodiment, a uniaxial slider mechanism is attached to the mounting table, and a position detector is attached on the uniaxial slider so that the position detector can be moved in the Y direction. I can do it.
By using a common position detector in this way, there is an effect of eliminating variations in position detection accuracy due to variations among individual measuring instruments.
However, as a modification of the above embodiment, the number of position detectors may be increased in accordance with the number of marking heads.

(9-2) Configuration provided with a plurality of position detectors As another embodiment, a position detector may be provided at each of the front and rear ends of the mounting table in the moving direction. An embodiment in which a plurality of position detectors 4 are provided will be described with reference to FIG. FIG. 7 is a perspective view showing an example of another embodiment of the present invention.

In FIG. 7, the position detector 4 is provided at both ends of the mounting table 22 in the X direction. The position of the pair of position detectors 4 in the Y direction is the same.
Even if the number of identification codes increases, marking can be performed by reciprocating as a method of increasing the number of codes that can be marked within a predetermined time without increasing the number of marking heads. Generally, if there is one position detector for one marking head, it is possible to confirm immediately before exposure of the identification code only on either the forward path or the backward path.

  However, if the position detectors 4 are provided at the front and rear ends in the moving direction of the mounting table 22 as in the present embodiment, the galvano scanner when the mounting table 22 is moved in the direction of the arrow in the X direction. And the rotation speed of the galvano scanner when the mounting table 22 is moved in the direction opposite to the arrow in the X direction can be confirmed immediately before marking. As a result, the processing time can be shortened even when the marking operation is performed in a reciprocating manner.

(9-3) Configuration in which marking object is in continuous sheet shape The present invention can be used for marking other than a flat plate-like object. For example, the marking object may be a continuous sheet.

  FIG. 8 shows a perspective view of a continuous sheet marking device, which is an example of another embodiment of the present invention. In the figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.

  The marking device 5 is attached to the device frame 50, a portal structure composed of a column 51 and a beam 52 attached to the device frame 50, a Y-axis stage 53 attached to the beam 52, and the Y-axis stage 53. The marking head unit 3 and the control unit 9 are included.

  The apparatus frame 50 includes feeding rollers 54a and 54b for feeding and transporting the continuous sheet-like marking object 11, and winding rollers 55a and 55b for winding and transporting the marking object 11. Is attached. The marking object 11 is sent and moved at a predetermined speed by the rotation operation of a motor (not shown) attached to the take-up roller 55c (not shown).

  A position detector 4b is attached to the end of the take-up roller 55a, and can be rotated and moved in synchronization with the feeding movement of the marking object 11.

  The marking head unit 3 and the control unit 9 of the marking device 5 have the same device configuration as that of the marking device 1, and further include the motor attached to the position detector 4b of the winding roller 55a and the winding roller 55c. It is connected. The position detector 4b is connected to the device control unit 95 of the control unit 9 via an electrical contact mechanism (so-called rotary joint) capable of infinite rotation.

  The position detector 4b at the end of the take-up roller 55a only needs to move in synchronism with the rotation of the take-up roller 55a. In this case, the position detector 4b and the device control unit 95 of the control unit 9 may be connected without the electric contact mechanism capable of infinite rotation.

  Since the marking device 5 has the above-described configuration, it is possible to mark the identification code by irradiating an aiming ray to a continuous sheet-like marking object and measuring the blur of the marking.

  In this way, it is not necessary to interrupt production for measuring the marking blur, and the quantity of products produced within a predetermined time can be maintained.

(9-4) Types of marking methods (9-4-1) Marking by exposure The present invention can be used for marking by exposure. When the photosensitive resin is applied to the marking object and the light beam used for marking is a light beam having a wavelength capable of curing or softening the photosensitive resin such as ultraviolet rays, the exposure method is used for marking.
If the present invention is used for the marking of the exposure system, it is possible to detect in advance the occurrence of blurring in the identification code by detecting a shift in relative movement speed without going through a development process. Therefore, it is possible to eliminate the time and waiting time for the developing process.

(9-4-2) Direct marking The present invention can also be used for direct marking, which directly processes the surface of a marking object. If the light source or the marking beam is set to the wavelength or energy of the beam that can change the surface state of the marking object, the direct marking is performed.
If the present invention is used for the direct marking, it is possible to detect in advance that the identification code is shaken by detecting a shift in the relative movement speed before directly marking the manufactured product. Therefore, it is possible to prevent a product with a defective identification code.

(9-4-3) Inner marking The present invention can also be used for inner marking in which marking is performed inside a marking object. If the conditions for changing the inside of the material of the marking object are satisfied as the light source or the marking light beam, the inner marking is obtained. In the inner marking, if there is a marking defect, it cannot be re-marked after the surface is polished. If the present invention is used for inner marking, it is possible to detect in advance that the identification code is shaken by detecting a shift in the relative movement speed before directly marking the manufactured product. Therefore, it is possible to prevent a product with a defective identification code.

(9-5) Modified example of synchronization of position detector and marking object Table 22 and position detector 4 are viewed from the side if the moving speed when the workpiece is viewed in plan from the galvanometer mirror is the same. Even if the position of is different, it can be regarded as the same speed.

  As an embodiment other than those described above, even when the movement speed of the table and the position detector is different, the speed when viewed in plan is not the same, or when a speed reducer is attached, etc. The present invention can be applied as long as it moves while maintaining a proportional movement speed relationship, and can be handled as the same speed by calculating using a proportional coefficient. Therefore, the present invention can be applied to cases other than the case where the table and the position detector move at the same moving speed on the same plane.

(9-6) Apparatus for Marking Arbitrary Pattern and Marking Method Thereof As for the embodiment, the apparatus and method for marking an identification code have been described. However, an apparatus for marking an arbitrary pattern instead of the identification code. It can also be used as a method.

  An arbitrary pattern generating unit that can generate an arbitrary pattern can be used in place of the identification code generating unit 305 described above. Examples of the arbitrary patterns include alignment marks, manufacturer names and logo marks, characters, numbers, and other figures and symbols indicating additional information such as product names, types, and manufacturing lots of marking objects. Moreover, a circuit pattern for electrical wiring, a processing pattern for shaping, and the like can be handled as an arbitrary pattern.

  By doing as mentioned above, it is possible to mark an arbitrary pattern following the movement of the marking object with respect to the marking object moving at a predetermined speed. And since the apparatus and method of this invention are used, the blurring at the time of marking arbitrary patterns can be prevented.

DESCRIPTION OF SYMBOLS 1 Marking apparatus 2 Stage part 3 Head part 4 Position detector 4a Position detector 4b Position detector 5 Marking apparatus 9 Control part 10 Marking target object 10a Marking target object 11 Substrate ID
12 Marked piece ID
13 Marking place of the piece ID 20 Device base 21 X-axis stage 22 Table 22a Table 30 Marking head part 31 Column 32 Beam 33 Y-axis stage 50 Device frame 51 Column 52 Beam 53 Y-axis stage 54a Feed roller 54b Feed roller 55a Winding Roller 55b Winding roller 55c Winding roller 56 Marked piece ID
57 Marking place of piece ID 90 Control computer 91 Information input means 92 Information display means 93 Notification means 94 Information recording means 95 Device control unit 301 Light source 302 Mirror 303 Relay lens 304 Relay lens 305 Identification code generating means 306 Aperture 307M Mirror 307S Galvano scanner 308M Mirror 308S Galvano scanner 309 Marking beam 309A Aiming beam 309a Aiming beam

Claims (10)

An apparatus that performs marking by irradiating an object that moves at a predetermined speed with a marking beam,
A moving unit for moving the object at a predetermined speed;
A light irradiation position detection unit that moves in synchronization with the moving unit;
A light irradiation unit that irradiates the light irradiation position detection unit with an aiming light beam, and has a light beam deflection unit that deflects the aiming light beam following the movement of the light irradiation position detection unit;
A marking device comprising: a determination unit that determines a change in an irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit based on a detection result from the light beam irradiation position detection unit. The light beam deflecting unit has a speed gain that is a setting value of a speed for changing the deflection angle by following the movement of the light beam irradiation position detecting unit,
A speed gain changing unit that changes the speed gain of the light beam deflecting unit so as to reduce a change in the irradiation position of the aiming light beam based on a determination result from the determining unit;
The marking device according to claim 1. A set value registration unit for registering a set value indicating an allowable range for a change in the irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit;
The marking device according to claim 2, further comprising a comparison unit that compares a value of a determination result from the determination unit with a set value indicating the allowable range. The light irradiation unit is a plurality, and the position detector is at least one unit,
The marking device according to any one of claims 1 to 3. The marking device according to any one of claims 1 to 4, wherein the moving unit reciprocates the object, and two light irradiation position detectors are provided for one light irradiation unit. A marking method for marking by irradiating an object that moves at a predetermined speed with a marking beam,
While moving the light irradiation position detection unit at a predetermined speed by the moving unit,
An irradiation step of deflecting the aiming light beam so as to follow the aiming light beam to the light beam irradiation position detecting unit;
A determination step of determining a change in the irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit based on a detection result from the light beam irradiation position detection unit;
Marking method. The irradiation step includes a step of deflecting a light beam to irradiate the aiming light beam to the light beam irradiation position detection unit,
The step of deflecting the light beam has a speed gain that is a setting value of a speed for changing the deflection angle by following the movement of the light beam irradiation position detection unit,
A speed gain changing step of changing the speed gain of the light beam deflection step so as to reduce a change in the irradiation position of the aiming light beam based on a determination result from the determination unit;
The marking method according to claim 6. The speed gain changing step includes a setting value registration step for registering a setting value indicating an allowable range for a change in the irradiation position of the aiming light beam irradiated to the light beam irradiation position detection unit, and a determination result from the determination unit The marking method according to claim 7, further comprising a comparison step of comparing the value of with a set value indicating the allowable range. The marking method according to any one of claims 6 to 8, wherein the irradiation step irradiates the light beam irradiation position detection unit from a plurality of locations with the aiming light beam. The light irradiation position detector is provided at two locations,
The marking method according to any one of claims 6 to 8, wherein, in the irradiation step, the light beam position detection units are irradiated with the aiming light beam while reciprocating the object.

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