WO2011000357A3 - Verfahren und vorrichtung zur deposition dünner schichten - Google Patents

Verfahren und vorrichtung zur deposition dünner schichten Download PDF

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Publication number
WO2011000357A3
WO2011000357A3 PCT/DE2010/000739 DE2010000739W WO2011000357A3 WO 2011000357 A3 WO2011000357 A3 WO 2011000357A3 DE 2010000739 W DE2010000739 W DE 2010000739W WO 2011000357 A3 WO2011000357 A3 WO 2011000357A3
Authority
WO
WIPO (PCT)
Prior art keywords
target
deposition
thin layers
materials
laser
Prior art date
Application number
PCT/DE2010/000739
Other languages
English (en)
French (fr)
Other versions
WO2011000357A2 (de
Inventor
Franz Herbst
Valery Serbezov
Original Assignee
Vascotec Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102009031768A external-priority patent/DE102009031768A1/de
Application filed by Vascotec Gmbh filed Critical Vascotec Gmbh
Publication of WO2011000357A2 publication Critical patent/WO2011000357A2/de
Publication of WO2011000357A3 publication Critical patent/WO2011000357A3/de
Priority to US13/340,727 priority Critical patent/US20130011440A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L27/00—Materials for grafts or prostheses or for coating grafts or prostheses
    • A61L27/28—Materials for coating prostheses
    • A61L27/30—Inorganic materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L29/00—Materials for catheters, medical tubing, cannulae, or endoscopes or for coating catheters
    • A61L29/08—Materials for coatings
    • A61L29/10—Inorganic materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L31/00—Materials for other surgical articles, e.g. stents, stent-grafts, shunts, surgical drapes, guide wires, materials for adhesion prevention, occluding devices, surgical gloves, tissue fixation devices
    • A61L31/08—Materials for coatings
    • A61L31/082—Inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2400/00—Materials characterised by their function or physical properties
    • A61L2400/12—Nanosized materials, e.g. nanofibres, nanoparticles, nanowires, nanotubes; Nanostructured surfaces
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2420/00—Materials or methods for coatings medical devices
    • A61L2420/02—Methods for coating medical devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Inorganic Chemistry (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Medicinal Chemistry (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Dermatology (AREA)
  • Transplantation (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Surgery (AREA)
  • Vascular Medicine (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zur Abscheidung dünner Schichten, insbesondere zur Herstellung von Multilayerschichten, Nanoschichten, Nanostrukturen und Nanokompositen, durch Laserdeposition aus Targetmaterialien auf eine Substratoberfläche, welches durch folgende Merkmale gekennzeichnet ist: a) das Target (5) ist in Segmente (17, 18) mit Materialien unterschiedlichster physikalischer und/oder chemischer Eigenschaften segmentiert, b) mittels kontrollierter energetischer Verteilung (29) der fokussierten Laserenergie über dem Laserstrahl (28) - Querschnitt werden einzelne Segmente (17, 18) dieses Targets (5) mit einer jeweils abweichenden Strahlungsintensität derart bestrahlt, dass jedes Targetsegment (17, 18) bei dieser Bestrahlung die Menge an Laserenergie absorbiert, die notwendig ist, das im jeweiligen Segment (17, 18) befindliche Targetmaterial zu evaporieren oder desorbieren.
PCT/DE2010/000739 2009-06-30 2010-06-28 Verfahren und vorrichtung zur deposition dünner schichten, insbesondere zur herstellung von multilayerschichten, nanoschichten, nanostrukturen und nanokompositen WO2011000357A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/340,727 US20130011440A1 (en) 2009-06-30 2011-12-30 Method and device for depositing thin layers, especially for the production of multiple layers, nanolayers, nanostructures and nanocomposites

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102009031767.8 2009-06-30
DE102009031768.6 2009-06-30
DE102009031767 2009-06-30
DE102009031768A DE102009031768A1 (de) 2009-06-30 2009-06-30 Verfahren und Vorrichtung zur Deposition dünner Schichten, insbesondere zur Herstellung von Multilayerschichten, Nanoschichten, Nanostrukturen und Nanokompositen

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/340,727 Continuation US20130011440A1 (en) 2009-06-30 2011-12-30 Method and device for depositing thin layers, especially for the production of multiple layers, nanolayers, nanostructures and nanocomposites

Publications (2)

Publication Number Publication Date
WO2011000357A2 WO2011000357A2 (de) 2011-01-06
WO2011000357A3 true WO2011000357A3 (de) 2011-07-14

Family

ID=43127161

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2010/000739 WO2011000357A2 (de) 2009-06-30 2010-06-28 Verfahren und vorrichtung zur deposition dünner schichten, insbesondere zur herstellung von multilayerschichten, nanoschichten, nanostrukturen und nanokompositen

Country Status (2)

Country Link
US (1) US20130011440A1 (de)
WO (1) WO2011000357A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101395393B1 (ko) * 2006-02-23 2014-05-15 피코데온 리미티드 오와이 금속 기재 상의 코팅 및 코팅된 금속 제품
EP1993778A2 (de) * 2006-02-23 2008-11-26 Picodeon Ltd OY Beschichtung mit carbonitrid und mit carbonitird beschichtetes produkt
US20120221099A1 (en) * 2011-02-24 2012-08-30 Alexander Borck Coated biological material having improved properties
DE102011122510A1 (de) * 2011-12-29 2013-07-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtung von optischen Wellenleitern
GB201202128D0 (en) * 2012-02-08 2012-03-21 Univ Leeds Novel material
EP2896717A1 (de) 2014-01-15 2015-07-22 Nanotechplasma SARL Laserdirektsynthese und Abscheidung von Nanoverbundwerkstoffen oder Nanostrukturen
WO2016093166A1 (ja) * 2014-12-08 2016-06-16 日本電気株式会社 無線リソース制御システム、無線基地局、中継装置、無線リソース制御方法およびプログラム
US20220199405A1 (en) * 2020-12-18 2022-06-23 Osram Opto Semiconductors Gmbh Method for Producing a Semiconductor Body, A Semiconductor Body and an Optoelectronic Device
EP4019663A1 (de) * 2020-12-23 2022-06-29 Advanced Nanotechonologies, S.L. Vorrichtung zum aufbringen nanostrukturen auf ein substrat
CN113743241B (zh) * 2021-08-13 2023-07-11 电子科技大学 基于语义分割算法识别和量化电镜图像中纳米团聚的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5622567A (en) * 1992-11-30 1997-04-22 Mitsubishi Denki Kabushiki Kaisha Thin film forming apparatus using laser
US20020066720A1 (en) * 2000-12-01 2002-06-06 Jeong-Sook Ha Fabrication method of erbium-doped silicon nano-size dots
WO2006085994A2 (en) * 2004-08-09 2006-08-17 Biomed Solutions, Llc Multi-component substances and apparatus for preparation thereof
WO2007145961A2 (en) * 2006-06-05 2007-12-21 Abbott Cardiovascular Systems Inc. Microporous coating on medical devices
US20080294236A1 (en) * 2007-05-23 2008-11-27 Boston Scientific Scimed, Inc. Endoprosthesis with Select Ceramic and Polymer Coatings

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2514900A (en) 1999-01-27 2000-08-18 United States Of America As Represented By The Secretary Of The Navy, The Fabrication of conductive/non-conductive nanocomposites by laser evaporation
DE19955789A1 (de) 1999-11-19 2001-05-23 Basf Ag Verfahren zur kombinatorischen Herstellung einer Bibliothek von Materialien
US6994775B2 (en) 2002-07-31 2006-02-07 The Regents Of The University Of California Multilayer composites and manufacture of same
US20080006524A1 (en) 2006-07-05 2008-01-10 Imra America, Inc. Method for producing and depositing nanoparticles
DE102007009487A1 (de) 2007-02-22 2008-08-28 Laserinstitut Mittelsachsen E.V. Vorrichtung zur Laserpulsabscheidung (PLD) von Schichten auf Substrate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5622567A (en) * 1992-11-30 1997-04-22 Mitsubishi Denki Kabushiki Kaisha Thin film forming apparatus using laser
US20020066720A1 (en) * 2000-12-01 2002-06-06 Jeong-Sook Ha Fabrication method of erbium-doped silicon nano-size dots
WO2006085994A2 (en) * 2004-08-09 2006-08-17 Biomed Solutions, Llc Multi-component substances and apparatus for preparation thereof
WO2007145961A2 (en) * 2006-06-05 2007-12-21 Abbott Cardiovascular Systems Inc. Microporous coating on medical devices
US20080294236A1 (en) * 2007-05-23 2008-11-27 Boston Scientific Scimed, Inc. Endoprosthesis with Select Ceramic and Polymer Coatings

Also Published As

Publication number Publication date
WO2011000357A2 (de) 2011-01-06
US20130011440A1 (en) 2013-01-10

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