SG10201407169UA - Method and apparatus for treating substrates - Google Patents
Method and apparatus for treating substratesInfo
- Publication number
- SG10201407169UA SG10201407169UA SG10201407169UA SG10201407169UA SG10201407169UA SG 10201407169U A SG10201407169U A SG 10201407169UA SG 10201407169U A SG10201407169U A SG 10201407169UA SG 10201407169U A SG10201407169U A SG 10201407169UA SG 10201407169U A SG10201407169U A SG 10201407169UA
- Authority
- SG
- Singapore
- Prior art keywords
- liquid
- substrate
- radiation
- methods
- treating substrates
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
Abstract
METHOD AND APPARATUS FOR TREATING SUBSTRATES The application describes several methods and an apparatus for treatment of at least partial areas of a substrate. In said methods, at least one liquid is applied to at least one partial area of the substrate and electromagnetic radiation is introduced into this liquid, in order to achieve a desired effect in accordance with the respective method. In one method, radicals are generated in the liquid by means of UV radiation prior to application of the liquid, wherein generation of the radicals occurs directly before applying the liquid to the substrate. In one method, electromagnetic radiation is introduced into said liquid such that at least a portion of the radiation reaches the substrate surface. In another method, UV radiation of a predetermined range of wavelength is guided through said liquid onto at least the partial area of the surface of said substrate. The methods may be performed in a common apparatus in any desired order in series and/or in parallel. Figure 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25763309P | 2009-11-03 | 2009-11-03 | |
DE102009058962A DE102009058962B4 (en) | 2009-11-03 | 2009-12-18 | Method and device for treating substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201407169UA true SG10201407169UA (en) | 2014-12-30 |
Family
ID=43828929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201407169UA SG10201407169UA (en) | 2009-11-03 | 2010-03-15 | Method and apparatus for treating substrates |
Country Status (10)
Country | Link |
---|---|
US (3) | US9662684B2 (en) |
EP (1) | EP2496367B1 (en) |
JP (1) | JP5766197B2 (en) |
KR (1) | KR20120101427A (en) |
CN (1) | CN102791391B (en) |
CA (1) | CA2778288C (en) |
DE (1) | DE102009058962B4 (en) |
HK (1) | HK1175141A1 (en) |
SG (1) | SG10201407169UA (en) |
WO (1) | WO2011054405A2 (en) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013045961A (en) * | 2011-08-25 | 2013-03-04 | Dainippon Screen Mfg Co Ltd | Substrate cleaning method, substrate cleaning liquid and substrate processing apparatus |
DE102012008220A1 (en) * | 2012-04-25 | 2013-10-31 | Süss Microtec Photomask Equipment Gmbh & Co. Kg | Method for cleaning photomasks using megasonic |
US9339853B2 (en) | 2012-12-04 | 2016-05-17 | The Boeing Company | Surface materials for decontamination with decontaminants |
US8764905B1 (en) * | 2013-03-14 | 2014-07-01 | Intel Corporation | Cleaning organic residues from EUV optics and masks |
CN103691714B (en) * | 2013-12-19 | 2015-12-02 | 合肥京东方光电科技有限公司 | A kind of cleaning device and cleaning method |
US9857680B2 (en) | 2014-01-14 | 2018-01-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cleaning module, cleaning apparatus and method of cleaning photomask |
JP6357319B2 (en) * | 2014-02-17 | 2018-07-11 | 株式会社プレテック | Method and apparatus for cleaning substrate to be cleaned |
CN104007610B (en) * | 2014-06-12 | 2018-03-06 | 深圳市华星光电技术有限公司 | The cleaning method and device of mask |
KR102296739B1 (en) * | 2014-10-27 | 2021-09-01 | 삼성전자 주식회사 | Method of manufacturing integrated circuit device using photomask cleaning composition |
DE102015011228B4 (en) * | 2015-08-27 | 2017-06-14 | Süss Microtec Photomask Equipment Gmbh & Co. Kg | Device for applying a liquid medium exposed to UV radiation to a substrate |
DE102015011229B4 (en) | 2015-08-27 | 2020-07-23 | Süss Microtec Photomask Equipment Gmbh & Co. Kg | Device for applying a liquid medium exposed to UV radiation to a substrate |
DE102015011177B4 (en) | 2015-08-27 | 2017-09-14 | Süss Microtec Photomask Equipment Gmbh & Co. Kg | Device for applying a liquid medium exposed to UV radiation to a substrate |
US11358172B2 (en) * | 2015-09-24 | 2022-06-14 | Suss Microtec Photomask Equipment Gmbh & Co. Kg | Method for treating substrates with an aqueous liquid medium exposed to UV-radiation |
US9966266B2 (en) | 2016-04-25 | 2018-05-08 | United Microelectronics Corp. | Apparatus for semiconductor wafer treatment and semiconductor wafer treatment |
KR101961326B1 (en) | 2016-10-19 | 2019-07-18 | 세메스 주식회사 | Method and Apparatus for cleaning component of apparatus for treating substrate |
US10416575B2 (en) * | 2016-11-16 | 2019-09-17 | Suss Microtec Photomask Equipment Gmbh & Co. Kg | Apparatus and method for cleaning a partial area of a substrate |
DE102017203351B4 (en) * | 2017-03-01 | 2021-08-05 | Süss Microtec Photomask Equipment Gmbh & Co. Kg | Device for applying a liquid medium exposed to UV radiation to a substrate |
JP2018163980A (en) | 2017-03-24 | 2018-10-18 | 株式会社Screenホールディングス | Substrate processing method and substrate processing apparatus |
JP2017113753A (en) * | 2017-03-30 | 2017-06-29 | 株式会社トクヤマ | Cleaning method and cleaning device |
CN107203094B (en) * | 2017-07-03 | 2020-07-24 | 京东方科技集团股份有限公司 | Mask plate cleaning device and method |
CN108380569A (en) * | 2018-03-02 | 2018-08-10 | 常州瑞择微电子科技有限公司 | High concentration OH free radical generating means |
CN108816870B (en) * | 2018-04-08 | 2021-05-25 | 苏州珮凯科技有限公司 | Regeneration method of ceramic annular part of WxZ process in thin film manufacturing process of semiconductor 8-inch wafer |
US10896824B2 (en) * | 2018-12-14 | 2021-01-19 | Tokyo Electron Limited | Roughness reduction methods for materials using illuminated etch solutions |
CN110112084A (en) * | 2019-05-22 | 2019-08-09 | 长江存储科技有限责任公司 | Semicoductor device washing apparatus |
CN111906093A (en) * | 2020-07-15 | 2020-11-10 | 常州瑞择微电子科技有限公司 | Large-area photon generation spray head |
CN112435938A (en) * | 2020-11-11 | 2021-03-02 | 深圳市华星光电半导体显示技术有限公司 | Substrate cleaning apparatus and substrate cleaning method |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2623497B2 (en) * | 1988-03-07 | 1997-06-25 | ウシオ電機株式会社 | Ozone water activation device |
US5068040A (en) * | 1989-04-03 | 1991-11-26 | Hughes Aircraft Company | Dense phase gas photochemical process for substrate treatment |
JPH04277748A (en) | 1991-03-06 | 1992-10-02 | Mitsubishi Paper Mills Ltd | Planographic printing plate |
US5814156A (en) * | 1993-09-08 | 1998-09-29 | Uvtech Systems Inc. | Photoreactive surface cleaning |
US5789755A (en) * | 1996-08-28 | 1998-08-04 | New Star Lasers, Inc. | Method and apparatus for removal of material utilizing near-blackbody radiator means |
US6869487B1 (en) * | 1997-05-09 | 2005-03-22 | Semitool, Inc. | Process and apparatus for treating a workpiece such as a semiconductor wafer |
JPH11121417A (en) * | 1997-10-09 | 1999-04-30 | Mitsubishi Electric Corp | Treating system and treating method for semiconductor substrates |
NL1012389C1 (en) * | 1999-06-18 | 2000-12-19 | Remmen Uv Techniek Van | Ultraviolet lamp and shower head with a lamp. |
DE10130999A1 (en) * | 2000-06-29 | 2002-04-18 | D M S Co | Multifunction cleaning module of a manufacturing device for flat screens and cleaning device using the same |
JP2002110611A (en) | 2000-10-04 | 2002-04-12 | Texas Instr Japan Ltd | Method and apparatus for cleaning semiconductor wafer |
JP4038557B2 (en) | 2002-04-16 | 2008-01-30 | リアライズ・アドバンストテクノロジ株式会社 | Resist removing apparatus and resist removing method |
JP3776092B2 (en) * | 2003-03-25 | 2006-05-17 | 株式会社ルネサステクノロジ | Etching apparatus, etching method, and manufacturing method of semiconductor device |
US7921859B2 (en) * | 2004-12-16 | 2011-04-12 | Sematech, Inc. | Method and apparatus for an in-situ ultraviolet cleaning tool |
JP5140916B2 (en) * | 2005-10-07 | 2013-02-13 | 富士通株式会社 | Photochemical treatment apparatus and photochemical treatment method |
US20070093406A1 (en) | 2005-10-24 | 2007-04-26 | Omoregie Henryson | Novel cleaning process for masks and mask blanks |
JP2007149972A (en) * | 2005-11-28 | 2007-06-14 | Matsushita Electric Ind Co Ltd | Electronic device cleaning device and electronic device cleaning method |
NL1030589C2 (en) | 2005-12-05 | 2007-06-06 | Houston R & D Consultancy B V | Cleaning system for fluid conduit, e.g. beer tap system or water pipe, comprises UV radiation source connected to radiation guide inside conduit |
JP5019156B2 (en) * | 2006-08-21 | 2012-09-05 | ウシオ電機株式会社 | Excimer lamp device |
JP2008108997A (en) * | 2006-10-27 | 2008-05-08 | Shibuya Kogyo Co Ltd | Cleaning device |
WO2008107933A1 (en) * | 2007-03-07 | 2008-09-12 | Fujitsu Limited | Cleaning device and cleaning method |
-
2009
- 2009-12-18 DE DE102009058962A patent/DE102009058962B4/en active Active
-
2010
- 2010-03-15 CN CN201080050483.6A patent/CN102791391B/en active Active
- 2010-03-15 US US13/505,385 patent/US9662684B2/en active Active
- 2010-03-15 SG SG10201407169UA patent/SG10201407169UA/en unknown
- 2010-03-15 CA CA2778288A patent/CA2778288C/en active Active
- 2010-03-15 JP JP2012537306A patent/JP5766197B2/en active Active
- 2010-03-15 EP EP10710543.9A patent/EP2496367B1/en active Active
- 2010-03-15 WO PCT/EP2010/001629 patent/WO2011054405A2/en active Application Filing
- 2010-03-15 KR KR1020127014173A patent/KR20120101427A/en not_active Application Discontinuation
-
2013
- 2013-02-21 HK HK13102212.3A patent/HK1175141A1/en unknown
-
2017
- 2017-05-18 US US15/598,344 patent/US20170320108A1/en not_active Abandoned
- 2017-05-18 US US15/598,361 patent/US10265739B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CA2778288C (en) | 2016-01-19 |
US10265739B2 (en) | 2019-04-23 |
US20120211024A1 (en) | 2012-08-23 |
US20170320108A1 (en) | 2017-11-09 |
CN102791391A (en) | 2012-11-21 |
CA2778288A1 (en) | 2011-05-12 |
CN102791391B (en) | 2016-05-25 |
KR20120101427A (en) | 2012-09-13 |
US20170252781A1 (en) | 2017-09-07 |
DE102009058962B4 (en) | 2012-12-27 |
US9662684B2 (en) | 2017-05-30 |
EP2496367A2 (en) | 2012-09-12 |
JP5766197B2 (en) | 2015-08-19 |
EP2496367B1 (en) | 2016-02-10 |
HK1175141A1 (en) | 2013-06-28 |
DE102009058962A1 (en) | 2011-05-05 |
WO2011054405A3 (en) | 2012-06-28 |
WO2011054405A2 (en) | 2011-05-12 |
JP2013510332A (en) | 2013-03-21 |
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