TW201613211A - Light source apparatus and light irradiating method - Google Patents

Light source apparatus and light irradiating method

Info

Publication number
TW201613211A
TW201613211A TW104108975A TW104108975A TW201613211A TW 201613211 A TW201613211 A TW 201613211A TW 104108975 A TW104108975 A TW 104108975A TW 104108975 A TW104108975 A TW 104108975A TW 201613211 A TW201613211 A TW 201613211A
Authority
TW
Taiwan
Prior art keywords
irradiating
irradiation section
light
elements
source apparatus
Prior art date
Application number
TW104108975A
Other languages
Chinese (zh)
Other versions
TWI652866B (en
Inventor
Koki Hino
Atsushi Fujioka
Takeo Kato
Syohei Maeda
Original Assignee
Toshiba Lighting & Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2014195825A external-priority patent/JP2016066754A/en
Priority claimed from JP2014195824A external-priority patent/JP2016064378A/en
Application filed by Toshiba Lighting & Technology filed Critical Toshiba Lighting & Technology
Publication of TW201613211A publication Critical patent/TW201613211A/en
Application granted granted Critical
Publication of TWI652866B publication Critical patent/TWI652866B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Device Packages (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention provides a light source apparatus and a light irradiating method. The light source apparatus 1 of one embodiment includes an irradiation section 20, a control unit 50 and a diffusion board 41. The irradiation section has a plurality of first irradiating elements 21 and a plurality of second irradiating elements 22. The first irradiating element irradiates ultraviolet light having a first peak wavelength. The second irradiating element irradiates ultraviolet light having a second peak wavelength different from the first peak wavelength. With at least one of the second irradiating elements located in a periphery of the first irradiating elements, the plurality of first irradiating elements and the plurality of second irradiating elements are arranged in a plane shape or a straight line shape. The control unit causes a relative light intensity of the irradiation section at an edge of the irradiation section to be larger than a relative light intensity in a center of the irradiation section. The diffusion board diffuses ultraviolet light irradiated by the first irradiating element and the second irradiating element and irradiates the same on an object W.
TW104108975A 2014-09-25 2015-03-20 Light source device and light irradiation method TWI652866B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014195825A JP2016066754A (en) 2014-09-25 2014-09-25 Light source device
JP2014-195824 2014-09-25
JP2014195824A JP2016064378A (en) 2014-09-25 2014-09-25 Light irradiation device and light irradiation method
JP2014-195825 2014-09-25

Publications (2)

Publication Number Publication Date
TW201613211A true TW201613211A (en) 2016-04-01
TWI652866B TWI652866B (en) 2019-03-01

Family

ID=53713249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104108975A TWI652866B (en) 2014-09-25 2015-03-20 Light source device and light irradiation method

Country Status (3)

Country Link
KR (1) KR20160036460A (en)
CN (1) CN204515295U (en)
TW (1) TWI652866B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106773549B (en) * 2017-01-21 2024-02-27 南京新趋势光电有限公司 High-uniformity LED parallel light ultraviolet exposure machine light source system
JP6825956B2 (en) * 2017-03-28 2021-02-03 株式会社Ｓｃｒｅｅｎホールディングス Selection method of substrate processing equipment, substrate processing method and ultraviolet irradiation means
KR102566424B1 (en) * 2018-01-22 2023-08-14 엘지이노텍 주식회사 Curing apparatus
JP2021067874A (en) * 2019-10-25 2021-04-30 株式会社ジャパンディスプレイ Manufacturing apparatus and manufacturing method for display panel
KR102643109B1 (en) * 2021-09-01 2024-02-29 에이피시스템 주식회사 Ultraviolet curing apparatus, bending protect layer forming system and method for ultraviolet curing
CN114237063B (en) * 2021-12-16 2024-10-11 深圳绿米联创科技有限公司 Scene control method, device and system, electronic equipment and medium
KR102533685B1 (en) 2022-02-25 2023-05-17 주식회사 씨티랩 Light source device

Also Published As

Publication number Publication date
KR20160036460A (en) 2016-04-04
CN204515295U (en) 2015-07-29
TWI652866B (en) 2019-03-01

Similar Documents

Publication Publication Date Title
TW201613211A (en) Light source apparatus and light irradiating method
IL265282A (en) Illumination source for an inspection apparatus, inspection apparatus and inspection method
WO2018032022A8 (en) Method and device for lithography-based additive manufacturing of three-dimensional shaped bodies
IL256816B (en) Metrology methods, radiation source, metrology apparatus and device manufacturing method
IL266515A (en) Illumination source for an inspection apparatus, inspection apparatus and inspection method
TW201614350A (en) Apparatus and method for irradiating polarized light for light alignment
EP3151299A4 (en) Light emitting device, electronic apparatus, and inspection method
BR112018001853A2 (en) methods for treating a disorder and for improving the treatment of a disorder
MX2016012804A (en) Processing device and processing method.
IL262358B (en) Method and apparatus for generating illuminating radiation
EP3425437A4 (en) Patterned light irradiation apparatus and method
EP3315600A4 (en) Cell treatment method and laser beam machine
EP3437728A4 (en) Light irradiating device and printing device
EP3446751A4 (en) Method for controlling moving pattern for laser treatment and laser irradiation device using same
GB201521374D0 (en) Light source identification apparatus and method
EP3442653A4 (en) An apparatus for use in irradiation therapy comprising ionization module and uv-light source
IL263774B (en) Illumination source for an inspection apparatus, inspection apparatus and inspection method
EP3426307A4 (en) Using dreadd for neuronal modulation in treating neuronal diseases
DE112015004434A5 (en) Vehicle lamp and method for providing directionally radiated light
EP3438730A4 (en) Pulse light generation device, light irradiation device, optical processing device, optical response measurement device, microscope device, and pulse light generation method
WO2016088721A8 (en) Substrate monitoring device and substrate monitoring method
EP3193207A4 (en) Light irradiating device and light irradiating method
CO2017002356A2 (en) Methods for treating depression using nmda modulators
HUP1500448A2 (en) Method for producing terahertz radiation and terahertz radiation source
WO2014145644A3 (en) Methods of tuning light emitting devices and tuned light emitting devices