WO2010136338A3 - Verfahren zum erzeugen einer schicht mit absorberpartikeln für eine energiestrahlung - Google Patents

Verfahren zum erzeugen einer schicht mit absorberpartikeln für eine energiestrahlung Download PDF

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Publication number
WO2010136338A3
WO2010136338A3 PCT/EP2010/056546 EP2010056546W WO2010136338A3 WO 2010136338 A3 WO2010136338 A3 WO 2010136338A3 EP 2010056546 W EP2010056546 W EP 2010056546W WO 2010136338 A3 WO2010136338 A3 WO 2010136338A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
fabricating
ceramic
absorbing particles
heat
Prior art date
Application number
PCT/EP2010/056546
Other languages
English (en)
French (fr)
Other versions
WO2010136338A2 (de
Inventor
Jens Dahl Jensen
Ursus KRÜGER
Gabriele Winkler
Christian Doye
Kathrin Kunert
Raymond Ullrich
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to EP10723956.8A priority Critical patent/EP2435599B1/de
Priority to CN2010800226953A priority patent/CN102449191B/zh
Priority to US13/322,432 priority patent/US9200370B2/en
Publication of WO2010136338A2 publication Critical patent/WO2010136338A2/de
Publication of WO2010136338A3 publication Critical patent/WO2010136338A3/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225—Deposition of multilayers of inorganic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1262—Process of deposition of the inorganic material involving particles, e.g. carbon nanotubes [CNT], flakes
    • C23C18/127—Preformed particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Nanotechnology (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Gegenstand der Erfindung ist ein Verfahren zum Erzeugen einer keramischen Schicht (15) auf einem Substrat (11). Hierbei kommt ein Beschichtungsstoff zum Einsatz, der chemische Vorstufen einer Keramik enthält. Diese Vorstufen werden mittels einer Wärmebehandlung in die zu erzeugende Keramik umgesetzt. Erfindungsgemäß ist vorgesehen, dass in den einzelnen Lagen unterschiedliche Verfahren zum Wärmeeintrag zur Anwendung kommen. Dies wird erreicht durch Absorberpartikel (16), die in unterschiedlicher Konzentration oder unterschiedlicher chemischer Zusammensetzung Verwendung finden können. Daher ist die gezielte Einbringung von Wärme auch in tiefere Schichtbereiche beispielsweise durch Mikrowellenanregung (16) oder UV- oder IR-Lichteintrag (18) neben dem klassischen Wärmeeintrag (19) möglich. Vorteilhaft lassen sich dadurch insbesondere vergleichsweise dicke Schichten mittels einer einzigen Wärmebehandlungsschicht herstellen.
PCT/EP2010/056546 2009-05-27 2010-05-12 Verfahren zum erzeugen einer schicht mit absorberpartikeln für eine energiestrahlung WO2010136338A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP10723956.8A EP2435599B1 (de) 2009-05-27 2010-05-12 Verfahren zum erzeugen einer schicht mit absorberpartikeln für eine energiestrahlung
CN2010800226953A CN102449191B (zh) 2009-05-27 2010-05-12 含有用于能量辐射的吸收颗粒的层的制造方法
US13/322,432 US9200370B2 (en) 2009-05-27 2010-05-12 Method for fabricating a layer with absorbing particles for an energy radiation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009023628.7 2009-05-27
DE102009023628A DE102009023628A1 (de) 2009-05-27 2009-05-27 Verfahren zum Erzeugen einer Schicht mit Absorberpartikeln für eine Energiestrahlung

Publications (2)

Publication Number Publication Date
WO2010136338A2 WO2010136338A2 (de) 2010-12-02
WO2010136338A3 true WO2010136338A3 (de) 2011-01-27

Family

ID=43027500

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/056546 WO2010136338A2 (de) 2009-05-27 2010-05-12 Verfahren zum erzeugen einer schicht mit absorberpartikeln für eine energiestrahlung

Country Status (5)

Country Link
US (1) US9200370B2 (de)
EP (1) EP2435599B1 (de)
CN (1) CN102449191B (de)
DE (1) DE102009023628A1 (de)
WO (1) WO2010136338A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2942788B1 (de) * 2014-03-19 2018-07-04 NGK Insulators, Ltd. Nichtlineares resistives spannungselement und verfahren zur herstellung davon
CN104934173A (zh) * 2014-03-19 2015-09-23 日本碍子株式会社 电压非线性电阻元件及其制法
IT201800002349A1 (it) * 2018-02-02 2019-08-02 Univ Degli Studi Di Milano Bicocca Metodo per la produzione di film sottili di dicalcogenuri di metalli di transizione
US11453618B2 (en) * 2018-11-06 2022-09-27 Utility Global, Inc. Ceramic sintering
US11539053B2 (en) * 2018-11-12 2022-12-27 Utility Global, Inc. Method of making copper electrode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009000676A2 (de) * 2007-06-27 2008-12-31 Siemens Aktiengesellschaft Verfahren zum erzeugen einer keramischen schicht auf einem bauteil
WO2009000657A2 (de) * 2007-06-27 2008-12-31 Siemens Aktiengesellschaft Bauteil mit einer einen farbstoff enthaltenden keramischen schicht und verfahren zu deren herstellung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585136A (en) 1995-03-22 1996-12-17 Queen's University At Kingston Method for producing thick ceramic films by a sol gel coating process
EP0850203B2 (de) * 1995-09-15 2012-01-04 Rhodia Chimie Substrat mit einer photokatalytischen beschichtung von titandioxyd und organische dispersionen mit titandioxyd
US6447848B1 (en) 1995-11-13 2002-09-10 The United States Of America As Represented By The Secretary Of The Navy Nanosize particle coatings made by thermally spraying solution precursor feedstocks
US20060280955A1 (en) * 2005-06-13 2006-12-14 Irene Spitsberg Corrosion resistant sealant for EBC of silicon-containing substrate and processes for preparing same
CN101210701A (zh) * 2006-12-29 2008-07-02 乐金电子(天津)电器有限公司 微波炉烤盘及其制作方法
DE102007026626B3 (de) 2007-06-07 2008-09-11 Siemens Ag Verfahren zum Erzeugen einer Trockenschmierstoff-Schicht
US20090274850A1 (en) * 2008-05-01 2009-11-05 United Technologies Corporation Low cost non-line-of -sight protective coatings
CN101323529B (zh) * 2008-07-11 2013-03-13 中国科学院上海硅酸盐研究所 微波烧结中的梯度透波结构及其用于制备陶瓷材料的方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009000676A2 (de) * 2007-06-27 2008-12-31 Siemens Aktiengesellschaft Verfahren zum erzeugen einer keramischen schicht auf einem bauteil
WO2009000657A2 (de) * 2007-06-27 2008-12-31 Siemens Aktiengesellschaft Bauteil mit einer einen farbstoff enthaltenden keramischen schicht und verfahren zu deren herstellung

Also Published As

Publication number Publication date
CN102449191A (zh) 2012-05-09
CN102449191B (zh) 2013-09-18
WO2010136338A2 (de) 2010-12-02
EP2435599B1 (de) 2013-07-03
US20120128872A1 (en) 2012-05-24
US9200370B2 (en) 2015-12-01
DE102009023628A1 (de) 2010-12-02
EP2435599A2 (de) 2012-04-04

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