WO2010140766A2 - 기판지지유닛 및 이를 포함하는 기판처리장치 - Google Patents
기판지지유닛 및 이를 포함하는 기판처리장치 Download PDFInfo
- Publication number
- WO2010140766A2 WO2010140766A2 PCT/KR2010/002227 KR2010002227W WO2010140766A2 WO 2010140766 A2 WO2010140766 A2 WO 2010140766A2 KR 2010002227 W KR2010002227 W KR 2010002227W WO 2010140766 A2 WO2010140766 A2 WO 2010140766A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- mounting table
- contact surface
- contact member
- contact
- Prior art date
Links
- 238000012545 processing Methods 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims abstract description 140
- 238000000034 method Methods 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000000926 separation method Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
Definitions
- the present invention relates to a substrate support unit and a substrate processing apparatus, and more particularly, to a substrate support unit having a non-contact surface and a substrate processing apparatus including the same.
- the semiconductor manufacturing method using the heating element is used as a general method in the thermal chemical vapor deposition proceeded by a single wafer, in addition to the chemical vapor deposition using a plasma method.
- front contact or partial contact is made with the upper surface of the mounting table while the substrate is placed on the upper surface of the mounting table.
- the substrate is placed on a mounting table at room temperature, and the mounting table installed in the high temperature reaction chamber maintains a temperature higher than room temperature. Therefore, when the substrate is placed on the mounting table, the substrate is heated through heat exchange with the mounting table, thereby causing thermal expansion in the substrate.
- substrate sliding phenomenon occurs due to the mounting table which maintains front contact or partial contact with the substrate.
- the substrate is thermally expanded, if the portion to be thermally expanded is restricted due to the mounting table, the substrate is moved to secure the expansion space.
- Such substrate transfer phenomenon causes a problem regarding process uniformity.
- An object of the present invention is to provide a substrate support unit and a substrate processing apparatus including the same that can prevent the movement of the substrate.
- Another object of the present invention is to provide a substrate support unit and a substrate processing apparatus including the same, which can secure a process uniformity for a substrate.
- the substrate support unit includes a mounting table on which the substrate is placed; And a heating element installed in the mounting table and capable of heating the substrate placed on the mounting table, wherein the mounting table is disposed to face the center portion of the substrate and is spaced apart from the center portion of the substrate; And a contact member extending outwardly from the non-contact surface and disposed along an edge portion of the substrate placed on the mounting table to support the edge portion of the substrate.
- the contact member may protrude from the non-contact surface.
- the contact member may include a plurality of support members disposed along an edge of the substrate.
- the contact member may have a ring shape disposed along an edge of the substrate.
- the mounting table may further include a guide ring disposed outside the contact member to guide the substrate, and the guide ring may include a guide surface inclined toward the inside of the mounting table.
- the mounting table may further include a protrusion member installed to protrude from the non-contact surface and spaced apart from the substrate to adjust a separation distance from the substrate.
- a substrate processing apparatus includes a chamber providing a process space for a substrate; A mounting table installed in the process space and on which the substrate is placed; And a heating element installed in the mounting table and capable of heating the substrate placed on the mounting table, wherein the mounting table is disposed to face the center portion of the substrate and is spaced apart from the center portion of the substrate; And a contact member extending outwardly from the non-contact surface and disposed along an edge portion of the substrate placed on the mounting table to support the edge portion of the substrate.
- the present invention it is possible to prevent the movement of the substrate. Moreover, the process uniformity of a board
- substrate can be ensured.
- FIG. 1 is a view schematically showing a substrate processing apparatus according to an embodiment of the present invention.
- FIG. 2 is a view showing the substrate support unit shown in FIG.
- FIG 3 is a view showing a substrate support unit according to another embodiment of the present invention.
- FIG. 4 is a view showing a process result using a conventional substrate support unit.
- FIG. 5 is a view showing a process result using the substrate support unit of the present invention.
- FIGS. 1 to 5 Embodiments of the invention may be modified in various forms, the scope of the invention should not be construed as limited to the embodiments described below. These embodiments are provided to explain in detail the present invention to those skilled in the art. Therefore, the shape of each element shown in the drawings may be exaggerated to emphasize a more clear description.
- FIG. 1 is a view schematically showing a substrate processing apparatus according to an embodiment of the present invention
- Figure 2 is a view showing a substrate support unit shown in FIG.
- the substrate processing apparatus includes a chamber 10 and a substrate support unit 20 installed inside the chamber 10.
- the chamber 10 provides an internal space that is blocked from the outside, and the process for the substrate W is performed in the internal space. Deposition and etching may be performed in the chamber, and various semiconductor manufacturing processes for the substrate W may be performed.
- the chamber 10 has an entrance 12 formed at one side, and the substrate W enters into and out of the chamber 10 through the entrance 12.
- the gate valve 14 is installed outside the entrance and exit 12, and the gate valve 14 opens and closes the entrance and exit 12.
- the substrate support unit 20 is installed in the chamber 10, and supports the substrate (W) loaded through the entrance (12).
- the substrate support unit 20 includes a mounting table and a support shaft 29, and the support shaft 29 may raise and lower the mounting table as the process proceeds.
- the mounting table includes a contact member 22, a non-contact surface 24, and a guide ring 26.
- the non-contact surface 24 is recessed than the upper surface of the contact member 22 and lower than the upper surface of the contact member 22, and the contact member 22 protrudes from the non-contact surface 24 so that the upper surface of the contact member 22 is It is higher than the non-contact surface 24.
- the height difference between the upper surface of the contact member 22 and the non-contact surface 24 may be approximately 1 ⁇ m to 100 ⁇ m.
- the non-contact surface 24 may have a shape (eg, a circle or a rectangle) that substantially matches the shape of the substrate (W, for example, a circle or a square), but may have a shape different from that of the substrate (W). have.
- the non-contact surface 24 is located below the center portion of the substrate W placed on the mounting table.
- the contact member 22 is disposed outside the non-contact surface 24, and the substrate W is placed on the upper surface of the contact member 22.
- the contact member 22 supports an edge portion of the substrate W placed thereon and is disposed along the edge portion of the substrate W. As shown in FIG.
- the edge portion may be approximately 1 mm to 30 mm in length measured along the radial direction.
- the contact member 22 may include a plurality of support members having a ring shape or an arc shape.
- a flow space 24a is formed between the non-contact surface 24 and the substrate (W).
- the mounting table further includes a heating element H, which heats the substrate W placed on the contact member 22.
- the mounting table may be a heater type including a heating element (H), it may be a susceptor (susceptor) type combined with a structure having a separate shape to the heater. That is, the mounting table described in this embodiment means a structure on which a substrate (for example, a wafer or a flat plate for a display) can be placed, and is used as a name encompassing a heater type and a susceptor type.
- the substrate W When the substrate W is heated by the heating element H, the substrate W is thermally deformed due to thermal expansion, and sag occurs at the center of the substrate W.
- the flow space 24a provides a space in which the center of the substrate W can move. That is, the substrate W is maintained by the contact member 22, and the center of the substrate W sags toward the non-contact surface 24 in the flow space 24a.
- the thermal deformation (or sag) of the substrate W is limited by the mounting table, so that the substrate W is It moves from the top of the mounting table and is eccentric from the center of the mounting table.
- the thermal deformation amount of the substrate W is proportional to the size of the substrate W, the larger the substrate W is, the larger the amount of eccentricity of the substrate W is.
- the thermal deformation (or deflection) of the substrate W is not limited, the movement of the substrate W due to thermal deformation can be prevented.
- the separation distance (d) between the non-contact surface 24 and the substrate (W) should be adjusted so that the thermal deformation of the substrate (W) is not limited by the non-contact surface (24), the separation distance (d) is the substrate ( It can be proportional to the thermal strain of W).
- the mounting table further includes a guide ring 26 disposed outside the contact member 22, and the guide ring 26 has a shape generally coinciding with the shape of the substrate W. As shown in FIG.
- the guide ring 26 has a guide surface 26a inclined inwardly toward the center of the mounting table, and the substrate W placed on the upper part of the mounting table is located at a predetermined position along the guide surface 26a of the guide ring 26. Can be seated on
- FIG. 3 is a view showing a substrate support unit according to another embodiment of the present invention.
- the substrate support unit 20 further includes a protruding member 28 provided on the non-contact surface 24.
- FIG. 3 is a view showing a substrate support unit according to another embodiment of the present invention.
- the substrate support unit 20 further includes a protruding member 28 provided on the non-contact surface 24.
- Heat generated in the heating element H is transmitted to the non-contact surface 24 and the protruding member 28, and is transmitted to the substrate W through the convection from the non-contact surface 24 and the protruding member 28.
- the distance d between the non-contact surface 24 and the substrate W is greater than the distance d 'between the protrusion member 28 and the substrate W, the amount of heat transfer per unit area of the protrusion member 28 is increased. Is greater than the heat transfer amount per unit area of the non-contact surface 24.
- the substrate (W) when the substrate (W) is heated by the heating element (H), the substrate (W) maintains the state supported by the contact member 22, the center of the substrate (W) flow space It sags toward the non-contact surface 24 in 24a.
- the separation distance d 'between the protruding member 28 and the substrate W must be adjusted so that the thermal deformation of the substrate W is not limited by the protruding member 28, and the separation distance d is the substrate W.
- Figure 5 is a view showing a process result using a substrate support unit of the present invention.
- the amount of eccentricity of the substrate W is about 0.05 mm to 1.80 mm, and the process uniformity of the substrate W is about 2.4. % To 6.8%.
- the amount of eccentricity of the substrate (W) was found to be approximately 0.05mm to 0.6mm, the process of the substrate W Uniformity ranged from approximately 1.72% to 2.75%. That is, when the edge contact method is adopted, it can be seen that the eccentricity and the process uniformity are greatly improved.
Abstract
Description
Claims (9)
- 상부에 기판이 놓여지는 재치대; 및상기 재치대 내에 설치되어 상기 재치대 상에 놓여진 상기 기판을 가열할 수 있는 발열체를 포함하되,상기 재치대는,상기 기판의 센터부와 대향되도록 배치되어 상기 기판의 센터부로부터 이격되는 비접촉면; 및상기 비접촉면으로부터 외측으로 연장되며, 상기 재치대 상에 놓여진 상기 기판의 에지부를 따라 배치되어 상기 기판의 에지부를 지지하는 접촉부재를 구비하는 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 접촉부재는 상기 비접촉면으로부터 돌출배치되는 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 접촉부재는 상기 기판의 에지부를 따라 배치된 복수의 지지부재들을 구비하는 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 접촉부재는 상기 기판의 에지부를 따라 배치된 링 형상인 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 재치대는 상기 접촉부재의 외측에 배치되어 상기 기판을 가이드하는 가이드링을 더 포함하는 것을 더 포함하며,상기 가이드링은 상기 재치대의 내측을 향해 경사진 안내면을 구비하는 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 재치대는 상기 비접촉면으로부터 돌출되도록 설치되고 상기 기판으로부터 이격되어 상기 기판과의 이격거리를 조절하는 돌출부재를 더 구비하는 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 접촉부재의 상부면과 상기 비접촉면의 높이 차이는 1㎛ 내지 100㎛인 것을 특징으로 하는 기판지지유닛.
- 제1항에 있어서,상기 기판의 반경방향을 따라 측정한 상기 에지부의 길이는 1㎜ 내지 30㎜인 것을 특징으로 하는 기판지지유닛.
- 기판에 대한 공정공간을 제공하는 챔버;상기 공정공간 내에 설치되며, 상기 기판이 상부에 놓여지는 재치대; 및상기 재치대 내에 설치되어 상기 재치대 상에 놓여진 상기 기판을 가열할 수 있는 발열체를 포함하되,상기 재치대는,상기 기판의 센터부와 대향되도록 배치되어 상기 기판의 센터부로부터 이격되는 비접촉면; 및상기 비접촉면으로부터 외측으로 연장되며, 상기 재치대 상에 놓여진 상기 기판의 에지부를 따라 배치되어 상기 기판의 에지부를 지지하는 접촉부재를 구비하는 것을 특징으로 하는 기판처리장치.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012513852A JP2012529173A (ja) | 2009-06-01 | 2010-04-12 | 基板支持ユニット及びそれを含む基板処理装置 |
US13/375,403 US20120160419A1 (en) | 2009-06-01 | 2010-04-12 | Substrate-supporting unit and substrate-processing apparatus comprising same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0048194 | 2009-06-01 | ||
KR1020090048194A KR20100129566A (ko) | 2009-06-01 | 2009-06-01 | 기판지지유닛 및 이를 포함하는 기판처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010140766A2 true WO2010140766A2 (ko) | 2010-12-09 |
WO2010140766A3 WO2010140766A3 (ko) | 2011-03-10 |
Family
ID=43298267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2010/002227 WO2010140766A2 (ko) | 2009-06-01 | 2010-04-12 | 기판지지유닛 및 이를 포함하는 기판처리장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20120160419A1 (ko) |
JP (1) | JP2012529173A (ko) |
KR (1) | KR20100129566A (ko) |
WO (1) | WO2010140766A2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150059647A1 (en) * | 2012-04-12 | 2015-03-05 | IIa Technologies Pt. Ltd. | Apparatus for Growing Diamonds by Microwave Plasma Chemical Vapour Deposition Process and Substrate Stage Used Therein |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140084529A1 (en) * | 2012-09-26 | 2014-03-27 | Chae Hon KIM | Wafer carrier with pocket |
WO2015156530A1 (ko) * | 2014-04-11 | 2015-10-15 | 주식회사 좋은기술 | 기판 가열 장치 |
WO2015156529A1 (ko) * | 2014-04-11 | 2015-10-15 | 주식회사 좋은기술 | 기판 가열 장치 |
CN107109688A (zh) | 2015-01-23 | 2017-08-29 | 应用材料公司 | 用于在晶片中消除沉积谷的新基座设计 |
KR102195920B1 (ko) * | 2018-11-30 | 2020-12-29 | 세메스 주식회사 | 기판 처리 장치 |
US20210047730A1 (en) * | 2019-08-13 | 2021-02-18 | Applied Materials, Inc. | Chamber configurations for controlled deposition |
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JP2002151412A (ja) * | 2000-10-30 | 2002-05-24 | Applied Materials Inc | 半導体製造装置 |
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JPH11111707A (ja) * | 1997-10-07 | 1999-04-23 | Hitachi Electron Eng Co Ltd | 気相成長装置 |
JP2000164588A (ja) * | 1998-11-30 | 2000-06-16 | Ebara Corp | 基板加熱方法及び装置 |
JP4203206B2 (ja) * | 2000-03-24 | 2008-12-24 | 株式会社日立国際電気 | 基板処理装置 |
JP2002134484A (ja) * | 2000-10-19 | 2002-05-10 | Asm Japan Kk | 半導体基板保持装置 |
WO2005081283A2 (en) * | 2004-02-13 | 2005-09-01 | Asm America, Inc. | Substrate support system for reduced autodoping and backside deposition |
US20100270004A1 (en) * | 2005-05-12 | 2010-10-28 | Landess James D | Tailored profile pedestal for thermo-elastically stable cooling or heating of substrates |
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2009
- 2009-06-01 KR KR1020090048194A patent/KR20100129566A/ko not_active Application Discontinuation
-
2010
- 2010-04-12 WO PCT/KR2010/002227 patent/WO2010140766A2/ko active Application Filing
- 2010-04-12 JP JP2012513852A patent/JP2012529173A/ja active Pending
- 2010-04-12 US US13/375,403 patent/US20120160419A1/en not_active Abandoned
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JP2002151412A (ja) * | 2000-10-30 | 2002-05-24 | Applied Materials Inc | 半導体製造装置 |
JP2004119859A (ja) * | 2002-09-27 | 2004-04-15 | Shin Etsu Handotai Co Ltd | サセプタ、半導体ウェーハの製造装置及び製造方法 |
KR20090036722A (ko) * | 2007-10-10 | 2009-04-15 | 주성엔지니어링(주) | 기판 지지대 및 이를 구비하는 박막 증착 장치 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150059647A1 (en) * | 2012-04-12 | 2015-03-05 | IIa Technologies Pt. Ltd. | Apparatus for Growing Diamonds by Microwave Plasma Chemical Vapour Deposition Process and Substrate Stage Used Therein |
US10184192B2 (en) * | 2012-04-12 | 2019-01-22 | Sunset Peak International Limited | Apparatus for growing diamonds by microwave plasma chemical vapour deposition process and substrate stage used therein |
Also Published As
Publication number | Publication date |
---|---|
WO2010140766A3 (ko) | 2011-03-10 |
US20120160419A1 (en) | 2012-06-28 |
JP2012529173A (ja) | 2012-11-15 |
KR20100129566A (ko) | 2010-12-09 |
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