WO2010122021A2

WO2010122021A2 - Vacuum pump housing and cooling element set for a vacuum pump housing

Info

Publication number: WO2010122021A2
Application number: PCT/EP2010/055196
Authority: WO
Inventors: Thomas Dreifert; Wolfgang Giebmanns
Original assignee: Oerlikon Leybold Vacuum Gmbh
Priority date: 2009-04-21
Filing date: 2010-04-20
Publication date: 2010-10-28
Also published as: DE102009018212A1; US20120034110A1; JP2012524859A; CN102405330A; TW201102504A; WO2010122021A3; KR20120013398A

Abstract

A vacuum pump housing has a pump housing (26) that forms a suction chamber. Pump elements are located in the suction chamber. A cooling element (10) is situated on a flat outer face (30) of the pump housing (26). The cooling element (10) has at least one cooling channel (12) that opens towards the outer face (30) of the pump housing (26). The invention also relates to a cooling element set comprising several cooling elements (10, 42, 44, 46) with different external dimensions.

Description

Vacuum pump housing and cooling element set for a vacuum pump housing

The invention relates to a vacuum pump housing and a cooling element set for a vacuum pump housing.

Vacuum pumps have pumping elements in a pump chamber formed by a housing. Vacuum pumps are, in particular, screw pumps, single-stage and multi-stage roots pumps, rotary vane pumps and claw pumps. To generate a vacuum, it is necessary for a narrow gap to be realized between the pumping elements and the inner wall of the pumping chamber. In this respect, it is necessary that vacuum pumps are operated at a steady operating temperature as possible in order to avoid changes in the gap due to different temperature expansions of the housing and the pumping elements.

It is known to provide vacuum pump housing with cooling fins and to cool the pump housing by an air flow. A uniform and targeted cooling of the housing is here, however, in general only by special measures, eg. B. fairing with targeted Luftfuhrung and external fan system (driven by one of the pump shafts or with separate drive) possible. Here, the specific cooling capacity (heat flow per area) is low. Furthermore, the dissipation of heat in the Environment often undesirable. Especially in clean room environments, the occurrence of air currents must be avoided as far as possible. Furthermore, fans are unwanted noise sources.

Furthermore, it is known to cool vacuum pump housing by water or Kühiflüssigkeit. In order to perform a water cooling, special design measures are required. On the one hand, the water must be brought as close as possible to the areas to be cooled in order to achieve a large cooling effect. On the other hand, due to its corrosive effect, water can not be used on most materials without special protective measures. For example, to avoid corrosion, it is possible to use corrosion-resistant materials such as stainless steel or certain aluminum alloys. However, such materials are expensive and do not meet other conditions occurring in vacuum pump housings such as the stability to high temperatures of more than 250 ⁰ C, in particular. Furthermore, it is possible to paint the surfaces coming into contact with the water. The reliable painting of corresponding disposed within the housing channels is extremely complex. There must be a coating by immersion baths or by rotation or Taumelbeweguπgen for distributing the liquid paint. Furthermore, galvanic surface treatment processes such as galvanizing or nickel plating in the case of steel and gray cast iron or hard anodizing of aluminum are known. However, these are also very complex procedures. Furthermore, the use of consumption anodes is known, and this method is complex and can not be reliably avoided especially when internal cooling channels in the occurrence of corrosion.

When using water as a coolant, special coolants can be used. However, this is only possible if it is closed and therefore expensive Kühlkreäsläufe. In particular, it is necessary to cool the coolant by additionally provided heat exchanger.

The provision of Kuhlkanälen in vacuum pump housings made of cast iron is also possible by the subsequent introduction of the channels by machining, in particular milling and drilling. This is extremely expensive, since time-consuming additional processing steps are required. It is also possible to provide cooling channels already during casting. For this sand cores are provided. Again, this is a complex process and also the cooling water can be contaminated by sand residues for a long time. Furthermore, the provision of cast-in sand-molded channels is only possible under severe restrictions with regard to the shaping, the cross-section and the course, since the shaping takes place by means of sand cores, which must have a corresponding stability for the casting process. The provision of such Kuhlkanäle thus leads to the severe restriction in the shape and the operating conditions such as strength, permissible operating temperatures and media compatibility.

The object of the invention is to provide a vacuum pump housing in which cooling in a simple manner, in particular by liquid cooling medium is possible. Furthermore, it is an independent object of the invention to provide a cooling element set for vacuum pumps, which has a high variability.

The object is achieved by a vacuum pump housing according to claim 1 or a Kühleiemente set according to claim 15.

A vacuum pump housing has a pump housing which forms a pump chamber. In the pumping chamber, the pump elements, such as helical rotors, are arranged. According to the invention the pump housing at least a flat outside. The preferably flat, planar outer side is connected to a cooling element. According to the invention, the cowl core has at least one, possibly also a plurality of cooling channels open in the direction of the outside of the pump housing. By connecting the preferably designed as a separate component Kühleiements with the pump housing, so that a preferably flat Anfagefläche the Kühleiements points in the direction of the flat outer side of the pump housing, closed cooling channels are formed in cross-section. It is thus not necessary in the inventive arrangement of a particular designed as a separate component Kuhlelements to provide on the pump housing itself cooling fins or the like. As a result, the design of the pump housing is simpler and thus the production cost. For cooling the pump housing, the cooling element according to the invention is then connected to the flat outside. This has the particular advantage that the cooling element can be manufactured as a separate component.

Since the cooling element has no innenüegenden cooling channels but the Kühlkanäie are open towards the outside of the pump housing, the production of the cooling element is simple. This may be, for example, castings, wherein the cooling channels are preferably not subsequently incorporated but are already provided as a corresponding groove or recesses in the cooling element. Here, the Kύhlkanäle may be formed such that the cooling element can be manufactured in molds. The cow channels here preferably have draft angles. It is thus not absolutely necessary to produce the cooling channels by subsequently processing the cooling element, such as, for example, milling the cooling channels. For flat, wide channels with larger Ausformschrägen and the provision of sand cores or the like for the preparation of the cooling channels is not required. Preferably, the cooling element has a planar contact surface, which points in the assembled state in the direction of the outside of the pump housing. In the assembled state, the contact surface is thus preferably parallel to the outside of the pump housing. It is possible to attach the cooling element directly on the outside, for example by screws or other Befestigungsrnittei. Preferably, a sealing element is also provided at least in the edge region of the cooling element on the facing in the direction of the outside of the pump housing surface. This may be a liquid sealing element, a sealing compound or the like. Preferably, a self-contained, annular sealing element with a particular circular cross-section, which is preferably an O-ring, is provided. In this case, it is preferable for a sealing groove to be provided in the outside of the pump housing and / or in one side of the cooling element opposite thereto, ie in a particularly preferred embodiment of the contact surface of the cooling element. In this sealing groove, the sealing element is arranged. It is possible that in each case a sealing groove is provided in both surfaces, so that two preferably opposite sealing grooves are provided. In addition or instead of such sealing elements in a preferred embodiment on the outside of the pump housing a particular flat design sealing element is provided. The sealing element preferably completely covers the outside. This allows the sealing element in addition to the function of sealing additionally have the function of protecting the outside of the pump housing from corrosion. It is therefore not necessary to coat a particularly machined, flat outside of the pump housing with a corrosion inhibitor, such as paint.

The provided in the cooling element at least one Kühikanal is preferably formed meander-shaped. It can also be provided in a cooling element several cooling channels, for example, have different cross-sections. This makes it possible to connect one and the same cooling element differently and thus to achieve a different cooling effect. Of course, the multiple cooling channels can also be connected together. Each cow canal has at least one inlet and at least one outlet. Preferably, several, in particular two inputs and / or outlets are provided. This has the advantage that there are several connection options and thus the one connection can be gewähit, for example, is more accessible or easier to assemble.

The at least one inlet and / or outlet is preferably arranged in a side surface of the cooling element. The side surface is an arranged at an angle to the contact surface of the Kühlelernents or "facing the outside of the side of the Kuhlelements page. For example, in a substantially cuboid cooling element, the side surface is perpendicular to the contact surface. Likewise, an inlet and / or outlet on an outside, i. be arranged in particular on that of the contact surface opposite side of the Kuhlelements.

In a particularly preferred embodiment, the inlets and / or outlets are arranged such that they are closed in the direction of the outside of the pump housing. This makes sealing much easier. In particular, the inputs and / or outlets are designed as bores. The bores connect the cooling channels open in the direction of the outside of the pump housing as in particular a cylindrical opening, which is closed in the direction of the outside of the pump housing or in the direction of the contact surface of the cooling element.

Since a cooling fluid _f, such as water, is used as the cooling medium in a particularly preferred embodiment, there is a risk of corrosion. To avoid corrosion, it is possible to provide the inner sides of the cooling channels with a corrosion protection layer. For this it is possible, for example, to paint the corresponding surfaces or to treat them galvanically, eg by galvanizing or nickel plating. Likewise, for example, in aluminum casting a hard anodizing is possible. Furthermore it is possible to provide a Verzehranode as corrosion protection. Preferably, the Kuhlelement is made of a material serving as Verzehranode. Likewise, the Kuhlelement may have a Verzehranode or partially made of a corresponding material.

In a particularly preferred embodiment, the cooling element is produced as a cast iron or spheroidal cast iron component or also from corrosion-resistant aluminum or cast stainless steel alloys. The resulting casting surfaces are not susceptible to corrosion by water. In addition, the production of components by gray or nodular cast iron or Alumϊniumguss is inexpensive. Furthermore, cooling elements made of copper, brass or bronze alloys can be produced.

Furthermore, the invention relates to a cooling elements set for vacuum pumps. The Kuhlelemente set has several cooling elements with different outer dimensions. Here, each cooling element has at least one cooling channel, which is open in the direction of the Aπlagefläche of the cooling element. The contact surface of the cooling element, in the assembled state, points in the direction of an outer side of the vacuum pump housing and, together with the latter, forms a cooling channel closed in cross-section. By developing a cooling element set with different cooling elements, it is possible to arrange the corresponding suitable cooling elements very variably on different pump types.

For example, the cooling elements of Kuhleiemente sets of different sizes, in particular rectangular contact surfaces. When designing the vacuum pump housings, it is therefore only necessary to ensure that outer surfaces are generated which correspond to the size of one of the cooling elements or a large number of them. It is thus not necessary to construct different Kuhlelemente for unterschiediiche vacuum pump housing. For example, the cooling elements set can not only have cooling elements with differently sized contact surfaces and / or differently geometrically formed contact surfaces but also cooling elements with cooling channels of different cross sections can be provided. It is thus possible in a simple manner to provide different cooling elements with different cooling capacities for the corresponding vacuum pump and the intended use of the vacuum pump. The individual cooling elements are in a preferred embodiment, as described above in connection with the vacuum pump housing, further developed. In particular, the cooling elements, which are preferably substantially parallelepiped-shaped or have a cuboid base body, have at least one inlet and at least one outlet. These are, as explained above, preferably provided in side surfaces or on an outer side of the cooling elements. In this respect, a simple connection of the cooling channels is possible via Kühlieitungen with a cooling system.

The invention will be explained in more detail below with reference to preferred embodiments with reference to the accompanying drawings.

Show it:

Fig. 1 is a schematic perspective view of a first

Embodiment of a cooling element,

2 shows a schematic sectional view along the line II-II in FIG. 1, FIG.

3 a detail of a cooling element similar to the cooling element shown in FIG. 2, FIG.

Fig. 4 is a schematic sectional view taken along the line III-III in

Fig. 1, and 5 shows an example of a cooling element set.

A cooling element 10 _f in the illustrated embodiment (FIG. 1) as a cuboid Gusstei! is formed, has a meandering cooling channel 12. The cooling channel 12 is formed as a groove which is open in the direction of a contact surface 14. In this case, the groove can already be produced during casting by using a corresponding casting mold. It is also possible to produce the groove for forming the cooling channel 12, for example, by machining methods, such as milling. The cooling channel 12 is U-shaped in cross-section (FIG. 2), so that the cooling element is closed on its outer surface 16. To connect the cooling channel to cooling lines 18 inlets 20 and outlets 22 are provided in the illustrated embodiment on outer sides. The inlets 20 and the outlets 22 are formed as transverse bores {Fig. 4). In the region of the transverse bores 20, 22, the contact surface 14 is thus closed. This has the advantage that the sealing is easier to implement.

In the illustrated embodiment, two inlets 20 and two outlets 22 are provided in each case. These are each arranged in different mutually perpendicular outer sides 18 each in a corner region. This has the advantage that the connection of the cooling channel can take place via one of the two inlet openings 20 or one of the two outlet openings 22, the connection being freely selectable depending on the requirements. This is advantageous since, depending on the pump type in which the cooling element 10 is used, different space conditions prevail.

Furthermore, the pump element 10 has a plurality of through-holes 24 for attachment, which extend from the outer surface 16 to the contact surface 14. This makes it possible in a simple manner, for example by means of screws, to attach the cooling element 10 to a pump housing 26 (FIG. 2). This is indicated in Fig. 2 by the dashed line 28. In the illustrated exemplary embodiment, the contact surface 14 is not directly adjacent to a flat, machined outer surface 30 of the pump housing 26. Rather, a flat seal 32 is provided between the two components. The seal completely covers the outside 30 as well as the contact surface 14. The seal thus not only serves to tightly position the cooling element 10 on the housing but also to seal the individual sections (FIG. 2) of the cooling channel 12 against one another. By providing a flat seal 32, the machined outer side 30 of the pump housing 26 is further protected from corrosion. Further, by the flat seal 32, the contact surface 14, which is machined in the entire surface in the exemplary embodiment shown in FIG. 2, also protected from corrosion. An inner surface 34 of the cooling channel 12 may be provided with a corrosion protection coating, such as a paint. Preferably, however, it is an untreated casting surface, wherein the cooling element 10 is preferably produced by the gray cast iron or spheroidal casting process or also by corrosion-resistant aluminum or stainless steel cast alloys, so that such a cast surface is corrosion-resistant to the coolant, in particular water.

In a further embodiment (FIG. 3), the cooling element 10 is constructed similarly as in FIG. The only difference is that web portions 36, which are located between adjacent sections of the cooling channel 12, are not processed in a region 38 of the contact surface 14. This is not necessary when providing a correspondingly thick, flat sealing element 32, since the sealing element 32 is compressed in the area 38 and the sealing element 32 thus partially protrudes into the side surfaces 34 of the cooling channel and thus seals adjacent sections of the cooling channel 12 against each other.

When providing a correspondingly thick sealing element 32 in the embodiment shown in Fig. 2, it is also not necessary to protect the contact surface 14 with a corrosion inhibitor from corrosion. This is not necessary because when using a correspondingly thick seal 32 this protrudes into the side surfaces 34 and thus the coolant does not reach the Anlagefiäche 14.

In embodiments which do not have a planar sealing element 32, it is also possible to provide a sealing groove in an outer edge region 40 (FIG. 2) of the contact surface 14, in which a sealing element formed, for example, as an O-ring can be arranged. Possibly. If appropriate, the corresponding sealing groove can also be arranged in the corresponding area in the outer side 30 of the pump housing 26.

In Fig. 5 is a cooling elements set with a plurality of cooling elements 42, 44, 46 is shown as an example. The cooling elements 42, 44, 46 essentially correspond to the structure of the cooling element 10.

Thus, the two Kuhlelemente 42, 44 each have a meandering shaped cooling channel 12, which is open according to the cooling element 10 described above in the direction of a contact surface 14. In the cooling element 42, inlet and outlet ports 20, 22 are provided on the side surfaces 18, wherein in each case two inlets or outlets are provided in the corner regions in order to ensure a high variability with regard to the connection possibilities.

The cooling element 44 is designed in accordance with the cooling element 10, wherein the cuboid-shaped cooling element has no square but a rectangular contact surface 14. The cooling element 46, which is also shown in FIG. 5, has two cooling channels running essentially parallel to one another. Each of the two cooling channels 12 has an inlet 20 and an outlet 22. The two cooling channels 12 can for example be flowed through in different directions. Furthermore, it is possible, depending on the requirement for cooling the vacuum pump, to connect only one of the cooling channels 12. "J 7 _

By a Kuhlelemente having Kuhlelemente set, as shown for example in FIGS. 5 to 7, it is possible to create Kuhlelemente for different vacuum pumps. These are constructed according to a modular system, so that the individual cooling elements of the cooling element sets can be used for different vacuum pumps. This has the advantage that the different vacuum pumps need only have correspondingly formed outer sides 30 and then, depending on the size and requirement, a corresponding cooling element of the cooling element set can be used. This results in extremely high flexibility.

Claims

claims

1. Vacuum pump housing, with

a pump housing (26) forming a pump chamber, and

a cooling element (10, 42, 44, 46) arranged on a flat outside (30) of the pump housing (26),

wherein the cooling element (10, 42, 44, 46) in the direction of the outer side (30) of the pump housing (26) has at least one open Kuhlkanal (12).

2. Vacuum pump housing according to claim 1, characterized in that the cooling element (10, 42, 44, 46) is formed as a separate component.

3. Vacuum pump housing according to claim 1 or 2, characterized in that the cooling element (10, 42, 44, 46) has a planar Aniagefläche (14) facing in the direction of the outer side (30) of the pump housing (26) and preferably in mounted State parallel to the outside (30) of the pump housing (26).

4. Vacuum pump housing according to one of claims 1 to 3, characterized in that on the outer side (30) of the pump housing (26) has a particular areal trained sealing element (32) is preferably completely covered the outside (30) and the outside ( 30) is preferably processed.

5. Vacuum pump housing according to one of claims 1 to 4, characterized in that in the outer side (30) of the pump housing (26) and / or an opposite side of the cooling element (10, 42, 44, 46), in particular the Aniagefläche (14), a sealing groove for receiving a sealing element, such as an O-ring, is provided,

6. Vacuum pump housing according to one of claims 1 to 5, characterized in that the at least one cooling channel (12) is meander-shaped,

7. Vacuum pump housing according to one of claims 1 to 6, characterized in that each Kühlkanai (12) has at least one inlet (20) and at least one outlet (22).

8. Vacuum pump housing according to claim 7, characterized in that the inlet (20) and / or the outlet (22) in a side surface (18) and / or an outer surface (16) of the Kuhlelements (10, 42, 44, 46) is.

9. Vacuum pump housing according to claim 7 or 8, characterized in that the inlet (20) and / or the outlet (22) in the direction of the outer side (30) of the pump housing (26) is closed and preferably formed as a bore,

10. Vacuum pump housing according to one of claims 1 to 9, characterized in that inner sides (34) of the through the cooling element (10, 42, 44, 46) formed at least one cooling channel (12) are formed as untreated cast surfaces.

11. Vacuum pump housing according to one of claims 1 to 10, characterized in that the Kuhlelement (10, 42, 44, 46) is at least partially formed as Verzehraπode.

12. Vacuum pump housing according to one of claims 1 to 11, characterized in that inner sides (34) of the cooling channel (12) and / or Outer surfaces (14, 40) and / or the outer side (30) of the pump housing (26) have a corrosion protection layer.

13. Vacuum pump housing according to one of claims 1 to 12, characterized in that the cooling element (10, 42, 44, 46) is cuboid or has a cuboid base body.

14. Vacuum pump housing according to one of claims 1 to 13, characterized in that the Aniageffäche (14) of the Kύhleiements (10, 42, 44, 46) partially an untreated casting surface (38), in particular in areas between adjacent portions of the at least one cooling channel (12).

15. Cooling element set for vacuum pumps, with

a plurality of cooling elements (10, 42, 44, 46) with different outer dimensions,

wherein each cooling element (10, 42, 44, 46) has at least one cooling channel (12) which is open in the direction of a contact surface (14), which in the assembled state faces an outer side of a vacuum pump housing (26).

16, cooling elements set according to claim 15, characterized in that the contact surface (14) of at least two cooling elements (10, 42, 44, 46) of the cooling element sets of different sizes, in particular rectangular surfaces.

17. Cooling element set according to claim 15 or 16, characterized in that at least two cooling elements (10, 42, 44, 46) have cooling channels (12) with different cross section.

18. Cooling element set according to one of claims 15 to 17, characterized by cooling elements (10, 42, 44, 46) according to at least one of claims 2 to 14,