201102504 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種真空泵外殻及一種用於真空泵外 殻之冷卻元件組》 【先前技術】 真空泵包括若干被配置在一由外殼所形成之泵唧室中 之泵唧元件。真空泵主要被構形爲螺旋式泵、單或多級式 魯氏（Roots)泵、迴轉式真空泵、及爪式泵。爲了產生真 空，有必要在諸泵啷元件與泵啷室的內壁之間實現一個盡 可能爲最小之間隙。爲此理由，有必要在一盡可能均一之 運轉溫度下運轉真空泵，以便避免該間隙之改變，而此改 變可能因爲在泵外殻與諸泵元件之熱膨脹上的不同而發 生。 提供冷卻肋件與真空泵並藉由利用空氣流動來冷卻栗 外殼已爲習知。然而，儘管有這些方法，此外殻之均一且 精準之冷卻通常只可能藉助於特殊措施才能達成，例如藉 助於安裝一具有精準之空氣導引以及外部通風系統（經由 諸泵軸中之一者或經由一分離之驅動單元所驅動） 罩。此一配置具有之缺點在於：比冷卻性能（每單位面積 之熱流）將會是低的。另外，朝周遭環境之散熱 法令人滿意的。尤其，在一無塵室環境中，氣流之胃&;必 須被盡可能最大程度地避免。此外，通風機單元 不悅之噪音來源。 另外，藉助於水或冷卻液來進行真空泵外胃2&§卩# 201102504 爲習知。水冷卻將需要特殊之結構措施。在—方面，爲了 達到盡可能最高之冷卻效果，水必須被導引至盡可能接近 諸必須被冷卻的區域》另一方面’水對於大部份材料之腐 蝕作用將使得在無採取特殊之保護措施下是不可能用水來 冷卻的。爲了防止腐蝕.，將可使用不會腐蝕的材料，諸如 不銹鋼或多種特殊之鋁合金。然而，此類材料均昂貴且不 符合真空泵外殼之其他先決條件，諸如抗高溫性，尤其是 高於250°C之溫度。另外，可塗敫亮漆至那些將會與水接 觸之表面。然而，要可靠地在被配置於外殻內部之諸對應 通道上塗亮漆將是非常複雜的。此塗亮漆程序將必須藉由 浸沒槽浴或藉由許多用於攪動液體亮漆之轉動或翻動動作 而被進行。另外習知者係電鍍表面處理，諸如在鋼及灰鑄 鐵之案例中係被鍍以鋅或鎳，或在鋁之案例中係進行硬質 陽極處理。然而，這些方法也是非常複雜。另一習知之方 式在於使用消耗性電極，但此方法也很複雜’且特別是在 有許多內部冷卻通道之情形中將更無法獲得可靠之腐蝕保 護。 亦可使用多種之特殊冷卻液來取代水作爲冷卻劑。然 而，此將只有在如果諸冷卻迴路本身係閉迴路的情形下才 爲可行，此將造成更增加複雜性之不利後果。尤其’此方 式必須藉由熱交換器來冷卻該冷卻劑’因而必須爲此目的 而額外地設置熱交換器。 在由鑄鐵所製成之真空泵外殼中設置多個冷卻通道之 201102504 方式亦可爲藉由機器製作（尤其如銑製及鑽製）而使此外 殻上配備有此諸通道。結果，多個需要耗時進行之額外加 工步驟將使此選項變得極端地複雜。亦可在鑄造製程期間 便已經形成此諸冷卻通道。爲此目的，砂心是必須被設置 的。此方法也是太複雜，且甚至具有可能使冷卻水長期受 砂殘留物所污染之風險。除此之外，藉由砂心而被成型之 插件模製通道的設置，雖爲可行，但會對此諸通道之形狀、 截面與路線強加許多限制，因爲此模製係藉助於多個被要 求對於鑄造製程必須具有一充分穩定性之砂心而被進行 的。因此，設置此類型冷卻通道將大量地限制可能形狀與 可能操作條件之範圍，而此可能操作條件例如包括穩定 性、運轉溫度、及介質相容性。 本發明之目的在於提供一種真空泵外殻，其可用一簡 單之方式被冷卻，尤其是藉由使用一種液體冷卻介質。另 外，本發明之一獨立目的在於提供一種用於真空泵之冷卻 元件組，其具有一高度變化性。 【發明內容】 根據本發明，上述諸目的將分別藉由如申請專利範圍 第1項中所界定之真空泵以及如申請專利範圍第15項中所 界定之冷卻元件組而達成。 一真空泵外殼包括一界定一泵啷室之泵殻體。被配置 在此泵唧室中者係多個泵唧元件，諸如螺旋狀轉子。根據 本發明，此泵外殼包括至少一平面狀外側面。此較佳係成 201102504 平坦之平面狀外側面被連接至一冷卻元件。根據本發明， 此冷卻元件包括至少一個及可選擇地複數個冷卻通道，其 係朝向此栗外殼之外側面敞開。藉由將此較佳被形成一分 離組件之冷卻元件連接至此泵外殼，所以此冷卻元件之一 較佳成平面狀的緊靠面係面向此泵外殼之平面狀外側面， 將會產生具有一閉合截面形狀之冷卻通道。因此，在本發 明之一較佳地被形成一分離組件之冷卻元件的配置中，並 不需要在泵外殼本身上設置多個冷卻肋件或類似物。藉 此，此泵外殻可被賦予一簡單之構形，因而可降低生產成 本。爲了冷卻此泵外殼，本發明之冷卻元件將接著被連接 至該平面狀外側面。具體而言，此具有之優點在於此冷卻 元件可被製造成一分離之組件。 因爲此冷卻元件並不含任何被配置在內部之通道，而 是以朝向泵外殼之外側面敞開的冷卻通道取代之，所以這 將使得此冷卻元件之製造可簡單化。此諸冷卻元件可被提 供爲鑄造組件，較佳地此諸冷卻通道將不是在稍後之製造 程序中被形成，而是已經事先在冷卻元件中被設置成相對 應之溝槽或凹部。此諸冷卻通道在此可具有一適當之形狀 以便使此冷卻元件可用鑄造模予以製造。此諸冷卻通道較 佳地具有脫模斜度。結果，並不必然需要藉由此冷卻元件 之後續處理（例如藉由銑製冷卻通道）而產生此諸冷卻通 道。在具有較大脫模斜度之平寬冷卻通道中，也是並非必 要提供砂心或類似者以供產生此諸冷卻通道。較佳地’此 201102504 冷卻元件包括一平面狀緊靠面，其在已組裝狀態下係面向 此泵外殼之外側面。在已組裝狀態下，該緊靠面因此較佳 地平行於此栗外殼之外側面。 可藉由例如使用螺絲或其他固定手段而將此冷卻元件 直接地固定於外側面上。較佳地，一密封元件被至少配置 在此冷卻元件之邊緣區域中，再度地係位於面朝此泵外殼 之外側面的表面上。該密封元件可爲一液態密封元件、一 密封複合物、或類似者。較佳的是被賦予一種環狀密封元 件，其本身係閉合的且較佳地具有一圓形截面：此一密封 元件較佳地係一 〇形環。較佳地，一密封溝槽被設置在此 泵外殼之外側面中及/或在與該外側面相對立之此冷卻元 件的一側面中；換言之，根據一尤其較佳之實施例，其被 設置在此冷卻元件之緊靠面中。密封元件被配置在此密封 溝槽中。可在兩表面上分別設置一密封溝槽，以便可有兩 個較佳地被相對立地配置的密封溝槽。除了此諸密封元件 外或者是取代此諸密封元件，根據一較佳之實施例，一較 佳成面狀型式之密封元件被安置於泵外殼之外側面上。該 密封元件較佳地完全覆蓋此外側面。除此密封功能外，此 密封元件因此亦可呈現用於防止泵外殻之外側面腐蝕之功 能。此排除了必須塗敷一抗腐蝕劑（例如亮漆）塗層至此 泵外殻之一平面狀且較佳地係經處理的外側面上之必要 性。 被設置在冷卻元件中之至少一冷卻通道較佳地係成曲 201102504 折形狀。可選擇地，亦可在一冷卻元件中設置複數個例如 具有不同截面之冷卻通道。此將使得一冷卻元件可用不同 之方式與一完全相同之冷卻元件相連接，因而達成一不同 之冷卻效果。當然，不同之冷卻通道亦可被連接在一起。 各冷卻通道包括至少一個入口及至少一個出口。較佳 地，設置複數個入口及/或出口，更佳地係各設置兩個。此 有利地提供了複數個連接方式選項，使得可以選用例如可 更佳地進入或可更易於安裝之連接方式。 該至少一個入口及/或出口較佳地被配置在此冷卻元 件之一橫側面中。該橫側面係一以相對於此冷卻元件之緊 靠面（亦即相對於面朝該外側面之該冷卻元件的側面）成 一角度地被定向之側面。例如，在一大致成平行六面體 (parallelepipedic)之冷卻元件中，該橫側面垂直地延伸 至該緊靠面。或者，一入口及/或出口可被配置在一外側面 上，亦即特別是在此冷卻元件之那一與緊靠面之側面成相 對立配置的側面上。 根據一特佳之實施例，此諸入口及/或出口被配置成使 得其等係朝向該泵外殼之外側面成封閉。因此，此密封將 被顯著地簡單化。較佳地，此諸入口及/或出口被形成爲 孔。這些孔較佳地被形成圓柱形開口，且連接諸朝向泵外 殼之外側面敞開之冷卻通道。該圓柱形開口係朝向該泵外 殼之外側面（亦即朝向此冷卻元件之緊靠面）成封閉。 根據一特佳之實施例，因爲所用之冷卻介質將會是一 201102504 諸如水之冷卻液，所以存在腐飩之風險。爲避免此類腐蝕’ 可在諸冷卻通道的內側面提供一抗腐蝕層。爲達此目的’ 可例如在諸相對應表面上塗以亮漆或使其等接受電鍍處 理，例如鍍鋅或鍍鎳。另外，例如在鑄鋁之情形中，將會 實施一種硬質陽極處理製程。再者，一消耗性電極亦可被 提供以用於防止腐蝕。較佳地，此冷卻元件係由一種作爲 一消耗性電極之材料所製成。另外，諸冷卻元件可包括一 消耗性電極，且可全部地或部分地由一種對應之材料所製 成。 根據一特佳之實施例，此冷卻元件被製造成一灰鑄鐵 或球墨鑄鐵組件，或亦可由抗腐蝕鋁或不銹鋼鑄造合金所 製成。所產生之鑄件表面在接觸到水時將不易於腐蝕。由 灰鑄鐵、球墨鑄鐵、或鑄鋁來製造此類組件零件將不會很 昂貴。另一可行性則在於用銅'黃銅或青銅合金來製造此 冷卻元件。 本發明另有關於一種用於真空泵之冷卻元件組。該冷 卻元件組包括複數個冷卻元件，其具有不同之外部尺寸。 各冷卻元件配備有至少一個冷卻通道，其朝向冷卻元件之 一緊靠面敞開。在已組裝狀態下，此冷卻元件之緊靠面係 朝向此真空泵外殼之一外側面，且連同此外側面形成—具 有一封閉截面之冷卻通道。藉由設計一包含多個不同冷卻 兀件之冷卻元件組’將能以一種非常多變之方式提供多個 具有各自適當冷卻元件之不同栗類型。 201102504 此冷卻元件組之諸冷卻元件包括多個例如具有不同大 小且較佳爲矩形之緊靠面》當設計真空泵外殼時，只必須 注意產生若干與一個或複數個冷卻元件之大小相當的外表 面。因此將不需要針對不同之真空泵外殼設計不同之冷卻 元件。 舉例而言，此冷卻元件組可不只包括多個具有不同大 小之緊靠面及/或具有不同幾何形狀之緊靠面的冷卻元 件，且還包括多個具有不同截面形狀之冷卻通道的冷卻元 件。因此，針對一給定之真空泵與一給定之真空泵用途’ 將可方便地提供具有不同冷卻性能之冷卻元件。根據本發 明之一較佳實施例’諸單獨之冷卻元件被以上述與真空泵 外殼相關之方式設計。尤其，較佳係一平行六面體形狀或 包括一平行六面體基部體之冷卻元件具有至少一個入口與 至少一個出口。如先前已說明的，這些較佳地被安置於諸 冷卻元件之橫側面中或外側面上。因此’將可用一簡單之 方式實現經由若干冷卻導管將諸冷卻通道連接至一冷卻系 統。 【實施方式】 一在第1圖所示實施例中之冷卻元件10被形成爲一平 行六面體鑄造組件，其包括—成曲折狀之冷卻通道12。冷卻 通道12被構形爲一朝向一緊靠面14敞開之溝槽。該溝槽 可藉由使用一對應之鑄模而在澆鑄期間已經被製得。或 者，形成冷卻通道12用之溝槽可例如藉由機械製造（諸如 -10- 201102504 銑製）而被製得。冷卻通道12具有一 U形截面（第2圖）， 所以此冷卻元件在其外表面1 6爲閉合的。在所示之實施例 中，可供將此冷卻通道連接至多個冷卻導管用之多個入口 2〇及多個出口 22被設置在諸外側面18上。此諸入口 20 及此諸出口 22被形成爲橫向孔（第4圖）。因此，緊靠面 14與這些橫向孔20、22之區域成關閉。此具有之優點在 於：密封的準備可用一較簡單之方式被實現。 在本實施例中，設有兩個入口 20與兩個出口 22。這 些被分別地配置在諸不同且相互垂直之外側面1 8中’各在 一角隅區域中。此配置之優點在於：此冷卻通道之連接可 分別經由兩入口 20中之一者及兩出口 22中之一者而被實 現，此連接則可按照各別之需求而自由地選定。這是有利 的，因爲取決於使用此冷卻元件1〇之泵型式，將存在許多 不同之空間狀態。 另外，冷卻元件10上配備有複數個可供連接用之貫穿 孔24,而此諸貫穿孔從外表面16延伸至緊靠面14。藉此， 冷卻元件1〇可例如藉由螺絲而被輕易地固定至一泵外殼 26上（第2圖）。此在第2圖中係用點線28予以示意地描 繪。 在本實施例中，緊靠面14並不直接緊靠在泵外殼26 之一平面狀經處理的外表面3 0上。取代地，則是在此兩組 件之間提供一面狀密封32。此密封32完全地覆蓋外表面 30以及緊靠面14。因此’此密封32不只用於達成冷卻元 -11 - 201102504 件ίο在該外殼上之密封配置，且還被用以密封冷 12彼此相抵之諸個別部分（第2圖）。另外，藉由 一面狀密封32，泵外殼26之經處理外表面30被保 腐蝕。此外，面狀密封32亦可用以保護緊靠面14 蝕，而此緊靠面14則在第2圖所示之實施例中亦已 一全表面性之處理。冷卻通道12之一內表面34上 一抗腐蝕保護塗層，諸如亮漆。然而，較佳地，此 34係一未經處理的鑄件表面，其中冷卻元件1 0較 藉由一灰鑄鐵鑄造或球墨鑄鐵鑄造製程所產生，或 腐蝕鋁或不銹鋼鑄造合金所製成，以便使所得之鑄 可抵抗冷卻劑（例如，尤其是水）的腐蝕。 在另一實施例（第3圖）中，冷卻元件10具有 2圖所示者相類似的構形。唯一之差異在於：多個 在冷卻通道12之兩相鄰部分間之腹板部分36未經 設置在緊靠面14之一區域38中。當提供一相當地 狀密封元件32時，該等部分之處理將不需要，因爲 元件32被壓迫在該區域38中，於是此密封元件32 地伸入冷卻通道1 2之諸橫側面3 4內，並因此將彼 地密封此冷卻通道1 2之諸相鄰部分。 當在第2圖所示實施例中設置一相當地厚之密 32時，同樣地並非絕對必要使用一用於保護緊靠® 於腐蝕之抗腐蝕劑。此並非必要之原因在於：如果 具有適當厚度之密封3 2，則此密封將伸入諸橫側面 通道 提供此 護以抗 以抗腐 被賦予 可配備 內表面 佳地係 係由抗 件表面 一與第 被配置 處理地 厚之面 此密封 將部分 此相抵 封元件 丨14免 使用一 34內， -12- 201102504 並因此將防止該冷卻劑到達緊靠面1 4。 在不包括一面狀密封元件32之諸實施例中，亦可設置 一密封溝槽於緊靠面14之一外緣區域40(第2圖）中， 以便容納一形成例如0形環之密封元件。可選擇地，相對 應之密封溝槽亦可被配置在一與泵外殼26之外表面30相 對立之對應區域中。 第5圖經由範例說明一冷卻元件組，其包括複數個冷 卻元件42、44、46。此諸冷卻元件42、44、46大致上係 以冷卻元件1 〇之方式被設計。 因此，該兩冷卻元件42、44各包括一曲折狀冷卻通道 1 2，其相對應於上述冷卻元件1 0地係朝向緊靠面1 4敞開。 冷卻元件42在其諸橫側面18上配備多個入口 20與出口 22，其中同樣地在此分別於諸邊緣區域中設置兩個入口與 出口，以便在連接選擇方面可確保一高度之可變性。 冷卻元件44係爲對應於冷卻元件1 0之設計，其中此 平行六面體冷卻元件並不包括一正方形而是一矩形之緊靠 面14。另一冷卻元件46(第5圖）包括兩個大致彼此平行 地延伸之冷卻通道。此兩冷卻通道12中之每一個具有一入 口 20及一出口 22。此兩冷卻通道12例如可引導在不同方 向上之流動。另外，可只是連接此諸冷卻通道12中之一 者，而這將取決於對此真空泵所提出之要求條件。 藉由上述包括複數個冷卻元件（諸如第5圖中之範例 所示者）之冷卻元件組，使得將可創造出用於不同真空泵 -13- 201102504 之冷卻元件。這些冷卻元件係以一模組結構包之方式被設 計，以使得此冷卻元件組之諸個別冷卻元件可被使用於諸 不同之真空泵。此具有之優點在於：諸不同之真空泵只須 具有多個經對應設計成之外表面30，且取決於大小及要求 條件，於是將可使用此冷卻元件組中之一相當的冷卻元 件。在此實施例中，將可達到一極高之靈活性。 雖然本發明已參照其多個特定實施例而被說明與圖 示，但此並非意欲將本發明限定於這些經圖式說明之實施 例。熟習本藝之人士將承認許多變化與修改可在不脫離被 界定於後附申請專利範圍中之本發明的真實範圍下被達 成。因此，本發明將涵蓋所有這些落在所附申請專利範圍 及其均等物之範圍內的變化與修改。 【圖式簡單說明】 本發明之包括其最佳模式及使熟習本藝之人士可據以 實施之完整且可行的揭示內容已配合參照附圖而被詳細地 提出於上文中，在此諸附圖中： 第1圖係一冷卻元件之第一實施例的示意立體圖； 第2圖係一沿第1圖中所示11 -11線所取的示意剖面圖； .第3圖係一與第2圖中所示冷卻元件相類似之冷卻元 件的部分視圖； 第4圖係一沿第4圖中所示III-III線所取的示意剖面 圖；及 第5.圖係一冷卻元件組範例之視圖。 -14- 201102504 【主要元件符號說明】 10 冷卻元件 12 冷卻通道 14 緊靠面 16 外表面 18 外側面 20 入口 22 出口 24 貫穿孔 26 泵外殼 28 點線 30 外表面 32 密封元件 34 內表面 36 腹板部分 3 8 區域 40 外緣區域 42/44/46 冷卻元件201102504 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum pump casing and a cooling element group for a vacuum pump casing. [Prior Art] A vacuum pump includes a plurality of components that are formed by a casing. Pumping element in the pumping chamber. Vacuum pumps are primarily configured as screw pumps, single or multi-stage Roots pumps, rotary vacuum pumps, and claw pumps. In order to create a vacuum, it is necessary to achieve a gap that is as small as possible between the pumping elements and the inner wall of the pumping chamber. For this reason, it is necessary to operate the vacuum pump at a temperature that is as uniform as possible to avoid changes in the gap, which may occur due to differences in thermal expansion of the pump casing and the pump elements. It is known to provide cooling ribs and vacuum pumps and to cool the chestnut casing by utilizing the flow of air. However, despite these methods, uniform and precise cooling of the outer casing can usually only be achieved by special measures, for example by installing a precise air guide and an external ventilation system (via one of the pump shafts or Driven by a separate drive unit). This configuration has the disadvantage that the specific cooling performance (heat flow per unit area) will be low. In addition, the heat dissipation method to the surrounding environment is satisfactory. In particular, in a clean room environment, the stomach & of the airflow must be avoided to the greatest extent possible. In addition, the ventilator unit is unpleasant for noise sources. In addition, vacuum pumping of the stomach 2 & § 卩 # 201102504 is known by means of water or a coolant. Water cooling will require special structural measures. In order to achieve the highest possible cooling effect, the water must be directed as close as possible to the areas that must be cooled. On the other hand, the corrosion of water on most materials will result in no special protection. It is impossible to cool down with water under the measures. In order to prevent corrosion, materials that do not corrode, such as stainless steel or a variety of special aluminum alloys, can be used. However, such materials are expensive and do not meet other prerequisites for vacuum pump housings, such as high temperature resistance, especially temperatures above 250 °C. Alternatively, lacquer can be applied to surfaces that will come into contact with water. However, it would be very complicated to reliably apply lacquer on the corresponding channels disposed inside the casing. This lacquering procedure will have to be carried out by immersion bath or by a number of turning or flipping actions for agitating the liquid lacquer. In addition, the prior art is electroplated surface treatment, such as zinc or nickel in the case of steel and ash cast iron, or hard anodization in the case of aluminum. However, these methods are also very complicated. Another conventional approach is to use consumable electrodes, but this method is also complicated' and particularly in the case of many internal cooling channels, reliable corrosion protection will not be obtained. A variety of special coolants can also be used instead of water as a coolant. However, this will only be possible if the cooling circuits themselves are closed, which will have the added disadvantage of increasing complexity. In particular, this method must be used to cool the coolant by means of a heat exchanger, and thus a heat exchanger must be additionally provided for this purpose. The 201102504 method of providing a plurality of cooling passages in a vacuum pump casing made of cast iron may also be provided with the passages on the casing by machine making (especially, for example, milling and drilling). As a result, multiple additional processing steps that require time consuming will make this option extremely complex. These cooling passages may also be formed during the casting process. For this purpose, the core must be set. This method is also too complicated and has even the risk of contaminating the cooling water with long-term sand residues. In addition to this, the arrangement of the insert molding channels formed by the sand core is feasible, but imposes many restrictions on the shape, cross section and route of the passages, since the molding system is supported by a plurality of It is required that the casting process must have a sand core with sufficient stability. Therefore, the provision of this type of cooling passage will greatly limit the range of possible shapes and possible operating conditions, including, for example, stability, operating temperature, and media compatibility. It is an object of the present invention to provide a vacuum pump housing that can be cooled in a simple manner, particularly by using a liquid cooling medium. Further, it is an independent object of the present invention to provide a cooling element group for a vacuum pump which has a high degree of variability. SUMMARY OF THE INVENTION According to the present invention, the above objects are achieved by a vacuum pump as defined in claim 1 and a cooling element group as defined in claim 15 of the patent application, respectively. A vacuum pump housing includes a pump housing defining a pump chamber. The pump chamber is configured with a plurality of pumping elements, such as a helical rotor. According to the invention, the pump housing comprises at least one planar outer side. This preferably is a 201102504 flat planar outer side that is connected to a cooling element. According to the invention, the cooling element comprises at least one and optionally a plurality of cooling passages which are open toward the outside of the chest shell. By connecting the cooling element, which is preferably formed as a separate component, to the pump housing, a preferably planar abutting surface of the cooling element faces the planar outer side of the pump housing and will have a A cooling passage that closes the cross-sectional shape. Accordingly, in a configuration in which one of the present invention is preferably formed as a cooling element of a separate assembly, it is not necessary to provide a plurality of cooling ribs or the like on the pump casing itself. As a result, the pump casing can be given a simple configuration, thereby reducing production costs. In order to cool the pump casing, the cooling element of the present invention will then be joined to the planar outer side. In particular, this has the advantage that the cooling element can be manufactured as a separate component. Since this cooling element does not contain any internal passages, but is replaced by a cooling passage that is open toward the outside of the pump casing, this will simplify the manufacture of the cooling element. The cooling elements can be provided as cast components, preferably the cooling passages will not be formed in a later manufacturing process, but rather have been previously provided in the cooling elements as corresponding grooves or recesses. The cooling passages may have a suitable shape here so that the cooling element can be manufactured using a casting mold. Preferably, the cooling passages have a draft angle. As a result, it is not necessary to generate such cooling passages by subsequent processing of the cooling elements (e.g., by milling the cooling passages). In a flat wide cooling passage having a large draft angle, it is not necessary to provide a core or the like for producing the cooling passages. Preferably, the 201102504 cooling element includes a planar abutment surface that faces the outer side of the pump housing in the assembled state. In the assembled state, the abutment surface is therefore preferably parallel to the outer side of the chest shell. This cooling element can be directly fixed to the outer side surface by, for example, using screws or other fixing means. Preferably, a sealing member is disposed at least in the edge region of the cooling member and is again placed on a surface facing the outer side of the pump casing. The sealing element can be a liquid sealing element, a sealing compound, or the like. Preferably, an annular sealing member is provided which is itself closed and preferably has a circular cross section: the sealing member is preferably a 〇 ring. Preferably, a sealing groove is provided in the outer side of the pump housing and/or in a side of the cooling element opposite the outer side; in other words, according to a particularly preferred embodiment, it is provided The abutment surface of this cooling element. A sealing element is disposed in the sealing groove. A sealing groove may be provided on each of the two surfaces so that there may be two sealing grooves which are preferably arranged oppositely. In addition to or in lieu of the sealing elements, in accordance with a preferred embodiment, a preferred planar sealing element is disposed on the outer side of the pump housing. The sealing element preferably completely covers the other side. In addition to this sealing function, this sealing element can therefore also exhibit the function of preventing corrosion on the outside of the pump casing. This eliminates the necessity of applying an anti-corrosion agent (e.g., lacquer) coating to one of the planar and preferably treated outer side surfaces of the pump housing. The at least one cooling passage disposed in the cooling element is preferably formed into a curved shape of 201102504. Alternatively, a plurality of cooling passages having, for example, different cross sections may be provided in a cooling element. This will allow a cooling element to be connected to an identical cooling element in a different manner, thus achieving a different cooling effect. Of course, different cooling channels can also be connected together. Each cooling passage includes at least one inlet and at least one outlet. Preferably, a plurality of inlets and/or outlets are provided, and more preferably two are provided. This advantageously provides a plurality of connection options such that a connection that is better accessible or easier to install is available. The at least one inlet and/or outlet is preferably disposed in one of the lateral sides of the cooling element. The lateral side is a side that is oriented at an angle relative to the abutment surface of the cooling element (i.e., the side of the cooling element facing the outer side). For example, in a substantially parallelepiped cooling element, the lateral side extends perpendicularly to the abutment surface. Alternatively, an inlet and/or outlet may be provided on an outer side, i.e., particularly on the side of the cooling element that is disposed opposite the side of the abutment surface. According to a particularly preferred embodiment, the inlets and/or outlets are configured such that they are closed toward the outside of the pump housing. Therefore, this seal will be significantly simplified. Preferably, the inlets and/or outlets are formed as holes. The holes are preferably formed into cylindrical openings and are connected to cooling passages that are open toward the outside of the pump casing. The cylindrical opening is closed towards the outer side of the pump casing (i.e., towards the abutment surface of the cooling element). According to a particularly preferred embodiment, there is a risk of rot because the cooling medium used will be a 201102504 coolant such as water. To avoid such corrosion, an anti-corrosion layer can be provided on the inner side of the cooling channels. For this purpose, for example, lacquer may be applied to the corresponding surfaces or subjected to electroplating treatment, such as galvanizing or nickel plating. Further, for example, in the case of cast aluminum, a hard anodizing process will be carried out. Further, a consumable electrode can also be provided for preventing corrosion. Preferably, the cooling element is made of a material that is a consumable electrode. Additionally, the cooling elements can include a consumable electrode and can be made, in whole or in part, from a corresponding material. According to a particularly preferred embodiment, the cooling element is fabricated as a grey cast iron or ductile iron assembly or may be formed from a corrosion resistant aluminum or stainless steel cast alloy. The resulting casting surface will not be susceptible to corrosion when exposed to water. Manufacturing such component parts from gray cast iron, ductile iron, or cast aluminum will not be expensive. Another possibility is to make this cooling element from copper 'brass or bronze alloy. The invention further relates to a cooling element set for a vacuum pump. The cooling element set includes a plurality of cooling elements having different outer dimensions. Each cooling element is provided with at least one cooling passage which is open towards an abutment surface of the cooling element. In the assembled state, the abutment surface of the cooling element faces one of the outer sides of the vacuum pump casing and, together with the other side faces, has a cooling passage having a closed section. By designing a group of cooling elements comprising a plurality of different cooling elements, a plurality of different pump types having respective suitable cooling elements can be provided in a very varied manner. 201102504 The cooling elements of the cooling element group comprise a plurality of, for example, differently sized and preferably rectangular abutments. When designing a vacuum pump housing, only care must be taken to create a number of outer surfaces that are comparable in size to one or more cooling elements. . Therefore, it is not necessary to design different cooling elements for different vacuum pump housings. For example, the cooling element group may include not only a plurality of cooling elements having differently sized abutments and/or abutting faces having different geometries, but also a plurality of cooling elements having cooling channels of different cross-sectional shapes. . Therefore, it will be convenient to provide cooling elements with different cooling performance for a given vacuum pump and a given vacuum pump application. In accordance with a preferred embodiment of the present invention, the individual cooling elements are designed in the manner described above in connection with the vacuum pump housing. In particular, the cooling element preferably in the shape of a parallelepiped or comprising a parallelepiped base has at least one inlet and at least one outlet. As previously explained, these are preferably placed in the lateral or lateral faces of the cooling elements. Thus, the cooling channels can be connected to a cooling system via a number of cooling ducts in a simple manner. [Embodiment] A cooling element 10 in the embodiment shown in Fig. 1 is formed as a parallelepiped casting assembly including a meandering cooling passage 12. The cooling passage 12 is configured as a groove that opens toward an abutment surface 14. The groove can be made during casting by using a corresponding mold. Alternatively, the grooves for forming the cooling passages 12 can be made, for example, by mechanical manufacturing (such as -10-201102504 milling). The cooling passage 12 has a U-shaped cross section (Fig. 2) so that the cooling element is closed at its outer surface 16 . In the illustrated embodiment, a plurality of inlets 2'' and a plurality of outlets 22 for connecting the cooling passage to the plurality of cooling conduits are disposed on the outer sides 18. The inlets 20 and the outlets 22 are formed as transverse holes (Fig. 4). Therefore, the area of the abutting surface 14 and the lateral holes 20, 22 is closed. This has the advantage that the preparation of the seal can be achieved in a relatively simple manner. In the present embodiment, two inlets 20 and two outlets 22 are provided. These are respectively disposed in different and mutually perpendicular outer sides 1 8' in each corner region. The advantage of this configuration is that the connection of the cooling channels can be effected via one of the two inlets 20 and one of the two outlets 22, respectively, which can be freely selected according to individual needs. This is advantageous because there will be many different spatial states depending on the pump type in which this cooling element is used. In addition, the cooling element 10 is provided with a plurality of through holes 24 for attachment, and the through holes extend from the outer surface 16 to the abutment surface 14. Thereby, the cooling element 1 can be easily fixed to a pump casing 26, for example, by screws (Fig. 2). This is schematically depicted in Figure 2 by dotted line 28. In the present embodiment, the abutment surface 14 does not directly abut against a planar treated outer surface 30 of the pump housing 26. Instead, a one-sided seal 32 is provided between the two sets of parts. This seal 32 completely covers the outer surface 30 and the abutment surface 14. Thus, the seal 32 is not only used to achieve a cooling arrangement on the outer casing, but is also used to seal the individual portions of the cold 12 against each other (Fig. 2). Additionally, the treated outer surface 30 of the pump casing 26 is protected from corrosion by the one-sided seal 32. In addition, the planar seal 32 can also be used to protect the abutment surface 14 from erosion, and the abutment surface 14 is also fully surface treated in the embodiment illustrated in Figure 2. A corrosion resistant protective coating, such as lacquer, is applied to inner surface 34 of one of cooling passages 12. Preferably, however, this 34 is an untreated casting surface in which the cooling element 10 is produced by a gray cast iron casting or ductile iron casting process, or by etching an aluminum or stainless steel casting alloy so that The resulting cast resists corrosion of the coolant (eg, especially water). In another embodiment (Fig. 3), the cooling element 10 has a configuration similar to that shown in Fig. 2. The only difference is that a plurality of web portions 36 between two adjacent portions of the cooling passage 12 are not disposed in a region 38 of the abutment surface 14. When a substantially sealing element 32 is provided, the handling of such portions will not be required because the element 32 is forced into the region 38, so that the sealing member 32 projects into the lateral sides 34 of the cooling passage 12 And thus will seal the adjacent portions of this cooling passage 12 to each other. When a relatively thick seal 32 is provided in the embodiment shown in Fig. 2, it is not absolutely necessary to use an anticorrosive agent for protecting against corrosion. The reason why this is not necessary is that if there is a seal 3 2 of appropriate thickness, the seal will extend into the lateral side passages to provide this protection against corrosion resistance being imparted with an inner surface that is better than the surface of the resistant part. The face is configured to handle the ground thickness. This seal will partially dissipate this phase of the sealing element 丨 14 from use within a 34, -12-201102504 and will therefore prevent the coolant from reaching the abutment surface 14 . In embodiments that do not include the one-sided sealing member 32, a sealing groove may be provided in an outer peripheral region 40 (Fig. 2) of the abutment surface 14 to accommodate a sealing member forming, for example, an O-ring. . Alternatively, the corresponding sealing grooves may also be disposed in a corresponding region opposite the outer surface 30 of the pump casing 26. Figure 5 illustrates, by way of example, a group of cooling elements comprising a plurality of cooling elements 42, 44, 46. The cooling elements 42, 44, 46 are generally designed in such a manner as to cool the element 1 . Accordingly, the two cooling elements 42, 44 each include a meandering cooling passage 12 that is open toward the abutment surface 14 corresponding to the cooling element 10 described above. The cooling element 42 is provided on its lateral sides 18 with a plurality of inlets 20 and outlets 22, wherein likewise two inlets and outlets are provided in the edge regions, respectively, in order to ensure a degree of variability in connection selection. The cooling element 44 is designed to correspond to the cooling element 10, wherein the parallelepiped cooling element does not include a square but a rectangular abutment surface 14. Another cooling element 46 (Fig. 5) includes two cooling passages that extend generally parallel to each other. Each of the two cooling passages 12 has an inlet 20 and an outlet 22. The two cooling channels 12 can, for example, direct the flow in different directions. Alternatively, only one of the cooling channels 12 may be connected, and this will depend on the requirements imposed on the vacuum pump. By the above-described group of cooling elements comprising a plurality of cooling elements, such as those shown in the example of Figure 5, it will be possible to create cooling elements for different vacuum pumps -13 - 201102504. These cooling elements are designed in a modular package so that the individual cooling elements of the cooling element set can be used with different vacuum pumps. This has the advantage that the different vacuum pumps only have to have a plurality of correspondingly designed outer surfaces 30, and depending on the size and requirements, then one of the cooling elements can be used. In this embodiment, a very high degree of flexibility can be achieved. While the invention has been illustrated and described with reference to the particular embodiments embodiments Those skilled in the art will recognize that many variations and modifications can be made without departing from the true scope of the invention as defined by the appended claims. Therefore, the present invention is intended to cover all such modifications and alternatives BRIEF DESCRIPTION OF THE DRAWINGS The complete and feasible disclosure of the present invention, including its best mode and those skilled in the art, may be presented in detail above with reference to the accompanying drawings. In the drawings: Fig. 1 is a schematic perspective view of a first embodiment of a cooling element; Fig. 2 is a schematic cross-sectional view taken along line 11-11 shown in Fig. 1; Fig. 3 is a first and a 2 is a partial view of a cooling element similar to that shown in the figure; Fig. 4 is a schematic cross-sectional view taken along line III-III shown in Fig. 4; and Fig. 5. An example of a cooling element group The view. -14- 201102504 [Description of main components] 10 Cooling element 12 Cooling channel 14 Abutment surface 16 Outer surface 18 Outer side 20 Inlet 22 Outlet 24 Through hole 26 Pump housing 28 Dotted line 30 Outer surface 32 Sealing element 34 Inner surface 36 Belly Plate part 3 8 area 40 outer edge area 42/44/46 cooling element