WO2010016093A1 - 回転振動型ジャイロ - Google Patents
回転振動型ジャイロ Download PDFInfo
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- WO2010016093A1 WO2010016093A1 PCT/JP2008/002127 JP2008002127W WO2010016093A1 WO 2010016093 A1 WO2010016093 A1 WO 2010016093A1 JP 2008002127 W JP2008002127 W JP 2008002127W WO 2010016093 A1 WO2010016093 A1 WO 2010016093A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
- Y10T74/1282—Gyroscopes with rotor drive
Definitions
- the present invention relates to a rotational vibration type gyro which is a rotational vibration type angular velocity sensor in a MEMS (micro-electro-mechanical system) sensor.
- MEMS micro-electro-mechanical system
- a drive electrode is disposed inside an annular mass part (see Patent Document 1).
- This rotational vibration type gyro connects a fixed portion (anchor) projecting on a substrate, a flat plate-shaped mass portion (drive weight and detection weight) supported by the fixed portion, and the fixed portion and the mass portion.
- a radial mass support portion (support spring), a drive electrode that rotates and vibrates the mass portion, and four detection electrodes that face the mass portion are provided.
- An object of the present invention is to provide a rotational vibration gyro that can eliminate the influence of the detection sensitivity in the other axis direction on the detection sensitivity in the detection axis direction.
- the rotational vibration type gyro of the present invention is provided with a plate-shaped annular driving weight, a driving electrode that rotates and vibrates around the Z axis through the center of the driving weight, and is vibrated by Coriolis force together with the driving weight.
- a detection weight comprising a pair of flat Y-axis divided detection weights that vibrate independently of each X-axis divided detection weight by a Coriolis force together with a pair of flat X-axis divided detection weights and a driving weight,
- an anchor that is positioned on the inside and protrudes on the substrate and supports the drive weight and the detection weight, and spans between the anchor and each X-axis division detection weight and vibrates as each X-axis division detection weight.
- the drive weight and the detection weight are vibrationally separated by the pair of X-axis weight connection springs and the pair of Y-axis weight connection springs having a function of absorbing rotational vibration and a function of transmitting Coriolis force
- the detection weight is composed of a pair of X-axis divided detection weights and a pair of Y-axis divided detection weights that are independent of each other. For this reason, the detection weight that vibrates due to the Coriolis force is not affected by the rotational vibration of the drive weight, and the pair of X-axis divided detection weights and the pair of Y-axis divided detection weights mutually interact when vibrated due to the Coriolis force. Is not affected by the other.
- the detection sensitivity of one divided detection weight does not affect the detection sensitivity of the other divided detection weight, and the angular velocity can be detected with high accuracy.
- the X-axis divided detection weight and the Y-axis divided detection weight are each composed of a pair of independent ones and are supported by weight support springs, respectively, and can be easily formed without impairing the detection sensitivity. .
- a uniaxial angular velocity sensor (gyro) and a biaxial angular velocity sensor (gyro) can be easily made separately.
- each X-axis divided detection weight and each Y-axis divided detection weight are formed in a flat fan shape.
- each X-axis divided detection weight and each Y-axis divided detection weight can be increased as much as possible with respect to the whole (drive weight), and the detection sensitivity is increased. be able to.
- each X-axis weight support spring and each Y-axis weight support spring are each constituted by a leaf spring formed thinner than the detection weight.
- the X-axis weight support springs and the Y-axis weight support springs that are independent of each other can be appropriately vibrated, and can be formed compactly.
- each X-axis weight support spring and each Y-axis weight support spring are each composed of a torsion bar spring.
- each X-axis weight support spring is composed of a pair of torsion bar springs extending in the Y-axis direction from the anchor.
- Each Y-axis weight support spring is preferably composed of a pair of torsion bar springs extending from the anchor in the X-axis direction.
- each of the X-axis weight support springs and each of the Y-axis weight support springs can properly support the detection weight and the drive weight of the divided structure, and when the detection weight of the division structure vibrates. There is no stress.
- the resonance frequency of the rotational vibration in the drive weight and the resonance frequency of the vibration (detection direction) in each X-axis divided detection weight and each Y-axis divided detection weight are different.
- the detection sensitivity is low, it is possible to suppress variations in detection sensitivity based on manufacturing variations.
- Another rotational vibration type gyro of the present invention is provided so as to surround a driving weight in the form of a plate, a driving electrode for rotating the driving weight around the Z axis passing through the center thereof, and surrounding the driving weight.
- a pair of X-axis weight supporting springs that function as hinges for the detection weights, and a pair of Y-axis that function as hinge axes for each Y-axis divided detection weight that oscillates between the anchor and each Y-axis divided detection weight.
- the weight support spring, rotational vibration absorption function and A pair of X-axis weight connection springs that have a function of transmitting an orientation force and connect the driving weight and each of the X-axis divided detection weights, and a function of absorbing rotational vibration and a function of transmitting Coriolis force.
- a pair of Y-axis weight coupling springs that couple the Y-axis divided detection weight, a pair of X-axis detection electrodes that detect displacement of the vibrating pair of X-axis divided detection weights, and / or a pair of vibrating Y-axis divided detection And a pair of Y-axis detection electrodes for detecting the displacement of the weight.
- the drive weight and the detection weight are vibrationally separated by the pair of X-axis weight connection springs and the pair of Y-axis weight connection springs having a function of absorbing rotational vibration and a function of transmitting Coriolis force
- the detection weight is composed of a pair of X-axis divided detection weights and a pair of Y-axis divided detection weights that are independent of each other. For this reason, the detection weight that vibrates due to the Coriolis force is not affected by the rotational vibration of the drive weight, and the pair of X-axis divided detection weights and the pair of Y-axis divided detection weights mutually interact when vibrated due to the Coriolis force. Is not affected by the other.
- the detection sensitivity of one divided detection weight does not affect the detection sensitivity of the other divided detection weight, and the angular velocity can be detected with high accuracy.
- the X-axis divided detection weight and the Y-axis divided detection weight are each composed of a pair of independent ones and are supported by weight support springs, respectively, and can be easily formed without impairing the detection sensitivity.
- a uniaxial angular velocity sensor (gyro) and a biaxial angular velocity sensor (gyro) can be easily made separately depending on the number of detection electrodes.
- the detection weight is composed of a pair of X-axis divided detection weights and a pair of Y-axis divided detection weights
- the detection sensitivity of one divided detection weight is the other.
- the detection sensitivity of the divided detection weight is not affected. Therefore, so-called other-axis sensitivity can be suppressed, and the angular velocity with respect to each axis can be detected with high accuracy.
- the drive weight and the detection weight are separated in vibration, the detection weight is not affected by the drive weight, and the angular velocity can be detected with high accuracy.
- This rotational vibration type gyroscope is a biaxial angular velocity sensor in a MEMS (micro-electro-mechanical system) sensor manufactured by microfabrication technology using silicon or the like as a material, and is driven by reciprocating reciprocal rotational vibration in a plane. And the thing of embodiment is packaged to about 1 mm square, for example, and is commercialized.
- the left-right direction of the drawing is “X-axis direction”
- the front-rear direction is “Y-axis direction”
- the penetration direction is “Z-axis direction”.
- the rotational vibration gyro 1 includes a plurality of sets (eight sets in the embodiment) of drive electrodes 3 positioned on the outermost periphery on the substrate 2, and a plurality of sets of drive electrodes 3.
- a pair of X-axis weight support springs 7A and 7A spanned between the anchor 6 and each X-axis divided detection weight 5A.
- a pair of Y-axis weight support springs 7B and 7B spanned between the anchor 6 and each Y-axis divided detection weight 5B, and a pair of X-axis connecting the drive weight 4 and each X-axis divided detection weight 5A.
- a pair of Y-axis weights for connecting the weight connection springs 8A, 8A and the drive weight 4 to each Y-axis divided detection weight 5B The springs 8B and 8B, the pair of X-axis split detection weights 5A and 5A that detect vibration and the pair of X-axis detection electrodes 9A and 9A that detect the displacement of the pair, and the displacement of the pair of Y-axis split detection weights 5B that detect vibration are detected.
- a pair of Y-axis detection electrodes 9B and 9B is provided.
- the drive weight 4 and the detection weight are composed of conductive members, and the movable drive electrode 12 described later is a part of the drive weight 4.
- the movable detection electrode 23 is configured by a part of the detection weight 5.
- the connection form between the pair of X-axis weight support springs 7A and 7A and the pair of Y-axis weight support springs 7B and 7B and the anchor 6 is such that the movable part mainly composed of the drive weight 4 and the detection weight 5 is the X-axis. It is configured to be symmetric about the Y axis and the Z axis.
- the center of gravity of the rotational vibration type gyro 1 overlaps with the axial center of both the X and Y support springs 7A and 7B and the anchor 6, and the rotational vibration type gyro is related to the X and Y planes.
- 1 (movable part) is arranged so that the center position thereof overlaps the center of gravity.
- the plurality of drive electrodes 3 are arranged, for example, at regular intervals in the circumferential direction outside the drive weight 4.
- Each drive electrode 3 includes a fixed drive electrode 11 formed integrally on the substrate 2 and a movable drive electrode 12 provided as a part of the drive weight 4 so as to extend radially outward from the outer peripheral end of the drive weight 4. And is composed of.
- the fixed drive electrode 11 and the movable drive electrode 12 are opposed to each other in the form of comb teeth.
- the drive weight 4 becomes Z by the electrostatic force generated between the electrodes 11 and 12. Vibrates around the axis.
- the drive weight 4 is formed in a flat plate ring centered on the Z axis
- the detection weight 5 includes a pair of flat plate fan-shaped X-axis divided detection weights 5A and 5A and a pair of Y-axis divided detection weights 5B and 5B.
- Each outer periphery has a slight gap between it and the drive weight 4, and is formed on a disc centering on the Z axis passing through the XY axis coordinate origin as a whole.
- the drive weight 4 and the detection weight 5 are located on the same plane and have the same thickness.
- the pair of X-axis divided detection weights 5A and 5A and the pair of Y-axis divided detection weights 5B and 5B are formed in exactly the same flat fan shape having an angle of 90 °, and are arranged at a pitch of 90 °.
- the rotationally oscillating drive weight 4 receives an angular velocity around the X axis
- the pair of X axis divided detection weights 5A and 5A together with the drive weight 4 is centered on the pair of X axis weight support springs 7A and 7A due to the generated Coriolis force. Each vibrates.
- the pair of Y axis divided detection weights 5B and 5B together with the drive weight 4 is generated by the generated Coriolis force and the pair of Y axis weight support springs 7B and 7B. Vibrate around each other.
- the pair of X-axis weight connection springs 8A and 8A are disposed opposite to each other on the X-axis, and each X-axis weight connection spring 8A is included in a notch 14 that is deeply cut into each X-axis divided detection weight 5A. It is arranged like this.
- the pair of Y-axis weight connection springs 8B and 8B are arranged to face each other on the Y-axis, and each Y-axis weight connection spring 8B is formed in a notch portion 14 that is deeply cut into each Y-axis divided detection weight 5B. It is arrange
- the pair of X-axis weight connection springs 8A and 8A and the pair of Y-axis weight connection springs 8B and 8B have exactly the same form, and are formed in a narrow cross-sectional rectangle, respectively.
- the Coriolis force received by the driving weight 4 is absorbed and transmitted to the detection weight 5. That is, the rotation vibration of the drive weight 4 is not transmitted to the detection weight 5 by the pair of X-axis weight connection springs 8A and 8A and the pair of Y-axis weight connection springs 8B and 8B, but the vibration due to the Coriolis force is transmitted to the detection weight 5. It has come to be.
- the pair of X-axis split detection weights 5A and 5A and the pair of Y-axis split detection weights 5B and 5B vibrate by Coriolis force without being affected by the rotational vibration of the drive weight 4.
- the anchor 6 is disposed at the center position of the detection weight 5 and is erected on the substrate 2 so as to be slightly higher than the detection weight 5.
- the anchor 6 includes a square anchor body 16 and four anchor protrusions 17 extending diagonally outward from the anchor body 16.
- the X-axis divided detection weights 5A are supported by the two pairs (four in total) of the anchor protrusions 17 arranged in the Y-axis direction via the corresponding X-axis weight support springs 7A, and are arranged in the X-axis direction.
- the Y-axis split detection weights 5B are supported on the anchor projections 17 of the set (four in total) via the corresponding Y-axis weight support springs 7B.
- Each X-axis weight support spring 7A is arranged to pass between both side surfaces of the two anchor protrusions 17 and 17 arranged in the Y-axis direction, and extends in the Y-axis direction, and the torsion support spring 18 , And a connecting piece 19 that connects the tip of the X-axis divided detection weight 5A.
- each Y-axis weight support spring 7B includes a torsion support spring 18 that extends between the two anchor projections 17 and 17 arranged in the X-axis direction and extends between the two side surfaces.
- the connecting piece 19 connects the intermediate position of the support spring 18 and the tip of the Y-axis split detection weight 5B.
- Each torsion support spring 18 is formed in a narrow cross-sectional rectangle like the above-described connection springs 8A and 8B, supports the detection weight 5 and the drive weight 4 in a state of being lifted from the substrate 2, and vibrates by Coriolis force. It functions as a hinge axis of the detection weight 5 to be detected. That is, each torsion support spring 18 functions as a so-called torsion spring.
- each X-axis split detection weight 5A that has received the Coriolis force vibrates around the torsion support spring (Y-axis) 18 that supports the X-axis split detection weight 5A, and the Y-axis split detection weight 5B supports this.
- the torsion support spring (X axis) 18 is oscillated around the center.
- the pair of X-axis detection electrodes 9A, 9A includes a pair of movable detection electrodes 23, 23 formed by a pair of X-axis divided detection weights 5A, and a small gap (however, a detection weight) And a pair of fan-shaped fixed detection electrodes 24 and 24 facing each other with an amplitude greater than 5).
- the pair of Y-axis detection electrodes 9B and 9B has a pair of movable detection electrodes 23 and 23 constituted by a pair of Y-axis divided detection weights 5B and a minute gap with respect to the pair of movable detection electrodes 23 and 23. And a pair of fan-shaped fixed detection electrodes 24, 24 facing each other.
- Each fixed detection electrode 24 may be provided on the substrate 2 or may be provided on the inner surface of the sealing member 26 as illustrated.
- the electrostatic capacitance between the movable detection electrode 23 and the fixed detection electrode 24 changes, and a desired angular velocity is based on this change. Is detected.
- the detection sensitivity can be increased by making the resonance frequency of the rotation vibration in the drive weight 4 and the resonance frequency of the vibration in the detection direction of the detection weight 5 the same.
- the resonance frequency of the rotational vibration in the drive weight 4 is different from the resonance frequency of the vibration in each X-axis divided detection weight 5A and each Y-axis divided detection weight 5B.
- the biaxial rotational vibration gyro 1 in the X-axis direction and the Y-axis direction is configured.
- a uniaxial rotational vibration gyro 1 is configured. That is, it is possible to easily make a single-axis gyro and a two-axis gyro.
- the detection weight 5 is constituted by the pair of mutually independent X-axis divided detection weights 5A and 5A and the pair of Y-axis divided detection weights 5B and 5B.
- the X-axis split detection weights 5A and 5A and the pair of Y-axis split detection weights 5B and 5B are not affected by the other when they vibrate with Coriolis force. That is, the detection sensitivity of one divided detection weight 5 does not affect the detection sensitivity of the other divided detection weight 5, and the angular velocity can be detected with high accuracy.
- the X-axis divided detection weight 5A and the Y-axis divided detection weight 5B are composed of a pair of independent members and are supported by the support springs 7A and 7B, respectively, so that they are easily formed without impairing the detection sensitivity. can do. Further, since the connecting springs 8A and 8B absorb the rotational vibration of the drive weight 4, the detection weight 5 is not affected by noise based on the rotational vibration, and the X-axis and Y-axis rotations are not affected. The angular velocity can be accurately detected.
- the anchor 6, the X-axis weight support spring 7A, and the Y-axis weight support spring 7B have a structure different from that of the first embodiment.
- the anchor 6 is disposed at the center position of the detection weight 5 and is erected on the substrate 2 so as to be slightly higher than the detection weight 5.
- the anchor 6 includes a square anchor body 16, a pair of X-axis anchor protrusions 17 ⁇ / b> A and 17 ⁇ / b> A extending outward in the X-axis direction from the anchor body 16, and extending outward in the Y-axis direction from the anchor body 16. And a pair of Y-axis anchor protrusions 17B and 17B.
- Each X-axis anchor protrusion 17A supports an X-axis split detection weight 5A via a corresponding X-axis weight support spring 7A, and each Y-axis anchor protrusion 17B has a corresponding Y-axis weight support spring 7B.
- the Y-axis divided detection weight 5B is supported via
- Each X-axis weight support spring 7A is composed of a pair of torsion support springs 18 and 18 extending in the Y-axis direction from both side surfaces of the X-axis anchor protrusion 17A, and the inner circumference of the X-axis split detection weight 5A. It is connected to both side surfaces of the “U” -shaped notch 21 formed on the side.
- each Y-axis weight support spring 7B is composed of a pair of torsion support springs 18 and 18 extending in the X-axis direction from both side surfaces of the Y-axis anchor protrusion 17B, and the Y-axis divided detection weight 5B.
- Each torsion support spring 18 is formed in a narrow cross-sectional rectangle like the above-described connection springs 8A and 8B, and supports the detection weight 5 and the drive weight 4 in a state of being lifted from the substrate 2 and has a Coriolis force. It functions as a hinge axis of the detection weight 5 that vibrates. That is, each torsion support spring 18 functions as a so-called torsion spring.
- each X-axis split detection weight 5A that has received the Coriolis force vibrates around a pair of torsion support springs (Y-axis) 18 and 18 that support it, and the Y-axis split detection weight 5B It vibrates around a pair of torsion support springs (X-axis) 18 and 18 supporting this.
- each X-axis weight support spring 7A and each Y-axis weight support spring 7B are configured by leaf springs extending from the anchor 6 in a cross shape.
- the anchor 6 is formed in a square shape on the Z-axis, and the inner edge of the X-axis divided detection weight 7A and the inner edge of the Y-axis divided detection weight 7B are parallel to each side of the corresponding anchor 6. Is formed.
- Each X-axis weight support spring 7A formed of a leaf spring is formed sufficiently thinner than the X-axis divided detection weight 5A and is connected to an intermediate position in the thickness direction of the X-axis divided detection weight 5A.
- each Y-axis weight support spring 7B is sufficiently thinner than the Y-axis divided detection weight 5B and is connected to an intermediate position in the thickness direction of the Y-axis divided detection weight 5B.
- each X-axis weight support spring 7A and each Y-axis weight support spring 7B can be formed compactly, and accordingly, the X-axis divided detection weight 5A and the Y-axis divided detection weight 5B can be formed larger.
- Each X-axis weight support spring 7A and each Y-axis weight support spring 7B are preferably formed as thin and wide as possible.
- the rotational vibration gyro 1 according to the second embodiment of the present invention will be described.
- the detection weight 5 is disposed on the outer side and the driving weight 4 is disposed on the inner side.
- a pair of X-axis weight support springs 7 A and 7 A and a pair of Y-axis weight support springs 7 B and 7 B are disposed outside the detection weight 5.
- the rotational vibration type gyro 1 is positioned on the outer periphery of the substrate 2 and has a substantially flat plate-like annular shape as a whole, a pair of flat plate-shaped X-axis divided detection weights 5A and 5A and a pair of flat-plate fan-shaped Y-axis divided portions.
- the detection weight 5 including the detection weights 5B and 5B, the substantially disk-shaped drive weight 4 disposed inside the detection weight 5, and the drive weight 4 at an angle of 45 ° with respect to the X-axis direction and the Y-axis direction.
- each X-axis weight support spring 7A is composed of a pair of torsion support springs (torsion springs) 18 and 18 extending in the Y-axis direction from both side surfaces of the X-axis anchor 6A. It is connected to both side surfaces of the 5 A wide notch 31.
- each Y-axis weight support spring 7B is composed of a pair of torsion support springs 18 and 18 extending in the X-axis direction from both side surfaces of the Y-axis anchor 6B, and the Y-axis divided detection weight 5B is wide. It is connected to both side surfaces of the notch 31.
- the detection weight 5 is composed of a pair of X-axis divided detection weights 5A and 5A and a pair of Y-axis divided detection weights 5B and 5B, one divided detection weight 5A. Detection sensitivity of the other divided detection weight 5B does not affect the angular velocities around the X axis and the Y axis.
- each X-axis weight coupling spring 8A is formed in a “T” shape and is arranged so as to be included in a “T” -shaped notch 33 formed in each X-axis divided detection weight 5A. It is installed.
- the straight portion 35 on the X-axis split detection weight 5A side of each X-axis weight connection spring 8A is arranged in parallel with the X-axis weight support spring 7A and functions as a torsion spring for the X-axis split detection weight 5A. Yes.
- each Y-axis weight coupling spring 8B is formed in a “T” shape and is disposed so as to be enclosed in a “T” -shaped notch 33 formed in each Y-axis divided detection weight 5B. ing. And the linear part 35 by the side of the Y-axis division
- the X-axis divided detection weights 5A and the Y-axis divided detection weights 5B that vibrate due to Coriolis force are supported with sufficient flexibility in the vibration direction, and this vibration is supported by the X-axis weight connection springs 8A and Y-axis. It is not suppressed by the weight connection spring 8B. Therefore, the detection sensitivity is not impaired, and the angular velocities around the X axis and the Y axis can be accurately detected.
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Abstract
Description
3 駆動電極 4 駆動錘
5 検出錘 5A X軸分割検出錘
5B Y軸分割検出錘 6 アンカー
7A X軸錘支持ばね 7B Y軸錘支持ばね
8A X軸錘連結ばね 8B Y軸錘連結ばね
9A X軸検出電極 9B Y軸検出電極
Claims (7)
- 平板環状の駆動錘と、
前記駆動錘をその中心を通るZ軸回りに回転振動させる駆動電極と、
前記駆動錘の内側に配設され、前記駆動錘と共にコリオリ力で振動する平板状の一対のX軸分割検出錘および前記駆動錘と共にコリオリ力で前記各X軸分割検出錘とは独立して振動する平板状の一対のY軸分割検出錘から成る検出錘と、
前記検出錘の内側に位置して基板上に突設され、前記駆動錘および前記検出錘を支持するアンカーと、
前記アンカーと各X軸分割検出錘との間に掛け渡され、振動する前記各X軸分割検出錘のヒンジとして機能する一対のX軸錘支持ばね、および前記アンカーと各Y軸分割検出錘との間に掛け渡され、振動する前記各Y軸分割検出錘のヒンジとして機能する一対のY軸錘支持ばねと、
前記回転振動の吸収機能および前記コリオリ力の伝達機能を有し、前記駆動錘と前記各X軸分割検出錘とを連結する一対のX軸錘連結ばね、および前記回転振動の吸収機能および前記コリオリ力の伝達機能を有し、前記駆動錘と前記各Y軸分割検出錘とを連結する一対のY軸錘連結ばねと、
振動する前記一対のX軸分割検出錘の変位を検出する一対のX軸検出電極、および/または振動する前記一対のY軸分割検出錘の変位を検出する一対のY軸検出電極と、を備えたことを特徴とする回転振動型ジャイロ。 - 前記各X軸分割検出錘および前記各Y軸分割検出錘は、いずれも平板扇状に形成されていることを特徴とする請求項1に記載の回転振動型ジャイロ。
- 前記各X軸錘支持ばねおよび前記各Y軸錘支持ばねは、前記検出錘より薄手に形成された板ばねでそれぞれ構成されていることを特徴とする請求項1に記載の回転振動型ジャイロ。
- 前記各X軸錘支持ばねおよび前記各Y軸錘支持ばねは、捻り棒ばねでそれぞれ構成されていることを特徴とする請求項1に記載の回転振動型ジャイロ。
- 前記アンカーは、前記一対のX軸分割検出錘および前記一対のY軸分割検出錘の内側に配設され、
前記各X軸錘支持ばねは、前記アンカーからY軸方向に延びる一対の捻り棒ばねで構成され、
前記各Y軸錘支持ばねは、前記アンカーからX軸方向に延びる一対の捻り棒ばねで構成されていることを特徴とする請求項1に記載の回転振動型ジャイロ。 - 前記駆動錘における回転振動の共振周波数と、前記各X軸分割検出錘および前記各Y軸分割検出錘おける振動の共振周波数とが異なることを特徴とする請求項1に記載の回転振動型ジャイロ。
- 平板状の駆動錘と、
前記駆動錘をその中心を通るZ軸回りに回転振動させる駆動電極と、
前記駆動錘の外側に囲むように配設され、前記駆動錘と共にコリオリ力で振動する平板扇状の一対のX軸分割検出錘および前記駆動錘と共にコリオリ力で前記各X軸分割検出錘とは独立して振動する平板扇状の一対のY軸分割検出錘から成る検出錘と、
前記検出錘の外側に位置して基板上に突設され、前記駆動錘および前記検出錘を支持するアンカーと、
前記アンカーと各X軸分割検出錘との間に掛け渡され、振動する前記各X軸分割検出錘のヒンジとして機能する一対のX軸錘支持ばね、および前記アンカーと各Y軸分割検出錘との間に掛け渡され、振動する前記各Y軸分割検出錘のヒンジ軸として機能する一対のY軸錘支持ばねと、
前記回転振動の吸収機能および前記コリオリ力の伝達機能を有し、前記駆動錘と前記各X軸分割検出錘とを連結する一対のX軸錘連結ばね、および前記回転振動の吸収機能および前記コリオリ力の伝達機能を有し、前記駆動錘と前記各Y軸分割検出錘とを連結する一対のY軸錘連結ばねと、
振動する前記一対のX軸分割検出錘の変位を検出する一対のX軸検出電極、および/または振動する前記一対のY軸分割検出錘の変位を検出する一対のY軸検出電極と、を備えたことを特徴とする回転振動型ジャイロ。
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US13/057,792 US20110185829A1 (en) | 2008-08-06 | 2008-08-06 | Rotational vibration gyro |
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WO2012004825A1 (ja) * | 2010-07-05 | 2012-01-12 | パイオニア株式会社 | 回転振動型ジャイロ |
WO2013051060A1 (ja) * | 2011-10-05 | 2013-04-11 | パイオニア株式会社 | 回転振動ジャイロ |
JP2019070574A (ja) * | 2017-10-10 | 2019-05-09 | パナソニックIpマネジメント株式会社 | 角速度センサ素子、およびこれを用いた角速度センサ |
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CN116147600A (zh) * | 2021-10-27 | 2023-05-23 | 苏州明皜传感科技股份有限公司 | 微机电多轴角速度感测器 |
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