WO2009145542A2 - 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치 및 그 표면처리방법 - Google Patents

빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치 및 그 표면처리방법 Download PDF

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Publication number
WO2009145542A2
WO2009145542A2 PCT/KR2009/002771 KR2009002771W WO2009145542A2 WO 2009145542 A2 WO2009145542 A2 WO 2009145542A2 KR 2009002771 W KR2009002771 W KR 2009002771W WO 2009145542 A2 WO2009145542 A2 WO 2009145542A2
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WO
WIPO (PCT)
Prior art keywords
laser
laser beam
polygon mirror
surface treatment
cross
Prior art date
Application number
PCT/KR2009/002771
Other languages
English (en)
French (fr)
Korean (ko)
Other versions
WO2009145542A3 (ko
Inventor
김도열
Original Assignee
하나기술(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하나기술(주) filed Critical 하나기술(주)
Priority to DE112009001247T priority Critical patent/DE112009001247T5/de
Priority to CN200980119090.3A priority patent/CN102046323B/zh
Publication of WO2009145542A2 publication Critical patent/WO2009145542A2/ko
Publication of WO2009145542A3 publication Critical patent/WO2009145542A3/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror

Definitions

  • the present invention relates to a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror, and a surface treatment method thereof.
  • the cross-sectional shape of the laser beam can be modified to minimize the attenuated laser beam lost from the reflection surface of the polygon mirror.
  • the present invention relates to a laser surface treatment apparatus and a surface treatment method using a beam mirror deformation and polygon mirror capable of compacting the equipment.
  • a surface treatment apparatus using a laser beam is used for various operations such as a process of digging a laser beam onto a workpiece and dividing grooves at regular intervals, or evenly distributing the internal structure of a steel sheet, or a surface treatment process.
  • the surface treatment apparatus using such a laser beam the magnetic domain micronization apparatus is mentioned.
  • the magnetic domain micronizing apparatus includes a plurality of laser beam generating apparatuses 200 and 200 'for generating a laser beam, and a plurality of laser beam generating apparatuses for inducing a laser beam generated from each of the laser beam generating apparatuses 200 and 200' in a predetermined direction.
  • the light collecting mirror 220 is further configured to irradiate the laser beams reflected from the mirrors 250, 250 ′, 260 and 260 ′ in the width direction of the object to be processed 100.
  • the conventional magnetic domain micronizing device may be installed such that the mirrors 250, 250 ', 260, 260' can oscillate in order to form a wider irradiation area, particularly when the beam distribution mirrors 240, 240 'are applied.
  • the polygon mirrors can replace the functions of these mirrors.
  • the polygon mirror automatically changes the reflection area of the laser beam according to the position of the reflecting surface which is changed by the rotation of the polygon mirror.
  • the conventional magnetic domain micronized device has the following problems.
  • the conventional mirror has a problem that it is difficult to cope with high power laser beam because of its small size.
  • the conventional polygon mirror has a complicated structure.
  • a plurality of lenses should be provided so that the laser beam reflected from each reflecting surface can enter the working area.
  • the present invention has been devised in view of this point, and in particular, the cross-sectional shape of the laser beam can be modified by using beam shaping means, thereby minimizing the attenuation laser beam that is lost when irradiating the polygon mirror, and also a plurality of surfaces.
  • the laser generating means of each surface treatment kit is configured to be located on the same plane, so that the beam cross-section deformation and the polygon can be simplified and the maintenance of the equipment can be facilitated. It is an object of the present invention to provide a laser surface treatment apparatus using a mirror and a surface treatment method thereof.
  • the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the present invention As a means for solving this problem, the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the present invention,
  • Second beam shaping means (40) for deforming a cross section of the second laser beam (22) to obtain a third laser beam (23);
  • a polygon mirror 50 which is irradiated with the third laser beam 23 while rotating at a constant speed
  • It consists of a surface treatment kit 300, including; the feed rate of the object to be processed 100, the rotational speed of the polygon mirror 50 in conjunction with the feed rate, the control means for controlling the output of the laser generating means 20; It is characterized by.
  • the transfer means 10 is characterized in that for transferring the processing object 100 at a speed of 80 ⁇ 200m / min.
  • first beam shaping means 30 is a concave mirror or convex lens
  • second beam shaping means 40 is a convex mirror or concave lens
  • the first beam shaping means 30 and the second beam shaping means 40 are characterized in that the radius (R) is different from each other.
  • the polygon mirror 50 is characterized in that the rotational speed is 1000 ⁇ 2000rpm.
  • the object 100 is characterized in that the fiber fabric, glass, wood, leather, steel plate, aluminum plate, copper plate, stainless steel plate, ceramic, plastic, or rubber.
  • the present invention is characterized in that it further comprises a beam dumper 80 that can adjust the scan width.
  • the third laser beam 23 has an elliptical cross section, does not deviate from the reflective surface 51a of the polygon mirror 50, and does not span the reflective surface 51b adjacent to the reflective surface 51a. It is characterized by a modification.
  • the fourth laser beam 24 is characterized in that the slot cross-sectional shape of 0.4 mm in width and 5 mm in length.
  • the second laser beam 22 to the fourth laser beam 24 is characterized in that the length of the long axis and short axis is adjusted according to the type and processing form of the object to be processed (100).
  • the laser beam surface treatment apparatus using another beam cross-sectional deformation and polygon mirror according to the present invention is provided with at least two sets of the surface treatment kit 300 of the above-described various configurations with respect to the width direction of the object to be processed (100)
  • the laser generating means 20a, 20b, 20c, and 20d of each surface treatment kit 300 are installed on the same plane.
  • the present invention is configured to further include a conveying means 10 for conveying the object to be processed 100 at a constant speed, when the object to be processed 100 is wound.
  • the polygon mirror 50 is rotated at a rotational speed of 1000 ⁇ 2000rpm in conjunction with the rotational speed of the workpiece 100, the workpiece 100 is characterized in that it is transferred at a speed of 80 ⁇ 200m / min.
  • the third laser beam 23 has an elliptical cross section, does not deviate from the reflective surface 51a of the polygon mirror 50, and does not span the reflective surface 51b adjacent to the reflective surface 51a. It is characterized by having a modified cross section.
  • the beam shaping means is used to transform the shape of the laser beam into an ellipse to minimize the loss ratio of the laser beam irradiated to the polygon mirror, thereby maximizing the utilization efficiency of the laser beam.
  • the spot shortened to the object to be processed can be condensed thinner, which enables fine processing.
  • 1 is a plan view showing a conventional magnetic domain micronization device.
  • Figure 2 is a perspective view schematically showing the configuration of a laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror according to the present invention.
  • FIG. 3 is a perspective view showing a first embodiment of the beam shaping means according to the present invention.
  • FIG. 4 is a perspective view showing a second embodiment of the beam shaping means according to the invention.
  • Figure 5 is a flow chart showing a cross-sectional change of the laser beam of the laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror according to the present invention.
  • FIG. 6 is a view for showing a cross section of the state in which the third laser beam is irradiated to the polygon mirror in accordance with the present invention.
  • FIG. 7 is a view for showing a cross section of a laser beam irradiated to a conventional polygon mirror.
  • Figure 8 is a perspective view schematically showing the configuration of another embodiment of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
  • Figure 9 is a perspective view showing a part of the mounting state of the laser generating means in another embodiment of the present invention.
  • FIG. 10 is a flowchart illustrating a laser surface treatment method using beam cross-sectional deformation and polygon mirror according to the present invention.
  • FIG. 2 is a perspective view schematically showing the configuration of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
  • Laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the first embodiment of the present invention comprises a surface treatment kit (300).
  • the surface treatment kit 300 includes a laser generating means 20, first and second beam shaping means 30 and 40, a polygon mirror 50, a condenser mirror 60, and a control means.
  • the surface treatment kit 300 is configured to further include a conveying means 10 when the object to be processed 100 is wound or the length is long.
  • the conveying means 10 is to convey the object to be processed 100 and includes a conveying means such as a conveyor.
  • the transfer means 10 transfers the object to be processed 100 at a speed of 80 to 200 m / min under the control of a control means to be described later. This feed speed is determined according to the type and processing type of the object to be processed 100.
  • the laser generating means 20 generates the first laser beam 21 having a specified rule.
  • the first laser beam 21 is similar to a garden whose cross section is not an exact circle, but for convenience of description, the first laser beam 21 will be described as a garden.
  • the first laser beam 21 is in the shape of a garden as shown in FIG.
  • a CO 2 laser, a Nd: YAG laser, a semiconductor laser, or a fiber laser generator can be used.
  • the first beam shaping means 30 receives the first laser beam 21 and deforms its cross-sectional shape into a second laser beam 22.
  • a concave mirror or a convex lens as shown in FIG. 3 may be used.
  • a cross section of the deformed second laser beam 22 is, for example, as shown in FIG.
  • the circle indicated by the dotted line indicates the cross section trajectory of the first laser beam 21.
  • the first beam shaping means 30 is described as using a concave mirror or a convex lens, but it is also possible to use a convex mirror or concave lens.
  • the second beam shaping means 40 is irradiated with the second laser beam 22 to deform into an ellipse shape having a shorter axis and a longer axis.
  • a convex mirror or a concave lens as shown in FIG. 4 may be used as the second beam shaping means 40.
  • a cross section of the modified third laser beam 23 is one example, as shown in FIG. 5C.
  • the circle indicated by the dotted line indicates the cross section trajectory of the first laser beam 21.
  • the cross section of the third laser beam 23 is, as shown in Figure 6, the third laser beam 23 is the reflective surface 51a of the polygon mirror 50 is substantially reflected It is desirable to minimize the attenuated laser beam that is lost by not leaving ().
  • the third laser beam 23 at this time is deformed to a size that does not overlap with the other reflective surface 51b adjacent to the reflective surface 51a to minimize the attenuated laser beam. This can be easily seen in comparison with FIG. 7, which shows a conventional laser beam having a circular cross section. In FIG. 7, the semicircle portions indicated by hidden lines correspond to the attenuated laser beam.
  • the second beam shaping means 40 is described as using a convex mirror or concave lens, but it is also possible to use a concave mirror or convex lens.
  • first beam shaping means 30 and the second beam shaping means 40 are manufactured with different radii R so that the cross section of the laser beam is first beam shaping means 30 and the second beam shaping means 40. It is desirable to make the long axis and the short axis become shorter as it passes.
  • the first beam shaping means 30 employs a convex lens having a radius R of 1 to 3 m
  • the second beam shaping means 40 employs a concave lens having a radius R of 30 to 80 cm. I can make it.
  • the polygon mirror 50 reflects the incident third laser beam 23 while rotating at a predetermined speed.
  • the polygon mirror 50 even if the third laser beam 23 is irradiated in a certain direction by the rotation will always adjust the reflection range within a certain range fluidly.
  • the polygon mirror 50 is subject to the control of the control means to be linked according to the conveying speed of the workpiece (100). That is, the control means is to control the rotation speed within the range from the stationary state of the polygon mirror 50 to 2000rpm. In particular, the control means is to control the rotational speed of the polygon mirror 50 in the range of 1000 ⁇ 2000rpm that is used a lot.
  • the rotation speed of the polygon mirror 50 may be determined according to the speed of the object 100 to be interlocked in consideration of the type of the object 100 or the time the laser beam stays on the object 100.
  • the condenser mirror 60 irradiates the surface of the object 100 with the fourth laser beam 24 obtained by condensing the third laser beam 23 to perform a necessary work. That is, according to the intensity of the fourth laser beam 24, a variety of operations are performed, such as processing the surface of the object 100 or carving a pattern, or stabilizing the internal molecular structure of the object 100.
  • the fourth laser beam 24 has an elliptic shape with a relatively short axis compared to the long axis.
  • the fourth laser beam 24 having a slit shape having a short axis of 0.4 mm and a long axis of 4 mm may be used. have.
  • the control means controls the intensity of the first laser beam 21 generated by the laser generating means 20, the rotation of the polygon mirror 50, and the like according to the type and the work content of the object to be processed 100.
  • the control means is not shown.
  • the surface treatment kit may further include a beam dumper 80 between the polygon mirror 50 and the condenser mirror 60.
  • the beam dumper 80 is used to adjust the irradiation width of the fourth laser beam 24.
  • the beam dumper 80 absorbs a laser beam that is out of a desired range so that irradiation is always performed within a predetermined range.
  • the workpiece 100 is a fiberglass, glass, wood, leather, steel sheet, aluminum plate, copper plate, stainless steel plate, ceramic, plastic, or various steel sheets such as rubber or plastics and fabrics Can be.
  • the second to fourth laser beams 22 to 24 are configured such that the lengths of the long axis and the short axis may be varied according to the type and the processing form of the object to be processed 100.
  • the first beam shaping means 30 and the second beam shaping means 40 may be manufactured in the form of an optical module so as to be able to adjust the focusing ratio so that the length ratio of the long axis and the short axis may be arbitrarily adjusted.
  • Figure 8 is a perspective view schematically showing the configuration of another embodiment of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
  • description is abbreviate
  • the width of the object 100 is not wide enough to cover the entire width with one surface treatment kit, at least two surface treatment kits are installed in the width direction of the object 100 to be used.
  • FIG. 8 shows an example in which four surface treatment kits 300a, 300b, 300c, and 300d are mounted.
  • the laser generating means 20a, 20b, 20c, and 20d of each of the surface treatment kits 300a, 300b, 300c, and 300d are installed to cross each other on the same plane as shown in FIG. Since it is possible to install the laser generating means (20a, 20b, 20c, 20d) on a single plane unlike the prior art, it is possible to compactly manufacture the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror of the present invention do.
  • FIG. 10 is a flowchart illustrating a laser surface treatment method using a beam cross section deformation and a polygon mirror according to the present invention. Here, it will be described taking an example of transferring the processing object 100 using the transfer means 10.
  • the first step (S100) is mounted to the conveying means 10 the object to be processed (100).
  • the object to be processed 100 may be mounted on a conveyor.
  • the second step (S200) sets a control variable.
  • the setting of the control variable is made in the control means not shown.
  • Variables include the rotational speed of the polygon mirror 50, the conveying speed of the object to be processed 100, and the output intensity of the laser generating means 20a, 20b, 20c, and 20d.
  • these variables can be controlled by interlocking at an appropriate ratio, the setting of such interlocking control depends on the type of the object to be processed 100 and the type of work.
  • the third step S300 drives the polygon mirror 50 and the workpiece 100 at a set speed.
  • the speed at this time depends on the setting of the above-described control variable.
  • the fourth step S400 is a step of generating the first laser beam 21.
  • the first laser beam 21 is generated with a specified aperture from the laser generating means 20a, 20b, 20c, 20d of the surface treatment kit 300.
  • the output intensity at this time depends on the setting of the control variable.
  • the fifth step S500 is to adjust the cross-sectional shape of the first laser beam 21.
  • This shape adjustment is made through the first beam shaping means 30 which is a concave mirror or convex lens and the second beam shaping means 40 which is a convex mirror or concave lens. That is, the first beam shaping means 30 receives the first laser beam 21 having a circular cross section and converts the shape into a second laser beam 22 having an elliptical cross section.
  • the second beam shaping means 40 is a size that does not deviate from the reflecting surface 51a of the polygon mirror 50 by being irradiated with the second laser beam 22 and has a long elliptical third laser beam having a relatively long axis. (23) is generated.
  • a sixth step S600 the third laser beam 23 generated as described above is irradiated to the reflecting surface 51a of the polygon mirror 50.
  • the working area is oscillated as much as it is rotated.
  • the third laser beam 23 collects the fourth laser beam 24 reflected from the reflecting surface 51a and irradiates the object 100 to be processed.
  • the irradiation of the fourth laser beam 24 enables the surface processing of the object 100 to be processed, the uniforming of the internal molecular structure, or the cutting of grooves.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/KR2009/002771 2008-05-26 2009-05-26 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치 및 그 표면처리방법 WO2009145542A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112009001247T DE112009001247T5 (de) 2008-05-26 2009-05-26 Einrichtung und Verfahren zur Laser-Oberflächenbehandlung unter Anwendung von Strahlquerschnittsformung und eines Polygonspiegels
CN200980119090.3A CN102046323B (zh) 2008-05-26 2009-05-26 利用光束截面成形和多面镜的激光表面处理设备及方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080048446A KR100900466B1 (ko) 2008-05-26 2008-05-26 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치및 그 표면처리방법
KR10-2008-0048446 2008-05-26

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WO2009145542A2 true WO2009145542A2 (ko) 2009-12-03
WO2009145542A3 WO2009145542A3 (ko) 2010-03-11

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KR (1) KR100900466B1 (zh)
CN (1) CN102046323B (zh)
DE (1) DE112009001247T5 (zh)
WO (1) WO2009145542A2 (zh)

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Publication number Priority date Publication date Assignee Title
EP2799561B1 (en) * 2011-12-27 2019-11-27 JFE Steel Corporation Device to improve iron loss properties of grain-oriented electrical steel sheet
KR101638355B1 (ko) * 2014-04-09 2016-07-14 두원포토닉스 주식회사 연속파 레이저 빔과 스캔 광학계를 이용한 그루빙 장치
DE102017218130A1 (de) * 2017-10-11 2019-04-11 Robert Bosch Gmbh Verfahren zur Herstellung eines Stromableiters, Elektrode und Batteriezelle

Citations (4)

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KR0137215B1 (ko) * 1988-06-01 1998-07-01 마쯔모도 가쯔슈 레이저 가공장치 및 방법
KR19990066180A (ko) * 1998-01-22 1999-08-16 카를로스 엠. 헤르난데즈 초단 펄스폭 및 높은 평균 전력을 갖는 레이저를 사용한 금속스케일 제거
JP2002067375A (ja) * 2000-08-24 2002-03-05 Ricoh Co Ltd 光書き込み装置および方法
KR20060012398A (ko) * 2004-08-03 2006-02-08 주식회사 이오테크닉스 오차 보정이 가능한 폴리곤 미러를 이용한 레이저 가공장치

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US4500771A (en) * 1982-10-20 1985-02-19 Westinghouse Electric Corp. Apparatus and process for laser treating sheet material
JP4475733B2 (ja) * 2000-04-12 2010-06-09 Ｈｏｙａ株式会社 走査光学装置
CN101013200A (zh) * 2007-02-12 2007-08-08 苏州德龙激光有限公司 激光精密加工的光学系统

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0137215B1 (ko) * 1988-06-01 1998-07-01 마쯔모도 가쯔슈 레이저 가공장치 및 방법
KR19990066180A (ko) * 1998-01-22 1999-08-16 카를로스 엠. 헤르난데즈 초단 펄스폭 및 높은 평균 전력을 갖는 레이저를 사용한 금속스케일 제거
JP2002067375A (ja) * 2000-08-24 2002-03-05 Ricoh Co Ltd 光書き込み装置および方法
KR20060012398A (ko) * 2004-08-03 2006-02-08 주식회사 이오테크닉스 오차 보정이 가능한 폴리곤 미러를 이용한 레이저 가공장치

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WO2009145542A3 (ko) 2010-03-11
DE112009001247T5 (de) 2011-04-14
CN102046323B (zh) 2014-07-09
CN102046323A (zh) 2011-05-04
KR100900466B1 (ko) 2009-06-02

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