WO2009145542A2 - Laser surface treatment apparatus and method using beam section shaping and polygon mirror - Google Patents
Laser surface treatment apparatus and method using beam section shaping and polygon mirror Download PDFInfo
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- WO2009145542A2 WO2009145542A2 PCT/KR2009/002771 KR2009002771W WO2009145542A2 WO 2009145542 A2 WO2009145542 A2 WO 2009145542A2 KR 2009002771 W KR2009002771 W KR 2009002771W WO 2009145542 A2 WO2009145542 A2 WO 2009145542A2
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- laser
- laser beam
- polygon mirror
- surface treatment
- cross
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
- B23K26/0846—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt for moving elongated workpieces longitudinally, e.g. wire or strip material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
Definitions
- the present invention relates to a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror, and a surface treatment method thereof.
- the cross-sectional shape of the laser beam can be modified to minimize the attenuated laser beam lost from the reflection surface of the polygon mirror.
- the present invention relates to a laser surface treatment apparatus and a surface treatment method using a beam mirror deformation and polygon mirror capable of compacting the equipment.
- a surface treatment apparatus using a laser beam is used for various operations such as a process of digging a laser beam onto a workpiece and dividing grooves at regular intervals, or evenly distributing the internal structure of a steel sheet, or a surface treatment process.
- the surface treatment apparatus using such a laser beam the magnetic domain micronization apparatus is mentioned.
- the magnetic domain micronizing apparatus includes a plurality of laser beam generating apparatuses 200 and 200 'for generating a laser beam, and a plurality of laser beam generating apparatuses for inducing a laser beam generated from each of the laser beam generating apparatuses 200 and 200' in a predetermined direction.
- the light collecting mirror 220 is further configured to irradiate the laser beams reflected from the mirrors 250, 250 ′, 260 and 260 ′ in the width direction of the object to be processed 100.
- the conventional magnetic domain micronizing device may be installed such that the mirrors 250, 250 ', 260, 260' can oscillate in order to form a wider irradiation area, particularly when the beam distribution mirrors 240, 240 'are applied.
- the polygon mirrors can replace the functions of these mirrors.
- the polygon mirror automatically changes the reflection area of the laser beam according to the position of the reflecting surface which is changed by the rotation of the polygon mirror.
- the conventional magnetic domain micronized device has the following problems.
- the conventional mirror has a problem that it is difficult to cope with high power laser beam because of its small size.
- the conventional polygon mirror has a complicated structure.
- a plurality of lenses should be provided so that the laser beam reflected from each reflecting surface can enter the working area.
- the present invention has been devised in view of this point, and in particular, the cross-sectional shape of the laser beam can be modified by using beam shaping means, thereby minimizing the attenuation laser beam that is lost when irradiating the polygon mirror, and also a plurality of surfaces.
- the laser generating means of each surface treatment kit is configured to be located on the same plane, so that the beam cross-section deformation and the polygon can be simplified and the maintenance of the equipment can be facilitated. It is an object of the present invention to provide a laser surface treatment apparatus using a mirror and a surface treatment method thereof.
- the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the present invention As a means for solving this problem, the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the present invention,
- Second beam shaping means (40) for deforming a cross section of the second laser beam (22) to obtain a third laser beam (23);
- a polygon mirror 50 which is irradiated with the third laser beam 23 while rotating at a constant speed
- It consists of a surface treatment kit 300, including; the feed rate of the object to be processed 100, the rotational speed of the polygon mirror 50 in conjunction with the feed rate, the control means for controlling the output of the laser generating means 20; It is characterized by.
- the transfer means 10 is characterized in that for transferring the processing object 100 at a speed of 80 ⁇ 200m / min.
- first beam shaping means 30 is a concave mirror or convex lens
- second beam shaping means 40 is a convex mirror or concave lens
- the first beam shaping means 30 and the second beam shaping means 40 are characterized in that the radius (R) is different from each other.
- the polygon mirror 50 is characterized in that the rotational speed is 1000 ⁇ 2000rpm.
- the object 100 is characterized in that the fiber fabric, glass, wood, leather, steel plate, aluminum plate, copper plate, stainless steel plate, ceramic, plastic, or rubber.
- the present invention is characterized in that it further comprises a beam dumper 80 that can adjust the scan width.
- the third laser beam 23 has an elliptical cross section, does not deviate from the reflective surface 51a of the polygon mirror 50, and does not span the reflective surface 51b adjacent to the reflective surface 51a. It is characterized by a modification.
- the fourth laser beam 24 is characterized in that the slot cross-sectional shape of 0.4 mm in width and 5 mm in length.
- the second laser beam 22 to the fourth laser beam 24 is characterized in that the length of the long axis and short axis is adjusted according to the type and processing form of the object to be processed (100).
- the laser beam surface treatment apparatus using another beam cross-sectional deformation and polygon mirror according to the present invention is provided with at least two sets of the surface treatment kit 300 of the above-described various configurations with respect to the width direction of the object to be processed (100)
- the laser generating means 20a, 20b, 20c, and 20d of each surface treatment kit 300 are installed on the same plane.
- the present invention is configured to further include a conveying means 10 for conveying the object to be processed 100 at a constant speed, when the object to be processed 100 is wound.
- the polygon mirror 50 is rotated at a rotational speed of 1000 ⁇ 2000rpm in conjunction with the rotational speed of the workpiece 100, the workpiece 100 is characterized in that it is transferred at a speed of 80 ⁇ 200m / min.
- the third laser beam 23 has an elliptical cross section, does not deviate from the reflective surface 51a of the polygon mirror 50, and does not span the reflective surface 51b adjacent to the reflective surface 51a. It is characterized by having a modified cross section.
- the beam shaping means is used to transform the shape of the laser beam into an ellipse to minimize the loss ratio of the laser beam irradiated to the polygon mirror, thereby maximizing the utilization efficiency of the laser beam.
- the spot shortened to the object to be processed can be condensed thinner, which enables fine processing.
- 1 is a plan view showing a conventional magnetic domain micronization device.
- Figure 2 is a perspective view schematically showing the configuration of a laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror according to the present invention.
- FIG. 3 is a perspective view showing a first embodiment of the beam shaping means according to the present invention.
- FIG. 4 is a perspective view showing a second embodiment of the beam shaping means according to the invention.
- Figure 5 is a flow chart showing a cross-sectional change of the laser beam of the laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror according to the present invention.
- FIG. 6 is a view for showing a cross section of the state in which the third laser beam is irradiated to the polygon mirror in accordance with the present invention.
- FIG. 7 is a view for showing a cross section of a laser beam irradiated to a conventional polygon mirror.
- Figure 8 is a perspective view schematically showing the configuration of another embodiment of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
- Figure 9 is a perspective view showing a part of the mounting state of the laser generating means in another embodiment of the present invention.
- FIG. 10 is a flowchart illustrating a laser surface treatment method using beam cross-sectional deformation and polygon mirror according to the present invention.
- FIG. 2 is a perspective view schematically showing the configuration of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
- Laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror according to the first embodiment of the present invention comprises a surface treatment kit (300).
- the surface treatment kit 300 includes a laser generating means 20, first and second beam shaping means 30 and 40, a polygon mirror 50, a condenser mirror 60, and a control means.
- the surface treatment kit 300 is configured to further include a conveying means 10 when the object to be processed 100 is wound or the length is long.
- the conveying means 10 is to convey the object to be processed 100 and includes a conveying means such as a conveyor.
- the transfer means 10 transfers the object to be processed 100 at a speed of 80 to 200 m / min under the control of a control means to be described later. This feed speed is determined according to the type and processing type of the object to be processed 100.
- the laser generating means 20 generates the first laser beam 21 having a specified rule.
- the first laser beam 21 is similar to a garden whose cross section is not an exact circle, but for convenience of description, the first laser beam 21 will be described as a garden.
- the first laser beam 21 is in the shape of a garden as shown in FIG.
- a CO 2 laser, a Nd: YAG laser, a semiconductor laser, or a fiber laser generator can be used.
- the first beam shaping means 30 receives the first laser beam 21 and deforms its cross-sectional shape into a second laser beam 22.
- a concave mirror or a convex lens as shown in FIG. 3 may be used.
- a cross section of the deformed second laser beam 22 is, for example, as shown in FIG.
- the circle indicated by the dotted line indicates the cross section trajectory of the first laser beam 21.
- the first beam shaping means 30 is described as using a concave mirror or a convex lens, but it is also possible to use a convex mirror or concave lens.
- the second beam shaping means 40 is irradiated with the second laser beam 22 to deform into an ellipse shape having a shorter axis and a longer axis.
- a convex mirror or a concave lens as shown in FIG. 4 may be used as the second beam shaping means 40.
- a cross section of the modified third laser beam 23 is one example, as shown in FIG. 5C.
- the circle indicated by the dotted line indicates the cross section trajectory of the first laser beam 21.
- the cross section of the third laser beam 23 is, as shown in Figure 6, the third laser beam 23 is the reflective surface 51a of the polygon mirror 50 is substantially reflected It is desirable to minimize the attenuated laser beam that is lost by not leaving ().
- the third laser beam 23 at this time is deformed to a size that does not overlap with the other reflective surface 51b adjacent to the reflective surface 51a to minimize the attenuated laser beam. This can be easily seen in comparison with FIG. 7, which shows a conventional laser beam having a circular cross section. In FIG. 7, the semicircle portions indicated by hidden lines correspond to the attenuated laser beam.
- the second beam shaping means 40 is described as using a convex mirror or concave lens, but it is also possible to use a concave mirror or convex lens.
- first beam shaping means 30 and the second beam shaping means 40 are manufactured with different radii R so that the cross section of the laser beam is first beam shaping means 30 and the second beam shaping means 40. It is desirable to make the long axis and the short axis become shorter as it passes.
- the first beam shaping means 30 employs a convex lens having a radius R of 1 to 3 m
- the second beam shaping means 40 employs a concave lens having a radius R of 30 to 80 cm. I can make it.
- the polygon mirror 50 reflects the incident third laser beam 23 while rotating at a predetermined speed.
- the polygon mirror 50 even if the third laser beam 23 is irradiated in a certain direction by the rotation will always adjust the reflection range within a certain range fluidly.
- the polygon mirror 50 is subject to the control of the control means to be linked according to the conveying speed of the workpiece (100). That is, the control means is to control the rotation speed within the range from the stationary state of the polygon mirror 50 to 2000rpm. In particular, the control means is to control the rotational speed of the polygon mirror 50 in the range of 1000 ⁇ 2000rpm that is used a lot.
- the rotation speed of the polygon mirror 50 may be determined according to the speed of the object 100 to be interlocked in consideration of the type of the object 100 or the time the laser beam stays on the object 100.
- the condenser mirror 60 irradiates the surface of the object 100 with the fourth laser beam 24 obtained by condensing the third laser beam 23 to perform a necessary work. That is, according to the intensity of the fourth laser beam 24, a variety of operations are performed, such as processing the surface of the object 100 or carving a pattern, or stabilizing the internal molecular structure of the object 100.
- the fourth laser beam 24 has an elliptic shape with a relatively short axis compared to the long axis.
- the fourth laser beam 24 having a slit shape having a short axis of 0.4 mm and a long axis of 4 mm may be used. have.
- the control means controls the intensity of the first laser beam 21 generated by the laser generating means 20, the rotation of the polygon mirror 50, and the like according to the type and the work content of the object to be processed 100.
- the control means is not shown.
- the surface treatment kit may further include a beam dumper 80 between the polygon mirror 50 and the condenser mirror 60.
- the beam dumper 80 is used to adjust the irradiation width of the fourth laser beam 24.
- the beam dumper 80 absorbs a laser beam that is out of a desired range so that irradiation is always performed within a predetermined range.
- the workpiece 100 is a fiberglass, glass, wood, leather, steel sheet, aluminum plate, copper plate, stainless steel plate, ceramic, plastic, or various steel sheets such as rubber or plastics and fabrics Can be.
- the second to fourth laser beams 22 to 24 are configured such that the lengths of the long axis and the short axis may be varied according to the type and the processing form of the object to be processed 100.
- the first beam shaping means 30 and the second beam shaping means 40 may be manufactured in the form of an optical module so as to be able to adjust the focusing ratio so that the length ratio of the long axis and the short axis may be arbitrarily adjusted.
- Figure 8 is a perspective view schematically showing the configuration of another embodiment of a laser surface treatment apparatus using a beam cross-sectional deformation and a polygon mirror according to the present invention.
- description is abbreviate
- the width of the object 100 is not wide enough to cover the entire width with one surface treatment kit, at least two surface treatment kits are installed in the width direction of the object 100 to be used.
- FIG. 8 shows an example in which four surface treatment kits 300a, 300b, 300c, and 300d are mounted.
- the laser generating means 20a, 20b, 20c, and 20d of each of the surface treatment kits 300a, 300b, 300c, and 300d are installed to cross each other on the same plane as shown in FIG. Since it is possible to install the laser generating means (20a, 20b, 20c, 20d) on a single plane unlike the prior art, it is possible to compactly manufacture the laser surface treatment apparatus using the beam cross-sectional deformation and polygon mirror of the present invention do.
- FIG. 10 is a flowchart illustrating a laser surface treatment method using a beam cross section deformation and a polygon mirror according to the present invention. Here, it will be described taking an example of transferring the processing object 100 using the transfer means 10.
- the first step (S100) is mounted to the conveying means 10 the object to be processed (100).
- the object to be processed 100 may be mounted on a conveyor.
- the second step (S200) sets a control variable.
- the setting of the control variable is made in the control means not shown.
- Variables include the rotational speed of the polygon mirror 50, the conveying speed of the object to be processed 100, and the output intensity of the laser generating means 20a, 20b, 20c, and 20d.
- these variables can be controlled by interlocking at an appropriate ratio, the setting of such interlocking control depends on the type of the object to be processed 100 and the type of work.
- the third step S300 drives the polygon mirror 50 and the workpiece 100 at a set speed.
- the speed at this time depends on the setting of the above-described control variable.
- the fourth step S400 is a step of generating the first laser beam 21.
- the first laser beam 21 is generated with a specified aperture from the laser generating means 20a, 20b, 20c, 20d of the surface treatment kit 300.
- the output intensity at this time depends on the setting of the control variable.
- the fifth step S500 is to adjust the cross-sectional shape of the first laser beam 21.
- This shape adjustment is made through the first beam shaping means 30 which is a concave mirror or convex lens and the second beam shaping means 40 which is a convex mirror or concave lens. That is, the first beam shaping means 30 receives the first laser beam 21 having a circular cross section and converts the shape into a second laser beam 22 having an elliptical cross section.
- the second beam shaping means 40 is a size that does not deviate from the reflecting surface 51a of the polygon mirror 50 by being irradiated with the second laser beam 22 and has a long elliptical third laser beam having a relatively long axis. (23) is generated.
- a sixth step S600 the third laser beam 23 generated as described above is irradiated to the reflecting surface 51a of the polygon mirror 50.
- the working area is oscillated as much as it is rotated.
- the third laser beam 23 collects the fourth laser beam 24 reflected from the reflecting surface 51a and irradiates the object 100 to be processed.
- the irradiation of the fourth laser beam 24 enables the surface processing of the object 100 to be processed, the uniforming of the internal molecular structure, or the cutting of grooves.
Abstract
Description
Claims (12)
- 가공대상물(100)을 이송시켜 주는 이송수단(10);A conveying means 10 for conveying the object to be processed 100;소정의 구경을 갖는 제1레이저빔(21)을 생성하는 레이저발생수단(20);Laser generating means (20) for generating a first laser beam (21) having a predetermined aperture;상기 제1레이저빔(21)의 단면을 변형시켜 제2레이저빔(22)을 얻는 오목미러 또는 볼록렌즈인 제1빔쉐이핑수단(30);First beam shaping means (30) which is a concave mirror or a convex lens which deforms a cross section of said first laser beam (21) to obtain a second laser beam (22);상기 제2레이저빔(22)의 단면을 변형시켜 그 단면이 타원형상으로 이루어지고, 입사될 폴리곤미러(50)의 반사면(51a)을 벗어나지 않으며, 상기 반사면(51a)에 인접한 반사면(51b)과 걸쳐지지 않도록 변형된 제3레이저빔(23)을 얻는 볼록미러 또는 오목렌즈인 제2빔쉐이핑수단(40);The cross section of the second laser beam 22 is deformed so that the cross section is formed in an elliptical shape and does not deviate from the reflecting surface 51a of the polygon mirror 50 to be incident, and the reflecting surface adjacent to the reflecting surface 51a ( Second beam shaping means 40 which is a convex mirror or a concave lens to obtain a third laser beam 23 deformed so as not to span 51b);일정속도로 회전하면서 상기 제3레이저빔(23)을 조사받는 폴리곤미러(50);A polygon mirror 50 which is irradiated with the third laser beam 23 while rotating at a constant speed;상기 폴리곤미러(50)로부터 반사된 상기 제3레이저빔(23)을 집광하여 상기 가공대상물(100)에 스팟을 생성시켜주는 제4레이저빔(24)을 조사하는 집광미러(60); 및A condensing mirror 60 for condensing the third laser beam 23 reflected from the polygon mirror 50 to irradiate a fourth laser beam 24 for generating a spot on the object 100; And상기 가공대상물(100)의 이송속도와, 상기 이송속도와 연동되는 상기 폴리곤미러(50)의 회전속도와, 상기 레이저발생수단(20)의 출력을 제어하는 제어수단;을 포함하는 표면처리키트(300)로 이루어지고,Surface treatment kit including; a control means for controlling the feed rate of the object to be processed 100, the rotational speed of the polygon mirror 50 in conjunction with the feed rate, and the output of the laser generating means 20 300),상기 표면처리키트(300)를 하나 이상 구비한 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.Laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that provided with at least one surface treatment kit (300).
- 제 1 항에 있어서,The method of claim 1,상기 이송수단(10)은 80~200m/min의 속도로 상기 가공대상물(100)을 이송시켜 주는 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The transfer means 10 is a laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that for transferring the processing object 100 at a speed of 80 ~ 200m / min.
- 제 1 항에 있어서,The method of claim 1,상기 제1빔쉐이핑수단(30) 및 상기 제2빔쉐이핑수단(40)은 반경(R)이 서로 다른 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The first beam shaping means (30) and the second beam shaping means (40) is a laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that the radius (R) is different from each other.
- 제 1 항에 있어서,The method of claim 1,상기 폴리곤미러(50)는 회전속도가 1000~2000rpm인 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The polygon mirror 50 is a laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that the rotational speed is 1000 ~ 2000rpm.
- 제 1 항에 있어서,The method of claim 1,상기 가공대상물(100)은 섬유원단, 유리, 목재, 가죽, 강판, 알루미늄판, 구리판, 스테인레스판, 세라믹, 플라스틱, 또는 고무인 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The processing object 100 is a fiber surface, laser beam surface treatment apparatus using a polygonal mirror and beam cross-sectional deformation, characterized in that the glass, wood, leather, steel plate, aluminum plate, copper plate, stainless steel plate, ceramic, plastic, or rubber.
- 제 1 항에 있어서,The method of claim 1,스캔폭을 조절할 수 있는 빔덤퍼(80)를 더 포함하는 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.Laser surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that it further comprises a beam dumper 80 that can adjust the scan width.
- 제 1 항에 있어서,The method of claim 1,상기 제4레이저빔(24)은 단면의 단축이 0.4㎜이고 장축이 5㎜인 슬롯단면 형상인 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The fourth laser beam (24) is a laser beam surface treatment apparatus using a beam cross-sectional deformation and polygon mirror, characterized in that the short axis of the cross section is 0.4mm and the long axis is a slot cross-sectional shape of 5mm.
- 제 1 항에 있어서,The method of claim 1,상기 제2레이저빔(22) 내지 제4레이저빔(24)은 상기 가공대상물(100)의 종류 및 가공 형태에 따라 단면의 장축 및 단축의 길이가 조절되는 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.The second laser beam 22 to the fourth laser beam 24 is a beam cross-sectional deformation and polygon mirror, characterized in that the length of the long axis and short axis of the cross section is adjusted according to the type and processing form of the object to be processed 100 Laser surface treatment apparatus using.
- 제 1 항에 있어서,The method of claim 1,상기 각 표면처리키트(300)의 레이저발생수단(20a,20b,20c,20d)은 동일평면상에 설치된 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리장치.Laser surface treatment apparatus using beam mirror deformation and polygon mirror, characterized in that the laser generating means (20a, 20b, 20c, 20d) of each surface treatment kit 300 is installed on the same plane.
- 가공대상물(100)을 이송수단(10)에 거치하는 제1단계(S100);First step (S100) for mounting the object 100 to the processing means 10;폴리곤미러(50)의 회전속도와, 상기 회전속도와 연동되는 상기 가공대상물(100)의 이송속도, 및 레이저발생수단(20a,20b,20c,20d)의 출력을 포함하는 제어변수를 설정하는 제2단계(S200);Setting a control variable including a rotational speed of the polygon mirror 50, a conveying speed of the workpiece 100 linked with the rotational speed, and an output of the laser generating means 20a, 20b, 20c, and 20d. Step 2 (S200);상기 폴리곤미러(50) 및 상기 가공대상물(100)을 설정된 속도로 구동시켜 주는 제3단계(S300);A third step (S300) of driving the polygon mirror 50 and the workpiece 100 at a set speed;표면처리키트(300)의 상기 레이저발생수단(20a,20b,20c,20d)으로부터 소정의 구경을 갖는 제1레이지빔(21)을 생성하는 제4단계(S400);A fourth step (S400) of generating a first laser beam 21 having a predetermined aperture from the laser generating means (20a, 20b, 20c, 20d) of the surface treatment kit (300);적어도 2개의 쉐이핑수단(30,40)을 이용하여 상기 제1레이저빔(21)의 단면 형태를 조절하여 제3레이저빔(23)을 얻는 제5단계(S500);A fifth step S500 of obtaining a third laser beam 23 by adjusting the cross-sectional shape of the first laser beam 21 using at least two shaping means 30 and 40;상기 제3레이저빔(23)을 상기 폴리곤미러(50)의 반사면(51a)에 조사하는 제6단계(S600); A sixth step (S600) of irradiating the third laser beam (23) onto the reflecting surface (51a) of the polygon mirror (50);상기 반사면(51a)에서 분할되어 얻어진 제4레이저빔(24)을 집광하여 상기 가공대상물(100)에 조사하는 제7단계(S700);를 포함하여 이루어진 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리방법.And a seventh step (S700) of condensing the fourth laser beam 24 obtained by dividing the reflective surface 51a and irradiating the object 100 to the workpiece 100. Laser surface treatment method using.
- 제 10 항에 있어서, The method of claim 10,상기 폴리곤미러(50)는 상기 가공대상물(100)의 회전속도와 연동하여 1000~2000rpm의 회전속도로 회전하고, 상기 가공대상물(100)은 80~200m/min의 속도로 이송되는 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리방법.The polygon mirror 50 is rotated at a rotational speed of 1000 ~ 2000rpm in conjunction with the rotational speed of the workpiece 100, the workpiece 100 is characterized in that it is transferred at a speed of 80 ~ 200m / min Laser surface treatment method using beam section deformation and polygon mirror.
- 제 10 항에 있어서,The method of claim 10,상기 제3레이저빔(23)은 그 단면이 타원형상으로 이루어지고, 상기 폴리곤미러(50)의 반사면(51a)을 벗어나지 않으며, 상기 반사면(51a)과 인접한 반사면(51b)과 걸쳐지지 않도록 변형된 단면을 갖는 것을 특징으로 하는 빔단면 변형과 폴리곤미러를 이용한 레이저 표면처리방법.The third laser beam 23 has an elliptical cross section and does not deviate from the reflection surface 51a of the polygon mirror 50 and is supported by the reflection surface 51b adjacent to the reflection surface 51a. Laser surface treatment method using a polygonal mirror and beam cross-sectional deformation, characterized in that it has a cross-section modified so as not to.
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KR0137215B1 (en) * | 1988-06-01 | 1998-07-01 | 마쯔모도 가쯔슈 | Laser processing method and apparatus thereof |
KR19990066180A (en) * | 1998-01-22 | 1999-08-16 | 카를로스 엠. 헤르난데즈 | Metal scale removal using laser with ultra short pulse width and high average power |
JP2002067375A (en) * | 2000-08-24 | 2002-03-05 | Ricoh Co Ltd | Optical write device and method |
KR20060012398A (en) * | 2004-08-03 | 2006-02-08 | 주식회사 이오테크닉스 | Laser processing apparatus using polygon mirror with error correction function |
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US4500771A (en) * | 1982-10-20 | 1985-02-19 | Westinghouse Electric Corp. | Apparatus and process for laser treating sheet material |
JP4475733B2 (en) * | 2000-04-12 | 2010-06-09 | Hoya株式会社 | Scanning optical device |
CN101013200A (en) * | 2007-02-12 | 2007-08-08 | 苏州德龙激光有限公司 | Laser precision finishing optical system |
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KR0137215B1 (en) * | 1988-06-01 | 1998-07-01 | 마쯔모도 가쯔슈 | Laser processing method and apparatus thereof |
KR19990066180A (en) * | 1998-01-22 | 1999-08-16 | 카를로스 엠. 헤르난데즈 | Metal scale removal using laser with ultra short pulse width and high average power |
JP2002067375A (en) * | 2000-08-24 | 2002-03-05 | Ricoh Co Ltd | Optical write device and method |
KR20060012398A (en) * | 2004-08-03 | 2006-02-08 | 주식회사 이오테크닉스 | Laser processing apparatus using polygon mirror with error correction function |
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