WO2009145133A1

WO2009145133A1 - Resistor

Info

Publication number: WO2009145133A1
Application number: PCT/JP2009/059508
Authority: WO
Inventors: 哲也高崎; 孝之山辺
Original assignee: コーア株式会社
Priority date: 2008-05-27
Filing date: 2009-05-25
Publication date: 2009-12-03
Also published as: JP2009289770A; JP5256544B2; DE112009001287T5

Abstract

Provided is a current detecting resistor, which has a compact size and excellent heat dissipating characteristics and can perform highly accurate and stable operation. The resistor is provided with: a resistor body (12a) composed of a metal foil; a pair of electrodes (11a) bonded on one surface of the resistor body; a base plate (14a), which is bonded on the other surface of the resistor body with an insulating layer (13) therebetween, covers a region between the pair of electrodes in the resistor body and also at least a part of a region where the electrodes are arranged; a first protection film (15) which covers the resistor body in the region between the pair of electrodes; and a second protection film (16) which covers the base plate. Furthermore, the resistor body (12a) in the region between the electrodes is provided with a slit (S) in the width direction, and a small-width meandering current path is formed by the slit, at the vicinity of the both electrodes (11a), with a large width at the center portion between the elctrodes.

Description

Resistor

The present invention relates to a current detection resistor used by being inserted into a circuit for current measurement, and in particular, a surface mount type using a resistance alloy foil (metal foil) as a resistor and having a low resistance value of about 10-500 mΩ. This relates to a metal foil resistor.

Conventionally, a metal plate resistor having a low resistance value is used to detect the value of a current flowing in a circuit. For example, such a metal plate resistor is formed by cladding (rolling and rolling) flat electrodes made of a highly conductive metal such as Cu on both ends of one surface of a flat resistor made of a resistance alloy such as a CuNi-based alloy. A material joined by, for example, pressure welding by heat treatment) is known (for example, JP-A-2002-57009).

Further, a metal foil resistor used as a resistor by bonding a resistance alloy foil (metal foil) such as an NiCr-based alloy on an insulating substrate such as alumina has been known for a long time (for example, JP-A-2002-151304). Issue gazette).

However, in these resistors, when the current to be detected increases, heat is generated in a central portion of the resistor, and the resistor temperature rises. For this reason, there is a problem that if the current capacity is increased, the size must be increased.

The present invention has been made on the basis of the above-described circumstances, and provides a current detecting resistor having a good heat dissipation, a highly accurate and stable operation, and a manufacturing method thereof, in a small and compact size. The purpose is to provide.

The resistor of the present invention includes a resistor made of a metal foil, a pair of electrodes bonded to one surface of the resistor, and the other surface of the resistor bonded via an insulating layer. A base plate that covers the inter-electrode region and covers at least a part of the region where the electrodes are disposed, a first protective film that covers the resistor in the pair of inter-electrode regions, and a second plate that covers the base plate And a protective film. The resistor in the pair of inter-electrode regions includes a slit in the width direction, and the slit forms a narrow current path of the meandering path, and the narrow current path is disposed in the vicinity of both electrodes, The central part between the two electrodes is a wide current path.

The method for manufacturing a resistor of the present invention includes preparing a bonding material obtained by bonding a resistor material made of a metal foil and an electrode material, patterning the bonding material, processing the bonding material into a predetermined shape, Applying an insulating adhesive to the base plate material, which is a thicker plate material, fixing the resistor material side surface of the patterned bonding material, patterning the base plate material to form a base plate of a predetermined shape, By patterning and etching the electrode material, a pair of electrodes having a predetermined shape is formed, and the surface of the resistor material is exposed in the pair of inter-electrode regions to cover the resistor in the pair of inter-electrode regions. A first protective film is formed, and a second protective film that covers the base plate is formed.

According to the resistor of the present invention, since the base plate is joined to the resistor made of metal foil via the insulating layer, it has a small and compact size, good heat dissipation, high accuracy and stability. Is possible. In particular, the resistor in the region between the pair of electrodes has a slit in the width direction arranged in the vicinity of both electrodes, so that the heat generation center can be distributed on both sides of the resistor, and the base plate and the atmosphere on the mounting substrate side can be dispersed. The heat can be efficiently radiated to the side and the temperature rise of the resistor can be reduced.

In addition, according to the method for manufacturing a resistor of the present invention, a large number of the resistors can be collectively produced from a bonding material sheet obtained by bonding a resistor material made of one metal foil and an electrode material. Efficient production is possible. In addition, by using a bonding material in which a resistor material and an electrode material are bonded by cladding, an excellent bonding state between the resistor and the electrode can be obtained, and an epoxy system having high thermal conductivity and high withstand voltage. By fixing the resistor material to the base plate using an adhesive, good heat dissipation and insulation can be obtained, and a highly reliable resistor can be obtained with a compact and compact structure.

FIG. 1A is a plan view showing the inside of a resistor according to an embodiment of the present invention. FIG. 1B is a top view of the resistor of one embodiment of the present invention. FIG. 1C is a bottom view of the resistor of one embodiment of the present invention. FIG. 1D is a diagram illustrating a resistor according to an embodiment of the present invention, and is a cross-sectional view taken along the line dd of FIG. 1A. FIG. 1E is a side view of a resistor of one embodiment of the present invention. FIG. 2A is a perspective view showing a bonding material, showing the first half of the manufacturing process of the resistor according to one embodiment of the present invention. FIG. 2B is a diagram illustrating the first half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view at a stage where the bonding material is subjected to patterning. FIG. 2C is a diagram illustrating the first half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a side view of a stage where the base plate material is joined to the resistor material using an insulating adhesive. FIG. 2D is a diagram illustrating the first half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view on the electrode material side at that time. FIG. 2E is a diagram showing the first half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a side view of the stage where the base plate is formed. FIG. 2F is a diagram showing the first half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view on the base plate side. FIG. 3A is a diagram illustrating the latter half of the manufacturing process of the resistor according to the embodiment of the present invention, in which the electrode is formed by patterning the electrode material, and the first protective film is formed at the line aa in FIG. 3C. FIG. FIG. 3B is a diagram illustrating the latter half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view of the electrode / resistor side at a stage where an electrode is formed by patterning an electrode material. FIG. 3C is a diagram illustrating the second half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view of the electrode / resistor side at the stage where the first protective film is formed. FIG. 3D is a diagram illustrating the latter half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a cross-sectional view taken along the line dd of FIG. 3E at the stage of forming and cutting the second protective film. FIG. 3E is a diagram illustrating the latter half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view of the base plate side at that stage. FIG. 3F is a diagram illustrating the second half of the manufacturing process of the resistor according to the embodiment of the present invention, and is a plan view on the electrode / resistor side.

Hereinafter, an embodiment of a resistor and a manufacturing method thereof according to the present invention will be described with reference to the accompanying drawings. In addition, in each figure, the same code | symbol is attached | subjected and demonstrated to the same or equivalent member or element.

1A to 1E are diagrams showing a resistor according to an embodiment of the present invention. As shown in FIGS. 1A and 1D, the resistor includes a resistor 12a made of a metal foil, and a resistor 12a. Similarly, a pair of

electrodes

11a and 11a made of metal foil joined to both ends of the lower surface are provided. The resistor 12a is a very thin NiCr alloy foil having a thickness of about 0.1 mm or less. The pair of

electrodes

11a and 11a is also an extremely thin Cu foil having a thickness of about 0.1 mm or less, a solder or Sn plating layer is provided on the surface, and the lower surfaces of the

electrodes

11a and 11a are mounted on the mounting substrate by surface mounting. It is fixed by soldering.

The resistor 12a in the region between the pair of

electrodes

11a, 11a includes a slit S in the width direction, and the slit S forms a narrow current path of a meandering path, and the narrow current path becomes the both electrodes 11a, It is arranged in the vicinity of 11a, and the central portion of the region between both

electrodes

11a, 11a forms a wide current path. As an example, in the case shown in the figure, the distance L1 between the electrode region and the first slit is 0.4 mm with respect to the effective part total length (L0) of 4.8 mm, and the first slit and the second slit The distance L2 from the slit is 1 mm, and the length of the wide current path (L3) without the slit at the center of the resistor is 2 mm. In addition, as a whole, the resistor 12a has a narrower effective region full length (L0) than the width of the region where the

electrodes

11a and 11a are arranged in the resistor. With this configuration, the resistor is prevented from being exposed from the side surface of the resistor when it is cut into individual resistors by dicing described later.

A base plate 14a is fixed to the upper surface of the resistor 12a through an insulating layer 13 by adhesion. The insulating layer 13 is a layer formed by curing an epoxy adhesive having a high thermal conductivity of about 80 μm and a high withstand voltage, and is made of a relatively thick Cu plate having a thickness of about 0.2 mm. The base plate 14a is bonded and fixed to the upper surface of the resistor 12a. And the 1st protective film 15 which consists of a resin material which coat | covers the exposed surface of the resistor 12a of the area | region between a pair of

electrodes

11a and 11a, and the 2nd protective film 16 which consists of the resin material which coat | covers the base board 14a. I have.

As shown in FIG. 1B, the upper surface of the resistor is covered with a protective film 16 made of an insulating resin material, and the base plate 14a is completely covered. As a result, the solder material does not adhere to the base plate 14a during mounting, and a short circuit or the like can be prevented. As shown in FIG. 1C, the bottom and side surfaces of the resistor are covered with a protective film 15 made of an insulating resin material except for the pair of

electrodes

11a and 11a, and the resistor 12a in the region between the pair of

electrodes

11a and 11a. Is completely covered. Thereby, even if the solder material extends to the region between the

electrodes

11a and 11a of the resistor at the time of mounting, it can be prevented from contacting the resistor 12a.

Here, since the resistor 12a made of metal foil is extremely thin and cannot hold the shape itself, the base plate 14a having a certain thickness, that is, rigidity, serves as a support base for holding the shape of the resistor 12a. Playing a role. The base plate 14a and the insulating layer 13 serve as a heat radiator (heat sink). From the role of the support base and the heat radiating body, the thickness of the base plate 14a is preferably thicker than the thickness of the material of the resistor 12a. Cu has a thermal expansion coefficient close to that of a resistance alloy material such as NiCr as a resistor and has good thermal conductivity, and is suitable for use as the base plate 14a. However, a metal plate such as Al, or an insulator such as alumina. May be used. The base plate 14a covers the effective total length (L0) of the resistor, that is, the region between the

electrodes

11a and 11a, and further covers the electrode arrangement region. For this reason, heat generated by the resistor can be absorbed, and the heat can be efficiently radiated to the circuit pattern side. The width of the base plate 14a is preferably the same as or wider than the width of the resistor portion full length (L0), and the base plate and the resistor (especially the effective portion full length (L0) of the resistor) As shown in FIG. 1A, the overlap in the width direction with the portion) is covered with the base plate 14a so as to reach the side in the width direction of the resistor in the plan view, or at least in the width direction side of the resistor. It is desirable that the side and the side of the base plate 14a coincide.

The slit S provided in the resistor 12a is disposed in the vicinity of the

electrodes

11a and 11a, and the base plate 14a covers the resistor 12a provided with the slit S and partially covers the

electrodes

11a and 11a. By the way, when the narrow current path of the meandering path is formed by the slit S, the current density is increased in the narrow current path, and the heat generation amount is maximized. For this reason, in the resistor of this embodiment, the normal resistor has the maximum amount of heat generation at the central portion of the resistor, whereas the maximum amount of heat generation is at two locations near the

electrodes

11a and 11a on both sides of the resistor 12a. Is distributed.

For this reason, the heat generated by being dispersed at two locations of the resistor 12a is transmitted to both the

electrodes

11a and 11a disposed in the vicinity via the insulating layer 13 having good thermal conductivity and the base plate 14a made of a Cu plate. It can be heated and further flowed out to the mounting substrate side. Similarly, the heat absorbed by the base plate 14a from the two heat generation centers is diffused to the central portion side and both electrode sides of the base plate 14a, and the atmosphere from the upper portion of the resistor 12a and the upper portion of both electrode portions with less heat generation. Heat can be dissipated to the side. That is, in the resistor structure shown in FIGS. 1A to 1E, the slits S for forming the meandering path of the resistor 12a are distributed in the vicinity of both the

electrodes

11a and 11a, and the base plate 14a is arranged above the slits S. Thus, the heat generated from the two locations of the resistor 12a is absorbed by the base plate 14a, and the absorbed heat is diffused inside the base plate 14a and can be efficiently radiated to the mounting substrate side and the atmosphere side.

Next, a method for manufacturing the resistor will be described with reference to FIGS. 2A to 2F and FIGS. 3A to 3F. First, as shown in FIG. 2A, a sheet of bonding material is prepared by cladding the electrode material 11 made of metal foil and the resistor material 12 by cladding. Here, the electrode material 11 is a very thin Cu foil having a thickness of about 0.1 mm or less, and the resistor material 12 is a very thin NiCr-based alloy foil having a thickness of about 0.1 mm or less. For example, a sheet having a size of about 500 mm × 200 mm is used. In addition, both the electrode material and the resistor material of the bonding material can be arbitrarily adjusted within the range of several tens μm to several hundred μm. Then, the

bonding materials

11 and 12 are patterned into a predetermined shape by etching, pressing, or electrical discharge as shown in FIG. 2B. That is, the portion indicated by the symbol X is a through hole removed by processing, the portion indicated by the symbol Y is a portion that becomes an electrode, and the portion indicated by a symbol Z is a portion that becomes a resistor. By providing the slit S corresponding to the resistance value in the through hole X at this stage, it is possible to manufacture a large number of resistor bodies in one sheet.

Next, as shown in FIGS. 2C and 2D, the surface of the

bonding material

11, 12 on the side of the resistor material 12 is coated with an insulating adhesive and patterned on the base plate material 14, which is a plate material thicker than the metal foil. The insulating layer 13 is formed by fixing the adhesive and heating and curing the adhesive by a vacuum hot press method or the like. Therefore, in this state, the insulating layer 13 is exposed on the surface of the electrode material 11 through the through hole X. The insulating layer 13 is a layer formed using an epoxy adhesive containing a large amount of alumina powder, and has a high thermal conductivity of about 2 to 8 ° C./W and a high withstand voltage of about 5 to 7 kV / mm. Have As the base plate material, a Cu plate having a thermal expansion coefficient close to that of a resistive alloy material such as NiCr and having good thermal conductivity is used, but an aluminum plate or an insulator having good thermal conductivity is used. It is also possible.

Next, as shown in FIGS. 2E and 2F, the base plate material 14 is patterned by photolithography and etched to form a base plate 14a having a predetermined shape. 2E and 2F show the base plate material side as an upper surface, with the top and bottom reversed from FIGS. 2C and 2D. The base plate 14a is disposed so as to cover a portion where the resistor 12a is formed.

Next, as shown in FIGS. 3A to 3C, the electrode material 11 is patterned by photolithography and etched to form a pair of

electrodes

11a and 11a having a predetermined shape, and the pair of

electrodes

11a and 11a. The surface of the resistor material 12 is exposed in the intermediate region to form the resistor 12a. Then, if necessary, the resistance value is finely adjusted by polishing or the like, and adjusted to an accuracy of, for example, ± 1%. Further, a first protective film 15 made of an epoxy resin or the like that covers the resistor 12a in the region between the pair of

electrodes

11a and 11a is formed by screen printing or the like.

Next, as shown in FIGS. 3D to 3F, a second protective film 16 made of epoxy resin or the like covering the base plate 14a is formed on the entire surface of the resistor by screen printing or the like. Each resistor is obtained by dicing along the cutting line F. 3E is a view of the resistor as viewed from the upper surface side at the time of cutting, and FIG. 3F is a view of the resistor as viewed from the bottom surface side at the time of cutting. Thereafter, the electrode 11a is subjected to surface treatment of Ni plating and Sn plating, and the resistor of the present invention is completed through completion inspection and the like.

According to the above manufacturing process, by using a bonding material obtained by cladding a resistor material made of metal foil and an electrode material, stable bonding can be obtained between the resistor and the electrode, and the base plate is heated to a high temperature. High reliability and stability can be obtained by bonding with an adhesive having conductivity and high withstand voltage and covering with a protective film except for the electrodes.

In the above description of the manufacturing process, an example in which four products are manufactured from one sheet is illustrated. However, this is for convenience of description, and in actuality, several hundred or more products are 500 mm × It can be manufactured from a single bonding material sheet of about 200 mm. Therefore, according to the manufacturing method of the present invention, it is possible to efficiently mass-produce current detection resistors that are small and compact, have good heat dissipation, and can operate with high accuracy and stability. .

In the above embodiment, an example of using a NiCr alloy as the resistance alloy material has been described. However, other resistance alloy materials such as a CuNi alloy may be used as a matter of course.

Although one embodiment of the present invention has been described so far, it is needless to say that the present invention is not limited to the above-described embodiment, and may be implemented in various forms within the scope of the technical idea.

The present invention is applicable to a surface mount type metal foil resistor having a resistance value as low as about 10 to 500 mΩ using a resistance alloy foil (metal foil) as a resistor.

Claims

A resistor made of metal foil;
A pair of electrodes joined to one surface of the resistor;
A base plate that is bonded to the other surface of the resistor via an insulating layer, covers a pair of inter-electrode regions in the resistor, and covers at least a part of the region where the electrodes are disposed;
A first protective film covering a resistor in a region between a pair of electrodes;
A second protective film covering the base plate;
A resistor comprising:
The resistor in the region between the pair of electrodes includes a slit in the width direction, and the slit forms a narrow current path of the meandering path, and the narrow current path is disposed in the vicinity of both electrodes. 2. The resistor according to claim 1, wherein a central portion between them is a wide current path.
Prepare a bonding material that joins a resistor material made of metal foil and an electrode material,
Pattern the bonding material, process the bonding material into a predetermined shape,
Apply an insulating adhesive to the base plate material that is thicker than the metal foil, and fix the resistor material side surface of the patterned bonding material.
Pattern the base plate material to form a base plate with a predetermined shape,
By patterning and etching the electrode material, a pair of electrodes having a predetermined shape is formed, and the surface of the resistor material is exposed in the region between the pair of electrodes.
Forming a first protective film covering the resistor in the region between the pair of electrodes;
Forming a second protective film covering the base plate;
A method for manufacturing a resistor.
4. The method of manufacturing a resistor according to claim 3, wherein the bonding material is formed by bonding a resistor material and an electrode material by cladding.
4. The method of manufacturing a resistor according to claim 3, wherein the resistor material is fixed to the base plate material using an epoxy adhesive having high thermal conductivity and high withstand voltage.