WO2009139326A1 - 分光器 - Google Patents

分光器 Download PDF

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Publication number
WO2009139326A1
WO2009139326A1 PCT/JP2009/058669 JP2009058669W WO2009139326A1 WO 2009139326 A1 WO2009139326 A1 WO 2009139326A1 JP 2009058669 W JP2009058669 W JP 2009058669W WO 2009139326 A1 WO2009139326 A1 WO 2009139326A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
package
region
spectroscope
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/058669
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
柴山　勝己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to CN2009801089043A priority Critical patent/CN101970994A/zh
Priority to EP09746533.0A priority patent/EP2287578B1/en
Priority to US12/992,412 priority patent/US20110141469A1/en
Publication of WO2009139326A1 publication Critical patent/WO2009139326A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/024—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for illuminating a slit efficiently (e.g. entrance slit of a spectrometer or entrance face of fiber)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Definitions

  • the present invention relates to a spectroscope for spectrally detecting light.
  • Patent Document 1 discloses a spectroscope that splits light incident on a package with a spectroscopic unit and detects it with a photodetecting element, and a member in which a grating groove is formed on an inner wall surface of a cylindrical package is a spectroscopic unit. Is fixed.
  • an object of the present invention is to provide a spectrometer capable of suppressing positional deviation generated in the grating groove even when the package is distorted. To do.
  • a spectroscope is a spectroscope that splits light by a spectroscopic unit and detects the light by a photodetecting element, comprising a package that houses the photodetecting element, and an inner wall surface of the package Includes a first region formed by arranging a plurality of grating grooves of the spectroscopic portion along a predetermined direction, and a second region surrounding the first region, and the first region and the first region The second region is continuous and formed on the same curved surface.
  • the second region surrounding the first region in which the grating grooves of the spectroscopic portion are formed is continuous from the first region and is formed on the same curved surface. For this reason, the distortion generated in the package is dispersed by the second region around the first region. Therefore, even when the package is distorted, it is possible to suppress the positional deviation that occurs in the grating groove.
  • the package has a rectangular parallelepiped shape and has a concave portion including a curved inner wall surface, and the first region and the second region are curved inner wall surfaces of the concave portion. It is preferable to be formed.
  • the first region formed on the inner wall surface of the curved surface and the surrounding region are relatively thick. For this reason, even when an external force is applied to the package, the first region where the grating groove is formed is unlikely to be distorted.
  • the outer surface of the package is provided with a pair of grooves that are located on both sides of the spectroscopic unit in a predetermined direction and extend along a direction orthogonal to the predetermined direction. It is preferable.
  • sink marks generated during resin molding of the package are alleviated in a predetermined direction (grating groove arrangement direction) by the pair of grooves, and the positional deviation of the grating grooves in that direction is further suppressed. For this reason, it is possible to suppress a decrease in spectral characteristics.
  • the spectroscope further includes a light-transmitting substrate fitted into the package so as to face the spectroscopic unit, and the light detection element is mounted on the light-transmitting substrate. . In this case, it is possible to easily and accurately position the light detection element with respect to the spectroscopic unit.
  • the gap between the package and the light transmission substrate in a predetermined direction is narrower than the gap between the package and the light transmission substrate in a direction orthogonal to the predetermined direction. It is preferable.
  • the light transmission substrate is accurately positioned in a predetermined direction, and as a result, the light detection element mounted on the light transmission substrate is also accurately positioned in the predetermined direction. For this reason, it is possible to suppress a decrease in light detection characteristics.
  • the present invention it is possible to provide a spectroscope capable of suppressing the positional deviation generated in the grating groove even when the package is distorted.
  • FIG. 1 is a cross-sectional view of an embodiment of a spectrometer according to the present invention. As shown in FIG. 1, the spectroscope 1 detects the light L ⁇ b> 2 that is reflected by the spectroscopic unit 3 while the light L ⁇ b> 1 that enters the package 2 is detected by the light detection element 4.
  • the package 2 has a rectangular parallelepiped box 5 and a rectangular plate-like lid 6.
  • the box 5 and the lid 6 are made of a light-shielding or light-absorbing resin such as a liquid crystalline wholly aromatic polyester resin, polycarbonate, or black epoxy.
  • the box 5 is provided with a concave section 7 having a rectangular cross section with a flat bottom surface, and a concave section 8 with a rectangular cross section having a flat bottom surface on the bottom surface of the concave section 7. Further, a concave portion 9 having a rectangular cross section with a flat bottom surface is provided on the bottom surface of the concave portion 8, and a hemispherical concave portion 10 is provided on the bottom surface of the concave portion 9. A pair of grooves 11 are provided on the bottom surface of the box 5.
  • the hemispherical recess 10 may be spherical or aspherical.
  • the inner wall surface of the recess 10 includes a bottom region 12 (first region) and a region 13 (second region) surrounding the region 12.
  • the region 12 and the region 13 are continuous regions and exist on the same curved surface.
  • a plurality of grating grooves 14 are arranged in a predetermined direction in the region 12, and the spectroscopic unit 3 including the plurality of grating grooves 14 is provided at the bottom of the recess 10.
  • FIG. 2 is an enlarged cross-sectional view of the spectroscopic unit 3
  • FIG. 3 is a bottom view of the spectroscope 1.
  • the spectroscopic unit 3 includes a plurality of grating grooves 14 and a reflective film 15 provided so as to cover the grating grooves 14.
  • the reflective film 15 is provided by evaporating Al, Au, or the like on the region 12 where the grating grooves 14 are formed.
  • the spectroscopic unit 3 is a reflective grating configured by depositing the reflective film 15 in the plurality of grating grooves 14.
  • the type of the grating may be a sawtooth blazed grating, a rectangular binary grating, a sine wave holographic grating, or the like. It is also possible to adjust the optical NA by adjusting the size of the reflective film 15.
  • the reflective film 15 is provided in a region smaller than the region 12 in which the grating groove 14 is formed so that light that is not reflected but only reflected is not generated.
  • a passivation film such as SiO 2 or MgF 2 may be formed by vapor deposition or the like so as to cover the reflection film 15 of the reflection type grating. At this time, the passivation film only needs to cover the reflection film 15 and may be larger or smaller than the region 12 where the grating groove 14 is formed.
  • a light transmission substrate 16 is fitted in the recess 9 so as to face the spectroscopic unit 3.
  • the light transmissive substrate 16 is formed in a rectangular plate shape using BK7, Pyrex (registered trademark), light transmissive glass such as quartz, plastic, or the like, and transmits light L1 and L2.
  • a light absorption layer 16a having a light passage opening 16c through which the light L1, L2 passes is formed.
  • Materials for the light absorption layer 16a include black resist, colored resin (silicone, epoxy, acrylic, urethane, polyimide, composite resin, etc.) containing filler (carbon, oxide, etc.), metal such as Cr and Co, or oxidation Examples thereof include metals, laminated films thereof, porous ceramics, metals, and metal oxides. Wiring (not shown) is provided on the upper surface side or the lower side of the light absorption layer 16a.
  • FIG. 4 is a plan view of the box 5.
  • the light transmission substrate 16 and the box 5 have a gap b between the side surface of the recess 9 and the side surface of the light transmission substrate 16 in the arrangement direction of the grating grooves 14. It is comprised so that it may become narrow compared with the clearance gap a between the side surface of the recessed part 9 and the side surface of the light transmissive board
  • the light detection element 4 is mounted on the light transmission substrate 16.
  • the light detection element 4 is formed in a rectangular plate shape, and a light detection unit 21 is formed on the surface on the spectroscopic unit 3 side.
  • the photodetecting element 4 is attached to the light transmitting substrate 16 by face-down bonding with bumps 18. Further, the light detection element 4 is electrically connected to wiring provided on the light transmission substrate 16 via the bumps 18. It should be noted that bumps 18 are covered in a region between the light transmission substrate 16 and the light detection element 4 except for the optical paths of the light L1 and L2 in order to improve the connection strength between the light transmission substrate 16 and the light detection element 4.
  • the resin agent 20 is applied to the surface.
  • the light detection unit 21 is a CCD image sensor, a PD array, a CMOS image sensor, or the like, and a plurality of channels are arranged along the arrangement direction of the grating grooves 14.
  • the light detection unit 21 is a CCD image sensor
  • light intensity information at a position incident on a two-dimensionally arranged pixel is line binned to obtain light intensity information at a one-dimensional position.
  • the light intensity information at the one-dimensional position is read out in time series. That is, a line of pixels to be line binned becomes one channel.
  • the light detection unit 21 is a PD array or a CMOS image sensor
  • light intensity information at a position incident on a one-dimensionally arranged pixel is read in time series, so that one pixel becomes one channel.
  • the light detection unit 21 is a PD array or a CMOS image sensor and the pixels are two-dimensionally arranged, a line of pixels arranged in a one-dimensional arrangement direction parallel to the arrangement direction of the grating grooves 14 is one channel. It becomes.
  • the light detection unit 21 is a CCD image sensor, for example, the interval between channels in the arrangement direction is 12.5 ⁇ m, the total channel length (the length of the one-dimensional pixel row to be line binned) is 1 mm, The number 256 is used for the light detection element 4.
  • the light detection element 4 is formed with a light passage hole 22 which is arranged in parallel with the light detection unit 21 in the channel arrangement direction and through which the light L1 traveling to the spectroscopic unit 3 passes.
  • the light passage hole 22 is a slit (for example, a length of 0.5 to 1 mm and a width of 10 to 100 ⁇ m) extending in a direction substantially orthogonal to the channel arrangement direction, and is positioned with high accuracy with respect to the light detection unit 21. In this state, it is formed by etching or the like.
  • the base end portions of the plurality of leads 17 embedded in the box 5 are exposed.
  • the leading end of the lead 17 extends outside the box 5.
  • the base end portion of the lead 17 is wire-bonded to and electrically connected to the wiring of the light transmission substrate 16 by a wire 16b.
  • An electrical signal generated when the light detection unit 21 of the light detection element 4 receives the light L2 is transmitted through the bump 18 of the light detection element 4, the wiring of the light transmission substrate 16, the wire 16b, and the lead 17 to the spectroscope 1. Take out to the outside.
  • the lid 6 is fitted in the recess 7.
  • the lid 6 has a light incident hole 23 for allowing the light L1 to enter the inside of the package 2.
  • a light transmissive window member 24 is attached to the light incident hole 23.
  • the window member 24 is made of BK7, Pyrex (registered trademark), light-transmitting glass such as quartz, plastic, or the like.
  • the grooves 11 are located on both sides of the spectroscopic unit 3 in the direction in which the grating grooves 14 are arranged, and extend along a direction perpendicular to the direction in which the grating grooves 14 are arranged. ing.
  • the groove 11 is formed integrally when the box 5 is formed.
  • the light L1 passes through the light incident hole 23 of the lid 6, passes through the window member 24 and enters the package 1, and enters the light passing hole of the light detection element 4.
  • the light passes through the light transmission substrate 16 and reaches the spectroscopic unit 3.
  • the light L1 that has reached the spectroscopic unit 3 is split by the spectroscopic unit 3 and reflected toward the photodetection unit 21 of the photodetection element 4.
  • the light L2 that is split and reflected by the spectroscopic unit 3 passes through the light transmitting substrate 16 and is detected by the photodetecting unit 21 of the photodetecting element 4.
  • the box 5 is molded with the leads 17 embedded therein.
  • the reflective film 15 is provided by evaporating Al, Au, or the like in the region of the recess 10 of the box 5 where the grating groove 14 is formed.
  • the reflective film 15 is provided by evaporating, for example, Al or Au.
  • a light transmission substrate 16 having wiring on the upper surface and a light detection element 4 having a light passage hole 22 are prepared, and the light transmission substrate 16 and the bumps 18 of the light detection element 4 are used to generate light.
  • the detection element 4 and the light transmission substrate 16 are electrically connected.
  • a resin agent 20 is applied from the side so as to cover the bumps 18, and the light transmitting substrate 16 and the light detecting element 4 are bonded.
  • the light transmitting substrate 16 to which the light detection element 4 is attached is accommodated in the box 5 in which the spectroscopic unit 3 is formed as described above. Specifically, as shown in FIG. 1, the light transmitting substrate 16 having the light detection element 4 attached to the upper surface is fitted into the recess 9 of the box 5. At this time, a resin agent (not shown) is applied between the light transmissive substrate 16 and the box 5 to adhere the light transmissive substrate 16 to the box 5.
  • the wiring of the light transmitting substrate 16 and the base end portion of the lead 17 are electrically connected by the wire 16b.
  • the lid 6 is fitted into the concave portion 7 of the box 5 and joined in an airtight manner to obtain the spectrometer 1 in which the light detection element 4 is accommodated in the package 2.
  • the region 13 surrounding the region 12 where the plurality of grating grooves 14 of the spectroscopic unit 3 are formed is continuous from the region 12 where the grating grooves 14 are provided, and is the same. It is formed on the curved surface. For this reason, the distortion generated in the package 1 is dispersed by the region 13 around the region 12 where the grating grooves 14 are provided. Accordingly, even when, for example, thermal distortion occurs in the package 1, the positional deviation generated in the grating groove 14 is suppressed, so that the thermal dependence of the spectral characteristics can be suppressed.
  • the box 5 of the package 2 has a rectangular parallelepiped shape and a concave portion 10 whose bottom surface is a hemispherical curved surface.
  • the region 12 and the region 13 around the region 12 are , Formed on the bottom surface of the recess.
  • the region 12 formed on the bottom surface and the surrounding region 13 are relatively thick. For this reason, even when an external force is applied to the package 2, it is difficult for distortion to occur in the region 12 in which the grating groove 14 of the spectroscopic unit 3 is provided.
  • the bottom surface of the box 5 is located on both sides of the spectroscopic unit 3 in the arrangement direction of the grating grooves 14 and extends in a direction perpendicular to the arrangement direction of the grating grooves 14.
  • a pair of grooves 11 are provided. For this reason, for example, sink marks generated when resin molding the box 5 of the package 2 are alleviated in the arrangement direction of the grating grooves 14 by the pair of grooves, and the positional deviation of the grating grooves 14 is further suppressed in that direction.
  • the grating groove 14 is misaligned in the arrangement direction of the grating grooves 14, the wavelength of the light to be dispersed may be shifted.
  • the positional deviation of the grating grooves 14 with respect to the arrangement direction of the grating grooves 14, that is, the light spectral direction is suppressed, so that a decrease in spectral characteristics can be suppressed.
  • the spectroscope 1 has a light transmission substrate 16 fitted into the concave portion 9 of the box 5 so as to face the spectroscopy unit 3, and the light detection element 4 is mounted on the light transmission substrate 16. .
  • the light detection element 4 can be easily positioned with respect to the spectroscopic unit 3 with high accuracy.
  • the gap b between the side surface of the recess 9 in the arrangement direction of the grating grooves 14 and the side surface of the light transmission substrate 16 is different from the side surface of the recess 9 in the direction orthogonal to the arrangement direction of the grating grooves 14. It is narrower than the gap a between the side surfaces of the light transmission substrate 16. For this reason, when the light transmission substrate 16 is attached to the box 5, the light transmission substrate 16 is accurately positioned in the arrangement direction of the grating grooves 14. As a result, the light detection element 4 attached on the light transmission substrate 16. Also, the positioning is performed with high accuracy in the arrangement direction of the grating grooves 14.
  • the wavelength of the detected light may be shifted.
  • the spectroscope 1 since it is possible to accurately position the photodetecting element 4 in the arrangement direction of the grating grooves 14, it is possible to suppress a decrease in photodetection characteristics.
  • the gap between the side surface of the recess 9 and the side surface of the light transmission substrate 16 in the direction orthogonal to the arrangement direction of the grating grooves 14 is relatively wide.
  • the light transmission substrate 16 can be easily and accurately mounted in the concave portion 9 of the box 5.
  • the present invention is not limited to the embodiment described above.
  • the concave portion 10 of the box 5 shown in FIG. 1 is hemispherical, but not limited to this, as shown in FIG. 5, a side surface 25 that is a cylindrical (straight section) curved surface
  • the concave portion 10 may be composed of the cylindrical side surface 25 and the bottom surface 26 which is a hemispherical curved surface.
  • the region 12 where the grating groove 14 of the spectroscopic unit 3 is formed and the region 13 surrounding the region 12 are included in the bottom surface 26 of the recess 10.
  • the region 12 and the region 13 are continuous and are provided on the same curved surface.
  • the concave portion 10 can be narrowed with respect to a portion that does not become the optical path of the incident light L ⁇ b> 1 and the split light L ⁇ b> 2, so that the package 2 can be downsized.
  • the groove 11 provided on the bottom surface of the box 5 of the package 2 may be a cylindrical groove 27 surrounding the spectroscopic unit 3 as shown in FIG.
  • sink marks generated when the package 10 is resin-molded can be mitigated not only in the direction in which the grating grooves 14 are arranged, but also in the direction perpendicular to the direction in which the grating grooves 14 are arranged. For this reason, the positional shift of the grating grooves 14 in the direction orthogonal to the arrangement direction of the grating grooves 14 can be suppressed.
  • the present invention it is possible to provide a spectroscope capable of suppressing the positional deviation generated in the grating groove even when the package is distorted.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
PCT/JP2009/058669 2008-05-15 2009-05-08 分光器 Ceased WO2009139326A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2009801089043A CN101970994A (zh) 2008-05-15 2009-05-08 分光器
EP09746533.0A EP2287578B1 (en) 2008-05-15 2009-05-08 Spectrometer
US12/992,412 US20110141469A1 (en) 2008-05-15 2009-05-08 Spectrometer

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008-128687 2008-05-15
JP2008128687 2008-05-15
JP2008311003A JP5205239B2 (ja) 2008-05-15 2008-12-05 分光器
JP2008-311003 2008-12-05

Publications (1)

Publication Number Publication Date
WO2009139326A1 true WO2009139326A1 (ja) 2009-11-19

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Family Applications (1)

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PCT/JP2009/058669 Ceased WO2009139326A1 (ja) 2008-05-15 2009-05-08 分光器

Country Status (6)

Country Link
US (1) US20110141469A1 (enExample)
EP (1) EP2287578B1 (enExample)
JP (1) JP5205239B2 (enExample)
KR (1) KR101635649B1 (enExample)
CN (1) CN101970994A (enExample)
WO (1) WO2009139326A1 (enExample)

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US8564773B2 (en) 2008-05-15 2013-10-22 Hamamatsu Photonics K.K. Spectroscopy module
US8604412B2 (en) 2008-05-15 2013-12-10 Hamamatsu Photonics K.K. Spectral module and method for manufacturing spectral module
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EP2287578A4 (en) 2014-05-07
JP5205239B2 (ja) 2013-06-05
JP2009300414A (ja) 2009-12-24
EP2287578A1 (en) 2011-02-23
KR101635649B1 (ko) 2016-07-08
EP2287578B1 (en) 2016-09-21
US20110141469A1 (en) 2011-06-16
KR20110008004A (ko) 2011-01-25
CN101970994A (zh) 2011-02-09

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