WO2009122637A1 - 物理量検出回路、物理量センサ装置、物理量検出方法 - Google Patents

物理量検出回路、物理量センサ装置、物理量検出方法 Download PDF

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Publication number
WO2009122637A1
WO2009122637A1 PCT/JP2009/000305 JP2009000305W WO2009122637A1 WO 2009122637 A1 WO2009122637 A1 WO 2009122637A1 JP 2009000305 W JP2009000305 W JP 2009000305W WO 2009122637 A1 WO2009122637 A1 WO 2009122637A1
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WIPO (PCT)
Prior art keywords
physical quantity
circuit
clock
sampling
digital
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Ceased
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PCT/JP2009/000305
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English (en)
French (fr)
Japanese (ja)
Inventor
犬飼文人
室屋清一
貝野陽一
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Panasonic Corp
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Panasonic Corp
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Publication of WO2009122637A1 publication Critical patent/WO2009122637A1/ja
Priority to US12/618,055 priority Critical patent/US8069009B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Definitions

  • the present invention relates to a physical quantity detection circuit used in a physical quantity sensor for detecting a physical quantity given from the outside and a physical quantity sensor device including the physical quantity detection circuit, and more particularly to a technique for adjusting a phase relationship between a sensor signal and a detection signal.
  • a physical quantity sensor device uses a physical quantity sensor that outputs a sensor signal according to a physical quantity given from the outside and a physical quantity signal from the sensor signal using a detection signal (a signal having a frequency corresponding to the frequency of the sensor signal).
  • a physical quantity detection circuit for detecting (a signal corresponding to the physical quantity).
  • Patent Document 1 discloses a signal processing circuit of a biaxial angular velocity / acceleration sensor constituted by a digital circuit.
  • an analog / digital conversion circuit converts a sensor signal from a sensor into a digital sensor signal, while a sine wave signal generation circuit generates a digital sine wave signal, and a digital multiplication circuit generates a digital sensor signal and a digital sine signal. Multiply by wave signal.
  • the analog / digital conversion circuit samples the sensor signal in synchronization with the sampling clock (that is, every sampling period), and analog values (amplitude values) A0, A1, A1 of the sampled sensor signal. A2,... Are converted into digital values P0, P1, P2,.
  • Patent Document 2 includes a phase correction circuit including a temperature sensitive element (an element having a predetermined temperature characteristic), thereby correcting a phase shift of a detection signal caused by a temperature change.
  • Japanese Patent No. 2728300 JP-A-8-14916 Japanese Patent No. 2728300 JP-A-8-14916
  • an object of the present invention is to improve the accuracy of phase adjustment while suppressing an increase in sampling frequency.
  • the physical quantity detection circuit is a physical quantity detection circuit used in a physical quantity sensor that outputs a sensor signal in accordance with a physical quantity given from the outside, and is a phase of a sampling clock having a predetermined sampling frequency.
  • a sampling phase adjustment circuit for adjusting the frequency an analog / digital conversion circuit for converting the sensor signal into a digital sensor signal in synchronization with the sampling clock phase-adjusted by the sampling phase adjustment circuit, and the analog / digital conversion circuit.
  • a detection circuit for detecting the physical quantity based on the digital sensor signal.
  • the sampling point (the position of the transition edge of the sampling clock) can be moved by adjusting the phase of the sampling clock.
  • the phase of the digital sensor signal can be changed. Thereby, the accuracy of phase adjustment can be improved while suppressing an increase in sampling frequency.
  • the sampling phase adjustment circuit operates in synchronization with a multiplication clock having a frequency higher than the sampling frequency, and delays the sampling clock by a predetermined number of pulses of the multiplication clock.
  • the phase of the sampling clock can be set in units of the period of the multiplied clock. The higher the frequency of the multiplied clock, the more precisely the phase of the sampling clock can be set. Thereby, the phase of a digital sensor signal can be adjusted precisely.
  • the sampling phase adjustment circuit includes one of a shift register that generates a plurality of delay clocks by sequentially shifting the sampling clock in synchronization with the multiplied clock, and a plurality of delay clocks generated by the shift register. And a selector for selecting.
  • the analog / digital conversion circuit may perform analog / digital conversion in synchronization with a delay clock selected by the selector. With this configuration, the sampling clock can be delayed by a predetermined number of pulses of the multiplied clock.
  • the sampling phase adjustment circuit counts the number of generated pulses of the multiplied clock, and generates a timing signal when the number of generated pulses reaches a predetermined value, and a timing signal from the sampling phase adjustment counter. And a clock generation circuit that generates the sampling clock in response to the transition edge. With this configuration, the sampling clock can be delayed by a predetermined number of pulses of the multiplied clock.
  • a physical quantity detection method is a method for detecting a physical quantity based on a sensor signal from a physical quantity sensor that senses a physical quantity given from the outside, the phase of a sampling clock having a predetermined sampling frequency.
  • the sensor signal is converted into a digital sensor signal in synchronization with the phase-adjusted sampling clock, and the physical quantity is detected based on the digital sensor signal.
  • the sampling point can be moved by adjusting the phase of the sampling clock.
  • the phase of the digital sensor signal can be changed. Thereby, the accuracy of phase adjustment can be improved while suppressing an increase in sampling frequency.
  • the accuracy of phase adjustment can be improved while suppressing an increase in sampling frequency.
  • FIG. 1 is a diagram illustrating a configuration example of a physical quantity sensor device according to the first embodiment.
  • FIG. 2 is a diagram illustrating a configuration example of the physical quantity sensor and the drive circuit illustrated in FIG.
  • FIG. 3 is a timing chart for explaining processing by the sampling phase adjustment circuit shown in FIG. 4A is a diagram illustrating a configuration example of the detection signal generator illustrated in FIG. 1.
  • 4B is a diagram illustrating an example of a correspondence relationship between count values and sine wave data in the detection signal generator of FIG. 4A.
  • FIG. 5 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 6 is a diagram showing a modification of the physical quantity detection circuit shown in FIG. FIG.
  • FIG. 7 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 8 is a diagram illustrating a configuration example of the physical quantity sensor device according to the second embodiment.
  • FIG. 9 is a timing chart for explaining processing by the sampling phase adjustment circuit shown in FIG.
  • FIG. 10 is a diagram illustrating a configuration example of the physical quantity sensor device according to the third embodiment.
  • FIG. 11 is a diagram illustrating a configuration example of the phase adjustment circuit illustrated in FIG. 10.
  • 12A is a diagram illustrating a configuration example of the phase adjustment circuit illustrated in FIG.
  • FIG. 12B is a diagram for explaining the phase adjustment counter.
  • FIG. 13 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG. FIG.
  • FIG. 14A is a diagram illustrating a configuration example of the detection signal generator illustrated in FIG. 10.
  • FIG. 14B is a diagram illustrating an example of a correspondence relationship between count values and sine wave data in the detection signal generator of FIG. 14A.
  • FIG. 15 is a diagram showing a modification of the physical quantity detection circuit shown in FIG.
  • FIG. 16 is a diagram for explaining a modification of the physical quantity sensor.
  • FIG. 17 is a diagram for explaining processing in the analog / digital conversion circuit.
  • FIG. 1 shows a configuration example of a physical quantity sensor device according to Embodiment 1 of the present invention.
  • the physical quantity sensor device includes a physical quantity sensor 10, a drive circuit 11, and a physical quantity detection circuit 12.
  • the physical quantity sensor 10 is supplied with a drive signal Sdrv having a predetermined frequency from the drive circuit 11 and outputs a sensor signal S10 according to a physical quantity (for example, angular velocity, acceleration, etc.) given from the outside.
  • the frequency of the sensor signal S10 corresponds to the frequency of the drive signal Sdrv.
  • the center frequency (carrier frequency) of the sensor signal S10 corresponds to the frequency of the drive signal Sdrv.
  • the physical quantity sensor 10 is a tuning fork type angular velocity sensor.
  • the drive circuit 11 supplies a drive signal Sdrv to the physical quantity sensor 10.
  • the drive circuit 11 adjusts the frequency and amplitude of the drive signal Sdrv according to the vibration signal Sosc from the physical quantity sensor 10.
  • the physical quantity detection circuit 12 detects a physical quantity based on the sensor signal S10 from the physical quantity sensor 10.
  • the physical quantity sensor 10 includes a tuning fork body 10a, a drive piezoelectric element Pdrv, a vibration detection piezoelectric element Posc, and angular velocity detection piezoelectric elements PDa and PDb.
  • the tuning fork main body 10a has a pair of tuning fork pieces that are twisted at right angles at the center, a connecting part that connects each end of the tuning fork piece, and a support pin that is provided on the connecting part so as to be a rotating shaft.
  • the drive piezoelectric element Pdrv vibrates one tuning fork piece according to the frequency and amplitude of the drive signal Sdrv from the drive circuit 11.
  • the two tuning fork pieces resonate with each other. Due to the tuning fork vibration, electric charges are generated in the vibration detecting piezoelectric element Posc (that is, the vibration signal Sosc is generated). Further, when the rotational angular velocity is generated, charges corresponding to the rotational angular velocity (Coriolis force) are generated in the angular velocity detecting piezoelectric elements PDa and PDb (that is, the sensor signal S10 is generated).
  • the monitor amplifier 11a converts the vibration signal Sosc from the physical quantity sensor 10 into a voltage
  • the automatic gain control amplifier (AGC) 11b amplifies or attenuates the output of the monitor amplifier 11a.
  • the self amplification gain is changed so that the voltage supplied to 11c becomes a constant value.
  • the drive amplifier 11c controls the frequency and amplitude of the drive signal Sdrv according to the output of the automatic gain control amplifier 11b.
  • the maximum vibration amplitude and vibration frequency of the physical quantity sensor 10 are kept constant by adjusting the drive signal Sdrv according to the vibration signal Sosc.
  • the physical quantity detection circuit 12 includes a waveform shaping circuit 101, a multiplication circuit 102, a frequency divider circuit 102a, a sampling phase adjustment circuit 100, a frequency divider circuit 102b, an input amplifier 103, and an analog / digital signal.
  • a converter (A / D) 104, a decimation filter 105, a detection signal generator 106, a multiplier 107, and a digital filter 108 are included.
  • the waveform shaping circuit 101 converts the drive signal Sdrv into a square wave and outputs it as a reference clock CKref.
  • the waveform shaping circuit 101 includes a comparator and an inverter.
  • the frequency of the reference clock CKref is substantially the same as the frequency of the drive signal Sdrv (that is, the frequency of the sensor signal S10).
  • the multiplier circuit 102 multiplies the reference clock CKref from the waveform shaping circuit 101 to generate a multiplied clock CKx having a frequency higher than the frequency of the reference clock CKref.
  • the multiplier circuit 102 is configured by a PLL (Phase Locked Loop).
  • the frequency dividing circuit 102a divides the frequency-multiplied clock CKx from the frequency-multiplier circuit 102 and has an operation clock CKa (sampling clock) having the same frequency as a predetermined sampling frequency (sampling frequency required for the analog / digital converter 104). Is generated. That is, the multiplied clock CKx has a frequency higher than the sampling frequency.
  • the frequency dividing circuit 102b divides the operation clock CKa from the frequency dividing circuit 102a, and generates an operation clock CKb having a frequency lower than the frequency of the operation clock CKa.
  • the sampling phase adjustment circuit 100 includes a shift register 100R and a selector 100S.
  • the shift register 100R sequentially shifts the operation clock CKa from the frequency dividing circuit 102a in synchronization with the frequency-multiplied clock CKx from the frequency multiplier 102, thereby shifting the phase n by a predetermined amount (n is an integer of 2 or more).
  • the shift register 100R includes a plurality of cascaded flip-flops.
  • the selector 100S selects one of the delay clocks CC1, CC2,..., CCn according to the set value SET set by the external control, and selects the selected delay clock as the sampling clock CKsp (phase-adjusted).
  • the set value SET is a value for setting the delay time of the sampling phase adjustment circuit 100, and indicates the number of pulses of the multiplied clock CKx. For example, when the set value SET is set to “3”, the selector 100S selects the third delay clock CC3. Thereby, the delay time of the sampling phase adjustment circuit 100 is set to a time corresponding to three pulses of the multiplied clock CKx.
  • the reference clock CKref is multiplied (64 times) to generate the multiplied clock CKx
  • the multiplied clock CKx is divided (1/4) to generate the operation clock CKa
  • the operation clock CKa is generated.
  • the frequency is divided (1/2) to generate an operation clock CKb.
  • the sampling phase adjustment circuit 100 outputs one of a plurality of delay clocks (three delay clocks CC1, CC2, CC3 in FIG. 3) (delay clock CC3 in FIG. 3) as the sampling clock CKsp.
  • the input amplifier 103 converts the sensor signal S10 from the physical quantity sensor 10 into a voltage and outputs it as an analog sensor signal Ssnc.
  • the analog / digital converter 104 samples the analog sensor signal Ssnc in synchronization with the sampling clock CKsp from the sampling phase adjustment circuit 100, and converts the sampled analog value (amplitude value) into a digital value. Thereby, the analog sensor signal Ssnc is converted into a digital sensor signal Dsnc constituted by a plurality of digital values.
  • the decimation filter 105 operates in synchronization with the operation clock CKa from the frequency dividing circuit 102a, and performs decimation processing (conversion of sampling frequency, thinning of digital values, etc.) on the digital sensor signal Dsnc obtained by the analog / digital converter 104. As a result, the digital sensor signal Dsnc corresponding to the sampling clock CKsp (operation clock CKa) is converted into the digital sensor signal Ddc corresponding to the operation clock CKb.
  • the detection signal generator 106 operates in synchronization with the operation clock CKb from the frequency dividing circuit 102b, and converts it into a sine wave signal in response to a transition edge (here, a rising edge) of the reference clock CKref from the waveform shaping circuit 101.
  • a corresponding digital detection signal Ddet is generated.
  • the digital detection signal Ddet is composed of a plurality of sine wave data.
  • Each of the plurality of sine wave data is a plurality of analog values (amplitude values) obtained by sampling a sine wave signal (for example, drive signal Sdrv) having a predetermined frequency in synchronization with a predetermined clock (for example, operation clock CKa). (See FIG. 4B).
  • the plurality of sine wave data indicate ideal amplitude values expressed by a sine function.
  • the multiplier 107 multiplies the digital sensor signal Ddc from the decimation filter 105 by the digital detection signal Ddet generated by the detection signal generator 106. Thereby, a physical quantity signal (a signal corresponding to the physical quantity detected by the physical quantity sensor 10) is detected.
  • the digital filter 108 operates in synchronization with the operation clock CKb, and passes only the low frequency component of the physical quantity signal detected by the multiplier 107 for noise removal or the like as the digital detection signal Dphy.
  • the detection signal generator 106 includes a ring counter 111, a data storage unit 112, and a data reading unit 113.
  • the ring counter 111 and the data reading unit 113 operate in synchronization with the operation clock CKb.
  • the ring counter 111 starts incrementing the count value CNT in response to the transition edge of the reference clock CKref, and resets the count value CNT to “0” when the count value CNT reaches a predetermined maximum value.
  • the data storage unit 112 stores a plurality of sine wave data DATA that is a source of the digital detection signal Ddet.
  • the data reading unit 113 reads out and outputs the sine wave data DATA corresponding to the count value CNT of the ring counter 111 based on the correspondence relationship (FIG. 4B) between the preset count value CNT and the sine wave data DATA. In this manner, the digital detection signal Ddet corresponding to the sine wave signal is generated by sequentially outputting the sine wave data D0, D1, D2,..., D15.
  • the transition edge of the operation clock CKa (sampling clock before phase adjustment) has desired sampling points SP0, SP1, SP2,... Of the analog sensor signal Ssnc (for example, sine wave data D0, D1, D2,... Does not match the point).
  • the selector 100S selects the third delay clock CC3 as the sampling clock CKsp.
  • the analog / digital converter 104 converts the analog sensor signal Ssnc into digital values P0, P1, P2, P3, P4... In synchronization with the sampling clock CKsp.
  • the decimation filter 105 thins out the digital values P1, P3,... From the digital sensor signal Dsnc and outputs the result as a digital sensor signal Sdc.
  • the detection signal generator 106 starts outputting sine wave data D0, D2,... Synchronized with the operation clock CKb in response to the transition edge of the reference clock CKref.
  • the multiplier 107 multiplies the digital values P0, P2,... From the decimation filter 105 by the sine wave data D0, D2,.
  • the sampling point position of the transition edge of the sampling clock CKsp
  • the phase of the digital sensor signal Dsnc can be changed.
  • the accuracy of phase adjustment of the digital sensor signal Dsnc can be improved without increasing the sampling frequency.
  • the position of the transition edge of the sampling clock CKsp can be matched (or brought close to) the desired sampling points SP0, SP1, SP2,..., The analog / digital conversion accuracy can be improved.
  • the phase of the sampling clock CKsp can be set with the period of the multiplied clock CKx as a unit. The higher the frequency of the multiplied clock CKx, the more precisely the phase of the sampling clock CKsp can be set. Thereby, the phase of the digital sensor signal Dsnc can be adjusted more precisely than in the past.
  • the frequency dividing circuit 102b may divide the sampling clock CKsp from the sampling phase adjusting circuit 100 to generate the operation clock CKb.
  • the detection signal generator 106 and the digital filter 108 may operate in synchronization with the sampling clock CKsp supplied to the analog / digital converter 104.
  • the physical quantity detection circuit 12a illustrated in FIG. 6 does not include the frequency dividing circuit 102b and the decimation filter 105 illustrated in FIG. 7, the detection signal generator 106 starts outputting sine wave data D0, D1, D2,... Synchronized with the sampling clock CKsp in response to the transition of the reference clock CKref.
  • the multiplier 107 multiplies the digital values P0, P1, P2,... Obtained by the analog / digital converter 104 by the sine wave data D0, D1, D2,. .
  • the sampling clock CKsp is used as an operation clock of the physical quantity detection circuit 12a, the same effect as in FIG. 1 can be obtained.
  • FIG. 8 shows a configuration example of a physical quantity sensor device according to Embodiment 2 of the present invention.
  • This physical quantity sensor device includes a physical quantity detection circuit 22 instead of the physical quantity detection circuit 12 shown in FIG.
  • the physical quantity detection circuit 22 includes a sampling phase adjustment circuit 200 instead of the sampling phase adjustment circuit 100 shown in FIG.
  • Other configurations are the same as those in FIG.
  • the sampling phase adjustment circuit 200 includes a sampling phase adjustment counter 201 and a frequency dividing circuit 202 (clock generation circuit).
  • the sampling phase adjustment counter 201 starts counting the number of generated pulses of the multiplied clock CKx in response to the transition edge of the reference clock CKref, and outputs the timing signal STR when the generated pulse number reaches a predetermined value SET set by external control. Generate.
  • the frequency dividing circuit 202 starts frequency dividing processing in response to the transition edge of the timing signal STR from the sampling phase adjustment counter 201 (for example, the output of the frequency dividing circuit 202 is reset to the initial state). Then, the frequency dividing circuit 202 divides the multiplied clock CKx to generate a sampling clock CKsp having a predetermined sampling frequency.
  • the frequency dividing circuit 202 is configured by a 2-bit counter, and corresponds to MSB (Most Significant Bit) among outputs of the 2-bit counter. Assume that the output is supplied as a sampling clock CKsp.
  • the sampling phase adjustment counter 201 starts counting the number of generated pulses of the multiplied clock CKx in response to the transition edge of the reference clock CKref.
  • the sampling phase adjustment counter 201 outputs the timing signal STR when the count value reaches “3”.
  • the frequency dividing circuit 202 starts counting from a preset initial value (here, 2), and the count value is the maximum value (here, When 3) is reached, the count value is reset to “0”.
  • the MSB output of the frequency dividing circuit 202 is “1” when the count value of the frequency dividing circuit 202 is 2 or 3, and “0” when the count value of the frequency dividing circuit 202 is 0 or 1. become.
  • the phase of the sampling clock CKsp can be set with the period of the multiplied clock CKx as a unit. Further, the higher the frequency of the multiplied clock CKx, the more precisely the phase of the sampling clock CKsp can be set. Thereby, the phase of the digital sensor signal Dsnc can be adjusted more precisely than in the past.
  • the frequency dividing circuit 202 may be replaced with a multiplication circuit that starts the multiplication process in response to the timing signal STR from the sampling phase adjustment counter 201.
  • Such a multiplier circuit multiplies a clock with a predetermined frequency to generate a sampling clock CKsp.
  • FIG. 10 shows a configuration example of a physical quantity sensor device according to Embodiment 3 of the present invention.
  • This physical quantity sensor device includes a physical quantity detection circuit 32 instead of the physical quantity detection circuit 12 shown in FIG.
  • the physical quantity detection circuit 32 includes a phase adjustment circuit 300 that adjusts the phase of the digital sensor signal Dsnc and a phase adjustment circuit 400 that adjusts the phase of the digital detection signal Ddet.
  • Other configurations are the same as those in FIG.
  • the phase adjustment circuit 300 includes a shift register 300R and a selector 300S.
  • the shift register 300R sequentially shifts the digital sensor signal Dsnc in synchronization with the operation clock CKa from the frequency dividing circuit 102a, whereby i (i is an integer of 2 or more) delay signals D1 whose phases are shifted by a predetermined amount. , D2,..., Di are generated.
  • the shift register 300R includes a plurality of cascaded flip-flops.
  • the selector 300S selects one of the delay signals D1, D2,..., Di according to the set value SET1 set by external control, and outputs the selected delay signal as the delayed digital sensor signal DDsnc.
  • the set value SET1 is a value for setting the delay time of the phase adjustment circuit 300, and indicates the number of pulses of the operation clock CKa.
  • the phase adjustment circuit 400 includes a shift register 400R and a selector 400S.
  • the shift register 400R sequentially shifts the reference clock CKref in synchronization with the operation clock CKb from the frequency dividing circuit 102b, so that j phases (j is an integer of 2 or more) delayed clocks CK1, whose phases are shifted by a predetermined amount. CK2,..., CKj are generated.
  • the shift register 400R includes a plurality of cascaded flip-flops.
  • the selector 400S selects any one of the delay clocks CK1, CK2,..., CKj according to the set value SET2 set by the external control, and outputs the selected delay clock as the selected clock SSS.
  • the set value SET2 is a value for setting the delay time of the phase adjustment circuit 400, and indicates the number of pulses of the operation clock CKb.
  • the phase adjustment circuit 400 shown in FIG. 10 may be replaced with the phase adjustment counter 401 shown in FIG. 12B.
  • the phase adjustment counter 401 has the same configuration as the sampling phase adjustment counter 201 shown in FIG.
  • the phase adjustment counter 401 starts counting the number of generated pulses of the operation clock CKb from the frequency dividing circuit 102b in response to the transition edge of the reference clock CKref, and outputs the timing signal TTT when the number of generated pulses reaches the set value SET2.
  • the detection signal generator 106 starts generating the digital detection signal Ddet in response to the transition edge of the selected clock SSS from the phase adjustment circuit 400 (or the timing signal TTT from the phase adjustment counter 401).
  • the sampling phase adjustment circuit 100 delays the operation clock CKa by a time “3t” corresponding to three pulses of the multiplied clock CKx. Output as sampling clock CKsp. As a result, the transition edges of the sampling clock CKsp can be matched with the desired sampling points SP0, SP1, SP2,.
  • the phase adjustment circuit 300 delays the digital sensor signal Dsnc by a time “4t” corresponding to one pulse of the operation clock CKa, and the delayed digital sensor signal. Output as DDsnc.
  • the phase adjustment circuit 400 delays the reference clock CKref by a time “16t” corresponding to two pulses of the operation clock CKb and outputs it as the selection clock SSS. To do.
  • the detection signal generator 106 outputs sine wave data D0, D2,... In response to the transition edge of the selected clock SSS.
  • the phase difference between the reference clock CKref and the digital detection signal Ddet becomes “16t”, so that the phase of the digital sensor signal Dsnc and the phase of the digital detection signal Ddet can be matched with each other.
  • the phase of the digital sensor signal Dsnc can be set by the phase adjustment circuit 300 in units of the cycle of the operation clock CKa. Further, the phase of the digital detection signal Ddet can be set by the phase adjustment circuit 400 (or the phase adjustment counter 401) in units of the cycle of the operation clock CKb. Thus, the phase of the digital sensor signal Dsnc and the phase of the digital detection signal Ddet can be set accurately.
  • the phase adjustment accuracy of the phase adjustment circuit 400 is lower than the phase adjustment accuracy of the phase adjustment circuit 300.
  • the circuit scale and power consumption required for the phase adjustment process can be reduced. For example, in order to set the maximum delay time to “16t” in units of the cycle “t” of the operation clock CKa, it is necessary to provide 16 flip-flops when only the phase adjustment circuit 400 is used. In this case, the phase adjustment circuits 300 and 400 may be provided with four flip-flops.
  • phase adjustment circuits 300 and 400 may operate in synchronization with another operation clock having a frequency higher than the frequency of the reference clock CKref (a clock having a frequency different from the operation clock CKa).
  • the ring counter 111 may start incrementing the count value CNT in response to the transition edge of the reference clock CKref.
  • the correspondence between the count value CNT and the sine wave data DATA in the data reading unit 113 can be set by the external control CTRL.
  • the data reading unit 113 starts reading the sine wave data DATA corresponding to the count value CNT in response to the transition edge of the selected clock SSS. For example, when the set value SET of the phase adjustment circuit 300 is set to “3”, the correspondence between the count value CNT and the sine wave data DATA is set as shown in FIG. 14B.
  • the detection signal generator 106 can sequentially output the sine wave data D0, D1, D2,... In response to the transition edge of the selected clock SSS.
  • the physical quantity sensor 10 in each of the above embodiments is not limited to the tuning fork type, but may be a cylindrical type, a regular triangular prism type, a regular quadrangular prism type, a ring type, or other shapes. Further, as shown in FIG. 16, the physical quantity sensor 10 may be a capacitance type acceleration sensor.
  • the physical quantity sensor 10 includes a fixed portion 10b, a movable portion 10c, movable electrodes Pma and Pmb, detection electrodes Pfa and Pfb, and a differential amplifier 10d.
  • the movable part 10c is connected to the fixed part 10b so as to be displaced according to the acceleration.
  • the movable electrodes Pma and Pmb are disposed on the movable portion 10c.
  • the detection electrodes Pfa and Pfb are disposed on the fixed portion 10b so as to face the movable electrodes Pma and Pmb, respectively. That is, the capacitive element Ca is configured by the movable electrode Pma and the detection electrode Pfa, and the capacitive element Cb is configured by the movable electrode Pmb and the detection electrode Pfb. Further, the drive signals Sdrv from the oscillation circuit 11d are supplied to the capacitive elements Ca and Cb, respectively.
  • the differential amplifier 10d outputs a sensor signal S10 corresponding to the difference in the amount of charge generated at each of the detection electrodes Pfa and Pfb.
  • the setting values SET, SET1, and SET2 have been described as changeable values.
  • the setting values SET, SET1, and SET2 may be fixed values.
  • a physical quantity sensor for example, a tuning fork type angular velocity sensor or a static fork
  • a capacitive acceleration sensor and the like is suitable for a physical quantity sensor.

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