JP4836985B2 - 物理量検出回路 - Google Patents

物理量検出回路 Download PDF

Info

Publication number
JP4836985B2
JP4836985B2 JP2008098694A JP2008098694A JP4836985B2 JP 4836985 B2 JP4836985 B2 JP 4836985B2 JP 2008098694 A JP2008098694 A JP 2008098694A JP 2008098694 A JP2008098694 A JP 2008098694A JP 4836985 B2 JP4836985 B2 JP 4836985B2
Authority
JP
Japan
Prior art keywords
clock
circuit
sampling
physical quantity
phase adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008098694A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009250774A5 (enExample
JP2009250774A (ja
Inventor
文人 犬飼
清一 室屋
陽一 貝野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008098694A priority Critical patent/JP4836985B2/ja
Priority to PCT/JP2009/000305 priority patent/WO2009122637A1/ja
Publication of JP2009250774A publication Critical patent/JP2009250774A/ja
Priority to US12/618,055 priority patent/US8069009B2/en
Publication of JP2009250774A5 publication Critical patent/JP2009250774A5/ja
Application granted granted Critical
Publication of JP4836985B2 publication Critical patent/JP4836985B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2008098694A 2008-04-04 2008-04-04 物理量検出回路 Expired - Fee Related JP4836985B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008098694A JP4836985B2 (ja) 2008-04-04 2008-04-04 物理量検出回路
PCT/JP2009/000305 WO2009122637A1 (ja) 2008-04-04 2009-01-27 物理量検出回路、物理量センサ装置、物理量検出方法
US12/618,055 US8069009B2 (en) 2008-04-04 2009-11-13 Physical quantity detection circuit and physical quantity sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008098694A JP4836985B2 (ja) 2008-04-04 2008-04-04 物理量検出回路

Publications (3)

Publication Number Publication Date
JP2009250774A JP2009250774A (ja) 2009-10-29
JP2009250774A5 JP2009250774A5 (enExample) 2011-02-03
JP4836985B2 true JP4836985B2 (ja) 2011-12-14

Family

ID=41135047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008098694A Expired - Fee Related JP4836985B2 (ja) 2008-04-04 2008-04-04 物理量検出回路

Country Status (3)

Country Link
US (1) US8069009B2 (enExample)
JP (1) JP4836985B2 (enExample)
WO (1) WO2009122637A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010169532A (ja) * 2009-01-22 2010-08-05 Panasonic Corp 駆動回路、物理量センサ装置
KR101189864B1 (ko) 2009-12-21 2012-10-11 정영진 센서의 감지 오류를 활용한 센서 샘플링 주기 조정 방법
KR101513352B1 (ko) * 2013-07-22 2015-04-17 삼성전기주식회사 관성센서의 구동장치 및 그 제어방법
CN105699694B (zh) * 2016-04-21 2019-02-22 中国科学院上海微系统与信息技术研究所 基于fpga的微机电混合σδm加速度计闭环检测电路系统
WO2020195139A1 (ja) * 2019-03-26 2020-10-01 パナソニックＩｐマネジメント株式会社 信号処理装置、慣性力センサ、信号処理方法、及びプログラム
JP7243485B2 (ja) * 2019-06-27 2023-03-22 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
US11108383B1 (en) * 2020-09-18 2021-08-31 Bae Systems Information And Electronic Systems Integration Inc. Clock phase control

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080489A (en) 1989-03-29 1992-01-14 Kubota, Ltd. Fiber optic gyroscope for detecting angular velocity of rotation using equivalent time sampling
JP2728300B2 (ja) 1989-07-22 1998-03-18 三菱プレシジョン株式会社 ２軸角速度・加速度センサの信号処理装置
US5264914A (en) * 1990-03-02 1993-11-23 Hitachi Ltd Interference sensor and method utilizing extracted alliasing frequency components
JPH07146151A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd ロックイン検出装置
JPH07198394A (ja) 1993-12-29 1995-08-01 Murata Mfg Co Ltd 位相補正回路
JP2975262B2 (ja) * 1994-07-04 1999-11-10 本田技研工業株式会社 振動ジャイロ検出回路
JP3322067B2 (ja) * 1995-04-24 2002-09-09 株式会社デンソー 物理量検出装置
JP3435979B2 (ja) 1996-04-26 2003-08-11 株式会社デンソー 物理量検出装置
GB2329471B (en) 1997-09-18 2001-08-15 British Aerospace A digital control system for a vibrating structure gyroscope
JP2002040047A (ja) * 2000-07-25 2002-02-06 Denso Corp 容量型物理量検出センサ
JP2003042768A (ja) * 2001-07-26 2003-02-13 Microstone Corp 運動センサ
JP2004212111A (ja) * 2002-12-27 2004-07-29 Kyocera Kinseki Corp 角速度センサ
JP2004239907A (ja) * 2003-02-06 2004-08-26 Robert Bosch Gmbh マイクロメカニカルヨーレートセンサ
JP2006329637A (ja) * 2005-05-23 2006-12-07 Matsushita Electric Works Ltd 角速度検出装置
JP2007292660A (ja) * 2006-04-26 2007-11-08 Murata Mfg Co Ltd 角速度センサ
JP4969182B2 (ja) * 2006-08-28 2012-07-04 富士フイルム株式会社 手振れ量検出装置及び撮影装置
JP4794596B2 (ja) * 2008-04-04 2011-10-19 パナソニック株式会社 物理量検出回路、物理量センサ装置
JP2009258009A (ja) * 2008-04-18 2009-11-05 Panasonic Corp 物理量検出回路およびそれを備える物理量センサ装置
JP2009281888A (ja) * 2008-05-22 2009-12-03 Panasonic Corp 物理量検出回路およびそれを備える物理量センサ装置、並びに物理量検出方法
JP2010151669A (ja) * 2008-12-25 2010-07-08 Panasonic Corp 物理量検出回路、物理量センサ装置
JP2010185714A (ja) * 2009-02-10 2010-08-26 Panasonic Corp 物理量センサシステム、物理量センサ装置

Also Published As

Publication number Publication date
JP2009250774A (ja) 2009-10-29
US20100057384A1 (en) 2010-03-04
WO2009122637A1 (ja) 2009-10-08
US8069009B2 (en) 2011-11-29

Similar Documents

Publication Publication Date Title
JP4794596B2 (ja) 物理量検出回路、物理量センサ装置
JP4836985B2 (ja) 物理量検出回路
CN202153136U (zh) 物理量传感器系统和物理量传感器装置
US9003883B2 (en) Angular velocity sensor and synchronous detection circuit used therein
JP5286676B2 (ja) 検出装置、センサ及び電子機器
WO2009141856A1 (ja) 物理量検出回路、物理量センサ装置、および物理量検出方法
CN101792107B (zh) 可变电容电子装置和包括该电子装置的微电子机械装置
JP4455201B2 (ja) 検出回路
JPWO2012147348A1 (ja) 慣性力センサとこれに用いるゼロ点補正方法
US8093926B2 (en) Physical quantity detection circuit and physical quantity sensor device
JP5561453B2 (ja) Ａｄ変換装置、力学量検出装置及び電子機器。
CN103344228B (zh) 摇动质量体声波固体波动微陀螺驱动与检测电路
JP2010151669A (ja) 物理量検出回路、物理量センサ装置
JP2018200666A (ja) 検出システム、センサ及びマイクロコンピュータ
CN104567850A (zh) 相移电路及其控制方法、以及mems陀螺仪驱动电路
JP2009264974A (ja) 慣性力センサ装置およびその起動制御方法
JP5003740B2 (ja) 検出回路
US20100214015A1 (en) Detection circuit and physical quantity sensor device
JP2018132461A (ja) 回路装置、物理量測定装置、電子機器及び移動体
JP5316434B2 (ja) 角速度センサ
JP2014021092A (ja) 角速度センサ
JPH0552881A (ja) 指示計器の計測回路

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090902

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101208

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110628

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110812

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110906

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110927

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141007

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4836985

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees